JP6908133B2 - Probe pins, inspection jigs, inspection units and inspection equipment - Google Patents

Probe pins, inspection jigs, inspection units and inspection equipment Download PDF

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JP6908133B2
JP6908133B2 JP2019564209A JP2019564209A JP6908133B2 JP 6908133 B2 JP6908133 B2 JP 6908133B2 JP 2019564209 A JP2019564209 A JP 2019564209A JP 2019564209 A JP2019564209 A JP 2019564209A JP 6908133 B2 JP6908133 B2 JP 6908133B2
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inspection
probe pin
longitudinal direction
extending
contact
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JPWO2019138505A1 (en
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直哉 笹野
直哉 笹野
宏真 寺西
宏真 寺西
貴浩 酒井
貴浩 酒井
時薫 崔
時薫 崔
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Omron Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted

Description

本開示は、プローブピン、このプローブピンを備えた検査治具、この検査治具を備えた検査ユニット、および、この検査ユニットを備えた検査装置に関する。 The present disclosure relates to a probe pin, an inspection jig provided with the probe pin, an inspection unit provided with the inspection jig, and an inspection device provided with the inspection unit.

カメラあるいは液晶パネル等の電子部品モジュールでは、一般に、その製造工程において、導通検査および動作特性検査等が行われる。これらの検査は、プローブピンを用いて、電子部品モジュールに設置されている本体基板と接続するためのＦＰＣ接触電極、あるいは、実装された基板対基板コネクタ等の電極部と検査装置とを接続することにより行われる。 In electronic component modules such as cameras and liquid crystal panels, continuity inspection, operating characteristic inspection, and the like are generally performed in the manufacturing process. In these inspections, probe pins are used to connect the FPC contact electrode for connecting to the main board installed in the electronic component module, or the electrode part such as the mounted board-to-board connector to the inspection device. It is done by.

このようなプローブピンとしては、例えば、特許文献１に記載されたものがある。このプローブピンは、電子部品の電極端子および被接続電子部品の電極端子に対してそれぞれ接触可能な一対のコンタクトと、一対のコンタクト間に介在して一対のコンタクトを接続する蛇行部とを備えている。前記プローブピンでは、蛇行部により、各コンタクトと電子部品の電極端子および被接続電子部品の電極端子との間の接圧を確保して、電子部品の電極端子および被接続電子部品の電極端子に対する接触信頼性を高めている。 As such a probe pin, for example, there is one described in Patent Document 1. This probe pin includes a pair of contacts that can contact the electrode terminals of the electronic component and the electrode terminals of the connected electronic component, respectively, and a meandering portion that connects the pair of contacts by interposing between the pair of contacts. There is. In the probe pin, the meandering portion secures the contact pressure between each contact and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component, and the electrode terminal of the electronic component and the electrode terminal of the connected electronic component are pressed. Increases contact reliability.

特開２００２−１３４２０２号公報JP-A-2002-134202

近年、電子部品モジュール間で送受信される情報量の増大などに伴って、電子部品モジュールの検査に用いるプローブピンにも高周波領域の信号に対応することが要請されている。 In recent years, as the amount of information transmitted and received between electronic component modules has increased, it has been required that probe pins used for inspecting electronic component modules also support signals in the high frequency region.

しかし、特許文献１のプローブピンでは、高周波領域の信号に必ずしも十分に対応できているとはいえず、電子部品モジュールの検査時にプローブピンを流れる高周波領域の信号の損失が大きくなる場合があった。 However, it cannot be said that the probe pin of Patent Document 1 can sufficiently correspond to the signal in the high frequency region, and the loss of the signal in the high frequency region flowing through the probe pin may be large when inspecting the electronic component module. ..

本開示は、検査対象物および検査装置に対する接触信頼性を確保しつつ、高周波領域の信号の損失を低減できるプローブピン、このプローブピンを備えた検査治具、この検査治具を備えた検査ユニット、および、この検査ユニットを備えた検査装置を提供することを目的とする。 The present disclosure discloses a probe pin capable of reducing signal loss in a high frequency region while ensuring contact reliability with respect to an inspection object and an inspection device, an inspection jig equipped with this probe pin, and an inspection unit provided with this inspection jig. , And an inspection device equipped with this inspection unit.

本開示の一例のプローブピンは、
長手方向に沿って伸縮する弾性部と、
前記弾性部の前記長手方向の第１端部に接続された板状の第１接触部と、
前記第１接触部に対して直列的に配置され、前記弾性部の前記長手方向の第２端部に接続された板状の第２接触部と
を備え、
前記弾性部が、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記第１接触部に接続された第１直線部と、
前記長手方向に交差する方向でかつ前記第１接触部から離れる方向に突出した円弧状に延びていると共に、その延在方向の一端部が前記第１直線部のその延在方向の他端部に接続された湾曲部と、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記湾曲部のその延在方向の他端部に接続された第２直線部と
を有し、
前記湾曲部の中心角が、９０度よりも大きく１８０度よりも小さくなるように構成されている。The probe pin of the example of the present disclosure is
An elastic part that expands and contracts along the longitudinal direction,
A plate-shaped first contact portion connected to the first end portion in the longitudinal direction of the elastic portion,
A plate-shaped second contact portion arranged in series with the first contact portion and connected to the second end portion in the longitudinal direction of the elastic portion is provided.
The elastic part
A first straight line portion extending in a direction intersecting the longitudinal direction and having one end portion in the extending direction connected to the first contact portion.
It extends in an arc shape protruding in a direction intersecting the longitudinal direction and away from the first contact portion, and one end portion in the extending direction is the other end portion of the first straight line portion in the extending direction. With curved parts connected to
Along with extending in a direction intersecting the longitudinal direction, one end portion in the extending direction has a second straight portion connected to the other end portion in the extending direction of the curved portion.
The central angle of the curved portion is configured to be larger than 90 degrees and smaller than 180 degrees.

また、本開示の一例の検査治具は、
前記プローブピンと、
前記プローブピンを収容可能な収容部を有するハウジングと
を備え、
前記プローブピンが、前記湾曲部の中心角が、９０度よりも大きく１８０度よりも小さくなるように、前記収容部に収容されている。Further, the inspection jig of the example of the present disclosure is
With the probe pin
A housing having an accommodating portion capable of accommodating the probe pin is provided.
The probe pin is housed in the housing so that the central angle of the curved portion is greater than 90 degrees and less than 180 degrees.

また、本開示の一例の検査ユニットは、
前記検査治具を少なくとも１つ備えた。In addition, the inspection unit of the example of the present disclosure is
At least one of the inspection jigs was provided.

また、本開示の一例の検査装置は、
前記検査ユニットを少なくとも１つ備えた。In addition, the inspection device of the example of the present disclosure is
At least one of the inspection units was provided.

