CN104502664B - Low-resistance non-inductive self-integration Rogowski coil integration resistor and manufacturing method thereof - Google Patents

Low-resistance non-inductive self-integration Rogowski coil integration resistor and manufacturing method thereof Download PDF

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CN104502664B
CN104502664B CN201410649653.2A CN201410649653A CN104502664B CN 104502664 B CN104502664 B CN 104502664B CN 201410649653 A CN201410649653 A CN 201410649653A CN 104502664 B CN104502664 B CN 104502664B
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integrating
rogowski coil
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resistor
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丁卫东
韩若愚
景龑
吴佳玮
刘巧珏
周海滨
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Xian Jiaotong University
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Abstract

本发明公开了一种低阻值无感自积分罗氏线圈积分电阻及其制造方法,包括:回流装置以及设置于回流装置内的首端匹配电阻,回流装置包括圆柱筒状的金属支撑,金属支撑的外表面设置有极薄的绝缘层,绝缘层外表面设置有喷金层;回流装置外表面设置有金属屏蔽壳,回流装置与金属屏蔽壳同心设置,回流装置与金属屏蔽壳之间设置有空气绝缘层,金属屏蔽壳的一端安装有电缆头,金属屏蔽壳的另一端与罗氏线圈本身的屏蔽壳相连;首端匹配电阻设置于金属支撑内,且首端匹配电阻一端通过焊锡与金属支撑前端连接,另一端与电缆头内芯连接,由于回流装置外表面设置有金属屏蔽壳,回流装置与金属屏蔽壳同心设置,因此,通过金属屏蔽壳,可以减小外界电磁场对输出信号的影响,提高输出信号的准确度。

The invention discloses a low-resistance non-inductive self-integrating Rogowski coil integral resistor and a manufacturing method thereof. The outer surface of the insulating layer is provided with a very thin insulating layer, and the outer surface of the insulating layer is provided with a gold-sprayed layer; the outer surface of the backflow device is provided with a metal shielding shell, and the backflow device and the metal shielding shell are arranged concentrically, and there is a gap between the backflow device and the metal shielding shell. Air insulation layer, one end of the metal shielding shell is equipped with a cable head, the other end of the metal shielding shell is connected to the shielding shell of the Rogowski coil itself; the matching resistance of the first end is set in the metal support, and one end of the matching resistance of the first end is connected to the metal support through solder The front end is connected, and the other end is connected to the inner core of the cable head. Since the outer surface of the return device is provided with a metal shielding shell, the return device and the metal shielding shell are concentrically arranged. Therefore, through the metal shielding shell, the influence of the external electromagnetic field on the output signal can be reduced. Improve the accuracy of the output signal.

Description

低阻值无感自积分罗氏线圈积分电阻及其制造方法Low-resistance non-inductive self-integrating Rogowski coil integral resistor and manufacturing method thereof

技术领域technical field

本发明属于高功率脉冲测量领域,涉及用于测量陡脉冲前沿(ns级)、高幅值(百kA)脉冲电流的低阻值无感自积分罗氏线圈积分电阻及其制造方法。The invention belongs to the field of high-power pulse measurement, and relates to a low-resistance value non-inductive self-integrating Rogowski coil integral resistance for measuring steep pulse front (ns level) and high amplitude (hundred kA) pulse current and a manufacturing method thereof.

背景技术Background technique

随着脉冲功率技术的高速发展、储能技术的逐步提高,陡脉冲前沿、高幅值的电脉冲得到了越来越广泛的应用。测量电流脉冲最常用的方式是分流器(Shunt)和罗氏线圈(Rogowski Coil)。With the rapid development of pulse power technology and the gradual improvement of energy storage technology, electric pulses with steep pulse fronts and high amplitudes have been more and more widely used. The most common ways to measure current pulses are shunts and Rogowski coils.

