WO2011013731A1 - Sonde de contact et support - Google Patents

Sonde de contact et support Download PDF

Info

Publication number
WO2011013731A1
WO2011013731A1 PCT/JP2010/062752 JP2010062752W WO2011013731A1 WO 2011013731 A1 WO2011013731 A1 WO 2011013731A1 JP 2010062752 W JP2010062752 W JP 2010062752W WO 2011013731 A1 WO2011013731 A1 WO 2011013731A1
Authority
WO
WIPO (PCT)
Prior art keywords
plunger
contact probe
spring
contact
distal end
Prior art date
Application number
PCT/JP2010/062752
Other languages
English (en)
Japanese (ja)
Inventor
次男 山本
Original Assignee
株式会社ヨコオ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2009178406A external-priority patent/JP5624740B2/ja
Priority claimed from JP2010095537A external-priority patent/JP5645451B2/ja
Application filed by 株式会社ヨコオ filed Critical 株式会社ヨコオ
Publication of WO2011013731A1 publication Critical patent/WO2011013731A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • H01R13/2492—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point multiple contact points
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00—Connectors or connections adapted for particular applications
    • H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes

Definitions

  • the present invention relates to a contact probe used for testing a semiconductor integrated circuit or the like and a socket provided with the contact probe.
  • a contact probe When inspecting an inspection object such as a semiconductor integrated circuit, a contact probe is generally used to electrically connect the inspection object and an inspection substrate on the measuring instrument side.
  • FIG. 25 is an explanatory diagram of a conventional contact probe, in which (A) shows a spring open state and (B) shows a spring compressed state (when energized).
  • This type of contact probe has a structure that does not have a metal tube outside the coil spring in order to reduce the diameter. Further, in order to suppress the electric resistance, the first plunger 61 that is a connection part with an inspection target such as a semiconductor integrated circuit and the second plunger 62 that is a connection part with a substrate for inspection are in direct contact with each other. It is a structure to let you.
  • A movable stroke of the first plunger 61
  • the performance required for contact probes includes, for example, low resistance, large current compatibility, and high frequency compatibility.
  • the total length of the contact probe is preferably as short as possible.
  • the movable strokes A and B of the first plunger and the second plunger and the overlap length C are determined by the required specifications and cannot be shortened to a certain length or less. .
  • the present invention has been made in view of such a situation, and its object is to make the total length of the first plunger and the second plunger longer than the conventional one when the movable stroke and the overlap allowance length are the same. It is an object of the present invention to provide a contact probe that can be shortened and a socket having the contact probe.
  • the first aspect of the present invention is a contact probe.
  • This contact probe A spring and first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate;
  • Each of the first and second plungers has a locking projection for locking the spring at an intermediate portion in the length direction, The spring is locked to the locking projection and biases the first and second plungers away from each other;
  • the spring is contracted to a length equal to or shorter than a predetermined length, the end of the second plunger is positioned closer to the tip of the first plunger than the spring.
  • the first plunger has a distal end portion, a distal end portion, and a flange portion between the distal end portion and the distal end portion,
  • the flange portion has the locking projection;
  • a sliding surface with the second plunger may continuously exist over a range of a predetermined length from the proximal end of the distal end portion, the flange portion, and the distal end portion.
  • the end of the first plunger when the spring is contracted to a length equal to or shorter than a predetermined length, the end of the first plunger may be positioned closer to the tip of the second plunger than the spring.
  • the sliding surfaces of the first and second plungers may be flat.
  • the second aspect of the present invention is also a contact probe.
  • This contact probe is the contact probe according to the first aspect,
  • the first plunger has an inclined portion at least a part of a sliding range with the second plunger, In the transition from the first state in which the spring is extended to the second state in which the spring is contracted, the second plunger rides on the inclined portion.
  • the inclined portion is present outside the spring with respect to the expansion / contraction direction of the spring.
  • the second plunger is deformed into a leaf spring in a state of riding on the inclined portion, and the end extends outside the inner peripheral width range of the spring in the direction perpendicular to the expansion / contraction direction. Good.
  • the second plunger is in a state where the intermediate portion in the longitudinal direction is in contact with the inner periphery of the end portion in the expansion / contraction direction of the spring, and a part of the distal end side with respect to the intermediate portion in a state of riding on the inclined portion. It is preferable that both of the tip side and the first plunger are in contact with each other.
  • the second plunger is a bifurcated portion that is divided into two from the middle portion in the length direction, and the distal end of the first plunger is between the bifurcated portions. It is preferable that at least one inclined portion is present corresponding to both one and the other of the bifurcated portions.
  • the flange portion of the intermediate portion in the length direction of the first plunger is formed in a groove shape by cutting out the sliding portion, and the end face of the flange portion is one end portion of the spring. It should be in contact with.
  • the first plunger In the contact probe of the second aspect, at least a part of a sliding range with the first plunger is an inclined portion, In the process of transition from the first state to the second state, the first plunger may have a structure that rides on the inclined portion of the second plunger.
  • the end of the first plunger may be inclined in the direction in which the second plunger exists.
  • the third aspect of the present invention is a socket.
  • This socket is formed by supporting a plurality of contact probes of the first or second aspect with an insulating support.
  • the first plunger of each contact probe has a sliding surface with the second plunger when the spring extends to a length equal to or longer than a predetermined length. It is good to extend from the inner side to the outer side of the insulating support.
