WO2011013731A1

WO2011013731A1 - Contact probe and socket

Info

Publication number: WO2011013731A1
Application number: PCT/JP2010/062752
Authority: WO
Inventors: 次男山本
Original assignee: 株式会社ヨコオ
Priority date: 2009-07-30
Filing date: 2010-07-29
Publication date: 2011-02-03

Abstract

Provided is a contact probe which, although the movable strokes of a first plunger and a second plunger of the contact probe and the length of overlap between the first plunger and the second plunger are the same as those of conventional products, has a smaller overall length than the conventional products. A socket equipped with the contact probe is also provided. When a coiled spring (806) is in a compressed state in which the coiled spring is contracted, a flat surface portion of an end section (811) of a first plunger (804) faces and makes contact with a second plunger (805) over an area thereof which extends from a flat surface portion of an end section (821) of the second plunger (805), through a range of a predetermined length from the base end of a tip-side body section (823), to a flat surface portion of a flange section (822), and a flat surface portion of the end section (821) of the second plunger (805) faces and makes contact with the first plunger (804) over an area thereof which extends from a flat surface portion of the end section (811) of the first plunger (804), through a range of a predetermined length from the base end of a tip-side body section (813), to a flat surface portion of a flange section (812).

Description

Contact probe and socket

The present invention relates to a contact probe used for testing a semiconductor integrated circuit or the like and a socket provided with the contact probe.

When inspecting an inspection object such as a semiconductor integrated circuit, a contact probe is generally used to electrically connect the inspection object and an inspection substrate on the measuring instrument side.

FIG. 25 is an explanatory diagram of a conventional contact probe, in which (A) shows a spring open state and (B) shows a spring compressed state (when energized). This type of contact probe has a structure that does not have a metal tube outside the coil spring in order to reduce the diameter. Further, in order to suppress the electric resistance, the first plunger 61 that is a connection part with an inspection target such as a semiconductor integrated circuit and the second plunger 62 that is a connection part with a substrate for inspection are in direct contact with each other. It is a structure to let you. The tip ends of the first and

second plungers

61 and 62 are pressed against the inspection object and the inspection substrate, respectively, by a spring force generated by compressing the coil spring 63 which is a component of the contact probe. Note that there are the following

Patent Documents

1 and 2 as prior art documents having the same structure as FIG.

JP 2000-241447 A US Pat. No. 6,462,567

The total length L ₁ when the conventional contact probe is opened and the total length L _{2 when it} is compressed are respectively
L ₁ = 2 (A + B) + C + X + Y
L ₂ = A + B + C + X + Y
It is expressed. Here, as shown in FIG.
A = movable stroke of the first plunger 61 B = movable stroke of the second plunger 62 C = length of overlap of the first and second plungers 61, 62 X = (first plunger 61 Total length)-(A + B + C)
・ Y = (Total length of second plunger 62) − (A + B + C)
It is.

The performance required for contact probes includes, for example, low resistance, large current compatibility, and high frequency compatibility. In order to satisfy these performances, the total length of the contact probe is preferably as short as possible. However, among the above lengths, the movable strokes A and B of the first plunger and the second plunger and the overlap length C are determined by the required specifications and cannot be shortened to a certain length or less. .

The present invention has been made in view of such a situation, and its object is to make the total length of the first plunger and the second plunger longer than the conventional one when the movable stroke and the overlap allowance length are the same. It is an object of the present invention to provide a contact probe that can be shortened and a socket having the contact probe.

The first aspect of the present invention is a contact probe. This contact probe
A spring and first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate;
Each of the first and second plungers has a locking projection for locking the spring at an intermediate portion in the length direction,
The spring is locked to the locking projection and biases the first and second plungers away from each other;
When the spring is contracted to a length equal to or shorter than a predetermined length, the end of the second plunger is positioned closer to the tip of the first plunger than the spring.

In the contact probe of the first aspect,
The first plunger has a distal end portion, a distal end portion, and a flange portion between the distal end portion and the distal end portion,
The flange portion has the locking projection;
A sliding surface with the second plunger may continuously exist over a range of a predetermined length from the proximal end of the distal end portion, the flange portion, and the distal end portion.

In the contact probe according to the first aspect, when the spring is contracted to a length equal to or shorter than a predetermined length, the end of the first plunger may be positioned closer to the tip of the second plunger than the spring. .

In the contact probe according to the first aspect, the sliding surfaces of the first and second plungers may be flat.

The second aspect of the present invention is also a contact probe. This contact probe is the contact probe according to the first aspect,
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
In the transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion.

In the contact probe according to the second aspect, it is preferable that the inclined portion is present outside the spring with respect to the expansion / contraction direction of the spring.

In addition, the second plunger is deformed into a leaf spring in a state of riding on the inclined portion, and the end extends outside the inner peripheral width range of the spring in the direction perpendicular to the expansion / contraction direction. Good.

Furthermore, the second plunger is in a state where the intermediate portion in the longitudinal direction is in contact with the inner periphery of the end portion in the expansion / contraction direction of the spring, and a part of the distal end side with respect to the intermediate portion in a state of riding on the inclined portion. It is preferable that both of the tip side and the first plunger are in contact with each other.

In the contact probe according to the second aspect, the second plunger is a bifurcated portion that is divided into two from the middle portion in the length direction, and the distal end of the first plunger is between the bifurcated portions. It is preferable that at least one inclined portion is present corresponding to both one and the other of the bifurcated portions.

The flange portion of the intermediate portion in the length direction of the first plunger is formed in a groove shape by cutting out the sliding portion, and the end face of the flange portion is one end portion of the spring. It should be in contact with.

In the contact probe of the second aspect,
In the second plunger, at least a part of a sliding range with the first plunger is an inclined portion,
In the process of transition from the first state to the second state, the first plunger may have a structure that rides on the inclined portion of the second plunger.

In the contact probe of the second aspect, the end of the first plunger may be inclined in the direction in which the second plunger exists.

The third aspect of the present invention is a socket. This socket is formed by supporting a plurality of contact probes of the first or second aspect with an insulating support.

In the socket according to the third aspect, the first plunger of each contact probe has a sliding surface with the second plunger when the spring extends to a length equal to or longer than a predetermined length. It is good to extend from the inner side to the outer side of the insulating support.

