JP2008286788A - Substrate inspecting tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspecting tool, reducing the contact resistance value between a contact and a connecting electrode part, and having a stable contact resistance value. <P>SOLUTION: This substrate inspecting tool includes: a plurality of contacts; a contact holder having a first guide plate with a first guide hole and a second guide plate with a second guide hole; and the connecting electrode part, wherein the first guide hole is formed to have a smaller diameter than the diameter of an insulating part of the contact, the second guide hole is formed ot have a larger diameter than the diameter of the insulating part of the contact, the first guide plate and the second guide plate have an alignment state where the first guide hole enabling the contact to be attached and detached is aligned with the second guide hole corresponding to the first guide hole and a holding state where the second guide plate holding the contacts is moved in the direction of plane, and the other ends of the contacts and the connecting electrode body come into contact with a part of the opposite connecting electrode part to enter the electrically conducting state. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to a substrate inspection jig used when inspecting a substrate to be inspected. More specifically, the substrate reduces contact resistance between a contact of a substrate inspection jig and an electrode portion of the substrate inspection jig. The present invention relates to a substrate inspection jig having an electrode structure of an inspection jig.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In this specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, a wiring pattern provided on a circuit board must accurately transmit an electric signal to an electric / electronic component such as a semiconductor or a resistor such as an IC mounted on the circuit board. Provided in the wiring pattern to be inspected against the printed wiring board before mounting, the circuit wiring board on which the wiring pattern is formed on the liquid crystal panel or plasma display panel, or the wiring pattern formed on the substrate such as a semiconductor wafer The resistance value between the inspection points was measured, and the quality was judged.

  In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such continuity and short-circuit inspection, the measurement terminals are brought into contact with inspection points provided at two locations of the wiring pattern to be inspected, and a predetermined level of measurement current flows between the measurement terminals. Thus, the voltage value between the measurement terminals is measured, and the pass / fail judgment is made by comparing this voltage value with a predetermined threshold value.

However, in the board inspection jig used in such a method, the measurement terminals brought into contact with each of the two inspection points of the wiring pattern are commonly used for supplying the measurement current and measuring the voltage. In this case, the contact resistance between the measurement terminal and the inspection point affects the measurement voltage, and the measurement accuracy of the resistance value is lowered and the reliability of the inspection result is lowered.
Particularly, in recent years, the miniaturization of the wiring pattern provided on the circuit board has progressed, and the resistance value of the wiring pattern has decreased, and the influence of the contact resistance on the measured value has been a big problem. .

  In order to solve such a problem of contact resistance, a contact as disclosed in Patent Document 1 has been proposed. This contact has a substantially linear contact portion that can be brought into contact with the electrode to be measured substantially perpendicularly, and a part extending along the length direction of the contact portion is another contact portion. It is comprised with the material which has a thermal expansion coefficient different from a part. By being configured in this way, the contact part is bimetallic, so that when the contact part is brought into contact with the measurement target electrode substantially perpendicularly at a predetermined environmental temperature and overdrive is performed in that state, the measurement is performed. The contact portion is bent toward a portion made of a material having a small coefficient of thermal expansion due to the environmental temperature heat transmitted from the target electrode.

JP 2005-345129 A

However, even if the contact described in Patent Document 1 is used, it is only possible to make contact with the electrode portion perpendicularly, and from the viewpoint of contact stability, it has sufficient contact stability. Therefore, it cannot be said that the connection has a low contact resistance value.
In addition, the substrate inspection jig can be used tens of thousands to hundreds of thousands of times. For this reason, when the contact | inspection contact for board | substrate inspection was damaged or worn at the time of use, it was necessary to replace | exchange quickly and simply.

  The present invention has been made in view of such circumstances, and has excellent electrode maintainability and a substrate having an electrode structure that reduces the contact resistance between the contact of the substrate inspection jig and the electrode portion of the substrate inspection jig. Provide inspection jigs.

According to the first aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity between the substrate inspection apparatus main body and a plurality of substrate inspection points provided in the wiring pattern of the substrate to be inspected is provided. A substrate inspection jig for obtaining the substrate inspection jig, wherein the substrate inspection jig has ends that are electrically connected to both ends, and one end is pressed against one of the substrate inspection points. A plurality of rod-shaped contacts having conductivity and having an insulating portion on the periphery excluding the end, and holding the plurality of contacts, and guiding one end of the contact to the inspection point A contact holder having a first guide plate having a first guide hole and a second guide hole having a second guide hole for guiding the other end of the contact to the electrode portion of the substrate inspection apparatus; , And arranged to face the other end of each contact of the contact and A connecting electrode body having a connecting electrode portion connected to the device, wherein the first guide hole is formed to have a diameter smaller than the diameter of the insulating portion of the contact, and the second guide hole is The first guide plate and the second guide plate are formed to have a diameter larger than the diameter of the insulating portion of the contact, and the first guide plate and the second guide plate correspond to the first guide hole so that the contact can be attached and detached. An alignment state in which the second guide hole is aligned, and a holding state in which the second guide plate is moved from the aligned state in the plane direction of the second guide plate in order to hold the contact. When connecting the other end of the contactor and the connection electrode body, at least a part of the side peripheral surface in the vicinity of the other end is one of the connection electrode portions facing each other. Board inspection, which is electrically connected by contact with To provide a use jig.
According to a second aspect of the present invention, the connection electrode portion has a structure in which the other end portion of the contact element facing the connection electrode portion is accommodated therein, and the conductive state between the contact element and the connection electrode portion is provided. 2. The substrate inspection jig according to claim 1, wherein at least the other end portion of the contact is in contact with the inner surface of the connection electrode portion.
According to a third aspect of the present invention, the connection electrode portion has a cylindrical shape capable of loosely fitting at least a part of the other end portion of the contact element facing the connection electrode portion. Or the jig | tool for board | substrate inspection of 2 description is provided.
The invention according to claim 4 is characterized in that the boundary between the insulating portion of the contact and the other end is disposed inside the second guide hole. Ingredients.
According to a fifth aspect of the present invention, the contact holder is slid in the longitudinal direction of the contact so that the contact protrudes when the other of the contacts is in contact with the connection electrode portion. The board inspection jig according to claim 1, further comprising a protective part that moves.

