JP6515516B2 - Probe pin and electronic device provided with the same - Google Patents

Description

  The present invention relates to a probe pin and an electronic device provided with the probe pin.

  In a semiconductor device, an LSI (Large Scale Integration), or the like, in the manufacturing process, a conduction test is performed using an electronic device provided with a probe pin, and it is confirmed whether or not it functions properly. Generally, a so-called linear probe pin, in which the contacts at both ends reciprocate along the same straight line, is used for the electronic device used for the conduction test.

  By the way, the above-mentioned energization test is performed by electrically connecting an inspection object such as a semiconductor device and the inspection apparatus with a probe pin. However, with the diversification of inspection devices and inspection objects, it has been difficult to connect inspection objects and inspection devices linearly, and in many cases it has been difficult to cope with linear probe pins. As a method for solving such a problem, a so-called offset type probe pin is proposed, in which the contact points at both ends respectively reciprocate along different straight lines.

  As said offset type probe pin, there exist some which were described in patent document 1, for example. The probe pin includes a contact portion in contact with the external terminal, a bellows-shaped elastic portion continuous with the contact portion, a connection portion continuous with the elastic portion, and a connection terminal provided in the connection portion. Then, the connection terminals are offset, that is, shifted, via the connection portions so that the contact portions and the connection terminals do not reciprocate on the same straight line.

JP 2004-138405 A

  However, in the above-described probe pin, the distance between the elastic portions is narrow when the size is reduced, and the elastic portion becomes long if a sufficient stroke is to be obtained.

  An object of the present invention is to provide a probe pin suitable for miniaturization, and an electronic device provided with the probe pin, in view of the above-mentioned problems.

  In order to solve the above problems, a probe pin according to the present invention includes at least one coil spring extending and contracting along a center line, a first contact point arranged on a first straight line parallel to the center line, and the center And a second contact point arranged on a second straight line corresponding to the line, wherein the first and second contact points are supported so as to be reciprocally movable via a spring force of the coil spring and directly to each other It is conducting.

  According to the probe pin of the present invention, at least one coil spring extending and contracting along the center line, a first contact point disposed on a first straight line parallel to the center line, and a second straight line coinciding with the center line And the first and second contacts are reciprocably supported via the spring force of the coil spring and are in direct electrical communication with each other. Thereby, the probe pin suitable for miniaturization can be obtained.

  As an embodiment of the present invention, one of the coil spring, a first insertion portion provided along the second straight line and inserted into one end of the coil spring, and a first contact portion having the first contact An intermediate portion connected to intersect the first insertion portion and the first contact portion, and one end of the coil spring in the center line direction provided between the first insertion portion and the intermediate portion. A first plunger having a supporting portion in contact, a second insertion portion inserted along the second straight line and inserted into the other end of the coil spring, a second contact portion having the second contact, and It is good also as composition provided with the 2nd plunger which has a supporter provided between the 2nd insertion part and the 2nd contact part, and contacts the other end of the direction of a center line of the above-mentioned coiled spring.

  According to the present embodiment, the first plunger has the intermediate portion connected to intersect the first insertion portion and the first contact portion. Thereby, the probe pin suitable for miniaturization can be obtained.

  As an embodiment of the present invention, the first insertion portion and the first contact portion may intersect with the middle portion at an angle larger than 0 degrees and 45 degrees or less.

  According to the present embodiment, when the probe pin is housed in the housing of the inspection unit as compared to the probe pin in which the first insertion portion and the first contact portion and the middle portion intersect at an angle larger than 45 degrees In addition, it is possible to narrow the spacing that can be arranged without interfering with other adjacent probe pins. In addition, when the first plunger is pressed toward the inside of the housing in a state of being housed in the housing of the inspection unit, the load on the first plunger can be reduced, and a probe pin having the designed operating characteristics can be obtained.

  In an embodiment of the present invention, the intermediate portion may have a curved shape.

  According to the present embodiment, the intermediate portion can be configured in a curved shape. Therefore, the degree of freedom in design of the probe pin can be expanded.

  As an embodiment of the present invention, it is provided with first and second coil springs that extend and contract along two parallel center lines, and the center line of the first coil spring is the first straight line, and the second coil The center line of the spring may be the second straight line.

  According to the present embodiment, since two coil springs are provided, a high spring load can be obtained as compared to a probe pin having one coil spring.

  As an embodiment of the present invention, a first insertion portion provided along the first straight line and inserted into one end of the first coil spring, and a first contact point disposed on the first straight line A first plunger having a first contact portion, a support portion provided between the first insertion portion and the first contact portion and in contact with one end of the first coil spring in the direction of the center line, and the second straight line And a second contact portion having the second contact point disposed on the second straight line, the second insertion portion, and the second insertion portion. A second plunger provided between the second contact portion and a support portion contacting with one end of the second coil spring in the direction of the center line, and the other of the first coil spring provided along the first straight line A third insertion portion inserted into the end, and the second insertion portion provided along the second straight line; A third plunger including a fourth insertion portion inserted into the other end of the coil spring, and an intermediate portion connected to intersect the third insertion portion and the fourth insertion portion. It is also good.

  According to the present embodiment, the third insertion portion provided along the first straight line and inserted into the other end of the first coil spring, and the second insertion along the second straight line are inserted into the other end of the second coil spring And a third plunger having a fourth insertion portion and an intermediate portion connected to the third insertion portion and the fourth insertion portion so as to obliquely intersect. Thereby, the probe pin suitable for miniaturization can be obtained.

