JP2009156720A - Substrate inspecting fixture and inspection contact element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspecting fixture having simple structure and a small inner resistance, and an inspecting contact element used in the substrate inspecting jig. <P>SOLUTION: The substrate inspecting fixture is adapted to electrically connect a body of a substrate inspecting device to a plurality of inspecting points provided on a wiring pattern on a substrate to be inspected. The substrate inspecting fixture includes a rod-like conductive contact element having both ends for electrical continuity, one end being brought into press contact with the inspecting point, a contact element holding body for holding the contact element, and a connection electrode body having an electrode section disposed to face the other end of the contact element. The contact element includes a conductive coil spring and a conductive rod-like member that is thread into the coil spring and is conductively connected to the coil spring. The electrode section is formed of a conductive hollow member whose one end is opened. When the contact element and the electrode section are used by bring them into contact with each other, the coil spring is in continuity contact with an outer surface of the hollow member, and a partial surface of the rod-like member of the contact element is allowed to slide on the inner surface of the hollow member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to a substrate inspection jig and an inspection contact, and more particularly to a substrate inspection jig having a simple structure and a low internal resistance, and an inspection contact used for the substrate inspection jig.
The present invention is not limited to a printed wiring board, but includes, for example, various substrates and semiconductor wafers such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In the present specification, these various test substrates are collectively referred to as “substrates”.

  Conventionally, a wiring pattern provided on a circuit board or the like has to accurately transmit an electric signal to an electric / electronic component such as a semiconductor such as an IC or a resistor mounted on the circuit board. Printed wiring board before mounting, circuit wiring board with wiring pattern formed on liquid crystal panel or plasma display panel, or wiring pattern to be inspected against wiring pattern formed on substrate such as semiconductor wafer The resistance value between the provided inspection points is measured, and the quality is determined.

  In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such disconnection inspection, a contact is brought into contact with each of the inspection points provided at two or more end points of the wiring pattern to be inspected, and a predetermined level of measurement current is applied between the contacts. The voltage value between the contacts is measured by flowing, and the quality is determined by comparing this voltage value with a predetermined threshold value.

However, in the board inspection jig used in such a method, a contact that is brought into contact with each of the two inspection points of the wiring pattern is commonly used for supplying measurement current and measuring voltage. In this case, there is a problem that the contact itself is affected by the internal resistance.
For example, in a printed wiring board continuity inspection jig described in Patent Document 1, a plunger (reference numeral 1 in the specification), a spring (reference numeral 2 in the specification), and a contact point (reference numeral 7 in the specification). They are arranged in series and formed so as to be in conductive contact.
In the test head of the circuit board inspection apparatus described in Patent Document 2, the receiving pin (reference numeral 3 in the specification) is further arranged in series with the contact pad (reference numeral 43 in the specification) so as to be in conductive contact. Is formed.

JP 2002-48816 A JP 2000-171527 A

Since the structure of the contact and its electrode part as disclosed in Patent Document 1 or 2 is formed by arranging the respective members in series, the contact resistance between the members is added when the spring load is reduced. Had a problem of growing. Further, the contact resistance between such members does not have stability, and when the contact resistance is large, there is a problem that the fluctuation is increased.
In particular, in recent years, circuit boards have been miniaturized and improved in quality, the spring load has become smaller, the resistance judgment value of the wiring pattern itself has become smaller, and the above internal resistance has an effect on this measured value. The impact was a big problem.

  The present invention has been made in view of such circumstances, and provides a substrate inspection jig and an inspection contact that can stably and reduce the internal resistance of the substrate inspection jig itself.

  According to the first aspect of the present invention, in order to inspect the electrical characteristics of the object to be inspected, the substrate inspection for obtaining electrical continuity between the inspection apparatus main body and a plurality of inspection points provided in advance on the inspection object. The jig 1 for the contact, the contact 2 is composed of a rod-shaped member 21 and a coil spring 22 in a state of penetrating the rod-shaped member, and is held by the contact-holder holding body 3. Is formed of a hollow member that is opened, and the other side is connected to the electrode wire 44. Since it is configured in this manner, at the time of use, a part of the rod-like member 21 of the contact 2 is slid and brought into contact with the one end side hollow portion 41 a of the electrode portion 41, and the coil spring 22 is connected to the electrode portion 41. It comes into conductive contact with the surface 41b. For this reason, when the board | substrate inspection jig | tool 1 is used, the contact 2 will carry out conductive contact in parallel and can provide the board | substrate inspection jig | tool 1 of the stable contact state with small internal resistance. .

