TW201629498A - Contact test device - Google Patents

Abstract

The present invention relates to a contact test device including: a first guide plate which has first probe holes; a second guide plate which is positioned in parallel with the first guide plate and has second probe holes; an intermediate plate which is positioned between the first guide plate and the second guide plate and has intermediate holes; and probes which are inserted into the first probe holes, the second probe holes, and the intermediate holes, in which the intermediate plate is movable relative to the first guide plate and the second guide plate, at least a portion of the probe is bent, and the bent portion abuts onto a wall surface of the intermediate hole. According to the contact test device according to the present invention, even though an insulating covering is not formed on the probe, it is possible to effectively prevent a short circuit between the probes arranged at a fine pitch, and it is possible to conveniently replace the probe without disassembling the contact test device.

Description

Contact test device

The present invention relates to a contact test apparatus that provides a probe card for testing the electrical characteristics of a semiconductor integrated circuit, or an electrical test fixture for testing the electrical characteristics of a semiconductor package printed circuit board.

The contact test device is a device that contacts an electronic component and transmits an electrical signal to the electronic component to inspect the electronic component (electronic device), such as a semiconductor integrated circuit or a semiconductor package printed circuit board manufactured according to a precise specification.

The electronic component on which the electrode is formed is a test object (DUT) to be tested, and one end of the probe disposed on the contact test device is in contact with the electrode of the test object, and the other end of the probe is converted to space. Contact. The space converter connects the test machine through a printed circuit board and tests the test object. That is, the contact test device was used as a medium for electrically connecting the test object and the space transformer during the test.

1 is a schematic cross-sectional view showing the structure of a conventional contact test device 6. The conventional contact test apparatus 6 includes a plurality of probes 40 and guide sheets 10, 20, wherein the guide sheets 10, 20 are non-conductor and have a plurality of probe holes 15 and 25 for inserting the probes. FIG. 1 illustrates an example of a cobra probe as the probe 40, although other linear probes may also be used as the probe 40. The intermediate portion of each of the guide sheets 10, 20 has a recess, so that the thickness of the intermediate portion is relatively small, and the probe holes 15 and 25 into which the probe 40 is inserted are precisely formed in the intermediate portion of the guide sheets 10, 20. The straight portions at both ends of the probe 40 are respectively inserted and formed The probe holes 15 and 25 of the guide plates 10 and 20 are guided. The probe 40 is vertically movable within the probe holes 15 and 25, and the tips at both ends of the probe 40 are in contact with the test object and the space transformer, respectively.

Typically, the contact test device is integrally assembled and used with a space transformer (not shown) to increase the distance between the electrodes. When the contact test device 6 is in close contact with the test object (not shown), the probe 40 is vertically compressed between the test object and the space transformer. The intermediate portion of the probe 40 is then elastically deformed, and the test object and the space transformer are electrically connected by the probe 40.

When the probe 40 is in contact with the test object, if the intermediate portions of the probe 40 are all bent in the same direction and the degree of bending is the same, the fixed distance between the plurality of probes 40 can be maintained, so that no electricity is generated between the probes 40. Sexual short circuit. However, when the length of the probe 40 or the height of the electrode of the test object does not match, the distance at which each probe 40 is vertically compressed may be different. Therefore, the extent to which adjacent probes are bent may be different from each other, and because of the difference in the amount of deformation, the intermediate portion of the probe contacts the adjacent intermediate portion of the other probe, causing a short circuit between the probes. This problem is particularly acute when the probes of the contact test device are densely packed at a small pitch.

To address the short circuit problem that occurs between the probes during testing, the intermediate portion of the probe 40 is typically coated with an insulating coating 41. However, the method of applying the insulating material to the micro probes one by one causes a problem of poor yield, and the probe is deformed during the application of the insulating material to the probe.

Another problem with the conventional contact test device 6 is that the probe 40 is not easily replaceable. When the contact test device 6 is assembled with a defective probe, or when the contact test device is damaged during use, the probe needs to be replaced. However, the probe replacement procedure is very complicated and difficult. In the conventional contact test device 6, the intermediate portion of the probe 40 has a thick portion, and the probe 40 is held in a state of being assembled to the contact test device. That is, in the conventional contact test device, the thick portion of the probe is caught in the probe holes 15 and 25 without exiting from the probe holes 15 and 25, thereby keeping the probe in the contact test device. status.

Therefore, in order to replace the probe 40, the contact test device 6 must be separated from the space transformer, and then the guide plates 10, 20 contacting the test device 6 must be separated from each other.

The present invention has been made in an effort to provide a contact test apparatus capable of avoiding a short circuit between probes arranged at a small pitch.

The present invention is also directed to providing a contact test device that allows easy replacement of the probe.

The present invention also seeks to improve the positional accuracy of the probe in the probe aperture.

The present invention is also directed to providing a contact testing device having a spatial switching function to increase the space between the probes.

An exemplary embodiment of the present invention provides a contact testing device including a first guiding plate, a second guiding plate, an interposer, and a plurality of probes, wherein the first guiding plate has a plurality of first probe holes; The lead plate is disposed in parallel with the first guiding plate, and has a plurality of second probe holes; the interposer is disposed between the first guiding plate and the second guiding plate, and has a plurality of intermediate holes; the plurality of probes are inserted into the plurality of first holes The probe hole, the plurality of second probe holes and the plurality of intermediate holes, wherein the interposer is movable relative to the first guiding plate and the second guiding plate. In such a situation, at least a portion of the probe is bendable and the curved portion abuts the wall surface of the intermediate hole. In addition, the relative movement of the interposer can deform the probe, and the probe can be fixed so as not to move by its own weight in the direction of gravity.

In the foregoing configuration, when the probe contacts the electrode of the test object and is pressed, the probe is further bent in the bending direction to move the interposer in the bending direction.

The intermediate holes formed in the interposer may have a long hole shape and an intermediary of the long hole form The long axis of the hole may be a direction that is inclined by a predetermined angle with respect to the center line of the adjacent probe.

Further, the diameter of the thickest portion of the probe may be smaller than the inner diameter of the first probe hole or the second probe hole.

In addition, at least a portion of the probe can be bent and the interposer can be more movable in the direction in which the probe is bent. In such a case, the first pillar hole may be formed in the first guiding plate, or the second pillar hole may be formed in the second guiding plate, and the movement restriction of the interposer may be inserted into the first column hole or the second column by the pin. Hole to achieve. In addition, the interposer holes for inserting the studs may be formed on the interposer, and the inner diameter of the interposer holes may be larger than the diameter of the studs, so that the interposer is movable.

