JP5599150B2 - Probe unit structure - Google Patents

Description

  The present invention relates to a probe unit structure that uses a wire-type probe integrated with a lead wire, and more particularly to a probe unit structure that is low in cost and excellent in measurement accuracy with an object to be inspected.

  In recent years, various circuit boards such as high-density mounting boards used for mobile phones and the like, IC package boards such as BGA (Ball Grid Array) and CSP (Chip Size Package) incorporated in personal computers, etc., are often used. Yes. Such a circuit board is subjected to, for example, a measurement of a direct current resistance value or a continuity test in the processes before and after mounting, and the electrical characteristics of the circuit board are inspected. The inspection of electrical characteristics is performed using an inspection apparatus jig (hereinafter referred to as “probe unit”) connected to an inspection apparatus for measuring electrical characteristics. For example, a pin shape mounted on the probe unit is used. The tip of the probe needle is brought into contact with an electrode (hereinafter also referred to as “measurement object”) of the circuit board (see, for example, Patent Document 1).

JP 2007-322369 A

  6, 7, and 9 of Patent Document 1 describe the probe units 10 and 110 to which various types of probe needles 1 and 101 are attached. The probe needles assembled to the probe units 10 and 110 are described. 1 and 101 are in contact with the lead wires 50 and 150, and an electrical signal at the time of measurement is sent to the inspection device via the lead wires 50 and 150.

  However, in the conventional probe unit described in Patent Document 1 and the like, the probe and the lead wire are separated, and the contact between the probe and the lead wire is changed by changing the contact pressure or repeating the contact itself. There is a problem that the resistance becomes unstable. Similarly, the probe had to be replaced when the electrical contact property deteriorated due to contamination, oxidation, or the like at the probe tip contacting the object to be inspected or the probe trailing end contacting the lead wire.

  In addition, since the conventional four-terminal resistance measurement probe unit has a structure in which one probe is inserted into one plate hole, it is necessary to reduce the diameter of the plate hole and reduce the interval between the plate holes. Many holes with small diameters had to be drilled, and the drilling cost was high. On the other hand, as a low-cost 4-terminal resistance measurement probe unit, a structure in which the diameter of the plate hole is enlarged and a plurality of probes are inserted into one plate hole is conceivable, but each probe tip and each lead inserted into the same hole can be considered. Since stable connection with the lead wire corresponding to the wire becomes unstable and difficult, it has not been practically used.

  The present invention solves the above-described problems, and an object thereof is to provide a low-cost probe unit structure that can eliminate instability of contact resistance and is excellent in measurement accuracy with an object to be inspected. .

The probe unit structure of the present invention that solves the above problems presses the front ends of a plurality of probes mounted on a guide plate against an object to be inspected, uses the repulsive force of the curved probe as an inspection pressure, and the rear end of the probe A probe unit structure using a side as a lead wire, wherein the probe is a wire-type probe integrated with a lead wire having a metal wire and an insulating layer provided on the metal wire; It is composed of a plurality of plates in which holes for inserting probes are formed, and the plurality of plates are arranged between a probe tip side plate that protrudes the probe tip by a predetermined length from the object to be inspected, and the probe tip side plate. in is fixed so as to ensure a predetermined length, which and spaced from the probe tip plate, the probe tip side pre An intermediate plate that determines the length of the curved portion where the probe bends between the intermediate plate and an intermediate plate that is spaced apart from the intermediate plate and is slidable on the intermediate plate side, and fixes the probe And at least a probe rear end side plate.

  According to this invention, since the tip of the probe hits the object to be inspected and the lead wire integrated wire type probe using the rear end side of the probe as the lead wire is used, the conventional probe and lead wire Instability of the contact resistance of the battery does not become a problem. Further, since the plurality of plates constituting the guide plate include the probe tip side plate, the intermediate plate, and the probe rear end side plate, for example, the probe tip is soiled or oxidized, and the probe tip is ground. When the protruding length of the probe has become shorter, the probe rear end plate can be adjusted by sliding the probe rear end side plate to the intermediate plate side without changing the probe pin as in the past. It can be played back to its original state. As a result, if the tip of the probe is ground regularly or irregularly, it is not necessary to replace the probe, and the inspection object is caused by uneven projection length based on the length variation of the probe pin as in the past. Because there is a special advantage that there is no change in the contact pressure to the body, it can be pressed against the object under constant contact pressure, providing a low-cost probe unit structure with excellent measurement accuracy with the object under inspection. can do.

