KR101157879B1 - Inspection fixture, inspection probe - Google Patents

Abstract

(assignment)
The present invention provides an inspection jig which can not only cope with the miniaturization and complexity of the substrate, but also has a contactor for four-terminal measurement with a simplified structure with a reduced number of parts.
(Solution)
A conductive cylindrical first cylinder in which the upper end is pressed against the electrode portion, protrudes from the lower end opening of the first cylinder, is electrically connected to the first cylinder, and is disposed coaxially, and the upper end is disposed in the first cylinder. The second cylindrical body having a conductive cylindrical shape, which is disposed inside the cylinder and whose lower end is pressed against the inspection point, is electrically connected to the first and second cylinders, and is coaxially housed in the first and second cylinders. And a conductive cylindrical third cylinder in which the upper end is press-contacted to the electrode portion and the lower end is press-contacted to the inspection point, and the first cylinder has a spiral first in the tubular wall portion between the upper end and the lower end of the first cylinder. A cutting portion is formed, and the first cylinder has a first fixing portion fixed to the second cylinder on the lower end side than the first cutting portion.

Description

Jig and contactor for inspection {INSPECTION FIXTURE, INSPECTION PROBE}

The present invention is an inspection jig for electrically connecting an inspection point set in advance on an inspection target portion of an object to be inspected and an inspection device that performs the inspection. In particular, the present invention relates to an inspection contactor that can easily measure four-terminal measurement and an inspection jig using the contactor.

The inspection jig according to the present invention detects the electrical characteristics of the inspection target part by supplying electric power or an electrical signal to a predetermined inspection position from the inspection device in the inspection target part included in the inspected object and detecting the electrical signal from the inspection object. Or operation test.

Such an object is, for example, a printed wiring board, a flexible substrate, a ceramic multilayer wiring board, a liquid crystal display or an electrode plate for a plasma display. Various substrates such as package substrates and film carriers for electronic and semiconductor packages, semiconductor wafers, semiconductor chips, and chip size packages (CSPs) A semiconductor device can be illustrated.

In this specification, these said to-be-tested | inspected objects are called generically the "inspection thing", and the test | inspection part formed in a to-be-tested object is called "inspection part." In addition, an inspection point is set in the inspection portion for actually inspecting the electrical characteristics of the inspection portion, and the electrical characteristics of the inspection portion are detected by pressing and contacting the contact point.

Conventionally, a plurality of wirings are formed on a circuit board, which is an example of an inspection object. This wiring is formed to supply electric power or to flow an electric signal so that the electric / electronic component mounted on the circuit board has a desired function. For this reason, it is known that poor wiring leads to malfunction of the circuit board.

In order to solve such a problem, many inventions of the inspection apparatus which determine the quality of the target part, such as the wiring formed in the to-be-tested object, such as a circuit board and a semiconductor device, are proposed.

Such an inspection apparatus includes, for example, a plurality of inspection points set in advance on a wiring to determine whether the wiring is formed on a substrate to be inspected, and a plurality of contacts (probes) connected to each. Inspection is carried out using an inspection jig with a probe).

In this inspection jig, one end of the contactor is pressed against the inspection point on the wiring (inspection portion), and the other end is pressed against the electrode portion electrically connected to the substrate inspection apparatus. Through the inspection jig, a current or voltage for measuring electrical characteristics of the wiring is supplied from the substrate inspection apparatus, and an electrical signal detected from the wiring is transmitted to the substrate inspection apparatus.

In recent years, due to advances in technology, wirings on a substrate are made finer and more complicated due to miniaturization of semiconductor devices, miniaturization of substrates, and the like. As miniaturization and complexity of such board wiring progress, the contacts included in the inspection jig also become thinner, smaller pitch, multipin, or simplified contact between the contacts. Is required.

In particular, in the case of measuring the target portion of the inspected object which has been miniaturized and complicated, the four-terminal measurement method is performed because the influence of the contact resistance value generated when the target portion comes into contact with the contactor is large. In this four-terminal measurement method, it is necessary to arrange two sets of electrically independent contacts for supplying current and detecting voltage at inspection points. For this reason, a thinner contact is required than usual.

Here, for example, in the contact of the inspection jig disclosed in Patent Literature 1, the first electrode portion of the cylindrical member and the first electrode portion insulated from the interior of the first electrode portion are disposed therein. It is provided with two electrode parts, and it is formed so that a 1st electrode part and a 2nd electrode part may contact simultaneously with a test point.

However, in the inspection jig disclosed in Patent Literature 1, since it is formed of a coil spring using a coil, it is difficult to form a coil having a diameter smaller than about four times the winding diameter, that is, the outer diameter is 100 μm. It was very difficult to form the following coil springs and assemble it as a test jig. Even if it could be formed, for example, the use of 2 to 4000 test fixtures was excessively expensive due to the manufacturing cost, and it was not practical.

Japanese Patent Laid-Open No. 2005-249447

The present invention provides an inspection jig provided with a contactor for four-terminal measurement having a simplified structure that can cope with miniaturization and complexity of a substrate and reduces the number of parts.

In order to solve the above problems, the inspection jig according to the present invention includes a connecting electrode body having a plurality of electrode portions electrically connected to the inspection apparatus, and an upper end thereof. Protruding from the conductive cylindrical first cylinder pressed against the electrode portion, and from the lower end opening of the first cylinder; A conductive cylindrical second cylinder electrically connected in one cylinder, disposed coaxially, an upper end disposed inside the first cylinder, and a lower end pressed against the inspection point. A second body, electrically connected to the first cylinder and the second cylinder, and coaxially accommodated in the first cylinder and the second cylinder, the upper end being pressed against the electrode and the lower end beingA first plate-like member having a conductive cylindrical third cylinder pressed against the inspection point and a first guide hole for guiding the lower ends of the second cylinder and the third cylinder to the inspection point (第 1) A second plate shape having a second guide hole for guiding the upper ends of each of the first cylinder and the third cylinder to the electrode portion, and arranged at a predetermined distance from the first plate member. A member is provided, and the said 1st cylinder is provided with the spiral-shaped 1st cutting part in the cylindrical wall part between the upper end and the lower end of the said 1st cylinder, , The third cylinder is formed with a spiral second cut portion formed in the cylindrical wall portion between the upper end and the lower end of the third cylinder, the first cylinder is the second cylinder on the lower end side than the first cut portion. To establish the first fixed government And it characterized in that.

The first guide hole may have a diameter smaller than the outer diameter of the first cylinder and larger than the outer diameter of the second cylinder. Here, a diameter larger than the outer diameter of a 2nd cylinder means a diameter slightly larger than the outer diameter of a 2nd cylinder. The upper and lower limits for some are of the design subject to change with the environment at the level of those skilled in the art. Hereinafter, it is the same in this specification.

In this third cylinder, one cut portion formed below the third cylinder may exist inside the first guide hole.

The first guide hole is connected to communicate with the first guide upper hole having a diameter larger than the outer diameter of the first cylinder and the first guide upper hole, and is smaller than the outer diameter of the first cylinder and the second. The first guide lower hole having a diameter larger than the outer diameter of the cylinder may be provided. Here, the diameter larger than the outer diameter of a 1st cylinder means the diameter slightly larger than the outer diameter of a 1st cylinder. The upper and lower limits for some are of the design subject to change with the environment at the level of those skilled in the art. Hereinafter, it is the same in this specification.

The third cylinder includes two spiral-shaped second cutouts disposed at a distance between the upper end and the lower end at a distance from each other, and is fixed to the second cylinder between the two second cutouts. 3 fixed parts may be provided.

The third cut member may be disposed so that the third cut member has a symmetrical shape with respect to the center of the third cylinder. Here, symmetry with respect to the center of a 3rd cylinder means symmetry including what is substantially symmetric about the center of a 3rd cylinder. The upper and lower limits for approximations belong to designs that can vary with the environment at the level of those skilled in the art. Hereinafter, it is the same in this specification.