According to the first aspect of the present invention, the first guide plate and the second guide plate are used so as to have a holding state in an aligned state in which the contact can be detached and held in a holding state. When exchanging the contacts, the first guide plate and the second guide plate can be easily exchanged by bringing them into alignment.
Further, when connecting the other end of the contact group and the connection electrode body, at least a part of the side peripheral surface in the vicinity of the other end of the contact is connected to a part of the connection electrode part facing this. Since the contact is brought into an electrically conductive state, the contact resistance value between the contact and the connection electrode portion can be reduced, and a substrate inspection jig having a stable contact resistance value regardless of the number of times of use is provided. To do.
According to the second aspect of the present invention, the contact state between the contact and the connection electrode portion is due to the contact between at least the other end of the contact and the inner surface of the connection electrode portion. Provided is a substrate inspection jig capable of increasing the area, reducing the contact resistance value, and having a stable contact resistance value regardless of the number of times of use.
According to the invention described in claim 3, since the connection electrode portion has a shape in which the contact can be loosely fitted, it is possible to prevent an excessive burden from being applied when the contact is inserted into and removed from the connection electrode portion. Can do.
In addition, since the connection electrode portion is formed in a cylindrical shape, a contact surface with which the contact contacts can be made uniformly, and the substrate inspection treatment has a stable contact resistance value regardless of which cylinder portion is contacted. Provide ingredients.
According to the invention of claim 4, when the first guide plate and the second guide plate are in alignment, the boundary between the insulating portion of the contact and the other end portion forms the side surface of the second guide hole. The contact with the second guide hole is engaged, and the contactor can be prevented from dropping or removing.
According to the invention described in claim 5, since the contact holder has a protection part for protecting the contact, the contact can be effectively protected when the contact is not in use. A substrate inspection jig capable of extending the service life is provided.

The best mode for carrying out the present invention will be described.
FIG. 1 shows an outline of a configuration in the case of using a substrate inspection jig according to the present invention. In FIG. 1, a connection having a plurality of contacts 101, a holding body 102 that holds the contacts 101 in a multi-needle shape, and a connection electrode portion that supports the holding body 102 and is conductive when in contact with the contact 101. An electrode body 103, an inspection signal processing unit 104, which is an inspection signal processing unit that processes an electrical signal to be detected, and a wire cable 105 that connects the inspection contact 101 and the inspection signal processing unit 104 are shown. The contact 101 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected, and the connection electrode body 103 is electrically connected by changing the pitch between the contact 101 and the inspection signal processing unit 104. .
The connection electrode body 103 has a connection electrode portion 106 that is electrically connected to the contact 101 on the arrangement side of the holding body 102. The present invention provides a connection resistance value having stability while being able to reduce the connection resistance value with the contact 101 by ingenuating the connection electrode portion 106.

A substrate inspection jig 1 according to an embodiment of the present invention includes a contact 2, a contact holder 3, and a connection electrode 4 (see FIG. 2). The connection electrode body 4 is connected to the inspection signal processing unit 104 as described above, but is omitted in FIG. FIG. 2 shows a state where the head 11 of the board inspection jig and the connection electrode body 4 are not connected.
The contact 2 has flexibility and conductivity, and is formed in a bar shape such as a needle shape or a long shape. One of the contacts 2 is in pressure contact with the inspection point of the substrate to be inspected, and the other is in contact with a connection electrode portion described later. For this reason, the contact 2 can transmit the electrical signal from the inspection signal processing unit 104 to the inspection point, and can transmit the electrical signal from the inspection point to the inspection signal processing unit 104.
Since this contact 2 has flexibility, it bends in a direction perpendicular to the major axis direction of the contact 2 in a space formed inside a contact holder 3 described later (buckling). Will be). For this reason, when the contact 2 is used, the contact 2 bends in response to a load from the inspection point of the substrate to be inspected or the connection electrode portion, and this bending causes a pressing force to each contact portion.

