201142323 六、發明說明： 【發明所屬之技術領域】 點=關於㈣先設定在被檢查物之檢查對象部上的檢查 t = G檢查的檢絲置進行電連接的檢查用治具，尤Ϊ 的^查進仃四端子狀的檢查用接觸件，及使用該接觸件 邱，檢查用治具’對於被檢查物所具有的檢查對象 二對，之檢查位置供給電力或電氣信號，並從 二[則出電氣信藉此可檢測出檢查對象部的電氣 特性，或者進行動作試驗。 水| π电乱 多如：印刷配線基板、撓性基板、_ 雕壯線土板、液日日顯不器或電漿顯示器用的電極板、及半導 =ί裝用的封裝基板或膜式載體等基板， 體2體晶片或晶片尺寸封，Chip size paekag== ^明書中’將料上述被檢查物總稱為「被檢查 對象部稱為「檢查部」。又，在檢查部設 部之電氣特性的檢查點，並使接觸件壓 接於邊檢查點，藉以檢測出檢查部的電氣特性。 【先前技術】 以往’於被檢查物之一實施形態即電路基板上形成有複數 雷i其it己成用來供給電力或流過電氣信號’以使搭載在 ，，基板上的电氣、電子零件具有所希望之功能。因此，已知 配線不良會導致電路基板的動作不良。 此解決此種問題’已多次有人提出對於如形成在電路基 板或半v體装置等被檢查物之配線的對象部是否良好 的檢查裝置的發明。 J疋 此種杈查裝置為了對於例如為被檢查物之基板 配線是否良好進行判斷，使用具備有與預先設定在配、 201142323 查。. .妾 觸件(探針)的檢查用治具來實施檢 的檢查點，的—端被麼接在配線(檢查部）上 狀ί氣’從基板檢查裝置供給用以測定 線所檢或電壓，並且往基板檢查裝置發送從配 化，步’半導體裝置小型化’基板小型 之配己線隨ί也形成得更細微且複雜。隨著如此基板 要進行接觸及複雜化’檢查用治具所具有的接觸件也須 及簡潔化觸件本身的細線化、接觸件間的間距狹小化、多針化 8士 ΐϊ、’·在對細微化及複雜化之被檢查物的縣部進行測定 ^ 象°卩與接觸件接觸時所產生之接觸電阻值的影響 ’ *此實施四端子測定法。在該四端子測定法巾，須要在檢 —點配置電流供給用與電壓檢測用之兩組電氣獨立的接觸件。 因此，需要比起通常情況更細線化的接觸件。 ^在此’例如專利文獻1所揭示之檢查用治具的接觸件具備： ，狀構件之第-電極部、及與該第—電極部内部絕緣而配置在 /、内部的第二電極部，並形成為第一電極部及第二電極部同時 與檢查點接觸。 Α然而，專利文獻1所揭示的檢查用治具由於以使用繞線的 螺旋彈簧形成，因此難以形成具有比線圈直徑之四倍左右小的 直徑的線圈，而極難形成外徑在1〇〇μπι以下的繞線螺旋彈箬， 並極難組裝成檢查用治具。即使能夠形成，就製造成本而言， 利用到2000〜4000支檢查用治具也過於昂貴，而有不實用二問 題。 【專利文獻1】日本特開20〇5_249447號公報 201142323 【發明内容】 (發明所欲解決之課題） 本發明提供檢查用治具，其具備四端子測定用的接觸件，該 ^觸件旎因應基板之細微化及複雜化，並具有零件個數減少之 潔化構造。 句 (解決課題之手段） _為解決上述課題，依本發明之檢查用治具，其特徵為：勺 言：，接電極體’具備有與檢查裝置電連接的複數之電極部^ 第形且具有導電性，其上方端麗接於該電極部;’ 弟一同體，呈向形且具有導電性，其從該第一筒 =内突出並;;x與連接方式_配置s 靖體上方端配置在該第一筒體的内部，而201142323 VI. Description of the invention: [Technical field to which the invention pertains] Point = (4) Inspection of the inspection target portion of the inspection object first t = G inspection inspection fixture for electrical connection ^Investigate the four-terminal inspection contact, and use the contact Qiu, the inspection fixture 'for the inspection object, the second pair of inspection objects, the inspection position to supply electric or electrical signals, and from the second [ Then, an electrical signal can be used to detect the electrical characteristics of the inspection target portion or perform an operation test. Water | π electric disturbance is as follows: printed wiring board, flexible substrate, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A substrate such as a carrier, a body 2 wafer or a wafer size seal, and a chip size paekag== ^in the book, the article to be inspected is collectively referred to as "the inspection unit". Further, in the inspection point of the electrical characteristics of the inspection unit, the contact is pressed against the inspection point to detect the electrical characteristics of the inspection unit. [Prior Art] Conventionally, in the embodiment of the object to be inspected, the circuit board is formed with a plurality of electric wires, which are used to supply electric power or flow an electric signal to mount the electric and electronic components on the substrate. The part has the desired function. Therefore, it is known that wiring failure causes malfunction of the circuit board. In order to solve such a problem, the invention has been proposed for an inspection apparatus which is excellent in the target portion of the wiring of the inspection object such as the circuit board or the half-v body device. J疋 This type of inspection device is used to determine whether or not the substrate wiring of the object to be inspected is good, and is used in advance and in 201142323. . . 妾 妾 妾 探针 探针 探针 探针 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾 妾The voltage is transmitted to the substrate inspection device from the compounding step, and the 'semiconductor device miniaturization' substrate is formed into a finer and more complicated structure. With such a substrate to be contacted and complicated, the contact members of the inspection jig must also be thinner and thinner, the spacing between the contacts is narrow, and the multi-needle is 8 ΐϊ, '· The influence of the contact resistance value generated when the sample is in contact with the contact member is measured. * This is a four-terminal measurement method. In the four-terminal measuring method, it is necessary to arrange two sets of electrically independent contacts for current supply and voltage detection at the inspection point. Therefore, there is a need for a contact that is thinner than usual. In the contact member of the inspection jig disclosed in Patent Document 1, for example, the first electrode portion of the shape member and the second electrode portion that is insulated from the inside of the first electrode portion and disposed inside the inside of the first electrode portion are provided. The first electrode portion and the second electrode portion are simultaneously brought into contact with the inspection point. However, since the jig for inspection disclosed in Patent Document 1 is formed by a coil spring using a winding, it is difficult to form a coil having a diameter smaller than about four times the diameter of the coil, and it is extremely difficult to form an outer diameter of 1〇〇. Winding bobbins below μπι, and extremely difficult to assemble into inspection fixtures. Even if it can be formed, in terms of manufacturing cost, it is too expensive to use 2000 to 4000 inspection jigs, and there are two problems that are not practical. [Problem to be Solved by the Invention] The present invention provides a jig for inspection, which includes a contact for measuring a four-terminal, and the contact member The substrate is made finer and more complicated, and has a clean structure with a reduced number of parts. In order to solve the above problems, the jig for inspection according to the present invention is characterized in that the electrode body 'is provided with a plurality of electrode portions electrically connected to the inspection device and Conductive, the upper end of which is connected to the electrode portion; 'different body, oriented and electrically conductive, protruding from the first cylinder = inner; and x; connection mode _ configuration s Inside the first cylinder, and
Cii方，接於該檢查部；第三筒體，呈筒形且具有 匕電，’其與•第—筒體及該第二筒體未電性連接， 收=在該第-筒體及該第二筒體 端=電極部，而第三筒體之下方端壓接以;㈡ 與該第—板“件隔 螺旋“第二缺口部，筒壁部設有 筒，設有螺旋狀的第二缺口部，的 部。. .、= 筒體固定的Ϊ二固定 之』具有比該第-筒體之外經小且比第二筒體 部存於該第三筒體之下方側的-個缺口 5亥第-導引孔可具有：第—導引上孔，具有比該第一筒體 201142323 之外控稱微大的孔經；及第_丨 ' 通連結，並且具有比該第-筒體之外柄丄145〒：導！!上孔連 徑稍微大的孔徑。 卫’、且比該第二筒體之外 方的彼此隔 二缺口部1設有时與鮮二&並兩個第 該第三筒體可形成為第二缺口部 固 之中心呈大致對稱的形狀。 -&相對於该第二筒體 又，依本發明之接觸件係使用於檢查 J將具有被檢查對象即檢查部的被檢查 含：弟-筒體，呈筒形且具有導雪抖，甘蜀牛之特试為.包 第二筒體，呈筒形且具有導電性，其從；壓 第-筒體内，並且第二筒體之上方同轴地配置在該 部，而第二筒體之下方端壓接於該檢查部體，2 形且具有導電性，其與該第一筒㉟ _ A 同體主同 且同軸地收納在該第一筒體及竽第u體均未電性連接’ 以下方端壓接於以 筒壁部以彼此隔開距離的方式設有的 缺口部靠下方端側的位置設有用來:該 弟一苟體固疋的弟一固定部，該第三筒體 「哀 間設有用來巧該第二筒體固定的第二固定部。個第一缺口 $之 該，三筒體可形成為第二缺口部配置 之中心呈大致對稱的形狀。 耽％亥弟二同體 又，依本發明之接觸件係使用於檢查用治且， f將具5被檢查對象即檢查部的被檢查物，與用、來 π之電氣特性的檢查裝置：者t連接；該_件之“^ 201142323 含：内側接觸件，由導電性的筒狀構件 之-方端壓接於電極部，另-方端壓接 接觸件 電性的筒狀構件形成，並將該内側;觸件:： 悲收納於内部’且該外側接觸件之—方端壓接於電極畜導= 方端壓接於檢查點；而且該内側接觸件與 方端與另-方端之間的筒壁部設有螺旋狀的觸 接觸件之筒狀構件的外側壁面形成為從該 =卜= 端側逐漸變大，或者呈階梯狀變大。 万而側朝邊一方 (發明之效果） 依請求項1所記載之發明，藉由使科電 ^第：筒體突出的方式收納於第-筒體之内部的導電=第， =====第三 2 = :與内側接觸件)。又，收納於第—筒體、兩個觸 及收納於第二筒體内部的第三筒體 體之下方 將第二龍I纟嫌⑽的第 二:糾查部側接觸，而 内部的第三筒體之上方端與電極部側接^因^筒體 距為寬，故能避免電極部的間距狹小側個端子之間 小間距的檢查點。而且，㈣第 ，，·有效地使用於 J的導引件’能確保接觸“強度 &件件由-體型的三個筒^ = 時，轉於檢查用治具 觸，藉此能防止接觸件脫落下方而〆、弟一板狀構件的上表面接 依請求項3所記載之發明，由於机 2缺口部存在於第—導引孔的内部、 =板狀構件可引導該缺D部的伸縮動作 201142323 時，該接觸件的ίι己在接觸件受保持於檢查用治具 板狀構件之上表第同—體：^ 觸，藉此能將接觸件引下孔的分界面）接 觸件保持成第持在適當的位置，並且能將接 觸。 ㈣下方端及第三筒體下方端可與檢查點接 定部而形成有兩個體上夹著第二固 ，=實;===^查點的推壓力 筒“ 方筒π目對於第三 以=j電性的第-筒體、 電性的第二筒體、及收納於該J 内部的導 —— |aj 内的第 ，你 立丨、及收二於 筒體收納於内部的；檢查部側接觸，而將第二 二第三筒體之上方端與電極部側接角 側）的2個端子之間距相較於 吏上方鳊（电極部 電:rf 筒體於在第三筒體以相對於第三 大闕％域的方式配置有第二缺口部，因此在 201142323 能縮短接 【實施方式】 (實施發明之最佳形態） 以下對用以實施本發明的實施形態進行說明。 圖1係顯示依本發明之檢查用治具之—每 成圖。依本發明之檢查用治具1包含：複數之^^^的概略構 3 ’將該等接觸件2保持成多針狀；連接件/ ;保持體 體3，並具有與各接觸件2接觸H = 4 ’支撐該保持 照圖極部參 圖1‘J不3根接觸件作為複數 、接 ，應的3根線部5 ’但其等並不限| 並顯示分別 基板所設定的檢查點來決定。 、x可根據檢查對象之 個作為^ 餘電性筒狀構件中的兩 :、而,用作具有外側接觸件與内側件:::二接觸 件，措此能夠利用於四端子測定。蜩件此一接觸件的接觸 接觸=二構第成三’二接第二筒體的下 與電極部接觸。 