CN101900748A - Inspection fixture - Google Patents
Inspection fixture Download PDFInfo
- Publication number
- CN101900748A CN101900748A CN2010101940232A CN201010194023A CN101900748A CN 101900748 A CN101900748 A CN 101900748A CN 2010101940232 A CN2010101940232 A CN 2010101940232A CN 201010194023 A CN201010194023 A CN 201010194023A CN 101900748 A CN101900748 A CN 101900748A
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- China
- Prior art keywords
- cylindrical shell
- inspection
- contact
- pars contractilis
- anchor clamps
- Prior art date
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Links
- 238000007689 inspection Methods 0.000 title claims abstract description 50
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 23
- 238000012360 testing method Methods 0.000 claims description 15
- 229910052759 nickel Inorganic materials 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 238000002788 crimping Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 17
- 230000010485 coping Effects 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 230000009975 flexible effect Effects 0.000 description 4
- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012797 qualification Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 235000019994 cava Nutrition 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The present invention provides an inspection fixture, capable of coping smallness and complication of a substrate, and having a simplification structure that the number of members is reduced. The inspection fixture, connecting an inspection body of an object to be inspected and an inspection device is characterized in that a contact includes an external cylinder having open parts on two ends, and an internal cylinder arranged on inner side of the external cylinder and projecting respectively from two ends of the external cylinder; the internal cylinder includes a first cylindrical part contacted with inspection points, a first telescopic part extending in a length direction of the internal cylinder, a second cylindrical part which end is conjoined to an electrode part, a second telescopic part extending in a length direction of the contact, and a third cylindrical part for communicating and connecting the first telescopic part and the second telescopic part; the first cylindrical part, the telescopic part, the third cylindrical part, the second telescopic part and the second cylindrical part are formed by a cylinder, and the third cylindrical part is provided with a connection part for fixing the external cylinder and the internal cylinder.
Description
Technical field
The present invention relates to be set in advance in the inspection anchor clamps that checkpoint and the testing fixture of implementing this inspection in the inspection object portion of checked property are electrically connected.
Background technology
Inspection anchor clamps of the present invention, for the inspection object portion that checked property had, from testing fixture regulation is checked position supply capability or electric signal, and from checking object portion detection electric signal, can detect the electrical specification of checking object portion thus, perhaps move test.
This checked property can list the semiconductor device of various substrates, semiconductor wafer or semi-conductor chip, CSP (Chip size package) etc. such as the base plate for packaging of battery lead plate that for example printed circuit board, flexible base, board, ceramic multilayer circuit board, LCD or plasma display use and semiconductor-sealing-purpose or membrane type carrier.
In this manual, the checked property that these are above-mentioned is referred to as " checked property ", and the inspection object portion that is formed on checked property is called " inspection portion ".
In the past, on circuit substrate, be formed with a plurality of wirings as an embodiment of checked property.This wiring is formed for supply capability or flows through electric signal, makes electric, the electronic unit of lift-launch on circuit substrate have the function of expectation.Therefore, the bad meeting of connecting up causes the action of circuit substrate bad.
In order to address this problem, the invention that whether good a plurality of judgements be formed on the object portion of wiring of checked properties such as circuit substrate, semiconductor device testing fixture was proposed once.
Whether this testing fixture in order well to judge formed wiring on the substrate as checked property for example, use have be set in advance in wiring on the inspection of a plurality of probes (contact) of being connected respectively of a plurality of checkpoints implement inspection with anchor clamps.
This inspection is crimped on checkpoint in the wiring with an end of the contact of anchor clamps, and its other end is crimped on the electrode part that is electrically connected with base board checking device.So, check by this and use anchor clamps, supply with electric current, the voltage of the electrical specification that is used to measure wiring from base board checking device, and send from the electric signal that connects up to base board checking device.
In recent years, because development of technology, semiconductor device diminishes, substrate diminishes, and the wiring on the substrate also forms more tinyly thereupon and be complicated.Along with cloth tinyization of alignment and the complicated development of this substrate, check also to be required the graph thinning of contact own, narrow and smallization of contact pitch, simplification with the contact that anchor clamps had.
