JP2003021658A - Electric characteristic inspection device for electronic part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric inspection measuring device for an electronic part capable of surely bringing measuring terminals into contact with electrodes even in the case of occurrence of a positioning error at the conveyance time, a size error of a chip part, or dispersion of an electrode pitch or the electrode width. SOLUTION: In this electric characteristic inspection device of the electronic part, the electric characteristic is measured by allowing a pair of measuring terminals 15, 15 arranged on a characteristic measuring position B and facing in the electrically insulating state to abut on the electrodes 22, 23 of the electronic part 20 conveyed to the characteristic measuring position B. In the device, the abutting surfaces 15a of each measuring terminal 15 are arranged slantingly so as to be obliquely intersected with long sides Y1 or short sides X1 of the electrodes 22, 23 of the electronic part 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical characteristic inspection device for measuring electrical characteristics by bringing a measuring terminal into contact with an electrode of, for example, a chip type electronic component (hereinafter abbreviated as chip component).

[0002]

2. Description of the Related Art FIG. 15 shows an electric characteristic inspecting apparatus for measuring electric characteristics of chip parts and selecting non-defective ones.
As shown in FIG. 3, a disk-shaped transfer rotor 51 is rotatably arranged on a fixed base 50, and storage recesses 51a for storing chip components 52 are provided in the outer peripheral portion of the transfer rotor 51 at predetermined intervals in the circumferential direction. There is a schematic structure formed.

In this electrical characteristic inspection apparatus, the transfer rotor 5
While rotating 1, the chip parts 52 are sequentially supplied to the respective storage recesses 51a, and the chip parts 52 are conveyed to the characteristic measuring position S. At the characteristic measuring position S, measuring terminals are arranged above and below the fixed table 50 so as to be movable up and down. When the chip component 52 is conveyed to the inspection position S, the measuring terminals move and the electrodes 53, 5 of the chip component 52 move.
4 and the electrical characteristics of the chip part 52 are measured.

As shown in FIG. 11, conventionally, the above-mentioned measuring terminals include a pair of upper and lower strip plate terminals 57, which are arranged so as to face the upper and lower electrodes 53, 53 'of one of the chip parts 52, respectively. , And a pair of upper and lower strip plate terminals 58 arranged so as to face the upper and lower electrodes 54 and 54 ', respectively. And these measuring terminals 57 and 58 are
A structure in which the long side portions 57a and 58a are arranged so as to be parallel to the X-axis direction side (long side portion) 52a of the chip component 52, or as shown in FIG.
Is generally arranged so that the long side portions 57a and 58a are parallel to the Y-axis direction side (short side portion) 52b of the chip component 52.

[0005]

However, in the structure in which the long side portions 57a and 58a of the conventional plate-like terminals 57 and 58 are arranged in parallel with the long side portion 52a of the chip part 52 as shown in FIG. As shown in the drawing, when there is a variation in the dimension W of the short side portion 52b of the chip component 52 or a positional deviation S1 during transportation with respect to the characteristic measurement position S, the measurement terminal 5 on one side is
There is a possibility that 7'and 58 'may come off from the electrodes 53 and 54 or contact failure may occur, and there is a problem that the reliability of the measurement accuracy is low.

When such a positional deviation occurs between the electronic component and the measuring terminal, the measuring terminal may abut along the edge of the measuring surface (upper surface) of the electronic component. In the case of the electronic component in which the electrode is formed so as to cover the edge, there is a problem that the measuring terminal scrapes off a part of the electrode formed on the edge of the electronic component and scratches the electrode.

On the other hand, when adopting the structure in which the long side portions 57a and 58a of the conventional plate-like terminals 57 and 58 are arranged in parallel with the short side portion 52b, as shown in FIG.
When the electrode pitch p and the electrode width w of the electrodes 3, 54 are varied, the measuring terminal 58 ′ may be disengaged from the electrode 54, and similarly to the above, there is a problem that the measurement accuracy is low.

The present invention has been made in view of the above-mentioned conventional circumstances, and the measuring terminal can be reliably used as an electrode even when a positional deviation during transportation, a chip component dimensional error or an electrode pitch or an electrode width variation occurs. It is an object of the present invention to provide an electrical inspection and measurement device for electronic components that can be brought into contact with each other and can improve reliability with respect to measurement accuracy.

