JP2011089801A - Tool for inspection and contact - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tool for inspection equipped with contacts for four-terminal measurement for coping with miniaturization and complication of a substrate while having a simplified structure with its component count reduced. <P>SOLUTION: The tool for inspection includes: a first tube, being conductive and tubular, with its upper end brought into pressure contact with an electrode; a second tube, being conductive and tubular, projecting from a lower end opening of the first tube while being electrically connected to the interior of the first tube and disposed coaxially therewith, with its upper end disposed within the first tube while its lower end brought into pressure contact with an inspection part; and a third tube, being conductive and tubular, electrically non-connected to the first and second tubes and coaxially housed within the first and second tubes, with its upper end brought into pressure contact with the electrode while its lower end brought into pressure contact with the inspection part. The first tube includes a first cut-out of a helical shape in a tube wall between the upper and lower ends of the first tube while being provided with a first fixed part fixed to the second tube on the lower end side of the first cut-out. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inspection jig for electrically connecting an inspection point set in advance on an inspection target portion of an object to be inspected and an inspection apparatus for performing this inspection, and in particular, four-terminal measurement can be easily measured. The present invention relates to an inspection contact to be performed and an inspection jig using the contact.

  The inspection jig of the present invention refers to an inspection object by supplying electric power or an electric signal from an inspection apparatus to a predetermined inspection position and detecting an electric signal from the inspection object part. It is possible to detect the electrical characteristics of the part and perform an operation test.

  Examples of such inspected objects include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, and various boards such as package boards and film carriers for semiconductor packages, and semiconductors. Examples of the semiconductor device include a wafer, a semiconductor chip, and a CSP (Chip size package).

  In the present specification, these inspection objects are collectively referred to as “inspection object”, and an inspection target part formed on the inspection object is referred to as “inspection part”. An inspection point for actually inspecting the electrical characteristics of the inspection unit is set in the inspection unit, and the electrical characteristic of the inspection unit is detected by pressing a contact with the inspection point.

  Conventionally, a plurality of wirings are formed on a circuit board which is an embodiment of an object to be inspected. This wiring is formed to supply electric power and to flow an electric signal so that electric / electronic components mounted on the circuit board have a desired function. For this reason, it is known that defective wiring leads to defective operation of the circuit board.

  In order to solve such a problem, many inventions of an inspection apparatus for determining the quality of a target portion such as a wiring formed on an inspection object such as a circuit board or a semiconductor device have been proposed.

  Such an inspection apparatus, for example, in order to determine the quality of the wiring formed on the substrate to be inspected, a plurality of inspection points set in advance on the wiring, and a plurality of contacts connected to each of them. Inspection is performed using an inspection jig having a child (probe).

  In such an inspection jig, one end of the contact is pressed against an inspection point on the wiring (inspection part), and the other end is pressed against an electrode part electrically connected to the substrate inspection apparatus. Then, the current and voltage for measuring the electrical characteristics of the wiring are supplied from the board inspection apparatus through the inspection jig, and the electrical signal detected from the wiring is transmitted to the board inspection apparatus. Become.

  In recent years, with the advancement of technology, with the miniaturization of a semiconductor device and the miniaturization of a substrate, the wiring on the substrate is formed more finely and complicatedly. As miniaturization and complexity of the wiring of such a substrate progresses, the contacts provided in the inspection jig are also required to be thinned, the pitch between the contacts is reduced, the number of pins is increased, and simplification is required. Yes.

  In particular, when measuring a target portion of an inspection object that has been refined and complicated, a four-terminal measurement method is performed because the influence of a contact resistance value that occurs when the target portion comes into contact with a contact is large. In this four-terminal measurement method, it is necessary to arrange two sets of electrically independent contacts for current supply and voltage detection at the inspection point. For this reason, the contactor made thinner than usual is required.

  Here, for example, in the contact of the inspection jig disclosed in Patent Document 1, the first electrode portion of the cylindrical member and the second electrode insulated from the inside of the first electrode portion and disposed therein The first electrode portion and the second electrode portion are simultaneously in contact with the inspection point.

  However, since the inspection jig disclosed in Patent Document 1 is formed by a coil spring using a winding, it is difficult to form a coil having a diameter smaller than about four times the diameter of the coil. However, it was extremely difficult to form a coiled coil spring having a thickness of 100 μm or less and assemble it as an inspection jig. Even if it could be formed, it was too expensive to use for 2 to 4,000 inspection jigs due to the problem of manufacturing cost, and there was an impractical problem.

JP 2005-249447 A

  The present invention provides an inspection jig provided with a four-terminal measuring contact having a simplified structure that can cope with miniaturization and complexity of a substrate and has a reduced number of components.

  In order to solve the above-described problems, an inspection jig according to the present invention includes a connection electrode body including a plurality of electrode portions that are electrically connected to an inspection apparatus, and a conductive material whose upper end is in pressure contact with the electrode portions. A first cylindrical body having a cylindrical shape, a first cylindrical body that protrudes from a lower end opening of the first cylindrical body, is electrically connected to the first cylindrical body, and is disposed coaxially. And a conductive cylindrical second cylinder whose lower end is press-contacted to the inspection portion, electrically disconnected from the first cylinder and the second cylinder, and the first cylinder A conductive cylindrical third cylindrical body that is coaxially accommodated inside the one cylindrical body and the second cylindrical body, and whose upper end is pressed against the electrode portion and whose lower end is pressed against the inspection portion; A first plate member having a first guide hole for guiding respective lower ends of the second cylinder and the third cylinder to the inspection point; and the first cylinder. A second guide hole having a second guide hole for guiding the upper end of each of the third cylinders to the electrode portion, and a second plate-like member arranged with a predetermined interval from the first plate-like member, The first cylinder is provided with a spiral first notch in the cylinder wall between the upper end and the lower end of the first cylinder, and the third cylinder is formed of the third cylinder. A spiral second notch is provided in the cylindrical wall between the upper end and the lower end, and the first cylinder is fixed to the second cylinder on the lower end side from the first notch. It has the 1st fixed part which is characterized by the above-mentioned.

  The first guide hole may have a diameter that is smaller than the outer diameter of the first cylinder and slightly larger than the outer diameter of the second cylinder.

  In the third cylinder, one notch provided on the lower side of the third cylinder may be present inside the first guide hole.

  The first guide hole is connected in communication with the first guide upper hole having a diameter slightly larger than the outer diameter of the first cylinder, and the first guide upper hole. You may make it have a 1st guide pilot hole which is small and has a diameter slightly larger than the outer diameter of said 2nd cylinder.

  The third cylindrical body is provided with two spiral second cutout portions at a distance from each other in the cylindrical wall portion between the upper end and the lower end, and the second cylindrical cutout portion between the two second cutout portions. You may make it have the 2nd fixing | fixed part fixed with a two cylinder body.

  The third cylindrical body may be arranged with the second cutout portion so as to have a substantially symmetrical shape with respect to the center of the third cylindrical body.

  Further, the contact according to the present invention is a contact used for an inspection jig for electrically connecting an object to be inspected having an inspection part to be inspected and an inspection apparatus for inspecting an electrical characteristic of the inspection part. A conductive cylindrical first cylinder whose upper end is pressed against the electrode portion; and a first cylindrical body that protrudes from a lower end opening of the first cylindrical body and electrically A conductive cylindrical second cylinder having an upper end disposed inside the first cylinder and a lower end pressed against the inspection portion; and the first cylinder The body and the second cylinder are electrically disconnected from each other and are coaxially accommodated in the first cylinder and the second cylinder, the upper end is pressed against the electrode portion, and the lower end is the inspection A conductive cylindrical third cylinder pressed against the portion, and the first cylinder is between an upper end and a lower end of the first cylinder The cylindrical wall portion is provided with a spiral first notch portion, and the third cylindrical body has two helical second notch portions on the cylindrical wall portion between the upper end and the lower end of the third cylindrical body. Are provided at a distance from each other, and the first cylinder has a first fixing portion to which the second cylinder is fixed at a lower end side than the first notch, and the third cylinder The body has a second fixing portion that is fixed to the second cylindrical body between two second cutout portions.