Moreover, the contactor concerning this invention is a contactor used for the test fixture which electrically connects the to-be-tested object provided with the test point to test | inspection, and the test | inspection apparatus which inspects the electrical property between the said test | inspection part. And an upper end protruding from the conductive cylindrical first cylinder pressed against the electrode portion, and protruding from the other end opening of the first cylinder, electrically connected to the first cylinder, and arranged coaxially. The first cylindrical member and the second cylindrical member having a conductive cylindrical shape in which the lower end is pressed against the inspection point and electrically connected to the first cylinder and the second cylinder, respectively, are disposed inside the first cylinder. Housed coaxially within the second cylinder, the upper end being pressed against the electrode and the lower end being A conductive cylindrical third cylinder press-contacted to the dead point, wherein the first cylinder has a spiral first cut portion formed in a cylindrical wall portion between an upper end and a lower end of the first cylinder, and the third cylinder. Is formed in the cylindrical wall portion between the upper end and the lower end of the third cylindrical body with two spiral-shaped second cutting portions at a distance from each other, and the first cylinder has the second cylindrical body at a lower end side than the first cutting portion. The first fixing part is fixed, and the said 3rd cylinder is provided with the 2nd fixing part fixed with the said 2nd cylinder between the said 2nd 2nd cutting parts.

The third cut member may be disposed so that the third cut member has a symmetrical shape with respect to the center of the third cylinder.

Moreover, the contactor which concerns on this invention is a contactor used for the test fixture which electrically connects the to-be-tested object which has a test point to test | inspection, and the test | inspection apparatus which inspects the electrical property between the said test point, The inner contactor is pressed against the electrode portion, the other end is pressed against the inspection point, and is formed from a conductive tubular member, and the inner contactor is in a non-conductive state inside. The inner contactor and the outer contactor are provided with an outer contact made of a conductive tubular member which is accommodated by a non-electron, and one end is press-contacted to the electrode portion, and the other end is press-contacted to the inspection point. The spiral cut portion is formed in the cylindrical wall portion between the one end and the other end, and the outer wall surface of the tubular member of the outer contact is raised from the other end side. Characterized in that it is formed along one short side such that increases gradually or step-shaped.

According to the invention of claim 1, the conductive first cylinder, a conductive second cylinder protruding from the first cylinder, and housed inside the first cylinder, and a conductive third body contained in the second cylinder By using the cylindrical body, the contactor included in the inspection jig includes two terminals (outer contactor and inner contactor) arranged coaxially. In addition, the lower end of the second cylinder housed in the first cylinder and the lower end of the third cylinder housed in the second cylinder are in contact with the inspection unit side, and the upper side of the first cylinder housing the second cylinder inside the electrode unit side. Since the end and the upper end of the third cylinder housed inside the second cylinder are in contact with each other, the pitch of the two terminals at the upper end (the electrode portion side) can be made wider than the pitch of the two terminals at the lower end (the inspection portion side). Negative narrow pitch can be avoided and it can be effectively used for the check point of narrow pitch. Further, by using the second cylinder as a guide between the first cylinder and the third cylinder, the strength of the contactor can be ensured, and both sides can be stretched vertically and reliably. Moreover, since two contacts are formed from three integral cylindrical members, the number of parts can be reduced and simplified.

According to the invention of claim 2, when the contactor is supported by the inspection jig, the lower end of the first cylindrical body of the contactor comes into contact with the upper surface of the first plate-shaped member, thereby preventing the contactor from being dropped.

According to the invention of claim 3, since one cut-out portion formed below the third cylinder exists inside the first guide hole, the first plate-like member forming the first guide hole performs the stretching operation of the cut-out portion. It can be guided and can stretch stably.

According to the invention as set forth in claim 4, when the contactor is supported by the inspection jig, the upper surface of the first plate-like member (the first guide upper hole and the first guide) in which the lower end of the first cylinder of the contactor forms the first guide lower hole. By contacting the boundary of the lower hole), the contactor can be supported at an appropriate position with high accuracy, and the contactor can be supported such that the lower end of the second cylinder and the lower end of the third cylinder can contact the inspection point.

According to the invention as set forth in claim 5, since the third cylinder has two cutting parts formed with the second fixing part interposed therebetween, the cutting part on the upper end side expands and contracts according to the pressing force from the electrode part, and the cutting portion on the lower end side is inspected. Since it expands and contracts according to the pressing force from a point, each cutting part can function independently.

According to the invention as set forth in claim 6, since the second cutting portion is arranged in the third cylinder so as to have a shape substantially symmetrical with respect to the center thereof, there is no need to distinguish the upper end and the lower end of the third cylinder when assembling the contactor. Therefore, the time required for manufacturing the contactor can be shortened.

According to invention of Claims 7 and 9, the electroconductive 1st cylinder, the electroconductive 2nd cylinder which protrudes from the opening of this 1st cylinder, and is accommodated in the inside of a 1st cylinder, and accommodated in this 2nd cylinder The upper end and the lower end of the contact in the inspection jig are coaxially arranged by the conductive third cylinder. In addition, a lower end of the second cylinder accommodated in the first cylinder and a lower end of the third cylinder accommodated in the second cylinder are brought into contact with the inspection part side, and an electrode part side of the first cylinder accommodates the second cylinder therein. Since the upper end and the upper end of the third cylinder housed inside the second cylinder are in contact with each other, the pitch of the two terminals at the upper end (the electrode part side) can be made wider than the pitch of the two terminals at the lower end (the inspection part side). In addition, the narrow pitch of the electrode portion can be avoided, and it can be effectively used for the inspection point of the narrow pitch. Further, by using the second cylinder as a guide between the first cylinder and the third cylinder, the strength of the contactor can be ensured, and both sides can be stretched vertically and reliably. Moreover, since two contacts are formed from three integral cylindrical members, the number of parts can be reduced and simplified.

According to the invention as set forth in claim 8, since the second cutting portion is arranged in the third cylinder so as to have an approximately symmetrical shape with respect to the center thereof, there is no need to distinguish the upper end and the lower end of the third cylinder when assembling the contactor. Therefore, the time required for manufacturing the contactor can be shortened.

1 is a schematic configuration diagram showing an embodiment of an inspection jig according to the present invention.
Fig. 2 is a schematic sectional view of a contactor (first contactor) in the first embodiment of the present invention.
3 is an exploded cross-sectional view of the outer contact constituting the first contactor, (a) shows a first cylinder, (b) shows a second cylinder, and (c) shows a second cylinder disposed in the first cylinder. It shows the state.
4 is a schematic cross-sectional view of the inner contactor (third cylinder).
5 is a schematic cross-sectional view of an inspection jig using a first contactor.
Fig. 6 is a schematic cross-sectional view showing a state during inspection of an inspection jig using a first contactor.
Fig. 7 is a schematic cross sectional view of a contactor (second contactor) in the second embodiment of the present invention.
8 is a schematic cross-sectional view of an inspection jig using a second contactor.
9 is a schematic cross-sectional view showing an operating state of the inspection jig using the second contactor.
Fig. 10 is a schematic sectional view of a contactor (third contactor) in the third embodiment of the present invention.

Detailed description for carrying out the present invention.

1 is a schematic configuration diagram showing an embodiment of an inspection jig according to the present invention. The inspection jig 1 according to the present invention includes a plurality of contacts 2 and a support 3 for supporting these contacts 2 in the form of a plurality of needles. And a connecting electrode body provided with an electrode portion 41 (see FIG. 5) which supports the support 3 and is in contact with each contactor 2 to be in a conductive state. And a conductive wire portion 5 formed so as to be electrically connected to and extend from the electrode portion 41.

In Fig. 1, three contacts are shown as the plurality of contacts 2, and three wire portions 5 corresponding to each are shown. However, these are not limited to three, but are set on the substrate to be inspected. It depends on the checkpoint.

