KR20080093865A - The fixture for circuit board inspection - Google Patents

Abstract

A fixture for circuit board inspection is provided to exchange easily a contact by using a first guiding plate and a second guiding plate. Each of contacts(2) includes an end as an electrical conductor. One end of each contact is connected to one of test target points of a substrate. Each contact has conductivity. An insulating part is formed at a center of each contact. Each contact has a shape of bar. A contact supporter(3) is formed to support the contacts. The contact supporter includes a first guiding plate(31) having a first guiding hole and a second guiding plate(32) having a second guiding hole. The first guiding plate is used for guiding one end of the contact to the test target points. The second guiding plate is used for guiding the other end of the contact to an electrode part. A connective electrode body is arranged opposite to the contacts. The connective electrode body includes a connective electrode part. The first guiding hole has a diameter smaller than a diameter of the insulating part. The second guiding hole has a diameter larger than the diameter of the insulating part. The second guiding plate has a corresponding state and a supporting state. The second guiding plate is electrically connected to a part of the connective electrode part.

Description

Jig for inspection of board {THE FIXTURE FOR CIRCUIT BOARD INSPECTION}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection jig used for inspecting a substrate to be inspected. More particularly, the contact resistance of the substrate inspection jig and the electrode portion of the substrate inspection jig are reduced ( The present invention relates to a substrate inspection jig having an electrode structure of a substrate inspection jig to be carried out.

In addition, the present invention is not limited to printed wiring boards, but for example, flexible wiring boards, multilayer wiring boards, electrode boards for liquid crystal displays or plasma displays, and electrical wiring in various substrates such as package substrates and film carriers for semiconductor packages. It can be applied to the inspection of, and in this specification, these various wiring boards are collectively referred to as "substrate".

In the conventional wiring pattern formed on a circuit board, it is necessary to accurately transmit electrical signals to electrical / electronic parts such as semiconductors and resistors such as ICs mounted on the circuit board. The resistance value between the inspection points provided in the wiring pattern to be inspected is measured with respect to the wiring pattern formed on the printed wiring board, the circuit wiring board having the wiring pattern formed on the liquid crystal panel or the plasma display panel, or the semiconductor wafer. It measured and the quality was judged.

In this determination inspection, an inspection method for inspecting disconnection and short circuit in the wiring pattern is implemented. In the inspection of such conduction or short circuit, each of the measurement terminals is brought into contact with each of the inspection points provided on two portions of the wiring pattern to be inspected, and a current of a predetermined level is measured between the measurement terminals. The determination was made by measuring the voltage value between the measurement terminals and comparing this voltage value with a predetermined threshold value.

However, in the board inspection jig used in such a method, when a measurement terminal in contact with each of the two inspection points of the wiring pattern is connected to the supply of the measurement current and the measurement of the voltage, between the measurement terminal and the inspection point The contact resistance of has a disadvantage in that the measurement voltage affects the measurement voltage, thereby reducing the measurement accuracy of the resistance value and reducing the reliability of the test result.

In particular, in recent years, the miniaturization of wiring patterns formed on circuit boards has progressed and the resistance value of wiring patterns has become small, and the influence of the above-mentioned contact resistance on the measured value has become a big problem.

In order to solve such a problem of contact resistance, a contactor as disclosed in Patent Document 1 is proposed. The contactor is made of a material having a substantially linear contact portion which is capable of contacting substantially perpendicularly to an electrode to be measured, and a portion extending along the longitudinal direction of the contact portion has a coefficient of thermal expansion different from other portions of the contact portion. Consists of. Since the contact portion is made of bimetal by such a configuration, if the contact portion is brought into contact with the electrode to be measured substantially perpendicularly under a predetermined environmental temperature and overdrive is performed in that state, the contact portion is subjected to heat of the environmental temperature transmitted from the electrode to be measured. As a result, the contact portion is bent toward a portion made of a material having a small coefficient of thermal expansion.

Patent Document 1: Japanese Unexamined Patent Publication No. 2005-345129

However, even when using the contactor described in Patent Literature 1, it is only possible to make vertical contact with the electrode portion, and in view of the contact stability, it is provided with a sufficient contact stability and a low contact resistance value. I could not say that.

In addition, the board | substrate inspection jig may be used from tens of thousands to several hundred thousand times. For this reason, when the contactor for board | substrate test | inspection was broken or worn at the time of use, it was necessary to replace it quickly and easily.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and provides a substrate inspection jig having an electrode structure which is excellent in maintainability and which reduces contact resistance of the contact portion of the substrate inspection jig and the electrode portion of the substrate inspection jig.

