JP2012251837A - Connection terminal, method of manufacturing connection terminal, and micro spring - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connection terminal and a method of manufacturing the same such that an object point set to even a very small object can be suitably connected and mass-productivity is superior.SOLUTION: The method of manufacturing the connection terminal includes the processes of: plating the entire surface of a rod member comprising a core material with a non-conductive outer peripheral surface, a conductive winding conductor which is wound spirally around the outer peripheral surface of the core material, and an insulating coating covering the core material and the winding conductor at a predetermined place; removing the insulating coating from the road member having been plated; removing the winding conductor exposed on a surface of the rod member from which the insulating coating is removed; and removing the core material from the rod member from which the winding conductor is removed.

Description

  The present invention relates to a connection terminal for electrically connecting two predetermined target points set in advance on an object, and a method for manufacturing the connection terminal. The present invention also relates to a fine spring in which both ends abut against a predetermined part of an object and urge the predetermined part.

  The connection terminal electrically connects between two predetermined target points set in advance on the target object, and enables transmission and reception of electrical signals between the target points. Examples of such objects include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode boards for liquid crystal displays and plasma displays, package boards for semiconductor packages, and film carriers, semiconductor wafers and semiconductor chips. And semiconductor devices such as LSI (Large Scale Integration) such as CSP (chip size package). This connection terminal can also be used for the purpose of electrically connecting the above-mentioned object and the device, and further, a connection treatment such as an interposer or connector for electrically connecting the electrode end to the electrode end. It can also be employed as a connection terminal used for tools.

  In the present specification, a part on the object that is brought into conduction when the connection terminal comes into contact with the part on the object that comes into contact with and presses the end of the spring member is referred to as a “target point”.

  When the object is an LSI, an electronic circuit formed on the LSI is a target portion, and each surface pad of the electronic circuit is a target point. In this case, in order to ensure that the electronic circuit formed in the LSI has the desired electrical characteristics, the electrical characteristics between the target points are measured to judge the quality of the electronic circuit. .

  Further, when the object is a substrate on which electric / electronic components are mounted, the wiring formed on the substrate is the target portion, and both ends of the wiring are the target points. In this case, in order to ensure that the wiring as the target part can accurately transmit the electrical signal to them, between the predetermined target points on the wiring formed on the wiring board before mounting the electric / electronic component. The electrical characteristics such as resistance value and leakage current are measured to judge the quality of the wiring.

  In addition, when used as a connection terminal used in a connection jig such as an interposer, both ends of the connection terminal provided in the connection jig are the respective members in order to electrically connect two members having electrodes. Will be connected to the other electrode. In such a case, each member having an electrode to be connected is a target portion, and the electrode of this member is a target point. An example of using such a connection jig is a probe card. This probe card is used in a WLT (Wafer Level Test) for detecting a defective product by conducting a continuity test by contacting a conductive probe in a state of a semiconductor wafer before dicing, for example. The probe card contains a large number of probes for transmitting inspection signals generated and transmitted by the inspection apparatus to the semiconductor wafer, and a connection jig is used to electrically connect the probes to the inspection apparatus. There is an interposer inside.

JP 2007-155507 A JP 2009-160722 A

  Patent Document 1 discloses a probe card including an interposer that is a connection terminal by inserting a coil spring into a housing that is a base material of the interposer.

  In Patent Document 2, a resist film is formed on the outer peripheral surface of a metal micropipe having an outer diameter of 100 μm or less, and a helical space pattern is formed on the resist film by, for example, exposing and developing the photosensitive portion in a spiral shape. A method of simultaneously forming a plurality of microcoils (fine springs) separated by a space pattern by forming a space pattern that goes around the micropipe at predetermined intervals and etching the space pattern is disclosed.

Patent Document 1 discloses that a coil-like spring member that expands and contracts in the axial direction is provided as a connection terminal of an interposer. Since this spring member is inserted without being fixed to the housing of the interposer, even if there is a problem with one connection terminal, it is possible to replace only that connection terminal, and maintenance such as repair becomes easy. This is a solution issue.
However, since the connection terminal of the interposer of the probe card shown in Patent Document 1 is formed by a coil spring obtained by winding an element wire in a coil shape, when forming a wound coil spring having an outer diameter of 100 μm or less. The coil must be formed of a strand having a diameter about ¼ of the outer diameter. For this reason, it is necessary to manufacture a fine spring using a strand having an extremely small diameter, and the manufacture of such a fine coiled coil spring requires extremely advanced technology. Has become difficult.
In addition, when manufacturing such a coil spring, it is not practical to use it for a probe card using 2,000 to 4,000 connection terminals due to the problem of manufacturing cost, which is not practical. Had.

In Patent Document 2, a resist is applied to the surface of a metal micropipe having an outer diameter of 100 μm or less, exposed to a spiral shape with a laser, and then the micropipe is etched to form a spiral wall portion. A microcoil (fine spring) formed in the above is disclosed.
However, in Patent Document 2, in order to obtain a fine spring with high accuracy, it is necessary to repeat the process of stopping etching once in the middle of etching, measuring the etching amount, obtaining the etching rate, and starting etching again. For this reason, there is a problem that a lot of man-hours and time are required.

