JP5624740B2 - Contact probe and socket - Google Patents

Description

  The present invention relates to a contact probe used for testing a semiconductor integrated circuit or the like and a socket provided with the contact probe.

  When an inspection object such as a semiconductor integrated circuit is inspected, a contact probe is generally used to electrically connect the inspection object and an inspection substrate on the measuring instrument side.

  20A and 20B are explanatory diagrams of a conventional contact probe, where FIG. 20A is an overall configuration diagram, and FIG. 20B is a cross-sectional view taken along the line BB ′ (contact state / non-contact state). This type of contact probe has a structure that does not have a metal tube outside the coil spring in order to reduce the diameter, and in order to suppress the electrical passage resistance, it is a connecting part with an inspection object such as a semiconductor integrated circuit. It has a structure in which a certain first plunger 61 and a second plunger 62 which is a connecting part for the inspection substrate are brought into direct contact. The first and second plungers 61 and 62 are contacted with the inspection object and the inspection substrate by the spring force generated by compressing the coil spring 63 which is a component of the contact probe, respectively. Press against. As a prior art document having a structure similar to that of FIG.

JP 2000-241447 A

  In the conventional contact probe, the internal contact of the contact probe (facing structure between the first plunger 61 and the second plunger 62) has a gap (play) for smooth sliding, which is the contact There is a problem that the state is not stable (for example, the plunger contact state and the non-contact state in FIG. 20B are repeated irregularly) and the passage resistance is unstable.

  The present invention has been made in view of such a situation, and an object of the present invention is to make it possible to reliably contact the first plunger and the second plunger, and to provide an inspection object such as a semiconductor integrated circuit and an inspection substrate. It is an object of the present invention to provide a contact probe and a socket having the same that can be electrically stabilized and can be connected with low resistance.

One embodiment of the present invention is a contact probe. This contact probe
The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the course of transition from a first state in which the spring is extended to a second state in which shrinks the spring, Ri structures der that the second plunger rides on the inclined portion,
Said inclined portion that exists outside of the spring with respect to expansion and contraction direction of the spring.

Another aspect of the present invention is a contact probe. This contact probe
The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the process of transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion,
The second plunger has a bifurcated portion that is divided into two from the middle portion in the length direction, the distal end of the first plunger is located between the bifurcated portions, and the inclined portion is the bifurcated portion. At least one corresponding to both one and the other of the parts,
The flange portion of the intermediate portion in the length direction of the first plunger is formed in a groove shape by cutting out the sliding range, and the end side end surface of the flange portion is in contact with one end portion of the spring. It touches .

Another aspect of the present invention is a contact probe. This contact probe
The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the process of transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion,
The end of the first plunger is inclined in the direction in which the second plunger is present .

The inclined portion may exist outside the spring with respect to the expansion / contraction direction of the spring .

The second plunger may be deformed into a leaf spring shape on the inclined portion and extend outside the inner peripheral width range of the spring in a direction perpendicular to the expansion / contraction direction .

In the state where the second plunger rides on the inclined portion, the intermediate portion in the longitudinal direction comes into contact with the inner periphery of the end portion in the expansion / contraction direction of the spring, and a part on the distal side and the distal end side with respect to the intermediate portion Both of them may contact the first plunger .

Before Stories second plunger, at least a portion of the sliding range of the first plunger have an inclined portion,
In the process of transition from the first state to the second state, may it first plunger the ride on the inclined portion structure der of the second plunger.

Another aspect of the present invention is a socket formed by supporting the contact probe in a plurality of insulating support.

  It should be noted that any combination of the above-described constituent elements, and those obtained by converting the expression of the present invention between methods and systems are also effective as aspects of the present invention.

  According to the present invention, at least a part of the sliding range of the first plunger with the second plunger is an inclined portion, and the spring is contracted from the first state in which the spring is extended. Since the second plunger rides on the inclined portion in the process of transitioning to the second state, the first plunger and the second plunger can be reliably contacted, such as a semiconductor integrated circuit The inspection object and the inspection substrate can be electrically stabilized and connected with low resistance.

