TW202403318A - Probe card - Google Patents

Abstract

A probe card according to various embodiments of the present invention comprises: a probe pin; and a guide part in which the probe pin is disposed. The probe pin may comprise: a body part; a first extension part extending toward one side from one side end of the body part; a first contact part extending in a first direction from one end of the first extension part and including a first probe tip contacting an object to be inspected; a second extension part extending toward the other side from the other side end of the body part; a second contact part extending in a second direction from one end of the second extension part and including a second probe tip contacting a printed circuit board; a third extension part extending toward the one side from the one side end of the body part while spaced apart from the first extension part, and at least partially disposed in the guide part; and a base part extending in the second direction from the body part.

Description

probe card

Various embodiments of the invention relate to a probe card.

A probe card is an interface that electrically connects a tester and the object under test in electrical characteristic testing (EDS: electrical die sorting) used to detect the electrical characteristics of the object under test. The probe card includes probes that are in direct contact with the pads of the object under test (for example, the connection terminal for external signals) to send and receive electrical signals.

In order to detect the electrical characteristics of the object under test, probe cards with slit arrangement and MEMS bonding probe cards are used. In a slit-arrangement probe card, the probes are arranged on a slit guide that can guide the position of the probes. The slit-arranged probe card has the advantage that even if the probe is damaged, the probe can be easily replaced. In the MEMS bonding probe card, the probes manufactured through the MEMS process are fixedly arranged through laser bonding. The MEMS binding method probe card has the advantage of long pressing length of the probe.

technical issues

The probe card with a gap arrangement can be replaced when the probe is damaged, but it has the disadvantage of a short pressing distance of the probe. If the pressing distance of the probe is short, poor contact between the probe and the object to be measured may occur.

The MEMS binding probe card has a long pressing distance and less poor contact between the probe and the object under test. However, when the probe is damaged, it has the disadvantage that it is not easy to repair the probe. For example, when repairing probes in a MEMS bonding probe card, it is necessary to scrape out the solder and align the flatness of the bonded pads, and laser bonding may be required again for probe placement. Determine the process.

Probe cards according to various embodiments of the present invention can provide a probe card with a longer pressing distance and at the same time easy maintenance of the probe.

Technical solution

A probe card according to various embodiments of the present invention includes: a probe electrically connected to a measured object and a printed circuit board; and a guide portion configured with the probe, and the probe includes: a main body portion including a plurality of a main body part opening; a first extension part extending in one direction from one end of the main body part; a first contact part extending in the first direction from one end of the first extension part, including the The first needle tip that is contacted by the measured object; the second extension part is extended from the other end of the main body part in the other side direction; the second contact part is from one end of the second extension part to the third Extending in two directions, including a second needle tip in contact with the printed circuit board; a third extension part, spaced apart from the first extension part, extending in one direction at one end of the main body part, at least part of which The guide part is arranged on the guide part; and the base part extends from the main body part in the second direction. The guide part includes: a first guide located in one side direction of the main body part, including the first guide disposed on the main body part. A first guide groove with three extension parts; and a second guide located in the other side direction of the main body part, including a second guide groove configured with the second extension part, when an external force is applied to the first contact part When the first extension part is elastically bent, the first contact part can move in the first direction or the second direction.

Invention effect

The probe card according to various embodiments of the present invention includes an extension portion of the probe that is not disposed at the guide portion and is elastically bent, so that the pressing distance of the probe can be increased.

The probe card according to various embodiments of the present invention can fix the probe by arranging at least a part of the probe in the guide groove of the guide part, so that when the probe is damaged, it can be easily repaired.

Figure 1a is a perspective view showing a probe card 10 according to the prior art.

Figure 1b is a diagram illustrating the first contact portion 110 of the probe card 10 according to the prior art illustrated in Figure 1a.

Referring to FIG. 1a, the probe card 10 according to the related art may include a probe 100 and a guide part 200.