[0009]

According to a first aspect of the present invention, a pair of upper and lower measuring terminals having contact surfaces having long sides are arranged opposite to each other at a characteristic measurement position, and the contact surfaces of the respective measuring terminals are In an electrical characteristic inspection device for an electronic component, wherein the electrical characteristic is measured by abutting on an electrode having a long side of the electronic component conveyed to the characteristic measuring position, the measuring terminal is provided with a length of the contact surface. It is characterized in that the side is inclined so that the side obliquely intersects the long side of the electrode of the electronic component.

According to a second aspect of the present invention, in the first aspect, the measuring terminal is inclined in a direction that absorbs a transportation error of the electronic component to a characteristic measurement position and a dimensional error of the electronic component in the transportation direction. It is characterized by that.

According to a third aspect of the present invention, in the first aspect, the measuring terminal is inclined in a direction that absorbs an error in an outer dimension of an electrode and an error in an electrode pitch in a direction orthogonal to a transport direction of the electronic component. It is characterized by being.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the long side of the contact surface of the measuring terminal and the long side of the electrode of the electronic component form 30 to 60 degrees. Is characterized by.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the measurement terminal has two electrically independent contact surfaces and two electrically independent conductive paths. It has a feature.

According to a sixth aspect of the present invention, in the fifth aspect, the two measuring terminals are rods each having a substantially semicircular cross section, and the flat surface portion of the semicircular shape is insulated. To form a substantially cylindrical terminal unit by arranging the flat surfaces so that the flat surfaces face each other, and the terminal unit is axially movable and immovable in the axis-perpendicular direction by a guide hole formed in the guide member. It is characterized by having supported.

According to a seventh aspect of the present invention, in the sixth aspect, the contact surface of each of the measuring terminals with the electrode is formed to have a knife edge shape.

According to an eighth aspect of the present invention, in the sixth or seventh aspect, the two terminal units are attached to one terminal block in two sets, and each of the terminal blocks sandwiches an electronic component at the characteristic measuring position. It is characterized in that it is supported so as to be capable of moving up and down so as to face each other and between a measurement position in contact with the electrode of the electronic component and a standby position.

[0017]

According to the electrical characteristic inspection apparatus of the present invention, the measuring terminal is inclined so that the long side of the contact surface of the measuring terminal intersects the long side of the electrode of the electronic component at an angle. Since it is arranged, even if the electrode is displaced from the characteristic measurement position,
The contact surface of the measurement terminal can be surely brought into contact with the electrode. In particular, in the case of an electronic component in which an electrode is formed so as to cover the edge of the component element described above, it is possible to solve the problem of scraping a part of the electrode and scratching it, and to ensure that the measuring terminal is an electronic component. Can be brought into contact with the measurement surface (upper surface) of
The above problems do not occur. This makes it possible to prevent contact mistakes and improve the reliability of measurement accuracy.

According to the second aspect of the present invention, since the measuring terminal is inclined in a direction that absorbs the transport error of the electronic component and the dimensional error of the electronic component with respect to the characteristic measurement position, the positional deviation during transport and the dimensional error of the electronic component may occur. Even if it occurs, the measurement terminal can be surely brought into contact with the electrode, and the reliability of the measurement accuracy can be improved.

According to the third aspect of the present invention, since the measuring terminal is inclined in a direction that absorbs the error in the outer dimension of the electrode and the error in the electrode pitch, the measuring terminal can be used even when the electrode width or the electrode pitch varies. It is possible to make sure contact with the electrode,
Similar to the above, the reliability of the measurement accuracy can be improved.

According to the fourth aspect of the invention, since the intersecting angle between the long side of the contact surface of the measuring terminal and the long side of the electrode is set to 30 to 60 degrees, the positional deviation during transportation, the dimensional error of the chip component or the electrode. Even when the pitch and the electrode width vary, the measurement terminal can be surely brought into contact with the electrode, and stable measurement accuracy can be obtained.

