WO2015156653A1 - Method for manufacturing test sheet, and test sheet - Google Patents

Method for manufacturing test sheet, and test sheet Download PDF

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Publication number
WO2015156653A1
WO2015156653A1 PCT/KR2015/003660 KR2015003660W WO2015156653A1 WO 2015156653 A1 WO2015156653 A1 WO 2015156653A1 KR 2015003660 W KR2015003660 W KR 2015003660W WO 2015156653 A1 WO2015156653 A1 WO 2015156653A1
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WO
WIPO (PCT)
Prior art keywords
inspection sheet
frame
manufacturing
inspection
sheet
Prior art date
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PCT/KR2015/003660
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French (fr)
Korean (ko)
Inventor
이병주
이학용
김종원
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Priority to CN201580029419.2A priority Critical patent/CN106560004B/en
Publication of WO2015156653A1 publication Critical patent/WO2015156653A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Definitions

  • the present invention relates to a method for manufacturing an inspection sheet and an inspection sheet that can be securely made even with a small load and easy to manufacture.
  • an electrical test is performed to determine whether a device under test, such as a semiconductor device, which has been manufactured is defective. Specifically, a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted.
  • the inspection device and the device under test are not directly connected to each other, but are indirectly connected by using a so-called test socket. The reason is that if the terminal of the device under test is in direct contact with the terminal of the inspection device, the terminal of the inspection device may be worn or damaged during repeated tests. If the terminals of such inspection device are broken, the entire inspection device must be replaced. This is because the overall cost will be a factor. Therefore, when the test socket is used, the device under test comes into contact with the test socket mounted on the test apparatus, and accordingly, the test socket is worn or damaged by repeated contact, and only the test socket needs to be replaced, thereby reducing the overall replacement cost. It becomes possible.
  • test socket may be used a variety of springs, such as pogo pins, but in recent years has been mainly used for the inspection sheet containing the conductive particles and elastic.
  • the inspection sheet 1 has a form in which a plurality of conductive particles 21 are contained in an elastic material.
  • the plurality of conductive particles 21 are oriented in the thickness direction to form one conductive portion 20, and a plurality of conductive particles 21 are formed in the surface direction so that the conductive portions 20 correspond to the terminals 51 of the device under test 50. Will be arranged.
  • the conductive part 20 is disposed at a portion other than the terminal 51 of the device under test 50 and is coupled to the conductive part 20 to support each of the insulating support parts that insulate the conductive part 20 from each other ( 10) insulated and supported.
  • the conductive portion 20 is in contact with the pad 41 of the inspection apparatus 40 in a state where the inspection sheet 1 is mounted on the inspection apparatus 40. 2, when the device under test 50 is lowered, the terminal 51 of the device under test 50 contacts the respective conductive portions 20 and moves the inspection sheet 1 downward. Pressurized, and thus the conductive particles 21 in the conductive portion 20 are in close contact with each other to form a state where electricity can be supplied. Subsequently, when a predetermined test signal is applied from the inspection apparatus 40, the test signal is transmitted to the device under test 50 through the inspection sheet 1, and the reflection signal is reversely passed through the inspection sheet 1. It enters the inspection device 40.
  • Such an inspection sheet has a property of exhibiting conductivity only in the thickness direction when pressed in the thickness direction, and has no advantages in that durability and excellent electrical connection can be achieved since no mechanical means such as soldering or springs are used. In addition, since it can absorb mechanical shocks and deformations, there is an advantage that the smooth connection is possible, it is widely used for electrical connection with various electrical circuit devices and inspection devices.
  • a device to be inspected using an inspection sheet is configured such that a large number of terminals are arranged per unit area at the same time as the spacing between terminals is narrowed.
  • the pressing force for reliably contacting the terminals of the device under test to the inspection sheet must be increased.
  • the pressing force is excessively large, there is a risk of causing damage to some terminals or the inspection sheet, which is not preferable.
  • the groove 11 extending in the vertical direction may be provided in the insulating support part 10 to be easily deformed even with a small pressing force.
  • the present invention has been made to solve the above-mentioned problems, and more particularly, to a method for manufacturing an inspection sheet and an inspection sheet capable of facilitating electrical connection and simplifying production even with a small pressing force.
  • the manufacturing method of the inspection sheet for achieving the above-mentioned object is a manufacturing method of the inspection sheet which is arrange
  • a frame made of a first material which can be changed from a solid state to a gaseous state by applying heat above a predetermined temperature and having holes formed at positions corresponding to terminals of the device under test;
  • Vaporizing the frame by applying heat above a predetermined temperature to the frame to remove the frame from the inspection sheet, thereby providing a communication hole in the inspection sheet.
  • the first material of the frame may be a blowing agent.
  • the blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine.
  • the frame may further include a second material that is liquefied by applying heat in a solid state.
  • the second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
  • the frame includes an inner portion located inside the inspection sheet and an exposed portion exposed to the outside of the inspection sheet, wherein the inner portion is connected to the exposed portion so that the first gaseous substance vaporized in the inner portion is vaporized. It can be released to the outside.
  • the communication hole is connected to each other, at least a portion may be connected to the outside.
  • the plurality of frames may be spaced apart from each other in the vertical direction.
  • the manufacturing method of the inspection sheet of the present invention for achieving the above object is disposed between the terminal of the device under test and the pad of the inspection apparatus, the manufacturing method of the inspection sheet for electrically connecting the terminal and the pad to each other.
  • Removing the frame from the inspection sheet by moving the frame along the plane direction of the inspection sheet, thereby providing a communication hole in the inspection sheet.
  • At least a portion of the frame may be exposed to the outside from the inspection sheet.
  • the frames may each include a beam-shaped member disposed spaced apart from each other and extending in one direction.
  • the plurality of frames may be arranged in the vertical direction to each other, so that beam-shaped members adjacent to each other above and below may cross each other at right angles.
  • the communication hole is connected to each other, at least a portion may be connected to the outside.
  • the plurality of frames may be spaced apart from each other in the vertical direction.
  • the inspection sheet of the present invention for achieving the above object is manufactured by the above-described manufacturing method.
  • An inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
  • a plurality of conductive parts disposed at positions corresponding to the terminals of the device under test and extending in a thickness direction and including a plurality of conductive particles in an elastic insulating material;
  • Insulating support for preventing the electrically conductive portions are electrically connected to each other by insulating while supporting each conductive portion,
  • the insulating support portion is provided with a communication hole extending in the horizontal direction while passing between the plurality of conductive portions, the end of which is connected to the outside.
  • the communication hole has a circular or rectangular cross section.
  • the communication hole may form a grid when viewed from the top.
  • the inspection sheet according to the present invention is provided with a communication hole extending in the horizontal direction in the inspection sheet, there is an advantage that the electrical connection can be easily made with a small pressing force and the manufacturing can be simplified.
  • FIG. 1 is a view showing a sheet for inspection according to a conventional embodiment.
  • FIG. 2 is a view showing the operation of FIG.
  • FIG. 3 is a view showing an inspection sheet according to another conventional embodiment.
  • 4 to 8 is a view showing a state of manufacturing a test sheet according to an embodiment of the present invention.
  • FIGS. 9 is a perspective view showing the inspection sheet manufactured by FIGS.
  • 10 to 13 is a view showing a state of manufacturing a test sheet according to another embodiment of the present invention.
  • FIG. 14 and 15 are views showing a state of manufacturing a test sheet according to another embodiment of the present invention.
  • 16 and 17 are views showing the inspection sheet according to another embodiment of the present invention.
  • Inspection sheet 100 is disposed between the terminal of the device to be inspected and the pad of the inspection device to electrically connect the terminal and the pad to each other, and the conductive portion 110 and Insulation support 120 is included.
  • the conductive part 110 is disposed at each position corresponding to the terminal of the device under test, and extends in the thickness direction, and a plurality of conductive particles 111 are included in the elastic insulating material.
  • the elastic insulating material is preferably a heat resistant polymer material having a crosslinked structure as the elastic polymer material.
  • curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance, Liquid silicone rubber is preferable.
  • the liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable.
