JP6062235B2 - 2-core contact probe, 2-core contact probe unit, and 2-core contact probe manufacturing method - Google Patents

Description

  The present invention relates to a two-core contact probe, a two-core contact probe unit, and a method for manufacturing a two-core contact probe. More specifically, the present invention relates to a two-core contact probe, a two-core contact probe unit, and two The present invention relates to a method for manufacturing a core contact probe.

Conventionally, the first contact pin and the second contact pin are integrated in parallel and insulated, and at the tip of each contact pin that contacts the surface to be inspected, each inclined surface that inclines and intersects with each axis of each contact pin There are known two-core contact probes each formed in a direction in which their tops are closest to each other (see, for example, Patent Documents 1 and 2).
Also, an inspection jig that holds the contact pin slightly obliquely to determine the bending direction of the contact pin when the contact pin is pressed against the inspection target surface in order to ensure contact with the inspection target surface. It is known (for example, refer to Patent Document 3).

Japanese Utility Model Publication No. 3-27360 Japanese Patent No. 3905850 JP 2008-309761 A

In the two-core contact probe described in Patent Document 1, an inclined surface that inclines and intersects with the axis of the first electric wire is formed at the tip thereof to form the first contact pin, and separately, the axis and inclination of the second electric wire are inclined. Then, an inclined surface intersecting with each other is formed at the tip of the contact pin to form a second contact pin, and thereafter, the first contact pin and the second contact pin are arranged in such a direction that the inclined surfaces of the tip portions of the contact pins are closest to their tops. It is integrated to become.
However, when each contact pin is very thin (for example, about 110 μm in diameter), a microscope is required to integrate the inclined surfaces of the tip portions of the contact pins so that their tops are closest to each other. There is a problem that the number of manufacturing steps is increased.

On the other hand, in the two-core contact probe described in Patent Document 2, the first contact pin and the second contact pin are integrated so that their inclined surfaces of their respective base end portions are oriented so that their top portions are farthest apart. Due to the structure, an inclined surface is formed at the base end portion of the first electric wire to be the first contact pin, and an inclined surface is formed at the base end portion of the second electric wire to be the second contact pin, and thereafter, The first electric wire and the second electric wire must be integrated.
However, when each electric wire is very thin (for example, about 110 μm in diameter), a microscope is required to integrate the inclined surfaces at the base end portions of the electric wires so that their tops are in the furthest distance. There is a problem that the number of manufacturing steps is increased.

  Furthermore, in the inspection jig described in Patent Document 3, it is difficult to set the contact pin between the holes whose center axes are shifted in order to hold the contact pin slightly obliquely. There was a problem.

  Therefore, an object of the present invention is to provide a two-core contact probe, a two-core contact probe unit, and a method for manufacturing a two-core contact probe that can reduce the number of manufacturing steps.

In a first aspect, the present invention provides a first contact pin and a second contact pin that are integrated in parallel and insulatively, and at the tip of each contact pin that contacts the surface to be inspected, Each of the inclined surfaces intersecting with each other is a two-core contact probe formed in a direction closest to the top of each of the inclined surfaces, and each axis of each contact pin is provided at each base end opposite to each tip. The inclined surfaces (5a, 5b) that intersect with (Ax, Bx) at an angle are formed in the same direction, are orthogonal to the plane (P) including both axes (Ax, Bx), and each axis ( Provided is a two-core contact probe (11) characterized in that each normal line (Na, Nb) of the inclined surfaces (5a, 5b) is parallel to each plane (Pa, Pb) including Ax, Bx), respectively. To do.
In the two-core contact probe (11) according to the first aspect, the inclined surfaces of the tip portions of the contact pins are oriented in the direction in which the top portions are closest to each other, so that the first electric wire serving as the first contact pin And the second electric wire to be the second contact pin can be formed even after being integrated. In addition, the inclined surfaces of the base end portions are in the same direction and are orthogonal to the plane (P) including both axes (Ax, Bx) and each plane including the axes (Ax, Bx). Since the normal lines (Na, Nb) of the inclined surfaces (5a, 5b) are respectively directed in parallel to (Pa, Pb), the first electric wire and the second contact pin, which are also the first contact pins, It can be formed even after the second electric wire is integrated. In other words, the first electric wire and the second electric wire can be integrated without worrying about the orientation, and then the inclined surface of the distal end and the inclined surface of the proximal end can be formed. The number of manufacturing steps can be reduced, such as eliminating the need to adjust the direction of the wires.
In addition, since the apex of the inclined surface of the base end portion makes point contact with the measuring device side electrode, the probability of contact failure due to sandwiching dust can be reduced.

In a second aspect, the present invention relates to a first contact pin and a second contact pin that are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with the surface to be inspected, Each of the inclined surfaces intersecting with each other is a two-core contact probe formed in a direction closest to the top thereof, and each axis (Ax, Bx) Each inclined surface (5a) which has each plane (9a, 9b) perpendicular to the cross-sectional area of each contact pin and which inclines and intersects with each axis (Ax, Bx) of each contact pin ', 5b') are formed in the same direction, orthogonal to the plane (P) including both axes (Ax, Bx), and each plane (Pa, Pb) including each of the axes (Ax, Bx). The inclined surface (5a ', Each normal (Na of b '), Nb) to provide a 2-core contact probe (12), which is a parallel.
In the two-core contact probe (12) according to the second aspect, the inclined surfaces of the tip portions of the contact pins are oriented in the direction in which the tops are closest to each other, so that the first electric wire serving as the first contact pin And the second electric wire to be the second contact pin can be formed even after being integrated. Further, the inclined surfaces (5a ′, 5b ′) of the respective base end portions are in the same direction and are relative to a plane (P) including both axes (Ax, Bx) of the first contact pin and the second contact pin. The normals (Na, Nb) of the inclined surfaces (5a ′, 5b ′) are parallel to the planes (Pa, Pb) orthogonal to each other and including the axes (Ax, Bx). Therefore, it can be formed even after the first electric wire to be the first contact pin and the second electric wire to be the second contact pin are integrated. In other words, the first electric wire and the second electric wire can be integrated without worrying about the orientation, and then the inclined surface of the distal end and the inclined surface of the proximal end can be formed. The number of manufacturing steps can be reduced, such as eliminating the need to adjust the direction of the wires.
Since the base ends are flat (9a, 9b), it is easy to make the lengths of the contact pins uniform.

