WO2014204161A2 - Insert for inspection - Google Patents

Insert for inspection Download PDF

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Publication number
WO2014204161A2
WO2014204161A2 PCT/KR2014/005278 KR2014005278W WO2014204161A2 WO 2014204161 A2 WO2014204161 A2 WO 2014204161A2 KR 2014005278 W KR2014005278 W KR 2014005278W WO 2014204161 A2 WO2014204161 A2 WO 2014204161A2
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WO
WIPO (PCT)
Prior art keywords
insert
hole
insert body
inspection
support member
Prior art date
Application number
PCT/KR2014/005278
Other languages
French (fr)
Korean (ko)
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WO2014204161A3 (en
Inventor
오종우
최우석
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Publication of WO2014204161A2 publication Critical patent/WO2014204161A2/en
Publication of WO2014204161A3 publication Critical patent/WO2014204161A3/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • G01R1/0466Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding

Definitions

  • the present invention relates to an inspection insert, and more particularly, to an inspection insert which enables easy electrical inspection with a terminal of a device under test.
  • a semiconductor device manufactured by a semiconductor device manufacturing process undergoes reliability tests such as an electrical property test and a function test before shipment.
  • an insert is mainly used as a device for transferring the manufactured semiconductor device to a test apparatus and classifying the tested semiconductor device.
  • the handler carries a plurality of semiconductor devices into a test apparatus and electrically contacts each semiconductor device to a test head for testing. Each semiconductor device after the test is completed is taken out from the test apparatus and classified according to the test result. In this case, the handler may return the test tray including the plurality of inserts containing the plurality of semiconductor devices to the test apparatus so that the test process may be performed.
  • FIGS. 1 and 2 As a conventional technique for such an insert, it is disclosed in FIGS. 1 and 2. Specifically, an inspection apparatus 110 such as a high fix board requiring electrical connection, and an inspection socket 120 disposed on the inspection apparatus 110 and detachably coupled to the inspection apparatus 110.
  • the insert 100 and the insert 100 which are transferred to the inspection apparatus 110 with the device under test 140 inserted therein and aligned with the inspection apparatus by a socket guide 150 disposed in the inspection apparatus. It is configured to include a pusher device 130 for pressing the device to be tested 140 inserted therein.
  • the inspection socket 120 disposed in the inspection apparatus is always in a state mounted on the inspection apparatus 110, and the insert 100 is transferred and electrically connected to the inspection target device 140 disposed inside the insert.
  • the inspection of the device under test 140 may be performed.
  • the insert is mainly responsible for carrying the device under test
  • the test socket is responsible for the electrical connection between the transported device under test and the test device, wherein the test socket has already been described above. It is arrange
  • the inspection socket is arranged on the inspection apparatus side, there is a problem that a lot of time is required for maintenance of the equipment. That is, when there is an insert problem, the insert should be checked as a whole, and when there is a problem with the inspection apparatus, the lower structure including the test socket should be checked as a whole.
  • the inserted insert can be securely aligned by the socket guide
  • the device under test does not have a configuration that can be surely aligned in the inspection socket. There may be cases where the sockets are not correctly aligned.
  • an object of the present invention is to provide an inspection insert which is easy to maintain and easy to align the device under test.
  • the terminal in the insert for inspection according to the present invention for achieving the above object, in the insert for moving the terminal to the external connecting body in a state of receiving a device under test provided with a plurality of terminals, the terminal is in contact with the connecting body,
  • An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof;
  • a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
  • the support member The support member,
  • a conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal, and an insulating portion for supporting each of the conductive portions;
  • a guide sheet disposed on an upper surface side of the conductive sheet and having through-holes formed at positions corresponding to the terminals.
  • the guide sheet may be made of any one of Kapton, FR4, FR5, XPC, and polyimide.
  • the guide sheet may be integrally attached to the conductive sheet.
  • the support member has an edge is in close contact with the lower surface of the insert body, the insert body is provided with a plurality of protrusions protruding downward,
  • the support member is provided with a coupling hole for each position corresponding to the protrusion
  • the protrusion may attach the support member to the lower surface of the insert body by thermal fusion.
  • the stopper sheet may be disposed at the edge of the support member at the same height as the lower surface of the conductive portion, or protrude downward from the lower surface of the conductive portion, and may be made of a harder material than the support member.
  • the insert body includes an insert body coupled to a socket guide provided on an external connection body;
  • It may be configured to include a floating member coupled to the insert body relative to the insert body is attached to the support member.
  • the floating member may be movable between a first position where the bottom surface of the floating member is located below the bottom surface of the insert body and a second position where the bottom surface of the floating member is positioned above the bottom surface of the insert body.
  • the floating member may be detachably coupled to the insert body.
  • the floating member may be provided with elastic biasing means for elastically biasing the floating member from the first position to the second position.
  • the elastic bias means The elastic bias means,
  • a first hole disposed at an edge of the insert body
  • a second hole disposed at a position corresponding to the first hole of the insert body
  • a lower locking portion having a lower end engaged with the lower surface of the insert body, a central portion extending upwardly from the lower locking portion and penetrating through the second hole and the first hole and spaced upwardly from the first hole;
  • a catching member disposed at an upper end of a central portion and including an upper catching portion having a larger diameter than the central portion;
  • an elastic bias member disposed between the periphery of the first hole of the insert body and the upper locking portion to elastically bias the upper locking portion away from the lower surface of the insert body.
  • the lower locking portion may be engaged with the bottom surface of the insert body in the form of a hook.
  • the support member The support member,
  • It may include a frame integrally coupled to the edge of the conductive sheet and extending from the edge of the conductive sheet to face the bottom surface of the insert body.
  • An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof;
  • a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
  • the support member The support member,
  • a conductor including a housing having a through hole formed at each position corresponding to the terminal, a pin inserted in the through hole and in contact with a terminal of the device under test, and a spring absorbing a pressing force applied by the pin;
  • It may include a guide sheet disposed on the upper surface side of the conductive sheet and the through hole is formed for each position corresponding to the terminal.
  • the insert for inspection according to the present invention has an advantage in that maintenance is easy by arranging a support member on the insert side that electrically connects the device under test and the device under test while supporting the device under test.
  • the inspection insert according to the present invention has an advantage that the alignment of the device under test can be facilitated by arranging a guide sheet for guiding the position of the device under test on the support member.
  • FIG. 1 is an exploded perspective view showing a test insert according to the prior art.
  • FIG. 2 is a partially combined view of FIG. 1.
  • FIG 3 is an exploded perspective view of an inspection apparatus including an inspection insert according to an embodiment of the present invention.
  • Figure 4 is a perspective view from above of the inspection insert in the inspection device of FIG.
  • FIG. 5 is a perspective view from below of the inspection insert in the inspection device of FIG.
  • FIG. 6 is a perspective view from above of the floating member in the inspection device of FIG. 3;
  • FIG. 7 is a perspective view of the floating member from below in the inspection device of FIG. 3;
  • FIG. 9 is a cross-sectional view of the insert for inspection of FIG. 4.
  • FIG. 10 and 11 are views of the operation of the test insert of FIG.
  • test insert 12 is a cross-sectional view of the test insert according to another embodiment of the present invention.
  • test insert according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
  • the inspection insert 10 of the present invention is an external connection body (in the present invention, 'pad of the inspection device', but is limited thereto in the state of receiving the device under test 80 provided with a plurality of terminals 81.
  • the inspection insert 10 of the present invention includes an insert body 20 and a support member 60.
  • the insert body 20 has a through hole 22 into which the device under test 80 can be inserted, and includes an insert body 21 and a floating member 30.
  • the insert main body 21 has a substantially rectangular parallelepiped shape, and a through hole 22 having a corresponding size of the device under test 80 is formed in the center portion.
  • the guide body 23 is symmetrically formed in the insert body 21 with the through hole 22 therebetween.
  • the guide hole 23 has a size that can be inserted into the guide protrusion 921 of the socket guide 92 disposed on the inspection device 93 side.
  • the lower surface of the insert body 21 is provided with a receiving groove 24 to be dug upward and to allow the floating member 30 to be seated therein.
  • a first hole 25 is disposed between the guide hole 23 and the through hole 22 to communicate the upper surface of the receiving groove 24 with the upper surface of the insert body 21.
  • a locking member 40 to be described later may be inserted into the first hole 25.
  • An upper portion of the first hole 25 has a large inner diameter, and a lower portion of the first hole 25 has an inner diameter smaller than the upper portion, but a stepped portion having a diameter is provided at the center thereof.
  • a spring receiving groove 26 is inserted between the first hole 25 and the through hole 22 to insert a spring 901 to elastically support the upper cover 90 upward.
  • the upper cover 90 is configured to operate the latch for fixing the position of the device under test 80 inserted into the insert body 21, by a spring 901 seated in the spring receiving groove 26 Is elastically supported.
  • the floating member 30 is relatively movable to the insert main body 21 and the supporting member 60 is attached, and the lower surface of the floating member 30 is smaller than the lower surface of the insert main body 21.
  • the floating member 30 is disposed at the second position during transportation to prevent the floating member 30 or the supporting member 60 from being damaged by colliding with another device.
  • the inspection apparatus 93 side is moved to the first position and protrudes from the insert body 20, it is configured to be in contact with the inspection apparatus 93.
  • the floating member 30 is formed in the shape of a square plate having a through hole 32 formed at a center thereof, and a plurality of protrusions 31 are formed on a lower surface of the floating member 30 along the circumference of the through hole 22. It will be prepared.
  • the protrusion 31 performs a function of fixing the support member 60 to the floating member 30. Specifically, the protrusion 31 is configured to fix the position of the support member 60 while the end is spread in the surface direction by thermal fusion.