The contact test apparatus of the present invention may further include a position adjustment plug that moves the interposer relative to the first guide plate and the second guide plate, wherein at least a portion of the probe is bent by the movement of the interposer, and the bent portion It is adjacent to the wall of the intermediate hole. The position adjustment pin may be rotatably inserted into the first position adjustment hole formed on the first guide plate or the second position adjustment hole formed on the second guide plate, and the position adjustment pin may have an eccentric rotation portion when the When the part is rotated in the first position adjusting hole or the second position adjusting hole, the interposer is pushed. In such a situation, the inner diameter of the first position adjustment hole or the second position adjustment hole may be larger than the diameter of the position adjustment pin such that the position adjustment pin is removable after the intermediate plate is moved.

In addition, the position adjustment pin can be used to insert a position adjustment hole formed on the side of the contact test device and to move the interposer.

In the contact test apparatus of the present invention, the pitch and/or configuration of the first probe holes and the pitch and/or configuration of the second probe holes may be different from each other.

Further, in the contact test device of the present invention, the insulating coating may be formed on at least one of the plurality of probes.

According to the contact test apparatus of the present invention, it is possible to avoid short-circuiting between the probes arranged at a small pitch by the interposer.

Further, according to the present invention, the probe is supported by the first probe hole and the second probe hole and the intermediate hole when bent, and therefore, the probe having no portion caught by the probe hole can be used, so the probe can be easily replaced. .

Further, according to the present invention, all of the probes are in close contact with the probe holes in the predetermined direction by the interposer, so that the positional accuracy of the probes in the probe holes can be improved.

Furthermore, according to the present invention, the pitch and/or configuration of the first probe holes and the pitch and/or configuration of the second probe holes are different from each other, and thus a space conversion function for increasing the space between the probes can be provided.

1, 2, 3, 4, 5‧ ‧ contact test equipment

6‧‧‧Custom contact test device

10‧‧‧First guide board

15‧‧‧First probe hole

16‧‧‧First column hole

17‧‧‧First position adjustment hole

18‧‧‧ Position fixing hole

19‧‧‧ Aligned holes

20‧‧‧Second guide

25‧‧‧Second probe hole

26‧‧‧Second column hole

27‧‧‧Second position adjustment hole

28‧‧‧ Position fixing hole

29‧‧‧ Alignment holes

30‧‧‧Intermediary board

35‧‧‧Intermediate hole

36‧‧‧Intermediate column hole

37‧‧‧Intermediate position adjustment hole

39‧‧‧ Alignment holes

40‧‧‧ probe

41‧‧‧Insulation coating

50‧‧‧ probe

55‧‧‧Bending direction

58‧‧‧ pitch

59‧‧‧ pitch

60‧‧‧ pin

70‧‧‧ Position adjustment latch

80‧‧‧ Position fixed latch

1 is a schematic cross-sectional view showing the structure of a conventional contact test device.

2 is a cross-sectional view showing the structure of a contact test apparatus according to an exemplary embodiment of the present invention.

3 is a schematic cross-sectional view showing the principle of the interposer fixing probe of the contact testing device according to an exemplary embodiment of the present invention, wherein FIG. 3(a) shows the step of inserting the probe; FIG. 3(b) shows the fixed probe. Step; and Figure 3 (c) shows the test steps.

4 is a cross-sectional plan view and a cross-sectional side view, respectively, of a first guiding plate, a second guiding plate, and an interposer of the contact testing device according to an exemplary embodiment of the present invention.

Fig. 5 is a top plan view showing the arrangement of the probe and the intermediate hole.

6 is a cross-sectional view showing a contact test apparatus according to another exemplary embodiment of the present invention; wherein FIG. 6(a) illustrates the step of inserting the probe; and FIG. 6(b) illustrates the step of fixing the probe.

7 is a cross-sectional view of a contact test apparatus in accordance with yet another exemplary embodiment of the present invention, wherein the position adjustment plug is configured to be removable.

8 is a schematic cross-sectional view of a contact test device according to still another exemplary embodiment of the present invention, wherein a position adjustment hole is formed on a side of the contact test device.

9 is a schematic cross-sectional view of a contact testing device according to still another embodiment of the present invention, wherein a minimum pitch between probe holes of the first guiding plate and the second guiding plate is different from each other.

10 is a schematic diagram showing the principle of increasing the distance between the probes of the contact test device, wherein FIG. 10(a) shows an example in which the probes are parallel to each other, and FIG. 10(b) shows that the upper end position of the probe moves in the x and y directions. An example.

Figure 11 is a top plan view showing a preferred arrangement of the first probe hole and the second probe hole.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a contact test apparatus mainly for viewing a semiconductor wafer will be described, but the present invention is not limited to a contact test apparatus for viewing a semiconductor wafer, but is applicable to all contact test apparatuses having a plurality of vertical probes.

2 is a cross-sectional view showing the structure of a contact test apparatus 1 according to an exemplary embodiment of the present invention. Referring to FIG. 2, the contact testing device 1 of the exemplary embodiment of the present invention is characterized by comprising a first guiding plate 10, a second guiding plate 20, an interposer 30 and a plurality of probes 50, wherein the first guiding plate 10 has a plurality of The first guiding hole 15 is disposed in parallel with the first guiding plate 10 and has a plurality of second probe holes 25; the interposer 30 is disposed on the first guiding plate 10 and the second guiding plate 20 There is a plurality of intermediate holes 35; the plurality of probes 50 are respectively inserted into the plurality of first probe holes 15 and the plurality of second probe holes 25, and the intermediate portion is inserted into the plurality of intermediate holes 35.

During the test, the first guiding plate 10 and the second guiding plate 20 are respectively in contact with a test object (not shown) and a space converter (not shown). Furthermore, during testing, the probe 50 can be deformed by compression between the test object and the space transformer, and the intermediate portion of the probe 50 can be bent. In most instances, the deformation of the probe 50 is elastically deformed, but plastic deformation is not excluded.

The relative position between the first guiding plate 10 and the second guiding plate 20 can be fixed by the studs 60. That is, the pin 60 is inserted into the first column hole 16 and the second column hole 26 formed in the first guiding plate 10 and the second guiding plate 20, respectively, thereby fixing the first guiding plate 10 and the second guiding The relative position between the plates 20. In this example, the intermediate post holes 36 in the form of elongated holes are formed in the interposer 30, and the studs 60 can contact the surface on the side of the interposer post holes 36 to support the interposer 30. With this configuration, the interposer 30 can be not fixed by the studs 60, but can be moved relative to the first guide plate 10 and the second guide plate 20.

