WO2015163160A1

WO2015163160A1 - Probe pin and ic socket

Info

Publication number: WO2015163160A1
Application number: PCT/JP2015/061171
Authority: WO
Inventors: 大熊　真史
Original assignee: オーキンスエレクトロニクスカンパニー，リミテッド
Priority date: 2014-04-21
Filing date: 2015-04-09
Publication date: 2015-10-29

Abstract

　Provided is a probe pin that poses a negligible risk of a continuity defect or operational defect occurring during use, the probe pin being provided with: a moveable member having on one end thereof either an electrode contact portion for contacting a measurement target electrode that is an electrode attached to a measurement target, or an auxiliary substrate contact portion for contacting a wired substrate of a measurement device; an auxiliary moveable member having at one end thereof the other of the electrode contact portion and the auxiliary substrate contact portion; and a coil spring having in proximity to a first end a first loosely wound portion in which a wire material is wound in compressible fashion with gaps therebetween, and having adjacent to the loosely wound portion a tightly wound portion in which a wire material is tightly wound with no gaps therebetween, wherein the moveable member is a plate-shaped body having two arm portions that face one another across a first slit opening to the other end thereof, and that are elastically deformable in a direction of constricting the first slit. When the first arms are not in an elastically deformed state, the distance between the outside surfaces of the first arms in proximity to the two end portions thereof is greater than the inside diameter of the tightly wound portion of the coil spring. A first engaging portion for engaging the end portion of the coil spring on the first loosely wound portion side is provided in proximity to the first end, and in a state in which the two first arm portions are elastically deformed in a direction constricting the first slit, the first engaging portion of the moveable member is inserted until engaging the end portion of the coil spring on the first loosely wound portion side, to the inside diameter side of the coil spring from the end portion at the first loosely wound portion side of the coil spring, and the auxiliary moveable member engages the end portion of the coil spring at the end portion opposite from the first loosely wound portion side, making it possible for the outside surface in proximity to the end portions of the first arms and the inside surface of the coil spring to change relative position, while maintaining electrical contact.

Description

Probe pin and IC socket

The present invention relates to a probe pin and an IC socket used for inspection of an IC (Integrated Circuit).

When inspecting an IC having a large number of terminals, an inspection connected to each terminal of the IC and an inspection device (IC tester) for inspecting the IC while suppressing electrical connection between adjacent terminals in the IC. Probe pins are used to electrically connect the electrodes corresponding to the respective terminals on the circuit board.

A typical configuration of the probe pin includes a tubular body that is opened while being partially closed at both ends, a coil spring disposed inside the tubular body, and the partially closed portion that is urged by the coil spring. And two contact members partially protruding from the tubular body in a state of being locked to each other. As another configuration, there is a probe pin constituted by two plate-like contact members obtained by pressing or etching a plate material and a coil spring. Since the tubular body is not necessary, the cost of parts of the probe pin can be reduced.

Further, as one of the probe pins having other configurations, there is a probe pin constituted by two parts of one contact member disclosed in Patent Document 1 and a coil spring in which a tubular body is partially formed. Since it is composed of two parts, the part cost can be further reduced.

The probe pin disclosed in Patent Document 1 includes a holder that supports a conductive needle-like body that is in contact with a contacted body so that the conductive needle-like body can protrude and retract in an axial direction, and a spring that projects the conductive needle-like body from the holder. A compression coil spring coaxially received with the conductive needle-like body in the holder for biasing, and an electrical signal passing through the conductive needle-like body via the compression coil spring. A conductive contact, wherein the compression coil spring is closely wound around a portion extending from the overlapping portion of the conductive needle-like member in the axial direction to the signal transmitting / receiving means. Is a conductive contact characterized by being formed.

JP 1998-239349 A JP 2011-89930 A JP 2012-58210 A JP 2010-157386 A

However, in general, there is a manufacturing tolerance in the inner diameter of the compression coil spring, and the probe pin of Patent Document 1 is in close contact with the conductive contact when the conductive contact fluctuates parallel to the central axis of the compression coil spring. There is a possibility that the winding portion does not come in contact and a conduction failure occurs.

Therefore, in order to solve the above problems, for example, probe pins disclosed in Patent Document 2 and Patent Document 3 have been proposed. The probe pin disclosed in Patent Document 2 is an eccentric part of the closely wound winding of the coil spring, and the probe pin of Patent Document 3 has a diameter of the coarsely wound portion of the coil spring from the closely wound portion. It is formed small, and the contact portion between the tightly wound portion and the plunger is eccentric while the center axis of the coil spring and the plunger is coaxial with the coarsely wound portion. However, there is a manufacturing tolerance in the inner diameter of the coil spring, and since the eccentric amount of each probe pin increases or decreases within the manufacturing tolerance of the coil spring, the probe pins disclosed in Patent Document 2 and Patent Document 3 are used. However, the risk of causing poor conduction is not sufficiently avoided.

Further, the probe pin disclosed in Patent Document 4 is a probe pin including a plunger made of a thin metal plate and a coil spring unit including a funnel-shaped tightly wound portion having a thin winding portion, and the plunger is By forming two parts, each having an upper contact piece, a wide part, and a lower contact piece of the same size, by bending them so that they are arranged parallel to and opposite to each other around the connecting part, The two contact points provided at the lower end portion of the contact piece are formed so as to be elastically deformable with respect to each other, and the distance between them is set smaller than the inner diameter of the spring portion and larger than the inner diameter of the narrow winding portion. When the is compressed, the two contact points of the lower contact piece elastically contact the inner peripheral surface of the narrow winding portion. In this probe pin, since the two contacts are elastically contacted, the risk of causing a conduction failure is reduced. However, the lower contact piece is formed by bending the thin metal plate in parallel and opposite to each other, and the two contacts provided at the lower end of the lower contact piece are in the thickness direction of the thin metal plate at the inner diameter of the thin winding portion of the coil spring unit. Therefore, if the outer diameter of the coil spring unit is reduced in order to inspect an IC having a fine pitch terminal, it is required to bend the connecting portion precisely, and an expensive press die is used. It may take. Further, since the lower end portion of the lower contact piece is introduced into the narrow winding portion while being position-regulated by the funnel-shaped tightly wound portion, the lower end portion of the lower contact piece is funnel-shaped when the spring portion is compressed. There is a risk of malfunction due to contact with the inner peripheral surface of the tightly wound portion.

In view of such a technical background, the present invention solves the above-described problem, and even when a probe pin has a small outer diameter for inspecting an IC having a fine-pitch terminal, conduction failure during use of the probe pin, and It is an object of the present invention to provide a probe pin with a low risk of causing malfunction.

In one aspect, a probe pin according to the present invention provided to solve the above-described problems is (1) an electrode contact portion for contacting a measurement target electrode which is an electrode attached to a measurement target, and wiring of the measurement device A movable member having one end of an auxiliary substrate contact portion for contacting the substrate at one end, an auxiliary movable member having the other end of the electrode contact portion and the auxiliary substrate contact portion at one end, and a wire rod compressed near the one end A coil spring having a first coarsely wound portion that can be wound, and having a tightly wound portion wound adjacently to the first coarsely wound portion and closely spaced without a gap. The movable member is a plate-like body having two first arm portions that are opposed to each other with the first slit opened at the other end and elastically deformable in a direction of narrowing the first slit. In a state where the portion is not elastically deformed, the distance between the outer surfaces near the two ends of the first arm portion is formed to be larger than the inner diameter of the tightly wound portion of the coil spring, and the first coarse portion of the coil spring is located near the one end. A first locking portion that locks to an end portion on the winding portion side is provided, and the two first arm portions are elastically deformed in a direction to narrow the first slit, and the first coarse winding portion side of the coil spring is The first locking portion of the movable member is inserted from the end portion to the inner diameter side of the coil spring until it is locked to the end portion of the coil spring on the first coarse winding portion side. The auxiliary movable member is locked to the end of the coil spring opposite to the first coarsely wound portion, and the outer surface near the end of the first arm portion and the inner surface of the coil spring are kept in electrical contact with each other. The position can be changed.

In the probe pin according to the present invention, the outer surface in the vicinity of the end of the first arm portion may be in contact with the inner surface of the tightly wound portion of the coil spring in a state where the coil spring is not compressed. In this way, the contact between the movable member and the coil spring can be stabilized. The outer surface near the end of the first arm portion may be configured not to contact the inner surface of the tightly wound portion of the coil spring when the coil spring is not compressed.
In this way, the overall length of the probe pin can be shortened.

(2) Further, in the probe pin according to the present invention, the plate width of the base portion of the first arm portion may be formed in the range of about the same as the plate thickness to 1/2 of the plate thickness.

(3) Moreover, in the probe pin which concerns on this invention, it is good to have a loose arc-shaped protrusion part in the outer surface of a 1st arm part.

Also, in the probe pin according to the present invention, the plate width of the first arm portion is substantially constant, and the first slit is preferably formed so that the width of the gap increases as it approaches the opening.

Further, in the probe pin according to the present invention, the width of the gap of the first slit is substantially constant, and the plate width of the first arm portion is preferably increased as it approaches the opening of the first slit.

(4) Further, in the probe pin according to the present invention, the movable member includes a protruding portion that protrudes in the plate width direction from the outer side surface in the vicinity of the first locking portion, and the protruding portion is the first coarse portion of the coil spring. It is good to fix to a coil spring by press-fitting in the edge part by the side of a winding part.

(5) In the probe pin according to the present invention, the movable member and the coil spring elastically deform the first arm portion of the movable member in the plate width direction and close the first slit while the first movable member is closed. Insert the coil spring into the inner diameter of the coil spring end from the first coarse winding portion, and assemble the coil member so that the portion from the first slit end of the movable member to the first locking portion is included in the coil spring. It should be done.

(6) Further, in the probe pin according to the present invention, the auxiliary movable member protrudes in a direction orthogonal to the insertion direction to the coil spring and is locked to the end opposite to the first coarse winding portion side of the coil spring. It is good to provide 2 latching | locking parts.

(7) Moreover, in the probe pin which concerns on this invention, an auxiliary | assistant movable member is provided with the protrusion part which protrudes from the end surface of a 2nd latching | locking part, and at least one part of the said protrusion part is the 1st rough winding part of a coil spring. It is good to insert in the internal diameter side of the edge part on the opposite side to a side.