  From such a problem, even for a minute object, it is possible to suitably connect the object point set to the object and to create a connection terminal excellent in mass productivity and a method for manufacturing the same. It has been.

The invention according to claim 1 is a connection terminal that abuts two predetermined terminals through which an electric signal is transmitted and received and electrically connects the predetermined terminals, and has a rectangular shape having an elongated front and back surface and two elongated side surfaces. The member is formed with a predetermined thickness from the front surface and two side surfaces excluding the back surface of the first conductive portion and the conductive first conductive portion formed in a hollow spiral with the back surface disposed inside. The connecting terminal is characterized in that the inner surface of the spiral is formed so that the first conductive portion and the second conductive portion are flush with each other.
The invention according to claim 2 is characterized in that one end of the second conductive portion is in conductive contact with the one predetermined terminal, and the other end of the second conductive portion is in conductive contact with the other predetermined terminal. The connection terminal according to claim 1 is provided.
The invention according to claim 3 is characterized in that the conductivity of the first conductive portion is higher than the conductivity of the second conductive portion, and the strength of the first conductive portion is lower than the strength of the second conductive portion. A connection terminal according to claim 1 or 2 is provided.
The invention according to claim 4 is a connection terminal for electrically connecting two terminals through which electric signals are transmitted and received, and is connected to the surface of one end opening connected to the one terminal and the other terminal. And the cylinder has a two-layer structure including a first conductive portion and a second conductive portion, and the inner surface of the cylinder has the first conductive portion Formed by the conductive portion and the second conductive portion, the outer surface of the cylinder is formed only by the second conductive portion, and the cylindrical wall portion is formed as a spiral spring portion extending and contracting in the long axis direction; When the surface perpendicular to the spiral direction of the spring portion is taken as a cross section, the peripheral edge of the first conductive portion other than the portion serving as the inner surface of the cylinder where the spring portion is formed is in contact with the second conductive portion. A connection terminal is provided.
According to a fifth aspect of the present invention, the surface of the one end opening is formed by the first conductive portion and the second conductive portion, and the surface of the other end opening is the first conductive portion and the second conductive portion. 5. The connection terminal according to claim 4, wherein the first conductive portion is formed with a conductivity higher than that of the second conductive portion.
The invention according to claim 6 is a connection terminal for electrically connecting two terminals through which electric signals are transmitted and received, and is connected to the surface of one end opening connected to the one terminal and to the other terminal. The other end opening surface is formed in a cylindrical shape, and the cylinder has a two-layer structure including a first conductive portion and a second conductive portion. The outer surface of the cylinder is formed only by the second conductive portion, and the surface of the one end opening is formed by the first conductive portion and the second conductive portion. The surface of the other end opening is formed by the first conductive portion and the second conductive portion, and the cylindrical wall portion is formed as a spiral spring portion that expands and contracts in the long axis direction, thereby forming the spring portion. The inner surface of the cylinder is formed along the spiral direction of the spring portion. Wherein the one conductivity portion second conductive portion to provide a connecting terminal which is characterized in that it is arranged.
The invention according to claim 7 provides the connection terminal according to claim 6, wherein the first conductive part is sandwiched between the two second conductive parts.
The invention according to claim 8 is a connection terminal for electrically connecting two terminals through which electric signals are transmitted and received, and is connected to the surface of one end opening connected to the one terminal and to the other terminal. And the cylinder has a two-layer structure including a first conductive portion and a second conductive portion, and the inner surface of the cylinder has the first conductive portion Formed by the conductive portion and the second conductive portion, the outer surface of the cylinder is formed only by the second conductive portion, and the surface of the one end opening is formed by the first conductive portion and the second conductive portion. The surface of the other end opening is formed by the first conductive portion and the second conductive portion, and the cylindrical wall portion is formed as a spiral spring portion extending and contracting in the long axis direction. The shape of the first conductive part on the surface and / or the surface of the other end opening is one end opening. Providing a connection terminal, which is a ring-shaped.
According to a ninth aspect of the present invention, the surface of the first conductive portion formed on the surface of the one end opening and / or the surface of the other end opening is recessed from the surface of the second conductive portion. The connection terminal according to claim 8, wherein the connection terminal is provided.
The invention according to claim 10 is a method of manufacturing a connection terminal for electrically connecting two terminals through which electric signals are transmitted and received, wherein the outer peripheral surface is a non-conductive core material, and the outer peripheral surface of the core material A conductive winding conductor wound in a spiral shape, a step of plating the entire surface of a rod-shaped member on which an insulating coating covering the core material and the winding conductor is formed at a predetermined location, and a bar shape subjected to the plating Removing the insulating coating from the member; removing the winding conductor exposed on the surface of the rod-shaped member from which the insulating coating has been removed; and removing the core from the rod-shaped member from which the winding conductor has been removed. The manufacturing method of the connecting terminal characterized by including the process to perform.
The invention according to claim 11 is a rod-shaped member having an insulating coating at a predetermined location by removing one or more insulating coatings from a rod-shaped member having an insulating coating formed over the entire length over the entire circumference of a predetermined length. It has the process of forming, The manufacturing method of the connecting terminal of Claim 10 characterized by the above-mentioned is provided.
According to a twelfth aspect of the present invention, in the connection terminal according to the eleventh aspect, a plurality of portions of the insulating film having a predetermined length to be removed are formed and arranged with a predetermined interval. A manufacturing method is provided.
A thirteenth aspect of the present invention provides the method of manufacturing a connection terminal according to the tenth aspect, wherein the method of removing the insulating film having a predetermined length is a method of removing using a laser.
The invention described in claim 14 is characterized in that the method of removing the remaining insulating film is a method of dissolving the insulating film of the rod-shaped member or a method of using a laser. A method of manufacturing a connection terminal is provided.
The invention according to claim 15 provides the method of manufacturing the connection terminal according to claim 10, wherein the strength of the plating layer formed by the plating is higher than the strength of the wound conductor.
According to a sixteenth aspect of the present invention, there is provided the method for manufacturing a connection terminal according to the tenth aspect, wherein an outer diameter of the connection terminal is 30 to 200 μm.
The invention according to claim 17 is a fine spring which abuts against two predetermined terminals and presses the two predetermined terminals, and has an outer diameter of 30 to 200 μm, and has an elongated front and back surface and two elongated side surfaces. The rectangular member is provided with a first layer formed in a hollow spiral with the back surface disposed inside, and a second layer formed with a predetermined thickness from the surface and two side surfaces of the first layer. The inner surface of the spiral is formed such that the first layer and the second layer are flush with each other.

