CN219195106U - Plating pot shaking mechanism - Google Patents
Plating pot shaking mechanism Download PDFInfo
- Publication number
- CN219195106U CN219195106U CN202223168595.0U CN202223168595U CN219195106U CN 219195106 U CN219195106 U CN 219195106U CN 202223168595 U CN202223168595 U CN 202223168595U CN 219195106 U CN219195106 U CN 219195106U
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- plating pot
- base
- mounting groove
- eccentric wheel
- rotating shaft
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- 238000007747 plating Methods 0.000 title claims abstract description 74
- 230000002093 peripheral effect Effects 0.000 claims abstract description 7
- 239000004744 fabric Substances 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 101100298222 Caenorhabditis elegans pot-1 gene Proteins 0.000 description 25
- 238000000034 method Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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Abstract
The utility model relates to the field of semiconductor processing, in particular to a plating pot shaking mechanism which comprises a plating pot, a connecting rod and a shaking assembly, wherein the shaking assembly comprises a base, an eccentric wheel, a rotating shaft and a moving rod, the plating pot is arranged above the base, a plurality of sheet sources are clamped on the plating pot, the rotating shaft is arranged in the base, the eccentric wheel is sleeved with the rotating shaft, the moving rod moves along the height direction of the base, and the lower end of the moving rod is abutted to the peripheral surface of the eccentric wheel; the connecting rod is connected with the plating pot and the upper end of the movable rod. Through the butt of movable rod and eccentric wheel global and its and connecting rod, plating pot be connected for when the pivot drives the eccentric wheel and rotates, the movable rod can produce the vertical displacement, realizes the rocking to plating pot, with whether the slice source that detects plating pot card and establish is fixed reliable.
Description
Technical Field
The utility model relates to the field of semiconductor processing, in particular to a plating pot shaking mechanism.
Background
The vapor deposition process is an important process in manufacturing the LED wafer, and is used for manufacturing the metal conductive electrode, and currently, a wider electron beam vapor deposition and corresponding vapor deposition machine is adopted, so that the LED wafer is required to be arranged in a plating pot and put into a device cavity for vapor deposition. In the general wafer loading process, the wafer (wafer source) is placed in the corresponding plating pot clamping groove and then clamped by the spring. And (5) placing the sheet source into equipment to start operation after the whole plating pot is filled. According to different process procedures, the plating pot rotates in the cavity for 3-6 hours, if the spring does not firmly clamp the wafer source at the moment or the clamping groove deforms at the moment, the wafer is at risk of falling under the action of centrifugal force, and the falling wafer source is broken and can fall into the metal source to pollute the whole metal source. The conventional detection of the sheet source fixation is mostly judged by human eyes, and the reliable fixation of the sheet source in the processing process cannot be accurately ensured. There is thus a need for a means to test the reliability of the fixing of the source on the plating pot to avoid the source falling off during processing.
Disclosure of Invention
The technical problems to be solved by the utility model are as follows: provides a plating pot shaking mechanism which is convenient for detecting the fixing condition of a sheet source on a plating pot.
In order to solve the technical problems, the utility model adopts the following technical scheme: the plating pot shaking mechanism comprises a plating pot, a connecting rod and a shaking assembly, wherein the shaking assembly comprises a base, an eccentric wheel, a rotating shaft and a moving rod, the plating pot is arranged above the base, a plurality of sheet sources are clamped on the plating pot, the rotating shaft is arranged in the base, the eccentric wheel is sleeved with the rotating shaft, the moving rod moves along the height direction of the base, and the lower end of the moving rod is abutted to the peripheral surface of the eccentric wheel; the connecting rod is connected with the plating pot and the upper end of the movable rod.
Further, the connecting rod is connected with the middle part of the plating pot and is perpendicular to the upper end of the base.
Further, a guide hole from top to bottom is formed in the base, and the moving rod moves along the length direction of the guide hole.
Further, a first mounting groove and a second mounting groove are formed in the base, the first mounting groove is formed in the upper side of the second mounting groove, the guide hole is communicated with the first mounting groove and the second mounting groove, and the second mounting groove is used for mounting the eccentric wheel and the rotating shaft; one end of the moving rod is positioned in the second mounting groove, and the other end of the moving rod passes through the first mounting groove and protrudes out of the upper side of the base; the part of the movable rod, which is positioned in the first mounting groove, is sleeved with a spring, one end of the spring is connected with the movable rod, and the other end of the spring is connected with the wall surface of the first mounting groove.