  As an embodiment of the present invention, the third insertion portion and the fourth insertion portion may intersect with the middle portion at an angle larger than 0 degrees and 45 degrees or less.

  According to the present embodiment, when the probe pin is housed in the housing of the inspection unit as compared to the probe pin in which the third insertion portion and the fourth contact portion and the middle portion intersect at an angle larger than 45 degrees In addition, it is possible to narrow the spacing that can be arranged without interfering with other adjacent probe pins. In addition, when the first and second plungers are pressed toward the inside of the housing in a state of being housed in the housing of the inspection unit, the load applied to the third plunger can be reduced, and a probe pin having an operating characteristic as designed is obtained. Can.

  As an embodiment of the present invention, the plunger may be configured to have higher rigidity than the coil spring.

  According to this embodiment, it is possible to obtain a probe pin having the designed operating characteristics.

  As an embodiment of the present invention, the plunger may be formed by electroforming.

  According to this embodiment, a probe pin suitable for miniaturization can be easily obtained.

  Further, the electronic device according to the present invention includes the probe pin and a housing capable of housing the probe pin, and the first and second plungers are biased to the housing by the coil spring.

  According to the electronic device of the present invention, an electronic device provided with probe pins suitable for miniaturization can be obtained.

It is a perspective view of an example of the inspection unit provided with the probe pin of a 1st embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is sectional drawing along the III-III line of FIG. It is a perspective view of the probe pin of 1st Embodiment of this invention. FIG. 5 is a view on arrow V of the probe pin shown in FIG. 4; It is VI arrow directional view of the probe pin shown in FIG. It is a disassembled perspective view of the probe pin shown in FIG. It is a perspective view of an example of the inspection unit provided with the probe pin of a 2nd embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 2nd Embodiment of this invention. It is XI arrow line view of the probe pin shown in FIG. It is an XII arrow line view of the probe pin shown in FIG. It is a disassembled perspective view of the probe pin shown in FIG. It is a perspective view of an example of the inspection unit provided with the probe pin of a 3rd embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 3rd Embodiment of this invention. It is an XVII arrow line view of the probe pin shown in FIG. It is an XVIII arrow line view of the probe pin shown in FIG. FIG. 17 is an exploded perspective view of the probe pin shown in FIG. 16; It is a perspective view of an example of the inspection unit provided with the probe pin of a 4th embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. FIG. 21 is a cross-sectional view along a line XXII-XXII shown in FIG. 20. It is a perspective view of the probe pin of 4th Embodiment of this invention. It is an XXIV arrow line view of the probe pin shown in FIG. It is an XXV arrow line view of the probe pin shown in FIG. It is a disassembled perspective view of the probe pin shown in FIG. It is a perspective view of an example of the inspection unit provided with the probe pin of a 5th embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 5th Embodiment of this invention. FIG. 30 is a view on arrow XXX of the probe pin shown in FIG. 29. It is an XXXI arrow line view of the probe pin shown in FIG. FIG. 30 is an exploded perspective view of the probe pin shown in FIG. 29.

  Hereinafter, an embodiment of an inspection unit provided with a probe pin of the present invention will be described with reference to the attached drawings. In the following description, in describing the configuration shown in the drawings, terms indicating directions such as "upper," "lower," "left," "right," etc. and other terms including those are used. However, the purpose of using these terms is to facilitate the understanding of the embodiments through the drawings. Therefore, those terms are not limited to those indicating the direction in which the embodiment of the present invention is actually used, and these terms limit interpretation of the technical scope of the invention described in the claims. It should not be done.

First Embodiment
FIG. 1 is a perspective view of an example of an inspection unit provided with a probe pin according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing a state in which a part of the inspection unit shown in FIG. 3 is a cross-sectional view taken along the line III-III of FIG.

  As shown in FIGS. 1 to 3, the inspection unit 1 as an example of the electronic device includes a housing and the probe pin 30 of the first embodiment housed in the housing. The housing is composed of a housing body 10 and a housing cover 20 covering the housing body 10, and a probe pin 30 is accommodated in the housing body 10.

  As shown in FIG. 2, the housing body 10 has a planar shape in which a square corner is chamfered in a top view. A recess 11 is provided substantially at the center of the top surface of the housing body 10.

  A plurality of storage portions 12 for storing the probe pins 30 are provided on the bottom surface of the recess 11. The storage portion 12 has a circular shape in a plan view as viewed from the upper surface of the housing main body 10, and is disposed apart from each other along the X and Y directions shown in FIG. Further, contact openings 13 for projecting one end of the probe pin 30 are provided on the bottom surface of the housing 12 respectively. The contact opening 13 has a diameter smaller than that of the housing 12 in top view. Note that the X direction is a direction parallel to one side of the housing main body 10 in top view, and the Y direction is a direction orthogonal to the X direction.

  The housing cover 20 has the same planar shape as the housing body 10 in top view as shown in FIG. As shown in FIG. 3, the housing cover 20 is provided with a recess 21 substantially at the center of the bottom surface thereof.

  The recess 21 has an opening of the same shape as the recess 11 of the housing body 10, and is arranged to coincide with the recess 11 of the housing body 10 in a state where the housing cover 20 is attached to the housing body 10. Further, a plurality of contact openings 22 for projecting the other end of the probe pin 30 are provided on the bottom surface of the recess 21. The contact openings 22 are spaced apart from each other along the X and Y directions shown in FIG. 2 in the same manner as the housing 12 of the recess 11 of the housing body 10. Further, as shown in FIG. 3, in the state where the contact cover 22 is attached to the housing main body 10, a straight line perpendicular to the top surface of the housing cover 20 passing through the center of the contact cover 22 is the housing main body 10. It is disposed parallel to a straight line perpendicular to the bottom surface of the housing body 10 through the center of the contact opening 13 provided on the bottom surface of the housing 10 and having a distance L1.