  • the locking projection of the first plunger is a retaining member from the insulating support, and the sliding surface of the first plunger has a groove shape on the tip side of the locking projection. It should be the bottom.
  • the end of the second plunger is positioned closer to the tip of the first plunger than the spring, so the first plunger and the second plan If the movable stroke of the jar and the length of the overlap allowance are the same, the total length of the contact probe can be shortened compared to the conventional case.
  • FIG. 7 is a schematic explanatory view of a bending force applied to the second plunger in the compressed state shown in FIG. 6 (B).
  • FIG. 10 is a cross-sectional view taken along the line VV ′ of FIG. 9.
  • the schematic diagram which shows the contact and electric path which were made by the elastic deformation of a 2nd plunger in the compression state shown to FIG. 6 (B).
  • FIG. 27 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 26.
  • the schematic diagram which shows the measuring method of the resistance value characteristic view of a contact probe.
  • FIG. 1 It is a whole block diagram of the contact probe which concerns on the 8th Embodiment of this invention, (A) shows a spring open state, (B) shows a spring compression state. It is a component figure of the 1st plunger of the contact probe, (A) is a front view, (B) is a right view, (C) is a bottom view. It is a whole block diagram of the contact probe which concerns on the 9th Embodiment of this invention, (A) is a front view of a spring open state, (B) is a right view of the state, (C) is a spring compression state. Front view, (D) is a right side view of the same state.
  • FIG. 1 is an overall configuration diagram of a contact probe 900 according to a first embodiment of the present invention, where (A) is a front view in a spring open state, (B) is a front view in a spring compression state, and (C).
  • FIG. 4 is a cross-sectional view of the overlapping portion of the first and second plungers.
  • FIG. 2 is a front sectional view of a socket 830 that supports a plurality of the contact probes 900 in use.
  • the contact probe 900 includes a first plunger 804, a second plunger 805, and a coil spring 806 as a spring.
  • the first plunger 804 is a connection part with the inspection object 807 (see FIG. 2)
  • the second plunger 805 is a connection part with the inspection substrate 808 (see FIG. 2).
  • a coil spring 806 made of a general conductive metal material such as a piano wire or a stainless steel wire has first and second plans so that the first and second plungers 804 and 805 can slide relative to each other. It is provided for the jars 804 and 805 (the first and second plungers 804 and 805 are connected).
  • the coil spring 806 also biases the first and second plungers 804 and 805 in a direction away from each other when in use, thereby causing the first and second plungers 804 and 805 to move toward the inspection object 807 and the inspection substrate 808. Press.
  • the inspection object 807 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 807a (for example, solder bumps) are arranged at a predetermined interval.
  • the inspection substrate 808 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 807a.
  • the first plunger 804 which is a conductive metal body such as a copper alloy, includes an end portion 811, a flange portion 812 that forms a locking projection, and a distal end side body portion 813 as a distal end portion. It is the rod shape which has.
  • the semi-cylindrical end portion 811 has a smaller diameter than the inner diameter of the coil spring 806 and is positioned inside the coil spring 806.
  • the curved surface portion of the end portion 811 is located along the inner periphery of the coil spring 806.
  • a planar portion of the end portion 811 is located on the axial center side of the coil spring 806 and is in contact with the second plunger 805.
  • the flange portion 812 has a larger diameter than the inner diameter of the coil spring 806.
  • the end face of the flange portion 812 is in contact with one end of the coil spring 806.
  • the end surface on the front end side of the flange portion 812 is locked to the insulating support 809.
  • the distal end side main body portion 813 has a smaller diameter than the flange portion 812.
  • the distal end of the distal end side main body portion 813 is a contact portion 813 a that contacts the electrode bump 807 a of the inspection object 807.
  • the range of a predetermined length from the proximal end of the distal end side main body portion 813 and the flange portion 812 have a semi-cylindrical shape, and the planar portion is flush with the planar portion of the distal end portion 811.
  • a range of the predetermined length of the distal end side main body portion 813, a planar portion of the flange portion 812, and the end portion 811 is a sliding surface 814 that can come into contact with the second plunger 805. It should be noted that the flat surface portion of the distal end side main body portion 813 is formed in a range that does not come out of an insulating support 809 described later even when the spring 806 is opened.
  • the second plunger 805 which is a conductive metal body such as a copper alloy, has a distal end 821, a flange 822 that forms a locking projection, and a distal-side main body as a distal end. 823.
  • the semi-cylindrical end portion 821 has a smaller diameter than the inner diameter of the coil spring 806 and is positioned inside the coil spring 806.
  • the curved surface portion of the end portion 821 is located along the inner periphery of the coil spring 806.
  • a planar portion of the end portion 821 is located on the axial center side of the coil spring 806 and is in contact with the first plunger 804.
  • the flange portion 822 has a larger diameter than the inner diameter of the coil spring 806.
  • the end face of the flange portion 822 is in contact with the other end of the coil spring 806.
  • the front end side end surface of the flange portion 822 is locked to the insulating support 809.
  • the distal end side main body portion 823 has a smaller diameter than the flange portion 822.
  • the distal end of the distal end side body portion 823 is a contact portion 823a that comes into contact with an electrode pad (not shown) of the inspection substrate 808.
  • the range of the predetermined length from the proximal end of the distal end side main body portion 823 and the flange portion 822 are semi-cylindrical, and the plane portion is flush with the plane portion of the end portion 821.