In the invention of claim 5, since the measuring terminal has two electrically independent contact surfaces and two conductive paths, the measuring terminal is surely brought into contact with the electrode of the electronic component. Can be made. That is, in the case of four-terminal measurement in which two measurement terminals must be surely brought into contact with a pair of electrodes in order to perform accurate measurement, the measurement terminals are slightly misaligned with the electronic components. One of them cannot contact the electrode. INDUSTRIAL APPLICABILITY The present invention is particularly effective for such four-terminal measurement because the measurement terminal can be surely brought into contact with the upper and lower electrode surfaces of the electronic component even if the positional deviation occurs between the measurement terminal and the electronic component. Is.

In a sixth aspect of the present invention, a cylindrical terminal unit is formed by making flat surfaces of measuring terminals having a semicircular cross section face each other in an electrically insulated state, and the terminal unit is formed with a guide hole of a guide member. Since it is supported so as to be movable in the axial direction and immovable in the direction perpendicular to the axis, it is possible to secure the matching accuracy when forming the terminal unit by combining two measuring terminals, and when the electrode area is extremely small. Also, the two measuring terminals can be surely brought into contact with the electrodes, and the measurement accuracy when performing the four-terminal measurement can be further improved.

According to the invention of claim 7, since the electrode contact surface of the measuring terminal has a knife edge shape, it is possible to make good electrical contact with the electrode and to widen the allowable range of electrode displacement. Becomes

According to the invention of claim 8, two terminal units are attached to one terminal block, and the terminal blocks are supported so as to be able to move up and down between the measurement position and the standby position. Therefore, an electronic component having a plurality of electrodes It is possible to secure the positional accuracy between the terminal units in the case of measuring, and to make the entire device compact.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

1 to 8 are views for explaining an electric characteristic inspection apparatus for electronic parts according to an embodiment of the present invention. FIG. 1 is an overall perspective view of the electric characteristic inspection apparatus, and FIG. 2 is an electric characteristic. A schematic perspective view of a characteristic measuring unit of the inspection apparatus, FIG. 3 is an exploded perspective view of a terminal block, FIG. 4 is a perspective view of a terminal unit,
5 is a cross-sectional view of the terminal block, FIG. 6 is a plan view of the measurement terminal, FIG. 7 is a perspective view of the measurement terminal, and FIGS. 8A and 8B are views showing the tip end portion of the measurement terminal.

In FIG. 1, reference numeral 1 denotes an electric characteristic inspection device, which measures and inspects the electric characteristics of the chip parts 20 and automatically and continuously selects non-defective products, and mainly supplies parts. It includes a unit 2, a characteristic measuring unit 3, a measurement display unit 4 and a component collecting unit 5.

The chip component 20 has a structure in which external electrodes 22 and 23 are formed at opposite ends of a rectangular parallelepiped ceramic element 21 in the X-axis direction with the element 21 sandwiched therebetween. The external electrodes 22 and 23 are formed over both ends of the ceramic element 21 in the Y-axis direction and have a rectangular shape. In the chip component 20, the X-axis direction side is the long side portion 20a and the Y-axis direction side is the short side portion 20b.

The component supply unit 2 has a large number of chip components 20.
Is provided with a storage hopper 2a in which is stored, and a supply unit 2b that takes out the chip components 20 in the storage hopper 2a and sequentially supplies them to the characteristic measuring unit 3. The chip components measured and inspected by the characteristic measuring unit 3 are provided. 20 is collected by the component collecting section 5.

In the characteristic measuring unit 3, a gear-shaped carrier rotor 8 is rotatably arranged on the upper surface of a fixed base 7 fixed on a pedestal 6, and the carrier rotor 8 is supplied by a drive motor (not shown) to a component supply position. It is configured to be rotationally driven so as to pass through A, the characteristic measurement position B, the component collection position C, and the like.

A storage recess 8 is formed on the outer peripheral portion of the transfer rotor 8.
a is formed so as to be dented toward the center of rotation, and a predetermined space is provided in the circumferential direction between the storage recesses 8a. The chip component 20 is housed in the housing recess 8a with the X-axis direction side (long side part) 20a thereof oriented in the radial direction and the Y-axis direction side (short side part) 20b thereof oriented in the carrying direction.

A terminal device 10 is arranged at the characteristic measuring position B of the fixed base 7. The terminal device 10 includes box-shaped upper and lower terminal blocks 11, which are arranged so as to face each other with the chip component 20 interposed therebetween at the characteristic measurement position B.
12 and two sets of terminal units 13 arranged in each of the terminal blocks 11 and 12. The upper and lower terminal blocks 11 and 12 have the same structure, and the terminal units 13 and 13 have the same structure.