In a third aspect, the present invention integrates the first contact pin and the second contact pin in parallel and insulatively, and at the tip of each contact pin that contacts the surface to be inspected, each axis of each contact pin and Each of the inclined surfaces intersecting with each other is a two-core contact probe formed in a direction closest to the top of each of the inclined surfaces, and each axis of each contact pin is provided at each base end opposite to each tip. The inclined surfaces (5a ′, 5b ′) that intersect with (Ax, Bx) at an angle are formed in the same direction and intersect with the axes (Ax, Bx) of each contact pin at an angle. Each inclined surface (5a ″, 5b ′) having an area smaller than (5a ′, 5b ′) is formed opposite to the inclined surface (5a ′, 5b ′) and includes a plane including both axes (Ax, Bx) ( Orthogonal to P) and said each A two-core contact probe characterized in that the normal lines (Na, Nb) of the inclined surfaces (5a ′, 5b ′) are parallel to the planes (Pa, Pb) including the lines (Ax, Bx), respectively. 13).
In the two-core contact probe (13) according to the third aspect, the inclined surfaces of the tip portions of the contact pins are oriented in the direction in which the tops are closest to each other, so that the first electric wire serving as the first contact pin And the second electric wire to be the second contact pin can be formed even after being integrated. In addition, the inclined surfaces (5a ′, 5b ′, 5a ″, 5b ″) of the respective base end portions are in the same direction and include planes (Ax, Bx) of the first contact pin and the second contact pin. The normals (Na, Nb) of the inclined surfaces (5a ′, 5b ′) are parallel to the planes (Pa, Pb) orthogonal to (P) and including the axes (Ax, Bx), respectively. Since it is directed in a certain direction, it can be formed even after the first electric wire to be the first contact pin and the second electric wire to be the second contact pin are integrated. In other words, the first electric wire and the second electric wire are integrated without worrying about the direction, and then the inclined surface (4a, 4b) of the distal end portion and the inclined surface (5a ′, 5b ′, 5a) of the proximal end portion. ", 5b") can be formed, and the number of manufacturing steps can be reduced, such as the need for adjusting the direction of the two electric wires using a microscope.
In addition, since the ridge line where the two inclined surfaces (5a ′, 5b ′, 5a ″, 5b ″) at the base end meet is in line contact with the measuring device side electrode, the probability of poor contact due to sandwiching dust is reduced. I can do it.

In a fourth aspect, the present invention provides the two-core contact probe according to any one of the first to third aspects, wherein the first contact pin and the second contact pin are integrated via a covering and the covering is integrated with the covering. Provided is a two-core contact probe (16) provided with a step (8).
In the two-core contact probe (16) according to the fourth aspect, since the step (8) for use in the axial positioning of each contact pin is provided in the covering, the contact with the positioning member is performed through the covering. In other words, both slipping property and insulating property are suitable.

In a fifth aspect, the present invention provides the two-core contact probe according to any one of the first to fourth aspects, wherein the first contact pin and the second contact pin are connected only through a coupling portion (6) of the covering. A two-core contact probe (17) characterized by being integrated is provided.
In the two-core contact probe (17) according to the fifth aspect, the first contact pin and the second contact pin are integrated only in part, so that the first contact pin and the second contact pin can be bent separately. The degree can be increased.

In a sixth aspect, the present invention provides a plurality of two-core contact probes according to any one of the first to fifth aspects, and the inclined surfaces (5a, 5b, 5a ′, 5b ′, 5a ″, 5b). The two-core contact probe unit (30) is provided in which the directions of ")" are aligned and held in parallel.
In the two-core contact probe unit (30) according to the sixth aspect, a plurality of two-core contact probes are aligned in the directions of the inclined surfaces (5a, 5b, 5a ′, 5b ′, 5a ″, 5b ″). In addition, since the adjacent two-core contact probes are bent in the same direction and the adjacent two-core contact probes are not bent in a direction approaching each other, Even if it is not disposed with an inclination, it can be avoided that adjacent two-core contact probes come into close contact with each other.

In a seventh aspect, the present invention integrates the first contact pin and the second contact pin in parallel and insulatively, and inclines with the axis of each contact pin at the tip of each contact pin that comes into contact with the object to be inspected. Each of the inclined surfaces intersecting each other is formed in a direction closest to the top thereof, and each axis of each contact pin ( Inclined surfaces (5a1, 5b1) inclined and intersecting with Ax, Bx) are formed in the same direction and intersecting with the axis (Ax, Bx) of each contact pin while intersecting with the inclined surfaces (5a1, 5x1). 5b1) and an inclined surface (5a2, 5b2) having the same area as that of the inclined surface (5a1, 5b1) are formed in the opposite direction to the plane (P) including both axes (Ax, Bx). 2 cores characterized in that each normal line (Na, Nb) of the inclined surfaces (5a1, 5b1) is parallel to each plane (Pa, Pb) intersecting and including each axis (Ax, Bx). A contact probe (14) is provided.
In the two-core contact probe (14) according to the seventh aspect, the inclined surfaces of the tip portions of the contact pins are oriented in the direction in which the top portions are closest to each other, so that the first electric wire serving as the first contact pin And the second electric wire to be the second contact pin can be formed even after being integrated. Further, the inclined surfaces (5a1, 5b1) and the inclined surfaces (5a2, 5b2) of the respective base end portions are in the same direction and include planes (Ax, Bx) of the first contact pin and the second contact pin. Direction in which each normal line (Na, Nb) of the inclined surface (5a1, 5b1) is parallel to each plane (Pa, Pb) orthogonal to (P) and including each axis (Ax, Bx) Therefore, it can be formed even after the first electric wire serving as the first contact pin and the second electric wire serving as the second contact pin are integrated. In other words, the first electric wire and the second electric wire can be integrated without worrying about the orientation, and then the inclined surface of the distal end and the inclined surface of the proximal end can be formed. The number of manufacturing steps can be reduced, such as eliminating the need to adjust the direction of the wires.
In addition, since the ridge line where the two inclined surfaces (5a1, 5a2) and (5b1, 5b2) of the base end meet is in line contact with the measuring instrument side electrode, the probability of poor contact due to the dust being caught can be reduced. I can do it.

In an eighth aspect, the present invention provides a first contact pin and a second contact pin that are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with an object to be inspected, each axis of each contact pin is inclined with each axis. Each of the inclined surfaces intersecting each other is a two-core contact probe formed in a direction closest to the top of each of the inclined surfaces, and each axis (Ax, Bx) is provided at each proximal end opposite to each distal end. Inclined surfaces (5a1 ′, 5b1 ′) having planes (9a, 9b) orthogonal to each other and intersecting each axis (Ax, Bx) of each contact pin at an angle are formed in the same direction. Inclined surfaces (5a2 ′, 5b2 ′) that incline and intersect each axis (Ax, Bx) of each contact pin are formed on the opposite side to the inclined surfaces (5a1 ′, 5b1 ′) in opposite directions, respectively. Axis (Ax, Bx The normals (Na, Nb) of the inclined surfaces (5a1 ′, 5b1 ′) to the planes (Pa, Pb) that are orthogonal to the plane (P) including the axis and include the axes (Ax, Bx), respectively. Provided is a two-core contact probe (15) characterized by being parallel.
In the two-core contact probe (15) according to the eighth aspect, each inclined surface of each tip portion of each contact pin is directed in the direction in which the top portions thereof are closest to each other, so that the first electric wire serving as the first contact pin And the second electric wire to be the second contact pin can be formed even after being integrated. In addition, the inclined surfaces of the base end portions are in the same direction and are orthogonal to the plane (P) including both the axis lines (Ax, Bx) of the first contact pin and the second contact pin, and the axis lines ( Since the normal lines (Na, Nb) of the inclined surfaces (5a1 ′, 5b1 ′) are parallel to the respective planes (Pa, Pb) including Ax, Bx), respectively, the first contact is also made. It can be formed even after the first electric wire serving as the pin and the second electric wire serving as the second contact pin are integrated. In other words, the first electric wire and the second electric wire can be integrated without worrying about the orientation, and then the inclined surface of the distal end and the inclined surface of the proximal end can be formed. The number of manufacturing steps can be reduced, such as eliminating the need to adjust the direction of the wires.
Since the base end is a plane, it is easy to make the lengths of the contact pins uniform.