  • the floating member 30 is detachably coupled to the insert body 21.
  • the floating member 30 is provided with elastic biasing means for elastically biasing from the first position to the second position.
  • the elastic bias means includes a first hole 25 disposed at an edge of the insert body 20 and a second hole 32 disposed at a position corresponding to the first hole 25 of the insert body 20. ), A locking member 40 and an elastic bias member 50.
  • the locking member 40, the lower engaging portion 41, the lower end is engaged with the lower surface of the insert body 20, and extends upwardly from the lower locking portion 41 and the second hole 32 And a central portion 42 penetrating through the first hole 25 and spaced upwardly from the first hole 25, and disposed at an upper end of the central portion 42 and having a diameter larger than that of the central portion 42. And a portion 43.
  • the elastic bias member is disposed between the stepped portion of the first hole 25 of the insert body 20 and the upper catching portion 43 to move the upper catching portion 43 to the insert body 20. It is configured to include an elastic biasing member 50 for elastically biasing in a direction away from the lower surface.
  • the elastic bias means elastically biases the floating member 30 to the second position so that the floating member 30 can be positioned inside the insert body 20 at normal times. If the floating member 30 is pressed downward, the elastic bias member 50 is compressed to allow the floating member 30 to descend, and when the pressing is completed, the elastic bias member 50 is elastically restored to restore the floating member. The member 30 is returned to the second position.
  • the lower engaging portion 41 has the form of a hook can be fitted to the lower surface of the insert body (20). Specifically, it is caught around the second hole 32, so that the floating member 30 can be easily caught by the insert body 20. On the other hand, by manually forcing the lower locking portion 41 hanging on the lower surface of the insert body 20 is forced to the floating member 30 can be separated from the insert body (20).
  • the support member 60 is disposed to cross the through hole 22 of the insert body 20, and the device under test 80 inserted through the through hole 22 is inserted into the through hole 22.
  • the terminal 81 of the device under test 80 and the pad of the test device 93 are electrically connected to each other while being supported so as to be maintained.
  • the support member 60 includes the conductive sheet 61, the guide sheet 62, and the frame 63.
  • the conductive sheet 61 includes a conductive portion 611 in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal 81, and a conductive portion 611 while supporting the respective conductive portions 611. ) Is insulated from each other (612).
  • the conductive portion 611 is disposed at a position corresponding to the terminal 81 of the device under test 80, and a plurality of conductive particles are arranged in a line in the thickness direction in the elastic material.
  • the heat resistant high molecular material which has a crosslinked structure is preferable.
  • curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance
  • Liquid silicone rubber is preferable.
  • the liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable.
  • the silicone cured product has a compression set of 10% or less at 150 ° C. It is preferable, More preferably, it is 8% or less, More preferably, it is 6% or less.
  • the number average particle diameter of the magnetic core particle for obtaining electroconductive particle P is 3-40 micrometers.
  • the number average particle diameter of a magnetic core particle says what was measured by the laser diffraction scattering method.
  • iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used, but those whose saturation magnetization is 0.1 dl / m 2 or more can be preferably used, and more preferably.
  • Gold, silver, rhodium, platinum, chromium and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
  • the insulating part 612 maintains insulation between the conductive parts 611 while supporting the conductive part 611.
  • the insulating part 612 may be made of the same material as that of the elastic material in the conductive part 611, but is not limited thereto. Any material having good elasticity and excellent insulating property may be used.
  • the guide sheet 62 is disposed on the upper surface side of the conductive sheet 61 and has a through hole 621 formed at each position corresponding to the terminal 81.
  • the guide sheet 62 is aligned with the conductive portion 611 to which the terminal 81 of the device under test 80 is to be contacted, and thus cannot be lowered.
  • 81 is guided by the guide sheet 62 to contact the conductive portion 611.
  • the through hole 621 may have a circular cross section and may have a reverse cone shape in which an inner diameter decreases toward the lower side.
  • the guide sheet 62 may be any material as long as it is flexible, but may be made of any one of Kapton, FR4, FR5, XPC, and polyimide. Such a guide sheet is preferably integrated with the conductive sheet 61 by an adhesive. Of course, the present invention is not limited to the adhesive and may be integrated into the mold by inserting into the mold in the process of manufacturing the conductive sheet 61.
  • the frame 63 is formed in the shape of a square plate having a hole formed in the center thereof, and the conductive sheet 61 is integrally attached to the frame 63.
  • the frame 63 is integrally coupled to the edge of the conductive sheet 61 to support the conductive sheet 61.
  • the frame 63 is provided with a coupling hole 631 at a position corresponding to the protrusion 31 of the insert body 20.
  • the stopper sheet 70 is an edge of the support member 60, specifically, disposed at the edge of the frame 63, and protrudes downward to the same position as the bottom surface of the conductive portion 611. It protrudes down to the same height as.
  • the stopper sheet 70 is made of a harder material than the support member 60, and when the floating member 30 descends while being inclined with respect to the inspection apparatus 93, the stopper sheet 70 is in contact with the inspection apparatus 93 in advance and horizontally. It is to guide the insert to descend. However, it is not necessary to use a hard material than the support member 60, it is also possible to use the same material.
  • Inspection insert 10 according to an embodiment of the present invention has the following effects.
  • the device under test 80 is inserted into the insert body 20 to place the device under test 80 on the support member 60.
  • the device under test 80 is in contact with the conductive portion 611 of the conductive sheet 61 while being aligned by the guide sheet 62 disposed on the upper surface of the support member 60.
  • the insert in which the device under test 80 is accommodated is moved to the inspection apparatus 93 side.
  • the insert moved to the inspection device 93 is lowered, and the insert body 20 is positioned in the correct position while being aligned by the guide socket.
  • a predetermined pusher 94 presses the device under test 80. Specifically, when the pusher device presses the device under test 80, the floating member 30 is lowered. Specifically, as shown in FIG. 9, the floating member 30 disposed in the first position by the elastic bias member 50 is lowered together as the device under test 80 descends as shown in FIG. 10. When the floating member 30 is sufficiently lowered, the bottom surface of the support member 60 comes into contact with the pad of the inspection device 93. After this, a predetermined electrical test is made. After the electrical inspection is completed, the pusher device is removed from the device under test 80 and the elastic bias member 50 is elastically restored, and the floating member 30 and the device under test 80 are removed from the inspection device 93. Away from the pads.
  • the lower locking portion is elastically deformed to release the lower surface of the insert body so that the floating member can be easily separated from the insert body.
  • Inspection insert according to an embodiment of the present invention has the following advantages.
  • the inspection insert according to the present embodiment has an advantage of easy maintenance by attaching a conductive sheet (support member) corresponding to the existing inspection socket to the insert side.
  • the terminal of the device under test can be accurately contacted with the conductive portion of the conductive sheet.
  • the stopper sheet is inclined to contact the surface of the inspection apparatus before the conductive sheet, thereby minimizing the falling of the floating member.
  • the support member is attached to the insert body by heat fusion to maximize the ease of assembly. That is, ease of attachment can be achieved rather than bolting.
  • the floating member since the floating member is exposed to the outside from the insert body only during the actual inspection and is inserted into the insert body during the other operation, that is, the floating member minimizes the damage of the floating member and external foreign matters on the lower surface of the conductive sheet. There is an advantage that it can.
  • the floating member is fastened to the insert body in the form of a hook, there is an advantage that can be achieved easy coupling.
  • test insert according to an embodiment of the present invention may be modified as follows.
  • the conductive sheet is provided on the support member, but as shown in FIG. 12, the conductor may be disposed.
  • the inspection insert is exemplified by various examples.
  • the present invention is not limited thereto, and it can be extended and interpreted as long as it is reasonably interpreted according to the scope of the present invention.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Leads Or Probes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The present invention relates to an insert for inspection and, more particularly, to an insert for inspection comprising: an insert body having a through-hole formed in the central portion thereof, a device to be inspected being able to be inserted into the through-hole; and a support member arranged across the through-hole of the insert body, wherein the support member comprises: a conductive sheet including conductive portions and insulating portions supporting respective conductive portions; and a guide sheet arranged on the upper surface of the conductive sheet, the guide sheet having a through-hole formed in each position corresponding to a terminal.

Description

검사용 인서트Inspection insert
본 발명은 검사용 인서트에 대한 것으로서, 더욱 상세하게는 피검사 디바이스의 단자와 용이하게 전기적 검사할 수 있도록 하는 검사용 인서트에 대한 것이다.The present invention relates to an inspection insert, and more particularly, to an inspection insert which enables easy electrical inspection with a terminal of a device under test.
일반적으로 반도체 디바이스 제조 공정에 의해 제조된 반도체 디바이스는 출하되기 전에 전기적 특성 검사와 기능 테스트(Function Test)와 같은 신뢰성 테스트를 거치게 된다. 여기서, 제조된 반도체 디바이스를 테스트 장치로 이송하며, 테스트 완료된 반도체 디바이스를 분류하기 위한 장비로서 주로 인서트(Insert)가 사용된다.In general, a semiconductor device manufactured by a semiconductor device manufacturing process undergoes reliability tests such as an electrical property test and a function test before shipment. Here, an insert is mainly used as a device for transferring the manufactured semiconductor device to a test apparatus and classifying the tested semiconductor device.
