KR20130011964A - Probe and fixture - Google Patents

Abstract

PURPOSE: A test contactor and a test tool are provided to simply generates difference of pressure by supplying weak pressure in a non-check. CONSTITUTION: An electrode body(4) includes an electrode unit(41). The electrode unit is electrically connected with a detection device. A test contactor(2) electrically contacts an inspection point. A supporter(3) supports the test contactor. A conductive member contacts with a surface of the electrode unit.

Description

Inspection contact and inspection jig {PROBE AND FIXTURE}

The present invention is an inspection jig for electrically connecting an inspection point set in advance on an inspection target portion of an object to be inspected and an inspection device that performs this inspection. The present invention relates to an examination contactor used in an examination tool and an examination jig.

The inspection jig with the inspection contact is supplied from the inspection device to the predetermined inspection position of the inspection target portion provided by the inspection object via the inspection contact, and at the same time detects the electrical signal from the inspection target portion. In this case, the electrical characteristics of the inspection subject are detected or operation tests are performed.

Examples of the inspection object include various substrates such as printed wiring boards, flexible substrates, ceramic multilayer wiring boards, liquid crystal displays, plasma display electrode plates, semiconductor package package substrates, film carriers, semiconductor wafers, semiconductor chips, and CSPs. And a semiconductor device such as a chip size package.

In this specification, the above-mentioned test object is collectively called "the test object", and the test target part formed in the test object is called an "inspection part". In addition, an inspection point is set in the inspection portion for actually inspecting the electrical characteristics of the inspection portion, and the contact point is press-contacted to this inspection point, thereby bringing into contact with the inspection portion.

In this inspection jig, one end of the contactor is pressed against the inspection point on the wiring (inspection portion), and the other end is pressed against the electrode portion electrically connected to the substrate inspection apparatus. Through this inspection jig, a current or voltage for measuring electrical characteristics of the wiring is supplied from the board inspection apparatus, and an electrical signal detected from the wiring is transmitted to the substrate inspection apparatus.

The jig | tool disclosed by patent document 1 is mentioned as such an inspection jig | tool. In the inspection jig of Patent Document 1, a coiled spring is attached to a conductive movable body (contactor). In such an inspection jig, when the contactor is mounted on the holder, the coil spring contracts and is pressed toward the conductive portion, thereby providing a good contact state between the conductive portion and the contactor.

In addition, the contactor obtains a predetermined pressure by contracting the coil spring by a predetermined amount (a predetermined length) after the contactor comes into contact with the inspection point so as to break an insulating layer such as an oxide film formed on the surface of the inspection point and contact with the inspection point. It is adjusted to be.

In particular, since a lot of inspection points are set on the substrate recently, a number of contactors that must correspond to these inspection points are also mounted in the holder. For this reason, as described above, when the number of contacts increases, the coil spring that contracts also increases, so that a large force is applied to the holder. The holder loaded with a large force had a problem that the whole bent by the force of the coil spring. In order to reduce the force applied to the holder, a method of reducing the elastic force of the coil spring may be considered, but in this case, when the coil spring is contracted by a predetermined length, the coil spring may not provide the pressure desired by the inspector, There was a problem in that it could not be contacted with sufficient pressure.

Japanese Patent Laid-Open No. 2003-215160

The present invention not only can cope with the miniaturization and complexity of the substrate, but also provides a micro contactor and an inspection jig using the contactor that can provide a strong pressure during inspection and a weak pressure during non-inspection.