接觸件的上端（第三筒體的上端） 件)/圖2係本f明3—·^=的接觸件(以下稱第—接觸 成第一接觸件的外側接觸件 略剖面圖，圖3係顯示構 ，示第二筒體，刀第解t雅示第-筒體’ 態，圖4係第三筒體的概略剖^同體内配置有第二筒體的狀 如上所述，該弟一接觸 呈 件22，且在外側接觸件21 ς有卜側接觸件21與内側接觸 觸件21絕緣的狀態配置。 。，内側接觸件22以與外侧接 201142323 外側接觸件21具有第-筒體211與第二筒體212，而内側 接觸件22由第三筒體213形成。第一接觸件2如圖2 外側配置有外側接觸件21的第—筒體211，第—筒體2ιι =配置有外側接觸件21的第二筒體犯，而最内侧配置 氣體213。如此第-接觸件2係由直徑不同的三個筒 成同心軸狀所構成。 Γ1祕仵配置 第-筒體211形成外側接觸件21的一部份，並形成外側接 觸件21之抵接於電極部的部位。該第一筒體211係三個 件中具有最大直徑的筒狀構件。該第—筒體2n且有既定之長 成有兩端開口部之導電性之中空狀的圓柱形狀(筒 〜第一.同體211之一端開口部與後述的電極部“接觸， 此能將電極部與外側接觸件21電連接。 曰 第筒體211由第-前端部2na、第一缺口部21化 一 及第-後端部211d各部位形成(參照圖 缺口部211b及第一後端部211d由於以同-，狀，冓件喊各個部位，@此各個部位具有相同 =ΐ—固定部21 lc形成於該筒狀構件的壁面。本發明之第= :體11，猎由在—根筒狀構件的壁面設置螺旋狀的缺口而形成 H著該缺σ部的兩個筒狀構件分別形成為第一前 :口弟-後端部。又’該第一缺口部211b的長度並無特 但須要將長度調整成具有所希望之伸縮長，且口要第 的強賴，也可遍及第—筒體211的纽純而形= 上』具有與電極部41抵接之-邊形成開口的 ϊ導被貫通支撐於後述第二板狀構们2之 ^二¥引孔321的内部，而被引導至既定的第一電 成2lla在長軸方向上的長度並無特 ： 七ί I f構件32的厚度長。第-前端部叫二IS 後迷第-缺口部211b之上端連通連結。 卜鳊與 201142323 第=口部211b形成在第—前端部211a愈第—後迪 2，，ΐΓΓΓ11'的上端與第-前端部2iia M3 連通連結。如上所述，該第部如d的上端 筒_形成螺旋 ==第缺一 體之長軸方向上伸縮的伸縮部而發揮功能。又乍為在第-筒 J有的伸縮特性，可藉由缺口部之 ^口部211b所 整、筒狀構件之材料的種類问狀構件之厚度的調 =學處理等）、或者各種機械力Γ工熱處理 ^置者輕。又，細部在财以= 結心端連通連 端。關於該第一後端部211d，第 心弟同體211的下方 面能抵接於第-板狀構件31 ^ 4也第—後&部2加之下方 置 :^^2Ud 設 第一固定部211c形成於第3體212電連接。該 定部池，顯示藉由從第—筒_ ° = 3⑻所不之第-固 體212側進行推壓而形成第 後&部21冲側往第二筒 内部後的情況下固定第m = 一=配置在第一筒體犯 可事先形成於第一筒體211\ χ /'弟二筒體212而形成，但也 與第二筒體212,在藉由從外第===了固定第一筒體211 進行推壓(斂縫)來加以固定的彺内側(第二筒體耶 12 201142323 方法。又，在第二 ΐ寻體211與第二筒體212電連接的固定方法 二—同體12電連接的111定方法之情況下，也可利肢错々道 線雜例如第一筒體211與第二筒體212電連接7利叫錫心 如上所述，第一筒體211可由一根導電性的冰业 形成為例如外徑40〜250μπι、内徑30〜24〇μπι牛形成， 之深度的合計長度稍長。並及0/ 导丨上孔311 保持體3時，第一=/21=^在/；~接觸件2受保持於 , 缺卩211b收鈿而成為偏壓狀鲅，侦篦一饩 體 i端形成始終壓接於電極部的狀態。，使弟同 接的ί:Ξ2 極!=，而與第-筒體211電連 211盘第二I %、道筒體211之下端突出。第-筒體 :電性的材料即可，並無特別限定，可例示二 .配置ί 衫—細211d分別 位於對稱位置。在如此配 對於第一筒體叫 的形上下方向的差異消二因此組裝將具有對稱 件21之用以與檢查點抵接的構y該^外側，觸 構件内大致中間大小的直經，也且^ ^ ?有二個同狀 該第二筒體212形成為具二開:之 ==第第4筒體體下方端丄 連接的第-筒體2η與第二筒體而夕^接觸件21使用彼此電 问體212’而電極部41與第一筒體2u 13 201142323 =3接跑账_ 212 _觸，細檢查點與電 212c 〇 212b ^ ;;同的外徑與内“二 前端部犯a。該第二前端部212a始終當^第广 :。為,了將，二前端部心如上述二= 筒體211縮短的情況下第 =縮功能而使第- 211的上方端突出。 $心也不會從第-筒體 端部件的另一方 二後端第=== = ==於該第 件21的下方端而與檢查點導通 第二==第與:==12電連接。該 —=定部2__形成在從第二筒體2 2 力乂牡興第一後螭部211d上所配置之 的位置。藉由如此固定第—筒體2 ^ C 應 固定部2llc位在比第一缺口部211b下弟方7山=2笛1匕而由於第二 上，因此藉由第一缺口部211b的伸縮，二」而部21 :_ 211的_間中相對移動 ™b顯不成往内側彎曲的内侧凹部，該内側凹部係用^已^ 14 201142323 第-筒體212收細在第-筒體211内部後的情況下固定 川:第二筒體212及第三筒體213而形成，但也可事先^ 二々同體212。又’該内側凹部係為了固定第一筒體2ιι ^一汽 212， ，縫)來加關糾情況下卿成。該第—及第二筒體‘ =^ 其縫方法，也可使时射焊接、電_接杨結劑等 如外=:=!===，形成為例 軸“ 或者'相對於令心 =狀的情況下，在製造外側接觸件^稱之 第二筒體212。 才J無上下之分地利用 與第一筒體211相同，笫-锊邮 作為該材料，只要是具有同；^2也由導電性材料形成。 可例示如錄、鎳合金錢合^㈣材糾卩可，絲_限定， 如圖3(c)所示，第—筒體2n盘笛一 二側係第-筒體211突出，且另一：痛：212藉由配置成 形成為外側接觸件21。第— 系弟一筒體212突出，而 二固定部2llc與第二固定部f S二筒體212由於以第 Ϊ —筒體扣的上方端與電極^觸电連接而固定，因此藉由使 方端與檢查點接觸，能作=觸’亚使第二筒體212的下 而發揮功能。 电11部與檢查點電連接的接觸件 筒體 22 體213進行說明圖第接，件2之内側接觸件22的第三 ’並且形成内側接觸件2 ; ^二筒體213形成内側接觸件 213係三個筒狀構件部與檢查點的部位。 ，二-體犯具有既 ，中具有束小直經的筒狀構件 之 導電性的中空狀的圓 ;^、，亚且形成為具有兩端開口」 第三筒體213 ώ笙（同形）。 m㈣物a、第：缺l中間 15 201142323 部213c、第三固定部213d、第三缺口部213e及第三後端部213f 各個部位形成(參照圖4)。第三前端部213a、第二缺口部213b、 中間部213c、第三缺口部213e及第三後端部213f，由於各個部 位由同一筒狀構件形成，因此各個部位具有相同的外徑與内 從’而弟二固定部213d形成於該筒狀構件的壁面。本發明之第 三筒體213 ’藉由·在一根筒狀構件的壁面設置螺旋狀的缺口而形 成缺口部’並將夾著該缺口部的兩個筒狀構件分別形成為第三 如端部213a與第三後端部213f。又，該第二缺口部213b及第 二缺口部213e的長度並無特別限定，但須要將長度調整成具有 所希望之伸縮長’且只要第三筒體213的強度夠，也可遍及第 三筒體213的大致全長而形成缺口部。 第二前端部213a具有與電極部41抵接之上方形成開口的 上^面，§亥第二前端部213a的上端面相當於内側接觸件22的 上，端。第三前端部213a被貫通支撐於後述第二板狀構件32 二導引孔321的内部，而被引導至既定的第一電極部412。 第三前端部213a在長軸方向上的長度並無特別限定，但較佳 得比第二板狀構件32的厚度長。第三前端部213a之下 與後述第二缺口部213b之上端連通連結。 第=缺口部213b形成在第三前端部213a與中間部213c之 二且f i缺Γ213b的上端與第三前端部2l3a的下端連通 f 部腿的下端與後述中間部213c的上端連 11上所述，該第二缺°部213b係藉由沿著作為第三筒 ，的同狀構件之壁面形成螺旋狀的缺口而形成 的缺口，使該第二缺口部“作為在Ϊ =體之長轴方向上伸縮的伸縮部而發揮功能。又， 3b所具有的伸縮的特性，可藉由缺口部之 ^ :二 之厚度的調整、筒狀構件之材料的種類、筒二: 種處理(熱處理或化學處理等）、或者各種/同狀構j牛施加的各 在圖中設有-個，但也可設置複數個。 /、。b 201142323 一中間部213c形成在第三筒體213的第二缺口部213b與第 • 三缺口部213e之間，且中間部213c之上端與第二缺口部213b 之下，連通連結，而中間部213c之下端與後述第三缺口部213e ^上端連通連結。該中間部213c具有後述第三固定部2nd，且 包性絕緣地與第一筒體211及第二筒體212固定。 ο η第二固一定部2l3d以絕緣狀態固定第二筒體212與第三筒體 。言/第三固定部213d形成於中間部213c。刻4所示之第 ^部213d係藉由從第二筒體212(第二後端部212(〇側往第 二S3側推壓來進行固定。又，顧定部係用以於已將第 2lH ^5在第二筒體212内部後的情況下111定第二筒體 又，體213而形成，但也可事先形成於第三筒體213。 從外糸為了固定第二筒體212與第三筒體213，在藉由 側(第三筒體213)進行推職來加 於該固ΐ部21_第二及第三筒體的固定方法並不限 縫方法，也可使用黏結劑等其他固定方法。但是，第二 間，形成在中間部213c與第三後端部213f之 而第三端射間部犯e的下端連通連結， 所述’該第三缺口部2Be係藉由沿著作為第 體之長= ^ 所具有的魏舰叮:丄1L叫禪功此。又’該缺口部213e :調整、筒狀構件之的種;部筒广之厚度 加以適當調整，且由使用者適m械加工處理(塑性加工等)來 林—個，但也可設置複數個Γ °。I ，第二缺口部在圖中 17 201142323 第三後端部213f的上端與第三缺口 結，第三後端部而的下端開口 4 e的&端連通連 端。因此，第三筒體213之作為上方々山沾版213的下方 方面與電極部抵接，而第三筒體213而之作為二下的上 部mf的下方面與檢杳點板桩 & 7马下方"而的第三後端 的長度如上般^而在_方向上 接於檢查點的長度。成為具有弟二後端部213f之下方面能抵 例如= 筒狀構件形成’且形成為 -減在長軸方向上的長度較佳係形成得比德，f笛 長。其原因為：在第-接觸件2受^持於的間隔稍 狀態，使第三“Si 213以導電性材料形成。作電的導^ ，材料即可’並無特別限定，可例示=、鎳; 第三前端部2l3a、第二缺口部21北、 口部213e及第三後端部213f分別配置 曰^ 、第二缺 部位也可配置成相對於第三筒體213位於^肢旦該等 置的情況下，第三筒體213將具有對稱的口此配 差異消除，因此組裳變得容易。 7 上下方向的 如圖4所示，較與弟二筒體212)的内部，因此 緣形成絕緣被膜21 g在之^構件部份的外側周 聚四產厂成亥絕緣被膜21#可利用例如聚醯亞胺、 例如1〜5μιη。又H氧樹脂。該絕緣被膜213g之厚度形成為 〜絶緣被膜也可形成在缺口部的外側周緣。 201142323 該絕緣被膜213g於圖4的者^ 213 = 則周緣，但也可形成在/二i三筒體 5的:=二筒體212的下方端上 (^二同肢213的下方端)與檢查 =的下方知 方端（第-筒體2U的上方端)及内側===觸件21的上 213的上方端)與電極部抵接。 、方端（第三筒體 如圖2所示，第三筒體213配置 端開口部與第二筒體212的 =211的上方 也可配置成完全不$屮而開〇P犬出，但第三筒體213 $含尸伸縮功能的缺口部，因此無論平面= 使第查ΐί電極部推壓時缺口部充分地收縮大 側i觸件)與第三筒體犯(内 圖。^杳5用觸件?安裝於保持體的狀態的剖面 /〇"八有用來保持第一接觸件2的保持體3。該仵 持體上具有第—板狀構件31與第二板狀構件32。 ' 认*第一板狀構件31具有用來將第一接觸件2之下方端引導至 檢查點的第一導引上別Ή1溆笼植？| ^The Cii side is connected to the inspection unit; the third cylinder has a cylindrical shape and has electric power, and the electric cylinder is electrically connected to the second cylinder and the second cylinder, and is received in the first cylinder and The second cylinder end = the electrode portion, and the lower end of the third cylinder is crimped; (2) the second plate is separated from the first plate by a spiral, and the cylinder wall portion is provided with a cylinder, and is provided with a spiral shape. The part of the second notch. . . . = the fixed cylinder of the cylinder is fixed to be smaller than the first cylinder and is located on the lower side of the third cylinder than the second cylinder. The lead hole may have: a first guiding upper hole having a larger diameter than the first cylindrical body 201142323; and a first _' connection, and having a handle smaller than the first cylindrical body 145〒: Guide! ! The aperture of the upper hole is slightly larger. And the second portion of the second cylindrical body is formed to be substantially symmetrical with respect to the center of the second notch portion. shape. -& relative to the second cylinder, the contact according to the present invention is used for the inspection J to have the inspection object, that is, the inspection portion of the inspection portion: the brother-cylinder, which has a cylindrical shape and has a snow-sliding, The special test of the sweet yak is to pack the second cylinder, which is cylindrical and electrically conductive, and is pressed from the inside of the cylinder, and the second cylinder is coaxially disposed at the portion, and the second The lower end of the cylinder is pressure-bonded to the inspection portion, and has a bi-shape and is electrically conductive. The first cylinder 35_A is identical to the first cylinder and coaxially accommodated in the first cylinder and the second body. The lower end of the electrical connection ' is crimped to the lower end side of the notch portion which is disposed at a distance from each other by the wall portion of the cylinder, and is provided with a fixing portion for the younger body The third cylinder "is provided with a second fixing portion for fixing the second cylinder. The first notch $ is formed, and the three cylinders are formed in a substantially symmetrical shape in the center of the second notch portion.