WO2023096237A1

WO2023096237A1 - Probe card

Info

Publication number: WO2023096237A1
Application number: PCT/KR2022/017851
Authority: WO
Inventors: 안승배
Original assignee: 주식회사 티에스이
Priority date: 2021-11-24
Filing date: 2022-11-14
Publication date: 2023-06-01
Also published as: KR20230076513A; TW202403318A; KR102614924B1; TWI848449B

Abstract

A probe card according to various embodiments of the present invention comprises: a probe pin; and a guide part in which the probe pin is disposed. The probe pin may comprise: a body part; a first extension part extending toward one side from one side end of the body part; a first contact part extending in a first direction from one end of the first extension part and including a first probe tip contacting an object to be inspected; a second extension part extending toward the other side from the other side end of the body part; a second contact part extending in a second direction from one end of the second extension part and including a second probe tip contacting a printed circuit board; a third extension part extending toward the one side from the one side end of the body part while spaced apart from the first extension part, and at least partially disposed in the guide part; and a base part extending in the second direction from the body part.

Description

probe card

Various embodiments of the present disclosure relate to a probe card.

A probe card is an interface that electrically connects a tester and an object under test in electrical die sorting (EDS) for inspecting electrical characteristics of an object under test. The probe card includes probe pins that directly contact pads (eg, connection terminals for external signals) of the object to be inspected to transmit and receive electrical signals.

A probe card of a slit arrangement method and a probe card of a MEMS bonding method are used to inspect electrical characteristics of a subject. In the probe card of the slit arrangement method, the probe pins are arranged in a slit guide that can guide the location of the probe pins. The slit-arranged probe card has an advantage in that the probe pins can be easily replaced even if the probe pins are damaged. In the probe card of the MEMS bonding method, probe pins manufactured by the MEMS process are fixed by laser bonding and disposed. The probe card of the MEMS bonding method has an advantage in that the pressing distance of the probe pin is long.

The probe card of the slit arrangement method can be replaced when the probe pin is damaged, but has a short pressing distance of the probe pin. If the pressing distance of the probe pin is short, contact failure between the probe pin and the object to be inspected may occur.

The probe card of the MEMS bonding method has a long pressing distance, so there is less contact between the probe pin and the object to be inspected. However, when the probe pin is damaged, it is not easy to repair the pin. For example, when repairing probe pins on a probe card of the MEMS bonding method, a process of scraping off the solder and leveling the pads to which the probe pins are bonded is required, and a laser bonding process is required again to arrange the probe pins. may be needed

The probe card according to various embodiments of the present disclosure may provide a probe card having a long pressing distance and easy repair of probe pins.

A probe card according to various embodiments of the present disclosure includes a probe pin electrically connected to an object under test and a printed circuit board; and a guide portion in which the probe pin is disposed, wherein the probe pin includes a body portion including a plurality of body portion openings; a first extension part extending in one direction from one end of the body part; a first contact portion extending in a first direction from one end of the first extension portion and including a first probe tip contacting the object to be inspected; a second extension portion extending from the other side end of the body portion toward the other side; a second contact portion extending in a second direction from one end of the second extension portion and including a second probe tip contacting the printed circuit board; a third extension part spaced apart from the first extension part and extending in one direction from one end of the body part, at least a part of which is disposed in the guide part; and a base portion extending from the body portion in a second direction, wherein the guide portion is located in one direction of the body portion, and includes a first guide including a first guide groove in which the third extension portion is disposed; and a second guide located on the other side of the body and including a second guide groove in which the second extension is disposed, and when an external force is applied to the first contact portion, the first extension is elastically While being bent, the first contact portion may be movable in a first direction or a second direction.

A probe card according to various embodiments of the present disclosure may include an extension of a probe pin that is elastically bent without being disposed on a guide unit, thereby improving a pressing distance of the probe pin.