For example, with in the anchor clamps, utilize the contact that uses cartridge in patent documentation 1 disclosed inspection, this contact forms the slit with spring function., the contact of tubular is inserted into has the holding member that is used for guiding the hole portion that keeps this contact with in the anchor clamps in the inspection of this patent documentation 1, keep contact by the substantial middle portion of this hole portion.
Yet, with in the anchor clamps, in order to keep long contact, and have to form slotted hole portion in the disclosed inspection of patent documentation 1, existing has increased the problem of making the required expense of holding member.Especially in order to tackle graph thinning, narrow and smallization of spacing, need to form slot portion, have the high problem of cost.
[patent documentation 1] Japanese kokai publication hei 10-288626 communique
Summary of the invention
The invention provides a kind of tinyization that can tackle substrate and complicated, and be endowed the inspection anchor clamps of the structure that components number lowers and oversimplify.
Technical scheme 4 described inventions provide a kind of inspection anchor clamps on each the basis in technical scheme 1 to 3, it is characterized in that the external diameter of above-mentioned outside cylindrical shell forms below the 250 μ m.
Technical scheme 6 described inventions provide a kind of inspection anchor clamps on the basis of technical scheme 1, it is characterized in that, above-mentioned inspection be installed in the contact of anchor clamps this inspection with anchor clamps on and when not being used, above-mentioned first pars contractilis is that nature is long, above-mentioned second pars contractilis is in application of force state.
According to the present invention, a kind of tinyization of tackling substrate and complicated can be provided, and possess the inspection anchor clamps of the simplification structure that components number lowers.
Description of drawings
Fig. 1 is the simple pie graph of expression inspection involved in the present invention with an embodiment of anchor clamps.
Fig. 2 illustrates the simple pie graph of contact involved in the present invention one embodiment, (a) sectional view of the inboard cylindrical shell of expression, (b) ground plan of the inboard cylindrical shell of expression, (c) sectional view of expression outside cylindrical shell, (d) ground plan of expression outside cylindrical shell.
Fig. 3 illustrates the simple pie graph of contact of the present invention, represents that inboard cylindrical shell is installed in the sectional view of the state of outside cylindrical shell.
Fig. 4 is a pie graph of representing contact of the present invention is installed in the state that keeps body, represents first plate-shaped member and second plate-shaped member with the cross section, with the installation site of explanation contact.
Fig. 5 is the pie graph of expression inspection of the present invention with anchor clamps, and the state that contact is installed on electrode part is shown, and for convenience of explanation, with the cross section maintenance body and electrode body is shown, and is represented by dotted lines the inboard cylindrical shell of contact and the inwall of outside cylindrical shell.
Symbol description is as follows
1... check and use anchor clamps; 2... contact; 2a... inboard cylindrical shell; 2a1... first portion; 2a2... second portion; 2a3... the 3rd portion; 2a4... first pars contractilis; 2a5... second pars contractilis; 2b... outside cylindrical shell; 2b3... connecting portion; 3... maintenance body; 31... first plate-shaped member; 32... second plate-shaped member; 4... electrode body; 41... electrode part.
Embodiment
Describe being used to implement mode of the present invention.
Fig. 1 is the simple pie graph of expression inspection involved in the present invention with an embodiment of anchor clamps.
Inspection involved in the present invention with anchor clamps 1 have a plurality of contacts 2, with those contacts 2 be held in the spininess shape maintenance body 3, support this maintenance body 3 and have the connection electrode body 4 that contacts with contact 2 and become the electrode part of conducting state, be set to the wire portion 5 that extends out and be electrically connected with it from electrode part.
In addition, though as a plurality of contacts 23 contacts are shown among Fig. 1 and show 3 corresponding respectively wire portions 5, they can decide according to the checkpoint that the substrate of checking object sets, and are not limited to 3.
One end of contact 2 is crimped on the checkpoint of predefined regulation in the wiring of substrate, and the other end is crimped on the electrode part that is electrically connected with testing fixture (not shown).