When describing the probe card 10 according to the related art, the first direction may refer to the positive z-axis direction, and the second direction may refer to the negative z-axis direction. The third direction may refer to the positive x-axis direction, and the fourth direction may refer to the negative x-axis direction.

Referring to FIG. 1 a , the probe 100 according to the related art may include a first contact part 110 and a second contact part 120 . The probe 100 may be in contact with the object under test (for example, a contact pad (not shown) of a display panel (not shown)) at the first contact portion 110 and with the printed circuit board (not shown) at the second contact portion 120 . )get in touch with.

Referring to FIG. 1a, the probe 100 according to the related art may be configured on the guide part 200. The guide 200 may include a guide groove 210 in which the probe 100 may be configured. The guide part 200 may include a plurality of guide grooves 210 . The probe 100 can be arranged in the guide groove 210 of the guide part 200 .

Referring to FIG. 1a, the guide groove 210 of the guide part 200 according to the related art may have a depth of about a first length L1. The probe 100 according to the related art may have a width of about the second length L2. When the probe 100 according to the related art is configured in the guide groove 210, the first contact portion 110 of the probe 100 can move in the second direction (for example: the negative z-axis direction) to remove the second length L2 from the first length L1. The length of the degree.

Referring to FIG. 1 b , when the first contact part 110 of the probe 100 moves in the second direction (for example, the negative z-axis direction), the probe 100 may contact the lower end 230 of the guide groove 210 , so that the probe 100 damaged. According to the probe card 10 according to the related art, in order to prevent the contact between the probe 100 and the groove lower end 230, the separation distance L3 between the probe 100 and the groove lower end 230 can be maintained to be more than a preset distance.

When the first contact part 110 of the probe 100 moves in the second direction (for example, the negative z-axis direction), the guide upper end 220 may directly contact the object (not shown). If the object under test (not shown) is in direct contact with the guide upper end 220, the object under test (not shown) may be damaged, so the first contact part 110 can move in the second direction (for example, the negative z-axis direction). ) does not move beyond the preset distance.

The first tip 111 of the probe 100 may be in repeated contact with the object to be measured (not shown), thereby causing wear. When the first needle tip 111 is worn, the distance the first contact portion 110 can move in the second direction (for example, the negative z-axis direction) may be smaller.

According to the probe card 10 of the related art, the probe 100 is arranged on the guide groove 210, thereby limiting the movable distance of the first contact portion 110 in the second direction (for example, the negative z-axis direction). For example, the first contact part 110 can only move by a distance from the depth of the guide groove 210 (for example, the first length L1 ) minus the width of the probe 100 (for example, the second length L2 ), and the groove lower end 230 and the probe 100 The separation distance (for example: the third length L3) needs to be more than the preset distance. The first contact part 110 can only move to a distance where the guide upper end 220 and the object (not shown) may not be in direct contact. Therefore, It is difficult to form a long movable distance of the first contact portion 110 .

FIG. 2a is a diagram showing the detection block 40 configured to detect the first display panel D1.

FIG. 2b is a diagram showing the detection block 40 configured to detect the second display panel D2.

Referring to FIG. 2a and FIG. 2b , the detection unit 50 may refer to a detection device connected with multiple detection blocks 40 .

The detection block 40 according to various embodiments of the present invention may be used for electrical characteristic detection (EDS: electrical die sorting) of the object under test (not shown). In various embodiments, the object (not shown) that becomes the object for electrical characteristic detection may be the first display panel D1 or the second display panel D2.

The detection block 40 may include a plurality of probe cards 30 (see Figure 3). For example, the detection block 40 may include a plurality of probe cards 30 (refer to FIG. 3 ) and thus a plurality of probes 300 (refer to FIG. 3 ).

Each of the plurality of probes 300 (refer to FIG. 3 ) included in the detection block 40 can be connected to a contact pad (not shown) of the first display panel D1 or the second display panel D2 at one end of the probe 300 (refer to FIG. 3 ). contact, thereby making an electrical connection. Each of the plurality of probes 300 (refer to FIG. 3 ) may contact a printed circuit board (not shown) included in a test device (not shown) at the other end of the probe 300 (refer to FIG. 3 ), thereby being electrically connected.