It is a whole block diagram of the contact probe which concerns on the 1st Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. The exploded view of the contact probe. The front sectional view in the use condition of the socket which supports a plurality of the contact probes. The typical explanatory view of the bending force applied to the 2nd plunger in the compression state shown in Drawing 1 (B). FIG. 5 is a cross-sectional view taken along the line VV ′ in FIG. 4. The schematic diagram which shows the contact and electric path which were made by the elastic deformation of a 2nd plunger in the compression state shown to FIG. 1 (B). VII-VII 'sectional drawing of FIG. The resistance characteristic figure of the contact probe of a 1st embodiment. FIG. 21 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 20. The schematic diagram which shows the measuring method of the resistance value characteristic view of a contact probe. It is a whole block diagram of the contact probe which concerns on the 2nd Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. XII-XII 'sectional drawing of FIG. It is a whole block diagram of the contact probe which concerns on the 3rd Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the contact probe which concerns on the 4th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the contact probe which concerns on the 5th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 6th Embodiment of this invention, (A) is a front view of a spring open state, (B) is a right view of the state, (C) is a spring compression state. Front view, (D) is a right side view of the same state. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 7th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is explanatory drawing of the conventional contact probe, (A) is a whole block diagram, (B) is the BB 'sectional drawing (contact state / non-contact state).

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

(First embodiment)
FIG. 1 is an overall configuration diagram of a contact probe 100 according to a first embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. FIG. 2 is an exploded view of the contact probe 100. FIG. 3 is a front sectional view of the socket 30 in which a plurality of the contact probes 100 are supported in use.

  The contact probe 100 includes a first plunger 1, a second plunger 2, and a coil spring 3 as a spring. The first plunger 1 is a connection part with the inspection object 5, and the second plunger 2 is a connection part with the inspection substrate 6. For example, the coil spring 3 made of a general material such as a piano wire or a stainless steel wire has the first and second plungers 1 and 2 so that the first and second plungers 1 and 2 can slide relative to each other. 2 (the first and second plungers 1 and 2 are connected). The coil spring 3 also urges the first and second plungers 1 and 2 in directions away from each other during use, and causes the inspection object 5 and the inspection substrate 6 to be applied to the first and second plungers 1 and 2. Give contact force. The inspection object 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 5a are arranged at a predetermined interval. The inspection substrate 6 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 5a.

  As shown in FIG. 3, the socket 30 includes an insulating support 31 having a cavity 32 for arranging a plurality of contact probes 100 in parallel at a predetermined interval, and the contact probe 100 is inserted into each cavity 32. It is arranged. Specifically, the contact probe 100 is constructed by integrally assembling the first plunger 1, the second plunger 2, and the coil spring 3 as shown in FIG. It is inserted and arranged in the cavity 32 of 31. Opening side sliding support portions 33 and 34 at both ends (upper and lower ends) of the cavity portion 32 support (fitting) the front end side main body portions 13 and 24 of the first and second plungers 1 and 2 slidably, respectively. The intermediate portion 35 excluding the opening side sliding support portions 33 and 34 of the cavity portion 32 has a larger diameter than the opening side sliding support portions 33 and 34, and the inner periphery on which the flange portions 12 and 23 and the coil spring 3 can freely move. It is a diameter. The opening side sliding support portions 33 and 34 of the cavity portion 32 are engaged with the flange portions 12 and 23 to restrict the withdrawal of the first and second plungers 1 and 2. The insulating support 31 has a structure that can be divided into a plurality of layers in order to incorporate the contact probe 100 into the cavity 32 (not shown).

  As shown in FIGS. 1 and 2, the first plunger 1, which is a conductive metal body such as a copper alloy, has an end portion 11 and a flange portion 12 from the inspection substrate 6 side toward the inspection object 5 side. And a bar shape having a front end side main body portion 13 sequentially. The semi-cylindrical end portion 11 has a smaller diameter than the inner diameter of the coil spring 3 and is positioned inside the coil spring 3. A curved surface portion is disposed along the inner periphery of the coil spring 3, and on the coil spring 3 axis side. A plane portion is disposed so as to contact the second plunger 2. The flange portion 12 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3. The distal end side main body portion 13 has a smaller diameter than the flange portion 12, and the distal end is a contact portion 13 a that contacts the electrode bump 5 a of the inspection object 5. The sliding surface of the portion of the first plunger 1 that is located outside the coil spring 3 with respect to the expansion and contraction direction of the coil spring 3 (the flange portion 12 and the distal end side main body portion 13) with the second plunger 2 is partially It becomes the inclined part 15 (here inclined surface). In the illustrated example, an inclined portion 15 exists between the semi-cylindrical portion on the distal end side of the flange portion 12 and the cylindrical portion on the distal end side of the distal end side main body portion 13.