  In the probe unit structure of the present invention, the adjustment mechanism of the probe rear end side plate is configured to grind and grind the probe tip when the probe tip is pressed against the object to be inspected and becomes dirty or oxidized. In order to return the shortened projecting length to the original projecting length, the adjusting mechanism is configured to slide toward the intermediate plate.

  In the probe unit structure of the present invention, the inspection pressure is adjusted by changing the distance between the probe tip side plate and the intermediate plate.

In the probe unit structure of the present invention, the probe front end side plate, the intermediate plate, and the probe rear end side plate are each constituted by at least one plate.

In the probe unit structure of the present invention, the holes formed in the plurality of plates are configured to have a predetermined diameter into which one or more and three or less probes can be inserted.

According to the probe unit structure of the present invention, since a wire-type probe integrated with a lead wire is used, there is no problem of instability of contact resistance between the probe and the lead wire as in the prior art. If the tip is soiled or oxidized and the tip of the probe is ground, and the protruding length of the tip of the probe is shortened, the probe pin is slid to the intermediate plate side by sliding the probe rear end plate as before. Since the probe tip side can be restored to the original state without replacing the probe, if the probe tip is ground regularly or irregularly, the probe need not be replaced. Furthermore, since there is no change in the contact pressure to the test object based on the length variation of the probe pin as in the past, it can be pressed against the test object with a constant contact pressure, and the measurement accuracy with the test object And a low-cost probe unit structure can be provided.

It is a typical front view which shows an example of the basic structure of the probe unit structure of this invention. It is a typical top view which shows an example when the probe unit structure of this invention is seen from the to-be-inspected object side. In the probe unit structure of this invention, it is a typical front view of the embodiment with which many wire type probes were mounted. It is a typical front view which shows the aspect of the assembly procedure of the probe unit structure of this invention illustrated in FIG. It is a typical front view which shows the aspect after the assembly procedure shown in FIG. It is a typical section lineblock diagram showing the mode which inspects the electrical property of a to-be-inspected object with the probe unit structure of the present invention.

  The probe unit structure of the present invention will be described below with reference to the drawings.

  FIG. 1 is a schematic front view showing an example of the basic structure of the probe unit structure of the present invention. FIG. 2 is a schematic plan view showing an example when the probe unit structure of the present invention is viewed from the inspection object side. FIG. 3 is a schematic front view of an embodiment in which a number of wire-type probes are mounted in the probe unit structure of the present invention. 4 is a schematic front view showing an aspect of the assembly procedure of the probe unit structure of the present invention illustrated in FIG. 1, and FIG. 5 is a schematic front view showing an aspect after the assembly procedure shown in FIG. FIG. FIG. 6 is a schematic cross-sectional configuration diagram showing an aspect of inspecting the electrical characteristics of the object to be inspected by the probe unit structure of the present invention. The present invention is not limited to the illustrated embodiment.

  As shown in FIGS. 1 and 3, the probe unit structure 1 of the present invention presses the tips 11 of a plurality of probes 10 attached to a guide plate 20 against an object to be inspected 50, and the repulsive force of the curved probe 10 is applied. This structure is used as an inspection pressure and uses the rear end 12 side of the probe 10 as a lead wire. And the feature is that the probe 10 is a wire-type probe integrated with a lead wire having a metal wire 15 and an insulating layer 16 provided on the metal wire 15, and the guide plate 20 is In other words, it is composed of the following plurality of plates (21, 22, 23) in which holes 24 into which the probe 10 is inserted are formed.