According to the invention described in claim 2, the contact 2 has the large diameter portion 23 larger than the diameter of the rod-shaped member 21, and the contact holder 3 inspects one end of the contact 2 on the substrate to be inspected. A guide hole 33 for guiding to a point is provided, and the guide hole 33 can be prevented from coming out of the substrate inspection jig.
According to the third aspect of the invention, the contact holder 3 is provided with the guide plate 31 in which the guide hole 33 is formed and the holding hole 35 in which the diameter of the large diameter portion 23 of the contact 2 is larger. Since the guide plate 31 and the holding plate 32 are formed so as to be detachable, the contact 2 can be removed by removing the guide plate 31, so that the assembly and maintenance (replacement) of the contact 2 are possible. ) Can be easily performed.
According to the invention described in claim 4, since the guide plate 31 has the guide hole 33 and the first holding hole 34, the guide plate 31 is provided so as to press the contact 2 toward the electrode part 41 side. Therefore, the protruding length of one end of the contact 2 can be made constant.
According to the fifth aspect of the present invention, since the electrode portion 41 is disposed so as to protrude from the surface of the electrode holding plate 42, it can be reliably brought into contact with the coil spring 22 and the contact resistance can be reduced and stabilized.
According to invention of Claim 6, it is the contactor 2 with which the electrical connection jig | tool for obtaining electrical continuity is equipped, Comprising: While being penetrated by this coil spring 22 and this coil spring 22, this said Conduction connected to the coil spring 22, one end is in conduction contact with the inspection point, and the other end is electrically slid on a hollow portion 41 a included in the hollow electrode portion 41 electrically connected to the inspection apparatus main body. When the contact 2 is pressed against the inspection point and the electrode portion 41, the coil spring 22 of the contact 2 and the electrode portion 41 are in conductive contact with each other. Since a part of the rod-shaped member 21 is slid into the hollow portion 41a of the hollow member, it is in conductive contact, and is in conductive contact in parallel, so that a stable contact state can be achieved and the internal resistance is small. A stable contact 2 is provided.

According to the first aspect of the present invention, there are a plurality of conductive contacts inside the contact 2 and a parallel connection circuit of contact resistances at each point becomes a resistance value which is small and stable. And since the electrode part 41 and the electrode wire 44 are physically connected, there is no fluctuation in connection resistance, so that the inductance of the coil spring in direct current and alternating current is small even at low load, and low resistance conduction determination is possible. Become.
According to the second aspect of the present invention, it is possible to accurately guide the tip of the rod-shaped member 21 to the inspection point due to the guide hole 33, and to prevent the contact 2 from coming out due to the large diameter portion 23. Can do.
According to the third aspect of the present invention, the contact holder 3 is composed of the holding plate 32 and the guide plate 31 and the guide plate 31 is removed, whereby the contact 2 can be easily assembled and replaced.
According to the fourth aspect of the present invention, since the first holding hole 34 of the guide plate 31 and the large-diameter portion 23 of the rod-shaped member 21 are in contact with each other, the protruding amount of the tip of the contact 2 is constant.
According to invention of Claim 5, it contact | abuts reliably with the load amount between the electrode part 41 and the coil spring 22, and a contact resistance is also small and stabilized.
According to the sixth aspect of the present invention, there are a plurality of conductive contacts inside the contact 2 and a parallel connection circuit of contact resistances at each point becomes a resistance value which is small and stable. It is possible to provide a stable contact 2 having a small internal resistance and a small inductance of a coil spring in a direct current and an alternating current even under a low load.