The contact 2 is not particularly limited as long as it is formed in the shape as described above, but it can also be formed as in one embodiment as shown in FIG.
The contact 2 shown in FIG. 3 is formed on an elongated rod-like member 21 having both ends tapered, as shown in FIG. The tapered shape may be a sharp shape as shown in FIG. 3A or may be a spherical shape.
Examples of the rod-shaped member 21 include stainless steel, beryllium copper (BeCu), and tungsten (W). However, the rod-shaped member 21 is not particularly limited and may be any conductive material.
The rod-shaped member 21 is preferably formed in a cylindrical or columnar shape so that a uniform load is applied to a contact area that contacts a connection electrode portion to be described later, but is not particularly limited.
The length and thickness of the rod-shaped member 21 are not particularly limited, and are appropriately set according to the pitch of the wiring pattern formed on the substrate to be inspected and the size of the substrate to be inspected.

FIG. 3B shows a state in which the rod-shaped member 21 is accommodated in the cylindrical member 22. The cylindrical member 22 has flexibility and conductivity. A rod-shaped member 21 is inserted into the tubular member 22. In FIG. 3B, when one end 22a that is one end of the cylindrical member 22 is compared with the other end 22b that is the other end, the length of the rod-shaped member 21 that protrudes from the one end 22a protrudes from the other end 22b. It is set so as to be longer than the length of the rod-shaped member 21 to be performed.
In such a case, the one end 22a is in contact with the connection electrode portion, and the other end 22b is in contact with the inspection point of the substrate to be inspected. By changing the length of the arrangement in this way, the contact area where the bar-shaped member 21 contacts the connection electrode portion can be increased, and the length of the bar-shaped member 21 protruding from the other end 22b is set short. Therefore, when the contactor contacts an inspection point such as a bump, the cylindrical member 22 can serve as a stopper that prevents the rod-shaped member 21 from penetrating into the inspection point more than necessary, and is spherical. It is possible to make stable contact with inspection points such as bumps. Furthermore, contact with the inspection point by the rod-shaped member 21 and the cylindrical member 22 can be made possible without depending on the workability of the tip shape of the rod-shaped member 21.
The protruding amount of the rod-shaped member 21 on the other end 22b side can be set shorter than the one end 22a as described above, and at the same time, is set as an amount (length) that penetrates the inspection point as described above. You can also
The cylindrical member 22 is not particularly limited as long as it can accommodate the rod-shaped member 21 and can be electrically connected to the rod-shaped member 21.

The cylindrical member 22 and the rod-shaped member 21 are electrically connected to each other. For this reason, it forms by performing electrolytic plating or electroless plating on the whole in the state (state shown in Drawing 3 (b)) where rod-shaped member 21 was inserted in cylindrical member 22.
As another method, by providing a plurality of projecting portions (not shown) inside the cylindrical member 22, the cylindrical member 22 has a caulking structure that presses the rod-shaped member 21, thereby making contact and electrical conduction. be able to.

In FIG. 3C, the rod-shaped member 21 and the cylindrical member 22 are integrated, and an insulating portion 23 is provided on the surface of the cylindrical member 22. The place where the insulating portion 23 is formed is formed at a place other than the one end and the other end of the contact 2 as shown in FIG. Further, the step 24 formed by the insulating portion 23 and the cylindrical member 22 is used as a locking portion when the contact 2 is disposed on the contact holder 3 described later.
The insulating portion 23 prevents a short circuit even when the contact 2 comes into contact with the adjacent contact 2 when the contact 2 is bent.
The insulating portion 23 can be made of polyurethane, but is not particularly limited.
In the above description, the case where the contact 2 is configured by using the rod-shaped member 21, the cylindrical member 22, and the insulating portion 23 has been described. However, a contact composed of the rod-shaped member 21 and the insulating portion 23 may be used. However, the structure is not limited to these.
In this specification, a part of the contact 2 accommodated in the connection electrode portion 41 will be described as 2A. However, the accommodating portion 2A of the contact 2 is the contact 2 in which the insulating portion 23 is not formed. It becomes one end of. For example, it is the part (the part of length L) of the contact 2 from the tip of the contact 2 to the step 24. It is not necessary for all of the portion L to be accommodated in the connection electrode portion, but it is preferable that as many portions as possible be accommodated.
The length L of this portion is appropriately set depending on the length accommodated in the connection electrode portion, but it may be about 2 to 5 mm in order to achieve a sufficiently stable contact state (conduction state). preferable.
This part of the contact 2 corresponds to the other end, and at least a part of the side peripheral surface of this part comes into contact with the connection electrode part 41.

The contact holder 3 holds a plurality of contacts 2 (contact group) composed of a plurality of contacts 2. As shown in FIG. 2, the contact holder 3 includes a first guide plate 31 and a second guide plate 32 in order to hold the plurality of contacts 2.
In the contact holder 3 shown in FIG. 2, the first guide plate 31 is disposed on the back side of the paper, the second guide plate 32 is disposed on the front side of the paper, and the first guide plate 31 has the tip of the contact 2 disposed thereon. Guided to the inspection point, the second holding body 32 guides the other end of the contact 2 to the connection electrode portion 4.
The first guide plate 31 has a first guide hole 33 for guiding a predetermined contact 2 to a predetermined inspection point. The first guide hole 33 is formed so as to be larger than the outer diameter of the rod-shaped member 21 and the cylindrical member 22 of the contact 2 and smaller than the diameter of the insulating portion 23. By forming in this way, the contact 2 is prevented from coming out of the first guide hole 33 of the first guide plate 31.
The second guide hole 32 has a second guide hole 34 for guiding the predetermined contact 2 to the predetermined connection electrode portion. The second guide hole 32 is formed so as to be larger than the outer diameter of the rod-like member 21 and the cylindrical member 22 of the contact 2 and further larger than the diameter of the insulating portion 23. By forming in this way, the contact 2 can be inserted into the contact terminal holding part 3 from the second guide hole 32.
For this reason, when the contactor 2 is inserted and removed, for example, the second guide plate 32 side is directed upward, the first guide plate 31 is directed downward, and the second guide plate 32 has a second guide hole 34. The contact 2 is inserted and removed.