(8) Further, in the probe pin according to the present invention, the auxiliary movable member includes a protruding portion that protrudes in the direction perpendicular to the insertion direction to the coil spring in the vicinity of the second locking portion, and the protruding portion is provided in the coil spring. The auxiliary movable member and the coil spring may be fixed to each other in a state where the auxiliary movable member and the coil spring are assembled by press-fitting into the end opposite to the first coarsely wound portion.

(9) In the probe pin according to the present invention, the coil spring is preferably formed so that the outer diameter of the tightly wound portion is substantially the same as the outer diameter of the first coarsely wound portion. (10) Alternatively, in the probe pin according to the present invention, the coil spring may be formed such that the outer diameter of the tightly wound portion is smaller than the outer diameter of the first coarsely wound portion. (11) In this case, in a state where the first arm portion is not elastically deformed, the distance between the outer surfaces near the two end portions of the first arm portion is formed to be smaller than the inner diameter of the first coarsely wound portion of the coil spring. Good.

(12) In the probe pin according to the present invention, the auxiliary movable member may be a plate-like body. (13) The auxiliary movable member may be a cylindrical body. In this case, the auxiliary movable member may be three-dimensionally formed with an electrode contact portion or an auxiliary substrate contact portion formed at one end.

Further, in the probe pin according to the present invention, when the auxiliary movable member is a cylindrical body, at least a part of the protrusion provided in the auxiliary movable member is preferably formed in a plate shape. In this case, in the state before the coil spring is assembled with the auxiliary movable member, the vicinity of the end portion on the auxiliary movable member side of the tightly wound portion is preferably formed to have a smaller outer diameter than other portions.

(14) In the probe pin according to the present invention, the coil spring has a second coarsely wound portion in which a wire rod is wound in a compressible manner at a distance in the vicinity of the other end, and the auxiliary movable member is a first movable member. It is a plate-like body having an arm portion having a structure common to the arm portion and a slit having a structure common to the first slit, and the auxiliary movable member is elastically deformed in a direction in which the two arm portions narrow the slit. In this state, the coil spring is inserted into the coil spring from the end on the second coarsely wound portion side to the inner diameter side of the coil spring, and the outer surface near the end of the arm portion provided in the auxiliary movable member and the inner surface of the coil spring maintain electrical contact. However, it is preferable that the relative position can be changed.

(15) Further, in the probe pin according to the present invention, the auxiliary movable member protrudes from the outer side surface in the plate width direction and is engaged with the end opposite to the first coarsely wound portion side of the coil spring. The auxiliary movable member and the coil spring elastically deform the arm portion of the auxiliary movable member in the plate width direction to close the slit of the auxiliary movable member, and the end of the auxiliary movable member on the slit side. The coil spring is inserted into the inner diameter of the end portion on the second coarsely wound portion side of the coil spring, and the portion extending from the slit-side end portion of the auxiliary movable member to the second locking portion is preferably assembled in the coil spring.

(16) Further, in the probe pin according to the present invention, the movable member has an electrode contact portion at one end for contacting the measurement target electrode that is an electrode attached to the measurement target, and the auxiliary movable member is It is preferable to have an auxiliary substrate contact portion at one end for contacting an inspection substrate which is a wiring substrate of the measuring apparatus.

(17) In the probe pin according to the present invention, the movable member has an auxiliary substrate contact portion for contacting an inspection substrate, which is a wiring substrate of the measuring apparatus, at one end, and the auxiliary movable member is an object to be measured. It is good to have the electrode contact part for contacting the measuring object electrode which is an electrode attached to a thing at one end.

In another aspect, the probe pin according to the present invention provided to solve the above problem is (18) an electrode contact portion for contacting a measurement target electrode, which is an electrode attached to the measurement target, at one end. A movable member having a wire and a rough winding portion (first coarse winding portion) wound in a compressible manner at a distance in the vicinity of one end, and the wire rod is adjacent to the coarse winding portion (first coarse winding portion). Is a probe pin including a coil spring having a tightly wound portion wound tightly with no gap, and the movable member is opposed to the first slit having the other end opened, and the first It is a plate-like body having two first arm portions that can be elastically deformed in the direction of narrowing the slit, and the outer surface in the vicinity of the two end portions of the first arm portion in a state where the first arm portion is not elastically deformed. Is greater than the inner diameter of the tightly wound part of the coil spring. An engaging portion is formed in the vicinity of the electrode contact portion and is engaged with an end of the coil spring on the coarse winding portion (first coarse winding portion) side, and the two first arm portions narrow the first slit. In the state of being elastically deformed in the direction, the engaging portion of the movable member is connected to the coarse winding portion (first coarse winding portion) of the coil spring from the end of the coil spring on the coarse winding portion (first coarse winding portion) side to the inner diameter side of the coil spring. The outer surface near the end of the first arm portion and the inner surface of the coil spring can be changed in relative position while maintaining electrical contact.

In the probe pin according to the present invention, the outer surface in the vicinity of the end portion of the first arm portion may be configured to come into contact with the inner surface of the tightly wound portion in the coil spring when the coil spring is not compressed. In this way, the contact between the movable member and the coil spring can be stabilized. The outer surface near the end of the first arm portion may be configured not to contact the inner surface of the tightly wound portion of the coil spring when the coil spring is not compressed. In this way, the overall length of the probe pin can be shortened.

(19) Further, in the probe pin according to the present invention, the plate width of the base portion of the first arm portion may be formed in a range from about the same as the plate thickness to 1/2 of the plate thickness.

(20) Moreover, in the probe pin which concerns on this invention, it is good to have a gentle circular-arc-shaped protrusion part in the outer surface of a 1st arm part.

Further, in the probe pin according to the present invention, the width of the interval between the first slits is substantially constant, and the plate width of the first arm portion is preferably increased as it approaches the opening of the first slit.

(21) Further, in the probe pin according to the present invention, the movable member includes a protruding portion that protrudes in the plate width direction from the outer surface thereof, and the protruding portion is disposed on the rough winding portion (first rough winding portion) side of the coil spring. It is good to fix to a coil spring by press-fitting in an edge part.

(22) Further, in the probe pin according to the present invention, the movable member and the coil spring elastically deform the first arm portion of the movable member in the plate width direction, close the first slit, and move the first movable member. The part from the end on the slit side to the inner diameter of the end on the coarse winding part (first coarse winding part) side of the coil spring is included in the coil spring from the end on the first slit side of the movable member to the locking part. It is good to be assembled.

(23) In the probe pin according to the present invention, the coil spring is preferably formed so that the outer diameter of the tightly wound portion is substantially the same as the outer diameter of the coarsely wound portion (first coarsely wound portion).

(24) In the probe pin according to the present invention, the coil spring is preferably formed so that the outer diameter of the tightly wound portion is smaller than the outer diameter of the coarsely wound portion (first coarsely wound portion).

(25) Further, in the probe pin according to the present invention, in the state where the first arm portion is not elastically deformed, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion is the rough winding portion of the coil spring ( It is good to form smaller than the internal diameter of a 1st rough winding part.

(26) Also, in the probe pin according to the present invention, the movable member has a plate width smaller than the inner diameter of the coarsely wound portion (first coarsely wound portion) and larger than the inner diameter of the tightly wound portion, It is preferable that a plate-like extending portion that protrudes in the insertion direction into the coil spring is provided from the end face of the first arm portion, and the first arm portion protrudes from an end portion of the extending portion opposite to the locking portion.

(27) Moreover, in the probe pin which concerns on this invention, it is good for a close_contact | adherence winding part to further be provided with the narrow diameter part diameter-reduced rather than the part which slides with a 1st arm part. (28) The narrow-diameter portion may have a substrate contact portion for contacting the wiring substrate of the measuring device at the end opposite to the coarsely wound portion (first coarsely wound portion).

In the present specification, a member made of an insulating rigid body, having a through hole in an array corresponding to the terminal of the IC to be inspected, and a member for holding the probe pin in the through hole is called a housing, An assembly in which the probe pin is held in the housing is called an IC socket.

According to the probe pin of the present invention, conduction between the conductive plate-shaped movable member and the tightly wound portion of the coil spring is stable, and the risk of causing poor conduction when using the probe pin is reduced. The

Fig.1 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the movable member 11 of the probe pin 1 which concerns on 1st Embodiment of this invention, FIG.1 (b) is a movable member. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 11 plate-shaped bodies. FIG. 1C is an external view of the movable member 11. It is a schematic diagram which shows the relationship between the internal diameter D of a coil spring, and the board width W of a board | plate material. FIG. 3A is a cross-sectional view showing a state in which the probe pin is not compressed in a modified example of the probe pin 1 according to the first embodiment of the present invention. FIG.3 (b) is sectional drawing which shows the state by which the probe pin was compressed about the modification of the probe pin 1 which concerns on 1st Embodiment of this invention. FIGS. 4A to 4C are external views showing modifications of the shape of the first arm portion 116 in the movable member 11. 5A and 5B are cross-sectional views showing a modification of the probe pin 1 according to the first embodiment of the present invention. It is sectional drawing which shows the state in which the IC socket 2 holding the probe pin 1 which concerns on 1st Embodiment of this invention was mounted in the board | substrate 1000 for a test | inspection. It is sectional drawing which shows the state which IC socket 2 is test | inspecting IC2000 which is a measuring object. FIG. 8A is a cross-sectional view of the probe pin 3 according to the second embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 31, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 31 plate-shaped bodies. FIGS. 9A and 9B are sectional views showing a modification of the probe pin 3 according to the second embodiment of the present invention. FIGS. 10A and 10B are sectional views showing a modification of the probe pin 3 according to the second embodiment of the present invention. FIG. 11A is a cross-sectional view of the probe pin 4 according to the third embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 41, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 41 plate-shaped bodies. FIG. 12A is a cross-sectional view of a probe pin 4 according to a modification of the third embodiment of the present invention, in a plane parallel to the plate surface of the plate-like body of the movable member 41, and FIG. FIG. 6 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the movable member 41. FIG. 13A is a cross-sectional view of the probe pin 5 according to the fourth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 51, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 51 plate-shaped bodies. FIG. 14A is a sectional view of the probe pin 5 according to the modification of the fourth embodiment of the present invention in the initial state of the coil spring 52, and FIG. 14B is a plate-like body of the movable member 51. 14C is a cross-sectional view taken along a plane parallel to the plate surface, FIG. 14C is a cross-sectional view taken along a plane perpendicular to the plate surface of the plate-like body of the movable member 51, and FIG. 5 is a cross-sectional view of a surface orthogonal to the insertion direction of the press-fitting portion of the electrode contact member 55. FIG. FIG. 15A is a cross-sectional view of the probe pin 6 according to the fifth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 61, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 61 plate-shaped bodies. FIG. 16A is a cross-sectional view of the probe pin 7 according to the sixth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 71, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 71 plate-shaped bodies. FIG. 17A is a cross-sectional view of a probe pin 7 according to a modification of the sixth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 71, and FIG. FIG. 5 is a cross-sectional view of a plane perpendicular to the plate surface of the plate-like body of the movable member 71.