The first display panel D1 illustrated in Figure 2a may be a display panel used on a large television. The first display panel D1 may include contact pads (not shown) on the edges of the first display panel D1 (eg, one side of the four sides of the first display panel D1 ).

Referring to FIG. 2a , a plurality of detection blocks 40 and detection units 50 connected to the plurality of detection blocks 40 may be respectively configured on the side of the first display panel D1. For example, when the first display panel D1 is formed in a rectangular shape, a plurality of detection blocks 40 and detection units 50 connected to the plurality of detection blocks 40 may be disposed on each side of the four sides of the rectangle.

The second display panel D2 illustrated in FIG. 2b may be a display panel used on a mobile phone or a notebook computer. The second display panel D2 may include a plurality of unit cell panels D21. Each of the plurality of unit cell panels D21 may include a contact pad (not shown). The detection block 40 can be in contact with the contact pad (not shown) of the unit cell panel D21 to be electrically connected.

The position of the second display panel D2 can be moved, and the second display panel D2 can be moved to complete the contact between each unit cell panel D21 and the detection block 40 .

Figure 3 is a diagram illustrating a probe card 30 according to various embodiments of the invention.

When describing the probe card 30 according to various embodiments of the present invention, the first direction may refer to the positive z-axis direction, and the second direction may refer to the negative z-axis direction. The third direction may refer to the positive x-axis direction, and the fourth direction may refer to the negative x-axis direction.

Referring to FIG. 3 , a probe card 30 according to various embodiments of the present invention may include a probe 300 and a guide 400 .

The probe 300 according to various embodiments of the present invention may include a main body portion 310, a first extension portion 320, a first contact portion 330, a second extension portion 340, a second contact portion 350, a third extension portion 360, and/or a base. Department 370.

According to various embodiments, the main body part 310 may be connected to the first extension part 320 and the third extension part 360 on one side (for example, with the main body part 310 as a reference, the side in the negative x-axis direction), and on the other side (for example, the side in the negative x-axis direction) : taking the main body part 310 as a reference, the positive x-axis direction side surface) is connected to the second extension part 340. The main body part 310 may be connected to the base part 370 in the second direction (for example, the negative z-axis direction).

According to various embodiments, the body portion 310 may include a plurality of body portion openings 311 . The main body opening 311 may be formed in a circular or elliptical shape, but is not limited thereto and may have various shapes.

According to various embodiments, the first extension portion 320 may extend from one end of the main body portion 310 to one side. The first extension part 320 may be connected to the first contact part 330 at one end and connected to the main body part 310 at the other end.

The first extension part 320 may include a plurality of elastic openings 321, 322. The plurality of elastic openings 321 and 322 can provide elasticity to the probe 300 so that the first contact portion 330 can move in position. For example, when an external force is applied to the first contact portion 330 of the probe 300, the first extension portion 320 including the plurality of elastic openings 321, 322 is elastically bent, and the position of the first contact portion 330 can be toward the first direction (eg, : positive z-axis direction) or the second direction (for example: negative z-axis direction) movement.

The elastic openings 321 and 322 may include a first elastic opening 321 and a second elastic opening 322 . The second elastic openings 322 may be located at intervals in the second direction (for example, the negative z-axis direction) of the first elastic opening 321 . The first extension 320 may include a plurality of second elastic openings 322 .

The first elastic opening 321 and the second elastic opening 322 may be openings formed in the length direction of the first extension part 320 . The first elastic opening 321 and the second elastic opening 322 may be formed into a shape in which at least a part thereof is curved along the length direction of the first extension part 320 . The width of the second elastic opening 322 (eg, the length in a direction perpendicular to the length direction of the first extension part 320 ) may be formed smaller than the width of the first elastic opening 321 .