The 1st guide plate 31 and the 2nd guide plate 32 are arrange | positioned with the predetermined space | interval through the support | pillar 35a. For this reason, a space is formed between the first guide plate 31 and the second guide plate 32 by the support 35a, and the contact 2 can be bent in this space.
The length of the space by the support 35a is appropriately set by the user.
In addition, the support | pillar shown with the code | symbol 35b is shown by the figure of FIG. This support 35b is a support for holding three plate members of the second guide plate 32 described later.

  In FIG. 2, the first guide plate 31 is formed of three plate members. These plate members are provided as plate members for forming the first guide holes 33 and plate members for forming screw holes for fixing to the support columns 35a. The number of these plate members is not particularly limited, and may be one or two or three or more as long as it has at least the above function.

FIG. 3 is an enlarged partial cross-sectional view of the first guide plate 31 and the contact 2.
As shown in FIG. 3, the first guide plate 31 is formed using three outer plate members 311, an intermediate plate member 312 and an inner plate member 313. The first guide hole 33 includes an outer guide hole 331 of the outer plate member 311, an inner guide hole 332 of the middle plate member 312, and an inner guide hole 333 of the inner plate member 313.
The outer plate member 311 is arranged closest to the substrate to be inspected, and is arranged in this order with the middle plate member 312 and the inner plate member 313.

The diameter of the first guide hole 33 is formed so as to be larger than the width (diameter) of the rod-shaped member 21 or the cylindrical member 22 of the contact 2 and smaller than the diameter of the insulating portion 23. For this reason, it arrange | positions so that only the front-end | tip conduction | electrical_connection part of the contactor 2 may protrude from the outer side board member 311. FIG.
In FIG. 4, the first small-diameter inner guide hole 333 b of the first inner guide hole 333 of the inner plate member 313 is formed to have the above-described diameter.
In FIG. 3, a large diameter guide hole and a small diameter guide hole are formed in each plate member forming the first guide portion 31, but the guide hole that is located outside the outer plate member 311 is the first. The guide hole formed as the small-diameter guide hole 331a and disposed at the innermost position is a guide hole (first small-diameter guide hole 33b) having the function as described above.
Note that the boundary 2 b between the conductive portion and the insulating portion of the contact 2 is disposed inside the first guide hole 33.

As shown in FIG. 4, the first guide hole 33 is formed from the outside (upper side of the drawing) from the small diameter guide hole 331a, the large diameter guide hole 331b, the large diameter guide hole 332a, the small diameter guide hole 332b, the large diameter guide hole 333a, and the small diameter. The guide holes 333b are arranged in this order.
Although this order is not limited, it is necessary to contact the inspection point of the substrate with high accuracy, and the contact is prevented from being worn because the contact is in contact with the plate member. It is preferable to consider this.

In FIG. 2, the second guide plate 32 is formed of three plate members. These plate members are provided as a plate member for forming the second guide hole 34 and a plate member for forming a screw hole for fixing the column 35a. The number of these plate members is not particularly limited, and may be one, two, or three or more as long as it has at least the above function.
FIG. 5 is a schematic enlarged cross-sectional view showing the positional relationship between the second guide plate 32 and the contact 2.
In FIG. 5, the second guide plate 32 includes an inner guide plate 321, an intermediate guide plate 322, and an outer guide plate 323.
The second guide plate 32 includes an inner guide plate 321, an inner guide plate 322, and an outer guide plate 323. The inner guide plate 321 is formed with holes 341 including all of the plurality of contacts 2, and the inner guide plate 321 is used to hold the support column 35 connected to the first guide plate 31.
The middle guide plate 322 is formed to slide slightly in the plane direction of the plate member than the inner guide plate 321. The middle guide plate 322 has a small diameter guide hole 342a and a large diameter guide hole 342b.
The outer guide plate 323 is provided with a guide hole for guiding the end portion of the contact 2 to the connection electrode portion.
The diameter of the second guide hole 34 is larger than that of the insulating portion 23 of the contact 2. For this reason, the contact 2 can be inserted and removed through the second guide hole 34.

It is preferable that the boundary 2b between the rod-shaped member 21 and the insulating portion 23, which is the other end of the contact 2, be disposed on the inner side of the second guide hole 34. By disposing the boundary 2b on the inner side of the second guide hole 34, when a second guide plate 32 described later slides, the boundary 2b engages with the surface of the second guide plate 32 of the second guide hole 34. . For this reason, the contact 2 is firmly held.
FIG. 5 shows a case where the boundary 2b of the contact 2 exists in the large-diameter guide hole 343a of the outer guide plate 343, and is engaged with a step portion between the small-diameter guide hole 343b and the large-diameter guide hole 343a. In FIG. 5, the guide hole is arranged so that a step is generated by providing a hole having a different size and the boundary 2 b of the contact 2 is engaged, but it is not necessary to provide a step.