The main feature of the present invention is that the outer contactor uses two of the three conductive tubular members as the first contactor and the other one cylindrical member as the second contactor. It can be used for four-terminal measurement by using it as a contactor having two contacts, namely, an external contactor and an inner contactor.

With such a configuration, the inspection point is brought into contact with the lower end of the outer contactor (lower end of the second cylinder) and the lower end of the inner contactor (lower end of the third cylinder), and the outer side of the electrode portion is outside. The upper end of the contactor (upper end of the first cylinder) and the upper end of the inner contactor (upper end of the third cylinder) contact each other.

A contactor (hereinafter referred to as a first contactor) of the first embodiment according to the present invention will be described. Figure 2 is a schematic cross-sectional view of the first contact of the present invention, Figure 3 shows an exploded cross-sectional view of the outer contact constituting the first contact, (a) represents a first cylinder, (b) is a second cylinder (C) has shown the state in which the 2nd cylinder was arrange | positioned in the 1st cylinder, and FIG. 4 has shown schematic sectional drawing of the 3rd cylinder.

The first contactor 2 includes the outer contactor 21 and the inner contactor 22 as described above, and is insulated from the outer contactor 21 in the outer contactor 21. The inner contactor 22 is arranged.

The outer contactor 21 includes a first cylinder 211 and a second cylinder 212, and the inner contactor 22 is formed from the third cylinder 213. As shown in FIG. 2, the first contact 2 has a first cylinder 211 of the outer contact 21 disposed at its outermost side, and a second cylinder 212 of the outer contact 21 at its inner side. Is arranged, and the 3rd cylinder 213 is arrange | positioned at the innermost side. In this manner, the first contact member 2 is configured by arranging three cylindrical members having different diameters in concentric axes.

The first cylinder 211 forms a part of the outer contact 21 and forms a portion in contact with the electrode portion of the outer contact 21. The first cylinder 211 is a cylindrical member having the largest diameter among the three cylindrical members. The first cylinder 211 has a predetermined length and is formed in a conductive hollow cylindrical shape (cylindrical shape) having openings at both ends. The first cylinder 211 makes electrical connection between the electrode portion and the outer contact 21 possible by contacting the electrode portion 41 described later with an opening of one end thereof.

The first cylinder 211 includes a first tip portion 211a, a first cut portion 21lb, a first fixing portion 211c and a first portion. It is formed from each part of the rear end 211d (see Fig. 3 (a)). Since each part is formed from the same cylindrical member of the 1st tip part 211a, the 1st cut part 21lb, and the 1st rear part 211d, each part has the same outer diameter and the inner diameter, and the 1st The fixing part 211c is formed in the wall surface of this cylindrical member. The 1st cylindrical body 211 of this invention forms a cut | disconnected part by forming a spiral cut | disconnect on the wall surface of one cylindrical member, and has a 1st front-end | tip part, respectively with two cylindrical members across the cut | disconnected part. And the first rear end portion. On the other hand, the length of the first cutout portion 21lb is not particularly limited, but the length of the first cutout portion 21lb needs to be adjusted to have a desired stretch length, and if the strength of the first cylinder 211 is sufficient, the first cylinder 211 is provided. Cuts may also be formed over approximately the entire length of the shell.

The first tip portion 211a has an upper end surface of one opening contacting the electrode portion 41, and an upper end surface of the first tip portion 211a is formed of the first cylinder 211. It corresponds to an upper end. The first tip portion 211a penetrates and is supported by the inside of the second guide hole 321 of the second plate-shaped member 32, which will be described later, and has a predetermined first electrode portion. 411). Although the length of the long axis direction of the 1st front-end | tip part 211a is not specifically limited, It is preferable to form longer than the thickness of the 2nd plate-shaped member 32. As shown in FIG. The lower end of the first tip portion 211a is connected to communicate with the upper end of the first cut portion 21lb, which will be described later.

The first cutout portion 21lb is formed between the first tip portion 211a and the first rear end portion 211d, and its upper end is connected to communicate with the lower end of the first tip portion 211a, and the lower end thereof will be described later. It is connected to communicate with the upper end of the first rear end 211d. As described above, the first cut portion 21 lb is formed by a spiral cut along the wall surface of the cylindrical member which is the first cylinder. By forming a spiral cut in the first cylinder 211 in this manner, the first cut portion 21 lb functions as an elastic portion that is stretched in the major axis direction of the first cylinder. In addition, the characteristics of the elasticity of the first cut portion 21lb include the adjustment of the width and length of the cut portion and the thickness of the tubular member, the type of material of the tubular member, and the various treatments applied to the tubular member (thermal treatment or chemical Treatment) and various mechanical processing treatments (firing, etc.), and can be appropriately adjusted by the user. Moreover, although there are one cut part in drawing, you may form in multiple numbers.

The first rear end 211d is connected so that the upper end thereof communicates with the lower end of the first cutout 21lb, and the lower end opening corresponds to the lower end of the first cylinder 211. The first rear end portion 211d comes into contact with the first plate-like member 31 and the lower surface of the first rear end portion 211d. For this reason, the upper surface of the 1st front-end | tip part 211a which becomes the upper end of the 1st cylinder 211 contacts an electrode part, and the lower surface of the 1st rear end part 211d which becomes the lower end is the 1st plate-shaped member. It comes into contact with 31 (see Fig. 5). The length in the major axis direction of the first rear end 211d is formed to have a length such that the lower surface of the first rear end 211d can contact the first plate-like member 31 as described above. The first rear end portion 211d is formed so as to protrude from the opening portion of the second cylinder, which will be described later.

The first fixing portion 211c electrically connects the first cylinder 211 and the second cylinder 212. This first fixing portion 211c is formed at the first rear end portion 211d. In the first fixing part 211c shown in FIG. 3A, the pressure is applied from the first cylinder 211 (first rear end 211d) to the second cylinder 212 side. The state in which the recessed part in which the rear end part 211d bends inward is formed. In addition, the recess is formed to fix the first cylinder 211 and the second cylinder 212 when the second cylinder 212 is disposed in the first cylinder 211, but is formed in the first cylinder 211. It may be formed in advance. In addition, in order to fix the 1st cylinder 211 and the 2nd cylinder 212, this recessed part presses (caulking) from the outer side (the 1st cylinder 211) to the inner side (the 2nd cylinder 212). It is formed when it is fixed by.

The fixing method of the 1st and 2nd cylinder by the 1st fixing part 211c is not limited to this caulking method, and other fixing methods, such as laser welding, arc welding, and an adhesive agent, are used. You may use it. Moreover, although it is unnecessary when the fixing method by which the 1st cylinder 211 and the 2nd cylinder 212 are electrically connected as a fixing method of the 1st cylinder 211 and the 2nd cylinder 212 is used, the 1st cylinder When the fixing method in which the 211 and the second cylinder 212 are not electrically connected is used, for example, the first cylinder 211 and the second cylinder 212 are electrically connected by soldering or conducting wire. You can also make a connection.

Although the 1st cylinder 211 can be formed with one electroconductive cylindrical member as mentioned above, it is formed, for example with an outer diameter of 40-250 micrometers, an inner diameter of 30-240 micrometers, and a thickness of 5-50 micrometers.

The length of the long cylinder direction of the 1st cylinder 211 is slightly longer than the length which added together the space | interval of the 1st plate-shaped member 31 and the 2nd plate-shaped member 32 mentioned later, and the depth of the 1st guide upper hole 311. It is preferably formed. This is because when the first contactor 2 is supported by the support 3, the first cutting portion 21lb contracts and becomes pressurized, so that the upper end of the first cylinder 211 normally press-contacts the electrode portion. Because it becomes a state.

As for the 1st cylinder 211, the upper end contacts the electrode part, and the 2nd cylinder 212 electrically connected to the 1st cylinder 211 protrudes from the lower end, and is arrange | positioned. The first cylinder 211 and the second cylinder 212 are formed of a conductive material. Although it will not specifically limit, if it is a material with electroconductivity as this material, For example, nickel, a nickel alloy, or a palladium alloy can be illustrated.

