CN102890166A - Inspection contactor and inspection fixture - Google Patents
Inspection contactor and inspection fixture Download PDFInfo
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- CN102890166A CN102890166A CN2012102524055A CN201210252405A CN102890166A CN 102890166 A CN102890166 A CN 102890166A CN 2012102524055 A CN2012102524055 A CN 2012102524055A CN 201210252405 A CN201210252405 A CN 201210252405A CN 102890166 A CN102890166 A CN 102890166A
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- 238000007689 inspection Methods 0.000 title claims abstract description 108
- 230000008602 contraction Effects 0.000 claims abstract description 24
- 238000012360 testing method Methods 0.000 claims description 14
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- 238000002788 crimping Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 4
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
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- 229910001220 stainless steel Inorganic materials 0.000 description 2
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- 239000007767 bonding agent Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2844—Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2896—Testing of IC packages; Test features related to IC packages
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention provides a fine contactor which can respond to micronization and complication of a substrate and provide strong pressing force in inspection time and provide weak pressing force in non-inspection time and an inspection fixture. An inspection contactor which electrically connects a plurality of inspection points of an object to be inspected and a plurality of electrode parts which are arranged on an electrode body of the inspection fixture and are electrically connected with an inspection device which inspects electrical characteristics of the inspection points has a conductive cylindrical component with opening parts at two ends and the front end opening part abutting against the surface of the electrode part, a conductive bar-shaped component which protrudes from the rear end opening part of the cylindrical component, is configured in the inner part of the cylindrical component and the rear end is in contact with the inspection points and a fixed part which electrically connects the cylindrical component with the bar-shaped component, the cylindrical component has a first gap part and a second gap part which forms spiral gaps telescoping in a long axis direction in a wall part of the cylindrical component, and the first or second gap part reaches the limit of contraction when the bar-shaped component abuts against the inspection points and implements inspection.
Description
Technical field
The present invention relates to inspection that the checkpoint in a kind of inspection object section that will be set in advance in checked property is electrically connected with the testing fixture of implementing this inspection with anchor clamps and the inspection contactor that uses in anchor clamps in inspection.
Background technology
Inspection is installed uses anchor clamps via described inspection contactor with the inspection of contactor, the inspection object section that has for checked property, inspection position from from testing fixture to regulation provides electric current or electric signal, and from checking object section detection electric signal, check accordingly the detection of the electrical characteristics of object section, the enforcement of motion test etc.
As checked property, semiconductor device such as the various substrates such as the base plate for packaging of the battery lead plate that the usefulness such as printed circuit substrate, flexible base, board, ceramic multilayer circuit base plate, liquid crystal display or plasma display are arranged and semiconductor-sealing-purpose or membrane type carrier or semiconductor wafer, semi-conductor chip or CSP (chip size packages, Chip size package) etc.
In this manual, these above-mentioned checked properties are referred to as " checked property ", the inspection object section that is formed on the checked property is called " inspection section ".In addition, can set be used for checking practically in inspection section the checkpoint of the electrical characteristics of described inspection section, and become conducting state by contactor being crimped on the described checkpoint with inspection section.
This inspection is connected on the checkpoint in the wiring (inspection section), on the electrode part that the other end is crimped on base board checking device is electrically connected with a side pressure of the contactor of anchor clamps.In addition, via described inspection anchor clamps, be provided for measuring the curtage of the electrical characteristics of wiring from base board checking device, and the electric signal that will detect sends to base board checking device from wiring.
This inspection for example can example be illustrated in disclosed anchor clamps in the patent documentation 1 with anchor clamps.Inspection at patent documentation 1 is used in the anchor clamps, at electric conductivity movable body (contactor) volute spring is installed.With in the anchor clamps, contactor is on being installed in support the time in this inspection, utilizes helical spring contraction and is pressed against on the conductive part, and the good contact condition of conductive part and contactor is provided.
In addition, contactor is adjusted to, contact the pressing force that contactor is contacted with the checkpoint can obtain to stipulate so that volute spring shrinks the amount (specified length) of regulation for the insulation course that destroys the oxide film that forms on the surface of checkpoint etc. and with the checkpoint conducting.
Especially, in recent years, because substrate has been set a large amount of checkpoints, so contactor that also should be corresponding with these checkpoints is rack-mount in large quantities.Therefore, as mentioned above, if the quantity of contactor increases, the volute spring that then shrinks also increases, in the very large power of support burden.Born the support existence of very large power because of the problem of the effect integrally bending of described helical spring power.