In this case, the locking projection of the first plunger is a retaining member from the insulating support, and the sliding surface of the first plunger has a groove shape on the tip side of the locking projection. It should be the bottom.

It should be noted that an arbitrary combination of the above-described components and a conversion of the expression of the present invention between methods and systems are also effective as an aspect of the present invention.

According to the present invention, when the spring is contracted to a length equal to or shorter than the predetermined length, the end of the second plunger is positioned closer to the tip of the first plunger than the spring, so the first plunger and the second plan If the movable stroke of the jar and the length of the overlap allowance are the same, the total length of the contact probe can be shortened compared to the conventional case.

BRIEF DESCRIPTION OF THE DRAWINGS It is a whole block diagram of the contact probe which concerns on the 1st Embodiment of this invention, (A) is a front view of a spring open state, (B) is a front view of a spring compression state, (C) is 1st and 1st Sectional drawing of the overlap margin part of 2 plungers. The front sectional view at the time of use of the socket which supports a plurality of the contact probes. It is a whole block diagram of the contact probe which concerns on the 2nd Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the contact probe which concerns on the 3rd Embodiment of this invention, (A) is a front view of a spring open state, (B) is the right side view, (C) is a front view of a spring compression state , (D) is the right side view. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 4th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. The exploded view of the contact probe. The front sectional view in the use condition of the socket which supports a plurality of the contact probes. FIG. 7 is a schematic explanatory view of a bending force applied to the second plunger in the compressed state shown in FIG. 6 (B). FIG. 10 is a cross-sectional view taken along the line VV ′ of FIG. 9. The schematic diagram which shows the contact and electric path which were made by the elastic deformation of a 2nd plunger in the compression state shown to FIG. 6 (B). VII-VII 'sectional drawing of FIG. The resistance characteristic figure of the contact probe of a 4th embodiment. FIG. 27 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 26. The schematic diagram which shows the measuring method of the resistance value characteristic view of a contact probe. It is a whole block diagram of the contact probe which concerns on the 5th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. XII-XII 'sectional drawing of FIG. It is a whole block diagram of the contact probe which concerns on the 6th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the contact probe which concerns on the 7th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the contact probe which concerns on the 8th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 9th Embodiment of this invention, (A) is a front view of a spring open state, (B) is a right view of the state, (C) is a spring compression state. Front view, (D) is a right side view of the same state. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 10th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a whole block diagram of the conventional contact probe, (A) shows a spring open state, (B) shows a spring compression state. It is explanatory drawing of the conventional contact probe, (A) is a whole block diagram, (B) is the BB 'sectional drawing (contact state / non-contact state).

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

(First embodiment)
FIG. 1 is an overall configuration diagram of a contact probe 900 according to a first embodiment of the present invention, where (A) is a front view in a spring open state, (B) is a front view in a spring compression state, and (C). FIG. 4 is a cross-sectional view of the overlapping portion of the first and second plungers. FIG. 2 is a front sectional view of a socket 830 that supports a plurality of the contact probes 900 in use.

The contact probe 900 includes a first plunger 804, a second plunger 805, and a coil spring 806 as a spring. The first plunger 804 is a connection part with the inspection object 807 (see FIG. 2), and the second plunger 805 is a connection part with the inspection substrate 808 (see FIG. 2). For example, a coil spring 806 made of a general conductive metal material such as a piano wire or a stainless steel wire has first and second plans so that the first and

second plungers

804 and 805 can slide relative to each other. It is provided for the jars 804 and 805 (the first and

second plungers

804 and 805 are connected). The coil spring 806 also biases the first and

second plungers

804 and 805 in a direction away from each other when in use, thereby causing the first and

second plungers

804 and 805 to move toward the inspection object 807 and the inspection substrate 808. Press. The inspection object 807 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 807a (for example, solder bumps) are arranged at a predetermined interval. The inspection substrate 808 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 807a.

As shown in FIG. 1, the first plunger 804, which is a conductive metal body such as a copper alloy, includes an end portion 811, a flange portion 812 that forms a locking projection, and a distal end side body portion 813 as a distal end portion. It is the rod shape which has. The semi-cylindrical end portion 811 has a smaller diameter than the inner diameter of the coil spring 806 and is positioned inside the coil spring 806. The curved surface portion of the end portion 811 is located along the inner periphery of the coil spring 806. A planar portion of the end portion 811 is located on the axial center side of the coil spring 806 and is in contact with the second plunger 805. The flange portion 812 has a larger diameter than the inner diameter of the coil spring 806. The end face of the flange portion 812 is in contact with one end of the coil spring 806. The end surface on the front end side of the flange portion 812 is locked to the insulating support 809. The distal end side main body portion 813 has a smaller diameter than the flange portion 812. The distal end of the distal end side main body portion 813 is a contact portion 813 a that contacts the electrode bump 807 a of the inspection object 807.

The range of a predetermined length from the proximal end of the distal end side main body portion 813 and the flange portion 812 have a semi-cylindrical shape, and the planar portion is flush with the planar portion of the distal end portion 811. A range of the predetermined length of the distal end side main body portion 813, a planar portion of the flange portion 812, and the end portion 811 is a sliding surface 814 that can come into contact with the second plunger 805. It should be noted that the flat surface portion of the distal end side main body portion 813 is formed in a range that does not come out of an insulating support 809 described later even when the spring 806 is opened.

As with the first plunger 804, the second plunger 805, which is a conductive metal body such as a copper alloy, has a distal end 821, a flange 822 that forms a locking projection, and a distal-side main body as a distal end. 823. The semi-cylindrical end portion 821 has a smaller diameter than the inner diameter of the coil spring 806 and is positioned inside the coil spring 806. The curved surface portion of the end portion 821 is located along the inner periphery of the coil spring 806. A planar portion of the end portion 821 is located on the axial center side of the coil spring 806 and is in contact with the first plunger 804. The flange portion 822 has a larger diameter than the inner diameter of the coil spring 806. The end face of the flange portion 822 is in contact with the other end of the coil spring 806. The front end side end surface of the flange portion 822 is locked to the insulating support 809. The distal end side main body portion 823 has a smaller diameter than the flange portion 822. The distal end of the distal end side body portion 823 is a contact portion 823a that comes into contact with an electrode pad (not shown) of the inspection substrate 808.