The first tip portion 211a, the first cut portion 21lb, and the first rear end portion 211d are respectively disposed on the first cylinder 211, but these portions are arranged to be symmetrical with respect to the first cylinder 211. You may. In such a case, since the first cylinder 211 has a symmetrical shape, the difference in the vertical direction is eliminated, and assembling becomes easy.

The second cylinder 212 is a member for forming a part of the outer contactor 21 and contacting the inspection point of the outer contactor 21. The second cylinder 212 has a diameter of approximately medium size among the three cylindrical members, has a predetermined length and is formed of a conductive material. The second cylinder 212 is formed in a hollow cylindrical shape (cylindrical shape) having openings at both ends. The 2nd cylinder 212 is arrange | positioned so that the lower end may contact a test | inspection point, and an upper end will always exist in the inside of the 1st cylinder 211. In addition, the outer contact 21 is brought into contact with the electrode portion 41 and the first cylinder 211 by using the first cylinder 211 and the second cylinder 212 that are electrically connected to each other so that the inspection point and the The inspection point and the electrode portion are electrically connected by bringing the two cylinders 212 into contact so as to conduct.

The second cylinder 212 includes a second end portion 212a, a second fixing portion 212b, and a second rear end portion 212c. The second end portion 212a and the second rear end portion 212c are formed of one cylindrical member and have the same outer diameter and inner diameter, and the second fixing portion 212b is formed on the wall surface of the cylindrical member. It is.

The 2nd tip part 212a is the one end part of the cylindrical member which forms the 2nd cylinder 212, and the site | part of an electrode part side corresponds to this from the 2nd fixing part 212b mentioned later. The second tip portion 212a is always housed and disposed in the first cylinder 211. Since the length of the 2nd tip part 212a is always accommodated in the 1st cylinder 211 as mentioned above, the 1st cylinder (2B) by the telescopic function of the 1st cutting part 21lb with which the 1st cylinder 211 is equipped is provided. Even when 211 is shortened, it is necessary to be formed with a length which does not protrude from the upper end of the first cylinder 211.

The second rear end 212c is the other end of the tubular member forming the second cylinder 212, and the site on the inspection point side corresponds to this from the second fixing part 212b described later. The other opening of the second rear end 212c is brought into contact with the inspection point as the lower end of the outer contact 21. As described above, the length of the second rear end portion 212c is required to protrude from the other opening of the first rear end portion 211d in the first cylinder 211.

The second fixing part 212b electrically connects the first cylinder 211 and the second cylinder 212. The second fixing part 212b is formed at the same position as the first fixing part 211c described above. It is preferable that the second fixing part 212b is formed at a position deviated from the center of the second cylinder 212 (a position located downward from the center in FIG. 3). This is for forming at a position corresponding to the position of the first fixing portion 211c disposed on the first rear end portion 211d. Thus, since the 1st cylinder 211 and the 2nd cylinder 212 are fixed, since the 1st fixing part 211c exists on the 1st rear part 211d of the lower end side rather than the 1st cutting part 21lb, As the first cutting portion 21lb expands and contracts, the second leading portion 212a relatively moves the internal space of the first cylinder 211. In addition, although the second fixing part 212b shown in Fig. 3B is shown as an inner concave portion curved inwardly, the inner concave portion accommodates the second cylinder 212 in the interior of the first cylinder 211. Although it is formed in order to fix the 1st cylinder 211, the 2nd cylinder 212, and the 3rd cylinder 213 later, you may form in the 2nd cylinder 212 previously. In addition, this inner concave portion is fixed by pressing (caulking) from the outer side (the first cylinder 211) to the inner side (the second cylinder 212) in order to fix the first cylinder 211 and the second cylinder 212. It is formed when. The fixing method of this 1st and 2nd cylinder is not limited to this caulking, You may use other fixing methods, such as laser welding, arc welding, and an adhesive agent.

The second cylinder 212 can be formed of one conductive tubular member, and is formed, for example, with an outer diameter of 20 to 220 µm, an inner diameter of 10 to 200 µm, and a thickness of 5 to 50 µm.

The second cylinder 212 may be formed by arranging respective portions so as to have the center and the point symmetry or the central axis and the line symmetry. When formed so that it may become a symmetrical shape, when manufacturing the outer contactor 21, the upper and lower sides of the 2nd cylinder 212 can be handled, without distinguishing.

The second cylinder 212 is formed of a conductive material similarly to the first cylinder 211. Although it will not specifically limit, if it is a material provided with electroconductivity as this material, For example, nickel, a nickel alloy, or a palladium alloy can be illustrated.

As shown in Fig. 3 (c), the first cylinder 211 and the second cylinder 212 protrude from the first cylinder 211 and the second cylinder 212 from the other. Is protruded and is formed as the outer contact 21. Since the first cylinder 211 and the second cylinder 212 are electrically connected and fixed by the first fixing portion 211c and the second fixing portion 212b, the upper end of the first cylinder 211 is fixed. When the lower end of the second cylinder 212 is in contact with the inspection point, the electrode unit can function as a contactor for electrically connecting the electrode section and the inspection point.

Next, the third cylinder 213 serving as the inner contactor 22 forming the first contactor 2 will be described (see FIG. 4). The third cylinder 213 forms an inner contact 22, and forms a portion in contact with the electrode portion of the inner contact 22 and the inspection point. This third cylinder 213 is a cylindrical member having the smallest diameter among the three cylindrical members. The third cylinder 213 has a predetermined length and is formed into a conductive hollow cylindrical shape (cylindrical shape) having openings at both ends.

The third cylinder 213 is formed of the third tip portion 213a, the second cut portion 213b, the middle portion 213c, the third fixing portion 213d, the third cut portion 213e and the third rear end portion 213f. It forms from each site | part (refer FIG. 4). Since the third tip portion 213a, the second cut portion 213b, the middle portion 213c, the third cut portion 213e and the third rear end portion 213f are each formed from the same tubular member, the respective portions are Has the same outer diameter and inner diameter, and the third fixing portion 213d is formed on the wall surface of the tubular member. The third cylinder 213 of the present invention forms a cutout by forming a spiral cut on the wall surface of one tubular member, and each of the two tubular members with the cutout interposed therebetween with a third front end 213a. And the third rear end 213f. On the other hand, the lengths of the second cut portion 213b and the third cut portion 213e are not particularly limited, but the lengths need to be adjusted to have a desired stretch length. A cutout may be formed over approximately the entire length of the three-cylinder 213.

The third tip portion 213a has an upper end surface of the upper opening in contact with the electrode portion 41, and the upper end surface of the third tip portion 213a corresponds to the upper end of the inner contact 22. The third tip portion 213a is supported by penetrating through the inside of the second guide hole 321 of the second plate member 32, which will be described later, and guided to the predetermined second electrode portion 412. The length in the major axis direction of the third tip portion 213a is not particularly limited, but is preferably formed longer than the thickness of the second plate-like member 32. The lower end of the third tip portion 213a is connected to communicate with the upper end of the second cut portion 213b which will be described later.

The second cutting portion 213b is formed between the third tip portion 213a and the middle portion 213c, and an upper end thereof is connected to communicate with a lower end of the third tip portion 213a, and the lower end is an intermediate portion to be described later. It is connected to communicate with the upper end of the (213c). This 2nd cutting part 213b is formed by spiral cutting along the wall surface of the cylindrical member which is a 3rd cylinder as mentioned above. By forming a spiral cut in the third cylinder 213 in this manner, the second cut portion 213b functions as an expansion and contraction portion that stretches in the longitudinal direction of the third cylinder. In addition, the characteristics of the elasticity of the second cut portion 213b include the adjustment of the width and length of the cut portion and the thickness of the tubular member, the type of material of the tubular member, and the various treatments applied to the tubular member (thermal treatment or chemical Treatment), or various mechanical processing (firing, etc.), and appropriately adjusted by the user. In addition, although there is one this 2nd cutting part 213b in figure, you may form in multiple numbers.