  • This addition type liquid silicone rubber is cured by the reaction of a vinyl group and a Si-H bond, and is a one-component type (one-component type) consisting of a polysiloxane containing both a vinyl group and a Si-H bond, and a polysiloxane containing a vinyl group.
  • a two-component (two-component) composed of polysiloxane containing a Si-H bond, but in the present invention, it is preferable to use a two-component addition type liquid silicone rubber.
  • the thing of the viscosity in 23 degreeC of 100-1,250 Pa.s More preferably, it is 150-800 Pa.s, Especially preferably, it is 250-500 Pa.s.
  • this viscosity is less than 100 Pa.s, sedimentation of the conductive particles 111 in the additive liquid silicone rubber is likely to occur, and good storage stability cannot be obtained, and conductive particles are formed when a parallel magnetic field is applied to the molding material layer. It may become difficult to form the chain
  • this viscosity exceeds 1250 Pa.s, since the molding material obtained becomes a high viscosity, it may become difficult to form a molding material layer in the metal mold 140, and also parallel to the molding material layer. Even if the magnetic field is acted on, the conductive particles 111 do not sufficiently move, which may make it difficult to orient the conductive particles 111 in the thickness direction.
  • the conductive particles 111 constituting the conductive portion 110 are preferably formed by coating a highly conductive metal on the surface of the core particles of the metal material (hereinafter also referred to as “magnetic core particles”).
  • “highly conductive metal” means that the electrical conductivity at 0 ° C is 5 ⁇ 10 6 ⁇ ⁇ 1 m ⁇ 1 or more.
  • the number average particle diameter of the core particle for obtaining electroconductive particle 111 (13) (P) is 3-40 micrometers.
  • the number average particle diameter of a core particle means what was measured by the laser diffraction scattering method.
  • the number average particle diameter is 3 ⁇ m or more, it is preferable that the pressure deformation is easy, and the conductive portion 110 having a low resistance value and high connection reliability can be easily obtained.
  • the said number average particle diameter is 40 micrometers or less, the fine electrically-conductive part 110 can be easily formed, and the electrically-conductive part 110 obtained becomes easy to have stable conductivity.
  • iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used.
  • magnetic material is preferable.
  • Gold, silver, rhodium, platinum, chromium, and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
  • the insulating support part 120 is disposed at a portion other than a terminal of the device under test, and is coupled with each conductive part 110 to support and insulate the conductive part 110.
  • the insulating support 120 is preferably made of the same material as the elastic material of the conductive portion 110, specifically, made of silicone rubber.
  • the present invention is not limited thereto and may be made of a material different from that of the elastic material of the conductive part 110.
  • the insulation support part 120 is provided with a communication hole 121 extending in the horizontal direction while passing between the plurality of conductive parts 110 and having an end portion connected to the outside.
  • the communication hole 121 has a substantially rectangular cross-sectional shape and has a lattice shape when viewed from above.
  • the communication hole 121 is connected to each other as a whole, so even if a part of the communication hole 121 is compressed, the compressed air is released to the outside to enable a certain deformation.
  • the manufacturing method of the inspection sheet 100 of the present invention is as follows.
  • the frame when the heat is applied to a predetermined temperature or more is made of a first material that can be changed from a solid state to a gaseous state, the frame is formed in each position corresponding to the terminal of the device under test 130 is manufactured.
  • the frame 130 is formed in a substantially grid form.
  • the liquid molding material 100 in which the frame 130 is placed in the mold 140 and the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold 140. Fill in ').
  • the liquid molding material 100 ′ is configured to fill the cavity in the mold 140 to surround the frame 130.
  • the magnetic field is applied to the mold 140 in the thickness direction so that the conductive particles 111 are aligned at positions corresponding to the terminals of the device under test in the liquid molding material 100 ′.
  • a magnetic layer 141 is formed in which a portion adjacent to the cavity is disposed at a predetermined interval, and a nonmagnetic layer 142 is disposed between the magnetic layers.
  • the magnetic layer 141 may be disposed at a position corresponding to the terminal of the device under test.
  • a magnetic substrate 143 is formed on the rear side of the magnetic layer 141 and the nonmagnetic layer 142, and an electromagnet (not shown) is disposed on the rear side of the magnetic substrate 143.
  • the electromagnet when the electromagnet is operated, the magnetic field is moved from the upper side to the lower side.
  • the conductive particles 111 in the liquid silicone rubber may be arranged in the vertical direction in the liquid molding material 100 '(silicone rubber). Will be.
  • the fabrication of the inspection sheet 100 in which the frame 130 is integrated is completed, and when the inspection sheet 100 which is hardened is taken out to the mold 140, The inspection sheet 100 as in step 7 is obtained.
  • the frame 130 is vaporized by applying heat above a predetermined temperature to the frame 130 to remove the frame 130 from the inspection sheet 100.
  • the communication hole 121 is formed at the position where the frame 130 is located.
  • the shape of the communication hole 121 corresponds to the shape of the frame 130.
  • the first material of the frame 130 may be a blowing agent, and the blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine.
  • the material constituting the frame 130 is not limited thereto, and may further include a second material liquefied when the frame 130 is heated in a solid state.
  • the second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
  • the frame 130 includes an inner portion 131 located inside the inspection sheet 100 and an exposed portion exposed to the outside of the inspection sheet 100, wherein the inner portion 131 is exposed. Is connected to the part is the gaseous first material vaporized in the inner portion 131 is discharged to the outside.
  • the communication holes 121 formed by the frame 130 are connected to each other, at least a part of which is connected to the outside.
  • the frame 130 may be manufactured within a predetermined frame, but is not limited thereto and may be manufactured by various methods.
  • Inspection sheet 100 according to a preferred embodiment of the present invention has the following advantages.
  • the communication hole around the conductive portion may absorb the deformation in the thickness direction of the conductive portion to some extent in contact with the device under test, so that it may be possible to contact the device under test with a small load.
  • the inspection sheet 100 of the present invention it is possible to align the conductive particles 111 of the conductive portion 110 with a fine and high density.
  • the conductive particles 111 are finely or densely disposed, there is a concern that the conductive particles 111 may be connected to the adjacent conductive portions 110.
  • the present invention provides a frame 130 that separates the adjacent conductive portions 110 from the manufacturing process. It has the advantage that there is no fear of connection.
  • the inspection sheet 100 of the present invention may be modified as shown in FIGS. 10 to 13. That is, in the above-described embodiment of FIGS. 4 and 9, the frame 130 is used as a single unit. However, as illustrated in FIGS. 10 to 13, the plurality of frames 230 may be disposed in the vertical direction. It is possible.
  • predetermined communication holes 221 may be spaced apart from each other in the vertical direction, and accordingly, the thickness direction of the conductive portion 210 is determined. There is an advantage that the insulation support 220 can sufficiently absorb the deformation.
  • the inspection sheet 300 may be modified as shown in FIGS. 14 and 15.
  • a method of manufacturing an inspection sheet 300 disposed between a terminal of a device under test and a pad of an inspection apparatus to electrically connect the terminal and the pad to each other wherein Manufacturing a frame 330 having a through hole formed at each position corresponding to the terminal of the device under test; Inserting the frame 330 into the mold 300 and filling the liquid molding material in which the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold; Applying a magnetic field in the mold in the thickness direction so that the conductive particles in the liquid molding material are aligned in the thickness direction at positions corresponding to the terminals of the device under test; Hardening the liquid molding material to produce an inspection sheet 300 in which the frame 330 is integrated; And removing the frame 330 from the inspection sheet 300 by moving the frame 330 along the surface direction of the inspection sheet 300, thereby providing a communication hole 321 in the inspection sheet 300. It may include a step.
  • the frame 330 may each include a beam-like member is disposed spaced apart a predetermined interval and extending in one direction.
  • the frame 330 may be formed in a substantially comb-like shape.
  • the plurality of frames 330 are arranged in a vertical direction with each other, so that the beam-shaped members adjacent to the top and bottom may cross each other in a perpendicular direction.
  • the communication hole 321 is connected to each other, at least a part of the connection to the outside, the plurality of frames 330 may be arranged spaced apart from each other in the vertical direction.