Invention of Claim 1 is a board | substrate test | inspection for obtaining the electrical conduction between the board | substrate test apparatus main body and the some test subject point formed in the wiring pattern of the said test | inspection board | substrate, in order to test the electrical characteristic of a test | inspection board | substrate. As the jig for jig, the jig for jig has an end portion for conducting electrical conduction at both ends, and one end is pressed against one of the substrate inspection points and provided with electrical conductivity and at the edge except for the end. A first guide plate including a plurality of rod-shaped contacts provided with an insulator, a first guide hole for supporting the plurality of contacts, and guiding one end of the contact to the inspection point; And a second guide hole for guiding the other end portion to the electrode portion of the substrate inspection apparatus. And a contact electrode body having a contact support having a second guide hole, and a connecting electrode portion disposed opposite to the other end of each contact of the contact and connected to the substrate inspection apparatus, wherein the first guide is provided. The hole is formed to have a diameter smaller than the diameter of the insulator of the contact, and the second guide hole is formed to have a diameter larger than the diameter of the insulator of the contact, and the first guide plate and the second guide plate are And a mating state in which the first guide hole and the second guide hole corresponding thereto are adapted to detachable the contactor, and the second guide plate from the mating state to support the contactor. And a supporting state moving in the planar direction of the guide plate, wherein When the edge of the room and the connecting electrode body are connected, at least a part of the side peripheral surface of the vicinity of each of the other ends is brought into an electrically conductive state by contacting a part of the connecting electrode portion facing the other. Provide inspection fixtures.

The invention according to claim 2 has a structure in which the connecting electrode portion accommodates the other end of the contact opposite to the inside thereof, and the conduction state of the contact and the connecting electrode portion is at least the other of the contact. A substrate inspection jig according to claim 1 is provided by contact between an end portion and an inner surface of the connection electrode portion.

The invention according to claim 3, wherein the connecting electrode portion is a tubular shape which can loosely insert at least a part of the other end of the contact opposite to them, and provides the substrate inspection jig according to claim 1 or 2. do.

The invention according to claim 4, wherein the boundary between the insulator portion of the contactor and the other end portion is disposed inward from the second guide hole.

The invention according to claim 5 is characterized in that the contact supporter includes a protection portion that slides in the long axis direction of the contact so that the contact is protruded when the other of the contact is in contact with the connection electrode portion. Provided is a substrate inspection jig according to claim 1.

According to the invention as set forth in claim 1, the first guide plate and the second guide plate are formed so as to have a mating state and a supportable state in which the contact is detachable. Therefore, when the contact is replaced, the first guide plate and the second guide plate are used. It can be replaced easily by bringing into a mating state.

Moreover, in connecting the other end part of a contact group and a connection electrode body, since at least one part of the side peripheral surface of the vicinity of the other end part of a contactor contacts and contacts a part of the connection electrode part which opposes, it connects with a contactor, Provided is a substrate inspection jig that can reduce the contact resistance value of the electrode portion and has a stable contact resistance value regardless of the number of times of use.

According to the invention of claim 2, since the conduction state of the contactor and the connection electrode part is at least by contact between the other end of the contactor and the inner surface of the connection electrode part, the contact area of the contactor and the connection electrode part can be increased, resulting in a contact resistance. It is possible to further reduce the value and to provide a substrate inspection jig having a stable contact resistance value regardless of the number of times of use.

According to the invention of claim 3, since the connecting electrode portion can be loosely inserted into the contactor, an excessive burden can be prevented when the contact enters the connecting electrode portion.

Moreover, since the connection electrode part is formed in a cylindrical shape, the contact surface with which a contactor contacts can be made uniform, and the board | substrate inspection jig which has a stable contact resistance value in contact with any cylinder part is provided.

According to the invention as set forth in claim 4, when the first guide plate and the second guide plate are in a mating state, the boundary between the insulating portion of the contactor and the other end contacts the second guide hole forming the side surface of the second guide hole. The coupling can prevent falling or misalignment of the contact.

According to the invention as set forth in claim 5, since the contact support has a protective portion for protecting the contact, it is possible to effectively protect the contact at the time of use and nonuse of the contact, and to increase the service life of the contact. To provide.

EXAMPLE

An embodiment of the present invention will be described.

1 shows a schematic configuration in the case of using the jig for inspection of a substrate according to the present invention. In Fig. 1, a plurality of contacts 101, a support body 102 supporting such a contact 101 in the form of a plurality of needles, a connection electrode body 103 supporting the support body 102 and a connecting electrode portion which is brought into contact with the contactor 101, The test signal processing unit 104 for processing the detected electrical signal and the wire contact 105 connecting the test contact 101 and the test signal processing unit 104 are shown. The contactor 101 is a terminal in contact with each inspection point of the wiring pattern formed on the inspection target board, and the connecting electrode body 103 is electrically connected by performing pitch conversion between the contactor 101 and the inspection signal processing unit 104.

The connecting electrode body 103 is provided with the connecting electrode part 106 electrically connected to the contactor 101 on the arrangement side of the support body 102. The present invention can reduce the connection resistance value with the contactor 101 by creatively devising the connection electrode part 106 and provide a connection resistance value with stability.

The board | substrate inspection jig | tool 1 of one Embodiment which concerns on this invention is provided with the contactor 2, the contactor support body 3, and the connection electrode body 4 (refer FIG. 2). In addition, although the connection electrode body 4 is connected with the test signal processing part 104 as mentioned above, it abbreviate | omits in the said FIG. 2, the head 11 of the board | substrate inspection jig and the connection electrode body 4 are not connected.

The contactor 2 is flexible and has electroconductivity, and is formed in the shape of a rod such as a needle or a girdle. One of the contactors 2 is pressed against the inspection point of the inspection target substrate and the other is in contact with the connecting electrode portion described later. For this reason, the contactor 2 can transmit the electric signal from the test signal processing unit 104 to the test point and can also transmit the electric signal from the test point to the test signal processing unit 104.

