CN103245807B - Probe unit structure and preparation method thereof - Google Patents
Probe unit structure and preparation method thereof Download PDFInfo
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- CN103245807B CN103245807B CN201210030997.6A CN201210030997A CN103245807B CN 103245807 B CN103245807 B CN 103245807B CN 201210030997 A CN201210030997 A CN 201210030997A CN 103245807 B CN103245807 B CN 103245807B
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Abstract
The present invention discloses a kind of probe unit structure and preparation method thereof, and it comprises the first positioning baseplate, the second positioning baseplate, contact probe and distance piece, and the first positioning baseplate is provided with first and threads a needle hole; Second positioning baseplate is provided with second and threads a needle hole, the first positioning baseplate and the second positioning baseplate mutually stacked when assembling, and make to be formed with spacing between the first positioning baseplate and the second positioning baseplate by rising instrument; Contact probe is connected to the first hole and second of threading a needle and threads a needle hole; Distance piece is formed with the room of accommodating contact probe by spacing; The relative second sliding position of positioning baseplate of first positioning baseplate, makes the first hole of threading a needle, hole and second of threading a needle produce off normal, to be pulled location respectively to make contact probe two ends by the first positioning baseplate and the second positioning baseplate folder.By this, the thin footpathization of contact probe is made still to facilitate the making of probe unit.
Description
Technical field
The present invention relates to a kind of probe structure for detecting, particularly relating to a kind of probe unit structure and preparation method thereof.
Background technology
When the SIC (semiconductor integrated circuit) such as manufacture IC chip, namely can carry out the inspection of electric characteristics to detect defective products; Specifically, when carrying out the detection of SIC (semiconductor integrated circuit) or liquid crystal panel etc., can learn in the Wiring pattern of the SIC (semiconductor integrated circuit) of check object whether have electrical short or broken string; Meanwhile, in order to seek check object and outgoing inspection signal signal processing apparatus between electric connection, the probe unit of accommodating multiple conductive electrical contact probe can be adopted, to be electrically connected with check object and signal processing apparatus respectively.
Traditional probe unit, as shown in Figure 1 to Figure 2, it mainly to comprise on corresponding one positioning baseplate 10 and once positioning baseplate 20, make be separated with a fixed component 30 of a distance between positioning baseplate 10 and lower positioning baseplate 20 and wear a contact probe 40 of positioning baseplate 10 and lower positioning baseplate 20, wherein go up positioning baseplate 10 and be provided with hole slot 101 on, lower positioning baseplate 20 is provided with the hole slot 201 of corresponding upper hole slot 101, this contact probe 40 is first plugged in hole slot 101 and is positioned at positioning baseplate 10, refill and set positioning baseplate 20, the corresponding hole slot 201 up and down of contact probe 40 is made to plug location.By this, to reach the position of Restricted Contact probe 40.
But in recent years, SIC (semiconductor integrated circuit) was in progress in highly integrated, miniaturization existing showing, with regard to probe unit, in order to be coordinated the progress of this technology, also by thin for the diameter of each contact probe footpath, each contact probe can be made each other apart from stricturization simultaneously; But, under the diameter of above-mentioned contact probe 40 is less, upper hole slot 101 and lower hole slot 201 also can be more and more less, the contraposition between hole slot 101 and lower hole slot 201 is made to produce a little error, and then after causing contact probe 40 to be positioned positioning baseplate 10, but cannot wear and be positioned lower positioning baseplate 20, now assemble by force and namely can damage contact probe 40; Therefore, during the reduced of contact probe 40, existing probe unit has difficulty and cannot breaking through greatly in making with combination.