  • the inspection sheet 100 according to the present invention is not limited thereto, and may have a shape as shown in FIGS. 16 and 17. That is, a plurality of communication holes 421 crossing the conductive portions 410 in the horizontal direction may be provided in the inspection sheet 400.
  • the communication hole 421 is to have a substantially cylindrical cross-section extending in the horizontal direction.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Measuring Leads Or Probes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

The present invention relates to a method for manufacturing a test sheet, the test sheet being arranged between a terminal of a device to be tested and a pad of a test device so as to electrically connect the terminal and the pad to each other. The method comprises the steps of: manufacturing a frame which has holes formed at every position corresponding to the terminal of the device to be tested; placing the frame within a mold and filling the mold with a liquid molding material; applying a magnetic field inside the mold in a thickness direction; curing the liquid molding material; and applying, to the frame, heat of a temperature greater than or equal to a predetermined temperature.

Description

검사용 시트의 제조방법 및 검사용 시트Manufacturing method of inspection sheet and inspection sheet
작은 하중으로도 전기적 접속이 확실하게 이루어질 수 있도록 하고 제조가 간편한 검사용 시트의 제조방법 및 검사용 시트에 대한 것이다.The present invention relates to a method for manufacturing an inspection sheet and an inspection sheet that can be securely made even with a small load and easy to manufacture.
일반적으로 제조가 완료된 반도체 디바이스와 같은 피검사 디바이스의 불량여부를 판단하기 위하여 전기적 테스트를 실시한다. 구체적으로는 검사장치로부터 소정의 테스트신호를 피검사 디바이스으로 흘려보내 그 기판의 단락여부를 판정하게 된다. 이러한 검사장치와 피검사 디바이스은 서로 직접 접속되는 것이 아니라, 소위 테스트 소켓이라는 매개장치를 이용하여 간접적으로 접속되게 된다. 그 이유는 검사장치의 단자에 피검사 디바이스의 단자가 직접 접촉하는 경우에는 반복적인 테스트과정에서 검사장치의 단자가 마모 또는 파손이 발생하게 되며 이러한 검사장치의 단자가 파손되면 전체적인 검사장치를 교체해야 하여 전체적으로 많은 비용이 발생될 요인이 되기 때문이다. 따라서, 테스트 소켓을 사용하게 되면 피검사 디바이스은 검사장치에 장착된 테스트소켓에 접촉하게 되고 이에 따라 테스트 소켓이 반복적인 접촉에 의하여 마모 또는 파손되며 그 테스트 소켓만을 교체하여 주면 되어 전체적인 교체비용을 절약할 수 있게 된다.In general, an electrical test is performed to determine whether a device under test, such as a semiconductor device, which has been manufactured is defective. Specifically, a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted. The inspection device and the device under test are not directly connected to each other, but are indirectly connected by using a so-called test socket. The reason is that if the terminal of the device under test is in direct contact with the terminal of the inspection device, the terminal of the inspection device may be worn or damaged during repeated tests. If the terminals of such inspection device are broken, the entire inspection device must be replaced. This is because the overall cost will be a factor. Therefore, when the test socket is used, the device under test comes into contact with the test socket mounted on the test apparatus, and accordingly, the test socket is worn or damaged by repeated contact, and only the test socket needs to be replaced, thereby reducing the overall replacement cost. It becomes possible.
한편, 이러한 테스트소켓으로는 스프링이 포함된 포고핀 등 다양한 것이 사용될 수 있으나, 최근에는 내부에 도전성 입자가 포함되고 탄성을 가지는 검사용 시트가 주로 사용되어 오고 있다.On the other hand, such a test socket may be used a variety of springs, such as pogo pins, but in recent years has been mainly used for the inspection sheet containing the conductive particles and elastic.
이러한 검사용 시트의 일예는 도 1에 도시된다. 상기 검사용 시트(1)는, 탄성 물질 내에 다수의 도전성 입자(21)가 함유되어 있는 형태로 이루어진다. 이러한 다수의 도전성 입자(21)는 두께방향으로 배향되어 하나의 도전부(20)를 이루며 이러한 도전부(20)가 상기 피검사 디바이스(50)의 단자(51)와 대응되도록 면방향으로 다수개가 배열되어 있게 된다. 이러한 도전부(20)는 피검사 디바이스(50)의 단자(51) 이외의 부분에 배치되며 상기 도전부(20)와 결합되어 각각을 지지하면서 상기 도전부(20)를 서로 절연시키는 절연지지부(10)에 의하여 절연 및 지지된다. One example of such an inspection sheet is shown in FIG. 1. The inspection sheet 1 has a form in which a plurality of conductive particles 21 are contained in an elastic material. The plurality of conductive particles 21 are oriented in the thickness direction to form one conductive portion 20, and a plurality of conductive particles 21 are formed in the surface direction so that the conductive portions 20 correspond to the terminals 51 of the device under test 50. Will be arranged. The conductive part 20 is disposed at a portion other than the terminal 51 of the device under test 50 and is coupled to the conductive part 20 to support each of the insulating support parts that insulate the conductive part 20 from each other ( 10) insulated and supported.
이러한 검사용 시트(1)는 검사장치(40)에 탑재된 상태에서 그 각각의 도전부(20)가 검사장치(40)의 패드(41)와 접촉되어 있게 된다. 이후에 도 2에 도시한 바와 같이 피검사 디바이스(50)이 하강하면 그 피검사 디바이스(50)의 단자(51)가 각각의 도전부(20)와 접촉하면서 검사용 시트(1)를 하측으로 가압하게 되며, 이에 따라 도전부(20) 내의 도전성 입자(21)들은 서로 밀착되면서 통전이 가능한 상태를 형성한다. 이후, 검사장치(40)로부터 소정의 테스트신호가 인가되면 그 테스트신호가 검사용 시트(1)를 거쳐 피검사 디바이스(50)으로 전달되고, 그 반사신호는 반대로 검사용 시트(1)를 거쳐 검사장치(40)로 들어오게 된다.In the inspection sheet 1, the conductive portion 20 is in contact with the pad 41 of the inspection apparatus 40 in a state where the inspection sheet 1 is mounted on the inspection apparatus 40. 2, when the device under test 50 is lowered, the terminal 51 of the device under test 50 contacts the respective conductive portions 20 and moves the inspection sheet 1 downward. Pressurized, and thus the conductive particles 21 in the conductive portion 20 are in close contact with each other to form a state where electricity can be supplied. Subsequently, when a predetermined test signal is applied from the inspection apparatus 40, the test signal is transmitted to the device under test 50 through the inspection sheet 1, and the reflection signal is reversely passed through the inspection sheet 1. It enters the inspection device 40.
이러한 검사용 시트는 두께방향으로 가압되었을 때 그 두께방향으로만 도전성을 나타내는 특성을 가지며, 납땜 또는 스프링과 같은 기계적 수단이 사용되지 않으므로 내구성이 우수하며 간단한 전기적 접속을 달성할 수 있는 장점이 있다. 또한 기계적인 충격이나 변형을 흡수할 수 있기 때문에, 부드러운 접속이 가능한 장점이 있어 각종 전기적 회로장치 등과 검사장치와의 전기적 접속을 위하여 널리 사용된다.Such an inspection sheet has a property of exhibiting conductivity only in the thickness direction when pressed in the thickness direction, and has no advantages in that durability and excellent electrical connection can be achieved since no mechanical means such as soldering or springs are used. In addition, since it can absorb mechanical shocks and deformations, there is an advantage that the smooth connection is possible, it is widely used for electrical connection with various electrical circuit devices and inspection devices.