  FIG. 4 is a perspective view of the probe pin 30 of the first embodiment. 5 is a view on arrow V of the probe pin of FIG. 4 and FIG. 6 is a view on arrow VI of the probe pin of FIG. FIG. 7 is an exploded perspective view of the probe pin of FIG.

  The probe pin 30 according to the first embodiment includes a first plunger 40, a second plunger 50, and a coil spring 60, as shown in FIGS. The first and second plungers 40 and 50 each have conductivity, and are formed, for example, by electroforming.

  As shown in FIG. 7, the first plunger 40 has a pinched portion 41, an intermediate portion 42 continuous to the pinched portion 41, and a contact portion 43 continuous to the intermediate portion, and is substantially the same. Of thickness H1. The supported portion 41 is an example of a first insertion portion, and the contact portion 43 is an example of a first contact portion.

  The held portion 41 has a rectangular flat plate shape, and a rectangular guide groove 44 is provided on the wide surface thereof. The guide groove 44 extends from the tip end (lower end in FIG. 7) of the held portion 41 to the base end (upper end in FIG. 7) continuous with the middle portion 42. Further, as shown in FIG. 7, the guide groove 44 has a width W <b> 7 larger than the thickness H <b> 2 of the second plunger 50.

  The intermediate portion 42 extends in the direction of 45 degrees with respect to the longitudinal direction of the clamped portion 41. That is, as shown in FIG. 5, the center line A1 of the held portion 41 and the center line A2 of the middle portion 42 form an angle of θ1 = 45 degrees. A coil spring support 45 as an example of a support that contacts one end (the upper end in FIG. 7) of the coil spring 60 is provided on the side of the intermediate portion 42 to be held. The coil spring support portion 45 has a width W2 larger than the width W1 of the held portion 41. Further, a housing support portion 47 is provided on the contact portion 43 side of the intermediate portion 42. As shown in FIG. 3, the housing support portion 47 protrudes from both sides in the direction of the width W 3 of the contact portion 43 and has a width W 6 larger than the diameter of the contact opening 22 of the housing cover 20. The center line A1 of the held portion 41 coincides with the center line of the coil spring 60.

  The contact portion 43 has a substantially rectangular flat plate shape, and a contact 46 having an inverted V shape as an example of the first contact is provided at the tip thereof. The contact portion 43 extends in parallel with the longitudinal direction of the clamped portion 41 and in the direction of 45 degrees with respect to the longitudinal direction of the intermediate portion 42. That is, as shown in FIG. 5, the center line A1 of the held portion 41 and the center line A3 of the contact portion 43 are parallel, and the center line A2 of the middle portion 42 and the center line A3 of the contact portion 43 are , And the intermediate portion 42 is connected so as to obliquely intersect the held portion 41 and the contact portion 43. The width W3 of the contact portion 43 shown in FIG. 7 has substantially the same dimension as the width W1 of the held portion 41.

  As shown in FIG. 7, the second plunger 50 has a contact portion 51 and first and second elastic pieces 52 and 53 provided at the base end (upper end in FIG. 7) of the contact portion 51. , And have substantially the same thickness H2. The contact portion 51 is an example of a second contact portion, and the first and second elastic pieces 52 and 53 are an example of a second insertion portion.

  The contact portion 51 has a substantially rectangular flat plate shape, and a contact 54 having a V shape as an example of a second contact is provided at the tip (the lower end in FIG. 7) of the contact portion 51. Further, at the base end of the contact portion 51, coil spring support portions 55 for supporting the coil spring 60 are provided to protrude on both sides in the width W4 direction of the contact portion 51.

  The contact point 54 of the contact portion 51 is disposed on the center line A <b> 1 of the clamped portion 41 of the first plunger 40. That is, as shown in FIG. 5, the contact 46 of the first plunger 40 as the first contact is disposed on the center line A3 of the contact portion 43 which is the first straight line parallel to the center line of the coil spring 60. The contact point 54 of the second plunger 50 as a second contact point is disposed on a center line A1 of the contact portion 51 which is a second straight line coinciding with the center line of the spring 60.

  The first and second elastic pieces 52 and 53 extend in parallel with each other at an interval from the base end (upper end in FIG. 7) of the contact portion 51 along the longitudinal direction of the contact portion 51. The first and second elastic pieces 52 and 53 are disposed at both ends in the direction of the width W4 of the base end of the contact portion 51 so as to have an interval larger than the thickness H1 of the first plunger 40. That is, in the width W4 direction of the contact portion 51, the distance between the outward facing surfaces of the first and second elastic pieces 52, 53 is substantially equal to the width W4 of the contact portion 51, and the distance between the inward facing surfaces is the first plunger 40. It is provided to be larger than the thickness H1 of Furthermore, the first and second elastic pieces 52 and 53 have different lengths, and the first elastic piece 52 is shorter than the second elastic piece 53.

  At the tip of the first elastic piece 52, a guide protrusion 56 is provided so as to protrude toward the second elastic piece 53. In addition, a contact protrusion 57 is provided at a tip of the second elastic piece 53 so as to protrude toward the first elastic piece 52. The contact projection 57 is disposed so as to always contact the pinched portion 41 of the first plunger 40 in a state where the guide projection 56 of the first elastic piece 52 is fitted in the guide groove 44 of the first plunger 40. ing.