The intermediate portion 213c is formed between the second cutting portion 213b and the third cutting portion 213e of the third cylinder 213, and an upper end thereof is connected to communicate with a lower end of the second cutting portion 213b, and The lower end is connected to the upper end of the third cutting portion 213e which will be described later. This intermediate part 213c is provided with the 3rd fixing part 213d mentioned later, and is electrically insulated from the 1st cylinder 211 and the 2nd cylinder 212, and is fixed.

The third fixing part 213d fixes the second cylinder 212 and the third cylinder 213 in an insulated state. This third fixing portion 213d is formed in the intermediate portion 213c. In the third fixing portion 213d shown in FIG. 4, the fixing is performed by pressing the second cylinder 212 (the second rear end 212c) from the side to the third cylinder 213. In addition, the fixing part is formed to fix the second cylinder 212 and the third cylinder 213 when the third cylinder 213 is disposed in the second cylinder 212, but the third cylinder 213 It may be formed in advance. In addition, in order to fix the 2nd cylinder 212 and the 3rd cylinder 213, this fixing part was fixed by pressurizing (caulking) from the outer side (the 2nd cylinder 212) to the inner side (the 3rd cylinder 213). If it is formed.

The fixing method of the 2nd and 3rd cylinder by the 3rd fixing part 213d is not limited to this caulking method, You may use other fixing methods, such as an adhesive agent. However, since the second cylinder 212 and the third cylinder 213 must be fixed in an insulated state, it is not possible to adopt a fixing method that is electrically connected.

The third cutting portion 213e is formed between the middle portion 213c and the third rear end portion 213f, and the upper end thereof is connected to communicate with the lower end of the intermediate portion 213c, and the lower end thereof is the third that will be described later. It is connected to communicate with the upper end of the rear end 213f. As described above, the third cut portion 213e is formed by spiral cutting along the wall surface of the cylindrical member which is the third cylinder. By forming a spiral cut in the third cylinder 213 in this manner, the third cutting portion 213e functions as an expansion and contraction portion that expands and contracts in the longitudinal direction of the third cylinder. Moreover, the characteristic of the expansion and contraction which this 3rd cutting part 213e is equipped with is the width and length of a cutting part, the thickness adjustment of a cylindrical member, the kind of material of a cylindrical member, and the various processes applied to a cylindrical member (thermal treatment and chemical Treatment) and various mechanical machining treatments (firing, etc.), and can be appropriately adjusted by the user. In addition, although the 3rd cutting part is one in drawing, you may form in multiple numbers.

The third rear end 213f is connected so that the upper end thereof communicates with the lower end of the third cutting part 213e, and the opening of the lower end corresponds to the lower end of the third cylinder 213. For this reason, the upper surface of the third front end 213a, which is the upper end of the third cylinder 213, is in contact with the electrode, and the lower surface of the third rear end 213f, which is the lower end, is in contact with the inspection point. do. The length in the major axis direction of the third rear end 213f is formed to have a length such that the lower surface of the third rear end 213f can contact the same inspection point.

The third cylinder 213 can be formed of one conductive cylindrical member, and is formed, for example, with an outer diameter of 20 to 220 µm, an inner diameter of 10 to 200 µm, and a thickness of 5 to 50 µm.

It is preferable that the length of the 3rd cylinder 213 in the major axis direction is formed slightly longer than the space | interval of the lower surface of the 1st plate-shaped member 31 mentioned later, and the upper surface of the 2nd plate-shaped member 32. As shown in FIG. This is because when the first contactor 2 is supported by the support 3, the second cutting portion 213b contracts and becomes pressurized, so that the upper end of the third cylinder 213 is normally pressed into the electrode portion. to be.

The upper end of the third cylinder 213 is in contact with the electrode portion, the lower end thereof is in contact with the inspection point, and electrical conduction between the inspection point and the electrode portion is achieved with the third cylinder 213 therebetween. The third cylinder 213 is made of a conductive material. Although it will not specifically limit, if it is a material provided with electroconductivity as this material, For example, nickel, a nickel alloy, or a palladium alloy can be illustrated.

The third tip portion 213a, the second cut portion 213b, the intermediate portion 213c, the third cut portion 213e, and the third rear end portion 213f are disposed in the third cylinder 213, respectively, It may be arrange | positioned so that it may become a position symmetrical with the three cylinders 213. FIG. In this case, the third cylinder 213 is provided with a symmetrical shape so that the difference in the vertical direction is eliminated, so that assembly is easy.

Since the 1st contactor 2 accommodates and arrange | positions the 3rd cylinder 213 which is an inner contactor inside the outer contactor (the 1st cylinder 211 and the 2nd cylinder 212), as shown in FIG. In the third cylinder 213, it is preferable to form an insulating coating 213g on the outer edge of the cylindrical member portion. As the insulating film 213g, for example, polyimide, polytetrafluoroethylene (PTFE) or epoxy resin may be used. The thickness of this insulating film 213g is formed to be 1-5 micrometers, for example. The insulating coating may also be formed on the outer edge of the cut portion. This insulating film 213g is formed on the outer edge of the third cylinder 213 in the embodiment of Fig. 4, but may be formed on the inner edge of the second cylinder 212.

When the first contactor 2 is pressed against the inspection point or the electrode portion, the inspection point has a lower end of the outer contactor 21 (lower end of the second cylinder 212) and a lower end of the inner contactor 22. The lower end of the three cylinders 213 are in contact with each other, and the upper end of the outer contactor 21 (upper end of the first cylinder 211) and the upper end of the inner contactor (above the third cylinder 213) are connected to the electrode portion. (A) is in contact.

The third cylinder 213 is arranged to protrude from the upper end opening of the first cylinder 211 and the lower end opening of the second cylinder 212 as shown in FIG. 2, but the third cylinder 213 protrudes at all. It may be arranged so as not to. Since both the first cylinder 211 and the third cylinder 213 have a cutting portion having an elastic function, the cutting portion is sufficiently contracted when pressed from the inspection point or the electrode portion even if any of the protrusions protrude in the plane. Both the first cylinder 211 and the second cylinder 212 (outer contact) and the third cylinder 213 (inner contact) may contact the inspection point or the electrode portion.

5 is a cross-sectional view showing a state in which the first contactor 2 is attached to the support. The inspection jig 1 includes a support 3 for supporting the first contactor 2. The support body 3 includes a first plate member 31 and a second plate member 32.

The first plate member 31 includes a first guide upper hole 311 and a first guide lower hole 312 for guiding the lower end of the first contactor 2 to the inspection point. The first guide upper hole 311 is formed to have an inner diameter slightly larger than the outer diameter of the first cylinder 211. In addition, the first guide lower hole 312 is connected to communicate with the first guide upper hole 311 and has an inner diameter slightly smaller than the outer diameter of the first cylinder 211 and slightly larger than the outer diameter of the second cylinder 212. It is formed to have.

When the first guide upper hole 311 and the first guide lower hole 312 are formed in this way, when the first contactor 2 is inserted from the second guide hole 321 described later and supported by the support 3, In the first cylinder 211, the first contactor 2 may be coupled by a difference between the outer diameter of the lower end of the first rear end portion 211d and the diameter of the first guide lower hole 312. Further, since the difference between the outer diameter of the first rear end portion 211d and the inner diameter of the first guide upper hole 311 is slight, the first contactor 2 can be supported by the support 3 with higher accuracy.

The thickness of the first plate member 31 is not particularly limited, but is preferably shorter than the length of the first rear end portion 211d. This is to ensure that the first rear end portion 211d can be stretched and contracted along the first guide upper hole 311.