Hereinafter, probe pins and IC sockets according to the present invention will be described with reference to the drawings.

[First Embodiment]
The probe pin 1 according to the first embodiment of the present invention includes a movable member 11 and a coil spring 12. Fig.1 (a) is sectional drawing in the surface parallel to the plate | board surface of the plate-shaped body of the movable member 11 of the probe pin 1 which concerns on 1st Embodiment of this invention, FIG.1 (b) is a movable member. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 11 plate-shaped bodies. FIG. 1C is an external view of the movable member 11. The movable member 11 is made of a plate-like body having a substantially uniform plate thickness. Here, as a means for manufacturing the movable member 11, for example, one plate material may be pressed or etched, or a silicon substrate may be processed by a processing method applying a semiconductor manufacturing technique called MEMS. .

The movable member 11 includes an electrode contact portion 111 for contacting an electrode (also referred to as a terminal in the present specification) attached to an IC that is a measurement object at one end. In addition, the movable member 11 includes a first flange portion 114 (corresponding to a first locking portion of the present invention) that protrudes in the plate width direction from the outer side surface in the vicinity of the electrode contact portion 111. Furthermore, the movable member 11 includes a first arm portion 116 in which a first slit 112 having an opening at the tip is formed at the other end portion. A first extending portion 119 is provided between the end face of the first flange portion 114 and the first arm portion 116. The first extending portion 119 is not provided with a slit and has a plate width slightly smaller than the inner diameter of the coil spring 12. Here, as illustrated in FIG. 1C, the first arm portion 116 is an initial stage of the movable member 11 obtained by etching or pressing a plate material, or the movable member 11 obtained by manufacturing by the MEMS technology. The shape is such that the plate width of the movable member 11 formed by the two first arm portions 116 in the vicinity of the opening of the first slit 112 is slightly larger than the inner diameter of the coil spring 12. That is, in the state where the movable member 11 is not elastically deformed, the distance between the outer surfaces near the two end portions of the first arm portion is formed slightly larger than the inner diameter of the coil spring.

In the probe pin 1 illustrated in FIG. 1, the plate width of the first arm portion 116 is formed to be almost constant over the entire length, and the first arm portion 116 is slightly inclined toward the opening of the first slit 112. (That is, the width of the gap increases as it approaches the opening). As will be described later, the first arm portion 116 and the first slit 112 may have other shapes.

In general, when a plate material having a certain plate thickness is inserted into the inner diameter of a circular coil spring, the plate width W in contact with the inner diameter of the coil spring is slightly smaller than the center diameter D of the coil spring, as shown in FIG. In the present invention, being formed slightly larger than the inner diameter of the coil spring means that it is formed slightly larger than the plate width in contact with the inner diameter of the coil spring. In the present invention, when the tightly wound portion of the coil spring includes a small diameter portion, the inner diameter of the tightly wound portion of the coil spring means the inner diameter of the portion excluding the small diameter portion.

Here, when the material of the movable member 11 is manufactured by etching or pressing, a copper alloy such as phosphor bronze or beryllium copper, stainless steel, or the like is assumed, and each has a certain degree of elasticity. In addition, in the case of manufacturing by MEMS technology, the material is silicon, but silicon also has some elasticity. By selecting such a material, the first slit 112 can be opened and closed within the range of elasticity of the first arm portion 116.

The coil spring 12 includes a substrate contact portion 121 for contacting an inspection substrate 1000 which is a wiring substrate of the measuring device at one end. In addition, the coil spring 12 has a tightly wound portion 122 having a certain length in the vicinity of the end on the side where the substrate contact portion 121 is provided. The tightly wound portion 122 is a portion in which the wire forming the coil spring 12 is wound in close contact with no gap. Further, in the probe pin 1 illustrated in FIG. 1, a narrow-diameter portion 123 having an outer diameter smaller than that of the other portion of the tightly wound portion 122 closest to the end on the substrate contact portion 121 side. Is provided. The coil spring 12 has a first coarsely wound portion 124 having a certain length in the vicinity of the side opposite to the end on the side where the substrate contact portion 121 is provided. The first coarsely wound portion 124 is a portion in which the wire forming the coil spring 12 is wound at an interval so that the coil spring 12 can be compressed.

The probe pin 1 of the present embodiment including the movable member 11 and the coil spring 12 elastically deforms the first arm portion 116 of the movable member 11 in the plate width direction of the first arm portion 116 and slightly closes the first slit 112. On the other hand, the movable member 11 is moved from the end on the first slit 112 side to the inner diameter of the end of the coil spring 12 opposite to the substrate contact portion 121, and the first flange portion 114 of the movable member 11 is the first coarsely wound portion of the coil spring 12. The coil member 12 is assembled so that the portion extending from the end portion on the first slit 112 side to the first flange portion 114 of the movable member 11 is included in the coil spring 12. In the probe pin 1 illustrated in FIG. 1, the movable member 11 and the coil spring 12 are not fixed and can be separated. However, as described later, when the probe pin 1 is held in the through hole of the housing, it can be easily separated. Absent.

In the probe pin 1 according to the first embodiment of the present invention that is arranged and assembled in this way, the outer surface near the ends of the two first arm portions 116 provided in the movable member 11 (the plate thickness surface on the outer peripheral side). The inner surface of the tightly wound portion of the coil spring 12 constitutes a sliding contact structure. With this sliding contact structure, the movable member 11 and the coil spring 12 can change their relative positions while maintaining electrical contact. Here, the initial shape of the first arm portion 116 is such that the distance between the outer surfaces in the vicinity of the two end portions is slightly larger than the inner diameter of the coil spring 12. A slight contact pressure is applied to the, so that the relative position can be changed while maintaining a stable electrical contact. It is assumed that the movable member 11 and the coil spring 12 are plated with gold, and the contact pressure applied to the two contact portions may be extremely small. Therefore, the first arm portion 116 may be slightly elastically deformed. Since there is a manufacturing tolerance in the inner diameter of the coil spring 12, it may be set so as to be elastically deformed slightly larger than the tolerance. Further, in the probe pin 1 illustrated in FIG. 1, the outer surface near the end of the first arm portion 116 is in close contact with the coil spring 12 in a state where the probe pin 1 is assembled (that is, the coil spring 12 is not compressed). Although it is in contact with the inner surface of the winding portion, as illustrated in FIG. 3, the outer surface near the end of the first arm portion 116 is not attached to the tight winding portion of the coil spring 12 in the assembled state of the probe pin 1. In a state where the inner surface of the first coarsely wound portion 124 of the coil spring 12 is not touched and the later-described IC is inspected (the coil spring 12 is compressed and the first arm portion 116 moves toward the tightly wound portion 122 of the coil spring 12). It may be designed so as to be in contact with the inner surface of the tightly wound portion 122 of the coil spring 12 in the pushed state). With such a configuration, the overall length of the probe pin 1 can be shortened. Note that the tip of the first arm portion 116 is formed to a length that does not reach the small-diameter portion 123 even when the probe pin 1 is used (when the coil spring is compressed). Therefore, the outer diameter of the small-diameter portion 123 can be reduced as long as the coil spring 12 can be manufactured, and the substrate contact portion 121 can be reduced.

As described above, since the probe pin 1 according to the first embodiment of the present invention elastically deforms the first arm portion 116 in the plate width direction of the first arm portion 116, the elastic repulsive force of the first arm portion 116 is What is necessary is just to adjust with the board width of the 1st arm part 116. Specifically, the width of the base portion of the first arm portion 116 (the vicinity of the edge portion on the opposite side of the first arm portion 116 from the opening of the first slit 112) may be adjusted. The elastic repulsive force of the first arm portion 116 acts as a contact pressure at the sliding contact portion. Here, the contact pressure in the sliding contact portion may be extremely small, and if the contact pressure is large, the sliding contact may be hindered. In general, when the plate material can be pressed or etched, the plate width can be processed up to ½ of the plate thickness. Also in the probe pin 1 according to the first embodiment of the present invention, It is desirable to set the plate width of the base portion in the range of about the same as the plate thickness to ½ of the plate thickness. On the other hand, in order to ensure the strength of the entire first arm portion 116, it is desirable to increase the plate width of the portion that does not affect the elastic repulsion force of the first arm portion 116. From such a viewpoint, the shape of the first arm portion 116 may be the shape illustrated in FIG. That is, as illustrated in FIG. 4A, the slit width of the first slit 112 is substantially constant, and the plate widths of the two first arm portions 116 are increased toward the opening of the first slit 112 (that is, the first slit 112). The plate width may be increased as it approaches the opening of one slit 112), and as illustrated in FIG. 4B, a gentle arc-shaped protruding portion 117 is provided on the outer surface of the first arm portion 116. It may be provided. When the plate width of the entire movable member 11 is large, as illustrated in FIG. 4C, a notch 118 may be provided on the inner surface of the root portion of the first arm portion 116.

Also, the probe pin 1 according to the first embodiment of the present invention may be configured such that the movable member 11 and the coil spring 12 are fixed to each other in an assembled state and are not easily separated. Specifically, as illustrated in FIG. 5, a protrusion 115 protruding from the outer surface of the movable member 11 in the plate width direction is provided in the vicinity of the first flange portion 114, and the protrusion 115 is press-fitted into one end of the coil spring 12. do it. Thus, when fixing the movable member 11 and the coil spring 12 mutually, the 1st flange part 114 does not need to be as illustrated in FIG.5 (b). In this case, the portion of the through hole of the housing that will be described below that engages with the step part 214 in the first hole becomes the end surface of the coil spring 12.