In the probe card according to various embodiments of the present disclosure, at least a portion of the probe pins may be disposed in the guide groove of the guide unit to fix the probe pins so that the probe pins can be easily repaired when damaged.

1A and 1B are diagrams illustrating a probe card according to the prior art.

2A and 2B are diagrams illustrating a probe block disposed for inspecting a display panel.

3 is a diagram illustrating a probe card according to various embodiments of the present disclosure.

4 is a perspective view illustrating a probe card according to various embodiments of the present disclosure.

1A is a perspective view showing a probe card 10 according to the prior art.

FIG. 1B is a view showing the first contact portion 110 of the probe card 10 according to the prior art shown in FIG. 1A.

Referring to FIG. 1A , a probe card 10 according to the related art may include a probe pin 100 and a guide part 200 .

In the description of the probe card 10 according to the prior art, the first direction may mean a positive z-axis direction, and the second direction may mean a negative z-axis direction. The third direction may mean a positive x-axis direction, and the fourth direction may mean a negative x-axis direction.

Referring to FIG. 1A , a probe pin 100 according to the prior art may include a first contact portion 110 and a second contact portion 120 . The probe pin 100 is in contact with an object to be inspected (eg, a contact pad (not shown) of a display panel (not shown)) at the first contact part 110, and a printed circuit board (not shown) at the second contact part 120. can come into contact with

Referring to FIG. 1A , a probe pin 100 according to the prior art may be disposed on a guide part 200 . The guide part 200 may include a guide groove 210 in which the probe pin 100 may be disposed. The guide part 200 may include a plurality of guide grooves 210 . The probe pin 100 may be disposed in the guide groove 210 of the guide part 200 .

Referring to Figure 1a, the guide groove 210 of the guide unit 200 according to the prior art may have a depth as much as the first length (L1). The probe pin 100 according to the prior art may have a width equal to the second length L2. When the probe pin 100 according to the prior art is disposed in the guide groove 210, the first contact portion 110 of the probe pin 100 is extended by a length excluding the second length L2 from the first length L1. Movement in a second direction (eg, a negative z-axis direction) may be possible.

Referring to FIG. 1B , when the first contact portion 110 of the probe pin 100 is moved in the second direction (eg, the negative z-axis direction), the probe pin 100 moves to the lower end of the groove of the guide groove 210. Contact with 230 may cause damage to the probe pin 100 . In the probe card 10 according to the prior art, the distance L3 between the probe pin 100 and the lower end of the groove 230 is greater than or equal to a predetermined distance in order to prevent contact between the probe pin 100 and the lower end of the groove 230. can be maintained as much as possible.

When the first contact portion 110 of the probe pin 100 is moved in a second direction (eg, a negative z-axis direction), the guide upper end 220 may directly contact an object to be inspected (not shown). Since damage may occur to the inspected object (not shown) when the inspected object (not shown) directly contacts the guide upper end 220, the first contact part 110 is preliminarily in the second direction (eg, negative z-axis direction). It may not move more than a certain distance.

The first probe tip 111 of the probe pin 100 may be worn due to repeated contact with an object to be inspected (not shown). When the first probe tip 111 is worn, the distance that the first contact portion 110 can move in the second direction (eg, the negative z-axis direction) may be reduced.

In the probe card 10 according to the prior art, the probe pin 100 is disposed in the guide groove 210 so that the movable distance of the first contact part 110 in the second direction (eg, in the negative z-axis direction) is limited. For example, the depth of the guide groove 210 (eg, the first length L1) minus the width of the probe pin 100 (eg, the second length L2) of the first contact portion 110. It is movable, and the distance between the lower part of the groove 230 and the probe pin 100 (eg, the third length L3) must be greater than or equal to a predetermined distance, and the upper part of the guide 220 and the subject (not shown) Since the first contact portion 110 can move only by a distance that cannot be directly contacted, it is difficult to form a long movable distance of the first contact portion 110 .