핸들러는 다수의 반도체 디바이스를 테스트 장치 내에 반송하고, 각 반도체 디바이스를 테스트 헤드에 전기적으로 접촉시켜 테스트를 행하게 한다. 그리고 테스트가 완료된 각 반도체 디바이스를 테스트 장치로부터 반출하여 테스트 결과에 따라서 분류한다. 이때 핸들러는 복수개의 반도체 디바이스가 수납된 인서트를 복수 배치하고 있는 테스트 트레이를 테스트 장치로 반송하여 테스트 공정이 이루어질 수 있도록 하는 것이다. The handler carries a plurality of semiconductor devices into a test apparatus and electrically contacts each semiconductor device to a test head for testing. Each semiconductor device after the test is completed is taken out from the test apparatus and classified according to the test result. In this case, the handler may return the test tray including the plurality of inserts containing the plurality of semiconductor devices to the test apparatus so that the test process may be performed.
이러한 인서트에 대한 종래기술로는, 도 1 및 도 2에 개시되어 있게 된다. 구체적으로 전기적인 접속이 요구되는 하이픽스 보드와 같은 검사장치(110)와, 상기 검사장치(110)의 상부에 배치되며 상기 검사장치(110)에 착탈가능하게 결합되는 검사용 소켓(120)과, 내부에 피검사 디바이스(140)를 삽입한 상태로 검사장치(110) 측으로 이송하며 검사장치에 배치되는 소켓가이드(150)에 의하여 검사장치에 위치정렬되는 인서트(100) 및 상기 인서트(100) 내부에 삽입된 피검사 디바이스(140)를 눌러주는 푸셔장치(130)를 포함하여 구성된다.As a conventional technique for such an insert, it is disclosed in FIGS. 1 and 2. Specifically, an inspection apparatus 110 such as a high fix board requiring electrical connection, and an inspection socket 120 disposed on the inspection apparatus 110 and detachably coupled to the inspection apparatus 110. The insert 100 and the insert 100 which are transferred to the inspection apparatus 110 with the device under test 140 inserted therein and aligned with the inspection apparatus by a socket guide 150 disposed in the inspection apparatus. It is configured to include a pusher device 130 for pressing the device to be tested 140 inserted therein.
이때, 검사장치에 배치되는 검사용 소켓(120)은 항상 검사장치(110)에 탑재된 상태에 있으며, 인서트(100)가 이송되어서 인서트 내부에 배치되는 피검사 디바이스(140)와 전기적으로 연결됨으로서, 상기 피검사 디바이스(140)에 대한 검사를 수행가능하게 한다.At this time, the inspection socket 120 disposed in the inspection apparatus is always in a state mounted on the inspection apparatus 110, and the insert 100 is transferred and electrically connected to the inspection target device 140 disposed inside the insert. The inspection of the device under test 140 may be performed.
이러한 종래기술에 검사용 인서트를 이용한 검사시 다음과 같은 문제점이 있다.In the prior art, the following problems exist when inspecting the test insert.
종래기술에서는, 인서트는 피검사 디바이스를 운반하는 기능만을 주로 담당하고, 운반된 피검사 디바이스와 검사장치를 서로 전기적으로 접속하는 기능은 검사용 소켓이 담당하게 되는데, 이때 검사용 소켓은 이미 상술한 바와 같이 검사장치 측에 배치되어 있게 된다. 이와 같이 검사용 소켓이 검사장치 측에 배치되어 있게 되면, 장비의 유지보수에 드는 시간이 많이 든다는 문제점이 있다. 즉, 인서트 문제시에는 인서트를 전체적으로 체크해야 하고, 검사장치의 문제시에는 테스트 소켓을 포함한 하부의 구조물을 전체적으로 체크해야 해서 검토를 해야 하는 부분이 많아지게 되는 문제점이 있다.In the prior art, the insert is mainly responsible for carrying the device under test, and the test socket is responsible for the electrical connection between the transported device under test and the test device, wherein the test socket has already been described above. It is arrange | positioned at the inspection apparatus side as shown. As such, when the inspection socket is arranged on the inspection apparatus side, there is a problem that a lot of time is required for maintenance of the equipment. That is, when there is an insert problem, the insert should be checked as a whole, and when there is a problem with the inspection apparatus, the lower structure including the test socket should be checked as a whole.
또한, 이송되는 인서트는 소켓 가이드에 의하여 위치정렬이 확실하게 될 수 있으나, 인서트 내에 삽입되는 피검사 디바이스는 검사용 소켓에 위치정렬이 확실하게 될 수 있는 구성이 존재하지 않기 때문에 피검사 디바이스가 검사용 소켓에 정확하게 위치정렬되지 않는 경우가 있게 된다.In addition, although the inserted insert can be securely aligned by the socket guide, the device under test does not have a configuration that can be surely aligned in the inspection socket. There may be cases where the sockets are not correctly aligned.
본 발명은 상술한 문제점을 해결하기 위하여 창출된 것으로서, 더욱 상세하게는 유지보수가 용이하며 피검사 디바이스의 위치정렬이 용이한 검사용 인서트를 제공하는 것을 목적으로 한다.The present invention has been made in order to solve the above-mentioned problems, and more specifically, an object of the present invention is to provide an inspection insert which is easy to maintain and easy to align the device under test.
상술한 목적을 달성하기 위한 본 발명의 검사용 인서트는, 다수의 단자가 마련된 피검사 디바이스를 수납한 상태로 외부의 접속체 측으로 이동하여 상기 단자를 상기 접속체와 접촉가능하게 하는 인서트에 있어서,In the insert for inspection according to the present invention for achieving the above object, in the insert for moving the terminal to the external connecting body in a state of receiving a device under test provided with a plurality of terminals, the terminal is in contact with the connecting body,
상기 피검사 디바이스가 삽입될 수 있는 관통구멍이 중앙 부분에 형성되어 있는 인서트 몸체; 및An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof; And
상기 인서트 몸체의 관통구멍을 가로지르도록 배치되고, 상기 관통구멍을 통하여 삽입된 피검사 디바이스가 상기 관통구멍 내에 유지될 수 있도록 지지하는 지지부재;를 포함하며,And a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
상기 지지부재는,The support member,
상기 단자와 대응되는 위치마다 다수의 도전성 입자가 두께방향으로 정렬배치되는 도전부와, 상기 각 도전부를 지지하는 절연부로 이루어지는 도전성 시트; 및A conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal, and an insulating portion for supporting each of the conductive portions; And
상기 도전성 시트의 상면측에 배치되며 상기 단자와 대응되는 위치마다 관통공이 형성되어 있는 가이드시트를 포함한다.And a guide sheet disposed on an upper surface side of the conductive sheet and having through-holes formed at positions corresponding to the terminals.
상기 검사용 인서트에서, In the inspection insert,
가이드 시트는, 캡톤(kapton), FR4, FR5, XPC, 폴리이미드 중 어느 하나의 소재로 이루어질 수 있다.The guide sheet may be made of any one of Kapton, FR4, FR5, XPC, and polyimide.
상기 검사용 인서트에서,In the inspection insert,
상기 가이드시트는, 상기 도전성 시트에 일체화되어 부착될 수 있다.The guide sheet may be integrally attached to the conductive sheet.
상기 검사용 인서트에서,In the inspection insert,
상기 지지부재는 가장자리가 상기 인서트몸체의 하면에 밀착되어 있으며, 상기 인서트몸체에는 하측으로 돌출되는 다수의 돌출부가 배치되고,The support member has an edge is in close contact with the lower surface of the insert body, the insert body is provided with a plurality of protrusions protruding downward,
상기 지지부재에는 상기 돌출부와 대응되는 위치마다 결합공이 마련되어 있으며,The support member is provided with a coupling hole for each position corresponding to the protrusion,
상기 돌출부는 열융착에 의하여 상기 지지부재를 인서트몸체의 하면에 부착시킬 수 있다.The protrusion may attach the support member to the lower surface of the insert body by thermal fusion.
상기 검사용 인서트에서,In the inspection insert,
상기 지지부재의 가장자리에는 상기 도전부의 하면과 동일높이에 있거나, 상기 도전부의 하면보다 하측으로 돌출되어 있으며, 상기 지지부재보다 경질의 소재로 이루어지는 스토퍼시트가 배치될 수 있다.The stopper sheet may be disposed at the edge of the support member at the same height as the lower surface of the conductive portion, or protrude downward from the lower surface of the conductive portion, and may be made of a harder material than the support member.
상기 검사용 인서트에서, In the inspection insert,
상기 인서트 몸체는, 외부의 접속체에 마련되어 있는 소켓가이드에 결합되는 인서트 본체; 및The insert body includes an insert body coupled to a socket guide provided on an external connection body; And
상기 인서트 본체에 대하여 상대이동가능하게 결합되며 상기 지지부재가 부착되는 플로팅 부재를 포함하여 구성될 수 있다.It may be configured to include a floating member coupled to the insert body relative to the insert body is attached to the support member.
상기 검사용 인서트에서, In the inspection insert,
상기 플로팅 부재는, 플로팅 부재의 하면이 상기 인서트 본체의 하면보다 아래쪽에 위치하는 제1위치와, 플로팅 부재의 하면이 상기 인서트 본체의 하면보다 윗쪽에 위치하는 제2위치사이에서 위치이동가능할 수 있다.The floating member may be movable between a first position where the bottom surface of the floating member is located below the bottom surface of the insert body and a second position where the bottom surface of the floating member is positioned above the bottom surface of the insert body. .
상기 검사용 인서트에서,In the inspection insert,
상기 플로팅 부재는, 상기 인서트 본체에 착탈가능하게 결합될 수 있다.The floating member may be detachably coupled to the insert body.
상기 검사용 인서트에서,In the inspection insert,
상기 플로팅 부재에는, 상기 플로팅 부재는 제1위치로부터 제2위치를 향하도록 탄성바이어스시키는 탄성바이어스수단이 마련될 수 있다.The floating member may be provided with elastic biasing means for elastically biasing the floating member from the first position to the second position.
