TWI267641B - Measuring module suitable for all kind of electric characteristics and small measuring point - Google Patents

Measuring module suitable for all kind of electric characteristics and small measuring point Download PDF

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TWI267641B
TWI267641B TW94102985A TW94102985A TWI267641B TW I267641 B TWI267641 B TW I267641B TW 94102985 A TW94102985 A TW 94102985A TW 94102985 A TW94102985 A TW 94102985A TW I267641 B TWI267641 B TW I267641B
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layer
test
pin
probe
tested
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TW94102985A
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Chinese (zh)
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TW200628795A (en
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Jin-Tsai Jeng
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Jin-Tsai Jeng
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Abstract

The present invention relates to a measuring module suitable for all kinds of electrical characteristics and small measuring point, which comprises of a carrier plate, a guide correction layer, a clamp pin layer, linear probes, first buffer components, second buffer components, stroke adjustment rods, guide posts, and a base, in which the carrier plate, the guide correction layer, and the clamp pin layer are capable of vertically lifting and descending along the same axis applying the guide posts. The linear probes are inserted into the carrier plate, the guide correction layer, and the clamp pin layer such that their inner ends are fixed at the clamp pin layer and their outer ends are located at the carrier plate position. The first buffer components and the stroke adjustment rods are disposed between the guide correction layer and the clamp pin layer, while the second buffer components are disposed between the base and the clamp pin layer such that the carrier board, the guide correction layer, and clamp pin layer all are having an elastic force, and the elastic force exerts a force of equal magnitude to each linear probe. Therefore, the measuring module creates a very small gap between the outer ends of adjacent linear probes, so that it can test micro measured objects and the testing pressure and contact resistance for each measured point is identical, further to increase the measuring stability, and similarly effectively improve damage to the measured object.

Description

12676411267641

【發明所屬之技術領域】 、本發明係有關一種適用 之測試模組,尤指一種可對 提供更高測試密度及更輕測 且可應用於各式電路空板或 【先前技術】 於各式電氣特性且具微小特點 各種電子產品之各項電氣特性 試壓力以及更穩定測試效果, 貫裝板測試作業之測試模組。 測試的方式,大 按’習知對電子產品用之電路板進行 抵有下列數種: 右弟一、二圖所示,該主要係在一治具1之基座11設 、反1 2、夾板1 3、頂板1 4及若干探針2。其中,該針板 ^預設有對應待測物3(如印刷電路板)之待測點31的針孔 21,該若干探針2係由探針套筒21、針筒22、彈箬23及針 體24組成。 〃 上述,該探針2之探針套筒2 1係插置在針板丨2預置之 針孔1 2_1内’其一端設有導線4用以將訊號傳輸至測試機 (圖^未示);該彈簧23係容置在針筒22内,針體24係插置在 針筒22内,藉由彈簧23之伸縮力,使針體24在針筒22内具 有彈性伸縮之回復力,而該針筒22係固定於探針套筒21内 ’如是’該探針2便可完成定位在針板1 2上。 Φ 上述’該夾板1 3、頂板1 4上係分別設有與針板1 2之針 孔121相對應的穿孔13ι、14ι,而針體24係穿過夾板13、 頂板14之穿孔131、;[ 41,而凸出於頂板! 4。 如是’將待測物3放置於頂板1 4上方,藉由測試機具 將待測物3之待測點3 1與探針2之針體24接觸,則該電訊號[Technical Field] The present invention relates to a suitable test module, especially one that can provide higher test density and lighter measurement and can be applied to various circuit boards or [prior art] Electrical characteristics and small features Various electrical characteristics of various electronic products, test pressure and more stable test results, test modules for through-board test operations. In the way of testing, the following is a few of the following types of circuit boards for electronic products: As shown in the second and second figures of the right brother, the main system is set on the base 11 of the fixture 1 and reversed. The splint 1 3, the top plate 14 and a plurality of probes 2. Wherein, the needle plate is pre-equipped with a pinhole 21 corresponding to the point 31 to be tested of the object to be tested 3 (such as a printed circuit board), and the plurality of probes 2 are composed of a probe sleeve 21, a syringe 22, and an magazine 23 And the needle body 24 is composed. 〃 In the above, the probe sleeve 2 1 of the probe 2 is inserted into the pinhole 1 2_1 preset in the needle plate ' 2, and one end of the probe 2 is provided with a wire 4 for transmitting signals to the testing machine (Fig. The spring 23 is received in the barrel 22, and the needle 24 is inserted into the barrel 22. The elastic force of the spring 23 causes the needle body 24 to have an elastic expansion and contraction force in the barrel 22. The syringe 22 is fixed in the probe sleeve 21, and the probe 2 can be positioned on the needle plate 12. Φ The above 'the splint 13 and the top plate 14 are respectively provided with perforations 13ι, 14ι corresponding to the pinholes 121 of the needle plate 12, and the needle 24 is passed through the splint 13 and the perforations 131 of the top plate 14, [41, and protruded from the top! 4. If the object to be tested 3 is placed above the top plate 14 and the point to be tested 3 1 of the object to be tested 3 is brought into contact with the needle body 24 of the probe 2 by the test tool, the electrical signal is

