JP2015007555A - Probe unit, and circuit board inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure that the tip of a probe is accurately contacted to a predetermined position.SOLUTION: A probe unit according to the present invention comprises: a plurality of probes 10; a first support part 11 for supporting the tip part 10a side of the probe 10; a second support part 12 for supporting the base end part 10c side of the probe 10; an electrode plate 13; and a connection mechanism 14 for connecting the first support part 11 to the electrode plate 13 so as to be movable in a first direction perpendicular to a disposition surface 13b of the electrode plate 13. The connection mechanism 14 is provided with: an urging part 42 for urging the first support part 11; a first restriction part 51 for restricting the first support part 11 from separating from the disposition surface 13b more than a predetermined distance; and a second restriction part 52 for restricting the movement of the first support part 11 in a second direction along the disposition surface 13b, the second restriction part 52 being provided with a body part 52a attached to the electrode plate 13, and a leaf spring 52b, disposed between the body part 52a and the first support part 11, for generating an elastic force in a direction to maintain a clearance between the first support part 11 and the body part 52 at a constant distance.

Description

  The present invention relates to a probe unit including a plurality of probes, a first support part and a second support part for supporting each probe, and a substrate inspection apparatus including the probe unit.

  As this type of probe unit, an inspection jig disclosed in JP 2012-181186 A is known. The inspection jig includes a jig main body, a regulating member, an electrode body, and the like. The jig main body has an inspection side support having an inspection guide hole for guiding the tip of a contact (probe) to the object to be inspected, and an electrode side support having an electrode guide hole for guiding the rear end of the contact to the electrode. It is configured with. The restricting member restricts the movement of the jig main body portion forward. The electrode body includes a plurality of electrodes that are in contact with the rear end of the contact, and is attached to the rear side of the electrode side support. Also, the electrode body has a slide mechanism that regulates the movement of the jig main body in the lateral direction (direction perpendicular to the direction toward the inspection object) when the inspection jig is moved toward the inspection object during inspection. Is attached. In this case, the slide mechanism includes a rod-like shaft portion and a cylindrical bearing portion into which the shaft portion is inserted. In this inspection jig, when the inspection jig is moved toward the inspection object, the opposing surface of the inspection-side support body comes into contact with the inspection object, and the tip of the contact comes into contact with the inspection object. At this time, the movement of the jig main body in the lateral direction is restricted by the slide mechanism.

JP 2012-181186 (page 6-13, Fig. 1-4)

  However, the conventional inspection jig has the following problems. That is, in this inspection jig, the movement of the jig main body in the lateral direction is restricted by a slide mechanism including a shaft portion and a bearing portion into which the shaft portion is inserted. However, in this type of slide mechanism, there is generally a slight gap between the shaft portion and the bearing portion. For this reason, in this inspection jig, when the shaft portion slides, the shaft portion is displaced with respect to the bearing portion by this gap, so that the contact position of the tip of the contact with the object to be inspected is determined in advance. There is a problem that the position is shifted from the specified position.

  The present invention has been made in view of such problems, and a main object of the present invention is to provide a probe unit and a substrate inspection apparatus that can accurately bring the tip of the probe into contact with a predetermined position.

  In order to achieve the above object, the probe unit according to claim 1 includes a plurality of probes for inputting / outputting electric signals by bringing the tip portion into contact with a contact target, and a first support for supporting the tip portion side of the probe. A plurality of parts for inputting / outputting the electrical signal to / from an external device in contact with each base end part of each probe, a second support part supporting the base end part side of the probe, A probe unit including an electrode plate having an electrode disposed on one surface, and a coupling mechanism for coupling the first support portion to the electrode plate so as to be movable in a first direction perpendicular to the one surface. The coupling mechanism includes an urging portion for urging the first support portion in the direction away from the one surface along the first direction, and the first support not less than a predetermined distance from the one surface. A first restricting portion for restricting the separation of the portion; A second restricting portion for restricting movement of the first support portion in the second direction along the surface, the second restricting portion including a body portion attached to the electrode plate, the body portion, An elastic member disposed between the first support portion and generating an elastic force when the separation distance changes in a direction to maintain the separation distance between the first support portion and the main body portion at a constant distance; It is prepared for.

  According to a second aspect of the present invention, in the probe unit according to the first aspect, the elastic member is constituted by a leaf spring.

  A probe unit according to a third aspect is the probe unit according to the first or second aspect, wherein the second restriction portion includes a pair of the second restriction portions, and the second restriction portions correspond to the first and second distances when the separation distance changes. One of the two restricting portions is configured to generate a pressing force as the elastic force, and the other of the second restricting portions is configured to generate a tensile force as the elastic force.