Prior art
10 ... upper positioning baseplate
101 ... large hole slot
102 ... little hole slot
20 ... lower positioning baseplate
30 ... fixed component
40 ... contact probe
The present invention
1 ... first positioning baseplate
11 ... insulcrete in first
111 ... lockhole
12 ... first external insulation plate
121 ... bury hole underground
13 ... first threads a needle hole
2 ... second positioning baseplate
21 ... insulcrete in second
211 ... lockhole
22 ... second external insulation plate
221 ... bury hole underground
23 ... second threads a needle hole
3 ... contact probe
31 ... test section
32 ... teat
4 ... distance piece
41 ... room
42 ... half space bar
421 ... U-shaped tank
5 ... bolting element
51 ... head
6 ... lock member
61 ... head
100 ... first puts instrument
200 ... rising instrument
300 ... second puts instrument
400 ... signal processing apparatus
S ... spacing
Summary of the invention
An object of the present invention, is to provide a kind of probe unit structure and preparation method thereof, and still simple and easyly it, under utilizing the thin footpath of the diameter of contact probe, be made into probe unit.
To achieve the above object, the invention provides a kind of probe unit structure, comprising:
A kind of probe unit structure, comprising:
One first positioning baseplate, is provided with multiple first and threads a needle hole;
One second positioning baseplate, to should the first positioning baseplate configuration, this second positioning baseplate be provided with the corresponding the plurality of first multiple second of hole of threading a needle and threads a needle hole;
Multiple contact probe, the two ends of each this contact probe are connected to respectively that this first to be threaded a needle hole and respectively this second to be threaded a needle hole respectively; And
One distance piece, be connected between this first positioning baseplate and this second positioning baseplate, this distance piece is provided with a room of accommodating the plurality of contact probe;
Wherein, this the first positioning baseplate relatively sliding displacement of this second positioning baseplate moves, thus make the plurality of first hole of threading a needle, hole and the plurality of second of threading a needle produce off normal relation, to be pulled location by this first positioning baseplate and this second positioning baseplate folder respectively to make the two ends of each this contact probe.
To achieve the above object, the present invention also provides a kind of method for making of probe unit, and its step comprises:
A) this second positioning baseplate is configured in above this first positioning baseplate, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make each this contact probe penetrate respectively;
B) provide a rising instrument, this second positioning baseplate risen by this rising instrument, makes to be formed with a spacing between this first positioning baseplate and this second positioning baseplate;
C) this distance piece inserted this spacing and be folded between this first positioning baseplate and this second positioning baseplate, make to be formed with this room between this first positioning baseplate and this second positioning baseplate, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make the two ends of each this contact probe be connected to respectively respectively;
D) provide multiple bolting element, this second positioning baseplate by each this bolting element with locking at this distance piece;
E) provide multiple lock member, this first positioning baseplate by each this lock member with locking at this distance piece; And
F) by the plurality of lock member temporary release, from this first positioning baseplate, the sliding displacement of this second positioning baseplate is dynamic relatively, thus make the plurality of first hole of threading a needle, hole and the plurality of second of threading a needle produce off normal relation, to be pulled location by this first positioning baseplate and this second positioning baseplate folder respectively to make the two ends of each this contact probe.
The present invention also has following effect:
The present invention is easier to bend under utilizing the contact probe in the thin footpath of diameter stressed, the sliding displacement of relative second positioning baseplate of first positioning baseplate is moved, thus make the first hole of threading a needle, hole and second of threading a needle produce off normal relation, distortion is produced by the first positioning baseplate and the compacting of the second positioning baseplate respectively to make the two ends of each contact probe, thus make each contact probe be fixed between the first positioning baseplate and the second positioning baseplate by clip, and then under the thin footpath of the diameter reaching contact probe, be made into probe unit and still there is effect simple and easy and with low cost.
In addition, the two ends of each contact probe are produced distortion by the first positioning baseplate and the compacting of the second positioning baseplate respectively, contact probe loose contact or come off with aligned contact probe and when avoiding detecting, and then improve the stability in use of probe unit structure of the present invention.