Since the contactor 2 is flexible, the contactor 2 is bent (buckled) in a direction perpendicular to the long axis direction of the contactor 2 in a space formed inside the contactor support 3 described later. For this reason, when the said contact 2 is used, it bends under the load in the test | inspection point of a test | inspection board | substrate or a connection electrode part, and a pressure generate | occur | produces in each contact part by this bending.

The contactor 2 is not particularly limited as long as it is formed in the shape described above, but may be formed as in the embodiment shown in FIG.

The contact 2 shown in Fig. 3 is formed of an elongated rod-shaped member 21 having a shape in which both ends thereof become narrow as shown in Fig. 3A. The narrowing shape may be a sharp shape as shown in Fig. 3 (a) or may be a spherical shape.

The rod-shaped member 21 may be stainless steel, beryllium copper (BeCu) or tungsten (W), but is not particularly limited and may be a conductive material.

The rod-shaped member 21 is preferably formed in a cylindrical or cylindrical shape so as to apply a uniform load to the contact area in contact with the connecting electrode portion described later, but is not particularly limited.

The length and thickness of the rod-shaped member 21 are not particularly limited, but are appropriately set according to the pitch of the wiring pattern formed on the substrate under test or the size of the substrate under test.

3B shows a state where the rod-shaped member 21 is accommodated in the tubular member 22. As shown in FIG. The cylindrical member 22 has flexibility and conductivity. The rod-shaped member 21 is inserted into the cylindrical member 22. In Fig. 3 (b), when the one end 22a, which is the one end of the cylindrical member 22, and the other end 22b, which is the other end, the length of the rod-shaped member 21 which protrudes from the one end 22a is projected from the other end 22b. It is set to be longer than the length of.

In such a case, one end 22a contacts the connecting electrode part, and the other end 22b comes into contact with the inspection point of the substrate under test. By changing the length of the arrangement in this way, the contact area where the rod-shaped member 21 comes into contact with the connecting electrode portion can be increased, and the length of the rod-shaped member 21 protruding from the other end 22b is set short. When the contact is in contact, the cylindrical member 22 can achieve a stopper role in preventing the rod-shaped member 21 from penetrating into the inspection point more than necessary, and also inspects a spherical bump or the like. It can contact stably with respect to a point. In addition, it is possible to make contact with the inspection point by the rod-shaped member 21 and the tubular member 22 possible without depending on the workability of the tip shape of the rod-shaped member 21.

The protruding amount of the rod-shaped member 21 on the other end 22 'side can be set shorter than the end 22a as described above, and can also be set as the amount (length) penetrating into the inspection point as described above.

The tubular member 22 is not particularly limited as long as it is capable of accommodating the rod-shaped member 21 therein and can be brought into a conductive state with the rod-shaped member 21.

The cylindrical member 22 and the rod-shaped member 21 are electrically connected to each other. For this reason, it forms by electrolytic-plating or electroless-plating in the whole in the state which inserted the rod-shaped member 21 into the cylindrical member 22 (the state shown in FIG.3 (b)).

Alternatively, by forming a plurality of protruding portions (not shown in the drawing) inside the tubular member 22, the tubular member 22 has a caulking structure for pressing the rod member 21, thereby contacting and electrically Can be turned on.

In Fig. 3 (c), the rod-like member 21 and the tubular member 22 are integrated, and the insulating portion 23 is formed on the outer circumferential surface of the tubular member 22. As shown in Fig. 3 (c), the place where the insulating portion 23 is formed is formed at a place other than one end and the other end of the contactor 2. In addition, the step 24 formed by the insulating portion 23 and the cylindrical member 22 is used as a coupling portion when the contactor 2 is disposed on the contact support 3 described later.

The insulator 23 prevents a short circuit even when the contactor 2 is in contact with the adjacent contactor 2 when the contactor 2 is bent.

Polyurethane may be used for the insulating portion 23, but is not particularly limited.

In the above description, the case where the contactor 2 is formed by using the rod-shaped member 21, the tubular member 22, and the insulator 23 is described. However, a contactor composed of the rod-shaped member 21 and the insulator 23 may be used. It is not limited to these.

In the present specification, a part of the contactor 2 accommodated in the connection electrode part 41 will be described as 2A, but the receiving part 2A of the contactor 2 is one end of the contactor 2 in which the insulator 23 is not formed. For example, it is the part (the part of length L) of the contactor 2 from the front-end | tip of the contactor 2 to step 24. It is not necessary that all of the portions L be accommodated in the connecting electrode portion, but it is preferable that as many portions as possible be accommodated.

Although the length L of the said part is set suitably by the length accommodated in a connection electrode part, it is preferable that it is about 2-5 mm also in order to become a contact state (conduction state) with sufficient stability.

The part of the contactor 2 corresponds to the other end, and at least a part of the side circumferential surface of the part comes into contact with the connection electrode part 41.

The contact supporter 3 supports a plurality of contacts 2 (contact group) composed of a plurality of contacts 2.

As shown in FIG. 2, the contact support 3 includes a first guide plate 31 and a second guide plate 32 to support a plurality of contacts 2.

In the contact support 3 shown in Fig. 2, the first guide plate 31 is disposed inside the ground, and the second guide plate 32 is disposed in front of the ground, and the first guide plate 31 guides the tip of the contactor 2 to the inspection point and the second guide plate 31 is disposed. The guide plate 32 guides the other end of the contactor 2 to the connection electrode portion 4.