According to various embodiments, the first contact portion 330 may be formed at one end of the first extension portion 320 . The first contact portion 330 may include a first needle tip 331 and/or a contact portion opening 332 . The first contact part 330 may be extended in the first direction (positive z-axis direction) from one end of the first extension part 320 .

The probe 300 may be in contact with the object under test (not shown) at the first needle tip 331 to thereby be electrically connected. The first contact part 330 may include a first needle tip 331 capable of contacting the object (not shown). The first needle tip 331 may be located at one end of the first contact portion 330 (eg, one end located in the positive z-axis direction of the first contact portion 330 ). For example, the object under test (not shown) may be a display panel (not shown), and the first needle tip 331 may contact a contact pad (not shown) of the display panel (not shown) to thereby be electrically connected.

The first contact 330 may include a contact opening 332 in at least a portion. The contact opening 332 may be an opening having a length in the first direction (for example, the positive z-axis direction). When the first contact portion 330 moves toward the first direction or the second direction, the contact portion opening 332 can provide elasticity.

According to various embodiments, the second extension portion 340 may extend from the other side end of the main body portion 310 toward the other side direction (for example, the positive x-axis direction). The second extension part 340 may be formed to have a preset length and extend in the longitudinal direction (for example, the positive x-axis direction). The width direction length of the second extension part 340 (eg, the positive z-axis direction length of the second extension part 340 ) may be formed smaller than the length direction length of the second extension part 340 . The width direction length of the second extension part 340 may be formed to gradually become smaller from the second extension part 340 toward the third direction (for example, the positive x-axis direction).

At least a part of the second extension part 340 may be disposed on the guide part 400. The second extension part 340 may be disposed on the second guide 420 of the guide part 400 to fix the position of the probe 300.

The second contact part 350 may be formed at one end of the second extension part 340. For example, the second contact portion 350 may be extended in the second direction (for example, the negative z-axis direction) from one end of the second extension portion 340 .

Referring to FIG. 3 , the second contact portion 350 may include at least a portion of a second needle tip 351 capable of contacting the printed circuit board P. The second needle tip 351 may be located at one end of the second contact portion 350 (for example, at an end of the second contact portion 350 located in the negative z-axis direction). The probe 300 may contact the printed circuit board P at the second tip 351 to thereby be electrically connected.

According to various embodiments, the third extension portion 360 may extend from one end of the main body portion 310 to one side. The third extension part 360 may be formed to have a preset length and extend in the longitudinal direction (for example, the negative x-axis direction). The width direction length of the third extension part 360 (eg, the positive z-axis direction length of the third extension part 360 ) may be formed smaller than the length direction length of the third extension part 360 .

The third extension part 360 may be disposed spaced apart from the first extension part 320 . For example, referring to FIG. 3 , the third extension part 360 may be arranged at intervals in the second direction (for example, the negative z-axis direction) based on the first extension part 320 .

At least a part of the third extension part 360 may be disposed on the guide part 400. At least a part of the third extension part 360 may be disposed in the first guide groove 411 of the first guide 410 . At least a part of the third extension part 360 may be disposed in the first guide groove 411 to fix the position of the probe 300 .

Referring to FIG. 3 , the base portion 370 may extend in the second direction (for example, the negative z-axis direction) of the main body portion 310 . The base portion 370 may extend in the second direction from at least a portion of the main body portion 310 and contact at least a portion of the guide portion 400 . For example, the base portion 370 may be in contact with the support portion 423 of the second guide 420 located in the second direction (for example, the negative z-axis direction) with the base portion 370 as a reference. The base portion 370 of the probe 300 may contact the support portion 423 to support the probe 300 through the support portion 423 . Taking the third direction (for example, the positive x-axis direction) as a reference, the length of the base portion 370 may be formed smaller than the length of the main body portion 310 .