耽%海弟二同体, the contact according to the invention is used for inspection and treatment, and f will have 5 objects to be inspected, that is, the inspection department The inspection object is connected to the inspection device using the electrical characteristics of π: t is connected; the "^ 201142323 includes: the inner contact member, which is crimped to the electrode portion by the square end of the conductive cylindrical member, and - the square end crimping contact member is formed by the electrical cylindrical member, and the inner side; the contact member: is sadly received in the inner portion and the square end of the outer contact member is crimped to the electrode guide = the square end is crimped to a check point; and an outer wall surface of the cylindrical member in which the inner contact member and the cylindrical end portion between the square end and the other end are provided with a spiral contact member are formed to gradually become larger from the side of the side; Or it becomes larger in steps. In the invention according to the first aspect of the invention, the electric conduction of the inside of the first cylinder is made by the electromagnetism: the cylinder is protruded, and ==== = third 2 = : contact with the inner side). Further, the second cylinder is in contact with the second cylinder body and the second cylinder body that is accommodated in the second cylinder body is in contact with the second: the correction unit side of the second dragon (10), and the third interior The upper end of the cylinder is connected to the side of the electrode portion. Since the distance between the upper and lower ends of the cylinder is wide, it is possible to avoid a small check point between the terminals of the electrode portion with a small pitch. Moreover, (4),,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The upper surface of the plate-like member is detached from the lower part, and the upper surface of the plate member is connected to the invention described in claim 3, because the notch portion of the machine 2 exists inside the first guide hole, and the plate member can guide the portion D. When the telescopic action 201142323, the contact piece is affixed to the contact piece held by the inspection fixture plate-like member, the same body: body touch, thereby being able to connect the contact piece to the interface of the hole) contact piece Keep the first position in the proper position and be able to contact. (4) The lower end and the lower end of the third cylinder can be formed with the checkpoint connection part and the two bodies are sandwiched by the second solid, = real; === ^Check the pressure cylinder "the square tube π mesh for the third to =j electrical first cylinder, the electrical second cylinder, and the guide contained in the J inside - | aj, You are standing and receiving the inside of the cylinder; the inspection side is in contact with the upper end of the second and second cylinders. The distance between the two terminals of the side flank side is higher than that of the upper side of the cymbal (the electrode portion is electrically: the rf cylinder is disposed with the second notch portion in the third cylinder with respect to the third largest 阙% domain) EMBODIMENT OF THE INVENTION The best mode for carrying out the invention will now be described below. Fig. 1 is a view showing each of the jigs for inspection according to the present invention. The jig 1 for inspection according to the present invention comprises: a plurality of schematic structures 3' that hold the contacts 2 in a multi-needle shape; a connecting member /; a holding body 3, and having contact with each of the contacts 2 H = 4 'Support the holding picture of the pole part of the figure 1 'J not 3 pieces of contact as the plural, connected, the three line parts 5 ' but not limited to | and display the check points set by the respective substrates It is determined that x can be used as two of the remaining cylindrical members according to the inspection object: and, as the outer contact member and the inner member::: two contact members, which can be utilized for four-terminal measurement Contact contact of the contact piece = two structures, the third and the second, the second cylinder Contact with the pole. The upper end of the contact (the upper end of the third cylinder)) / Figure 2 is the contact of the 3 - ^ ^ = (hereinafter referred to as the first contact - the outer contact of the first contact is slightly cross-section Fig. 3 is a view showing the structure of the second cylinder, and the knife is in a state of the first cylinder, and Fig. 4 is a schematic diagram of the third cylinder. The first contact member 22 is disposed in contact with the inner contact member 21 and the inner contact member 21 is insulated from the inner contact member 21. The inner contact member 22 is connected to the outer side 201142323 outer contact member 21 The first cylinder 211 and the second cylinder 212 are provided, and the inner contact 22 is formed by the third cylinder 213. The first contact member 2 has a first cylinder 211 in which the outer contact member 21 is disposed on the outer side of Fig. 2, and the first cylinder 2 is replaced by a second cylinder in which the outer contact member 21 is disposed, and the gas 213 is disposed on the innermost side. Thus, the first contact member 2 is composed of three tubes having different diameters which are concentrically shaped. Γ1 Tip Configuration The first cylinder 211 forms a part of the outer contact 21 and forms a portion of the outer contact 21 that abuts against the electrode portion. The first cylinder 211 is a cylindrical member having the largest diameter among the three members. The first tubular body 2n has a hollow cylindrical shape which is formed to have a conductive opening at both ends, and the tubular opening portion of the first to the same body 211 is in contact with an electrode portion to be described later. The electrode portion is electrically connected to the outer contact 21. The first tubular body 211 is formed by each of the first end portion 2na, the first notch portion 21, and the first rear end portion 211d (see the cutout portion 211b and the first rear end). In the portion 211d, each part is shouted in the same manner, and each part has the same = ΐ - the fixing portion 21 lc is formed on the wall surface of the cylindrical member. The invention of the present invention =: body 11, hunting by - The cylindrical surface of the root-shaped tubular member is provided with a spiral notch, and the two cylindrical members forming the σ-deficient portion are respectively formed as a first front portion: a younger brother-rear end portion. Further, the length of the first notch portion 211b is However, it is not necessary to adjust the length to have a desired expansion and contraction length, and the mouth must be strong, or it may be formed over the edge of the first cylinder 211 and the electrode portion 41 is abutted. The opening of the opening is guided and supported by the inside of the second plate-shaped hole 321 of the second plate-shaped structure 2 to be described later, and is guided to both The length of the first electric circuit 2lla in the long axis direction is not special: the thickness of the seventh il I f member 32 is long. The first front end portion is called the second IS, and the upper end of the first notch portion 211b is connected and connected. 