FIG. 2A is a diagram illustrating the probe block 40 disposed to inspect the first display panel D1.

2B is a diagram illustrating the probe block 40 disposed to inspect the second display panel D2.

Referring to FIGS. 2A and 2B , a probe unit 50 may mean a probe device to which a plurality of probe blocks 40 are connected.

The probe block 40 according to various embodiments of the present disclosure may be used for electrical die sorting (EDS) of an object under test (not shown). In various embodiments, objects to be inspected (not shown) to be tested for electrical characteristics may be the display panels D1 and D2.

The probe block 40 may include a plurality of probe cards 30 (see FIG. 3 ). For example, the probe block 40 may include a plurality of probe pins 300 (see FIG. 3 ) including a plurality of probe cards 30 (see FIG. 3 ).

Each of the plurality of probe pins 300 (see FIG. 3) included in the probe block 40 contacts the first display panel D1 or the second display panel D2 at one end of the probe pin 300 (see FIG. 3). It may be electrically connected by being in contact with a pad (not shown). Each of the plurality of probe pins 300 (see FIG. 3 ) may contact and electrically connect to a printed circuit board (not shown) included in a test equipment (not shown) at the other end of the probe pins 300 (see FIG. 3 ).

The first display panel D1 shown in FIG. 2A may be a display panel used in a large-sized television. The first display panel D1 may include a contact pad (not shown) at an edge of the first display panel D1 (eg, one side of four sides of the first display panel D1).

Referring to FIG. 2A , a plurality of probe blocks 40 and a probe unit 50 connected to the plurality of probe blocks 40 may be disposed on a side surface of the first display panel D1 , respectively. For example, when the first display panel D1 is formed in a rectangular shape, a plurality of probe blocks 40 and a plurality of probe blocks 40 are connected to one side of each of the four sides of the rectangle, respectively. ) can be placed.

The second display panel D2 shown in FIG. 2B may be a display panel used in a mobile phone or a laptop computer. The second display panel D2 may include a plurality of unit cell panels D21. Each of the plurality of unit cell panels D21 may include a contact pad (not shown). The probe block 40 may contact and electrically connect to a contact pad (not shown) of the unit cell panel D21.

The position of the second display panel D2 may be moved, and as the second display panel D2 is moved, contact between each unit cell panel D21 and the probe block 40 may be made.

3 is a diagram illustrating a probe card 30 according to various embodiments of the present disclosure.

In describing the probe card 30 according to various embodiments of the present disclosure, a first direction may mean a positive z-axis direction, and a second direction may mean a negative z-axis direction. The third direction may mean a positive x-axis direction, and the fourth direction may mean a negative x-axis direction.

Referring to FIG. 3 , a probe card 30 according to various embodiments of the present disclosure may include a probe pin 300 and a guide part 400 .

The probe pin 300 according to various embodiments of the present disclosure includes a body portion 310, a first extension portion 320, a first contact portion 330, a second extension portion 340, a second contact portion 350, A third extension part 360 and/or a base part 370 may be included.

According to various embodiments, the body portion 310 is connected to the first extension portion 320 and the third extension portion 360 at one side (eg, the side in the negative x-axis direction relative to the body portion 310), , It may be connected to the second extension part 340 on the other side (eg, the positive x-axis direction side with respect to the body part 310). The body portion 310 may be connected to the base portion 370 in a second direction (eg, a negative z-axis direction).

According to various embodiments, the body portion 310 may include a plurality of body portion openings 311 . The body opening 311 may be formed in a circular or elliptical shape, but is not limited thereto and may have various shapes.

According to various embodiments, the first extension part 320 may be formed to extend from one end of the body part 310 in one direction. The first extension part 320 may be connected to the first contact part 330 at one end and connected to the body part 310 at the other end.