  The coil spring 60 is made of, for example, carbon steel or stainless steel, and as shown in FIGS. 5 and 6, the width W1 (shown in FIG. 7) of the gripped portion 41 of the first plunger 40 and the second plunger 50. It has an inner diameter slightly larger than the width W4 (shown in FIG. 7). Further, the coil spring 60 has a width W2 (shown in FIG. 7) of the coil spring support 45 of the first plunger 40 and a width W5 of a portion where the coil spring support 55 of the second plunger 50 is provided (see FIG. 7), and have substantially the same outer diameter.

  The coil spring 60 is compressed in the state shown in FIG. 3, ie, in the initial state in which the first plunger 40 and the second plunger 50 are combined with each other and stored in the housing of the inspection unit 1. The spring length is adjusted.

  Next, the assembly process of the test | inspection unit 1 provided with the probe pin 30 of 1st Embodiment is demonstrated.

  First, the probe pin 30 is assembled. First, the first plunger 40 is inserted from the one end side of the coil spring 60 into the inside of the coil spring 60 from the side of the supported portion 41, and the other side of the coil spring 60 into the inside of the coil spring 60. Is inserted from the first and second elastic pieces 52, 53 side. At this time, as shown in FIG. 6, the first and second plungers 40 and 50 are inserted such that the wide surface of the first plunger 40 and the wide surface of the second plunger 50 are orthogonal to each other.

  When the first and second plungers 40 and 50 are inserted into the inside of the coil spring 60, the pinched portion 41 of the first plunger 40 is between the first and second elastic pieces 52 and 53 of the second plunger 50. The inserted portion 41 is held between the first elastic piece 52 and the second elastic piece 53. Then, when the first and second plungers 40 and 50 are further inserted into the coil spring 60, the guide projections 56 of the second plunger 50 are fitted in the guide grooves 44 of the first plunger 40, and the first , The second plungers 40, 50 are connected. Thereby, the assembly of the probe pin 30 is completed. In the probe pin 30 in the assembled state, the contact protrusion 57 of the second elastic piece 53 of the second plunger 50 is the proximal end side (upper side of the guide groove 44 in FIG. 7) of the pinched portion 41 of the first plunger 40. I am always in touch.

  When the assembly of the probe pin 30 is completed, the probe pin 30 is inserted into the housing portion 12 of the housing body 10 from the second plunger 50 side. Thereafter, the process of assembling the probe pin 30 and the process of inserting the assembled probe pin 30 into the housing portion 12 of the housing body 10 are repeated, and the probe pins 30 are inserted into all the housing portions 12 of the housing body 10 The housing cover 20 is attached to the housing body 10, and the assembly process of the inspection unit 1 is completed.

  Subsequently, the operation of the probe pin 30 housed in the inspection unit 1 will be described.

  In the probe pin 30 in the initial state, as shown in FIG. 3, the contact 46 of the first plunger 40 protrudes from the contact opening 22 of the housing cover 20, and the contact 54 of the second plunger 50 is the contact opening 13 of the housing body 10. In the state of protruding from the housing of the inspection unit 1. In this initial state, the first plunger 40 is pressed against the housing cover 20 via the housing support portion 47 by receiving the return force of the coil spring 60 by the coil spring support portion 45. Further, the second plunger 50 receives the return force of the coil spring 60 by the coil spring support 55 and is pressed against the housing main body 10 via the coil spring support 55.

  The center line A3 of the contact portion 43 of the first plunger 40 passes through the center of the contact opening 22 of the housing cover 20 and coincides with a straight line orthogonal to the top surface of the housing cover 20. The center line A1 of the portion 41 (the contact portion 51 of the second plunger 50) passes through the center of the housing portion 12 of the housing body 10 and coincides with a straight line orthogonal to the bottom surface of the housing body 10.

  When the contact points 46 and 54 of the first and second plungers 40 and 50 are pressed and the first and second plungers 40 and 50 are pushed into the housing of the inspection unit 1, the guide projections of the first elastic piece 52 56 starts sliding movement along the guide groove 44 of the first plunger 40. At this time, the contact 46 of the first plunger 40 moves along the center line A3 of the contact portion 43, and the contact 54 of the second plunger 50 moves along the center line A1 of the contact 51. Further, the force applied to the first and second plungers 40 and 50 is transmitted to the coil spring 60 through the coil spring support 45 of the first plunger 40 and the coil spring support 55 of the second plunger 50. , Compressed.

  When the first and second plungers 40 and 50 are further pushed into the housing of the inspection unit 1, the guide groove 44 of the first plunger 40 and the guide projection 56 of the second plunger 50 contact each other, or the first plunger The contact 46 of 40 and the contact 54 of the second plunger 50 are pushed into the housing, and the sliding movement of the first and second plungers 40, 50 is stopped. Thereafter, when the force applied to the contact points 46 and 54 of the first and second plungers 40 and 50 is released, the return force of the coil spring 60 causes the first plunger 40 to move toward the housing cover 20. Are respectively urged toward the housing body 10 to return to the initial state shown in FIG. Thus, the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are supported so as to be capable of reciprocating through the spring force of the coil spring 60.

  In the probe pin 30 of the first embodiment, the first and second plungers 40 and 50 each have rigidity higher than that of the coil spring 60, and the amount of movement of the first and second plungers 40 and 50 is a coil spring. Absorbed by 60. Therefore, even if the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are not on the same straight line, the force applied to the contacts 46 and 54 can be transmitted to the coil spring 60 as it is.