The range of the predetermined length from the proximal end of the distal end side main body portion 823 and the flange portion 822 are semi-cylindrical, and the plane portion is flush with the plane portion of the end portion 821. The range of the predetermined length of the distal end side main body portion 823, the planar portion of the flange portion 822, and the end portion 821 is a sliding surface 824 that can contact the first plunger 804. It should be noted that the flat surface portion of the distal end side main body portion 823 is formed in a range that does not come out of the insulating support 809 even when the spring 806 is opened.

As shown in FIG. 2, the socket 830 includes an insulating support 809 (for example, made of resin or ceramic) having a cavity 832 for arranging a plurality of contact probes 900 in parallel at predetermined intervals, and each of these cavities. A contact probe 900 is inserted into 832. Specifically, the first probe 804, the second plunger 805, and the coil spring 806 are integrally assembled as shown in FIG. 1 to form the contact probe 900, and the insulating support shown in FIG. 809 is inserted into the cavity 832. Opening side sliding

support portions

833 and 834 at both ends (upper and lower ends) of the cavity portion 832 support the front end side

main body portions

813 and 823 of the first and

second plungers

804 and 805 slidably, respectively. The intermediate portion 835 except for the opening side sliding

support portions

833 and 834 of the cavity portion 832 has a larger diameter than the opening side sliding

support portions

833 and 834, and the inner circumference where the

flange portions

812 and 822 and the coil spring 806 can freely move. It is a diameter. Step portions formed on the intermediate portion 835 side of the opening side sliding

support portions

833 and 834 of the cavity portion 832 engage with the front end side surfaces of the

flange portions

812 and 822, respectively, and the first and

second plungers

804 and 805 are engaged. Regulate the escape of Note that the insulating support 809 has a structure that can be divided into a plurality of layers in order to incorporate the contact probe 900 into the cavity 832 (two-divided structure in the figure).

When the inspection is performed using the socket 830 assembled as shown in FIG. 2, the socket 830 is positioned and placed on the inspection substrate 808. As a result, the coil spring 806 is contracted by a predetermined length and the second plunger 805 is contracted. The contact portion 823a of the front end side main body portion 823 elastically contacts the electrode pad of the inspection substrate 808. In a state where there is no inspection object 807 such as a semiconductor integrated circuit, the first plunger 804 moves in the protruding direction until the flange portion 812 is regulated by the opening side sliding support portion 833, and the tip side main body portion 813 The amount of protrusion from the insulating support 809 is the maximum. When the inspection object 807 is disposed to face the insulating support 809 of the socket 830 at a predetermined interval, the distal end side body portion 813 is retracted and the spring 806 is further compressed. As a result, the distal end side body portion 813 is compressed. Elastically contacts the electrode bump 807a of the inspection object 807. In this state, the inspection object 807 is inspected.

As shown in FIG. 1A, in the first state (open state) in which the coil spring 806 is extended, the end portion 811 of the first plunger 804 and the end portion 821 of the second plunger 805 are both The sliding surfaces face each other over a predetermined length from the end side and come into contact with each other. When the first state (open state) is changed to the second state (compressed state, ie, energized state) in which the coil spring 806 is contracted as shown in FIG. 1B, the end of the first plunger 804 is moved. The flat surface portion (sliding surface) of the portion 811 faces across the range of the predetermined length of the distal end side main body portion 823 and the flat surface portion of the flange portion 822 from the flat surface portion of the end portion 821 of the second plunger 805, and contacts To do. That is, the end of the end portion 811 of the first plunger 804 is located closer to the tip of the second plunger 805 than the coil spring 806. The plane portion (sliding surface) of the end portion 821 of the second plunger 805 is within the range of the predetermined length from the plane portion of the end portion 811 of the first plunger 804 to the main body portion 813 and the plane portion of the flange portion 812. Face to face and touch. That is, the end of the end portion 821 of the second plunger 805 is located closer to the tip of the first plunger 804 than the coil spring 806.

The movable stroke A of the first plunger 804, the movable stroke B of the second plunger 805, and the overlap length C of the first and

second plungers

804 and 805 of the contact probe 900 of the present embodiment are shown in FIG. This is the same as that of the conventional contact probe shown in FIG. On the other hand, the following X ', Y'
・ X ′ = (the total length of the first plunger 804) − (A + B + C)
・ Y ′ = (the total length of the second plunger 805) − (A + B + C)
Are X and Y of the conventional contact probe shown in FIG.
・ X = (Total length of the first plunger 61) − (A + B + C)
・ Y = (Total length of second plunger 62) − (A + B + C)
In relation to
X '<X and Y'<Y
It becomes. This is different from the conventional contact probe in the specific configuration of the present embodiment in which the range of the predetermined length of the distal end side

main body portions

813 and 823 and the

flange portions

812 and 822 have a semi-cylindrical shape and have a plane portion. to cause. In this configuration, not only the flat portions of the

end portions

811 and 821 but also the range of the predetermined length of the front end side

main body portions

813 and 823 and the flat portions of the

flange portions

812 and 822 are mutually sliding surfaces, and as described above, X ′ , Y ′ can be made shorter than X and Y, respectively. That is, the open length L ₁ ′ and the compressed full length L ₂ ′ of the contact probe 900 of the present embodiment, and the conventional contact probe full length L ₁ and the compressed full length L ₂ are respectively L ₁ ′ = 2 (A + B ) + C + X '+ Y'
L ₂ '= A + B + C + X ′ + Y ′
L ₁ = 2 (A + B) + C + X + Y
L ₂ = A + B + C + X + Y
Therefore, L ₁ ′ <L ₁ and L ₂ ′ <L ₂ .

As described above, according to the present embodiment, when the movable stroke and overlap length of the first plunger 804 and the second plunger 805 are the same, the total length of the contact probe is larger than that of the conventional one. It can be shortened. Therefore, compared with the conventional contact probe, it is advantageous in terms of low resistance, large current, and high frequency. Further, in the first and

second plungers

804 and 805, since the

flange portions

812 and 822 are formed on the outer periphery over 180 ° or more, the holding of the spring 806 is stable. Further, since the flat portions of the distal end side

main body portions

813 and 823 do not come out of the insulating support 809 even when the spring 806 is opened, rattling can be prevented.