최근 검사용 시트를 이용하여 검사를 수행하게 되는 피검사 디바이스는 단자간의 간격이 좁아짐과 동시에 단위면적당 많은 수의 단자들이 배치되도록 구성되어 있다. 이와 같이 단자의 수가 많아지고 단자간 간격이 좁아지게 되면 피검사 디바이스의 단자를 검사용 시트에 확실하게 접촉시키기 위한 가압력이 커져야 한다는 문제점이 있다. 그러나, 가압력을 지나치게 크게 하는 경우 일부 단자 또는 검사용 시트의 파손등을 유발할 염려가 있어서 바람직하지 못하다. 이러한 점을 감안하여 적은 가압력으로도 쉽게 변형될 수 있도록 도 3에 도시된 바와 같이 상하방향으로 연장되는 홈(11)을 절연지지부(10)에 마련하는 일이 있다. 이와 같이 절연지지부(10)에 홈(11)을 마련하기 위하여 레이저에 의하여 도전부 사이에 빛을 조사하거나 커팅기구를 이용하게 되는데, 이러한 작업은 번거롭게 시간이 많이 걸리는 문제점이 있다. 특히, 도전부가 많이 형성되어 있게 되는 경우에는 촘촘하게 홈을 형성하는 일이 쉽지 않다는 문제점이 있다.Recently, a device to be inspected using an inspection sheet is configured such that a large number of terminals are arranged per unit area at the same time as the spacing between terminals is narrowed. As such, when the number of terminals increases and the spacing between terminals decreases, there is a problem that the pressing force for reliably contacting the terminals of the device under test to the inspection sheet must be increased. However, when the pressing force is excessively large, there is a risk of causing damage to some terminals or the inspection sheet, which is not preferable. In view of this point, the groove 11 extending in the vertical direction may be provided in the insulating support part 10 to be easily deformed even with a small pressing force. In this way, in order to provide the groove 11 in the insulating support 10, the laser is irradiated with light between the conductive parts or using a cutting mechanism, this operation has a problem that takes a long time cumbersome. In particular, when many conductive parts are formed, there is a problem that it is not easy to form grooves densely.
또한, 홈의 특성상 상면으로 하면을 향하여 패어진 형상을 제작하게 되는데, 이러한 홈은 도전부 상부 측의 변형만을 주로 흡수할 수 있게 되어 전체적으로 고른 변형을 기대할 수 없다는 문제점이 있다.In addition, due to the characteristics of the grooves to form a concave shape toward the lower surface to the upper surface, there is a problem that these grooves can mainly absorb only the deformation of the upper side of the conductive portion can not expect a uniform deformation overall.
본 발명은 상술한 문제점을 해결하기 위하여 창출된 것으로서, 더욱 상세하게는 적은 가압력으로도 전기적 접속을 용이하게 하고 제조를 간편하게 할 수 있는 검사용 시트의 제조방법 및 검사용 시트에 대한 것이다.The present invention has been made to solve the above-mentioned problems, and more particularly, to a method for manufacturing an inspection sheet and an inspection sheet capable of facilitating electrical connection and simplifying production even with a small pressing force.
상술한 목적을 달성하기 위한 검사용 시트의 제조방법은, 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트의 제조방법으로서,The manufacturing method of the inspection sheet for achieving the above-mentioned object is a manufacturing method of the inspection sheet which is arrange | positioned between the terminal of a device under test and the pad of an inspection apparatus, and electrically connects the said terminal and the said pad,
소정온도 이상의 열을 가하면 고체상태에서 기체상태로 변화될 수 있는 제1물질로 이루어지며, 상기 피검사 디바이스의 단자와 대응되는 위치마다 구멍이 형성되어 있는 프레임을 제조하는 단계;Manufacturing a frame made of a first material which can be changed from a solid state to a gaseous state by applying heat above a predetermined temperature and having holes formed at positions corresponding to terminals of the device under test;
상기 프레임을 금형 내에 넣고 상기 금형 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자를 분포되어 있는 액상 성형물질을 채워넣는 단계;Inserting the frame into a mold and filling a liquid molding material having conductive particles exhibiting magnetic properties in the liquid polymer material in the mold;
상기 금형 내에 두께방향으로 자장을 가하여 액상 성형물질 내에서 도전성 입자가 상기 피검사 디바이스의 단자와 대응되는 위치마다 정렬되도록 하는 단계;Applying a magnetic field in the mold in the thickness direction so that the conductive particles are aligned at positions corresponding to the terminals of the device under test in the liquid molding material;
상기 액상 성형물질을 경화시켜 프레임이 일체화된 검사용 시트를 제작하는 단계; 및Hardening the liquid molding material to produce an inspection sheet having an integrated frame; And
상기 프레임에 소정온도 이상의 열을 가함으로서 상기 프레임을 기화시켜 검사용 시트로부터 프레임을 제거하고, 이로 인하여 상기 검사용 시트 내에 연통공이 마련되도록 하는 단계를 포함한다.Vaporizing the frame by applying heat above a predetermined temperature to the frame to remove the frame from the inspection sheet, thereby providing a communication hole in the inspection sheet.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임의 제1물질은 발포제일 수 있다.The first material of the frame may be a blowing agent.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 발포제는 탄산 나트륨, 아조디카본아미드, 벤젠 술포닐 하이드라진 중 어느 하나일 수 있다.The blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임에는 고체상태에서 열을 가하면 액화되는 제2물질이 더 포함될 수 있다.The frame may further include a second material that is liquefied by applying heat in a solid state.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 제2물질은 파라핀계 탄화수소 또는 알콜지방산 에스테르일 수 있다.The second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 검사용 시트의 내부에 위치한 내부부분과, 검사용 시트의 외부로 노출되는 노출부분을 포함하되, 상기 내부부분은 노출부분에 연결되어 있어 내부부분에서 기화된 기체상태의 제1물질이 외부로 방출될 수 있다.The frame includes an inner portion located inside the inspection sheet and an exposed portion exposed to the outside of the inspection sheet, wherein the inner portion is connected to the exposed portion so that the first gaseous substance vaporized in the inner portion is vaporized. It can be released to the outside.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 연통공은 서로 연결되어 있으며, 적어도 일부는 외부와 연결될 수 있다.The communication hole is connected to each other, at least a portion may be connected to the outside.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 복수개가 서로 상하방향으로 이격되어 배치될 수 있다.The plurality of frames may be spaced apart from each other in the vertical direction.
상술한 목적을 달성하기 위한 본 발명의 검사용 시트의 제조방법은, 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트의 제조방법으로서,The manufacturing method of the inspection sheet of the present invention for achieving the above object is disposed between the terminal of the device under test and the pad of the inspection apparatus, the manufacturing method of the inspection sheet for electrically connecting the terminal and the pad to each other. As
상기 피검사 디바이스의 단자와 대응되는 위치마다 관통공이 형성되어 있는 프레임을 제조하는 단계;Manufacturing a frame having through holes formed at positions corresponding to the terminals of the device under test;
상기 프레임을 금형 내에 넣고 상기 금형 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자를 분포되어 있는 액상 성형물질을 채워넣는 단계;Inserting the frame into a mold and filling a liquid molding material having conductive particles exhibiting magnetic properties in the liquid polymer material in the mold;
상기 금형 내에 두께방향으로 자장을 가하여 액상 성형물질 내에서 도전성 입자가 상기 피검사 디바이스의 단자와 대응되는 위치마다 두께방향으로 정렬되도록 하는 단계;Applying a magnetic field in the mold in the thickness direction so that the conductive particles in the liquid molding material are aligned in the thickness direction at positions corresponding to the terminals of the device under test;
상기 액상 성형물질을 경화시켜 프레임이 일체화된 검사용 시트를 제작하는 단계; 및Hardening the liquid molding material to produce an inspection sheet having an integrated frame; And
상기 프레임을 검사용 시트의 면방향을 따라서 이동시킴으로서 상기 검사용 시트로부터 제거하고, 이로 인하여 상기 검사용 시트 내에 연통공이 마련되도록 하는 단계를 포함한다.Removing the frame from the inspection sheet by moving the frame along the plane direction of the inspection sheet, thereby providing a communication hole in the inspection sheet.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 적어도 일부분이 상기 검사용 시트로부터 외부로 노출될 수 있다.At least a portion of the frame may be exposed to the outside from the inspection sheet.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 각각이 일정간격 이격되어 배치되며 일방향으로 연장되는 빔형 부재를 포함할 수 있다.The frames may each include a beam-shaped member disposed spaced apart from each other and extending in one direction.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 복수개가 서로 상하방향으로 배치되어 있어, 위아래에 인접한 빔형 부재는 서로 직각방향으로 교차되어 있을 수 있다.The plurality of frames may be arranged in the vertical direction to each other, so that beam-shaped members adjacent to each other above and below may cross each other at right angles.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 연통공은 서로 연결되어 있으며, 적어도 일부는 외부와 연결될 수 있다.The communication hole is connected to each other, at least a portion may be connected to the outside.