  According to a fourth aspect of the present invention, there is provided the substrate inspection apparatus according to any one of the first to third aspects, and an electrical signal input via the probe of the probe unit brought into contact with the substrate as the contact target. And an inspection unit for inspecting the substrate based on the above.

  According to the probe unit according to claim 1 and the substrate inspection apparatus according to claim 4, the first support portion is disposed between the main body portion attached to the electrode plate and the main body portion and the first support portion. And a second restricting portion having an elastic member that generates an elastic force in a direction to maintain the separation distance at a constant distance when the separation distance between the main body and the main body changes. Even if a force in the second direction is applied to the first support portion when moving (probing), the first support portion and the first support portion are affected by the elastic force (pressing force or pulling force) of the elastic member in the second restricting portion. Since the separation distance from the main body portion can be maintained at a constant distance, the movement of the first support portion in the second direction can be reliably restricted. Therefore, according to the probe unit and the substrate inspection apparatus, the tip of the probe can be accurately brought into contact with a predetermined position.

  Further, according to the probe unit and the substrate inspection apparatus, since the elastic member can function as a buffer material, it is possible to reliably prevent damage to the first support portion when an impact is applied to the first support portion. it can. In addition, the thickness of the first support part is non-uniform, or the distance between one surface of the electrode plate and the first support part varies depending on the location of the first support part, Even when there is a variation in the distance to the first support portion, such a variation can be absorbed by the elastic deformation of the elastic member, so that the tip portion of each probe contacts the contact object evenly. Can be made.

  In the probe unit according to claim 2 and the substrate inspection apparatus according to claim 4, a plate spring as an elastic member is used. In this case, in the configuration in which the leaf spring is disposed between the first support portion and the main body portion, a configuration in which an elastic body such as rubber is sandwiched between the first support portion and the main body portion, and the coil spring or the torsion coil Compared to a configuration in which a spring (torsion spring) is disposed between the first support portion and the main body portion, a large elastic force can be generated during elastic deformation. For this reason, according to this probe unit and board | substrate inspection apparatus, when the force to a 2nd direction is added with respect to a 1st support part, the movement of the 1st support part to a 2nd direction can be controlled more reliably. Can do.

  The probe unit according to claim 3 and the substrate inspection apparatus according to claim 4 include a pair of second restricting portions, and the distance between the first support portion and the main body portion of the second restricting portion changes. An elastic member in one of the second restricting portions generates a pressing force as an elastic force, and an elastic member in the other of the second restricting portions generates a pulling force as an elastic force. For this reason, according to the probe unit and the substrate inspection apparatus, the elastic force of each elastic member in the pair of second restricting portions is effectively applied to restrict the movement of the first support portion in the second direction. Can do. Therefore, according to the probe unit and the substrate inspection apparatus, the movement of the first support portion in the second direction can be more reliably regulated.

1 is a configuration diagram showing a configuration of a substrate inspection apparatus 1. FIG. 2 is a cross-sectional view showing a configuration of a probe unit 2. FIG. FIG. 5 is an explanatory diagram for explaining the operation of the probe unit 2. 2 is a cross-sectional view showing a configuration of a probe unit 102. FIG. 5 is an explanatory diagram for explaining the operation of the probe unit 102. FIG.

  Hereinafter, embodiments of a probe unit and a substrate inspection apparatus will be described with reference to the drawings.

  First, the configuration of the substrate inspection apparatus 1 as an example of the substrate inspection apparatus will be described. A substrate inspection apparatus 1 shown in FIG. 1 includes a probe unit 2, a moving mechanism 3, a substrate holding unit 4, a measurement unit 5, an inspection unit 6, a storage unit 7, and a processing unit 8, as shown in FIG. 100 can be inspected.

  As shown in FIGS. 2 and 3, the probe unit 2 includes a plurality of probes 10, a first support portion 11, a second support portion 12, an electrode plate 13, and a coupling mechanism 14.

  The probe 10 is used to input / output an electric signal by bringing it into contact with a conductor portion such as a conductor pattern on the substrate 100 as a contact target at the time of inspection. As an example, a conductive metal material (for example, beryllium) is used. Copper alloy, SKH (high speed tool steel), tungsten steel, etc.) are formed in a rod shape with a circular cross section that can be elastically deformed. In addition, an insulating layer made of an insulating coating material (for example, fluorine resin, polyurethane, polyester, polyimide, etc.) is formed on the peripheral surface of the intermediate portion 10b (see FIG. 2) of the probe 10. Yes. For this reason, the probe 10 is formed such that the intermediate portion 10b has a larger diameter than the distal end portion 10a (see the same figure) and the proximal end portion 10c (see the same figure).