  The third cylindrical body may be arranged with the second cutout portion so as to have a substantially symmetrical shape with respect to the center of the third cylindrical body.

  Further, the contact according to the present invention is a contact used for an inspection jig for electrically connecting an object to be inspected having an inspection part to be inspected and an inspection apparatus for inspecting an electrical characteristic of the inspection part. An inner contact formed from a conductive cylindrical member and having the one end pressed against the electrode portion and the other end pressed against the inspection point, and the inner contact in a non-conductive state inside. And having an outer contact made of a conductive cylindrical member having one end pressed against the electrode portion and the other end pressed against the inspection point. The inner contact and the outer contact A spiral notch is provided in the cylindrical wall portion between the end and the other end, and the outer wall surface of the cylindrical member of the outer contact is gradually or stepped from the other end side to the one end side. It is formed so that it may become large in a shape.

According to the first aspect of the present invention, the conductive first cylinder, the conductive second cylinder protruding from the first cylinder and housed in the first cylinder, and the second cylinder By using the conductive third cylinder housed inside the body, the contact provided in the inspection jig has two terminals (outer contact and inner contact) arranged on the same axis. Become. Further, the lower end of the second cylinder housed inside the first cylinder body and the lower end of the third cylinder housed inside the second cylinder body are in contact with the inspection section side, Since the upper end of the first cylinder that houses the second cylinder is in contact with the upper end of the third cylinder that is accommodated inside the second cylinder, the pitch of the two terminals at the lower end (inspection part side) In addition, since the pitch of the two terminals at the upper end (electrode part side) can be made wider, it is possible to avoid the narrowing of the pitch of the electrode part and effectively use it for inspection points with a narrow pitch. Furthermore, by using the second cylinder as a guide for the first cylinder and the third cylinder, the strength of the contact can be ensured and both can be expanded and contracted with certainty. In addition, since two contactors are formed from three integral cylindrical members, the number of parts can be reduced and simplified.
According to invention of Claim 2, when a contactor is hold | maintained at the jig | tool for a test | inspection, a contactor falls out because the lower end of the 1st cylinder of the contactor contacts the upper surface of a 1st plate-shaped member. This can be prevented.
According to the invention described in claim 3, since one notch portion provided on the lower side of the third cylindrical body exists inside the first guide hole, the first plate-like member that forms the first guide hole. Can guide the expansion / contraction operation of the notch, and can stably perform the expansion / contraction operation.
According to invention of Claim 4, when a contactor is hold | maintained at the jig | tool for a test | inspection, the upper surface of the 1st plate-shaped member in which the 1st cylinder lower end of the contactor forms a 1st guide pilot hole The contactor is accurately held in an appropriate position by contacting the (interface between the first guide upper hole and the first guide lower hole), and the contactor is held at the lower end of the second cylinder and the lower part of the third cylinder. It can be held so that the end can contact the inspection point.
According to the fifth aspect of the present invention, since the two cutout portions are formed in the third cylindrical body with the second fixed portion interposed therebetween, the cutout portion on the upper end side corresponds to the pressing force from the electrode portion. Since the notch portion on the lower end side expands and contracts according to the pressing force from the inspection point, each notch portion can independently perform an expansion / contraction function.
According to the invention described in claim 6, since the second cutout portion is arranged in the third cylinder so as to have a substantially symmetric shape with respect to the center thereof, the third cylinder is formed when assembling the contact. Since it is not necessary to distinguish between the upper end and the lower end of the body, the time required for manufacturing the contact can be shortened.
According to invention of Claim 7 and 9, the electroconductive 1st cylinder, the electroconductive 2nd cylinder which protrudes from the opening of this 1st cylinder, and is accommodated in the inside of the 1st cylinder, By the conductive third cylinder housed in the second cylinder body, the upper end and the lower end of the contact of the inspection jig are coaxially arranged. Further, the lower end of the second cylinder housed inside the first cylinder body and the lower end of the third cylinder housed inside the second cylinder body are in contact with the inspection section side, Since the upper end of the first cylinder that houses the second cylinder is in contact with the upper end of the third cylinder that is accommodated inside the second cylinder, the pitch of the two terminals at the lower end (inspection part side) In addition, since the pitch of the two terminals at the upper end (electrode part side) can be made wider, it is possible to avoid the narrowing of the pitch of the electrode part and effectively use it for inspection points with a narrow pitch. Furthermore, by using the second cylinder as a guide for the first cylinder and the third cylinder, the strength of the contact can be ensured and both can be expanded and contracted with certainty. In addition, since two contactors are formed from three integral cylindrical members, the number of parts can be reduced and simplified.
According to the eighth aspect of the invention, since the second cutout portion is disposed in the third cylinder so as to have a substantially symmetric shape with respect to the center thereof, the third cylinder is assembled when assembling the contact. Since it is not necessary to distinguish between the upper end and the lower end of the body, the time required for manufacturing the contact can be shortened.

It is a schematic structure figure showing one embodiment of the inspection jig concerning the present invention. It is a schematic sectional drawing of the contact (1st contactor) of 1st embodiment of this invention. It is an exploded sectional view of the outside contact which constitutes the 1st contact, (a) shows the 1st cylinder, (b) shows the 2nd cylinder, (c) shows the 2nd inside the 1st cylinder. The state where the cylinder is arranged is shown. The schematic sectional drawing of an inner side contactor (3rd cylinder) is shown. It is a schematic sectional drawing of the test | inspection jig | tool using a 1st contactor. It is a schematic sectional drawing which shows the state at the time of the test | inspection of the test jig | tool using a 1st contactor. It is a schematic sectional drawing of the contact (2nd contact) of 2nd embodiment of this invention. It is a schematic sectional drawing of the test | inspection jig | tool using a 2nd contactor. It is a schematic sectional drawing which shows the state of operation | movement of the test jig | tool using a 2nd contactor. It is a schematic sectional drawing of the contact (3rd contactor) of 3rd embodiment of this invention.

A mode for carrying out the present invention will be described.
FIG. 1 is a schematic configuration diagram showing an embodiment of an inspection jig according to the present invention. An inspection jig 1 according to the present invention includes a plurality of contacts 2, a holding body 3 that holds the contacts 2 in a multi-needle shape, supports the holding body 3, and is in contact with each contact 2 and is in a conductive state. A connecting electrode body 4 having an electrode portion 41 (see FIG. 5), and a conductive wire portion 5 that is electrically connected and extended from the electrode portion 41.
In FIG. 1, three contacts are shown as the plurality of contacts 2 and three conductor portions 5 corresponding to the contacts are shown, but these are not limited to three, It is determined according to the inspection point set on the substrate to be inspected.

The main feature of the present invention is that two of the three conductive cylindrical members are used as the first contact and the remaining one cylindrical member is used as the second contact. By using it as a contact having two contacts, an outer contact and an inner contact, it can be used for four-terminal measurement.
With this configuration, the lower end of the outer contact (the lower end of the second cylinder) and the lower end of the inner contact (the lower end of the third cylinder) are in contact with the inspection point, and the electrode portion Will contact the upper end of the outer contact (upper end of the first cylinder) and the upper end of the inner contact (upper end of the third cylinder).

