KR101490498B1 - Insert for test - Google Patents

Abstract

The present invention relates to an insert for inspecting, more specifically, an insert which moves to an external connection body in a state in which a device to be inspected provided with a plurality of terminals is housed and makes the terminal come into contact with the connection body, An insert body in which a through hole through which a device to be inspected can be inserted is formed at a central portion thereof; And a support member which is disposed to cross the through hole of the insert body and supports the device to be inspected inserted through the through hole so as to be held in the through hole,
Wherein the support member comprises: a conductive sheet comprising a conductive portion in which a plurality of conductive particles are arranged in a thickness direction for each position corresponding to the terminal; and an insulating portion for supporting the conductive portions; And a guide sheet disposed on an upper surface side of the conductive sheet and having through holes formed at positions corresponding to the terminals.

Description

Insert for test

The present invention relates to an inspection insert, and more particularly, to an inspection insert capable of easily performing electrical inspection with a terminal of an inspection target device.

In general, a semiconductor device manufactured by a semiconductor device manufacturing process is subjected to a reliability test such as an electrical characteristic test and a function test before being shipped. Here, the manufactured semiconductor device is transferred to a test apparatus, and an insert is mainly used as an apparatus for sorting tested semiconductor devices.

The handler conveys a plurality of semiconductor devices into the test apparatus, and makes each semiconductor device electrically contact with the test head to perform the test. Then, the tested semiconductor devices are taken out from the test apparatus and classified according to the test results. At this time, the handler conveys the test tray, in which a plurality of inserts accommodating a plurality of semiconductor devices are arranged, to the test apparatus so that the test process can be performed.

The prior art for such inserts is disclosed in Figs. 1 and 2. Fig. A test socket 110 such as a high-speed board requiring electrical connection, a test socket 120 disposed on the test device 110 and detachably coupled to the test device 110, An insert 100 which is positioned in the inspection apparatus by a socket guide 150 disposed in the inspection apparatus while being transported to the inspection apparatus 110 with the inspected device 140 inserted therein, And a pusher device 130 for pressing the inspecting device 140 inserted in the inserting device.

At this time, the inspecting socket 120 disposed in the inspecting apparatus is always mounted on the inspecting apparatus 110, and is electrically connected to the inspecting device 140 disposed inside the insert after the insert 100 is transported , The inspection of the device 140 to be inspected can be performed.

Such conventional techniques have the following problems in inspections using inspecting inserts.

In the prior art, the insert mainly carries the function of carrying the device to be inspected, and the function of connecting the inspected device and the inspected device to each other is carried out by the inspecting socket. At this time, As shown in Fig. When the inspection socket is disposed on the inspection apparatus side, there is a problem that it takes a long time to perform maintenance of the equipment. That is, inserts must be checked as a whole in case of an insert problem, and in the case of a problem of a test apparatus, there is a problem that a lower portion including a test socket must be checked as a whole to be examined.

Also, since the inserted insides can be positively aligned by the socket guide, there is no configuration in which the inspecting device inserted in the insert can be reliably aligned in the inspecting socket, It may not be precisely aligned with the receptacle for the socket.

Korean Patent No. 659153

SUMMARY OF THE INVENTION It is an object of the present invention to provide an inspection insert which is easy to maintain and easy to align a device to be inspected.

According to an aspect of the present invention, there is provided an insert for inspecting an inspecting device provided with a plurality of terminals and moving the inspecting device to an external connecting body so that the terminal can be brought into contact with the connecting body,

An insert body having a through hole through which the device to be inspected can be inserted; And

And a support member which is disposed to cross the through hole of the insert body and supports the device to be inspected inserted through the through hole so as to be held in the through hole,

Wherein the support member comprises:

A conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned and arranged in a thickness direction at positions corresponding to the terminals, and an insulating portion for supporting the conductive portions; And

And a guide sheet disposed on the upper surface side of the conductive sheet and having through holes formed at positions corresponding to the terminals.

In the inspection insert,

The guide sheet may be made of any one of capton, FR4, FR5, XPC and polyimide.

In the inspection insert,

The guide sheet may be integrally attached to the conductive sheet.