分流器的原理是当脉冲大电流流过一个无感电阻时会产生电压降,利用测量这个电阻的电压波形就可以得到电阻的电流波形。但实际的电阻很难做到无感,只能尽可能减小电感,如果分流器的电感不够小,那么流过陡电流脉冲的时候电感上的压降会很大,电压波形产生畸变,影响测量结果。此外,如果被测电流幅值很高,分流器的散热能力(因为电阻发热)和机械强度(因为电磁力的影响)都需要考量。The principle of the shunt is that when a large pulse current flows through a non-inductive resistor, a voltage drop will occur, and the current waveform of the resistor can be obtained by measuring the voltage waveform of the resistor. But the actual resistance is difficult to be insensitive, and the inductance can only be reduced as much as possible. If the inductance of the shunt is not small enough, the voltage drop on the inductance will be large when the steep current pulse flows, and the voltage waveform will be distorted, affecting the measurement results. In addition, if the amplitude of the measured current is high, the heat dissipation capability of the shunt (due to the heat generated by the resistance) and the mechanical strength (due to the influence of electromagnetic force) of the shunt need to be considered.

罗氏线圈的原理是利用法拉第电磁感应定律和全电流定律的原理,将一条导线(通常带有绝缘层)均匀缠绕在一个以被测电流路径为中心的环形骨架上,利用被测电流变化时线圈缠绕的导线两端感应的电动势完成对电流的检测,由于感生电动势和被测电流的微分成正比,所以需要加入积分环节。利用积分原理不同,罗氏线圈分为自积分罗氏线圈和外积分罗氏线圈。自积分罗氏线圈是将导线两端直接连接一个小电阻进行测量,这种方法简单且比较适合高频信号的测量,所以在快脉冲测量领域应用较为广泛。The principle of the Rogowski coil is to use Faraday's law of electromagnetic induction and the principle of the full current law to evenly wind a wire (usually with an insulating layer) on a ring-shaped skeleton centered on the measured current path, and use the coil when the measured current changes. The electromotive force induced at both ends of the wound wire completes the detection of the current. Since the induced electromotive force is proportional to the differential of the measured current, it is necessary to add an integral link. Using different integration principles, Rogowski coils are divided into self-integrating Rogowski coils and externally integrating Rogowski coils. The self-integrating Rogowski coil directly connects the two ends of the wire to a small resistor for measurement. This method is simple and more suitable for the measurement of high-frequency signals, so it is widely used in the field of fast pulse measurement.

对于陡脉冲前沿(ns级)、高幅值(百kA)脉冲电流测量来说,其频率响应有着很多影响因素,如线圈骨架、绕法、材料和积分电阻等。然而当被测信号频率足够高时,线圈分布电容和积分电阻本身的寄生电感、电容的影响会逐渐增加。如果不能采取合适的方法抑制分布参数的影响,输出波形就会产生较大的畸变。对于测量ns级电流信号的线圈来说,通常采用较为稀疏的绕组以减小绕组间的分布电容,同时采用低感或无感的积分电阻。如果被测电流较小,可以采用阻值比较大的低感电阻来减小寄生电感带来的影响,比如多个电阻并联。如果被测电流较大,则需要从电阻结构入手减小寄生电感,这种积分电阻通常采用回流方式减小自身电感,比如同轴状积分电阻。For the measurement of steep pulse front (ns level) and high amplitude (hundred kA) pulse current, its frequency response has many influencing factors, such as coil bobbin, winding method, material and integral resistance, etc. However, when the frequency of the measured signal is high enough, the influence of the distributed capacitance of the coil and the parasitic inductance and capacitance of the integrating resistor itself will gradually increase. If the influence of distribution parameters cannot be suppressed by appropriate methods, the output waveform will be greatly distorted. For coils that measure ns-level current signals, relatively sparse windings are usually used to reduce the distributed capacitance between windings, and low-inductance or non-inductive integrating resistors are used at the same time. If the measured current is small, a low-inductance resistor with a relatively large resistance value can be used to reduce the influence of parasitic inductance, such as multiple resistors connected in parallel. If the measured current is large, it is necessary to reduce the parasitic inductance from the resistance structure. This kind of integral resistor usually uses a backflow method to reduce its own inductance, such as a coaxial integral resistor.

发明内容Contents of the invention

针对上述缺陷或不足,本发明的目的在于提供低阻值无感自积分罗氏线圈积分电阻及其制造方法,使得该电阻有着极小的寄生电感和电容,从而能够使罗氏线圈拥有更高的上限截止频率和最小的波形畸变。In view of the above-mentioned defects or deficiencies, the object of the present invention is to provide a low-resistance non-inductive self-integrating Rogowski coil integrating resistor and its manufacturing method, so that the resistor has extremely small parasitic inductance and capacitance, so that the Rogowski coil can have a higher upper limit cutoff frequency and minimal waveform distortion.