201142323 The first mouth portion 211b is formed at the first end portion 211a, and the upper end of the ΐΓΓΓ11' is connected to the first end portion 2iia M3. As described above, the upper portion of the first portion such as d forms a spiral == The expansion and contraction of the expansion and contraction in the longitudinal direction of the integral body functions as the first extension, and the expansion and contraction characteristics of the first cylinder J can be made by the material of the tubular member 211b of the notch portion. The thickness of the type of the questioning member is adjusted, or the mechanical force is reduced by the heat treatment of the mechanical force. Further, the detail is connected to the end of the core end. About the first rear end portion 211d, The lower side of the symplectic body 211 can abut against the first plate member 31 ^ 4 and the first - rear & portion 2 plus the lower portion: ^^2Ud, the first fixing portion 211c is formed to be electrically connected to the third body 212. The fixed pool is shown to be pressed by the first solid 212 side of the first cylinder _ ° = 3 (8) to form the second & When the punching side is moved to the inside of the second cylinder, the m = one = the first cylinder is formed in the first cylinder 211 \ χ / ' brother 2, but it is also formed. The second cylinder 212 is fixed on the inside of the crucible by pressing (fusing) the fixed first cylinder 211 from the outer === (second cylinder yeah 12 201142323 method. Again, in the second ΐ In the case where the body 211 is electrically connected to the second cylinder 212, the fixing method 2 is the same as the method of determining the electrical connection of the body 12, the first cylinder 211 and the second cylinder 212 may be used. The electrical connection 7 is referred to as a tin core. As described above, the first cylinder 211 can be formed of a conductive ice industry, for example, having an outer diameter of 40 to 250 μm and an inner diameter of 30 to 24 μm μm. The total length of the depth is slightly longer. . And 0/ guide upper hole 311 when holding body 3, the first = / 21 = ^ in /; ~ contact 2 is held in, the missing 211b is closed and becomes biased, detecting a body i The end is formed in a state of being always crimped to the electrode portion.使 Ξ 2 pole! =, and electrically connected to the first cylinder 211 211 disk second I%, the lower end of the ball cylinder 211 protrudes. The first cylinder: an electrical material may be used, and is not particularly limited, and the second embodiment may be exemplified. In this way, the difference in the shape of the vertical direction of the first cylinder is eliminated. Therefore, the assembly will have the outer surface of the symmetrical member 21 for abutting the inspection point, and the substantially middle size of the contact member is also And the second cylinder 212 is formed into two openings: the second cylinder body 2η connected to the lower end of the fourth cylinder body and the second cylinder body 21 using the mutual electrical body 212' and the electrode portion 41 and the first cylinder 2u 13 201142323 = 3 to run the account _ 212 _ touch, fine check point and electricity 212c 〇 212b ^;; the same outer diameter and inner "two front end In the case of the second front end portion 212a, the second front end portion is always widened. In the case where the two front end portions are shortened as in the case of the above two = the cylindrical body 211, the upper end of the first 211 is protruded. The heart will not be from the other end of the second end of the first barrel end === = == at the lower end of the first piece 21 and the check point is turned on second == first: == 12 The -= fixed portion 2__ is formed at a position disposed on the first rear crotch portion 211d from the second cylindrical body 2 2 . By fixing the first cylindrical body 2 ^ C should be fixed portion 2llc In the second The lower portion 211b is lower than the lower side of the mountain 7 = 2 flutes, and the second upper portion is closed by the first notch portion 211b, and the relative movement TMb of the portion 21:_211 is not dominant. The inner concave portion that is curved inside is formed by the second cylindrical body 212 and the third cylindrical body 213 when the inner tubular recess 212 is shrunk inside the first cylindrical body 211. However, it is also possible to pre-compound 212. Further, the inner concave portion is formed in order to fix the first cylinder 2 ιι ^1, and the slit is added to the case. The first and second cylinders '=^ the seaming method can also be used for the time-radiation welding, the electric-jointing agent, etc., such as the outer =:=!===, formed as an example axis "or" relative to the heart In the case of a shape, the second cylinder 212 of the outer contact member is manufactured. The same as the first cylinder 211, the 笫-锊 mail is used as the material, as long as it has the same; 2 is also formed of a conductive material. It can be exemplified as the record, the nickel alloy Qianhe ^ (four) material can be corrected, the wire _ limited, as shown in Figure 3 (c), the first cylinder 2n flute one side two - The cylinder 211 protrudes, and the other: pain: 212 is formed into an outer contact member 21 by the arrangement. The first cylinder 212 protrudes, and the two fixing portions 2llc and the second fixing portion f S are the second cylinder 212 The first end - the upper end of the barrel buckle is electrically connected to the electrode ^ and is fixed. Therefore, by bringing the square end into contact with the inspection point, the second cylinder 212 can be made to function as a touch. The contact body 22 body 213 electrically connected to the inspection point is first illustrated in the drawing, the third side of the inner contact member 22 of the member 2 is formed and the inner contact member 2 is formed; ^ the two cylinders 213 are formed inside The side contact member 213 is a portion of the three cylindrical member portions and the inspection point. The two-body body has a hollow circle having conductivity of the tubular member having a small beam straight through; In order to have both ends open, the third cylinder 213 同 (same shape). m (four) object a, first: lack of l intermediate 15 201142323 The portion 213c, the third fixing portion 213d, the third notch portion 213e, and the third rear end portion 213f are formed (see Fig. 4). The third distal end portion 213a, the second notch portion 213b, the intermediate portion 213c, the third notch portion 213e, and the third rear end portion 213f are formed by the same tubular member, and thus each portion has the same outer diameter and inner diameter. The second fixing portion 213d is formed on the wall surface of the tubular member. The third cylindrical body 213' of the present invention forms a notch portion by providing a spiral notch on the wall surface of one cylindrical member, and forms two cylindrical members sandwiching the notched portion into a third end. The portion 213a and the third rear end portion 213f. Further, the length of the second notch portion 213b and the second notch portion 213e is not particularly limited, but it is necessary to adjust the length to have a desired expansion and contraction length 'and as long as the strength of the third cylindrical body 213 is sufficient, it is also possible to extend the third The cylindrical body 213 has a substantially full length to form a notch. The second front end portion 213a has an upper surface on which the opening is formed in contact with the electrode portion 41, and the upper end surface of the second front end portion 213a corresponds to the upper end of the inner contact member 22. The third distal end portion 213a is guided to the inside of the second guide hole 321 of the second plate-shaped member 32 to be described later, and is guided to the predetermined first electrode portion 412. The length of the third distal end portion 213a in the longitudinal direction is not particularly limited, but is preferably longer than the thickness of the second plate member 32. The lower end of the third distal end portion 213a is connected to the upper end of the second notch portion 213b which will be described later. The first notch portion 213b is formed in the third end portion 213a and the intermediate portion 213c, and the upper end of the fi Γ 213b and the lower end of the third front end portion 213a communicate with the lower end of the f leg and the upper end 11 of the intermediate portion 213c to be described later. The second missing portion 213b is a notch formed by forming a spiral notch along the wall surface of the same member that is a third cylinder, and the second notch