Again, first positioning baseplate and the second positioning baseplate are mutually stacked when making, and make to be formed with spacing between the first positioning baseplate and the second positioning baseplate by rising instrument, distance piece is inserted spacing again and is folded between the first positioning baseplate and the second positioning baseplate, to be formed with the room of accommodating each contact probe; Compare existing, it is simple and assemble easy feature that probe unit structure of the present invention has more step in making with combination.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Accompanying drawing explanation
The combination schematic diagram of this existing probe unit of Fig. 1;
The partial enlarged drawing of this existing probe unit of Fig. 2;
The exploded perspective view of Fig. 3 probe unit structure of the present invention;
The schematic perspective view of Fig. 4 contact probe of the present invention;
The combination schematic diagram of Fig. 5 probe unit structure of the present invention;
The cross-sectional schematic of Fig. 6 probe unit structure of the present invention;
The flow chart of steps of Fig. 7 probe unit method for making of the present invention;
Fig. 8 A the present invention first positioning baseplate, the second positioning baseplate and contact probe are for placing the schematic diagram that first puts instrument;
Fig. 8 B the present invention raises instrument for wearing the side view cutaway drawing that first puts instrument and the first positioning baseplate;
Fig. 8 C the present invention raises the side view cutaway drawing that the second positioning baseplate risen by instrument;
Fig. 8 D the present invention half space bar for sandwiched enter the schematic diagram of the first positioning baseplate and the second positioning baseplate;
Fig. 8 E the present invention second puts instrument for being fixed on the schematic diagram of the second positioning baseplate and distance piece;
Fig. 8 F the present invention second puts the side view cutaway drawing that instrument has been fixed on the second positioning baseplate and distance piece;
Fig. 8 G the present invention first positioning baseplate overturns the side view cutaway drawing be arranged on above the second positioning baseplate;
Fig. 8 H the present invention puts for dismounting first side view cutaway drawing that instrument put by instrument and second;
Fig. 8 I the present invention first positioning baseplate is for the side view cutaway drawing of the sliding position of relative second positioning baseplate;
Fig. 8 J the present invention first thread a needle hole and second thread a needle hole for off normal configuration side view cutaway drawing;
Fig. 8 K the present invention first thread a needle hole and second thread a needle hole off normal configuration side view cutaway drawing;
Fig. 8 L the present invention first positioning baseplate has been fixed on the side view cutaway drawing of distance piece and the second positioning baseplate;
The using state schematic diagram of Fig. 9 probe unit structure of the present invention.
Wherein, Reference numeral
Embodiment
Detailed description for the present invention and technology contents, be described as follows cooperation accompanying drawing, but appended accompanying drawing is only as illustrative purposes, not for limiting to the present invention.
Please refer to shown in Fig. 3 to Fig. 6, the invention provides a kind of probe unit structure and preparation method thereof, this probe unit structure mainly comprises one first positioning baseplate 1,1 second positioning baseplate 2, multiple contact probe 3 and a distance piece 4.
First positioning baseplate 1 comprises one first external insulation plate 12 of insulcrete 11 and gluing insulcrete 11 in first in one first, and in first, insulcrete 11 and the first external insulation plate 12 are jointly provided with multiple first and thread a needle hole 13; Again, in first, insulcrete 11 is provided with multiple lockhole 111, first external insulation plate 12 and is provided with the multiple of corresponding the plurality of lockhole 111 and buries hole 121 underground.
Corresponding first positioning baseplate 1 of second positioning baseplate 2 configures, second positioning baseplate 2 comprises one second external insulation plate 22 of insulcrete 21 and gluing insulcrete 21 in second in one second, and in second, insulcrete 21 and the second external insulation plate 22 are jointly provided with the corresponding the plurality of first many second of hole 13 of threading a needle and thread a needle hole 23; Again, in second, insulcrete 21 is provided with multiple lockhole 211, second external insulation plate 22 and is provided with the multiple of corresponding the plurality of lockhole 211 and buries hole 221 underground.
The two ends of each contact probe 3 are connected to each first hole 13 and each second of threading a needle respectively and thread a needle hole 23, each contact probe 3 one end has a test section 31, the other end has a teat 32, test section 31 is exposed to the first positioning baseplate 1 via each first hole 13 of threading a needle, and teat 32 threads a needle hole 23 clip in the second positioning baseplate 2 via each second.
