JP3214775B2 - Probe head and electrical test method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe head and an electrical test method, and more particularly to a probe head used for inspecting a substrate such as a printed wiring board and an electrical test method using the probe head.

[0002] In recent years, as the density of a substrate such as a printed wiring board has increased, the number of man-hours and time for an electrical test using a probe have increased. In order to reduce the man-hour for the electrical test, the probe head is required to make the probe contact the surface of the substrate at a high speed and to reduce the damage of the substrate at the time of the high-speed contact.

[0003] In addition, by the multi-product small-quantity production of the above-mentioned substrate,
It is desired to reduce the cost burden of a collective contact type probe jig using a large number of probes by a wiring tester.
For this reason, several probes have been used, and each probe has been moved according to the position data of the measurement point and brought into contact with the substrate to perform an electrical test. In such a probe-moving electrical test method, it is required to reduce the inspection time per substrate.

[0004]

2. Description of the Related Art A probe such as a needle probe, a spring probe or a leaf spring probe is used in a conventional probe head. Such a probe is connected to a slide rail or lever. The slide rail or lever is driven by an air cylinder or a motor. As a result, the probe moves up and down, comes into contact with the surface of the substrate, and an electrical test is performed. This probe head has been required to reduce the weight of the drive unit in order to move the probe at high speed.

A probe head shown in FIG. 3 is used for such a high-speed movement. This probe head uses a leaf spring probe 40 having a square hole 40a. The leaf spring probe 40 is rotatable about the fulcrum 40b. In the vicinity of the fulcrum 40b,
One end of the coil spring 41 is fixed. The other end of the coil spring 41 is locked at a predetermined position of the probe device. A cam follower 42 is fixed to one end 40c of the leaf spring 40. An eccentric cam 43 is in contact with the outer peripheral surface of the cam follower 42.

When the eccentric cam 43 rotates at high speed, the leaf spring probe 40 rotates about the fulcrum 40b via the cam follower 42. The tip 40d is the substrate 3
0, and an electrical test of the substrate 30 is performed.

[0007] The probe head has a leaf spring probe 4.
By forming the square hole 40a in 0, weight reduction is achieved,
The high-speed rotation of the eccentric cam 43 moves the distal end portion 40a of the leaf spring probe 40 up and down at a high speed.

A probe head having such a structure often uses a plurality of probes 40, and the tip portions 40d of the probes 40 are opposed to each other. However, when the opposed end portions 40d are brought into contact with predetermined portions of the substrate 30 and are simultaneously separated from the substrate 30, the end portions 40d may collide with each other.

This is because the rotation of the distal end portion 40d is
This is because the distance to b is a radius. Therefore, when the distal end portion 40d moves away from the substrate 30, it moves in the direction A in the drawing. If the distance between the contact points (test points) on the substrate 30 is too short, each tip 40d
When moving away from zero, the tip portions 40d collide with each other. As a result, the test of the substrate 30 is hindered. Therefore, FIG.
When a plurality of probes of the probe head are used, there is a disadvantage that they cannot be used facing each other.

As a solution to this inconvenience, a probe head shown in FIG. 4 is known. This probe head uses a leaf spring probe 50. The plate spring probe 50 also has a square hole 50a. One end 50c of the leaf spring probe 50 is fixed to the probe device with bolts 50b, 50b. The leaf spring probe 5
Below 0, a lever 51 is provided. The lever 51 is rotatable about a fulcrum 51b, and its tip 51a is in contact with the lower surface of the leaf spring probe 50.
The coil spring 41 is fixed near the fulcrum 51b. The cam follower 42 is fixed to the base end 51 c of the lever 51, and the eccentric cam 43 contacts the outer peripheral surface of the cam follower 42.

The lever 51 rotates about the fulcrum 51b with the cam follower 42 interposed in accordance with the rotation of the eccentric cam 43. As a result, the distal end portion 51a of the lever 51 moves up and down, and the leaf spring probe 50 is elastically deformed. Then, the distal end portion 51d of the leaf spring probe 50 contacts the substrate 30 while moving up and down above the substrate 30.
When the distal end portion 51d moves away from the substrate 30, it moves in the direction B. Therefore, even when a plurality of probes 50 are used face to face, their tips 50d do not collide with each other when they are separated from the substrate 30.

A conventional electrical test method has been performed using the probe head shown in FIG.