Further, the upper end of the movable rod is provided with a slot, one side of the slot is provided with a first screw hole, and the lower end of the connecting rod is matched with the slot and is provided with a second screw hole corresponding to the first screw hole.
Further, the lower end of the moving rod is connected with a pulley, and the pulley is propped against the circumference of the eccentric wheel.
Further, a baffle is arranged on the upper side of the base, and dustproof cloth is paved on the baffle; in the height direction of the base, the projection of the baffle covers the projection of the plating pot.
Further, one end of the rotating shaft extends to the side face of the base and is provided with a handle.
The utility model has the beneficial effects that: through the butt of movable rod and eccentric wheel global and its and connecting rod, plating pot be connected for when the pivot drives the eccentric wheel and rotates, the movable rod can produce the vertical displacement, realizes the rocking to plating pot, with whether the slice source that detects plating pot card and establish is fixed reliable.
Drawings
FIG. 1 is a schematic view of a pan rocking mechanism according to an embodiment of the present utility model;
fig. 2 is a schematic structural view of another view of the pan rocking mechanism according to the embodiment of the present utility model.
Description of the reference numerals:
1. plating a pot; 2. a sheet source; 3. a connecting rod; 4. a base; 41. a first mounting groove; 42. a second mounting groove; 5. an eccentric wheel; 6. a rotating shaft; 7. a moving rod; 71. a slot; 8. a spring; 9. a pulley; 10. a baffle; 11. a dust-proof cloth; 12. a handle.
Detailed Description
In order to describe the technical contents, the achieved objects and effects of the present utility model in detail, the following description will be made with reference to the embodiments in conjunction with the accompanying drawings.
Referring to fig. 1 and 2, a rocking mechanism of a plating pot 1 comprises a plating pot 1, a connecting rod 3 and a rocking assembly, wherein the rocking assembly comprises a base 4, an eccentric wheel 5, a rotating shaft 6 and a moving rod 7, the plating pot 1 is arranged above the base 4, a plurality of sheet sources 2 are clamped on the plating pot 1, the rotating shaft 6 is arranged in the base 4, the eccentric wheel 5 is sleeved with the rotating shaft 6, the moving rod 7 moves along the height direction of the base 4, and the lower end of the moving rod 7 is abutted to the peripheral surface of the eccentric wheel 5; the connecting rod 3 is connected with the upper ends of the plating pot 1 and the movable rod 7.
From the above description, the beneficial effects of the utility model are as follows: through the butt of movable rod 7 and eccentric wheel 5 global and be connected with connecting rod 3, plating pot 1 for when pivot 6 drove eccentric wheel 5 and rotate, movable rod 7 can produce the vertical displacement, realizes the rocking to plating pot 1, in order to detect the slice source 2 that plating pot 1 card established and fix reliably.
Further, the connecting rod 3 is connected with the middle part of the plating pot 1, and the connecting rod 3 is perpendicular to the upper end of the base 4.
As can be seen from the above description, the plurality of sheet sources 2 disposed on the plating pot 1 can be uniformly shaken by connecting the connecting rod 3 with the middle portion of the plating pot 1, so as to realize uniform testing of the positions of the plurality of sheet sources 2.
Further, a guiding hole from top to bottom is formed in the base 4, and the moving rod 7 moves along the length direction of the guiding hole.
As is apparent from the above description, the guide holes serve as guides for the upward and downward movement of the moving rod 7, so that the connecting rod 3 and the plating vessel 1 are prevented from being inclined due to the displacement of the moving rod 7 during the movement.
Further, a first mounting groove 41 and a second mounting groove 42 are formed in the base 4, the first mounting groove 41 is formed in the upper side of the second mounting groove 42, the guide hole is communicated with the first mounting groove 41 and the second mounting groove 42, and the second mounting groove 42 is used for mounting the eccentric wheel 5 and the rotating shaft 6; one end of the moving rod 7 is positioned in the second mounting groove 42, and the other end of the moving rod passes through the first mounting groove 41 and protrudes out of the upper side of the base 4; the part of the movable rod 7 positioned in the first mounting groove 41 is sleeved with a spring 8, one end of the spring 8 is connected with the movable rod 7, and the other end is connected with the wall surface of the first mounting groove 41.
As is apparent from the above description, the first mounting groove 41 is provided with the spring 8, and the portion of the moving rod 7 located in the first mounting groove 41 can play a role in buffering when the moving rod 7 moves up and down due to the provision of the spring 8; and the second mounting groove 42 is used for mounting the eccentric wheel 5, the rotating shaft 6 and other components.