Fig. 2 is the simple pie graph of an embodiment of contact involved in the present invention, (a) sectional view of the inboard cylindrical shell of expression, (b) ground plan of the inboard cylindrical shell of expression, (c) sectional view of expression outside cylindrical shell, (d) ground plan of expression outside cylindrical shell.
Inboard cylindrical shell 2a has the length of regulation and is that cartridge forms by the cylindrical shape of hollow form.An end that forms the cartridge of inboard cylindrical shell 2a is contacted with the checkpoint, and the other end is contacted with electrode part described later, carries out being electrically connected between checkpoint and electrode part thus.
Inboard cylindrical shell 2a has first 2a1 of portion, second 2a2 of portion, the 3rd 2a3 of portion, the first pars contractilis 2a4 and the second pars contractilis 2a5.This inboard cylindrical shell 2a be communicated with to link first 2a1 of portion, the first pars contractilis 2a4, the 3rd 2a3 of portion, the second pars contractilis 2a5, second 2a2 of portion successively and forms shown in Fig. 2 (a).
The end of first 2a1 of portion is connected to the checkpoint, and perforation is inserted in first bullport 311 described later (perhaps hole 311a is gone up in first guiding).This first 2a1 of portion forms the cylindrical shape of hollow form.The length of this first 2a1 of portion forms that the length than first bullport 311 is long at least, when first 2a1 of portion is crimped on the checkpoint, can slide along first bullport.
The end of second 2a2 of portion is connected to electrode part, and is inserted in second bullport 321 described later by outer side tube part 2b perforation.This second 2a2 of portion forms the cylindrical shape of hollow form.The length of this second 2a2 of portion is preferably formed as longlyer than the length of second bullport, when second 2a2 of portion is crimped on electrode part, can be inserted into the inwall slip of the outside cylindrical shell 2b in second bullport 321 along perforation.
In addition, first 2a1 of portion and second 2a2 of portion preferably have approximately uniform shape.
The first pars contractilis 2a4 forms with first 2a1 of portion and is coaxial shape, and forms on the length direction of inboard cylindrical shell 2a and stretch.This first pars contractilis 2a4 has the volute spring shape portion that forms the notch of shape of slit on cartridge.Flexible effect is played by this volute spring shape portion.
The first pars contractilis 2a4 forms respectively and links with the other end of first 2a1 of portion and the end of the 3rd 2a3 of portion, and is coaxial again with the footpath with first 2a1 of portion.
The second pars contractilis 2a5 forms with second 2a2 of portion and is coaxial shape, and forms on the length direction of inboard cylindrical shell 2a and stretch.This second pars contractilis 2a5 has the volute spring shape portion that forms the notch of shape of slit on cartridge.Flexible effect is played by this volute spring shape portion.
The second pars contractilis 2a5 forms respectively and links with the other end of second 2a2 of portion and the other end of the 3rd 2a3 of portion, and is coaxial again with the footpath with second 2a2 of portion.
The 3rd 2a3 of portion forms and is communicated with the cylindric of the hollow form that links the first pars contractilis 2a4 and the second pars contractilis 2a5.The end of the 3rd 2a3 of portion and the first pars contractilis 2a4 link, and the other end and the second pars contractilis 2a5 link.
The 3rd 2a3 of portion forms to have coaxial with the first pars contractilis 2a4 and the second pars contractilis 2a5 and with the footpath, and forms also and to have coaxial with first 2a1 of portion and second 2a2 of portion and with the footpath.
The length that the length of the 3rd 2a3 of portion forms the degree that can form the connecting portion that is connected with outside cylindrical shell 2b described later gets final product, and is not subjected to special qualification.In addition, Fig. 2 (a) though in the state that caves in slightly to the inside with the 3rd 2a3 of portion represent that it is expressed as in the formed depression fixedly time the with outside cylindrical shell 2b described later.
First to the 3rd portion and first to second pars contractilis forms coaxial as mentioned above and with the footpath, therefore above-mentioned tube portion and pars contractilis can be formed by a cartridge.Like this, inboard cylindrical shell 2a is formed by a cartridge, can efficiently and easily form.