상기 검사용 인서트에서,In the inspection insert,
상기 탄성바이어스수단은,The elastic bias means,
상기 인서트 몸체의 가장자리에 배치되는 제1구멍;A first hole disposed at an edge of the insert body;
상기 인서트 몸체의 제1구멍과 대응되는 위치에 배치되는 제2구멍;A second hole disposed at a position corresponding to the first hole of the insert body;
하단이 상기 인서트 몸체의 하단면에 걸어맞춤되는 하부걸림부와, 상기 하부걸림부로부터 상측으로 연장되며 제2구멍 및 제1구멍을 관통하되 상기 제1구멍으로부터 상측으로 이격되어 있는 중앙부와, 상기 중앙부의 상단에 배치되며 상기 중앙부보다 직경이 큰 상부걸림부를 포함하는 걸림부재; 및A lower locking portion having a lower end engaged with the lower surface of the insert body, a central portion extending upwardly from the lower locking portion and penetrating through the second hole and the first hole and spaced upwardly from the first hole; A catching member disposed at an upper end of a central portion and including an upper catching portion having a larger diameter than the central portion; And
상기 인서트 몸체의 제1구멍의 주변과 상기 상부걸림부의 사이에 배치되어 상기 상부걸림부를 상기 인서트 몸체의 하면으로부터 멀어지는 방향으로 탄성바이어스시키는 탄성바이어스부재;를 포함할 수 있다.And an elastic bias member disposed between the periphery of the first hole of the insert body and the upper locking portion to elastically bias the upper locking portion away from the lower surface of the insert body.
상기 검사용 인서트에서,In the inspection insert,
상기 하부걸림부는, 후크의 형태로 상기 인서트 몸체의 하단면에 걸어맞춤될 수 있다.The lower locking portion may be engaged with the bottom surface of the insert body in the form of a hook.
상기 검사용 인서트에서,In the inspection insert,
상기 지지부재에는,The support member,
상기 도전성 시트의 가장자리에 일체적으로 결합되며 상기 도전성 시트의 가장자리로부터 연장되어 상기 인서트 몸체의 하면과 대면하는 프레임을 포함할 수 있다.It may include a frame integrally coupled to the edge of the conductive sheet and extending from the edge of the conductive sheet to face the bottom surface of the insert body.
상술한 목적을 달성하기 위한 본 발명의 검사용 인서트는,Inspection insert of the present invention for achieving the above object,
다수의 단자가 마련된 피검사 디바이스를 수납한 상태로 검사장치 측으로 이동하여 상기 단자를 상기 검사장치의 패드와 접촉가능하게 하는 인서트에 있어서,An insert for moving the terminal to the inspection apparatus in a state of receiving a device under test with a plurality of terminals provided therein, wherein the insert makes contact with a pad of the inspection apparatus.
상기 피검사 디바이스가 삽입될 수 있는 관통구멍이 중앙 부분에 형성되어 있는 인서트 몸체; 및An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof; And
상기 인서트 몸체의 관통구멍을 가로지르도록 배치되고, 상기 관통구멍을 통하여 삽입된 피검사 디바이스가 상기 관통구멍 내에 유지될 수 있도록 지지하는 지지부재;를 포함하며,And a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
상기 지지부재는,The support member,
상기 단자와 대응되는 위치마다 관통공이 형성되는 하우징과, 상기 관통공 내에 삽입되며 피검사 디바이스의 단자와 접촉하는 핀과, 상기 핀에 의하여 가해지는 가압력을 흡수하는 스프링을 포함하는 도전체; 및A conductor including a housing having a through hole formed at each position corresponding to the terminal, a pin inserted in the through hole and in contact with a terminal of the device under test, and a spring absorbing a pressing force applied by the pin; And
상기 도전성 시트의 상면측에 배치되며 상기 단자와 대응되는 위치마다 관통공이 형성되어 있는 가이드시트를 포함할 수 있다.It may include a guide sheet disposed on the upper surface side of the conductive sheet and the through hole is formed for each position corresponding to the terminal.
본 발명에 따른 검사용 인서트는, 피검사 디바이스를 지지하면서 피검사 디바이스와 검사장치를 전기적으로 접속하는 지지부재를 인서트 측에 배치하여 유지보수가 용이하다는 장점이 있다.The insert for inspection according to the present invention has an advantage in that maintenance is easy by arranging a support member on the insert side that electrically connects the device under test and the device under test while supporting the device under test.
또한, 본 발명에 따른 검사용 인서트는, 지지부재에, 피검사 디바이스의 위치를 가이드하는 가이드시트를 배치하여 피검사 디바이스의 위치정렬을 용이하게 할 수 있다는 장점이 있다.In addition, the inspection insert according to the present invention has an advantage that the alignment of the device under test can be facilitated by arranging a guide sheet for guiding the position of the device under test on the support member.
도 1은 종래기술에 따른 검사용 인서트를 도시한 분리사시도.1 is an exploded perspective view showing a test insert according to the prior art.
도 2는 도 1의 일부 결합도.2 is a partially combined view of FIG. 1.
도 3은 본 발명의 일 실시예에 따른 검사용 인서트를 포함하는 검사장치의 분리사시도.3 is an exploded perspective view of an inspection apparatus including an inspection insert according to an embodiment of the present invention.
도 4는 도 3의 검사장치에서 검사용 인서트를 위에서 바라본 사시도.Figure 4 is a perspective view from above of the inspection insert in the inspection device of FIG.
도 5는 도 3의 검사장치에서 검사용 인서트를 아래에서 바라본 사시도.5 is a perspective view from below of the inspection insert in the inspection device of FIG.
도 6은 도 3의 검사장치에서 플로팅 부재를 위에서 바라본 사시도.6 is a perspective view from above of the floating member in the inspection device of FIG. 3;
도 7은 도 3의 검사장치에서 플로팅 부재를 아래에서 바라본 사시도.7 is a perspective view of the floating member from below in the inspection device of FIG. 3;
도 8은 도 3의 VIII - VIII 단면도.8 is a cross-sectional view taken along line VIII-VIII of FIG. 3.
도 9는 도 4의 검사용 인서트의 단면도.9 is a cross-sectional view of the insert for inspection of FIG. 4.
도 10 및 도 11은 도 9의 검사용 인서트의 작동도.10 and 11 are views of the operation of the test insert of FIG.
도 12는 본 발명의 다른 실시예에 따른 검사용 인서트의 단면도.12 is a cross-sectional view of the test insert according to another embodiment of the present invention.
이하, 본 발명의 일 실시예에 따른 검사용 인서트의 바람직한 실시예를 첨부된 도면을 참조하면서 상세하게 설명한다.Hereinafter, a preferred embodiment of the test insert according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
본 발명의 검사용 인서트(10)는, 다수의 단자(81)가 마련된 피검사 디바이스(80)를 수납한 상태로 외부의 접속체(본 발명에서는 '검사장치의 패드'를 의미하지만 이에 한정되는 것은 아니며 피검사 디바이스가 접촉될 필요가 있는 모든 구성을 의미한다) 측으로 이동하여 상기 단자(81)를 상기 접속체와 접속가능하게 하는 인서트로서, 접속체 측에 별도의 검사용 소켓이 없이 지지부재가 검사용 소켓으로의 기능을 수행하는 인서트에 대한 것이다.The inspection insert 10 of the present invention is an external connection body (in the present invention, 'pad of the inspection device', but is limited thereto in the state of receiving the device under test 80 provided with a plurality of terminals 81. Means an arrangement for moving the terminal 81 to the connection body by moving to the side of the device under test, without a separate inspection socket on the connection body. Is for inserts that function as test sockets.
이러한 본 발명의 검사용 인서트(10)는, 인서트 몸체(20)와 지지부재(60)를 포함한다.The inspection insert 10 of the present invention includes an insert body 20 and a support member 60.
상기 인서트 몸체(20)는, 피검사 디바이스(80)가 삽입될 수 있는 관통구멍(22)이 중앙 부분에 형성되어 있는 것으로서, 인서트 본체(21)와 플로팅 부재(30)를 포함한다.The insert body 20 has a through hole 22 into which the device under test 80 can be inserted, and includes an insert body 21 and a floating member 30.
상기 인서트 본체(21)는, 대략 직육면체의 형태를 가지되 중앙 부분에는 피검사 디바이스(80)의 대응되는 크기를 가지는 관통구멍(22)이 형성되어 있다. 또한, 인서트 본체(21)에는 관통구멍(22)을 사이에 두고 대칭적으로 가이드홀(23)이 형성되어 있게 된다. 상기 가이드홀(23)은 검사장치(93) 측에 배치된 소켓 가이드(92)의 가이드돌기(921)가 삽입될 수 있는 크기를 가지게 된다. The insert main body 21 has a substantially rectangular parallelepiped shape, and a through hole 22 having a corresponding size of the device under test 80 is formed in the center portion. In addition, the guide body 23 is symmetrically formed in the insert body 21 with the through hole 22 therebetween. The guide hole 23 has a size that can be inserted into the guide protrusion 921 of the socket guide 92 disposed on the inspection device 93 side.
상기 인서트 본체(21)의 하면에는 상측으로 패여지며 플로팅 부재(30)가 내부에 안착될 수 있도록 하는 수용홈(24)이 마련되어 있다. 또한, 가이드홀(23)과 상기 관통구멍(22)의 사이에는 상기 수용홈(24)의 상면과 상기 인서트 본체(21)의 상면을 서로 연통하는 제1구멍(25)이 배치되어 있게 된다. 상기 제1구멍(25)에는 후술하는 걸림부재(40)가 삽입될 수 있다.The lower surface of the insert body 21 is provided with a receiving groove 24 to be dug upward and to allow the floating member 30 to be seated therein. In addition, a first hole 25 is disposed between the guide hole 23 and the through hole 22 to communicate the upper surface of the receiving groove 24 with the upper surface of the insert body 21. A locking member 40 to be described later may be inserted into the first hole 25.