According to invention of Claim 1, even if it is a minute target object, the connection terminal which can connect suitably the target point set to the target object can be provided.
According to the second aspect of the invention, since the second conductive portion directly contacts and presses the predetermined terminal, the strength of the connection terminal can be adjusted by the material used for the second conductive portion.
According to the third aspect of the present invention, the conductivity of the first conductive portion is higher than the conductivity of the second conductive portion, and the strength of the first conductive portion is lower than the strength of the second conductive portion. A connection terminal having high conductivity and high strength at the second conductive portion can be provided.

According to invention of Claim 4, even if it is a minute target object, the connection terminal which can connect suitably the target point set to the target object can be provided. Further, the inner surface of the connection terminal is formed by the first and second conductive portions, the outer surface is formed by only the second conductive portion, and the cross section of the spiral portion is such that the second conductive portion is in contact with the peripheral edge of the first conductive portion. Therefore, it is possible to provide a connection terminal that can be easily adjusted so as to have suitable conductivity and strength.
According to the invention of claim 5, the surface of the one end opening is formed by the first conductive portion and the second conductive portion, the surface of the other end opening is formed by the first conductive portion and the second conductive portion, Since the conductivity of the first conductive portion is formed higher than the conductivity of the second conductive portion, it is possible to provide a connection terminal having excellent conductivity.

According to invention of Claim 6, even if it is a minute target object, the connection terminal which can connect suitably the target point set to the target object can be provided. Further, the inner surface of the connection terminal is formed by the first and second conductive portions, the outer surface is formed only by the second conductive portion, and the spring portion is formed on the inner surface of the cylinder on which the spring portion is formed. Since the first conductive portion and the second conductive portion are arranged along the spiral direction, a connection terminal that can be easily adjusted to have suitable conductivity and strength can be provided.
According to the seventh aspect of the present invention, since the first conductive portion is sandwiched between the two second conductive portions, it is possible to provide a connection terminal that can be easily adjusted to have suitable conductivity and strength.

According to invention of Claim 8, even if it is a minute target object, the connection terminal which can connect suitably the target point set to the target object can be provided. Further, the inner surface of the connection terminal is formed by the first and second conductive portions, and the outer surface is formed only by the second conductive portion, and the surface of the one end opening and / or the surface of the other end opening is formed. Since the shape of the first conductive portion is formed in a ring shape with one end opening, it is possible to provide a connection terminal that can be easily adjusted so as to have suitable conductivity and strength.
According to invention of Claim 9, the surface of the 1st electroconductive part currently formed in the surface of the opening part of one end and / or the opening part of the other end is formed indented from the surface of the 2nd electroconductive part. Therefore, since the second conductive part directly contacts and presses the predetermined terminal, the strength of the connection terminal can be adjusted by the material used for the second conductive part.

According to invention of Claim 10, even if it is a minute target object, the manufacturing method of the connecting terminal which can connect suitably the target point set to the target object can be provided.
According to the eleventh aspect of the present invention, since the connection terminals are manufactured using the rod-like member having an insulating film formed on the entire length and the entire circumference, a plurality of connection terminals can be manufactured in large quantities at a time.
According to the twelfth aspect of the present invention, since a plurality of portions of the insulating film having a predetermined length to be removed are formed and arranged with a predetermined interval, a plurality of connection terminals can be manufactured at a time.
According to the thirteenth aspect of the invention, since the method for removing the insulating film having a predetermined length is a method for removing the insulating film using a laser, the insulating film can be efficiently removed.
According to the fourteenth aspect of the invention, since the method for removing the remaining insulating film is a melting method or a method using a laser, the insulating film can be efficiently removed.
According to the fifteenth aspect of the present invention, since the strength of the plating layer formed by plating is higher than the strength of the wound conductor, the strength of the connection terminal can be improved by the plating layer.
According to the sixteenth aspect of the invention, since the outer diameter of the connection terminal is 30 to 200 μm, it is possible to provide a method for manufacturing an extremely fine connection terminal.