If the direction in which the curved portion of the probe 50 moves forward when the probe 50 is bent is defined as the bending direction 55, FIG. 2 illustrates the state in which the interposer 30 is supported by the stud 60, so that the interposer 30 may not be The interposer 30 has returned to the original state in a state in which the bending direction 55 is slightly moved. That is, with reference to the position between the holes in which the same probe 50 is commonly inserted, the intermediate hole 35 is moved farther in the bending direction than the first probe hole 15 and the second probe hole 25. Therefore, the intermediate portion of the probe 50 is bent by the elastic restoring force and contacts the left surface of the intermediate hole 35 (shown based on the drawing).

When the probe 50 is in close contact with the test object, the probe 50 is further bent so that the intermediate portion of the probe 50 can be pushed against the right surface of the intermediate hole 35 (shown based on the drawing). Since the interposer 30 is not fixed by the stud 60, the probe 50 can move the interposer 30 further in the direction of the bend. That is, the interposer 30 can be moved in the bending direction, however, the movement of the interposer 30 in the opposite direction is restricted by the studs 60 inserted into the interposer holes 36 formed in the form of elongated holes of the interposer 30. 2 shows the configuration of the pin 60 inserted into the intermediate post hole 36 formed in the form of a long hole of the interposer 30, and can also be implemented in the pin 60 support. The structure of the peripheral portion of the interface 30. Even in such a situation, the movement of the interposer 30 in the direction of the stud 60 is restricted, but the interposer 30 can be moved in the opposite direction (i.e., the bending direction 55).

Based on the position of the probe, the post holes 36 may also be formed on the sides of the interposer 30 in the direction in which the probe is bent. If the position of the column hole is changed to the opposite position described above, the stress occurring between the intermediate hole of the probe insertion and the column hole of the interposer is changed from a compressive stress to a tensile stress. The plurality of column holes may be formed in a single interposer, thereby dispersing the stress applied to the column holes. In a conventional contact test device, one of the probes has a longer length than the other probes, or one of the electrodes in contact with the probe has a higher height than the other electrodes, and the probe may be non-uniformly used during the test. Deformed and possibly in contact with adjacent probes. Therefore, the insulating coating is usually formed at the intermediate portion where the probe is bent. However, in the structure of the contact test apparatus 1 of the present invention, the interposer 30 allows all of the probes 50 to be equally deformed. In the prior art, only the vertical force applied to the probe 50 deforms the probe, however, in the structure of the present invention, the horizontal force generated by the interposer 30 can deform the probe 50 together with the vertical force.

Therefore, in the contact test apparatus 1 of the present invention, the probe 50 is uniformly bent, and the interposer 30 prevents the adjacent probes 50 from coming into contact with each other, thereby effectively avoiding a short circuit between the probes 50. In the example using the structure of the present invention, even if the probe 50 is disposed at a small pitch, the probe 50 can be manufactured without the use of an insulating coating, so that the contact test apparatus 1 can be manufactured more efficiently.

3 is a cross-sectional view showing the principle of the probe 50 fixed to the interposer 30 in an exemplary embodiment of the present invention. FIG. 3(a) illustrates the step of inserting the probe 50 when the contact test device 1 is assembled. The probe 50 is assumed to be a probe having a uniform thickness as a whole, and the intermediate portion is not bent and has a linear shape before the probe 50 is assembled to the contact test device. The first probe hole 15 and the second probe hole 25 are aligned with the intermediate hole 35 to position the first probe hole 15, the second probe hole 25, and the intermediate hole 35 in a straight line, and the linear probe 50 is inserted and passed through the three holes.

Fig. 3(b) shows the assembly step after the step of Fig. 3(a), that is, the step of fixing the probe 50 by moving the interposer 30 due to the bending direction. When the interposer 30 is moved in a direction perpendicular to the longitudinal direction of the probe 50 in a state where the probe 50 is inserted, the intermediate portion of the probe 50 is elastically deformed when the probe 50 is bent. The probe 50 is fixed in close contact with the intermediate hole 35 by the elastic restoring force on the elastic deformation probe 50 side of the inner wall of the intermediate hole 35. The probe 50 fixed as described above does not withdraw from the hole by gravity due to gravity. In this state, when a predetermined or higher force is vertically pushed against the probe 50, the probe 50 may move vertically.

Fig. 3(c) shows the step of testing the test article using the contact test device 1, that is, the step of the probe 50 being in close contact with the test object and the probe 50 being deformed. When force is applied to one end of the probe 50, the probe 50 is pushed upward through the first probe hole 15 formed in the first guiding plate 10, and the probe 50 is further in the first guiding plate 10 and the second guiding The lead plates 20 are bent between each other. The direction of bending 55 of the probe 50 can be determined by the direction of movement of the interposer 30 in the assembly step of the contact test device, i.e., the step shown in Figure 3(b).

The movement of the interposer 30 in the assembly step of Fig. 3(b) deforms the probe 50, but in the use step of the contact test device 1, the deformation of the probe 50 causes the interposer 30 to move. That is, in the assembly step of the contact test device 1, the inner wall of the intermediate hole 35 is pushed against the side surface of the probe 50 in the bending direction, and in the use step of the contact test device 1, the bent portion of the probe 50 is bent. The direction is pushed against the opposite inner wall of the intermediate hole 35. Therefore, in these two steps, the direction in which the side surface of the probe 50 is in contact with the inner wall of the intermediate hole 35 is opposite to each other.

In a conventional contact test device, a thick portion is formed in the middle of the probe, or a side surface of the probe is formed with a protrusion, so that the probe inserted into the probe hole is caught by the probe hole without passing through the probe hole. In contrast, in the present invention, the probe 50 is elastically restored with the inner hole 25 The wall and the inner walls of the probe holes 15 and 25 are in close contact and fixed. That is, even if the probe does not have a thick portion or protrusion that can be caught in the probe hole, the probe does not easily exit. Therefore, in the structure of the present invention, the diameter of the cross section of the thickest portion of the probe 50 may be smaller than the inner diameters of the first probe hole 15 and the second probe hole 25, and the probe 50 may pass through the probe hole 15 And 25. That is, in the structure of the present invention, the probe 50 can be inserted into or pulled out from the probe holes 15 and 25, so that the probe 50 can be conveniently replaced from the probe holes 15 and 25 without It is necessary to separate the guide sheets 10 and 20.