The best mode for carrying out the present invention will be described.
FIG. 1 shows an overall schematic configuration when a substrate inspection jig according to the present invention is used. In FIG. 1, a board inspection jig 1 includes a plurality of contacts 2, a contact holder 3 that holds the contacts 2 in a multi-needle shape, and supports the contact holder 3 and contacts 2. A connection electrode body 4 having an electrode portion 41 that is brought into contact with each other, an inspection signal processing portion 5 that processes a detected electric signal, and an electrode wire 44 that connects the electrode portion 41 and the inspection signal processing portion 5 are shown. .
The contact 2 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected, and the connection electrode body 4 is electrically connected by changing the pitch between the contact 2 and the inspection signal processing unit 5. .
The present invention relates to the substrate inspection jig 1 and particularly relates to the structure of the electrode portion 41 provided on the contact 2 and the connection electrode body 4 electrically connected to the contact 2.
FIG. 1 is a schematic view, and the number of contacts 2 and the number of wire cables are not particularly limited. Further, the contactor 2 and the connection electrode part 41 shown in the drawings are disclosed only for one structure for convenience of explanation, and the actual substrate inspection jig 1 has a plurality of contactors 2 and their contacts. A plurality of electrode portions 41 corresponding to the child 2 are provided.

FIG. 2 is a cross-sectional view showing an embodiment of the contact used in the substrate inspection jig 1 according to the present invention.
The contact 2 is formed in a bar shape having conductivity, one of which is in conductive contact with an inspection point and the other of which is in conductive contact with an electrode portion 41 described later. The contact 2 transmits electric signals from the inspection point to the electrode part 41 or from the electrode part 41 to the inspection point.

As shown in FIG. 2, the contact 2 includes a rod-shaped member 21 and a coil spring 22.
The rod-shaped member 21 is an elongated member formed in a rod shape, and is not particularly limited, but is formed in a columnar shape.
One end of the rod-shaped member 21 is preferably formed in a curved shape, a hemispherical shape, or a sharp shape as shown in FIG. Thus, when the one end part of the rod-shaped member 21 is formed so as to have the shape as described above, it can be stably contacted when contacting the inspection point.
The shape of the other end of the rod-shaped member 21 is not particularly limited, but a curved shape or a hemispherical shape is desirable.

The rod-shaped member 21 is formed of a conductive member (conductive material), and examples thereof include SK steel (SKH) and beryllium copper (BeCu).
The length and thickness of the rod-shaped member 21 are not particularly limited, and can be changed as appropriate according to the use of the rod-shaped member 21, and the pitch of the wiring pattern formed on the substrate to be inspected and the inspection point of the substrate to be inspected It is set appropriately according to the size.
In addition, the length of the rod-shaped member 21 and the magnitude | size of a diameter are formed in length 20-30mm, and are formed in the magnitude | size of diameter 100-1000 micrometers.

The coil spring 22 is disposed so that the rod-shaped member 21 is accommodated therein and the rod-shaped member 21 is held through. The coil spring 22 is electrically connected to the rod-shaped member 21.
As shown in FIG. 2, the coil spring 22 is formed to be shorter than the major axis length of the rod-shaped member 21, and is formed so that the other end portion of the rod-shaped member 21 extends from the coil spring 22.
The coil spring 22 is formed of a conductive member such as piano wire, stainless steel, beryllium copper (BeCu) or tungsten (W), and is held by the coil spring holding portion 23 b of the rod-like member 21. The coil spring 22 expands and contracts in the long axis direction of the rod-shaped member 21.

The contact 2 preferably includes a large diameter portion 23.
The large-diameter portion 23 is provided at a predetermined location of the rod-shaped member 21 as shown in FIG. The large-diameter portion 23 is formed so as to cover the side periphery of the rod-shaped member 21 so as to have a larger diameter than the diameter of the rod-shaped member 21. The large diameter portion 23 is formed of a conductive material, and the large diameter portion 23 and the rod-shaped member 21 are conductively connected. The side surface portion 23 a of the large diameter portion 23 can be used as a connection surface of the coil spring 22.
The diameter of the large diameter portion 23 is not particularly limited, but is formed to be equal to the outer diameter of the coil spring 22. Further, the length of the large diameter portion 23 in the major axis direction is not particularly limited because it is appropriately adjusted according to the length of the rod-shaped member 21 in the major axis direction, but is formed to have a length of 3 to 5 mm. The