  The angles θ1 and θ2 formed by the center line A1 of the held portion 41 and the center line A3 of the contact portion 43 and the center line A2 of the middle portion 42 are preferably greater than 0 degree and 45 degrees or less. When the angles θ1 and θ2 formed by the center line A1 of the held portion 41 and the center line A3 of the contact portion 43 and the center line A2 of the middle portion 42 exceed 45 degrees, the first plunger is pressed toward the inside of the housing Sometimes, the load (bending moment) applied to the first plunger 40 is increased. For this reason, there is a possibility that the connection portion between the clamped portion 41 and the middle portion 42 is deformed, and the first plunger and the surface of the concave portion of the housing main body are in contact, and a load necessary for design of the probe pin can not be obtained. Becomes higher.

  In the first plunger 40 of the probe pin 30 of the first embodiment, the center line A1 of the held portion 41 and the center line A3 of the contact portion 43 are parallel, and the center line A1 of the held portion 41 and the center line The center line A3 of the contact portion 43 and the center line A2 of the middle portion 42 form an angle of 45 degrees. Therefore, when the first plunger 40 is pressed into the housing, the load applied to the first plunger 40 can be reduced, and the contact between the first plunger 40 and the surface of the recess 11 of the housing body 10 can be avoided. Thereby, the probe pin 30 having the designed operating characteristics can be obtained. In addition, for example, compared with the case where the center line A1 of the held portion 41 and the center line A3 of the contact portion 43 and the center line A2 of the middle portion 42 form an angle of 90 degrees, When housed in one housing, it is possible to narrow the space that can be arranged without interfering with the other adjacent probe pins 30.

  Further, with the probe pin 30 in a state where the guide projection 56 of the second plunger 50 is fitted into the guide groove 44 of the first plunger 40, the contact projection 57 of the second elastic piece 53 of the second plunger 50 is It always contacts with the base end side (upper side of the guide groove 44 of FIG. 7) of the to-be-held part 41 of the 1st plunger 40. As shown in FIG. Therefore, high contact stability can be obtained between the first and second plungers 40 and 50.

  Further, the movement of the first and second plungers 40 and 50 is performed by the sliding movement of the guide projection 56 of the second plunger 50 along the guide groove 44. For this reason, the contact position which the to-be-held part 41 of the 1st plunger 40 and the contact projection 57 of the 2nd plunger 50 contact can be detected correctly.

  Further, in the probe pin 30 of the first embodiment, the coil spring 60 causes the contacts 46 and 54 of the first and second plungers 40 and 50 to return to the initial state shown in FIG. 3. For this reason, even if the probe pin 30 is miniaturized, it is easy to obtain the spring load necessary for the design of the probe pin 30. Furthermore, since the conduction path between the first and second plungers 40 and 50 can be shortened, the resistance at the time of conduction can be reduced compared to a probe pin having a bellows-shaped elastic portion.

Second Embodiment
8 to 13 are diagrams showing an example of the inspection unit 201 including the probe pin 230 of the second embodiment and the probe pin 230 of the second embodiment. In the second embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted, and only differences from the first embodiment will be described. The inspection unit 201 is an example of an electronic device.

  In the probe pin 230 of the second embodiment, as shown in FIGS. 10 to 13, the middle portion 242 of the first plunger 140 extends in the direction of 90 degrees with respect to the longitudinal direction of the clamped portion 41, and The contact portion 43 is different from the probe pin 30 of the first embodiment in that the contact portion 43 extends in the direction of 90 degrees with respect to the longitudinal direction of the intermediate portion 142. That is, in the probe pin 230, the center line A1 of the held portion 41 and the center line A4 of the middle portion 242 form an angle of θ1 = 90 degrees, and the center line A4 of the middle portion 242 and the center line A3 of the contact portion 43. Are configured to form an angle of θ2 = 90 degrees.

  As described above, since the first plunger 240 has the intermediate portion 242 where θ1 = 90 degrees and θ2 = 90 degrees, the first plunger 240 suppresses the length L3 of the probe pin 230 shown in FIG. The distance L4 between the contact point 46 of 240 and the contact point 54 of the second plunger 50 can be increased.

  In the probe pin 230 of the second embodiment, the first plunger 140 has conductivity, and is formed by, for example, electroforming.

  Further, in the probe pin 230 of the second embodiment, in the initial state in which the probe pin 230 is housed in the housing of the inspection unit 201, the intermediate portion 242 contacts the housing cover 20. That is, the first plunger 240 receives the return force of the coil spring 60 and is pressed against the housing cover 20 via the intermediate portion 242. For this reason, the structure equivalent to the housing support part 47 of the probe pin 30 of 1st Embodiment is not provided.

Third Embodiment
FIGS. 14-19 is a figure which shows an example of the test | inspection unit 301 provided with the probe pin 330 of 3rd Embodiment, and the probe pin 330 of 3rd Embodiment. In the third embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted, and only differences from the first embodiment will be described. The inspection unit 301 is an example of an electronic device.

  In the probe pin 330 of the third embodiment, as shown in FIGS. 16 to 19, the middle portion 342 of the first plunger 340 has a wave-like planar shape in the XVII view of FIG. It differs from the one embodiment.

  The intermediate portion 342 is configured of a first bending portion 347 continuous with the held portion 41 and a second bending portion 348 continuous with the first bending portion 347 and continuous with the contact portion 43. In the first and second curved portions 347 and 348, the vertex P1 of the first curved portion 347 and the vertex P2 of the second curved portion 348 in the Z direction shown in FIG. It is configured to be located between the support portion 47 and the support portion 47.