In conventional contact test devices, the thick portion of the probe is used to avoid the probe exiting from the probe aperture, but in the structure of the present invention, the probe 50 is applied to the interposer 35 and the probe aperture. The frictional forces on the inner walls of 15 and 25 are fixed. Even in the structure of the present invention, the probe coated with the insulating coating can be used for a probe having a high density to which a short circuit may occur between the probes. Since the contact test device is used for testing and needs to maintain accurate performance even in an extreme example, a double or triple structure for preventing short circuit and leakage current can be employed. Even in the example in which the probe has a thick portion, at least one of the first probe hole 15 and the second probe hole 25 is formed to be larger than the thickest portion of the probe, whereby the probe can be conveniently replaced. Unlike the conventional contact test device, the probe 50 is fixed by the elastic restoring force, so that even if the contact test device is reversed, the probe is fixed in the original position without moving in the direction of gravity. This structure can be implemented because the mass of the probe 50 is much lower than the frictional force caused by the elastic restoring force of the probe 50.

In addition, in the case where the inner diameter of the probe hole of the conventional contact test device is larger than the outer diameter of the probe, the probe moves largely in the probe hole, thereby making the positional accuracy of the probe poor. However, the structure of the present invention has an advantage in that the interposer 30 continuously pushes all the probes 50 in one direction of the probe holes 15 and 25, and the probe does not move in the probe holes, even if it is large. The probe holes 15 and 25 also greatly increase the accuracy of the position of the probe 50.

In the exemplary embodiments shown in FIGS. 2 and 3, a probe having a linear shape and a uniform thickness as a whole has been described as an example, however, the technical spirit of the present invention can be applied to a cobra as long as the intermediate portion of the probe can be bent. All probes for the probe. The cobra probe having the curved intermediate portion can also be fixed at a predetermined position by elastic deformation by slightly moving the relative position between the probe hole and the intermediate hole from the probe insertion position.

In addition, under the same principle, a pogo probe can also be fixed by slightly deforming the middle portion of the probe. In the example of the wave probe, the plunger rod can be in close contact with the inner wall of the probe hole of the guide plate, and the sleeve can be in close contact with the inner wall of the intermediate hole of the interposer. Since the wave probe can remain linear even if the compression wave can be probed, the movement of the interposer due to the deformation of the wave probe can hardly occur.

4 is a cross-sectional top view and a cross-sectional side view of the first guiding plate 10, the second guiding plate 20, and the interposer 30 in the contact testing device 1 of the exemplary embodiment of the present invention. The interposer 30 is further moved in the bending direction compared to the first guiding plate 10 and the second guiding plate 20 positioned on the upper and lower sides of the interposer 30. Therefore, the probe 50 is elastically deformed and is passed through the interposing hole 35. The inside of the probe holes 15 and 25 are fixed in close contact with each other. The force generated by the elastic restoring force of the probe 50 and the force that causes the interposer 30 to return to the direction opposite to the bending direction are applied to the interposer 30 that has moved in the bending direction, but the interposer 30 is supported by the stud 60 . The pin 60 is inserted through the first column hole 16 and the second column hole 26 formed in the first guiding plate 10 and the second guiding plate 20, and the intermediate column hole 36 formed in the interposer, and is used to determine the first guiding The relative position between the lead plate 10 and the second guiding plate 20 and the interposer 30. Because the first guiding plate 10 and the second guiding plate 20 need to be positioned at precise positions relative to each other, the first column hole 16 and the second column hole 26 may have a circular planar shape, and the intermediate column hole 36 may have a long hole. The planar shape of the form, because the interposer 30 needs to be supported to move the interposer 30 in the direction of the bend but in the opposite direction of the bend The direction is not pushed.

Because the actual conditions used by the contact test device are different from the ideal conditions, the lengths of all the probes may not be exactly the same, and the degree of bending of all the probes may not be equal to each other. The distance obtained by subtracting the outer diameter of the probe 50 from the inner diameter of the intermediate hole 35 is defined as a space capable of absorbing the unevenness of the degree of bending, and therefore, it is necessary to increase the intermediate hole 35 to a certain extent. However, since the distance between the dense intermediate holes 35 is short, the increase in the size of the intermediate holes 35 is restricted. In the example in which the intermediate hole 35 is formed to be elongated in the bending direction, a space in which the bending unevenness of the probe can be absorbed in the bending direction 55 can be ensured while maintaining a large wall thickness between the dense intermediate holes 35. Therefore, the intermediate hole 35 may have a planar shape having a long axis in the form of a long hole, an ellipse or a rectangle.

In this example, the major axis direction of the interposing holes 25 may be a direction having a predetermined inclination with respect to a center line of the adjacent probes 50. The reason is that the long axis direction of the intermediate hole 25 is substantially the direction in which the probe 50 is bent, and the probe 50 may easily come into contact with other adjacent probes when bent. That is, the direction in which the probe is bent may be a direction in which a straight line with the center of the adjacent probe 50 is sandwiched by a predetermined angle.

FIG. 5 is a top plan view showing the configuration of the probe 50 and the intermediate hole 35, showing the state in which the probes 50 are densely arranged in a two-dimensional plane. As shown in FIG. 5, in the example in which the intermediate hole 35 is formed in the form of an elongated hole such that the long-axis direction is at an angle of 45 degrees to the straight line connecting the centers of the adjacent probes 50, since the intermediate holes 35 can be formed to have the maximum length. , so space is the most efficient. In the example in which the probe 50 is disposed in a straight line, the intermediate hole 35 may be formed such that the long-axis direction of the intermediate hole 35 is at an angle of 90 degrees to the straight line of the center of the adjacent probe 50. The state in which the straight line direction of the center of the adjacent probe 50 coincides with the long axis direction of the intermediate hole 35 may be the most disadvantageous in space efficiency.

The technical spirit of the present invention can also be applied to a probe hole having a probe inserted therein. Configuration of two or more guide plates. Even in such a case, the plate member having the portion that allows the probe to bend through the plate member is the interposer, and the plate that is positioned on both sides of the interposer to support the inserted probe to bend the middle portion of the probe The piece is the guide plate. One of the guiding plates closest to the interposer and closer to the test object may be the first guiding plate, and the other guiding plate disposed on the opposite side of the guiding plate and closest to the interposer may be Two guide plates.