On the other hand, reduce the power that is applied on the support, will study and reduce helical spring elastic force, but can not provide desirable pressing force in the situation that shrink the specified length volute spring, have the problem that contactor and checkpoint can not conducting contacts by enough pressing forces.
(prior art file)
Patent documentation 1: TOHKEMY 2003-215160 communique
Summary of the invention
(inventing problem to be solved)
The invention provides a kind of miniaturization that can tackle substrate and complicated, and strong pressing force can be provided when checking and the fine contactor of weak pressing force and the inspection anchor clamps that use this contactor can be provided when non-the inspection.
(means of dealing with problems)
A first aspect of the present invention provides a kind of checked property and the inspection anchor clamps that the testing fixture that checks the electrical characteristics between described checkpoint is electrically connected that will become inspected object and have a plurality of checkpoints, it is characterized in that possessing: the electrode body that possesses a plurality of electrode parts that are electrically connected with described testing fixture; The inspection contactor that described electrode part is electrically connected with described checkpoint; And keep described inspection with the holder of contactor, wherein, described inspection possesses with contactor: two ends have the cartridge of electric conductivity of the surperficial butt of peristome and front end opening and described electrode part; Give prominence to and be configured in the inside of described cartridge and the bar-like member of the electric conductivity that the rear end contacts with described checkpoint from the open rearward end section of described cartridge; And the fixed part that described cartridge is electrically connected with described bar-like member, described holder possesses: have first plate-shaped member of described front end opening to the first bullport of described electrode body guiding; And have the rear end of described bar-like member the second plate-shaped member to the second bullport of described checkpoint guiding, described cartridge has: have with the front end opening of the Surface Contact of described electrode part and with the leading section of described bar-like member and be contained in inner top cylinder section; Form the diameter identical with described top cylinder section and be connected and be formed in the wall section of described cartridge the first notch part of the flexible spiral helicine breach of long axis direction with described top cylinder section; The middle cylinder section that forms the diameter identical with described the first notch part and be connected with described the first notch part; Form the diameter identical with described middle cylinder section and be connected and be formed in the wall section of described cartridge the second notch part of the flexible spiral helicine breach of long axis direction with described middle cylinder section; And form the diameter identical with described the second notch part and be connected and possess the doffing section of described fixed part with described the second notch part, any one in described the first notch part or described the second notch part reaches the limit of contraction at described bar-like member and described checkpoint butt and when implementing to check.
A second aspect of the present invention provides a kind of as the described inspection anchor clamps of above-mentioned first aspect, it is characterized in that, described the first notch part is different with the pitch of the spiral of described the second notch part.
A third aspect of the present invention provides a kind of as above-mentioned first or the described inspection anchor clamps of second aspect, it is characterized in that, the gap width of described the first notch part is different from the gap width of described the second notch part.
The inspection contactor that a plurality of checkpoints that a fourth aspect of the present invention provides a kind of checked property that will become inspected object are electrically connected with a plurality of electrode parts that possess in the electrode body that checks with anchor clamps, described electrode part is electrically connected with the testing fixture that checks the electrical characteristics between described checkpoint, and described inspection possesses with contactor: the outside cylindrical shell that becomes the electrode tip of front end opening and described electrode part butt; And from the open rearward end section of described outside cylindrical shell outstanding and is connected with the internal electrical of described outside cylindrical shell and configure coaxially and become the inboard cylindrical shell that rearward end is crimped on the electric conductivity of the inspection end on the described checkpoint, described outside cylindrical shell has: the outside top cylinder section with the front end opening that becomes described electrode tip; With described outside top cylinder section same diameter and front end opening and the open rearward end section of described outside top cylinder section be connected and possess at side face the first notch part of the tubular of the spiral helicine breach that forms at long axis direction; With described the first notch part same diameter and with the outside that described the first notch part is connected in cylinder section; With cylinder section same diameter in the described outside and be connected and possess at side face the second notch part of the tubular of the spiral helicine breach that forms at long axis direction with cylinder section in the described outside; And with outside doffing section described the second notch part same diameter and be connected and possess fixed part with described the second notch part, described inboard cylindrical shell has: the inboard doffing section with rearward end of becoming described inspection end; And the fixed part that is configured in described outside inner barrel, wherein, described fixed part is electrically connected described outside cylindrical shell and is fixing with described inboard cylindrical shell, and described the first notch part is different from the pitch of the spiral of described the second notch part.