  According to the seventeenth aspect of the present invention, it is possible to provide a connection terminal capable of suitably connecting a target point set to the target object even for a minute target object.

(A) shows the schematic sectional drawing of the rod-shaped member used by this invention, (b)-(f) is a schematic sectional drawing which shows the manufacturing process of the connection terminal which concerns on this invention. It is a front view showing one embodiment of a connection terminal concerning the present invention. It is sectional drawing which shows one Embodiment of the connecting terminal which concerns on this invention, and is the figure which made the surface at right angles to the spiral direction of this spring the cross section of the spring part of a connecting terminal. It is the surface figure which shows one Embodiment of the connecting terminal which concerns on this invention, and is the figure which showed a part of inner surface of a connecting terminal.

The best mode for carrying out the present invention will be described.
An embodiment of a method for producing a connection terminal according to the present invention will be described.
Fig.1 (a) shows the schematic sectional drawing of the rod-shaped member used by this invention, (b)-(f) has shown the manufacturing method of the connection terminal of one Embodiment which concerns on this invention, ( (a)-(f) is a schematic sectional drawing which shows one Embodiment of each process. In this manufacturing method, a connection terminal is obtained through the steps (a) to (f) shown in FIG.
In the specification, the upper and lower expressions when describing the direction of the drawings are expressed with the back side as the upward direction and the near side as the downward direction toward the paper surface.

  Fig.1 (a) shows sectional drawing of the rod-shaped member 10 used in order to manufacture the connection terminal which concerns on this invention. The rod-shaped member 10 is a member for forming a first conductive portion of a connection terminal described later. This rod-shaped member 10 includes a core material 11, a wound conductor 12, and an insulating film 13.

  The core material 11 is a member that becomes the core of the rod-shaped member 10, and the outer peripheral surface is formed of an insulating member. The core material 11 is formed in a columnar shape. The core material 11 is formed to have a size of an outer diameter of 10 to 100 μm.

The outer surface of the core material 11 is formed of an insulating member. However, the core wire 11a may be disposed as an axis of the core material 11, and the outer surface of the core wire 11a may be covered with an insulator 11b. . The core wire 11a is formed in a cylindrical shape having a diameter of 5 to 100 μm, and for example, stainless steel, tungsten, copper, or an alloy thereof can be employed.
The insulator 11b is a non-conductive layer formed on the outer peripheral surface of the core wire 11 over the entire circumference and length of the core wire 11. As the insulator 13, a fluorine resin or a silicone resin having a thickness of 5 to 30 μm can be used.

The wound conductor 12 is a conductive member, and is wound spirally around the outer peripheral surface of the core material 11 with a constant interval P. This constant interval P is an interval between adjacent winding conductors 12 when the winding conductor 12 is wound around the core material 11 (see FIG. 1A). The wound conductor 12 is spirally wound over the entire length of the core member 11 with this constant interval P.
The constant interval P of the winding conductor 12 can be formed to 20 to 150 μm, for example, but is appropriately adjusted according to the cross-sectional shape and the size of the winding conductor 12.
For example, copper, silver, aluminum, or an alloy thereof can be used as the material of the wound conductor 12. In addition, it is desirable to use copper or a copper alloy as a member employed for the winding conductor 12 in consideration of good workability and low cost. The winding conductor 12 can be a thin plate member having an arbitrary length having a rectangular cross section with a short side of 5 to 30 μm and a long side of 10 to 100 μm.
Moreover, it is preferable that this winding conductor 12 employ | adopts the member whose electrical conductivity is higher than the electrical conductivity of the metal used for the plating layer 14 mentioned later. Although this will be described in detail later, this is for the plating layer 14 to ensure the strength of the connection terminal 20 and the winding conductor 12 to ensure the conductivity of the connection terminal 20. In this case, the electrical conductivity of the winding conductor 12 can be improved.

Although the winding conductor 12 will not be specifically limited if it is the shape which can be wound around the core material 11, It forms in the rectangular member which has a long and slender front and back surface and two elongate side surfaces. It is because it becomes easy to wind around the core material 11 by forming in this way.
The wound conductor 12 forms the first conductive portion of the connection terminal 20.

The insulating coating 13 is formed so as to cover the entire circumference of the rod-shaped member 10, and is formed so as to cover the entire surface of the core material 11 and the wound conductor 12. Since the insulating coating 13 is formed of an insulating material and has this member, the surface of the rod-shaped member 10 has insulating properties.
As the material of the insulating coating 13, for example, a resin such as polyurethane or polyethylene can be employed. The insulating coating 13 can be formed to have a thickness of 5 to 50 μm.

  The rod-shaped member 10 has the above-described configuration. For example, a coaxial cable in which two conductive portions are coaxially arranged can be used. In this case, the winding conductor 12 becomes a conductive part arranged outside, and the core wire 11a of the core material 11 becomes a conductive part arranged inside. In addition, the electroconductive part arrange | positioned outside is formed in the helical shape which the above-mentioned winding conductor 12 has.

  The length of the rod-shaped member 10 is preferably 50 cm or less from the viewpoint of ease of carrying work and workability for removing the core material 11 in the final process described later, but may have a length longer than that. . Further, both ends of the rod-shaped member 10 may not be covered with the insulating coating 13.