A number of intermediaries are also available. All of the plates that can be moved in the direction in which the probe is bent when the probe is bent can be an interposer. As the number of interposers increases, the probes are easier to insert and avoid short circuits between the probes. Intermediaries that overlap each other can share the pin. The interposer may be separately formed by dividing the entire area into two or more areas, and in this example, the individual interposers may individually have pins.

Furthermore, in addition to the stud 60, other fixing means for relatively fixing the first guiding plate 10 and the second guiding plate 20 can be provided. For example, the position fixing holes are formed in the first guiding plate 10 and the second guiding plate 20, and the position fixing pins are inserted into the position fixing holes, thereby fixing the first guiding plate 10 and the second guiding plate 20 . In such a situation, the studs 60 do not necessarily need to pass through the first guiding plate 10 and the second guiding plate 20, and the post holes may be formed only in any of the first guiding plate 10 and the second guiding plate 20. And the pin 60 is inserted into the column hole.

Figure 6 is a schematic cross-sectional view of a contact testing device 2 in accordance with another exemplary embodiment of the present invention. The contact test device 2 of the present exemplary embodiment is characterized by including a position adjustment plug 70 for adjusting the position of the interposer 30.

Referring to Figure 6, the structure of the contact test device 2 includes a first guiding plate 10, a second guiding plate 20, an interposer 30 and a plurality of probes 50, wherein the first guiding plate 10 has a plurality of first probe holes 15; The second guiding plate 20 is disposed parallel to the first guiding plate 10 and has a plurality of second probe holes 25; The plate 30 is disposed between the first guiding plate 10 and the second guiding plate 20 and has a plurality of intermediate holes 35; the two sides of the plurality of probes 50 are respectively inserted into the first probe hole 15 and the second probe hole 25 And the intermediate portion is inserted into the intermediate hole 35. The trenches are respectively formed on the surfaces of the first guiding plate 10 and the second guiding 20, and the first probe holes 15 and the second probe holes 25 are accurately formed in the grooves, and the configurations are as shown in FIG. The contact test device 1 is the same.

However, the contact test device 2 shown in FIG. 6 is characterized in that the first position adjusting hole 17 is disposed on the first guiding plate 10, the second position adjusting hole 27 is disposed on the second guiding plate 20, and the intermediate position adjusting hole 37 is disposed. The intermediate plate 30 is inserted, and the position adjusting pins 70 are inserted into the individual position adjusting holes 17, 27 and 37, thereby adjusting the position of the interposer 30. The position adjusting plug 70 prevents the interposer 30 from returning to the original position by the elastic restoring force of the bending probe 50 after the interposer 30 moves in the bending direction 55. Therefore, the position adjusting plug 70 can also function as the contact test shown in FIG. The pin 60 of the device 1.

The position adjusting pin 70 is rotatably provided in the position adjusting holes 17, 27 and 37, and the thickness of the portion of the position adjusting pin 70 positioned in the intermediate position adjusting hole 37 may be different from the position adjusting pin 70 positioned in the first position adjusting hole. 17 and the second position adjust the thickness of a portion of the hole 27. Although FIG. 6 illustrates that the portion of the position adjusting pin positioned at the intermediate position adjusting hole 37 has a larger thickness than the other portions of the position adjusting pin, the portion of the position adjusting pin positioned at the intermediate position adjusting hole 37 may have a position adjusting pin. Other parts are still small in thickness. When the position adjusting plug 70 having the aforementioned configuration is rotated about the rotating shaft, the intermediate plate 30 can be moved in the bending direction by the pushing of the position adjusting plug 70. Based on the position of the interposer 35 into which the probe is inserted, the intermediate position adjusting hole 37 may be formed in a portion in the bending direction of the probe, or the intermediate position adjusting hole may be formed in the opposite portion.

The inner diameter of the intermediate position adjusting hole 37 may be larger than the outer diameter of the position adjusting plug 70, so that the interposer 30 can be moved, and the interposer 30 can be further inserted when the probe 50 is further bent during the test. The step moves in the direction of the bend. Further, the position adjustment plug 70 may be configured to support the outer peripheral portion of the interposer 30 without forming the intermediate position adjustment hole 37. The movement of the interposer 30 caused by the position adjustment plug 70 will be described in more detail with reference to FIG. Figure 6 (a) shows the contact test device fully inserted into the probe 50 in an intermediate procedure of assembling the contact test device. In order to facilitate the process of inserting the linear probe 50, the first probe hole 15, the second probe hole 25 and the intermediate hole 35 are linearly aligned, and then the probe 50 is inserted into the common first probe hole 15, Two probe holes 25 and intermediate holes 35.

In the step of inserting the probe, an additional alignment hole not shown and an additional alignment pin not shown may be provided to accurately align the positions of the individual panels, and the first probe aperture 15 and the second The probe hole 25 and the intermediate hole 35 are positioned in a straight line, or the position adjusting holes 17, 27 and 37 and the position adjusting plug 70 can perform the aforementioned functions. The position fixing holes 18 and 28 are formed on the first guiding plate 10 and the second guiding plate 20, and the position fixing pins 80 are inserted into the position fixing holes 18 and 28, thereby fixing the aligned first guiding plates 10 and The relative position between the two guide plates 20.

6(b) shows a state in which the contact test apparatus is assembled, that is, after the probe 50 is inserted, the interposer 30 is moved in a direction perpendicular to the longitudinal axis direction of the probe 50, and the intermediate portion of the probe 50 is bent. . When the position adjusting plugs 70 of the insertion position adjusting holes 17, 27, and 37 are rotated in the state in which the probe 50 is inserted, the interposer 30 can be horizontally moved to the right side by the pushing of the position adjusting plug 70. By the movement of the interposer 30, the probe 50 continues to be in close contact with the probe holes 15, 25 and 35 in one direction, and the probe 50 is fixed in the probe holes 15, 25 and 35.

The position adjusting plug 70 shown in Fig. 6 has two portions having different thicknesses, and the center of the cross-section of the two portions does not coincide with each other. When the position adjusting plug 70 is rotated as described above in part, the relative position between the first guiding plate 10 and the second guiding plate 20 and the interposer 30 is changed. Furthermore, the probe 50 is elastically deformed by the movement of the interposer 30, and is interposed with the interposer 30. The inner wall of the mesopores 35 is in close contact and fixed. The position adjusting plug 70 shown in Fig. 6 is held in the contact test device in the state in which the position adjusting holes 17, 27 and 37 are inserted, and serves as a pin for supporting the interposer 30 so that the interposer 30 cannot be moved in one direction. The position adjustment plug 70 may have a circular cross-sectional shape as a whole and may be appropriately rotated, and a cross-sectional shape having a portion having a thickness different from that of other portions may be circular, oblong or frusto-circular.