[0013]

However, the probe head of FIG. 4 has a problem that it cannot stably contact the substrate 30.

This is because the spring constant of the leaf spring probe 50 is reduced in order to reduce damage at the time of contact with the substrate 30. That is, in order to reduce the contact damage between the leaf spring probe 50 and the substrate 30, the pressing force of the leaf spring probe 50 must be reduced. The pressing force of the leaf spring probe 50 is determined by its spring constant. When the spring constant of the leaf spring probe 50 is reduced, the pressing force at the time of contact with the substrate 30 decreases, and
Zero damage is reduced. However, since the pressing force at the time of contact is reduced, the repelling force causes the distal end portion 50d of the leaf spring probe 50 to be instantly lifted from the substrate 30. The tip portion 50d vibrates up and down above the substrate 30 and repeats contact and separation. Therefore, in the probe head of FIG. 4, the contact with the substrate 30 was unstable. Further, the rotation of the eccentric cam 43 does not correspond to the contact between the leaf spring probe 50 and the substrate 30.

Further, when a predetermined electrical test is performed using two or more probe heads shown in FIG. 4, the contact with the substrate 30 becomes unstable. Therefore, two or more probe heads cannot be brought into contact with the respective contact portions of the substrate 30 at the same time. As a result, even when a plurality of probe heads are used, measurement cannot be performed simultaneously. Therefore, the inspection time per substrate 30 having a plurality of measurement points cannot be reduced.

Accordingly, the present invention has been made in view of the above problems, and allows a plurality of probes to face each other at a high speed by bringing the probes into contact with each other at a high speed. It is an object of the present invention to provide a probe head that achieves stable contact of the probe and an electrical test method that can shorten the inspection time.

[0017]

Means for Solving the Problems The above-mentioned problems are solved by the following constitutions of the present invention.

According to a first aspect of the present invention, there is provided a first leaf spring portion, a second leaf spring portion juxtaposed below the first leaf spring portion, one end of the first leaf spring portion and the second leaf spring. A connecting portion integrally connected to one end of the spring portion, an external force mechanism for applying a downward force to one end of the first leaf spring portion having the other end fixed, and a second end portion of the second leaf spring portion. A probe head that is diagonally downward and protrudes along a direction opposite to the connection portion, and that is a tip portion that comes into contact with or separates from a measurement location on the substrate.

A second aspect of the present invention is a probe head formed by forming a lightening hole in the first leaf spring portion and the second leaf spring portion.

The invention according to claim 3 is a probe head wherein the external force mechanism is configured such that the outer periphery of the eccentric cam abuts against one end of the first leaf spring portion.

According to a fourth aspect of the present invention, a plurality of probe heads according to the first, second or third aspect are used, and the force of the external force mechanism when each of the tip portions of the plurality of probe heads is in contact with the substrate is used. This is an electrical test method configured to memorize and measure the substrate when the force of the external force mechanism is applied.

[0022]

As described above, in the probe head according to the first aspect of the present invention, the external force mechanism applies a downward force to one end of the first spring portion. At this time, since the other end of the first leaf spring is fixed, the first leaf spring is elastically deformed, and one end of the first leaf spring is displaced downward. Along with this displacement, the second leaf spring portion and the tip portion move downward through the connecting portion. Then, the second leaf spring portion does not elastically deform until the tip portion contacts the substrate. The tip moves obliquely downward and in a direction opposite to the connecting portion until it contacts the substrate.

Even after the tip portion contacts the substrate, the upper leaf spring portion is elastically deformed. At this time, due to the contact of the tip with the substrate, the second leaf spring cannot be lowered and is elastically deformed.

After the second leaf spring portion is elastically deformed and abuts on the first leaf spring portion, the downward force by the external force mechanism is reduced.
The other end of the first leaf spring part is displaced upward. With this displacement, the elastic deformation of the second leaf spring portion is restored. After this,
The tip moves away from the substrate.

The force that presses the substrate from the contact of the tip to the separation thereof is determined by the spring constant of the second leaf spring. By reducing the spring constant, the pressing force of the substrate can be reduced. For this reason, probe scratches on the substrate can be reduced.

Further, even if the spring constant of the second leaf spring portion is reduced, since the downward force is applied from the up-and-down mechanism, the leading end does not separate from the measurement position on the substrate.