  The second plunger 2, which is a conductive metal body such as a copper alloy, has a semi-cylindrical sliding portion 21, a cylindrical portion 22, and a flange portion from the inspection object 5 side toward the inspection substrate 6 side. 23 and a rod-shaped body having a distal end side main body portion 24 sequentially. The sliding portion 21 and the columnar portion 22 are smaller than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar portion 22 is fitted inside the coil spring 3. The semi-cylindrical sliding portion 21 is provided with a curved surface portion along the inner periphery of the coil spring 3, and a flat surface portion on the flat surface portion of the end portion 11 of the first plunger 1 and on the end side of the flange portion 12. The semi-cylindrical portion is disposed toward the plane and the inclined portion 15. The flange portion 23 has a diameter larger than the inner diameter of the coil spring 3 and an end surface thereof abuts on the other end of the coil spring 3. The front end side main body portion 24 has a diameter smaller than that of the flange portion 23, and the front end is a contact portion 24 a that contacts an electrode pad (not shown) of the inspection substrate 6.

The product outer diameters of the contact probe 100 and the socket 30 are, for example, as follows.
-Diameter of the intermediate part 35 of the cavity part 32 of the insulating support 31: 0.22 mm
・ Outer diameter of contact probe 100 (outer diameter of coil spring 3): 0.2 mm
-Coil spring 3 wire diameter (wire width): 0.04 mm
-Inner diameter of coil spring 3: 0.12 mm
-The thickness of the end portion 11 of the first plunger 1: 0.055 mm
-Thickness of the sliding portion 21 of the second plunger 2: 0.055 mm
-Free length of contact probe 100: 4 mm
・ Use length of contact probe 100: 3 mm

  When the inspection is performed using the socket 30 assembled as shown in FIG. 3, the socket 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is contracted by a predetermined length and the second plunger 2 is contracted. The contact portion 24 a of the distal end side main body portion 24 comes into elastic contact with the electrode pad of the inspection substrate 6. In a state where there is no inspection object 5 such as a semiconductor integrated circuit, the first plunger 1 moves in the protruding direction until the flange portion 11 is regulated by the opening-side sliding support portion 33. The amount of protrusion is the maximum. By disposing the inspection object 5 so as to face the insulating support 31 of the socket 30 at a predetermined interval, the distal end side main body portion 13 is retracted and the spring 3 is further compressed. Elastically contacts the electrode bump 5a of the inspection object 5. In this state, the inspection object 5 is inspected.

  As shown in FIG. 1 (A), in the first state (open state) in which the coil spring 3 is extended, the distal end portion 11 of the first plunger 1 and the sliding portion 21 of the second plunger 2 are both The sliding surfaces face each other with a gap (play) over a predetermined length from the end side. Then, in the process of transition from the first state (opened state) to the second state (compressed state) in which the coil spring 3 is contracted as shown in FIG. 1B, the second state as shown in FIG. The sliding portion 21 of the plunger 2 is deformed into a leaf spring shape and rides on the inclined portion 15 of the first plunger 1. In this state, the sliding portion 21 extends outside the inner peripheral width range of the coil spring 3 with respect to a direction perpendicular to the expansion / contraction direction of the coil spring 3. In addition, the presence position of the inclined portion 15 is a position away from the portion where the sliding portion 21 abuts in the first state (open state) by a predetermined length L toward the distal end side of the first plunger 1. In the process of transition from the first state (open state) to the second state (compressed state), the sliding portion 21 starts to ride on the inclined portion 15 after the coil spring 3 is contracted by the predetermined length L. Become. The predetermined length L is, for example, a length that is equal to or slightly shorter than the length in which the coil spring 3 contracts when the contact portion 24a of the distal end side body portion 24 of the second plunger 2 abuts against the inspection substrate 6. Say it.