In order to change the relative position between the first guiding plate and the interposer by rotating the position adjusting pin 70, the center of the position adjusting hole formed in the first guiding plate and the center of the position adjusting hole formed in the interposer Inconsistent, or the shape of the position adjusting hole formed in the first guiding plate is different from the shape of the position adjusting hole formed in the interposer.

In the structure shown in FIG. 6, the position adjustment plug 70 is exposed to the outside through the first position adjustment hole 17 and the second position adjustment hole 27, and in the state in which the contact test device 2 is assembled, the interposer 30 can be rotated by the bare The latch 70 is moved at the outer position to move. A protrusion may be formed at an end of the position adjustment plug 70 to grasp the protrusion to rotate the position adjustment pin 70. For this purpose, the protrusion of the position adjustment pin 70 may have a polygonal cross-sectional shape, such as a quadrilateral or hexagonal cross-sectional shape. . In the example in which the end portion of the position adjusting plug 70 does not protrude outside the guide sheets 10 and 20, a straight or cross-shaped groove may be formed on the end surface of the position adjusting plug 70 exposed on the outer side to use a screwdriver. Turn the position adjustment pin 70. In order to stably fix the position adjusting plug 70, a thread may be formed on one side of the position adjusting plug 70.

The interposer 30 is moved by the position adjusting plug 70 so that the probe 50 is fixed in close contact with the inner wall of the intermediate hole 35 of the interposer 30, and during the procedure, the probe 50 having a linear shape as a whole is elastically deformed into a curve having curvature. shape. In the case where the probe originally has a curved shape, the curvature of the probe can be increased by elastic deformation. A probe with a straight shape is more suitable for The procedure for inserting the probe into the probe hole, but to maintain the lateral distance between the probes, it is disadvantageous for the probe to have a predetermined curvature when the probe is bent. The distance between the first probe hole of the first guiding plate and the second probe hole of the second guiding plate at the bend of the probe is defined as a buckling length, and the middle portion of the probe when bent The distance moved in the bending direction is defined as the bending distance, and the bending distance when the position adjusting pin is used may be equal to or greater than 2% of the bending length. In the example where the bending distance is about 2% of the buckling length, since the amount of bending is too small, the probe as a whole looks like a straight line without bending, but even such a small amount of bending can determine the bending direction of the probe, and The probe can be fixed when the probe is in contact with the inner wall of the intermediate hole.

FIG. 7 illustrates a contact test apparatus 3 according to still another exemplary embodiment of the present invention, and illustrates an example of the movable position adjustment plug 70 after the intermediate board 30 is moved. Compared with the exemplary embodiment shown in FIG. 6, the intermediate portion of the position adjusting plug 70 of FIG. 6 is thicker than the position adjusting holes 17 and 27, but the position adjusting plug 70 of FIG. 7 is integrally formed to be larger than the first position adjusting hole 17. Still thin. Therefore, after the interposer 30 is moved in the bending direction by the position adjusting plug 70, the position adjusting plug 70 can be removed by the first position adjusting hole 17.

When the position adjustment plug 70 is removed, the interposer 30 may return to the original position due to the elastic restoring force of the probe 50, and therefore, the stud 60 is used to prevent the interposer 30 from returning to the original position. That is, the first column hole 16 and the second column hole 26 may be formed on the first guiding plate 10 and the second guiding plate 20, and the pin 60 may be inserted into the first column hole 16 and the second column hole 26. In the drawings, the studs 60 support the interposer 30 such that the interposer 30 may not move to the left. The studs 60 can be configured to support an inner wall of the interposer bore 36 formed in the interposer 30 or to support an outer peripheral surface of the interposer 30. In the structure of the peripheral surface of the pin supporting the interposer, it is not necessary to form an additional column hole in the interposer. In the structure in which the pin 60 is provided, the position adjusting pin 70 can be removed, so that only the state in which the contact test device is assembled can be guaranteed The position adjusting holes 17, 27 and 37 are left without the position adjusting pin 70.

As shown in FIG. 7, in the example in which the stud 60 is inserted into the interposer hole 36, the inner diameter of the interposer hole 36 may be larger than the outer diameter of the stud 60, so that the interposer 30 can be moved to the right when the probe is bent. As shown in Figure 7, the intervening post holes 36 can be formed in the form of elongated holes. The interposer holes may be formed in the form of elongated holes that are elongated in the direction in which the probe is bent, rather than circular holes, to allow the interposer to freely move in the direction of the bend and to reduce the movement of the interposer in other directions. In the example in which the cross section of the probe has a quadrangle, the cross section of the probe may have a rectangular shape elongated in the bending direction.

In the example where the contact test device has a large area, a plurality of small-area interposers may be installed, and the positions of the interposers may be independently adjusted using the respective position adjustment pins of the respective interposers. In such a situation, it is economical to use the position adjustment pin only in the assembly step, because the position adjustment pin shape is complicated and difficult to manufacture, and the pin is left in the actual product after the contact test device is assembled, because the pin shape is relatively simple. It is easier to manufacture. In the example where the stud is configured in the form of a bolt that forms a thread at one end of the stud, such a configuration helps to secure the stud to the guide plate. Further, in comparison with the configuration in which the position adjusting pin is mounted on the side surface of the guide plate (as will be described later in FIG. 8), in the contact test device having the aforementioned structure, the position adjusting pin is attached to the top surface ( As shown in Figure 7, it is more advantageous in space utilization.

Further, the position adjusting hole may be formed on either side of the first guiding plate 10 and the second guiding plate 20.

Although not shown in FIG. 7, additional alignment holes and additional alignment pins may be provided to cause the first guide plate 10 and the second guide plate 20 to be interposed in the initial mounting step of the contact test device. The relative positions between the plates 30 are aligned. Further, the position adjustment holes 17, 27, and 37 and the position adjustment plug 70 can perform the functions of aligning the holes and aligning the pins.