Thereafter, by further reducing the downward force by the external force mechanism, the distal end is displaced obliquely upward and toward the connecting portion.

Therefore, even if a plurality of probe heads are used so that a plurality of tips face each other, when the tips are separated from the substrate, the tips do not collide with each other. In addition, the distance between the tips is higher when rising from the surface of the substrate than when the tips contact the surface of the substrate, and the closest approach distance between the tips on the surface of the substrate. Can be shortened. That is, the distance between the plurality of inspection locations can be reduced on the surface of the substrate.

The probe head according to the second aspect of the present invention can move the distal end portion at high speed by reducing the weight of the first and second leaf spring portions.

Further, in the probe head according to the third aspect of the present invention, since the external force mechanism is an eccentric cam, the speed of the tip just before the tip comes into contact with the substrate can be reduced. Also, by optimizing the cam curve of the eccentric cam, the contact damage between the tip and the substrate is reduced, and the tip is not vibrated during contact with the substrate. Stabilization of contact.

On the other hand, the electrical test method according to claim 4 uses a plurality of the probe heads. The force of the external force mechanism when each tip of the plurality of probe heads is in contact with the substrate is stored. At the time of the stored force of the external force mechanism, the substrate is measured. As a result, a plurality of measurement points can be inspected using a plurality of probe heads. Therefore, it is possible to shorten the inspection time per substrate having a plurality of measurement points.

[0032]

FIG. 1 shows a configuration diagram of a probe head according to an embodiment of the present invention. The probe head generally includes an upper spring portion 10a as a first leaf spring portion, a lower spring portion 10b as a second leaf spring portion, a connecting portion 10k, and a tip portion 10c.
And a cam follower 11 and an eccentric cam 21 which are external force mechanisms.

The leaf spring probe 10 has a substantially U-shape, and mainly has an upper spring portion 10a, a lower spring portion 10b, a connecting portion 10k, and a tip portion 10c which are integrally formed vertically and has a plate thickness of 2 mm. Is processed by wire cutting of phosphor bronze
The shape is formed.

The upper spring portion 10a is formed with a left hole 10d and a right hole 10e used for attachment to a probe device described later. The other end 10l of the upper spring portion 10a is fixed to the probe device by these holes 10d and 10e. Further, a U-shaped hole 10f is formed in the upper spring portion 10a so as to surround the left hole 10d and the right hole 10e. The cam follower 11 is fixed to one end 10g of the upper spring portion 10a with a nut 12.

One end 10m of the lower spring portion 10b is integrated with one end 10g of the upper spring portion to form a connecting portion 10k. A square hole 10h is formed in the lower spring portion 10b. The distal end portion 10c is connected to the other end 10n of the lower spring portion 10b so as to be inclined in an L-shape. The tip portion 10c is obtained by brazing a gold-plated super rope alloy and sharpening it into a knife shape.

The eccentric cam 21 has a disk shape, and the cam center 21c of the cam shaft 21a is eccentric from the center of the circle. The cam follower 11 is also disc-shaped. The outer periphery 21 of the eccentric cam 21 is attached to the outer periphery of the cam follower 11.
b is in contact.

Hereinafter, the tip portion 10c of the leaf spring probe 10 will be described.
Until the contact with the surface of the substrate 30 will be described.

First, with the shortest (bottom) 21d of the eccentric cam 21 from the cam center 21c to the outer periphery 21b being in contact with the outer periphery of the cam follower 11, the upper spring portion 10a of the leaf spring probe 10 is previously lowered. To be elastically deformed. This elastic deformation is a deformation in a state where the upper spring portion 10a is fixed at two points to a probe device described later via the left hole 10d and the right hole 10e. Then, as a result of the elastic deformation of the upper spring portion 10a, the repulsive force applies an initial pressure to the eccentric cam 21 via the cam follower 11. Therefore, the cam follower 11 always follows the rotational movement of the eccentric cam 21.

When the bottom 21d of the eccentric cam 21 is in contact with the outer periphery of the cam follower 11, the tip 10c of the leaf spring probe 10 is separated from the surface of the substrate 30 on the test table 34 by a small distance.