为达到以上目的,本发明的技术方案为:For achieving above object, technical scheme of the present invention is:

一种低阻值无感自积分罗氏线圈积分电阻,包括:回流装置以及设置于回流装置内的首端匹配电阻,其中,回流装置包括圆柱筒状的金属支撑,金属支撑的外表面设置有绝缘层,绝缘层的外表面设置有喷金层;A low-resistance non-inductive self-integrating Rogowski coil integrating resistor, comprising: a return device and a head-end matching resistor arranged in the return device, wherein the return device includes a cylindrical metal support, and the outer surface of the metal support is provided with insulating layer, the outer surface of the insulating layer is provided with a gold-sprayed layer;

回流装置外表面设置有金属屏蔽壳,回流装置与金属屏蔽壳同心设置,且回流装置与金属屏蔽壳之间设置有空气绝缘层,金属屏蔽壳的一端安装有电缆头,金属屏蔽壳的另一端敞开;The outer surface of the backflow device is provided with a metal shielding shell, the backflow device and the metal shielding shell are concentrically arranged, and an air insulation layer is set between the backflow device and the metal shielding shell, one end of the metal shielding shell is installed with a cable head, and the other end of the metal shielding shell open;

首端匹配电阻设置于金属支撑内,且首端匹配电阻一端通过焊锡与金属支撑前端连接,另一端与电缆头连接。The head-end matching resistor is arranged in the metal support, and one end of the head-end matching resistor is connected to the front end of the metal support through soldering tin, and the other end is connected to the cable head.

所述喷金层以及焊锡上连接有引出线。Lead wires are connected to the gold-sprayed layer and the solder.

所述电缆头伸入金属屏蔽壳,并与喷金层接触。The cable head extends into the metal shielding shell and is in contact with the gold-sprayed layer.

所述绝缘层为金属氧化层或绝缘漆层。The insulating layer is a metal oxide layer or an insulating paint layer.

所述喷金层采用喷金工艺制成外导体结构。The gold-spraying layer is made of an outer conductor structure by a gold-spraying process.

一种低阻值无感自积分罗氏线圈积分电阻制造方法,包括以下步骤:A method for manufacturing a low-resistance non-inductive self-integrating Rogowski coil integral resistor, comprising the following steps:

1)、根据预设要求,制作圆柱筒状金属体为金属支撑;1) According to the preset requirements, a cylindrical metal body is made as a metal support;

2)、在金属支撑的外侧设置绝缘层,并且在金属支撑的连接处预留喷金层的位置;2) Set an insulating layer on the outside of the metal support, and reserve the position of the gold spray layer at the connection of the metal support;

3)、在绝缘层上使用离子溅射仪或喷金仪镀上一层喷金层作为外导体后,形成回流装置;3) On the insulating layer, use an ion sputtering device or a gold spraying device to plate a layer of gold spraying layer as an outer conductor to form a reflow device;

4)、在回流装置上安装首端匹配电阻、金属屏蔽壳以及电缆头,得到低阻值无感自积分罗氏线圈积分电阻。4) Install the head-end matching resistor, metal shielding shell and cable head on the return device to obtain a low-resistance non-inductive self-integrating Rogowski coil integrating resistor.

所述步骤2)中绝缘层通过化学氧化法或电镀法制成氧化膜。In the step 2), the insulating layer is formed into an oxide film by chemical oxidation or electroplating.

所述步骤2)中绝缘层通过涂刷绝缘漆形成。In the step 2), the insulating layer is formed by painting insulating varnish.

所述喷金层为采用金、银或铜金属材料。The gold-sprayed layer is made of gold, silver or copper metal material.

所述首端匹配电阻的阻值范围与信号输出电缆阻抗相同。The resistance range of the first-end matching resistor is the same as the impedance of the signal output cable.