  Thus, since the apexes P1 and P2 of the first and second curved portions 347 and 348 are disposed between the housing support portion 47 and the coil spring support portion 45, the contact point 46 of the first plunger 340 is pressed. When the first plunger 340 is pushed into the housing of the inspection unit 301, even if the intermediate portion 342 is elastically deformed, the recess 11 of the housing body 10 or the surface of the recess 21 of the housing cover 20 and the intermediate portion 342 It is possible to avoid contact with the

  In the probe pin 330 of the third embodiment, the first plunger 340 has conductivity, and is formed by, for example, electroforming.

Fourth Embodiment
FIGS. 20 to 26 are diagrams showing an example of the inspection unit 401 provided with the probe pin 430 of the fourth embodiment and the probe pin 430 of the fourth embodiment. In the fourth embodiment, the same reference numerals as in the first embodiment denote the same parts, and a description thereof will be omitted. A difference from the first embodiment will be described. The inspection unit 401 is an example of an electronic device.

  The inspection unit 401 includes a housing body 10, a housing cover 420 covering the housing body 10, and a probe pin 430 of the fourth embodiment housed in the housing body 10, as shown in FIGS. There is. The housing body 10 and the housing cover 420 constitute a housing.

  The housing cover 420 has the same planar shape as the housing body 10 in top view as shown in FIG. As shown in FIG. 22, the housing cover 420 has a plurality of housing portions 423 for housing the probe pins 430 substantially at the center of the bottom surface. The housing portion 423 has a circular shape in a plan view when the housing cover 420 is viewed from the bottom surface direction, and is disposed apart from each other along the X and Y directions shown in FIG. Further, contact openings 22 are provided on the bottom surface of the housing portion 423, respectively. The contact opening 22 has a smaller diameter than the housing 423. In addition, as shown in FIG. 22, in the state where the contact opening 22 has the housing cover 420 attached to the housing body 10, a straight line passing through the center of the contact opening 22 and perpendicular to the top surface of the housing cover 420 is the housing body 10. It is disposed parallel to a straight line perpendicular to the bottom surface of the housing body 10 through the center of the contact opening 13 provided on the bottom surface of the housing 10 and having a distance L2.

  The probe pin 430 of the fourth embodiment, as shown in FIGS. 23 to 26, includes the first plunger 70, the second plunger 80, the third plunger 90, and the first and second coil springs 61 and 62. Have. The first to third plungers 70, 80, 90 each have conductivity, and are formed, for example, by electroforming.

  As shown in FIG. 26, the first and second plungers 70 and 80 have contact portions 51 and first and second elastic pieces 52 and 53, and are the same as the second plunger 50 of the first embodiment. It has a shape and configuration. The contact portion 51 of the first plunger 70, the contact 54, and the first and second elastic pieces 52 and 53 are an example of a first contact portion, a first contact, and a first insertion portion, respectively. The contact portion 51, the contact point 54 and the first and second elastic pieces 52 and 53 are an example of a second contact portion, a second contact point and a second insertion portion, respectively. The center line A4 of the contact portion 51 of the first plunger 70 coincides with the center line of the first coil spring 61, and the center line A6 of the contact portion 51 of the second plunger 80 corresponds to the second coil spring 62. It coincides with the center line.

  As shown in FIG. 26, the third plunger 90 has a first held portion 91, an intermediate portion 92 continuous with the first held portion 91, and a second held portion 93 continuous with the intermediate portion 92. doing. The first and second held portions 91 and 93 have the same shape and configuration as the held portion 41 of the first plunger 40 of the first embodiment, and extend in parallel with each other. That is, the center line A4 of the first support portion 91 and the center line A6 of the second support portion 93 are parallel to each other. The first support portion 91 is an example of a third insertion portion, and the second support portion 93 is an example of a fourth insertion portion.

  The middle portion 92 is connected to the first and second held portions 91 and 93 so as to obliquely intersect. That is, as shown in FIG. 24, the center lines A4 and A6 of the first and second held portions 91 and 93 and the center line A5 of the middle portion 92 form an angle of θ = 45 degrees. Further, coil spring support portions 45 are provided at both ends of the intermediate portion 92, respectively.

  Next, an assembly process of the inspection unit 401 provided with the probe pin 430 of the fourth embodiment will be described.

  First, the first plunger 70 is inserted from the one end side of the first coil spring 61 into the inside from the side of the first and second elastic pieces 52 and 53, and the other end side of the first coil spring 61 into the inside thereof. 3 Insert the first supported portion 91 of the plunger 90. Further, the second plunger 80 is inserted from the one end side of the second coil spring 62 into the inside from the side of the first and second elastic pieces 52, 53, and into the inside from the other end side of the second coil spring 62. 3 Insert the second supported portion 93 of the plunger 90. At this time, as shown in FIG. 25, in the first and second plungers 70 and 80 and the third plunger 90, the wide surfaces of the first and second plungers 70 and 80 are orthogonal to the wide surfaces of the third plunger 90. To be inserted.