  • the range of the predetermined length of the distal end side main body portion 823, the planar portion of the flange portion 822, and the end portion 821 is a sliding surface 824 that can contact the first plunger 804. It should be noted that the flat surface portion of the distal end side main body portion 823 is formed in a range that does not come out of the insulating support 809 even when the spring 806 is opened.
  • the socket 830 includes an insulating support 809 (for example, made of resin or ceramic) having a cavity 832 for arranging a plurality of contact probes 900 in parallel at predetermined intervals, and each of these cavities.
  • a contact probe 900 is inserted into 832.
  • the first probe 804, the second plunger 805, and the coil spring 806 are integrally assembled as shown in FIG. 1 to form the contact probe 900, and the insulating support shown in FIG. 809 is inserted into the cavity 832.
  • Opening side sliding support portions 833 and 834 at both ends (upper and lower ends) of the cavity portion 832 support the front end side main body portions 813 and 823 of the first and second plungers 804 and 805 slidably, respectively.
  • the intermediate portion 835 except for the opening side sliding support portions 833 and 834 of the cavity portion 832 has a larger diameter than the opening side sliding support portions 833 and 834, and the inner circumference where the flange portions 812 and 822 and the coil spring 806 can freely move. It is a diameter. Step portions formed on the intermediate portion 835 side of the opening side sliding support portions 833 and 834 of the cavity portion 832 engage with the front end side surfaces of the flange portions 812 and 822, respectively, and the first and second plungers 804 and 805 are engaged. Regulate the escape of Note that the insulating support 809 has a structure that can be divided into a plurality of layers in order to incorporate the contact probe 900 into the cavity 832 (two-divided structure in the figure).
  • the socket 830 When the inspection is performed using the socket 830 assembled as shown in FIG. 2, the socket 830 is positioned and placed on the inspection substrate 808. As a result, the coil spring 806 is contracted by a predetermined length and the second plunger 805 is contracted. The contact portion 823a of the front end side main body portion 823 elastically contacts the electrode pad of the inspection substrate 808. In a state where there is no inspection object 807 such as a semiconductor integrated circuit, the first plunger 804 moves in the protruding direction until the flange portion 812 is regulated by the opening side sliding support portion 833, and the tip side main body portion 813 The amount of protrusion from the insulating support 809 is the maximum.
  • the inspection object 807 When the inspection object 807 is disposed to face the insulating support 809 of the socket 830 at a predetermined interval, the distal end side body portion 813 is retracted and the spring 806 is further compressed. As a result, the distal end side body portion 813 is compressed. Elastically contacts the electrode bump 807a of the inspection object 807. In this state, the inspection object 807 is inspected.
  • the end portion 811 of the first plunger 804 and the end portion 821 of the second plunger 805 are both The sliding surfaces face each other over a predetermined length from the end side and come into contact with each other.
  • the first state (open state) is changed to the second state (compressed state, ie, energized state) in which the coil spring 806 is contracted as shown in FIG. 1B, the end of the first plunger 804 is moved.
  • the flat surface portion (sliding surface) of the portion 811 faces across the range of the predetermined length of the distal end side main body portion 823 and the flat surface portion of the flange portion 822 from the flat surface portion of the end portion 821 of the second plunger 805, and contacts To do. That is, the end of the end portion 811 of the first plunger 804 is located closer to the tip of the second plunger 805 than the coil spring 806.
  • the plane portion (sliding surface) of the end portion 821 of the second plunger 805 is within the range of the predetermined length from the plane portion of the end portion 811 of the first plunger 804 to the main body portion 813 and the plane portion of the flange portion 812. Face to face and touch. That is, the end of the end portion 821 of the second plunger 805 is located closer to the tip of the first plunger 804 than the coil spring 806.
  • the movable stroke A of the first plunger 804, the movable stroke B of the second plunger 805, and the overlap length C of the first and second plungers 804 and 805 of the contact probe 900 of the present embodiment are shown in FIG. This is the same as that of the conventional contact probe shown in FIG.
  • ⁇ X (Total length of the first plunger 61) ⁇ (A + B + C)
  • ⁇ Y (Total length of second plunger 62) ⁇ (A + B + C)
  • X ' ⁇ X and Y' ⁇ Y It becomes.
  • This is different from the conventional contact probe in the specific configuration of the present embodiment in which the range of the predetermined length of the distal end side main body portions 813 and 823 and the flange portions 812 and 822 have a semi-cylindrical shape and have a plane portion. to cause.
  • the total length of the contact probe is larger than that of the conventional one. It can be shortened. Therefore, compared with the conventional contact probe, it is advantageous in terms of low resistance, large current, and high frequency.
  • the first and second plungers 804 and 805 since the flange portions 812 and 822 are formed on the outer periphery over 180 ° or more, the holding of the spring 806 is stable. Further, since the flat portions of the distal end side main body portions 813 and 823 do not come out of the insulating support 809 even when the spring 806 is opened, rattling can be prevented.
  • FIG. 3 is an overall configuration diagram of a contact probe according to a second embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state.
  • the contact probe of the present embodiment is different from that of the first embodiment in that the range of a predetermined length from the distal end side of the distal end side body portion 813 of the first plunger 804 and the flange portion 812 have a cylindrical shape.
  • This is a shape in which a groove 935 is formed in the vertical direction. The bottom surface of the groove 935 is flush with the flat portion of the end portion 811. As shown in FIG.
  • the front end side of the groove 935 protrudes outside the insulating support 809 over a predetermined length.
  • FIG. 3B when the coil spring 806 is compressed, the flat portion (sliding surface) 824 of the end portion 821 of the second plunger 805 is formed on the bottom surface (sliding surface 814) of the groove 935.
  • the coil spring 806 faces and contacts the bottom surface of the portion that is outside the insulating support 809 when the coil spring 806 is opened.