In a ninth aspect, the present invention provides the two-core contact probe according to any one of the seventh and eighth aspects, wherein the first contact pin and the second contact pin are integrated via a covering and the covering is integrated. Provided is a two-core contact probe (16) provided with a step (8).
In the two-core contact probe (16) according to the ninth aspect, the step (8) used for the axial positioning of each contact pin is provided in the covering, so that the contact with the positioning member is performed through the covering. In other words, both slipping property and insulating property are suitable.

According to a tenth aspect, the present invention provides the two-core contact probe according to any one of the seventh to ninth aspects, wherein the first contact pin and the second contact pin are connected only through a coupling portion (6) that is covered. A two-core contact probe (17) characterized by being integrated is provided.
In the two-core contact probe (17) according to the tenth aspect, since the first contact pin and the second contact pin are integrated only in part, the first contact pin and the second contact pin can be flexed separately. The degree can be increased.

In an eleventh aspect, the present invention relates to a two-core parallel wire manufacturing process for manufacturing a two-core parallel wire (1e) in which a predetermined length of first and second wires are integrated in parallel and insulated, The plane (P) of the two-core parallel wires is parallel to one virtual plane (Pe) and includes both the first and second axes (Ax, Bx) of the two-core parallel wires. Arranged in a direction orthogonal to Pe) and held by the tip end polishing jig (E), intersecting the virtual plane (Pe) and orthogonal to the plane (P), the polishing surfaces (F) An inclined surface (4a) that is inclined and intersects with the axis of the first electric wire of the two-core parallel wire is provided, and then the tip polishing jig (E) is turned over, and each of the plurality of two-core parallel wires is A tip end polishing step for providing an inclined surface (4b) that inclines and intersects the axis of the tip of the second electric wire; A plane (P) including a number of two-core parallel wires parallel to one virtual plane (Pg) and including the first and second axes (Ax, Bx) of each two-core parallel wires is the virtual plane. (Pg) parallel to (Pg) and with the tips aligned and held by the base end polishing jig (G), the polishing surfaces (F) intersecting the virtual plane (Pg) Inclined surfaces (5a, 5b, 5a ′, 5b ′, 5a ″, 5b ″, 5a1, 5b1, and the base line of each of the first electric wires and the second electric wires of the two-core parallel electric wires are inclined. 5a2, 5b2, 5a1 ′, 5b1 ′, 5a2 ′, 5b2 ′) and a base end polishing step for providing a two-core contact probe.
In the manufacturing method of the two-core contact probe according to the eleventh aspect, the first electric wire serving as the first contact pin and the second electric wire serving as the second contact pin are integrated, and then the inclined surface of the distal end and the inclined end of the proximal end Since the surface is formed, the first electric wire and the second electric wire can be integrated without worrying about the direction. Therefore, it is possible to reduce the number of manufacturing steps, such as the need for adjusting the direction of the two electric wires using a microscope. Thereby, the two-core contact probe according to the tenth aspect can be suitably manufactured from the first aspect.
Note that either the tip end polishing step or the base end polishing step may be performed first.

In a twelfth aspect, the present invention provides the method for manufacturing a two-core contact probe according to the eleventh aspect, wherein the first electric wire and the second electric wire are integrated via a coating in the two-core parallel wire manufacturing step. In addition, the present invention provides a method for manufacturing a two-core contact probe, comprising a step forming step of removing a part of the coating and providing a step (8).
In the method for manufacturing a two-core contact probe according to the twelfth aspect, the two-core contact probe according to the fourth and ninth aspects can be preferably manufactured.

In a thirteenth aspect, the present invention provides the two-core contact probe manufacturing method according to any one of the eleventh and the twelfth aspects, wherein the first electric wire and the second electric wire are connected in the two-core parallel electric wire manufacturing step. The first electric wire and the second electric wire are integrated with each other through the covering, and a cut is made between the first electric wire and the second electric wire from the distal end side and the proximal end side to connect the first electric wire and the second electric wire only to the coupling portion (6). The manufacturing method of the two-core contact probe characterized by having the slit process integrated via this.
In the method for manufacturing a two-core contact probe according to the thirteenth aspect, the two-core contact probe according to the fifth and tenth aspects can be preferably manufactured.

In a fourteenth aspect, the present invention provides a first contact pin and a second contact pin which are integrated in parallel and insulatively, and at the tip of each contact pin which comes into contact with the surface to be inspected, Each of the inclined surfaces intersecting with each other is a two-core contact probe formed in a direction closest to the top of each of the inclined surfaces, and each base end portion on the opposite side to each of the distal end portions corresponds to each axis of each contact pin ( Provided is a two-core contact probe (18) characterized in that it is formed on a convex rotary surface (7a, 7b) having a rotation axis of Ax, Bx).
In the above configuration, the convex rotation surfaces (7a, 7b) having the axis (Ax, Bx) as the rotation axis have a first end on the axis (Ax, Bx), and a tip side from the first end. And a surface formed by rotating a straight line or a curve having a second end outside the axis (Ax, Bx) around the axis (Ax, Bx), for example, a conical surface, a truncated conical surface, a hemispherical surface, Such as a truncated hemisphere.
In the two-core contact probe (18) according to the fourteenth aspect, the convex rotating surface (7a) is formed at the base end portion of the first electric wire serving as the first contact pin, and separately from the second electric wire serving as the second contact pin. A convex rotation surface (7b) is formed also at the base end of the first electric wire, the first electric wire and the second electric wire are integrated, and thereafter each inclined surface can be formed at each distal end portion of each electric wire. Here, when the first electric wire and the second electric wire are integrated, the base end portion is not the inclined surface but the convex rotary surface (7a, 7b), so there is no need to adjust the direction. Therefore, it is possible to reduce the number of manufacturing steps, such as the need for adjusting the direction of the two electric wires using a microscope.

In a fifteenth aspect, the present invention provides a first electric wire base end portion processing step for processing a base end portion of a first electric wire having a predetermined length into a convex rotating surface (7a) having an axis of the first electric wire as a rotation axis. And a second electric wire base end portion processing step for processing the base end portion of the second electric wire having a predetermined length into a convex rotary surface (7b) having the same shape as the base end portion of the first electric wire, and the base end portion A two-core parallel wire manufacturing process for manufacturing a two-core parallel wire in which the processed first electric wire and the second electric wire are integrated in parallel and insulated, and a plurality of two-core parallel wires on one virtual plane (Pe) The tip portion is polished so that the plane (P) including the first and second axes (Ax, Bx) of each two-core parallel wire is parallel to the imaginary plane (Pe). The plurality of two-core flats are held by a polishing surface (F) that is held by a jig (E) and intersects the virtual plane (Pe) and is orthogonal to the plane (P). An inclined surface (4a) that inclines and intersects the axis (Ax) is provided at the tip of each first electric wire of the electric wire, and then the tip polishing jig (E) is turned over, and each of the plurality of two-core parallel wires is A method for manufacturing a two-core contact probe, comprising: a tip end polishing step of providing an inclined surface (4b) that inclines and intersects the axis (Bx) at the tip end portion of a second electric wire.
In the method of manufacturing the two-core contact probe according to the fifteenth aspect, the convex rotary surface (7a) is formed at the base end portion of the first electric wire, and separately from the convex rotary surface ( 7b), the first electric wire and the second electric wire are integrated, and then each inclined surface (4a, 4b) is formed at each tip of each electric wire. Here, when the first electric wire and the second electric wire are integrated, the base end portion is not the inclined surface but the convex rotary surface (7a, 7b), so there is no need to adjust the direction. Therefore, it is possible to reduce the number of manufacturing steps, such as the need for adjusting the direction of the two electric wires using a microscope. Thereby, the two-core contact probe according to the fourteenth aspect can be suitably manufactured.