The second plate member 32 is disposed at a predetermined distance from the first plate member 31, and the second guide hole 321 for guiding the upper end of the first contactor 2 to the electrode portion 41. ). The second guide hole 321 is formed to have a diameter slightly larger than the outer diameter of the first cylinder 211. The thickness of the second plate member 32 is not particularly limited, but is preferably shorter than the length of the first tip portion 211a. This is because the first tip portion 211a is reliably guided along the second guide hole 321. In addition, the distance between the lower surface of the first plate-like member 31 and the upper surface of the second plate-like member 32 is not particularly limited, but is slightly shorter than the length of the first contactor 2 (the length of the outer contactor and the inner contactor). Is placed.

When the first contactor 2 is mounted on the support 3, the lower end of the first contactor 2 is passed through the second guide hole 321, and then the first guide upper hole 311 and the first guide 211 are passed through. The lower end portion is passed through the guide lower hole 312 to be mounted. At this time, the first contactor 2 is arranged to protrude outward from the first guide lower hole 312 and the second guide hole 321, respectively.

In the connecting electrode body 4 of the inspection jig 1, an electrode portion 41 corresponding to each first contactor 2 is formed. The electrode portion 41 has a first electrode portion 411 in contact with the first cylinder 211 and a conductive state, and a second electrode portion 412 in contact with the third cylinder 213 and a conductive state. It is provided with.

In the electrode portion 41 shown in Fig. 5, a first electrode portion 411 and a second electrode portion 412 are shown, and these electrode portions are each formed of conductive wires, and each end surface of each of the cylinders is formed. It is formed so that it may contact with an edge part. The first electrode portion 411 and the second electrode portion 412 are formed to be in contact with the respective cylinders and to be disposed at the furthest position (the position having the largest space).

On the other hand, the structure of the electrode portion 41 is an inner conductor inside the tubular outer conductor using a wire having a structure such as a coaxial cable, in addition to that shown in FIG. ) May be a coaxial structure arranged coaxially. The inner conductor may be a solid cylindrical shape or a hollow cylindrical shape. In this case, the outer conductor of the electrode portion corresponds to the first electrode portion 411 and the inner conductor corresponds to the second electrode portion 412.

Fig. 6 is a schematic cross-sectional view showing a state during inspection of an inspection jig using a first contactor. When the first contactor 2 is mounted on the support 3, the first contactor 2 is inserted from the second guide hole 321 of the second plate-like member 32, and the first guide upper hole of the first plate-like member 31 ( 311 and the first guide lower hole 312. At this time, the first contact member 2 is coupled to the first cylinder 211 at a boundary where the diameters of the first guide upper hole 311 and the first guide lower hole 312 are different from each other.

After the first contactor 2 is inserted into the support 3, the second plate member 32 contacts the connecting electrode body 4 such that the upper end of the first contactor 2 is pressed by the electrode portion 41. do. At this time, since the outer contact 21 and the inner contact 22 of the first contact 2 are pressed against the first electrode 411 and the second electrode 412, respectively, each of the first cutouts 21lb. And the second cut portion 213b are contracted to be in a pressurized state. For this reason, the lower end of the outer contactor (lower end of the second rear end 212c in the second cylinder 212) and the lower end of the inner contactor (the lower end of the third rear end 213f in the third cylinder 213). Irrespective of the direction of contact with the inspection point, the upper ends of the outer contactors and the inner contactors normally contact the respective electrode portions 41. Moreover, the 3rd cutting part 213e arrange | positioned at the lower end side of the inner side contactor 22 will be in a test standby state in the state of natural length, and this cut | disconnected part will be in the long-axis direction of the 3rd cylinder 213 only at the time of an actual test | inspection. Shrinks. The first cutout portion 21lb of the outer contactor contracts when the upper end of the outer contactor (upper end of the first cylinder 211) is pressed against the electrode, but the lower end of the outer contactor (the second cylinder 212) The lower end) is preferably formed so that it can contract even when it is in contact with the inspection point.

The above is the description of the configuration of the inspection jig of the first embodiment.

As described above, the first contactor 2 is made of a first cylinder 211, a second cylinder 212, and a third cylinder 213, and is formed of a material having conductivity. The first contactor 2 needs to be formed by thinning the contact itself according to the miniaturization and complexity of the inspected object. On the other hand, in order for the contactor to stretch at right angles to the support, it must be formed to have a stretch function on the probe itself. However, when forming a portion having a stretch function with a coil spring (coil spring) using a conventional coil, the outer diameter of this portion will depend on the diameter size of the coil itself. This means that it is difficult to form a coil spring having a diameter smaller than about four times the winding diameter. In particular, it is very difficult to form a coil spring having an outer diameter of 100 µm or less. In addition, even if a contactor can be manufactured by forming such a coil spring, there is a problem that it is too expensive and not practical for use in an inspection jig composed of 2 to 4000 contacts due to problems of assembling and manufacturing cost.

In the present invention, by using the manufacturing method as described below it is possible to produce a fine contactor cheaper and easier. In this manufacturing method, the following two manufacturing methods can be disclosed.

[Production example 1]

(1) First, the core wire (not shown) which forms the hollow part of the 1st cylinder 211 is prepared. In addition, this core wire defines the inner diameter of the first cylinder 211 and uses a core wire (for example, a diameter of 30 µm and stainless steel (SUS)) having conductivity of a desired thickness.

(2) Subsequently, a photoresist film is applied to the core wire (stainless wire) to cover the circumferential surface of the core wire. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, the core wire can be rotated along the central axis and exposed by a laser to form a spiral mask. In order to form the first cylinder 211 of the present invention, a cut portion (first cut portion 21 lb) is formed at a predetermined position (approximately central portion of the first cylinder).

(3) Nickel plating is then applied to this core wire. At this time, since the core wire is conductive, the place where the photoresist mask is not formed is nickel plated.

(4) Subsequently, the photoresist mask is removed and the core wire is pulled out to form the first cylinder 211 having a desired length. It goes without saying that the cylinder may be cut after the core wire is completely pulled out.

In addition, the 1st cylinder 211 can also be manufactured with the following method.

Preparation Example 2

First, the core wire (not shown) which forms the hollow part of the 1st cylinder 211 as mentioned above is prepared. Nickel is plated on the core wire to a desired thickness to form a nickel plating layer on the circumferential surface of the core wire.

(2) Next, photoresist is applied to the surface of this nickel plating layer. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, the core wire can be routed along the central axis and exposed by a laser to form a spiral mask. In order to form the first cylinder 211 of the present invention, a cut portion (first cut portion 21 lb) is formed at a predetermined position (approximately central portion of the first cylinder).

(3) Subsequently, nickel plating is removed by etching. At this time, nickel plating in the place where the photoresist mask is not formed is removed.

(4) Subsequently, the photoresist mask is removed to extract the core wire to form a first cylinder 211 having a desired length. It goes without saying that the cylinder may be cut after the core wire is completely pulled out.

In the coil spring system using a conventional coil, it is difficult to form a coil having a diameter smaller than about four times the diameter according to the diameter of the coil material, and it is very difficult to form a coil spring of 100 µm or less. Since the first cylinder 211 of the present invention according to the above-described manufacturing method is manufactured by nickel plating the core wire to form a desired shape and then extracting the core wire, the thickness of the spring material is higher than that of the coil spring method using a conventional coil. It can be made thin, and at the same time, a fine outer diameter and an inner diameter can be manufactured collectively with high precision.

It is needless to say that in Production Example 1 and Production Example 2, a photoresist mask for cutting the cylinder may be formed.

Although the manufacturing method of the 1st cylinder 211 is the above, the manufacturing method of the 2nd cylinder 212 in this invention except the point which does not require formation of a photoresist mask, and the diameter and inner diameter of a cylindrical member differ from each other. Since it is the same as the manufacturing method of the 1st cylinder 211, the description is abbreviate | omitted.

In the third cylinder 213 of the present invention, two cut portions (the second cut portion 213b and the third cut portion 213e) are formed with a predetermined distance (distance equal to the length of the middle portion 213c). . For this reason, the number and location of forming the photoresist mask are different. The diameter and inner diameter of the cylindrical member are also different from those of the first cylinder. Except for these points, the description of the manufacturing method is omitted because it is the same as the manufacturing method of the first cylinder 211.