portion is "in the long axis direction of the body" The expansion and contraction of the telescopic portion functions. The characteristics of the expansion and contraction of 3b can be adjusted by the thickness of the notch, the type of the material of the tubular member, and the treatment of the cylinder (heat treatment or chemical). Each of the treatments, or the various types of the same configuration, is provided in the figure, but a plurality of them may be provided. /, b 201142323 An intermediate portion 213c is formed in the second gap of the third cylinder 213 Between the portion 213b and the third notch portion 213e, the upper end of the intermediate portion 213c is connected to the lower portion of the second notch portion 213b, and the lower end of the intermediate portion 213c is connected to the upper end of the third notch portion 213e^ to be described later. The portion 213c has a third fixing portion 2nd to be described later, and includes The first cylindrical body 211 and the second cylindrical body 212 are fixed to the insulating layer. The second fixed portion 231d fixes the second cylindrical body 212 and the third cylindrical body in an insulated state. The third fixed portion 213d is formed at the intermediate portion. 213c. The fourth portion 213d shown in FIG. 4 is fixed by pressing from the second cylindrical body 212 (the second rear end portion 212 (the side of the back side toward the second S3 side). When the 2lH^5 is inside the second cylinder 212, the second cylinder is formed in the second cylinder and the body 213. However, the second cylinder 213 may be formed in advance. The body 212 and the third cylinder 213 are attached to the fixing portion 21_the second and third cylinders by the side (third cylinder 213), and the method of fixing the second and third cylinders is not limited. Another fixing method such as a bonding agent is used. However, the second portion is formed to be connected to the lower end of the intermediate portion 213c and the third rear end portion 213f and the third end interposing portion e, the third notch portion 2Be It is called the Wei 叮 丄 L L ^ = = = = = = = = = = = = 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏It can be adjusted appropriately, and the user can process it (plastic processing, etc.), but it is also possible to set a plurality of Γ °. I, the second notch is in the figure 17 201142323 The third rear end portion 213f The upper end and the third notch are joined, and the & end of the lower end opening 4 e of the third rear end portion communicates with the connecting end. Therefore, the third cylindrical body 213 abuts against the electrode portion as the lower side of the upper side of the mountain plate 213, The lower side of the third cylinder 213 as the lower part of the upper mf is the same as the length of the third rear end of the inspection point sheet pile and the lower part of the horse, and is connected to the inspection point in the _ direction. length. It is preferable that the length of the lower end portion 213f of the second leg portion 213f can be resisted, for example, the shape of the tubular member is formed, and the length in the direction of the major axis is preferably formed to be longer than the length of the flute. The reason for this is that the third "Si 213 is formed of a conductive material in a state where the first contact member 2 is held at a slight interval, and the material is not particularly limited, and can be exemplified =, Nickel; the third front end portion 231a, the second notch portion 21 north, the mouth portion 213e, and the third rear end portion 213f are disposed respectively, and the second missing portion may be disposed to be positioned relative to the third cylinder 213 In the case of the equal position, the third cylinder 213 will have a symmetrical mouth and the difference is eliminated, so that the group is easy to get. 7 The upper and lower direction is as shown in FIG. 4, and the inside of the second cylinder 212) The edge forming insulating film 21 g is formed on the outer side of the component portion. The insulating film 21 can be made of, for example, polyimide, for example, 1 to 5 μm. Further, H-oxygen resin. The thickness of the insulating film 213 g is formed. The insulating film may be formed on the outer peripheral edge of the notch portion. 201142323 The insulating film 213g is formed on the periphery of FIG. 4, but may be formed on the /di-i-cylinder 5:==two-tube 212 On the lower end (^ the lower end of the same limb 213) and the lower side of the check = (the upper end of the first cylinder 2U) And the inner side ===the upper end of the upper portion 213 of the contact 21) is in contact with the electrode portion. The square end (the third cylinder is as shown in FIG. 2, and the third cylinder 213 is disposed at the end opening portion and the second cylindrical body 212). The upper part of the 211 can also be configured to open the P dog out completely, but the third cylinder 213 $ contains the notch of the corpse telescopic function, so no matter the plane = the gap portion when pushing the electrode portion Fully contracting the large side i contact) and the third cylinder (inner figure. ^杳5 contact piece? The profile of the state of being mounted on the holding body/〇" eight has a holding body for holding the first contact 2 3. The holding body has a first plate member 31 and a second plate member 32. The first plate member 31 has a first portion for guiding the lower end of the first contact 2 to the check point. Guided on the other side of the cage?| ^
Mi 與弟一導引下孔312。第—導引上孔 形成為具有比第一筒體211之外徑稍大的内徑。又，第一 开與Ϊ 一導引上孔311連通連結，該第一導引下孔312 =成為具有比第一筒體211之外徑稍小且比第二筒體M2之外 從稍大的内徑。 藉由如此形成第一導引上孔311與第一導引下孔312，在將 -接觸件2從後述第二導引孔321插入並保持於保持體3時， 由於第一筒體211之第一後端部211d下端的外徑與第一導引下 孔312之孔徑的差異，能將第一接觸件2卡止。而且，由於第 —後端部211d之外徑與第一導引上孔311之内徑的差極小，因 此月b夠更咼精度地將第一接觸件2保持於保持體3。 又，該第一板狀構件31的厚度並無特別限定，但較佳係形 201142323 211d 成為比第一後端部211 d的長度短。此係為了使第―後端部 能沿著第一導引上孔311確實地伸縮。 而。 第二板狀構件32配置成與第一板狀構件31呈有既 隔’並且設有用來將第一接觸件2之上方端引導至電極部41 第二導引孔32卜第二導引孔321形成為具有比第—筒體2ιι 之外徑稍大的孔徑。又，該第二板狀構件32的厚度並無特別限 定，但較佳係形成為比第一前端部211a的長度短。此; 第一前端部211a沿著第二導引孔321確實地引導。又，第一板 狀構件31力底面與第二板狀構件32 #頂面之間的間隔並無特 別限疋，但較佳係配置成比第一接觸件2之長度(外侧接觸件與 内側接觸件之長度)稍短。 ~ 在將第-接觸件2裝著在保持體3時，使第一接觸件2的 下端部穿過第二導引孔321 ’然後使該下端部穿過第一導引上孔 311與第導引下孔312而裝著。此時，第一接觸件2配置成從 第一導引下孔312與第二導引孔321分別突出到外側。 在檢查用治具1的連接電極體4形成有與各第一接觸件2 對應的，極部41。該電極部41具有與第一筒體211抵接而成為 導通狀_第-電極部411、以及與第三筒體213抵接而成為導 通狀態的第二電極部412。 圖5/斤不之電極部41顯示有第一電極部411與第二電極部 4!2 ’ 極部分取導_成，且形成為各自的端面與各筒 體的接觸。第一電極部411及第二電極部412形成為與各 個筒體接^，且配置在最遠的位置(具有最大空間的位置）。 游極部41的構造除了圖5所示之構造外，還可使用例 如同# 士、’見之構造的電線’形成為筒狀之外部導體之内部同轴 地酉己置f内部導體的同轴構造。又，内部導體可為實心的圓柱 形狀’可為中空的筒形。此時，該電極部的外部導體與第一 電極邠11對應，而内部導體與第二電極部412對應。 圖6係顯不使用第-接觸件的檢查用治具在檢查時之狀態 的概略剖面圖。第-接觸件2在裝著於保持體3時，係從第二 20 201142323 板狀構件32的第二導引孔321插入， 的第一導引上孔311與第一導引τ Ή 一板狀構件31 312之孔徑不同的分界。 ，、乐令W下孔 上方件2插入保持體3之後，以第-接觸件2之 部41的方式使第二板狀構件32 體4抵接。此#，由於第一接觸 妾電極 =第分1，第一電極部411與第二電 ==Γ 各自的弟一缺口部211b與第二缺口部213b 因此， 態。因此，無論外側接觸件的下方端（第雕2=偏麗狀 部212c的下端)與内側接觸件的下 第一後端 端部213f的下方面)是否抵接 ，（弟—间脰213之第三後 件的上方端均始終與各個電極部H觸，:觸 件22之下端側的第三缺口部213U f於内側接觸 =，且僅在實際檢查時該缺口部沿第三"筒體 端^-的觸上件方2llb在外侧接觸件、的上i 為在外側接觸件的下方端(第二筒體 方开-成 觸時同樣能收縮。 12的下方鳊)與檢查點接 =Γΐ:實施形態之檢查用治具之構成的說明。 及第三筒一，體211、第二筒體212 -接觸件2因應被檢查物的上該第 。另一方面，為了使==持=吏= 上伸縮，必須使探針本身具有伸端二/'lf板成直角的方向 繞線的螺旋彈簧來形成具有伸縮功而’若以習知使用 於繞線本身的直徑的大小:此;=以 f〇crT：^^：：f^ -«--μ- 接觸件，就組裝性或製造成本而言用 21 201142323 的接觸件構成的檢查用治具上也過於 因此，本發日种藉* 如下述；；二巧的問題。 =地製造微細的接觸件。該製造方^如; [製法例1] 示）首先用用fit第體211之中空部的芯線(未圖 細以=電"性的芯線(例如直徑30μιη的不錄鋼(sus))斤希望的粗 (2) 其-人，在芯線(不銹鋼線)塗佈光阻被膜， 周面。對該光阻的所希望之部份進行 員7 =線， =進來形成螺旋狀以 :二1:之位置(第-筒體的大致中央部)形成缺； (3) 接著，對該芯線進行鍍鎳。此時， 因此未形成有光阻遮罩的部位會被鍍鎳。…泉，、有導電性， ⑷再來，去除光阻遮罩，抽出芯線 第一筒體211。當然也可在將w綠+入驭斤布王之長度的 又線元全抽出之後切斷筒體。 又弟同體211也可以下述方法製造。 [製法例2] 先’如上所述，準備用來形成第一筒體2U之中，的 二 =對該芯線峨到所希望之厚度，以在以周 之部鍍獅的表面㈣光阻。_光_所希望 ° ^订+光、"貞影、加熱處理來形成螺旋狀的遮罩。此g士 -筒形成本發明之第一筒體2n，在既定之位ί(第 苟體的大致中央部)形成缺口部(第一缺口部2〗ib)。 位的ϊί；被^錄顧去除。此時，未形成有光阻遮罩的部 22 201142323 (4)再來，去除光阻遮罩，抽出呔 第一筒體211。當然也可在將芯線:成所希望之長度的 習知的採用繞線的螺旋彈菩G 之後切斷筒體。 