In addition, in the present embodiment, showing with the 3rd 2a3 of portion is the center, and 2 pars contractiliss of the first pars contractilis 2a4 and the second pars contractilis 2a5 are formed on the position of symmetry, but is formed centrally the pars contractilis of desired amt in can also the 3rd 2a3 of portion being.
This inboard cylindrical shell 2a can be formed by the cartridge of an electric conductivity as mentioned above, can form external diameter 20～250 μ m, internal diameter 10～230 μ m, wall thickness 5～50 μ m.By forming such size,, also can tackle with the testing fixture of the structure oversimplified for checked properties such as the wiring that has been endowed tinyization and complicated substrate, semiconductor devices.
In the example of this inboard cylindrical shell 2a, be point symmetry or the line symmetrical manner forms each position with relative its center.This is owing to by forming such symmetric shape, can utilize contact 2 when the maintenance body of jig for inspecting substrate described later is installed supreme branch down.
The end in contact checkpoint of inboard cylindrical shell 2a, its other end contact electrode portion, by the electrically conducting between this inboard cylindrical shell 2a realization checkpoint and electrode part, therefore inboard cylindrical shell 2a forms with the material of electric conductivity.As this material, then be not subjected to special qualification so long as have the material of electric conductivity, for example can list nickel, nickel alloy, palldium alloy.
This inboard cylindrical shell 2a as mentioned above, form with the material with electric conductivity, but contact 2 also must form according to tinyization and the complicated enforcement graph thinning of checked property itself.Especially stretch perpendicular to the direction of holding plate for the edge, must make contact 2 itself have Telescopic, and use the inspection at the helical spring position that coiling is arranged with in the anchor clamps in formation in the past, the size that will depend on the diameter of spiral self, very difficult formation has the coil of the diameter littler about 4 times than spiral diameter, the extremely difficult volute spring of external diameter below 100 μ m that form.Promptly allow to form, it is also too expensive with anchor clamps to use 2000～4000 inspections on assembleability and manufacturing cost, has lunar politics.
Yet the present application is by utilizing following manufacture method, can be cheap more and easily produce tiny contact.
Following two kinds of manufacture methods can be disclosed about inboard cylindrical shell 2a.
[method for making example 1]
(1) at first, prepare the heart yearn (not shown) of the hollow bulb of the inboard cylindrical shell 2a of formation.Wherein this heart yearn uses the SUS line of the expectation thickness (for example, diameter 30 μ m) of the internal diameter that limits inboard cylindrical shell 2a.
(2) afterwards, heart yearn (SUS line) is applied the photoresist tunicle, coat the side face of this heart yearn.The part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft, expose, can form spiral helicine mask by laser.In order to form inboard cylindrical shell 2a of the present invention, has predetermined distance (with the suitable distance of length amount of the 3rd cylindrical shell 2a3) between 2 pars contractiliss (the first pars contractilis 2a4 and the second pars contractilis 2a5) and form.
(3) afterwards, this heart yearn is implemented nickel plating.At this moment, because heart yearn has electric conductivity, so the position that does not form the photoresist mask is by nickel plating.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form inboard cylindrical shell 2a.Can certainly before extracting heart yearn out fully, cut off cylindrical shell.
In addition, inboard cylindrical shell 2a also can make according to following method.
[method for making example 2]
At first, prepare to form like that as mentioned above the heart yearn (not shown) of the hollow bulb of inboard cylindrical shell 2a.
This heart yearn nickel plating is reached the thickness of expectation, thereby form nickel coating at the side face of heart yearn.
Afterwards, to the surface-coated photoresist of this nickel coating.Thereby the part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft,, can form spiral helicine mask by laser explosure.In order to form inboard cylindrical shell 2a of the present invention, has predetermined distance (with the suitable distance of length amount of the 3rd cylindrical shell 2a3) between 2 pars contractiliss (the first pars contractilis 2a4 and the second pars contractilis 2a5) and form.