상기 제1구멍(25)의 상부는 큰 내경을 가지며 상기 제1구멍(25)의 하부는 상기 상부보다 작은 내경을 가지되 중앙에는 직경이 변화되는 단턱이 마련되어 있게 된다. An upper portion of the first hole 25 has a large inner diameter, and a lower portion of the first hole 25 has an inner diameter smaller than the upper portion, but a stepped portion having a diameter is provided at the center thereof.
상기 제1구멍(25)과 관통구멍(22)의 사이에는 상부커버(90)를 상측으로 탄성지지하는 스프링(901)이 삽입되는 스프링 수용홈(26)이 마련되어 있게 된다. 이때 상부커버(90)는 인서트 본체(21) 내에 삽입되는 피검사 디바이스(80)의 위치를 고정하는 래치를 작동시키기 위한 구성으로서, 상기 스프링 수용홈(26)에 안착된 스프링(901)에 의하여 탄성지지된다.A spring receiving groove 26 is inserted between the first hole 25 and the through hole 22 to insert a spring 901 to elastically support the upper cover 90 upward. At this time, the upper cover 90 is configured to operate the latch for fixing the position of the device under test 80 inserted into the insert body 21, by a spring 901 seated in the spring receiving groove 26 Is elastically supported.
상기 플로팅 부재(30)는, 상기 인서트 본체(21)에 대하여 상대이동가능하게결합되며 상기 지지부재(60)가 부착되는 것으로서, 그 플로팅 부재(30)의 하면이 인서트 본체(21)의 하면보다 아래쪽에 위치하는 제1위치(도 10 및 도 11에 도시된 위치)와, 플로팅 부재(30)의 하면이 상기 인서트 본체(21)의 하면보다 윗쪽에 위치하는 제2위치(도 4 및 도 9에 도시된 위치)사이에 위치이동될 수 있다. 구체적으로 플로팅 부재(30)는, 운반시에는 제2위치에 배치되어 다른 장치와 부딪힘에 의하여 플로팅 부재(30) 또는 지지부재(60)가 손상되는 것이 방지한다. 또한, 일단 검사장치(93) 측으로 이송된 후에는 제1위치로 이동하여 인서트 몸체(20)으로부터 돌출됨으로서, 검사장치(93)와 접촉될 수 있도록 하는 구성이다.The floating member 30 is relatively movable to the insert main body 21 and the supporting member 60 is attached, and the lower surface of the floating member 30 is smaller than the lower surface of the insert main body 21. A first position located below (a position shown in FIGS. 10 and 11) and a second position where the bottom surface of the floating member 30 is located above the bottom surface of the insert body 21 (FIGS. 4 and 9). May be moved between positions). Specifically, the floating member 30 is disposed at the second position during transportation to prevent the floating member 30 or the supporting member 60 from being damaged by colliding with another device. In addition, once moved to the inspection apparatus 93 side is moved to the first position and protrudes from the insert body 20, it is configured to be in contact with the inspection apparatus 93.
이러한 플로팅 부재(30)는 대략 중앙에 관통구멍(32)이 형성된 사각판 형태로 이루어지되, 상기 플로팅 부재(30)의 하면에는 상기 관통구멍(22)의 둘레를 따라서 다수의 돌출부(31)가 마련되어 있게 된다. 이러한 돌출부(31)는 지지부재(60)를 상기 플로팅 부재(30)에 고정시키는 기능을 수행하게 된다. 구체적으로 상기 돌출부(31)는 열융착에 의하여 단부가 면방향으로 퍼지면서 상기 지지부재(60)를 위치고정할 수 있도록 구성되어 있다.The floating member 30 is formed in the shape of a square plate having a through hole 32 formed at a center thereof, and a plurality of protrusions 31 are formed on a lower surface of the floating member 30 along the circumference of the through hole 22. It will be prepared. The protrusion 31 performs a function of fixing the support member 60 to the floating member 30. Specifically, the protrusion 31 is configured to fix the position of the support member 60 while the end is spread in the surface direction by thermal fusion.
한편, 상기 플로팅 부재(30)는, 상기 인서트 본체(21)에 착탈가능하게 결합되어 있다. 이러한 플로팅 부재(30)는, 제1위치로부터 제2위치를 향하도록 탄성바이어스시키는 탄성바이어스수단이 마련되어 있다. 이러한 탄성바이어스수단은, 상기 인서트 몸체(20)의 가장자리에 배치되는 제1구멍(25)과, 상기 인서트 몸체(20)의 제1구멍(25)과 대응되는 위치에 배치되는 제2구멍(32)과, 걸림부재(40) 및 탄성바이어스부재(50)을 포함한다.On the other hand, the floating member 30 is detachably coupled to the insert body 21. The floating member 30 is provided with elastic biasing means for elastically biasing from the first position to the second position. The elastic bias means includes a first hole 25 disposed at an edge of the insert body 20 and a second hole 32 disposed at a position corresponding to the first hole 25 of the insert body 20. ), A locking member 40 and an elastic bias member 50.
이때, 걸림부재(40)은, 하단이 상기 인서트 몸체(20)의 하단면에 걸어맞춤되는 하부걸림부(41)와, 상기 하부걸림부(41)로부터 상측으로 연장되며 제2구멍(32) 및 제1구멍(25)을 관통하되 상기 제1구멍(25)으로부터 상측으로 이격되어 있는 중앙부(42)와, 상기 중앙부(42)의 상단에 배치되며 상기 중앙부(42)보다 직경이 큰 상부걸림부(43)를 포함한다.At this time, the locking member 40, the lower engaging portion 41, the lower end is engaged with the lower surface of the insert body 20, and extends upwardly from the lower locking portion 41 and the second hole 32 And a central portion 42 penetrating through the first hole 25 and spaced upwardly from the first hole 25, and disposed at an upper end of the central portion 42 and having a diameter larger than that of the central portion 42. And a portion 43.
또한, 상기 탄성바이어스부재는, 상기 인서트 몸체(20)의 제1구멍(25)의 단턱과 상기 상부걸림부(43)의 사이에 배치되어 상기 상부걸림부(43)를 상기 인서트 몸체(20)의 하면으로부터 멀어지는 방향으로 탄성바이어스시키는 탄성바이어스부재(50)를 포함하여 구성된다. In addition, the elastic bias member is disposed between the stepped portion of the first hole 25 of the insert body 20 and the upper catching portion 43 to move the upper catching portion 43 to the insert body 20. It is configured to include an elastic biasing member 50 for elastically biasing in a direction away from the lower surface.
이러한 탄성바이어스수단은, 플로팅 부재(30)를 제2위치측으로 탄성바이어스시켜 평상시에는 상기 플로팅 부재(30)가 인서트 몸체(20)의 내부에 위치될 수 있도록 한다. 만약 플로팅 부재(30)가 하측으로 가압되면 상기 탄성바이어스부재(50)가 압축되면서 상기 플로팅 부재(30)의 하강을 허용하고, 가압이 완료되면 상기 탄성바이어스부재(50)가 탄성복원되면서 상기 플로팅 부재(30)를 제2위치로 복귀시키게 된다. The elastic bias means elastically biases the floating member 30 to the second position so that the floating member 30 can be positioned inside the insert body 20 at normal times. If the floating member 30 is pressed downward, the elastic bias member 50 is compressed to allow the floating member 30 to descend, and when the pressing is completed, the elastic bias member 50 is elastically restored to restore the floating member. The member 30 is returned to the second position.
한편, 상기 하부걸림부(41)는 후크의 형태를 가지고 있으며 상기 인서트 몸체(20)의 하면에 걸어맞춤될 수 있다. 구체적으로는 제2구멍(32)의 주변에 걸리게 되는데, 인서트 몸체(20)에 플로팅 부재(30)가 용이하게 걸릴 수 있도록 한다. 한편, 하면에 걸려 있는 하부걸림부(41)를 수동으로 인서트 몸체(20)의 하면에서 억지로 빼내면 상기 플로팅 부재(30)는 상기 인서트 몸체(20)로부터 이탈될 수 있게 되는 것이다.On the other hand, the lower engaging portion 41 has the form of a hook can be fitted to the lower surface of the insert body (20). Specifically, it is caught around the second hole 32, so that the floating member 30 can be easily caught by the insert body 20. On the other hand, by manually forcing the lower locking portion 41 hanging on the lower surface of the insert body 20 is forced to the floating member 30 can be separated from the insert body (20).
상기 지지부재(60)는, 인서트 몸체(20)의 관통구멍(22)을 가로지르도록 배치되고, 상기 관통구멍(22)을 통하여 삽입된 피검사 디바이스(80)가 상기 관통구멍(22) 내에 유지될 수 있도록 지지하면서 상기 피검사 디바이스(80)의 단자(81)와 상기 검사장치(93)의 패드를 전기적으로 연결시키는 것이다. The support member 60 is disposed to cross the through hole 22 of the insert body 20, and the device under test 80 inserted through the through hole 22 is inserted into the through hole 22. The terminal 81 of the device under test 80 and the pad of the test device 93 are electrically connected to each other while being supported so as to be maintained.
이러한 지지부재(60)는, 도전성 시트(61), 가이드시트(62), 프레임(63)을 포함하여 구성된다.The support member 60 includes the conductive sheet 61, the guide sheet 62, and the frame 63.