The invention described in claim 1,

An inspection jig for electrically connecting an inspection object having a plurality of inspection points to be inspected and an inspection device for inspecting electrical characteristics between the inspection points,

An electrode body having a plurality of electrode portions electrically connected to the inspection apparatus;

An inspection contact for electrically connecting the electrode portion and the inspection point;

A support for supporting the inspection contact

Respectively,

The contact for inspection,

A conductive ordinary member having openings at both ends and having a tip opening contacting the surface of the electrode portion;

A conductive rod-shaped member disposed inside the normal member while protruding from the rear end opening of the normal member, the rear end of which is in contact with the inspection point;

A fixing portion for electrically connecting the ordinary member and the rod-shaped member

Respectively,

The support,

A first plate member having a first guide hole for guiding the tip opening portion to the electrode body;

A second plate-like member having a second guide hole for guiding a rear end of the rod-like member to the inspection point;

Respectively,

The ordinary member,

A top portion having a tip opening portion in contact with the surface of the electrode portion and having a tip portion of the rod-shaped member housed therein;

A first groove portion formed to have the same diameter as the upper portion and connected to the upper portion, and having a spiral groove extending in a long axis direction in a wall portion of the ordinary member;

A middle barrel portion formed to have the same diameter as the first groove portion and connected to the first groove portion;

A second groove portion which is formed to have the same diameter as the middle barrel portion and is connected to communicate with the middle barrel portion and has a spiral groove extending in the longitudinal direction in the wall portion of the ordinary member;

It is formed to have the same diameter as the second groove portion and connected to communicate with the second groove portion, the lower cylinder portion having the fixing portion

Respectively,

When the rod-shaped member is in contact with the inspection point when the inspection is carried out, the inspection jig, characterized in that any one of the first groove portion or the second groove portion reaches the shrinkage limit.

to provide.

The invention described in claim 2,

It provides a test jig according to claim 1, characterized in that pitches of spirals of the first groove portion and the second groove portion are different from each other.

The invention described in claim 3,

It provides a test jig according to claim 1 or 2, wherein the groove width of the first groove portion is different from the groove width of the second groove portion.

The invention described in claim 4,

An inspection contact for electrically connecting a plurality of inspection points of an object to be inspected and a plurality of electrode portions provided in an electrode body of an inspection jig electrically connected to an inspection device for inspecting electrical characteristics between the inspection points. ,

The contact for inspection,

An outer cylinder whose tip opening portion is an electrode end in contact with the electrode portion,

A conductive inner cylinder that protrudes from the rear end opening of the outer cylinder and is electrically connected to the inside of the outer cylinder and disposed coaxially, and the rear end of the outer cylinder is an inspection end that is pressed against the inspection point. )

Respectively,

The outer cylinder is,

An outer upper cylindrical portion having a tip opening which becomes the electrode end;

A first first groove portion having the same diameter as that of the outer upper cylindrical portion and having a spiral groove formed at an edge thereof in a axial direction, the leading end opening being connected to the rear opening of the outer upper cylindrical portion;

An outer barrel portion having the same diameter as the first groove portion and connected to communicate with a rear opening of the first groove portion;

Respectively,

A normal second groove portion having the same diameter as the outer barrel portion and connected to communicate with the outer barrel portion, and having a spiral groove formed at an edge thereof in a long axis direction;

The outer lower cylinder portion having the same diameter as the second groove portion and connected to communicate with the second groove portion, and having a fixing portion.

Respectively,

The inner cylinder is,

An inner lower barrel portion having a rear end portion to be the inspection end;

An inner upper barrel disposed inside the outer cylinder

Respectively,

The fixing part,

Fixed while electrically connecting the outer cylinder and the inner cylinder,

Inspection contact, characterized in that the pitch of the spiral of the first groove portion and the second groove portion is different

to provide.

According to the invention of Claims 1 and 4, since the electrically conductive rod-like member is electrically connected and fixed while being disposed coaxially inside the electrically conductive ordinary member having two spiral groove portions, these ordinary members and the rod-like member are fixed. Will function as a test contact. The groove portion formed in the ordinary member is formed integrally with the ordinary member and functions as an elastic portion that contracts in the major axis direction. In other words, the contact for inspection is formed only of the ordinary member, the rod-shaped member, and the fixed portion. Thereby, the number of parts can be reduced rather than the inspection contact which uses a coil spring, and the inspection contact can be formed simply. The inspection contact also provides a fine contact and an inspection jig using the contactor, which can provide a strong pressure during the inspection and a weak pressure during the non-inspection. According to the invention as set forth in claim 2, it is possible to easily generate a difference in pressure at the time of inspection and non-inspection by varying the spiral pitch of the first groove portion and the second groove portion. According to the invention described in claim 3, it is possible to easily generate a difference in pressure at the time of inspection and non-inspection by varying the groove width of the first groove portion and the second groove portion.