  The plurality of plates constituting the guide plate 20 are spaced apart from the probe tip side plate 21 and the probe tip side plate 21 that project the probe tip 11 by a predetermined length L1 from the inspected object 50 (see FIG. 6) side. An intermediate plate 22 that determines the length L2 of the bending portion 13 where the probe 10 bends between the probe tip side plate 21 and the probe tip side plate 21, and is spaced apart from the intermediate plate 22 and is slidable to the intermediate plate side And a probe rear end side plate 23 for fixing the probe 10.

  In the probe unit structure 1 of the present invention, as shown in FIG. 2 (A), when two probes 10a and 10b are inserted into one plate hole 24, it can be preferably used mainly for 4-terminal resistance measurement. As shown in FIG. 2 (B), when one probe 10 is inserted into one plate hole 24, it can be preferably used mainly for two-terminal resistance measurement. As shown in FIG. When three probes 10a, 10b, and 10c are inserted into one plate hole 24, it can be preferably used mainly for four-terminal resistance measurement.

  In FIG. 1, reference numeral 14 indicates an area where the probe 10 functions as a lead portion, reference numeral 31 indicates an adhesive for fixing the probe 10 to the probe tip side plate 23, and reference numeral 40 indicates an inspection apparatus. ing.

  Hereinafter, each component will be described.

(Lead wire integrated probe)
The probe 10 is a lead wire integrated wire type probe. Here, “wire type” is used as a term that represents a certain length compared to a conventional short pin type probe, and “lead wire integrated type” is composed of a pin type probe and a lead wire. It is used as a term for the conventional signal transmission conductor structure. That is, the lead wire integrated type wire probe is not separated from the probe and the lead wire as in the conventional case, and the contact between the probe and the lead wire is caused by the contact pressure fluctuating or the contact itself is repeated. This is a long signal transmission conductor that does not cause the problem of unstable resistance, and has a metal wire 15 and an insulating layer 16 provided on the metal wire 15.

  The metal wire 15 is a linear conductor processed to a predetermined length, and is formed by cutting a metal wire (also referred to as “metal spring wire”) having high conductivity and high elastic modulus. . Examples of the metal used for the metal wire 15 include a metal having a wide elastic range. For example, a copper alloy such as beryllium copper, tungsten, rhenium tungsten, steel (for example, high speed steel: SKH) is preferably used. it can. The reason why the metal wire 15 is made of an elastic material is that the probe unit structure 1 of the present invention presses the tip 11 of the probe 10 against the inspection object 50 and uses the repulsive force of the curved probe 10 as the inspection pressure. Because.

  In the probe unit structure 1, the length of the probe tip 11 that presses against the object to be inspected 50, the length of the bending portion 13 that curves when the probe tip 11 presses against the object to be inspected, and the lead portion 14 that functions as a lead wire. Since it is necessary to secure at least the length, the probe 10 needs to have a certain length. In particular, since the lead portion 14 needs to be long, the length of the metal wire 11 is several hundred mm, for example, about 200 mm. The minimum length is about 500 mm. The metal wire 15 having such a length is normally used without a seam from the front end 11 to the rear end 12, but may be provided with a seam by fusion or caulking. However, when the joint is provided, it is necessary to be the lead portion 14.

  The metal wire 15 is usually subjected to plastic working such as cold or hot wire drawing until the metal becomes a linear conductor having a predetermined diameter. The outer diameter of the metal wire 15 is arbitrarily set depending on the size of the object to be inspected, the diameter of the plate hole 24, the number of insertions into the plate hole, the ease of handling as a lead wire, etc., but usually 20 μm or more It can be arbitrarily selected from the range of 500 μm or less, preferably 25 μm or more and 200 μm or less. In addition, although the shape of the edge part of the front end side of the metal wire 15 and the edge part of a rear end side is not specifically limited, since it grinds at the time of use as shown in FIG.5 (B), it is usually a flat surface or a little curve Any planar shape may be used.