When the bottom 21d of the eccentric cam 21 comes into contact with the outer periphery of the cam follower 10, the eccentric cam 21
Is rotated in the direction of arrow C. According to this rotation, the cam follower 11 descends. With the lowering of the cam follower 11, the connecting portion 10k, the lower spring portion 10b, and the tip portion 10c of the leaf spring probe 10 also lower, and the upper spring portion 10a is further elastically deformed. At this time, the tip portion 10c is displaced while descending diagonally leftward.

When the eccentric cam 21 is further rotated, the tip 10 c of the leaf spring probe 10 comes into contact with the surface of the substrate 30. At this time, the cam follower 11 is
In front of the top 21e. This top 21e
Is the longest distance from the cam center 21c to the outer periphery 21b. The lower spring portion 10b is not elastically deformed until the tip portion 10c contacts the surface of the substrate 30. In this state, even if the tip portion 10c is in contact with the surface of the substrate 30, this surface is not pressed by the leaf spring probe 10.

Next, the state where the leaf spring probe 10 presses the surface of the substrate 30 will be described.

First, the eccentric cam 21 is rotated in the C direction until the cam follower 11 contacts the top 21e of the eccentric cam 21. At this time, the tip 10c of the leaf spring probe 21
Is in contact with the surface of the substrate 30. During this contact, the substrate 30 is pressed. The lower spring portion 10b is
Elastically deforms with the point of contact with the fixed end. This elastic deformation is performed until the upper surface 10i of the lower spring portion 10b contacts the lower surface 10j of the upper spring portion 10a. The upper spring portion 10
a is also elastically deformed. Then, the restoring force due to the elastic deformation of the lower spring portion 10b acts downward, and the surface of the substrate 30 is pressed downward.

The downward pressing force during this contact can be reduced by reducing the spring constant of the lower spring portion 10b. Further, the pressing force due to the elastic deformation of the upper spring portion 10a acts leftward on the surface of the substrate 30. The leftward pressing force is reduced by the rightward force due to the elastic deformation of the lower spring portion 10b. Therefore, in such a state, the pressing force on the surface of the substrate 30 becomes small. Therefore, probe flaws on the surface of the substrate 30 can be reduced. Further, even if the spring constant of the lower spring portion 10b is reduced, the entire leaf spring probe 10 is pushed down by the eccentric cam 21, so that the distal end portion 10c does not separate from the surface of the substrate 30.

Next, the cam follower 11 separates from the top 21 e of the eccentric cam 21, and the distal end 10
The eccentric cam 21 is rotated in the C direction until c moves away from the surface of the substrate 30. At this time, the tip 10 c of the leaf spring probe 21 is in contact with the surface of the substrate 30. During this contact, while the upper surface 10i of the lower spring portion 10b is separated from the lower surface 10j of the upper spring portion 10a, the lower spring portion 10b returns from the elastically deformed shape to the shape before the elastic deformation. Also, the upper spring portion 1
The shape of Oa also returns to the state of elastic deformation at the moment when the tip 10c contacts the surface of the substrate 30. The pressing force on the surface of the substrate 30 is the same as when the eccentric cam 21 is rotated in the C direction until the cam follower 11 contacts the top 21e of the eccentric cam 21. Similarly, since the entire leaf spring probe 10 is pushed down by the eccentric cam 21, the distal end portion 10c
Does not separate from the surface of the substrate 30.

Next, the tip 10c of the leaf spring probe 10
After moving away from the surface of the substrate 30 will be described.

The eccentric cam 21 is rotated in the direction of arrow C until the cam follower 10 contacts the bottom 21d of the eccentric cam 21. In accordance with this rotation, the tip 10 c of the leaf spring probe 10 comes off the surface of the substrate 30. The distal end portion 10c at the time of the separation is displaced while rising obliquely rightward along the direction D in the drawing.

Therefore, even when a plurality of probe heads are used such that a plurality of tip portions 10c face each other, when the tip portions 10c move away from the substrate 30, the tip portions 10c move away from each other. Absent.
In addition, the distance between the tips 10c is higher when rising from the surface of the substrate 30 than when the tips 10c are in contact with the surface of the substrate 30, and the tip on the surface of the substrate 30 is larger. The closest approach distance between the 10c can be shortened. That is, on the surface of the substrate 30, the distance between the plurality of inspection locations can be reduced.

Further, since a large number of holes are formed in the leaf spring probe 10, the weight can be reduced. Therefore, the leaf spring probe 10 can be brought into contact with the substrate 30 at high speed by the eccentric cam 21 rotating at high speed.