(3) afterwards, nickel plating is removed in etching.At this moment, the nickel plating that does not form the position of photoresist mask is removed.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form inboard cylindrical shell 2a.Can certainly before extracting heart yearn out fully, cut off cylindrical shell.
Use in the past has the volute spring mode of coiling to depend on the diameter of the material that winds the line, and very difficult formation has the coil of the diameter littler about 4 times than this diameter, the extremely difficult following volute spring of 100 μ m that is formed on.The of the present invention inboard cylindrical shell 2a that makes based on above-mentioned method for making, and after forming the shape of expectation to heart yearn nickel plating, make and draw by extracting heart yearn out, compare with the situation of the volute spring mode of in the past use coiling, wall thickness that can the attenuate spring material simultaneously can high precision and make tiny external diameter and internal diameter freely in the lump.
Outside cylindrical shell 2b forms the cylindrical shape of the hollow bulb 2b2 with band specified length.This outside cylindrical shell 2b can form for example external diameter 20～250 μ m, internal diameter 10～230 μ m, wall thickness 5～50 μ m.Be endowed tinyization and complicated substrate by forming this size, can tackling.
Inboard cylindrical shell 2a is disposed at the hollow bulb 2b2 of outside cylindrical shell 2b coaxially.At this moment, first of inboard cylindrical shell 2a 2a1 of portion and second 2a2 of portion are configured to respectively from the peristome of outside cylindrical shell 2b extend out (with reference to Fig. 3).
The length of outside cylindrical shell 2b as mentioned above, forms first 2a1 of portion and second length that the 2a2 of portion can extend out from its peristome respectively with inboard cylindrical shell 2a.In addition, this outside cylindrical shell 2b preferably has the length of the first pars contractilis 2a4 and the hollow bulb 2b2 that the second pars contractilis 2a5 is accommodated in outside cylindrical shell 2b all the time of inboard cylindrical shell 2a.This be because, be housed in cylindrical shell 2b inside, the outside all the time by two pars contractiliss with inboard cylindrical shell 2a, can play the guiding function of the flexible direction of two pars contractiliss when stretching motion, can improve the permanance of pars contractilis.
Outside cylindrical shell 2b shown in Fig. 2 (c) locates in the central to be formed with and is used for being fixedly coupled the 2b3 of portion with inboard cylindrical shell 2a.This connecting portion 2b3, be housed in the hollow bulb 2b2 of outside cylindrical shell 2b and inboard cylindrical shell 2a when two openends of outside cylindrical shell 2b extend out at inboard cylindrical shell 2a, as shown in Figure 3, substantial middle place by outside-in extruding (riveted joint) outside cylindrical shell 2b, thus inboard cylindrical shell 2a and outside cylindrical shell 2b are fixed, thereby connecting portion 2b3 is formed on outside cylindrical shell 2b.Therefore, this connecting portion 2b3 just begins to form after accommodating inboard cylindrical shell 2a.
In addition, shown in Fig. 2 (d), outside cylindrical shell 2b is in order to fix with inboard cylindrical shell 2a, and the internal diameter of its connecting portion 2b3 part forms forr a short time than other parts.
In addition, if part that can fixedly connected 2b3, certainly also can be for outside cylindrical shell 2b other fixing meanss with inboard cylindrical shell 2a employing laser bonding, arc welding, cementing agent etc.
As shown in Figure 3, in the contact 2 of the present invention, inboard cylindrical shell 2a is configured in the hollow bulb 2b2 of outside cylindrical shell 2b, and first 2a1 of portion and second 2a2 of portion of inboard cylindrical shell 2a are configured to extend out from two openends of outside cylindrical shell 2b.
This contact 2 is preferably formed in appearance to being point symmetry.
It more than is explanation to the formation of contact 2.
This inspection has the maintenance body 3 that is used for a plurality of contacts 2 are remained the spininess shape with anchor clamps 1.
As shown in Figure 4, this maintenance body 3 has first plate-shaped member 31 and second plate-shaped member 32.Above-mentioned plate-shaped member is formed by the material of insulativity.