The first extension part 320 may include a plurality of

elastic openings

321 and 322 . The plurality of

elastic openings

321 and 322 may serve to provide elasticity to the probe pin 300 so that the position of the first contact portion 330 can be moved. For example, when an external force is applied to the first contact portion 330 of the probe pin 300, the first extension portion 320 including the plurality of

elastic openings

321 and 322 is elastically bent and the first extension portion 320 is elastically bent. The location of the contact portion 330 may be moved in a first direction (eg, a positive z-axis direction) or a second direction (eg, a negative z-axis direction).

The

elastic openings

321 and 322 may include a first elastic opening 321 and a second elastic opening 322 . The second elastic opening 322 may be spaced apart from the first elastic opening 321 in a second direction (eg, a negative z-axis direction). The first extension part 320 may include a plurality of second elastic openings 322 .

The first elastic opening 321 and the second elastic opening 322 may be openings formed in the longitudinal direction of the first extension part 320 . At least a portion of the first elastic opening 321 and the second elastic opening 322 may be formed in a curved shape in the longitudinal direction of the first extension part 320 . The width of the second elastic opening 322 (eg, a length in a direction perpendicular to the longitudinal direction of the first extension part 320) may be smaller than the width of the first elastic opening 321.

According to various embodiments, the first contact portion 330 may be formed at one end of the first extension portion 320 . The first contact portion 330 may include a first probe tip 331 and/or a contact portion opening 332 . The first contact portion 330 may be formed to extend from one end of the first extension portion 320 in a first direction (in a positive z-axis direction).

The probe pin 300 may be electrically connected to the first probe tip 331 by contacting the object to be inspected (not shown). The first contact part 330 may include a first probe tip 331 capable of contacting an object to be inspected (not shown). The first probe tip 331 may be positioned at one end of the contact portion 330 (eg, one end located in the positive z-axis direction of the contact portion 330). For example, the object to be inspected (not shown) may be a display panel (not shown), and the first probe tip 331 may contact and electrically connect to a contact pad (not shown) of the display panel (not shown). .

At least a portion of the first contact portion 330 may include a contact portion opening 332 . The contact opening 332 may be an opening having a length in a first direction (eg, a positive z-axis direction). The opening 332 of the contact portion may serve to provide elasticity when the position of the first contact portion 330 is moved in the first direction or the second direction.

According to various embodiments, the second extension part 340 may be formed to extend from the other end of the body part 310 in the other direction (eg, in the positive x-axis direction). The second extension part 340 may be formed in a form extending with a predetermined length in a longitudinal direction (eg, a positive x-axis direction). The length of the second extension 340 in the width direction (eg, the length of the second extension 340 in the positive z-axis direction) may be smaller than the length of the second extension 340 in the longitudinal direction. The length of the second extension part 340 in the width direction may be smaller as it goes from the second extension part 340 in the third direction (eg, the positive x-axis direction).

At least a part of the second extension part 340 may be disposed on the guide part 400 . The second extension part 340 is disposed on the second guide 420 of the guide part 400, and the position of the probe pin 300 may be fixed.

The second contact portion 350 may be formed at one end of the second extension portion 340 . For example, the second contact portion 350 may be formed extending from one end of the second extension portion 340 in the second direction (eg, a negative z-axis direction).

Referring to FIG. 3 , the second contact portion 350 may include a second probe tip 351 capable of contacting the printed circuit board P at least in part. The second probe tip 351 may be positioned at one end of the second contact portion 350 (eg, one end located in the negative z-axis direction of the second contact portion 350). The probe pin 300 may contact and electrically connect the printed circuit board P at the second probe tip 351 .

According to various embodiments, the third extension part 360 may be formed to extend from one end of the body part 310 in one direction. The third extension part 360 may be formed to extend with a predetermined length in a longitudinal direction (eg, a negative x-axis direction). The length of the third extension 360 in the width direction (eg, the length of the third extension 360 in the positive z-axis direction) may be smaller than the length of the third extension 360 in the longitudinal direction.