상기 도전성 시트(61)는, 상기 단자(81)와 대응되는 위치마다 다수의 도전성 입자가 두께방향으로 정렬배치되는 도전부(611)와, 상기 각 도전부(611)를 지지하면서 도전부(611)들을 서로 절연시키는 절연부(612)로 이루어진다.The conductive sheet 61 includes a conductive portion 611 in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal 81, and a conductive portion 611 while supporting the respective conductive portions 611. ) Is insulated from each other (612).
상기 도전부(611)는, 피검사 디바이스(80)의 단자(81)와 대응되는 위치에 배치되되 탄성물질 내에 다수의 도전성 입자가 두께방향으로 일렬 배치되는 것이다.The conductive portion 611 is disposed at a position corresponding to the terminal 81 of the device under test 80, and a plurality of conductive particles are arranged in a line in the thickness direction in the elastic material.
상기 도전부(611)를 형성하는 탄성 물질로서는 가교 구조를 갖는 내열성의 고분자 물질이 바람직하다. 이러한 가교 고분자 물질을 얻기 위해 이용할 수 있는 경화성의 고분자 물질 형성 재료로서는, 다양한 것을 이용할 수 있지만, 액상 실리콘 고무가 바람직하다. 액상 실리콘 고무는 부가형의 것이라도 축합형의 것이라도 좋지만, 부가형 액상 실리콘 고무가 바람직하다. 도전부(611)를 액상 실리콘 고무의 경화물(이하,「실리콘 고무 경화물」이라 함)에 의해 형성하는 경우에 있어서, 상기 실리콘 경화물은 그 150 ℃에 있어서의 압축 영구 왜곡이 10 % 이하인 것이 바람직하고, 보다 바람직하게는 8 % 이하, 더욱 바람직하게는 6 % 이하이다. 이 압축 영구 왜곡이 10 %를 넘는 경우에는, 얻을 수 있는 탄성 도전시트(110)를 고온 환경 하에 있어서 반복해서 사용하였을 때에는 접속용 도전부(611)(22)에 있어서의 도전성 입자의 연쇄에 흐트러짐이 생기는 결과, 소요의 도전성을 유지하는 것이 곤란해진다.As an elastic material which forms the said electroconductive part 611, the heat resistant high molecular material which has a crosslinked structure is preferable. Although various things can be used as curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance, Liquid silicone rubber is preferable. The liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable. In the case where the conductive portion 611 is formed of a cured product of liquid silicone rubber (hereinafter referred to as "silicone rubber cured product"), the silicone cured product has a compression set of 10% or less at 150 ° C. It is preferable, More preferably, it is 8% or less, More preferably, it is 6% or less. When this compressive permanent distortion exceeds 10%, when the obtained elastic conductive sheet 110 is repeatedly used in a high temperature environment, it will be disturbed by the chain | stranding of the electroconductive particle in the conductive parts 611 and 22 for connection. As a result of this, it becomes difficult to maintain the required conductivity.
상기 도전성 입자로는 자성을 나타내는 코어 입자의 표면에 고도전성 금속이 피복되어 이루어지는 것을 이용하는 것이 바람직하다. 여기서,「고도전성 금속」이라 함은, 0 ℃에 있어서의 도전율이 5 × 106 Ω/m 이상인 것을 말한다. 도전성 입자(P)를 얻기 위한 자성 코어 입자는 그 수평균 입자 직경이 3 내지 40 ㎛인 것이 바람직하다. 여기서, 자성 코어 입자의 수평균 입자 직경은 레이저 회절 산란법에 의해 측정된 것을 말한다. 자성 코어 입자를 구성하는 재료로서는 철, 니켈, 코발트, 이들 금속을 구리, 수지에 코팅한 것 등을 이용할 수 있지만, 그 포화 자화가 0.1 ㏝/㎡ 이상인 것을 바람직하게 이용할 수 있고, 보다 바람직하게는 0.3 ㏝/㎡ 이상, 특히 바람직하게는 0.5 ㏝/㎡ 이상인 것이고, 구체적으로는 철, 니켈, 코발트 또는 그들 합금을 들 수 있다.It is preferable to use what consists of a highly conductive metal coat | covered on the surface of the core particle which shows magneticity as said electroconductive particle. Here, "highly conductive metal" means that the electrical conductivity at 0 ° C is 5 × 10 6 Ω / m or more. It is preferable that the number average particle diameter of the magnetic core particle for obtaining electroconductive particle P is 3-40 micrometers. Here, the number average particle diameter of a magnetic core particle says what was measured by the laser diffraction scattering method. As the material constituting the magnetic core particles, iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used, but those whose saturation magnetization is 0.1 dl / m 2 or more can be preferably used, and more preferably. 0.3 kPa / m <2> or more, Especially preferably, it is 0.5 kPa / m <2> or more, Specifically, iron, nickel, cobalt, or those alloys are mentioned.
자성 코어 입자의 표면에 피복되는 고도전성 금속으로서는 금, 은, 로듐, 백금, 크롬 등을 이용할 수 있고, 이들 중에서는 화학적으로 안정되고 또한 높은 도전율을 갖는 점에서 금을 이용하는 것이 바람직하다.Gold, silver, rhodium, platinum, chromium and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
상기 절연부(612)는 상기 도전부(611)를 지지하면서 도전부(611) 간에 절연성을 유지시키는 기능을 수행한다. 이러한 절연부(612)는 상기 도전부(611) 내의 탄성물질과 동일한 소재가 사용될 수 있으나, 이에 한정되는 것은 아니며 탄성력이 좋으면서 절연성이 우수한 소재라면 무엇이나 사용될 수 있음은 물론이다.The insulating part 612 maintains insulation between the conductive parts 611 while supporting the conductive part 611. The insulating part 612 may be made of the same material as that of the elastic material in the conductive part 611, but is not limited thereto. Any material having good elasticity and excellent insulating property may be used.
상기 가이드시트(62)는, 상기 도전성 시트(61)의 상면측에 배치되며 상기 단자(81)와 대응되는 위치마다 관통공(621)이 형성되어 있는 것이다. 이러한 가이드시트(62)는 피검사 디바이스(80)의 단자(81)가 접촉하고자 하는 도전부(611)에 정렬되어 하강하지 못하고 다소 좌우방향으로 옵셋형태로 위치이탈하여 하강하는 경우에도 상기 단자(81)가 가이드시트(62)에 의하여 안내되어 상기 도전부(611)에 접촉할 있도록 안내하는 것이다. 이때 관통공(621)은 원형의 단면을 가지는 것도 가능하며 하측으로 갈수록 내경이 감소되는 역원뿔형태를 가지는 것도 가능하다. The guide sheet 62 is disposed on the upper surface side of the conductive sheet 61 and has a through hole 621 formed at each position corresponding to the terminal 81. The guide sheet 62 is aligned with the conductive portion 611 to which the terminal 81 of the device under test 80 is to be contacted, and thus cannot be lowered. 81 is guided by the guide sheet 62 to contact the conductive portion 611. In this case, the through hole 621 may have a circular cross section and may have a reverse cone shape in which an inner diameter decreases toward the lower side.
이러한 가이드시트(62)는, 유연성이 있는 소재라면 무엇이나 가능하나, 캡톤(kapton), FR4, FR5, XPC, 폴리이미드 중 어느 하나의 소재로 이루어지는 것이 가능하다. 이러한 가이드 시트는 접착제에 의하여 상기 도전성 시트(61)에 일체화되는 것이 좋다. 물론, 접착제에 의하여 한정되는 것은 아니며 도전성 시트(61)를 제작하는 과정에서 금형 내에 인서트하여 인서트 사출방식으로 일체화시키는 것도 가능하다.The guide sheet 62 may be any material as long as it is flexible, but may be made of any one of Kapton, FR4, FR5, XPC, and polyimide. Such a guide sheet is preferably integrated with the conductive sheet 61 by an adhesive. Of course, the present invention is not limited to the adhesive and may be integrated into the mold by inserting into the mold in the process of manufacturing the conductive sheet 61.
상기 프레임(63)은 대략 중앙에 구멍이 형성되는 사각판의 형태로 이루어지며 그 중앙에는 상기 도전성 시트(61)가 일체적으로 부착되어 있는 것이다. 이러한 프레임(63)은 상기 도전성 시트(61)의 가장자리에 일체적으로 결합되어 상기 도전성 시트(61)를 지지하는 기능을 수행한다. 상기 프레임(63)에는 상기 인서트 몸체(20)의 돌출부(31)와 대응되는 위치에 결합공(631)이 마련되어 있게 된다. The frame 63 is formed in the shape of a square plate having a hole formed in the center thereof, and the conductive sheet 61 is integrally attached to the frame 63. The frame 63 is integrally coupled to the edge of the conductive sheet 61 to support the conductive sheet 61. The frame 63 is provided with a coupling hole 631 at a position corresponding to the protrusion 31 of the insert body 20.
상기 스토퍼시트(70)는, 상기 지지부재(60)의 가장자리로서, 구체적으로는 프레임(63)의 가장자리에 배치되는 것으로서, 상기 도전부(611)의 하면과 동일한 위치까지 아래로 돌출되어 있거나 하면과 동일높이까지 아래로 돌출되어 있다. 이러한 스토퍼시트(70)는 상기 지지부재(60)보다 경질의 소재로 이루어지고, 검사장치(93)에 대하여 플로팅 부재(30)가 경사지면서 하강하는 경우 미리 검사장치(93)에 접촉하면서 수평하게 인서트가 하강할 수 있도록 안내하는 것이다. 다만, 반드시 지지부재(60)보다 경질의 소재를 사용할 필요는 없으며 동일한 소재로 사용되는 것도 가능하다.The stopper sheet 70 is an edge of the support member 60, specifically, disposed at the edge of the frame 63, and protrudes downward to the same position as the bottom surface of the conductive portion 611. It protrudes down to the same height as. The stopper sheet 70 is made of a harder material than the support member 60, and when the floating member 30 descends while being inclined with respect to the inspection apparatus 93, the stopper sheet 70 is in contact with the inspection apparatus 93 in advance and horizontally. It is to guide the insert to descend. However, it is not necessary to use a hard material than the support member 60, it is also possible to use the same material.