  FIG. 4 is a schematic explanatory view of bending forces F1 to F3 applied to the second plunger 2 in the second state (the compressed state shown in FIG. 1B). As shown in the figure, as a result of the sliding portion 21 of the second plunger 2 deforming into a leaf spring and riding on the inclined portion 15 of the first plunger 1, the second plunger 2 is moved to the sliding portion 21. Of the first plunger 1 is brought into contact with the inclined portion 15 of the first plunger 1 at the first contact 101, and a bending force F <b> 1 is applied from the inclined portion 15 of the first plunger 1 at the first contact 101. In the second plunger 2, the intermediate portion outer surface in the longitudinal direction of the sliding portion 21 abuts with the inner periphery of the end portion in the expansion / contraction direction of the coil spring 3 at the second contact 102. A bending force F2 is applied. Further, when the bending force F2 is applied to the second plunger 2, the tip end side of the sliding portion 21 comes into contact with the end side plane of the end portion 11 of the first plunger 1 at the third contact 103, and the third contact point In 103, a bending force F3 is applied from the end 11 of the first plunger 1.

  5 is a cross-sectional view taken along the line VV ′ of FIG. As shown in this figure, the cross-sectional areas of the end portion 11 of the first plunger 1 and the sliding portion 21 of the second plunger 2 are equal. However, when the diameter is large, the cross-sectional area of the sliding portion 21 is made small so that the sliding portion 21 has an appropriate spring force (elastic force). In order to suppress the electric resistance, it is desirable that the cross-sectional area is large. However, there is a case where an excessive spring force is generated in the sliding portion 21 and smooth sliding cannot be performed.

  FIG. 6 is a schematic diagram showing a contact and an electric path formed by elastic deformation of the second plunger 2 in the second state (compressed state shown in FIG. 1B). A part of the current E <b> 1 passing through the first plunger 1 branches to the second plunger 2 at the first contact 101. The current branched and flowing to the first plunger 1 and the second plunger 2 becomes a current E2 that flows through the second plunger 2 by joining at the third contact 103. Further, as shown in a sectional view in FIG. 7, the contact between the first plunger 1 and the coil spring 3 (third contact 103) and the contact between the second plunger 2 and the coil spring 3 (fourth contact 104). Connects the first and second plungers 1 and 2 using the coil spring 3 as a current path. By securing a plurality of current paths in this way, electrical resistance is suppressed.

  FIG. 8 is a resistance characteristic diagram of the contact probe 100 according to the present embodiment, and shows measurement results (during compression and return) of five contact probe samples. As shown in FIG. 10, the measurement method is such that the contact probe 100 is sandwiched between electrodes connected to a constant voltage power source, and the passing resistance of the contact probe 100 is measured by changing the use length of the contact probe 100 (the contact probe 100). Obtained from the flowing current). FIG. 9 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 20, and shows measurement results (when compressed and returned) of five contact probe samples. The measurement method is the same as in FIG.

  In the measurement result shown in FIG. 8 (this embodiment), the resistance value variation among the samples is small and the resistance value is low. It can also be seen that the variation of the resistance value when the contact probe usage length is changed is small. On the other hand, in the measurement results shown in FIG. 9 (conventional example), the variation among the samples is large and the resistance value is high. Further, it can be seen that the resistance value fluctuates greatly when the contact probe usage length is changed.

  According to the present embodiment, the following effects can be achieved.

(1) The sliding surface of the first plunger 1 with the second plunger 2 is partially inclined 15, and the coil spring 3 is contracted from the first state in which the coil spring 3 is extended. Since the second plunger 2 rides on the inclined portion 15 during the transition to the second state, the first plunger 1 and the second plunger 2 can be reliably contacted. As a result, as is apparent from the measurement results shown in FIGS. 8 and 9, compared with the conventional example, the inspection object 5 and the inspection substrate 6 can be electrically stabilized and connected with a low resistance. .