前記プローブピンによれば、弾性部が、プローブピンの長手方向に交差する方向に延びて延在方向の一端部が第１接触部に接続された第１直線部と、プローブピンの長手方向に交差する方向でかつ第１接触部から離れる方向に突出した円弧状に延びて延在方向の一端部が第１直線部のその延在方向の他端部に接続された湾曲部と、プローブピンの長手方向に交差する方向に延びて延在方向の一端部が湾曲部のその延在方向の他端部に接続された第２直線部とを有し、湾曲部の中心角が、９０度よりも大きく１８０度よりも小さくなるように構成されている。これにより、プローブピンの長手方向における第１直線部と第２直線部との間に距離を設けることができるので、例えば、第１直線部を流れる高周波領域の信号の第２直線部を流れる高周波領域の信号に対する干渉を低減できる。その結果、検査対象物および検査装置に対する接触信頼性を確保しつつ、高周波領域の信号の損失を低減できるプローブピンを実現できる。 According to the probe pin, the elastic portion extends in the direction intersecting the longitudinal direction of the probe pin, and one end portion in the extending direction is connected to the first contact portion in the longitudinal direction of the probe pin. A curved portion extending in an arc shape extending in an intersecting direction and protruding in a direction away from the first contact portion, and one end in the extending direction connected to the other end in the extending direction of the first straight portion, and a probe pin. One end in the extending direction extends in the direction intersecting the longitudinal direction of the curved portion and has a second straight portion connected to the other end in the extending direction of the curved portion, and the central angle of the curved portion is 90 degrees. It is configured to be larger than and less than 180 degrees. As a result, a distance can be provided between the first straight line portion and the second straight line portion in the longitudinal direction of the probe pin. Therefore, for example, the high frequency flowing through the second straight line portion of the signal in the high frequency region flowing through the first straight line portion. Interference with signals in the region can be reduced. As a result, it is possible to realize a probe pin capable of reducing signal loss in the high frequency region while ensuring contact reliability with respect to the inspection object and the inspection device.

また、前記検査治具によれば、前記プローブピンにより、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査治具を実現できる。 Further, according to the inspection jig, the probe pin has high contact reliability with respect to the inspection object and the inspection device, and the inspection jig has a small signal loss in the high frequency region when connected to the inspection object and the inspection device. Can be realized.

また、前記検査ユニットによれば、前記検査治具により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査ユニットを実現できる。 Further, according to the inspection unit, the inspection jig provides an inspection unit having high contact reliability to the inspection object and the inspection device and little signal loss in the high frequency region when connected to the inspection object and the inspection device. realizable.

また、前記検査装置によれば、前記検査ユニットにより、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査装置を実現できる。 Further, according to the inspection device, the inspection unit realizes an inspection device having high contact reliability with respect to the inspection object and the inspection device and having a small signal loss in a high frequency region when connected to the inspection object and the inspection device. can.

本開示の一実施形態の検査ユニットを示す断面斜視図。FIG. 3 is a cross-sectional perspective view showing an inspection unit according to an embodiment of the present disclosure. 図１のII-II線に沿った断面図。Sectional view taken along line II-II of FIG. 本開示の一実施形態のプローブピンを示す斜視図。The perspective view which shows the probe pin of one Embodiment of this disclosure. 図３のプローブピンの平面図。Top view of the probe pin of FIG. 図３のプローブピンの弾性部の拡大平面図。The enlarged plan view of the elastic part of the probe pin of FIG. 比較例のプローブピンを用いたインサーションロスおよびリターンロスの測定結果を示す図。The figure which shows the measurement result of the insertion loss and the return loss using the probe pin of the comparative example. 実施例のプローブピンのプローブピンを用いたインサーションロスおよびリターンロスの測定結果を示す図。The figure which shows the measurement result of the insertion loss and the return loss using the probe pin of the probe pin of an Example. 図３のプローブピンの第１の変形例を示す弾性部の拡大平面図。The enlarged plan view of the elastic part which shows the 1st modification of the probe pin of FIG. 図３のプローブピンの第２の変形例を示す平面図。The plan view which shows the 2nd modification of the probe pin of FIG.

以下、本開示の一例を添付図面に従って説明する。なお、以下の説明では、必要に応じて特定の方向あるいは位置を示す用語（例えば、「上」、「下」、「右」、「左」を含む用語）を用いるが、それらの用語の使用は図面を参照した本開示の理解を容易にするためであって、それらの用語の意味によって本開示の技術的範囲が限定されるものではない。また、以下の説明は、本質的に例示に過ぎず、本開示、その適用物、あるいは、その用途を制限することを意図するものではない。さらに、図面は模式的なものであり、各寸法の比率等は現実のものとは必ずしも合致していない。 Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. In the following description, terms indicating a specific direction or position (for example, terms including "top", "bottom", "right", and "left") are used as necessary, but the use of these terms is used. Is for facilitating the understanding of the present disclosure with reference to the drawings, and the meaning of those terms does not limit the technical scope of the present disclosure. In addition, the following description is merely an example and is not intended to limit the present disclosure, its application, or its use. Furthermore, the drawings are schematic, and the ratio of each dimension does not always match the actual one.

本開示の一実施形態のプローブピン１０は、導電性を有し、例えば、図１および図２に示すように、ソケット３に収容された状態で使用され、ソケット３と共に検査治具２を構成する。この検査治具２には、一例として、複数の細長い薄板状のプローブピン１０が収容されている。 The probe pin 10 of the embodiment of the present disclosure has conductivity and is used in a state of being housed in the socket 3 as shown in FIGS. 1 and 2, for example, and constitutes an inspection jig 2 together with the socket 3. do. As an example, the inspection jig 2 houses a plurality of elongated thin plate-shaped probe pins 10.

また、検査治具２は、検査ユニット１の一部を構成している。検査ユニット１は、図１に示すように、一例として、複数の検査治具２が組み込まれた略直方体状のベースハウジング４を備えている。このベースハウジング４は、略矩形板状の第１ハウジング５と、この第１ハウジング５の板厚方向に積み重ねられた第２ハウジング６とで構成されている。 Further, the inspection jig 2 constitutes a part of the inspection unit 1. As shown in FIG. 1, the inspection unit 1 includes, as an example, a substantially rectangular parallelepiped base housing 4 in which a plurality of inspection jigs 2 are incorporated. The base housing 4 is composed of a first housing 5 having a substantially rectangular plate shape, and a second housing 6 stacked in the plate thickness direction of the first housing 5.

ソケット３は、図２に示すように、各プローブピン１０を収容可能な複数の収容部７を有し、第１ハウジング５および第２ハウジング６で保持されている。各収容部７は、ソケット３とベースハウジング４の第２ハウジング６とで取り囲まれており、後述する第１接点部１２１および第２接点部１３１がソケット３およびベースハウジング４の外部にそれぞれ露出した状態で、各プローブピン１０を収容可能に構成されている。 As shown in FIG. 2, the socket 3 has a plurality of accommodating portions 7 capable of accommodating each probe pin 10, and is held by the first housing 5 and the second housing 6. Each accommodating portion 7 is surrounded by a socket 3 and a second housing 6 of the base housing 4, and the first contact portion 121 and the second contact portion 131, which will be described later, are exposed to the outside of the socket 3 and the base housing 4, respectively. In the state, each probe pin 10 is configured to be accommodating.

なお、図２に示すように、第１接点部１２１は、一例として、検査装置の基板（例えば、ＰＣＢパッド）１００に設けられた端子に接触可能に構成されている。また、第２接点部１３１は、一例として、検査対象物（例えば、基板対基板（ＢｔｏＢ）コネクタ）１１０の端子１２０に接触可能に構成されている。 As shown in FIG. 2, the first contact portion 121 is configured so as to be able to contact a terminal provided on a substrate (for example, a PCB pad) 100 of an inspection device as an example. Further, the second contact portion 131 is configured so as to be able to contact the terminal 120 of the inspection target object (for example, a substrate-to-board (BtoB) connector) 110 as an example.