  • the sliding surface 814 of the first plunger 804 extends to the outside of the insulating support 809 when the coil spring 806 is opened. Therefore, the first plunger can be made shorter with the same movable stroke and overlapping length. That is, the total length of the contact probe can be further shortened as compared with the first embodiment.
  • a range of a predetermined length from the distal end side of the distal end side main body portion 813 of the first plunger 804 is a shape in which a groove 935 is formed in the length direction of the columnar shape, the bottom surface (sliding) when the coil spring 806 is opened.
  • the surface 814) protrudes outside the insulating support 809, but the lateral direction of the first plunger 804 with respect to the insulating support 809 when the coil spring 806 is open is compared with the case where the same range is a semi-cylindrical shape. It is preferable because it can suppress rattling.
  • FIG. 4 is an overall configuration diagram of a contact probe according to a third embodiment of the present invention, where (A) is a front view of a spring open state, (B) is a right side view thereof, and (C) is spring compression. A front view of the state, (D) is a right side view thereof.
  • FIG. 5 is a component diagram of the first plunger 804 of the contact probe, where (A) is a front view, (B) is a right side view, and (C) is a bottom view.
  • the contact probe of this embodiment differs from that of the first embodiment in that the end portion 821 of the second plunger 805 has bifurcated portions 821a and 821b that are divided into two from the middle portion to the end. Further, the end portion 811 of the first plunger 804 is located between the bifurcated portions 821a and 821b.
  • the flange portion 812 has a cylindrical shape in which sliding portions with the bifurcated portions 821a and 821b are cut out into groove shapes. Therefore, sliding surfaces 814 a and 814 b extending from the end portion 811 to the flange portion 812 and further to the middle of the distal end side body portion 813 are formed.
  • the end face of the flange portion 812 is in contact with one end of the coil spring 806. According to the present embodiment, the number of contact points of the first and second plungers 804 and 805 can be increased, and a lower resistance can be expected as compared with the first embodiment.
  • FIG. 6 is an overall configuration diagram of a contact probe 100 according to a fourth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state.
  • FIG. 7 is an exploded view of the contact probe 100.
  • FIG. 8 is a front sectional view of the socket 30 in which a plurality of the contact probes 100 are supported in use.
  • the contact probe 100 includes a first plunger 1, a second plunger 2, and a coil spring 3 as a spring.
  • the first plunger 1 is a connection part with the inspection object 5, and the second plunger 2 is a connection part with the inspection substrate 6.
  • a coil spring 3 formed of a general material such as a piano wire or a stainless steel wire has a first and second plunger 1, 2 so that the first and second plungers 1, 2 can slide relative to each other. 2 (the first and second plungers 1 and 2 are connected).
  • the coil spring 3 also urges the first and second plungers 1 and 2 in directions away from each other during use, and causes the inspection object 5 and the inspection substrate 6 to be applied to the first and second plungers 1 and 2. Give contact force.
  • the inspection object 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 5a are arranged at a predetermined interval.
  • the inspection substrate 6 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 5a.
  • the socket 30 includes an insulating support 31 having cavities 32 at a predetermined interval for arranging a plurality of contact probes 100 in parallel, and the contact probes 100 are inserted into the cavities 32. It is arranged.
  • the contact probe 100 is constructed by integrally assembling the first plunger 1, the second plunger 2, and the coil spring 3 as shown in FIG. It is inserted and arranged in the cavity 32 of 31. Opening side sliding support portions 33 and 34 at both ends (upper and lower ends) of the cavity portion 32 support (fitting) the front end side main body portions 13 and 24 of the first and second plungers 1 and 2 slidably, respectively.
  • the intermediate portion 35 excluding the opening side sliding support portions 33 and 34 of the cavity portion 32 has a larger diameter than the opening side sliding support portions 33 and 34, and the inner periphery on which the flange portions 12 and 23 and the coil spring 3 can freely move. It is a diameter.
  • the opening side sliding support portions 33 and 34 of the cavity portion 32 are engaged with the flange portions 12 and 23 to restrict the withdrawal of the first and second plungers 1 and 2.
  • the insulating support 31 has a structure that can be divided into a plurality of layers in order to incorporate the contact probe 100 into the cavity 32 (not shown).
  • the first plunger 1 which is a conductive metal body such as a copper alloy, has an end portion 11 and a flange portion 12 from the inspection substrate 6 side toward the inspection object 5 side. And a bar shape having a front end side main body portion 13 sequentially.
  • the semi-cylindrical end portion 11 has a smaller diameter than the inner diameter of the coil spring 3 and is positioned inside the coil spring 3.
  • a curved surface portion is disposed along the inner periphery of the coil spring 3, and on the coil spring 3 axis side.
  • a plane portion is disposed so as to contact the second plunger 2.
  • the flange portion 12 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3.
  • the distal end side main body portion 13 has a smaller diameter than the flange portion 12, and the distal end is a contact portion 13 a that contacts the electrode bump 5 a of the inspection object 5.
  • the sliding surface of the portion of the first plunger 1 that is located outside the coil spring 3 with respect to the expansion and contraction direction of the coil spring 3 (the flange portion 12 and the distal end side main body portion 13) with the second plunger 2 is partially It becomes the inclined part 15 (here inclined surface).
  • an inclined portion 15 exists between the semi-cylindrical portion on the distal end side of the flange portion 12 and the cylindrical portion on the distal end side of the distal end side main body portion 13.
  • the second plunger 2 which is a conductive metal body such as a copper alloy, has a semi-cylindrical sliding portion 21, a cylindrical portion 22, and a flange portion from the inspection object 5 side toward the inspection substrate 6 side. 23 and a rod-shaped body having a distal end side main body portion 24 sequentially.
  • the sliding portion 21 and the columnar portion 22 are smaller than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar portion 22 is fitted inside the coil spring 3.