(2) Since the inclined part 15 exists in the part (flange part 12 and front end side main body part 13) located outside the coil spring 3 in the first plunger 1 with respect to the expansion / contraction direction of the coil spring 3, the coil in the same direction Unlike the case where the inclined portion exists in the portion located inside the spring 3, the sliding portion 21 can be elastically deformed beyond the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15. Further, the configuration in which the end of the sliding portion 21 extends outside the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15 allows a limited space to be used effectively, and the contact probe 100 can be made compact. This is advantageous for downsizing.

(3) As a result of the sliding portion 21 of the second plunger 2 riding on the inclined portion 15 of the first plunger 1, the end of the sliding portion 21 comes into contact with the inclined portion 15 at the first contact 101, and the sliding portion The outer surface of the intermediate portion in the longitudinal direction of 21 is in contact with the inner periphery of the end portion of the coil spring 3 in the expansion / contraction direction at the second contact 102, and the distal end side of the sliding portion 21 is in contact with the end of the end portion 11 at the third contact 103. Therefore, two points (the first contact 101 and the third contact 103) between the first and second plungers 1 and 2 are surely secured, which is advantageous in reducing the resistance.

(4) In the process of transition from the open state shown in FIG. 1A to the compressed state shown in FIG. Compared with the case where the sliding part 21 rides on the inclined part 15 from the start of contraction to the end of extension of the coil spring 3, it can be expected that the sliding (especially restoration from the compressed state to the open state) becomes smoother. That is, when the sliding portion 21 rides on the inclined portion 15 from the start of contraction of the coil spring 3 to the end of extension, it is in the vicinity of the end of extension, and if the restoring force of the coil spring 3 cannot overcome the frictional force caused by the ride, the original position is restored. Although there is a risk that it cannot be restored, in the present embodiment, such a risk can be reduced.

(Second embodiment)
FIG. 11 is an overall configuration diagram of a contact probe 200 according to the second embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. 12 is a cross-sectional view taken along the line XII-XII ′ of FIG. Compared with the first embodiment, the contact probe 200 according to the present embodiment has an inclined portion 225 on the second plunger 202 (part to be connected to the inspection object), and the second plunger 202. The end portion 221 of the first plunger 201 is inclined in the direction in which the first plunger 201 exists over a predetermined length from the end, and the sliding portion 211 of the first plunger 201 is more than the end portion 221 of the second plunger 202. It is mainly different from the small diameter.

  The second plunger 202 has a distal end portion 221, a flange portion 222, and a distal end side main body portion 223. The end portion 221 having a substantially semi-cylindrical shape is smaller in diameter than the inner diameter of the coil spring 3, is positioned inside the coil spring 3, and is inclined from the end in a direction in which the first plunger 201 exists over a predetermined length. The flange portion 222 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3. The front end side main body portion 223 has a smaller diameter than the flange portion 222, and the front end is a contact portion 223a that comes into contact with the electrode pad of the inspection substrate. The sliding surface of the portion of the second plunger 202 located outside the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3 (the flange portion 222 and the distal end side body portion 223) with the first plunger 201 is partially It is an inclined portion 225 (here, an inclined surface). In the illustrated example, there is an inclined portion 225 between the semi-cylindrical portion on the distal end side of the flange portion 222 and the cylindrical portion on the distal end side of the distal end side main body portion 223.

  The first plunger 201 includes a substantially semi-cylindrical sliding portion 211, a cylindrical portion 212, a flange portion 213, and a distal end side main body portion 214. The sliding part 211 and the columnar part 212 are smaller in diameter than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar part 212 is fitted inside the coil spring 3. The flange portion 213 has a diameter larger than the inner diameter of the coil spring 3, and an end surface thereof is in contact with the other end of the coil spring 3. The distal end side main body portion 214 has a smaller diameter than the flange portion 213, and the distal end is a contact portion 214a that comes into contact with the electrode bump of the inspection object.

  Similarly to the first embodiment, this embodiment also has a structure in which the sliding portion 211 of the first plunger 201 rides on the inclined portion 225 of the second plunger 202. The two plungers 202 can be reliably brought into contact with each other, and the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance as compared with the conventional example. In other respects, the same effects as those of the first embodiment can be obtained. Further, in the present embodiment, since the end of the end portion 221 of the second plunger 202 is inclined in the direction in which the first plunger 201 exists over a predetermined length, when the second plunger 202 is processed. Even if the end portion 221 is slightly warped in the direction in which the first plunger 201 does not exist, the end of the end portion 221 can be reliably brought into contact with the sliding portion 211 of the first plunger 201. In addition, the sliding portion 211 has a small diameter so that excessive spring force is not generated.