FIG. 6 is a cross-sectional view showing a state where the IC socket 2 holding the probe pin 1 according to the first embodiment of the present invention is placed on the inspection substrate 1000. FIG. 7 is a cross-sectional view showing a state in which the IC socket 2 is inspecting the IC 2000 which is a measurement object.

The IC socket 2 holds the probe pin 1 at a position corresponding to an electrode attached to the IC 2000 that is a measurement object, by each of the plurality of through holes 210 provided in the housing 21. Specifically, the housing 21 is divided into two in the main surface inward direction. The through hole 210 has a first opening 211 provided on the surface facing the measurement object IC 2000 and a second opening 212 provided on the surface facing the inspection substrate 1000 so that the diameters of the first opening 211 and the first opening 211 are the same. It is formed smaller than the hole diameter of the hollow part 213 provided between the second opening part 212. A first in-hole step 214 is provided at the boundary between the first opening 211 and the hollow 213, and a second in-hole step 215 is provided at the boundary between the second opening 212 and the hollow 213. In a state where the IC socket 2 is assembled, the step portion 214 in the first hole is engaged with the first flange portion 114, and the step portion 215 in the second hole has a diameter of the first coarse winding at the tightly wound portion 122 of the coil spring 12. The diameter is reduced from the same level as the portion 124 and is engaged with the step portion 125 connected to the small diameter portion. Thereby, the probe pin 1 is held in the through hole 210.

Here, the cross-sectional shape of the through-hole 210 is such that the hollow portion 213 in which the coil spring 12 is accommodated is circular according to the outer shape of the coil spring 12. Further, the cross-sectional shape of the portion from the first hole step 214 to which the part of the electrode contact portion 111 is accommodated to the first opening 211 may be circular for easy processing, or the electrode contact portion 111. It is good also as a rectangle (for example, a rectangle whose long side and short side are each about 10 micrometers larger than a board | plate material) a little larger than the cross-sectional shape of the electrode contact part 111 in order to suppress inclination of this.

The IC socket 2 is designed such that the coil spring 12 included in the probe pin 1 is slightly compressed in a state where it is placed on the inspection substrate 1000, that is, in a state shown in FIG. With this design, when the IC socket 2 is placed on the inspection substrate 1000, contact pressure is always applied to the contact portion between the substrate contact portion 121 and the inspection substrate 1000. It is preferable because dust and the like are prevented from adhering. In general, when the IC socket is placed on the inspection substrate 1000, the compression of the coil spring in this manner is called preloading. Although preloading is preferably performed, it may not be performed.

Furthermore, as described above, the IC socket placed on the inspection substrate 1000 is connected to each terminal of the IC 2000 to be inspected by an external device or a cover attached to the IC socket 2 in the use state shown in FIG. Is fixed so as to press the electrode contact portion 111 of each probe pin 1 of the IC socket by a certain length. In FIG. 7, portions that fix the IC 2000 such as an external device or a cover attached to the IC socket are omitted. As shown in FIG. 7, when the IC socket 2 is in use, the coil spring 12 provided in the probe pin 1 is compressed to a predetermined length, and the electrode contact between each terminal of the IC 2000 to be inspected and each probe pin 1 of the IC socket 2. A predetermined contact pressure is applied to the contact portion with the portion 111, so that an electrically stable inspection is possible.

[Second Embodiment]
The probe pin 3 according to the second embodiment of the present invention includes an auxiliary electrode contact member 33 made of another plate material in addition to the movable member 31 and the coil spring 32. FIG. 8A is a cross-sectional view of the probe pin 3 according to the second embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 31, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 31 plate-shaped bodies.

The probe pin according to the present invention has a three-dimensional shape of the electrode contact portion by fixing the auxiliary electrode contact member 33 to the movable member 31. In the following, the second embodiment will be described with respect to parts different from the first embodiment. Since the structure, manufacturing method, and the like not particularly described are the same as those of the probe pin 1 according to the first embodiment described above, the description thereof is omitted here.

As shown in FIG. 8, the movable member 31 includes a second arm portion 318 that defines a second slit 317. The second slit 317 is a window-shaped opening having one edge near the electrode contact portion 311 and the other edge near the first flange portion 314.

The auxiliary electrode contact member 33 is provided with an auxiliary electrode contact portion 331 for contacting an electrode attached to the IC that is the measurement object at one end. Further, the auxiliary electrode contact member 33 includes a third arm portion 333 in which a third slit 332 having an opening at the tip is formed at an end portion on the side where the auxiliary electrode contact portion 331 is provided. Further, the auxiliary electrode contact member 33 is provided in the vicinity of the end portion on the side where the auxiliary electrode contact portion 331 is provided, from the second flange portion 334 protruding in the plate width direction from the outer surface thereof, and from the end surface of the second flange portion 334. A first protruding portion 335 that protrudes is provided. At least a part of the first protrusion BR> 狽 R35 is inserted into the inner diameter side of the end of the coil spring 32 on the second flange portion 334 side. That is, the coil spring 32 includes at least a part of the first protrusion 335 of the auxiliary electrode contact member 33.

The movable member 31 and the auxiliary electrode contact member 33 are arranged such that the plate surface from the bottom edge of the third slit 332 to the end opposite to the auxiliary electrode contact portion 331 in the auxiliary electrode contact member 33 is the second slit of the movable member 31. While being included in 317, they are assembled so as to be orthogonal to each other. Here, the length of the second slit 317 of the movable member 31 is substantially the same as the length from the bottom edge of the third slit 332 of the auxiliary electrode contact member 33 to the end opposite to the auxiliary electrode contact portion 331. The auxiliary electrode contact member 33 is fixed to the movable member 31 so as not to fluctuate in the movable direction of the movable member 31. In addition, the auxiliary electrode contact member 33 is not easily separated from the coil spring 32 by the first protrusion 335 included in the auxiliary electrode contact member 33 being locked to the inner diameter of the coil spring 32.

As a specific method of assembling the movable member 31 and the auxiliary electrode contact member 33, the third slit 332 of the auxiliary electrode contact member 33 is formed on the movable member 31 while the auxiliary electrode contact member 33 is slightly inclined with respect to the movable member 31. The movable member 31 and the auxiliary electrode contact member 33 are inserted parallel to the side edge of the electrode contact portion 311 of the second slit 317, and the third slit of the auxiliary electrode contact member 33 is inserted into the second slit 317 of the movable member 31. What is necessary is just to include the plate | board surface from the bottom edge part of 332 to the edge part on the opposite side to the auxiliary electrode contact part 331. FIG.

Here, the end surfaces on the coil spring 32 side of the first flange portion 314 of the movable member 31 and the second flange portion 334 of the auxiliary electrode contact member 33 that are locked to one end of the coil spring 32 are the same in the probe pin 3 illustrated in FIG. The height is set, and both the first flange portion 314 and the second flange portion 334 are locked to one end of the coil spring 32, but the movable member 31 and the auxiliary electrode contact member 33 are fixed so as not to fluctuate with each other. Therefore, any one of the flange portions may be engaged with one end of the coil spring 32. For example, the first flange portion 314 and the second flange portion 334 may have a step due to manufacturing tolerances of the movable member 31 and the auxiliary electrode contact member 33.

The electrode contact portion 311 provided in the movable member 31 and the auxiliary electrode contact portion 331 provided in the auxiliary electrode contact member 33 are each V-shaped in the probe pin 3 illustrated in FIG. The Here, since the movable member 31 and the auxiliary electrode contact member 33 are disposed so as to be orthogonal to each other, the electrode contact portion of the probe pin 3 illustrated in FIG. 8 is formed from four inclined surfaces disposed at an angle of 90 degrees. It is formed. This is the same as the four peaks formed when the electrode contact portion is three-dimensionally processed called a crown cut in the structure of a typical probe pin having the tubular body described above, and is attached to an IC that is a measurement object, for example. In the case where the electrode to be soldered is a solder ball, even if the solder ball is displaced, a plurality of inclined surfaces are in contact with the solder ball, and when the probe pin 3 is used, the electrode attached to the IC and the electrode contact portion of the probe pin 3 Electrical contact with is stable and preferable. Usually, the electrode contact portion is worn by repeated use of the probe pin. When the electrode contact part has four peaks formed by crown cutting, the area of the contact of the electrode contact part gradually increases as the peak part wears due to contact with the electrode attached to the IC, and is constant. When the area is as described above, the electrical contact with the electrode attached to the IC becomes unstable. On the other hand, even if the electrode contact portion of the probe pin 3 according to the second embodiment illustrated in FIG. 8 wears out the portion that directly contacts the electrode attached to the IC, the area of the portion is the plate-like body. The cross-sectional area can be maintained, and the electrical contact is not easily destabilized. Therefore, the probe pin 3 according to the second embodiment illustrated in FIG. 8 is also excellent in the durability of the electrode contact portion.

Further, in the probe pin 3 illustrated in FIG. 8, the plate width of the portion from the electrode contact portion 311 to the first flange portion 314 in the movable member 31 and the auxiliary electrode contact portion 331 to the second flange portion in the auxiliary electrode contact member 33. The plate width of the portion reaching 334, the plate width of the first flange portion 314 in the movable member 31, and the plate width of the second flange portion 334 in the auxiliary electrode contact member 33 are set to substantially the same plate width. Therefore, the cross-sectional shape in the direction orthogonal to the movable direction of the portion from the electrode contact portion to the flange portion in the probe pin 3 and the cross-sectional shape in the same direction of the flange portion are respectively cross-shaped. Here, as described above, the probe pin 3 is held in the circular through hole of the IC socket when in use, but the movable part constituted by the movable member 31 and the auxiliary electrode contact member 33 in the probe pin 3 is Since the cross-sectional shape is a cross shape, it is possible to suppress inclination in any direction within the circular through hole. Therefore, the risk that the movable part is excessively inclined to cause a sliding failure is also reduced.