In the inspection insert,

Wherein the support member is in close contact with a lower surface of the insert body at an edge thereof, and a plurality of protrusions protruding downward are disposed in the insert body,

The supporting member is provided with a coupling hole at each position corresponding to the projection,

The protruding portion can attach the support member to the lower surface of the insert body by thermal fusion.

In the inspection insert,

A stopper sheet made of a harder material than the support member may be disposed on the support member so as to protrude below the lower surface of the conductive member at the edge of the support member.

In the inspection insert,

Wherein the insert body comprises: an insert body coupled to a socket guide provided on an external contact body; And

And a floating member coupled to the insert body and to which the support member is attached.

In the inspection insert,

The floating member may be movable between a first position in which the lower surface protrudes from the lower surface of the insert body and a second position in which the lower surface is positioned higher than a lower surface of the insert body.

In the inspection insert,

The floating member may be detachably coupled to the insert body.

In the inspection insert,

The floating member may be provided with elastic bias means for biasing the floating member from the first position toward the second position.

In the inspection insert,

Wherein the elastic bias means comprises:

A first hole disposed at an edge of the insert body;

A second hole disposed at a position corresponding to the first hole of the insert body;

A center portion extending upward from the lower engaging portion and passing through the second hole and the first hole and spaced upward from the first hole, An engaging member disposed at an upper end of the central portion and including an upper engaging portion having a larger diameter than the central portion; And

And an elastic biasing member disposed between the periphery of the first hole of the insert body and the upper engaging portion and elastically biasing the upper engaging portion in a direction away from the lower surface of the insert body.

In the inspection insert,

The lower latching portion can be engaged with the lower end surface of the insert body in the form of a hook.

In the inspection insert,

In the support member,

And a frame integrally coupled to an edge of the conductive sheet and extending from an edge of the conductive sheet to face the lower surface of the insert body.

According to an aspect of the present invention,

An insert which moves to an inspection apparatus side in a state in which an inspected device provided with a plurality of terminals is housed and makes the terminal contactable with a pad of the inspection apparatus,

An insert body having a through hole through which the device to be inspected can be inserted; And

And a support member which is disposed to cross the through hole of the insert body and supports the device to be inspected inserted through the through hole so as to be held in the through hole,

Wherein the support member comprises:

A conductive member inserted into the through hole and including a pin contacting the terminal of the device to be inspected and a spring for absorbing a pressing force applied by the pin; And

And a guide sheet disposed on the upper surface of the conductive sheet and having through holes formed at positions corresponding to the terminals.

The inspection insert according to the present invention is advantageous in that it is easy to maintain and maintain the inspecting device by disposing a supporting member for electrically connecting the device to be inspected and the inspecting device on the insert side while supporting the device to be inspected.

The inspection insert according to the present invention is advantageous in that it is possible to arrange a device to be inspected easily by disposing a guide sheet for guiding the position of the device to be inspected on the support member.

1 is an exploded perspective view showing a conventional inspection insert;
Figure 2 is a partial view of Figure 1;
3 is an exploded perspective view of a testing apparatus including an inspection insert according to an embodiment of the present invention;
Fig. 4 is a perspective view of the inspecting insert viewed from above in the inspection apparatus of Fig. 3; Fig.
Fig. 5 is a perspective view of the inserting inspecting apparatus shown in Fig. 3 as viewed from below. Fig.
6 is a perspective view from above of the floating member in the inspection apparatus of FIG. 3;
Fig. 7 is a perspective view of the floating member viewed from below in the inspection apparatus of Fig. 3; Fig.
8 is a cross-sectional view taken along line VIII-VIII of FIG.
Figure 9 is a cross-sectional view of the inspection insert of Figure 4;
Figures 10 and 11 are operational views of the inserting insert of Figure 9;
12 is a cross-sectional view of a test insert according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an inspection insert according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The inspecting insert 10 of the present invention includes an external contact member (referred to as a " pad of the inspection apparatus " in the present invention, but is limited thereto) in a state of accommodating the inspecting device 80 provided with the plurality of terminals 81 And the terminal 81 is connected to the connection body. The insert is not provided with a separate inspection socket on the connection body side, Is an insert for performing a function as a test socket.