1267641 :發明說明(2) 五 便可依序傳遞至彈簣23、探針套筒21,並由探針套筒21底 部連接之導線4傳遞至測試機完成測試作業。 如上所述,習知之測試治具具有如下之缺點: 1、 由於探針2與待測物3之待測點31接觸時,必需具 有彈性回復之伸縮力,以防止損壞待測點3丨之電性,因此 ,針體24必需設於具有彈簧23之針筒22内,使針體以被壓 縮後可自動彈伸回復,如是之構造組成,整個探針2之體 積無法製成相當細小,或將其製成相當細小時,其相對a 成本非常高昂,以致造成測試成本的提高及無法提 密度。 ㈡ 2、 由於探針套筒21需配合探針2之尺寸設計,因此发 尺寸相,的文到限制,以致針板丨2之針孔丨2 i之整體密户、 無法提问,將造成無法測試高密度待測點3丨之待測物3。 3、 由於待測物3之待測點”之電訊號係藉由針體24、 辞性7L件2 3、針筒2 2、探針套筒2 J篝 一 觸傳遞,然,在經過多道之接觸偟、腾&牛、一、、且a及電接 不_ b > a 之接觸傳遞後,將造成訊號傳滲 及农減之現象’以致影響測試之品質,尤其在 j 迸又之待測點時,其效果更佳不彰。 八 ^ 針2 ^針音係山垂直式的與待測物3接觸,因此,相鄰探 t對於的距離d必然是無法有效縮小的情形下, 对於具被測點(即待測點宓 w u r , 將有完全無法實施之虞。山又較咼)之待測物3的測試作業 有鐘於上述,此間乃有章 之測試治具,該主 出如苐三、四圖所示 旻係將/σ具上设有針盤5、線盤6、若干1267641: Invention Description (2) Five can be sequentially transmitted to the magazine 23, the probe sleeve 21, and transmitted to the testing machine by the wire 4 connected to the bottom of the probe sleeve 21 to complete the test operation. As described above, the conventional test fixture has the following disadvantages: 1. Since the probe 2 is in contact with the point 31 to be tested of the object to be tested 3, it is necessary to have an elastic recovery elastic force to prevent damage to the point to be measured. Therefore, the needle body 24 must be disposed in the syringe 22 having the spring 23, so that the needle body can be automatically rebounded and restored after being compressed. If the structure is composed, the volume of the entire probe 2 cannot be made relatively small. Or it can be made into a relatively small hour, and its relative cost is very high, resulting in an increase in test cost and inability to increase density. (2) 2. Since the probe sleeve 21 needs to be matched with the size design of the probe 2, the size of the hairpin is limited, so that the pinhole 丨2 i of the needle plate 丨 2 can not be questioned, which will result in failure. Test the high-density to-be-measured point 3 of the object to be tested 3. 3. Because the signal to be tested of the object to be tested 3 is transmitted by the needle 24, the 7L piece 2 3, the syringe 2 2, the probe sleeve 2 J篝, and then The contact between 道, 腾 & 牛, 一,和, and a 接 _ b > a contact transmission will cause signal transmission and agricultural reduction phenomenon, which will affect the quality of the test, especially in j 迸When the point to be measured is further, the effect is better. The 8^ pin 2^ pin is a vertical type of contact with the object to be tested 3, therefore, the distance d for the adjacent probe must not be effectively reduced. Next, for the test object 3 with the measured point (that is, the point to be tested 宓wur, there will be completely impossible to implement. The mountain is more ambiguous), there is a test in the above, and there is a test fixture in this chapter. The main output is as shown in Fig. 3 and Fig. 4, and the σ is equipped with a dial 5, a reel 6, and several

麵 第7頁 1267641 五、發明說明(3) '線狀探針7及若干彈性元件8等主要元件。其中,該針盤5 ‘、線盤6係相互疊置組合,該針盤5係設有複數層導正板5 j 與一頂板52,在頂板52上設有與待測物3之待測點31相對 應的穿孔521,而在導正板51上係以垂直或斜置狀設有與 頂板穿孔521相對應的穿孔511 ;該線盤6係設有上、中、Page 7 1267641 V. INSTRUCTIONS (3) 'The main components such as the linear probe 7 and several elastic elements 8. Wherein, the dial 5' and the reel 6 are stacked on each other, and the dial 5 is provided with a plurality of layers of guiding plates 5 j and a top plate 52, and the top plate 52 is provided with the object to be tested 3 to be tested. The corresponding perforation 521 of the point 31, and the perforation 511 corresponding to the top plate perforation 521 is provided on the guiding plate 51 in a vertical or oblique shape; the reel 6 is provided with upper, middle,

下三層夾板61、62、63,並分別在其上鑽設有對應於針盤 5之導正板穿孔511的穿孔611、621、631,其中,該中層 爽板62之穿孔621係容置有彈性元件8,該下層夾板63之穿 孔631係供連接於測試機(圖未示)與彈性元件8底端之間的 導線4*穿置;該線狀探針7係沿著針盤5之頂板穿孔521、導 正板穿孔5 1 1及線盤β之上層夾板穿孔6丨i穿置,而將内端 頂承於彈性元件8及外端係外露於針盤頂板5 2。 藉之,待測物3設置在針盤5之頂板52上方,藉由測試 機具將待測物3之待測點31與線狀探針7接觸,則該電訊號 ,可依序傳輸至彈性元件8、導線4及測試機完成測試作& 、彈ί2?則的設成’雖較前述必需先將探針針體24 弹百23、針同22、探針套筒21相互組合方可 較具貫施簡易性,及該斜放的峻爿 工 f,oi ^ ^ ^ ^ 斜放的線狀铋針7雖可應用於待測 ;31益度較问之待測物3,而較習知治具具 範圍0惟,因庫雷;方口 _士人士 ’更大的應用 密度需體積愈來愈小,而要求之測試 在度而更问、測试壓力需更輕及 1、由於諸線狀探針7分別呈垂直盥 · 件下,是藉測4、、Λ 〜从禾而更穩定的條 忏卜疋種測试冶具仍有下述美中不足之缺 〜土土且兴計置狀穿設於針盤The lower three layers of the clamping plates 61, 62, 63 are respectively drilled with perforations 611, 621, 631 corresponding to the guiding plate perforations 511 of the dial 5, wherein the perforations 621 of the intermediate cooling plate 62 are accommodated. The elastic member 8 has a through hole 631 of the lower plate 63 for the wire 4* connected between the testing machine (not shown) and the bottom end of the elastic member 8; the linear probe 7 is along the dial 5 The top plate perforation 521, the guide plate perforation 51 and the upper plate ply perforation 6丨i are placed, and the inner end is supported by the elastic member 8 and the outer end is exposed to the dial top plate 52. The object to be tested 3 is disposed above the top plate 52 of the dial 5, and the test point 31 of the object to be tested 3 is brought into contact with the linear probe 7 by the test tool, and the electrical signal can be sequentially transmitted to the elastic state. The component 8, the wire 4, and the tester complete the test for & and the ί2? is set to 'before the above-mentioned probe needle 24 is required to be smashed, the needle 22, and the probe sleeve 21 are combined with each other. It is more simplistic and simple, and the oblique 爿 爿 ^ ^ ^ ^ ^ 线 的 线 线 虽 虽 虽 虽 虽 虽 虽 虽 虽 线 线 线 线 线 线 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 31 The scope of the Zhizhi tool has a range of 0. Because of the large application density of the Querrey; Fangkou_Shiren people, the volume needs to be smaller and smaller, and the required test is more in question, the test pressure needs to be lighter and 1, due to The linear probes 7 are vertically 盥· 。 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Shaped on the dial