The upper and lower terminal blocks 11 and 12 are moved up and down between a measurement position where electric characteristics of the chip component 20 are measured by a lift drive mechanism (not shown) and a standby position where the chip component 20 is on standby. Supported as possible. Further, the insertion holes 11a and 12a are formed in the terminal blocks 11 and 12, respectively.
Is formed, and the terminal unit 13 is inserted in each of the insertion holes 11a and 12a so as to be able to move forward and backward.

Each of the terminal units 13 has a structure in which a pair of measuring terminals 15 and 15 are arranged so as to face each other in an electrically insulated state, and in detail, it has the following structure.

Each of the measuring terminals 15 is joined by welding to the corner portion of one main surface of the rectangular parallelepiped terminal member 16.
A supporting rod 17 extending to the opposite side of the measuring terminal 15 is connected and fixed to the other main surface of the terminal member 16, and a coil spring 18 is attached to the supporting rod 17.

The terminal unit 13 is inserted into the insertion hole 12a of the terminal block 12 so that the terminal member 16 can be positioned and moved forward and backward. The coil spring 18 biases the measuring terminal 15 in the protruding direction. Has been done. In addition, each measuring terminal 15 is connected to a measuring device 26 by wiring.
It is connected to the.

A flat plate-shaped guide member 25 is arranged and fixed to the terminal block 12. A guide hole 25a is formed in the guide member 25, and the guide hole 25a
The measuring terminal 15 of the terminal unit 13 is inserted therein so as to be slidable in the axial direction and immovable in the direction perpendicular to the axis.

Each of the measuring terminals 15 is a rod body having a semicircular cross section made of a superhard material having excellent electrical conductivity, and a flat surface 15b passing through the center of the semicircle is coated with an insulating film 15c. ing. An insulating film (not shown) is also coated on the facing surfaces of the terminal members 16, 16.

A knife edge-shaped contact surface 15a is formed on the tip surface of each measuring terminal 15 so as to follow the flat surface 15b by cutting the arc side. The contact surface 15a has a rectangular shape with a width of about 0.05 mm and a length of about 4 mm, and has substantially the same length as the long sides of the external electrodes 22 and 23.

As shown in FIG. 6, each measuring terminal 15 of the terminal unit 13 is inclined so that the contact surface 15a of the measuring terminal 15 diagonally intersects the long side Y1 or the short side X1 of the external electrodes 22, 23. It is arranged. This measuring terminal 1
The inclination angle θ of 5 is in the range of 30 to 60 degrees, and is specifically set to 45 degrees.

In this way, each of the measuring terminals 15 is inclined in such a direction as to absorb a transportation error of the chip component 20 to the characteristic measuring position B and a dimensional error of the chip component 20 in the transportation direction, and It is inclined in a direction that absorbs an error in the outer dimension of the electrode and an error in the electrode pitch in the direction orthogonal to the transport direction of the component 20.

In order to measure the electrical characteristics of the chip component 20 by using the above-mentioned electrical characteristic inspection device 1 and to select non-defective products, the chip component 20 is sequentially placed in each storage recess 8a of the transport rotor 8 at the component supply position A. The chip component 20 is supplied and conveyed to the characteristic measuring position B. Then, the upper terminal block 11 descends, and the lower terminal block 12 rises, so that the contact surfaces 15a of the respective measurement terminals 15 are connected to the external electrodes 22 and 23, respectively.
Abut. Electrical characteristics, inspection, etc. are performed in this state,
After that, it is conveyed to the component collecting position C and collected by the component collecting unit 5.

In this case, in the case where an error in the transportation of the chip component 20 and an error in the external dimensions, or an error in the electrode pitch and the electrode width occur, conventionally, the measuring terminal may come off the electrode to cause a contact error. was there. On the other hand, in the present embodiment, each measurement terminal 15 extends obliquely in the direction that absorbs the conveyance error, the outer dimension error, and the variation of the electrode, and each measurement terminal 15 is securely connected to the external electrodes 22 and 23. Will come into contact.