A position fixing pin 80 may be provided to fix the relative position between the first guiding plate 10 and the second guiding plate 20. The position fixing holes 18 and 28 into which the position fixing pins 80 are inserted may be formed in the thick portions of the guide sheets 10 and 20 where the grooves are not formed to have durability. After the alignment pin (not shown) or the position adjustment pin 70 is aligned with the relative position between the first guide plate 10 and the second guide plate 20, the position fixing pin 80 is inserted into the position fixing holes 18 and 28 to firmly The first guiding plate 10 and the second guiding plate 20 are fixed. In order to securely fix the first guide plate 10 and the second guide plate 20 by using a screwdriver or the like to rotate the position fixing pin 80, the thread may be formed at the position fixing pin 80. Although only one position fixing pin 80 is illustrated in the drawings, two or more position fixing pins may be actually provided, and are symmetrically disposed with respect to the vertical axis and the horizontal axis based on the configuration of the probe.

8 is a cross-sectional view of a contact testing device 4 according to still another exemplary embodiment of the present invention, characterized in that a position adjusting hole 17 and a position adjusting plug 70 are provided on a side surface of the contact testing device 4. The contact test device 4 shown in FIG. 8 has a structure in which the position adjustment hole 17 is formed on the side and the interposer 30 is moved by the position adjustment insertion hole 17 of the position adjustment hole 17. The position adjustment plug 70 is used to adjust the position of the interposer 30 and can serve as a stud that supports the interposer 30 such that the interposer 30 cannot move in a direction opposite to the direction in which the probe 50 is bent. The thread may be formed on the position adjustment pin 70 such that when the position adjustment pin 70 is rotated, the position of the position adjustment pin 70 is changed, thereby pushing the interposer 30, and the position adjustment pin 70 may be in the form of a bolt.

After the first probe hole 15 and the second probe hole 25 are precisely aligned with the position of the intermediate hole 35, the probe 50 is inserted. In this example, the relative positions between the plates 10, 20, and 30 can be aligned with the holes 19, 29, and 39 formed on the first guiding plate 10, the second guiding plate 20, and the interposer 30, respectively, and are not drawn. The alignment pins shown are inserted into the alignment holes 19, 29 and 39 to be precisely aligned. The alignment plug has a circular cross section and may be formed in a straight line form having a uniform thickness as a whole in the longitudinal axis direction.

When the probe 50 is fully inserted, the alignment pins are removed, causing the interposer 30 to move. Thus, as shown in FIG. 8, the alignment pins are removed from the completed assembled contact test device 4, leaving only the alignment holes 19, 29 and 39. Two or more alignment holes may be formed, and at least one of the plurality of alignment holes may be formed in the form of an elongated hole.

Meanwhile, in the contact test apparatus of the present invention, the minimum pitch formed between the first probe holes 15 of the first guide sheets 10 may be different from the second probe holes 25 formed in the second guide sheets 20. The minimum pitch between. Figure 9 is a cross-sectional view of a contact test device 5 to which the foregoing technique is applied. Although not shown in FIG. 9, the position adjustment hole and the position adjustment plug for moving the interposer 30, the post holes and the pins for supporting the interposer, and the alignment holes for aligning the respective plates may be further selectively provided. And configuration such as alignment pins.

Referring to FIG. 9, in the contact test device 5, the pitch between the second probe holes 25 is larger than the pitch between the first probe holes 15. The lower end of the probe 50 protruding from the first probe hole 25 has the same configuration as the electrode formed on the surface of the test object. In contrast, the second probe holes 25 are arranged with a larger interval, thereby further ensuring the distance between the probes 50. When the contact test device 5 is operated, there is a risk that the probe 50 will come into contact with each other and short-circuit when bent, but such risk can be reduced by further increasing the distance between the probes 50.

FIG. 10 is a schematic diagram showing the principle of increasing the distance between the probes 50 in the contact test device 5. The probe 50 is entirely made of a conductive material and is not covered with an insulating coating. When the contact test device 5 is in close contact with the test object, the surface of the test object is pushed against the lower end of the probe 50, thereby increasing the amount of bending of the probe. FIG. 10 only shows the state in which the bending amount of the probe 50 is increased, and all the guide sheets 10 and 20 and the interposer 30 are omitted.

Figure 10 (a) shows a state in which the first probe hole 15 and the second probe hole 25 have phases The same configuration, and all of the probes 50 are maintained parallel to each other in the z-axis direction. The pitch of the lower end of the probe 50 is the same as the pitch of the upper end of the probe 50. In this configuration, there is a risk that the probes will be inconsistent and a short circuit will occur between the probes. Specifically, in the case of a small pitch of 100 μm or less, there is a risk of short-circuiting between the probes. Even if there is an interposer, a short circuit may occur between the interposer and the guide between the guide plates due to the very inconsistent bending of the probe.

The structure shown in FIG. 10(b) is such that the relative positions of the first probe hole 15 and the second probe hole 25 are adjusted such that the position of the upper end of the individual probe 50 is slightly shifted from the position of FIG. 10(a). The axial direction and the y-axis direction are used to increase the distance between the probes 50. According to this configuration, the probe 50 is accurately brought into contact with the surface of the test object in a predetermined configuration, and when the distance between the probes 50 is increased, the probes 50 can be prevented from coming into contact with each other. When the upper end of the probe 50 moves, the distance between the probes 50 increases, especially when the upper end of the probe 50 moves in the x-axis direction, the deformed portions of the adjacent probes 50 do not overlap each other. The probe 50 has a circular cross section, and the most convex portion of the intermediate portion of the probe 50 is easily in contact with the other probe, but in the present invention, the most convex portions of the probe 50 do not overlap each other, thereby greatly reducing the probe The possibility of needle contact and short circuit.

The configuration of the first probe hole 15 may not be arbitrarily changed because the configuration of the first probe hole 15 depends on the electrode configuration of the test object, but the interval between the second probe holes 25 of the second guide plate 20 may be changed. And the configuration of the second probe hole 25. In this example, the electrode configuration formed in the space transformer needs to be changed according to the configuration of the second probe hole 25. In the case where the probes are densely arranged, the possibility of occurrence of a short circuit between the probes 50 can be greatly reduced by changing the configuration of the second probe holes 25 as described above. In a state where the pitch between the probes is too short and there is a risk of occurrence of a short circuit between the probes even if the distance between the probes is increased, a probe coated with an insulating material at the intermediate portion may be used. Even in the case where only one of the two probes with the smallest pitch is coated with an insulating material, the insulation Material coating has an effect.