First plate-shaped member 31 has and is used for first bullport 311 of an end of contact 2 guiding to the checkpoint.
As shown in Figure 4, first bullport 311 form first guiding that external diameter is different go up hole 311a and first guiding down hole 311b be communicated with and link.
First guiding hole 311b down forms the big slightly aperture of external diameter that has than outside cylindrical shell 2b.
Therefore, contact 2 can not break away from from first bullport 311 of first plate-like portion 31.
This first bullport 311 is formed by 2 different holes of external diameter as mentioned above, and the difference of this external diameter can be by the thickness difference institute fastening of the inboard cylindrical shell 2a of contact 2 and outside cylindrical shell 2b.Especially the thickness difference that inboard cylindrical shell 2a and outside cylindrical shell 2b are produced is higher because of tube portion all forms hardness by the nickel electroformed layer, even and if repeat tens thousand of times, hundreds thousand of times slip between the checkpoint, still can have good permanance.
Second plate-shaped member 32 is configured to and 31 of first plate-shaped members have predetermined distance, and has and be used for second bullport 321 of the other end of contact 2 guiding to electrode part.
The predetermined distance d1 that this second plate-shaped member 32 and first plate-shaped member are 31 sets for shorter than the length of outside cylindrical shell 2b, and the thickness poor (border) of inboard cylindrical shell 2a and outside cylindrical shell 2b is disposed in first bullport 311 of first plate-shaped member 31.
Electrode body 4 shown in Figure 5 is formed with a plurality of electrode part 41.Electrode body 4 is formed by insulating material, keeps the electrode part 41 that is formed by conductive material.
The maintenance body 3 of contact 2 has been installed, as shown in Figure 5, has been installed on the electrode body 4.At this moment, the other end of second 2a2 of portion of the inboard cylindrical shell 2a of contact 2 and the electrode part 41 of electrode body 4 are positioned in the mode of butt, and releasably are fixed together.
When keeping body 3 to be fixed in electrode body 4, the outside cylindrical shell 2b of contact 2 can push to electrode body 4 sides from first plate-shaped member 31 that keeps body 3.Therefore, the second pars contractilis 2a5 of inboard cylindrical shell 2a can be compressed, and under the effect of this force of compression, second 2a2 of portion can push electrode part 41.That is to say that the inboard cylindrical shell 2a and the electrode part 41 of contact 2 are in stable contact condition.In addition, have nature long length for the first pars contractilis 2a4 not being applied the state of physical force this moment.That is to say that with in the anchor clamps 1, when contact 2 was installed, first plate-shaped member 31 pushed outside cylindrical shell 2b to electrode part 41 sides in this inspection.At this moment, because outside cylindrical shell 2b and inboard cylindrical shell 2a are fixed by connecting portion 2b, therefore the second pars contractilis 2a5 can be crimped to electrode part 41.
In addition, actual when contacting, the first pars contractilis 2a4 can be compressed according to this contact with checkpoint (first 2a1 of portion of inboard cylindrical shell 2a) at contact 2, thereby utilizes the relative checkpoint of this force of compression stably to contact.
That is to say, utilize the situation of the first pars contractilis 2a4 and the second pars contractilis 2a5, can improve the permanance of contact 2, life-saving by differentiation.
In addition, among Fig. 1, wire portion 5 is configured to can be connected with testing fixture from checking the lower side with anchor clamps 1 from checking that the following aspect with anchor clamps 1 extends out.