The place where the large-diameter portion 23 is provided is preferably formed on the side of the bar-shaped member 21 that contacts the inspection point. When the contact 2 is attached to the contact holder 3, it is possible to prevent the large diameter portion 23 from coming out of the contact holder 3, and the contact 2 can be easily attached and detached.
The large diameter portion 23 shown in FIG. 2 is provided so as to cover the outer periphery of the rod-shaped member 21 at a predetermined position, but can also be formed integrally.

The contact holder 3 holds a plurality of contacts 2. The contact holder 3 guides one end of each contact 2 to a preset inspection point and guides the other end of each contact 2 to a preset electrode portion.
This contact holder 3 is preferably formed of a plurality of plate-like members. The contact holder 3 shown in FIG. 3 is formed of two plate-like members each having a guide plate 31 and a holding plate 32.
The guide plate 31 has a guide hole 33 for guiding one end of the contact 2 to the inspection point. The guide hole 33 is formed to have a diameter slightly larger than the diameter of the rod-shaped member 21 of the contact 2 and smaller than the diameter of the large diameter portion 23. For this reason, when the contact 2 is mounted on the contact holder 3, the contact 2 is projected from the guide hole 33 of the guide plate 31 of the contact holder 3.
The guide plate 31 is formed with a first holding hole 34 that is connected to the guide hole 33. The first holding hole 34 is formed larger than the diameter of the large diameter portion 23. For this reason, the first holding hole 34 can also insert the large diameter portion 23.

The holding plate 32 has a second holding hole 35. The second holding hole 35 is a housing portion that can house the contact 2 therein, and is connected to the first holding hole 34 of the guide plate 31 in communication. The first holding hole 34 and the second holding hole 35 are preferably formed with holes having the same diameter.
As shown in FIG. 3, the second holding hole 35 formed in the holding plate 32 is formed so as to penetrate the holding plate 32, and guides the other end of the contact 2 to the electrode unit described later.

  The contact holder 3 includes a guide plate 31 and a holding plate 32. The guide plate 31 and the holding plate 32 are detachable. As described above, since the guide plate 31 and the holding plate 32 are formed so as to be detachable, when the contact 2 is mounted on the contact holder 3, the guide plate 31 is removed and the second plate of the holding plate 32 is removed. The contact 2 can be easily removed by inserting the contact 2 into the second holding hole 35.

When the contact holder 3 holds the contact 2, the contact 2 is inserted into the second holding hole 35 of the holding plate 32 and is then fixed by the guide plate 31. At this time, since the guide plate 31 has the guide hole 33 and the first holding hole 34, the guide plate 31 is provided so as to press the contact 2 toward the electrode portion.
Therefore, when the contact 2 is inserted and held in the second holding hole 35 of the holding plate 32 and the guide plate 31 is fixed and the contact is fixed, the coil spring 22 is pressed by the guide plate 31. Thus, the contactor 2 can be held in the biased state (compressed state).

The connection electrode body 4 has an electrode portion 41 that is electrically connected to the other end of each contactor 2.
FIG. 4 shows one embodiment of the connection electrode portion, (a) shows a side sectional view of one embodiment, and (b) shows a side sectional view of another embodiment.
The connection electrode body 4 includes an electrode portion 41, an electrode holding plate 42, an electrode wire holding plate 43, and an electrode wire 44.
The electrode part 41 is formed of a conductive hollow member whose one end is opened. In the embodiment shown in FIG. 4, the electrode part 41 is formed of a member having a hollow part whose one end is opened.
The electrode portion 41 is formed of a conductive member, and if the conductive member is in contact with the outer surface and the inner surface, conductive contact with the member is possible.
Although the shape of this electrode part 41 is not specifically limited, it has a shape along the shape of the rod-shaped member 21 of the contact 2, and when the rod-shaped member 21 is formed in a columnar shape, it is formed in a cylindrical shape. Is done.
Thus, when the rod-shaped member 21 is accommodated in the hollow part 41a of the electrode part 41 by appropriately changing the shape of the electrode part 41 according to the cross-sectional shape of the contact 2, the inner surface of the electrode part 41 41c and a part of the outer surface of the rod-shaped member 21 come into contact with each other, and the electrode portion 41 and the contact 2 come into conductive contact. When the rod-shaped member 21 of the contact 2 is accommodated in the hollow portion 41a, the surface of the rod-shaped member 21 is accommodated while sliding with the inner surface 41c of the electrode portion 41. Therefore, the contact 2 and the electrode The part 41 is in conductive contact.