1 is a schematic configuration diagram showing an inspection jig according to the present invention.
2 is a schematic cross-sectional view of an inspection contact according to the present invention.
3 is a schematic cross-sectional view of a normal member of an inspection contact according to the present invention.
4 is a schematic cross-sectional view of the rod-like member of an inspection contact according to the present invention.
5 is a schematic cross-sectional view showing a state in which a test contact is mounted according to the present invention.
6 is a schematic cross-sectional view showing an operation state during inspection of the inspection jig according to the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION The best mode for carrying out the present invention will be described. 1 is a schematic configuration diagram showing a first embodiment of an inspection jig according to the present invention. The inspection jig 1 according to the present invention includes a plurality of contacts 2, a support 3 which fixes these contacts 2 in a multiplied form, and each contactor 2 while supporting the support 3. ), An electrode body 4 having an electrode portion 41 which is brought into a conductive state, and a conductor portion 5 electrically connected to and extending from the electrode portion 41. In addition, in Fig. 1, three contacts are shown as a plurality of contacts 2 and three conductors 5 corresponding to each of them are shown at the same time. Can be decided accordingly.

According to the present invention, the groove portion formed in the conductive ordinary member functions as an elastic portion, and the contact pressure necessary for the inspection and the constant contact with the electrode portion 41 are varied by changing the elastic characteristics of the groove portion formed in at least two places. It is characterized by being able to supply a pressure contact force. By constructing a contactor for inspection as in the present invention, it is possible not only to cope with the miniaturization and complexity of the substrate, but also to reduce and simplify the number of parts, and to provide a large contact pressure at the inspection point during inspection, It is possible to provide a small contact pressure to the support.

The inspection contact 2 used for the inspection jig of the present invention will be described. 2 is a schematic cross-sectional view of the inspection contact 2 according to the present invention. One end of the inspection contact 2 is electrically connected to the inspection point, and the other end is electrically connected to the electrode portion 41, which will be described later.

This inspection contact 2 is composed of a normal member 21 and a rod-shaped member 22 (see Fig. 2). The ordinary member 21 is provided with openings 21a and 2lb at both ends, and one tip opening portion 21a is in contact with the surface of the electrode portion 41. The ordinary member 21 is formed of a conductive material, for example, copper, nickel or an alloy thereof.

3 is a schematic cross-sectional view of a conventional member according to the present invention. As shown in Fig. 3, the ordinary member 21 includes an upper cylinder portion 21c, a first groove portion 21d, a middle cylinder portion 21e, a second groove portion 21f, and a lower cylinder portion 21g. . The upper cylinder portion 21c has a tip opening portion 21a in contact with the surface of the electrode portion 41, and accommodates the rear end portion 22a of the rod-shaped member 22 described later. The upper cylinder portion 21c is a part of the ordinary member 21, and its outer diameter and inner diameter are the same as those of the ordinary member 21.

The first groove portion 21d is formed to have the same diameter as the upper cylinder portion 21c, is connected to communicate with the upper cylinder portion 21c, and a spiral groove extending in the longitudinal direction is formed in the wall portion of the ordinary member 21. . Since the first groove 21d is formed on the wall surface of the ordinary member 21, the outer diameter and the inner diameter are the same as those of the normal member 21.

The middle barrel portion 21e is formed to have the same diameter as the first groove portion 21d and is connected to communicate with the first groove portion 21d. The middle barrel portion 21e is a part of the ordinary member 21, and the outer diameter and the inner diameter are the same as those of the normal member 21.