Claims (6)
1. inspection anchor clamps, its will become inspected object checked property, be electrically connected with the testing fixture of checking the electrical specification that is formed at the inspection body on this checked property, it is characterized in that possessing:
Contact, one end are crimped on the checkpoint of the regulation on the inspection body that is set in advance in this checked property, the other end and the electrode part crimping that is electrically connected in described testing fixture;
First plate-shaped member, it has and is used for first bullport of an end of described contact guiding to described checkpoint;
Second plate-shaped member, its be configured to and described first plate-shaped member between have predetermined distance, and have and be used for second bullport of the other end of described contact guiding to described electrode part; With
Be formed with the electrode body of a plurality of described electrode part,
Described contact possesses:
The outside cylindrical shell that has peristome at two ends; With
The inboard cylindrical shell that is housed in the inboard of described outside cylindrical shell and is configured to give prominence to respectively from the two ends of this outside cylindrical shell,
Described inboard cylindrical shell has:
First portion, the one end is connected to described checkpoint and this first portion is inserted in described first bullport by perforation;
First pars contractilis, it forms and is coaxial shape with described first portion and stretches on the length direction of this inboard cylindrical shell;
Second portion, its other end is connected to described electrode part and this second portion's perforation is inserted in described second bullport,
Second pars contractilis, it forms and is coaxial shape with described second portion and stretches on the length direction of this contact; With
The 3rd portion, it is communicated with binding with described first pars contractilis and described second pars contractilis,
Described first portion, described first pars contractilis, described the 3rd portion, described second pars contractilis and described second portion are formed by a cartridge unit,
Described the 3rd portion is formed with the connecting portion of fixing described outside cylindrical shell and described inboard cylindrical shell,
Described first bullport form have bigger and than the footpath of described inboard cylindrical shell than the little aperture, footpath of described outside cylindrical shell.
2. inspection anchor clamps according to claim 1 is characterized in that:
Described contact forms has the shape that is symmetry with respect to the center of this contact.
3. inspection anchor clamps according to claim 1 and 2 is characterized in that:
Described inboard cylindrical shell and described outside cylindrical shell are formed by the alloy that with nickel is major component.
4. according to each described inspection anchor clamps in the claim 1 to 3, it is characterized in that:
The external diameter of described outside cylindrical shell forms below the 250 μ m.
5. according to each described inspection anchor clamps in the claim 1 to 4, it is characterized in that:
Described outside cylindrical shell and described inboard cylindrical shell wall thickness separately form roughly 5～50 μ m.
6. inspection anchor clamps according to claim 1 is characterized in that:
Described inspection be installed in the contact of anchor clamps this inspection with anchor clamps on and when not being used, described first pars contractilis is that nature is long, described second pars contractilis is in application of force state.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-130335 | 2009-05-29 | ||
| JP2009130335A JP2010276510A (en) | 2009-05-29 | 2009-05-29 | Inspection jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101900748A true CN101900748A (en) | 2010-12-01 |
| CN101900748B CN101900748B (en) | 2013-05-08 |
Family
ID=43226450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101940232A Expired - Fee Related CN101900748B (en) | 2009-05-29 | 2010-05-28 | Inspection fixture |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2010276510A (en) |