与现有技术比较,本发明的有益效果为:Compared with prior art, the beneficial effects of the present invention are:

本发明提供了一种低阻值无感自积分罗氏线圈积分电阻,通过在金属支撑上依次设置绝缘层和喷金层,形成回流装置,并在罗氏线圈引出线将信号加载到积分电阻上,由于喷金层很薄,所以该同轴电阻的电感很小,使得积分电阻的阻值更加均匀稳定;另外,由于回流装置外表面设置有金属屏蔽壳,回流装置与金属屏蔽壳同心设置,因此,通过金属屏蔽壳,可以减小外界电磁场对输出信号的影响,提高输出信号的准确度。The invention provides a low-resistance non-inductive self-integrating Rogowski coil integral resistor, by sequentially arranging an insulating layer and a gold-sprayed layer on a metal support to form a reflow device, and loading a signal on the integral resistor at the lead-out line of the Rogowski coil, Because the gold-sprayed layer is very thin, the inductance of the coaxial resistor is very small, making the resistance of the integral resistor more uniform and stable; in addition, since the outer surface of the reflow device is provided with a metal shielding shell, the reflow device and the metal shielding shell are concentrically arranged, so , Through the metal shielding shell, the influence of the external electromagnetic field on the output signal can be reduced, and the accuracy of the output signal can be improved.

本发明还提供了一种低阻值无感自积分罗氏线圈积分电阻制造方法:The present invention also provides a low-resistance non-inductive self-integrating Rogowski coil integral resistance manufacturing method:

1、本发明采用电镀法或别的方法产生氧化层作为内外导体之间的绝缘层,可以使得积分电阻的阻值更加均匀稳定,同时电感极小;1. The present invention uses electroplating or other methods to produce an oxide layer as the insulating layer between the inner and outer conductors, which can make the resistance of the integral resistor more uniform and stable, and the inductance is extremely small;

2、本发明中,使用喷金的方法制作积分电阻的外导体,可以使得阻值更加均匀,也可以在和内导体的连接处没有接触电阻的影响;2. In the present invention, the method of spraying gold is used to make the outer conductor of the integral resistance, which can make the resistance value more uniform, and can also have no influence of contact resistance at the connection with the inner conductor;

3、本发明通过使用屏蔽壳,可以减小外界电磁场对输出信号的影响。3. The present invention can reduce the influence of the external electromagnetic field on the output signal by using the shielding case.

附图说明Description of drawings

图1为本发明低阻值无感自积分罗氏线圈积分电阻结构示意图;Fig. 1 is the low-resistance value non-inductive self-integrating Rogowski coil integral resistor structure schematic diagram of the present invention;

图2为本发明低阻值无感自积分罗氏线圈积分电阻测量系统的整体结构图。Fig. 2 is the overall structure diagram of the low-resistance non-inductive self-integrating Rogowski coil integral resistance measuring system of the present invention.

图中,1为引出线,2为焊锡,3为首端匹配电阻,4为金属支撑,5为绝缘层,6为喷金层,7为电缆头,8为金属屏蔽壳,1-1为罗氏线圈,2-1为低阻值无感自积分罗氏线圈积分电阻,3-1为同轴电缆,4-1为示波器。In the figure, 1 is the lead wire, 2 is the solder, 3 is the matching resistor at the head end, 4 is the metal support, 5 is the insulation layer, 6 is the gold spray layer, 7 is the cable head, 8 is the metal shielding shell, 1-1 is the Roche Coil, 2-1 is a low-resistance non-inductive self-integrating Rogowski coil integrating resistor, 3-1 is a coaxial cable, and 4-1 is an oscilloscope.

具体实施方式detailed description

下面结合附图对本发明做详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings.

如图1所示,本发明提供了一种低阻值无感自积分罗氏线圈积分电阻,包括:回流装置以及设置于回流装置内的首端匹配电阻3,其中,回流装置包括圆柱筒状的金属支撑4,金属支撑4的外表面设置有绝缘层5,绝缘层5的外表面设置有喷金层6;喷金层6采用喷金工艺制成外导体结构。As shown in Figure 1, the present invention provides a low-resistance non-inductive self-integrating Rogowski coil integrating resistor, including: a return device and a head-end matching resistor 3 arranged in the return device, wherein the return device includes a cylindrical The metal support 4 is provided with an insulating layer 5 on the outer surface of the metal support 4, and the outer surface of the insulating layer 5 is provided with a gold-sprayed layer 6; the gold-sprayed layer 6 is made of an outer conductor structure by a gold-spraying process.