Here, FIG. 9 schematically shows the positional relationship between the displacement of the external electrode and the measurement terminal with respect to the characteristic measurement position when the inclination angle of the measurement terminal 15 is 45 degrees.
This is because the dimension of the long side 20a of the ceramic element is 1250 ±
50 μm, the short side 20b dimension is 500 ± 50 μm,
Further, this is a case where the electrode width (short side portion) is 350 ± 100 μm (see FIG. 9A). By the way, the tolerance of the element size, electrode size, and electrode pitch of this type of chip component is about ± 50 μm. Further, the allowable range for the error in transportation to the characteristic measurement position is ± 70 μm.

For example, even when the chip component 20 is displaced by about 70 μm from the characteristic measuring position B, the contact surface 15a of the measuring terminal 15 is substantially entirely covered by the external electrodes 22, 23.
(See FIG. 9B). In addition, the chip component 20 exceeds the allowable range at the characteristic measurement position B of 95 μm.
In the case where the contact surface 15a 'of one of the measuring terminals is partly displaced and the width dimension is smaller by 50 μm,
Although it slightly deviates from 2, 23, the electrical contact is surely secured (see FIG. 9C).

On the other hand, the electrode width of the chip component 20 is 250 μ
When the electrode pitch is 100 μm, the contact surface 1 of one of the measuring terminals 15 ′ is small.
Although about half of 5a 'is detached from the electrode 23, electrical contact is surely obtained (see FIG. 9 (d)).

Further, the electrode width of the chip part 20 is 250 μm.
m, the electrode pitch varies by 100 μm, and the width dimension of the chip component 20 is reduced by 50 μm, and the position of the chip component 20 exceeds the allowable range with respect to the characteristic measurement position B by about 95 μm. In the case of the displacement, there is a possibility that the electrode may be detached from the electrode in the past, but in the present embodiment, the contact surface 15 ′ of one of the measuring terminals 15 ′ is.
Although approximately half of the electrodes 22 and 23 are detached, electrical contact is secured (see FIG. 9 (e)).

FIGS. 10 (a) to 10 (e) each schematically show the relationship between the displacement of the external electrode with respect to the characteristic measurement position and the measurement terminal when the inclination angle of the measurement terminal is 30 degrees. It is a figure. Also in this case, the measuring terminal 15 does not come off from the electrodes 22 and 23 as in the above, and electrical contact can be secured.

As described above, according to this embodiment, the contact surface 15a of each measurement terminal 15 of the terminal unit 13 is oblique to the long side Y1 or the short side X1 of the external electrodes 22, 23 of the chip component 20. Since I placed it so that it intersects,
Specifically, the inclination angle θ of the measuring terminal 15 is 30 to 6
Since it is 0 degree, the chip component 2 with respect to the characteristic measurement position B
The transfer error of 0 and the dimensional error of the chip component 20 can be absorbed, and the external dimension error and the electrode pitch error of the external electrodes 22 and 23 can be absorbed. Even when 23 is displaced, the contact surface 15a of the measuring terminal 15 can be securely connected to the external electrode 2
2, 23 can be contacted. This makes it possible to prevent contact mistakes and improve the reliability of measurement accuracy.

In this embodiment, the flat surfaces 15b of the pair of measuring terminals 15 formed in a semicircular cross section are connected to each other by the insulating film 16.
The columnar terminal unit 13 is formed by making it face each other through the guide member 25.
Since it is supported by the guide hole 25a so that it can move in the axial direction and cannot move in the direction perpendicular to the axis, both of them can be used when the two measuring terminals 15 are combined to form the terminal unit 13.
It is possible to secure the alignment accuracy of 5 and 15 and to reliably contact the measurement terminals 15 even when the electrode area is extremely small, so that the measurement accuracy can be further improved.

Since the contact surface 15a of the measuring terminal 15 has a knife edge shape, it is possible to make good electrical contact with the external electrodes 22 and 23 and to widen the allowable range of electrode displacement. Become.

In this embodiment, the two terminal units 13 are
Is attached to one terminal block 11 and 12, and each terminal block 11 and 12 is supported so as to be able to move up and down between the measurement position and the standby position. Therefore, the chip component 20 having a pair of opposing external electrodes 22 and 23 is measured. Terminal unit 1
Positional accuracy between the three can be secured, and the entire device can be made compact.