第8頁 1267641 五、’發明說明(4) 5並令内端頂承於對應之彈性元件8後,复 互不相同(垂直之探針外端較高,斜置之探 端&的咼度係 '故當待測物3受壓致諸線狀探針7接觸對样 端較低)’ 然是連帶不同的情形下,該待測物便極 的塵, 生損傷或測試不穩定之情事,而此亦是最八2不均而毛 處。 7杀者詬病之 2、由於該每一線狀探針7需配合一彈性 f線狀探針7係極為細,卜該彈性元件8亦 ’且因 較小狀,故該眾多的細小彈性元件,㉟ 制^對的衣成 係同樣具有極感麻煩、不便與昂貴之情 ς、、組裝上 應之線狀探針7的彈性力而t,亦會致使各別施予對 到的彈力呈現不一较,、# 1 A 吏各線狀探針7所得 試壓力連帶有發生不均勻、u::J待測點所受到的測 ^ t r""" ^ 故該測試訊號仍會因轉接a 被¥線4傳遞至測試機, 事,進而依44多而發生傳輸不良與衰減情 曰 ’、、、有汾警測甙品質穩定性之虞。 疋,有鑑於上述之缺失抚 理的運用,特將習知者加以^ ^乃潛心精研並配合學 明。 以°又叶改良,終於提供出本發 【發明内容】 即’本發明之主要目 氣特性且具微小測點之測$ ^在提供一種適用於各式電 的内端係一同固設在爽針展果、、且,其中,藉該諸線狀探針 曰’而夾針層又係受第二緩衝元 1267641 五、發明說明(5) -件頂承’則該諸線狀探針將可 試待測物,俾達到提高測 =彈性作用力實施測 1 一線狀探針内端配置一彈::::土,同時,該毋需在 測試治具整體暨元件之製作、 盘Λ轭方式,亦可使得 方便、快速及經濟之效。 、,衣人維修具有更形簡易、 本發明之另一目的,乃在 性且具微小測點之測試模組,其中、^適用於各式電氣特 在夾針層後,其等外端之高声^=該諸線狀探針固設 為基,則實施測試作業時,兮蠄、測物各對應待測點 應之待測點,自然的,俾該;!:=針,時觸及對 、接觸阻值係可連帶相同,進而:‘二,又到的,試壓力 穩定:時,亦可有效達到降低待測:匕測忒之 性且具微小測點之測試模組,匕―種式電氣特 將測得訊號直接經由導線傳輸線狀探針係可 训王碉忒機,而不需透過JL# 介體,則該測試之品質將可藉以達到大幅提高之效, 欠ft!之再一目的乃在提供—種可對各式電子產品 之各項電氣特性提供更高測試密度及更輕測試壓力以及更 穩疋測试效果,且可應用於各式電路空板或實裝板測試作 業之測試模組。 為使貴審查委員對於本發明之目的、特徵及功效有 更進一步的了解與認同,兹配合圖式詳細說明於后: 【實施方式】 ' 首先,請參閱第五、六圖所示’清晰顯示,本發明一Page 8 1267641 V. 'Inventive Note (4) 5 and let the inner end bear the corresponding elastic element 8, the complex is different from each other (the vertical probe is higher at the outer end, and the inclined probe end & Degree system 'When the object to be tested 3 is pressed, the linear probes 7 are in contact with the lower end of the sample end') However, in the case of different joints, the object to be tested is extremely dusty, and the damage or test is unstable. The situation, and this is also the most unbalanced and Mao. 7 killer rickets 2, because each of the linear probes 7 need to cooperate with an elastic f-linear probe 7 is extremely thin, and the elastic element 8 is also 'small, so the numerous small elastic elements, 35 The pair of clothing systems are also extremely troublesome, inconvenient and expensive, and the elastic force of the linear probe 7 assembled in the same way, and also causes the elastic force of each pair to be presented. A comparison test, #1 A 吏 each line probe 7 obtained test pressure with unevenness, u::J test points received ^ t r """ ^ so the test signal will still be transferred The connection a is transmitted to the test machine by the ¥4, and the transmission failure and attenuation are caused by more than 44, and there is a flaw in the quality stability of the police. Hey, in view of the above-mentioned use of the lack of care, the specials will be carefully studied and cooperated with the students. With the improvement of ° and leaves, the present invention is finally provided. [Inventive content] That is, the main eye-catching characteristics of the present invention and the measurement of the micro-measurement point are provided in the interior end system which is suitable for various types of electricity. The needle-like fruit, and, wherein, the linear probes 曰' and the pin layer is subjected to the second buffer element 1267641 5. The invention description (5) - the top bearing 'the linear probes will The test object can be tested, and the test can be carried out to improve the test. The elastic force is measured. 1 The inner end of the linear probe is configured with a bomb:::: soil. At the same time, the test is required to make the whole fixture and component of the test fixture. The way can also make it convenient, fast and economical. , the clothing repair has a more simple and simple, another object of the present invention, is a test module with a small measuring point, wherein ^ is suitable for all kinds of electrical special after the pin layer, its outer end High sound ^=The linear probes are fixed as the base, then when the test operation is carried out, the 兮蠄 and the measured objects correspond to the points to be measured at the points to be measured, naturally, 俾; :=Needle, touch and pair, contact resistance can be the same, and then: 'two, again, when the test pressure is stable: can also effectively reduce the test to be tested: the nature of the test and the small measurement point The test module, the 匕-type electric special test signal can be transmitted directly through the wire to the linear probe system, without the need to pass the JL# mediator, the quality of the test can be greatly improved. Another effect of owing to ft! is to provide higher test density and lighter test pressure and more stable test results for various electrical characteristics of various electronic products, and can be applied to various circuits. Test module for empty board or mounted board test operations. In order to enable the review committee to have a better understanding and approval of the purpose, features and functions of the present invention, the following detailed description will be given with the following figures: [Embodiment] 'First, please refer to the fifth and sixth figures' for clear display. , the invention one