A contact according to the first embodiment of the present invention (hereinafter referred to as a first contact) will be described. FIG. 2 is a schematic cross-sectional view of the first contact of the present invention, FIG. 3 shows an exploded cross-sectional view of the outer contact constituting the first contact, (a) shows the first cylinder, (B) shows a 2nd cylinder, (c) shows the state by which the 2nd cylinder was arrange | positioned in the 1st cylinder, and FIG. 4 has shown schematic sectional drawing of the 3rd cylinder.
As described above, the first contact 2 includes the outer contact 21 and the inner contact 22, and the inner contact 22 is disposed inside the outer contact 21 in an insulated state from the outer contact 21. ing.
The outer contact 21 includes a first cylinder 211 and a second cylinder 212, and the inner contact 22 is formed from a third cylinder 213. As shown in FIG. 2, the first contact 2 has the first cylinder 211 of the outer contact 21 disposed on the outermost side, and the second cylinder 212 of the outer contact 21 disposed on the innermost side. The third cylinder 213 is disposed on the side. Thus, the 1st contactor 2 is comprised by arrange | positioning the three cylindrical members from which a diameter differs on a concentric shaft.

  The first cylinder 211 forms a part of the outer contact 21 and a part that contacts the electrode portion of the outer contact 21. The first cylinder 211 is a cylindrical member having the largest diameter among the three cylindrical members. The first cylinder 211 has a predetermined length and is formed in a conductive hollow cylindrical shape (cylindrical shape) having openings at both ends. The first cylindrical body 211 allows an electrical connection between the electrode section and the outer contactor 21 by having an opening at one end thereof in contact with an electrode section 41 described later.

  The 1st cylinder 211 is formed from each site | part of the 1st front-end | tip part 211a, all the notch parts 211b, the 1st fixing | fixed part 211c, and the 1st rear-end part 211d (refer Fig.3 (a)). Since each part is formed from the same cylindrical member, the first tip part 211a, the first notch part 211b, and the first rear end part 211d have the same outer diameter and inner diameter. The first fixing portion 211c is formed on the wall surface of this cylindrical member. The first cylinder 211 of the present invention forms a notch by providing a spiral notch on the wall surface of one cylindrical member, and each of the two cylindrical members sandwiching the notch is a first tip part. And a first rear end portion. Although the length of the first notch 211b is not particularly limited, it is necessary to adjust the length so as to have a desired expansion / contraction length, and the strength of the first cylinder 211 is sufficient. If it exists, a notch part can also be formed over the substantially full length of the 1st cylinder 211. FIG.

  The first tip portion 211 a has an upper end surface of one opening that contacts the electrode portion 41, and the upper end surface of the first tip portion 211 a corresponds to the upper end of the first cylinder 211. The first tip 211a is penetrated and supported inside a second guide hole 321 of a second plate-like member 32 described later, and is guided to a predetermined first electrode 411. The length of the first tip portion 211a in the major axis direction is not particularly limited, but is preferably longer than the thickness of the second plate member 32. The lower end of the first tip portion 211a is connected in communication with the upper end of a first notch portion 211b described later.

  The first notch 211b is formed between the first front end 211a and the first rear end 211d, and its upper end is connected to the lower end of the first front end 211a. The upper end of the portion 211d is connected in communication. As described above, the first notch 211b is formed by a spiral notch along the wall surface of the cylindrical member that is the first cylinder. By forming a spiral cutout in the first cylinder 211 in this way, the first notch 211b functions as an expansion / contraction part that expands and contracts in the major axis direction of the first cylinder. The expansion / contraction characteristics of the notch 211b include the adjustment of the width and length of the notch and the thickness of the tubular member, the type of material of the tubular member, and various treatments applied to the tubular member (thermal treatment and chemical And other mechanical processing (plastic processing, etc.), and can be adjusted as appropriate by the user. The number of notches is one in the drawing, but a plurality of notches may be provided.

  The upper end of the first rear end portion 211 d is in communication with the lower end of the first notch 211 b, and the lower end opening corresponds to the lower end of the first cylinder 211. The first rear end portion 211d comes into contact with the first plate member 31 and the lower surface of the first rear end portion 211d. For this reason, as for the 1st cylinder 21, the upper surface of the 1st front-end | tip part 211a used as the upper end contact | abuts to an electrode part, and the lower surface of the 1st rear-end part 211d used as the lower end is a 1st plate-shaped member. 31 (see FIG. 5). The length in the major axis direction of the first rear end portion 211d is formed to have a length that allows the lower surface of the first rear end portion 211d to contact the first plate-like member 31 as described above. become. In addition, this 1st rear-end part 211d is provided so that the 2nd cylinder mentioned later may protrude from the opening part.

  The first fixing portion 211 c electrically connects the first cylinder 21 and the second cylinder 22. The first fixing portion 211c is formed at the first rear end portion 211d. In the first fixing portion 211c shown in FIG. 3A, the first rear end portion 211d is pressed from the first cylindrical body 21 (first rear end portion 211d) side to the second cylindrical body 22 side. Shows a state in which a concave portion curved inward is formed. In addition, although this recessed part is formed in order to fix the 1st cylinder 211 and the 2nd cylinder 212 in the case after arrange | positioning the 2nd cylinder 212 in the 1st cylinder 211, the 1st cylinder The body 211 may be formed in advance. The concave portion is fixed by pressing (caulking) from the outer side (first cylindrical body 211) to the inner side (second cylindrical body 212) in order to fix the first cylindrical body 211 and the second cylindrical body 212. It is formed in the case of.

  The fixing method of the 1st and 2nd cylinder by the 1st fixing | fixed part 211c is not limited to this caulking method, You may use other fixing methods, such as laser welding, arc welding, and an adhesive agent. In addition, when the fixing method in which the first cylinder 211 and the second cylinder 212 are electrically connected, such as welding, is unnecessary as the fixing method of the first cylinder 211 and the second cylinder 212, When a fixing method in which the first cylinder 211 and the second cylinder 212 are not electrically connected is used, for example, the first cylinder 211 and the second cylinder 212 are electrically connected with solder or a conductive wire. It can also be.

As described above, the first cylindrical body 211 can be formed of a single conductive cylindrical member. For example, the first cylindrical body 211 is formed to have an outer diameter of 40 to 250 μm, an inner diameter of 30 to 240 μm, and a thickness of 5 to 50 μm. .
The length of the first cylinder 211 in the major axis direction is slightly longer than the sum of the distance between the first plate-like member 31 and the second plate-like member 32 described later and the depth of the first guide upper hole 311. It is preferred that This is because when the first contactor 2 is held by the holding body 3, the first notch 211 b is contracted to be in an urging state, and the upper end of the first cylinder 211 constantly presses the electrode part. Because it becomes.

  The first cylinder 211 has an upper end in contact with the electrode portion, and a second cylinder 212 that is electrically connected to the first cylinder 211 from the lower end protrudes. The first cylinder 211 and the second cylinder 212 are made of a conductive material. Although it will not specifically limit as this material if it is a material which has electroconductivity, For example, nickel, nickel alloy, and a palladium alloy can be illustrated.

  The first front end portion 211 a, the first notch portion 211 b and the first rear end portion 211 c are arranged in the first cylindrical body 211, respectively, but these portions are symmetric with respect to the first cylindrical body 211. It can also be arranged. When arranged in this way, since the first cylindrical body 211 has a symmetrical shape, there is no difference in the vertical direction, and assembling becomes easy.