(Insulating layer)
The insulating layer 16 is provided on the metal wire 15. The insulating layer 16 basically functions to prevent the probes from contacting each other when inspecting the electrical characteristics of the device under test 50 and to prevent a short circuit. It is provided to ensure coating strength and withstand voltage, and to facilitate insertion into a hole during mounting on a probe unit or use, reduction of sliding failure and inspection failure, and the like. Further, as shown in FIGS. 2A and 2C, when two or more insulating layers 16 are inserted into the plate hole 24, the insulating layer 16 is not connected to the metal wire 15 of another probe 10 inserted at the same time. Are provided to ensure a predetermined insulating gap (interval). The insulating gap is the thickness of the insulating layer 16 of the adjacent probe 10. The insulating layer 16 may have a single layer structure or a multilayer structure. When the insulating layer 16 is formed in a multilayer structure, it may be composed of layers having different insulating properties, a layer imparting slipperiness may be formed in the outer layer, or a layer having heat fusion properties may be formed in the outer layer. You may form in.

  The constituent material of the insulating layer 16 is not particularly limited. For example, the insulating layer 16 can be selected from polyurethane resin, polyester resin, polyesterimide resin, and polyamideimide resin. For more heat resistance, polyesterimide resin, polyamideimide resin, etc. You can choose. Moreover, an epoxy resin, an acrylic resin, etc. may be sufficient. In addition, when forming a layer that ensures slipperiness as an outer layer when a multilayer structure is formed, a fluorine-based resin material can be used, and when it is formed in order to have heat-fusibility, Polyamide, butyral, and epoxy thermoplastic resins and thermosetting resins can be used.

  The thickness of the insulating layer 16 depends on the type and outer diameter of the metal wire 15, the degree of coating strength and withstand voltage, and when two or more are inserted into the plate hole 24, Although it is arbitrarily set depending on how much insulation gap (interval) is secured between the metal wire 15 and the like, a range of usually about 1 μm to 50 μm, preferably about 3 μm to 40 μm can be exemplified. The formation of the insulating layer 16 on the metal wire 15 is usually preferably performed on the long metal wire 15 by a continuous enamel baking method, but may of course be formed by other methods.

(Guide plate)
As shown in FIG. 1 and the like, the guide plate 20 is composed of a plurality of plates (21, 22, 23) in which holes 24 into which the probes 10 are inserted is formed, and the plurality of probes 10 are mounted. As shown in FIG. 6, the guide plate 20 operates so as to press the tip 11 of the mounted probe 10 against the object to be inspected 50, and as a result, the bending portion 13 of the probe 10 is bent, and the bent probe 10 is bent. The repulsive force is used as an inspection pressure to inspect the electrical characteristics of the inspection object 50.

  The plurality of plates constituting the guide plate 20 are arranged apart from the probe tip side plate 21 and the probe tip side plate 21 that causes the probe tip 11 to protrude from the inspected object 50 side by a predetermined length L1. An intermediate plate 22 that determines the length L2 of the bending portion 13 in which the probe 10 bends between the probe tip side plate 21 and an adjustment mechanism that is disposed apart from the intermediate plate 22 and is slidable toward the intermediate plate side. And a probe rear end side plate 23 that fixes the probe 10 (not shown).

  As a material of each of these plates 20 (21, 22, 23), an insulating base material can be preferably used. For example, a plastic base material or a ceramic base material such as alumina can be preferably used. Further, each plate 20 may be constituted by a single plate, or may be constituted by a plurality of plate members 22a and 22b, for example, like the intermediate plate 22 of FIG. It may be composed of three or more plate members. When each plate 20 is composed of two or more plate members, each plate member may be bonded with an adhesive such as UV curable resin or epoxy resin, or may be integrated with a screw or the like. Whether the plate 20 has one or two plates can be arbitrarily set in consideration of the thickness, rigidity, ease of processing, etc. of the plate member to be used.

