JP3908230B2 - probe - Google Patents

Description

  The present invention relates to a probe used for measuring electrical characteristics of a measurement object.

  As a conventional probe card, it has a needle-like probe that comes into contact with the electrode to be measured and a substrate on which the probe is provided, and after making the probe contact the electrode, press (overdrive) it, While this ensures a predetermined contact pressure of the probe, the probe is slid laterally on the surface of the electrode (generates scrub), thereby achieving electrical conduction between the probe and the electrode ( Patent Document 1).

Japanese Patent Laid-Open No. 2001-41978

  By the way, in the probe card, as the measurement object is highly integrated in recent years (the pitch interval between the electrodes is narrowed), it is necessary to make the probe finer and to provide the substrate with a narrow pitch interval.

  However, if the needle-like probe is miniaturized, the scrub length necessary for contact cannot be obtained, and the contact property with the electrode to be measured is deteriorated. That is, since the contact resistance between the probe and the measurement target electrode is high, the conventional probe cannot achieve stable electrical continuity with the measurement target electrode, and corresponds to a highly integrated measurement target. I couldn't do it.

  The present invention was devised in view of the above circumstances, and an object of the present invention is to provide a probe capable of achieving stable electrical conduction with an electrode to be measured even when miniaturized. It is in.

  In order to solve the above problems, a probe of the present invention is a probe formed in a cantilever shape on the surface of a substrate of a probe card, and has a first ¼ arc portion whose one end is supported by the substrate. And a projecting contact terminal capable of contacting the electrode to be measured at a position displaced from the top of the first 1/4 arc portion on the measurement object facing surface of the first 1/4 arc portion. The height dimension of the contact terminal is characterized in that the position of the tip of the contact terminal is higher than the position of the top of the probe.

  The probe is connected to the first ¼ arc portion and the other end of the first ¼ arc portion and is shorter than the first ¼ arc portion. In the case of a substantially semicircular arc-shaped probe having a 1/4 arc portion, the contact terminal is the top of the probe on the measurement object facing surface of the first 1/4 arc portion or the second 1/4 arc portion. It is provided in the position shifted from.

  In the case of the probe according to claim 1 of the present invention, when the tip of the contact terminal of the probe is brought into contact with the electrode to be measured and overdrive is performed in this state, the probe has a substantially 1/4 arc shape. While elastically deforming in the vertical direction, the tip portion thereof moves obliquely toward the probe card substrate. In this process, the angle of the contact terminal with respect to the electrode to be measured becomes smaller than the angle at the time of contact. That is, the contact terminal makes a circular motion with the tip end surface of the contact terminal in contact with the electrode to be measured with the installation location of the first 1/4 arc portion as a fulcrum. By this rotational movement, the tip surface of the contact terminal rubs the electrode to be measured. Thereby, the scrub length of the contact terminal of the probe can be shortened, and the contact resistance between the contact terminal and the electrode can be kept low. Therefore, stable electrical conduction can be achieved between the contact terminal of the probe and the electrode to be measured, and it is possible to sufficiently cope with a highly integrated measurement object.

  In the case of the probe according to claim 2 of the present invention, when the tip of the contact terminal of the probe is brought into contact with the electrode to be measured and overdrive is performed in this state, the probe has an arc shape, so While being deformed, the tip of the second 1/4 arc portion moves obliquely toward the probe card substrate. In this process, the angle of the contact terminal with respect to the electrode to be measured becomes smaller than the angle at the time of contact. That is, the contact terminal moves circularly with the tip end surface of the contact terminal in contact with the electrode to be measured using the installation location of the first 1/4 arc portion or the second 1/4 arc portion as a fulcrum. By this rotational movement, the tip surface of the contact terminal rubs the electrode to be measured. Thereby, the scrub length of the contact terminal of the probe can be shortened, and the contact resistance between the contact terminal and the electrode can be kept low. Therefore, stable electrical continuity between the contact terminal of the probe and the electrode to be measured can be achieved, and it is possible to sufficiently cope with a highly integrated measurement object.

  Hereinafter, a probe card using the probe according to the embodiment of the present invention will be described. FIG. 1 is a schematic cross-sectional view of a probe card using a probe according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing a use state of the probe card, and (a) is a contact terminal of the probe (B) is a diagram when the contact terminal of the probe is pressed against the electrode to be measured, FIG. 3 is a schematic sectional view showing a design variation of the probe card, FIG. 4 is a schematic cross-sectional view showing another design variation of the probe card.

  A probe card A shown in FIG. 1 is a sensing part of a measurement device not shown in the figure of a measurement target B, and is held by a prober of the measurement device and thereby arranged to face the measurement target B, and the substrate 100 And a plurality of probes 200 formed on the surface. Hereinafter, each part will be described in detail.

  As shown in FIGS. 1 and 2, the probe 200 applies a resist on the surface of the substrate 100, forms a pattern on the resist, forms a plating on the pattern, and repeats this to repeat the process of the substrate 100. It is integrally formed on the surface. The pitch interval of the probe 200 is set to the same pitch interval as that of the electrode 10 of the measurement target B, in this case, 25 μm so as to be in contact with the electrode 10 of the measurement target B.

  The probe 200 is a semicircular arc-shaped probe, and is connected to the first quarter arc portion 210 whose one end is supported by the substrate 100 and the other end of the first quarter arc portion 210. And a second quarter arc portion 220 extending toward the substrate 100. The second ¼ arc portion 220 is set slightly shorter than the first ¼ arc portion 210, and the tip 221 faces the substrate 100. A contact terminal 230 capable of contacting the electrode 10 of the measurement target B is provided at the center position of the measurement target facing surface of the second ¼ arc portion 220.