  According to the manufacturing method of the two-core contact probe, the two-core contact probe unit, and the two-core contact probe of the present invention, the number of manufacturing steps can be reduced.

1 is a front view and a side view showing a two-core contact probe according to Example 1. FIG. It is X-X 'sectional drawing of FIG. It is a block diagram which shows the straight line correction process which concerns on Example 1. FIG. 3 is a block diagram illustrating a coating baking process according to Embodiment 1. FIG. It is a block diagram which shows the 2 wire integration process which concerns on Example 1. FIG. It is a block diagram which shows the predetermined length cutting process which concerns on Example 1. FIG. 1 is a perspective view showing a two-core parallel electric wire according to Example 1. FIG. 1 is a perspective view showing a tip polishing jig according to Embodiment 1. FIG. FIG. 5 is an explanatory view showing a tip portion polishing step according to Example 1. FIG. 6 is an explanatory diagram showing a continuation of the tip portion polishing step according to Example 1. 1 is a perspective view showing a proximal polishing jig according to Embodiment 1. FIG. FIG. 4 is an explanatory view showing a base end portion polishing step according to Example 1. It is the front view and side view which show the 2 core parallel electric wire which passed through the front-end | tip part grinding | polishing process and the base end part grinding | polishing process. 1 is a partially broken front view and a partially broken side view showing a two-core contact probe unit according to Embodiment 1. FIG. 6 is a front view and a side view showing a proximal end portion of a two-core contact probe according to Embodiment 2. FIG. 6 is a front view and a side view showing a proximal end portion of a two-core contact probe according to Embodiment 3. FIG. 6 is an explanatory view showing a base end portion polishing step according to Example 3. FIG. FIG. 10 is an explanatory view showing the continuation of the base end portion polishing step according to Example 3. FIG. 10 is a front view and a side view showing a proximal end portion of a two-core contact probe according to a fourth embodiment. FIG. 10 is a front view and a side view showing a proximal end portion of a two-core contact probe according to a fifth embodiment. FIG. 10A is a front view and a side view showing a distal end portion of a two-core contact probe according to a sixth embodiment. 10 is a front view showing a two-core contact probe according to Embodiment 7. FIG. FIG. 10 is a front view and a side view showing a two-core contact probe according to an eighth embodiment. It is a block diagram which shows the predetermined length cutting process which concerns on Example 8. FIG. It is the front view and side view which show the 1st electric wire which passed through the base end part grinding | polishing process. It is the front view and side view which show the 2 core parallel electric wire which integrated the 1st electric wire and 2nd electric wire which passed through the base end part grinding | polishing process. 10 is a perspective view showing a tip end polishing jig according to Embodiment 8. FIG. FIG. 10 is a front view and a side view showing a proximal end portion of a two-core contact probe according to Example 9.

  Hereinafter, the present invention will be described in more detail with reference to embodiments shown in the drawings. Note that the present invention is not limited thereby.

Example 1
FIG. 1A is a left side view illustrating the two-core contact probe 11 according to the first embodiment. FIG. 1B is a front view thereof. FIG. 1C is a right side view.
The two-core contact probe 11 is obtained by integrating a first contact pin 11a and a second contact pin 11b in parallel and through a cover 3.
Inclined surfaces 4a and 4b that are inclined and intersect with the axis lines Ax and Bx of the contact pins 11a and 11b are formed at the tips of the contact pins 11a and 11b, respectively, in directions that are closest to the tops. Yes.
At the base ends of the contact pins 11a and 11b, inclined surfaces 5a and 5b that are inclined and intersect with the axes Ax and Bx of the contact pins 11a and 11b are formed in the same direction.

2 is a cross-sectional view taken along the line XX ′ of FIG.
The contact pins 11a and 11b have coatings 2a and 2b, respectively.
The plane Pa is a plane that is orthogonal to the plane P including both axes Ax and Bx and includes the axis Ax. The normal line Na of the inclined surface 5a is parallel to the plane Pa.
The plane Pb is a plane that is orthogonal to the plane P including both axes Ax and Bx and includes the axis Bx. The normal line Nb of the inclined surface 5b is parallel to the plane Pb.

A method for manufacturing the two-core contact probe 11 will be described with reference to FIGS.
3 to 7 show a two-core parallel wire manufacturing process, FIGS. 8 to 10 show a tip end polishing process, and FIGS. 11 to 13 show a base end polishing process.

First, as shown in FIG. 3, for example, a conducting wire 1a such as a tungsten wire having a diameter of about 110 μm is passed through a straightening device A to form a conducting wire 1b having a predetermined linearity, and this is wound around a roll Ra.
Next, as shown in FIG. 4, the conducting wire 1b is passed through the coating baking apparatus B to form a coated conducting wire 1c having a coating 2 such as a polyester coating having a thickness of about 10 μm, which is wound around a roll Rb.
Next, as shown in FIG. 5, two coated conductors 1c are arranged at a predetermined interval and passed through a coating baking apparatus C so as to be integrated with a coating 3 such as a polyester coating or a fusion coating having a thickness of about 5 μm. The parallel conducting wire 1d is taken up on the roll Rc.
Next, as shown in FIG. 6, the two-core parallel conductor 1 d is passed through the cutting device D to form a two-core parallel electric wire 1 e having a predetermined length such as a length of 30 mm, and this is accommodated in the tray Q.
FIG. 7 is a perspective view of the two-core parallel wire 1e.

  Next, as shown in FIG. 8, a plurality of two-core parallel electric wires 1e are arranged in parallel on one virtual plane Pe and both the first electric wires 1c-1 and the second electric wires 1c-2 of each two-core parallel electric wires 1e. The planes P including the axes Ax and Bx are arranged so as to be orthogonal to the virtual plane Pe, and are elastically sandwiched between the first holder Ea and the second holder Eb of the tip end polishing jig E.

Next, as shown in FIG. 9, the tip end polishing jig E is inclined so that the virtual plane Pe intersects the polishing surface F at an angle θ of, for example, 30 ° and the plane P is orthogonal to the polishing surface F. The tip end portion of each first electric wire 1c-1 of the two-core parallel electric wire 1e is polished with the polishing surface F, and the inclined surface 4a that inclines and intersects the axis Ax at each tip portion of each of the plurality of first electric wires 1c-1. Provided at the same time as a two-core parallel wire 1f.
Next, as shown in FIG. 10, the tip end polishing jig E is turned over, and the tip end polishing jig is set so that the virtual plane Pe intersects the polishing surface F at an angle θ and the plane P intersects the polishing surface F at right angles. E is inclined to polish the tip of each second wire 1c-2 of the plurality of two-core parallel wires 1f with the polishing surface F, and the tip of each of the plurality of second wires 1c-2 is inclined with respect to the axis Bx. The intersecting inclined surfaces 4b are provided at the same time to provide a two-core parallel wire 1g.