상기 검사용 시트의 제조방법에서,In the manufacturing method of the inspection sheet,
상기 프레임은 복수개가 서로 상하방향으로 이격되어 배치될 수 있다.The plurality of frames may be spaced apart from each other in the vertical direction.
상술한 목적을 달성하기 위한 본 발명의 검사용 시트는, 상술한 제조방법에 의하여 제조된다.The inspection sheet of the present invention for achieving the above object is manufactured by the above-described manufacturing method.
상술한 목적을 달성하기 위한 본 발명의 검사용 시트는, The inspection sheet of the present invention for achieving the above object,
피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트로서,An inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
상기 피검사 디바이스의 단자와 대응되는 위치마다 배치되되 두께방향으로 연장되고 다수의 도전성 입자가 탄성 절연물질 내에 포함되어 있는 복수의 도전부; 및A plurality of conductive parts disposed at positions corresponding to the terminals of the device under test and extending in a thickness direction and including a plurality of conductive particles in an elastic insulating material; And
각각의 도전부를 지지하면서 절연시켜 도전부들이 서로 전기적으로 접속되는 것을 방지하는 절연지지부;를 포함하되,Insulating support for preventing the electrically conductive portions are electrically connected to each other by insulating while supporting each conductive portion,
상기 절연지지부에는 복수의 도전부 사이를 지나면서 수평방향으로 연장되어 있으며 단부가 외부와 연결되어 있는 연통공이 마련된다.The insulating support portion is provided with a communication hole extending in the horizontal direction while passing between the plurality of conductive portions, the end of which is connected to the outside.
상기 검사용 시트에서,In the inspection sheet,
상기 연통공은 원형 또는 사각형 단면을 가진다.The communication hole has a circular or rectangular cross section.
상기 검사용 시트에서,In the inspection sheet,
상기 연통공은 상부에서 바라보았을 때 격자형상을 이룰 수 있다.The communication hole may form a grid when viewed from the top.
본 발명에 따른 검사용 시트는, 상기 검사용 시트 내에 수평방향으로 연장되는 연통공이 마련되어 있어 적은 가압력으로도 전기적 접속을 용이하게 하고 제조를 간편하게 할 수 있는 장점이 있다.The inspection sheet according to the present invention is provided with a communication hole extending in the horizontal direction in the inspection sheet, there is an advantage that the electrical connection can be easily made with a small pressing force and the manufacturing can be simplified.
도 1은 종래의 일 실시예에 따른 검사용 시트를 나타내는 도면.1 is a view showing a sheet for inspection according to a conventional embodiment.
도 2는 도 1의 작동모습을 나타내는 도면.2 is a view showing the operation of FIG.
도 3은 종래의 다른 실시예에 따른 검사용 시트를 나타내는 도면.3 is a view showing an inspection sheet according to another conventional embodiment.
도 4 내지 도 8는 본 발명의 일 실시예에 따른 검사용 시트를 제조하는 모습을 나타내는 도면.4 to 8 is a view showing a state of manufacturing a test sheet according to an embodiment of the present invention.
도 9는 도 4 내지 도 8에 의하여 제조된 검사용 시트를 나타내는 사시도.9 is a perspective view showing the inspection sheet manufactured by FIGS.
도 10 내지 도 13는 본 발명의 다른 실시예에 따른 검사용 시트를 제조하는 모습을 나타내는 도면.10 to 13 is a view showing a state of manufacturing a test sheet according to another embodiment of the present invention.
도 14 및 도 15은 본 발명의 또 다른 실시예에 따른 검사용 시트를 제조하는 모습을 나타내는 도면.14 and 15 are views showing a state of manufacturing a test sheet according to another embodiment of the present invention.
도 16 및 도 17은 본 발명의 또 다른 실시예에 따른 검사용 시트를 나타내는 도면.16 and 17 are views showing the inspection sheet according to another embodiment of the present invention.
이하, 본 발명의 일 실시예에 따른 검사용 시트의 제조방법 및 검사용 시트를 첨부된 도면을 참조하면서 상세하게 설명한다.Hereinafter, a method for manufacturing an inspection sheet and an inspection sheet according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
본 발명의 일 실시예에 따른 검사용 시트(100)는, 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 것으로서, 도전부(110)와 절연지지부(120)를 포함한다. Inspection sheet 100 according to an embodiment of the present invention is disposed between the terminal of the device to be inspected and the pad of the inspection device to electrically connect the terminal and the pad to each other, and the conductive portion 110 and Insulation support 120 is included.
상기 도전부(110)는, 상기 피검사 디바이스의 단자와 대응되는 위치마다 배치되되 두께방향으로 연장되고 다수의 도전성 입자(111)가 탄성 절연물질 내에 포함되어 있는 것으로서 복수개가 마련된다. The conductive part 110 is disposed at each position corresponding to the terminal of the device under test, and extends in the thickness direction, and a plurality of conductive particles 111 are included in the elastic insulating material.
상기 탄성 절연물질은 탄성 고분자 물질로서는 가교 구조를 갖는 내열성의 고분자 물질이 바람직하다. 이러한 가교 고분자 물질을 얻기 위해 이용할 수 있는 경화성의 고분자 물질 형성 재료로서는, 다양한 것을 이용할 수 있지만, 액상 실리콘 고무가 바람직하다. The elastic insulating material is preferably a heat resistant polymer material having a crosslinked structure as the elastic polymer material. Although various things can be used as curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance, Liquid silicone rubber is preferable.
액상 실리콘 고무는 부가형의 것이라도 축합형의 것이라도 좋지만, 부가형 액상 실리콘 고무가 바람직하다. 이 부가형 액상 실리콘 고무는 비닐기와 Si-H 결합의 반응에 의해 경화되는 것이며, 비닐기 및 Si-H 결합의 양쪽을 함유하는 폴리실록산으로 이루어지는 1액형(1성분형)의 것과, 비닐기를 함유하는 폴리실록산 및 Si-H 결합을 함유하는 폴리실록산으로 이루어지는 2액형(2성분형)의 것이 있지만, 본 발명에 있어서는 2액형의 부가형 액상 실리콘 고무를 이용하는 것이 바람직하다. The liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable. This addition type liquid silicone rubber is cured by the reaction of a vinyl group and a Si-H bond, and is a one-component type (one-component type) consisting of a polysiloxane containing both a vinyl group and a Si-H bond, and a polysiloxane containing a vinyl group. And a two-component (two-component) composed of polysiloxane containing a Si-H bond, but in the present invention, it is preferable to use a two-component addition type liquid silicone rubber.
부가형 액상 실리콘으로서는 그 23 ℃에 있어서의 점도가 100 내지 1,250 ㎩ㆍs의 것을 이용하는 것이 바람직하고, 더욱 바람직하게는 150 내지 800 ㎩ㆍs, 특히 바람직하게는 250 내지 500 ㎩ㆍs의 것이다. 이 점도가 100 ㎩ㆍs 미만인 경우에는 상기 부가형 액상 실리콘 고무 중에 있어서의 도전성 입자(111)의 침강이 생기기 쉽고, 양호한 보존 안정성을 얻을 수 없고, 또한 성형 재료층에 평행 자장을 작용시켰을 때에 도전성 입자(111)가 두께 방향으로 늘어서도록 배향하지 않고, 균일한 상태에서 도전성 입자(111)의 연쇄를 형성하는 것이 곤란해지는 일이 있다. 한편, 이 점도가 1250 ㎩ㆍs를 넘는 경우에는 얻을 수 있는 성형 재료가, 점도가 높은 것이 되므로, 금형(140) 내에 성형 재료층을 형성하기 어려운 것이 되는 일이 있고, 또한 성형 재료층에 평행 자장을 작용시켜도 도전성 입자(111)가 충분히 이동하지 않고, 그로 인해 도전성 입자(111)를 두께 방향으로 늘어서도록 배향시키는 것이 어려워지는 일이 있다. As addition type liquid silicone, it is preferable to use the thing of the viscosity in 23 degreeC of 100-1,250 Pa.s, More preferably, it is 150-800 Pa.s, Especially preferably, it is 250-500 Pa.s. When this viscosity is less than 100 Pa.s, sedimentation of the conductive particles 111 in the additive liquid silicone rubber is likely to occur, and good storage stability cannot be obtained, and conductive particles are formed when a parallel magnetic field is applied to the molding material layer. It may become difficult to form the chain | strand of electroconductive particle 111 in a uniform state, without orienting so that (111) may line up in a thickness direction. On the other hand, when this viscosity exceeds 1250 Pa.s, since the molding material obtained becomes a high viscosity, it may become difficult to form a molding material layer in the metal mold 140, and also parallel to the molding material layer. Even if the magnetic field is acted on, the conductive particles 111 do not sufficiently move, which may make it difficult to orient the conductive particles 111 in the thickness direction.