Next, the inspection jig 1 'of the second embodiment will be described. 7 is a schematic cross-sectional view of a contactor (second contactor) in the second embodiment of the present invention. 8 is a schematic cross-sectional view of an inspection jig using a second contactor. 9 is a schematic cross-sectional view showing an operating state of the inspection jig using the first contactor. This second contactor 2 'has a basic configuration substantially the same as that of the first contactor 2 described above, and includes a first cylinder 211' and a second cylinder constituting the outer contactor 21. 212 and the 3rd cylinder 223 used as the inner side contactor 22 are provided. In addition, the second contactor 2 'receives the second cylinder 212 inside the first cylinder 211' to serve as the outer contact 21, and the inner contact 22 in the second cylinder 212. The third cylinder 223 is further accommodated and formed (see Fig. 7). In addition, since the 2nd contactor 2 'and the 1st contactor 2 have a similar structure, a different structure is demonstrated in the following description, and the description is abbreviate | omitted about the same structure.

The main difference between the first contactor 2 and the second contactor 2 'is the length in the major axis direction of the first cylinder 211', and the first cylinder 211 'of the second contactor 2' It is formed shorter than the length of the longitudinal direction of the 1st cylinder 211 of the contactor 2. As shown in FIG. In particular, the first rear end portion 211d 'of the second contactor 2' is formed shorter than the length in the major axis direction of the first rear end portion 211d of the first contactor 2.

In addition, in the embodiment of the second contactor 2 'shown in Fig. 7, three cutouts formed in the third cylinder 223 of the inner contactor 22 are formed, but the third fixing part 223f described later will be described. At least one cut-out part may be formed in each of the upper end side and the lower end side in the third cylinder 223 with the boundary as. In the second contactor 2 'shown in Fig. 7, two cutout portions, a second cutout portion 223b and a third cutout portion 223d, are formed on the upper end side of the third fixing part 223f. One cut portion of four cut portions 223g is formed. In addition, the second cutout 223b and the third cutout 223d generate a pressing force for pressing the inner contactor 22 to the electrode, and the fourth cutout 223g causes the inner contactor 22 to be pressed against the inspection point. Create a pressing force for

The second contactor 2 'includes a third fixing part 223f as described above, but the third fixing part 223f is formed in the second intermediate part 223e (see Fig. 7). This third fixing portion 223f serves as a portion for fixing the third cylinder 223 and the second cylinder 212 in a non-conductive state. In addition, the first cylinder 211 'and the second cylinder 212 are connected to each other so as to be conductive, and are fixed by the first fixing portion 211c and the second fixing portion 212b, and further fixed by the third fixing portion 223f. Since the second cylinder 212 and the third cylinder 223 are fixed, the first to third cylinders are fixed as one body.

In the third fixing portion 223f shown in FIG. 7, the inner surface of the second intermediate portion 223e is curved inwardly, and the recess is formed by the second cylinder 212. It is formed after accommodating the inside, and is not formed in the 3rd cylinder 223 previously. Moreover, this recessed part presses inward from the outermost 1st cylinder 211 'side in order to fix the 1st cylinder 211', the 2nd cylinder 212, and the 3rd cylinder 223 integrally (caulking). It is formed by doing). The fixing method of the first to third cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding or adhesive may be used. In addition, this fixing method may be divided into two stages so as to fix the first cylinder to these cylinders after the second cylinder and the third cylinder are fixed.

In the embodiment of the second contactor 2 ', unlike the first contactor 2, the insulating film 223i of the third cylinder 223 is formed so as to cover the entire surface of the third cylinder 223. The surface of the cylindrical member (third tip portion 223a, third intermediate portion 223c, second intermediate portion 223e, third trailing edge portion 223h), and a cut portion portion (second cutting portion 223b), The third cut portions 223d and the fourth cut portions 223g) are formed on the surfaces thereof, respectively. As shown in the embodiment of the first contactor 2, the insulating film 223i may be formed only on the cylindrical member, or may be formed on the inner surface of the second cylinder 212.

As shown in Fig. 7, the third cylinder 223 is arranged to protrude from the upper end opening of the first cylinder 211 'and the lower end opening of the second cylinder 212, but the third cylinder 223 is not at all. It may be arranged so as not to protrude. Since both the first cylinder 211 ′ and the third cylinder 223 have a cutting portion having an elasticity function, the cutting portion is sufficiently contracted when pressed from the inspection point or the electrode portion even if any of the protrusions protrude in the plane. Each of the outer contact 21 and the inner contact 22 may be in contact with the inspection point or the electrode.

In the second contactor 2 'shown in FIG. 7, three cylindrical members are placed at predetermined positions in order to fix the first cylinder 211', the second cylinder 212, and the third cylinder 223. FIG. After arranging, each cylindrical member is fixed together at the same place by pressing (coking) from the outside of the first cylinder 211 'to the inside. The fixing method of each cylindrical member is not limited to this caulking, You may use other fixing methods, such as laser welding, arc welding, and an adhesive agent. Moreover, after all the said 1st thru | or 3rd cylinders are arrange | positioned, you may form so that all the cylinders may be fixed, and after fixing a 1st cylinder and a 2nd cylinder, you may fix a 3rd cylinder. Alternatively, the first cylinder may be fixed after the second cylinder and the third cylinder are fixed. In addition, the second cylinder 212 and the third cylinder 223 need to be fixed in a non-conductive state.

8 is a schematic cross-sectional view showing a state in which the second contactor 2 'is attached to the support 3. In the inspection jig 1 'of the second embodiment, the second contactor 2' is supported and assembled by the support 3 having the first plate-like member 33 and the second plate-like member 32. As shown in FIG. At this time, unlike the case of the inspection jig 1 in the first embodiment, the first guide hole 331 formed in the first plate-shaped member 33 has only a through hole having a predetermined diameter. .

The first guide hole 331 of the first plate-shaped member 33 is formed to have a diameter slightly smaller than the outer diameter of the first cylinder 211 'and slightly larger than the outer diameter of the second cylinder 212. As the first guide hole 331 is formed, the second contactor 2 'is coupled to the second contactor 2' by the step between the first cylinder 211 'and the second cylinder 212. do. That is, although the 2nd cylinder 212 can pass through the 1st guide hole 331 of the 1st plate-shaped member 33, the 1st cylinder 211 'cannot pass, and this 1st guide hole 331 is not able to pass. As a result, it is possible to prevent the second contactor 2 'from falling out.

At this time, the second contact member 2 'is formed with a first rear end portion 211d' such that the fourth cutting portion 223g of the third cylinder 223 is present in the first guide hole 331 and engaged therewith. It is preferable to be. By forming the second contactor 2 'in this manner, a portion to be inserted into the first guide hole 331 of the second cylinder 212 and the third cylinder 223 can be increased. The rear end 212c and the third rear end 223h may be in contact with the inspection point with high accuracy.

After supporting the second contactor 2 'on the support 3, the second plate member 32 is connected to the connecting electrode body 4 so that the upper end of the second contactor 2' is pressed against the electrode portion 41. Contact. At this time, since the first cylinder 211 'and the third cylinder 223 of the second contactor 2' are pressed against each of the first electrode portion 411 and the second electrode portion 412, the expansion and contraction function is performed. Each of the first cutout portion 21lb, the second cutout portion 223b, and the third cutout portion 223d, which are provided, is contracted to be in a pressurized state, so that the first tip portion 211a and the third cylinder of the first cylinder 211 'are provided. The third tip portion 223a of 223 normally contacts each electrode portion 41 regardless of whether or not the third tip portion 223a is in contact with the inspection point. In addition, the 4th cut part 223g of the 3rd cylinder 223 arrange | positioned below will be in the test standby state in the state of natural length, and this cut part will be expanded and contracted only at the time of an actual test | inspection.