  The second cylinder 212 is a member that forms a part of the outer contact 21 and abuts against the inspection point of the outer contact 21. The second cylindrical body 212 has a diameter that is substantially intermediate among the three cylindrical members, has a predetermined length, and is formed of a conductive material. The second cylinder 212 is formed in a hollow cylindrical shape (cylindrical shape) having both end openings. The second cylinder 212 is arranged so that the lower end thereof is in contact with the inspection point and the upper end is always present inside the first cylinder 211. The outer contactor 21 uses the first cylinder 211 and the second cylinder 212 that are electrically connected to each other so that the electrode portion 41 and the first cylinder 211 are in conductive contact, and the inspection point and the second cylinder are in contact. When the body 212 is in conductive contact, the inspection point and the electrode part are electrically connected.

  The second cylinder 212 has a second front end portion 212a, a second fixing portion 212b, and a second rear end portion 212c. The second front end portion 212a and the second rear end portion 212c are formed of a single cylindrical member, have the same outer diameter and inner diameter, and the second fixing portion 212b is a wall surface of the cylindrical member. Will be formed on top.

  The 2nd front-end | tip part 212a is one end part of the cylindrical member which forms the 2nd cylinder 212, and the site | part by the side of an electrode part from the 2nd fixing | fixed part 212b mentioned later corresponds to this. The second tip 212a is always accommodated and arranged in the first cylinder 211. Since the length of the second tip 212a is always accommodated in the first cylinder 211 as described above, the first cylinder 211 is provided by the expansion / contraction function of the first notch 211b of the first cylinder 211. Even if it becomes short, it is necessary to form in the length which does not protrude from the upper end of the 1st cylinder 211.

  The second rear end portion 212c is the other end of the cylindrical member that forms the second cylindrical body 212, and a portion closer to the inspection point from the second fixing portion 212b described later corresponds to this second rear end portion. The other opening of 212c is brought into conductive contact with the inspection point as the lower end of the outer contact 21. As described above, the length of the second rear end portion 212c needs to be long enough to protrude from the other opening of the first rear end portion 211d of the first cylindrical body 211.

  The second fixing portion 212b electrically connects the first cylinder 211 and the second cylinder 212. The second fixing portion 212b is formed at the same position as the first fixing portion 211b described above. The second fixing portion 212b is preferably formed at a position shifted from the center of the second cylinder 212 (a position on the lower side from the center in FIG. 3). This is because it is formed at a position corresponding to the position of the first fixing portion 211c disposed on the first rear end portion 212d. Thus, by fixing the 1st cylinder 211 and the 2nd cylinder 212, the 1st fixing | fixed part 211c exists on the 1st rear-end part 211d of the lower end side rather than the 1st notch part 211b. Therefore, the second tip portion 212a relatively moves in the internal space of the first cylindrical body 211 by the expansion and contraction of the first notch portion 211b. In addition, although the 2nd fixing | fixed part 212c shown by FIG.3 (b) is shown as an inner side recessed part curved inside, this inner side recessed part accommodated the 2nd cylinder 212 in the 1st cylinder 211 inside. Although formed to fix the first cylinder 211, the second cylinder 212, and the third cylinder 213 later, they may be formed in advance on the second cylinder 212. In addition, the inner concave portion is pressed (caulked) from the outer side (first cylindrical body 211) to the inner side (second cylindrical body 212) in order to fix the first cylindrical body 211 and the second cylindrical body 212. Formed when fixed. The fixing method of the first and second cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used.

  The second cylinder 212 can be formed of a single conductive cylindrical member, and is formed to have an outer diameter of 20 to 220 μm, an inner diameter of 10 to 200 μm, and a thickness of 5 to 50 μm, for example.

  The second cylinder 212 can also be formed by arranging each part so as to be point-symmetric with respect to the center or line-symmetric with respect to the central axis. When the outer contactor 21 is formed in such a symmetrical shape, it can be handled without distinction between the upper and lower sides of the second cylinder 212.

  The second cylinder 212 is formed of a conductive material, like the first cylinder 211. Although it will not specifically limit as this material if it is a material which has electroconductivity, For example, nickel, nickel alloy, and a palladium alloy can be illustrated.

  As shown in FIG. 3C, the first cylinder 211 and the second cylinder 212 are arranged such that the first cylinder 211 protrudes on the one hand and the second cylinder 212 protrudes on the other hand. The outer contact 21 is formed. Since the first cylinder 211 and the second cylinder 212 are electrically connected and fixed by the first fixing part 211c and the second fixing part 212b, the upper end of the first cylinder 211 is in contact with the electrode part. And when the lower end of the 2nd cylinder 212 contacts an inspection point, it can function as a contactor which connects an electrode part and an inspection point electrically.

  Next, the 3rd cylinder 213 used as the inner side contactor 22 which forms the 1st contactor 21 is demonstrated (refer FIG. 4). The third cylinder 213 forms the inner contact 21 and forms a portion that contacts the electrode portion of the inner contact 21 and the inspection point. The third cylinder 213 is a cylindrical member having the smallest diameter among the three cylindrical members. The third cylinder 213 has a predetermined length and is formed in a conductive hollow cylindrical shape (cylindrical shape) having openings at both ends.

  The third cylindrical body 213 is formed from each part of a third front end portion 213a, a second notch portion 213b, an intermediate portion 213c, a third fixing portion 213d, a third notch portion 213e, and a third rear end portion 213f ( (See FIG. 4). The third tip portion 213a, the second notch portion 213b, the intermediate portion 213c, the third notch portion 213e, and the third rear end portion 213f are formed from the same cylindrical member, so that the respective portions are the same. The third fixed portion 213c is formed on the wall surface of the cylindrical member. The third cylinder 213 of the present invention forms a notch by providing a spiral notch on the wall surface of one cylindrical member, and each of the two cylindrical members sandwiching the notch is a third tip. 213a and the third rear end 213f are formed. The lengths of the second notch 213b and the third notch 213e are not particularly limited, but the length needs to be adjusted so as to have a desired expansion / contraction length. If the strength is sufficient, a notch can be formed over substantially the entire length of the third cylinder 213.

  The third tip portion 213 a has an upper end surface of an upper opening that contacts the electrode portion 41, and the upper end surface of the third tip portion 213 a corresponds to the upper end of the inner contact 22. The third tip portion 213a is penetrated and supported inside a second guide hole 321 of a second plate-like member 32 described later, and is guided to a predetermined first electrode portion 412. The length of the third tip portion 213a in the major axis direction is not particularly limited, but is preferably longer than the thickness of the second plate-like member 32. The lower end of the third tip 213a is connected in communication with the upper end of a second notch 213b described later.

  The second notch portion 213b is formed between the third tip portion 213a and the intermediate portion 213c, and its upper end is connected to the lower end of the third tip portion 213a, and its lower end is connected to the upper end of the intermediate portion 213c described later. The As described above, the second notch 213b is formed by a spiral notch along the wall surface of the cylindrical member that is the third cylinder. Thus, by forming a spiral notch in the third cylinder 213, the second notch 213b functions as an expansion / contraction part that expands and contracts in the major axis direction of the third cylinder. The expansion / contraction characteristics of the notch 213b include the adjustment of the width and length of the notch and the thickness of the tubular member, the type of material of the tubular member, and various treatments applied to the tubular member (thermal treatment and chemical treatment). And other mechanical processing (plastic processing, etc.) and can be adjusted as appropriate by the user. Further, although the number of the notches 213b is one in the drawing, a plurality of notches may be provided.

  The intermediate part 213c is formed between the second notch part 213b and the third notch part 213e of the third cylinder 213, the upper end thereof is connected to the lower end of the second notch part 213b, and the lower end thereof is a third notch described later. The upper end of the portion 213e is connected in communication. The intermediate portion 213c has a third fixing portion 213d described later, and is electrically insulated and fixed from the first cylinder 211 and the second cylinder 212.