As described above, the second guide plate 32 is formed of a plurality of plate members, and these plate members are arranged so as to be shifted by a predetermined length in the direction perpendicular to the contact 2 (left and right in FIG. 2). Is done.
Thus, the 2nd guide hole 34 will be formed inclining by arrange | positioning several plate members gradually shifting | deviating. For this reason, as described above, it is engaged with the second guide hole 34 formed in the second guide plate 32.
Furthermore, when the contact 2 is held by the contact holder 3, the contact 2 is lightly bent, and contact resistance with the plate member is generated, so that the contact 2 has stability. Will be retained.
In FIG. 5, the inner guide plate 341 is fixed to the first guide plate 31 without moving in the plane direction. The middle guide plate 342 slides slightly in the plane direction of the second guide plate 32. Further, the outer guide plate 343 slides slightly in the plane direction than the middle guide plate 342. That is, the outer guide hole 343 slides larger than the first guide hole 33.

The second guide plate 32 slides in the long axis direction of the contact 2 such that the contact 2 protrudes toward the connection electrode portion side of the contact 2 when the contact 2 is brought into contact with the connection electrode portion. A protection unit 36 is provided.
As shown in FIG. 2, the protection portion 36 is disposed on the connection electrode portion side of the second guide plate 32, and a spring mechanism 37 is provided so as to slide in the long axis direction of the contact 2. .
The protection part 36 is formed of a plate member having a predetermined thickness, and protects the tip part of the contactor 2 (the part in contact with the connection electrode part) when the substrate inspection jig is not used.
For example, FIG. 6 shows the operation of this protection unit, FIG. 6 (a) shows a state when the substrate inspection jig is not used, and FIG. 6 (b) shows the substrate inspection jig. The state at the time of use is shown.
FIG. 6A shows a state where the contact 2 and the contact holder 3 of the board inspection jig are not connected to the connection electrode body 4. In this state, the connection electrode portion of the contact 2 is moved to. The contacting end is protected by a protection unit 36. In addition, although the state accommodated in the inside of the protection part 36 is shown in drawing, the front-end | tip of the contactor 2 may protrude from the protection part 36 slightly.
The protection unit 36 includes the same amount of slide mechanism as the second guide plate 32 or the outer plate member of the second guide plate 32. For this reason, the hole of the 2nd guide hole 34 and the protection part 36 is arrange | positioned in the same position in planar view.

FIG. 6B shows a state in which the contact 2 and the contact holder 3 of the board inspection jig are connected to the connection electrode body 4. In FIG. 6B, the connection electrode body 4 is omitted. In this state, the protection portion 36 slides and the contact 2 protrudes, and the protruded contact 2 comes into contact with the connection electrode portion.
In this case, the protection unit 36 comes into contact with the lower end of the second guide plate 32 and is biased by the spring of the spring mechanism 37. In addition, the protection part 36 tries to return to the position shown in FIG. 6A. In the state shown in FIG. 6B, the connection electrode body 4 and the protection part 36, and the protection part 36 and the second guide plate 32 are in contact with each other. It will be in contact.
In FIG. 2, two protrusions 38 are provided for aligning the contact holder 3 and the connection electrode body 4 described later.

The connection electrode body 4 includes a connection electrode portion 41 that supports the contact holder 3 and accommodates part of the contact 2 therein.
The connection electrode portion 41 is formed in a hole shape extending from the surface of the connection electrode body 4 to the connection electrode body 4 in order to accommodate the contact 2 inside. By forming the connection electrode portion 41 in the shape of a hole extending inside the connection electrode body 4 in this way, a part of the contact 2 can be reliably accommodated inside the connection electrode portion 41. In this case, a part of the contact 2 can be brought into contact with the inner surface by forming an electrode portion on the inner surface of the connection electrode portion 41.
The connection electrode portion 41 is connected to the conductive wire 42. The conducting wire 42 is connected to the inspection signal processing unit as described above.

  It is preferable that the connection electrode part 41 has a shape in which the contact 2 can be loosely fitted. Since the connection electrode portion 41 can loosely fit the contact 2, when the contact 2 is accommodated in the connection electrode portion 41 or when the contact 2 is removed from the connection electrode portion 41, the contact 2 and the connection electrode portion This is because the frictional resistance with 41 can be reduced and can be easily extracted.

The connection electrode part 41 accommodates a part of the contact 2 inside, and uses the inner side surface of the connection electrode part 41 as an electrode part. For this reason, the connection electrode 41 can be formed in a conductive cylinder. In this case, the cylindrical connection electrode part 41 accommodates the contact 2 inside, and the cylindrical inner side surface functions as an electrode part.
In addition, this connection electrode part 41 arrange | positions a pipe | tube (pipe) so that it may become flush with the surface of the connection electrode body 4. FIG. By arranging in this way, the surface of the connection electrode body 4 is flush, and when the second guide plate 32 and the protection part 36 are in contact with the connection electrode body 4, they are perpendicular to the surface of the connection electrode body 4. When the contactor 2 is pressed and bent in use, a uniform load can be applied to any contactor 2.