The second groove portion 21f is formed to have the same diameter as the barrel portion 21e, is connected to communicate with the barrel portion 21e, and a spiral groove extending in the longitudinal direction is formed in the wall portion of the ordinary member 21. . Since the second groove portion 21f is formed on the wall surface of the ordinary member 21, the outer diameter and the inner diameter become the same shape as the normal member 21.

The lower tube portion 21g is formed to have the same diameter as the second groove portion 21f and is connected to communicate with the second groove portion 21f. The lower cylinder portion 21g includes a fixing portion 23 for fixing the rod-like member 22 and the ordinary member 21 to be described later and electrically connecting the same. The lower cylinder portion 21g is a part of the ordinary member 21, and the outer diameter and the inner diameter are the same as those of the normal member 21. Moreover, this lower cylinder part 21g is provided with rear end opening part 2lb.

As described above, the ordinary member 21 is provided with an upper barrel portion 21c, a first groove portion 21d, a middle barrel portion 21e, a second groove portion 21f, and a lower cylinder portion 21g. The ordinary member 21 is constituted.

The first groove portion 21d reaches the shrinkage limit when the rod-shaped member 22 contacts the inspection point and is examined (at the time of inspection). This is because the space formed by the groove formed in the first groove 21d is in a state where the first groove 21d is deflated, thereby reaching a contraction limit. Since the first groove portion 21d reaching the shrinkage limit no longer contracts, the first groove portion 21d functions as the upper cylinder portion 21c, the middle cylinder portion 21e, and the lower cylinder portion 21g.

As described above, the first groove 21d reaches the shrinkage limit during the inspection, but the second groove 21f does not reach the shrinkage limit. This is because the non-uniformity of the inspection point (bump) height can be absorbed by the contraction of the second groove 21f by allowing the shrinkage amount of the second groove 21f to have a margin when the rod-shaped member 22 contacts the inspection point. to be.

When the rod-shaped member 22 does not contact the inspection point (non-inspection), the inspection contact 2 is supported by the support 3, which will be described later, so that the first groove 21d and the second groove portion ( 21f) is in a contracted state. At this time, the first groove 21d is contracted to near the contraction limit, and the second groove 21f is slightly contracted. In other words, during the non-inspection, the first groove 21d is greatly contracted and the second groove 21f is slightly contracted. At the time of inspection, the first groove 21d is no longer contracted (since the shrinkage limit is reached), and only the second groove 21f is contracted.

The first groove portion 21d and the second groove portion 21f have different functions at the time of inspection and non-inspection as described above, so that the pitch of the spiral is formed differently in order to have a difference in this function. In Fig. 3 showing a schematic sectional view of one embodiment of the ordinary member, the spiral pitch d1 of the first groove 21d and the spiral pitch d2 of the second groove 21f are formed differently. In FIG. 3, the spiral pitch d1 of the first groove 21d is short, and the spiral pitch d1 of the second groove 21f is relatively long. 3, the width of the wall surface forming the first groove portion 21d and the width of the wall surface forming the second groove portion 21f are the same length. These spiral widths are not particularly limited and can be arbitrarily adjusted as long as the functions of the first groove 21d and the second groove 21f can be exerted.

As described above, the first groove portion 21d and the second groove portion 21f are formed differently by a difference in the amount of shrinkage (contraction length) that can be contracted at the time of inspection and non-inspection. That is, the amount of shrinkage at the time of non-inspection is affected by the first groove 21d and the second groove 21f, but the amount of shrinkage at the time of inspection is only affected by the second groove 21f since the first groove 21d is the limit of shrinkage. do. To this end, the groove width of the second groove portion 21f is formed to be wider than the groove width of the first groove portion 21d. By this formation, the first groove portion 21d and the second groove portion 21f are contracted during the non-inspection, and only the second groove portion 21f can be additionally contracted during the inspection.