(Second embodiment)
FIG. 3 is an overall configuration diagram of a contact probe according to a second embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. The contact probe of the present embodiment is different from that of the first embodiment in that the range of a predetermined length from the distal end side of the distal end side body portion 813 of the first plunger 804 and the flange portion 812 have a cylindrical shape. This is a shape in which a groove 935 is formed in the vertical direction. The bottom surface of the groove 935 is flush with the flat portion of the end portion 811. As shown in FIG. 3A, when the coil spring 806 is opened, the front end side of the groove 935 protrudes outside the insulating support 809 over a predetermined length. On the other hand, as shown in FIG. 3B, when the coil spring 806 is compressed, the flat portion (sliding surface) 824 of the end portion 821 of the second plunger 805 is formed on the bottom surface (sliding surface 814) of the groove 935. Among them, the coil spring 806 faces and contacts the bottom surface of the portion that is outside the insulating support 809 when the coil spring 806 is opened.

In the contact probe of this embodiment, unlike the first embodiment, the sliding surface 814 of the first plunger 804 extends to the outside of the insulating support 809 when the coil spring 806 is opened. Therefore, the first plunger can be made shorter with the same movable stroke and overlapping length. That is, the total length of the contact probe can be further shortened as compared with the first embodiment. In addition, since a range of a predetermined length from the distal end side of the distal end side main body portion 813 of the first plunger 804 is a shape in which a groove 935 is formed in the length direction of the columnar shape, the bottom surface (sliding) when the coil spring 806 is opened. The surface 814) protrudes outside the insulating support 809, but the lateral direction of the first plunger 804 with respect to the insulating support 809 when the coil spring 806 is open is compared with the case where the same range is a semi-cylindrical shape. It is preferable because it can suppress rattling.

(Third embodiment)
FIG. 4 is an overall configuration diagram of a contact probe according to a third embodiment of the present invention, where (A) is a front view of a spring open state, (B) is a right side view thereof, and (C) is spring compression. A front view of the state, (D) is a right side view thereof. FIG. 5 is a component diagram of the first plunger 804 of the contact probe, where (A) is a front view, (B) is a right side view, and (C) is a bottom view.

The contact probe of this embodiment differs from that of the first embodiment in that the end portion 821 of the second plunger 805 has bifurcated

portions

821a and 821b that are divided into two from the middle portion to the end. Further, the end portion 811 of the first plunger 804 is located between the

bifurcated portions

821a and 821b. The flange portion 812 has a cylindrical shape in which sliding portions with the

bifurcated portions

821a and 821b are cut out into groove shapes. Therefore, sliding

surfaces

814 a and 814 b extending from the end portion 811 to the flange portion 812 and further to the middle of the distal end side body portion 813 are formed. The end face of the flange portion 812 is in contact with one end of the coil spring 806. According to the present embodiment, the number of contact points of the first and

second plungers

804 and 805 can be increased, and a lower resistance can be expected as compared with the first embodiment.

(Fourth embodiment)
In the following embodiments, it is an object to make the mutual contact of the first and second plungers more reliable. That is, in the conventional contact probe shown in FIG. 26 (A), the contact probe internal contact (the facing structure between the first plunger 61 and the second plunger 62) has a gap (play) for smooth sliding. have. For this reason, the contact state between the first plunger 61 and the second plunger 62 is not stable (for example, the plunger contact state and the non-contact state in FIG. The problem of being unstable can also occur. Therefore, in the following embodiments, the first plunger and the second plunger can be reliably contacted, and the inspection object such as a semiconductor integrated circuit and the inspection substrate are electrically stabilized and connected with low resistance. An object of the present invention is to provide a contact probe that can be used and a socket including the same.

FIG. 6 is an overall configuration diagram of a contact probe 100 according to a fourth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. FIG. 7 is an exploded view of the contact probe 100. FIG. 8 is a front sectional view of the socket 30 in which a plurality of the contact probes 100 are supported in use.

The contact probe 100 includes a first plunger 1, a second plunger 2, and a coil spring 3 as a spring. The first plunger 1 is a connection part with the inspection object 5, and the second plunger 2 is a connection part with the inspection substrate 6. For example, a coil spring 3 formed of a general material such as a piano wire or a stainless steel wire has a first and

second plunger

1, 2 so that the first and

second plungers

1, 2 can slide relative to each other. 2 (the first and

second plungers

1 and 2 are connected). The coil spring 3 also urges the first and

second plungers

1 and 2 in directions away from each other during use, and causes the inspection object 5 and the inspection substrate 6 to be applied to the first and

second plungers

1 and 2. Give contact force. The inspection object 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 5a are arranged at a predetermined interval. The inspection substrate 6 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 5a.

As shown in FIG. 8, the socket 30 includes an insulating support 31 having cavities 32 at a predetermined interval for arranging a plurality of contact probes 100 in parallel, and the contact probes 100 are inserted into the cavities 32. It is arranged. Specifically, the contact probe 100 is constructed by integrally assembling the first plunger 1, the second plunger 2, and the coil spring 3 as shown in FIG. It is inserted and arranged in the cavity 32 of 31. Opening side sliding

support portions

33 and 34 at both ends (upper and lower ends) of the cavity portion 32 support (fitting) the front end side

main body portions

13 and 24 of the first and

second plungers

1 and 2 slidably, respectively. The intermediate portion 35 excluding the opening side sliding

support portions

33 and 34 of the cavity portion 32 has a larger diameter than the opening side sliding

support portions

33 and 34, and the inner periphery on which the

flange portions

12 and 23 and the coil spring 3 can freely move. It is a diameter. The opening side sliding

support portions

33 and 34 of the cavity portion 32 are engaged with the

flange portions

12 and 23 to restrict the withdrawal of the first and

second plungers

1 and 2. The insulating support 31 has a structure that can be divided into a plurality of layers in order to incorporate the contact probe 100 into the cavity 32 (not shown).