The third extension 360 may be spaced apart from the first extension 320 . For example, referring to FIG. 3 , the third extension part 360 may be spaced apart from the first extension part 320 in a second direction (eg, a negative z-axis direction).

At least a part of the third extension part 360 may be disposed on the guide part 400 . For example, at least a portion of the third extension 360 may be disposed in the first guide groove 411 of the first guide 410 . At least a portion of the third extension 360 may be disposed in the first guide groove 411 so that the position of the probe pin 300 may be fixed.

Referring to FIG. 3 , the base portion 370 may extend in a second direction (eg, a negative z-axis direction) of the body portion 310 and may be formed. The base portion 370 extends from at least a portion of the body portion 310 in the second direction and may contact at least a portion of the guide portion 400 . For example, the base part 370 may contact the support part 423 of the second guide part 420 located in the second direction (eg, the negative z-axis direction) with respect to the base part 370 . The base portion 370 of the probe pin 300 may contact the support portion 423 so that the probe pin 300 may be supported by the support portion 423 . Based on the third direction (eg, the positive x-axis direction), the length of the base portion 370 may be smaller than that of the body portion 310 .

The base part 370 may include a first base extension part 371 and a second base extension part 372 . The first base extension part 371 may be formed to extend from one side of the base part 370 in one direction (eg, a negative x-axis direction). The second base extension part 372 may be formed extending from the other side of the base part 370 in the other direction (eg, in the positive x-axis direction).

The first base extension part 371 and the second base extension part 372 may have lengths in a first direction (eg, a positive z-axis direction). Based on the first direction, the length of the first base extension part 371 may be smaller than the length of the second base extension part 372 .

A round region 374 may be formed at one end of the first base extension part 371 and the second base extension part 372 . The round area 374 may refer to a curved portion of the first base extension 371 from the first direction to the third direction and a curved portion from the second direction to the third direction. The round area 374 may refer to a curved portion of the second base extension 372 from the first direction to the fourth direction and a curved portion from the second direction to the fourth direction.

When the probe pin 300 is disposed on one side of the first guide 410 and the second guide 420, the round region 374 is formed by the probe pin 300, the first guide 410, and the probe pin 300. It may serve to prevent damage to the probe pin 300 by allowing the second guide 420 to come into gentle contact with each other.

The first contact portion 330 of the probe pin 300 according to various embodiments of the present disclosure may be movable in a first direction (positive z-axis direction) and a second direction (negative z-axis direction). The first contact portion 330 may be moved in a first direction to contact and electrically connect to an object to be inspected (not shown).

The first contact portion 330 of the probe pin 300 according to various embodiments of the present disclosure has a first direction compared to the first contact portion 110 (see FIG. 1A) of the prior art probe pin 100 (see FIG. 1A). And it can be moved longer in the second direction. The probe pin (100, see FIG. 1a) according to the prior art is disposed in the guide groove (210, see FIG. 1a) of the guide part (200, see FIG. 1a) to limit its movement distance. In the probe pin 300 according to various embodiments of the present disclosure, since the first contact portion 330 and the first extension portion 320 are not directly disposed on the guide portion 400, the movement distance of the first contact portion 330 is reduced. It is not limited, and since the first extension part 320 connected to the first contact part 330 can be elastically bent, the first contact part 330 can move longer in the first and second directions.

The guide part 400 according to various embodiments of the present disclosure may serve to fix the position of the probe pin 300 . For example, at least a portion of the probe pin 300 may be disposed in the guide unit 400 so that the position of the probe pin 300 may be fixed.

The guide unit 400 according to various embodiments of the present disclosure may include a first guide 410 , a second guide 420 and/or a support member 430 . The first guide 410 and the second guide 420 may be formed to be separable, and may be located on one side and the other side of the probe pin 300, respectively. The first guide 410 may be positioned in one direction (eg, a negative x-axis direction) of the body portion 310 and the base portion 370 of the probe pin 300 . The second guide 420 may be positioned in the other direction (eg, in the positive x-axis direction) of the body portion 310 and the base portion 370 of the probe pin 300 . The support member 430 may be positioned in a fourth direction (eg, a negative x-axis direction) with respect to the first guide 410 .