  When the first to third plungers 70, 80, 90 are inserted into the first and second coil springs 61, 62, respectively, the space between the first and second elastic pieces 52, 53 of the first plunger 70 The first held portion 91 of the third plunger 90 is inserted, and the first held portion 91 is held by the first and second elastic pieces 52 and 53 of the first plunger 70. In addition, the second gripped portion 93 of the third plunger 90 is inserted between the first and second elastic pieces 52 and 53 of the second plunger 80, and the second gripped portion 93 is the first and second ones of the second plunger 80. It is held by the second elastic pieces 52, 53. Then, when the first to third plungers 70, 80, 90 are further inserted into the first and second coil springs 61, 62, the guide projection 56 of the first elastic piece 52 of the first plunger 70 is: The guide projection 56 of the first elastic piece 52 of the second plunger 80 is fitted in the guide groove 44 of the first held portion 91 of the third plunger 90, and the guide groove of the second held portion 93 of the third plunger 90 The probe pin 430 is assembled by being fitted to 44.

  When the probe pin 430 is assembled, the probe pin 430 is inserted into the housing 12 of the housing body 10. Then, the process of assembling the probe pins 430 and inserting the assembled probe pins 430 into the housing portion 12 of the housing body 10 is repeated, and when the probe pins 430 are inserted into all the housing portions 12 of the housing body 10, the housing cover 420. Is attached to the housing body 10, and the assembly process of the inspection unit 401 is completed.

  Subsequently, an operation of the probe pin 430 in a state of being accommodated in the inspection unit 401 will be described.

  In the probe pin 430 in the initial state stored in the inspection unit 401, as shown in FIG. 22, the contact 54 of the first plunger 70 protrudes from the contact opening 22 of the housing cover 420, and the contact 54 of the second plunger 80 is the housing It is accommodated in the housing of inspection unit 401 in the state where it projected from contact opening 13 of main part 10. In this initial state, the first plunger 70 receives the return force of the first coil spring 61 by the coil spring support 55 and is pressed against the housing cover 420 via the coil spring support 55. Further, the second plunger 80 receives the return force of the second coil spring 62 by the coil spring support 55 and is in pressure contact with the housing main body 10 via the coil spring support 55.

  The center line A4 of the first plunger 70 passes through the center of the housing portion 423 of the housing cover 420 and coincides with a straight line orthogonal to the top surface of the housing cover 420, and the center line A6 of the second plunger 80 is the housing body. It passes through the center of the storage portion 12 and coincides with a straight line perpendicular to the bottom surface of the housing body 10.

  When the contact points 54 of the first and second plungers 70 and 80 are pressed to push the first and second plungers 70 and 80 into the housing of the inspection unit 401, the first and second plungers 70 and 80 The guide protrusion 56 of the first elastic piece 52 starts sliding movement along the guide groove 44 of the third plunger 90. At this time, the contact point 54 of the first plunger 70 moves along the center line A4 of the first plunger 70, and the contact point 54 of the second plunger 50 moves along the center line A6 of the second plunger 80. Forces applied to the first and second plungers 70 and 80 are transmitted to the first and second coil springs 61 and 62 via the coil spring support portions 55 of the first and second plungers 70 and 80, respectively. It is compressed.

  When the first and second plungers 70 and 80 are further pushed into the housing of the inspection unit 401, the guide projections 56 of the first plunger 70 and the guide grooves 44 of the first gripped portion 91 of the third plunger 90 make contact. Contact between the guide projection 56 of the second plunger 80 and the guide groove 44 of the second gripped portion 93 of the third plunger 90, or the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are housings. By being pushed in, movement of the first and second plungers 70 and 80 is stopped. Thereafter, when the force applied to the contact point 54 of the first and second plungers 70 and 80 is released, the first plunger 70 is moved toward the housing cover 420 by the return force of the first and second coil springs 61 and 62. The second plunger 80 is biased toward the housing body 10 to return to the initial state shown in FIG. As described above, the contact points 54 of the first and second plungers 70 and 80 are supported so as to be reciprocally movable via the spring force of the coil springs 61 and 62.

  In the probe pin 430 of the fourth embodiment, since the two coil springs 61 and 62 are provided, a higher spring load can be obtained as compared with a probe pin having one coil spring.

  Moreover, in the probe pin 430 of the fourth embodiment, the first to third plungers 70, 80, 90 each have rigidity higher than that of the coil springs 61, 62, and the first to third plungers 70, 80. , 90 are absorbed by the coil springs 61 and 62. Therefore, even if the contacts 54 of the first and second plungers 70 and 80 are not on the same straight line, the force applied to each contact 54 can be transmitted to the coil springs 61 and 62 as it is.

Fifth Embodiment
FIG. 27 to FIG. 32 are diagrams showing an example of the inspection unit 501 provided with the probe pin 530 of the fifth embodiment and the probe pin 530 of the fifth embodiment. In the fifth embodiment, the same reference numerals as in the first and fourth embodiments denote the same parts, and a description thereof will be omitted, and only differences from the fourth embodiment will be described. The inspection unit 501 is an example of an electronic device.

  In the probe pin 530 of the fifth embodiment, as shown in FIGS. 29 to 32, the middle portion 192 of the third plunger 190 is 90 degrees with respect to the longitudinal direction of the first and second pinched portions 91 and 93. It differs from the fourth embodiment in that it extends in the direction. That is, the center lines A4 and A6 of the first and second held portions 91 and 93 and the center line A5 of the middle portion 192 form an angle of θ = 90 degrees.

  As described above, since the third plunger 190 has the intermediate portion 192 with θ = 90 degrees, the contact point 54 of the first plunger 70 and the length L3 of the probe pin 530 shown in FIG. The distance L4 between the second plunger 80 and the contact point 54 can be increased.

  In the probe pin 530 of the fifth embodiment, the third plunger 190 has conductivity, and is formed by, for example, electroforming.