In the above description, the case where the first groove portion 21d reaches the shrinkage limit when the rod-shaped member 22 contacts the inspection point and the inspection is performed is described. However, instead of the first groove portion 21d, the second groove portion ( 21f) may reach the shrinkage limit. In the present invention, either the first groove 21d or the second groove 21f may reach the shrinkage limit.

The ordinary member 21 of the present invention has an upper cylinder portion 21c, a first groove portion 21d, a middle cylinder portion 21e, a second groove portion 21f, and a lower cylinder portion 21g as described above. In order to manufacture the member 21, the following manufacturing method can be employ | adopted.

(1) First, a core wire (not shown) forming a hollow portion of the ordinary member is prepared. In addition, as this core wire, the core wire which has electroconductivity (for example, diameter 30 micrometers, stainless steel (SUS)) of the desired thickness which prescribes the inner diameter of a normal member is used.

(2) Subsequently, a photoresist film is applied to the core wire (stainless wire) to cover the peripheral surface of the core wire. The desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, the core wire may be rotated along a central axis, and exposed by laser to form a spiral mask. In order to form the ordinary member of the present invention, two masks for forming the first and second grooves are formed at predetermined positions.

(3) Subsequently, this core wire is nickel plated. At this time, since the core wire is conductive, the portion where the photoresist mask is not formed is nickel plated.

(4) Subsequently, the photoresist mask is removed to remove the core wire to form a normal member of a desired length. The cylinder may be cut after the core wire is completely removed.

4 is a schematic cross-sectional view showing a rod-like member according to the present invention. The rod-like member 22 is a conductive member whose rear end portion 22b is in contact with the inspection point. The rod-shaped member 22 has an elongate shape, for example, is formed in a cylindrical shape or a cylindrical shape. The rod-shaped member 22 protrudes from the rear end opening 2lb of the ordinary member 21 and is disposed inside the ordinary member 21. The tip portion 22a of the rod-shaped member 22 is disposed inside the normal member 21, but is preferably disposed in the upper portion 21c of the normal member 21. Since the tip portion 22a of the rod-like member 22 is disposed inside the upper cylinder portion 21c, it penetrates the portion of the first groove portion 21d or the second groove portion 21f, and functions as a guide that the groove portion stretches. Done. The tip portion 22a of the rod-shaped member 22 is adjusted so as not to contact the electrode body 4 described later.

The rear end 22b of the rod-shaped member 22 is in direct contact with the inspection point. The shape of this rear end 22b is not specifically limited, and shapes, such as a crown type, a sharp type, and a triangular pyramid, can be selected. The rear end 22b of the rod-shaped member 22 protrudes from the rear end opening 2lb of the ordinary member 21, and the protruding length of the rear end 22b is at least the second plate-like member of the support 3 to be described later ( It is installed longer than the thickness of 32). The rod-shaped member 22 is formed of a conductive material. For example, copper (Cu), nickel (Ni), or an alloy thereof may be employed.

The fixing part 23 electrically connects the normal member 21 and the rod-shaped member 22. The fixing part 23 is formed in the lower cylinder part 21g of the normal member 21, and is formed in the rear end part 22b side of the rod-shaped member 22. As shown in FIG. The fixing portion 23 can be formed by, for example, caulking, laser welding, arc welding, adhesive, or the like. The ordinary member 21 can be electrically connected to the rod-shaped member 22 while being electrically connected. 21) and the rod-shaped member 22 can be adopted as long as it is a fixing method that does not significantly deform the shape.

The inspection jig 1 includes a support 3 that supports the inspection contact 2. The support 3 is formed of an insulating material. The support 3 has a first plate member 31 having a first guide hole 31h for guiding the tip opening portion 21a of the ordinary member 21 to the electrode portion 41 of the electrode body 4 described later. ). The support body 3 is equipped with the 2nd plate-shaped member 32 provided with the 2nd guide hole 32h which guides the rear end part 22b of the rod-shaped member 22 to an inspection point.