  The third fixing portion 213d fixes the second cylinder 212 and the third cylinder 213 in an insulated state. The third fixing portion 213d is formed in the intermediate portion 213c. In the third fixing portion 213d shown in FIG. 4, fixing is performed by pressing from the second cylindrical body 212 (second rear end portion 212c) side to the third cylindrical body 213 side. In addition, although this fixing | fixed part is the case after arrange | positioning the 3rd cylinder 213 in the 2nd cylinder 212, it is formed in order to fix the 2nd cylinder 212 and the 3rd cylinder 213. The third cylinder 213 may be formed in advance. In addition, this fixing portion is pressed (caulked) from the outside (second cylinder 212) to the inside (third cylinder 213) in order to fix the second cylinder 212 and the third cylinder 213. It is formed when fixed.

  The fixing method of the 2nd and 3rd cylinder by the 3rd fixing | fixed part 213d is not limited to this caulking method, You may use other fixing methods, such as an adhesive agent. However, since the second cylinder 212 and the third cylinder 213 must be fixed in an insulated state, a fixing method in which they are electrically connected cannot be employed.

  The third notch portion 213e is formed between the intermediate portion 213c and the third rear end portion 213f, and the upper end thereof is connected to the lower end of the intermediate portion 213c. Connected. As described above, the third notch 213e is formed by a spiral notch along the wall surface of the cylindrical member that is the third cylinder. By forming a spiral notch in the third cylinder 213 in this manner, the third notch 213e functions as an expansion / contraction part that expands and contracts in the major axis direction of the third cylinder. The expansion / contraction characteristics of the notch 213e include the adjustment of the width and length of the notch and the thickness of the tubular member, the type of material of the tubular member, and various treatments applied to the tubular member (thermal treatment and chemical treatment). And other mechanical processing (plastic processing, etc.), and can be adjusted as appropriate by the user. Moreover, although the number of the 3rd notch part is one in the figure, you may provide multiple.

  The upper end of the third rear end portion 213f is connected to the lower end of the third notch portion 213e, and the lower end opening corresponds to the lower end of the third cylindrical body 213. For this reason, in the third cylinder 213, the upper surface of the third tip end portion 213a serving as the upper end thereof contacts the electrode portion, and the lower surface of the third rear end portion 213f serving as the lower end thereof contacts the inspection point. It will be. The length in the major axis direction of the first rear end portion 213f is formed to have a length that allows the lower surface of the third rear end portion 213f to contact the inspection point as described above.

  The third cylinder 213 can be formed of a single conductive cylindrical member, and is formed to have an outer diameter of 20 to 220 μm, an inner diameter of 10 to 200 μm, and a thickness of 5 to 50 μm, for example.

  The length of the third cylinder 213 in the major axis direction is preferably slightly longer than the interval between the lower surface of the first plate member 31 and the upper surface of the second plate member 32 described later. This is because when the first contact 2 is held by the holding body 3, the second notch 213 b is contracted to be in a biased state, and the upper end portion of the third cylinder 213 is constantly pressed against the electrode portion. It is because it will be in a state.

  The third cylinder 213 has its upper end in contact with the electrode part and its lower end in contact with the inspection point, and the third cylinder 313 establishes electrical continuity between the inspection point and the electrode part. . The third cylinder 213 is formed of a conductive material. Although it will not specifically limit as this material if it is a material which has electroconductivity, For example, nickel, nickel alloy, and a palladium alloy can be illustrated.

  The third tip portion 213a, the second notch portion 213b, the intermediate portion 213c, the third notch portion 213e, and the third rear end portion 213f are arranged in the third cylinder 213, respectively. It can also be arranged so as to be symmetrical with respect to 213. When arrange | positioning in this way, the 3rd cylinder 213 will have a symmetrical shape, and since the difference of an up-down direction is lose | eliminated, an assembly becomes easy.

Since the first contact 2 accommodates and arranges the third cylinder 213 which is an inner contact inside the outer contacts (first cylinder 211 and second cylinder 212), as shown in FIG. The insulating coating 213g is preferably formed on the outer peripheral edge of the cylindrical member portion of the third cylinder 213. For example, polyimide, polytetrafluoroethylene (PTFE), or an epoxy resin can be used for the insulating film 213g. The insulating film 213g has a thickness of 1 to 5 μm, for example. In addition, you may form this insulating film also in the outer periphery of a notch part.
The insulating coating 213g is formed on the outer peripheral edge of the third cylinder 213 in the embodiment of FIG. 4, but can also be formed on the inner peripheral edge of the second cylinder 212.

  When the first contactor 2 is pressed by the inspection point or the electrode part, the inspection point includes a lower end of the outer contactor 21 (a lower end of the second cylinder 212) and a lower end of the inner contactor 22 (the first end). The lower end of the three cylinder 213 is in contact with the upper end of the outer contact 21 (upper end of the first cylinder 211) and the upper end of the inner contact (upper end of the third cylinder 213). Abut.

  As shown in FIG. 2, the third cylinder 213 is disposed so as to protrude from the upper end opening of the first cylinder 211 and the lower end opening of the second cylinder 212, but the third cylinder 213. It is also possible to arrange so that does not protrude at all. Since both the first cylinder 211 and the third cylinder 213 are provided with a cutout portion having an expansion / contraction function, the cutout portion is pressed when being pressed from the inspection point or the electrode portion, regardless of which of the two protrudes in plan view. By sufficiently contracting, both the first cylinder 211 and the second cylinder 212 (outer contact) and the third cylinder 213 (inner contact) can come into contact with the inspection point and the electrode part.

  FIG. 5 is a cross-sectional view showing a state in which the first contactor 21 is attached to the holding body. The inspection jig 1 has a holding body 3 for holding the first contactor 21. The holding body 3 includes a first plate member 31 and a second plate member 32.

  The first plate-like member 31 has a first guide upper hole 311 and a first guide lower hole 312 for guiding the lower end of the first contactor 21 to the inspection point. The first guide upper hole 311 is formed to have an inner diameter that is slightly larger than the outer diameter of the first cylinder 211. The first guide lower hole 312 is connected to the first guide upper hole 311 so as to have an inner diameter slightly smaller than the outer diameter of the first cylinder 211 and slightly larger than the outer diameter of the second cylinder 212. Is formed.

By forming the first guide upper hole 311 and the first guide lower hole 312 in this way, when the first contactor 21 is inserted from a second guide hole 321 described later and held by the holding body 3, The first contactor 21 can be locked by the difference between the outer diameter of the lower end of the first rear end portion 211d of the one cylinder 211 and the diameter of the first guide lower hole 312. Furthermore, since the difference between the outer diameter of the first rear end portion 211d and the inner diameter of the first guide upper hole 312 is small, the first contactor 21 can be held on the holding body 3 with higher accuracy.
The thickness of the first plate member 31 is not particularly limited, but is preferably shorter than the length of the first rear end portion 211d. This is because the first rear end portion 211 d can reliably expand and contract along the first guide upper hole 311.

  The second plate member 32 is disposed with a predetermined distance from the first plate member 31 and has a second guide hole 321 for guiding the upper end of the first contactor 21 to the electrode part 41. . The second guide hole 321 is formed to have a diameter slightly larger than the outer diameter of the first cylinder 211. The thickness of the second plate member 32 is not particularly limited, but is preferably shorter than the length of the first tip portion 211a. This is because the first tip portion 211a is reliably guided along the second guide hole 321. Moreover, although the space | interval of the 1st plate-shaped member 31 lower surface and the 2nd plate-shaped member 32 upper surface is not specifically limited, It is slightly shorter than the length (length of an outer contactor and an inner contactor) of the 1st contactor 21. It is arranged to become.

  When attaching the first contact 2 to the holding body 3, the lower end of the first contact 2 is passed through the second guide hole 321, and then into the first guide upper hole 311 and the first guide lower hole 312. Install through this lower end. At this time, the first contact 2 is disposed so as to protrude outward from the first guide lower hole 312 and the second guide hole 321, respectively.