[Brief description of drawings]

FIG. 1 is an overall perspective view of an electrical characteristic inspection apparatus for electronic components according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view of a characteristic measuring unit of the electrical characteristic inspection apparatus.

FIG. 3 is an exploded perspective view of a terminal block of the electrical characteristic inspection device.

FIG. 4 is a perspective view of a terminal unit arranged in the terminal block.

FIG. 5 is a cross-sectional view of the terminal block.

FIG. 6 is a plan view of a measurement terminal that constitutes the terminal unit.

FIG. 7 is a perspective view of the measuring terminal.

FIG. 8 is a diagram showing a tip portion of the measurement terminal.

FIG. 9 is a diagram showing a contact state when the measuring terminal of the embodiment has an inclination angle of 45 degrees.

FIG. 10 is a diagram showing a contact state when the inclination angle of the measurement terminal of the above embodiment is 30 degrees.

FIG. 11 is a perspective view showing an arrangement structure of a conventional general measuring terminal.

FIG. 12 is a diagram showing a problem of the arrangement structure.

FIG. 13 is a perspective view showing an arrangement structure of a conventional general measuring terminal.

FIG. 14 is a diagram showing a problem of the arrangement structure.

FIG. 15 is a perspective view of a characteristic inspection unit of a general electric characteristic inspection apparatus.

[Explanation of symbols]

1 Electrical characteristics inspection device 11, 12 terminal block 13 terminal unit 15 measuring terminals 15a contact surface 15b flat surface 20 Chip parts (electronic parts) 22, 23 External electrode 25 Guide member 25a guide hole B characteristic measurement position Short side of X1 electrode Long side of Y1 electrode

Continued front page    F-term (reference) 2G003 AA00 AB00 AG03 AG10 AG11                       AG12 AG16 AH05 AH07                 2G011 AA02 AC14 AD01 AE00                 2G036 AA00 BA00 BB00 CA02 CA03                 2G132 AA00 AD01 AE01 AE04 AE22                       AF06 AF07 AF08 AL03 AL11                       AL35

Claims (8)

[Claims] 1. A pair of upper and lower measuring terminals having a contact surface having a long side are arranged opposite to each other at a characteristic measuring position, and the contact surface of each measuring terminal of an electronic component conveyed to the characteristic measuring position. In an electrical characteristic inspection device for an electronic component, the electrical characteristic of which is measured by abutting on an electrode having a long side, wherein the measuring terminal has a long side of the contact surface and a long side of the electrode of the electronic component. An electrical characteristic inspection device for electronic parts, which is arranged so as to be obliquely intersected. 2. The measuring terminal according to claim 1, wherein the measuring terminal is inclined in a direction that absorbs a transportation error of the electronic component to a characteristic measurement position and a dimensional error of the electronic component in the transportation direction. Electrical characteristics inspection device for electronic parts. 3. The measuring terminal according to claim 1, wherein the measuring terminal is inclined in a direction that absorbs an error in an outer dimension of an electrode and an error in an electrode pitch in a direction orthogonal to a transport direction of the electronic component. Electrical component inspection device for electronic components. 4. The electron according to claim 1, wherein the long side of the contact surface of the measuring terminal and the long side of the electrode of the electronic component form 30 to 60 degrees. Electrical property inspection device for parts. 5. The electronic component according to claim 1, wherein the measuring terminal has two electrically independent contact surfaces and two electrically independent conductive paths. Electrical property inspection device. 6. The two measuring terminals as claimed in claim 5, which are rods each having a substantially semicircular cross section and whose flat surface portion has an insulating treatment. Characterized in that a terminal unit having a substantially columnar shape is formed by arranging the terminals facing each other, and the terminal unit is supported by a guide hole formed in a guide member so as to be movable in the axial direction and immovable in the direction orthogonal to the axis. Electrical characteristics inspection device for electronic parts. 7. The electrical characteristic inspection device for an electronic component according to claim 6, wherein the contact surface of each of the measuring terminals with respect to the electrode is formed to have a knife edge shape. 8. The terminal unit according to claim 6 or 7, wherein two sets of the terminal units are attached to one terminal block, and the terminal blocks face each other with the electronic component interposed therebetween at the characteristic measurement position. An electronic characteristic inspection device for an electronic component, which is supported so as to be capable of moving up and down between a measurement position in contact with an electrode of the electronic component and a standby position.