JP4056983B2 - Probe card - Google Patents

Description

  The present invention relates to a probe card used for measuring electrical characteristics of a measurement object.

  This type of probe card has a basic structure having a support substrate and a probe provided on the support substrate. After the probe is brought into contact with the electrode, it is pressed (overdrive), thereby the probe While ensuring a predetermined contact pressure, there is a technique in which the probe is slid laterally on the surface of the electrode (scrubbing is generated), thereby achieving electrical conduction between the probe and the electrode (Patent Document 1). See).

JP 2002-277485 A

  However, in the probe card, the probe is miniaturized with the recent high integration of measurement objects. When the probe is miniaturized in this way, the rigidity of the probe itself is weakened. For this reason, the needle pressure of the probe decreases, and a predetermined contact pressure necessary for achieving electrical continuity between the probe and the electrode to be measured cannot be secured.

  The present invention was devised in view of the above circumstances, and an object of the present invention is to provide a predetermined necessary in order to achieve electrical continuity between the probe and the electrode to be measured even if the probe is miniaturized. An object of the present invention is to provide a probe card that can ensure a high contact pressure.

In order to solve the above problems, a probe card of the present invention includes a support substrate, a cantilever probe provided on the support substrate and curved in the surface direction of the support substrate, and the support substrate. A probe mounting surface provided with a substantially ¼ arc-shaped reinforcing plate positioned between the probe mounting surface of the support substrate and the support substrate facing surface of the probe; According to the force acting on the top, the top is elastically deformed in a direction approaching the support substrate, and the top of the reinforcing plate is pressed against the probe by the top. It is characterized by elastic deformation in a direction approaching the support substrate .

Another probe card according to the present invention is provided on a support substrate, a cantilever probe provided on the support substrate and curved in the surface direction of the support substrate, and a probe mounting surface of the support substrate. And a substantially ¼ arc-shaped reinforcing plate located between the probe mounting surface of the support substrate and the support substrate facing surface of the probe, and the probe is a semicircle that can be elastically deformed. An arc-shaped probe, one end of which is supported by a support substrate and having a substantially ¼ arc shape, is connected to the other end of the first bending portion, and the first bending portion. And a second curved portion having a substantially arc shape that is slightly shorter than the portion, and the top of the probe at the substantially central position is a contact surface that contacts the electrode to be measured.

  Alternatively, the probe has a substantially ¼ arc shape with one end supported by a support substrate, and the top of the probe is a contact surface in contact with the electrode to be measured.

  In the case of the probe card according to the first aspect of the present invention, when the top portion of the probe is brought into contact with the electrode and then overdrive is performed, the probe is elastically deformed to contact the top portion of the substantially 1/4 arc-shaped reinforcing plate. Touch. Then, the reinforcing plate elastically deforms with the probe while receiving the probe. Thus, the needle pressure of the probe can be increased by elastically deforming the reinforcing plate together with the probe. Therefore, even with a miniaturized probe, it is possible to ensure a predetermined contact pressure necessary for achieving electrical continuity between the probe and the electrode to be measured, and as a result, highly integrated measurement. It becomes possible to sufficiently deal with the subject.

  In the case of the probe card according to claim 2 of the present invention, since the probe has a semicircular arc shape, when the top portion of the probe comes into contact with the electrode and then overdrive is performed, the probe is elastically deformed and becomes a reinforcing plate. In addition to elastically deforming the reinforcing plate together with the probe, the tip of the second curved portion of the probe contacts the substrate. This also increases the needle pressure of the probe, which is advantageous in obtaining the effect of claim 1.

  In the case of the probe card according to claim 3 of the present invention, since the probe has a substantially ¼ arc shape, the same effect as in claim 1 can be obtained.

  Hereinafter, the probe card according to the embodiment of the present invention will be described. 1 is a schematic cross-sectional view of a probe card according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing a use state of the probe card, and FIG. 3 is a schematic cross-section showing an example of a design change of the probe card. FIG.

  A probe card A shown in FIG. 1 is a sensing portion of a measuring device not shown in the figure of a measuring object B, and is held by a prober of the measuring apparatus, and thereby is arranged to face the measuring object B, and this support A plurality of probes 200 formed on the surface of the substrate 100 and a reinforcing plate 300 provided on the support substrate 100 are provided. Hereinafter, each part will be described in detail.

  As the support substrate 100, for example, a silicon substrate having a linear expansion coefficient close to that of the measurement target is used. A wiring pattern (not shown) is formed on the surface of the support substrate 100. Further, external electrodes (not shown) are provided on the edge of the support substrate 100. The external electrode is electrically connected to one end of the first bending portion 210 via a wiring pattern.

  The probe 200 is formed integrally on the surface of the support substrate 100 by applying a resist on the surface of the support substrate 100, forming a pattern on the resist, forming a plating on the pattern, and repeating this. The

  This probe 200 is a semicircular arc-shaped probe, one end of which is supported by the support substrate 100 and is curved toward the surface direction of the support substrate 100. The first curved portion 210 is connected to the other end of the first curved portion 210 and has a quarter arc-shaped second curved portion 220 curved toward the support substrate 100. The second bending portion 220 is set to be slightly shorter than the first bending portion 210, and the tip portion 221 faces the support substrate 100. A protruding contact terminal 230 that contacts the electrode 10 of the measuring object B is provided at the top of the probe 200 at the substantially central position.