Further, when the eccentric cam 21 is rotated at a high speed, the speed of the distal end portion 10c immediately before the leaf spring probe 10 comes into contact with the surface of the substrate 30 is reduced, so that the contact damage with the substrate 30 is reduced. The tip 10 is in contact with
By optimizing the cam curve of the eccentric cam 21 so that the vibration of c does not occur, the contact with the substrate 30 can be stabilized.

Next, a probe device having the above-described probe head and an electrical test method will be described with reference to FIG. FIG. 2A is a front view of the probe device, and FIG.
(B) is a right side view thereof. In FIG. 2B,
A stand 31 and the like are further shown.

In the figure, reference numeral 10 denotes a leaf spring probe. 11
Is a cam follower, which is attached to the leaf spring probe 10 using a nut 12.

13 and 14 are guide plates,
The leaf spring probe 10 is fixed by overlapping with bolts 15 and nut plates 16 from both sides. At this time, the leaf spring probe 10 and the guide plates 13 and 14 are fixed.
Between the resin 32a, such as a fluororesin with good slip,
32b are bonded to form slight gaps 33a and 33b. As a result, the tip 10 of the leaf spring probe 10
c is guided and does not swing in the left-right direction in FIG.

The probe mechanism assembled in this manner is inserted into the two C-shaped grooves 17 a and 17 b of the holder 17 and fixed by bolts 18. This holder 1
7 is temporarily fixed to the groove 19a of the bracket 19 with bolts 20,20. A stepping motor 22 is attached to the bracket 19.

The eccentric cam 21 is attached to the rotation shaft of the stepping motor 22. And
The eccentric cam 21 is rotated to bring its bottom 21 d into contact with the outer periphery of the cam follower 11,
Stop the rotation of. With the bottom 21 d of the eccentric cam 21 in contact with the cam follower 11,
The holder 17 is moved upward by a predetermined distance along 9a. As a result, the eccentric cam 21 applies an initial pressure to the upper spring portion 10a of the leaf spring probe 10 via the cam follower 11. Therefore, the upper spring portion 10a is elastically deformed in advance. In this state, the bracket 19 is fixed by the stand 31 at a position where the distal end portion 10c of the leaf spring probe 10 is separated from the surface of the substrate 30 by about 1 mm.

Further, a post 24 is fixed on the upper portion of the bracket 19. This post 24 holds the photoelectric sensor 23. Further, a concave portion 21g is formed in the boss 21f of the eccentric cam 21. The processing of the concave portion 21g is performed at an angle at which the photoelectric sensor 23 functions only while the distal end portion 10c of the leaf spring probe 10 is in contact with the surface of the substrate 30.

That is, the leaf spring probe 10 is
During the contact with the surface of the concave portion, the light of the photoelectric sensor
Then, the light is reflected on the camshaft 21a, and the camshaft 21a is detected. While the leaf spring probe 10 is away from the surface of the substrate 30, the light of the photoelectric sensor 23 is blocked by the boss 21f and does not detect the cam shaft 21a.

By doing so, the photoelectric sensor 23
Can detect the time during which the leaf spring probe 10 is in contact with the surface of the substrate 30, the rotation angle of the eccentric cam 21 that starts contacting, and the rotation angle of the eccentric cam 21 that has stopped contacting. And the photoelectric sensor 23 is the eccentric cam 2
3 by detecting the rotation of the leaf spring probe 10.
It can be detected whether or not is in contact with the substrate 30.

The rotation angle of the eccentric cam 21 when the leaf spring probe 10 starts to contact the surface of the substrate 30 is given by
Triggers the start of measurement in electrical tests. Thus, while the leaf spring probe 10 is in contact with the surface of the substrate 30, control can be performed so as to end the measurement of the electrical test.

Further, when a plurality of measurements of the substrate 30 are performed using two or more leaf spring probes 10, each eccentric cam 2
Rotate 1 simultaneously. Each leaf spring probe 10 is mounted on the substrate 3
When the rotation angle of the eccentric cam 10 at the time of starting contact with 0 is reached, measurement of the electrical test is started. As a result,
The electrical test can be completed while the plurality of leaf spring probes 10 are in contact with the substrate 30. Therefore, the electrical test of the substrate 30 having a plurality of measurement points is performed by one rotation of the eccentric cam 21 without stopping the rotation of each eccentric cam 21. Therefore, the probing time can be significantly reduced. Therefore, it is possible to reduce the cost burden of the collective contact type probe jig using a large number of probes by the wiring tester.