(effect of invention)
According to of the present invention above-mentioned first and fourth aspect, owing to the bar-like member of electric conductivity is configured in coaxially inside and the electrical connection and fixing of the cartridge that possesses the spiral helicine notch part in two places, so these cartridges and bar-like member play a role with contactor as an inspection.The notch part that is arranged on the cartridge is formed on the cartridge, and brings into play the effect of the elastic of shrinking at long axis direction.That is, described inspection includes only cartridge, bar-like member and fixed part with contactor and forms.Therefore, compare with contactor with using helical spring inspection, can reduce number of spare parts, and form simply the inspection contactor.
In addition, described inspection provides a kind of with contactor can provide strong pressing force and the fine contactor of weak pressing force and the inspection anchor clamps that use described contactor are provided when non-the inspection when checking.
According to above-mentioned second aspect of the present invention, because the first notch part is different from the screw pitch of the second notch part, so in the time of can producing easily inspection and the pressing force during non-inspection poor.
According to the above-mentioned third aspect of the present invention, because the first notch part is different from the gap width of the second notch part, so in the time of can producing easily inspection and the pressing force during non-inspection poor.
Description of drawings
Fig. 1 is the summary construction diagram that anchor clamps are used in expression inspection of the present invention.
Fig. 2 is the summary section that contactor is used in inspection of the present invention.
Fig. 3 is the summary section that the cartridge of contactor is used in inspection of the present invention.
Fig. 4 is the summary section that the bar-like member of contactor is used in inspection of the present invention.
Fig. 5 is the summary section that the installment state of contactor is used in expression inspection of the present invention.
The summary section of the operating state when Fig. 6 is expression inspection of the present invention with the inspection of anchor clamps.
(description of reference numerals)
1: check and use anchor clamps; 2: check and use contactor; 21: cartridge; 22: bar-like member
23: fixed part; 3: holder; 31: the first plate-shaped members; 31h: the first bullport
32: the second plate-shaped members; 32h: the second bullport; 4: electrode body; 41: electrode part
5: wire; 8: checked property; 81: the checkpoint
Embodiment
The following describes be used to implementing preferred implementation of the present invention.
Fig. 1 is the summary construction diagram that the first embodiment of anchor clamps is used in expression inspection of the present invention.Inspection of the present invention possesses with anchor clamps 1: a plurality of contactors 2; These contactors 2 are remained the holder 3 of spininess shape: support described holder 3 and have the electrode body 4 that contacts and become the electrode part 41 of conducting state with each contactor 2; And be electrically connected and extend the wire portion 5 that arranges from electrode part 41.
In addition, in Fig. 1, represented three contactors and represented respectively three wire portions 5 of correspondence as a plurality of contactors 2, but they are not limited to three, and can determine accordingly with the checkpoint that is set on the inspection object.
The invention is characterized in: utilize notch part performance on the cartridge be formed on electric conductivity as the function this point of elastic, be arranged on the elastic property of the notch part at least two places by change, can be provided in contact required in the inspection and the crimp force that is used for contacting with electrode part 41 all the time.
By as shown in the present, consisting of the inspection contactor, can tackle the miniaturization of substrate and complicated, and can reduce number of spare parts and oversimplify, large contact can also be when checking be provided to the checkpoint and provides little contact to holder during in non-inspection.
The following describes the inspection used in anchor clamps in inspection of the present invention with contactor 2.Fig. 2 is the summary section that contactor 2 is used in inspection of the present invention.
Check that the end with contactor 2 contacts with the checkpoint conducting, and the other end contacts with electrode part 41 conductings described later, accordingly the checkpoint is electrically connected with electrode part.
Described inspection has cartridge 21 and bar-like member 22 (with reference to Fig. 2) with contactor 2.
Cartridge 21 has peristome 21a, 21b at two ends, a side front end opening 21a and the surperficial butt of electrode part 41.Described cartridge 21 can form with the material of electric conductivity, for example can utilize copper, nickel or their alloy to form.
Fig. 3 is the summary section of cartridge of the present invention.
Described cartridge 21 has the 21c of top cylinder section, the first notch part 21d, the middle cylinder 21e of section, the second notch part 21f and the 21g of doffing section as shown in Figure 3.
The 21c of top cylinder section has the front end opening 21a with the Surface Contact of electrode part 41, and holds the leading section 22a of bar-like member 22 described later in inside.The described top cylinder 21c of section is the part of cartridge 21, has the shape that all equates with cartridge 21 aspect external diameter and the internal diameter.