  Next, as shown in FIG. 11, a plurality of two-core parallel wires 1g having inclined surfaces 4a and 4b provided at the front end portions are parallel to one virtual plane Pg and the first wires 1c of the two-core parallel wires 1g. Of the inclined surfaces 4a and 4b on the imaginary straight line Lg perpendicular to the axes Ax and Bx so that the plane P including both the axes Ax and Bx of the -1 and the second electric wire 1c-2 is parallel to the imaginary plane Pg. The apexes are aligned, and elastically sandwiched between the first holding tool Ga and the second holding tool Gb of the proximal end polishing jig G.

Next, as shown in FIG. 12, a virtual plane Pg intersects the polishing surface F at an angle φ of 30 °, for example, and a virtual straight line Lg connecting the vertices of the inclined surfaces 4a and 4b at the tip is parallel to the polishing surface F. In this manner, the base end polishing jig G is tilted so that the base ends of the first electric wires 1c-1 and the second electric wires 1c-2 of the plurality of two-core parallel wires 1g are polished by the polishing surface F, Inclined surfaces 5a and 5b that incline and intersect with the axis lines Ax and Bx are provided at the base end portions of the first electric wire 1c-1 and the second electric wire 1c-2, respectively, to form a two-core parallel electric wire 1h.
FIG. 13A is a front view of a two-core parallel wire 1h in which inclined surfaces 4a and 4b are provided at the distal end portion and inclined surfaces 5a and 5b are provided at the proximal end portion. FIG. 13B is a side view thereof.

  Finally, if the coating 2a, 2b, 3 on the distal end portion and the proximal end portion of the two-core parallel wire 1h is removed by, for example, a laser device, a two-core contact probe 11 as shown in FIG. 1 can be manufactured.

14A is a partially broken front view showing the two-core contact probe unit 30. FIG. FIG. 14B is a side sectional view of the same part.
In this two-core contact probe unit 30, nine two-core contact probes 11 are arranged in three rows and three columns so that the directions of the inclined surfaces 5a and 5b are aligned and parallel to each other. keeping.
The inclined surfaces 4a and 4b at the tip portions of the two-core contact probe 11 are in point contact with the inspection target surface L of the circuit board at their apexes.
The inclined surfaces 5a and 5b at the base ends of the two-core contact probe 11 are in point contact with the measuring instrument side electrodes Ma and Mb at the apexes thereof.

  As shown by an arrow α in FIG. 14B, the two-core contact probe 11 is pushed by the measuring instrument side electrodes Ma and Mb to ensure contact. At that time, the two-core contact probe 11 is moved in the direction of the arrow β. Bend. The direction of the arrow β is the direction opposite to the side where the centers of gravity of the first electric wire 1c-1 and the second electric wire 1c-2 exist with respect to the axis lines Ax and Bx. In other words, the inclined surfaces 5a and 5b are oriented in the direction.

  According to the two-core contact probe 11 and the manufacturing method thereof of the first embodiment, the first electric wire 1c-1 and the second electric wire 1c-2 are integrated without worrying about the orientation, and then the inclined surface 4a at the distal end portion. , 4b and the inclined surfaces 5a, 5b of the base end portion can be formed, so that it is not necessary to adjust the direction of the two electric wires using a microscope, and the number of manufacturing steps can be reduced. In addition, since the apexes of the inclined surfaces 5a and 5b at the base end are in point contact with the measuring device side electrodes Ma and Mb, the probability of contact failure due to dust being caught can be reduced.

  Further, according to the two-core contact probe unit 30 of the first embodiment, even when a plurality of two-core contact probes 11 are held in parallel, the bending direction of the adjacent two-core contact probes 11 is the same direction, and adjacent to each other. Since the two-core contact probes 11 are not bent in such a direction that they approach each other, it is possible to avoid the adjacent two-core contact probes 11 from coming into close contact with each other.

-Example 2-
FIG. 15A is a left side view showing a proximal end portion of the two-core contact probe 12 according to the second embodiment. FIG. 15B is a front view thereof. FIG. 15C is a right side view thereof.
The two-core contact probe 12 is an embodiment except that it has flat surfaces 9a, 9b orthogonal to the axes Ax, Bx and having an area less than half of the cross-sectional area of the contact pins 12a, 12b at the base end. 1 is the same configuration as the two-core contact probe 11.

  The flat surfaces 9a and 9b are provided by polishing the inclined surfaces 5a 'and 5b' so as to leave the flat surfaces 9a and 9b. Alternatively, the inclined surfaces 5a and 5b may be polished and provided in the same manner as the two-core contact probe 11 of Example 1, and then the flat surfaces 9a and 9b may be provided by polishing with a polishing surface orthogonal to the axes Ax and Bx. I can do it.

  According to the two-core contact probe 12 and the manufacturing method thereof of the second embodiment, the first electric wire 1c-1 and the second electric wire 1c-2 are integrated without worrying about the orientation, and then the inclined surface 4a at the tip portion is integrated. 4b and the inclined surfaces 5a ', 5b' and the flat surfaces 9a, 9b of the base end portion can be formed, so that it is not necessary to adjust the direction of the two electric wires using a microscope, thereby reducing the number of manufacturing steps. I can do it. Further, since the base ends are the planes 9a and 9b, it is easy to make the lengths of the contact pins 12a and 12b uniform.

  Further, since the areas of the planes 9a and 9b are less than half of the cross-sectional areas of the contact pins 12a and 12b, the centers of gravity of the contact pins 12a and 12b are sufficiently biased toward the planes 9a and 9b with respect to the axes Ax and Bx. Therefore, even if a plurality of the two-core contact probes 12 of the second embodiment are held in parallel instead of the two-core contact probes 11 in the two-core contact probe unit 30 of the first embodiment, the adjacent two-core contact probes 12 Since the bending direction is the same direction and the adjacent two-core contact probes 12 are not bent in such a direction as to approach each other, it is possible to avoid the adjacent two-core contact probes 12 from coming into close contact with each other.

-Example 3-
FIG. 16A is a left side view showing a proximal end portion of the two-core contact probe 13 according to the third embodiment. FIG. 16B is a front view of the same. FIG. 16C is a right side view of the same.
In this two-core contact probe 13, instead of the flat surfaces 9a and 9b of the second embodiment, the inclined surfaces 5a ″ and 5b ″ having smaller areas than the inclined surfaces 5a ′ and 5b ′ are opposite to the inclined surfaces 5a ′ and 5b ′. The configuration is the same as that of the two-core contact probe 11 of the first embodiment except that each is formed in the direction.