Furthermore, as illustrated in FIG. 9, the first protrusion 335 included in the auxiliary electrode contact member 33 may be configured to be included in the tightly wound portion 322 of the coil spring 32 at least when the probe pin 3 is used. . Since the cross-sectional shape of the portion of the probe pin 3 included in the first coarsely wound portion 324 of the coil spring 32 forms a cross shape, the risk of the first coarsely wound portion 324 being bent when the coil spring 32 contracts is reduced. The

8 and 9, similarly to the probe pin 1 illustrated in FIG. 5, in the vicinity of the first flange portion 314 of the movable member 31, a protrusion protruding from the outer surface in the plate width direction. The movable member 31 and the coil spring 32 may be fixed to each other in the assembled state. When the movable member 31 and the coil spring 32 are fixed to each other, similarly, the auxiliary electrode contact member may be fixed to the coil spring 32, or the movable member 31 and the auxiliary electrode contact member 33 are fixed to each other. The auxiliary electrode contact member 33 may not be fixed to the coil spring 32.

In the probe pin 3 according to the second embodiment described above, when the electrode attached to the IC that is the measurement object is a pad-like electrode, the tip of the contact portion of the electrode contact portion 311 is set as one point contact. Also good. In this case, the contact portion of the auxiliary electrode contact portion 331 may be lower than the contact portion of the electrode contact portion 311 so that it does not come into contact with the electrode attached to the IC. In the present invention, even if the contact portion of the auxiliary electrode contact portion 331 is not in contact with the electrode attached to the IC, the end portion of the auxiliary electrode contact member 33 is constituted by the auxiliary electrode contact portion 331. It is assumed that the end of the auxiliary electrode contact portion 331 does not come into contact with the electrode attached to the IC when the probe pin 3 is used.

[Modification of Second Embodiment]
FIGS. 10A and 10B are sectional views showing a modification of the probe pin 3 according to the second embodiment of the present invention. In the probe pin 3 according to the second embodiment described above, as illustrated in FIG. 10A, the tip of the electrode contact portion 311 included in the movable member 31 has a plurality of protrusions in the plate width direction of the electrode contact portion 311. You may have. As illustrated in FIG. 10B, the tip of the auxiliary electrode contact portion 331 provided in the auxiliary electrode contact member 33 may have a plurality of protrusions in the plate width direction of the auxiliary electrode contact member 33. By forming a plurality of protrusions in this way, even when the plate thickness of the movable member 31 and the auxiliary electrode contact member 33 is large, the plate width of the protrusion can be formed smaller than the plate thickness. As a result, for example, when the electrode attached to the IC to be measured is a solder ball, the tip of the protrusion penetrates the oxide film formed on the surface of the solder ball, and the electrode attached to the IC and the probe pin 3 The electrical contact with the electrode contact portion is stabilized. Here, the protrusions at the end of the plate as illustrated in FIG. 10 can be formed to have a plate width of ½ or less of the plate thickness. As illustrated in FIG. 10, the plurality of protrusions may be made higher as approaching the outer surface of the electrode contact portion, or may be formed at the same height. In the probe pin 1 according to the first embodiment illustrated in FIG. 1, a plurality of protrusions may be formed at the tip of the electrode contact portion 111 in the plate width direction of the electrode contact portion 111.

[Third Embodiment]
The probe pin according to the third embodiment of the present invention further includes an auxiliary board contact member made of another plate material, and the board contact portion of the coil spring is a wiring board of the measuring apparatus via the auxiliary board contact member. You may make it contact 1000. The configuration of the probe pin 4 according to the third embodiment may be implemented in the probe pin 1 according to the first embodiment or may be implemented in the probe pin 3 according to the second embodiment. Below, the case where it implements in the probe pin 1 which concerns on 1st Embodiment as an example is illustrated. In the following, the third embodiment will be described with respect to parts different from the first embodiment. Since the structure, manufacturing method (for example, the structure of the electrode contact portion 411 and the coil spring 42) and the like not particularly described are the same as those of the probe pin 1 according to the first embodiment described above, description thereof is omitted here.

FIG. 11A is a cross-sectional view of the probe pin 4 according to the third embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 41, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 41 plate-shaped bodies.

In the probe pin 4 according to the third embodiment of the present invention, as illustrated in FIG. 11, the coil spring 42 does not include a small diameter portion, and the auxiliary substrate contact member 44 made of another plate material on the substrate contact portion side of the probe pin 4. Is provided. The auxiliary substrate contact member 44 corresponds to the auxiliary movable member of the present invention. The auxiliary substrate contact member 44 includes an auxiliary substrate contact portion 441 for contacting an inspection substrate 1000 which is a wiring substrate of the measuring device at one end. Further, the auxiliary substrate contact member 44 has a third flange portion 444 and a third flange portion 444 that protrude in the plate width direction (that is, the direction orthogonal to the insertion direction into the coil spring) from the outer surface in the vicinity of the end portion. The 2nd protrusion part 445 which protrudes from the end surface of this is provided. The third flange portion 444 corresponds to the second locking portion of the present invention. The third flange portion 444 is engaged with the end portion of the coil spring 42 on the first rough winding portion 424 side. At least a part of the second projecting portion 445 is inserted into the inner diameter side of the end portion of the coil spring 42 that is in contact with the third flange portion 444 (that is, the substrate contact portion side and opposite to the first rough winding portion 424 side). Is done. That is, the coil spring 42 includes at least a part of the second projecting portion 445 of the auxiliary substrate contact member 44. In the configuration of the probe pin 4 according to the third embodiment, the substrate contact portion 421 of the coil spring 42 is in contact with the inspection substrate 1000 that is a wiring substrate of the measuring apparatus via the auxiliary substrate contact member 44.

Here, in the probe pin 4 illustrated in FIG. 11, the auxiliary substrate contact member 44 and the coil spring 42 are not fixed and can be separated, but when held in the through hole of the housing described above, the third flange portion 444 is formed. By being locked to the step part 215 in the second hole, it is not easily separated. Thus, when the auxiliary substrate contact member 44 and the coil spring 42 are not fixed, the second protrusion 445 may not be provided. Further, similarly to the case where the movable member 11 and the coil spring 12 are fixed in the probe pin 1 illustrated in FIG. 5, the auxiliary board contact member 44 protrudes in the plate width direction from the outer surface in the vicinity of the third flange portion 444. A protrusion may be provided, and the protrusion may be pressed into the end of the coil spring 42 on the substrate contact portion 421 side to fix the auxiliary substrate contact member 44 and the coil spring 42 to each other in an assembled state. Further, the auxiliary substrate contact member 44 may have any shape as long as it is a conductor that conducts the substrate contact portion 421 of the coil spring 42 and the inspection substrate 1000 that is a wiring substrate of the measuring apparatus, and may be a cylindrical body. .

In the probe pin 4 illustrated in FIG. 11, the outer surface in the vicinity of the end portion of the first arm portion 416 is a tightly wound portion of the coil spring 42 in a state where the probe pin 4 is assembled (that is, the coil spring 42 is not compressed). In the state in which the probe pin 4 is assembled, the outer surface near the end of the first arm portion 416 does not reach the tightly wound portion 422 of the coil spring 42, and the IC is inspected. The coil spring 12 may be designed to contact the inner surface of the tightly wound portion 422 of the coil spring 42 in a state where the coil spring 12 is compressed and the first arm portion 416 is pushed into the tightly wound portion 422 side of the coil spring 42. . With such a configuration, the overall length of the probe pin 4 can be shortened.

[Modification of Third Embodiment]
12 (a) and 12 (b) are cross-sectional views showing a modification of the probe pin 4 according to the third embodiment of the present invention. In the probe pin 4 according to the third embodiment described above, the outer diameter of the first coarsely wound portion 424 is the same as the outer diameter of the tightly wound portion 422. However, as in the modification illustrated in FIG. The outer diameter of the winding part 424 may be larger than the outer diameter of the tightly wound part 422. As shown in FIG. 12, the distance of the outer surface at the base portion of the first arm portion 416 in the movable member 41 is formed smaller than the inner diameter of the tightly wound portion 422 of the coil spring 42. The two first arm portions 416 are elastically deformed and inserted into the inner diameter side of the coil spring 42, and the outer surface near the end of the first arm portion 416 and the inner surface of the tightly wound portion 422 of the coil spring 42 are in contact with each other. The two first arm portions 416 are configured so as not to contact the inner surface of the coil spring 42 at a portion other than the vicinity of the end portion.

Here, in the modification of the probe pin 4 according to the third embodiment of the present invention illustrated in FIG. 12, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion 416 is at least the tightly wound portion of the coil spring 42. It may be formed larger than the inner diameter of 422 and smaller than the inner diameter of the first rough winding portion 424. Since the distance between the outer surfaces near the two ends of the first arm portion 416 is smaller than the inner diameter of the first coarse winding portion 424, the first arm portion 416 is separated from the end portion of the coil spring 42 on the first coarse winding portion 424 side. When inserted into the inner diameter side of the coil spring 42, the first arm portion 416 is unlikely to interfere with the first rough winding portion 424, and assembly is facilitated.

In the modified example of the probe pin 4 according to the third embodiment of the present invention configured as described above, the step portion between the first coarsely wound portion 424 and the tightly wound portion 422 in the coil spring 42 is the first through hole of the housing described above. Since it becomes a site | part locked with the step part 215 in 2 holes, the full length of the probe pin 4 can be shortened further.

In the probe pin 4 according to the third embodiment of the present invention described above, the shape of the auxiliary substrate contact member 44 is arbitrary. For example, when the electrode of the inspection substrate 1000 is small, the auxiliary substrate contact portion is reduced. By forming, electrical contact with the inspection substrate 1000 can be stabilized.

[Fourth Embodiment]
The probe pin 5 according to the fourth embodiment of the present invention includes a movable member 51, a coil spring 52, and an electrode contact member 55. The probe pin 5 has a configuration similar to that of the probe pin 4 according to the third embodiment, but the movable member 51 comes into contact with the inspection substrate 1000 instead of the electrode attached to the IC. The probe pin 5 according to the fourth embodiment is the same as the probe pin according to the first to third embodiments described above, since the structure, the manufacturing method, and the like, which are not particularly described, are omitted here.

FIG. 13A is a cross-sectional view of the probe pin 5 according to the fourth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 51, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 51 plate-shaped bodies.