  The first support portion 11 supports the tip portion 10a side of the probe 10 as shown in FIGS. Specifically, a plurality of support holes 21 (the same number as the number of probes 10) are formed in the first support portion 11, and the distal end portion 10 a of the probe 10 inserted through the support holes 21 is supported. In this case, the support hole 21 is formed to have a diameter slightly larger than the diameter of the distal end portion 10a of the probe 10 and slightly smaller than the diameter of the intermediate portion 10b of the probe 10, so that the intermediate portion 10b is not inserted. In addition, only the tip portion 10a can be inserted.

  As shown in FIGS. 2 and 3, the first support portion 11 includes, as an example, a plate-like portion 11 a in which a support hole 21 is formed, and 2 formed to protrude from both end portions of the plate-like portion 11 a. Two side portions 11b, and the cross section is formed in a U shape. Further, the first support portion 11 is arranged in a state where the plate-like portion 11 a described above is parallel (substantially parallel) to the electrode plate 13. Further, the outer end of each side portion 11b of the first support portion 11 is in contact with a tip end portion of a sleeve 42a of an urging portion 42 (to be described later) of the connection mechanism 14 and a first restriction portion 51 (to be described later) of the connection mechanism 14. Protrusions 11c that contact the protrusions 51b are formed.

  The second support portion 12 supports the proximal end portion 10c side of the probe 10 as shown in FIGS. Specifically, a plurality of support holes 22 (the same number as the number of probes 10) are formed in the second support portion 12, and the base end portion 10 c of the probe 10 inserted through the support holes 22 is supported. . In this case, the support hole 22 is formed to have the same diameter as the support hole 21 of the first support portion 11 described above, and only the base end portion 10c can be inserted without inserting the intermediate portion 10b of the probe 10. It has become. Moreover, as shown in both figures, the 2nd support part 12 is formed in plate shape as an example, and is being fixed to the electrode plate 13 in the state contact | abutted to the electrode plate 13. As shown in FIG.

  The electrode plate 13 is formed in a plate shape as shown in FIGS. In addition, one surface of the electrode plate 13 (the upper surface in the figure, which is also referred to as “arrangement surface 13b” hereinafter) is in contact with each base end portion 10c of each probe 10 and the measurement unit 5 (of the external device). A plurality of electrodes 13a for inputting / outputting electrical signals to / from the example) are fitted. A cable (not shown) connected to the measurement unit 5 is attached to these electrodes 13a. Further, the base end portion 10c of the probe 10 supported by the second support portion 12 is in contact with each electrode 13a.

  The coupling mechanism 14 is a mechanism for coupling the first support portion 11 to the electrode plate 13 in a state that it can move in a first direction (vertical direction in FIGS. 2 and 3) perpendicular to the arrangement surface 13b of the electrode plate 13. As shown in both figures, the mounting plate 41, the urging portion 42, the first restricting portion 51, and the second restricting portion 52 are each provided with a pair (a plurality of examples).

  As shown in FIGS. 2 and 3, the mounting plate 41 is formed in a plate shape and is fixed to the arrangement surface 13 b of the electrode plate 13. The urging portion 42 is attached to the attachment plate 41 and urges the first support portion 11 in a direction away from the arrangement surface 13b of the electrode plate 13 along the first direction described above. Specifically, the urging portion 42 includes a bottomed cylindrical sleeve 42a, a plunger 42b whose proximal end portion is accommodated in the sleeve 42a so that the amount of protrusion on the distal end side from the sleeve 42a increases and decreases, A spring 42c that is accommodated on the bottom side of the sleeve 42a and biases the plunger 42b toward the tip side is configured.

  The first restricting portion 51 restricts the first support portion 11 from being separated from the arrangement surface 13b of the electrode plate 13 by a predetermined distance (distance in the state shown in FIG. 2) or more. Specifically, as shown in FIGS. 2 and 3, the first restricting portion 51 includes a main body portion 51a and a protruding portion 51b. The main body 51 a is formed in a plate shape and is erected on the mounting plate 41 so as to be positioned outside the side portion 11 b in the first support portion 11. The protrusion 51b is formed so as to protrude from the distal end portion (upper end portion in both drawings) of the main body portion 51a toward the side portion 11b of the first support portion 11 (that is, inward).