(Other embodiments)
In the first to fifth embodiments, the guide projection 56 of the first elastic piece 52 can be fitted in the guide groove 44, and when it is fitted in the guide groove 44, the slide movement of each plunger can be performed in the guide groove 44. The shape, size, etc. can be selected as appropriate as long as they can be regulated.

  In the first to fifth embodiments, the contact protrusion 57 of the second elastic piece 53 can be appropriately selected in shape, size, and the like according to the design. By changing the shape or the like of the contact protrusion 57, it is possible to adjust the biasing force of the second elastic piece 53 with respect to each held portion.

  In the first to fifth embodiments, the difference L2 between the lengths of the first elastic piece 52 and the second elastic piece 53 is formed to have substantially the same dimension as the length L1 of the guide groove 44, but is limited thereto Absent. The difference in length between the first elastic piece and the second elastic piece may be changed as long as it is equal to or greater than the length of the guide groove.

  In the first to fifth embodiments, the thickness of each plunger is the same, but the present invention is not limited to this. The thickness of each plunger may be changed as appropriate. Also, the thickness may be different depending on the portion of each plunger.

  Each plunger of the first to fifth embodiments can also be subjected to surface treatment such as plating and coating according to the design.

  Although each plunger of the 1st-5th embodiment is formed by electroforming, it is not restricted to this. Any method can be selected as long as it can form each plunger of the first to fifth embodiments.

  In the first to fifth embodiments, the contact points 46 and 54 are provided at the centers of the contact portions 43 and 51, but the present invention is not limited to this. It can be provided at any position on one end of the contact portion 43, 51.

  In the first to third embodiments, the first plunger 40 is provided with the held portion 41, and the second plunger 50 is provided with the first and second elastic pieces 52, 53. In the fourth and fifth embodiments, The first and second elastic pieces 52 and 53 are provided on the first and second plungers 70 and 80, and the first and second pinched portions 91 and 93 are provided on the third plunger 90. However, the present invention is not limited to this. For example, in the first to third embodiments, the first plunger may be provided with the first and second elastic pieces, and the second plunger may be provided with the pinched portion. In the fourth and fifth embodiments, the first and second elastic pieces may be provided. The second plunger may be provided with a pinched portion, and the third plunger 90 may be provided with the first and second elastic pieces.

  Also, if possible, in the first to third embodiments, the second plunger 50 may be provided with the intermediate portion 42 and the contact portion 43, and in the fourth and fifth embodiments, the first and second plungers The intermediate portion 42 and the contact portion 43 may be provided at 70 and 80.

  In the probe pin of the present invention, although the held portion 41 and the first and second elastic pieces 52 and 53 are used in combination as the insertion portion, the present invention is not limited thereto. When inserted from both ends of the coil spring, any insertion portion which can slide and conduct mutually can be adopted arbitrarily.

  Of course, the components described in the first to fifth embodiments and the modification may be combined as appropriate, and may be selected, replaced, or deleted as appropriate.

  The probe pin according to the present invention can be applied to, for example, an electronic device such as a test socket for IC.

1, 201, 301, 401, 501 Inspection unit 10 Housing body 11 Recess 12 Storage 13 Contact opening 20, 420 Housing cover 21 Recess 22 Contact opening 423 Storage 30, 30, 330, 430, 530 Probe pin 40, 140, 240 first plunger 41 held portion 42 intermediate portion 43 contact portion 44 guide groove 45 coil spring support portion 46 contact point 47 housing support portion 50 second plunger 51 contact portion 52 first elastic piece 53 second elastic piece 54 contact point 55 Coil spring support portion 56 Guide projection 57 Contact projection 60 Coil spring 70 First plunger 80 Second plunger 90, 190 Third plunger 91 First pinched portion 92, 192 Intermediate portion 93 Second pinched portion

Claims (4)

At least one coil spring extending and contracting along the center line,
A first contact point disposed on a first straight line parallel to the center line;
A second contact point disposed on a second straight line coincident with the center line;
Equipped with
The first and second contacts are reciprocably supported via the spring force of the coil spring and are in direct electrical communication with each other ,
The coil springs include first and second coil springs that extend and contract along two parallel center lines,
The center line of the first coil spring is the first straight line, and the center line of the second coil spring is the second straight line,
A first insertion portion provided along the first straight line and inserted into one end of the first coil spring, a first contact portion having the first contact point disposed on the first straight line, and the first contact portion A first plunger having a support portion provided between the insertion portion and the first contact portion and in contact with one end of the first coil spring in the center line direction;
A second insertion portion provided along the second straight line and inserted into one end of the second coil spring, a second contact portion having the second contact point disposed on the second straight line, and the second contact portion A second plunger having a support portion provided between the insertion portion and the second contact portion and in contact with one end of the second coil spring in the center line direction;
A third insertion portion provided along the first straight line and inserted into the other end of the first coiled spring, and a fourth inserted portion provided along the second straight line and inserted into the other end of the second coiled spring A third plunger having an insertion portion, and an intermediate portion connected to intersect the third insertion portion and the fourth insertion portion;
Equipped with
The probe pin in which the said 3rd insertion part and the said 4th insertion part, and the said intermediate part cross | intersect at an angle of more than 0 degree and 45 degrees or less . It said first, second, third plunger has respectively a higher rigidity than the coil spring, the probe pin according to claim 1. Said first, second, third plunger is formed by electroforming, the probe pin according to claim 1 or 2. The probe pin according to any one of claims 1 to 3 and a housing for housing the probe pin, wherein the first and second plungers are biased toward the housing by the coil spring. There are electronic devices.

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