  Next, the process of manufacturing the connection terminal according to the present invention from the rod-like member 10 shown in FIG. FIGS. 1B to 1F are schematic cross-sectional views showing respective steps in which a connection terminal is manufactured from the rod-like member 10 shown in FIG.

  FIG.1 (b) is a schematic sectional drawing which shows the 1st process which manufactures the connection terminal which concerns on this invention. In this first step, the surface of the rod-shaped member 10 is divided into a portion of the insulating coating 13 and a portion of the core material 11 or the wound conductor 12. By dividing the surface in this manner, in the step of applying plating described later, the portion of the insulating coating 13 and the portion of the core material 11 are not plated, and the portion of the wound conductor 12 where the insulating coating 13 is not formed is formed. Only plating will be formed. Note that the portion where the insulating coating 13 is formed is a cut portion of the connection terminal 20.

In FIG. 1B, since the insulating coating 13 is formed over the entire rod-shaped member 10, the insulating coating 13 at a predetermined location is removed. As described above, the portion where the insulating coating 13 remains is a portion where the connection terminal 20 is cut, and the connection terminal 20 (the second conductive portion of the connection terminal 20) is formed where the insulation coating 13 is removed. Will be.
The portions from which the insulating coating 13 is removed are removed by a predetermined length over the entire circumference of the bar-shaped member 10 at a plurality of positions of the bar-shaped member 10. More preferably, the insulating film having a predetermined length L is removed with a predetermined interval D (see FIG. 1B). At this time, the predetermined interval D is a portion that is cut between the connection terminals 20, and thus is formed as short as possible. In addition, since the predetermined length L is the length of the connection terminal 20, the predetermined length L is adjusted according to the desired length of the connection terminal 20.
The insulating coating 13 is removed at a plurality of positions at a predetermined interval D as described above, but in the embodiment shown in FIG. 1B, two places are removed.

As a method of removing the insulating coating 13, for example, a method of removing by irradiating a laser or a method of dissolving and removing using a predetermined solution can be employed. For example, a carbon dioxide laser can be used as a method of removing the insulating coating 13 by irradiating a laser. In this case, the laser output is adjusted so that only the insulating coating 13 is removed and the core material 11 and the winding conductor 12 are not damaged.
Moreover, the method of melt | dissolving and removing the insulating film 13 using a solution can use a sodium hydroxide solution, for example. Also in this case, it is necessary to adjust so as to remove only the insulating coating 13 at a predetermined location.
Since the insulating coating 13 is formed so as to cover the core 11 around which the winding conductor 12 is wound, the portion from which the insulating coating 13 is removed as described above exposes the core 11 or the winding conductor 12. .

  In this first step, the step of removing the insulating coating 13 at a predetermined location when the insulating coating 13 is formed over the entire length of the rod-shaped member 10 has been described, but the insulating coating as shown in FIG. In the case where the member 13 is not formed and the winding conductor 12 is wound around the core member 11, the insulating coating 13 having a predetermined distance D is formed at a predetermined separation point, thereby FIG. You may form the rod-shaped member 10 as shown by b).

FIG.1 (c) is a schematic sectional drawing which shows the 2nd process of manufacturing the connection terminal which concerns on this invention. The second step in FIG. 1C is a step of plating the entire surface of the rod-shaped member 10 from which the insulating coating 13 has been removed in the first step. In the second step, the second conductive portion of the connection terminal 20 is formed.
In the portion where the insulating coating 13 has been removed (the portion where the insulating coating 13 is not covered), the wound conductor 12 or the core material 11 appears on the surface. When such a rod-shaped member 10 is plated, a plating layer 14 having a predetermined thickness is formed only on the surface of the conductive winding conductor 12.

  The plating layer 14 is, for example, nickel plating, and a formation method by electrolytic nickel plating can be employed. The method of nickel plating is not limited to this, and a method using electroless nickel plating may be used. Similarly, when using electroless nickel plating, the plating layer 14 is formed only on the winding conductor 12.

  The plated layer 14 is formed on the surface of the wound conductor 12 so as to have a thickness of 5 to 20 μm. In particular, the plated layer 14 is formed only on the surface of the wound conductor 12. If the cross section of the winding conductor 12 is rectangular, the plating layer 14 is formed with the same thickness from the surface of the winding conductor 12 other than the surface in contact with the core material 11. In this case, since the winding conductor 12 and the core material 11 are in close contact with each other, the plating layer 14 is not formed on the contact surface in contact with the core material 11, and the contact surface of the winding conductor 12 and the plating are formed. The contact surface of the layer 14 and the core material 11 is formed flush.

  The plating layer 14 may be made of a material that can be formed on the conductive winding conductor 12 with a predetermined thickness, for example, plating of nickel or nickel alloy. It is preferable to employ a plating layer 14 having a higher strength than the winding conductor 12. Thus, even if the strength of the winding conductor 12 is insufficient due to the plating layer 14 having higher strength than the winding conductor 12, the strength of the connection terminal 20 can be increased by providing the plating layer 14 with high strength. Can be increased.