各プローブピン１０は、図３に示すように、その長手方向（すなわち、図３の上下方向）に沿って伸縮する弾性部１１と、弾性部１１の長手方向の第１端部１１１に接続された板状の第１接触部１２と、弾性部１１の長手方向の第２端部１１２に接続された板状の第２接触部１３とを備えている。このプローブピン１０では、例えば、電鋳法で形成され、弾性部１１、第１接触部１２および第２接触部１３が一体に構成されている。 As shown in FIG. 3, each probe pin 10 is connected to an elastic portion 11 that expands and contracts along its longitudinal direction (that is, the vertical direction of FIG. 3) and a first end portion 111 of the elastic portion 11 in the longitudinal direction. A plate-shaped first contact portion 12 and a plate-shaped second contact portion 13 connected to a second end portion 112 in the longitudinal direction of the elastic portion 11 are provided. The probe pin 10 is formed by, for example, an electroforming method, and the elastic portion 11, the first contact portion 12, and the second contact portion 13 are integrally formed.

弾性部１１は、図４に示すように、第１接触部１２の板厚方向（すなわち、図４の紙面貫通方向）から見て、蛇行形状を有し、相互に隙間２３を空けて配置された複数の帯状弾性片（この実施形態では、２つの帯状弾性片）２１、２２を有している。各帯状弾性片２１、２２は、細長い帯状を有し、プローブピン１０の長手方向における一端部である第１端部２１１が第１接触部１２に接続され、プローブピン１０の長手方向における他端部である第２端部２１２が第２接触部１３に接続されている。 As shown in FIG. 4, the elastic portion 11 has a meandering shape when viewed from the plate thickness direction of the first contact portion 12 (that is, the paper surface penetrating direction in FIG. 4), and is arranged with a gap 23 between them. It has a plurality of strip-shaped elastic pieces (in this embodiment, two strip-shaped elastic pieces) 21, 22. Each of the strip-shaped elastic pieces 21 and 22 has an elongated strip shape, and the first end portion 211, which is one end portion in the longitudinal direction of the probe pin 10, is connected to the first contact portion 12, and the other end in the longitudinal direction of the probe pin 10. The second end portion 212, which is a portion, is connected to the second contact portion 13.

詳しくは、図５に示すように、各帯状弾性片２１、２２は、４つの帯状の直線部（すなわち、第１直線部３１、３２と、第２直線部５１、５２と、第３直線部７１、７２と、第４直線部９１、９２）と、３つの帯状の湾曲部（すなわち、第１湾曲部４１、４２と、第２湾曲部６１、６２と、第３湾曲部８１、８２）とを有している。 Specifically, as shown in FIG. 5, each strip-shaped elastic piece 21 and 22 has four strip-shaped straight portions (that is, first straight portions 31, 32, second straight portions 51 and 52, and a third straight portion). 71, 72, 4th straight portions 91, 92) and 3 strip-shaped curved portions (that is, 1st curved portions 41, 42, 2nd curved portions 61, 62, and 3rd curved portions 81, 82). And have.

第１直線部３１、３２は、プローブピン１０の長手方向に交差する方向（例えば、直交方向）に延びていると共に、その延在方向の一端部が第１接触部１２に接続されて、第１端部２１１、２２１を構成している。なお、第１直線部３１、３２は、プローブピン１０の長手方向に交差する方向（例えば、直交する方向）から第１接触部１２に接続されている。 The first straight line portions 31 and 32 extend in a direction intersecting the longitudinal direction of the probe pin 10 (for example, in an orthogonal direction), and one end portion in the extending direction is connected to the first contact portion 12, so that the first straight portion portion 31 and 32 are second. It constitutes one end portion 211 and 221. The first straight line portions 31 and 32 are connected to the first contact portion 12 from a direction intersecting the longitudinal direction of the probe pin 10 (for example, a direction orthogonal to each other).

第１湾曲部４１、４２は、プローブピン１０の長手方向に交差する方向でかつ第１接触部１２から離れる方向に突出し、かつ、９０度よりも大きく１８０度よりも小さい中心角θ１に対する円弧に沿って延びている。また、第１湾曲部４１、４２は、その延在方向の一端部が第１直線部３１、３２のその延在方向の他端部に接続されている。 The first curved portions 41 and 42 project in a direction intersecting the longitudinal direction of the probe pin 10 and in a direction away from the first contact portion 12, and form an arc with respect to a central angle θ1 larger than 90 degrees and smaller than 180 degrees. It extends along. Further, one end of the first curved portions 41 and 42 in the extending direction is connected to the other end of the first straight portions 31 and 32 in the extending direction.

第２直線部５１、５２は、プローブピン１０の長手方向に交差する方向に延びていると共に、その延在方向の一端部が第１湾曲部４１、４２のその延在方向の他端部に接続されている。この第２直線部５１、５２は、その延在方向の一端部から他端部に向かうにつれて（すなわち、第１湾曲部４１、４２から離れるにつれて）、プローブピン１０の長手方向において、第１直線部３１、３２から離れる方向に延びている。 The second straight portions 51 and 52 extend in a direction intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction thereof extends to the other end in the extending direction of the first curved portions 41 and 42. It is connected. The second straight line portions 51 and 52 have a first straight line in the longitudinal direction of the probe pin 10 as they move from one end to the other end in the extending direction (that is, as they move away from the first curved portions 41 and 42). It extends in a direction away from the portions 31 and 32.

第２湾曲部６１、６２は、プローブピン１０の長手方向に交差する方向でかつ第１接触部１２に接近する方向に突出し、かつ、９０度よりも大きく１８０度よりも小さい中心角θ２に対する円弧に沿って延びている。また、第２湾曲部６１、６２は、その延在方向の一端部が第２直線部５１、５２のその延在方向の他端部に接続されている。 The second curved portions 61 and 62 project in a direction intersecting the longitudinal direction of the probe pin 10 and in a direction approaching the first contact portion 12, and are arcs with respect to a central angle θ2 larger than 90 degrees and smaller than 180 degrees. Extends along. Further, one end of the second curved portion 61, 62 in the extending direction is connected to the other end of the second straight portion 51, 52 in the extending direction.

第３直線部７１、７２は、プローブピン１０の長手方向に交差する方向に延びていると共に、その延在方向の一端部が第２湾曲部６１、６２のその延在方向の他端部に接続されている。この第３直線部７１、７２は、その延在方向の一端部から他端部に向かうにつれて（すなわち、第２湾曲部６１、６２から離れるにつれて）、プローブピン１０の長手方向において、第２直線部５１、５２から離れる方向に延びている。 The third straight portions 71 and 72 extend in a direction intersecting the longitudinal direction of the probe pin 10, and one end in the extending direction thereof extends to the other end in the extending direction of the second curved portions 61 and 62. It is connected. The third straight line portions 71 and 72 have a second straight line in the longitudinal direction of the probe pin 10 as they move from one end to the other end in the extending direction (that is, as they move away from the second curved portions 61 and 62). It extends in a direction away from the portions 51 and 52.