1267641 五、發明說明(6) -種適用於各式電氣特性且具微小測點之測試模組,主要係 包含有載板1 〇、導正層2 0、夾針層3 0、線狀探針7、第一 緩衝元件40、行程調整柱50、第二緩衝元件6〇、導柱7〇、 基座11等主要元件組成。其中,該導柱7〇係可按於基座u 四端角,而該載板1 0、導正層2 0、夾針層3 0係可以導柱7 〇 為基做同一軸線的垂直升、降位移。即; 該載板1 0,係用以供待測物3承置定位,其上在待測 物3之各待測點3 1對應處’係分別預設有一供線狀探針7穿 言免的插孔1 〇 1 ; 該導正層20,係設有複數塊導正板2〇1,各導正板2〇1 相互係以適當咼度間隔並藉定位銷2 1與載板1 〇固設為一體 在各導正板201上係設有與載板1〇之插孔1〇ι呈垂直或斜 置對應之導正孔2 0 1 1 ; 一…該夾針層30,係位於導正層2〇之内側,其主要係設有 疋位框座3 〇 1及複數塊夾針板3 〇 2。其中,該定位框座 ^ 1係將中央設為貫通並於周邊設有一承部3 〇丨丨;該複數 J,針板302係相互疊置在定位框座3〇1之承部3〇11,並可 ^疋位螺絲32固設,而其中該鄰近導正層2〇的最外層夾針 ^ 2且係固设在定位框座3 〇】上,其等之上係設有與導 層Μ之導^孔2011呈垂直或斜置對應的穿孔3〇21 ; 4線狀板針7,係依待測物3之待測點3 1數量設為複數 系分別穿設在夾針層3〇之各夾針板30 2 ( 302,)的各穿 之.1、&正層20之各導正板201的導正孔2011及載板10 孔1 0 1而令外端恰對應於待測物3之待測點3 1,其等1267641 V. INSTRUCTIONS (6) - A test module suitable for various electrical characteristics and with small measuring points, mainly including carrier board 1 导, guiding layer 20, pin layer 30, linear probe The main components such as the needle 7, the first cushioning member 40, the stroke adjusting column 50, the second cushioning member 6A, the guide post 7A, and the base 11 are composed. Wherein, the guiding column 7 can be connected to the four end angles of the base u, and the carrier 10, the guiding layer 20, and the pin layer 30 can be vertically raised on the same axis based on the guiding column 7 , reduce the displacement. That is, the carrier 10 is used for positioning the object to be tested 3, and the corresponding points of the to-be-measured points 3 1 of the object to be tested 3 are respectively preset with a line probe 7 Except for the jack 1 〇1; the guiding layer 20 is provided with a plurality of guiding plates 2〇1, and the guiding plates 2〇1 are mutually spaced at appropriate intervals and the positioning pin 2 1 and the carrier 1 are The tamping is integrated, and each of the guiding plates 201 is provided with a guiding hole 2 0 1 1 which is perpendicular or obliquely corresponding to the insertion hole 1〇 of the carrier 1〇; It is located on the inner side of the guiding layer 2〇, and is mainly provided with a clamping frame seat 3 〇1 and a plurality of pinch plates 3 〇2. Wherein, the positioning frame base 1 has a central portion and a receiving portion 3 〇丨丨 is disposed at the periphery; the plurality of pins J and the needle plates 302 are stacked on each other at the receiving portion 3〇11 of the positioning frame base 3〇1. And the clamping screw 32 is fixed, and the outermost pin 2 of the adjacent guiding layer 2 is fixed on the positioning frame 3, and the guiding layer is arranged on the same Μ 导 孔 孔 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 2011 Each of the pin plates 30 2 (302,) is inserted into the guide hole 2011 of each of the guide plates 201 of the positive layer 20 and the hole 10 1 of the carrier plate 10 so that the outer end corresponds to the outer end DUT 3 to be tested 3 1, etc.

第11頁 1267641Page 11 1267641

五、發明說明(7) —之内jr而係固設在夹益 议义么 機(圖未示)之導線4 ;曰 別按設有一連接於測試 與爽元:4Γ係設有複數個並按設在導正層2。 力; 俾v正層2 0與載板1 0係具有彈性作用 ,佐及仃知'周整柱5G,係按設在導正層2G與夹針層3〇之間 之長=預留的設定間距b制定線狀探針7外端外伸於載板1 〇 力^又,進而控制線狀探針7施予待測物待測點31之壓 ,梅:ft緩衝元件60,係可設為較第-緩衝元件40為大 接提;諸:2 =按設在夾針層3〇與基座11之間,俾;直 仏渚線狀奴針7相同之彈性作用力; 7實施組裝1勺用方上气述所至構成的人本發明,其中,該諸線狀探針 =:載!;1。、導正層2。、夹針層3。暨導柱7〇^ 使行程卞敕測物杈擬塊9上,並將該夾針層30予以下壓 31的高声呈一、'、研±磨平板,俾應用於待測物3之諸待測點 據待“3之^ ;或該待測物模擬塊9之表面係可依 输壯;7二待測點3 1的位置、高度製成。繼之,該等 1二:乃係由夾針層30預設之各穿孔302 1逐一往下穿 ^〇1、ϋ歷經導正層2〇之諸導正板201預設的對應導正 系頂釗1、、,而插設於載板1〇之對應插孔101,及恰致外 而’、、測物模擬塊9之表面,而待諸線狀探針7均插設5. Inventive Note (7) - jr is fixed on the wire 4 of the clip-on machine (not shown); the set is connected to the test and the Shuangyuan: 4Γ is provided with a plurality of Press according to the guiding layer 2. Force; 俾v positive layer 20 and the carrier 10 system has an elastic effect, and the 仃 ' '周周柱5G, according to the length between the guiding layer 2G and the pin layer 3 = = reserved Setting the spacing b, the outer end of the linear probe 7 is extended to the carrier 1 to control the pressure of the linear probe 7 to be applied to the point to be tested 31, and the ft cushioning element 60 can be It is set to be larger than the first cushioning element 40; the following: 2 = according to the elastic force provided between the pin layer 3〇 and the base 11, 俾; the straight line-shaped slave needle 7; 7 implementation The invention of the present invention is assembled by assembling one scoop of the above-mentioned smear, wherein the linear probes are: , guiding layer 2. , pin layer 3. The guiding column 7〇^ makes the stroke measuring object 杈 block 9, and the pin layer 30 is pressed down to the high sound of the one, ', grinding ± grinding plate, 俾 applied to the object to be tested 3 The points to be measured are determined to be "3"; or the surface of the object to be tested is 9 can be made strong; 7 is the position and height of the point 31 to be measured. Then, the 1 2: Each of the perforations 302 1 preset by the pin layer 30 is inserted one by one, and the corresponding guiding system tops 1, which are preset by the guiding plates 201 of the guiding layer 2, are inserted. The corresponding jack 101 of the carrier board 1 and the surface of the analog dummy block 9 and the linear probes 7 are inserted.