FIG.1 (d) is a schematic sectional drawing which shows the 3rd process which manufactures the connecting terminal which concerns on this invention. In the third step, the state where the insulating coating 13 is removed from the rod-shaped member 10 plated in the second step is shown.
As a method of removing the insulating coating 13, as described in the first step, a method of irradiating with a laser or a method of dissolving and removing with a solution can be employed. Also in this case, it is necessary to adjust so as not to affect the core material 11 and the plating layer 14.
When the insulating coating 13 is removed in the third step, the core material 11 and the wound conductor 12 are exposed from the portion from which the insulating coating 13 has been removed. At this time, the surface of the winding conductor 12 has a portion where the plating layer 14 is applied only to a part thereof.

FIG.1 (e) is a schematic sectional drawing which shows the 4th process of manufacturing the connection terminal which concerns on this invention. The state which removes the winding conductor 12 exposed to the surface of the rod-shaped member 10 in the 3rd process is shown.
The fourth step is a step of removing the winding conductor 12 exposed on the surface of the rod-shaped member 10 in the third step.
As a method for removing the winding conductor 12, for example, etching can be used. In this case, the etching is selectively performed so that the plating layer 14 is not etched and only the winding conductor 12 is etched. When copper is adopted for the winding conductor 12 and nickel plating is adopted for the plating layer 14, only copper is etched and etching is selectively performed so that nickel is not etched.

  When etching is performed selectively so that only the winding conductor 12 is etched in this manner, the plating layer 14 is not etched, and the portion of the winding conductor 12 covered with the plating layer 14 is not etched. When the plating layer 14 is formed on a part of the winding conductor 12, the winding conductor 12 is etched from the surface where the winding conductor 12 is exposed. The side surface of the plating layer 14 is not affected at the end portion of the connection terminal to be etched, and the winding conductor 12 is etched to form a surface in which only the portion of the winding conductor 12 is depressed.

FIG.1 (f) is a schematic sectional drawing which shows the 5th process of manufacturing the connecting terminal which concerns on this invention. In the fifth step, the core material 11 is removed from the rod-shaped member 10 from which the winding conductor 12 has been removed in the fourth step.
The method of removing the core material 11 is not particularly limited, but a method of removing only the core material 11 without affecting the wound conductor 12 and the plating layer 14 is employed. In this removal method, for example, the core material 11 may be pulled out and removed, or may be removed by dissolving with a solution or the like. When the core material 11 is pulled out, a plurality of connection terminals 20 are manufactured when the core material 11 is pulled out.

  When the core material 11 includes the core wire 11a and the insulator 11b, the order in which the core wire 11a and the insulator 11b are removed is not particularly limited, and the insulator 11b may be removed after the core wire 11a is removed. And you may remove the insulator 11b and the core wire 11a simultaneously. The core wire 11a can be pulled out by pulling it down to reduce the cross-sectional area. The insulator 11b can be removed by being dissolved in an alkaline solution and then drawn out, or by completely dissolving the insulator 11b. In addition, when pulling out this core material 11, the connection terminal 20 can also be slid out from the core material 11, and you may melt | dissolve in said solution in this case.

  As shown in FIG. 1F, when the core material 11 is removed, a plurality of connection terminals 20 are manufactured. In FIG. 1 (f), two connection terminals 20a and 20b are manufactured. Although the number of connection terminals 20 that can be manufactured depends on the length of the rod-shaped member 10 and the desired length of the connection terminals 20, a large number of connection terminals 20 can be manufactured at one time.

  Through the steps of FIGS. 1B to 1F, the connection terminal 20 formed in a cylindrical shape in which the wall portion is formed in a spiral shape is manufactured. On the spiral wall portion of the connection terminal 20, a plating layer 14 having a predetermined thickness is formed on the surface excluding the inner surface of the winding conductor 12 (the surface in contact with the core material 11). The inner surface of the connection terminal 20 is formed so that the winding conductor 12 and the plating layer 14 are flush with each other. For this reason, the plating layer 14 is disposed on both sides of the wound conductor 12 on the inner surface of the spiral wall portion. (See Figure 4)

  Further, both end surfaces of the connection terminal 20 are formed so that the wound conductor 12 and the plating layer 14 appear on the surface, but the surface of the winding conductor 12 is formed to be recessed from the surface of the plating layer 14. .

  The connection terminal manufacturing method of the present invention can be manufactured under the conditions of the dimensions disclosed above, and in particular, can be formed into a cylindrical shape having an outer diameter of 30 to 200 μm and an inner diameter of 10 to 100 μm. A connection terminal can be manufactured.

The connection terminal according to the present invention will be described.
FIG. 2 is a schematic configuration diagram showing an embodiment of the connection terminal 20 manufactured through the manufacturing process of the present invention. In the embodiment of FIG. 2, four springs are shown, but the number of turns is not limited to this.

  The connection terminal 20 is formed in a cylindrical shape having one end opening 201 and the other end opening 202, and a spiral wall portion 203 and a skeleton portion 204 serving as a skeleton of the wall portion 203 are formed on a peripheral portion of the cylindrical shape. Is formed. By having the spiral wall portion 203, the connection terminal 20 expands and contracts in the major axis direction according to the load from the one end opening 201 and the other end opening 202. For this reason, the member and site | part which contact | abut to the one end opening part 201 and the other end opening part 202 are pressed. The one end opening 201 and the other end opening 202 are formed as a plane perpendicular to the major axis of the connection terminal 20 in the no-load state shown in FIG.