第３湾曲部８１、８２は、プローブピン１０の長手方向に交差する方向でかつ第１接触部１２から離れる方向に突出し、かつ、９０度よりも大きく１８０度よりも小さい中心角θ３に対する円弧に沿って延びている。また、第３湾曲部８１、８２は、その延在方向の一端部が第３直線部７１、７２のその延在方向の他端部に接続されている。 The third curved portions 81 and 82 project in a direction intersecting the longitudinal direction of the probe pin 10 and in a direction away from the first contact portion 12, and form an arc with respect to a central angle θ3 larger than 90 degrees and smaller than 180 degrees. It extends along. Further, one end of the third curved portion 81, 82 in the extending direction is connected to the other end of the third straight portion 71, 72 in the extending direction.

第４直線部９１、９２は、プローブピン１０の長手方向に交差する方向（例えば、直交方向）に延びていると共に、その延在方向の一端部が第３湾曲部８１、８２のその延在方向の他端部に接続されている。この第４直線部９１、９２は、その延在方向の一端部から他端部に向かうにつれて（すなわち、第３湾曲部８１、８２から離れるにつれて）、プローブピン１０の長手方向において、第３直線部７１、７２から離れる方向に延びている。また、第４直線部９１、９２は、その延在方向の他端部が第２接触部１３に接続されて、第２端部２１２、２２２を構成している。なお、第４直線部９１、９２は、プローブピン１０の長手方向から第２接触部１３に接続されている。 The fourth straight portions 91 and 92 extend in a direction intersecting the longitudinal direction of the probe pin 10 (for example, in an orthogonal direction), and one end in the extending direction thereof extends in the extending direction of the third curved portions 81 and 82. It is connected to the other end in the direction. The fourth straight line portions 91 and 92 form a third straight line in the longitudinal direction of the probe pin 10 as they move from one end to the other end in the extending direction (that is, as they move away from the third curved portions 81 and 82). It extends in a direction away from the portions 71 and 72. Further, the other ends of the fourth straight lines 91 and 92 in the extending direction are connected to the second contact portion 13 to form the second end portions 212 and 222. The fourth straight line portions 91 and 92 are connected to the second contact portion 13 from the longitudinal direction of the probe pin 10.

前記プローブピン１０では、第１直線部３１、３２および第４直線部９１、９２は、第２湾曲部６１、６２の曲率中心を通りかつプローブピン１０の長手方向に直交する方向に延びる直線Ｌ１に対して対称に配置されている。また、第２直線部５１、５２および第３直線部７１、７２は、直線Ｌ１に対して対称に配置され、第１湾曲部４１、４２および第３湾曲部８１、８２は、直線Ｌ１に対して対称に配置されている。 In the probe pin 10, the first straight line portions 31, 32 and the fourth straight line portions 91, 92 pass through the center of curvature of the second curved portions 61, 62 and extend in a direction orthogonal to the longitudinal direction of the probe pin 10. It is arranged symmetrically with respect to. Further, the second straight line portions 51, 52 and the third straight line portions 71, 72 are arranged symmetrically with respect to the straight line L1, and the first curved portion 41, 42 and the third curved portion 81, 82 are arranged with respect to the straight line L1. Are arranged symmetrically.

また、各帯状弾性片２１、２２の幅（すなわち、各帯状弾性片２１、２２の第１端部２１１、２２１および第２端部２１２、２２２間の経路の延在方向に直交する幅方向の長さ）Ｗ１、Ｗ２が、隣接する帯状弾性片２１、２２間の最短距離Ｗ３よりも小さくなるように構成されている。なお、図５には、一例として、第１湾曲部４１、４２間の直線距離を最短距離Ｗ５として示している。 Further, the width of the strip-shaped elastic pieces 21 and 22 (that is, the width direction orthogonal to the extending direction of the path between the first end portions 211 and 221 and the second end portions 212 and 222 of the strip-shaped elastic pieces 21 and 22). Length) W1 and W2 are configured to be smaller than the shortest distance W3 between adjacent strip-shaped elastic pieces 21 and 22. Note that FIG. 5 shows, as an example, the straight line distance between the first curved portions 41 and 42 as the shortest distance W5.

第１接触部１２は、図４に示すように、プローブピン１０の長手方向に沿って延び、その延在方向の一端部が弾性部１１の第１端部１１１に接続されている。第１接触部１２の延在方向の他端部には、第１接点部１２１が設けられている。また、第２接触部１３は、図４に示すように、プローブピン１０の長手方向に沿って延び、その延在方向の一端部が弾性部１１の第２端部１１２に接続されている。第２接触部１３の延在方向の他端部には、第２接点部１３１が設けられている。 As shown in FIG. 4, the first contact portion 12 extends along the longitudinal direction of the probe pin 10, and one end portion in the extending direction thereof is connected to the first end portion 111 of the elastic portion 11. A first contact portion 121 is provided at the other end of the first contact portion 12 in the extending direction. Further, as shown in FIG. 4, the second contact portion 13 extends along the longitudinal direction of the probe pin 10, and one end portion in the extending direction thereof is connected to the second end portion 112 of the elastic portion 11. A second contact portion 131 is provided at the other end of the second contact portion 13 in the extending direction.

第１接触部１２および第２接触部１３の各々は、プローブピン１０の長手方向沿いに延びる仮想直線Ｌ２に沿って直列的に配置されている。すなわち、図５に示すように、弾性部１１の各直線部３１、３２、５１、５２、７１、７２、９１、９２と、第１湾曲部４１、４２および第３湾曲部８１、８２は、仮想直線Ｌ２に対して同じ側（すなわち、第１接触部１２の幅方向の一方側）に配置され、第２湾曲部６１、６２は、第１接触部１２および第２接触部１３の間でかつ仮想直線Ｌ２に沿って直列的に配置されている。 Each of the first contact portion 12 and the second contact portion 13 is arranged in series along a virtual straight line L2 extending along the longitudinal direction of the probe pin 10. That is, as shown in FIG. 5, the linear portions 31, 32, 51, 52, 71, 72, 91, 92 of the elastic portion 11 and the first curved portions 41, 42 and the third curved portions 81, 82 are The second curved portions 61 and 62 are arranged on the same side with respect to the virtual straight line L2 (that is, one side in the width direction of the first contact portion 12), and the second curved portions 61 and 62 are located between the first contact portion 12 and the second contact portion 13. And they are arranged in series along the virtual straight line L2.

図４に示すように、第１接触部１２のその延在方向の中間部における幅方向の一方側には、支持部１２２が設けられている。支持部１２２は、第１接触部１２の板厚方向から見て、第１接触部１から、プローブピン１０の長手方向に交差する方向（例えば、直交方向）でかつ仮想直線Ｌ３に対する第１直線部３１、３２側に向かって突出している。 As shown in FIG. 4, a support portion 122 is provided on one side in the width direction in the intermediate portion of the first contact portion 12 in the extending direction. The support portion 122 is a first straight line in a direction (for example, an orthogonal direction) intersecting the longitudinal direction of the probe pin 10 from the first contact portion 1 and with respect to the virtual straight line L3 when viewed from the plate thickness direction of the first contact portion 12. It protrudes toward the portions 31 and 32.