  The contact terminal 230 is a protruding member. The height of the contact terminal 230 is set such that the position of the tip of the contact terminal 230 is higher than the position of the top of the probe 200 and the top of the probe 200 does not contact the measuring object B.

  For the substrate 100, for example, a silicon substrate having a linear expansion coefficient close to that of the measuring object B is used. A wiring pattern (not shown) is formed inside and / or on the surface of the substrate 100. Further, external electrodes (not shown) are provided on the edge of the support substrate 100. The external electrode is electrically connected to one end of the first ¼ arc portion 210 through the wiring pattern.

  The probe card A configured as described above is attached to the prober of the measuring apparatus as described above, and is used to measure various electrical characteristics of the measuring object B. Hereinafter, the method of use will be described in detail. Note that the tester of the measuring apparatus and the probe card A are electrically connected via the external electrode.

  First, the prober drive device is operated to bring the substrate 100 and the measuring object B relatively close to each other. As a result, the contact terminal 230 of the probe 200 comes into contact with the electrode 10 of the measuring object B (see FIG. 2). Thereafter, the substrate 100 and the measurement target B are further brought closer to each other, and the contact terminal 230 is pressed against the electrode 10 of the measurement target B (that is, overdrive is performed).

  Then, the probe 200 is elastically deformed in the vertical direction, and the tip 221 moves obliquely toward the substrate 100. In this process, the angle β of the contact terminal 230 with respect to the electrode 10 of the measuring object B is smaller than the angle α at the time of contact (see FIG. 2). That is, the contact terminal 230 is shown in FIG. 2B in a state where the tip surface of the contact terminal 230 is in contact with the electrode 10 of the measuring object B with the installation location of the second quarter arc portion 220 of the probe 200 as a fulcrum. Circular motion in the direction of the arrow. Due to this rotational movement, the tip surface of the contact terminal 230 rubs the electrode 10 of the measuring object B.

  In the case of such a probe card A, the tip surface of the contact terminal 230 is circularly moved by making good use of the elastic deformation of the arc-shaped probe 200, whereby the tip surface of the contact terminal 230 causes the electrode 10 of the measuring object B to move. It is supposed to rub. Therefore, the scrub length of the contact terminal 230 of the probe 200 can be shortened, and the contact resistance between the contact terminal 230 and the electrode 10 can be kept low. Stable electrical continuity between the contact terminal 230 of the probe 200 and the electrode 10 of the measurement target B can be achieved, and as a result, it is possible to sufficiently cope with the highly integrated measurement target B.

  The probe 200 is a semi-circular probe formed in a cantilever shape on the surface of the substrate 100 of the probe card. However, as shown in FIG. 3, at least one end is supported by the substrate. What is necessary is just to have the 1/4 circular arc part 210. FIG. Therefore, the length dimension of the second 1/4 arc portion 220 may be about half the length of the first 1/4 arc portion 210. The contact terminal 230 is provided at a position shifted from the top of the first 1/4 arc portion 210 of the measurement target facing surface of the first 1/4 arc portion 210. It is also possible to provide it at a position shifted from the top of the second 1/4 arc portion 220 on the measurement object facing surface of the 1/4 arc portion 220 (see FIG. 4). Regarding the height dimension of the contact terminal 230, it is only necessary that the position of the tip of the contact terminal 230 is higher than the position of the top of the probe 200.

  As the substrate 100, any member that can form the probe 200 as described above can be used, and the design can be arbitrarily changed. Further, another substrate may be arranged on the upper side of the substrate 100 so as to be arranged one above the other with a space therebetween. In this case, the substrate 100 and another substrate may be electrically connected by a flexible substrate or the like. It goes without saying that, for example, a sheet-like member can be used instead of the substrate 100.

It is typical sectional drawing of the probe card using the probe which concerns on embodiment of this invention. It is typical sectional drawing which shows the use condition of the probe card, (a) is a figure when the contact terminal of a probe contacts the electrode of a measuring object, (b) is a contact terminal of a probe on the electrode of a measuring object. It is a figure when it is pressed. It is typical sectional drawing which shows the design modification of the probe card. It is a typical sectional view showing another design modification of the probe card.

Explanation of symbols

A Probe card 100 Substrate 200 Probe 210 First 1/4 arc portion 220 Second 1/4 arc portion B Measurement object 10 Electrode

Claims (2)

  In the probe formed in a cantilever shape on the surface of the substrate of the probe card, one end has a first ¼ arc portion supported by the substrate, and the first ¼ arc portion faces the object to be measured. The surface is provided with a protruding contact terminal that can contact the electrode to be measured at a position displaced from the top of the first 1/4 arc portion. The height of the contact terminal is determined by the contact terminal. The probe is characterized in that the position of the tip of the probe is higher than the position of the top of the probe.   2. The probe according to claim 1, wherein the first 1/4 arc portion and the other end of the first 1/4 arc portion are connected to each other and are shorter than the first 1/4 arc portion. A probe having a substantially semicircular arc shape having a second 1/4 arc portion, and the contact terminal is a surface of the measuring object facing surface of the first 1/4 arc portion or the second 1/4 arc portion. A probe provided at a position displaced from the top of the first 1/4 arc portion or the second 1/4 arc portion.

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