The base portion 370 may include a first base extension portion 371 and a second base extension portion 372 . The first base extension portion 371 may extend from one side of the base portion 370 in one direction (for example, the negative x-axis direction). The second base extension part 372 may extend from the other side of the base part 370 in the other side direction (for example, the positive x-axis direction).

The first base extension part 371 and the second base extension part 372 may have a length in the first direction (for example, the positive z-axis direction). Taking the first direction as a reference, the length of the first base extension part 371 may be formed to be smaller than the length of the second base extension part 372 .

An arc region 374 may be formed at one end of the first base extension part 371 and the second base extension part 372 . The arc region 374 may refer to a portion of the first base extending portion 371 that is curved from the first direction toward the third party and a portion that is curved from the second direction to the third direction. The arc region 374 may refer to a portion of the second base extending portion 372 that is curved from the first direction to the fourth direction and a portion that is curved from the second direction to the fourth direction.

When the probe 300 is disposed on one side of the first guide 410 and the second guide 420, the arc area 374 can make the probe 300 and the first guide 410 and the probe 300 and the second guide 420 gently contact, thereby preventing The probe 300 is damaged.

The first contact portion 330 of the probe 300 according to various embodiments of the present invention can move in a first direction (positive z-axis direction) and a second direction (negative z-axis direction). The first contact portion 330 can move in the first direction to contact the object (not shown) to be electrically connected.

Compared with the first contact portion 110 (refer to FIG. 1 a ) of the probe 100 (refer to FIG. 1 a ) according to the related art, the first contact portion 330 of the probe 300 according to various embodiments of the present invention can be oriented in the first direction and the second direction. Two directions move longer. The probe 100 (refer to FIG. 1 a ) according to the related art is arranged in the guide groove 210 (refer to FIG. 1 a ) of the guide part 200 (refer to FIG. 1 a ), so that the moving distance is limited. In the probe 300 according to various embodiments of the present invention, the first contact part 330 and the first extension part 320 are not in direct contact with the guide part 400 and the moving distance of the first contact part 330 is not limited, and the first contact part 330 is not in direct contact with the first contact part 330 The connected first extension portion 320 can be elastically bent, so the first contact portion 330 can move longer in the first direction and the second direction.

The guide part 400 according to various embodiments of the present invention may function to fix the position of the probe 300. For example, at least a part of the probe 300 may be arranged on the guide part 400 to fix the position of the probe 300 .

The guide part 400 according to various embodiments of the present invention may include a first guide 410, a second guide 420, and/or a support member 430. The first guide 410 and the second guide 420 may be detachable and may be located on one side and the other side of the probe 300 respectively. The first guide 410 may be located in one side direction of the main body part 310 and the base part 370 of the probe 300 (eg, the negative x-axis direction). The second guide 420 may be located in the other side direction of the main body part 310 and the base part 370 of the probe 300 (eg, the positive x-axis direction). The support member 430 may be located in the fourth direction (for example, the negative x-axis direction) with the first guide 410 as a reference.

According to various embodiments, the first guide 410 may include a first guide groove 411 in at least a portion. The first guide groove 411 may be formed at an upper end of the first guide 410 (for example, an end of the first guide 410 located in the positive z-axis direction). The first guide groove 411 may be formed at the upper end of the first guide 410 along the length of the third direction of the first guide 410 (eg, the positive x-axis direction). The height of the first guide groove 411 (for example: the positive z-axis direction length of the first guide groove 411) may be formed to be equal to the height of the third extension part 360 (for example: the positive z-axis direction length of the third extension part 360) Same length. The third extension part 360 of the probe 300 may be disposed in the first guide groove 411 to fix the position of the probe 300.

The first guide 410 may include a first guide fixing portion 412 at least in part. The first guide fixing portion 412 may be formed to have a length and extend in at least a part of one end of the first guide 410 in one direction (for example, the positive x-axis direction with the first guide 410 as a reference). The first guide fixing part 412 may be located in the first direction (for example, the positive z-axis direction) of the first base extension part 371 to fix the position of the probe 300 .