The first guide hole 31h of the first plate-like member 31 is formed as a through hole having a constant diameter in the thickness direction of the first plate-like member 31, and the outer diameter of the through-hole is It is formed slightly larger than the outer diameter of the upper cylinder portion 21c. The tip opening 21a of the normal member 21 is guided to the predetermined electrode portion 41 provided in the electrode body 4 by the first guide hole 31h.

It is preferable that the thickness of the first plate-shaped member 31 is shorter than the length of the upper cylinder portion 21c. This is to prevent the occurrence of abrasion due to contact between the first and second grooves 21d and the first plate-shaped member 31 that are stretched.

The second plate member 32 is arranged at a predetermined interval from the first plate member 31, and is used to guide the rear end 22b of the rod-shaped member 22 of the inspection contact 2 to the inspection point. Two guide holes 32h are provided. The thickness of the second plate-shaped member 32 is adjusted to a length sufficient to allow the rear end 22b of the rod-shaped member 22 to contact the inspection point at the time of inspection.

The second guide hole 32h is formed to have a constant diameter penetrating in the thickness direction of the second plate-like member 32 and is formed to have an outer diameter larger than the outer diameter of the rod-shaped member 22 and smaller than the outer diameter of the normal member 21. do. As the second guide hole 32h is formed in this way, when the inspection contactor 2 is inserted into the support 3, the rear end opening 2lb of the normal member 21 of the inspection contactor 2 becomes the second plate-shaped member ( It is pinched by the surface of 32 and the electrode body 4, and the rear end part 22b of the rod-shaped member 22 of the inspection contact 2 will be in the state which protruded from the 2nd plate-shaped member 32. As shown in FIG.

The second plate member 32 is arranged at a predetermined distance L from the electrode portion 41, which is set shorter than the length in the major axis direction of the normal member 21 in the no-load state. . The difference between the predetermined distance L and the length of the natural state of the ordinary member 21 is the amount of shrinkage of the first groove 21d and the second groove 21f. Moreover, by this predetermined space | interval L, the 1st groove part 21d is set so that it may shrink | contract to the extent just before a shrinkage limit, and the 2nd groove part 21f is set so that it may become a slightly contracted state. In addition, when the rod-shaped member 22 of the inspection contact 2 comes into contact with the inspection point, the normal member 21 is shorter in length than the predetermined interval L. At this time, the first groove 21d reaches the shrinkage limit, and the second groove 21f is contracted.

By forming in this way, when attaching the inspection contact 2 to the support 3, the first groove 21d and the second groove 21f of the ordinary member 21 are contracted to be in a pressurized state. 21 is mounted while pressing the electrode portion 41 and the second plate-like member 32, respectively.

In Fig. 5, the second guide hole 32h is shown as a through hole having a constant diameter, but two holes (upper and lower) having two different outer diameters disposed on the same axis. ) And not shown) may be used as the through hole. In this case, the upper air has a diameter slightly larger than the outer diameter of the ordinary member 21, and is disposed from the second plate-shaped member 32 toward the electrode portion, and the lower hole is smaller than the outer diameter of the normal member 21 and the rod-shaped member 22 It has a diameter slightly larger than the outer diameter and is disposed toward the inspection point from the second plate-like member 32. By forming the upper and lower holes in this way, when the inspection contact 2 is inserted from the first guide hole 31h and mounted on the support 3, the diameter of the lower hole and the outer diameter of the rear end opening 2lb of the ordinary member 21 are formed. By using the difference between the ordinary member 21, the rod-like member 22 may be arranged so as to protrude from the second guide hole (32h).

In the embodiment shown in FIG. 5, the first plate-like member 31 and the second plate-like member 32 are arranged at a predetermined interval, and are arranged between the first plate-like member 31 and the second plate-like member 32. A third plate member (not shown) may be provided. The third plate member may be disposed in a space by the gap by stacking one or more plate members. In this case, for example, the third plate member may be formed by stacking a plurality of plate members such as the first plate member 31. In addition, as long as the through-hole formed in the 3rd plate-shaped member has the magnitude | size which can penetrate the normal member 21 of the inspection contact 2, the cross-sectional shape is not specifically limited.