[0061]

As described above, according to the first aspect of the present invention,
By elastically deforming the second leaf spring while the tip is in contact with the substrate, the force pressing the substrate from the contact of the tip to the separation is determined by the spring constant of the second leaf spring. Is done. By reducing the spring constant, the pressing force of the substrate can be reduced. Probe scratches on the substrate can be reduced. Furthermore, even if the spring constant of the second leaf spring portion is reduced, the distal end portion does not separate from the measurement location on the substrate because it receives a downward force from the vertical mechanism.

The tip moves obliquely downward and in the direction opposite to the connecting portion until it contacts the substrate. Further, the distal end portion away from the substrate is displaced obliquely upward and toward the connecting portion.

Therefore, even when a plurality of probe heads are used so that a plurality of tip portions face each other, when the tip portions are separated from the substrate, the tip portions are separated from each other, so that no collision occurs. In addition, the distance between the tips is higher when rising from the surface of the substrate than when the tips contact the surface of the substrate, and the closest approach distance between the tips on the surface of the substrate. Can be shortened. That is, the distance between the plurality of inspection locations can be reduced on the surface of the substrate.

According to the second aspect of the present invention, the weight of the first leaf spring portion and the second leaf spring portion can be reduced, so that the distal end portion can be moved at a high speed.

According to the third aspect of the present invention, since the external force mechanism is an eccentric cam, the speed of the front end portion just before the front end portion contacts the substrate can be reduced. Also, by optimizing the cam curve of the eccentric cam, the contact damage between the tip and the substrate is reduced, and the tip is not vibrated during contact with the substrate. Can be stabilized.

According to the invention of claim 4, a plurality of the probe heads are used. The force of the external force mechanism when each tip of the plurality of probe heads is in contact with the substrate is stored. At the time of the stored force of the external force mechanism, the substrate is measured. As a result, a plurality of measurement points can be inspected using a plurality of probe heads. Therefore,
It is possible to reduce the inspection time per substrate having a plurality of measurement points.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a probe head according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a probe device using the probe head of FIG.

FIG. 3 is an explanatory view (1) of a conventional probe head.

FIG. 4 is an explanatory view (2) of a conventional probe head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Leaf spring probe 10a Upper spring part 10b Lower spring part 10c Tip part 10k Connecting part 11 Cam follower 12 Nut 13, 14 Guide plate 17 Holder 19 Bracket 21 Eccentric cam 22 Stepping motor 23 Photoelectric sensor 24 Post 30 Substrate 31 Stand 34 Test stand

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-245658 (JP, A) JP-A-65-1048 (JP, A) JP-A-6-58957 (JP, A) JP-A-7-57 115110 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01L 21/66 G01R 1/06 G01R 1/073

Claims (4)

(57) [Claims] 1. A first leaf spring portion (10a); a second leaf spring portion (10b) juxtaposed below the first leaf spring portion (10a); and the first leaf spring portion (10a). (10g) and one end (10m) of the second leaf spring portion (10b) are connected and integrated, and a first leaf spring portion (10l) to which the other end (10l) is fixed. 10
an external force mechanism (11, 21) for applying a downward force to one end (10g) of a), and the connecting portion (10k) obliquely below the other end (10n) of the second leaf spring portion (10b). And a tip (10c) protruding along the direction (E) opposite to and being in contact with or separated from a measurement location on the substrate (30). 2. A hole (10f, 10) for reducing the weight of the first leaf spring portion (10a) and the second leaf spring portion (10b).
The probe head according to claim 1, wherein h) is formed. 3. The external force mechanism according to claim 1, wherein an outer periphery (21b) of the eccentric cam (21) is connected to one end (10g) of the first leaf spring portion (10a).
3. The probe head according to claim 1, wherein the probe head is in contact with the probe head. 4. An external force mechanism (11, 21) when a plurality of probe heads according to claim 1, 2 or 3 are used, and each tip portion (10c) of said plurality of probe heads is in contact with a substrate (30). )
When the force of the external force mechanism (11, 21) is used, the substrate (30)
An electrical test method characterized by performing the measurement of