(Third embodiment)
FIG. 13 is an overall configuration diagram of a contact probe 300 according to a third embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. Compared with the first embodiment, the contact probe 300 of the present embodiment has a smaller (shorter) range of the inclined portion 15 and a sliding portion of the second plunger 2. 21 is mainly different in that the diameter is smaller than the end portion 11 of the first plunger 1.

  In the present embodiment, since the existence range of the inclined portion 15 is limited to a part of the flange portion 12, the second state (compressed state) in which the coil spring 3 is contracted as shown in FIG. 13B. Then, the end of the sliding portion 21 exceeds the existence range of the inclined portion 15 (the inclined portion 15 is fully climbed), and the intermediate portion of the sliding portion 21 is in contact with the end (upper end) corner of the inclined portion 15. Yes.

  This embodiment can also achieve the same effects as those of the first embodiment. In addition, the sliding portion 21 has a small diameter so that an excessive spring force is not generated.

(Fourth embodiment)
FIG. 14 is an overall configuration diagram of a contact probe 400 according to the fourth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. Compared with the first embodiment, the contact probe 400 of the present embodiment has an inclined surface 15 from a straight inclined surface to an R surface (an inclined surface in which the inclination is continuously steep from flat as viewed from the end side). The main difference is that This embodiment can also achieve the same effects as those of the first embodiment.

(Fifth embodiment)
FIG. 15 is an overall configuration diagram of a contact probe 500 according to a fifth embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. The contact probe 500 according to the present embodiment is mainly different from the first embodiment in that the inclined portion 15 is formed by a convex portion 515. The shape of the convex portion 515 is not particularly limited as long as the sliding portion 21 can ride on, but has a triangular pyramid shape, a quadrangular pyramid shape, a wedge shape, or the like as shown in FIG. This embodiment can also achieve the same effects as those of the first embodiment.

(Sixth embodiment)
FIG. 17 is an overall configuration diagram of a contact probe 600 according to a sixth embodiment of the present invention, where (A) is a front view of the spring open state, (B) is a right side view of the same state, and (C). Is a front view of the spring compressed state, and (D) is a right side view of the state. FIG. 18 is a component diagram of the first plunger 1 of the contact probe 600, where (A) is a front view, (B) is a right side view, and (C) is a bottom view.

  Compared with the first embodiment, the contact probe 600 of the present embodiment is divided into two forks from the intermediate portion in the length direction of the second plunger 2 to the end side (sliding portion 21). The point which becomes 21a, 21b, the point which the terminal part 11 of the 1st plunger 1 is located between the bifurcated part 21a, 21b, and the inclination part 15a, 15b exist corresponding to the bifurcated part 21a, 21b. It is mainly different from the point.

  The flange portion 12 has a columnar shape in which a sliding portion with the second plunger 2 is notched in a groove shape, and the end side end surface of the flange portion 12 is in contact with one end of the coil spring 3. Since this embodiment also has a structure in which the bifurcated portions 21a and 21b ride on the inclined portions 15a and 15b, the first plunger 1 and the second plunger 2 can be reliably contacted, compared with the conventional example. The inspection object and the inspection substrate can be electrically stabilized and connected with low resistance. In other respects, the same effects as those of the first embodiment can be obtained. Furthermore, since the number of contacts of the first and second plungers 1 and 2 is increased, it is possible to further reduce the resistance.

(Seventh embodiment)
FIG. 19 is an overall configuration diagram of a contact probe 700 according to a seventh embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. Compared with the first embodiment, the contact probe 700 according to the present embodiment has inclined portions in both the first plunger 1 and the second plunger 2, and both inclined portions are coil springs 3. It is mainly different in that it exists within the length range.