  As shown in FIG. 17, the virtual plane Pg intersects the polishing surface F at an angle φ of 30 °, for example, and the virtual straight line Lg connecting the vertices of the inclined surfaces 4 a and 4 b at the tip is parallel to the polishing surface F. The base end portion of the first electric wire 1c-1 and the second electric wire 1c-2 of the plurality of two-core parallel electric wires 1g (see FIG. 11) is polished with the polishing surface F by inclining the base end portion polishing jig G. Inclined surfaces 5a ′ and 5b ′ that incline and intersect with the axis lines Ax and Bx are provided at the base end portions of the plurality of first electric wires 1c-1 and second electric wires 1c-2 at the same time to form a two-core parallel electric wire 1i. . In addition, the size of the inclined surfaces 5a 'and 5b' is set to a size that can intersect the axis lines Ax and Bx.

  Next, as shown in FIG. 18, the base end polishing jig G is turned over, and the virtual plane Pg intersects the polishing surface F at an angle φ and connects the vertices of the inclined surfaces 4 a and 4 b at the tip end portions to a virtual straight line Lg. The base end polishing jig G is tilted so that is parallel to the polishing surface F, and the base ends of the first electric wires 1c-1 and the second electric wires 1c-2 of the plurality of two-core parallel electric wires 1i are respectively provided. Inclined surfaces 5a "and 5b" which intersect with the axis lines Ax and Bx are provided at the same time to form a two-core parallel wire 1j. In addition, the size of the inclined surfaces 5a ″ and 5b ″ is set to a size that does not intersect the axis lines Ax and Bx.

  If the distal end portion and the base end portion covering 2a, 2b, 3 of the two-core parallel wire 1j provided with the inclined surfaces 5a ', 5b', 5a ", 5b" are removed by, for example, a laser device, 2 as shown in FIG. The core contact probe 13 can be manufactured.

  According to the two-core contact probe 13 and the manufacturing method thereof of the third embodiment, the first electric wire 1c-1 and the second electric wire 1c-2 are integrated without worrying about the orientation, and then the inclined surface 4a at the distal end portion. , 4b and the inclined surfaces 5a ′, 5b ′, 5a ″, 5b ″ at the base end can be formed, so that it is not necessary to adjust the direction of the two electric wires using a microscope, thereby reducing the number of manufacturing steps. I can do it. In addition, since the ridge line where the inclined surfaces 5a ′ and 5a ″ meet and the ridge line where the inclined surfaces 5b ′ and 5b ″ meet is in line contact with the measuring device side electrodes Ma and Mb, the contact failure due to sandwiching dust The probability of can be lowered.

  Further, since the area of the inclined surfaces 5a ", 5b" is smaller than the area of the inclined surfaces 5a ', 5b', the center of gravity of each contact pin 13a, 13b is sufficiently inclined with respect to the axes Ax, Bx. Even if a plurality of two-core contact probes 13 of the third embodiment are held in parallel instead of the two-core contact probe 11 in the two-core contact probe unit 30 of the first embodiment, the adjacent two-core contacts Since the bending direction of the probe 13 is the same direction and the adjacent two-core contact probes 13 do not bend in a direction approaching each other, it is possible to avoid the adjacent two-core contact probes 13 from coming into close contact with each other.

Example 4
FIG. 19A is a left side view illustrating the proximal end portion of the two-core contact probe 14 according to the fourth embodiment. FIG. 19B is a front view of the same. FIG. 19C is a right side view thereof.
The two-core contact probe 14 is formed by forming inclined surfaces 5a1, 5a2 and 5b1, 5b2 having the same area in place of the inclined surfaces 5a ′, 5a ″ and 5b ′, 5b ″ having different areas as in the third embodiment. These are the structures similar to the 2-core contact probe 11 of Example 1. FIG.

  According to the two-core contact probe 14 of Example 4 and the manufacturing method thereof, the first electric wire 1c-1 and the second electric wire 1c-2 are integrated without worrying about the orientation, and then the inclined surface 4a of the tip portion is obtained. , 4b and the inclined surfaces 5a1, 5b1, 5a2, 5b2 of the base end portion can be formed, so that it is not necessary to adjust the direction of the two electric wires using a microscope, and the number of manufacturing steps can be reduced. . Further, since the ridge line where the inclined surfaces 5a1 and 5a2 meet and the ridge line where the inclined surfaces 5b1 and 5b2 meet is in line contact with the measuring device side electrodes Ma and Mb, the probability of contact failure due to dust sandwiching is reduced. I can do it.

-Example 5
FIG. 20A is a left side view illustrating the proximal end portion of the two-core contact probe 15 according to the fifth embodiment. FIG. 20B is a front view of the same. FIG. 20C is a right side view thereof.
The two-core contact probe 15 is an embodiment example except that it has at its base end each plane 9a, 9b that is orthogonal to each axis Ax, Bx and has an area less than half of the cross-sectional area of each contact pin 12a, 12b. 4 of the two-core contact probe 14.

  The flat surfaces 9a and 9b are provided by polishing the inclined surfaces 5a1 ', 5b1', 5a2 ', and 5b2' so as to leave the flat surfaces 9a and 9b. Alternatively, the inclined surfaces 5a1, 5b1, 5a2, and 5b2 are polished and provided in the same manner as the two-core contact probe 14 of the fourth embodiment, and then polished by a polishing surface orthogonal to the axes Ax and Bx to obtain the flat surfaces 9a and 9b. Can also be provided.

  According to the two-core contact probe 15 of Example 5 and the manufacturing method thereof, the first electric wire 1c-1 and the second electric wire 1c-2 are integrated without worrying about the orientation, and then the inclined surface 4a of the tip portion is obtained. , 4b and the inclined surfaces 5a1 ′, 5b1 ′, 5a2 ′, 5b2 ′ and the planes 9a, 9b of the base end portion can be formed, so that the operation of adjusting the direction of the two electric wires using a microscope is not required. Manufacturing man-hours can be reduced.

-Example 6
FIG. 21A is a front view illustrating the distal end portion of the two-core contact probe 16 according to the sixth embodiment. FIG. 21B is a side view thereof.
This two-core contact probe 16 removes a predetermined length on the front end side of the coating 3 with, for example, a laser device, leaving the coatings 2a and 2b after the two-core contact probes 11 to 15 of the first to fifth embodiments are formed. A step 8 is provided. The portion of the covering 3 sandwiched between the coverings 2a and 2b remains.

  According to the two-core contact probe 16 and the manufacturing method thereof according to the sixth embodiment, in addition to the effects of the first to fifth embodiments, the step 8 for use in positioning the contact pins 16a and 16b in the axial direction is covered. Since they are provided leaving 2a and 2b, the contact with the positioning member is performed through the coverings 2a and 2b, which is preferable in terms of both slipperiness and insulation.

-Example 7-
FIG. 22 is a front view illustrating the two-core contact probe 16 according to the seventh embodiment.
In this two-core contact probe 17, after forming the two-core contact probe 16 of the sixth embodiment, a notch W for separating the contact pins 17 a and 17 b is formed in the cover 3 only through the coupling portion 6 by, for example, a laser device. It is a configuration. The coupling portion 6 is a portion having a length of, for example, about 5 mm, which is slightly closer to the proximal end than the middle between the distal end and the proximal end.

  According to the two-core contact probe 17 and the manufacturing method of the seventh embodiment, in addition to the effects of the sixth embodiment, the first contact pin 17a and the second contact pin 17b are integrated only at the coupling portion 6. Therefore, the degree of freedom in which the first contact pin 17a and the second contact pin 17b can be bent separately can be increased.