The first guide plate 31 is provided with a first guide hole 33 for guiding the predetermined contact 2 to the predetermined inspection point. The first guide hole 33 is formed to be larger than the outer diameter of the rod-shaped member 21 or the tubular member 22 of the contactor 2 and smaller than the diameter of the insulating portion 23. This formation prevents the contactor 2 from falling out of the first guide hole 33 of the first guide plate 31.

The second guide plate 32 is provided with a second guide hole 34 for guiding the predetermined contactor 2 to the predetermined connection electrode portion. The second guide hole 34 is formed so as to be larger than the outer diameter of the rod-shaped member 21 or the cylindrical member 22 of the contactor 2 and larger than the diameter of the insulating portion 23. In this way, the contact 2 can be inserted into the contact terminal support 3 from the second guide hole 34.

For this reason, in the case where the contactor 2 is inserted and removed, for example, the second guide plate 32 is placed upward and the first guide plate 31 is disposed downward, and the contactor 2 is inserted and removed from the second guide hole 34 of the second guide plate 32. It is said.

The 1st guide plate 31 and the 2nd guide plate 32 are arrange | positioned with predetermined space | interval with strut 35a in between. For this reason, a space is formed between the first guide plate 31 and the second guide plate 32 by the support post 35a, and the contactor 2 can bend in this space.

The length of the space by the support 35a is appropriately set by the user.

2, the support | pillar shown with the code | symbol 35b is shown. The strut 35b is a strut for supporting three plate members of the second guide plate 32 described later.

In Fig. 2, the first guide plate 31 is formed by three plate members. These plate members are comprised by the plate member for forming the 1st guide hole 33, and the plate member which forms the screw hole for fixing to the support | pillar 35a. The number of these plate members is not specifically limited, As long as it has at least the above-mentioned function, it may be one piece, two pieces, or three or more pieces.

4 is an enlarged partial cross-sectional view of the first guide plate 31 and the contactor 2;

As shown in Fig. 4, the first guide plate 31 is formed using three plate members, an outer plate member 311, a middle plate member 312 and an inner plate member 313. The first guide hole 33 includes an outer guide hole 331 of the outer plate member 311, a middle guide hole 332 of the middle plate member 312, and an inner guide hole 333 of the inner plate member 313.

The outer plate member 311 is disposed closest to the substrate to be inspected and is arranged in the order of the middle plate member 312 and the inner plate member 313.

The diameter of the first guide hole 33 is formed to be larger than the width (diameter) of the rod-shaped member 21 or the tubular member 22 of the contactor 2 and smaller than the diameter of the insulating portion 23. For this reason, only the tip conduction part of the contactor 2 is arrange | positioned so that it may protrude from the outer side plate member 311. As shown in FIG.

In Fig. 4, the first small diameter inner guide hole 333b of the first inner guide hole 333 of the inner plate member 313 is formed to have the size as described above.

In Fig. 4, each of the plate members forming the first guide portion 31 is formed with a large diameter guide hole and a small diameter guide hole, but the guide hole positioned outside the outer plate member 311 is the first small diameter guide hole. The guide hole formed as 331a and disposed at the innermost side is a guide hole (third small diameter guide hole 333b) having the above function.

Further, the boundary 2b of the conductive portion and the insulating portion of the contactor 2 is disposed inside the first guide hole 33.

As shown in Fig. 4, the first guide hole 33 has a small diameter guide hole 331a, a large diameter guide hole 331b, a large diameter guide hole 332a, a small diameter guide hole 332b, a large diameter guide hole 333a, The small diameter guide holes 333b are arranged in this order.

In addition, although the said order is not limited, it is preferable to consider that it is necessary to make contact with the test | inspection point of a board | substrate with high precision, and to prevent contactor from abrasion because a contactor contacts a board member.

2, the second guide plate 32 is formed of three plate members. These plate members are comprised by the plate member for forming the 2nd guide hole 34, and the plate member for forming the screw hole for fixing the support | pillar 35a. The number of these plate members is not specifically limited, As long as it has at least the above-mentioned function, it may be one piece, two pieces, or three pieces or more.

5 is a schematic enlarged cross-sectional view showing the positional relationship between the second guide plate 32 and the contactor 2;

In FIG. 5, the second guide plate 32 includes an inner guide plate 321, a middle guide plate 322, and an outer guide plate 323.

The second guide plate 32 includes an inner guide plate 321, a middle guide plate 322 and an outer guide plate 323. The inner guide plate 321 is formed with a hole 341 including all of the plurality of contacts 2, and the inner guide plate 321 is used to support the support post 35 connected to the first guide plate 31.

The middle guide plate 322 is formed to slide slightly further in the planar direction of the plate member than the inner guide plate 321. The middle guide plate 322 includes a small diameter guide hole 342a and a large diameter guide hole 342b.

The outer guide plate 323 is provided with a guide hole for guiding the end of the contactor 2 to the connection electrode portion.

The diameter of the second guide hole 34 is larger than the insulation 23 of the contactor 2. For this reason, the contact 2 can be inserted and removed through the said 2nd guide hole 34. FIG.