The pitch and arrangement of the intermediate holes 35 formed in the interposer 30 also need to be changed according to the pitch and configuration of the second probe holes 25. That is, in the example of inserting the linear probe, the positions of the holes need to be aligned, and in the step of inserting the probes, all of the first probe holes 15, the intermediate holes 35, and the second probe holes 25 are placed. straight line. If the interposer 30 is present at an intermediate point between the first guiding plate 10 and the second guiding plate 20, the distance that the intermediate hole 35 formed in the interposer 30 can move is the second probe hole 25 relative to the first probe. Half the distance that the pinhole 15 moves.

The pitch between the second probe holes 25 is larger than the pitch between the first probe holes 15, so that the probe 50 is inclined away from the vertical axis and has the same as the first probe hole 15 and the second probe hole 25 An example of the pitch further increases the distance between the first probe hole 15 and the second probe hole 25. However, the distance between the second probe hole 25 and the second guiding plate 20 is substantially short, that is, about 1% of the distance between the first guiding plate 10 and the second guiding plate 20, so The distance between the two probe holes 15 and 25 caused by the movement of the two probe holes 25 changes. That is, the length of the probe 50 need not be separately changed, and the entire contact test device can be fabricated using a single type of probe having the same length. The probe 50 can be inclined in the x-axis direction and the y-axis direction. Based on the sum of the two directions, the length of the probe is affected by the angle at which the probe is inclined with respect to the vertical probe. Therefore, the second probe 20 is second. The position of the pinhole 25 can be changed within a range in which the length of the probe is not seriously affected. The technique of changing the spacing between the probes by changing the pitch between the second probes 25 is equally applicable to all vertical probes, including cobra probes, line probes, and wave probes.

FIG. 11 is a top plan view showing a preferred arrangement of the first probe hole 15 and the second probe hole 25. FIG. 11( a ) illustrates that the first probe hole 15 of the first guiding plate 10 forms a straight line. FIG. 11(b) illustrates the junction of some of the second probe holes 25 of the second probe hole 25 of the second guiding plate 20 in the x-axis direction. Structure.

The pitch 59 between the second probe holes 25 is increased compared to the pitch 58 between the first probe holes 15, and the configuration of the second probe holes 25 is also changed. When the arrangement of the second probe holes 25 is changed wide, it is advantageous to form the electrodes of the space transformer corresponding to the second probe holes 25. In the example in which the bending direction of the probe 50 is the x-axis direction as shown in FIG. 11, the deformed curved portions of the adjacent probes 50 do not overlap. If the deformed curved portions do not overlap each other, the adjacent probes 50 do not overlap each other. Therefore, even if the intermediate portion of the probe 50 is shaken in the y direction, the possibility that the adjacent probes 50 are in contact with each other is greatly reduced.

The exemplified embodiments and the drawings are intended to be illustrative, and the embodiments and drawings are intended to be illustrative, and the embodiments and drawings may be practiced without departing from the spirit and scope of the invention. Various modifications and changes. The contact test apparatus that has been described with reference to the individual exemplary embodiments is not intended to exclude additional or other configurations, such as different exemplary embodiments being selectively combinable and implemented. Accordingly, the scope of protection of the invention is determined by the scope of the claims and their equivalents.

1‧‧‧Contact test device

10‧‧‧First guide board

15‧‧‧First probe hole

16‧‧‧First column hole

20‧‧‧Second guide

25‧‧‧Second probe hole

26‧‧‧Second column hole

30‧‧‧Intermediary board

35‧‧‧Intermediate hole

36‧‧‧Intermediate column hole

50‧‧‧ probe

55‧‧‧Bending direction

60‧‧‧ pin

Claims (18)

A contact testing device comprising: a first guiding plate having a plurality of first probe holes; a second guiding plate disposed parallel to the first guiding plate and having a plurality of second probe holes; an interposer Between the first guiding plate and the second guiding plate, and having a plurality of intermediate holes; and a plurality of probes, inserting the plurality of first probe holes, the plurality of second probe holes, and the plural intermediary a hole, wherein the interposer is movable relative to the first guiding plate and the second guiding plate. The contact test device of claim 1, wherein at least a portion of the probe is curved and the curved portion abuts a wall of the intermediate hole. The contact test device of claim 1, wherein a diameter of a thickest portion of the probe is smaller than an inner diameter of the first probe hole or the second probe hole. The contact test device of claim 1, wherein at least a portion of the probe is bent, and the interposer is more movable in a direction in which the probe is bent, and the interposer is opposite to the bending direction of the probe The movement in the direction is limited. The contact test device of claim 4, wherein a first column hole is formed in the first guiding plate, or a second column hole is formed in the second guiding plate, and a pin is inserted into the first column A hole or the second post hole to limit movement of the interposer. The contact test device of claim 5, wherein the pin is inserted into one of the interposer holes formed in the interposer, and the inner diameter of the interposer hole is larger than the diameter of the pin, and the interposer is Movable. The contact test device of claim 2, further comprising: a position adjusting latch for moving the interposer relative to the first guiding plate and the second guiding plate; wherein at least a portion of the probe is bent by movement of the interposer, and the curved portion abuts the interposing hole One of the walls. The contact test device of claim 7, wherein the position adjusting pin is rotatably inserted into a first position adjusting hole formed in the first guiding plate or formed in a second position adjustment of the second guiding plate a hole, and the position adjusting pin has an eccentric rotating portion that pushes the interposer when the portion rotates in the first position adjusting hole or the second position adjusting hole. The contact test device of claim 8, wherein an inner diameter of the first position adjustment hole or the second position adjustment hole is larger than a diameter of the position adjustment pin, so that the position adjustment pin is movable after the interposer is moved. Removed. The contact test device of claim 7, wherein the position adjustment pin is for inserting a position adjustment hole formed on one side of the contact test device and for moving the interposer. The contact test device of claim 1, wherein a pitch between the plurality of first probe holes and a pitch between the plurality of second probe holes are different from each other. The contact test device of claim 1, wherein the configuration of the plurality of first probe holes and the configuration of the plurality of second probe holes are different from each other. The contact test device of claim 1, wherein the probe is deformed when the probe contacts one of the electrodes of the test object and is pressed; and the deformation of the probe causes the interposer to move. The contact test device of claim 1, wherein the intermediate hole has a long hole shape. The contact test device of claim 14, wherein one of the longitudinal holes in the form of a long hole is oriented in a direction inclined by a predetermined angle with respect to a center line of the two adjacent probes. The contact test device of claim 1, wherein an insulating coating is formed on the plurality of probes At least one probe. The contact test device of claim 1, wherein the movement of the interposer deforms the probe. The contact test device of claim 1, wherein the probe is fixed so as not to move by its own weight in the direction of gravity.