The electrode body 4 is equipped with the electrode part 41 electrically connected with the test | inspection apparatus. The electrode part 41 which this electrode body 4 has is arrange | positioned so that it may correspond to each inspection contact 2. The electrode portion 41 is in pressure contact with the tip opening portion 21a of the normal member 21 to be in a conductive state.

The electrode portion 41 is formed of a thin conductive wire, and in FIG. 5, the cut surface of the conductive wire and the surface of the electrode body 4 are disposed so as to be one surface. The cut surface of this lead becomes the electrode part 41, and is pressed against the front-end opening 21a of the normal member 21. As shown in FIG.

The above is description of the structure of the inspection jig 1 of 1st Embodiment of this invention.

The case where the inspection contact 2 is attached to the support 3 in order to assemble the inspection jig 1 will be described. When attaching the support 3 to the test fixture 1, the test contact 2 is first inserted into the support 3. When inserting the inspection contact 2 into the support 3, first, the rear end 22b of the rod-shaped member 22 of the inspection contact 2 is passed through the first guide hole 31h. Next, this rear end 22b is inserted into the second guide hole 32h and passed through.

The inspection contact 2 inserted into the support 3 is coupled to the support 3 by a rear opening 2lb of the ordinary member 21. The tip opening portion 21a of the ordinary member 21 and the rear end portion 22b of the rod-shaped member 22 are arranged to protrude outward from the first guide hole 31h and the second guide hole 32h, respectively.

When the inspection contact 2 is inserted into the support 3, the first plate-like member 31 is moved to the electrode body 4 so that the tip opening portion 21a of the ordinary member 21 presses the predetermined electrode portion 41. Contact with. At this time, since the normal member 21 is pressed against the electrode portion 41, each of the first groove portion 21d and the second groove portion 21f is contracted to be in a pressurized state. At this time, the first groove 21d is in a contracted state until the stage close to the shrinkage limit, and the second groove 21f is in a slightly contracted state. In this way, the inspection jig | tool 1 provided with the inspection contact 2 is completed.

Next, the case where the inspection jig 1 is used for inspection (at the time of inspection) is demonstrated. 6 is a schematic cross-sectional view showing a state during inspection of an inspection jig using an inspection contact; At the time of inspection, the inspection jig 1 is attached to an inspection apparatus (not shown), and the conducting wire 5 is electrically connected to the control means of the inspection apparatus. The inspection apparatus includes, for example, moving means for moving the mounting table on which the inspected object 8 is placed in the xyz axis direction, respectively, for a predetermined inspection to the plurality of inspected points 81 of the inspected object 8. The mounting table is moved in the xyz axis direction and inspected so that the rear end portion 22b of the rod-shaped member 22 of the contactor 2 is press-contacted.

When the mounting table is positioned so that the inspection apparatus can contact the rear end 22b of the desired inspection contact 2 at the predetermined inspection point 81, each inspection contact 2 is placed at each inspection point 81. The rear end 22b of) is moved in contact with and conducting. At this time, when the desired rear end 22b comes into contact with the predetermined inspection point 81, the rear end 22b is first press-contacted so that the first groove 21d and the second groove 21f of the normal member 21 are contracted. . In this case, the first groove portion 21d immediately before the shrinkage limit becomes the shrinkage limit, and the second groove portion 21f is contracted. Therefore, the first groove 21d and the second groove 21f act on the non-inspection, and the second groove 21f on the inspection. That is, since the load applied to the second plate-shaped member 32 of the support body 3 at the time of non-inspection is generated from the first groove portion 21d and the second groove portion 21f, the load smaller than the load at the time of inspection should be set. Can be. It can provide a strong pressure at the time of inspection and a weak pressure at the time of non-inspection.