第12頁 1267641 五、發明說明(8) .定位後,技術人員乃再將其等之内端固設於夾針層3 〇, 該等線狀探針7便可簡便的完成組裝動作。 " 上述,當該諸線狀探針7均完成組裝動作後,技術人 員只要再將該完成組裝的載板10、導正層2〇、夾針層3〇 暨導柱70等予以正置,並按裴於基座丨丨預定位置,^ 明之測試模組便可完成整體之組裝作業。 ^ 上述,由於該諸線狀探針7的内端插設於夾針層3 〇之 對應穿孔302 1後,乃係以固設狀按置定位而非呈自曰由位 狀,故其等固設方式不拘,只要確保無位移現象即可·諸 =在夾針層30之夾針板302表面熱覆一層不導電溶液或覆 盍一層粘膠,待該不導電溶液或粘膠凝固後即可牢固的 各線狀探針7予以固設;或如第七、八圖所示,係可在夾、 針層30之各夾針板3 〇2的預定位置鑽設相對應但具孔位差 向穿孔3 0 22a、3022b,而利用輪心定位螺絲32的逐一 穿設與配合螺帽33鎖設,則該疊置在定位框座3〇1之承部 301 1的諸夾針板3〇2,便可被強迫橫向位移並致各穿孔 22a 30 22b呈同一軸線對應,進而,以該各夾針板 橫向位移時,又恰可致原提供線狀探針7穿設的諸穿孔 302 1產生偏向,則該等插設之諸線狀探針7便可隨著諸穿 孔302 1的偏向,而被強力的相互咬固達到牢固定位效 (如第八圖)。 辈士’請再配合第九圖所示,本發明對待測物實施測 二m目日Γ ’、乃是將待測物3置於載板1 0之預定位置,而測 ^ ^壓於待測物3時,該載板1 〇暨導正層2 0將可受第Page 12 1267641 V. INSTRUCTIONS (8) After positioning, the technician fixes the inner end of the electrode to the pin layer 3 〇, and the wire probe 7 can easily complete the assembly operation. " As described above, after the linear probes 7 have completed the assembly operation, the technician only needs to dispose the assembled carrier 10, the guiding layer 2, the pinch layer 3, the guiding column 70, and the like. And press the 丨丨 to the predetermined position of the pedestal, the test module of the Ming can complete the overall assembly work. ^ As described above, since the inner ends of the linear probes 7 are inserted into the corresponding through holes 302 1 of the pin layer 3, they are positioned in a fixed position instead of being self-aligned, so The fixing method is not limited, as long as it is ensured that there is no displacement phenomenon, and the surface of the pinch plate 302 of the pin layer 30 is thermally coated with a non-conductive solution or a layer of adhesive, and after the non-conductive solution or the glue is solidified, The solid linear probes 7 can be fixed; or as shown in the seventh and eighth figures, corresponding holes can be drilled at predetermined positions of the respective pin plates 3 〇 2 of the clip and the needle layer 30. To the perforations 3 0 22a, 3022b, and by the rotation of the wheel center positioning screws 32 and the mating nut 33, the pin plates 3 of the receiving portion 301 1 of the positioning frame holder 3〇 are folded. 2, can be forced to lateral displacement and the perforations 22a 30 22b correspond to the same axis, and further, when the pin plates are laterally displaced, the perforations 302 1 through which the linear probes 7 are originally provided can be caused. When the deflection is generated, the inserted linear probes 7 can be firmly bitten together to achieve a firm positioning along with the deviation of the perforations 302 1 . (As in the eighth FIG). The seniors' please cooperate with the ninth figure. The invention is to measure the object to be tested, and the object 3 is placed at the predetermined position of the carrier 10, and the test is pressed. When measuring object 3, the carrier plate 1 〇 导 guiding layer 20 will be subject to