The inspecting insert 10 of the present invention includes an insert body 20 and a support member 60.

The insert body 20 includes an insert body 21 and a floating member 30 in which a through hole 22 through which the device under test 80 can be inserted is formed at a central portion.

The insert main body 21 has a substantially rectangular parallelepiped shape and a through hole 22 having a corresponding size of the device under test 80 is formed at a central portion thereof. In addition, the insert body 21 is formed with the guide hole 23 symmetrically with the through hole 22 therebetween. The guide hole 23 has a size such that the guide protrusion 921 of the socket guide 92 disposed on the inspection apparatus 93 side can be inserted.

On the lower surface of the insert body 21, there is provided an accommodating groove 24 which is punched upward and on which the floating member 30 can be seated. A first hole 25 communicating with the upper surface of the receiving groove 24 and the upper surface of the insert body 21 is disposed between the guide hole 23 and the through hole 22. [ A locking member 40 described later can be inserted into the first hole 25.

The upper portion of the first hole 25 has a large inner diameter, and the lower portion of the first hole 25 has a smaller inner diameter than the upper portion, and a step is formed at the center of which the diameter is changed.

A spring receiving groove 26 into which a spring 901 for elastically supporting the upper cover 90 upward is inserted is provided between the first hole 25 and the through hole 22. [ The upper cover 90 is configured to actuate a latch for fixing the position of the device under test 80 inserted into the insert main body 21 by a spring 901 seated in the spring receiving groove 26 And is elastically supported.

The floating member 30 is attached to the insert main body 21 and is attached with the support member 60. The bottom surface of the floating member 30 protrudes downward from the lower surface of the insert main body 21, Between the first position (the position shown in Figs. 10 and 11) and the second position (the position shown in Figs. 4 and 9) where the lower surface of the floating member 30 is positioned higher than the lower surface of the insert body 21 As shown in FIG. Specifically, the floating member 30 is disposed at the second position during transportation to prevent the floating member 30 or the supporting member 60 from being damaged by collision with another device. After being transferred to the inspection apparatus 93 side, it is moved to the first position and protruded from the insert body 20, so that it can be brought into contact with the inspection apparatus 93.

The floating member 30 is formed in the shape of a rectangular plate having a through hole 32 at the center thereof and a plurality of protruding portions 31 are formed on the bottom surface of the floating member 30 along the circumference of the through hole 22 . The protrusion 31 functions to fix the support member 60 to the floating member 30. As shown in FIG. Specifically, the protruding portion 31 is configured such that the end portion thereof spreads in the surface direction by heat fusion so that the support member 60 can be fixed in position.

On the other hand, the floating member 30 is detachably coupled to the insert main body 21. The floating member 30 is provided with an elastic bias means for biasing the first floating member 30 toward the second position from the first position. The elastic biasing means includes a first hole 25 disposed at an edge of the insert body 20 and a second hole 32 disposed at a position corresponding to the first hole 25 of the insert body 20 , An engaging member (40), and an elastic bias member (50).

The engaging member 40 has a lower engaging portion 41 whose lower end is engaged with the lower end surface of the insert body 20 and a lower portion which extends upward from the lower engaging portion 41, And a central hole 42 which extends through the first hole 25 and is spaced upward from the first hole 25 and an upper hole 42 disposed at the upper end of the central hole 42 and having a larger diameter than the central hole 42, (43).

The elastic biasing member is disposed between the step of the first hole 25 of the insert body 20 and the upper latching portion 43 so that the upper latching portion 43 is inserted into the insert body 20, And an elastic bias member 50 for biasing the elastic bias member 50 in a direction away from the lower surface.

The elastic biasing means elastically biases the floating member 30 toward the second position so that the floating member 30 can be positioned inside the insert body 20 at normal times. If the floating member 30 is pressed downward, the elastic biasing member 50 is compressed to allow the floating member 30 to descend. When the pressing force is completed, the elastic biasing member 50 is elastically restored, Thereby returning the member 30 to the second position.

Meanwhile, the lower latching part 41 has a hook shape and can be engaged with the lower surface of the insert body 20. Specifically, around the second hole 32, so that the floating member 30 can be easily engaged with the insert body 20. [ Meanwhile, if the lower engaging portion 41 is manually pulled out from the lower surface of the insert body 20, the floating member 30 can be detached from the insert body 20.