  An electrode portion 41 corresponding to each first contact 2 is formed on the connection electrode body 4 of the inspection jig 1. The electrode part 41 includes a first electrode part 411 that comes into contact with the first cylinder 211 and a second electrode part 412 that comes into contact with the third cylinder 213.

The electrode portion 41 shown in FIG. 5 includes a first electrode portion 411 and a second electrode portion 412. These electrode portions are each formed of a conductive wire, and each end surface is an end portion of each cylindrical body. It is formed to contact. The first electrode portion 411 and the second electrode portion 412 are formed so as to be in contact with the respective cylinders and to be disposed at the farthest position (position having the largest space).
In addition to the structure shown in FIG. 5, the structure of the electrode portion 41 is, for example, a coaxial structure in which an inner conductor is coaxially arranged inside a cylindrical outer conductor using an electric wire having a structure such as a coaxial cable. You can also The inner conductor may be a solid cylindrical shape or a hollow cylindrical shape. In this case, the outer conductor of this electrode portion corresponds to the first electrode portion 411, and the inner conductor corresponds to the second electrode portion 412.

  FIG. 6 is a schematic cross-sectional view showing a state at the time of inspection of the inspection jig using the first contact. When the first contactor 21 is attached to the holding body 3, the first contactor 21 is inserted from the second guide hole 321 of the second plate-like member 32, and the first guide upper hole 311 of the first plate-like member 31 is connected to the first contactor 21. Guided to the guide pilot hole 312. At this time, in the first contactor 21, the first cylindrical body 211 is locked at a boundary where the diameters of the first guide upper hole 311 and the first guide lower hole 312 are different.

After the first contact 21 is inserted into the holding body 3, the second plate member 32 is brought into contact with the connection electrode body 4 so that the upper end of the first contact 21 is pressed against the electrode portion 41. At this time, since the outer contact 21 and the inner contact 22 of the first contact 21 are pressed against the first electrode portion 411 and the second electrode portion 412, respectively, the first notch portion 211b and the second notch portion respectively. 213b contracts and enters an energized state. For this reason, the lower end of the outer contact (second lower end 212c of the second cylinder 212) and the lower end of the inner contact (lower surface of the third rear end 213f of the third cylinder 213) are inspected. Regardless of whether or not they contact the point, the upper ends of the outer contact and the inner contact are in constant contact with the respective electrode portions 41. Further, the third notch 213e to be arranged on the lower end side of the inner contact 22 is in a natural length state and awaiting inspection, and this notch is only in the third cylinder 213 during actual inspection. It contracts in the major axis direction. Note that the first notch 211b of the outer contact contracts when the upper end of the outer contact (the upper end of the first cylinder 211) is pressed against the electrode portion, but the lower end (first of the outer contact) It is preferable that the lower end of the two-cylinder body 212 be formed so that it can contract even when it comes into contact with the inspection point.
The above is the description of the configuration of the inspection jig of the first embodiment.

  As described above, the first contact 1 includes the first cylinder 211, the second cylinder 212, and the third cylinder 213, and is formed of a conductive material. The first contact 1 needs to be formed by thinning the contact itself in accordance with the miniaturization and complexity of the object to be inspected. On the other hand, in order for the contact to expand and contract in the direction perpendicular to the holding plate, the probe itself must be formed to have an expansion / contraction function. However, when a portion having an expansion / contraction function is formed by a coil spring using a conventional winding, the outer diameter of this portion depends on the size of the diameter of the winding itself. This means that it is difficult to form a coil spring having a diameter smaller than about four times the diameter of the winding. In particular, it is extremely difficult to form a coil spring having an outer diameter of 100 μm or less. Moreover, even if such a coil spring can be formed to manufacture a contactor, it is expensive to use for an inspection jig composed of 2 to 4,000 contacts due to problems of assembly and manufacturing cost. It was too much to have practical problems.

  Therefore, in the present invention, a fine contact can be easily produced at a lower cost by using the following production method. In this manufacturing method, the following two manufacturing methods can be disclosed.

[Production Example 1]
(1) First, a core wire (not shown) that forms the hollow portion of the first cylindrical body 211 is prepared. In addition, this core wire uses the core wire (For example, diameter 30 micrometers, stainless steel (SUS)) of the desired thickness which prescribes | regulates the internal diameter of the 1st cylinder 211. FIG.

(2) Next, a photoresist film is applied to the core wire (stainless steel wire) to cover the peripheral surface of the core wire. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, the core wire can be rotated along the central axis and exposed by a laser to form a spiral mask. In order to form the first cylinder 211 of the present invention, the notch (the first notch 211b) is formed at a predetermined position (substantially the center of the first cylinder).

(3) Next, nickel plating is performed on this core wire. At this time, since the core wire is conductive, the portion where the photoresist mask is not formed is plated with nickel.

(4) Next, the photoresist mask is removed, the core wire is drawn, and the first cylinder 211 having a desired length is formed. It goes without saying that the cylinder may be cut after the core wire is completely pulled out.

  Moreover, the 1st cylinder 211 can also be manufactured with the following method.

[Production Example 2]
First, a core wire (not shown) that forms the hollow portion of the first cylinder 211 as described above is prepared. The core wire is plated with nickel to a desired thickness, and a nickel plating layer is formed on the peripheral surface of the core wire.

(2) Next, a photoresist is applied to the surface of the nickel plating layer. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, it is possible to form a spiral mask by forming a core line along the central axis and exposing with a laser. In order to form the first cylinder 211 of the present invention, the notch (the first notch 211b) is formed at a predetermined position (substantially the center of the first cylinder).

(3) Next, the nickel plating is removed by etching. At this time, the nickel plating in a portion where the photoresist mask is not formed is removed.

(4) Next, the photoresist mask is removed, the core wire is drawn, and the first cylinder 211 having a desired length is formed. It goes without saying that the cylinder may be cut after the core wire is completely pulled out.

In the conventional coil spring system using a winding, depending on the diameter of the winding material, it is difficult to form a coil having a diameter smaller than about four times the diameter, and it is possible to form a coil spring of 100 μm or less. It was extremely difficult. The first cylindrical body 211 of the present invention by the above manufacturing method is manufactured by extracting the core wire after nickel-plating the core wire to form a desired shape, so that a coil spring type using a conventional winding is used. As a result, the thickness of the spring material can be reduced, and at the same time, a fine outer diameter and inner diameter can be collectively manufactured with high accuracy and flexibility.
Needless to say, in [Production Method 1] and [Production Example 2], a photoresist mask may be formed for cutting the cylinder.

  Although the manufacturing method of the 1st cylinder 211 is above, the manufacturing method of the 2nd cylinder 212 in this invention is a point other than the point from which the formation of a photoresist mask is unnecessary, and the diameter and internal diameter of a cylindrical member differ. Since this is the same as the manufacturing method of the first cylinder 211, the description thereof is omitted.

  In the third cylinder 213 of the present invention, two notches (second notch 213b and third notch 213e) are formed with a predetermined distance (distance corresponding to the length of the intermediate portion 213c). Become. For this reason, the location and number of photoresist masks are different. Moreover, the diameter and inner diameter of the cylindrical member are also different from those of the first cylindrical body. Except for these points, the manufacturing method is the same as the manufacturing method of the first cylinder 211, and the description of the manufacturing method is omitted.