  • the semi-cylindrical sliding portion 21 is provided with a curved surface portion along the inner periphery of the coil spring 3, and a flat surface portion on the flat surface portion of the end portion 11 of the first plunger 1 and on the end side of the flange portion 12.
  • the semi-cylindrical portion is disposed toward the plane and the inclined portion 15.
  • the flange portion 23 has a diameter larger than the inner diameter of the coil spring 3 and an end surface thereof abuts on the other end of the coil spring 3.
  • the front end side main body portion 24 has a diameter smaller than that of the flange portion 23, and the front end is a contact portion 24 a that contacts an electrode pad (not shown) of the inspection substrate 6.
  • the product outer diameters of the contact probe 100 and the socket 30 are, for example, as follows. -Diameter of the intermediate part 35 of the cavity part 32 of the insulating support 31: 0.22 mm ⁇ Outer diameter of contact probe 100 (outer diameter of coil spring 3): 0.2 mm -Coil spring 3 wire diameter (wire width): 0.04 mm -Inner diameter of coil spring 3: 0.12 mm -The thickness of the end portion 11 of the first plunger 1: 0.055 mm -Thickness of the sliding portion 21 of the second plunger 2: 0.055 mm -Free length of contact probe 100: 4 mm ⁇ Use length of contact probe 100: 3 mm
  • the socket 30 When the inspection is performed using the socket 30 assembled as shown in FIG. 8, the socket 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is contracted by a predetermined length and the second plunger 2 is contracted.
  • the contact portion 24 a of the distal end side main body portion 24 comes into elastic contact with the electrode pad of the inspection substrate 6.
  • the first plunger 1 moves in the protruding direction until the flange portion 11 is regulated by the opening-side sliding support portion 33.
  • the amount of protrusion is the maximum.
  • the distal end side body portion 13 is retracted and the spring 3 is further compressed. As a result, the distal end side body portion 13 is compressed. Elastically contacts the electrode bump 5a of the inspection object 5. In this state, the inspection object 5 is inspected.
  • the sliding part 21 extends outside the inner peripheral width range of the coil spring 3 with respect to the direction perpendicular to the expansion / contraction direction of the coil spring 3 and from the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3. Is also located near the tip of the first plunger 1.
  • the presence position of the inclined portion 15 is a position away from the portion where the sliding portion 21 abuts in the first state (open state) by a predetermined length L toward the distal end side of the first plunger 1.
  • the sliding portion 21 starts to ride on the inclined portion 15 after the coil spring 3 is contracted by the predetermined length L.
  • the predetermined length L is, for example, a length that is equal to or slightly shorter than the length in which the coil spring 3 contracts when the contact portion 24a of the distal end side body portion 24 of the second plunger 2 abuts against the inspection substrate 6. Say it.
  • FIG. 9 is a schematic explanatory view of bending forces F1 to F3 applied to the second plunger 2 in the second state (compressed state shown in FIG. 6B).
  • the second plunger 2 is moved to the sliding portion 21.
  • the first plunger 1 is brought into contact with the inclined portion 15 of the first plunger 1 at the first contact 101, and a bending force F ⁇ b> 1 is applied from the inclined portion 15 of the first plunger 1 at the first contact 101.
  • the intermediate portion outer surface in the longitudinal direction of the sliding portion 21 abuts with the inner periphery of the end portion in the expansion / contraction direction of the coil spring 3 at the second contact 102.
  • a bending force F2 is applied. Further, when the bending force F2 is applied to the second plunger 2, the tip end side of the sliding portion 21 comes into contact with the end side plane of the end portion 11 of the first plunger 1 at the third contact 103, and the third contact point In 103, a bending force F3 is applied from the end 11 of the first plunger 1.
  • FIG. 10 is a cross-sectional view taken along the line VV ′ of FIG.
  • the cross-sectional areas of the end portion 11 of the first plunger 1 and the sliding portion 21 of the second plunger 2 are equal.
  • the cross-sectional area of the sliding portion 21 is made small so that the sliding portion 21 has an appropriate spring force (elastic force).
  • it is desirable that the cross-sectional area is large.
  • an excessive spring force is generated in the sliding portion 21 and smooth sliding cannot be performed.
  • FIG. 11 is a schematic diagram showing a contact and an electric path formed by elastic deformation of the second plunger 2 in the second state (compressed state shown in FIG. 6B).
  • a part of the current E ⁇ b> 1 passing through the first plunger 1 branches to the second plunger 2 at the first contact 101.
  • the current branched and flowing to the first plunger 1 and the second plunger 2 becomes a current E2 that flows through the second plunger 2 by joining at the third contact 103.
  • the contact between the first plunger 1 and the coil spring 3 third contact 103
  • the contact between the second plunger 2 and the coil spring 3 fourth contact 104. Connects the first and second plungers 1 and 2 using the coil spring 3 as a current path.
  • FIG. 13 is a resistance characteristic diagram of the contact probe 100 of the present embodiment, and shows the measurement results (when compressed and returned) of the samples of the five contact probes.
  • the contact probe 100 is sandwiched between electrodes connected to a constant voltage power source, and the passing resistance of the contact probe 100 is measured by changing the use length of the contact probe 100 (as shown in FIG. 15). Obtained from the flowing current).
  • FIG. 14 is a resistance characteristic diagram of the conventional contact probe shown in FIG. 26, and shows the measurement results of the five contact probe samples (during compression and return). The measurement method is the same as in FIG.
  • the resistance value variation among the samples is small and the resistance value is low. It can also be seen that the variation of the resistance value when the contact probe usage length is changed is small. On the other hand, in the measurement result shown in FIG. 14 (conventional example), the variation among the samples is large and the resistance value is high. Further, it can be seen that the resistance value fluctuates greatly when the contact probe usage length is changed.