Referring to FIG. 3 , the first guide fixing portion 412 may be in contact with at least a portion of the probe 300 . For example, the first guide fixing part 412 may be in contact with the base part 370 of the probe 300 in the third direction of the first guide fixation part 412, and the first guide fixation part 412 may be in contact with the base part 370 of the probe 300 in the second direction of the first guide fixation part 412. The first base extension 371 of the probe 300 is in contact.

The second guide 420 may include a protruding area 424 in which at least a part of an upper end (for example, an end of the second guide 420 located in the positive z-axis direction) is formed to protrude in the first direction. For example, referring to FIG. 3 , two protruding areas 424 may be formed on the upper end of the second guide 420 .

According to various embodiments, the second guide 420 may include a second guide groove 421 in at least a portion (refer to FIG. 4 ). The second guide groove 421 (refer to FIG. 4 ) may be formed in the protruding area 424 of the second guide 420 .

Referring to FIG. 3 , the height of the second guide groove 421 (refer to FIG. 4 ) (eg, the positive z-axis direction length of the second guide groove 421 (refer to FIG. 4 )) may be formed to be greater than the height of the second extension part 340 (eg, : the length of the second extension part 340 in the positive z-axis direction).

According to various embodiments, the second extension portion 340 of the probe 300 may be configured in the second guide groove 421 (refer to FIG. 4 ) to fix the position of the probe 300 .

The second guide 420 may include a second guide fixing portion 422 at least in part. The second guide fixing portion 422 may be formed to have a length and extend in at least a part of one end of the second guide 420 in one direction (for example, the negative x-axis direction with the second guide 420 as a reference). The second guide fixing part 422 may be located in the first direction of the second base extension part 372 (for example, the positive z-axis direction), thereby serving to fix the position of the probe 300 .

Referring to FIG. 3 , the second guide fixing part 422 may be in contact with at least a portion of the probe 300 . For example, the second guide fixing part 422 may be in contact with the second base extension part 372 of the probe 300 located in the second direction of the second guide fixation part 422.

The second guide 420 may include a support portion 423 in at least a portion. The support portion 423 may extend from the lower end of the second guide 420 (for example, the end of the second guide 420 located in the negative z-axis direction) in the fourth direction (for example, the negative x-axis direction). The base portion 370 of the probe 300 may be disposed on one side of the support portion 423 . The support part 423 may function to support the probe 300 .

The guide part 400 may include a support member 430 that prevents the position of the first guide 410 from moving. The support member 430 may be arranged in the fourth direction (for example, the negative x-axis direction) with the first guide 410 as a reference. When an external force is applied to the probe 300, the force may be transmitted to the first guide 410 through the probe 300. When an external force is applied to the probe 300, the supporting member 430 can support the first guide 410 to prevent the position of the first guide 410 from moving.

Figure 4 is a perspective view illustrating probe card 30 according to various embodiments of the present invention.

When describing the probe card 30 according to various embodiments of the present invention, the first direction may refer to the positive z-axis direction, and the second direction may refer to the negative z-axis direction. The third direction may refer to the positive x-axis direction, and the fourth direction may refer to the negative x-axis direction. The fifth direction may refer to the positive y-axis direction, and the sixth direction may refer to the negative y-axis direction.

Referring to FIG. 4 , a probe card 30 according to various embodiments of the present invention may include a probe 300 and a guide 400 .

Referring to FIG. 4 , the probe 300 may include a body portion 310 , a first extension portion 320 , a first contact portion 330 , a second extension portion 340 , a second contact portion 350 , a third extension portion 360 and/or a base portion 370 .

According to various embodiments, the guide 400 may function to fix the position of the probe 300 . For example, at least a part of the probe 300 may be arranged on the guide part 400 to fix the position of the probe 300 .