  The second restricting portion 52 restricts the movement of the first support portion 11 in the second direction (the left-right direction in FIGS. 2 and 3) along the arrangement surface 13 b of the electrode plate 13. Specifically, the 2nd control part 52 is provided with the main-body part 52a and the leaf | plate spring 52b, as shown to both figures. The main body 52a is formed in a plate shape, and is erected on the mounting plate 41 so as to be located inside the side portion 11b of the first support portion 11 (attached to the electrode plate 13 via the mounting plate 41). ing).

  The leaf spring 52b is an example of an elastic member, and is formed in a plate shape as shown in both drawings. The leaf spring 52b is on the outside of the front end portion (upper end portion in both drawings) of the main body portion 52a and the first support portion 11 side. It is arrange | positioned between the inner side of the front-end | tip part (lower end part in both figures) in the part 11b. Specifically, one end portion in the length direction is connected to the outside of the tip portion of the main body portion 52a, and the other end portion in the length direction is connected to the inside of the tip portion of the side portion 11b so as to span between the two. Has been. When the separation distance between the first support portion 11 and the main body portion 52a changes, the leaf spring 52b generates an elastic force in a direction to maintain the separation distance at a constant distance.

  Moreover, each 2nd control part 52 is arrange | positioned in the position which opposes on both sides of the area | region in which the probe 10 in the 1st support part 11 is arrange | positioned, as shown in FIG. For this reason, when the separation distance between the first support portion 11 and the main body portion 52a changes, the leaf spring 52b in one of the second restricting portions 52 generates a pressing force as an elastic force, and each second restricting portion. The leaf spring 52b on the other side of 52 generates a tensile force as an elastic force. As a result, the separation distance between the first support portion 11 and the main body portion 52a is maintained at a constant distance, and movement of the first support portion 11 in the second direction is restricted.

  In the probe unit 2, as shown in FIGS. 2 and 3, the opposing surface 11 d (upper surface in both drawings) of the plate-like portion 11 a of the first support portion 11 facing the substrate 100 is separated from the substrate 100 ( The tip portion 10a of the probe 10 does not protrude from the facing surface 11d in either of the following states (also referred to as “non-contact state”) and the state where the facing surface 11d is in contact with the substrate 100 (hereinafter referred to as “contacting state”). It is configured as follows.

  In the probe unit 2, the center of the opening surface of the support hole 21 in the first support portion 11 and the center of the opening surface of the support hole 22 in the second support portion 12 are the plate-like portion 11 a of the first support portion 11 and The 1st support part 11 and the 2nd support part 12 are arrange | positioned so that it may be located on the virtual straight line inclined with respect to the 2nd support part 12. FIG. Therefore, as shown in FIG. 2, the probe 10 inserted through each of the support holes 21 and 22 is inclined with respect to the plate-like portion of the first support portion 11 and the second support portion 12 in the non-contact state. Maintained posture.

  The moving mechanism 3 performs probing to move the probe unit 2 in a direction toward and away from the substrate holding unit 4 (the substrate 100 placed on the substrate holding unit 4) according to the control of the processing unit 8. To do. The substrate holding unit 4 is configured to hold the substrate 100. The measurement unit 5 performs a measurement process for measuring a physical quantity (for example, a resistance value) based on an electrical signal input / output via the probe 10.

  Under the control of the processing unit 8, the inspection unit 6 executes an inspection process for inspecting the quality of the substrate 100 (whether the conductor is disconnected or short-circuited) based on the resistance value as a physical quantity measured by the measurement unit 5. The storage unit 7 temporarily stores the resistance value measured by the measurement unit 5 and the result of the inspection performed by the inspection unit 6 according to the control of the processing unit 8. The processing unit 8 controls each unit constituting the substrate inspection apparatus 1.

  Next, a substrate inspection method for inspecting the substrate 100 using the substrate inspection apparatus 1 and the operation of each part at that time will be described with reference to the drawings.

  First, the probe unit 2 with the first support portion 11 facing upward is fixed to the moving mechanism 3 (see FIG. 1). Next, the substrate holding unit 4 holds the substrate 100. Subsequently, the substrate inspection apparatus 1 is operated. At this time, the processing unit 8 controls the moving mechanism 3 to raise (move) the probe unit 2 in a direction approaching the substrate 100 (upward in FIG. 1) (execution of probing).