As shown in FIGS. 6 and 7, the first plunger 1, which is a conductive metal body such as a copper alloy, has an end portion 11 and a flange portion 12 from the inspection substrate 6 side toward the inspection object 5 side. And a bar shape having a front end side main body portion 13 sequentially. The semi-cylindrical end portion 11 has a smaller diameter than the inner diameter of the coil spring 3 and is positioned inside the coil spring 3. A curved surface portion is disposed along the inner periphery of the coil spring 3, and on the coil spring 3 axis side. A plane portion is disposed so as to contact the second plunger 2. The flange portion 12 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3. The distal end side main body portion 13 has a smaller diameter than the flange portion 12, and the distal end is a contact portion 13 a that contacts the electrode bump 5 a of the inspection object 5. The sliding surface of the portion of the first plunger 1 that is located outside the coil spring 3 with respect to the expansion and contraction direction of the coil spring 3 (the flange portion 12 and the distal end side main body portion 13) with the second plunger 2 is partially It becomes the inclined part 15 (here inclined surface). In the illustrated example, an inclined portion 15 exists between the semi-cylindrical portion on the distal end side of the flange portion 12 and the cylindrical portion on the distal end side of the distal end side main body portion 13.

The second plunger 2, which is a conductive metal body such as a copper alloy, has a semi-cylindrical sliding portion 21, a cylindrical portion 22, and a flange portion from the inspection object 5 side toward the inspection substrate 6 side. 23 and a rod-shaped body having a distal end side main body portion 24 sequentially. The sliding portion 21 and the columnar portion 22 are smaller than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar portion 22 is fitted inside the coil spring 3. The semi-cylindrical sliding portion 21 is provided with a curved surface portion along the inner periphery of the coil spring 3, and a flat surface portion on the flat surface portion of the end portion 11 of the first plunger 1 and on the end side of the flange portion 12. The semi-cylindrical portion is disposed toward the plane and the inclined portion 15. The flange portion 23 has a diameter larger than the inner diameter of the coil spring 3 and an end surface thereof abuts on the other end of the coil spring 3. The front end side main body portion 24 has a diameter smaller than that of the flange portion 23, and the front end is a contact portion 24 a that contacts an electrode pad (not shown) of the inspection substrate 6.

The product outer diameters of the contact probe 100 and the socket 30 are, for example, as follows.
-Diameter of the intermediate part 35 of the cavity part 32 of the insulating support 31: 0.22 mm
・ Outer diameter of contact probe 100 (outer diameter of coil spring 3): 0.2 mm
-Coil spring 3 wire diameter (wire width): 0.04 mm
-Inner diameter of coil spring 3: 0.12 mm
-The thickness of the end portion 11 of the first plunger 1: 0.055 mm
-Thickness of the sliding portion 21 of the second plunger 2: 0.055 mm
-Free length of contact probe 100: 4 mm
・ Use length of contact probe 100: 3 mm

When the inspection is performed using the socket 30 assembled as shown in FIG. 8, the socket 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is contracted by a predetermined length and the second plunger 2 is contracted. The contact portion 24 a of the distal end side main body portion 24 comes into elastic contact with the electrode pad of the inspection substrate 6. In a state where there is no inspection object 5 such as a semiconductor integrated circuit, the first plunger 1 moves in the protruding direction until the flange portion 11 is regulated by the opening-side sliding support portion 33. The amount of protrusion is the maximum. By disposing the inspection object 5 so as to face the insulating support 31 of the socket 30 at a predetermined interval, the distal end side body portion 13 is retracted and the spring 3 is further compressed. As a result, the distal end side body portion 13 is compressed. Elastically contacts the electrode bump 5a of the inspection object 5. In this state, the inspection object 5 is inspected.

As shown in FIG. 6 (A), in the first state (open state) in which the coil spring 3 is extended, the end portion 11 of the first plunger 1 and the sliding portion 21 of the second plunger 2 are both The sliding surfaces face each other with a gap (play) over a predetermined length from the end side. Then, in the process of transition from the first state (opened state) to the second state (compressed state) in which the coil spring 3 is contracted as shown in FIG. 6B, the second state as shown in FIG. The sliding portion 21 of the plunger 2 is deformed into a leaf spring shape and rides on the inclined portion 15 of the first plunger 1. In this state, the sliding part 21 extends outside the inner peripheral width range of the coil spring 3 with respect to the direction perpendicular to the expansion / contraction direction of the coil spring 3 and from the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3. Is also located near the tip of the first plunger 1. In addition, the presence position of the inclined portion 15 is a position away from the portion where the sliding portion 21 abuts in the first state (open state) by a predetermined length L toward the distal end side of the first plunger 1. In the process of transition from the first state (open state) to the second state (compressed state), the sliding portion 21 starts to ride on the inclined portion 15 after the coil spring 3 is contracted by the predetermined length L. Become. The predetermined length L is, for example, a length that is equal to or slightly shorter than the length in which the coil spring 3 contracts when the contact portion 24a of the distal end side body portion 24 of the second plunger 2 abuts against the inspection substrate 6. Say it.

FIG. 9 is a schematic explanatory view of bending forces F1 to F3 applied to the second plunger 2 in the second state (compressed state shown in FIG. 6B). As shown in the figure, as a result of the sliding portion 21 of the second plunger 2 deforming into a leaf spring and riding on the inclined portion 15 of the first plunger 1, the second plunger 2 is moved to the sliding portion 21. Of the first plunger 1 is brought into contact with the inclined portion 15 of the first plunger 1 at the first contact 101, and a bending force F <b> 1 is applied from the inclined portion 15 of the first plunger 1 at the first contact 101. In the second plunger 2, the intermediate portion outer surface in the longitudinal direction of the sliding portion 21 abuts with the inner periphery of the end portion in the expansion / contraction direction of the coil spring 3 at the second contact 102. A bending force F2 is applied. Further, when the bending force F2 is applied to the second plunger 2, the tip end side of the sliding portion 21 comes into contact with the end side plane of the end portion 11 of the first plunger 1 at the third contact 103, and the third contact point In 103, a bending force F3 is applied from the end 11 of the first plunger 1.