Distance piece 4 is connected between the first positioning baseplate 1 and the second positioning baseplate 2, is described in detail as follows, and in first, insulcrete 11 is interposed between distance piece 4 and the first external insulation plate 12, and in second, insulcrete 21 is interposed between distance piece 4 and the second external insulation plate 22; Distance piece 4 comprises 2 half space bars 42 of Symmetric Composite, 2 half space bars 42 are folded between the first positioning baseplate 1 and the second positioning baseplate 2, every half space bar 42 is provided with the room 41 that U-shaped tank 421, a two U-shaped tank 421 is formed with accommodating the plurality of contact probe 3.
Wherein, the sliding displacement of relative second positioning baseplate 2 of first positioning baseplate 1 is moved, thus make the plurality of first hole 23 of threading a needle, hole 13 and the plurality of second of threading a needle produce off normal relation, pressed from both sides by the first positioning baseplate 1 and the second positioning baseplate 2 location of pulling respectively to make the two ends of each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are suppressed by the first positioning baseplate 1 and the second positioning baseplate 2 respectively and are produced distortion, thus each contact probe 3 is fixed between the first positioning baseplate 1 and the second positioning baseplate 2 by clip.
The present invention also comprises multiple bolting element 5, each bolting element 5 has a head 51, the outside peripheral dimension of each head 51 is less than the aperture size that each buries hole 221 underground, the corresponding distance piece 4 of insulcrete 21 in second locks via each lockhole 211 by each bolting element 5, and each head 51 is embedded in respectively buries hole 221 underground.
The present invention also comprises multiple lock member 6, each lock member 6 has a head 61, the outside peripheral dimension of each head 61 is less than the aperture size that each buries hole 121 underground, the corresponding distance piece 4 of insulcrete 11 in first locks via each lockhole 111 by each lock member 6, and each head 61 is embedded in respectively buries hole 121 underground.
The combination of probe unit structure of the present invention, it utilizes the first positioning baseplate 1 to be provided with each first to thread a needle hole 13; Corresponding first positioning baseplate 1 of second positioning baseplate 2 configures, and the second positioning baseplate 2 is provided with the corresponding each first each second of hole 13 of threading a needle and threads a needle hole 23; The two ends of each contact probe 3 are connected to each first hole 13 and each second of threading a needle respectively and thread a needle hole 23; Distance piece 4 is folded between the first positioning baseplate 1 and the second positioning baseplate 2; Wherein, the sliding displacement of relative second positioning baseplate 2 of first positioning baseplate 1 is moved, thus make the plurality of first hole 23 of threading a needle, hole 13 and the plurality of second of threading a needle produce off normal relation, pressed from both sides by the first positioning baseplate 1 and the second positioning baseplate 2 location of pulling respectively to make the two ends of each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are suppressed by the first positioning baseplate 1 and the second positioning baseplate 2 respectively and are produced distortion, thus each contact probe 3 is fixed between the first positioning baseplate 1 and the second positioning baseplate 2 by clip.
By this, because probe unit is that conjunction with semiconductors integrated circuit is in progress that is highly integrated, miniaturization, also can by thin for the diameter of each contact probe footpath, but during the reduced of contact probe, probe unit be caused to have difficult greatly in making with combination and cannot break through, compare down, the present invention is easier to bend under utilizing the contact probe 3 in the thin footpath of diameter stressed, the sliding displacement of relative second positioning baseplate 2 of first positioning baseplate 1 is moved, thus the plurality of first hole 23 of threading a needle, hole 13 and the plurality of second of threading a needle is configured with off normal, suppressed by the first positioning baseplate 1 and the second positioning baseplate 2 respectively to make the two ends of each contact probe 3 and produce distortion, thus make each contact probe 3 be fixed between the first positioning baseplate 1 and the second positioning baseplate 2 by clip, and then under the thin footpath of the diameter reaching contact probe 3, be made into probe unit and still there is effect simple and easy and with low cost.