1: jig for inspection
2: contactor for inspection
21: Normal member
22: rod member
23: fixing part
3: Support
31: first plate member
31h: 1st guide hole
32: second plate member
32h: 2nd guide hole
4: electrode body
41: electrode portion
5: lead wire
8: Test object
81: checkpoint

Claims (4)

Inspection jig electrically connecting an inspection object having a plurality of inspection points to be inspected and an inspection device for inspecting electrical characteristics between the inspection points. As a 治 具),
An electrode body having a plurality of electrode portions electrically connected to the inspection apparatus;
An inspection contact for electrically connecting the electrode portion and the inspection point;
A support for supporting the inspection contact
Respectively,
The inspection contact (檢査 用 接觸 子),
A conductive ordinary member having openings at both ends and having a tip opening contacting the surface of the electrode portion;
A conductive rod-shaped member disposed inside the normal member while protruding from the rear end opening of the normal member, the rear end of which is in contact with the inspection point;
A fixing portion for electrically connecting the ordinary member and the rod-shaped member
Respectively,
Wherein the support comprises:
A first plate member having a first guide hole for guiding the tip opening portion to the electrode body;
A second plate-like member having a second guide hole for guiding a rear end of the rod-like member to the inspection point;
Respectively,
The normal member,
A top portion having a tip opening portion in contact with the surface of the electrode portion and having a tip portion of the rod-shaped member housed therein;
A first groove portion formed to have the same diameter as that of the upper cylinder portion and connected to the upper cylinder portion, and having a spiral groove extending in a long axis direction in a wall portion of the ordinary member;
A middle barrel portion formed to have the same diameter as the first groove portion and connected to the first groove portion;
A second groove portion which is formed to have the same diameter as the middle barrel portion and is connected to communicate with the middle barrel portion and has a spiral groove extending in the longitudinal direction in the wall portion of the ordinary member;
It is formed to have the same diameter as the second groove portion and connected to communicate with the second groove portion, the lower cylinder portion having the fixing portion
Respectively,
An inspection jig, wherein either the first groove portion or the second groove portion reaches a shrinkage limit when the rod-shaped member contacts the inspection point to perform the inspection.
The method of claim 1,
The jig for inspection, characterized in that the pitch of the spiral is different from the first groove portion and the second groove portion.
The method according to claim 1 or 2,
The groove width of the first groove portion is different from the groove width of the second groove portion.
An inspection contact for electrically connecting a plurality of inspection points of an object to be inspected and a plurality of electrode portions provided in an electrode body of an inspection jig electrically connected to an inspection device for inspecting electrical characteristics between the inspection points. ,
The contact for inspection,
An outer cylinder whose tip opening portion is an electrode end in contact with the electrode portion,
A conductive inner cylinder which protrudes from the rear end opening of the outer cylinder, is electrically connected to the inside of the outer cylinder, is disposed coaxially, and the rear end is an inspection end that is pressed against the inspection point. )
Respectively,
The outer cylinder is,
An outer upper cylindrical portion having a tip opening which becomes the electrode end;
A first first groove portion having the same diameter as that of the outer upper cylindrical portion and having a spiral groove formed at an edge thereof in a axial direction, the leading end opening being connected to the rear opening of the outer upper cylindrical portion;
An outer barrel portion having the same diameter as the first groove portion and connected to communicate with a rear opening of the first groove portion;
Respectively,
A second ordinary groove portion having the same diameter as the outer barrel portion and connected to communicate with the outer barrel portion and having a spiral groove formed at an edge thereof in a long axis direction;
The outer lower cylinder portion having the same diameter as the second groove portion and connected to communicate with the second groove portion, and having a fixing portion.
Respectively,
The inner cylinder is,
An inner lower barrel portion having a rear end portion to be the inspection end;
An inner upper barrel disposed inside the outer cylinder
Respectively,
The fixing unit includes:
Fixed while electrically connecting the outer cylinder and the inner cylinder,
Inspection contact, characterized in that the pitch of the spiral of the first groove portion and the second groove portion is different from each other.

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