徑，而難以形成具有比該直徑^二’取決於繞線材料的直 難形成ΙΟΟμιη以下的螺旋彈筈。仏°二一的直杈的線圈，極 第-筒體211，由於在對芯線錢鎳製得的本發明之 芯線而製造得出，因此相較於習知望^形狀後，抽出 式，能使彈簧材料的壁厚減薄彈簧方 造細小的外徑及内徑。 精度且自如地-併製 又，在[製法例1]及[製法例2]中，去妙、士 而形成光阻遮罩。 田…、、也可為了切斷筒體 第一筒體211的製造方法如上 筒體212的製造方法，則除了不須开^成光阻發明中之第二 同，因此省略其說明。 第同體211的製造方法相 本發明之第二茼體213形成為2個缺口 _ 與第三缺口部1 2叫具有既定之距離(盘d—缺口部_ ^巨離）。因此，形成光阻遮罩的部位與個數° =長”應 件的直徑與内徑也與第—筒體不同。除了該Ί’同狀構 第-筒體211的製造方法相同，因此省略製造方法明均與 接下來，對第二實施形態的檢查用治且 兄月。 係本發明之第二實施形態的接觸^ ^丁 =欢圖7 圖。圖8係使用第二接觸件的檢錢治具的m t略剖面 圖。該第二接觸件2,的基本構成形成為與剖面 致相同的構成，係具有構成外側接觸件 2大 二筒體212，與作為内側接觸件22的第三$同體211，及第 23 1 212 ΛΗ乍為外側接觸件21，並*第 二、，，内弟二 2 作為内側接觸件22的第三筒體223(參照圖7)。又，^内部收納 ，弟一接觸件 201142323 SC接因此在下述說明中說明不 一，=之第-後端部211d在長^相較於第 觸件22之第三筒體22 : ^:=例中’形成於内側接 固定部223f為分界而在第^體^固=旦只要以後述第三 別形成有至少一個缺口部即\圖所側與下端部側分 缺口部223d兩個缺口部，在第三與第三 2Γ二部】，一個缺口部。又，第二缺口部：：巧 力^第四缺口 塵接於電極部的推壓 點的推壓力。 g產生用以將内側接觸件U壓接於檢查 如上所述’第二接觸件2,且有篦二 固定部223f形成於第二中間部223^ tσΡ 2=且該第三 f3f係以非導電狀態固定第三筒體筒體;；2固= 位。又，第一筒體211，盘第212的部 -C "ΙΤάΙΙ\-l 由該第三固―定，因此第-至第= 圖7所示之第三固定部223f，顯示在第二中間部22辟 面在内側彎曲的凹部形狀，且該 ς :第二筒請内部之後所形成，而非事先形= -L。又，该Γ部係為了將第一筒體211，、第二筒體212及第三 f 22?固定成-體而藉由從最外側的第一筒體211，側朝内 進订擠壓(敛缝)所形成。該第一至第三筒體的固定方法並不限於 24 201142323 電轉接或黏結劑等其他固 3第一筒體固定於該第二筒體;第 不同於第一接觸件2，社结- §* 99^ ΑΑ Λ7Ϊ ^ 'J, nti 00〇. 弟一接觸件2’的實施例係第三筒 =23的絕緣被膜2231形成為覆门 、第二==、 一缺口部223b第5部223h)的表面、與缺口部部份（第 ί：ί-：Ιϊ；^ 223g)"^ ° 構件=被覆:也，成於第二二的：= 端二 s 體 ，第—筒體2ΐΓ與第三“ 各，、有伸鈿功月匕的缺口。ρ，因此無 均可藉由在受檢查點或電_推_@ j 側接觸件21與内側接觸件22抵接於檢查點或電刀極^ ’使外 二筒個==r，、第 結劑等其他固定方法。又，可如上述地在=一:3= 部配置好後，對全部的筒體進行固定，也可王 進^定後’再固定第三筒體。或者，也可:Ji及 同體及第二同體進行固定後，再固定第一筒體。又，笛一 f: 212與第三筒體223必須以非導電狀態固定。 一间肢 圖8係顯示將第二接觸件2,安裝於保持體3 剖面圖。第二實施形態之檢查用治具i，係利用且有=的概略 件33與第二板狀構件32的保持體3來保持= 25 201142323 裝。此時，不同於第一實施形能 γ板狀構件%的第-導徑= 該第一板狀構件33的第—料孔331形成為 體211，之外徑稍小而比第二筒體212 大=第‘ 如此形成第-導引孔33!，使第二接 第二筒體212之間的段差所散昂R體211與 通過第一板狀構^ 丨=犯能 通過該第一導引孔331，而能藉由哕$ 21^無法 觸件2,脫落。 精由。亥弟一導引孔331防止第二接 又此％ ’第一接觸件2,較佳係第 口部223g存在於第-導引孔切内部^止3 = 2 = 端部2nd，。藉由如此形成第 卡 ，第；筒體，入第—導咖3丄部二日以在-實匕= =使弟-後㈣咖與第三後端部通高精度地抵接於檢查 上方2,保持於保持體3後，以第二接觸件2,之 罪^ 的方式使第二板狀構件32與連接電極 此時’由於第二接觸件2，的第一筒體2ιι，與第三筒 柚始^別壓接於第一電極部411與第二電極部412,因此呈士 的各個第—缺口部咖、第二缺口部现及第三= 2以盘第，無論第—筒體211，之第—前端部 個^^ 紅前端部223a是否抵接於檢查點，各 筒i別二、=、各個電極部41接觸。又，配置於下方側之第三 且射化ί=缺口部223g於待檢查時形成自然長度的狀態， 且僅在貫際檢查時該缺口部伸縮。 下，堂t用，二接觸件2’的檢查用治具實施檢查的情況 餘Μ及第三筒體的下方端與檢查點抵接。此時，由於第二 二;9^利用第二固定部212b與第一筒體211，固定’因此第 同豆所具有的第—缺口部211b收縮，而第三筒體223中 26 201142323 第四缺口部223g收縮。 以上係對於第一貫施形態之檢查用治具的說明。 ^來’對第三實施職之编件(第三賴件)進行說明。該 ί 2”具有與第二接觸件2,之構成大致相同的構成，因 2^日11不同的構成為中心作說明。圖10所示之第三:觸件 H乂於第二接觸件2’’連接固定第—筒體211，、第二 223的固定部位不同。於該第三接觸件2”形^有以 連=第一筒體211，與第二筒體犯，的第-^部 疋。P212b’且形成有以非導通狀態連接固定第- 同體212,與第三筒體223的第三固 ^口疋^一 該等固定部如圖10所示，第-筒體2: 第二筒體212,與第三筒 固定：筒。藉由如此進行 使組裝步驟變得容易。 匕此將各組裝步驟分工化進行， 說明^ ’該等固定部的固定方法可利用上述方法，在此省略其 筒體;23之: ’該等f ^部形成為配置於第三 定部，使得位於較^卜2置’藉由在該位置形成各個固 壓接的推往電極部“ 往檢查點壓接的推壓力。、人罪下鳊邛側的缺口部產生 如上述所說明，本發明之第一至第二 端(電極部)的兩個端子_/^ 保持=，導引=二|^用來 以上係對於第三實施形態之檢查用治具的說明裝工^ 27 201142323 又 可在ί ; 5第ί=件係藉由組合三個筒$冓件凸:形T，免ί也 如J内側配置作為内側接觸件的筒狀構件， 衿〕、苐一筒體形成的外側接觸件般’組人 乂弟一同 同狀構件來作為外側接觸件 、、且5碰直徑逐漸增大的 〔圖式簡單說明】 圖。« 1係顯報本個之檢錢治狀—實麵態的概略構成 剖命^係本發明之第一實施形態的接觸件(第1接觸件)的概略 圖；3(a、上a)- j(e)係構成第—接觸件的外侧接觸件的分解剖面 顯示第二筒體，顯示以 示内側接觸件(第三筒體)的概略剖面圖。 _ 6 ^用第—接觸件的檢知治具的概略剖面圖。 的概略剖^ 第—接觸件的檢钱治具在檢查時之狀態 略^圖7係本發明之第二實施形態的接觸件⑼二接觸件)的概 用第二接觸件的檢查用治具的概略剖面圖。 略刮命圖 使用第二接觸件的檢查用治具之動作狀態的概 略刮係本發明之第三實施形態的接觸件(第三麵件)的概 28 201142323 【主要元件符號說明】 1、 r〜檢查用治具. 2、 2,、2，，〜接觸件 21〜外側接觸件 211、 21Γ〜第一筒體 211a〜第一前端部 211b〜第一缺口部 211c〜第一固定部 211d、211d’〜第一後端部 212、 212’〜第二筒體 212a〜第二前端部 212b〜第二固定部 212b’〜第三固定部 212c〜第二後端部 213〜第三筒體 213a〜第三前端部 213b〜第二缺口部 213c〜中間部 213d〜第三固定部 213e〜第三缺口部 213f〜第三後端部 213g〜絕緣被膜 22〜内側接觸件 223〜第三筒體 223a〜第三前端部 223b〜第二缺口部 223c〜第三中間部 223d〜第三缺口部 ' 223e〜第二中間部 . 223f〜固定部 29 201142323 223g〜第四缺口部 223h〜第三後端部 223i〜絕緣被膜 3〜保持體 31〜第一板狀構件 311〜第一導引上孔 312〜第一導引下孔 32〜第二板狀構件 321〜第二導引孔 33〜第一板狀構件 331〜第一導引孔 4〜連接電極體 41〜電極部 411〜第一電極部 412〜第二電極部 5〜導線部Mi and the younger guide the lower hole 312. The first guiding upper hole is formed to have an inner diameter slightly larger than the outer diameter of the first cylindrical body 211. Further, the first opening and the first guiding upper hole 311 are connected to each other, and the first guiding lower hole 312 = has a smaller outer diameter than the first cylindrical body 211 and is slightly larger than the second cylindrical body M2. Inner diameter. By forming the first guiding upper hole 311 and the first guiding lower hole 312 in this way, when the -contacting member 2 is inserted and held by the second guiding hole 321 described later from the holding body 3, since the first cylindrical body 211 is The difference between the outer diameter of the lower end of the first rear end portion 211d and the aperture of the first guiding lower hole 312 can lock the first contact 2 . Further, since the difference between the outer diameter of the first rear end portion 211d and the inner diameter of the first guide upper hole 311 is extremely small, the month b can hold the first contact 2 to the holder 3 more accurately. Further, the thickness of the first plate-shaped member 31 is not particularly limited, but the preferred shape 201142323 211d is shorter than the length of the first rear end portion 211d. This is for the first rear end portion to be surely stretched and contracted along the first guide upper hole 311. and. The second plate member 32 is disposed to be spaced apart from the first plate member 31 and is provided to guide the upper end of the first contact member 2 to the electrode portion 41, the second guiding hole 32, and the second guiding hole. The 321 is formed to have a pore diameter slightly larger than the outer diameter of the first cylinder 2ι. Further, the thickness of the second plate member 32 is not particularly limited, but is preferably shorter than the length of the first front end portion 211a. Therefore, the first front end portion 211a is surely guided along the second guiding hole 321. Further, the interval between the force bottom surface of the first plate member 31 and the top surface of the second plate member 32 is not particularly limited, but is preferably configured to be longer than the length of the first contact member 2 (outer contact member and inner side) The length of the contact) is slightly shorter. When the first contact member 2 is mounted on the holding body 3, the lower end portion of the first contact member 2 is passed through the second guiding hole 321 ' and then the lower end portion is passed through the first guiding upper hole 311 and the The lower hole 312 is guided to be mounted. At this time, the first contact member 2 is disposed to protrude from the first guiding lower hole 312 and the second guiding hole 321 to the outside, respectively. The electrode portion 4 of the jig 1 for inspection is formed with an electrode portion 41 corresponding to each of the first contacts 2. The electrode portion 41 has a second electrode portion 412 that is in contact with the first cylindrical body 211 to be in a conductive state, the first electrode portion 411, and the third cylindrical body 213. The electrode portion 41 of Fig. 5 is shown with the first electrode portion 411 and the second electrode portion 4! 