  The reinforcing plate 300 is a ¼ arc-shaped member formed on the support substrate 100 in the same process as the probe 200 before the probe 200 is formed, and has higher elasticity than the probe 200 made of, for example, tungsten or nickel. It is comprised with the material which has. The reinforcing plate 300 is located between the opposite surface of the top of the probe 200 that contacts the electrode 10 of the measurement target B and the support substrate 100. The height dimension of the reinforcing plate 300 is high enough not to contact the probe 200. That is, the reinforcing plate 300 has a gap between the probe 200 and the probe 200 that can be elastically deformed.

  The probe card A configured as described above is mounted on the prober of the measuring apparatus as described above, and is used to measure various electrical characteristics of the measuring object B. Hereinafter, the method of use will be described in detail. Note that the tester of the measuring apparatus and the probe card A are electrically connected via the external electrode.

  First, the prober drive device is operated to bring the support substrate 100 and the measurement object B relatively close to each other. Thereby, the contact terminal 230 of the probe 200 and the electrode 10 of the measuring object B are in contact. Thereafter, the support substrate 100 and the measurement target B are brought closer to each other, and the contact terminal 230 is pressed against the electrode 10 of the measurement target B (that is, overdrive is performed).

  At this time, while the probe 200 is elastically deformed, the tip portion 221 of the second curved portion 220 abuts on the surface of the support substrate 100 as shown in FIG. 2, while the opposite surface of the top portion of the probe 200 is the reinforcing plate. It abuts on the top of 300. At this time, the reinforcing plate 300 is elastically deformed together with the probe 200 while receiving the probe 200.

  In the case of such a probe card A, the needle pressure of the probe 200 can be increased by the reinforcing plate 300 that receives the elastically deformed probe 200 and elastically deforms together with the probe 200. Therefore, even if the probe 200 is miniaturized, a predetermined contact pressure between the probe 200 and the electrode 10 of the measurement target B can be ensured, so that the measurement target B that is highly integrated can be handled. It becomes possible.

  The probe 200 is a member that is elastically deformable in the vertical direction provided on the support substrate 100 and is a cantilever having a first curved portion that is curved toward the surface direction of the support substrate 100. Any design modification can be made. For example, as shown in FIG. 3, the probe 200 can be formed in a ¼ arc shape. In this case, the contact terminal 230 is provided on the top of the first bending portion 210.

  Any material can be used for the support substrate 100 as long as it can form the probe 200 as described above, and design deformation is also optional. Although the support substrate 100 is held by the prober here, another substrate may be provided above the support substrate 100 and the substrate may be attached to the prober. The substrate and the support substrate 100 may be connected by screwing, or may be connected via a spring or an elastic resin. When connected via a spring or the like, the needle pressure of the probe 200 can also be increased by the spring or the like.

  The reinforcing plate 300 may be subjected to any design modification as long as it has a substantially ¼ arc shape. Therefore, as long as the above-described function can be realized, the material can be arbitrarily selected. Further, the height of the reinforcing plate 300 is such that it does not contact the probe 200, but may be larger than that. That is, the reinforcing plate 300 may be in contact with the substrate facing surface of the probe 200 without having a gap between the reinforcing plate 300 and the probe 200.

It is a typical sectional view of a probe card concerning an embodiment of the invention. It is typical sectional drawing which shows the use condition of the probe card. It is typical sectional drawing which shows the example of a design change of the probe card.

Explanation of symbols

A Probe card 100 Substrate 200 Probe 210 First curved portion 220 Second curved portion 300 Reinforcing plate B Measurement object 10 Electrode

Claims (3)

A support substrate;
A cantilevered probe which is curved toward the surface direction of the and the supporting board is provided on the supporting substrate,
Wherein provided on the probe arrangement surface of the supporting substrate, and comprises a substantially 1/4 circular arc shape of the reinforcing plate located between the probe arrangement surface of the support substrate and the support substrate facing surface of the probe,
The probe is adapted to be elastically deformed in a direction in which the top approaches the support substrate in accordance with a force acting on the top.
The probe card , wherein the top of the reinforcing plate is elastically deformed in a direction in which the top approaches the support substrate when the top is pressed against the probe. A support substrate;
A cantilever-like probe provided on the support substrate and curved in the surface direction of the support substrate;
Provided on the probe placement surface of the support substrate, and comprises a substantially ¼ arc-shaped reinforcing plate located between the probe placement surface of the support substrate and the support substrate facing surface of the probe;
The probe is a semi-arc-shaped probe that can be elastically deformed , and is connected to the first curved portion having a substantially ¼ arc shape whose one end is supported by the support substrate and the other end of the first curved portion. A second curved portion having a substantially arc shape that is slightly shorter than the first curved portion, and the top of the probe at the substantially central position contacts the electrode to be measured. A probe card characterized by having a contact surface.   2. The probe card according to claim 1, wherein the probe has a substantially ¼ arc shape with one end supported by a support substrate, and a top portion of the probe is a contact surface in contact with an electrode to be measured. And probe card.

Images