Please refer to shown in Fig. 7 and Fig. 8 A to Fig. 8 L, the method for making step of above-mentioned probe unit structure.
As shown in the step a of Fig. 7 and Fig. 8 A, first, one first is provided to put instrument 100, one first positioning baseplate 1, one second positioning baseplate 2 and multiple contact probe 3, first puts instrument 100 sequentially locates the first positioning baseplate 1, second positioning baseplate 2 and multiple contact probe 3, first positioning baseplate 1 is provided with multiple first and threads a needle hole 13, second positioning baseplate 2 is provided with the corresponding the plurality of first multiple second of hole 13 of threading a needle and threads a needle hole 23, second positioning baseplate 2 is configured in the top of the first positioning baseplate 1, each contact probe 3 penetrates each first hole 13 and each second of threading a needle and to thread a needle hole 23, wherein, each contact probe 3 one end has a test section 31, and the other end has a teat 32, and test section 31 is exposed to the first positioning baseplate 1 via each first hole 13 of threading a needle, and teat 32 threads a needle hole 23 clip in the second positioning baseplate 2 via each second, be described in detail as follows, first puts instrument 100 makes the second positioning baseplate 2 location be arranged on above the first positioning baseplate 1, moreover, each contact probe 3 penetrate each first thread a needle hole 13 and each second thread a needle hole 23 time, first puts instrument 100 can provide a space, each contact probe 3 to be threaded a needle hole 23 and be contained in first and put in instrument 100 via each first hole 13 and each second of threading a needle, cause each teat 32 to thread a needle hole 23 with clip in the second positioning baseplate 2 via each second, and then locate the position of each contact probe 3.
As shown in the step b of Fig. 7 and Fig. 8 A to Fig. 8 C, in addition, provide a rising instrument 200, rising instrument 200 rises the second positioning baseplate 2 from the below that first puts instrument 100, makes to be formed with an interval S between the first positioning baseplate 1 and the second positioning baseplate 2.
As shown in the step c of Fig. 7 and Fig. 8 D, provide a distance piece 4, this distance piece 4 is divided into 2 half space bars 42 of Symmetric Composite, and every half space bar 42 is provided with U-shaped tank 421, a two U-shaped tank 421 and jointly forms a room 41; Again 2 half space bars 42 are inserted in interval S, allow 2 half space bars 42 be combined into distance piece 4 simultaneously, be folded between the first positioning baseplate 1 and the second positioning baseplate 2 to allow distance piece 4, and make the room 41 being formed with accommodating the plurality of contact probe 3 between the first positioning baseplate 1 and the second positioning baseplate 2, and make the two ends of each contact probe 3 be connected to each first hole 13 and each second of threading a needle respectively threading a needle hole 23.
As shown in the steps d of Fig. 7 and Fig. 8 D, again, provide multiple bolting element, the second positioning baseplate 2 via each this bolting element 5 with locking at distance piece 4; Be described in detail as follows, second positioning baseplate 2 comprises one second external insulation plate 22 of insulcrete 21 and gluing insulcrete 21 in second in one second, in second, insulcrete 21 is interposed between distance piece 4 and the second external insulation plate 22, and in second, insulcrete 21 and the second external insulation plate 22 are jointly provided with the plurality of second and thread a needle hole 23; Each bolting element 5 has a head 51, in second, insulcrete 21 is provided with multiple lockhole 211, second external insulation plate 22 is provided with the multiple of corresponding each lockhole 211 and buries hole 221 underground, each aperture size burying hole 221 underground is greater than the outside peripheral dimension of each head 51, each bolting element 5 via each lockhole 211 by this in second the corresponding distance piece 4 of insulcrete 21 lock, each head 51 is embedded in and respectively buries hole 221 underground.