According to various embodiments, the first guide 410 may include a first guide groove 411 at least in part. The first guide groove 411 may be formed at an upper end of the first guide 410 (eg, one end of the first guide 410 located in the positive z-axis direction). The first guide groove 411 may be formed from an upper end of the first guide 410 along a length of the first guide 410 in a third direction (eg, a positive x-axis direction). The height of the first guide groove 411 (eg, the positive length of the first guide groove 411 in the z-axis direction) is the height of the third extension 360 (eg, the positive length of the third extension 360). length in the z-axis direction). The third extension part 360 of the probe pin 300 is disposed in the first guide groove 411 and the position of the probe pin 300 may be fixed.

The first guide 410 may include a first guide fixing part 412 at least in part. The first guide fixing part 412 has a length extending from at least a portion of one end of the first guide 410 in one direction (eg, the positive x-axis direction relative to the first guide 410). can be formed The first guide fixing part 412 may serve to fix the position of the probe pin 300 by being positioned in the first direction (eg, the positive z-axis direction) of the first base extension part 371 .

Referring to FIG. 3 , the first guide fixing part 412 may contact at least a portion of the probe pin 300 . For example, the first guide fixing part 412 may contact the base part 370 of the probe pin 300 located in the third direction of the first guide fixing part 412, and the first guide fixing part ( 412 may contact the first base extension part 371 of the probe pin 300 located in the second direction of the first guide fixing part 412 .

The second guide 420 may include a protrusion area 424 formed so that at least a portion of the upper end (eg, one end of the second guide 420 in the positive z-axis direction) protrudes in the first direction. there is. For example, referring to FIG. 3 , two protruding regions 424 may be formed at the upper end of the second guide 420 .

According to various embodiments, the second guide 420 may include a second guide groove 421 (see FIG. 4 ) at least in part. The second guide groove 421 (see FIG. 4 ) may be formed in the protruding area 424 of the second guide 420 .

Referring to FIG. 3 , the height of the second guide groove 421 (see FIG. 4 ) (eg, the length of the second guide groove 421 (see FIG. 4 ) in the positive z-axis direction) of the second extension 340 It may be formed longer than the height (eg, the length of the second extension part 340 in the positive z-axis direction).

According to various embodiments, the second extension 340 of the probe pin 300 may be disposed in the second guide groove 421 (see FIG. 4 ) and the position of the probe pin 300 may be fixed.

The second guide 420 may include a second guide fixing part 422 at least in part. The second guide fixing part 422 has a length extending from at least a portion of one end of the second guide 420 in one direction (eg, in the negative x-axis direction relative to the second guide 420). can be formed The second guide fixing part 422 may serve to fix the position of the probe pin 300 by being positioned in the first direction (eg, the positive z-axis direction) of the second base extension part 372 .

Referring to FIG. 3 , the second guide fixing part 422 may contact at least a portion of the probe pin 300 . For example, the second guide fixing part 422 may contact the second base extension part 372 of the probe pin 300 located in the second direction of the second guide fixing part 422 .

The second guide 420 may include a support part 423 at least in part. The support portion 423 extends from the lower end of the second guide 420 (eg, one end of the second guide 420 in the negative z-axis direction) to the fourth direction (eg, the negative x-axis direction). It can be. The base part 370 of the probe pin 300 may be disposed on one surface of the support part 423 . The support part 423 may serve to support the probe pin 300 .