  • the sliding surface of the first plunger 1 with the second plunger 2 is partially inclined 15, and the coil spring 3 is contracted from the first state in which the coil spring 3 is extended. Since the second plunger 2 rides on the inclined portion 15 during the transition to the second state, the first plunger 1 and the second plunger 2 can be reliably contacted. As a result, as is apparent from the measurement results shown in FIGS. 13 and 14, the inspection object 5 and the inspection substrate 6 can be electrically stabilized and connected with a low resistance as compared with the conventional example. .
  • the sliding portion 21 can be elastically deformed beyond the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15. Further, the configuration in which the end of the sliding portion 21 extends outside the inner peripheral width range of the coil spring 3 when riding on the inclined portion 15 allows a limited space to be used effectively, and the contact probe 100 can be made compact. This is advantageous for downsizing.
  • the end of the sliding portion 21 is positioned closer to the tip of the first plunger 1 than the coil spring 3 in the expansion / contraction direction of the coil spring 3 when riding on the inclined portion 15, the same as in the first embodiment.
  • the total length of the contact probe can be shortened. Therefore, compared with the conventional contact probe, it is advantageous in terms of low resistance, large current, and high frequency.
  • FIG. 16 is an overall configuration diagram of a contact probe 200 according to a fifth embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state. 17 is a cross-sectional view taken along the line XII-XII ′ of FIG.
  • the contact probe 200 according to the present embodiment has an inclined portion 225 on the second plunger 202 (part to be connected to the inspection object), and the second plunger 202.
  • the end portion 221 of the first plunger 201 is inclined in the direction in which the first plunger 201 exists over a predetermined length from the end, and the sliding portion 211 of the first plunger 201 is more than the end portion 221 of the second plunger 202. It is mainly different from the small diameter.
  • the second plunger 202 has a distal end portion 221, a flange portion 222, and a distal end side main body portion 223.
  • the end portion 221 having a substantially semi-cylindrical shape is smaller in diameter than the inner diameter of the coil spring 3, is positioned inside the coil spring 3, and is inclined from the end in a direction in which the first plunger 201 exists over a predetermined length.
  • the flange portion 222 has a larger diameter than the inner diameter of the coil spring 3, and an end surface thereof is in contact with one end of the coil spring 3.
  • the front end side main body portion 223 has a smaller diameter than the flange portion 222, and the front end is a contact portion 223a that comes into contact with the electrode pad of the inspection substrate.
  • the sliding surface of the portion of the second plunger 202 located outside the coil spring 3 with respect to the expansion / contraction direction of the coil spring 3 (the flange portion 222 and the distal end side body portion 223) with the first plunger 201 is partially It is an inclined portion 225 (here, an inclined surface).
  • an inclined portion 225 here, an inclined surface.
  • the first plunger 201 includes a substantially semi-cylindrical sliding portion 211, a cylindrical portion 212, a flange portion 213, and a front end side main body portion 214.
  • the sliding part 211 and the columnar part 212 are smaller in diameter than the inner diameter of the coil spring 3 and are located inside the coil spring 3, and the columnar part 212 is fitted inside the coil spring 3.
  • the flange portion 213 has a diameter larger than the inner diameter of the coil spring 3, and an end surface thereof is in contact with the other end of the coil spring 3.
  • the distal end side main body portion 214 has a smaller diameter than the flange portion 213, and the distal end is a contact portion 214a that comes into contact with the electrode bump of the inspection object.
  • this embodiment also has a structure in which the sliding portion 211 of the first plunger 201 rides on the inclined portion 225 of the second plunger 202.
  • the two plungers 202 can be reliably brought into contact with each other, and the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance as compared with the conventional example. In other respects, the same effects as those of the fourth embodiment can be obtained. Further, in the present embodiment, since the end of the end portion 221 of the second plunger 202 is inclined in the direction in which the first plunger 201 exists over a predetermined length, when the second plunger 202 is processed.
  • the end portion 221 is slightly warped in the direction in which the first plunger 201 does not exist, the end of the end portion 221 can be reliably brought into contact with the sliding portion 211 of the first plunger 201.
  • the sliding portion 211 has a small diameter so that excessive spring force is not generated.
  • FIG. 18 is an overall configuration diagram of a contact probe 300 according to a sixth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state.
  • the contact probe 300 of the present embodiment has a smaller (shorter) range of the inclined portion 15 and a sliding portion of the second plunger 2. 21 is mainly different in that the diameter is smaller than the end portion 11 of the first plunger 1.
  • the sliding portion 21 has a small diameter so that an excessive spring force is not generated.
  • FIG. 19 is an overall configuration diagram of a contact probe 400 according to a seventh embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state.
  • the contact probe 400 of the present embodiment has an inclined surface 15 from a straight inclined surface to an R surface (an inclined surface in which the inclination is continuously steep from flat as viewed from the end side). The main difference is that This embodiment can achieve the same effects as those of the fourth embodiment.
  • FIG. 20 is an overall configuration diagram of a contact probe 500 according to an eighth embodiment of the present invention, where (A) shows a spring open state and (B) shows a spring compression state.
  • the contact probe 500 of the present embodiment is mainly different from the fourth embodiment in that the inclined portion 15 is formed by the convex portion 515.
  • the shape of the convex portion 515 is not particularly limited as long as the sliding portion 21 can ride on, but is a triangular pyramid shape, a quadrangular pyramid shape, a wedge shape, or the like as shown in FIG. This embodiment can achieve the same effects as those of the fourth embodiment.
  • FIG. 22 is an overall configuration diagram of a contact probe 600 according to a ninth embodiment of the present invention, where (A) is a front view of the spring open state, (B) is a right side view of the same state, and (C). Is a front view of the spring compressed state, and (D) is a right side view of the same state.