The first notch part 21d is formed the diameter identical with the 21c of top cylinder section and is connected with the 21c of top cylinder section, is that wall section at cartridge 21 is formed on the flexible spiral helicine breach of long axis direction and forms.Described the first notch part 21d is owing to being formed on the wall of cartridge 21, so become the shape that equates with cartridge 21 aspect external diameter and the internal diameter.
The middle cylinder 21e of section is formed the diameter identical with the first notch part 21d and is connected with the first notch part 21d.The part that described middle cartridge unit 21e is cartridge 21 has the shape that all equates with cartridge 21 aspect external diameter and the internal diameter.
The second notch part 21f is formed the diameter identical with the middle cylinder 21e of section and is connected with the middle cylinder 21e of section, is that wall section at cartridge 21 is formed on the flexible spiral helicine breach of long axis direction and forms.Described the second notch part 21f is owing to being formed on the wall of cartridge 21, so become the shape that equates with cartridge 21 aspect external diameter and the internal diameter.
The 21g of doffing section is formed the diameter identical with the second notch part 21f and is connected with the second notch part 21f.The 21g of doffing section possesses the fixed part 23 of fixing and being electrically connected for bar-like member 22 described later and cartridge 21.The described doffing 21g of section is the part of cartridge 21, and has the shape that all equates with cartridge 21 aspect external diameter and the internal diameter.In addition, the described doffing 21g of section has the 21b of open rearward end section.
The first notch part 21d (during inspection) when bar-like member 22 and checkpoint butt and enforcement inspection reaches the limit of contraction.This is so that the space of being caused by the breach that is formed on the first notch part 21d because the contraction of the first notch part 21d becomes the state that this breach (space) disappears, makes the first notch part 21d reach the limit of contraction.The the first notch part 21d that reaches the limit of contraction shrinks because of no longer generation is further, so the 21c of top cylinder section, the middle cylinder 21e of section or the 21g of doffing section become the same function of performance.
As mentioned above, when checking, although the first notch part 21d has reached the limit of shrinking, the second notch part 21f does not reach the limit of contraction.This is because in the situation that bar-like member 22 and checkpoint butt have the surplus of contraction by making the second notch part 21f, can utilize the contraction of the second notch part 21f to absorb the height tolerance of checkpoint (projection).
In the situation that bar-like member 22 not with checkpoint butt (during non-inspection), check to be in the state that is kept by holder 3 described later with contactor 2, therefore become the state of the first notch part 21d and the second notch part 21f contraction.At this moment, the first notch part 21d is near the state the limit that is retracted to contraction, and the second notch part 21f becomes the state of a small amount of contraction.
That is, when non-inspection, the first notch part 21d significantly shrinks, and the second notch part 21f shrinks on a small quantity.When checking, the first notch part 21d no longer further shrinks (because having reached shrinkage limit), and only has the second notch part 21f to shrink.
The first notch part 21d and the second notch part 21f as mentioned above, function is different during with non-inspection when checking, and in order to have this function difference, forms the different mode of pitch of spiral.In Fig. 3 of summary section of a kind of embodiment of expression cartridge, the screw pitch d2 of the screw pitch d1 of the first notch part 21d and the second notch part 21f is formed differently.
In described Fig. 3, short with the screw pitch d1 that becomes the first notch part 21d, and the mode of the spiral segment distance of the second notch part 21f relatively forms.In addition, in Fig. 3, forming the width of wall of the first notch part 21d and the width that forms the wall of the second notch part 21f is to form with identical length.In addition, the width of these spirals is special the restriction not, then can adjust arbitrarily as long as can play the function of the first notch part 21d and the second notch part 21f.
The first notch part 21d and the second notch part 21f as mentioned above, the amount of contraction (contracted length) that can shrink during with non-inspection when checking is different, forms accordingly the different mode of function.That is, the amount of contraction during non-check is subjected to the impact of the first notch part 21d and the second notch part 21f, and the amount of contraction when checking is in the impact that shrinkage limit only is subjected to the second notch part 21f because of the first notch part 21d.Therefore, the gap width of the second notch part 21f forms widelyr than the gap width of the first notch part 21d.By forming in this wise, the first notch part 21d and the second notch part 21f shrink when non-inspection, and only have the second notch part 21f further to shrink when checking.
In the above description, illustrated when bar-like member 22 is connected to the checkpoint and implement checks, reached the situation of the limit of the contraction of the first notch part 21d, but also can replace the first notch part 21d ground, made the second notch part 21f reach the limit of contraction.In the present invention, as long as any one among the first notch part 21d or the second notch part 21f reaches the limit of contraction.