Since the contact electrode 2 enters and exits the connection electrode portion 41 depending on when the connection electrode portion 41 is used or not used, the length direction of the contact portion 2 is used to ensure contact with the connection electrode portion 41. It is preferable to arrange or form the connection electrode portions 41 so that the length directions of the connection electrode portions 41 intersect (relatively intersect).
As a specific example, for example, the connection electrode portion 41 is formed to be inclined or curved with respect to the long axis of the contact 2.
By forming the connection electrode portion 41 in this way, when the contact 2 is accommodated inside the connection electrode portion 41, the contact 2 is accommodated while rubbing the inner surface of the connection electrode portion 41. Can establish a contact state with the connection electrode part 41 reliably. In particular, by configuring in this way, it is possible to break the oxide film formed on the electrode part on the inner surface and the surface of the contact 2.

FIG. 7 shows an embodiment of the connection electrode portion. The connection electrode part 41 shown in FIG. 7A is formed along the thickness direction of the connection electrode body 4. Even in such a case, when the contact 2 as described above is inclined, the contact 2 contacts the inner surface of the connection electrode portion 41 while rubbing.
FIG. 7B shows a case where the connection electrode portion 41 is formed at an angle with respect to the surface of the connection electrode body 4. In this case, even if the contact 2 is accommodated on the surface of the connection electrode body 4 in a substantially right angle direction, it comes into contact with rubbing the inner surface of the connection electrode portion 41.
FIG.7 (c) shows the case where the connection electrode part 41 is formed in reverse letter shape. In this case, the contact 2 is rubbed in the same manner as in FIG. 7B and accommodated in the inside, and the connection electrode portion 41 forms a slope in the opposite direction at the square-shaped apex portion. In this apex portion, the contact 2 reliably comes into contact with the inner surface.
FIG. 7D shows a case where the connection electrode portion 41 is formed to be curved. In this case, when the contact 2 is accommodated, the contact is made while rubbing the surface while curving along the inner surface of the connection electrode portion 41. Further, in this case, since the load on the contact 2 is lower than that in FIG. 7C, the contact 2 can be easily inserted and removed.
The shape of the connection electrode portion 41 shown in FIG. 7 is not limited to these, and is formed so that the accommodation direction of the connection electrode portion 41 intersects the entrance / exit direction of the contact 2 Can be set to By forming the connection electrode portion 41 in this way, the contact 2 is surely brought into contact with the inner surface of the connection electrode portion 41 and is accommodated while rubbing the inner surface when being accommodated. Therefore, the contact 2 having a low contact resistance value and a high stability of the contact resistance value can be connected to the connection electrode portion 41.

As another specific example, as shown in FIG. 8, the tip 2 </ b> A of the contact 2 accommodated in the connection electrode portion 41 is bent with respect to the long axis of the contact 2.
By bending the tip 2A of the contact 2 in this way, when the tip 2A of the contact 2 is accommodated in the connection electrode portion 41, the inner surface of the connection electrode portion 41 is rubbed and contacted. Become.
The contact 2 shown in FIG. 8 is bent from the central axis of the contact 2 so that the tip 2A of the contact 2 has a width W. The width W is preferably formed to be approximately the same as the inner diameter of the connection electrode portion 41. This is because the width W is formed to be substantially the same as the inner diameter of the connection electrode portion 41, so that the inner surface can be reliably contacted and the amount of bending (width) can be reduced.

FIG. 9 shows a state in which the substrate inspection jig according to the present invention is used.
In FIG. 9, the accommodating portions 2 </ b> A of the plurality of contacts 2 are accommodated inside the connection electrode portion 41. Although not shown in FIG. 9, when the housing 2 </ b> A of the contact 2 is bent or the contact 2 is inclined, the contact 2 is placed in the connection electrode portion 41. When being accommodated, the interior side surface is rubbed and brought into contact. In FIG. 9, the contact 2 is positioned approximately at the center of the connection electrode portion 41 for convenience.

When the contact 2 is accommodated in the connection electrode portion 41, the contact 2 holding body 3 and the connection electrode body 4 are relatively moved, so that the accommodation portion 2 </ b> A of the contact 2 is reliably connected to the inside of the connection electrode portion 41. It is preferable to press the surface.
It is shown that the contact holder 3 and the connection electrode body 4 are moved in the direction perpendicular to the long axis of the contact 2 to be surely brought into contact with the inner surface of the connection electrode portion 41. Thus, by tilting the contact holder 3 and / or the connection electrode body 4 with respect to the entry / exit direction of the contact 2, the housing 2 </ b> A of the contact 2 is more stable to the inner surface of the connection electrode 41. Can be brought into contact with each other.