  The one end opening 201, the other end opening 202, and the wall 203 are formed by the plating layer 14 described in the manufacturing process. For this reason, the shapes and materials of the one end opening 201, the other end opening 202, and the wall 203 depend on the plating layer 14. The main part 204 is formed by the winding conductor 12 described in the manufacturing process. For this reason, the shape and material of the main part 204 depend on the winding conductor 12.

The skeleton 204 is formed as a rectangular member having an elongated front and back surface and two elongated side surfaces, and is formed in a hollow spiral shape (see FIG. 1F) with the back surface of the rectangular member disposed inside. The wall portion 203 is formed to have a predetermined thickness from the front surface and two side surfaces of the skeleton portion 204 excluding the back surface of the skeleton portion 204.
For this reason, the back surface (the inner surface of the cylindrical spiral) of the connection terminal 20 is formed such that the skeleton part 204 and the wall part 203 are flush with each other.

  The surfaces of the one end opening 201 and the other end opening 202 are formed in a cylindrical shape. In the connection terminal 20, the wall 203 is formed in a ring shape and the skeleton 204 is formed in a ring shape in which a part thereof is opened in a plan view. The skeleton part 204 is formed so as to be recessed from the surface of the wall part 203. For this reason, when the connection terminal 20 contacts the object, the plating layer 14 of the one end opening 201 of the connection terminal 20 contacts one target point, and the plating layer 14 of the other end opening 202 contacts the other object. It will contact the point.

  In the embodiment shown in FIG. 2, the contact surface that contacts the electrode or the target point that is the surface of the one end opening 201 and the other end opening 202 has a shape in which a part of the ring shape is missing on the plane. is doing. As shown in the process of FIG. 1, the skeleton part 204 is formed in a spiral shape, and the wall part 203 is formed along the skeleton part 204, whereas the insulating coating 13 is connected to the connection terminal. 20 is formed at right angles to the major axis (see FIG. 1C). For this reason, the contact surface of the one end opening 201 and the other end opening 202 is formed in a ring shape with a part missing, for example, a C-shape.

  The main part 204 of the connection terminal 20 is the winding conductor 12 described in the manufacturing method, and the wall part 203 is the plating layer 14. For this reason, the connection terminal 20 has a characteristic that the skeleton part 204 has higher conductivity than the wall part 203 and the strength of the skeleton part 204 is lower than that of the wall part 203. By forming the skeleton part 204 and the wall part 203 in this way, the strength of the connection terminal 20 can be adjusted by the material and thickness of the wall part 203, and the conductivity of the connection terminal 20 can be adjusted by the material of the skeleton part 204 and The connection terminal 20 which can be adjusted by thickness and has a function desired by the manufacturer can be manufactured.

  FIG. 3 is a view showing a section where a spiral portion (spring portion) is formed with a plane perpendicular to the spiral direction as a cross section. As shown in FIG. 3, in the spiral cross section of the spiral portion, the wall portion 203 is in contact with the periphery of the skeleton portion 204 other than one side of the skeleton portion 204 corresponding to the inner surface of the cylinder forming the spiral portion. Is formed. In other words, the skeleton part 204 appears on the inner surface of the cylindrical connection terminal 20, but the skeleton part 204 does not appear on the other surface of the connection terminal 20 (one end opening 201 and the other end opening). Except the surface of the portion 202).

FIG. 4 is a view showing an inner surface by extracting a part of a portion where the spring portion is formed.
A skeleton part 204 and a wall part 203 are arranged on the inner surface of the spring part of the connection terminal 20 along the spiral direction of the spring part. This is because the wall 203 is formed along the main part 204.
The arrangement of the skeleton part 204 and the wall part 203 is formed such that the first conductive part is sandwiched between two second conductive parts. By forming in this way, the wall 203 is formed so as to reinforce the skeleton 204, and the connection terminal 20 having high conductivity and strength can be provided.

  As described above, the connection terminal 20 of the present invention can electrically connect between two target points and abut against each target point while applying a pressing force. For this reason, it can also function as a connection terminal of an interposer. Moreover, it can function also as a fine spring which can apply a pressing force to two target points and can contact them.

DESCRIPTION OF SYMBOLS 10 ... Rod-shaped member 11 ... Core material 11a ... Core wire 11b ... Insulator 12 ... Winding conductor 13 ... Insulating coating 14 ... Plating layer 20 ... Connection terminal 201 ... One end opening 202 ·· Other end opening 203 · · Wall 204 · · Body

Claims (17)