Referring to FIG. 4 , the guide part 400 may include a first guide 410 , a second guide 420 and/or a support member 430 . The first guide 410 and the second guide 420 may be detachable and may be located on one side and the other side of the probe 300 respectively. The first guide 410 may be located in one side direction of the main body part 310 and the base part 370 of the probe 300 (eg, the negative x-axis direction). The second guide 420 may be located in the other side direction of the main body part 310 and the base part 370 of the probe 300 (eg, the positive x-axis direction). The support member 430 may be located in the fourth direction (for example, the negative x-axis direction) with the first guide 410 as a reference.

Referring to FIG. 4 , the first guide 410 and the second guide 420 may be formed to have a length and extend in the fifth direction (positive y-axis direction).

According to various embodiments, a plurality of guide grooves 411 may be included at the upper ends of the first guide 410 and the second guide 420 (for example, one end of the first guide 410 and the second guide 420 located in the positive z-axis direction). 421. At least a part of the plurality of probes 300 can be arranged in each of the plurality of guide grooves 411 and 421 to fix the positions of the plurality of probes 300 .

At least part of the plurality of probes 300 can be arranged in each of the plurality of guide grooves 411 and 421. Therefore, the width of each of the plurality of guide grooves 411 and 421 (for example, the positive y-axis direction length of the guide grooves 411 and 421) can be formed It is the same as or larger than the width of the probe 300 (for example, the length of the probe 300 in the positive y-axis direction).

According to various embodiments, probe 300 may include an elastic material. The probe 300 includes an elastic material, so that when an external force is applied to a portion of the probe 300, a portion of the probe 300 can deform and move. For example, when an external force is applied to the first contact portion 330 of the probe 300, the first extension portion 320 can be elastically bent, and the position of the first contact portion 330 is oriented toward the first direction (for example, the positive z-axis direction) or the second direction. Move in two directions (for example: negative z-axis direction).

According to various embodiments, when arranging the probe 300 on the guide part 400 , after arranging the second guide 420 , the probe may be arranged on one side of the second guide 420 (for example, the negative x-axis direction side of the second guide 420 ). Needles 300. To configure the probe 300, the second extension part 340 of the probe 300 may be arranged in the second guide groove 421 of the second guide 420. After the position of the probe 300 is fixed through the second guide 420 , the first guide 410 can be disposed on one side of the probe 300 (for example, the negative x-axis direction side of the probe 300 ). The first guide 410 is configured, and the third extension part 360 of the probe 300 may be configured in the first guide groove 411 of the first guide 410 . After arranging the first guide 410 , the supporting member 430 for supporting the first guide 410 may be arranged in a fourth direction of the first guide 410 (for example, the negative x-axis direction).

The probe card 30 according to various embodiments of the present invention does not fix the probe 300 on the guide part 400 by laser binding, but may configure at least a part of the probe 300 in the guide grooves 411, 421 of the guide part 400. way to fix the probe 300. Since the probe 300 is not fixed by laser binding, when the probe 300 is damaged, the probe 300 can be easily replaced and repaired.

According to various embodiments, the probe 300 may be manufactured through a micro electro mechanical systems (MEMS) process or through an etching process. When the probe 300 is manufactured through the MEMS process, the probe 300 may be manufactured by manufacturing a mold (not shown) having the shape of the probe 300 and then coating the mold (not shown) with a gold plating material. The probe 300 manufactured through the MEMS process may be made of at least one material selected from NiCo, NiP, NiB, NiPd, PdCo, and Pd.

When the probe 300 is manufactured through the etching process, the probe 300 may be manufactured by displaying the shape of the probe 300 on a material (not shown) to be processed, and then removing parts other than the probe 300 . The probe 300 manufactured through the etching process may be made of at least one material selected from BeCu and BNT.

The present invention has been described above with reference to the embodiments. However, the present invention is not necessarily limited thereto, and any modifications and variations may be made within the scope of the technical concept of the present invention.