  In addition, it is the same even if it uses the 2-core contact probe 11-15 of Example 1- Example 5 instead of the 2-core contact probe 16 of Example 6. FIG.

-Example 8-
FIG. 23A is a front view showing the two-core contact probe 18 according to the eighth embodiment. FIG. 23B is a side view thereof.
The two-core contact probe 18 is obtained by integrating a first contact pin 18a and a second contact pin 18b in parallel and through a cover 3.
Inclined surfaces 4a and 4b that are inclined and intersect with the axis lines Ax and Bx of the contact pins 18a and 18b are formed at the tips of the contact pins 18a and 18b, respectively, in directions that are closest to the tops. Yes.
At the base end portions of the contact pins 18a and 18b, rotation surfaces 7a and 7b having the axes Ax and Bx of the contact pins 18a and 18b as rotation axes are formed in the same direction.
The cross section of the two-core contact probe 18 is the same as that shown in FIG.

  A method for manufacturing the two-core contact probe 18 will be described with reference to FIGS. 3, 4, and 24 to 27.

First, as shown in FIG. 3, for example, a conducting wire 1a such as a tungsten wire having a diameter of about 110 μm is passed through a straightening device A to form a conducting wire 1b having a predetermined linearity, and this is wound around a roll Ra.
Next, as shown in FIG. 4, the conducting wire 1b is passed through the coating baking apparatus B to form a coated conducting wire 1c having a coating 2 such as a polyester coating having a thickness of about 10 μm, which is wound around a roll Rb.
Next, as shown in FIG. 24, the covered conductor 1 c is passed through the cutting device D to form a predetermined length of electric wire 1 k such as a length of 30 mm, and this is accommodated in the tray Q.
Next, as shown in FIG. 25, the base end portion of the electric wire 1k is processed into a conical surface 7a having the axis Ax as the central axis, thereby forming the electric wire 1m.
Next, as shown in FIG. 26, the joint portion 6 of the two electric wires 1m of the first electric wire 1m-1 and the second electric wire 1m-2 is bonded with an adhesive to form a two-core parallel electric wire 1n. The coupling portion 6 is a portion having a length of, for example, about 5 mm, which is slightly closer to the proximal end than the middle between the distal end and the proximal end.
In addition, in order to distinguish the conical surface of the 2nd electric wire 1m-2 from the conical surface 7a of the 1st electric wire 1m-1, the code | symbol is 7b.

  Next, as shown in FIG. 27, a plurality of two-core parallel wires 1n are parallel to one virtual plane Pe and include the axes Ax and Bx of the first wire 1m-1 and the second wire 1m-2. The first holding tool of the tip end polishing jig E is arranged by aligning the apexes of the conical surfaces 7a and 7b on the virtual straight line Lg orthogonal to the axis lines Ax and Bx so that P is oriented perpendicular to the virtual plane Pe. It is elastically clamped between Ea and the second holder Eb.

  Thereafter, if the same processing as described with reference to FIGS. 9 and 10 is applied to the tip of the two-core parallel wire 1n, the two-core contact probe 18 can be manufactured.

  According to the two-core contact probe 18 and the manufacturing method thereof in Example 8, when the first electric wire 1m-1 and the second electric wire 1m-2 are bonded and integrated, the base end portion is not an inclined surface but a conical surface 7a. 7b, there is no need to adjust the orientation. Therefore, it is possible to reduce the number of manufacturing steps, such as the need for adjusting the direction of the two electric wires using a microscope.

-Example 9-
FIG. 28A is a left side view illustrating the two-core contact probe 19 according to the ninth embodiment. FIG. 28B is a front view thereof. FIG. 28C is a right side view thereof.
The two-core contact probe 19 has the same configuration as that of the two-core contact probe 11 of the first embodiment except that the coating 3 and the coatings 2a and 2b shown in FIG. 2 are left until just before the inclined surfaces 5a and 5b. .

The range for removing the coverings 2a, 2b, 3 is not particularly limited, and a range of several millimeters on the base end side and the tip end side may be removed as shown in FIG. 1, or as shown in FIG. The base end side may leave the coatings 2a, 2b, 3 until just before the inclined surfaces 5a, 5b.
Further, as shown in FIG. 14, when the tips of the coatings 2 a, 2 b, 3 are brought into contact with the stopper portion of the two-core contact probe holder 20, the design is based on the design considering the distance to the inspection target surface L. Then, the tip side portions of the coatings 2a, 2b, 3 may be removed.

  The two-core contact probe, the two-core contact probe unit and the manufacturing method thereof according to the present invention can be used as, for example, a circuit board inspection apparatus.

1e-1j, 1n 2-core parallel wire 2 coating 3 coating (or fusion coating)
4a, 4b inclined surface 5a, 5b inclined surface 5a ', 5b' inclined surface 5a ", 5b" inclined surface 5a1, 5b1, 5a2, 5b2 inclined surface 5a1 ', 5b1', 5a2 ', 5b2' inclined surface 7a, 7b cone Surface 9a, 9b Plane 11-19 Two-core contact probe 11a, 11b Contact pin 12a, 12b Contact pin 13a, 13b Contact pin 15a, 15b Contact pin 16a, 16b Contact pin 17a, 17b Contact pin 18a, 18b Contact pin 20 2-core Contact probe holder 30 2-core contact probe unit Ax, Bx Axis line E Tip polishing jig F Polishing surface G Base edge polishing jig P Plane plane including axes Ax, Bx Pe, Pg Virtual plane

Claims (15)