It is preferable that the boundary 2b of the rod-shaped member 21 and the insulating portion 23, which is the other end of the contactor 2, is disposed inward from the second guide hole 34. Since the boundary 2b is disposed inward from the second guide hole 34, the second guide plate 32, which will be described later, is engaged with the surface of the second guide plate 32 of the second guide hole 34 when the slide is made. For this reason, the contact 2 is fixed.

In FIG. 5, the boundary 2b of the contactor 2 exists in the large diameter guide hole 343a of the outer guide plate 323, and is couple | bonded with the step part of the small diameter guide hole 343b and the large diameter guide hole 343a. In Fig. 5, the guide holes are provided with holes of different sizes so that a step is generated so that the boundary 2b of the contactor 2 is engaged, but it is not necessary to provide the stepped portion.

The second guide plate 32 is formed of a plurality of plate members as described above, and these plate members are disposed to be moved by a predetermined length in the perpendicular direction (left and right direction in Fig. 2) with respect to the contactor 2, respectively.

By gradually moving and arranging the plurality of plate members, the second guide hole 34 is formed to be inclined. For this reason, it is engaged with the 2nd guide hole 34 formed in the 2nd guide plate 32 as mentioned above.

In addition, when the contactor 2 is supported by the contactor support 3, the contactor 2 is bent lightly and contact resistance is generated with the plate member, so that the contactor 2 is supported with stability.

In Fig. 5, the inner guide plate 321 is fixed to the first guide plate 31 without moving in the planar direction. The middle guide plate 322 slides slightly in the plane direction of the second guide plate 32. The outer guide plate 323 slides slightly further in the plane direction than the middle guide plate 322. That is, the outer guide hole 343 slides larger than the first guide hole 33.

The second guide plate 32 is provided with the protection part 36 which slides in the longitudinal axis direction of the contactor 2 on the connection electrode part side of the contactor 2 so that the contactor 2 may protrude in the use which contacts the contactor 2 to the connection electrode part.

As shown in Fig. 2, the protection part 36 is arranged on the connecting electrode part side of the second guide plate 32 and is provided with a spring mechanism 37 so as to slide in the long axis direction of the contactor 2.

The said protection part 36 is formed with the board member of a predetermined thickness, and protects the front-end | tip part (contact part of a contact electrode part) of the contactor 2 when the board | substrate inspection jig is not in use.

For example, Fig. 6 shows the operation of the protective part. Fig. 6 (a) shows the state when the board inspection jig is not in use, and Fig. 6 (b) shows the state when the board inspection jig is in use.

Fig. 6 (a) shows a state in which the contactor 2 and the contactor support 3 of the substrate inspection jig are not connected to the connecting electrode body 4, and in this state, the end portion in contact with the connecting electrode portion of the contactor 2 is the protective portion 36. It is protected by. In addition, although the figure has shown the state accommodated in the inside of the protection part 36, the front-end | tip of the contactor 2 may protrude slightly from the protection part 36.

In addition, the protection part 36 is provided with the slide mechanism of the same quantity as the outer board member of the 2nd guide plate 32 or the 2nd guide plate 32. As shown in FIG. For this reason, the hole of the 2nd guide hole 34 and the protection part 36 is arrange | positioned in the same position by planar view.

Fig. 6 (b) shows a state where the contact 2 and the contact support 3 of the jig for substrate inspection are connected to the connecting electrode body 4. In Fig. 6B, the connecting electrode body 4 is omitted. In this state, the protection part 36 slides and the contact 2 protrudes, and this protruding contact 2 comes into contact with the connection electrode portion.

In this case, the protection part 36 comes into contact with the lower end of the second guide plate 32 and is pressed by the spring of the spring mechanism 37. Furthermore, although the protection part 36 tries to return to the position shown in FIG. 6 (a), in the state of FIG. 6 (b), the connecting electrode body 4 and the protection part 36, and the protection part 36 and the second guide plate 32 are in contact with each other.

In Fig. 2, two projecting portions 38 for aligning the contact support 3 and the connecting electrode body 4 described later are formed.

The connection electrode body 4 is provided with the connection electrode part 41 which supports the contact support body 3, and accommodates a part of contactor 2 inside.

The connection electrode part 41 is formed in a hole shape extending from the surface of the connection electrode body 4 into the connection electrode body 4 to accommodate the contactor 2 therein. Since the connection electrode part 41 is formed in the shape of a hole extending into the connection electrode body 4 in this way, a part of the contactor 2 can be reliably accommodated in the connection electrode part 41. In this case, a part of the contactor 2 can be brought into contact with the inner surface by forming the electrode portion on the inner surface of the connection electrode portion 41.

The connecting electrode portion 41 is connected to the conductive wire 42. The conductive wire 42 is connected to the inspection signal processing unit as described above.

It is preferable that the connection electrode part 41 is a shape which can loosely insert the contactor 2. As shown in FIG. Since the contact electrode part 41 can loosely insert the contactor 2, the frictional resistance between the contactor 2 and the contact electrode part 41 is reduced when the contactor 2 is accommodated in the contact electrode part 41 or the contactor 2 is removed from the contact electrode part 41. It is because it can reduce and can extract easily.

The connection electrode part 41 accommodates a part of contactor 2 inside, and uses the inner surface of the connection electrode part 41 as an electrode part. For this reason, the connection electrode part 41 can be formed in electroconductive cylinder shape.

In this case, the cylindrical connection electrode part 41 accommodates the contactor 2 inside, and the cylindrical inner surface functions as an electrode part.