또한, 도전부(110)를 구성하는 도전성 입자(111)는 금속소재의 코어 입자(이하,「자성 코어 입자」라고도 함)의 표면에 고전도성 금속이 피복되어 이루어지는 것을 이용하는 것이 바람직하다. 여기서,「고전도성 금속」이라 함은, 0 ℃에 있어서의 도전율이 5 × 106 Ω-1m-1이상인 것을 말한다. 도전성 입자(111)(13)(P)를 얻기 위한 코어 입자는 그 수평균 입자 직경이 3 내지 40 ㎛인 것이 바람직하다. 여기서, 코어 입자의 수평균 입자 직경은 레이저 회절 산란법에 의해 측정된 것을 말한다.In addition, the conductive particles 111 constituting the conductive portion 110 are preferably formed by coating a highly conductive metal on the surface of the core particles of the metal material (hereinafter also referred to as "magnetic core particles"). Here, "highly conductive metal" means that the electrical conductivity at 0 ° C is 5 × 10 6 Ω −1 m −1 or more. It is preferable that the number average particle diameter of the core particle for obtaining electroconductive particle 111 (13) (P) is 3-40 micrometers. Here, the number average particle diameter of a core particle means what was measured by the laser diffraction scattering method.
상기 수평균 입자 직경이 3 ㎛ 이상이면 가압 변형이 용이하고, 저항치가 낮고 접속 신뢰성이 높은 도전부(110)를 얻기 쉬워 바람직하다. 한편, 상기 수평균 입자 직경이 40 ㎛ 이하이면 미세한 접속용 도전부(110)를 쉽게 형성할 수 있고, 또한 얻게 되는 도전부(110)는 안정된 전도성을 갖는 것이 되기 쉽다. When the number average particle diameter is 3 µm or more, it is preferable that the pressure deformation is easy, and the conductive portion 110 having a low resistance value and high connection reliability can be easily obtained. On the other hand, when the said number average particle diameter is 40 micrometers or less, the fine electrically-conductive part 110 can be easily formed, and the electrically-conductive part 110 obtained becomes easy to have stable conductivity.
이러한 코어 입자를 구성하는 재료로서는 철, 니켈, 코발트, 이들 금속을 구리, 수지에 코팅한 것 등을 이용할 수 있으며, 이외에도 자성을 띄고 있는 것이 바람직하다. 자성 코어 입자의 표면에 피복되는 고전도성 금속으로서는 금, 은, 로듐, 백금, 크롬 등을 이용할 수 있고, 이들 중에서는 화학적으로 안정되고 또한 높은 도전율을 갖는 점에서 금을 이용하는 것이 바람직하다. As the material constituting such core particles, iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used. In addition, magnetic material is preferable. Gold, silver, rhodium, platinum, chromium, and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
상기 절연지지부(120)는 상기 피검사 디바이스의 단자 이외의 부분에 배치되는 것으로서, 각각의 도전부(110)와 결합되어 그 각각이 도전부(110)를 지지 및 절연시키는 것이다. 구체적으로는 상기 절연지지부(120)는 상기 도전부(110)의 탄성물질과 동일한 소재로 이루어지게 되는 것이 바람직하며, 구체적으로는 실리콘 고무로 이루어지는 것이 좋다. 다만, 이에 한정되는 것은 아니며 상기 도전부(110)의 탄성물질과 다른 소재로 구성되는 것도 가능하다.The insulating support part 120 is disposed at a portion other than a terminal of the device under test, and is coupled with each conductive part 110 to support and insulate the conductive part 110. Specifically, the insulating support 120 is preferably made of the same material as the elastic material of the conductive portion 110, specifically, made of silicone rubber. However, the present invention is not limited thereto and may be made of a material different from that of the elastic material of the conductive part 110.
이러한 절연지지부(120)에는 복수의 도전부(110) 사이를 지나면서 수평방향으로 연장되어 있으며 단부가 외부와 연결되어 있는 연통공(121)이 마련된다. 이러한 연통공(121)은, 대략 사각단면형상을 가지며 위에서 바라보았을 때 격자형상을 가지게 된다. 이러한 연통공(121)은 전체적으로 서로 연결되어 있어 연통공(121)의 일부가 압축되어도 그 압축공기는 외부로 빠져나가게 되어 확실한 변형을 가능하게 한다.The insulation support part 120 is provided with a communication hole 121 extending in the horizontal direction while passing between the plurality of conductive parts 110 and having an end portion connected to the outside. The communication hole 121 has a substantially rectangular cross-sectional shape and has a lattice shape when viewed from above. The communication hole 121 is connected to each other as a whole, so even if a part of the communication hole 121 is compressed, the compressed air is released to the outside to enable a certain deformation.
이러한 본 발명의 검사용 시트(100)의 제조방법은 아래와 같다.The manufacturing method of the inspection sheet 100 of the present invention is as follows.
먼저, 도 4에 도시된 바와 같이, 소정온도 이상의 열을 가하면 고체상태에서 기체상태로 변화될 수 있는 제1물질로 이루어지며, 상기 피검사 디바이스의 단자와 대응되는 위치마다 구멍이 형성되어 있는 프레임(130)을 제조한다. 상기 프레임(130)은 대략 격자형태로 이루어지게 된다.First, as shown in Figure 4, when the heat is applied to a predetermined temperature or more is made of a first material that can be changed from a solid state to a gaseous state, the frame is formed in each position corresponding to the terminal of the device under test 130 is manufactured. The frame 130 is formed in a substantially grid form.
이후에, 도 5에 도시된 바와 같이, 상기 프레임(130)을 금형(140) 내에 넣고 상기 금형(140) 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자(111)를 분포되어 있는 액상 성형물질(100')을 채워넣는다. 이때, 액상 성형물질(100')은 금형(140) 내 캐비티에 충전되되 상기 프레임(130)을 둘러싸도록 구성된다.Subsequently, as illustrated in FIG. 5, the liquid molding material 100 in which the frame 130 is placed in the mold 140 and the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold 140. Fill in '). In this case, the liquid molding material 100 ′ is configured to fill the cavity in the mold 140 to surround the frame 130.