2'. The pole portions are guided to each other and are formed such that their respective end faces are in contact with the respective cylinders. The first electrode portion 411 and the second electrode portion 412 are formed so as to be connected to the respective cylindrical bodies, and are disposed at the farthest position (the position having the largest space). In addition to the configuration shown in FIG. 5, the structure of the pole portion 41 can be formed by using, for example, a wire of the same structure as that of the wire, and the inner conductor of the cylindrical outer conductor is coaxially disposed. Shaft construction. Further, the inner conductor may have a solid cylindrical shape 'which may be a hollow cylindrical shape. At this time, the outer conductor of the electrode portion corresponds to the first electrode stack 11, and the inner conductor corresponds to the second electrode portion 412. Fig. 6 is a schematic cross-sectional view showing a state in which the jig for inspection which does not use the first contact member is inspected. When the first contact member 2 is mounted on the holding body 3, the first guiding upper hole 311 and the first guiding upper hole 311 are inserted from the second guiding hole 321 of the second 20 201142323 plate member 32. The apertures of the members 31 312 have different boundaries. After the upper member 2 is inserted into the holding body 3, the second plate member 32 body 4 is brought into contact with the portion 41 of the first contact member 2. This #, because the first contact 妾 electrode = the first division 1, the first electrode portion 411 and the second electric == 各自 the respective one of the notch portion 211b and the second notch portion 213b. Therefore, whether or not the lower end of the outer contact member (the lower end of the second engraving portion 212c) and the lower end portion of the lower first end end portion 213f of the inner contact member are abutted, The upper end of the third rear member is always in contact with each of the electrode portions H: the third notch portion 213U f on the lower end side of the contact member 22 is in contact with the inner side, and the notch portion is along the third "tube only during actual inspection The contact piece 2lb of the body end is at the lower end of the outer contact member, and the upper end of the outer contact member is also capable of contracting at the lower end of the outer contact member (the second cylindrical body is opened when it is touched. =Γΐ: Description of the configuration of the jig for inspection of the embodiment. And the third cylinder 1, the body 211, and the second cylinder 212 - the contact 2 corresponds to the object to be inspected. On the other hand, in order to make == Hold = 吏 = upper and lower telescopic, the probe itself must have a coil spring wound in a direction perpendicular to the end of the two / 'lf plate to form a retractable work and 'if used to the diameter of the wire itself: This; with f〇crT:^^::f^ -«--μ- contact, with 21 201142323 contact for assembly or manufacturing costs The inspection fixture used is too much, so the following is the same as the following; ● The problem of the second skill. = The manufacture of fine contact parts. The manufacturer's ^^; [Method 1] shows) The core of the hollow portion of the fit body 211 (not illustrated as = electric " core wire (for example, 30 μm diameter of unrecorded steel (sus)) jin wants thick (2) its - person, in the core wire (stainless steel wire) Coating the photoresist film, the peripheral surface. The desired portion of the photoresist is 7 = line, = is formed to form a spiral shape: the position of 2:1 (the substantially central portion of the first cylinder) is formed; (3) Next, the core wire is plated with nickel. At this time, the portion where the photoresist mask is not formed is nickel-plated....spring, and conductive, (4) again, the photoresist mask is removed, and the core wire is taken out. The first cylinder 211. Of course, the cylinder may be cut after the full line element of the length of the w green + the 驭 布 王 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 First, as described above, the two are prepared to form the first cylinder 2U, and the core is twisted to a desired thickness to smear the surface of the lion (4) Photoresist. _ light _ desired ° ^ order + light, & 贞 shadow, heat treatment to form a spiral mask. This g-tube forms the first cylinder 2n of the present invention, in the established position ί ( The substantially central portion of the second body is formed with a notch portion (first notch portion 2 ib). The position of the 苟 ; is removed by the recording. At this time, the portion where the photoresist mask is not formed 22 201142323 (4) The photoresist mask is removed and the first cylinder 211 is withdrawn. It is of course also possible to cut the cylinder after the core wire: a conventionally wound spiral ball G of the desired length. The diameter is difficult to form a spiral magazine having a diameter smaller than the diameter of the winding material depending on the winding material. The straight coil of the 二°21, the pole-tubular body 211 is manufactured by the core wire of the present invention made of the core wire nickel, so that it can be extracted compared to the conventional shape. The wall thickness of the spring material is reduced to form a small outer diameter and inner diameter of the spring. Accuracy and Freedom - Concurrently, in [Production Example 1] and [Manufacturing Example 2], a photoresist mask is formed. In order to cut the cylindrical body, the method of manufacturing the first cylindrical body 211 as described above, the second method of the invention of the cylindrical body 212 is omitted, and the description thereof will be omitted. Method of Manufacturing First Body 211 The second body 213 of the present invention is formed into two notches _ and the third notch portion 1 2 has a predetermined distance (disc d-notch portion _ ^ giant separation). Therefore, the diameter and the inner diameter of the portion where the photoresist mask is formed and the number of the length of the spacer are also different from those of the first cylinder. Except that the method of manufacturing the same-shaped tubular body 211 is the same, the description is omitted. The manufacturing method is the same as the following, and the second embodiment is inspected and used in the second embodiment. The contact of the second embodiment of the present invention is shown in Fig. 7. Fig. 8 is a test using the second contact. A mt. sectional view of the jig, the basic structure of the second contact member 2 is formed in the same configuration as the cross section, and has a second cylindrical body 212 constituting the outer contact member 2, and a third cylindrical member 212 as the inner contact member 22. The same body 211 and the 23 1 212 ΛΗ乍 are the outer contact members 21, and the second and second brothers 2 are the third cylinders 223 (see FIG. 7) of the inner contact members 22. Further, the internal storage is The second contact of the contact member 201142323 is explained in the following description, and the first-rear end portion 211d is formed in the length of the third cylinder 22 of the first contact 22: ^:= The inner connecting fixing portion 223f is a boundary, and the second body is formed by at least one notch portion, which is described later. The side and the lower end side are divided into two notch portions 263d, in the third and third portions, a notch portion. Further, the second notch portion: the fourth notch is connected to the electrode portion. The pressing force of the pressing point g is generated to crimp the inner contact U to the second contact 2 as described above, and the second fixing portion 223f is formed in the second intermediate portion 223^tσΡ 2= and The third f3f fixes the third cylinder barrel in a non-conducting state; 2 solid = position. Further, the first cylinder 211, the portion of the 212th portion -C "ΙΤάΙΙ\-l is determined by the third solid Therefore, the third fixing portion 223f shown in the first to the seventh embodiment is in the shape of a concave portion which is curved inside on the inner side of the second intermediate portion 22, and the second cylinder is formed after the inside of the second cylinder, instead of being in advance. Shape = - L. Further, the crotch portion is laterally fixed from the outermost first cylindrical body 211 in order to fix the first cylindrical body 211, the second cylindrical body 212, and the third f 22? The method of fixing the first to third cylinders is not limited to 24 201142323, and other solid 3 first cylinders such as electrical adapters or adhesives are fixed to the first The cylinder is different from the first contact member 2, and is s* 99^ ΑΑ Λ 7Ϊ ^ 'J, nti 00 〇. The embodiment of the