In addition, the connection electrode part 41 arrange | positions a cylinder (pipe) so that it may become one surface with the surface of the connection electrode body 4. As shown in FIG. By arrange | positioning in this way, when the surface of the connection electrode body 4 becomes one surface, and when the 2nd guide plate 32 and the protection part 36 contact | connect the connection electrode body 4, it can arrange | position so that it may become perpendicular to the surface of the connection electrode body 4, In use, even when the contactor 2 is pressed and bent, a uniform load can be applied to any contactor 2.

Since the contact electrode 2 enters into and out of the connection electrode part 41 when the connection electrode part 41 is used or not used, the longitudinal direction of the contact part 2 and the connection direction of the connection electrode part 41 cross each other in order to ensure contact with the connection electrode part 41. Preferably arranged or formed relatively).

As this specific example, for example, the connecting electrode portion 41 is formed to be inclined or curved with respect to the long axis of the contactor 2.

As the connection electrode portion 41 is formed in this way, when the contactor 2 is accommodated inside the connection electrode portion 41, it is accommodated by rubbing the inner surface of the connection electrode portion 41, and the contactor 2 establishes a contact state with the connection electrode portion 41 reliably. can do. In particular, the oxide film formed on the electrode portion on the inner surface and the surface of the contactor 2 can be removed.

Fig. 7 shows one embodiment of the connecting electrode portion. The connection electrode part 41 shown in Fig. 7A is formed in parallel with the thickness direction of the connection electrode body 4. Even in this case, when the contactor 2 is inclined as described above, the contactor 2 rubs against the inner surface of the connection electrode portion 41 to make contact.

Fig. 7 (b) shows a case where the connecting electrode portion 41 is formed at an angle with respect to the surface of the connecting electrode body 4 at an angle. In this case, even if the contactor 2 is accommodated on the surface of the connection electrode body 4 in a substantially perpendicular direction, the contact is made while rubbing the inner surface of the connection electrode portion 41.

Fig. 7 (c) shows a case where the connecting electrode portion 41 is formed in a '>' shape. In this case, the contact 2 is rubbed and touched as shown in Fig. 7 (b), and the connection electrode portion 41 forms an inclination in the reverse direction at the vertex portion having a '>' shape. Contactor 2 is brought into contact with the inner surface.

Fig. 7 (d) shows a case where the connecting electrode portion 41 is formed curved. In this case, when the contactor 2 is accommodated, the contact is bent while rubbing along the inner surface of the connection electrode portion 41. In this case, since the degree of influence on the contactor 2 is lower than that shown in Fig. 7C, the contactor 2 can be easily inserted and removed.

The shape of the connection electrode portion 41 shown in FIG. 7 is not limited to this, but can be set so that the receiving direction of the connection electrode portion 41 intersects with the entry and exit direction of the contactor 2. By forming the connection electrode portion 41 as described above, the contactor 2 reliably comes into contact with the inner surface of the connection electrode portion 41 and is accommodated while rubbing the inner surface when received, so that the contact resistance value is low and the stability of the contact resistance value is improved. It is possible to connect the high contact 2 and the connection electrode portion 41.

As another specific example, as shown in Fig. 8, the tip 2A of the contactor 2 accommodated in the connection electrode portion 41 is formed by bending with respect to the long axis of the contactor 2.

By bending the tip 2A of the contactor 2 in this manner, the tip 2A of the contactor 2 is contacted while rubbing the inner surface of the connection electrode part 41 when it is accommodated in the connection electrode part 41.

The contact 2 shown in FIG. 8 is bent so that the tip 2A of the contact 2 has a width W from the center axis of the contact 2. The width W is preferably formed to be approximately equal to the inner diameter of the connection electrode portion 41. This is because the width W is formed to be substantially equal to the inner diameter of the connection electrode portion 41, so that not only the inner surface can be reliably contacted, but also the amount (width) to be bent can be reduced.

Fig. 9 shows a state where the substrate inspection jig according to the present invention is used.

In FIG. 9, the accommodating part 2A of the several contactor 2 is accommodated in the connection electrode part 41. As shown in FIG. Although not shown in FIG. 9, in the case where the receiving portion 2A of the contactor 2 is bent or disposed at an inclined position, when the contactor 2 is accommodated in the connecting electrode portion 41, the contacting surface is rubbed and accommodated. In FIG. 9, the contactor 2 is located in the substantially center of the connection electrode part 41 for convenience.

When the contactor 2 is accommodated in the connection electrode part 41, it is preferable to press-contact the receiving part 2A of the contactor 2 to the inner side surface of the connection electrode part 41 reliably by moving the contact support body 3 or the connection electrode body 4 relatively.

The contact supporter 3 and the connection electrode body 4 are moved in a direction perpendicular to the long axis of the contactor 2, thereby making sure that the inner surface of the connection electrode portion 41 is in contact with each other. By inclining the contact support 3 and / or the connecting electrode body 4 in the inward direction of the contact 2, the receiving portion 2A of the contact 2 can be more stably contacted with the inner surface of the connecting electrode 41.