이러한 본 발명의 일 실시예에 따른 검사용 인서트(10)는 다음과 같은 작용효과를 가진다. Inspection insert 10 according to an embodiment of the present invention has the following effects.
먼저, 피검사 디바이스(80)를 인서트 몸체(20)의 내부에 삽입하여 상기 피검사 디바이스(80)를 지지부재(60)에 배치시킨다. 이때 피검사 디바이스(80)는 지지부재(60)의 상면에 배치되어 있는 가이드시트(62)에 의하여 위치가 정렬되면서 도전성 시트(61)의 도전부(611)에 접촉하게 된다. 이후에 상기 피검사 디바이스(80)가 수납되어 있는 인서트가 검사장치(93) 측으로 이동하게 된다. 검사장치(93) 측으로 이동한 인서트는 하강하게 되는데, 이때 인서트 몸체(20)가 가이드 소켓에 의하여 위치정렬되면서 정확한 위치에 안착된다.First, the device under test 80 is inserted into the insert body 20 to place the device under test 80 on the support member 60. At this time, the device under test 80 is in contact with the conductive portion 611 of the conductive sheet 61 while being aligned by the guide sheet 62 disposed on the upper surface of the support member 60. Thereafter, the insert in which the device under test 80 is accommodated is moved to the inspection apparatus 93 side. The insert moved to the inspection device 93 is lowered, and the insert body 20 is positioned in the correct position while being aligned by the guide socket.
인서트가 검사장치(93) 측에 탑재되면 소정의 푸셔장치(94)가 상기 피검사 디바이스(80)를 가압하게 된다. 구체적으로는 피검사 디바이스(80)를 푸셔장치가 누르게 되면, 플로팅 부재(30)는 하강하게 된다. 구체적으로 도 9에 도시된 바와 같이 탄성바이어스부재(50)에 의하여 제1위치에 배치되어 있던 플로팅 부재(30)는 도 10에 도시된 바와 같이 피검사 디바이스(80)가 하강함에 따라서 함께 하강하게 되는데, 플로팅 부재(30)가 충분하게 하강되면 상기 지지부재(60)의 하면이 검사장치(93)의 패드와 접촉하게 된다. 이후에 소정의 전기적인 검사가 이루어지게 된다. 전기적 검사가 완료된 후에는 푸셔장치가 피검사 디바이스(80)로부터 제거되고 이와 함께 탄성바이어스부재(50)가 탄성복원되면서 플로팅 부재(30) 및 피검사 디바이스(80)를 상기 검사장치(93)의 패드로부터 이격시키게 된다. When the insert is mounted on the inspection apparatus 93 side, a predetermined pusher 94 presses the device under test 80. Specifically, when the pusher device presses the device under test 80, the floating member 30 is lowered. Specifically, as shown in FIG. 9, the floating member 30 disposed in the first position by the elastic bias member 50 is lowered together as the device under test 80 descends as shown in FIG. 10. When the floating member 30 is sufficiently lowered, the bottom surface of the support member 60 comes into contact with the pad of the inspection device 93. After this, a predetermined electrical test is made. After the electrical inspection is completed, the pusher device is removed from the device under test 80 and the elastic bias member 50 is elastically restored, and the floating member 30 and the device under test 80 are removed from the inspection device 93. Away from the pads.
한편, 플로팅 부재가 상승하게 되면 인서트 몸체 내에 삽입되어 외부에 노출되지 않게 되는데, 이에 따라서 외부에 장애물이 의하여 상기 플로팅 부재가 손상되는 일이 없게 된다. On the other hand, when the floating member is raised is inserted into the insert body is not exposed to the outside, thereby preventing the floating member from being damaged by an obstacle to the outside.
한편, 상기 플로팅 부재의 교체가 요구되는 경우에는 상기 하부걸림부를 탄성변형시켜 인서트 몸체의 하면에 걸림해제함으로서 용이하게 플로팅 부재를 인서트 몸체로부터 분리시킬 수 있게 된다.On the other hand, when replacement of the floating member is required, the lower locking portion is elastically deformed to release the lower surface of the insert body so that the floating member can be easily separated from the insert body.
이러한 본 발명의 일 실시예에 따른 검사용 인서트는 다음과 같은 장점이 있다.Inspection insert according to an embodiment of the present invention has the following advantages.
종래기술과 같이 본 실시예에 따른 검사용 인서트는 기존 검사용 소켓에 해당하는 도전성 시트(지지부재)를 인서트 측에 부착시킴으로서, 유지보수가 용이하다는 장점이 있다.As in the prior art, the inspection insert according to the present embodiment has an advantage of easy maintenance by attaching a conductive sheet (support member) corresponding to the existing inspection socket to the insert side.
또한, 지지부재에는 가이드시트를 배치함으로서, 피검사 디바이스의 단자가 정확하게 도전성 시트의 도전부에 접촉될 수 있도록 한다.Further, by arranging the guide sheet on the supporting member, the terminal of the device under test can be accurately contacted with the conductive portion of the conductive sheet.
또한, 플로팅 부재가 하강하는 과정에서 수평방향으로 정밀하게 하강하지 못하는 경우에도 스토퍼시트가 도전성 시트보다 먼저 검사장치의 표면에 접촉하여 기울어지면서 플로팅 부재가 하강하는 것을 최소화할 수 있게 한다.In addition, even when the floating member does not descend accurately in the horizontal direction during the descending process, the stopper sheet is inclined to contact the surface of the inspection apparatus before the conductive sheet, thereby minimizing the falling of the floating member.
또한, 지지부재는 열융착에 의하여 인서트 몸체에 부착시킴으로서 조립의 용이성을 극대화한다. 즉, 볼트 체결보다는 부착의 용이성을 달성할 수 있다.In addition, the support member is attached to the insert body by heat fusion to maximize the ease of assembly. That is, ease of attachment can be achieved rather than bolting.
또한, 플로팅 부재는 실제 검사시에만 인서트 몸체로부터 외부로 노출되고 그 외, 즉 이동과정에서는 인서트 몸체 내에 삽입되어 있음에 따라서 플로팅 부재의 손상 및 외부의 이물질이 도전성 시트의 하면에 뭍게 되는 것을 최소화할 수 있다는 장점이 있다. In addition, since the floating member is exposed to the outside from the insert body only during the actual inspection and is inserted into the insert body during the other operation, that is, the floating member minimizes the damage of the floating member and external foreign matters on the lower surface of the conductive sheet. There is an advantage that it can.
또한, 플로팅 부재는 후크형태로 인서트 몸체에 체결됨으로서, 결합의 용이성을 달성할 수 있다는 장점이 있다.In addition, the floating member is fastened to the insert body in the form of a hook, there is an advantage that can be achieved easy coupling.
이러한 본 발명의 일 실시예에 따른 검사용 인서트는 다음과 같이 변형되는 것도 가능하다.The test insert according to an embodiment of the present invention may be modified as follows.
상술한 실시예에서는 지지부재에 도전성 시트를 마련하는 것을 예시하였으나, 도 12에 도시된 바와 같이 도전체를 배치하는 것도 가능하다. In the above-described embodiment, the conductive sheet is provided on the support member, but as shown in FIG. 12, the conductor may be disposed.
즉, 상기 단자와 대응되는 위치마다 관통공(611a')이 형성되는 하우징(611')과, 상기 관통공(611a') 내에 삽입되며 반도체 디바이스의 단자와 접촉하는 핀(612')과, 상기 핀(612')에 의하여 가해지는 가압력을 흡수하는 스프링(613')을 포함하는 도전체(61')가 지지부재 대신 사용되는 것도 가능함은 물론이다.That is, the housing 611 'in which the through hole 611a' is formed at each position corresponding to the terminal, the pin 612 'inserted into the through hole 611a' and in contact with the terminal of the semiconductor device; It is of course possible that a conductor 61 'including a spring 613' that absorbs the pressing force exerted by the pin 612 'may be used instead of the support member.
본 발명에서는 다양한 실시예를 들면서 검사용 인서트를 예시하고 있으나, 이에 한정되는 것은 아니며 본 발명의 권리범위에 의하여 합리적으로 해석되는 범위라면 확장되어 해석될 수 있음은 당연하다.In the present invention, the inspection insert is exemplified by various examples. However, the present invention is not limited thereto, and it can be extended and interpreted as long as it is reasonably interpreted according to the scope of the present invention.

Claims (13)

  1. 다수의 단자가 마련된 피검사 디바이스를 수납한 상태로 외부의 접속체 측으로 이동하여 상기 단자를 상기 접속체와 접촉가능하게 하는 인서트에 있어서,In the insert which moves to the external connection side in the state which accommodated the device under test in which the many terminal was provided, The insert which makes contact with the said connection body WHEREIN:
    상기 피검사 디바이스가 삽입될 수 있는 관통구멍이 중앙 부분에 형성되어 있는 인서트 몸체; 및An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof; And
    상기 인서트 몸체의 관통구멍을 가로지르도록 배치되고, 상기 관통구멍을 통하여 삽입된 피검사 디바이스가 상기 관통구멍 내에 유지될 수 있도록 지지하는 지지부재;를 포함하며,And a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
    상기 지지부재는,The support member,
    상기 단자와 대응되는 위치마다 다수의 도전성 입자가 두께방향으로 정렬배치되는 도전부와, 상기 각 도전부를 지지하는 절연부로 이루어지는 도전성 시트; 및A conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal, and an insulating portion for supporting each of the conductive portions; And
    상기 도전성 시트의 상면측에 배치되며 상기 단자와 대응되는 위치마다 관통공이 형성되어 있는 가이드시트를 포함하는 것을 특징으로 하는 검사용 인서트.And a guide sheet disposed on an upper surface side of the conductive sheet and having a through hole formed at a position corresponding to the terminal.