FIG. 10 shows an embodiment of the sliding portion of the connection electrode body. The sliding portion shown in FIG. 10 includes the connection electrode body 4 having three first plate members 43, second plate members 44, and fourth plate members 45. A connection electrode portion 41 is formed so as to penetrate these three plate members. The first plate member 43 and the third plate member 45 are fixed members, and have a mechanism in which the second plate member 44 slides. For this reason, as shown in FIG. 10B, the second plate member 44 slides and presses the connection electrode part 41 from the side surface side, and the connection electrode part 41 becomes a curved shape and contacts 2 The housing portion 2A is pressed from the side surface to come into contact.
The connection electrode body 4 shown in FIG. 10 has been described using three plate members. However, the number of plate members is not limited to three, and a sliding portion may be formed using a plurality of plate members.
In FIG. 10, for convenience, the contact 2 is shown at a position substantially parallel to the hole direction of the connection electrode portion 41.

FIG. 11 is a schematic configuration diagram illustrating the electrode terminals of the connection electrode portion.
The electrode terminals of the connection electrode portion 41 shown in FIG. 11A are denoted by reference numerals 421 and 422. The electrode terminals 421 and 422 are each formed of a conducting wire, and each conducting wire is connected to the substrate inspection apparatus main body. For this reason, two terminals will be provided from the connection electrode part 41, and a four-terminal measurement can be performed.
By using this configuration, the contact resistance on the electrode side is extremely small and / or stable. For this reason, if only the contact resistance on the inspection point side is taken into consideration, a measurement result substantially the same as that obtained when two terminals are brought into direct contact with the inspection point can be obtained.

The electrode terminal 42 of the connection electrode part 41 shown by FIG.11 (b) is formed by using one conducting wire.
In the electrode terminal 42, one end of a trident-shaped conductive material is electrically connected to the connection electrode portion 41, and the remaining terminals are electrically connected to the substrate inspection apparatus main body as two electrode terminals 421 and 422.
When such a configuration is used, accurate measurement can be performed by correcting the resistance value by detecting the resistance value by the distance d from the connection electrode portion 41 to the three-pronged portion. .

As shown in FIG. 11, four terminal measurement can be performed by providing two electrode terminals from the connection electrode portion 41. In this case, the four-terminal measurement is normally performed using two electrode terminals for the point to be inspected. However, in the case of the electrode structure of the present invention (connection electrode part structure), the contact resistance between the contact 2 and the connection electrode part. Is extremely small or stable, so that stable four-terminal measurement can be performed.
It is description of the structure of the jig | tool for board | substrate inspection which concerns on this invention.

Next, the case where the contact 2 is attached to the board inspection jig of the present invention will be described.
FIG. 12 shows a process showing a case where a contact is attached.
First, the first guide hole 33 and the second guide hole 34 are arranged so as to be aligned. At this time, the protection unit 36 is kept in contact with the second guide plate 32.
In the case of the embodiment shown in FIG. 12, the first guide holes 33 and the second guide holes 34 are arranged in a line in the vertical direction (FIG. 12A).
In this case, the second guide plate 32 is disposed on the upper side, and the first guide plate 31 is disposed on the lower side. Although this arrangement position is not particularly limited, it is preferable that the arrangement is performed in this manner so that the contact 2 does not fall out of the first guide hole 33.

Next, the contact 2 is inserted from the second guide hole 34 (see FIG. 12B).
In this case, as described above, since the first guide hole 33 is formed smaller than the diameter of the insulating portion 23 of the contact 2, the contact 2 does not fall off.
When the contact 2 is inserted, the second guide plate 32 and the protection part 36 are simultaneously slid.
At this time, the insulating portion 23 of the contact 2 is engaged with the second guide hole 34 of the second guide plate 32 (see FIG. 5).
That is, the contact 2 is bent by sliding the second guide plate 32 and the protection portion 36. Since the contact 2 is flexible, the first guide that forms the first guide hole 33 is formed. The side portion of the plate 31 and the side portion (surface portion) of the second guide plate 32 forming the second guide hole 34 are engaged.
At this time, the amount of sliding is larger for the outer plate member of the second guide plate 32 as described above.

Next, the protection part 36 is protruded from the second guide plate 32 (see FIG. 12D).
By projecting the protection part 36, the end of the contact 2 is protected.
In this way, the contact 2 can be attached, and when it is removed, the reverse procedure is performed.

Next, an example of a substrate inspection jig according to the present invention will be described.
FIG. 13 shows an embodiment of a substrate inspection jig implemented in the present invention.
In the contact 2 shown in this embodiment, a rod-shaped member 21 having a length of 30 mm and a diameter of 90 μm is formed using tungsten as a material, and the insulating portion 23 is formed so that the length of the accommodating portion 2A is 2 mm.
The connection electrode portion 41 is a conductive pipe having an inner diameter of 95 μm and an outer diameter of 125 μm, and the inner surface of this pipe is subjected to gold plating.
In one embodiment shown in FIG. 13, the connection electrode body 4 is formed of a first plate-like portion 43, a second plate-like portion 44, a third plate-like portion 45 and a fourth plate-like portion 46, and A sliding portion 47 for moving the two plate-like portion 44 in the lateral direction is provided. The first plate-like portion 43 and the third plate-like portion 45 are fixed members, and the fourth plate-like portion 46 is used as a base for the substrate inspection jig 1 ′.
The connection electrode part 41 is formed so as to penetrate the first to third plate-like parts.
The sliding part 47 can move the second plate-like part 44 to the left and right. The sliding portion 47 has a pair of left and right screw mechanisms, and the position of the second plate-like portion 44 can be adjusted by adjusting the left and right screws.
In FIG. 13A, a space is formed between the second guide plate 32 and the protection part 36, and is in a state of not being used.