図２に示すように、ソケット３の収容部７にプローブピン１０を収容したとき、第１接触部１２の支持部１２２は、プローブピン１０の長手方向における第１接点部１２１側の面が、収容部７を構成する第２ハウジング６の第１ハウジング５に対向する面に当接するように構成されている。また、プローブピン１０は、その長手方向における第２接点部１３１側の面が収容部７を構成するソケット３の第２ハウジング６に対向する面に、帯状弾性片２１の第４直線部９１が当接するように構成されている。すなわち、第１接触部１２の支持部１２２および帯状弾性片２１の第４直線部９１により、プローブピン１０が収容部７の内部で支持されるように構成されている。 As shown in FIG. 2, when the probe pin 10 is accommodated in the accommodating portion 7 of the socket 3, the support portion 122 of the first contact portion 12 has a surface on the first contact portion 121 side in the longitudinal direction of the probe pin 10. The second housing 6 constituting the accommodating portion 7 is configured to come into contact with a surface facing the first housing 5. Further, the probe pin 10 has a fourth straight line portion 91 of the strip-shaped elastic piece 21 on a surface whose surface on the second contact portion 131 side in the longitudinal direction faces the second housing 6 of the socket 3 constituting the accommodating portion 7. It is configured to abut. That is, the probe pin 10 is configured to be supported inside the accommodating portion 7 by the support portion 122 of the first contact portion 12 and the fourth straight line portion 91 of the strip-shaped elastic piece 21.

ソケット３の収容部７に収容された状態においても、各湾曲部４１、４２、６１、６２、８１、８２の中心角θ１、θ２、θ３は、９０度よりも大きく１８０度よりも小さくなるように構成されている。 Even in the state of being accommodated in the accommodating portion 7 of the socket 3, the central angles θ1, θ2, and θ3 of the curved portions 41, 42, 61, 62, 81, 82 are larger than 90 degrees and smaller than 180 degrees. It is configured in.

なお、第１接触部１２の支持部１２２を省略して、帯状弾性片２１の第１直線部３１が、第２ハウジング６の第１ハウジング５に対向する面に当接するように構成してもよい。すなわち、帯状弾性片２１の第１直線部３１および第４直線部９１により、プローブピン１０が収容部７の内部で支持されるように構成してもよい。 Even if the support portion 122 of the first contact portion 12 is omitted, the first straight portion 31 of the strip-shaped elastic piece 21 is configured to come into contact with the surface of the second housing 6 facing the first housing 5. good. That is, the probe pin 10 may be supported inside the accommodating portion 7 by the first straight line portion 31 and the fourth straight line portion 91 of the strip-shaped elastic piece 21.

また、図４に示すように、第２接触部１３のプローブピン１０の長手方向における弾性部１１側の端部には、第２接触部１３を板厚方向に貫通する貫通孔部１３２が設けられている。この貫通孔部１３２は、プローブピン１０の長手方向に延びて、帯状弾性片２１、２２の間の隙間２３に接続されている。この貫通孔部１３２により、第２接触部１３に発生する応力を分散させている。 Further, as shown in FIG. 4, a through hole 132 that penetrates the second contact portion 13 in the plate thickness direction is provided at the end portion of the second contact portion 13 on the elastic portion 11 side in the longitudinal direction of the probe pin 10. Has been done. The through hole portion 132 extends in the longitudinal direction of the probe pin 10 and is connected to the gap 23 between the band-shaped elastic pieces 21 and 22. The stress generated in the second contact portion 13 is dispersed by the through hole portion 132.

ところで、第１湾曲部４１、４２の中心角θ１が、９０度以下であった場合、第１接触部１２および第２接触部１３を直列的に配置することができず、また、検査対象物および検査装置に対する接触信頼性を確保できる弾性力を備えた弾性部１１を得ることが困難になる。 By the way, when the central angle θ1 of the first curved portions 41 and 42 is 90 degrees or less, the first contact portion 12 and the second contact portion 13 cannot be arranged in series, and the inspection object In addition, it becomes difficult to obtain an elastic portion 11 having an elastic force capable of ensuring contact reliability with respect to the inspection device.

また、第１湾曲部４１、４２の中心角θ１が、１８０度以上であった場合、第１直線部３１、３２と第２直線部５１、５２との間に十分な距離を設けることができないため、例えば、第１直線部３１、３２を流れる高周波領域の信号が、第２直線部５１、５２を流れる高周波領域の信号に対して干渉し、高周波領域の信号の損失を低減するのが困難になる。 Further, when the central angle θ1 of the first curved portions 41 and 42 is 180 degrees or more, a sufficient distance cannot be provided between the first straight portions 31 and 32 and the second straight portions 51 and 52. Therefore, for example, the signal in the high frequency region flowing through the first straight lines 31 and 32 interferes with the signal in the high frequency region flowing through the second straight lines 51 and 52, and it is difficult to reduce the loss of the signal in the high frequency region. become.

これに対して、前記プローブピン１０では、弾性部１１が、プローブピン１０の長手方向に交差する方向に延びて延在方向の一端部１１１が第１接触部１２に接続された第１直線部３１、３２と、プローブピン１０の長手方向に交差する方向でかつ第１接触部１２から離れる方向に突出した円弧状に延びて延在方向の一端部が第１直線部３１、３２のその延在方向の他端部に接続された第１湾曲部４１、４２と、プローブピン１０の長手方向に交差する方向に延びて延在方向の一端部が第１湾曲部４１、４２のその延在方向の他端部に接続された第２直線部５１、５２とを有し、第１湾曲部４１、４２の中心角θ１が、９０度よりも大きく１８０度よりも小さくなるように構成されている。これにより、プローブピン１０の長手方向における第１直線部３１、３２と第２直線部５１、５２との間に距離を設けることができるので、例えば、第１直線部３１、３２を流れる高周波領域の信号の第２直線部５１、５２を流れる高周波領域の信号に対する干渉を低減できる。その結果、検査対象物および検査装置に対する接触信頼性を確保しつつ、高周波領域の信号の損失を低減できるプローブピン１０を実現できる。 On the other hand, in the probe pin 10, the elastic portion 11 extends in a direction intersecting the longitudinal direction of the probe pin 10, and one end portion 111 in the extending direction is connected to the first contact portion 12. 31 and 32 extend in an arc shape extending in a direction intersecting the longitudinal direction of the probe pin 10 and protruding in a direction away from the first contact portion 12, and one end in the extending direction is an extension of the first straight portions 31 and 32. The first curved portions 41 and 42 connected to the other end in the existing direction and one end in the extending direction extending in the direction intersecting the longitudinal direction of the probe pin 10 are the extending portions of the first curved portions 41 and 42. It has second straight portions 51 and 52 connected to the other end in the direction, and the central angle θ1 of the first curved portions 41 and 42 is configured to be larger than 90 degrees and smaller than 180 degrees. There is. As a result, a distance can be provided between the first straight portions 31 and 32 and the second straight portions 51 and 52 in the longitudinal direction of the probe pin 10, so that, for example, a high frequency region flowing through the first straight portions 31 and 32 can be provided. It is possible to reduce interference with the signal in the high frequency region flowing through the second straight line portions 51 and 52 of the signal. As a result, it is possible to realize the probe pin 10 that can reduce the signal loss in the high frequency region while ensuring the contact reliability with respect to the inspection object and the inspection device.