  2. 제1항에 있어서,The method of claim 1,
    가이드 시트는, 캡톤(kapton), FR4, FR5, XPC, 폴리이미드 중 어느 하나의 소재로 이루어지는 것을 특징으로 하는 검사용 인서트.The guide sheet is made of any one of Kapton, FR4, FR5, XPC, and polyimide.
  3. 제1항에 있어서,The method of claim 1,
    상기 가이드시트는, 상기 도전성 시트에 일체화되어 부착되어 있는 것을 특징으로 하는 검사용 인서트.The guide sheet is integrally attached to the conductive sheet and attached to the inspection insert.
  4. 제1항에 있어서,The method of claim 1,
    상기 지지부재는 가장자리가 상기 인서트몸체의 하면에 밀착되어 있으며, 상기 인서트몸체에는 하측으로 돌출되는 다수의 돌출부가 배치되고,The support member has an edge is in close contact with the lower surface of the insert body, the insert body is provided with a plurality of protrusions protruding downward,
    상기 지지부재에는 상기 돌출부와 대응되는 위치마다 결합공이 마련되어 있으며,The support member is provided with a coupling hole for each position corresponding to the protrusion,
    상기 돌출부는 열융착에 의하여 상기 지지부재를 인서트몸체의 하면에 부착시키는 것을 특징으로 하는 검사용 인서트.The protruding portion is an inspection insert, characterized in that for attaching the support member to the lower surface of the insert body by thermal fusion.
  5. 제1항에 있어서,The method of claim 1,
    상기 지지부재의 가장자리에는 상기 도전부의 하면과 동일높이에 있거나, 상기 도전부의 하면보다 하측으로 돌출되어 있으며, 상기 지지부재보다 경질의 소재로 이루어지는 스토퍼시트가 배치되는 것을 특징으로 하는 검사용 인서트.An insert for inspection, characterized in that at the edge of the support member is disposed at the same height as the lower surface of the conductive portion or protrudes below the lower surface of the conductive portion, and a stopper sheet made of a harder material than the supporting member.
  6. 제1항에 있어서,The method of claim 1,
    상기 인서트 몸체는,The insert body,
    외부의 접속체에 마련되어 있는 소켓가이드에 결합되는 인서트 본체; 및An insert body coupled to a socket guide provided on an external connection body; And
    상기 인서트 본체에 대하여 상대이동가능하게 결합되며 상기 지지부재가 부착되는 플로팅 부재를 포함하여 구성되는 것을 특징으로 하는 검사용 인서트.Insert for inspection, characterized in that it comprises a floating member coupled to the insert body relative to the insert body is attached to the support member.
  7. 제6항에 있어서,The method of claim 6,
    상기 플로팅 부재는, 플로팅 부재의 하면이 상기 인서트 본체의 하면보다 아래쪽에 위치하는 제1위치와, 플로팅 부재의 하면이 상기 인서트 본체의 하면보다 윗쪽에 위치하는 제2위치사이에서 위치이동가능한 것을 특징으로 하는 검사용 인서트.The floating member may be moved between a first position where a bottom surface of the floating member is positioned below the bottom surface of the insert body and a second position where the bottom surface of the floating member is positioned above the bottom surface of the insert body. Inspection inserts.
  8. 제7항에 있어서,The method of claim 7, wherein
    상기 플로팅 부재는, 상기 인서트 본체에 착탈가능하게 결합되는 것을 특징으로 하는 검사용 인서트.The floating member is an inspection insert, characterized in that detachably coupled to the insert body.
  9. 제8항에 있어서,The method of claim 8,
    상기 플로팅 부재에는, 상기 플로팅 부재는 제1위치로부터 제2위치를 향하도록 탄성바이어스시키는 탄성바이어스수단이 마련되어 있는 것을 특징으로 하는 검사용 인서트.And the elastic member is provided with the floating member so as to elastically bias the floating member from the first position to the second position.
  10. 제9항에 있어서,The method of claim 9,
    상기 탄성바이어스수단은,The elastic bias means,
    상기 인서트 몸체의 가장자리에 배치되는 제1구멍;A first hole disposed at an edge of the insert body;
    상기 인서트 몸체의 제1구멍과 대응되는 위치에 배치되는 제2구멍;A second hole disposed at a position corresponding to the first hole of the insert body;
    하단이 상기 인서트 몸체의 하단면에 걸어맞춤되는 하부걸림부와, 상기 하부걸림부로부터 상측으로 연장되며 제2구멍 및 제1구멍을 관통하되 상기 제1구멍으로부터 상측으로 이격되어 있는 중앙부와, 상기 중앙부의 상단에 배치되며 상기 중앙부보다 직경이 큰 상부걸림부를 포함하는 걸림부재; 및A lower locking portion having a lower end engaged with the lower surface of the insert body, a central portion extending upwardly from the lower locking portion and penetrating through the second hole and the first hole and spaced upwardly from the first hole; A catching member disposed at an upper end of a central portion and including an upper catching portion having a larger diameter than the central portion; And
    상기 인서트 몸체의 제1구멍의 주변과 상기 상부걸림부의 사이에 배치되어 상기 상부걸림부를 상기 인서트 몸체의 하면으로부터 멀어지는 방향으로 탄성바이어스시키는 탄성바이어스부재;를 포함하는 것을 특징으로 하는 검사용 인서트.And an elastic biasing member disposed between the periphery of the first hole of the insert body and the upper catching portion to elastically bias the upper catching portion away from the lower surface of the insert body.
  11. 제10항에 있어서,The method of claim 10,
    상기 하부걸림부는, 후크의 형태로 상기 인서트 몸체의 하단면에 걸어맞춤되는 것을 특징으로 하는 검사용 인서트.The lower locking portion is inserted into the inspection, characterized in that engaging with the bottom surface of the insert body in the form of a hook.
  12. 제1항에 있어서,The method of claim 1,
    상기 지지부재에는,The support member,
    상기 도전성 시트의 가장자리에 일체적으로 결합되며 상기 도전성 시트의 가장자리로부터 연장되어 상기 인서트 몸체의 하면과 대면하는 프레임을 포함하는 것을 특징으로 하는 검사용 인서트.And a frame integrally coupled to an edge of the conductive sheet and extending from an edge of the conductive sheet to face the bottom surface of the insert body.
  13. 다수의 단자가 마련된 피검사 디바이스를 수납한 상태로 검사장치 측으로 이동하여 상기 단자를 상기 검사장치의 패드와 접촉가능하게 하는 인서트에 있어서,An insert for moving the terminal to the inspection apparatus in a state of receiving a device under test with a plurality of terminals provided therein, wherein the insert makes contact with a pad of the inspection apparatus.
    상기 피검사 디바이스가 삽입될 수 있는 관통구멍이 중앙 부분에 형성되어 있는 인서트 몸체; 및An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof; And
    상기 인서트 몸체의 관통구멍을 가로지르도록 배치되고, 상기 관통구멍을 통하여 삽입된 피검사 디바이스가 상기 관통구멍 내에 유지될 수 있도록 지지하는 지지부재;를 포함하며,And a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
    상기 지지부재는,The support member,
    상기 단자와 대응되는 위치마다 관통공이 형성되는 하우징과, 상기 관통공 내에 삽입되며 피검사 디바이스의 단자와 접촉하는 핀과, 상기 핀에 의하여 가해지는 가압력을 흡수하는 스프링을 포함하는 도전체; 및A conductor including a housing having a through hole formed at each position corresponding to the terminal, a pin inserted in the through hole and in contact with a terminal of the device under test, and a spring absorbing a pressing force applied by the pin; And
    상기 도전성 시트의 상면측에 배치되며 상기 단자와 대응되는 위치마다 관통공이 형성되어 있는 가이드시트를 포함하는 것을 특징으로 하는 검사용 인서트.And a guide sheet disposed on an upper surface side of the conductive sheet and having a through hole formed at a position corresponding to the terminal.
PCT/KR2014/005278 2013-06-18 2014-06-17 Insert for inspection WO2014204161A2 (en)

Applications Claiming Priority (2)

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KR10-2013-0069975 2013-06-18
KR20130069975A KR101490498B1 (en) 2013-06-18 2013-06-18 Insert for test

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KR20160118796A (en) * 2015-04-03 2016-10-12 리노공업주식회사 A test socket
KR101928466B1 (en) * 2016-10-14 2018-12-12 주식회사 아이에스시 Test socket
KR102192919B1 (en) * 2019-11-19 2020-12-18 (주)티에스이 Test socket device and method for manufacturing the same
KR102192764B1 (en) * 2019-11-19 2020-12-18 (주)티에스이 Test socket device
KR102089653B1 (en) * 2019-12-30 2020-03-16 신종천 Test socket assembly
KR102144806B1 (en) * 2020-04-24 2020-08-14 티씨에스 주식회사 Socket for electronic component testing apparatus
KR102319388B1 (en) * 2020-07-16 2021-11-01 주식회사 아이에스시 Connecting apparatus for electrical test
KR102342480B1 (en) * 2020-08-21 2021-12-23 (주)티에스이 Test socket and test apparatus having the same
KR102703562B1 (en) * 2022-04-05 2024-09-05 주식회사 오킨스전자 Insert for testing semiconductor device

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KR101490498B1 (en) 2015-02-05
TW201512677A (en) 2015-04-01

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