contact piece 2' is formed by the insulating film 2231 of the third cylinder = 23 Covering the door, the second ==, the surface of the fifth portion 223h) of the notch portion 223b, and the portion of the notch portion (the ί: ί-: Ιϊ; ^ 223g) " ^ ° member = cover: also, in the first Two or two: = end two s body, the first - cylinder 2 ΐΓ and the third "each, there is a gap in the work. ρ, therefore, no contact can be made at the inspection point or the electric_push_@ j side contact member 21 and the inner contact member 22 at the check point or the electric knife pole ^ 'the outer two cylinders == r, Other fixing methods such as knotting. Further, after the =1:3= portion is arranged as described above, all of the cylinders may be fixed, or the third cylinder may be fixed after the adjustment. Alternatively, the first cylinder may be fixed after the Ji and the same body and the second body are fixed. Further, the flute f: 212 and the third cylinder 223 must be fixed in a non-conductive state. One of the limbs Fig. 8 is a cross-sectional view showing the second contact 2 attached to the holding body 3. The jig for inspection according to the second embodiment is held by the holder 33 of the second plate member 32 and is held by the holder 3 of the second plate member 32 = 25 201142323. At this time, the first guide diameter different from the first embodiment of the shape γ-plate member % = the first hole 331 of the first plate-shaped member 33 is formed as the body 211, and the outer diameter is slightly smaller than the second cylinder 212 large = the first so that the first guiding hole 33! is formed such that the step difference between the second connecting second cylindrical body 212 is distracted by the R body 211 and passes through the first plate-shaped structure The hole 331 is guided, and the contact 2 can be removed by 哕$21^. Fine by. A guide hole 331 prevents the second contact and the first contact member 2, preferably the first portion 223g is present in the first guide hole, and the inner portion 3 = 2 = the end portion 2nd. By forming the first card, the first; the cylinder, into the first-day coffee, the third part of the third day, in the - - - - - - - - - - - - - - - - - - - - - - - - - - 2, after the holding body 3, in the second contact member 2, the second plate member 32 and the connecting electrode at this time 'because of the second contact member 2, the first cylinder 2, and the first The three-tube pomelo is pressed against the first electrode portion 411 and the second electrode portion 412, so that each of the first-notch portions, the second notch portion, and the third portion 2 are in the disk, regardless of the first tube In the body 211, whether or not the first end portion of the red end portion 223a is in contact with the inspection point, and the respective tubes are in contact with each other. Further, the third portion is disposed on the lower side, and the illuminating portion 223g is in a state of being formed in a natural length when it is to be inspected, and the notch portion is expanded and contracted only during the cross-check. Next, the inspection is performed for the inspection jig of the two contact members 2', and the lower end of the third cylinder is in contact with the inspection point. At this time, since the second second portion 9b is fixed by the second fixing portion 212b and the first cylindrical body 211, the first notch portion 211b of the first bean is contracted, and the third cylindrical body 223 is 26 201142323. The notch portion 223g contracts. The above is a description of the jig for inspection of the first embodiment. ^ Come to the description of the third implementation of the third (the third). The ί 2 ′′ has substantially the same configuration as that of the second contact 2 , and the configuration is different for the different configurations of the 2nd day 11 . The third embodiment shown in FIG. 10 : the contact H is the second contact 2 ''Connecting and fixing the first barrel 211, and the fixing portion of the second 223 is different. The third contact piece 2" has a shape of the first cylinder 211, and the second cylinder guilty, the first -^ Department. P212b' is formed by connecting and fixing the first body 212 in a non-conducting state, and the third fixing member of the third cylinder 223 is such a fixing portion as shown in FIG. 10, the first cylinder 2: second The cylinder 212 is fixed to the third cylinder: a cylinder. By doing so, the assembly step is facilitated. Therefore, the assembly steps are divided into different parts, and the method of fixing the fixing portions can be performed by the above method, and the cylindrical body is omitted here; 23: 'The f ^ portions are formed to be disposed in the third fixed portion, Therefore, the pressing force is applied to the electrode portion "by pressing the electrode portion at each position of the solid pressure contact at the position", and the notch portion on the side of the lower side of the human sin is generated as described above. The two terminals _/^ of the first to second ends (electrode portions) of the invention are held, and the guides are used for the inspection of the jig of the third embodiment. 27 201142323 In the case of ί; 5 ί= by the combination of three cylinders, the convexity of the shape: the shape of T, and the inner side of the J is configured as the inner member of the cylindrical member, 衿], the outer side of the cylinder The contact piece is like a group of people who use the same member as the outer contact piece, and the diameter of the 5 touch is gradually increased [simple description of the figure]. « 1 series report the check of the money - solid surface A schematic diagram of a contact (a first contact) according to a first embodiment of the present invention; 3 (a, upper) a)-j(e) shows an exploded view of the outer contact member constituting the first contact member, showing a second cylindrical body, and shows a schematic cross-sectional view showing the inner contact member (third cylindrical body). _ 6 ^ using the first contact A schematic cross-sectional view of the inspection fixture of the article. A schematic view of the inspection tool at the time of inspection. FIG. 7 is a schematic view of the contact member (9) of the second embodiment of the present invention. A schematic cross-sectional view of the jig for inspection using the second contact member. Slightly scratching the contact member of the third embodiment of the present invention using the second contact member.概要 28 201142323 [Description of main components] 1. r~ inspection jig. 2, 2, 2, ~ contact 21 to outer contact 211, 21Γ~ first cylinder 211a to first front end Portion 211b to first notch portion 211c to first fixing portion 211d, 211d' to first rear end portion 212, 212' to second cylindrical body 212a to second front end portion 212b to second fixed portion 212b' to third fixed Portion 212c to second rear end portion 213 to third cylindrical body 213a to third front end portion 213b to second notch portion 213c 〜 intermediate portion 213d to third fixing portion 213e to third notch portion 213f to third rear end portion 213g to insulating film 22 to inner contact 223 to third cylindrical member 223a to third front end portion 223b to second notch portion 223c 〜3rd intermediate portion 223d to third notch portion 223e to second intermediate portion 223f to fixing portion 29 201142323 223g to fourth notch portion 223h to third rear end portion 223i to insulating film 3 to holding body 31 to first The plate-shaped member 311 to the first guiding upper hole 312 to the first guiding lower hole 32 to the second plate-shaped member 321 to the second guiding hole 33 to the first plate-shaped member 331 to the first guiding hole 4 to Electrode body 41 to electrode portion 411 to first electrode portion 412 to second electrode portion 5 to lead portion