  In each plate 20 (21, 22, 23), a hole 24 through which the probe 10 passes is formed at the same position. When drilling holes at the same position, it is preferable that all the plates 20 (21, 22, 23) are overlapped in the manner shown in FIG. It is possible to easily make the hole 24 at the same position of the same size. The size of the hole 24 is arbitrarily set according to the diameter and the number of the probes 10 that pass through the hole 24, and a predetermined diameter in which one or more probes 10 of a predetermined diameter can be inserted, for example, It can be opened at about 0.03 mm to 0.25 mm.

  As shown in FIG. 1, the probe tip side plate 21 is arranged on the side facing the object to be inspected 50, and a guide for pressing the tip 11 of the probe 10 protruding from the probe tip side plate 21 against the object to be inspected 50. Acts as a plate. As can be seen from FIG. 1, the protruding length L1 of the probe tip 11 from the probe tip plate 21 is from the fixed portion where the probe 10 is fixed to the probe rear plate 23 to the probe tip 11 on the inspected object side. It can be regulated by the difference between the length and the length from the fixed portion to the side of the probe tip side plate 21 to be inspected. The protruding length L1 is actually adjusted by preparing the probe 10 to be longer toward the object to be inspected, setting the position of each plate 20, and then cutting and grinding the probe tip 11 side. Is done. The protruding length L1 is not particularly limited because it depends on the rigidity, diameter, etc. of the probe 10, but is usually about 0.1 mm to 0.5 mm, for example.

  The probe tip side plate 21 is disposed apart from the intermediate plate 22 so as to ensure a predetermined length L2 between the probe distal side plate 21 and the intermediate plate 22. A portion where the probe tip side plate 21 and the intermediate plate 22 are separated (portion represented by a length L2) is the tip of the probe when the probe tip 11 is pressed against the object to be inspected 50 as shown in FIG. 11 is a portion (bending portion 13) where the probe 10 is bent by a force applied from the 11 side. That is, the length L2 is the length of the bending portion 13. Since the probe unit structure 1 of the present invention uses the repulsive force of the probe 10 bent by the bending portion 13 as the inspection pressure, the inspection pressure can also be adjusted by the length L2 of the bending portion 13. As described above, it goes without saying that the rigidity and diameter of the probe 10 also affect the magnitude of the inspection pressure. However, when the same probe 10 is used, the inspection pressure can be adjusted by the length L2 of the bending portion 13. it can. As described above, the length L2 of the bending portion 13 cannot be defined unconditionally because it is set in consideration of the inspection pressure to be inspected and the rigidity, diameter, etc. of the probe 10 is taken into account. It is about 5 mm to 30 mm.

  As shown in FIG. 1, the intermediate plate 22 is disposed away from the probe tip side plate 21, and as described above, the length L <b> 2 of the bending portion 13 where the probe 10 bends with the probe tip side plate 21. To decide. Although the length L2 is as described above, the intermediate plate 22 is fixed in the probe unit structure 1, and therefore, the length L2 is determined after inserting the probe 10 into the hole 24 of the plate 20, for example. Adjustment is made by moving the probe tip side plate 21 toward the inspection object 50 side. After the probe tip side plate 21 is moved, the probe tip side plate 21 and the intermediate plate 22 are fixed with a restricting member 25 such as a metal support or a frame, and the length L2 of the bending portion 13 is set. regulate.

  The probe rear end side plate 23 is disposed away from the intermediate plate 22. The probe rear end side plate 23 has an adjustment mechanism (not shown) that can slide on the intermediate plate 22 side, and fixes the probe 10 with an adhesive or the like. The probe rear end plate 23 is used when, for example, the probe tip 11 is soiled or oxidized and the electrical contact characteristics with the device under test 50 deteriorate or may deteriorate. When the protruding length L1 of the probe tip 11 is shortened, the probe rear end plate 24 is slid to the intermediate plate 22 side, so that the probe tip 11 is returned to its original properties (contact characteristics). In a state where there is no dirt or oxidation that affects the probe), and further, the protruding length of the probe tip 11 is restored to the original length L1. Therefore, the probe rear end side plate 23 has an adjustment mechanism (not shown) that can slide on the intermediate plate 22 side, and is further spaced apart by a fixed length L3 that can be slid.