ここで、各湾曲部４１、４２、６１、６２、８１、８２の中心角θ１、θ２、θ３が全て１８０度のプローブピン１０（以下、比較例のプローブピンという）と、各湾曲部４１、４２、６１、６２、８１、８２の中心角θ１、θ２、θ３が全て１５０度のプローブピン１０（以下、実施例のプローブピンという）とについて、インサーションロスおよびリターンロスを測定した。 Here, the probe pins 10 (hereinafter, referred to as probe pins of the comparative example) in which the central angles θ1, θ2, and θ3 of the curved portions 41, 42, 61, 62, 81, and 82 are all 180 degrees, and the curved portions 41, Insertion loss and return loss were measured with respect to the probe pin 10 (hereinafter referred to as the probe pin of the embodiment) in which the central angles θ1, θ2, and θ3 of 42, 61, 62, 81, and 82 were all 150 degrees.

図６に示すように、比較例のプローブピンでは、１４．２８Ｇｂｐｓの信号に対して−１ｄＢのインサーションロスが発生し、１３．４０Ｇｂｐｓの信号に対して−１０ｄＢのリターンロスが発生した。一方、図７に示すように、実施例のプローブピンでは、３０．６０Ｇｂｐｓの信号に対して−１ｄＢのインサーションロスが発生し、３０．２４Ｇｂｐｓの信号に対して−１０ｄＢのリターンロスが発生した。すなわち、第１湾曲部４１、４２の中心角θ１が、９０度よりも大きく１８０度よりも小さくなるようにプローブピン１０を構成することで、高周波領域の信号の損失を低減できることができた。 As shown in FIG. 6, in the probe pin of the comparative example, an insertion loss of -1 dB was generated for a signal of 14.28 Gbps, and a return loss of -10 dB was generated for a signal of 13.40 Gbps. On the other hand, as shown in FIG. 7, in the probe pin of the example, an insertion loss of -1 dB was generated for a signal of 30.60 Gbps, and a return loss of -10 dB was generated for a signal of 30.24 Gbps. .. That is, by configuring the probe pin 10 so that the central angle θ1 of the first curved portions 41 and 42 is larger than 90 degrees and smaller than 180 degrees, it was possible to reduce the signal loss in the high frequency region.

また、前記プローブピン１０によれば、弾性部１１が、相互に隙間２３を空けて配置された複数の帯状弾性片で構成され、各帯状弾性片２１、２２の幅Ｗ１、Ｗ２が、隣接する帯状弾性片２１、２２間の最短距離Ｗ３よりも小さくなるように構成されている。これにより、例えば、第１接点部１２１および第２接点部１３１の各々が検査対象物および検査装置に対して接触して各帯状弾性片２１、２２がプローブピン１０の長手方向に圧縮されたときでも、各帯状弾性片２１、２２同士の接触を防止することができ、高い接触信頼性を確保できるプローブピン１０を実現できる。 Further, according to the probe pin 10, the elastic portion 11 is composed of a plurality of strip-shaped elastic pieces arranged with a gap 23 between them, and the widths W1 and W2 of the strip-shaped elastic pieces 21 and 22 are adjacent to each other. It is configured to be smaller than the shortest distance W3 between the band-shaped elastic pieces 21 and 22. As a result, for example, when each of the first contact portion 121 and the second contact portion 131 comes into contact with the inspection object and the inspection device, and the strip-shaped elastic pieces 21 and 22 are compressed in the longitudinal direction of the probe pin 10. However, it is possible to prevent the strip-shaped elastic pieces 21 and 22 from coming into contact with each other, and to realize the probe pin 10 that can secure high contact reliability.

また、前記検査治具２によれば、プローブピン１０により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査治具２を実現できる。 Further, according to the inspection jig 2, the probe pin 10 has high contact reliability with respect to the inspection object and the inspection device, and the inspection cure with little signal loss in the high frequency region when connected to the inspection object and the inspection device. Tool 2 can be realized.

また、前記検査ユニット１によれば、検査治具２により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査ユニット２を実現できる。 Further, according to the inspection unit 1, the inspection jig 2 has high contact reliability with respect to the inspection object and the inspection device, and the inspection unit has a small signal loss in the high frequency region when connected to the inspection object and the inspection device. 2 can be realized.

なお、前記検査ユニット１は、検査装置の一部を構成することができる。このような検査装置によれば、検査ユニット１により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査装置を実現できる。 The inspection unit 1 can form a part of the inspection device. According to such an inspection device, the inspection unit 1 realizes an inspection device having high contact reliability with respect to the inspection object and the inspection device and having a small signal loss in a high frequency region when connected to the inspection object and the inspection device. can.

弾性部１１は、第１直線部３１、３２、第１湾曲部４１、４２および第２直線部５１、５２を有し、第１湾曲部４１、４２の中心角が９０度よりも大きく１８０度よりも小さくなるように構成されていればよい。 The elastic portion 11 has first straight portions 31, 32, first curved portions 41, 42, and second straight portions 51, 52, and the central angle of the first curved portions 41, 42 is 180 degrees, which is larger than 90 degrees. It suffices if it is configured to be smaller than.

例えば、弾性部１１は、図８に示すように、第１直線部３１、３２、第１湾曲部４１、４２および第２直線部５１、５２のみで構成してもよい。 For example, as shown in FIG. 8, the elastic portion 11 may be composed of only the first straight portions 31, 32, the first curved portions 41, 42, and the second straight portions 51, 52.

また、弾性部１１は、相互に隙間２３を空けて配置された２つの帯状弾性片２１、２２を有する場合に限らない。弾性部１１は、例えば、図９に示すように、相互に隙間を空けて配置された４つの帯状弾性片２１、２２、２４、２５を有していてもよいし、図示していないが、１つの帯状弾性片を有していてもよい。 Further, the elastic portion 11 is not limited to the case where it has two strip-shaped elastic pieces 21 and 22 arranged so as to have a gap 23 between them. As shown in FIG. 9, the elastic portion 11 may have four strip-shaped elastic pieces 21, 22, 24, and 25 arranged with a gap from each other, and is not shown, although it is not shown. It may have one band-shaped elastic piece.

各帯状弾性片２１、２２の幅Ｗ１、Ｗ２は、隣接する帯状弾性片２１、２２間の最短距離Ｗ３よりも小さい場合に限らず、大きくてもよい。 The widths W1 and W2 of the strip-shaped elastic pieces 21 and 22 are not limited to being smaller than the shortest distance W3 between the adjacent strip-shaped elastic pieces 21 and 22, and may be larger.

第１接触部１２および第２接触部１３は、プローブピン１０の設計等に応じて、その形状等を適宜変更できる。例えば、第２接触部１３は、図９に示すように、プローブピン１０の長手方向に沿って延びる一対の脚部１３３、１３４の先端部のそれぞれに設けてもよい。すなわち、第１接点部１２１および第２接点部１３１の各々は、検査装置あるいは検査対象物の様々な態様に応じて、形状および位置などを適宜変更することができる。 The shapes and the like of the first contact portion 12 and the second contact portion 13 can be appropriately changed according to the design and the like of the probe pin 10. For example, as shown in FIG. 9, the second contact portion 13 may be provided at each of the tip portions of the pair of leg portions 133 and 134 extending along the longitudinal direction of the probe pin 10. That is, the shape and position of each of the first contact portion 121 and the second contact portion 131 can be appropriately changed according to various aspects of the inspection device or the inspection object.