When the inspection is performed using the inspection jig provided with the second contactor 2 ', the lower ends of the second and third cylinders are in contact with the inspection point. At this time, since the second cylinder 212 is fixed to the first cylinder 211 'by the second fixing part 212b, the first cutting portion 21lb provided by the first cylinder 211' is contracted. In the third cylinder 223, the fourth cut portion 223g is contracted.

The above is the description of the inspection jig of the second embodiment.

Next, the contactor (third contactor) of the third embodiment will be described. The third contactor 2 ″ has a configuration substantially the same as that of the second contactor 2 ′, and will be described based on a configuration different from this. The third contactor 2 ″ shown in FIG. 10 uses the first cylinder 211 ′, the second cylinder 212 ′, and the third cylinder 223 as compared with the second contactor 2 ′. The fixed place for connecting and fixing is different. In the third contactor 2 '', the first fixing part 211c and the second fixing part 212b which connect and fix the first cylinder 211 'and the second cylinder 212' in a conductive state are provided. And a third fixing portion 212b 'and a fourth fixing portion 223f which connect and fix the second cylinder 212' and the third cylinder 223 in a non-conductive state. As shown in Fig. 10, these fixing portions have positions of fixed positions of the first cylinder 211 'and the second cylinder 212' and fixed positions of the second cylinder 212 'and the third cylinder 223. It is set to a different location, not the same location. By fixing in this way, since the 3rd cylinder and the 2nd cylinder are fixed first, and a 1st cylinder is fixed to these cylinders, assembling of a contact is carried out, each assembly process can be divided into labors and an assembly process becomes easy. In addition, the fixing method of these fixing parts can use the said method, and abbreviate | omits description about this.

In the third contactor 2 ″ of FIG. 10, these fixing portions are formed so as to be disposed at the position of the second intermediate portion 223e of the third cylinder 223. The cut portion located on the upper end side generates a pressing force pressed against the electrode portion 41, and the cut portion located on the lower end side from this position generates pressure pressed on the inspection point.

Since the first to third contactors of the present invention are formed from the three cylinders described above, the contactors have a narrower two-terminal pitch at the lower end (inspection point) than the two-terminal pitch of the upper end (electrode part). can do. In addition, by using the second cylinder as a guide for the first cylinder and the third cylinder, the strength of the contactor can be ensured, and both can be stretched vertically and reliably. In addition, the number of the guide holes of the support body supporting the contactor can be reduced, and the number of assembly operations can be reduced.

The above is the description of the inspection jig of the third embodiment.

Moreover, in these 1st thru | or 3rd contactor, the taper part which becomes a sharp shape can be formed in the front-end | tip part of the upper end part and the lower end part, or can also be formed in the crown shape provided with several convex part.

Although the first to third contactors are formed by combining three cylindrical members, the cylindrical members to be inner contactors are arranged within the outermost portion, and the plurality of contact members are gradually and plurally formed like the outer contactors formed by the second cylinder and the first cylinder. It can also be set as an outer contactor by combining two or more cylindrical members which become large in diameter.

1: jig for inspection
2: contactor
211: first body
21lb: First Cut
211c: First Government
212: second cylinder
212b: Second Government
213: third body
213b: second cutting part
213e: third cut
213d: Third Government
3: support
31: first plate member
311: first guide hole
32: second plate member
321: second guide hole
4: connecting electrode body
41: electrode part
5: conductor part

Claims (9)

An inspection for electrically connecting an inspection object having an inspection point to be inspected and an inspection device for inspecting an electrical property between the inspection points. As a dragon jig,
A connecting electrode body having a plurality of electrode portions electrically connected to the inspection apparatus;
A conductive cylindrical first cylinder whose upper end is pressed against the electrode portion;
It protrudes from the lower end opening part of the said 1st cylinder, is electrically connected in the said 1st cylinder, and is arrange | positioned coaxially, and an upper end is arrange | positioned inside the said 1st cylinder, and a lower end A conductive cylindrical second cylinder in which the lower end is pressed against the inspection point;
Conductively electrically connected to the first cylinder and the second cylinder and housed coaxially within the first cylinder and the second cylinder, the upper end being pressed against the electrode portion and the lower end being pressed against the inspection point. With a tubular third cylinder,
A first plate member having a first guide hole for guiding the lower ends of the second cylinder and the third cylinder to the inspection point;
A second plate-shaped member having a second guide hole for guiding the upper ends of the first cylinder and the third cylinder to the electrode portion, the second plate-like member being spaced apart from the first plate-like member;
Respectively,
The first cylinder is formed with a spiral first cut portion at a cylindrical wall portion between an upper end and a lower end of the first cylinder,
The third cylinder is formed with a spiral second cut portion formed in a cylindrical wall portion between an upper end and a lower end of the third cylinder,
The first jig is provided with a first fixing part which is fixed to the second cylinder on the lower end side than the first cutting part.
The method of claim 1,
The first jig hole has a diameter smaller than the outer diameter of the first cylinder and larger than the outer diameter of the second cylinder.
The method of claim 1 ,
The third jig is a jig for inspection, characterized in that one cut portion formed below the third cylinder is present in the first guide hole.
The method of claim 1,
The first guide hole,
A first guide upper hole having a diameter larger than an outer diameter of the first cylinder,
A first guide lower hole connected to the first guide upper hole and having a diameter smaller than an outer diameter of the first cylinder and larger than an outer diameter of the second cylinder.
Inspection jig, characterized in that provided.
The method of claim 1 ,
The third cylinder includes two spiral-shaped second cutouts disposed at a distance between the upper end and the lower end at a distance from each other, and is fixed to the second cylinder between the two second cutouts. Jig for inspection, characterized in that the three fixed parts are provided.
The method according to any one of claims 1 to 5,
The third jig is arranged for the inspection jig, characterized in that the second cutting portion is disposed so as to be symmetrical with respect to the center of the third cylinder.
As a contactor used for an inspection jig electrically connecting an inspected object having an inspection point to be inspected and an inspection device for inspecting electrical characteristics between the inspection points,
A conductive cylindrical first cylinder in which the upper end is pressed against the electrode portion ,
Protruding from the other end opening of the first cylinder, electrically connected to the first cylinder, disposed coaxially, and having an upper end disposed inside the first cylinder, and having a lower end pressed against the inspection point. A second cylindrical body,
It is electrically connected to the first cylinder and the second cylinder, respectively, and is accommodated coaxially inside the first cylinder and the second cylinder, and an upper end is pressed against the electrode, and a lower end is connected to the inspection point. Conductive cylindrical third cylinder of pressure welding
Respectively,
The first cylinder is formed with a spiral first cut portion formed in a cylindrical wall portion between an upper end and a lower end of the first cylinder,
The third cylinder is formed with two spiral-shaped second cut portions at a distance from each other between an upper end and a lower end of the third cylinder, at a distance from each other,
The first cylinder has a first fixing part to which the second cylinder is fixed to the lower end side than the first cutting part,
The said 3rd cylinder is provided with the 3rd fixing part fixed with the said 2nd cylinder between the said 2nd 2nd cutting parts, The contactor characterized by the above-mentioned.
The method of claim 7, wherein
The said 3rd cylinder is a contactor characterized by the 2nd cutting part arrange | positioned so that it may become a symmetrical shape with respect to the center of the said 3rd cylinder.
A contactor for use in an inspection jig for electrically connecting an inspection object having an inspection point to be inspected and an inspection device for inspecting electrical characteristics between the inspection points,
An inner side contactor in which one end is pressed against the electrode portion and the other end is pressed against the inspection point and formed from a conductive tubular member,
An outer contact made of a conductive tubular member in which the inner contactor is accommodated in a non-conductive state inside, one end of which is press-contacted to the electrode portion, and the other end of which is press-contacted to the inspection point.
Respectively,
The inner contactor and the outer contactor are provided with a spiral cut portion formed in a tubular wall portion between the one end and the other end,
The outer wall surface of the cylindrical member of the said outer contactor is formed so that it may become enlarged gradually or stairway shape along the said one end side from the said other end side.

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