  The length L3 between the probe rear end side plate 23 and the intermediate plate 22 indicates how many times the grinding process for regenerating the probe tip 11 can be performed, and the tip 11 is reduced by one grinding process. Although it differs depending on the size and the like and is not necessarily limited, it is usually several mm, for example, about 2 mm to 5 mm.

  As described above, the adjustment mechanism (not shown) of the probe rear end side plate 23 is used to return the projection length L1 ′ (not shown) shortened by grinding to the original projection length L1. It is an adjustment mechanism that slides to the side. Various means can be applied as such an adjustment mechanism, and examples thereof include a means for adjusting the position by pushing the probe rear end side plate 23 by a predetermined amount with a dial type micrometer.

  Various methods can be used to fix the probe 10 to the probe rear end side plate 23. Preferably, the probe 10 is fixed with an adhesive 31 such as a UV curable resin or an epoxy resin. As shown in FIG. 4, after passing the probe 10 through the hole 24 of the plate 20, the adhesive 31 is applied to the hole on the opposite surface of the probe rear end side plate 23 on the intermediate plate 22 side, and thereafter Harden.

(Assembly procedure / manufacturing method)
Next, a procedure for assembling the probe unit structure, that is, a method for manufacturing the probe unit structure will be described. 4 and 5 are schematic cross-sectional views showing aspects of the assembly procedure of the probe unit structure of the present invention.

  First, the probe front end plate 21, the intermediate plate 22, and the probe rear end side plate 23 are overlapped to prepare a plate having a hole 24 at a predetermined position. The holes in the plate 20 may be made in a lump after overlapping, or may be made for each plate. Thereafter, the probe 10 is passed through the hole 24 as shown in FIG. The probe 10 may be passed through the hole 24 of the probe rear end side plate 23 on the probe front end 11 side, or may be passed through the hole 24 of the probe front end side plate 21 on the probe rear end 12 side, as shown in FIG. Thus, it is preferable to pass the probe rear end 12 side that functions as the lead portion 14 from the probe front end side plate 21. At this time, when the probe 10 composed of two or more probes 10a and 10b is inserted into the same hole as in the case of the four-terminal measurement shown in FIG. 4, each probe 10a and 10b at the probe rear end 12 is inserted. Can be easily inserted into the hole 24 even when the clearance between the outer diameter of the probe 10 and the diameter of the hole 24 is small. can do. Fixing at this time may be performed by an adhesive 32 such as a UV curable resin or an epoxy resin, may be brazed with solder or the like, or the insulating layer 16 is fused. There may be. The probe tips 11 may or may not be aligned as shown in FIG.

  Next, as shown in FIG. 4B, the probe 10 is inserted to a predetermined position and fixed to the probe rear end side plate 23. The extent to which the distal end side of the probe 10 is inserted depends on the length L2 between the probe distal end plate 21 and the protrusion length L1 of the probe distal end 11 from the probe distal end plate 21. Insert with at least a length exceeding the final structural dimension. After the insertion, the probe 10 is fixed to the probe rear end side plate 23. This fixing is as described above. Preferably, the probe 10 is fixed with an adhesive 31 such as a UV curable resin or an epoxy resin. As shown in FIG. 4B, the adhesive 31 is applied to the portion of the hole 24 on the opposite surface of the probe rear end side plate 23 on the intermediate plate 22 side, and then cured.

  Next, as shown in FIG. 5A, the probe tip side plate 21 is moved so as to form a curved portion 13 having a predetermined length L2 between the probe tip side plate 21 and the intermediate plate 22, and the probe The rear end side plate 23 is separated from the intermediate plate 22 by a predetermined length L3. At this time, as shown in FIG. 6, the probe tip side plate 21 and the intermediate plate 22 are fixed by a regulating member 25 such as a metal support so that the length L2 of the bending portion 13 can be kept constant. On the other hand, the probe rear end side plate 23 is retracted to the inspection device 40 (see FIG. 1) side by an adjusting mechanism (not shown) so as to ensure a predetermined length L3. In this way, the plates 21, 22, and 23 are arranged at predetermined positions.