検査治具２およびベースハウジング４は、検査装置あるいは検査対象物の様々な態様に応じて、その構成を適宜変更することができる。すなわち、検査治具２およびベースハウジング４を汎用化して、検査ユニット１（ひいては検査装置）の生産性を向上させることができる。 The configurations of the inspection jig 2 and the base housing 4 can be appropriately changed according to various aspects of the inspection device or the inspection object. That is, the inspection jig 2 and the base housing 4 can be generalized to improve the productivity of the inspection unit 1 (and thus the inspection device).

以上、図面を参照して本開示における種々の実施形態を詳細に説明したが、最後に、本開示の種々の態様について説明する。なお、以下の説明では、一例として、参照符号も添えて記載する。 The various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In the following description, a reference reference numeral is also provided as an example.

本開示の第１態様のプローブピン１０は、
長手方向に沿って伸縮する弾性部１１と、
前記弾性部１１の前記長手方向の第１端部１１１に接続された板状の第１接触部１２と、
前記第１接触部１２に対して直列的に配置され、前記弾性部１１の前記長手方向の第２端部１１２に接続された板状の第２接触部１３と
を備え、
前記弾性部１１が、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記第１接触部に接続された第１直線部３１と、
前記長手方向に交差する方向でかつ前記第１接触部１２から離れる方向に突出した円弧状に延びていると共に、その延在方向の一端部が前記第１直線部３１のその延在方向の他端部に接続された湾曲部４１と、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記湾曲部４１のその延在方向の他端部に接続された第２直線部５１と
を有し、
前記湾曲部４１の中心角θ１が、９０度よりも大きく１８０度よりも小さくなるように構成されている。The probe pin 10 of the first aspect of the present disclosure is
An elastic portion 11 that expands and contracts along the longitudinal direction,
A plate-shaped first contact portion 12 connected to the first end portion 111 in the longitudinal direction of the elastic portion 11 and
A plate-shaped second contact portion 13 arranged in series with the first contact portion 12 and connected to the second end portion 112 in the longitudinal direction of the elastic portion 11 is provided.
The elastic portion 11
A first straight line portion 31 extending in a direction intersecting the longitudinal direction and having one end portion in the extending direction connected to the first contact portion.
It extends in an arc shape protruding in a direction intersecting the longitudinal direction and in a direction away from the first contact portion 12, and one end portion in the extending direction thereof is other than the extending direction of the first straight line portion 31. The curved portion 41 connected to the end and
It has a second straight line portion 51 extending in a direction intersecting the longitudinal direction and having one end portion in the extending direction connected to the other end portion in the extending direction of the curved portion 41.
The central angle θ1 of the curved portion 41 is configured to be larger than 90 degrees and smaller than 180 degrees.

第１態様のプローブピン１０によれば、プローブピン１０の長手方向における第１直線部３１と第２直線部５１との間に距離を設けることができるので、例えば、第１直線部３１を流れる高周波領域の信号の第２直線部５１を流れる高周波領域の信号に対する干渉を低減できる。その結果、検査対象物および検査装置に対する接触信頼性を確保しつつ、高周波領域の信号の損失を低減できるプローブピン１０を実現できる。 According to the probe pin 10 of the first aspect, a distance can be provided between the first straight line portion 31 and the second straight line portion 51 in the longitudinal direction of the probe pin 10, so that, for example, the probe pin 10 flows through the first straight line portion 31. Interference with the signal in the high frequency region flowing through the second straight line portion 51 of the signal in the high frequency region can be reduced. As a result, it is possible to realize the probe pin 10 that can reduce the signal loss in the high frequency region while ensuring the contact reliability with respect to the inspection object and the inspection device.

本開示の第２態様のプローブピン１０は、
前記弾性部１１が、相互に隙間２３を空けて配置された複数の帯状弾性片２１、２２で構成され、
前記複数の帯状弾性片２１、２２の各々の幅Ｗ１、Ｗ２が、隣接する前記複数の帯状弾性片２１、２２間の最短距離Ｗ３よりも小さくなるように構成されている。The probe pin 10 of the second aspect of the present disclosure is
The elastic portion 11 is composed of a plurality of strip-shaped elastic pieces 21 and 22 arranged with a gap 23 between them.
The widths W1 and W2 of the plurality of strip-shaped elastic pieces 21 and 22 are configured to be smaller than the shortest distance W3 between the plurality of strip-shaped elastic pieces 21 and 22 adjacent to each other.

第２態様のプローブピン１０によれば、例えば、第１接点部１２１および第２接点部１３１の各々が検査対象物および検査装置に対して接触して各帯状弾性片２１、２２がプローブピン１０の長手方向に圧縮されたときでも、各帯状弾性片２１、２２同士の接触を防止することができ、高い接触信頼性を確保できるプローブピン１０を実現できる。 According to the probe pin 10 of the second aspect, for example, the first contact portion 121 and the second contact portion 131 are in contact with the inspection object and the inspection device, and the strip-shaped elastic pieces 21 and 22 are in contact with the probe pin 10. It is possible to prevent the strip-shaped elastic pieces 21 and 22 from coming into contact with each other even when compressed in the longitudinal direction of the probe pin 10, and it is possible to realize the probe pin 10 that can secure high contact reliability.

本開示の第３態様の検査治具２は、
前記プローブピン１０と、
前記プローブピン１０を収容可能な収容部７を有するソケット３と
を備え、
前記プローブピン１０が、前記湾曲部４１の中心角が、９０度よりも大きく１８０度よりも小さくなるように、前記収容部７に収容されている。The inspection jig 2 of the third aspect of the present disclosure is
With the probe pin 10
A socket 3 having an accommodating portion 7 capable of accommodating the probe pin 10 is provided.
The probe pin 10 is housed in the housing portion 7 so that the central angle of the curved portion 41 is larger than 90 degrees and smaller than 180 degrees.

第３態様の検査治具２によれば、プローブピン１０により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査治具２を実現できる。 According to the inspection jig 2 of the third aspect, the probe pin 10 has high contact reliability with respect to the inspection object and the inspection device, and inspection with little signal loss in the high frequency region when connected to the inspection object and the inspection device. The jig 2 can be realized.

本開示の第４態様の検査ユニット１は、
前記検査治具を少なくとも１つ備えた。The inspection unit 1 of the fourth aspect of the present disclosure is
At least one of the inspection jigs was provided.

第４態様の検査ユニット１によれば、検査治具２により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査ユニット２を実現できる。 According to the inspection unit 1 of the fourth aspect, the inspection jig 2 has high contact reliability with respect to the inspection object and the inspection device, and inspection with little signal loss in the high frequency region when connected to the inspection object and the inspection device. Unit 2 can be realized.

本開示の第５態様の検査装置は、
前記検査ユニット１を少なくとも１つ備えた。The inspection device of the fifth aspect of the present disclosure is
At least one of the inspection units 1 was provided.