  Next, the inspection jig 1 'according to the second embodiment will be described. FIG. 7 is a schematic cross-sectional view of a contact (second contact) according to the second embodiment of the present invention. FIG. 8 is a schematic cross-sectional view of an inspection jig using the second contact. FIG. 9 is a schematic cross-sectional view showing the state of operation of the inspection jig using the first contact. The second contact 2 'has a basic configuration substantially the same as that of the first contact 2 described above, and the first cylinder 211' and the second cylinder constituting the outer contact 21. 212 and a third cylindrical body 223 to be the inner contact 22. Further, the second contact 2 ′ accommodates the second cylinder 212 inside the first cylinder 211 ′ as the outer contact 21, and the inner contact 22 inside the second cylinder 212. The third cylinder 223 is accommodated (see FIG. 7). Note that the second contact 2 'and the first contact 2 have similar configurations, and in the following description, different configurations will be described, and description of the same configurations will be omitted.

  The main difference between the first contact 2 and the second contact 2 ′ is the length in the major axis direction of the first cylinder 211 ′, and the first cylinder 211 ′ of the second contact 2 ′ is The first contactor 2 is formed to be shorter than the length in the major axis direction of the first cylinder 211. In particular, the first rear end portion 211 d ′ of the second contact 2 ′ is formed to be shorter than the length of the first rear end 211 d of the first contact 2 in the major axis direction.

  Further, in the embodiment of the second contact 2 ′ shown in FIG. 7, three notches formed in the third cylindrical body 223 of the inner contact 22 are formed, but a third fixing portion 223f described later is formed. With the above as a boundary, it is sufficient that at least one notch portion is formed on each of the upper end side and the lower end side of the third cylinder 223. In the second contact 2 'shown in FIG. 7, two notches 223b and 223d are formed on the upper end side of the third fixed portion 223f, and the lower end thereof is formed. One cutout portion of the fourth cutout portion 223g is formed on the side. The second notch 223b and the third notch 223d generate a pressing force for pressing the inner contact 22 to the electrode portion, and the fourth notch 223g is for the inner contact 22 to press the inspection point. This will generate a pressing force.

  As described above, the second contact 2 'has the third fixing portion 223f, and the third fixing portion 223f is formed in the second intermediate portion 223e (see FIG. 7). The third fixing portion 223f is a portion that fixes the third cylinder 223 and the second cylinder 212 in a non-conductive state. The first cylinder 211 ′ and the second cylinder 212 are electrically connected and fixed by the first fixing part 211c and the second fixing part 212b, and further, the second cylinder 212 and the second cylinder 212 are fixed by the third fixing part 223f. Since the three cylinders 223 are fixed, the first to third cylinders are fixed together.

  The third fixing portion 223f shown in FIG. 7 is shown as a concave shape that curves inward on the wall surface of the second intermediate portion 223e. This concave portion accommodates the third cylindrical body 223 inside the second cylindrical body 212. The third cylinder 223 is not formed in advance. In addition, this concave portion is pressed (caulked) inward from the outermost first cylindrical body 211 ′ side in order to fix the first cylindrical body 211 ′, the second cylindrical body 212, and the third cylindrical body 223 as one body. ). The fixing method of the first to third cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used. Note that this fixing method may be divided into two stages so that the first cylinder is fixed to these cylinders after the second cylinder and the third cylinder are fixed.

  In the embodiment of the second contact 2 ′, unlike the first contact 2, the insulating coating 223i of the third cylinder 223 is formed so as to cover the entire surface of the third cylinder 223, The surface of the cylindrical member (the third tip portion 223a, the second intermediate portion 223c, the third intermediate portion 223e, the third rear end portion 223h) and the notch portions (the second notch portion 223b, the third notch portion 223d, the second Four cutouts 223g) are respectively formed on the surface. As shown in the embodiment of the first contact 2, the insulating coating 223 i may be formed only on the cylindrical member, or may be formed on the inner surface of the second cylindrical body 212.

  As shown in FIG. 7, the third cylinder 223 is disposed so as to protrude from the upper end opening of the first cylinder 211 ′ and the lower end opening of the second cylinder 212. It can also arrange so that it may not protrude at all. Since both the first cylinder 211 ′ and the third cylinder 223 are provided with a cutout portion having an expansion / contraction function, the cutout portion is pressed when pressed from the inspection point or the electrode portion, regardless of which of the two protrudes in plan view. By sufficiently contracting the part, each of the outer contact 21 and the inner contact 22 can come into contact with the inspection point and the electrode part.

  In the second contact 2 ′ shown in FIG. 7, three cylindrical members are arranged at predetermined positions in order to fix the first cylindrical body 211 ′, the second cylindrical body 212, and the third cylindrical body 223. Then, by pressing (caulking) from the outer side to the inner side of the first cylindrical body 211 ′, the respective cylindrical members are integrally fixed at the same place. The fixing method of each cylindrical member is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used. In addition, after all the 1st thru | or 3rd cylinders as mentioned above are arrange | positioned, you may form so that all the cylinders may be fixed, and after fixing the 1st and 2nd cylinders first, You may make it fix a cylinder. Or after fixing a 2nd cylinder and a 3rd cylinder, you may make it fix a 1st cylinder. The second cylinder 212 and the third cylinder 223 need to be fixed in a non-conductive state.

FIG. 8 is a schematic cross-sectional view showing a state in which the second contact 2 ′ is attached to the holding body 3. The inspection jig 1 ′ of the second embodiment is assembled by holding the second contact 2 ′ by the holding body 3 having the first plate-like member 33 and the second plate-like member 32. At this time, the first guide hole 331 formed in the first plate-like member 33 is different from the case of the inspection jig 1 of the first embodiment, and only a through hole having a predetermined diameter is formed.
The first guide hole 331 of the first plate member 33 is formed to have a diameter slightly smaller than the outer diameter of the first cylinder 211 ′ and slightly larger than the outer diameter of the second cylinder 212. Yes. By forming the first guide hole 331 in this manner, the second contact 2 ′ is locked by the step between the first cylinder 211 ′ and the second cylinder 212. Become. That is, the second cylindrical body 212 can pass through the first guide hole 331 of the first plate-shaped member 33, but the first cylindrical body 211 ′ cannot pass through the first guide hole 331. It is possible to prevent the two-contact 2 'from coming out.

  At this time, the second contact 2 ′ has the first rear end portion 211d ′ so that the fourth notch 223g of the third cylindrical body 223 exists and is locked inside the first guide hole 331. Preferably it is formed. By forming the second contact 2 ′ in this way, it is possible to increase the number of parts that are inserted into the first guide holes 331 of the second cylinder 212 and the third cylinder 223. The end 212c and the third rear end 223i can contact the inspection point with high accuracy.

  After holding the second contact 2 ′ on the holding body 3, the second plate member 32 is brought into contact with the connection electrode body 4 so that the upper end of the second contact 2 ′ is pressed against the electrode part 41. . At this time, the first cylinder 211 ′ and the third cylinder 223 of the second contact 2 ′ are pressed against the first electrode part 411 and the second electrode part 412, respectively. The cutout portion 211b, the second cutout portion 223b, and the third cutout portion 223d contract and become biased, and the first tip portion 211a of the first cylinder 211 ′ and the third tip portion 223a of the third cylinder 223 are in contact with each other. Regardless of whether or not it comes into contact with the inspection point, the electrode portion 41 is constantly contacted. Further, the fourth cutout portion 223g of the third cylinder 223 to be arranged on the lower side is in a waiting state for inspection in a natural length state, and this cutout portion expands and contracts only during actual inspection. .

When the inspection is performed using the inspection jig having the second contact 2 ', the lower ends of the second and third cylinders abut on the inspection point. At this time, since the second cylinder 212 is fixed to the first cylinder 211 ′ by the second fixing portion 212b, the first notch 211b of the first cylinder 211 ′ contracts and the third cylinder 211 contracts. In 223, the fourth notch 223g contracts.
The above is the description of the inspection jig of the second embodiment.