| KR (1) | KR101141206B1 (en) |
| CN (1) | CN101900748B (en) |
| TW (1) | TWI422831B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102890166A (en) * | 2011-07-21 | 2013-01-23 | 日本电产理德株式会社 | Inspection contactor and inspection fixture |
| CN102981025A (en) * | 2011-09-05 | 2013-03-20 | 日本电产理德株式会社 | Connection terminal and connection jig |
| CN103308733A (en) * | 2012-03-13 | 2013-09-18 | 日本电产理德株式会社 | Probe and connecting jig |
| CN103348255A (en) * | 2011-02-10 | 2013-10-09 | 日本电产理德株式会社 | Test jig |
| CN104297535A (en) * | 2013-07-16 | 2015-01-21 | 日置电机株式会社 | Probe unit and substrate inspection device |
| CN110036300A (en) * | 2016-11-30 | 2019-07-19 | 日本电产理德股份有限公司 | Contact terminal, gauging fixture and check device |
| CN112601965A (en) * | 2018-08-23 | 2021-04-02 | 日本电产理德股份有限公司 | Inspection jig, inspection device, and contact terminal |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5776687B2 (en) * | 2010-04-19 | 2015-09-09 | 日本電産リード株式会社 | Inspection contact and inspection jig |
| JP6484137B2 (en) * | 2014-11-26 | 2019-03-13 | 株式会社日本マイクロニクス | Probe and contact inspection device |
| CN104714059A (en) * | 2015-03-19 | 2015-06-17 | 东莞鸿爱斯通信科技有限公司 | Test joint |
| JP6527762B2 (en) * | 2015-06-19 | 2019-06-05 | 日本電子材料株式会社 | probe |
| JP6484136B2 (en) * | 2015-07-27 | 2019-03-13 | 株式会社日本マイクロニクス | Contact inspection device |
| KR101869335B1 (en) * | 2016-01-29 | 2018-06-20 | 최선영 | Probe pin and manufacturing method thereof |
| WO2021064788A1 (en) * | 2019-09-30 | 2021-04-08 | 三菱電機株式会社 | Inspection jig |
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| JP4625480B2 (en) * | 2007-03-30 | 2011-02-02 | 日本電産リード株式会社 | Inspection jig |
| KR100975808B1 (en) * | 2007-04-17 | 2010-08-13 | 니혼덴산리드가부시키가이샤 | The fixture for circuit board inspection |
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- 2010-05-27 TW TW099117058A patent/TWI422831B/en not_active IP Right Cessation
- 2010-05-28 CN CN2010101940232A patent/CN101900748B/en not_active Expired - Fee Related
- 2010-05-28 KR KR1020100050044A patent/KR101141206B1/en not_active IP Right Cessation
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| JP2003194849A (en) * | 2001-12-27 | 2003-07-09 | Takashima Sangyo Kk | Contact probe |
| JP2004219282A (en) * | 2003-01-16 | 2004-08-05 | Toyo Denshi Giken Kk | Probe and contact device using the same |
| CN2833600Y (en) * | 2005-07-06 | 2006-11-01 | 颜鸿杰 | Probe structure improvement of testing jig |
| CN200956035Y (en) * | 2006-08-24 | 2007-10-03 | 中国探针股份有限公司 | Replaceable probe structure |
| CN201110927Y (en) * | 2007-11-02 | 2008-09-03 | 振展科技股份有限公司 | Tooth hole detecting probe structure |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103348255A (en) * | 2011-02-10 | 2013-10-09 | 日本电产理德株式会社 | Test jig |
| TWI449916B (en) * | 2011-02-10 | 2014-08-21 | Nidec Read Corp | Substrate inspection fixture |
| CN103348255B (en) * | 2011-02-10 | 2015-11-25 | 日本电产理德株式会社 | Checking tool |
| CN102890166A (en) * | 2011-07-21 | 2013-01-23 | 日本电产理德株式会社 | Inspection contactor and inspection fixture |
| CN102890166B (en) * | 2011-07-21 | 2015-03-25 | 日本电产理德株式会社 | Inspection contactor and inspection fixture |
| CN102981025A (en) * | 2011-09-05 | 2013-03-20 | 日本电产理德株式会社 | Connection terminal and connection jig |
| CN102981025B (en) * | 2011-09-05 | 2015-10-07 | 日本电产理德株式会社 | Splicing ear and jockey |
| CN103308733A (en) * | 2012-03-13 | 2013-09-18 | 日本电产理德株式会社 | Probe and connecting jig |
| CN104297535A (en) * | 2013-07-16 | 2015-01-21 | 日置电机株式会社 | Probe unit and substrate inspection device |
| CN110036300A (en) * | 2016-11-30 | 2019-07-19 | 日本电产理德股份有限公司 | Contact terminal, gauging fixture and check device |
| CN110036300B (en) * | 2016-11-30 | 2020-03-06 | 日本电产理德股份有限公司 | Contact terminal, inspection jig, and inspection device |
| CN112601965A (en) * | 2018-08-23 | 2021-04-02 | 日本电产理德股份有限公司 | Inspection jig, inspection device, and contact terminal |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20100129218A (en) | 2010-12-08 |
| TW201102662A (en) | 2011-01-16 |
| TWI422831B (en) | 2014-01-11 |
| KR101141206B1 (en) | 2012-05-04 |
| CN101900748B (en) | 2013-05-08 |
| JP2010276510A (en) | 2010-12-09 |
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