FIG. 10 is a cross-sectional view taken along the line VV ′ of FIG. As shown in this figure, the cross-sectional areas of the end portion 11 of the first plunger 1 and the sliding portion 21 of the second plunger 2 are equal. However, when the diameter is large, the cross-sectional area of the sliding portion 21 is made small so that the sliding portion 21 has an appropriate spring force (elastic force). In order to suppress the electric resistance, it is desirable that the cross-sectional area is large. However, there is a case where an excessive spring force is generated in the sliding portion 21 and smooth sliding cannot be performed.

FIG. 11 is a schematic diagram showing a contact and an electric path formed by elastic deformation of the second plunger 2 in the second state (compressed state shown in FIG. 6B). A part of the current E <b> 1 passing through the first plunger 1 branches to the second plunger 2 at the first contact 101. The current branched and flowing to the first plunger 1 and the second plunger 2 becomes a current E2 that flows through the second plunger 2 by joining at the third contact 103. Further, as shown in a sectional view in FIG. 12, the contact between the first plunger 1 and the coil spring 3 (third contact 103), and the contact between the second plunger 2 and the coil spring 3 (fourth contact 104). Connects the first and

second plungers

1 and 2 using the coil spring 3 as a current path. By securing a plurality of current paths in this way, electrical resistance is suppressed.

FIG. 13 is a resistance characteristic diagram of the contact probe 100 of the present embodiment, and shows the measurement results (when compressed and returned) of the samples of the five contact probes. As shown in FIG. 15, the contact probe 100 is sandwiched between electrodes connected to a constant voltage power source, and the passing resistance of the contact probe 100 is measured by changing the use length of the contact probe 100 (as shown in FIG. 15). Obtained from the flowing current). FIG. 14 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 26, and shows the measurement results of the five contact probe samples (during compression and return). The measurement method is the same as in FIG.

In the measurement result shown in FIG. 13 (this embodiment), the resistance value variation among the samples is small and the resistance value is low. It can also be seen that the variation of the resistance value when the contact probe usage length is changed is small. On the other hand, in the measurement result shown in FIG. 14 (conventional example), the variation among the samples is large and the resistance value is high. Further, it can be seen that the resistance value fluctuates greatly when the contact probe usage length is changed.

According to this embodiment, the following effects can be achieved.

(1) The sliding surface of the first plunger 1 with the second plunger 2 is partially inclined 15, and the coil spring 3 is contracted from the first state in which the coil spring 3 is extended. Since the second plunger 2 rides on the inclined portion 15 during the transition to the second state, the first plunger 1 and the second plunger 2 can be reliably contacted. As a result, as is apparent from the measurement results shown in FIGS. 13 and 14, the inspection object 5 and the inspection substrate 6 can be electrically stabilized and connected with a low resistance as compared with the conventional example. .

(2) Since the inclined portion 15 is present in the portion of the first plunger 1 located outside the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3 (the flange portion 12 and the front end side main body portion 13), Unlike the case where the inclined portion exists in the portion located inside the spring 3, the sliding portion 21 can be elastically deformed beyond the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15. Further, the configuration in which the end of the sliding portion 21 extends outside the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15 allows a limited space to be used effectively, and the contact probe 100 can be made compact. This is advantageous for downsizing. Further, since the end of the sliding portion 21 is positioned closer to the tip of the first plunger 1 than the coil spring 3 in the expansion / contraction direction of the coil spring 3 when riding on the inclined portion 15, the same as in the first embodiment. In addition, the total length of the contact probe can be shortened. Therefore, compared with the conventional contact probe, it is advantageous in terms of low resistance, large current, and high frequency.

(3) As a result of the sliding portion 21 of the second plunger 2 riding on the inclined portion 15 of the first plunger 1, the end of the sliding portion 21 comes into contact with the inclined portion 15 at the first contact 101, and the sliding portion The outer surface of the intermediate portion in the longitudinal direction of 21 is in contact with the inner periphery of the end portion of the coil spring 3 in the expansion / contraction direction at the second contact 102, and the distal end side of the sliding portion 21 is in contact with the end of the end portion 11 at the third contact 103. Therefore, two points (the first contact 101 and the third contact 103) between the first and

second plungers

1 and 2 are surely secured, which is advantageous in reducing the resistance.

(4) In the process of transition from the open state shown in FIG. 6 (A) to the compressed state shown in FIG. 6 (B), the sliding portion 21 starts to ride on the inclined portion 15 after the coil spring 3 is contracted by a predetermined length. Compared with the case where the sliding part 21 rides on the inclined part 15 from the start of contraction to the end of extension of the coil spring 3, it can be expected that the sliding (especially restoration from the compressed state to the open state) becomes smoother. That is, when the sliding portion 21 rides on the inclined portion 15 from the start of contraction of the coil spring 3 to the end of extension, it is in the vicinity of the end of extension, and if the restoring force of the coil spring 3 cannot overcome the frictional force caused by the ride, the original position is restored. Although there is a risk that it cannot be restored, in the present embodiment, such a risk can be reduced.

(Fifth embodiment)
FIG. 16 is an overall configuration diagram of a contact probe 200 according to a fifth embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. 17 is a cross-sectional view taken along the line XII-XII ′ of FIG. Compared with the fourth embodiment, the contact probe 200 according to the present embodiment has an inclined portion 225 on the second plunger 202 (part to be connected to the inspection object), and the second plunger 202. The end portion 221 of the first plunger 201 is inclined in the direction in which the first plunger 201 exists over a predetermined length from the end, and the sliding portion 211 of the first plunger 201 is more than the end portion 221 of the second plunger 202. It is mainly different from the small diameter.

The second plunger 202 has a distal end portion 221, a flange portion 222, and a distal end side main body portion 223. The end portion 221 having a substantially semi-cylindrical shape is smaller in diameter than the inner diameter of the coil spring 3, is positioned inside the coil spring 3, and is inclined from the end in a direction in which the first plunger 201 exists over a predetermined length. The flange portion 222 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3. The front end side main body portion 223 has a smaller diameter than the flange portion 222, and the front end is a contact portion 223a that comes into contact with the electrode pad of the inspection substrate. The sliding surface of the portion of the second plunger 202 located outside the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3 (the flange portion 222 and the distal end side body portion 223) with the first plunger 201 is partially It is an inclined portion 225 (here, an inclined surface). In the illustrated example, there is an inclined portion 225 between the semi-cylindrical portion on the distal end side of the flange portion 222 and the cylindrical portion on the distal end side of the distal end side main body portion 223.