As shown in the step e of Fig. 7 and Fig. 8 E to Fig. 8 G, wherein, the present invention be also included in step e before a step e ', one second is wherein provided to put instrument 300 in e ' step, second puts corresponding second positioning baseplate 2 of instrument 300 fills the solid and the plurality of contact probe of contact 3, the first and puts instrument 100 and second and put instrument 300 sandwiched first positioning baseplate 1, second positioning baseplate 2, the plurality of contact probe 3 and distance piece 4 jointly; This second puts instrument 300 object and makes the first positioning baseplate 1 put instrument 300 via second to overturn to be arranged on above the second positioning baseplate 2, and second puts instrument 300 and prevent each contact probe 3 from coming off in each first hole 13 and each second of threading a needle and to thread a needle hole 23; Therefore, second puts instrument 300 fills solid after the second positioning baseplate 2, then upset makes the first positioning baseplate 1 be arranged on the top of the second positioning baseplate 2, can throw off rising instrument 200, to carry out following steps.
Moreover, provide multiple lock member 6, the first to put instrument 100 and be provided with multiple through hole, the through hole that each lock member 6 utilizes first to put instrument 100, so that the first positioning baseplate 1 is locked on distance piece 4; Be described in detail as follows, first positioning baseplate 1 comprises one first external insulation plate 12 of insulcrete 11 and gluing insulcrete 11 in first in one first, in first, insulcrete 11 is interposed between distance piece 4 and the first external insulation plate 12, and in first, insulcrete 11 and the first external insulation plate 12 are jointly provided with the plurality of first and thread a needle hole 13; Each lock member 6 has a head 61, this in first insulcrete 11 be provided with multiple lockhole 111, first external insulation plate 12 is provided with the multiple of corresponding each lockhole 111 and buries hole 121 underground, each aperture size burying hole 121 underground is greater than the outside peripheral dimension of each head 61, insulcrete 11 in first is locked in distance piece 4 via each lockhole 111 by each lock member 6, and each head 61 is embedded in respectively buries hole 121 underground.
As shown in the step f of Fig. 7 and Fig. 8 H to Fig. 8 L, utilize rising instrument 200 to dismantle first and put instrument 100, now the first positioning baseplate 1 and the second positioning baseplate 2 lock via lock member 6 and the corresponding distance piece 4 of bolting element 5 respectively, finally, by the plurality of lock member 6 temporary release, move from the sliding displacement of relative second positioning baseplate 2 of the first positioning baseplate 1, thus make the plurality of first hole 23 of threading a needle, hole 13 and the plurality of second of threading a needle produce off normal relation, pressed from both sides by the first positioning baseplate 1 and the second positioning baseplate 2 location of pulling respectively to make the two ends of each contact probe 3, be described in detail as follows, the two ends of each contact probe 3 are suppressed by the first positioning baseplate 1 and the second positioning baseplate 2 respectively and are produced distortion, thus make each contact probe 3 be fixed between the first positioning baseplate 1 and the second positioning baseplate 2 by clip, dismantle second again and put instrument 300, namely probe unit structure is completed.
So, by above-mentioned contexture, probe unit structure of the present invention and preparation method thereof can be obtained.By this, first positioning baseplate 1 and the second positioning baseplate 2 are mutually stacked when making, and make to be formed with interval S between the first positioning baseplate 1 and the second positioning baseplate 2 by rising instrument 200, distance piece 4 is inserted interval S again and is folded between the first positioning baseplate 1 and the second positioning baseplate 2, to be formed with the room 41 of accommodating each contact probe 3; Compare existing, it is simple and assemble easy feature that probe unit structure of the present invention also has step in making with combination.
As shown in Figure 9, the using state of probe unit structure of the present invention, wherein, the test section 31 correspondence proving object contact of contact probe 3 one end, and the other end of feeler inspection pin 3, one end respective signal treating apparatus 400 namely with teat 32 is electrically connected, and makes probe unit to be electrically connected check object and signal processing apparatus 400 respectively, with the electric connection between the signal processing apparatus 400 reaching check object and outgoing inspection signal.In addition, the two ends of each contact probe 3 are suppressed by the first positioning baseplate 1 and the second positioning baseplate 2 respectively and are produced distortion; By this, aligned contact probe 3, contact probe 3 loose contact or come off during to avoid detecting, and then improve the stability in use of probe unit structure of the present invention.