FIG. 13B shows a state where the substrate inspection jig 1 ′ is used. At this time, the second guide plate 32 and the protection part 36 come into contact with each other, and the accommodation part 2 </ b> A of the contact 2 is accommodated in the connection electrode part 41. And the accommodating part 2A of this contactor 2 will be in the state which contacted, rubbing the inner surface of the connection electrode part 41, and can establish a conduction | electrical_connection state.
Moreover, in this board | substrate test | inspection jig | tool 1 ', it has the sliding part 47 on either side, and after the accommodating part 2A of the contactor 2 is accommodated in the connection electrode part 41, a connection electrode is adjusted by adjusting a screw. The second plate-like portion 44 of the body 4 is moved in the lateral direction. At this time, the second plate-like portion 44 portion of the connection electrode portion 41 is in a curved state as the second plate-like portion 44 moves, and the inner surface of the connection electrode portion 41 and the contact 2 are pressed. .
In this embodiment, the contact 2 is also inclined and held by the contact holder 3, and the connection electrode body 4 has the sliding portion 47, so that the contact 2 is on the inner surface of the connection electrode portion 41. Can be housed while being rubbed and contacted stably to establish a conduction state.

The outline of the structure in the case of using the jig for substrate inspection concerning the present invention is shown. The schematic structure of the jig | tool for board | substrate inspection which concerns on this invention is shown, and the position structure of a contactor, a contactor holding body, and a connection electrode body is shown. 1 shows one embodiment of a contact. (A) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, (c) is a rod-shaped member, a cylindrical member, and an insulating part. It is a schematic sectional drawing which shows the structure by the side of the test | inspection point of the jig | tool for board | substrate inspection which concerns on this invention. It is a schematic sectional drawing which shows the structure by the side of the connection electrode of the jig | tool for board | substrate inspection which concerns on this invention. The state which uses the jig | tool for board | substrate inspection which concerns on this invention is shown. (A)-(d) shows one Embodiment of a connection electrode part, respectively. 3 shows another embodiment of a contact. It is a schematic block diagram which shows the use condition of the board | substrate inspection jig which concerns on this invention. The other embodiment of the contactor and connection electrode part which concern on this invention is shown. The further another embodiment of the contactor and contactor holding body which concern on this invention is shown. The process for mounting | wearing the contact of the jig | tool for a board | substrate inspection which concerns on this invention is shown. 1 shows an embodiment of a substrate inspection jig implemented in the present invention.

Explanation of symbols

1 ... Jig for substrate inspection 1 '... Jig for substrate inspection (another embodiment)
2... Contact 2A... Housing 3... Contact holder 31... First guide plate 32. Electrode body 41... Connection electrode portion 42... Electrode terminal

Claims (5)

A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus main body and a plurality of substrate inspection points provided in a wiring pattern of the inspection substrate in order to inspect the electrical characteristics of the inspection substrate. Because
The substrate inspection jig is
A rod-like shape having an end for electrical continuity at both ends, one end having a conductivity pressed against one of the board inspection points, and an insulating portion on the periphery except for the end A plurality of contacts;
A first guide plate having a first guide hole for holding the plurality of contacts and guiding one end of the contact to the inspection point, and the other end of the contact as the substrate inspection apparatus A contact holder holding a second guide hole having a second guide hole for guiding to the electrode portion of
A contact electrode body provided with a connection electrode portion disposed opposite to the other end of each contact of the contact and connected to the substrate inspection apparatus;
The first guide hole is formed to have a diameter smaller than the diameter of the insulating portion of the contact,
The second guide hole is formed to have a diameter larger than the diameter of the insulating portion of the contact,
The first guide plate and the second guide plate are
An alignment state in which the first guide hole and the corresponding second guide hole are aligned in order to allow the contactor to be detached; and
A holding state in which the second guide plate moves in the planar direction of the second guide plate from the aligned state in order to hold the contact;
When connecting the other end of the contact and the connection electrode body, at least a part of the side peripheral surface in the vicinity of the other end is a part of the connection electrode that faces the other end. A substrate inspection jig which is brought into an electrically conductive state by contact with the substrate.   The connection electrode portion has a structure in which the other end portion of the contact member facing the contact electrode portion is accommodated therein, and the conductive state between the contact member and the connection electrode portion is at least the other of the contact members. The substrate inspection jig according to claim 1, wherein the substrate inspection jig is brought into contact with an inner surface of the connection electrode portion.   3. The substrate inspection treatment according to claim 1, wherein the connection electrode portion has a cylindrical shape capable of loosely fitting at least a part of the other end of the contact element facing the connection electrode portion. Ingredients.   The board inspection jig according to claim 1, wherein a boundary between the insulating portion of the contact and the other end portion is disposed inside the second guide hole.   The contact holder includes a protective portion that slides in the long axis direction of the contact so that the contact protrudes when the other of the contacts is brought into contact with the connection electrode portion. The substrate inspection jig according to claim 1.

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