The first plunger 201 includes a substantially semi-cylindrical sliding portion 211, a cylindrical portion 212, a flange portion 213, and a front end side main body portion 214. The sliding part 211 and the columnar part 212 are smaller in diameter than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar part 212 is fitted inside the coil spring 3. The flange portion 213 has a diameter larger than the inner diameter of the coil spring 3, and an end surface thereof is in contact with the other end of the coil spring 3. The distal end side main body portion 214 has a smaller diameter than the flange portion 213, and the distal end is a contact portion 214a that comes into contact with the electrode bump of the inspection object.

Similarly to the fourth embodiment, this embodiment also has a structure in which the sliding portion 211 of the first plunger 201 rides on the inclined portion 225 of the second plunger 202. The two plungers 202 can be reliably brought into contact with each other, and the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance as compared with the conventional example. In other respects, the same effects as those of the fourth embodiment can be obtained. Further, in the present embodiment, since the end of the end portion 221 of the second plunger 202 is inclined in the direction in which the first plunger 201 exists over a predetermined length, when the second plunger 202 is processed. Even if the end portion 221 is slightly warped in the direction in which the first plunger 201 does not exist, the end of the end portion 221 can be reliably brought into contact with the sliding portion 211 of the first plunger 201. In addition, the sliding portion 211 has a small diameter so that excessive spring force is not generated.

(Sixth embodiment)
FIG. 18 is an overall configuration diagram of a contact probe 300 according to a sixth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. Compared with the fourth embodiment, the contact probe 300 of the present embodiment has a smaller (shorter) range of the inclined portion 15 and a sliding portion of the second plunger 2. 21 is mainly different in that the diameter is smaller than the end portion 11 of the first plunger 1.

In the present embodiment, since the existence range of the inclined portion 15 is limited to a part of the flange portion 12, the second state (compressed state) in which the coil spring 3 is contracted as shown in FIG. 18B. Then, the end of the sliding portion 21 exceeds the existence range of the inclined portion 15 (the inclined portion 15 is fully climbed), and the intermediate portion of the sliding portion 21 is in contact with the end (upper end) corner of the inclined portion 15. Yes.

This embodiment can achieve the same effects as those of the fourth embodiment. In addition, the sliding portion 21 has a small diameter so that an excessive spring force is not generated.

(Seventh embodiment)
FIG. 19 is an overall configuration diagram of a contact probe 400 according to a seventh embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. Compared with the fourth embodiment, the contact probe 400 of the present embodiment has an inclined surface 15 from a straight inclined surface to an R surface (an inclined surface in which the inclination is continuously steep from flat as viewed from the end side). The main difference is that This embodiment can achieve the same effects as those of the fourth embodiment.

(Eighth embodiment)
FIG. 20 is an overall configuration diagram of a contact probe 500 according to an eighth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state. The contact probe 500 of the present embodiment is mainly different from the fourth embodiment in that the inclined portion 15 is formed by the convex portion 515. The shape of the convex portion 515 is not particularly limited as long as the sliding portion 21 can ride on, but is a triangular pyramid shape, a quadrangular pyramid shape, a wedge shape, or the like as shown in FIG. This embodiment can achieve the same effects as those of the fourth embodiment.

(Ninth embodiment)
FIG. 22 is an overall configuration diagram of a contact probe 600 according to a ninth embodiment of the present invention, where (A) is a front view of the spring open state, (B) is a right side view of the same state, and (C). Is a front view of the spring compressed state, and (D) is a right side view of the same state. FIG. 23 is a component diagram of the first plunger 1 of the contact probe 600, where (A) is a front view, (B) is a right side view, and (C) is a bottom view.

Compared with the fourth embodiment, the contact probe 600 according to the present embodiment is divided into two forks from the intermediate portion in the length direction of the second plunger 2 to the end side (sliding portion 21). The point which becomes 21a, 21b, the point which the terminal part 11 of the 1st plunger 1 is located between the

bifurcated part

21a, 21b, and the

inclination part

15a, 15b exist corresponding to the

bifurcated part

21a, 21b. It is mainly different from the point.

The flange portion 12 has a cylindrical shape in which a sliding portion with the second plunger 2 is cut out in a groove shape, and the end side end surface of the flange portion 12 is in contact with one end of the coil spring 3. Since this embodiment also has a structure in which the

bifurcated portions

21a and 21b ride on the

inclined portions

15a and 15b, the first plunger 1 and the second plunger 2 can be reliably contacted, compared with the conventional example. The inspection object and the inspection substrate can be electrically stabilized and connected with low resistance. In other respects, the same effects as those of the fourth embodiment can be obtained. Furthermore, since the number of contacts of the first and

second plungers

1 and 2 is increased, it is possible to further reduce the resistance.

(Tenth embodiment)
FIG. 24 is an overall configuration diagram of a contact probe 700 according to a tenth embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. Compared with the fourth embodiment, the contact probe 700 according to the present embodiment has inclined portions in both the first plunger 1 and the second plunger 2, and both inclined portions are coil springs 3. It is mainly different in that it exists within the length range.

In the second plunger 2, the sliding portion 21 is an inclined portion 25 (here, an inclined surface) over a predetermined length from the tip side. The first plunger 1 also has a sliding portion 71 having the same configuration as the sliding portion 21 of the second plunger 2. The sliding portion 71 is an inclined portion 75 (here, an inclined surface) over a predetermined length from the tip side. The coil spring 3 is sandwiched between the end surfaces of the

flange portions

73 and 23 of the first and

second plungers

1 and 2.

Process of transition from the first state in which the coil spring 3 is extended (open state shown in FIG. 24A) to the second state in which the coil spring 3 is contracted (compressed state shown in FIG. 24B) Thus, the sliding

portions

21 and 71 are deformed into leaf springs and ride on the

inclined portions

75 and 25, respectively. Thereby, the 1st and

2nd plungers

1 and 2 contact reliably at two places. Therefore, as in the fourth embodiment, the object to be inspected and the inspection substrate can be electrically stabilized and connected with low resistance as compared with the conventional example. However, since the sliding

deformable portions

21 and 71 are limited to the inner peripheral width range of the coil spring 3 when the sliding

portions

21 and 71 run on the

inclined portions

75 and 25, the viewpoint of downsizing (smaller diameter) of the contact probe. Then, the fourth embodiment is more excellent. In other respects, the same effects as those of the fourth embodiment are obtained.