The movable member 51 is made of a plate-like body having a substantially uniform plate thickness, like the movable member 11 of the first embodiment. The movable member 51 includes an auxiliary substrate contact portion 511 for contacting an inspection substrate 1000 that is a wiring substrate of the measuring device at one end. In addition, the movable member 51 includes a first flange portion 514 that protrudes in the plate width direction from the outer side surface in the vicinity of the auxiliary substrate contact portion 511. Furthermore, the movable member 51 includes a first arm portion 516 in which a first slit 512 having an opening at the tip is formed at the other end portion. A first extending portion 519 is provided between the end surface of the first flange portion 514 and the first arm portion 516. The first extending portion 519 is not provided with a slit and has a plate width slightly smaller than the inner diameter of the coil spring 52.

Here, like the first arm portion 116 of the first embodiment, the first arm portion 516 is a movable member 51 obtained by etching or pressing a plate material, or a movable member 51 obtained by manufacturing by MEMS technology. The initial shape is such that the plate width of the movable member 51 formed by the two first arm portions 516 in the vicinity of the opening of the first slit 512 is slightly larger than the inner diameter of the coil spring 52. That is, in the state where the movable member 51 is not elastically deformed, the distance between the outer surfaces near the two ends of the first arm portion 516 is formed slightly larger than the inner diameter of the coil spring 52.

When the material of the movable member 51 is manufactured by etching or pressing, a copper alloy such as phosphor bronze or beryllium copper, stainless steel, or the like is assumed, and each has a certain degree of elasticity. In addition, in the case of manufacturing by MEMS technology, the material is silicon, but silicon also has some elasticity. By selecting such a material, the first slit 512 can be opened and closed within the elastic range of the first arm portion 516.

The coil spring 52 has a tightly wound portion 522 having a certain length in the vicinity of one end. The tightly wound portion 522 is a portion in which the wire forming the coil spring 52 is wound in close contact with no gap. Further, the coil spring 52 has a first coarsely wound portion 524 having a certain length in the vicinity of the other end portion. The first coarsely wound portion 524 is a portion in which the wire forming the coil spring 52 is wound at an interval so that the coil spring 52 can be compressed.

The electrode contact member 55 is made of a plate-like conductor having a substantially uniform plate thickness. The electrode contact member 55 corresponds to the auxiliary movable member of the present invention. The electrode contact member 55 includes an electrode contact portion 551 for contacting an electrode attached to an IC that is a measurement object at one end portion. Furthermore, the electrode contact member 55 includes a third flange portion 554 that protrudes from the outer side surface in the plate width direction and a second protrusion portion 555 that protrudes from the end surface of the third flange portion 554 in the vicinity of the end portion. The third flange portion 444 corresponds to the second locking portion of the present invention. The third flange portion 554 engages with the end portion of the coil spring 52 on the first rough winding portion 524 side. At least a part of the second projecting portion 555 is inserted into the inner diameter side of the end portion of the coil spring 52 that is in contact with the third flange portion 554 (that is, the side opposite to the first rough winding portion 524 side). That is, the coil spring 52 includes at least a part of the second protrusion 555 of the electrode contact member 55.

In the probe pin 5 arranged and assembled in this way, the inner surface of the two first arm portions 516 provided in the movable member 51 in the vicinity of the end portion (the outer surface side plate thickness surface) and the tightly wound portion of the coil spring 52 are arranged. Side surfaces constitute a sliding contact structure. With this sliding contact structure, the movable member 51 and the coil spring 52 can change their relative positions while maintaining electrical contact. Here, the initial shape of the first arm portion 516 is such that the distance between the outer surfaces in the vicinity of the two end portions is slightly larger than the inner diameter of the coil spring 52. A slight contact pressure is applied to the, so that the relative position can be changed while maintaining a stable electrical contact. The first arm portion 516 is formed in such a length that the tip does not contact the electrode contact member 55 when the probe pin 5 is used (when the coil spring is compressed).

The movable member 51 and the coil spring 52 elastically deform the first arm portion 516 of the movable member 51 in the plate width direction of the first arm portion 516 and slightly close the first slit 512, while making the movable member 51 the first slit. The portion extending from the end on the 512 side to the inner diameter of the end on the first rough winding portion 524 side of the coil spring 52 and the portion extending from the end on the first slit 512 side of the movable member 51 to the first flange portion 514 becomes the coil spring 52. Assembled to be included.

The movable member 51 and the coil spring 52 are not fixed and can be separated. However, when the movable member 51 and the coil spring 52 are held in the through hole of the housing, the first flange portion 514 engages with the step portion 215 in the second hole, so that it can be easily separated. Never do. Similarly, the electrode contact member 55 and the coil spring 52 can also be separated without being fixed, but when held in the through hole of the housing, the third flange portion 554 is locked to the step portion 214 in the first hole. Therefore, it is not easily separated. Thus, when the electrode contact member 55 and the coil spring 52 are not fixed, the second protrusion 555 may not be provided.

Also, the probe pin 5 according to the fourth embodiment may be configured such that the movable member 51 and the coil spring 52 are fixed to each other in an assembled state and are not easily separated. Specifically, in the same manner as the movable member 11 and the coil spring 12 are fixed in the probe pin 1 illustrated in FIG. 5, the first flange portion 514 of the movable member 51 is projected in the plate width direction from the outer surface thereof. The protruding portion 515 is provided, and the protruding portion 515 may be press-fitted into one end of the coil spring 52. Thus, when the movable member 51 and the coil spring 52 are fixed to each other, the first flange portion 514 may not be provided. In this case, the part of the through hole of the housing that is engaged with the step part 215 in the second hole becomes the end surface of the coil spring 52.

Further, similarly to the case where the movable member 11 and the coil spring 12 are fixed in the probe pin 1 illustrated in FIG. 5, a protrusion protruding in the plate width direction from the outer surface in the vicinity of the third flange portion 554 of the electrode contact member 55. The electrode contact member 55 and the coil spring 52 may be fixed to each other in a state where the electrode contact member 55 and the coil spring 52 are assembled.

[Modification of Fourth Embodiment]
In the fourth embodiment, the electrode contact member 55 is a plate-like body. However, as long as it is a conductor that conducts between the substrate contact portion 521 of the coil spring 52 and the electrode attached to the IC that is the measurement object. The shape is arbitrary and may be a three-dimensional shape such as a cylindrical body. When the electrode contact member 55 is a cylindrical body, the electrode contact portion 551 provided at one end thereof may be a three-dimensional shape such as a crown cut. In this way, the electrical contact with the electrode attached to the IC can be ensured.

Here, when the electrode contact member 55 is a cylindrical body, it is assumed that the electrode contact member 55 is manufactured by cutting, and the second projecting portion 555 is also usually processed into a cylindrical shape. Therefore, when the electrode contact member 55 and the coil spring 52 are press-fitted and fixed, a ring-shaped protrusion may be provided from the outer peripheral surface of the second projecting portion 555 in a direction orthogonal to the insertion direction into the coil spring 52. Thus, when the electrode contact member 55 and the coil spring 52 are fixed to each other, the third flange portion 554 may not be provided. In this case, a portion of the housing through-hole that engages with the first hole step 214 is an end surface of the coil spring 52.

However, although the coil spring 52 is an elastic body, its material is a rigid body, and the inner diameter of the coil spring 52 expands very slightly. Therefore, when a ring-shaped protrusion is press-fitted and fixed to the coil spring 52, the inner diameter of the coil spring 52 and the outer diameter of the ring-shaped protrusion need to be precisely managed in manufacturing, which may cause defects. There is a fear. If there is such a possibility, the shape of the second protrusion 555 of the electrode contact member 55 may be a plate as shown in FIG.

FIG. 14A is a cross-sectional view of the initial shape of the coil spring 52 of the probe pin 5 according to the modification of the fourth embodiment of the present invention, and FIG. 14B is the plate-like body of the movable member 51. 14C is a cross-sectional view in a plane parallel to the plate surface, FIG. 14C is a cross-sectional view in a plane perpendicular to the plate surface of the plate-like body of the movable member 51, and FIG. 6 is a cross-sectional view of a surface orthogonal to the insertion direction of the press-fitting portion of the contact member 55. FIG.

As shown in FIGS. 14B and 14C, if the shape of the second projecting portion 555 of the electrode contact member 55 is plate-shaped, as shown in FIG. The cross-sectional shape in the diameter direction is elastically deformed into an ellipse, and the coil spring 52 and the second projecting portion 555 of the electrode contact member 55 are press-fitted and fixed by the elastic repulsion. When the sectional shape of the coil spring 52 in the diametrical direction is elastically deformed into an ellipse, a certain amount may be plastically deformed beyond the elastic limit. If there is a slight elastic repulsive force, there is no possibility that the coil spring 52 and the electrode contact member 55 are easily separated. Further, it is more preferable that a slight taper is provided on the side surface orthogonal to the plate surface of the second projecting portion 555 as shown in FIG. The possibility that the coil spring 52 and the electrode contact member 55 are separated is further reduced.

Here, the method of processing the shape of the second projecting portion 555 of the electrode contact member 55 into a plate shape is to cut a part of the side surface (generally referred to as D-cut) after machining into a cylindrical shape by cutting. Alternatively, after processing into a cylindrical shape, it may be plastically deformed into a plate shape by pressing or the like. In the case of plastic deformation, the plate width of the second protrusion 555 after being processed into a plate shape is larger than the diameter before processing, and therefore it is desirable to keep the diameter before processing a certain amount.

As shown in FIG. 14D, when the cross-sectional shape in the diameter direction of the press-fitted portion of the coil spring 52 is elastically deformed into an ellipse, the major axis of the ellipse becomes larger than the diameter before the elastic deformation. At this time, it is desirable that the elliptical major axis is not larger than the outer diameter of the other part of the coil spring 52. Therefore, as shown in FIG. 14A, in the initial shape of the coil spring 52, it is desirable that the outer diameter in the vicinity of the end portion on the electrode contact member 55 side serving as the press-fitting portion be formed slightly smaller.

In the probe pin 5 illustrated in FIGS. 13 and 14, the outer surface near the end of the first arm portion 516 contacts the inner surface of the tightly wound portion 522 of the coil spring 52 in the assembled state. However, when the probe pin 5 is assembled, the outer surface near the end of the first arm portion 516 does not reach the tightly wound portion 522 of the coil spring 52, and the coil spring 52 is compressed and the first arm portion is compressed. You may make it contact the inner surface of the close_contact | adherence winding part 522 of the coil spring 52 in the state which 516 was pushed in the close_contact | adherence winding part 522 side of the coil spring 52. FIG.