Certainly; the present invention also can have other various embodiments; when not deviating from the present invention's spirit and essence thereof; those of ordinary skill in the art are when making various corresponding change and distortion according to the present invention, but these change accordingly and are out of shape the protection domain that all should belong to the claim appended by the present invention.
Claims (11)
1. a method for making for probe unit, is characterized in that, step comprises:
A) one first positioning baseplate, one second positioning baseplate and multiple contact probe are provided, this first positioning baseplate is provided with multiple first and threads a needle hole, this second positioning baseplate is provided with the corresponding the plurality of first multiple second of hole of threading a needle and threads a needle hole, this second positioning baseplate is configured in above this first positioning baseplate, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make each this contact probe penetrate respectively;
B) provide a rising instrument, this second positioning baseplate risen by this rising instrument, makes to be formed with a spacing between this first positioning baseplate and this second positioning baseplate;
C) one distance piece is provided, this distance piece is inserted this spacing and is folded between this first positioning baseplate and this second positioning baseplate, make to be formed with a room between this distance piece, this first positioning baseplate and this second positioning baseplate, the plurality of contact probe is placed in this room, and this first to be threaded a needle hole and respectively this second to be threaded a needle hole to make the two ends of each this contact probe be connected to respectively respectively;
D) provide multiple bolting element, this second positioning baseplate by each this bolting element with locking at this distance piece;
E) provide multiple lock member, this first positioning baseplate by each this lock member with locking at this distance piece; And
F) by the plurality of lock member temporary release, from this first positioning baseplate, the sliding displacement of this second positioning baseplate is dynamic relatively, thus make the plurality of first hole of threading a needle, hole and the plurality of second of threading a needle produce off normal relation, to be pulled location by this first positioning baseplate and this second positioning baseplate folder respectively to make the two ends of each this contact probe.
2. the method for making of probe unit according to claim 1, it is characterized in that, one first is also provided to put instrument in a step, this first puts instrument for this second positioning baseplate being arranged on the top of this first positioning baseplate, and this first is put each this contact probe of tool positioned and be arranged in respectively that this first to be threaded a needle hole and respectively this second to be threaded a needle hole.
3. the method for making of probe unit according to claim 2, it is characterized in that, each this contact probe one end has a test section, the other end has a teat, this test section is exposed to this first positioning baseplate via each this first hole of threading a needle, and this teat is via respectively this second threads a needle hole clip in this second positioning baseplate.
4. the method for making of probe unit according to claim 1, is characterized in that, in step c, this distance piece is divided into 2 half space bars of Symmetric Composite, makes this 2 half space bar insert this spacing.
5. the method for making of probe unit according to claim 4, is characterized in that, each this half space bar is provided with a U-shaped tank, and this two U-shapeds tank forms this room.
6. the method for making of probe unit according to claim 1, it is characterized in that, in Step d, this second positioning baseplate comprises insulcrete and gluing in one second in one second external insulation plate of this insulcrete in second, this in second insulcrete be interposed between this distance piece and this second external insulation plate, this in second insulcrete and this second external insulation plate be jointly provided with the plurality of second and thread a needle hole.
7. the method for making of probe unit according to claim 6, it is characterized in that, each this bolting element has a head, this in second insulcrete be provided with multiple lockhole, this the second external insulation plate is provided with corresponding the multiple of the plurality of lockhole and buries hole underground, each this aperture size burying hole underground is greater than the outside peripheral dimension of each this head, and respectively by this, insulcrete is to should distance piece locking in second via each this lockhole for this bolting element, and respectively this head is embedded in respectively, and this buries hole underground.
8. the method for making of probe unit according to claim 1, it is characterized in that, a step e ' before being also included in step e, one second is wherein provided to put instrument in e ' step, this first positioning baseplate second puts instrument upset to be arranged on above this second positioning baseplate via this, and this second is put instrument and prevent the plurality of contact probe from coming off in respectively this first to be threaded a needle hole and respectively this second to be threaded a needle hole.