  As for the 2nd plunger 2, the sliding part 21 becomes the inclination part 25 (here inclined surface) over predetermined length from the front end side. The first plunger 1 also has a sliding portion 71 having the same configuration as the sliding portion 21 of the second plunger 2. The sliding portion 71 is an inclined portion 75 (here, an inclined surface) over a predetermined length from the tip side. The coil spring 3 is sandwiched between the end surfaces of the flange portions 73 and 23 of the first and second plungers 1 and 2.

  Process of transition from the first state in which the coil spring 3 is extended (the open state shown in FIG. 19A) to the second state in which the coil spring 3 is contracted (the compressed state shown in FIG. 19B) Thus, the sliding portions 21 and 71 are deformed into leaf springs and ride on the inclined portions 75 and 25, respectively. Thereby, the 1st and 2nd plungers 1 and 2 contact reliably at two places. Therefore, similarly to the first embodiment, the object to be inspected and the inspection substrate can be electrically stabilized and connected with low resistance as compared with the conventional example. However, since the sliding deformable portions 21 and 71 are limited to the inner peripheral width range of the coil spring 3 when the sliding portions 21 and 71 run on the inclined portions 75 and 25, the viewpoint of downsizing (smaller diameter) of the contact probe. The first embodiment is better. In other respects, the same effects as those of the first embodiment are obtained.

  The present invention has been described above by taking the embodiment as an example. However, it is understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way. Hereinafter, modifications will be described.

  In the embodiment, the first plunger is used for connection with the inspection object, and the second plunger is used for connection with the inspection substrate. However, in the modification, the first plunger is used for connection with the inspection substrate. Two plungers may be used for connection with the inspection object.

  Although the case where the inclined portion is located outside the length range of the coil spring has been described in the first to sixth embodiments, the inclined portion may exist within the length range of the coil spring. Also in this case, the first and second plungers can be reliably brought into contact with each other so that the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance.

  In the first to sixth embodiments, the case where the inclined portion is present in one of the first and second plungers has been described, but in the modified example, the inclined portions are provided in both the first and second plungers. May be.

DESCRIPTION OF SYMBOLS 1 1st plunger 2 2nd plunger 3 Coil spring 5 Test object 5a Electrode bump 6 Inspection board 11 Terminal part 12, 23 Flange part 13, 24 Front end side main body part 13a, 24a Contact part 15 Inclined part 30 Socket 100 , 200, ..., 700 Contact probe

Claims (8)

The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the course of transition from a first state in which the spring is extended to a second state in which shrinks the spring, Ri structures der that the second plunger rides on the inclined portion,
It said inclined portion that exists outside of the spring with respect to expansion and contraction direction of the spring, contact probe. The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the process of transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion,
The second plunger has a bifurcated portion that is divided into two from the middle portion in the length direction, the distal end of the first plunger is located between the bifurcated portions, and the inclined portion is the bifurcated portion. At least one corresponding to both one and the other of the parts,
The flange portion of the intermediate portion in the length direction of the first plunger is formed in a groove shape by cutting out the sliding range, and the end side end surface of the flange portion is in contact with one end portion of the spring. Contact probe in contact. The first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers are urged away from each other. A spring provided for the first and second plungers;
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the process of transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion,
The contact probe, wherein an end of the first plunger is inclined in a direction in which the second plunger exists. 4. The contact probe according to claim 2 , wherein the inclined portion exists outside the spring with respect to a direction in which the spring expands and contracts. 5. 5. The contact probe according to claim 1 , wherein the second plunger is deformed into a leaf spring in a state of riding on the inclined portion, and an inner periphery of the spring with respect to a direction perpendicular to the expansion / contraction direction. A contact probe that extends outside the width range. 6. The contact probe according to claim 5 , wherein the second plunger is in a state where the second plunger rides on the inclined portion, and an intermediate portion in a longitudinal direction abuts on an inner periphery of an end portion in an expansion / contraction direction of the spring, and the intermediate portion A contact probe in which both a part on the distal end side and a part on the distal end side are in contact with the first plunger. The contact probe according to any one of claims 1 to 6,
In the second plunger, at least a part of a sliding range with the first plunger is an inclined portion,
A contact probe having a structure in which the first plunger rides on the inclined portion of the second plunger in the process of transition from the first state to the second state. Socket comprising supporting the contact probe described plurality of insulating supports in any of claims 1 to 7.

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