(1) at first, prepare the heart yearn (not shown) of the hollow bulb of formation cartridge.In addition, for described heart yearn, use the heart yearn desirable thickness, that have electric conductivity (for example, diameter 30 μ m, stainless steel (SUS)) of the internal diameter of regulation cartridge.
(2) then, apply the photoresist coating and cover the side face of described heart yearn at heart yearn (stainless steel wire).Desirable part to described photoresist exposes/develops/heat treated and form spiral helicine mask.At this moment, for example, heart yearn is rotated along central shaft, and utilize laser to expose to form spiral helicine mask.In order to form cartridge of the present invention, the mask that is used to form two places of the first notch part and the second notch part is formed on the assigned position.
(3) then, described heart yearn is implemented nickel plating.At this moment, because heart yearn is electric conductivity, so the position that does not form photoresist mask is by nickel plating.
(4) then, remove photoresist mask, pull out heart yearn, form the cartridge of desirable length.Can certainly after heart yearn is pulled out fully, cylindrical shell be cut off.
Fig. 4 is the summary section of expression bar-like member of the present invention.
Bar-like member 22 is parts of the contacted electric conductivity of rearward end 22b and checkpoint.Bar-like member 22 has elongated shape, and for example can form cylindrical shape or drum.Cartridge 21 inside be given prominence to and be configured in to described bar-like member 22 can from the 21b of open rearward end section of cartridge 21.
The leading section 22a of bar-like member 22 can be configured in the inside of cartridge 21, but preferably is configured in the 21c of top cylinder section of cartridge 21.The leading section 22a of bar-like member 22 so connect the part of the first notch part 21d and the second notch part 21f, has the function as the flexible guiding device of these notch parts owing to being configured in the 21c of top cylinder section inside.The leading section 22a of bar-like member 22 can be adjusted to not the mode with electrode body 4 butts described later.
The rearward end 22b of bar-like member 22 directly and the checkpoint butt.The shape of described rearward end 22b is not particularly limited, and can select the shapes such as crown shape, sharp shape or triangular pyramid shape.The rearward end 22b of bar-like member 22 can be outstanding from the 21b of open rearward end section of cartridge 21, and that the outstanding length of described rearward end 22b can be set at least is longer than the thickness of the second plate-shaped member 32 of holder 3 described later.
Bar-like member 22 can form with the material of electric conductivity, such as adopting copper (Cu), nickel (Ni) or their alloy etc.
Check with anchor clamps 1 and possess the holder 3 that keeps checking with contactor 2.
The first bullport 31h of the first plate-shaped member 31 is formed in the through hole that has identical diameter on the thickness direction of the first plate-shaped member 31, and the external diameter of described through hole can be formed the slightly large diameter of external diameter that has than the 21c of top cylinder section of cartridge 21.Utilize described the first bullport 31h, the front end opening 21a of cartridge 21 can be guided to the electrode part 41 that is arranged on the regulation on the electrode body 4.
The thickness of the first plate-shaped member 31 is preferably and forms shortlyer than the length of the 21c of top cylinder section.This is to contact with the first plate-shaped member 31 and wear and tear for fear of the first flexible notch part 21d.
The second plate-shaped member 32 can be configured to have the interval of regulation with the first plate-shaped member 31 and have the second bullport 32h to the checkpoint guiding for the rearward end 22b that will check the bar-like member 22 of using contactor 2.The thickness of the second plate-shaped member 32 can be adjusted into bar-like member 22 when checking rearward end 22b can with the sufficient length of checkpoint butt.
The second bullport 32h can be formed has the identical diameter that the thickness direction at the second plate-shaped member 32 connects, and forms the large and external diameter less than the external diameter of cartridge 21 of the external diameter that has than bar-like member 22.By forming in this wise the second bullport 32h, in the time will checking with contactor 2 insertion holder 3, check the 21b of open rearward end section with the cartridge 21 of contactor 2 by the surface of the second plate-shaped member 32 and electrode body 4 clampings, become to make and check with the rearward end 22b of the bar-like member 22 of contactor 2 from the outstanding state of the second plate-shaped member 32.