Further, a slot 71 is provided at the upper end of the moving rod 7, a first screw hole is provided at one side of the slot 71, and a second screw hole is provided at the lower end of the connecting rod 3 corresponding to the slot 71.
As can be seen from the above description, the quick assembly of the link 3 is achieved by the engagement of the slot 71 on the moving rod 7 with the link 3; and then the connecting rod 3 is further fixed by locking bolts to the first screw hole and the second screw hole.
Further, the lower end of the moving rod 7 is connected with a pulley 9, and the pulley 9 abuts against the peripheral surface of the eccentric wheel 5.
As is apparent from the above description, damage to the moving rod 7 due to direct contact friction with the eccentric 5 is reduced by the arrangement of the pulley 9.
Further, a baffle plate 10 is arranged on the upper side of the base 4, and dustproof cloth 11 is paved on the baffle plate 10; the projection of the baffle 10 covers the projection of the plating pot 1 in the height direction of the base 4.
As can be seen from the above description, the baffle 10 on the base 4 is provided to prevent the falling sheet source 2 from being damaged by directly striking the ground during the shaking test, the falling sheet source 2 is received by the baffle 10 while being buffered by the laid dust cloth 11.
Further, one end of the rotating shaft 6 extends to the side of the base 4 and is provided with a handle 12.
As can be seen from the above description, the handle 12 and the shaft 6 are extended to facilitate the shaking test manually performed by the operator.
Referring to fig. 1 and 2, a first embodiment of the present utility model is:
the application scene of the utility model is as follows: because the plating pot 1 rotates and rotates frequently when the sheet source 2 is processed, the clamping failure of the sheet source 2 is caused by frequent rotation, the situation that the sheet source 2 falls down needs to be detected before the vapor plating process, and the situation that the sheet source 2 is fixed is usually observed manually and can not be further subjected to shaking test.
As shown in fig. 1 and 2, the plating pot 1 shaking mechanism of the embodiment comprises a plating pot 1, a connecting rod 3 and a shaking assembly, wherein the shaking assembly comprises a base 4, an eccentric wheel 5, a rotating shaft 6 and a moving rod 7, the plating pot 1 is arranged above the base 4, and a plurality of sheet sources 2 are clamped on the plating pot 1.
A first mounting groove 41 and a second mounting groove 42 are formed in the base 4, the first mounting groove 41 is formed in the upper side of the second mounting groove 42, a guide hole which is communicated with the first mounting groove 41 and the second mounting groove 42 is formed in the base 4, and the length direction of the guide hole is parallel to the height of the base 4; one end of the moving rod 7 is positioned in the second mounting groove 42, and the other end of the moving rod vertically protrudes out of the upper side of the base 4 along the guide hole and passes through the first mounting groove 41; the part of the movable rod 7 positioned in the first mounting groove 41 is sleeved with a spring 8, one end of the spring 8 is connected with the movable rod 7, and the other end is connected with the wall surface of the first mounting groove 41.
As shown in fig. 2, the second mounting groove 42 is used for mounting the eccentric 5, the eccentric 5 seat and the rotating shaft 6; the eccentric wheel 5 is arranged on the eccentric wheel 5 seat, the eccentric wheel 5 is sleeved with the rotating shaft 6, the lower end of the moving rod 7 is connected with the pulley 9, and the pulley 9 is abutted to the peripheral surface of the eccentric wheel 5. One end of the rotating shaft 6 passes through the wall surface of the second mounting groove 42 to extend to the side surface of the base 4 and is provided with a handle 12; specifically, through holes are formed on two side wall surfaces of the second mounting groove 42, two ends of the rotating shaft 6 are matched with the through holes and extend to the side surface of the base 4, and flanges are arranged at two ends of the rotating shaft 6 corresponding to the through holes to seal the through holes.
The connecting rod 3 is connected with the middle part of the plating pot 1, the connecting rod 3 is perpendicular to the upper end of the base 4, and the connecting rod 3 is connected with the plating pot 1 and the upper end of the movable rod 7.
On the cooperation of connecting rod 3 and carriage release lever 7, carriage release lever 7 upper end is equipped with slot 71, slot 71 one side is equipped with first screw, connecting rod 3 lower extreme and slot 71 looks adaptation and corresponding first screw are equipped with the second screw.
A baffle plate 10 is arranged on the upper side of the base 4, and dustproof cloth 11 is paved on the baffle plate 10; the projection of the baffle 10 covers the projection of the plating pot 1 in the height direction of the base 4.