  In this case, in the probe unit 2 in this state (non-contact state), as shown in FIG. 2, the proximal end portion 10 c of the probe 10 contacts the electrode 13 a of the electrode plate 13 and the distal end portion 10 a is the first support portion 11. It is maintained in a state where it does not protrude from the facing surface 11d. Further, in the probe unit 2 in this state, as shown in the figure, the first support portion 11 is urged by the urging portion 42 in the direction away from the arrangement surface 13b of the electrode plate 13 along the first direction. The protrusion 11c of the first support part 11 contacts the protrusion 51b of the first restricting part 51, and further separation of the first support part 11 is restricted.

  Next, when the probe unit 2 is raised by a predetermined movement amount, the opposing surface 11 d of the plate-like portion 11 a in the first support portion 11 contacts the substrate 100 as shown in FIG. 3. Also in the probe unit 2 in this state (contact state), as shown in the figure, the base end portion 10c of the probe 10 contacts the electrode 13a of the electrode plate 13 and the tip end portion in the same manner as in the non-contact state described above. 10a is maintained in a state where it does not protrude from the facing surface 11d of the first support portion 11.

  As the probe unit 2 is raised, the first support portion 11 is attached to the urging portion 42 (spring 42c) of the coupling mechanism 14 by the reaction force of the pressing force of the probe unit 2 against the substrate 100 as shown in FIG. It is moved in the direction (downward) close to the electrode plate 13 along the first direction against the force. Along with this, the distance from the first support portion 11 to the arrangement surface 13b of the electrode plate 13 gradually decreases, and the tip portion 10a of the probe 10 contacts the substrate 100 in the process. Further, as shown in the figure, since the intermediate portion 10b of the probe 10 is bent by the distance shortened from the first support portion 11 to the arrangement surface 13b of the electrode plate 13, the elastic force of the probe 10 generated by the bending. As a result, the distal end portion 10a comes into contact with the substrate 100 reliably.

  On the other hand, when probing (moving) the probe unit 2, a force in the second direction (left-right direction in the figure) may be applied to the first support portion 11. In the probe unit 2, Even if such a force is applied, the movement of the first support part 11 in the second direction is restricted by the elastic force of the leaf spring 52b in the second restriction part 52.

  Specifically, in the probe unit 2, as shown in FIGS. 2 and 3, a leaf spring 52 b is provided between each main body portion 52 a of each second restriction portion 52 and each side portion 11 b of the first support portion 11. Each is arranged. For this reason, for example, when a force is applied to the first support portion 11 in the left direction in both figures and the first support portion 11 is about to move to the left side (the separation distance between the first support portion 11 and the main body portion 52a). ), The right leaf spring 52b in both figures is bent so as to be compressed to the right (in a direction to keep the separation distance constant), and a pressing force (elastic force) is generated. The left leaf spring 52b in the drawing is stretched to generate a pulling force (elastic force) toward the right side (in a direction to keep the separation distance constant). As a result, the first support portion 11 is returned to the right side (original position) by the elastic force (pressing force and pulling force) of the leaf spring 52b, and the separation distance between the first support portion 11 and the main body portion 52a is a constant distance. Maintained.

  On the contrary, when a force is applied in the right direction in both figures and the first support portion 11 tries to move to the right side, the left leaf spring 52b in both figures is bent so as to be compressed and pushed toward the left side. A pressure (elastic force) is generated, and a right leaf spring 52b in both figures is extended to generate a pulling force (elastic force) toward the left side. As a result, the first support portion 11 is returned to the left side (original position) by the elastic force (pressing force and pulling force) of the leaf spring 52b, and the separation distance between the first support portion 11 and the main body portion 52a is a constant distance. Maintained. In this way, in the probe unit 2, the movement of the first support portion 11 in the second direction is restricted. For this reason, in this probe unit 2, it is possible to contact the front-end | tip part 10a of the probe 10 correctly to a predetermined position.

  Subsequently, the processing unit 8 controls the moving mechanism 3 to stop the descent of the probe unit 2, and then controls the measuring unit 5 to execute the measurement process. In this measurement process, the measurement unit 5 measures a resistance value as a physical quantity based on an electric signal input / output via each probe 10.

  Subsequently, the processing unit 8 controls the inspection unit 6 to execute inspection processing. In this inspection process, the inspection unit 6 inspects the conductor portion for disconnection and short circuit based on the resistance value measured by the measurement unit 5. Next, the processing unit 8 displays the inspection result on a display unit outside the drawing.

  Subsequently, the processing unit 8 controls the moving mechanism 3 to lower the probe unit 2. At this time, since the biasing portion 42 biases the first support portion 11 in a direction away from the arrangement surface 13b of the electrode plate 13, the opposing surface 11d of the first support portion 11 and the substrate 100 are in contact with each other. In this state, the second support portion 12, the electrode plate 13, and the coupling mechanism 14 start to descend, and accordingly, the distance from the first support portion 11 to the arrangement surface 13b of the electrode plate 13 gradually increases.