回流装置外表面设置有金属屏蔽壳8,回流装置与金属屏蔽壳8同心设置,且回流装置与金属屏蔽壳8之间设置有空气绝缘层,金属屏蔽壳8的一端安装有电缆头7,金属屏蔽壳8的另一端敞开;且电缆头7伸入金属屏蔽壳8,并与喷金层6接触。The outer surface of the backflow device is provided with a metal shielding shell 8, and the backflow device and the metal shielding shell 8 are arranged concentrically, and an air insulation layer is arranged between the backflow device and the metal shielding shell 8, and a cable head 7 is installed on one end of the metal shielding shell 8. The other end of the shielding shell 8 is open; and the cable head 7 extends into the metal shielding shell 8 and is in contact with the gold-sprayed layer 6 .

首端匹配电阻3设置于金属支撑4内,且首端匹配电阻3一端通过焊锡2与金属支撑4前端连接,另一端与电缆头7连接,喷金层6以及焊锡上连接有引出线1。The head-end matching resistor 3 is set in the metal support 4, and one end of the head-end matching resistor 3 is connected to the front end of the metal support 4 through the solder 2, and the other end is connected to the cable head 7, and the lead wire 1 is connected to the gold-sprayed layer 6 and the solder.

本法发明中,绝缘层5为金属氧化层,具体可以使用化学氧化的方法,或是电镀。当然也可以刷上一层绝缘漆或是覆盖一层绝缘薄膜。注意连接处需要留下空当,以便喷金层的连接。In this method and the invention, the insulating layer 5 is a metal oxide layer, specifically, chemical oxidation or electroplating can be used. Of course, it can also be painted with a layer of insulating paint or covered with a layer of insulating film. Note that the connection needs to leave a space for the connection of the gold spray layer.

本发明还提供了一种低阻值无感自积分罗氏线圈积分电阻制造方法,包括以下步骤:The present invention also provides a method for manufacturing a low-resistance non-inductive self-integrating Rogowski coil integrating resistor, comprising the following steps:

1)、根据预设要求,制作圆柱筒状金属体为金属支撑4;1), according to the preset requirements, make a cylindrical metal body as a metal support 4;

2)、在金属支撑4的外侧设置绝缘层5,并且在金属支撑4的连接处预留喷金层6的位置,所述绝缘层5通过化学氧化法或电镀法制成氧化膜,或者通过涂刷绝缘漆形成绝缘漆层。2), the insulating layer 5 is provided on the outside of the metal support 4, and the position of the gold-sprayed layer 6 is reserved at the connection of the metal support 4, and the insulating layer 5 is made into an oxide film by chemical oxidation or electroplating, or by coating Brush insulating varnish to form an insulating varnish layer.

3)、在绝缘层5上使用离子溅射仪或喷金仪镀上一层喷金层6作为外导体后,形成回流装置;所述喷金层6采用金、银或铜金属材料。3) On the insulating layer 5, use an ion sputtering instrument or a gold spraying instrument to plate a layer of gold spraying layer 6 as an outer conductor, and then form a reflow device; the gold spraying layer 6 is made of gold, silver or copper metal materials.

4)、在回流装置上安装首端匹配电阻3、金属屏蔽壳8以及电缆头7,得到低阻值无感自积分罗氏线圈积分电阻,所述首端匹配电阻3的阻值范围与信号输出电缆阻抗相同。4), install the head-end matching resistor 3, the metal shielding shell 8 and the cable head 7 on the reflux device to obtain a low-resistance non-inductive self-integrating Rogowski coil integrating resistor, the resistance range of the head-end matching resistor 3 and the signal output The cable impedance is the same.