Fig. 10 shows one embodiment of the sliding portion provided in the connecting electrode body. The sliding part shown in FIG. 10 is provided with the connecting electrode body 4 comprised from three sheets of the 1st board member 43, the 2nd board member 44, and the 4th board member 45. As shown in FIG. The connection electrode part 41 is formed so that these three board members may penetrate. The first plate member 43 and the third plate member 45 are fixed members, and the second plate member 44 is a mechanism for sliding. For this reason, as shown in FIG. 10 (b), the second plate member 44 slides to press the connecting electrode portion 41 from the side surface, and the connecting electrode portion 41 becomes curved to side the receiving portion 2A of the contactor 2. Pressurizes from and comes in contact.

Although the connection electrode body 4 shown in FIG. 10 was demonstrated using three plate members, it is not restricted to three sheets, A sliding part may be formed using several plate member.

In Fig. 10, for convenience, the contactor 2 is placed at a position substantially parallel to the hole direction of the connection electrode portion 41. Figs.

Fig. 11 is a schematic configuration diagram showing an electrode terminal of a connecting electrode portion.

Electrode terminals of the connecting electrode portion 41 shown in Fig. 11A are shown by reference numeral 421 and 422. The electrode terminals 421 and 422 are each formed of conductive wires, and the respective conductive wires are connected to the substrate inspection apparatus main body. For this reason, two terminals are provided in the connection electrode part 41, and four-terminal measurement can be performed.

By using the above configuration, the contact resistance on the electrode side becomes extremely small (or small) and a stable value. For this reason, if only the contact resistance on the inspection point side is taken into account, the measurement result is almost the same as in the case where two terminals are directly in contact with the inspection point.

The electrode terminal 42 of the connection electrode part 41 shown in Fig. 11B is formed by using one conducting wire.

In the electrode terminal 42, one end of the triconductive conductive material is electrically connected to the connecting electrode portion 41, and the remaining terminals are electrically connected to the substrate inspection apparatus main body as two electrode terminals 421 and 422.

In such a case, accurate measurement can be performed by detecting the resistance value by the distance d from the connection electrode portion 41 to the three-pronged portion and correcting the resistance value.

As shown in FIG. 11, four terminal measurement can be performed by providing two electrode terminals from the connection electrode part 41. FIG. In this case, four-terminal measurement is usually performed using two electrode terminals for the point to be inspected. However, in the electrode structure (connection electrode portion structure) of the present invention, the contact resistance of the contactor 2 and the connection electrode portion is extremely small or stable. In this way, stable four-terminal measurement is possible.

It is an explanation of the structure of the board | substrate inspection jig which concerns on this invention.

Next, the case where the contactor 2 is attached to the board | substrate inspection jig of this invention is demonstrated.

12 shows a process in the case of attaching a contactor.

First, the first guide hole 33 and the second guide hole 34 are arranged to mate. At this time, the protection part 36 is in contact with the second guide plate 32.

In the case of the embodiment of Fig. 12, the first guide hole 33 and the second guide hole 34 are arranged so as to be arranged in a line in the vertical direction (Fig. 12 (a)).

In this case, the second guide plate 32 is arranged above and the first guide plate 31 is arranged below. Although this arrangement position is not specifically limited, Since the contactor 2 does not fall out from the 1st guide hole 33, it is preferable to arrange | position in this way.

Next, the contactor 2 is inserted from the second guide hole 34 (see Fig. 12B).

In this case, since the first guide hole 33 is formed smaller than the diameter of the insulating portion 23 of the contactor 2 as described above, the contactor 2 does not fall out.

When the contactor 2 is inserted, the second guide plate 32 and the protective part 36 are simultaneously slid.

At this time, the insulating portion 23 of the contactor 2 is engaged with the second guide hole 34 of the second guide plate 32 (see Fig. 5).

That is, the contactor 2 is bent by the slide of the second guide plate 32 and the protective part 36. Since the contactor 2 is flexible, the contact part 2 forms the side of the first guide plate 31 forming the first guide hole 33 and the second guide hole 34. 2 It is combined with the side part (surface part) of the guide plate 32.

At this time, as for the amount of sliding, the outer side plate member side of the 2nd guide plate 32 will slide large.

Next, the protection part 36 protrudes from the 2nd guide plate 32 (refer FIG. 12 (d)).

The end of the contactor 2 is protected by protruding the protector 36.

In this way, when the contactor 2 can be attached and detached, it reverses the above order.

Subsequently, one example of the substrate inspection jig according to the present invention will be described.

Figure 13 shows one embodiment of a substrate inspection jig implemented in the present invention.

The contactor 2 shown in the above-mentioned one embodiment forms a rod-shaped member 21 having a length of 30 mm and a diameter of 90 µm using tungsten as a material, and the insulating portion 23 is formed so that the length of the receiving portion 2A is 2 mm.

The connecting electrode portion 41 is a conductive pipe having an inner diameter of 95 µm and an outer diameter of 125 µm, and is plated on the inner surface of the pipe.

In the embodiment shown in FIG. 13, the connecting electrode body 4 is formed of the first plate-shaped portion 43, the second plate-shaped portion 44, the third plate-shaped portion 45 and the fourth plate-shaped portion 46 and the second plate-shaped portion. A sliding portion 47 for moving the portion 44 in the horizontal direction is provided. The first plate-shaped portion 43 and the third plate-shaped portion 45 are fixed members, and the fourth plate-shaped portion 46 is used as a base for the jig 1 'for substrate inspection.

The connecting electrode portion 41 is formed so as to penetrate through the first to third plate-shaped portions.