Furthermore, in the fourth embodiment and the modified example of the fourth embodiment, the outer diameter of the first rough winding portion 524 is the same as the outer diameter of the tight winding portion 522. May be larger than the outer diameter of the tightly wound portion 522. In this case, the distance between the outer surfaces in the vicinity of the two ends of the first arm portion 516 may be formed to be at least larger than the inner diameter of the tightly wound portion 522 of the coil spring 52 and smaller than the inner diameter of the first coarsely wound portion 524. . Since the distance between the outer surfaces near the two ends of the first arm portion 516 is smaller than the inner diameter of the first coarse winding portion 524, the first arm portion 516 is separated from the end portion of the coil spring 52 on the first coarse winding portion 524 side. When inserted into the inner diameter side of the coil spring 52, the first arm portion 516 hardly interferes with the first rough winding portion 524, and the assembly is facilitated.

[Fifth Embodiment]
The probe pin 6 according to the fifth embodiment of the present invention includes a movable member 61, a coil spring 62, and an auxiliary movable member 66. 15A is a cross-sectional view of the probe pin 6 in a plane parallel to the plate surface of the plate member of the movable member 61. FIG. 15B is a cross-sectional view of the plate member of the movable member 61. It is sectional drawing in a perpendicular | vertical surface. The probe pin 6 according to the fifth embodiment is the same as the probe pin according to the first to fourth embodiments described above, since the structure, manufacturing method, and the like, which are not particularly described, are not described here.

Similar to the movable member 41 of the third embodiment, the movable member 61 includes an electrode contact portion 611, a first slit 612, a first flange portion 614, a first arm portion 616, a first extending portion 619, and the like. The The auxiliary movable member 66 has the same structure as the movable member 51 of the fourth embodiment, and has the same structure as the auxiliary substrate contact portion 661, the fourth slit 662 having the same structure as the first slit 512, and the first flange portion 514. The fourth flange portion 664, the fourth arm portion 666 having the same structure as the first arm portion 516, the second extending portion 669 having the same structure as the first extending portion 519, and the like are provided. In the probe pin 6 shown in FIG. 15, the structure of the auxiliary movable member 66 is equal to the structure of the movable member 51 of the fourth embodiment, and the structure of the fourth arm portion 666 is equal to the structure of the first arm portion 516.

The coil spring 62 of the present embodiment includes a first coarsely wound portion 624 in which a wire is wound in a compressible manner with a gap in the vicinity of one end portion. Also, in the vicinity of the other end portion, similarly to the first rough winding portion 624, a second rough winding portion 626 in which a wire is wound so as to be compressible with a gap is provided, and the first rough winding portion 624 and the second rough winding portion are provided. A tightly wound portion 622 in which a wire is tightly wound with no gap between the portion 626 is provided. That is, the coil spring 62 has a structure in which the coil spring 42 in the third embodiment and the coil spring 52 in the fourth embodiment are connected to each other at the end face on the side of the tightly wound portions (422, 522).

The movable member 61 and the coil spring 62 elastically deform the first arm portion 616 of the movable member 61 in the plate width direction, slightly close the first slit 612, and move the movable member 61 from the end on the first slit 612 side. The coil spring 62 is inserted into the inner diameter of the end portion on the first rough winding portion 624 side, and the part extending from the end portion on the first slit 612 side of the movable member 61 to the first flange portion 614 is assembled in the coil spring 62. .

Similarly, the auxiliary movable member 66 and the coil spring 62 elastically deform the fourth arm portion 666 of the auxiliary movable member 66 in the plate width direction and slightly close the fourth slit 662, while making the auxiliary movable member 66 the fourth slit. The portion extending from the end on the 662 side to the inner diameter of the end on the second coarsely wound portion 626 side of the coil spring 62 and the portion extending from the end on the fourth slit 662 side of the auxiliary movable member 66 to the fourth flange portion 664 is the coil spring 62. Assembled to be included in.

The movable member 61, the auxiliary movable member 66, and the coil spring 62 are not fixed and can be separated, but when held in the through hole of the housing, the first flange portion 614 engages with the first hole step portion 214. The fourth flange portion 664 is not easily separated by being locked to the step portion 215 in the second hole. Further, similarly to the other embodiments, the movable member 61 and the auxiliary movable member 66 may be fixed to the coil spring 62.

[Sixth Embodiment]
The probe pin 7 according to the sixth embodiment of the present invention includes a movable member 71 and a coil spring 72. The feature of the probe pin 7 of the present embodiment is that the outer diameter of the tightly wound portion of the coil spring 12 in the probe pin of the first embodiment is formed substantially the same as the outer diameter of the first coarsely wound portion, whereas the coil spring 72 The outer diameter of the tightly wound portion is smaller than the outer diameter of the first coarsely wound portion. In the following, structures, manufacturing methods, and the like that are not particularly described are the same as those of the probe pins according to the first to third embodiments described above, and thus description thereof is omitted here.

FIG. 16A is a cross-sectional view of the probe pin 7 according to the sixth embodiment of the present invention in a plane parallel to the plate surface of the plate-like body of the movable member 71, and FIG. It is sectional drawing in a surface perpendicular | vertical to the plate surface of 71 plate-shaped bodies.

The movable member 71 is made of a plate-like body having a substantially uniform plate thickness, like the movable member 11 of the first embodiment. The movable member 71 includes an electrode contact portion 711 for contacting an electrode attached to an IC that is a measurement object at one end. In addition, the movable member 71 includes a first flange portion 714 that protrudes in the plate width direction from the outer surface in the vicinity of the electrode contact portion 711.

The first extending portion 719 is provided so as to protrude from the end face of the first flange portion 714 in the direction opposite to the electrode contact portion 711. The first extending portion 719 is not provided with a slit, and has a plate width slightly smaller than the inner diameter of the first coarsely wound portion 724 included in the coil spring 72. It is preferable that the plate | board width of the 1st extending | stretching part 719 is formed larger than the internal diameter of a contact | adherence winding part. In this case, since the first extending portion 719 cannot enter the tightly wound portion 722, the tip of the first extending portion 719 (the end opposite to the first flange portion 714) functions as a stopper, and the movable member The movable range of 71 can be limited. Two first arm portions 716 protrude from the tip of the first extending portion 719. The ends of the two first arm portions 716 are not closed but are opened, and a first slit 712 is formed between the two first arm portions 716.

Here, the first arm portion 716 has a movable member 71 obtained by etching or pressing a plate material, or an initial shape of the movable member 71 obtained by the MEMS technology, as an opening portion of the first slit 712. The plate width of the movable member 71 formed by the two first arm portions 716 in the vicinity is formed to be slightly larger than the inner diameter of the tightly wound portion 722 of the coil spring 72. That is, in the state where the first arm portion 716 of the movable member 71 is not elastically deformed, the distance between the outer surfaces near the two ends of the first arm portion 716 is slightly larger than the inner diameter of the tightly wound portion 722 of the coil spring 72. Largely formed.

When the material of the movable member 71 is manufactured by etching or pressing, a copper alloy such as phosphor bronze or beryllium copper, stainless steel, or the like is assumed, and all have a certain degree of elasticity. In addition, in the case of manufacturing by MEMS technology, the material is silicon, but silicon also has some elasticity. By selecting such a material, the first slit 712 can be opened and closed within the elastic range of the first arm portion 716.

In the coil spring 72 of the present embodiment, a tightly wound portion 722 having a certain length is formed in the vicinity of one end portion. The tightly wound portion 722 is a portion in which the wire forming the coil spring 72 is wound in close contact with no gap. Further, the coil spring 72 has a first coarsely wound portion 724 having a certain length in the vicinity of the other end portion. The first coarsely wound portion 724 is a portion in which the wire forming the coil spring 72 is wound at an interval so that the coil spring 72 can be compressed. The outer diameter of the tightly wound portion 722 is formed smaller than the outer diameter of the first coarsely wound portion 724. Since the coil spring 72 is formed by winding a wire having a substantially constant wire diameter, the inner diameter of the tightly wound portion 722 is formed smaller than the inner diameter of the first coarsely wound portion 724, similar to the outer diameter.

As described above, in the state where the first arm portion 716 of the movable member 71 is not elastically deformed, the distance between the outer surfaces near the two ends of the first arm portion 716 is larger than the inner diameter of the tightly wound portion 722 of the coil spring 72. Is slightly larger than the inner diameter of the first coarsely wound portion 724. By doing in this way, the 1st arm part 716 cannot interfere with the 1st rough winding part 724 at the time of an assembly, and an assembly can be made easy.

The movable member 71 and the coil spring 72 elastically deform the first arm portion 716 of the movable member 71 in the plate width direction of the first arm portion 716 and slightly close the first slit 712, while making the movable member 71 the first slit. A portion extending from the end on the first rough winding portion 724 side of the coil spring 72 to the inner diameter of the end on the first coarse winding portion 724 side from the end on the 712 side to the first flange portion 714 on the coil slit 72 Assembled to be included.

The movable member 71 and the coil spring 72 are not fixed and can be separated. However, when the movable member 71 and the coil spring 72 are held in the through hole of the housing, the first flange portion 714 engages with the step portion 715 in the second hole, thereby easily separating. Never do.

[Modification of Sixth Embodiment]
In the sixth embodiment, the tightly wound portion 722 of the coil spring 72 has a substantially constant diameter. However, the tightly wound portion 722 has a narrow diameter portion 723 that is smaller in diameter than a portion that slides on the first arm portion 716. You may prepare. The small-diameter portion 723 is provided in the vicinity of the end of the close-contact winding portion 722 opposite to the first coarse winding portion 724. The small-diameter portion 723 has a substrate contact portion 721 for contacting the wiring substrate of the measuring device at the end opposite to the first coarsely wound portion 724. Thus, by providing the narrow diameter portion 723 at the end of the tightly wound portion 722, a stepped portion where the diameter of the tightly wound portion 722 is reduced is formed. When the probe pin 7 is disposed in the through-hole 210 of the housing 21 of the IC socket 2, the step portion can be configured to be held in the through-hole 210 by engaging with the step portion in the hole. .