第13頁 1267641 …丨一丨丨一 ! _ 五、發明說明(9) .一緩衝元件40之彈力作動 針層3。㈣帽W “ •二 測點31,俾直接將測气、 > 觸及對應之待 繼之i虎經由導線4傳輪至測試機。 < 田戟板10、導正層20受測試壓力繼择遝枓向必 致行程調整柱50設定之間距卜喷生_ 刀遍績弹性内移 帶的被内麼,而以該夹針層3〇將會連 7著,,爾針^ 線狀^内俾該夾針層3〇暨外端均頂到待測物3的諸 开線狀J:7,不但可藉以得到保護不致發生被破壞損傷/ 力7广、H線狀探針7更可藉以得到相同的彈性作用 上述,由於該諸線狀探針7在組裝時, 模擬塊9為其等外端靠持之基,故嗲 乃係以待测物 垂直或斜置插1,豆笑 ^ μ荨次狀採針7無論係呈 點μ之時機,“;;ίΊ觸及㈣物3之對應待測 施測試作Ϊ而=二二的情形下’自然的,當前述實 作業而靶壓於待測物3暨載板1 〇、導正具 性内移時’該等逐一外 曰並使彈 應對測Ζ ^ I 針自可同時接觸到對 而,上:―1::母一待測點31所受到的壓力均呈相同,進 則兮產:母測點31受到的測試壓力均相同的情形下 、J以產生的接觸阻值亦將連帶相等,而可 /下, 需的測試穩定度高與待測物受損率低的實質^揮預期所 又,由於導正層20與夾針層30之間只尨1 。 整柱5。,且該行程調整柱5。又係以預留有行程調 載板1 0與導正層2 〇内移之距離,:二:距b做為 J上述该置於載板10上之 第14頁 五 、·發明說明(10) •待測物3文測试壓力而一併内移的距離係連帶受到設定的 情形下,自然的,該受測之待測點31除如上述係可^寻到相 -同之壓力、接觸阻值,而具測試穩定度高與待測物受損率 低等效果外,尤其,以該待測物3内移距離係被精確設定 ,將更可致諸受測點31不會因内移距離太大,而發生被線 狀探針7施予過大壓力接觸之損傷現象,或内移距"離太小 而致線狀探針7發生接觸、測試不良之情事,進而,可更 為提高測試之穩定性與達到保護待測物之效。換言之,以 該行程調整柱5 0係可精確的設定待測物3受測内移之距離 ’則该專線狀探針7外端外伸同時觸及對應待測點3 1的距 鑭|離’將連帶被精確設定的情形下,自然的,該等待測點3 1 受到的壓力、接觸阻值將不但可完全相同,而具極高之測 試穩定度’同時,該受到之壓力更可藉以適中,而致待測 物可受到更佳的保護與得到更精確、更確實之測試效果。 上述’由於該諸線狀探針7係固設在夾針層30,及該 失針層30又係受第二緩衝元件6〇直接頂承,故該等線狀探 針7除了可以相同之彈力施予待測物3之各待測點3 1,而致 測試之品質與效果更形提升外,尤其,該等線狀探針7係 不需如習知分別配置一彈性元件頂承的情形下,則其等相 • I互配置的密度將完全不會如習知受到彈性元件(彈簧)之規 格影響,而可更為密集佈列,依此,該具微測點(即,待 測點相鄰之間距極小)的各項測試作業便更可藉以達到充 分且有效運用之境。換言之,以該等線狀探針7的佈設係 完全不會如習知受限於頂承之彈性元件規格,而可以更為Page 13 1267641 ... 丨 丨丨 ! 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明(4) Cap W “ • Two measuring points 31, 俾 directly measure the gas, > touch the corresponding i tiger to the test machine via the wire 4. < Tian Hao board 10, the guiding layer 20 is subjected to the test pressure遝枓 遝枓 行程 行程 行程 行程 行程 行程 50 50 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程 行程The inside of the pinhole layer 3〇 and the outer end are all connected to the open-line J:7 of the object to be tested 3, not only can be protected from damage, the force is 7 wide, and the H-line probe 7 is more In order to obtain the same elastic effect, since the linear probes 7 are assembled, the analog blocks 9 are the bases of the outer ends thereof, so that the objects are vertically or obliquely inserted into the object to be tested, and the beans are laughing. ^ μ荨次的针针7, regardless of the timing of the point μ, ";; Ί Ί ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( When the object to be tested 3 and the carrier board are 1 〇, and the guide is moved inwardly, 'these ones are smashed one by one and the bullets are coped with the test Ζ ^ I needle can be touched at the same time, upper: ―1:: mother waiting Measuring point 31 The pressures are all the same. If the test pressures are the same, the contact resistance values generated by J will be equal, and the test stability is high. The fact that the damage rate of the measured object is low is expected to be due to the fact that there is only 尨1 between the guiding layer 20 and the pin layer 30. Whole column 5. And the stroke adjusts the column 5. In addition, the distance between the transfer board 10 and the guide layer 2 is reserved, and the distance between b and the guide layer 2 is set to be: J: the above-mentioned 14th page placed on the carrier 10. 5. Description of the invention (10) • If the distance between the test object and the test object is shifted, the distance to be measured is set. In addition, the measured point to be tested 31 can be found in the same way as the above-mentioned system. In addition to the effect of high contact stability and low damage rate of the object to be tested, in particular, the distance of the inward movement of the object to be tested 3 is accurately set, and the measurement point 31 will not be caused. The internal shift distance is too large, and the damage caused by the excessive pressure contact by the linear probe 7 occurs, or the internal shift distance is too small to cause the linear probe 7 to contact and the test is poor, and further, It improves the stability of the test and achieves the effect of protecting the test object. In other words, with the stroke adjustment column 50, the distance of the object 3 to be measured can be accurately set, and the outer end of the special line probe 7 is extended and touches the distance corresponding to the point to be measured 3 1 In the case where the connection is accurately set, naturally, the pressure and contact resistance of the waiting point 3 1 will not only be identical, but also have a very high test stability. At the same time, the pressure can be moderated. Therefore, the object to be tested can be better protected and more accurate and more reliable. In the above, since the linear probes 7 are fixed to the pin layer 30, and the lost pin layer 30 is directly supported by the second cushioning member 6〇, the linear probes 7 can be identical. The elastic force is applied to each of the to-be-measured points 3 1 of the object to be tested 3, and the quality and effect of the test are further improved. In particular, the linear probes 7 do not need to be separately configured as an elastic member. In this case, the density of its phase I inter-configuration will not be affected by the specifications of the elastic element (spring) at all, but may be more densely arranged. Accordingly, the micro-measurement point (ie, to be Tests with a very small distance between adjacent points can be used to achieve full and effective use. In other words, the arrangement of the linear probes 7 is not at all limited by the elastic component specifications of the top bearing, but may be more