本发明的工作过程及原理为:Working process and principle of the present invention are:

脉冲大电流或电子束流通过图2所示的罗氏线圈时,会在线圈中感应出电动势,通过积分电阻流过二次电流,同时积分电阻上也会有电压降。该电压降可以通过积分电阻上的电缆头传递到示波器中。由于该积分电阻电感极小,所以在高频情况下仍然能够视作纯电阻,通过该电阻的电流波形和一次电流波形几乎一致,畸变极小。同时喷金层和金属支撑构成的回路电阻较小,约从0.01欧姆到1欧姆之间,可以轻松测量几十千安甚至百千安的电流。When a large pulsed current or electron beam passes through the Rogowski coil shown in Figure 2, an electromotive force will be induced in the coil, and a secondary current will flow through the integrating resistor, and there will be a voltage drop on the integrating resistor. This voltage drop can be transferred to the oscilloscope through the cable tip on the integrating resistor. Due to the extremely small inductance of the integral resistor, it can still be regarded as a pure resistor at high frequencies. The current waveform passing through the resistor is almost the same as the primary current waveform, and the distortion is extremely small. At the same time, the loop resistance formed by the gold-sprayed layer and the metal support is small, ranging from about 0.01 ohm to 1 ohm, and can easily measure tens of kiloamperes or even hundreds of kiloamperes of current.

本发明中的低阻值无感自积分罗氏线圈积分电阻测试系统为:The low-resistance value non-inductive self-integrating Rogowski coil integral resistance test system in the present invention is:

如图2所示,包括罗氏线圈1-1、低阻值无感自积分罗氏线圈积分电阻2-1、同轴电缆3-1,以及示波器4-1,其中,低阻值无感自积分罗氏线圈积分电阻2-1的引出线与罗氏线圈1-1连接,积分电阻2-1另一端通过同轴电缆3-1与示波器4-1连接,罗氏线圈引出线将信号加载到积分电阻上,他们的连接通过焊锡或是别的导电方式连接。其中内导体和喷金层构成回流装置,由于喷金层很薄,所以这个同轴电阻的电感很小。As shown in Figure 2, it includes a Rogowski coil 1-1, a low-resistance non-inductive self-integrating Rogowski coil integrating resistor 2-1, a coaxial cable 3-1, and an oscilloscope 4-1, wherein the low-resistance non-inductive self-integrating The lead-out wire of the Rogowski coil integrating resistor 2-1 is connected to the Rogowski coil 1-1, and the other end of the integrating resistor 2-1 is connected to the oscilloscope 4-1 through the coaxial cable 3-1, and the lead-out wire of the Rogowski coil loads the signal to the integrating resistor , and their connections are connected by solder or other conductive means. The inner conductor and the gold-sprayed layer constitute the reflow device. Since the gold-sprayed layer is very thin, the inductance of the coaxial resistor is very small.

Claims (10)