The slide portion 47 can move the second plate-shaped portion 44 to the left and right sides. The slide portion 47 is provided with a pair of left and right screw mechanisms, and the position of the second plate-shaped portion 44 can be adjusted by adjusting the left and right screws.

In addition, in Fig. 13A, a space is formed between the second guide plate 32 and the protection part 36 in an unused state.

Fig. 13B shows a state where the substrate inspection jig 1 'is used. At this time, the second guide plate 32 is brought into contact with the protection part 36, and the accommodating part 2A of the contactor 2 is accommodated in the connection electrode part 41. Then, the receiving portion 2A of the contactor 2 is brought into contact with the inner surface of the connecting electrode portion 41 to establish a conductive state.

In addition, in the substrate inspection jig 1 ', the slide portion 47 is provided on the left and right sides, and the second plate-shaped portion 44 of the connecting electrode body 4 is crossed by adjusting the screw after the receiving portion 2A of the contactor 2 is accommodated in the connecting electrode portion 41. To move in the direction of At this time, the second plate-shaped portion 44 of the connecting electrode portion 41 is bent in accordance with the movement of the second plate-shaped portion 44, and the inner surface of the connecting electrode portion 41 and the contactor 2 are press-contacted.

In the above embodiment, since the contactor 2 is also inclined and supported by the contact supporter 3, and the connection electrode body 4 has a sliding portion 47, the contactor 2 is accommodated while rubbing the inner surface of the connection electrode portion 41 and stably. The contact state can be established.

1 shows a schematic configuration in the case of using a substrate inspection jig according to the present invention.

Fig. 2 shows a schematic configuration of a substrate inspection jig according to the present invention and shows the positional structure of a contactor, a contact supporter and a connecting electrode body.

3 illustrates one embodiment of a contact. (a) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, (c) has shown the rod-shaped member, a cylindrical member, and an insulation part.

4 is a schematic cross-sectional view showing the configuration of an inspection point side of a substrate inspection jig according to the present invention.

Fig. 5 is a schematic cross-sectional view showing the structure of the connecting electrode side of the substrate inspection jig according to the present invention.

Fig. 6 shows a state where the substrate inspection jig according to the present invention is used.

7A to 7D show one embodiment of the connecting electrode portion, respectively.

8 shows another embodiment of a contact.

9 is a schematic configuration diagram showing a state of use of the substrate inspection jig according to the present invention.

10 shows another embodiment of the contactor and the connecting electrode section according to the present invention.

11 shows another embodiment of a contactor and a contact support according to the present invention.

Fig. 12 shows a process for attaching a contactor of a substrate inspection jig according to the present invention.

Fig. 13 shows one embodiment of the substrate inspection jig implemented by the present invention.

* Description of the symbols for the main parts of the drawings *

1 ····· jig for board inspection

1 '···· Jig for inspection of board (other embodiment)

2 ...

2A ...

3 ····· Contact support

31 ...

32 ... 2nd Information Board

4 ... electrode body

41 ... connection electrode part

42 Electrode terminals

Claims (5)

In order to inspect the electrical characteristics of the substrate under test, a plurality of substrate inspection points formed on the main body of the substrate inspection apparatus and the wiring pattern of the substrate under test are tested. As a jig for board inspection to obtain electrical conduction between the The substrate inspection jig, Both ends are provided with an end part for electrical conduction, and one end part is press-contacted to one of the said to-be-tested points of a board | substrate, is provided with electroconductivity, and the said end part is provided. A plurality of rod-shaped contacts having an insulating portion at the edge thereof, A first guide plate (# 1) having a first guide hole for supporting the plurality of contacts and guiding one end of the contact to the inspection point, and the other end of the contact. A contact support comprising a second guide plate having a second guide hole for guiding the electrode portion of the substrate inspection device; A connection electrode body which is disposed to face the other end of each contactor of the contactor and has a connection electrode part connected to the substrate inspection apparatus; Equipped, The first guide hole is formed to have a diameter smaller than the diameter of the insulating portion of the contact, The second guide hole is formed to have a diameter larger than the diameter of the insulating portion of the contact, The first guide plate and the second guide plate, A mating state in which the first guide hole and the second guide hole corresponding thereto are matched so that the contactor is detachable; In order to support the contactor, a supporting state in which the second guide plate moves in the planar direction of the second guide plate from the mating state Equipped, When the other end of the contact and the connection electrode body are connected, at least a part of the side circumferential surface in the vicinity of each of the other ends contacts with a part of the connection electrode part opposite thereto. To become a state of conduction Board inspection jig characterized by the above-mentioned. The method of claim 1, The connection electrode part has a structure for accommodating the other end of the contact opposite to the inside thereof, and the conduction state of the contact and the connection electrode part is at least the other end of the contact and the connection electrode part. A substrate inspection jig characterized by the contact of the inner surface. The method according to claim 1 or 2, And said connecting electrode portion is a tubular shape which can loosely insert at least a part of said other end of said contact facing each other. The method of claim 1, A boundary between the insulator part of the contact portion and the other end portion is disposed inward from the second guide hole. The method of claim 1, The said contact support body is provided with the protection part which slides in the long-axis direction of the said contact so that the said contact may protrude in the time of the use in which the other of the said contact contacts the said connection electrode part. Board inspection jig characterized by the above-mentioned.

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