第15頁 1267641 五、發明說明(10 .密實狀佈歹:的情形下’則該大至直徑10m .至直徑?3m/m的微探針將均可直接運用於本發明而2 發明所構成的測试模組便可直接運用於具微測點之各 面;Ξ板測試或實裝板;試 等各項測試〕,俾㈣組值測試) 彈竺八別i曰# &女4 /、门耠供,而非如習知係以眾多微小 ΐΐ:- :、:i針,故該第二緩衝元件60係可設為較 情形下,不但製作上係明顯具有較為簡ί 該亦9且ί ί度易於控制之效,就組裝與維修而言, 〜/Ν疋二有更為間易、方便與快速之效果。 性元5 $供:::諸線狀探針7並不需要分別的透過-彈 而毋需透過其他介體,如此,對於測試 提^出爭^^^善習知易發生衰減的不良現象’進而可 楗供2更為精確與確實的高品質效果。 ’本發明一種適用於各式電氣特性且具微小 有發’顯然具有更佳的測試效能提供’而確具 與進步性之專利要件,謹,審查委員惠予 罨視亚賜准專利’無任感禱。Page 15 1267641 V. Description of the invention (10. In the case of dense fabric: 'The size is as large as 10 m in diameter. The microprobe to diameter 3 m/m will be directly applicable to the present invention. The test module can be directly applied to each surface with micro-measurement points; slab test or mounting plate; test and other tests], 俾 (four) group value test) 竺 竺八别 i曰# & female 4 /, 耠 耠 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , 9 and ί ̄ degrees are easy to control, in terms of assembly and maintenance, ~ / Ν疋 2 has more convenient, convenient and fast effects. Sexual element 5 $ for:::The linear probes 7 do not need to pass through the bullets separately and do not need to pass through other mediators. Therefore, for the test, it is difficult to attenuate the problem. 'In turn, it can provide 2 more accurate and accurate high quality effects. 'The present invention is applicable to all kinds of electrical characteristics and has a slight hair 'apparently with better test performance to provide 'there is a progressive and progressive patent element, I hope that the reviewer Hui Yi despise the Asian patents 'nothing Pray.

第16頁 1267641 圖或簡單說明 _【圖式簡單說明】 第一圖係習知測試治具之平面示意圖(一)。 ‘第二圖係第一圖所示探針構造之平面示意圖。 第三圖係習知測試治具之平面示意圖(二)。 第四圖係第三圖實施測試作業之平面示意圖。 第五圖係本發明作實施例之平面示意圖。 第六圖係本發明組裝線狀探針實施例之平面示意圖。 第七圖係本發明夾針層組裝線狀探針實施例之平面示意 圖。 第八圖係第七圖所示固設線狀探針實施例之平面示意圖 第九圖係本發明實施測試作業實施例之平面示意圖。 【主要元件符號說明】 習知圖號說明: d :距離 1 21 :針孔 13 :夾板 23:彈簧 24:針體 1 :治具 1 1 :基座 12 :針板 1 3 1、1 4 1 ·•穿孔 1 4 :頂板 探針 21 :套筒 2 2 :針筒 待測物 31 :待測點 導線 5 2 ·頂板 5 :針盤 51 :導正板 511 ··穿孔 5 2 1 :穿孔 6 8 線盤 61 線狀探針 彈性元件 6 2、6 3 :夾板 6 1 1 、6 2 1 、6 3 1 :穿孔Page 16 1267641 Figure or simple description _ [Simple description of the diagram] The first diagram is a schematic diagram of the conventional test fixture (1). The second diagram is a schematic plan view of the probe configuration shown in the first figure. The third figure is a schematic diagram of a conventional test fixture (2). The fourth figure is a schematic plan view of the test operation performed in the third figure. The fifth drawing is a schematic plan view of an embodiment of the invention. Figure 6 is a schematic plan view of an embodiment of the assembled linear probe of the present invention. Figure 7 is a plan view showing an embodiment of a needle layer assembly linear probe of the present invention. Figure 8 is a plan view showing the embodiment of the fixed linear probe shown in Figure 7 . The ninth drawing is a plan view showing an embodiment of the test operation of the present invention. [Main component symbol description] Description of the conventional figure: d: distance 1 21: pinhole 13: splint 23: spring 24: needle body 1: jig 1 1 : base 12: needle plate 1 3 1 , 1 4 1 ·•Perforation 1 4 : Top probe 21 : Sleeve 2 2 : Syringe test object 31 : Point conductor to be tested 5 2 · Top plate 5 : Dial 51 : Guide plate 511 · Perforation 5 2 1 : Perforation 6 8 reel 61 linear probe elastic element 6 2, 6 3 : splint 6 1 1 , 6 2 1 , 6 3 1 : perforated

第17頁 1267641 圖式簡單說明 本案圖號說明 b :間距 3 : 待測物 31 :待測點 7 : 線狀探針 9 ·· 待測物模擬塊 10 載板 1 0 1 :插孔 11 基座 20 導正層 201: 導正板 2011 : 導正孔 21 定位銷 30 夾針層 301: 定位框座 3011 :承部 302 、3 0 2 ’ :夾針板 30 2 1 : 穿孔 3022a 32 定位螺絲 33 : :螺帽 40 第一緩衝元件 50 行程調整柱 60 第二緩衝元件 70 導柱 3022b :穿孔 ΦPage 17 1267641 Brief description of the diagram The description of the case number b: Spacing 3: Object to be tested 31: Point to be tested 7: Linear probe 9 ·· Dummy to be tested 10 Carrier board 1 0 1 : Jack 11 base Block 20 Guide layer 201: Guide plate 2011: Guide hole 21 Locating pin 30 Pin layer 301: Positioning frame holder 3011: Bearing portion 302, 3 0 2 ': Pin plate 30 2 1 : Perforation 3022a 32 Set screw 33 : : Nut 40 First cushioning element 50 Stroke adjustment column 60 Second cushioning element 70 Guide post 3022b : Perforation Φ

第18頁Page 18

Claims (1)