이후에, 도 6에 도시된 바와 같이, 상기 금형(140) 내에 두께방향으로 자장을 가하여 액상 성형물질(100') 내에서 도전성 입자(111)가 상기 피검사 디바이스의 단자와 대응되는 위치마다 정렬되도록 한다. 구체적으로 한 쌍의 금형(140)에서는 캐비티와 인접한 부분이 소정간격을 두고 배치되는 자성체층(141)이 형성되고 그 자성체 층의 사이에는 비자성체층(142)이 배치된다. 이때 자성체층(141)은 피검사 디바이스의 단자와 대응되는 위치에 배치될 수 있다. 한편, 자성체층(141)과 비자성체층(142)의 배면측에는 자성체기판(143)이 형성되고 그 자성체기판(143)의 배면측에는 전자석(미도시)등이 배치되어 있다. 이때, 전자석을 가동시키게 되면 그 자기장이 상측에서부터 하측으로 이동하게 되어 이때 액상의 실리콘 고무 내의 도전성 입자(111)는 그 액상 성형물질(100')(실리콘 고무) 내에서 상하방향으로 일렬 배치될 수 있게 된다.Subsequently, as shown in FIG. 6, the magnetic field is applied to the mold 140 in the thickness direction so that the conductive particles 111 are aligned at positions corresponding to the terminals of the device under test in the liquid molding material 100 ′. Be sure to Specifically, in the pair of molds 140, a magnetic layer 141 is formed in which a portion adjacent to the cavity is disposed at a predetermined interval, and a nonmagnetic layer 142 is disposed between the magnetic layers. In this case, the magnetic layer 141 may be disposed at a position corresponding to the terminal of the device under test. On the other hand, a magnetic substrate 143 is formed on the rear side of the magnetic layer 141 and the nonmagnetic layer 142, and an electromagnet (not shown) is disposed on the rear side of the magnetic substrate 143. In this case, when the electromagnet is operated, the magnetic field is moved from the upper side to the lower side. At this time, the conductive particles 111 in the liquid silicone rubber may be arranged in the vertical direction in the liquid molding material 100 '(silicone rubber). Will be.
이후, 액상 성형물질(100')을 경화시키면 프레임(130)이 일체화된 검사용 시트(100)의 제작이 완료되게 되며, 경화가 완료된 검사용 시트(100)를 금형(140)에 꺼내게 되면 도 7와 같은 검사용 시트(100)가 얻어진다. Subsequently, when the liquid molding material 100 ′ is cured, the fabrication of the inspection sheet 100 in which the frame 130 is integrated is completed, and when the inspection sheet 100 which is hardened is taken out to the mold 140, The inspection sheet 100 as in step 7 is obtained.
이후, 프레임(130)에 소정온도 이상의 열을 가함으로서 상기 프레임(130)을 기화시켜 검사용 시트(100)로부터 프레임(130)을 제거한다. 이와 같이 검사용 시트(100)로부터 프레임(130)이 제거되면 프레임(130)이 있던 자리에 연통공(121)이 형성되게 된다. 이러한 연통공(121)의 형상은 프레임(130)의 형상과 대응되게 된다. Thereafter, the frame 130 is vaporized by applying heat above a predetermined temperature to the frame 130 to remove the frame 130 from the inspection sheet 100. As such, when the frame 130 is removed from the inspection sheet 100, the communication hole 121 is formed at the position where the frame 130 is located. The shape of the communication hole 121 corresponds to the shape of the frame 130.
여기서, 상기 프레임(130)의 제1물질은 발포제일 수 있으며, 상기 발포제는 탄산 나트륨, 아조디카본아미드, 벤젠 술포닐 하이드라진 중 어느 하나일 수 있다. 다만, 프레임(130)을 구성하는 재료는 이에 한정되는 것은 아니며 프레임(130)이 고체상태에서 열을 가하면 액화되는 제2물질을 더 포함할 수 있다. 이때 제2물질은 파라핀계 탄화수소 또는 알콜지방산 에스테르일 수 있다.Here, the first material of the frame 130 may be a blowing agent, and the blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine. However, the material constituting the frame 130 is not limited thereto, and may further include a second material liquefied when the frame 130 is heated in a solid state. In this case, the second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
또한, 상기 프레임(130)은 검사용 시트(100)의 내부에 위치한 내부부분(131)과, 검사용 시트(100)의 외부로 노출되는 노출부분을 포함하되, 상기 내부부분(131)은 노출부분에 연결되어 있어 내부부분(131)에서 기화된 기체상태의 제1물질이 외부로 방출된다. 이러한 프레임(130)에 의하여 형성된 연통공(121)은 서로 연결되어 있으며, 적어도 일부는 외부와 연결되는 것이다. 상기 프레임(130)을 소정의 틀 내에서 제조될 수 있으나, 이에 한정되는 것은 아니며 다양한 방법으로 제조될 수 있다.In addition, the frame 130 includes an inner portion 131 located inside the inspection sheet 100 and an exposed portion exposed to the outside of the inspection sheet 100, wherein the inner portion 131 is exposed. Is connected to the part is the gaseous first material vaporized in the inner portion 131 is discharged to the outside. The communication holes 121 formed by the frame 130 are connected to each other, at least a part of which is connected to the outside. The frame 130 may be manufactured within a predetermined frame, but is not limited thereto and may be manufactured by various methods.
이러한 본 발명의 바람직한 실시예에 따른 검사용 시트(100)는 다음과 같은 장점을 가진다. Inspection sheet 100 according to a preferred embodiment of the present invention has the following advantages.
먼저 도전부 주변의 연통공이 피검사 디바이스와의 접촉시 도전부의 두께방향 변형을 일정정도 흡수하여 적은 하중상태로 피검사 디바이스와 접촉되는 것을 가능하도록 할 수 있다.First, the communication hole around the conductive portion may absorb the deformation in the thickness direction of the conductive portion to some extent in contact with the device under test, so that it may be possible to contact the device under test with a small load.
또한, 본 발명의 검사용 시트(100)에서는 도전부(110)의 도전성 입자(111)를 미세하면서도 고밀도로 정렬시키는 것이 가능하다. 일반적으로 도전성 입자(111)의 경우 미세하게 되거나 고밀도로 배치하게 되면 인접한 도전부(110)와 연결될 염려가 있으나, 본원발명은 제조과정에서 인접한 도전부(110)와 분리시키는 프레임(130)을 설치하고 있기 때문에 연결될 염려가 없다는 장점이 있다.In addition, in the inspection sheet 100 of the present invention, it is possible to align the conductive particles 111 of the conductive portion 110 with a fine and high density. In general, when the conductive particles 111 are finely or densely disposed, there is a concern that the conductive particles 111 may be connected to the adjacent conductive portions 110. However, the present invention provides a frame 130 that separates the adjacent conductive portions 110 from the manufacturing process. It has the advantage that there is no fear of connection.
이러한 본 발명의 검사용 시트(100)는, 도 10 내지 도 13와 같이 변형되는 것도 가능하다. 즉, 상술한 도 4 및 도 9의 실시예에서는 프레임(130)을 단일로 사용하는 것을 예시하였으나, 도 10 내지 도 13에 도시된 바와 같이 복수의 프레임(230)이 서로 상하방향으로 배치되는 것도 가능하다. The inspection sheet 100 of the present invention may be modified as shown in FIGS. 10 to 13. That is, in the above-described embodiment of FIGS. 4 and 9, the frame 130 is used as a single unit. However, as illustrated in FIGS. 10 to 13, the plurality of frames 230 may be disposed in the vertical direction. It is possible.
이와 같이 복수의 프레임(230)을 이용하여 검사용 시트(240)를 제작하는 경우에는 소정의 연통공(221)이 상하방향으로 이격되어 배치될 수 있게 되며 이에 따라서 도전부(210)의 두께방향 변형을 충분하게 절연지지부(220)가 흡수할 수 있다는 장점이 있다.When the inspection sheet 240 is manufactured using the plurality of frames 230 as described above, predetermined communication holes 221 may be spaced apart from each other in the vertical direction, and accordingly, the thickness direction of the conductive portion 210 is determined. There is an advantage that the insulation support 220 can sufficiently absorb the deformation.
또한, 상술한 실시예에 따름 검사용 시트(300)는 도 14 및 도 15에 도시된 바와 같이 변형되는 것도 가능하다.In addition, according to the above-described embodiment, the inspection sheet 300 may be modified as shown in FIGS. 14 and 15.