The guide unit 400 may include a support member 430 that prevents the first guide 410 from moving. The support member 430 may be disposed in a fourth direction (eg, a negative x-axis direction) with respect to the first guide 410 . When an external force is applied to the probe pin 300 , the force may be transmitted to the first guide 410 through the probe pin 300 . When an external force is applied to the probe pin 300, the support member 430 may support the first guide 410 and prevent the first guide 410 from moving.

4 is a perspective view illustrating a probe card 30 according to various embodiments of the present disclosure.

In describing the probe card 30 according to various embodiments of the present disclosure, a first direction may mean a positive z-axis direction, and a second direction may mean a negative z-axis direction. The third direction may mean a positive x-axis direction, and the fourth direction may mean a negative x-axis direction. The fifth direction may mean a positive y-axis direction, and the sixth direction may mean a negative y-axis direction.

Referring to FIG. 4 , a probe card 30 according to various embodiments of the present disclosure may include a probe pin 300 and a guide part 400 .

Referring to FIG. 4 , the probe pin 300 includes a body part 310, a first extension part 320, a first contact part 330, a second extension part 340, a second contact part 350, and a third An extension portion 360 and/or a base portion 370 may be included.

According to various embodiments, the guide part 400 may serve to fix the position of the probe pin 300 . For example, at least a portion of the probe pin 300 may be disposed in the guide unit 400 so that the position of the probe pin 300 may be fixed.

Referring to FIG. 4 , the guide unit 400 may include a first guide 410 , a second guide 420 and/or a support member 430 . The first guide 410 and the second guide 420 may be formed to be separable, and may be located on one side and the other side of the probe pin 300, respectively. The first guide 410 may be positioned in one direction (eg, a negative x-axis direction) of the body portion 310 and the base portion 370 of the probe pin 300 . The second guide 420 may be positioned in the other direction (eg, in the positive x-axis direction) of the body portion 310 and the base portion 370 of the probe pin 300 . The support member 430 may be positioned in a fourth direction (eg, a negative x-axis direction) with respect to the first guide 410 .

Referring to FIG. 4 , the first guide 410 and the second guide 420 may be formed to have a length and extend in a fifth direction (positive y-axis direction).

According to various embodiments, a plurality of upper ends of the first guide 410 and the second guide 420 (eg, one end of the first guide 410 and the second guide 420 located in the positive z-axis direction) Two

guide grooves

411 and 421 may be included. At least a portion of the plurality of probe pins 300 may be disposed in the plurality of

guide grooves

411 and 421, respectively, so that the positions of the plurality of probe pins 300 may be fixed.

Since at least a portion of the plurality of probe pins 300 may be disposed in the plurality of

guide grooves

411 and 421, respectively, the width of each of the plurality of guide grooves 411 and 421 (eg, the width of the guide grooves 411 and 421) The length in the positive y-axis direction) may be equal to or longer than the width of the probe pin 300 (eg, the length of the probe pin 300 in the positive y-axis direction).

According to various embodiments, the probe pin 300 may include an elastic material. Since the probe pin 300 includes an elastic material, when an external force is applied to a portion of the probe pin 300, the portion of the probe pin 300 may be deformed and moved. For example, when an external force is applied to the first contact portion 330 of the probe pin 300, the first extension portion 320 is elastically bent and the position of the first contact portion 330 moves in the first direction (eg : It may move in a positive z-axis direction) or in a second direction (eg, a negative z-axis direction).

According to various embodiments, when the probe pin 300 is disposed on the guide unit 400, one side of the second guide 420 (eg, the second guide 420) after the second guide 420 is disposed. The probe pin 300 may be disposed on a negative x-axis direction side). The probe pin 300 is disposed and the second extension 340 of the probe pin 300 may be disposed in the second guide groove 421 of the second guide 420 . After the position of the probe pin 300 is fixed by the second guide 420, a first guide 410 is placed on one side of the probe pin 300 (eg, the side of the probe pin 300 in the negative x-axis direction). can be placed. The first guide 410 is disposed and the third extension 360 of the probe pin 300 may be disposed in the first guide groove 411 of the first guide 410 . After the first guide 410 is disposed, a support member 430 for supporting the first guide 410 may be disposed in a fourth direction (eg, a negative x-axis direction) of the first guide 410 . .