The support member 60 is disposed to cross the through hole 22 of the insert body 20 and the inspecting device 80 inserted through the through hole 22 is inserted into the through hole 22 So that the terminal 81 of the device under test 80 is electrically connected to the pad of the testing device 93. [

The support member 60 includes a conductive sheet 61, a guide sheet 62, and a frame 63.

The conductive sheet 61 includes a conductive part 611 in which a plurality of conductive particles are aligned and arranged in the thickness direction at positions corresponding to the terminals 81 and conductive parts 611 (Not shown).

The conductive part 611 is disposed at a position corresponding to the terminal 81 of the device under test 80, and a plurality of conductive particles are arranged in a line in the thickness direction in the elastic material.

As the elastic material for forming the conductive part 611, a heat-resistant polymer material having a crosslinked structure is preferable. As the curable polymeric substance-forming material that can be used to obtain such a crosslinked polymeric substance, various ones can be used, but liquid silicone rubber is preferable. The liquid silicone rubber may be of an addition type or a condensation type, but an addition type liquid silicone rubber is preferable. In the case where the conductive portion 611 is formed of a cured liquid silicone rubber (hereinafter referred to as " silicone rubber cured product "), the silicone cured product has a compression set of 10% , More preferably not more than 8%, further preferably not more than 6%. When this compression set is more than 10%, when the obtained elastic conductive sheet 110 is repeatedly used under a high-temperature environment, the chain of the conductive particles in the connecting conductive parts 611 and 22 is disturbed As a result, it becomes difficult to maintain required conductivity.

As the conductive particles, it is preferable to use a material in which a surface of a core particle exhibiting magnetism is coated with a high-conductive metal. Here, the term "highly conductive metal" means that the conductivity at 0 ° C is 5 × 10 ⁶ Ω / m or more. The magnetic core particles for obtaining the conductive particles (P) preferably have a number average particle diameter of 3 to 40 mu m. Here, the number average particle diameter of the magnetic core particles refers to that measured by a laser diffraction scattering method. As the material constituting the magnetic core particles, iron, nickel, cobalt, those obtained by coating these metals with copper or resin, and the like can be used, but those having a saturation magnetization of 0.1 ㏝ / m 2 or more can be preferably used, M 2 / m 2 or more, particularly preferably 0.5 m 2 / m 2 or more, and specifically iron, nickel, cobalt or an alloy thereof.

Gold, silver, rhodium, platinum, chromium and the like can be used as the high-conductive metal to be coated on the surface of the magnetic core particles. Among them, gold is preferably used because it is chemically stable and has high conductivity.

The insulating portion 612 supports the conductive portion 611 and maintains the insulating property between the conductive portions 611. The insulating portion 612 may be made of the same material as the elastic material in the conductive portion 611, but it is not limited thereto and any material having good elasticity and excellent insulation properties can be used.

The guide sheet 62 is provided on the upper surface side of the conductive sheet 61 and has a through hole 621 formed at a position corresponding to the terminal 81. This guide sheet 62 can not be lowered even when the terminal 81 of the device under test 80 is aligned with the conductive part 611 to be contacted and is displaced in the offset direction in the lateral direction. 81 are guided by the guide sheet 62 so as to be brought into contact with the conductive part 611. At this time, the through hole 621 may have a circular cross-section, or may have an inverted conical shape whose inner diameter decreases toward the lower side.

This guide sheet 62 can be any material having flexibility, but it can be made of any one of capton, FR4, FR5, XPC and polyimide. Such guide sheet is preferably integrated with the conductive sheet 61 by an adhesive. Of course, the conductive sheet 61 is not limited to an adhesive but may be inserted into a mold and integrated with an insert injection method.

The frame 63 is formed in the shape of a rectangular plate having a hole at a substantially central portion thereof, and the conductive sheet 61 is integrally attached to the center thereof. The frame 63 is integrally coupled to the edge of the conductive sheet 61 to support the conductive sheet 61. The frame 63 is provided with a coupling hole 631 at a position corresponding to the protruding portion 31 of the insert body 20.