The working principle of the utility model is as follows: placing the plating pot 1 with the clamped sheet source 2 on the upper side of the base 4, then connecting the connecting rod 3 with the plating pot 1, inserting the other end of the connecting rod 3 into a slot 71 of a moving rod 7 protruding from the upper side of the base 4, and locking by bolts to complete the installation of the plating pot 1; then the rotating shaft 6 is manually or electrically operated to rotate, the rotating shaft 6 drives the eccentric wheel 5 to rotate, so that the pulley 9 and the moving rod 7 which are abutted against the rotating shaft are displaced in the height direction, the plating pot 1 connected through the connecting rod 3 is rocked, and the fixing condition of the sheet source 2 on the plating pot 1 is tested; when the sheet source 2 falls out, it can be received by the baffle 10 on the upper side of the base 4, and the dust cloth 11 provides a buffer.
In summary, according to the plating pot shaking mechanism provided by the utility model, through the abutting connection between the movable rod and the peripheral surface of the eccentric wheel and the connection between the movable rod and the connecting rod and the plating pot, when the rotating shaft drives the eccentric wheel to rotate, the movable rod can generate up-and-down displacement, so that the shaking of the plating pot is realized, and whether a sheet source clamped by the plating pot is fixed or not is detected reliably.
The foregoing description is only illustrative of the present utility model and is not intended to limit the scope of the utility model, and all equivalent changes made by the specification and drawings of the present utility model, or direct or indirect application in the relevant art, are included in the scope of the present utility model.
Claims (8)
1. The plating pot shaking mechanism is characterized by comprising a plating pot, a connecting rod and a shaking assembly, wherein the shaking assembly comprises a base, an eccentric wheel, a rotating shaft and a moving rod, the plating pot is arranged above the base, a plurality of sheet sources are clamped on the plating pot, the rotating shaft is arranged in the base, the eccentric wheel is sleeved with the rotating shaft, the moving rod moves along the height direction of the base, and the lower end of the moving rod is abutted to the peripheral surface of the eccentric wheel; the connecting rod is connected with the plating pot and the upper end of the movable rod.
2. The plating pot shaking mechanism of claim 1, wherein the connecting rod is connected with the middle part of the plating pot and is perpendicular to the upper end of the base.
3. The plating pot shaking mechanism of claim 1, wherein the base is provided with a guide hole from top to bottom, and the moving rod moves along the length direction of the guide hole.
4. The plating pot shaking mechanism according to claim 3, wherein a first mounting groove and a second mounting groove are formed in the base, the first mounting groove is formed in the upper side of the second mounting groove, the guide hole is communicated with the first mounting groove and the second mounting groove, and the second mounting groove is used for mounting the eccentric wheel and the rotating shaft; one end of the moving rod is positioned in the second mounting groove, and the other end of the moving rod passes through the first mounting groove and protrudes out of the upper side of the base; the part of the movable rod, which is positioned in the first mounting groove, is sleeved with a spring, one end of the spring is connected with the movable rod, and the other end of the spring is connected with the wall surface of the first mounting groove.
5. The plating pot shaking mechanism according to claim 1, wherein the upper end of the moving rod is provided with a slot, one side of the slot is provided with a first screw hole, and the lower end of the connecting rod is matched with the slot and is provided with a second screw hole corresponding to the first screw hole.
6. The plating pot shaking mechanism according to claim 1, wherein the lower end of the moving rod is connected with a pulley, and the pulley is abutted against the circumference of the eccentric wheel.
7. The plating pot shaking mechanism according to claim 1, wherein a baffle plate is arranged on the upper side of the base, and dustproof cloth is paved on the baffle plate; in the height direction of the base, the projection of the baffle covers the projection of the plating pot.
8. The plating pot shaking mechanism of claim 1, wherein one end of the rotating shaft extends to the side of the base and is provided with a handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223168595.0U CN219195106U (en) | 2022-11-28 | 2022-11-28 | Plating pot shaking mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223168595.0U CN219195106U (en) | 2022-11-28 | 2022-11-28 | Plating pot shaking mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219195106U true CN219195106U (en) | 2023-06-16 |
Family
ID=86718867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223168595.0U Active CN219195106U (en) | 2022-11-28 | 2022-11-28 | Plating pot shaking mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219195106U (en) |
-
2022
- 2022-11-28 CN CN202223168595.0U patent/CN219195106U/en active Active
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