  The electrode portion 41 shown in FIG. 4A is provided with an opening 41 b so as to protrude from the surface of the electrode holding plate 42 in order to ensure contact with the coil spring 22.

The electrode wire 44 is connected to the other side of the electrode portion 41 and to the substrate inspection apparatus main body. An electrical signal is transmitted to the substrate inspection apparatus main body through the electrode wire 44.
As the electrode wire 44, a lead wire or a lead wire can be used.
The electrode wire holding plate 43 holds the electrode wire 44. The electrode wire holding plate 43 has a hole substantially equal to or slightly larger than the diameter of the electrode wire 44, and guides to the other opening of the electrode portion 41 by inserting the electrode wire 44 through the hole.
The electrode wire holding plate 43 can also support the electrode portion 41.
The electrode wire 44 and the electrode portion 41 are conductively connected by means such as welding.

  It is preferable that the electrode part 41 is provided with a conductive extending part 45 on the periphery on the opening part side where the contact 2 is inserted. Since the extending portion 45 is formed at the periphery of the opening of the electrode portion 41, the contact surface of the electrode portion 41 can be enlarged. Further, when the electrode holding plate 42 is held by the electrode holding plate 42, the extending portion 45 can serve as a locking portion when the electrode portion 41 is inserted through the hole of the electrode holding plate 42. Therefore, when the electrode portion 41 is attached to the electrode holding plate 42, it can be easily attached while preventing it from coming off.

FIG. 4B shows another embodiment of the connection electrode body 4.
The connection electrode body 4 of this other embodiment shows a case where the electrode wire holding plate 43 is not used.

FIG. 5 is a cross-sectional view showing the configuration of the substrate inspection jig 1 according to the present invention, and the other end of the rod-like member 21 of the contact 2 is inserted into the hollow portion 41 a of the electrode portion 41. Further, the outer surface of the other end of the rod-shaped member 21 and the hollow portion 41a are in contact with each other, and the rod-shaped member 21 and the electrode portion 41 form a conductive state.
When assembling the board inspection jig 1, first, the holding plate 32 is stacked on the connection electrode body 4. At this time, the connection electrode body 4 is provided with a plurality of electrode portions 41, and the second holding hole 35 is positioned and the holding plate 32 is positioned so as to correspond to the position of each electrode portion 41. For this reason, the second holding hole 35 of the holding plate 32 is disposed above the electrode portion 41.

When the holding plate 32 is disposed on the connection electrode body 4, the contact 2 is inserted into each second holding hole 35. At this time, the other end of the contact 2 (the other end of the rod-shaped member) is inserted so as to be accommodated in the hollow portion 41 a of the electrode portion 41, and the outer surface of the other end of the rod-shaped member 21 is the inner surface 41 c of the electrode portion 41. It is inserted while sliding. For this reason, the outer surface of the other end of the rod-shaped member 21 is in contact with the inner surface 41 c of the electrode portion 41.
The contact 2 is inserted until the tip of the coil spring 22 of the contact 2 comes into contact with the opening 41 b of the electrode portion 41.

Next, the guide plate 31 is stacked on the holding plate 32, and the guide hole 33 and the first holding hole 34 of the guide plate 31 are arranged so that one end of the contact 2 is inserted.
At this time, since the guide plate 31 is disposed so as to contact the holding plate 32, the guide hole 33 presses the large diameter portion 23 toward the connection electrode body 4. For this reason, the coil spring 22 of the contactor 2 is surely pressed against the opening 41b of the electrode portion 41 by the pressing on the connection electrode body 4 side, and the coil spring 22 is compressed and is in an urging state. .
The above is the description of the assembly of the substrate inspection jig.