Each embodiment described above and the modifications thereof are described for facilitating the understanding of the present invention, and are not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, the inspection target of the probe pin according to the present invention may be not an IC but an internal substrate (substrate) of the IC.

1, 3, 4, 5, 6, 7 Probe pins 11, 31, 41, 51, 61, 71 Movable member 66 Auxiliary movable members 111, 311, 411, 551, 611, 711 Electrode contact portions 112, 312, 412, 512, 612, 712 First slit 114, 314, 414, 515 First flange portion 115 Protruding portion 116, 416, 516, 616, 716 First arm portion 119, 419, 519, 619, 719 First extending portion 12, 32, 42, 52, 62, 72 Coil springs 121, 321, 421, 521, 721 Substrate contact portions 122, 322, 422, 522, 622, 722 Closely wound portions 123, 323, 723 Small diameter portions 124, 324, 424, 524, 624, 724 First coarse winding portion 626 Second coarse winding portion 125 Stepped portion 2 IC socket 21 Housing 2 0 Through-hole 211 First opening 212 Second opening 213 Hollow 214 First hole step 215 Second hole step 317 Second slit 318 Second arm 33 Auxiliary electrode contact member 331 Auxiliary electrode contact 332 3rd slit 333 3rd arm part 334 2nd flange part 335 1st protrusion part 44 Auxiliary board contact member 55 Electrode contact members 441, 511, 661 Auxiliary board contact part 662 4th slit 666 4th arm part 669 2nd extension part 444, 554 Third flange portion 445, 555 Second protrusion 1000 Inspection substrate 2000 IC

Claims

A movable member having one end of an electrode contact portion for contacting a measurement target electrode which is an electrode attached to the measurement target and an auxiliary substrate contact portion for contacting a wiring board of the measurement device;
An auxiliary movable member having the other of the electrode contact portion and the auxiliary substrate contact portion at one end;
Close contact winding in which a wire rod is wound in a vicinity of one end so as to be compressible with a gap, and the wire rod is wound in close contact with the first coarse winding portion without a gap. A probe pin comprising: a coil spring having a portion;
The movable member is
It is a plate-like body having two first arm portions that are opposed to each other across the first slit having the other end opened and elastically deformable in the direction of narrowing the first slit,
In a state where the first arm portion is not elastically deformed, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion is formed larger than the inner diameter of the tightly wound portion of the coil spring,
In the vicinity of the one end, a first locking portion that locks to the end of the coil spring on the first rough winding portion side,
In a state where the two first arm portions are elastically deformed in the direction of narrowing the first slit, the end portion of the coil spring on the inner diameter side of the coil spring from the end portion on the first coarse winding portion side of the coil spring. Until the first locking portion is locked to the end of the coil spring on the first coarse winding side,
The auxiliary movable member is locked to an end portion of the coil spring opposite to the first rough winding portion side,
The probe pin, wherein an outer surface near the end of the first arm portion and an inner surface of the coil spring can change a relative position while maintaining electrical contact.
2. The probe pin according to claim 1, wherein a plate width of a base portion of the first arm portion is formed in a range from about the same as the plate thickness to 1/2 of the plate thickness.
2. The probe pin according to claim 1, wherein the outer surface of the first arm portion has a gently arcuate protruding portion.
The movable member includes a protrusion that protrudes in the width direction of the plate from the outer surface in the vicinity of the first locking portion, and presses the protrusion into the end of the coil spring on the first rough winding portion side. The probe pin according to claim 1, wherein the probe pin is fixed to the coil spring.
The movable member and the coil spring elastically deform the first arm portion of the movable member in the plate width direction, close the first slit, and move the movable member from the end on the first slit side. The coil spring is inserted into the inner diameter of the end portion on the first rough winding portion side, and is assembled so that a portion from the end portion on the first slit side of the movable member to the first locking portion is included in the coil spring. The probe pin according to claim 1, wherein:
The auxiliary movable member includes a second locking portion that protrudes in a direction perpendicular to the insertion direction into the coil spring and that locks at an end opposite to the first coarse winding portion of the coil spring. The probe pin according to claim 1.
The auxiliary movable member includes a protruding portion that protrudes from an end surface of the second locking portion, and at least a part of the protruding portion is an inner diameter of an end portion of the coil spring opposite to the first rough winding portion side. The probe pin according to claim 6, wherein the probe pin is inserted to the side.
The auxiliary movable member includes a protruding portion that protrudes in a direction orthogonal to the insertion direction into the coil spring in the vicinity of the second locking portion, and the protruding portion is opposite to the first coarsely wound portion side of the coil spring. The probe pin according to claim 6 or 7, wherein the auxiliary movable member and the coil spring are fixed to each other in a state where the auxiliary movable member and the coil spring are assembled by press-fitting into a side end portion.
The probe pin according to claim 1, wherein the coil spring is formed so that an outer diameter of the tightly wound portion is substantially the same as an outer diameter of the first coarsely wound portion.
The probe pin according to claim 1, wherein the coil spring is formed such that an outer diameter of the tightly wound portion is smaller than an outer diameter of the first coarsely wound portion.
In a state where the first arm portion is not elastically deformed, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion is smaller than the inner diameter of the first coarsely wound portion of the coil spring. The probe pin according to claim 10, wherein:
The probe pin according to claim 1, wherein the auxiliary movable member is a plate-like body.
The probe pin according to claim 1, wherein the auxiliary movable member is a cylindrical body.
The coil spring has a second coarsely wound portion in which a wire is wound in a compressible manner with a gap in the vicinity of the other end,
The auxiliary movable member is a plate-like body having an arm portion having a structure common to the first arm portion, and a slit having a structure common to the first slit,
The auxiliary movable member is inserted into an inner diameter side of the coil spring from an end portion of the second coarsely wound portion side of the coil spring in a state where the two arm portions are elastically deformed in a direction of narrowing the slit,
2. The relative position of the outer side surface near the end of the arm portion of the auxiliary movable member and the inner side surface of the coil spring can be changed while maintaining electrical contact. Probe pins as described in 1.
The auxiliary movable member includes a second locking portion that protrudes from the outer side surface in the plate width direction and locks to an end opposite to the first coarse winding portion of the coil spring.
The auxiliary movable member and the coil spring elastically deform the arm portion of the auxiliary movable member in the plate width direction, and close the slit of the auxiliary movable member, while moving the auxiliary movable member from the end on the slit side. The coil spring is inserted into the inner diameter of the end portion on the second coarsely wound portion side and assembled so that the portion from the end portion on the slit side of the auxiliary movable member to the second locking portion is included in the coil spring. The probe pin according to claim 14, wherein:
The movable member has an electrode contact portion at one end for contacting a measurement target electrode that is an electrode attached to the measurement target;
2. The probe pin according to claim 1, wherein the auxiliary movable member has an auxiliary substrate contact portion at one end for contacting an inspection substrate which is a wiring substrate of the measuring apparatus.
The movable member has an auxiliary substrate contact portion at one end for contacting an inspection substrate which is a wiring substrate of the measuring device,
The probe pin according to claim 1, wherein the auxiliary movable member has an electrode contact portion at one end for contacting a measurement target electrode that is an electrode attached to the measurement target.
A movable member having at one end an electrode contact portion for contacting a measurement target electrode that is an electrode attached to the measurement target;
A coil spring having a coarsely wound portion in which a wire rod is wound so as to be compressible with a gap in the vicinity of one end, and a tightly wound portion in which the wire rod is closely wound and wound without any gap adjacent to the coarsely wound portion. A probe pin comprising:
The movable member is
It is a plate-like body having two first arm portions that are opposed to each other across the first slit having the other end opened and elastically deformable in the direction of narrowing the first slit,
In a state where the first arm portion is not elastically deformed, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion is formed larger than the inner diameter of the tightly wound portion of the coil spring,
In the vicinity of the electrode contact portion, provided with a locking portion that locks to the end of the coil spring on the rough winding portion side,
In a state where the two first arm portions are elastically deformed in the direction of narrowing the first slit, the engagement of the movable member extends from the end portion on the coarse winding portion side of the coil spring to the inner diameter side of the coil spring. Inserted until the stop is locked to the end of the coil spring on the coarse winding side,
The probe pin, wherein an outer surface near the end of the first arm portion and an inner surface of the coil spring can change a relative position while maintaining electrical contact.
19. The probe pin according to claim 18, wherein a plate width of a base portion of the first arm portion is formed in a range from about the plate thickness to 1/2 of the plate thickness.
19. The probe pin according to claim 18, further comprising a gently arcuate protrusion on an outer surface of the first arm portion.
The movable member includes a protrusion protruding from the outer surface of the movable member in the plate width direction, and is fixed to the coil spring by press-fitting the protrusion into an end of the coil spring on the rough winding portion side. The probe pin according to claim 18.
The movable member and the coil spring elastically deform the first arm portion of the movable member in the plate width direction, close the first slit, and move the movable member from the end on the first slit side. The coil spring is inserted into the inner diameter of the end portion on the rough winding portion side and assembled so that a portion from the end portion on the first slit side of the movable member to the locking portion is included in the coil spring. The probe pin according to claim 18.
The probe pin according to claim 18, wherein the coil spring is formed so that an outer diameter of the tightly wound portion is substantially the same as an outer diameter of the coarsely wound portion.
The probe pin according to claim 18, wherein the coil spring is formed such that an outer diameter of the tightly wound portion is smaller than an outer diameter of the coarsely wound portion.
In the state where the first arm portion is not elastically deformed, the distance between the outer surfaces in the vicinity of the two end portions of the first arm portion is smaller than the inner diameter of the rough winding portion of the coil spring. The probe pin according to claim 24.
The movable member has a plate-like extending portion that has a plate width smaller than the inner diameter of the coarsely wound portion and larger than the inner diameter of the tightly wound portion and protrudes from the end surface of the locking portion in the insertion direction into the coil spring. With
The probe pin according to claim 24, wherein the first arm portion protrudes from an end portion of the extending portion opposite to the locking portion.
The probe pin according to claim 18, wherein the tightly wound portion further includes a narrow-diameter portion that is smaller in diameter than a portion that slides with the first arm portion.
28. The probe pin according to claim 27, wherein the narrow-diameter portion has a substrate contact portion for contacting a wiring substrate of a measuring device at an end opposite to the coarsely wound portion.