The stopper sheet 70 is disposed at the edge of the support member 60 and specifically at the edge of the frame 63 and protrudes downward from the lower surface of the conductive portion 611. The stopper sheet 70 is made of a harder material than the support member 60. When the floating member 30 descends while being inclined with respect to the inspection apparatus 93, So that the insert can descend. However, it is not always necessary to use a harder material than the support member 60, and the same material can be used.

The inspection insert 10 according to an embodiment of the present invention has the following operational effects.

First, a device 80 to be inspected is inserted into the insert body 20, and the device under test 80 is placed on the support member 60. The inspected device 80 is brought into contact with the conductive portion 611 of the conductive sheet 61 while being aligned by the guide sheet 62 disposed on the upper surface of the supporting member 60. [ Thereafter, the insert in which the device under test 80 is housed is moved to the inspection apparatus 93 side. The insert moved to the inspection apparatus 93 is lowered. At this time, the insert body 20 is aligned in the correct position while being aligned by the guide socket.

When the insert is mounted on the inspection device 93 side, a predetermined pusher device 94 presses the device 80 to be inspected. Specifically, when the pushing device pushes the device under test 80, the floating member 30 is lowered. Specifically, as shown in Fig. 9, the floating member 30, which is disposed at the first position by the elastic bias member 50, is lowered together with the device 80 to be inspected as shown in Fig. 10 When the floating member 30 is sufficiently lowered, the lower surface of the supporting member 60 comes into contact with the pad of the inspection apparatus 93. Thereafter, a predetermined electrical inspection is performed. After the electrical inspection is completed, the pusher device is removed from the device under test 80 and the elastic biasing member 50 is resiliently restored, thereby moving the floating member 30 and the device under test 80 to the inspection device 93 Spaced from the pad.

On the other hand, when the floating member is lifted, the floating member is inserted into the insert body and is not exposed to the outside, thereby preventing the floating member from being damaged by an external obstacle.

Meanwhile, when the floating member is required to be replaced, the lower engaging portion is elastically deformed to release the floating member from the insert body by releasing the engagement with the lower surface of the insert body.

The inspection insert according to an embodiment of the present invention has the following advantages.

As in the prior art, the inspecting insert according to the present embodiment is advantageous in that the conductive sheet (support member) corresponding to the existing inspecting socket is attached to the insert side, thereby facilitating maintenance.

In addition, the guide sheet is disposed on the support member so that the terminal of the device to be inspected can accurately contact the conductive portion of the conductive sheet.

In addition, even when the floating member can not be accurately lowered in the horizontal direction in the process of descending, it is possible to minimize the descent of the floating member due to tilting of the stopper sheet against the surface of the inspection apparatus before the conductive sheet.

In addition, the support member is attached to the insert body by thermal fusion, thereby maximizing the ease of assembly. That is, ease of attachment can be achieved rather than bolt tightening.

In addition, since the floating member is exposed to the outside from the insert body only during the actual inspection and is inserted into the insert body in other processes, that is, in the moving process, damage to the floating member and minimization of foreign matter on the bottom surface of the conductive sheet There is an advantage that it can be.

Further, the floating member is fastened to the insert body in the form of a hook, so that the ease of engagement can be achieved.

The inspection insert according to an embodiment of the present invention may be modified as follows.

In the above-described embodiment, the conductive member is provided on the supporting member. However, it is also possible to arrange the conductive member as shown in Fig.

That is, a housing 611 'in which a through hole 611a' is formed at a position corresponding to the terminal, a pin 612 'inserted in the through hole 611a' and in contact with a terminal of the semiconductor device, It goes without saying that the conductor 61 'including the spring 613' for absorbing the pressing force applied by the pin 612 'may be used instead of the supporting member.

While the present invention has been described by way of various embodiments, it is to be understood that the scope of the present invention is not limited thereto and may be extended as far as it is reasonably construed in accordance with the scope of the present invention.