  Next, as shown in FIG. 5B, the probe tip 11 is ground with an abrasive 60. The abrasive 60 is normally provided on the base material 61, and various abrasives can be used. As an example, for example, a # 2000 diamond grindstone can be cited. The probe tip 11 is ground with such an abrasive 60, and the height of the probe tip 11 is made uniform. In addition, although the dimension which the front-end | tip 11 reduces by grinding changes also with the kind of the metal wire 15 and the kind of abrasive | polishing material 60, it can grind in the range of several micrometers to several dozen micrometers, for example. Thereafter, alcohol cleaning is performed to remove grinding dust.

  Finally, as shown in FIG. 1, the probe rear end 12 can be connected to the inspection apparatus 40 to assemble the probe unit structure according to the present invention. Note that the connection to the inspection device 40 is performed by cutting the 32 parts of the adhesive and then processing the terminal.

  As described above, according to the probe unit structure 1 of the present invention, the tip 11 of the probe 10 presses against the object to be inspected 50 and the lead integrated wire that uses the rear end 12 side of the probe 10 as a lead wire. Since the mold probe 10 is used, the instability of contact resistance between the probe and the lead wire as in the prior art does not become a problem, and the connection stability can be improved. The probe unit structure 1 according to the present invention that can ensure such connection stability can be preferably used as a probe unit for four-terminal resistance measurement that requires high measurement accuracy, and a plurality of probes 10 are inserted into one hole 24. It is preferable to reduce the cost and the pitch by unitizing.

  Further, since the plurality of plates 21, 22, 23 constituting the guide plate 20 include the probe tip side plate 21, the intermediate plate 22, and the probe rear end side plate 23, for example, the probe tip 11 is soiled or oxidized. When the probe tip 11 is ground and the protruding length L1 of the probe tip 11 is shortened, the probe rear end side plate 23 is slid to the intermediate plate 22 side so that the probe pin can be Without replacement, the probe tip 11 and the protruding length L1 of the probe tip 11 can be restored to the original state. As a result, if the probe tip 11 is ground regularly or irregularly, the probe need not be replaced. As a result, maintenance costs and the like can be suppressed.

  In particular, in the probe unit structure 1 of the present invention, the probe 10 is fixed to the probe rear end side plate 23 with the adhesive 31 and the portion from the fixing point to the probe tip 11 is an integrated wire type probe 10. There is an excellent effect that there is almost no variation in the height L1 of the probe tip 11 pressed against the body 50. On the other hand, when the probe and the lead wire are separated as in the prior art, the length accuracy (variation) of each probe is usually about several tens of μm, so the length variation between adjacent probes is several tens of μm. It may become. In such a case, the pressure when each probe tip presses against the object to be inspected 50 is different and becomes non-uniform. Since the magnitude of the curve after hitting is also different, there is a possibility that the longer probe pushes up the shorter probe to prevent contact with the object to be inspected 50. However, in the present invention, since there is almost no variation in the height L1 of the probe tip 11 that presses against the object to be inspected 50, the pressure when each probe tip presses against the object to be inspected 50 is uniform. The contact resistance to 50 is stable, and there is a particular advantage that stable measurement with high accuracy can be realized without causing the above-mentioned conventional problems.

  Hereinafter, the present invention will be described based on examples. Note that the present invention is not limited thereby.

Example 1
As the probe 10, a urethane-coated beryllium copper wire (total outer diameter φ0.11 mm including an insulating layer, metal wire diameter φ0.09 mm) was used, and two pairs having a length of about 300 mm were used. As the guide plate 20, a 1 mm thick SUMIKA SUPER material (Sumitomo Chemical polyester resin SUMIKASUPER S1000) is used, the probe tip side plate 21 is composed of a single plate, and the intermediate plate 22 is bonded with an adhesive. The probe rear end side plate 24 is composed of one sheet. Each of these plates was overlaid. In addition, in the drilling process, a plurality of holes having a hole diameter of 0.23 mm were performed in a lump after overlapping them, and the number of holes was matched to the inspection object. Then, it assembled in the procedure shown in the column of the above-mentioned "assembly procedure / manufacturing method", and produced the probe unit structure based on this invention.