12676411267641 一 ^種適用於各式電氣特性且具微小測點之測試模 匕S有載板、導正層、夾針層、線狀探針、第一緩 二仃私调整柱、第二緩衝元件、導柱、導線及基座 凡件組成·’其中,該導柱係按於基座並可供載板、 、夾針層做同一軸線之垂直升、降位移;該線狀探 組’係 衝元件 寺主要 導正@ 針係用 試機; 該 正層係 載板固 直或斜 其上係 該第一 間,俾 針係依 之穿孔 設在夹 待測點 留有一 導正層 按設在 諸線狀 測試機 利 以測試待測物用;該導線係用以傳輸測試訊號於測 其特徵在於: ,板係依待測物之待測點預設有對應之插孔;該導 f有複數塊導正板,相互且係以適當高度間隔並與 設為一體]在各導正板上係設有與載板之插孔呈垂 ^對應的導正孔;該夾針層係位於導正層内側,在 ,有與導正層之導正孔呈垂直或斜置對應的穿孔; =衝凡件係設有複數個並按設在導正層與夾針層之 2仏$正層、載板彈性升、降之作用力;該線狀探 物之待測點設有複數支,係分別插設在夾針層 斜t正層之導正孔及載板之插孔位置並將内端係固 •二〜而外端在測試待測物時係可同時觸及對應之 f二仃耘凋整柱係按設在導正層與夾針層之間並預 受;5 Γ ’俾恰制定線狀探針在待測物、載板暨 =移時外伸之距離;該第二緩衝元件係 作用力;該導線除一端係連設於 用上:ϊί安裝固設在線狀探針内端; )貝⑪’貝,试作業而施壓於載板上之待測物A test module S having a plurality of measuring points for various electrical characteristics and having a small measuring point, a carrier layer, a guiding layer, a pin layer, a line probe, a first buffering adjustment column, a second buffering element, The guide post, the wire and the base are composed of parts. ' Among them, the guide column is pressed against the base and can be used for the vertical rise and fall of the same axis of the carrier plate and the pin layer; the linear probe group is flushed The main part of the component temple is guided by the needle machine. The positive layer is fixed or straightened to the first part. The needle is placed at the point to be measured and a guide layer is placed. The wire-shaped test machine is used for testing the object to be tested; the wire is used for transmitting the test signal, and the wire is used for measuring: the plate is pre-set with the corresponding socket according to the point to be tested of the object to be tested; a plurality of guiding plates are arranged at an appropriate height and are integrated with each other] a guiding hole corresponding to the insertion hole of the carrier is arranged on each of the guiding plates; the pin layer is located at the guide The inner side of the positive layer, there is a perforation corresponding to the vertical or oblique direction of the guiding hole of the guiding layer; According to the 2 正 $ positive layer of the guiding layer and the pin layer, the force of the carrier plate is raised and lowered; the point to be measured of the linear probe has a plurality of branches, which are respectively inserted in the pinhole layer The positive guide hole of the positive layer and the position of the insertion hole of the carrier plate and the inner end are fixed. The second end is in the test of the object to be tested, and the corresponding end can be touched at the same time. Between the positive layer and the pin layer; 5 Γ '俾 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 制定 线 线 线 线 线 线 线 线 线 线 线 线 线 线Connected to the device: ϊί Install and fix the inner end of the linear probe; ) Shell 11' shell, test the object and press the test object on the carrier I267641_ 六、·申請專利範圍 時,該載板、導正 端外伸一設定長度 點,而測得的訊號 傳輸至測試機者。 層將可在彈性内移 ,並以相同之彈壓 則可由按置在線狀 中致諸線狀探針之外 力同時觸及對應待測 探針内端的導線直接 2、 依據申請專利範圍第1 性立具微小測點之測試模組, 位框座與複數塊夾針板,該定 於周邊設有承部,而該複數塊 座承部,並可藉定位螺絲予以 的最外層夾針板且係固設在定 在係設有與導正層之導正孔呈 3、 依據申請專利範圍第1 氣特性且具微小測點之測試模 於夾針層預設的穿孔後,係可 電溶液對其固設者。 其中,該失針層係設有一定 位框座係將中央設為貫通並 夾針板係相互疊置在定位框 固設,及該其中鄰近導正層 位框座上,在該各夾針板上 垂直或斜置對應之穿孔者。 或2項所述之適用於各式電 組,其中,該線狀探針穿設 在夾針層表面熱覆一層不導 4、依據申請專利範圍第1或2項所述之適用於各式電 氣特性且具微小測點之測試模組,其中,該線狀探針穿設 於夾針層預設的穿孔後,係可在夾針層表面覆蓋一層粘膠 對其固設者。 ^I267641_ VI. · When applying for a patent range, the carrier and the leading end are extended to a set length point, and the measured signal is transmitted to the test machine. The layer will be movable in the elastic direction, and the same elastic force can be used to directly touch the wire corresponding to the inner end of the probe to be tested simultaneously in the line shape. 2, according to the patent application scope The test module of the micro measuring point, the bit frame seat and the plurality of pin plate, the bezel is set at the periphery, and the plurality of seat supports can be secured by the outermost pin plate of the positioning screw. The electroless solution is provided after the perforation of the pinning layer is determined by the test hole having the first gas characteristic according to the first gas characteristic of the patent application and having a micro measuring point according to the patented range. Fixed. Wherein, the lost pin layer is provided with a positioning frame seat, the center is set to pass through and the pin plate is superposed on each other in the positioning frame, and the adjacent guiding layer frame is placed on the pin plate The corresponding perforator is vertically or obliquely placed. Or the two items are applicable to various types of electric groups, wherein the linear probe is disposed on the surface of the pin layer and is thermally covered with a layer 4, which is applicable to various types according to the first or second aspect of the patent application scope. A test module having electrical characteristics and having a small measuring point, wherein the linear probe is disposed on the surface of the pin layer and is covered with a layer of adhesive on the surface of the pin layer. ^ 产5、依據申請專利範圍第1或2項所述之適用於各式電 氣特性且具微小測點之測試模組,其中,該夾針層之諸夾 針板係可在預定位置鑽設相對應且異孔位差的偏向穿孔, 而=輪心定位螺絲對其等逐一穿設與配合螺帽鎖設,該位 於疋位框座上的諸夾針板將呈橫向位移,並令供線狀探針Product 5, according to the scope of claim 1 or 2 of the test module applicable to various electrical characteristics and has a small measuring point, wherein the pin plate of the pin layer can be drilled at a predetermined position Corresponding and different hole spacing deviation perforation, and = wheel center positioning screw is threaded one by one and the matching nut is locked, the pin plates on the clamping frame seat will be laterally displaced, and the wire is supplied Probe 第20頁Page 20
TW94102985A 2005-02-01 2005-02-01 Measuring module suitable for all kind of electric characteristics and small measuring point TWI267641B (en)

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