Next, the contact (third contact) of the third embodiment will be described. The third contact 2 ″ has substantially the same configuration as that of the second contact 2 ′, and the description will focus on the different configuration. The third contact 2 '' shown in FIG. 10 is a fixed location for connecting and fixing the first cylinder 211 ', the second cylinder 212', and the third cylinder 223, as compared with the second contact 2 '. Is different. In the third contact 2 '', a first fixing portion 211c and a second fixing portion 212b for connecting and fixing the first cylinder 211 'and the second cylinder 212' in a conductive state are formed, and the second cylinder 212 is formed. A third fixing portion 212b 'and a fourth fixing portion 223f for connecting and fixing' and the third cylinder 223 in a non-conductive state are formed. As shown in FIG. 10, these fixed portions have the same positions of the first cylindrical body 211 ′ and the second cylindrical body 212 ′ and the fixed positions of the second cylindrical body 212 ′ and the third cylindrical body 223. It is set at a different position, not a position. By fixing in this way, the third cylinder and the second cylinder are fixed first, the first cylinder is fixed to these cylinders, and the assembly of the contactor is performed. The assembly process can be divided and performed, and the assembly process becomes easy.
In addition, the above-mentioned method can be utilized for the fixing method of these fixing | fixed parts, and description is abbreviate | omitted.

  In the third contact 2 '' of FIG. 10, these fixing portions are formed so as to be arranged at the position of the second intermediate portion 223e of the third cylinder 223, and the respective fixing portions are formed at this position. As a result, the notch portion positioned on the upper end side from this position generates a pressing force pressed against the electrode portion 41, and the notch portion positioned on the lower end side from this position is pressed against the inspection point. A pressing force is generated.

Since the first to third contacts of the present invention are formed from the three cylindrical bodies as described above, the lower end (inspection point) of the two terminals on the upper end (electrode part) of the contact is lower. The pitch of the two terminals can be reduced. In addition, by using the second cylinder as a guide for the first cylinder and the third cylinder, the strength of the contact can be ensured and both can be expanded and contracted vertically. Furthermore, it is possible to reduce the number of guide holes formed in the holding body that holds the contact, and to reduce the number of assembly steps.
The above is the description of the inspection jig of the third embodiment.

  In addition, at the top ends of the first to third contacts, the tip of the lower end and the tip may be formed with a tapered portion or a crown shape having a plurality of convex portions. .

  The first to third contact elements are formed by combining three cylindrical members, but a cylindrical member that is an inner contact element is arranged in the innermost portion, and is formed by a second cylindrical body and a first cylindrical body. As in the case of the outer contact, a plurality of cylindrical members with gradually increasing diameters can be combined to form an outer contact.

DESCRIPTION OF SYMBOLS 1 ... Inspection jig 2 ... Contact 211 ... First cylinder 211b First notch 211c First fixing part 212 Second cylinder 212b Second fixing part 213 ··· Third cylinder 213b · Second notch portion 213e · Third notch portion 213d · Third fixing portion 3 ··· Holding body 31 ··· First plate member 311 · · First guide hole 32 ··· Second plate member 321 Second guide hole 4 Connection electrode body 41 Electrode part 5 Conductor part

Claims (9)

An inspection jig for electrically connecting an inspection object having an inspection point to be inspected and an inspection device for inspecting the electrical characteristics of the inspection part,
A connection electrode body comprising a plurality of electrode portions electrically connected to the inspection device;
A conductive cylindrical first cylinder whose upper end is pressed against the electrode part; and
It protrudes from the lower end opening of the first cylinder and is electrically connected to the first cylinder and arranged coaxially. The upper end is arranged inside the first cylinder and the lower end is A conductive cylindrical second cylinder pressed against the inspection portion;
The first cylinder and the second cylinder are not electrically connected to each other and are coaxially accommodated in the first cylinder and the second cylinder. The upper end is pressed against the electrode portion and the lower end is A conductive cylindrical third cylinder pressed against the inspection portion;
A first plate-like member having a first guide hole for guiding the lower end of each of the second cylinder and the third cylinder to the inspection point;
A second plate having a second guide hole for guiding the upper end of each of the first cylinder and the third cylinder to the electrode portion, and being arranged at a predetermined interval from the first plate member. And a member
The first cylinder is
A spiral first notch is provided in the cylindrical wall portion between the upper end and the lower end of the first cylindrical body,
The third cylinder is
A spiral second notch is provided in the cylindrical wall between the upper and lower ends of the third cylinder,
The first cylinder is
An inspection jig having a first fixing portion fixed to the second cylindrical body on the lower end side from the first notch portion.   2. The inspection jig according to claim 1, wherein the first guide hole has a diameter smaller than an outer diameter of the first cylinder and slightly larger than an outer diameter of the second cylinder.   3. The inspection jig according to claim 1, wherein the third cylindrical body has one notch provided in a lower side of the third cylindrical body inside the first guide hole. . The first guide hole is
A first guide upper hole having a diameter slightly larger than the outer diameter of the first cylinder;
The first guide lower hole is connected to the first guide upper hole and has a diameter smaller than the outer diameter of the first cylinder and slightly larger than the outer diameter of the second cylinder. The inspection jig according to claim 1.   The third cylindrical body includes two spiral second cutout portions at a distance from each other in a cylindrical wall portion between an upper end and a lower end, and the second cylindrical cutout portion between the two second cutout portions. The inspection jig according to claim 1, further comprising a second fixing portion fixed to the two cylinders.   The inspection according to any one of claims 1 to 5, wherein the third cylindrical body is provided with a second cutout portion so as to have a substantially symmetric shape with respect to the center of the third cylindrical body. Jig. A contact for use in an inspection jig for electrically connecting an inspection object having an inspection point to be inspected and an inspection device for inspecting the electrical characteristics of the inspection part,
A conductive cylindrical first cylinder whose upper end is pressed against the electrode part; and
It protrudes from the opening at the other end of the first cylinder and is electrically connected to the first cylinder so as to be coaxially arranged. The upper end is arranged inside the first cylinder and the lower end is A conductive cylindrical second cylinder pressed against the inspection portion;
The first cylindrical body and the second cylindrical body are not electrically connected to each other, and are accommodated coaxially in the first cylindrical body and the second cylindrical body, and the upper end is pressed against the electrode portion and the lower side. A conductive cylindrical third cylinder whose end is pressed against the inspection section;
The first cylinder is
A spiral first notch is provided in the cylindrical wall portion between the upper end and the lower end of the first cylindrical body,
The third cylinder is
Two spiral second cutout portions are provided at a distance from each other in a cylindrical wall portion between an upper end and a lower end of the third cylindrical body,
The first cylinder is
It has a first fixing part to which the second cylindrical body is fixed on the lower end side from the first notch part,
The third cylinder is
A contact having a second fixing portion fixed to the second cylinder between the two second notches.   The contact according to claim 7, wherein the third cylindrical body is provided with a second cutout portion so as to have a substantially symmetric shape with respect to the center of the third cylindrical body. A contactor used for an inspection jig for electrically connecting an inspection object having an inspection part to be inspected and an inspection apparatus for inspecting an electrical characteristic of the inspection part,
An inner contact formed from a conductive cylindrical member, one end of which is pressed against the electrode portion and the other end is pressed against the inspection point;
The inner contact is accommodated in a non-conductive state inside, and has an outer contact made of a conductive cylindrical member whose one end is pressed against the electrode portion and the other end is pressed against the inspection point,
The inner contact and the outer contact are provided with a spiral notch in the cylindrical wall portion between the one end and the other end,
A contactor, wherein an outer wall surface of a cylindrical member of the outer contactor is formed so as to increase gradually or stepwise from the other end side along the one end side.

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