10 ... insert 20 ... insert body
21 ... insert body 22 ... through hole
23 ... guide hole 24 ... accommodating groove
25 ... first hole 26 ... spring receiving groove
30 ... Floating member 31 ... Projection
32 ... second hole 33 ... through hole
40 ... engaging member 41 ... lower engaging portion
42 ... center portion 43 ... upper fastening portion
50 ... elastic bias member 60 ... supporting member
61 ... conductive sheet 611 ... conductive part
612 ... insulation part 62 ... guide seat
621 ... through ball 63 ... frame
631 ... engagement hole 70 ... stopper seat
80 ... Inspection device

Claims (13)

An insert which moves to an external connection body in a state in which a device to be inspected provided with a plurality of terminals is housed and makes the terminals come into contact with the connection body,
An insert body having a through hole through which the device to be inspected can be inserted; And
And a support member which is disposed to cross the through hole of the insert body and supports the device to be inspected inserted through the through hole so as to be held in the through hole,
Wherein the support member comprises:
A conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned and arranged in a thickness direction at positions corresponding to the terminals, and an insulating portion for supporting the conductive portions; And
And a guide sheet disposed on an upper surface side of the conductive sheet and having through holes formed at positions corresponding to the terminals,
Wherein an upper surface of the conductive portion is positioned lower than an upper surface of the guide sheet, and a terminal of the device to be inspected is inserted into the through hole to contact the upper surface of the conductive portion. The method according to claim 1,
Wherein the guide sheet is made of a material selected from the group consisting of capton, FR4, FR5, XPC and polyimide. The method according to claim 1,
Wherein the guide sheet is integrally attached to the conductive sheet. The method according to claim 1,
Wherein the support member is in close contact with a lower surface of the insert body at an edge thereof, and a plurality of protrusions protruding downward are disposed in the insert body,
The supporting member is provided with a coupling hole at each position corresponding to the projection,
Wherein the protrusions attach the support member to the lower surface of the insert body by thermal fusion. The method according to claim 1,
Wherein a stopper sheet made of a hard material is disposed at the edge of the support member so as to protrude below the lower surface of the conductive portion. The method according to claim 1,
The insert body
An insert body coupled to a socket guide provided on an external contact body; And
And a floating member coupled to the insert body and to which the support member is attached. The method according to claim 6,
Wherein the floating member is positionally movable between a first position where a lower surface of the floating member protrudes from a lower surface of the insert body and a second position where a lower surface of the floating member is positioned higher than a lower surface of the insert body. For inserts. 8. The method of claim 7,
Wherein the floating member is detachably coupled to the insert body. 9. The method of claim 8,
Wherein the floating member is provided with elastic bias means for biasing the first member toward the second position from the first position. 10. The method of claim 9,
Wherein the elastic bias means comprises:
A first hole disposed at an edge of the insert body;
A second hole disposed at a position corresponding to the first hole of the insert body;
A center portion extending upward from the lower engaging portion and passing through the second hole and the first hole and spaced upward from the first hole, An engaging member disposed at an upper end of the central portion and including an upper engaging portion having a larger diameter than the central portion; And
And an elastic biasing member disposed between the periphery of the first hole of the insert body and the upper engaging portion and elastically biasing the upper engaging portion in a direction away from the lower surface of the insert body. 11. The method of claim 10,
Wherein the lower latching portion is engaged with the lower end surface of the insert body in the form of a hook. The method according to claim 1,
In the support member,
And a frame integrally joined to an edge of the conductive sheet and extending from an edge of the conductive sheet to face the lower surface of the insert body. An insert which moves to an inspection apparatus side in a state in which an inspected device provided with a plurality of terminals is housed and makes the terminal contactable with a pad of the inspection apparatus,
An insert body having a through hole through which the device to be inspected can be inserted; And
And a support member which is disposed to cross the through hole of the insert body and supports the device to be inspected inserted through the through hole so as to be held in the through hole,
Wherein the support member comprises:
A conductive member inserted into the through hole and including a pin contacting the terminal of the device to be inspected and a spring for absorbing a pressing force applied by the pin; And
And a guide sheet disposed on an upper surface side of the conductor and having a through hole for each position corresponding to the terminal,
Wherein an upper end of the pin is positioned lower than an upper surface of the guide sheet and a terminal of the device to be inspected is inserted into the through hole to contact the upper end of the pin.

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