第４態様の検査装置によれば、検査ユニット１により、検査対象物および検査装置に対する接触信頼性が高く、検査対象物および検査装置に接続した場合の高周波領域の信号の損失が少ない検査装置を実現できる。 According to the inspection device of the fourth aspect, the inspection unit 1 provides an inspection device having high contact reliability to the inspection object and the inspection device and having a small signal loss in the high frequency region when connected to the inspection object and the inspection device. realizable.

なお、前記様々な実施形態または変形例のうちの任意の実施形態または変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせまたは実施例同士の組み合わせまたは実施形態と実施例との組み合わせが可能であると共に、異なる実施形態または実施例の中の特徴同士の組み合わせも可能である。 By appropriately combining any of the various embodiments or modifications, the effects of each can be achieved. In addition, combinations of embodiments or examples or combinations of embodiments and examples are possible, and features in different embodiments or examples are also possible.

本開示のプローブピンは、例えば、液晶パネルの検査に用いる検査治具に適用できる。 The probe pin of the present disclosure can be applied to, for example, an inspection jig used for inspecting a liquid crystal panel.

本開示の検査治具は、例えば、液晶パネルの検査に用いる検査ユニットに適用できる。 The inspection jig of the present disclosure can be applied to, for example, an inspection unit used for inspecting a liquid crystal panel.

本開示の検査ユニットは、例えば、液晶パネルの検査装置に適用できる。 The inspection unit of the present disclosure can be applied to, for example, an inspection device for a liquid crystal panel.

本開示の検査装置は、例えば、液晶パネルの検査に用いることができる。 The inspection device of the present disclosure can be used, for example, for inspecting a liquid crystal panel.

１ 検査ユニット
２ 検査治具
３ ソケット
４ ベースハウジング
５ 第１ハウジング
６ 第２ハウジング
７ 収容部
１０ プローブピン
１１ 弾性部
１１１ 第１端部
１１２ 第２端部
１２ 第１接触部
１２１ 第１接点部
１３ 第２接触部
１３１ 第２接点部
１３２ 貫通孔部
１３３、１３４ 脚部
２１、２２、２４、２５ 帯状弾性片
２１１、２２１ 第１端部
２１２、２２２ 第２端部
２３ 隙間
３１、３２ 第１直線部
４１、４２ 第１湾曲部
５１、５２ 第２直線部
６１、６２ 第２湾曲部
７１、７２ 第３直線部
８１、８２ 第３湾曲部
９１、９２ 第４直線部
１００ 基板
１１０ 検査対象物
１２０ 端子
θ１、θ２、θ３ 中心角
Ｌ１、Ｌ２ 直線
Ｗ１、Ｗ２ 幅
Ｗ３ 最短距離1 Inspection unit 2 Inspection jig 3 Socket 4 Base housing 5 1st housing 6 2nd housing 7 Housing part 10 Probe pin 11 Elastic part 111 1st end 112 2nd end 12 1st contact 121 1st contact 13 2nd contact 131 2nd contact 132 Through hole 133, 134 Leg 21, 22, 24, 25 Band-shaped elastic piece 211, 221 1st end 212, 222 2nd end 23 Gap 31, 32 1st straight line Part 41, 42 First curved part 51, 52 Second straight part 61, 62 Second curved part 71, 72 Third straight part 81, 82 Third curved part 91, 92 Fourth straight part 100 Substrate 110 Inspection object 120 Terminals θ1, θ2, θ3 Central angles L1, L2 Straight lines W1, W2 Width W3 Shortest distance

Claims (4)

長手方向に沿って伸縮する弾性部と、
前記弾性部の前記長手方向の第１端部に接続された板状の第１接触部と、
前記第１接触部に対して直列的に配置され、前記弾性部の前記長手方向の第２端部に接続された板状の第２接触部と
を備え、
前記弾性部が、
前記長手方向に直交する方向に延びると共に、その延在方向の一端部が前記第１接触部に接続された第１直線部と、
前記第１直線部のその延在方向の他端部に接続された第１湾曲部と、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記第１湾曲部のその延在方向の他端部に接続された第２直線部と、
前記第２直線部のその延在方向の他端部に接続された第２湾曲部と、
前記長手方向に交差する方向に延びると共に、その延在方向の一端部が前記第２湾曲部のその延在方向の他端部に接続された第３直線部と、
前記第３直線部のその延在方向の他端部に接続された第３湾曲部と、
前記長手方向に直交する方向に延びると共に、その延在方向の一端部が前記第３湾曲部のその延在方向の他端部に接続され、その延在方向の他端部が前記第２接触部に接続された第４直線部と
を有し、
前記第１湾曲部、前記第２湾曲部および前記第３湾曲部の各々の中心角が、９０度よりも大きく１８０度よりも小さくなるように構成されており、
前記弾性部が、相互に隙間を空けて配置された複数の帯状弾性片で構成され、
前記複数の帯状弾性片の各々の幅が、隣接する前記複数の帯状弾性片間の最短距離よりも小さくなるように構成されている、プローブピン。 An elastic part that expands and contracts along the longitudinal direction,
A plate-shaped first contact portion connected to the first end portion in the longitudinal direction of the elastic portion,
A plate-shaped second contact portion arranged in series with the first contact portion and connected to the second end portion in the longitudinal direction of the elastic portion is provided.
The elastic part
A first straight line portion extending in a direction orthogonal to the longitudinal direction and having one end portion in the extending direction connected to the first contact portion.
The first curved portion connected to the other end of the first straight portion in the extending direction, and the first curved portion.
A second straight line portion extending in a direction intersecting the longitudinal direction and having one end portion in the extending direction connected to the other end portion in the extending direction of the first curved portion.
A second curved portion connected to the other end of the second straight portion in the extending direction, and a second curved portion.
A third straight line portion extending in a direction intersecting the longitudinal direction and having one end portion in the extending direction connected to the other end portion in the extending direction of the second curved portion.
A third curved portion connected to the other end of the third straight portion in the extending direction, and a third curved portion.
While extending in a direction orthogonal to the longitudinal direction, one end in the extending direction is connected to the other end in the extending direction of the third curved portion, and the other end in the extending direction is the second contact. It has a fourth straight part connected to the part,
The central angles of the first curved portion, the second curved portion, and the third curved portion are each larger than 90 degrees and smaller than 180 degrees .
The elastic portion is composed of a plurality of strip-shaped elastic pieces arranged so as to be spaced apart from each other.
A probe pin configured such that the width of each of the plurality of strip-shaped elastic pieces is smaller than the shortest distance between the plurality of strip-shaped elastic pieces adjacent to each other. 請求項１のプローブピンと、
前記プローブピンを収容可能な収容部を有するソケットと
を備え、
前記プローブピンが、前記第１湾曲部、前記第２湾曲部および前記第３湾曲部の各々の中心角が、９０度よりも大きく１８０度よりも小さくなるように、前記収容部に収容されている、検査治具。 The probe pin of claim 1 and
A socket having an accommodating portion capable of accommodating the probe pin is provided.
The probe pin is housed in the housing so that the central angles of the first curved portion, the second curved portion, and the third curved portion are larger than 90 degrees and smaller than 180 degrees. There is an inspection jig. 請求項２の検査治具を少なくとも１つ備えた、検査ユニット。 An inspection unit provided with at least one inspection jig according to claim 2. 請求項３の検査ユニットを少なくとも１つ備えた検査装置。 An inspection device including at least one inspection unit according to claim 3.
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