The second plate-shaped member 32 can be configured to have apart from electrode part 41 the interval L of regulation, and the interval L of described regulation can be set as the short mode of length than the long axis direction of cartridge under the no load condition 21.The difference of the length of the interval L of described regulation and the natural length of cartridge 21 becomes the amount of contraction of the first notch part 21d and the second notch part 21f.In addition, utilize the interval L of described regulation, the first notch part 21d can be set to the state that becomes near the degree of the limit that is retracted to contraction, and the second notch part 21f can be configured to a small amount of state that shrinks.In addition, in the situation of the bar-like member 22 that checks usefulness contactor 2 and checkpoint butt, cartridge 21 becomes the shorter length of interval L than regulation.At this moment, the first notch part 21d reaches shrinkage limit, and the second notch part 21f shrinks.
By forming in this wise, to check when being installed on the holder 3 with contactor 2, the first notch part 21d of cartridge 21 and the second notch part 21f shrink and become energy accumulating state, and cartridge 21 is installed with the state of pressing respectively electrode part 41 and the second plate-shaped member 32.
In Fig. 5, the second bullport 32h is represented as the through hole with identical diameter, but also can adopt the through hole that is formed by two holes with two various outer diameters that are configured on the same axle (upper hole and lower hole, not shown).In the case, upper hole has than the slightly large diameter of the external diameter of cartridge 21 and is configured in electrode part one side of the second plate-shaped member 32, and that lower hole has a external diameter than cartridge 21 is little and than the slightly large diameter of the external diameter of bar-like member 22 and be configured in checkpoint one side of the second plate-shaped member 32.
By forming in this wise upper hole and lower hole, to check with contactor 2 when the first bullport 31h inserts and be installed on the holder 3, utilize diameter different in external diameter and lower hole of the 21b of open rearward end section of cartridge 21, can be configured to cartridge 21 be locked and only have bar-like member 22 from the outstanding mode of the second bullport 32h.
In embodiment shown in Figure 5, the interval that the first plate-shaped member 31 and the second plate-shaped member 32 are configured to have regulation, but also can between the first plate-shaped member 31 and the second plate-shaped member 32, the 3rd plate-shaped member (not shown) be set.Described the 3rd plate-shaped member can stacked plate-shaped member more than or two, and can be configured in the space that is produced by described interval.In the case, for example, the 3rd plate-shaped member also can form by the stacked a plurality of plate-shaped members identical with the first plate-shaped member 31.In addition, as long as the through hole that is formed on the 3rd plate-shaped member has the size that checks with cartridge 21 perforations of contactor 2, its section configuration is not particularly limited.
More than be the inspection of the first embodiment of the present invention with the explanation of the structure of anchor clamps 1.
To the following describes in order assembling and to check with anchor clamps 1, be installed in situation on the holder 3 with checking with contactor 2.
In the time of on holder 3 being installed in inspection usefulness anchor clamps 1, at first, will checking with contactor 2 and insert holders 3.In the situation that will check that inspection is passed the first bullport 31h with the rearward end 22b of the bar-like member 22 of contactor 2 with contactor 2 insertion holders 3.Then, make described rearward end 22b pass the second bullport 32h and insert and connect from the second guiding port 32h.
The inspection of insertion holder 3 utilizes the 21b of open rearward end section of cartridge 21 with contactor 2 and locks on holder 3.The front end opening 21a of cartridge 21 and the rearward end 22b of bar-like member 22 are configured to distinguish outstanding laterally mode from the first bullport 31h and the second bullport 32h.
If will check with contactor 2 and insert holders 3, then the first plate-shaped member 31 is to electrode body 4 butts, so that the front end opening 21a of cartridge 21 presses and joins to the electrode part 41 of regulation.At this moment, because cartridge 21 is crimped on the electrode part 41, so each the first notch part 21d and the second notch part 21f shrink and become energy accumulating state.At this moment, the first notch part 21d is near the state in the stage of the limit that is retracted to contraction, and the second notch part 21f becomes the state that only shrinks on a small quantity.
Like this, the inspection anchor clamps 1 with inspection usefulness contactor 2 have been finished.
Below, illustrate and in inspection, use the situation (during inspection) that checks with anchor clamps 1.
Fig. 6 is that expression has used inspection to use the summary section of the state when checking of anchor clamps with the inspection of contactor.
When checking, will check with anchor clamps 1 to be installed on the testing fixture (not shown), wire 5 is electrically connected with the control module of testing fixture.
Testing fixture for example possesses makes the plummer that carries checked property 8 respectively at the mobile mobile unit of xyz direction of principal axis, so that the inspection of regulation is crimped on the mode on a plurality of checkpoints 81 of checked property 8 with the rearward end 22b of the bar-like member 22 of contactor 2, makes objective table in the movement of xyz direction of principal axis and check.