  Next, the second support portion 12, the electrode plate 13, and the coupling mechanism 14 are lowered until the protrusion portion 11 c of the first support portion 11 contacts the protrusion portion 51 b of the first restricting portion 51 (the first support portion 11 is the electrode plate 13). 1), the further separation of the first support portion 11 is restricted by the first restricting portion 51, and the first support portion 11 includes the second support portion 12, the electrode plate 13, and the coupling mechanism. 14 and descend.

  Subsequently, when the probe unit 2 is lowered to the initial position, the processing unit 8 controls the moving mechanism 3 to stop the lowering of the probe unit 2. Thus, the inspection of the substrate 100 is completed. Next, when inspecting a new substrate 100, the new substrate 100 is held by the substrate holder 4, and then the substrate inspection apparatus 1 is operated. At this time, the processing unit 8 executes each process described above.

  As described above, according to the probe unit 2 and the substrate inspection apparatus 1, the first support portion is disposed between the main body portion 52a attached to the electrode plate 13 and the main body portion 52a and the first support portion 11. When the second regulating portion 52 having an elastic member (plate spring 52b) that generates an elastic force in a direction to maintain the separation distance at a constant distance when the separation distance between the main body portion 52a and the main body portion 52a is changed, Even when a force in the second direction is applied to the first support portion 11 when the probe unit 2 is moved (probed) along the first direction, the elastic force of the leaf spring 52b in the second restriction portion 52 ( Since the separation distance between the first support portion 11 and the main body portion 52a can be maintained at a constant distance by the pressing force or the pulling force), the movement of the first support portion 11 in the second direction can be reliably restricted. it can. Therefore, according to the probe unit 2 and the substrate inspection apparatus 1, the tip portion 10a of the probe 10 can be accurately brought into contact with a predetermined position of the substrate 100.

  Moreover, according to this probe unit 2 and the board | substrate inspection apparatus 1, since the leaf | plate spring 52b can be functioned as a shock absorbing material, the damage of the 1st support part 11 when an impact is added to the 1st support part 11 is ensured. Can be prevented. Further, the thickness of the plate-like portion 11a of the first support portion 11 is not uniform, or the distance between the arrangement surface 13b of the electrode plate 13 and the plate-like portion 11a varies depending on the location of the plate-like portion 11a. As a result, even when there is a variation in the distance between the substrate 100 and the first support portion 11, such a variation can be absorbed by the elastic deformation of the leaf spring 52b. The ten tip portions 10 a can be brought into contact with the substrate 100 evenly.

  In the probe unit 2 and the substrate inspection apparatus 1, a plate spring 52b as an elastic member is used. In this case, in the configuration in which the leaf spring 52b is disposed between the first support portion 11 and the main body portion 52a, a configuration in which an elastic body such as rubber is sandwiched between the first support portion 11 and the main body portion 52a, and Compared with a configuration in which a coil spring or a torsion coil spring (torsion spring) is disposed between the first support portion 11 and the main body portion 52a, a large elastic force can be generated during elastic deformation. For this reason, according to this probe unit 2 and the board | substrate inspection apparatus 1, when the force to a 2nd direction is added with respect to the 1st support part 11, the movement of the 1st support part 11 to a 2nd direction is more reliable. Can be regulated.

  Further, the probe unit 2 and the substrate inspection apparatus 1 include a pair of second restricting portions 52, and each second restricting portion is changed when the distance between the first support portion 11 and the main body portion 52a of the second restricting portion 52 changes. Each leaf spring 52b on one side of the portion 52 generates a pressing force as an elastic force, and each leaf spring 52b on the other side of each second restricting portion 52 generates a pulling force as an elastic force. Is configured. For this reason, according to this probe unit 2 and the board | substrate test | inspection apparatus 1, it is effective in restrict | limiting the movement of the 1st support part 11 to a 2nd direction with the elastic force of each leaf | plate spring 52b in a pair of 2nd control part 52. Can be activated. Therefore, according to this probe unit 2 and the board | substrate inspection apparatus 1, the movement of the 1st support part 11 to a 2nd direction can be controlled further reliably.