1.一种低阻值无感自积分罗氏线圈积分电阻,其特征在于,包括:回流装置以及设置于回流装置内的首端匹配电阻(3),其中,回流装置包括圆柱筒状的金属支撑(4),金属支撑(4)的外表面设置有绝缘层(5),绝缘层(5)的外表面设置有喷金层(6);1. A low-resistance non-inductive self-integrating Rogowski coil integrating resistor, characterized in that it comprises: a backflow device and a head end matching resistor (3) arranged in the backflow device, wherein the backflow device includes a cylindrical metal support (4), the outer surface of the metal support (4) is provided with an insulating layer (5), and the outer surface of the insulating layer (5) is provided with a gold-sprayed layer (6); 回流装置外表面设置有金属屏蔽壳(8),回流装置与金属屏蔽壳(8)同心设置,且回流装置与金属屏蔽壳(8)之间设置有空气绝缘层,金属屏蔽壳(8)的一端安装有电缆头(7),金属屏蔽壳(8)的另一端敞开;The outer surface of the backflow device is provided with a metal shielding case (8), the backflow device and the metal shielding case (8) are arranged concentrically, and an air insulating layer is arranged between the backflow device and the metal shielding case (8), and the metal shielding case (8) A cable head (7) is installed at one end, and the other end of the metal shielding shell (8) is open; 首端匹配电阻(3)设置于金属支撑(4)内,且首端匹配电阻(3)一端通过焊锡(2)与金属支撑(4)前端连接,另一端与电缆头(7)连接。The head-end matching resistor (3) is arranged in the metal support (4), and one end of the head-end matching resistor (3) is connected to the front end of the metal support (4) through solder (2), and the other end is connected to the cable head (7). 2.根据权利要求1所述的低阻值无感自积分罗氏线圈积分电阻,其特征在于,所述喷金层(6)以及焊锡上连接有引出线(1)。2. The low-resistance non-inductive self-integrating Rogowski coil integrating resistor according to claim 1, characterized in that the gold-sprayed layer (6) and the solder are connected with lead wires (1). 3.根据权利要求1所述的低阻值无感自积分罗氏线圈积分电阻,其特征在于,所述电缆头(7)伸入金属屏蔽壳(8),并与喷金层(6)接触。3. The low-resistance non-inductive self-integrating Rogowski coil integrating resistor according to claim 1, characterized in that the cable head (7) extends into the metal shielding shell (8) and contacts the gold-sprayed layer (6) . 4.根据权利要求1所述的低阻值无感自积分罗氏线圈积分电阻,其特征在于,所述绝缘层(5)为金属氧化层或绝缘漆层。4. The low-resistance non-inductive self-integrating Rogowski coil integrating resistor according to claim 1, characterized in that the insulating layer (5) is a metal oxide layer or an insulating paint layer. 5.根据权利要求1所述的低阻值无感自积分罗氏线圈积分电阻,其特征在于,所述喷金层(6)采用喷金工艺制成外导体结构。5. The low-resistance non-inductive self-integrating Rogowski coil integrating resistor according to claim 1, characterized in that the gold-sprayed layer (6) is made of an outer conductor structure by a gold-spraying process. 6.一种基于权利要求1所述的低阻值无感自积分罗氏线圈积分电阻制造方法,其特征在于,包括以下步骤:6. a method for manufacturing a low-resistance non-inductive self-integrating Rogowski coil integrating resistance based on claim 1, characterized in that, comprising the following steps: 1)、根据预设要求,制作圆柱筒状金属体为金属支撑(4);1), according to the preset requirements, make a cylindrical metal body as a metal support (4); 2)、在金属支撑(4)的外侧设置绝缘层(5),并且在金属支撑(4)的连接处预留喷金层(6)的位置;2), an insulating layer (5) is arranged on the outer side of the metal support (4), and a position of the gold-sprayed layer (6) is reserved at the connection of the metal support (4); 3)、在绝缘层(5)上使用离子溅射仪或喷金仪镀上一层喷金层(6)作为外导体后,形成回流装置;3), on the insulating layer (5), use an ion sputtering instrument or a gold spraying instrument to plate a layer of gold spraying layer (6) as the outer conductor, and form a reflow device; 4)、在回流装置上安装首端匹配电阻(3)、金属屏蔽壳(8)以及电缆头(7),得到低阻值无感自积分罗氏线圈积分电阻。4) Install the head-end matching resistor (3), the metal shielding case (8) and the cable head (7) on the reflow device to obtain a low-resistance non-inductive self-integrating Rogowski coil integrating resistor. 7.根据权利要求6所述的低阻值无感自积分罗氏线圈积分电阻制造方法,其特征在于,所述步骤2)中绝缘层(5)通过化学氧化法或电镀法制成氧化膜。7. The low-resistance non-inductive self-integrating Rogowski coil integral resistance manufacturing method according to claim 6, characterized in that, in the step 2), the insulating layer (5) is made into an oxide film by chemical oxidation or electroplating. 8.根据权利要求6所述的低阻值无感自积分罗氏线圈积分电阻制造方法,其特征在于,所述步骤2)中绝缘层(5)通过涂刷绝缘漆形成。8. The low-resistance non-inductive self-integrating Rogowski coil integral resistance manufacturing method according to claim 6, characterized in that the insulating layer (5) is formed by painting insulating varnish in said step 2). 9.根据权利要求6所述的低阻值无感自积分罗氏线圈积分电阻制造方法,其特征在于,所述喷金层(6)采用金、银或铜金属材料。9. The method for manufacturing low-resistance non-inductive self-integrating Rogowski coil integral resistors according to claim 6, characterized in that, the gold-sprayed layer (6) is made of gold, silver or copper metal materials. 10.根据权利要求6所述的低阻值无感自积分罗氏线圈积分电阻制造方法,其特征在于,所述首端匹配电阻(3)的阻值范围与信号输出电缆阻抗相同。10. The method for manufacturing a low-resistance non-inductive self-integrating Rogowski coil integrating resistor according to claim 6, wherein the resistance range of the head-end matching resistor (3) is the same as the impedance of the signal output cable.
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