In the probe card 30 according to various embodiments of the present disclosure, the probe pins 300 are not fixed to the guide unit 400 by laser bonding, but at least a portion of the probe pins 300 are attached to the guide unit 400. The probe pin 300 may be fixed in such a manner as to be disposed in the

guide grooves

411 and 421 . Since the probe pin 300 is not fixed by a laser bonding method, replacement and repair of the probe pin 300 may be facilitated when damage occurs to the probe pin 300 .

According to various embodiments, the probe pin 300 may be manufactured by a micro electro mechanical systems (MEMS) process or by an etching process. When the probe pin 300 is manufactured by the MEMS process, a mold (not shown) having the shape of the probe pin 300 is manufactured and then the mold (not shown) is plated with a plating material to form the probe pin 300. this can be produced. The material of the probe pin 300 manufactured by the MEMS process may be made of at least one of NiCo, NiP, NiB, NiPd, PdCo, and Pd.

When the probe pin 300 is manufactured by an etching process, after marking the shape of the probe pin 300 on a material to be processed (not shown), parts other than the probe pin 300 are removed. (300) can be made. The material of the probe pin 300 manufactured by the etching process may be made of at least one of BeCu and BNT.

Although the above examples have been described with respect to the present disclosure, it is not necessarily limited thereto, and any number of modifications and variations are possible within the scope of the technical idea of the present disclosure.

Claims

In the probe card,

Probe pin electrically connected to the test subject and the printed circuit board; and

Including; a guide portion in which the probe pin is disposed,

The probe pin is

a body portion including a plurality of body portion openings;

a first extension part extending in one direction from one end of the body part;

a first contact portion extending in a first direction from one end of the first extension portion and including a first probe tip contacting the object to be inspected;

a second extension portion extending from the other side end of the body portion toward the other side;

a second contact portion extending in a second direction from one end of the second extension portion and including a second probe tip contacting the printed circuit board;

a third extension part spaced apart from the first extension part and extending in one direction from one end of the body part, at least a part of which is disposed in the guide part; and

Includes; a base portion extending in a second direction from the body portion;

the guide part

a first guide located in one direction of the body portion and including a first guide groove in which the third extension portion is disposed; and

A second guide located on the other side of the body and including a second guide groove in which the second extension is disposed,

When an external force is applied to the first contact portion, the first extension portion is elastically bent and the first contact portion is movable in a first direction or a second direction.
According to claim 1,

The first extension part

A probe card comprising a plurality of elastic openings providing elastic force to enable position movement of the first contact unit.
According to claim 2,

The elastic opening is

a first elastic opening and a second elastic opening;

The first elastic opening and the second elastic opening

It extends in the longitudinal direction of the first extension, and is formed to be curved in the longitudinal direction of the first extension in at least a part,

The second elastic opening is

A probe card disposed in a second direction of the first elastic opening, wherein a width of the second elastic opening is smaller than a width of the first elastic opening.
According to claim 1,

the base part

A probe card comprising a first base extension part extending in one direction from one side of the base part.
According to claim 1,

the base part

A probe card comprising a second base extension extending from the other side of the base to the other side.
According to claim 4,

The first guide

A first guide fixing part formed on one side of the first guide, positioned in a first direction of the first base extension part, and fixing the probe pin by contacting the base part and the first base extension part. Probe card to do.
According to claim 5,

The second guide

The probe card further includes a second guide fixing part formed on one side of the second guide, positioned in a first direction of the second base extension part, and contacting the second base extension part to fix the probe pin.
According to claim 1,

the guide part

The probe card further includes a support member preventing movement of the first guide.
According to claim 1,

the guide part

A probe card formed such that the first guide and the second guide are separable.