  The substrate inspection apparatus and the substrate inspection method are not limited to the above configuration and method. For example, the probe unit 102 shown in FIGS. 4 and 5 can be employed. In the following description, components having the same functions as those of the probe unit 2 described above are denoted by the same reference numerals, and redundant description is omitted. As shown in both drawings, the probe unit 102 includes a support portion 110 instead of the first support portion 11 and the second support portion 12 described above, and includes an electrode plate 113 instead of the electrode plate 13 described above. Instead of the connecting mechanism 14, a connecting mechanism 114 is provided.

  As shown in FIGS. 4 and 5, the support portion 110 includes a distal end side support portion 110 a as a first support portion in which the support hole 21 is formed and a proximal end side as a second support portion in which the support hole 22 is formed. The support portion 110b includes a pair of side portions 110c that connect the distal end side support portion 110a and the proximal end side support portion 110b and that have protrusions 110d that protrude outward, and these are integrally formed. . Further, the support portion 110 is positioned on an imaginary straight line in which the center of the opening surface of the support hole 21 and the center of the opening surface of the support hole 22 are inclined with respect to the distal end side support portion 110a and the proximal end side support portion 110b. It is configured. As shown in both figures, the electrode plate 113 is formed in a plate shape, and is configured such that the plurality of electrodes 13a are fitted into the arrangement surface 113b and the urging portion 42 can be fitted therein.

  As shown in FIGS. 4 and 5, the coupling mechanism 114 includes an urging portion 42, a pair of main body portions 151, and a pair of leaf springs 52 b. In this probe unit 102, each urging portion 42 is fitted into the electrode plate 113. Each main body 151 is erected on the electrode plate 113 so as to be positioned outside the side portion 110 c in the support portion 110. In addition, a protrusion 152 that protrudes toward the side portion 110c of the support portion 110 (that is, inward) is formed at the distal end portion (the upper end portion in both drawings) of the main body portion 151. The main body 151 and the projecting portion 152 constitute a first restricting portion, and when the projecting portion 152 abuts on the projecting portion 110d formed on the side portion 110c of the supporting portion 110, the supporting portion 110 (the front end side supporting portion). 110a) is separated from the arrangement surface 113b of the electrode plate 113 by a predetermined distance (distance in the state shown in FIG. 4) or more.

  Further, in this probe unit 102, as shown in FIGS. 4 and 5, each leaf spring 52b is disposed between each main body 151 and each side 110c of the support 110. Specifically, one end portion of the leaf spring 52b in the length direction is connected to the inside of the base end portion (lower end portion in both drawings) of the main body portion 151, and the other end portion in the length direction is a side portion of the support portion 110. It is connected to the outside of the lower end portion at 110c and spans between them. In this case, in the probe unit 102, the second restriction portion is configured by the main body portion 151 and the spring 52b. That is, the main body 151 functions as a main body of the first restricting portion and also functions as a main portion of the second restricting portion.

  In the probe unit 102, as shown in FIGS. 4 and 5, the pair of second restricting portions constituted by the main body 151 and the leaf spring 52b are opposed to each other across the region where the probe 10 is disposed in the support portion 110. Is arranged. For this reason, in this probe unit 102, when the separation distance between the support part 110 (the front end side support part 110a) and the main body part 151 changes, one of the two leaf springs 52b generates a pressing force as an elastic force. The other of the two leaf springs 52b generates a pulling force as an elastic force, and the separation distance between the support part 110 and the main body part 151 is maintained at a constant distance, whereby the support part 110 moves in the second direction. Is regulated.

  In the probe unit 102, as shown in FIGS. 4 and 5, the base end side support portion 110b of the support portion 110 and the arrangement surface 113b of the electrode plate 113 are both in the non-contact state and the contact state. Are separated. In this case, in the contact state, the separation distance between the base end side support portion 110b and the arrangement surface 113b decreases as the movement amount of the probe unit 102 increases.

  The probe unit 102 also includes a second restricting portion having a main body portion 151 attached to the electrode plate 113 and a leaf spring 52b as an elastic member disposed between the main body portion 151 and the support portion 110. As a result, even when a force in the second direction is applied to the support part 110 when the probe unit 102 is moved along the first direction, the second direction of the support part 110 is caused by the elastic force of the leaf spring 52b. The movement to the can be reliably controlled. For this reason, also in this probe unit 102, the front-end | tip part 10a of the probe 10 can be made to contact correctly at a predetermined position.

  Further, in both the non-contact state and the contact state, the probe unit 2 and 102 configured to prevent the distal end portion 10a of the probe 10 from protruding from the opposing surface 11d of the first support portion 11 or the distal end side support portion 110a. Although the example to be applied has been described above, the distal end portion 10a of the probe 10 protrudes from the opposing surface 11d of the first support portion 11 and the distal end side support portion 110a in at least one of a non-contact state and a contact state. It can also be applied to a probe unit.