10: Probe card 100: probe 110:First contact department 111:The first needle point 120:Second Contact Department 200:Guidance Department 210:Guide groove 220: Guide upper end 230: Lower end of groove 30: Probe card 300:Probe 310: Main part 311: Main body opening 320: First extension 321: Elastic opening 322: Elastic opening 330:First contact department 331:The first needle point 332: Contact opening 340:Second extension 350:Second Contact Department 351:Second needle tip 360: The third extension 370:Basal part 371: First base extension 372: Second base extension 374:Arc area 40: Detection block 400:Guidance Department 410:First guide 411: Guide groove 412: First guide fixing part 420:Second Orientation 421:Guide groove 422: Second guide fixing part 423:Support part 424:Protruding area 430:Support parts 50:Detection unit D1: first display panel D2: Second display panel D21: unit cell panel L1: first length L2: second length L3: Keep distance P:Printed circuit board

[Fig. 1a] and [Fig. 1b] are diagrams showing a probe card according to the related art. [Fig. 2a] and [Fig. 2b] are diagrams showing detection blocks arranged for detecting the display panel. [Fig. 3] is a diagram showing a probe card according to various embodiments of the present invention. [Fig. 4] is a perspective view showing a probe card according to various embodiments of the present invention.

30: Probe card

300:Probe

310: Main part

311: Main body opening

320: First extension

321: Elastic opening

322: Elastic opening

330:First contact department

331:The first needle point

332: Contact opening

340:Second extension

350:Second Contact Department

351:Second needle tip

360: The third extension

370:Basal part

371: First base extension

372: Second base extension

374:Arc area

400:Guidance Department

410:First guide

411: Guide groove

412: First guide fixing part

420:Second Orientation

422: Second guide fixing part

423:Support part

424:Protruding area

430:Support parts

P:Printed circuit board

Claims (9)

A probe card including: Probes, electrically connected to the object under test and the printed circuit board; and a guide portion configured with the probe, The probes include: The main body includes a plurality of main body openings; A first extension portion extends from one end of the main body portion in one direction; A first contact part extends in the first direction at one end of the first extension part and includes a first needle tip in contact with the measured object; A second extension part extends from the other side end of the main body part in the other side direction; A second contact portion extends in the second direction at one end of the second extension portion and includes a second needle tip in contact with the printed circuit board; A third extension part is spaced apart from the first extension part, extends in one direction from one end of the main body part, and at least a part thereof is arranged on the guide part; and The base portion extends in the second direction from the main body portion, The guide part includes: A first guide, located in one side direction of the main body, includes a first guide groove configured with the third extension; and The second guide is located in the other side direction of the main body part and includes a second guide groove configured with the second extension part, When an external force is applied to the first contact portion, the first extension portion is elastically bent, and the first contact portion can move in the first direction or the second direction. The probe card of claim 1, wherein the first extension portion includes a plurality of elastic openings that provide elastic force so that the first contact portion can move in position. The probe card as described in claim 2, wherein, The elastic opening includes a first elastic opening and a second elastic opening, The first elastic opening and the second elastic opening extend in the length direction of the first extension part, and are formed by bending at least a part along the length direction of the first extension part, The second elastic opening is arranged in the second direction of the first elastic opening, and the width of the second elastic opening is formed smaller than the width of the first elastic opening. The probe card of claim 1, wherein the base portion includes a first base extension portion extending from one side of the base portion to one side. The probe card according to claim 1, wherein the base portion includes a second base extension portion extending in the other side direction on the other side of the base portion. The probe card according to claim 4, wherein the first guide further includes a first guide fixing part formed on one side of the first guide and located in the first direction of the first base extension part , in contact with the base part and the first base extension part to fix the probe. The probe card according to claim 5, wherein the second guide further includes a second guide fixing part formed on one side of the second guide and located in the first direction of the second base extension part , contacting the second base extension portion to fix the probe. The probe card according to claim 1, wherein the guide part further includes a support member that prevents the position of the first guide from moving. The probe card according to claim 1, wherein the guide portion is formed such that the first guide and the second guide are separable.

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