  • FIG. 23 is a component diagram of the first plunger 1 of the contact probe 600, where (A) is a front view, (B) is a right side view, and (C) is a bottom view.
  • the contact probe 600 according to the present embodiment is divided into two forks from the intermediate portion in the length direction of the second plunger 2 to the end side (sliding portion 21).
  • the point which becomes 21a, 21b, the point which the terminal part 11 of the 1st plunger 1 is located between the bifurcated part 21a, 21b, and the inclination part 15a, 15b exist corresponding to the bifurcated part 21a, 21b. It is mainly different from the point.
  • the flange portion 12 has a cylindrical shape in which a sliding portion with the second plunger 2 is cut out in a groove shape, and the end side end surface of the flange portion 12 is in contact with one end of the coil spring 3. Since this embodiment also has a structure in which the bifurcated portions 21a and 21b ride on the inclined portions 15a and 15b, the first plunger 1 and the second plunger 2 can be reliably contacted, compared with the conventional example.
  • the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance. In other respects, the same effects as those of the fourth embodiment can be obtained. Furthermore, since the number of contacts of the first and second plungers 1 and 2 is increased, it is possible to further reduce the resistance.
  • FIG. 24 is an overall configuration diagram of a contact probe 700 according to a tenth embodiment of the present invention, in which (A) shows a spring open state and (B) shows a spring compression state.
  • the contact probe 700 according to the present embodiment has inclined portions in both the first plunger 1 and the second plunger 2, and both inclined portions are coil springs 3. It is mainly different in that it exists within the length range.
  • the sliding portion 21 is an inclined portion 25 (here, an inclined surface) over a predetermined length from the tip side.
  • the first plunger 1 also has a sliding portion 71 having the same configuration as the sliding portion 21 of the second plunger 2.
  • the sliding portion 71 is an inclined portion 75 (here, an inclined surface) over a predetermined length from the tip side.
  • the coil spring 3 is sandwiched between the end surfaces of the flange portions 73 and 23 of the first and second plungers 1 and 2.
  • the sliding deformable portions 21 and 71 are limited to the inner peripheral width range of the coil spring 3 when the sliding portions 21 and 71 run on the inclined portions 75 and 25, the viewpoint of downsizing (smaller diameter) of the contact probe. Then, the fourth embodiment is more excellent. In other respects, the same effects as those of the fourth embodiment are obtained.
  • the end portions 811 and 821 of the first and second plungers 804 and 805 have a semi-cylindrical shape
  • the end portions 811 and 821 have flat surfaces facing each other. If it is, it will not be limited to a semi-cylindrical shape. That is, the end portions 811 and 821 only need to have a flat surface as a sliding surface on the side surface. The same applies to the range of a predetermined length from the base ends of the distal end side main body portions 813 and 823 and the shape of the flange portion 812 in the first embodiment.
  • the range of a predetermined length from the proximal end of the distal end side main body portion 813 of the first plunger 804 and the case where the flange portion 812 has a shape in which the groove 935 is formed in the length direction of the columnar shape may have the same shape as the first embodiment (for example, a semi-cylindrical shape).
  • the coil spring 806 when the coil spring 806 is opened, the backlash in the lateral direction of the first plunger 804 with respect to the insulating support 809 is larger than in the second embodiment, but in terms of shortening the total length of the contact probe. The same effects as those of the second embodiment can be obtained.
  • the ends of the end portions 811 and 821 of the first and second plungers 804 and 805 are both outside the coil spring 806 with respect to the expansion and contraction direction of the coil spring 806.
  • one of the ends of the end portions 811 and 821 may be located outside the coil spring 806 and the other may be located inside the coil spring 806.
  • the total length of the contact probe can be shortened as compared with the conventional case.
  • the first plunger is used for connection with the inspection object
  • the second plunger is used for connection with the inspection substrate.
  • the first plunger is used for connection with the inspection substrate.
  • Two plungers may be used for connection with the inspection object.
  • the inclined portion is located outside the length range of the coil spring
  • the inclined portion may exist within the length range of the coil spring.
  • the first and second plungers can be reliably brought into contact with each other so that the inspection object and the inspection substrate can be electrically stabilized and connected with low resistance.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention concerne une sonde de contact qui possède une longueur totale inférieure à celle des produits classiques, bien que les courses mobiles d’un premier piston et d’un second piston de la sonde de contact et la longueur de chevauchement entre le premier piston et le second piston soient identiques à celles des produits classiques. L’invention concerne également un support équipé de la sonde de contact. Lorsqu’un ressort hélicoïdal (806) est dans un état comprimé dans lequel il est contracté, une partie surface plate d’une section terminale (811) d’un premier piston (804) fait face à un second piston (805) et entre en contact avec celui-ci sur une surface de celui-ci qui s’étend depuis une partie surface plate d’une section terminale (821) du second piston (805), sur une plage d’une longueur prédéfinie à partir de l’extrémité de base d’une section corps du côté pointe (823), vers une partie surface plate d’une section bride (822), et une partie surface plate de la section terminale (821) du second piston (805) fait face au premier piston (804) et entre en contact avec celui-ci sur une surface de celui-ci qui s’étend depuis une partie surface plate de la section terminale (811) du premier piston (804), sur une plage d’une longueur prédéfinie à partir de l’extrémité de base d’une section corps du côté pointe (813), vers une partie surface plate d’une section bride (812).
PCT/JP2010/062752 2009-07-30 2010-07-29 Sonde de contact et support WO2011013731A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009-178406 2009-07-30
JP2009178406A JP5624740B2 (ja) 2009-07-30 2009-07-30 コンタクトプローブ及びソケット
JP2010-095537 2010-04-16
JP2010095537A JP5645451B2 (ja) 2010-04-16 2010-04-16 コンタクトプローブ及びソケット