9. the method for making of probe unit according to claim 1, it is characterized in that, in step e, this first positioning baseplate comprises insulcrete and gluing in one first in one first external insulation plate of this insulcrete in first, this in first insulcrete be interposed between this distance piece and this first external insulation plate, this in first insulcrete and this first external insulation plate be jointly provided with the plurality of first and thread a needle hole.
10. the method for making of probe unit according to claim 9, it is characterized in that, each this lock member has a head, this in first insulcrete be provided with multiple lockhole, this the first external insulation plate is provided with corresponding the multiple of the plurality of lockhole and buries hole underground, each this aperture size burying hole underground is greater than the outside peripheral dimension of each this head, respectively this lock member via each this lockhole by this in first insulcrete be locked in this distance piece and this second positioning baseplate, respectively this head is embedded in respectively that this buries hole underground.
The method for making of 11. probe units according to claim 1, it is characterized in that, in f step, the two ends of each this contact probe are produced distortion by this first positioning baseplate and the compacting of this second positioning baseplate respectively, thus each this contact probe is fixed between this first positioning baseplate and this second positioning baseplate by clip.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210030997.6A CN103245807B (en) | 2012-02-06 | 2012-02-06 | Probe unit structure and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210030997.6A CN103245807B (en) | 2012-02-06 | 2012-02-06 | Probe unit structure and preparation method thereof |
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| CN103245807A CN103245807A (en) | 2013-08-14 |
| CN103245807B true CN103245807B (en) | 2015-11-25 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107607746B (en) * | 2016-07-11 | 2024-04-09 | 致茂电子(苏州)有限公司 | Clip type probe device |
| JP2018179721A (en) * | 2017-04-12 | 2018-11-15 | 株式会社日本マイクロニクス | Electrical connection device |
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| TWM395828U (en) * | 2010-08-25 | 2011-01-01 | Certain Micro Applic Technology Inc | testing device for electronic component |
| CN201845029U (en) * | 2010-11-08 | 2011-05-25 | 港建日置股份有限公司 | Test probe |
| CN102193009A (en) * | 2010-03-16 | 2011-09-21 | 台湾积体电路制造股份有限公司 | Vertical probe card |
| TW201137357A (en) * | 2009-12-18 | 2011-11-01 | Nihon Micronics Kk | Probe card and inspection apparatus |
| CN202133687U (en) * | 2011-03-25 | 2012-02-01 | 金准科技股份有限公司 | Test probe and probe mounting seat |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008102070A (en) * | 2006-10-20 | 2008-05-01 | Hioki Ee Corp | Electronic component inspection probe |
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- 2012-02-06 CN CN201210030997.6A patent/CN103245807B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1879025A (en) * | 2003-11-14 | 2006-12-13 | 温特沃斯实验室公司 | Die design with integrated assembly aid |
| CN1657949A (en) * | 2004-02-17 | 2005-08-24 | 财团法人工业技术研究院 | Integral probe card and assembling mode |
| TW201009343A (en) * | 2008-08-21 | 2010-03-01 | Kun-Mao Jiang | Vertical probe card |
| TW201137357A (en) * | 2009-12-18 | 2011-11-01 | Nihon Micronics Kk | Probe card and inspection apparatus |
| CN102193009A (en) * | 2010-03-16 | 2011-09-21 | 台湾积体电路制造股份有限公司 | Vertical probe card |
| TWM395828U (en) * | 2010-08-25 | 2011-01-01 | Certain Micro Applic Technology Inc | testing device for electronic component |
| CN201845029U (en) * | 2010-11-08 | 2011-05-25 | 港建日置股份有限公司 | Test probe |
| CN202133687U (en) * | 2011-03-25 | 2012-02-01 | 金准科技股份有限公司 | Test probe and probe mounting seat |
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| CN103245807A (en) | 2013-08-14 |
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