When testing fixture carries out the location of objective table can make desirable inspection be connected to mode on the checkpoint 81 of regulation with the rearward end 22b of contactor 2, with regard to so that each checks that the rearward end 22b with contactor 2 moves with the mode that each checkpoint 81 conductings contact.
At this moment, if desirable rearward end 22b is connected to the checkpoint 81 of regulation, then at first, because rearward end 22b becomes the state that is crimped, so the first notch part 21d of cartridge 21 and the second notch part 21f shrink.In the case, the first notch part 21d before the amount of contraction limit reaches shrinkage limit, and the second notch part 21f shrinks.
Therefore, when non-inspection, the first notch part 21d and the second notch part 21f work, and when checking, the second notch part 21f works.That is, when non-inspection, the load that is applied on the second plate-shaped member 32 of holder 3 is produced by the first notch part 21d and the second notch part 21f, therefore can be arranged to the little load of load when checking.Can when checking, provide strong pressing force and weak pressing force is provided when non-the inspection.
Claims (4)
1. one kind will become inspected object and has the checked property of a plurality of checkpoints and check the inspection anchor clamps that the testing fixture of the electrical characteristics between described checkpoint is electrically connected, and it is characterized in that possessing:
The electrode body that possesses a plurality of electrode parts that are electrically connected with described testing fixture;
The inspection contactor that described electrode part is electrically connected with described checkpoint; And
Keep the described inspection holder of contactor,
Wherein, described inspection possesses with contactor:
Two ends have the cartridge of electric conductivity of the surperficial butt of opening and front end opening and described electrode part;
Give prominence to and be configured in the inside of described cartridge and the bar-like member of the electric conductivity that the rear end contacts with described checkpoint from the open rearward end section of described cartridge; And
The fixed part that described cartridge is electrically connected with described bar-like member,
Described holder possesses:
Have first plate-shaped member of described front end opening to the first bullport of described electrode body guiding; And
Have the rear end of described bar-like member the second plate-shaped member to the second bullport of described checkpoint guiding, described cartridge has:
Have with the front end opening of the Surface Contact of described electrode part and with the leading section of described bar-like member and be contained in inner top cylinder section;
Form the diameter identical with described top cylinder section and be connected and be formed in the wall section of described cartridge the first notch part of the flexible spiral helicine breach of long axis direction with described top cylinder section;
The middle cylinder section that forms the diameter identical with described the first notch part and be connected with described the first notch part;
Form the diameter identical with described middle cylinder section and be connected and be formed in the wall section of described cartridge the second notch part of the flexible spiral helicine breach of long axis direction with described middle cylinder section; And
Form the diameter identical with described the second notch part and be connected and possess the doffing section of described fixed part with described the second notch part,
In described the first notch part or described the second notch part any one reaches the limit of contraction when described bar-like member and described checkpoint butt and enforcement inspection.
2. inspection anchor clamps as claimed in claim 1, it is characterized in that: described the first notch part is different with the pitch of the spiral of described the second notch part.
3. inspection anchor clamps as claimed in claim 1 or 2, it is characterized in that: the gap width of described the first notch part is different from the gap width of described the second notch part.