The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with the surface to be inspected, each axis of each contact pin and Each of the inclined surfaces intersecting at an angle is a two-core contact probe formed in a direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Respective inclined surfaces (5a, 5b) which are inclined and intersect with the respective axis lines (Ax, Bx) of the respective contact pins are formed in the same direction at the respective base end portions on the opposite side to the respective distal end portions. The normals (Na, 5b) of the inclined surfaces (5a, 5b) are orthogonal to the planes (Pa, Pb) perpendicular to the plane (P) including Ax, Bx) and include the axes (Ax, Bx). A two-core contact probe (11) characterized in that Nb) is parallel. The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with the surface to be inspected, each axis of each contact pin and Each of the inclined surfaces intersecting at an angle is a two-core contact probe formed in a direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Each base end portion on the opposite side to each of the tip ends has a plane (9a, 9b) orthogonal to each axis (Ax, Bx) and having an area less than half the cross-sectional area of each contact pin. Inclined surfaces (5a ′, 5b ′) that are inclined and intersect each axis (Ax, Bx) of the pin are formed in the same direction, and are orthogonal to the plane (P) including both axes (Ax, Bx). And the normals (Na, Nb) of the inclined surfaces (5a ′, 5b ′) are parallel to the planes (Pa, Pb) including the axes (Ax, Bx), respectively. Core contact probe (12). The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with the surface to be inspected, each axis of each contact pin and Each of the inclined surfaces intersecting at an angle is a two-core contact probe formed in a direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Inclined surfaces (5a ′, 5b ′) are formed in the same direction at the base end portions opposite to the distal end portions, and are inclined and intersect with the axis lines (Ax, Bx) of the contact pins. Each inclined surface (5a ″, 5b ″) that is inclined and intersects with each axis (Ax, Bx) of each contact pin and has a smaller area than the inclined surface (5a ′, 5b ′) is the inclined surface (5a ′, 5b). ') And the inclined surface on each plane (Pa, Pb) that is orthogonal to the plane (P) including both axes (Ax, Bx) and includes each axis (Ax, Bx). The two-core contact probe (13), wherein the normal lines (Na, Nb) of (5a ', 5b') are parallel.   The two-core contact probe according to any one of claims 1 to 3, wherein the first contact pin and the second contact pin are integrated through a covering and a step (8) is provided in the covering. A two-core contact probe (16).   The two-core contact probe according to any one of claims 1 to 4, wherein the first contact pin and the second contact pin are integrated only through a coupling portion (6) of covering. Contact probe (17).   A plurality of the two-core contact probes according to any one of claims 1 to 5, wherein the inclined surfaces (5a, 5b, 5a ', 5b', 5a ", 5b") are aligned in parallel and parallel to each other. A two-core contact probe unit (30) characterized by being held. The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated and at the tip of each contact pin that comes into contact with the object to be inspected, each axis of each contact pin is inclined. And a two-core contact probe in which the inclined surfaces intersecting with each other are formed in the direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Inclined surfaces (5a1, 5b1) that are inclined and intersect with the axes (Ax, Bx) of the contact pins are formed in the same direction at the base end portions on the opposite side to the tip portions, respectively, and the contacts. The inclined surfaces (5a2, 5b2) having the same area as the inclined surfaces (5a1, 5b1) intersecting the axis (Ax, Bx) of the pin in an inclined direction opposite to the inclined surfaces (5a1, 5b1) The inclined surfaces (5a1, 5b1) are formed on the respective planes (Pa, Pb) perpendicular to the plane (P) including both axes (Ax, Bx) and including the respective axes (Ax, Bx). The two-core contact probe (14), wherein the normal lines (Na, Nb) are parallel. The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated and at the tip of each contact pin that comes into contact with the object to be inspected, each axis of each contact pin is inclined. And a two-core contact probe in which the inclined surfaces intersecting with each other are formed in the direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Each base end portion on the opposite side to each of the tip ends has a plane (9a, 9b) orthogonal to each axis (Ax, Bx) and is inclined with each axis (Ax, Bx) of each contact pin. The intersecting inclined surfaces (5a1 ′, 5b1 ′) are formed in the same direction, and the inclined surfaces (5a2 ′, 5b2 ′) that intersect with the axis (Ax, Bx) of each contact pin are inclined. It is formed on the opposite side to the inclined surfaces (5a1 ′, 5b1 ′) in the opposite direction, is orthogonal to the plane (P) including both axes (Ax, Bx), and includes each axis (Ax, Bx). The two-core contact probe (15), wherein each normal line (Na, Nb) of the inclined surface (5a1 ', 5b1') is parallel to each plane (Pa, Pb).   9. The two-core contact probe according to claim 7, wherein the first contact pin and the second contact pin are integrated through a coating, and a step (8) is provided in the coating. A two-core contact probe (16).   The two-core contact probe according to any one of claims 7 to 9, wherein the first contact pin and the second contact pin are integrated only through a joint portion (6) for covering. Contact probe (17). A two-core parallel electric wire manufacturing process for manufacturing a two-core parallel electric wire (1e) in which a first electric wire and a second electric wire having a predetermined length are integrated in parallel and insulated, and a plurality of two-core parallel electric wires are combined into one virtual plane. A plane (P) including both the first and second axes (Ax, Bx) of the two-core parallel wires parallel to (Pe) and in a direction orthogonal to the virtual plane (Pe). The first electric wires of the plurality of two-core parallel electric wires are arranged side by side and held by the tip polishing jig (E), and the polishing surface (F) intersecting the virtual plane (Pe) and orthogonal to the plane (P). An inclined surface (4a) that is inclined and intersects with the axis of the tip is provided at the tip, and then the tip polishing jig (E) is turned over so that the axis of the second wire of the plurality of two-core parallel wires has its axis. A tip end polishing step for providing an inclined surface (4b) that is inclined and intersects with a plurality of two-core parallel wires A plane (P) parallel to the virtual plane (Pg) and including both the first and second axes (Ax, Bx) of the two-core parallel wires is parallel to the virtual plane (Pg). In addition, the first electric wires of the plurality of two-core parallel electric wires are arranged with the polishing surfaces (F) intersecting with the virtual plane (Pg) held by the base end polishing jigs (G) aligned and aligned. And the inclined surface (5a, 5b, 5a ', 5b', 5a ", 5b", 5a1, 5b1, 5a2, 5b2, 5a1 ', 5b1' which inclines and intersects with the axial line at the base end of each second electric wire , 5a2 ′, 5b2 ′), and a base end polishing step. 12. The method of manufacturing a two-core contact probe according to claim 11 , wherein in the two-core parallel wire manufacturing step, the first electric wire and the second electric wire are integrated through a coating, and a part of the coating is removed. And a step forming step of providing a step (8).   The method of manufacturing a two-core contact probe according to any one of claims 11 and 12, wherein in the two-core parallel wire manufacturing step, the first electric wire and the second electric wire are integrated through a coating, There is a slitting process in which the first electric wire and the second electric wire are integrated with each other only through the coupling portion (6) of the coating by cutting in the middle between the first electric wire and the second electric wire from the distal end side and the proximal end side. A manufacturing method of a two-core contact probe characterized by the above. The first contact pin made of the first electric wire and the second contact pin made of the second electric wire are integrated in parallel and insulated, and at the tip of each contact pin that comes into contact with the surface to be inspected, each axis of each contact pin and Each of the inclined surfaces intersecting at an angle is a two-core contact probe formed in a direction closest to their tops,
The first contact pin and the second contact pin each have a coating;
The first contact pin having the coating and the second contact pin having the coating are configured integrally by providing a coating different from the coating between and around the two,
Each of the base ends on the side opposite to the tip ends is formed on a convex rotary surface (7a, 7b) whose axis of rotation is the axis (Ax, Bx) of each contact pin. Contact probe (18). A first electric wire base end portion processing step for processing a base end portion of the first electric wire having a predetermined length into a convex rotating surface (7a) having an axis of the first electric wire as a rotation axis; and a base of the second electric wire having a predetermined length A second electric wire base end portion processing step for processing the end portion into a convex rotating surface (7b) having the same shape as the base end portion of the first electric wire, and a first electric wire and a second electric wire obtained by processing the base end portion, A two-core parallel wire manufacturing process for manufacturing a two-core parallel wire integrated in parallel and insulated, and a plurality of two-core parallel wires parallel to one virtual plane (Pe) and each of the two-core parallel wires The plane (P) including both the axes (Ax, Bx) of the first electric wire and the second electric wire is arranged so as to be perpendicular to the virtual plane (Pe), and is held by the tip polishing jig (E). At the tip of each first electric wire of the plurality of two-core parallel electric wires by a polishing surface (F) intersecting the virtual plane (Pe) and orthogonal to the plane (P) Its axis the tips of the second wire of said plurality of two-core parallel wires turned over the axis (Ax) and inclined to intersect the inclined surface (4a) and provided then in the tip polishing jig (E) of And a tip portion polishing step for providing an inclined surface (4b) which is inclined and intersects with (Bx).

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