The present invention has been described above by taking the embodiment as an example, but it will be understood by those skilled in the art that each component of the embodiment can be variously modified within the scope of the claims. Hereinafter, modifications will be described.

In the first to third embodiments, the case where the

end portions

811 and 821 of the first and

second plungers

804 and 805 have a semi-cylindrical shape has been described, but the

end portions

811 and 821 have flat surfaces facing each other. If it is, it will not be limited to a semi-cylindrical shape. That is, the

end portions

811 and 821 only need to have a flat surface as a sliding surface on the side surface. The same applies to the range of a predetermined length from the base ends of the distal end side

main body portions

813 and 823 and the shape of the flange portion 812 in the first embodiment.

In the second embodiment, the range of a predetermined length from the proximal end of the distal end side main body portion 813 of the first plunger 804 and the case where the flange portion 812 has a shape in which the groove 935 is formed in the length direction of the columnar shape, The range of the predetermined length of the distal end side main body portion 813 and the flange portion 812 may have the same shape as the first embodiment (for example, a semi-cylindrical shape). In this case, when the coil spring 806 is opened, the backlash in the lateral direction of the first plunger 804 with respect to the insulating support 809 is larger than in the second embodiment, but in terms of shortening the total length of the contact probe. The same effects as those of the second embodiment can be obtained.

In the first to third embodiments, when the coil spring 806 is compressed, the ends of the

end portions

811 and 821 of the first and

second plungers

804 and 805 are both outside the coil spring 806 with respect to the expansion and contraction direction of the coil spring 806. In the modification, one of the ends of the

end portions

811 and 821 may be located outside the coil spring 806 and the other may be located inside the coil spring 806. Also in this case, the total length of the contact probe can be shortened as compared with the conventional case.

In the embodiment, the first plunger is used for connection with the inspection object, and the second plunger is used for connection with the inspection substrate. However, in the modification, the first plunger is used for connection with the inspection substrate. Two plungers may be used for connection with the inspection object.

In the fourth to ninth embodiments, the case where the inclined portion is located outside the length range of the coil spring has been described, but the inclined portion may exist within the length range of the coil spring. Also in this case, the first and second plungers can be reliably brought into contact with each other so that the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance.

In the fourth to ninth embodiments, the case where the inclined portion is present in one of the first and second plungers has been described, but in the modified example, the inclined portion is provided in both the first and second plungers. May be.

804 1st plunger 805 2nd plunger 806 Coil spring 807 Inspection object 807a Electrode bump 808 Inspection substrate 809 Insulation support 811,821 End portion 812,822 Flange portion 813,823 Front end

side body portion

813a, 823a Contact portion 830 Socket 900 Contact probe

Claims

A spring and first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate;
Each of the first and second plungers has a locking projection for locking the spring at an intermediate portion in the length direction,
The spring is locked to the locking projection and biases the first and second plungers away from each other;
The contact probe, wherein the end of the second plunger is positioned closer to the tip of the first plunger than the spring when the spring is contracted to a predetermined length or less.
The contact probe according to claim 1,
The first plunger has a distal end portion, a distal end portion, and a flange portion between the distal end portion and the distal end portion,
The flange portion has the locking projection;
A contact probe in which a sliding surface with the second plunger continuously exists over a range of a predetermined length from the proximal end of the distal end portion, the flange portion, and the distal end portion.
3. The contact probe according to claim 1, wherein when the spring is contracted to a length equal to or shorter than a predetermined length, an end of the first plunger is closer to a tip of the second plunger than the spring is. Positioned contact probe.
The contact probe according to any one of claims 1 to 3, wherein the sliding surfaces of the first and second plungers are flat surfaces.
The contact probe according to claim 1,
The first plunger has an inclined portion at least a part of a sliding range with the second plunger,
The contact probe having a structure in which the second plunger rides on the inclined portion in a process of transition from a first state in which the spring is extended to a second state in which the spring is contracted.
6. The contact probe according to claim 5, wherein the inclined portion is present outside the spring with respect to a direction of expansion and contraction of the spring.
7. The contact probe according to claim 6, wherein the second plunger is deformed into a leaf spring in a state of riding on the inclined portion, and an inner peripheral width range of the spring with respect to a direction perpendicular to the expansion / contraction direction. A contact probe that extends outside.
8. The contact probe according to claim 7, wherein the second plunger is in a state in which the second plunger rides on the inclined portion, a middle portion in a longitudinal direction abuts on an inner periphery of an end portion in an expansion / contraction direction of the spring, and the middle portion A contact probe in which both a part on the distal end side and a part on the distal end side are in contact with the first plunger.
9. The contact probe according to claim 5, wherein the second plunger is a bifurcated portion that is divided into two from the middle portion in the longitudinal direction, and the end of the first plunger is The contact probe is located between the two forked portions, and the inclined portion exists at least one corresponding to both one and the other of the two forked portions.
10. The contact probe according to claim 9, wherein the flange portion of the intermediate portion in the length direction of the first plunger is formed in a groove shape by cutting out the sliding portion, and the distal end surface of the flange portion. A contact probe in contact with one end of the spring.
The contact probe according to any one of claims 5 to 10,
In the second plunger, at least a part of a sliding range with the first plunger is an inclined portion,
A contact probe having a structure in which the first plunger rides on the inclined portion of the second plunger in the process of transition from the first state to the second state.
The contact probe according to any one of claims 5 to 11, wherein an end of the first plunger is inclined in a direction in which the second plunger exists.
A socket formed by supporting a plurality of contact probes according to any one of claims 1 to 12 with an insulating support.
14. The socket according to claim 13, wherein the first plunger of each contact probe has a sliding surface with the second plunger when the spring extends to a length equal to or longer than a predetermined length. A socket extending from the inside to the outside of the insulating support with respect to the direction.
The socket according to claim 14,
The locking projection of the first plunger is a retaining from the insulating support,
The socket, wherein the sliding surface of the first plunger is a groove-shaped bottom surface on the tip side of the locking projection.