4. the inspection contactor that is electrically connected with a plurality of electrode parts that possess in the electrode body that checks with anchor clamps of a plurality of checkpoints of the checked property that will become inspected object, described electrode part is electrically connected with the testing fixture that checks the electrical characteristics between described checkpoint, and described inspection possesses with contactor:
Become the outside cylindrical shell of the electrode tip of front end opening and described electrode part butt; And
It is outstanding and is connected with the internal electrical of described outside cylindrical shell and the inboard cylindrical shell of the electric conductivity of inspection end that configure and that become rearward end and the crimping of described checkpoint coaxially from the open rearward end section of described outside cylindrical shell,
Described outside cylindrical shell has:
Outside top cylinder section with the front end opening that becomes described electrode tip;
With described outside top cylinder section same diameter and front end opening and the open rearward end section of described outside top cylinder section be connected and possess at side face the first notch part of the tubular of the spiral helicine breach that forms at long axis direction;
With described the first notch part same diameter and with the outside that described the first notch part is connected in cylinder section;
With cylinder section same diameter in the described outside and be connected and possess at side face the second notch part of the tubular of the spiral helicine breach that forms at long axis direction with cylinder section in the described outside; And
With outside doffing section described the second notch part same diameter and be connected and possess fixed part with described the second notch part,
Described inboard cylindrical shell has:
Inboard doffing section with rearward end of becoming described inspection end; And
Be configured in the inboard top cylinder section of described outside inner barrel,
Wherein, described fixed part is electrically connected described outside cylindrical shell and is fixing with described inboard cylindrical shell; And
Described the first notch part is different with the pitch of the spiral of described the second notch part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-159519 | 2011-07-21 | ||
| JP2011159519A JP5845678B2 (en) | 2011-07-21 | 2011-07-21 | Inspection contact and inspection jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102890166A true CN102890166A (en) | 2013-01-23 |
| CN102890166B CN102890166B (en) | 2015-03-25 |
Family
ID=47533731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210252405.5A Active CN102890166B (en) | 2011-07-21 | 2012-07-20 | Inspection contactor and inspection fixture |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5845678B2 (en) |
| KR (1) | KR101312340B1 (en) |
| CN (1) | CN102890166B (en) |
| TW (1) | TWI457571B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108603897A (en) * | 2016-02-08 | 2018-09-28 | 日本电产理德股份有限公司 | Contact terminal checks jig and check device |
| CN110036300A (en) * | 2016-11-30 | 2019-07-19 | 日本电产理德股份有限公司 | Contact terminal, gauging fixture and check device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6317270B2 (en) * | 2015-02-03 | 2018-04-25 | 株式会社日本マイクロニクス | Electrical connection device and pogo pin |
| TW201723492A (en) * | 2015-12-31 | 2017-07-01 | 旺矽科技股份有限公司 | Probe structure and probe device |
| CN109596677A (en) * | 2018-11-02 | 2019-04-09 | 大族激光科技产业集团股份有限公司 | A kind of quality detection device, method, system and integrated probe component |
| JP2022060711A (en) | 2020-10-05 | 2022-04-15 | 東京特殊電線株式会社 | Contact probe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900748A (en) * | 2009-05-29 | 2010-12-01 | 日本电产理德株式会社 | Inspection fixture |
| CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3990915B2 (en) | 2002-01-23 | 2007-10-17 | 日本発条株式会社 | Conductive contact |
| US6945827B2 (en) * | 2002-12-23 | 2005-09-20 | Formfactor, Inc. | Microelectronic contact structure |
| JP4614434B2 (en) * | 2004-09-30 | 2011-01-19 | 株式会社ヨコオ | probe |
| JP2010281592A (en) * | 2009-06-02 | 2010-12-16 | Nidec-Read Corp | Probe and inspection jig |
| JP5381609B2 (en) * | 2009-10-20 | 2014-01-08 | 日本電産リード株式会社 | Inspection jig and contact |
| GB201000344D0 (en) * | 2010-01-11 | 2010-02-24 | Cambridge Silicon Radio Ltd | An improved test probe |
| JP4572303B1 (en) * | 2010-02-12 | 2010-11-04 | 株式会社ルス・コム | Method for manufacturing contact for electric current inspection jig, contact for electric current inspection jig manufactured thereby, and electric current inspection jig including the same |
-
2011
- 2011-07-21 JP JP2011159519A patent/JP5845678B2/en not_active Expired - Fee Related
-
2012
- 2012-07-20 CN CN201210252405.5A patent/CN102890166B/en active Active
- 2012-07-20 TW TW101126326A patent/TWI457571B/en not_active IP Right Cessation
- 2012-07-20 KR KR1020120079080A patent/KR101312340B1/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900748A (en) * | 2009-05-29 | 2010-12-01 | 日本电产理德株式会社 | Inspection fixture |
| CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108603897A (en) * | 2016-02-08 | 2018-09-28 | 日本电产理德股份有限公司 | Contact terminal checks jig and check device |
| CN110036300A (en) * | 2016-11-30 | 2019-07-19 | 日本电产理德股份有限公司 | Contact terminal, gauging fixture and check device |
| CN110036300B (en) * | 2016-11-30 | 2020-03-06 | 日本电产理德股份有限公司 | Contact terminal, inspection jig, and inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201329457A (en) | 2013-07-16 |
| JP2013024716A (en) | 2013-02-04 |
| CN102890166B (en) | 2015-03-25 |
| KR20130011964A (en) | 2013-01-30 |
| JP5845678B2 (en) | 2016-01-20 |
| TWI457571B (en) | 2014-10-21 |
| KR101312340B1 (en) | 2013-09-27 |
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