  FIG. 4 is a basic mode of a probe unit structure in which a large number of wire-type probes are mounted, and FIG. 6 is a basic mode of inspecting the electrical characteristics of an object to be inspected. The probe unit structure of the present invention measures the electrical characteristics of the device under test 50 in this manner. The measurement is performed by the probe tip 11 protruding from the probe tip side plate 21 being pressed against the object to be inspected 50. However, since the measurement is repeatedly performed, the probe tip 11 may be soiled or oxidized. Therefore, the probe tip 11 is ground regularly or irregularly such as when a measurement abnormality occurs. By this grinding, the protruding length L1 of the probe tip 11 is shortened, but the property of the probe tip 11 and the protruding length of the probe tip 11 are obtained by sliding the probe rear end side plate 23 toward the intermediate plate 22 by the adjusting mechanism. Play L1 back to its original state.

DESCRIPTION OF SYMBOLS 1 Probe unit structure 10, 10a, 10b, 10c Lead wire integrated wire type probe 11 Tip 12 Rear end 13 Curved portion 14 Lead portion 15 Metal wire 16 Insulating layer 20 Plate 21 Probe tip side plate 22 Intermediate plate 22a, 22b Intermediate Plate member constituting plate 23 Probe rear end side plate 24 Hole 25 Restriction member 31, 32 Adhesive 40 Inspection device 50 Inspected object (electrode)
60 Abrasive material 61 Base material L1 Projection length L2 Length of curved portion L3 Length between intermediate plate and probe rear end side plate

Claims (4)

A probe unit structure in which tips of a plurality of probes mounted on a guide plate are pressed against an object to be inspected, a repulsive force of a curved probe is used as an inspection pressure, and a rear end side of the probe is used as a lead wire. ,
The probe is a wire-type probe integrated with a lead wire having a metal wire and an insulating layer provided on the metal wire,
The guide plate is composed of a plurality of plates in which holes for inserting the probe are formed,
The plurality of plates are provided in the probe unit structure so as to ensure a predetermined length between the probe tip side plate and the probe tip plate side that protrudes the probe tip by a predetermined length from the inspected object side. An intermediate plate fixed and spaced apart from the probe tip side plate and determining the length of the curved portion where the probe bends with the probe tip side plate; and spaced apart from the intermediate plate is arranged, and the probe rear end plate for securing the and the probe has a slidable adjusting mechanism the intermediate plate side, the at least Yes,
Predetermined length the moves the said probe-end plate so as to form a curved portion of the probe rear end plates from the intermediate plate a predetermined length between the probe-end plate and the intermediate plate At this time, the probe tip side plate and the intermediate plate are fixed by a regulating member so that the length of the curved portion can be kept constant,
The adjustment mechanism of the probe rear end side plate is configured such that when the probe tip is pressed against the object to be inspected and becomes dirty or oxidized, the probe tip is ground, and the projection length shortened by grinding is reduced. an adjustment Organization for sliding on the intermediate plate side to return to the original projecting length,
The probe rear end side plate is arranged apart from the intermediate plate by a length to be slid to the intermediate plate side .
A probe unit structure characterized by that. The probe unit structure according to claim 1 , wherein the inspection pressure is adjusted by changing a distance between the probe tip side plate and the intermediate plate. The probe unit structure according to claim 1 or 2 , wherein each of the probe front end side plate, the intermediate plate, and the probe rear end side plate is configured by at least one plate. The probe unit structure according to any one of claims 1 to 3 , wherein the holes formed in the plurality of plates are formed with a predetermined diameter into which one or more and three or less probes can be inserted.

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