A connection terminal that contacts two predetermined terminals that transmit and receive electrical signals and electrically connects the predetermined terminals,
A rectangular member having an elongated front and back surface and two elongated side surfaces, a conductive first conductive portion formed in a hollow spiral with the back surface disposed inside;
Excluding the back surface of the first conductive part, having a second conductive part formed with a predetermined thickness from the front surface and two side surfaces,
The inner surface of the spiral is formed so that the first conductive portion and the second conductive portion are flush with each other. One end of the second conductive part is in conductive contact with the one predetermined terminal,
The connection terminal according to claim 1, wherein the other end of the second conductive portion is in conductive contact with the other predetermined terminal.   The conductivity of the first conductive part is higher than the conductivity of the second conductive part, and the strength of the first conductive part is lower than the strength of the second conductive part. Connecting terminal. A connection terminal that electrically connects two terminals through which electrical signals are transmitted and received,
Formed in a cylindrical shape having a surface of one end opening connected to the one terminal and a surface of the other end opening connected to the other terminal;
The cylinder is
It has a two-layer structure with a first conductive part and a second conductive part,
An inner surface of the cylinder is formed by the first conductive portion and the second conductive portion,
The outer surface of the cylinder is formed only by the second conductive part,
The cylindrical wall portion is formed as a spiral spring portion that expands and contracts in the long axis direction,
When the surface perpendicular to the spiral direction of the spring portion is taken as a cross section, the peripheral edge of the first conductive portion other than the portion serving as the inner surface of the cylinder where the spring portion is formed is in contact with the second conductive portion. A connection terminal characterized by being formed. The surface of the one end opening is formed by the first conductive portion and the second conductive portion,
The surface of the other end opening is formed by the first conductive portion and the second conductive portion,
The connection terminal according to claim 4, wherein the conductivity of the first conductive portion is higher than the conductivity of the second conductive portion. A connection terminal that electrically connects two terminals through which electrical signals are transmitted and received,
Formed in a cylindrical shape having a surface of one end opening connected to the one terminal and a surface of the other end opening connected to the other terminal;
The cylinder has a two-layer structure including a first conductive part and a second conductive part,
The inner surface of the cylinder is formed by the first conductive portion and the second conductive portion,
The outer surface of the cylinder is formed only by the second conductive part,
The surface of the one end opening is formed by the first conductive portion and the second conductive portion,
The surface of the other end opening is formed by the first conductive portion and the second conductive portion,
The cylindrical wall portion is formed as a spiral spring portion that expands and contracts in the long axis direction,
The connection terminal, wherein the first conductive portion and the second conductive portion are arranged on the inner surface of the cylinder in which the spring portion is formed along the spiral direction of the spring portion.   The connection terminal according to claim 6, wherein the first conductive portion is sandwiched between two second conductive portions. A connection terminal that electrically connects two terminals through which electrical signals are transmitted and received,
Formed in a cylindrical shape having a surface of one end opening connected to the one terminal and a surface of the other end opening connected to the other terminal;
The cylinder is
It has a two-layer structure with a first conductive part and a second conductive part,
An inner surface of the cylinder is formed by the first conductive portion and the second conductive portion,
The outer surface of the cylinder is formed only by the second conductive part,
The surface of the one end opening is formed by the first conductive portion and the second conductive portion,
The surface of the other end opening is formed by the first conductive portion and the second conductive portion,
The cylindrical wall portion is formed as a spiral spring portion that expands and contracts in the long axis direction,
The connection terminal, wherein the shape of the first conductive portion on the surface of the one end opening and / or the surface of the other end opening is a ring shape of one end opening.   The surface of the first conductive part formed on the surface of the one end opening and / or the surface of the other end opening is recessed from the surface of the second conductive part. Item 9. The connection terminal according to Item 8. A method of manufacturing a connection terminal that electrically connects two terminals through which electrical signals are transmitted and received,
A rod-like member in which an outer peripheral surface is a non-conductive core material, a conductive winding conductor that is spirally wound around the outer peripheral surface of the core material, and an insulating coating that covers the core material and the winding conductor is formed at a predetermined location. The process of plating the entire surface of
Removing the insulating coating from the plated rod-like member;
Removing the wound conductor exposed on the surface of the rod-shaped member from which the insulating coating has been removed;
And a step of removing the core material from the rod-shaped member from which the wound conductor has been removed.   One or more portions of the insulating coating are removed from the rod-shaped member having the insulating coating formed over the entire length, and the rod-shaped member having the insulating coating at a predetermined location is formed. The method for manufacturing a connection terminal according to claim 10.   12. The method of manufacturing a connection terminal according to claim 11, wherein a plurality of portions of the insulating film having a predetermined length to be removed are formed and arranged with a predetermined interval.   The method of manufacturing a connection terminal according to claim 10, wherein the method of removing the insulating film having a predetermined length is a method of removing using a laser.   11. The method of manufacturing a connection terminal according to claim 10, wherein the method of removing the remaining insulating film is a method of dissolving the insulating film of the rod-shaped member or a method of using a laser.   The method of manufacturing a connection terminal according to claim 10, wherein the strength of the plating layer formed by the plating is higher than the strength of the wound conductor.   The method of manufacturing a connection terminal according to claim 10, wherein an outer diameter of the connection terminal is 30 to 200 μm. A fine spring having an outer diameter of 30 to 200 μm, abutting against the two predetermined terminals and pressing the two predetermined terminals respectively.
A rectangular member having an elongated front and back surface and two elongated side surfaces, a first layer formed into a hollow spiral with the back surface disposed inside;
Having a second layer formed with a predetermined thickness from the surface and two side surfaces of the first layer;
The fine spring, wherein the inner surface of the spiral is formed so that the first layer and the second layer are flush with each other.

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