  Although the substrate inspection jig has been described as an example of the substrate as the inspection object, the substrate inspection jig and the contact can be used as a transmission path for transmitting and receiving electrical signals.

The schematic structure of one Embodiment at the time of using the jig | tool for board | substrate inspection which concerns on this invention is shown. It is sectional drawing of the contact concerning this invention. It is sectional drawing which shows one Embodiment of the contactor holding body of the jig | tool for board | substrate inspection concerning this invention. FIG. 4 shows one embodiment of the connection electrode portion, (a) shows a side sectional view of one embodiment, and (b) shows a side sectional view of another embodiment. It is sectional drawing when the jig | tool for board | substrate inspection concerning this invention is assembled.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ...... Inspection jig | tool 2 ... Contact 21 ... Rod-shaped member 22 ... Coil spring 23 ... Large diameter part 3 ... Contact holder 31 ... Guide Plate 32 ... Holding plate 33 ... Guide hole 34 ... First holding hole 35 ... Second holding hole 4 ... Connection electrode body 41 ... Electrode portion 41a ... Hollow portion

Claims (6)

A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus main body and a plurality of inspection points provided on a wiring pattern of the substrate to be inspected in order to inspect the electrical characteristics of the substrate to be inspected. And
The substrate inspection jig is
A contact group having a plurality of rod-shaped contacts having conductivity, the ends having electrical continuity at both ends, and having one end pressed against the inspection point;
A contact holder for holding the contact group;
Comprising a connection electrode body connected to the substrate inspection apparatus main body, comprising an electrode portion arranged opposite to the other end of each contact of the contact group;
The contact is
A conductive coil spring;
A conductive rod-shaped member that is penetrated by the coil spring and is electrically connected to the coil spring;
The electrode part is
Formed of a conductive hollow member with one end open,
When the contactor and the electrode portion are used in contact with each other, the coil spring is in conductive contact with the outer surface of the hollow member, and the other partial surface of the rod-shaped member of the contactor is on the inner side of the hollow member. A substrate inspection jig characterized by being slid with a surface. The contact has a large diameter portion larger than the diameter of the rod-shaped member,
The contact holder has a guide hole for guiding one end of the contact to an inspection point of the substrate to be inspected,
The substrate inspection jig according to claim 1, wherein a diameter of the guide hole is larger than a diameter of the rod-shaped member and smaller than a diameter of the large diameter portion. The contact holder is
A guide plate in which the guide hole is formed;
Having a holding plate in which a holding hole larger than the diameter of the large-diameter portion of the contact is formed;
The substrate inspection jig according to claim 2, wherein the guide plate and the holding plate are detachable. The guide plate has the guide hole and a first holding hole having a larger diameter than the large-diameter portion connected to and communicated with the guide hole,
When the contact is held by the substrate inspection jig, the contact is pressed toward the electrode part at the boundary between the first holding hole and the guide hole. Item 4. A substrate inspection jig according to Item 3. The substrate inspection jig according to claim 1, wherein the electrode portion is disposed so as to protrude from a surface of the connection electrode body. In order to inspect the electrical characteristics of the inspected object, electricity for obtaining electrical continuity between the inspection apparatus main body for calculating the electrical characteristics of the inspected object and a plurality of inspection points provided in advance on the inspected object A contact provided in a mechanical connection jig,
A conductive coil spring;
A hollow electrode portion that penetrates the coil spring and is electrically connected to the coil spring, has one end electrically connected to the inspection point, and the other end electrically connected to the inspection apparatus body. A conductive rod-like member housed in the part,
When the contact is pressed against the inspection point and the electrode portion, the coil spring of the contact and the electrode portion are in conductive contact, and a part of the rod-shaped member of the contact is in the hollow portion of the hollow member. The contact is characterized by being slid into the contact.

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