  In addition, the above description has been made with respect to the example applied to the probe units 2 and 102 configured so that the base end portion 10c of the probe 10 contacts the electrode 13a of the electrode plate 13 in both the non-contact state and the contact state. It can also be applied to a probe unit configured such that the base end portion 10c of the probe 10 does not contact the electrode 13a of the electrode plate 13 in a non-contact state.

  In addition, the example in which the intermediate portion 10b is applied to the configuration using the probe 10 having a larger diameter than the distal end portion 10a and the proximal end portion 10c has been described above, but the distal end portion 10a, the intermediate portion 10b, and the proximal end portion 10c are the same. The present invention can also be applied to a configuration using the probe 10 formed in a diameter.

  Further, the center of the opening surface of the support hole 21 and the center of the opening surface of the support hole 22 are on an imaginary straight line inclined with respect to the plate-like portion 11a of the first support portion 11 and the front end side support portion 110a of the support portion 110. Although the example applied to the probe units 2 and 102 configured to be positioned has been described above, the center of the opening surface of each of the support holes 21 and 22 is the plate-like portion 11a of the first support portion 11 or the tip side support of the support portion 110. The probe unit configured to be positioned on a straight line perpendicular to the portion 110a, that is, in a non-contact state, the probe 10 is placed on the plate-like portion 11a of the first support portion 11 or the distal end side support portion 110a of the support portion 110. The present invention can also be applied to the probe unit 2 that is maintained in a vertical posture.

  Moreover, although the above-described probe unit 2 includes a pair of second restricting portions 52 (in the probe unit 102, a second restricting portion configured by the main body 151 and the leaf spring 52b), the second restricting portion 52 ( It is also possible to adopt a configuration provided with only one second restricting portion) formed by the main body 151 and the leaf spring 52b, or a configuration provided with three or more of these.

  In addition, the configuration example including one plate spring 52b for one second restricting portion 52 has been described above, but a configuration including a plurality of plate springs 52b for one second restricting portion 52 may be employed.

  Furthermore, instead of the leaf spring 52b, a configuration using an elastic body such as rubber as the elastic member may be employed. Moreover, it can replace with the leaf | plate spring 52b and the structure which uses a coil spring and a torsion coil spring (torsion spring) as an elastic member is also employable.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2,102 Probe unit 5 Measuring part 6 Inspection part 10 Probe 10a Tip part 10c Base end part 11 1st support part 12 2nd support part 13,113 Electrode plate 13a Electrode 13b, 113b Arrangement surface 14,114 Connecting mechanism 42 Energizing portion 51 First restricting portion 51a, 151 Body portion 52 Second restricting portion 52b Leaf spring 100 Substrate 110a Tip side support portion 110b Base end side support portion

Claims (4)

A plurality of probes for inputting / outputting electric signals by bringing the tip part into contact with the contact target, a first support part for supporting the tip part side of the probe, and a second support for supporting the base end part side of the probe A probe comprising: a support part; and an electrode plate in contact with each base end part of each of the probes, and an electrode plate on which a plurality of electrodes for inputting / outputting the electrical signal to / from an external device are arranged on one surface A unit,
A connection mechanism for connecting the first support portion to the electrode plate so as to be movable in a first direction perpendicular to the one surface;
The coupling mechanism includes an urging portion that urges the first support portion in the direction away from the one surface along the first direction, and the first support portion having a predetermined distance or more from the one surface. A first restriction portion that restricts the separation of the first support portion, and a second restriction portion that restricts the movement of the first support portion in the second direction along the one surface,
The second restricting portion is disposed between the main body portion attached to the electrode plate and the main body portion and the first support portion, and a separation distance between the first support portion and the main body portion is changed. A probe unit that includes an elastic member that generates an elastic force in a direction to maintain the separation distance at a constant distance.   The probe unit according to claim 1, wherein the elastic member is configured by a leaf spring. A pair of the second restricting portions;
Each of the second restricting portions causes the elastic member in one of the second restricting portions to generate a pressing force as the elastic force when the separation distance is changed, and in the other of the second restricting portions. The probe unit according to claim 1, wherein the elastic member is configured to generate a tensile force as the elastic force.   A probe unit according to any one of claims 1 to 3, and an inspection unit that inspects the substrate based on an electrical signal input through the probe of the probe unit that is in contact with the substrate as the contact target. Board inspection device equipped.

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