Publications (1)

Publication Number Publication Date
WO2011013731A1 true WO2011013731A1 (fr) 2011-02-03

Family

ID=43529384

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/062752 WO2011013731A1 (fr) 2009-07-30 2010-07-29 Sonde de contact et support

Country Status (1)

Country Link
WO (1) WO2011013731A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051675A1 (fr) 2011-10-07 2013-04-11 日本発條株式会社 Unité de sondes
WO2015133016A1 (fr) * 2014-03-06 2015-09-11 オムロン株式会社 Broche de sonde et dispositif électronique l'utilisant
US10082525B2 (en) 2014-09-19 2018-09-25 Nhk Spring Co., Ltd. Probe unit
WO2020022236A1 (fr) * 2018-07-26 2020-01-30 株式会社エンプラス Broche et support de sonde
DE202019101232U1 (de) * 2019-03-05 2020-06-08 PTR HARTMANN GmbH Federkontaktstift
EP4089721A4 (fr) * 2020-01-10 2024-02-14 Nidec Read Corporation Contacteur, gabarit d'inspection, dispositif d'inspection et procédé de fabrication dudit contacteur

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157576A (ja) * 1985-12-20 1987-07-13 オ−ガツト・インコ−ポレ−テツド テストプロ−ブ
JP2005069805A (ja) * 2003-08-22 2005-03-17 Jst Mfg Co Ltd コンタクトプローブおよびそれを用いたコンタクトアセンブリ
JP2006310025A (ja) * 2005-04-27 2006-11-09 Chichibu Fuji Co Ltd Ｉｃソケット用接触装置
JP2008032743A (ja) * 2007-10-01 2008-02-14 Nhk Spring Co Ltd 導電性接触子
JP2008516398A (ja) * 2004-10-06 2008-05-15 プラストロニックス・ソケット・パートナーズ， エルピー 電子デバイスのためのコンタクト
WO2008136396A1 (fr) * 2007-04-27 2008-11-13 Nhk Spring Co., Ltd. Contacteur conducteur

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157576A (ja) * 1985-12-20 1987-07-13 オ−ガツト・インコ−ポレ−テツド テストプロ−ブ
JP2005069805A (ja) * 2003-08-22 2005-03-17 Jst Mfg Co Ltd コンタクトプローブおよびそれを用いたコンタクトアセンブリ
JP2008516398A (ja) * 2004-10-06 2008-05-15 プラストロニックス・ソケット・パートナーズ， エルピー 電子デバイスのためのコンタクト
JP2006310025A (ja) * 2005-04-27 2006-11-09 Chichibu Fuji Co Ltd Ｉｃソケット用接触装置
WO2008136396A1 (fr) * 2007-04-27 2008-11-13 Nhk Spring Co., Ltd. Contacteur conducteur
JP2008032743A (ja) * 2007-10-01 2008-02-14 Nhk Spring Co Ltd 導電性接触子

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051675A1 (fr) 2011-10-07 2013-04-11 日本発條株式会社 Unité de sondes
KR20140065467A (ko) 2011-10-07 2014-05-29 닛폰 하츠죠 가부시키가이샤 프로브 유닛
US9291645B2 (en) 2011-10-07 2016-03-22 Nhk Spring Co., Ltd. Probe unit
WO2015133016A1 (fr) * 2014-03-06 2015-09-11 オムロン株式会社 Broche de sonde et dispositif électronique l'utilisant
JP2015169527A (ja) * 2014-03-06 2015-09-28 オムロン株式会社 プローブピン、および、これを用いた電子デバイス
CN106062567A (zh) * 2014-03-06 2016-10-26 欧姆龙株式会社 探针和使用探针的电子器件
US10082525B2 (en) 2014-09-19 2018-09-25 Nhk Spring Co., Ltd. Probe unit
WO2020022236A1 (fr) * 2018-07-26 2020-01-30 株式会社エンプラス Broche et support de sonde
JP2020017428A (ja) * 2018-07-26 2020-01-30 株式会社エンプラス プローブピンおよびソケット
DE202019101232U1 (de) * 2019-03-05 2020-06-08 PTR HARTMANN GmbH Federkontaktstift
EP4089721A4 (fr) * 2020-01-10 2024-02-14 Nidec Read Corporation Contacteur, gabarit d'inspection, dispositif d'inspection et procédé de fabrication dudit contacteur

Similar Documents

Publication Publication Date Title
JP5624740B2 (ja) コンタクトプローブ及びソケット
TWI482974B (zh) 接觸式探針及探針座
WO2011013731A1 (fr) Sonde de contact et support
KR101409821B1 (ko) 컴플라이언트 컨택 어셈블리 및 컴플라이언트 컨택 부재에 의해 테스트 사이트를 스크러빙하는 방법
KR101145283B1 (ko) 스프링 접촉 어셈블리
JP4614434B2 (ja) プローブ
JP4224389B2 (ja) スプリングコネクタ
TWI598594B (zh) 插銷式探針
WO2019069576A1 (fr) Sonde
JP5782261B2 (ja) ソケット
JP5624746B2 (ja) コンタクトプローブ及びソケット
KR102498454B1 (ko) 컨택트 프로브 및 검사 지그
JP7095753B2 (ja) プローブ
JP6013731B2 (ja) コンタクトプローブおよびその製造方法
JP5156973B1 (ja) 異方導電性部材
JP5008582B2 (ja) コンタクトプローブ
WO2015040999A1 (fr) Connecteur à ressort
JP2017015581A (ja) コンタクト
JP5645451B2 (ja) コンタクトプローブ及びソケット
TWI574014B (zh) 探針結構與探針卡
WO2023032625A1 (fr) Sonde et douille d'inspection
JP2010014544A (ja) 外ばね方式のプローブピンの製造方法
JP2009294149A (ja) 異方性導電性部材および当該部材に用いられるプローブピン
JP3088866U (ja) 検査用プローブ
JP6837513B2 (ja) ソケット

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10804477

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10804477

Country of ref document: EP

Kind code of ref document: A1