도 14 및 도 15의 제조방법과 관련하여, 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트(300)의 제조방법으로서, 상기 피검사 디바이스의 단자와 대응되는 위치마다 관통공이 형성되어 있는 프레임(330)을 제조하는 단계; 상기 프레임(330)을 금형(300) 내에 넣고 상기 금형 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자(111)를 분포되어 있는 액상 성형물질을 채워넣는 단계; 상기 금형 내에 두께방향으로 자장을 가하여 액상 성형물질 내에서 도전성 입자가 상기 피검사 디바이스의 단자와 대응되는 위치마다 두께방향으로 정렬되도록 하는 단계; 상기 액상 성형물질을 경화시켜 프레임(330)이 일체화된 검사용 시트(300)를 제작하는 단계; 및 상기 프레임(330)을 검사용 시트(300)의 면방향을 따라서 이동시킴으로서 상기 검사용 시트(300)로부터 제거하고, 이로 인하여 상기 검사용 시트(300) 내에 연통공(321)이 마련되도록 하는 단계를 포함할 수 있다.14 and 15, a method of manufacturing an inspection sheet 300 disposed between a terminal of a device under test and a pad of an inspection apparatus to electrically connect the terminal and the pad to each other, wherein Manufacturing a frame 330 having a through hole formed at each position corresponding to the terminal of the device under test; Inserting the frame 330 into the mold 300 and filling the liquid molding material in which the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold; Applying a magnetic field in the mold in the thickness direction so that the conductive particles in the liquid molding material are aligned in the thickness direction at positions corresponding to the terminals of the device under test; Hardening the liquid molding material to produce an inspection sheet 300 in which the frame 330 is integrated; And removing the frame 330 from the inspection sheet 300 by moving the frame 330 along the surface direction of the inspection sheet 300, thereby providing a communication hole 321 in the inspection sheet 300. It may include a step.
이때, 상기 프레임(330)은 적어도 일부분이 상기 검사용 시트(300)로부터 외부로 노출되며, 상기 프레임(330)은 각각이 일정간격 이격되어 배치되며 일방향으로 연장되는 빔형 부재를 포함할 수 있다. 구체적으로 상기 프레임(330)을 대략 빗과 같은 형상으로 이루어질 수 있게 된다.In this case, at least a portion of the frame 330 is exposed to the outside from the inspection sheet 300, the frame 330 may each include a beam-like member is disposed spaced apart a predetermined interval and extending in one direction. Specifically, the frame 330 may be formed in a substantially comb-like shape.
또한, 상기 프레임(330)은 복수개가 서로 상하방향으로 배치되어 있어, 위아래에 인접한 빔형 부재는 서로 직각방향으로 교차될 수 있다. 또한, 상기 연통공(321)은 서로 연결되어 있으며, 적어도 일부는 외부와 연결되며, 상기 프레임(330)은 복수개가 서로 상하방향으로 이격되어 배치될 수 있다.In addition, the plurality of frames 330 are arranged in a vertical direction with each other, so that the beam-shaped members adjacent to the top and bottom may cross each other in a perpendicular direction. In addition, the communication hole 321 is connected to each other, at least a part of the connection to the outside, the plurality of frames 330 may be arranged spaced apart from each other in the vertical direction.
일단 금형 내에서 검사용 시트(300)와 일체화된 빗의 형상을 가진 프레임(330)은 검사용 시트(300)가 경화된 후에 상기 검사용 시트(300)로부터 제거하게 되는데, 이는 일방향으로 빼내어서 제거하게 되는 것이다.Once the frame 330 having the shape of a comb integrated with the inspection sheet 300 in the mold is removed from the inspection sheet 300 after the inspection sheet 300 is cured, which is pulled out in one direction It will be removed.
본 발명에 따른 검사용 시트(100)는 이에 한정되는 것은 아니며, 도 16 및 도 17에 도시된 바와 같은 형상을 가질 수 있다. 즉, 검사용 시트(400) 내에 도전부(410) 사이를 수평방향으로 가로지르는 복수의 연통공(421)이 마련되는 것도 가능하다. 이러한 연통공(421)은 대략 원통단면을 가지면서 수평방향으로 연장된 형태를 가지는 것이다.The inspection sheet 100 according to the present invention is not limited thereto, and may have a shape as shown in FIGS. 16 and 17. That is, a plurality of communication holes 421 crossing the conductive portions 410 in the horizontal direction may be provided in the inspection sheet 400. The communication hole 421 is to have a substantially cylindrical cross-section extending in the horizontal direction.
이상에서 다양한 실시예를 들어 본 발명의 전기적 검사소켓을 설명하였으나, 이에 한정되는 것은 아니며 본 발명의 권리범위로부터 합리적으로 해석될 수 있는 것이라면 무엇이나 본 발명의 권리범위에 속하는 것은 당연하다.Although the electrical test socket of the present invention has been described with reference to various embodiments, it is not limited thereto, and any thing that can be reasonably interpreted from the scope of the present invention is naturally within the scope of the present invention.

Claims (18)

  1. 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트의 제조방법으로서,A method for manufacturing an inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
    소정온도 이상의 열을 가하면 고체상태에서 기체상태로 변화될 수 있는 제1물질로 이루어지며, 상기 피검사 디바이스의 단자와 대응되는 위치마다 구멍이 형성되어 있는 프레임을 제조하는 단계;Manufacturing a frame made of a first material which can be changed from a solid state to a gaseous state by applying heat above a predetermined temperature and having holes formed at positions corresponding to terminals of the device under test;
    상기 프레임을 금형 내에 넣고 상기 금형 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자를 분포되어 있는 액상 성형물질을 채워넣는 단계;Inserting the frame into a mold and filling a liquid molding material having conductive particles exhibiting magnetic properties in the liquid polymer material in the mold;
    상기 금형 내에 두께방향으로 자장을 가하여 액상 성형물질 내에서 도전성 입자가 상기 피검사 디바이스의 단자와 대응되는 위치마다 정렬되도록 하는 단계;Applying a magnetic field in the mold in the thickness direction so that the conductive particles are aligned at positions corresponding to the terminals of the device under test in the liquid molding material;
    상기 액상 성형물질을 경화시켜 프레임이 일체화된 검사용 시트를 제작하는 단계; 및Hardening the liquid molding material to produce an inspection sheet having an integrated frame; And
    상기 프레임에 소정온도 이상의 열을 가함으로서 상기 프레임을 기화시켜 검사용 시트로부터 프레임을 제거하고, 이로 인하여 상기 검사용 시트 내에 연통공이 마련되도록 하는 단계를 포함하는 것을 특징으로 하는 검사용 시트의 제조방법.Vaporizing the frame by applying heat above a predetermined temperature to the frame to remove the frame from the inspection sheet, thereby providing a communication hole in the inspection sheet. .
  2. 제1항에 있어서,The method of claim 1,
    상기 프레임의 제1물질은 발포제인 것을 특징으로 하는 검사용 시트의 제조방법.The first material of the frame is a manufacturing method of the inspection sheet, characterized in that the blowing agent.
  3. 제2항에 있어서,The method of claim 2,
    상기 발포제는 탄산 나트륨, 아조디카본아미드, 벤젠 술포닐 하이드라진 중 어느 하나인 것을 특징으로 하는 검사용 시트의 제조방법.The blowing agent is a method for producing a test sheet, characterized in that any one of sodium carbonate, azodicarbonamide, benzene sulfonyl hydrazine.
  4. 제1항에 있어서,The method of claim 1,
    상기 프레임에는 고체상태에서 열을 가하면 액화되는 제2물질이 더 포함되는 것을 특징으로 하는 검사용 시트의 제조방법.The frame is a manufacturing method of the inspection sheet, characterized in that it further comprises a second material that is liquefied when heated in a solid state.
  5. 제4항에 있어서,The method of claim 4, wherein
    상기 제2물질은 파라핀계 탄화수소 또는 알콜지방산 에스테르인 것을 특징으로 하는 검사용 시트의 제조방법.The second material is a method for producing a test sheet, characterized in that the paraffinic hydrocarbon or alcohol fatty acid ester.
  6. 제1항에 있어서,The method of claim 1,
    상기 프레임은 검사용 시트의 내부에 위치한 내부부분과, 검사용 시트의 외부로 노출되는 노출부분을 포함하되, 상기 내부부분은 노출부분에 연결되어 있어 내부부분에서 기화된 기체상태의 제1물질이 외부로 방출되는 것을 특징으로 하는 검사용 시트의 제조방법.The frame includes an inner portion located inside the inspection sheet and an exposed portion exposed to the outside of the inspection sheet, wherein the inner portion is connected to the exposed portion so that the first gaseous substance vaporized in the inner portion is vaporized. Method for producing a test sheet, characterized in that emitted to the outside.
  7. 제1항에 있어서,The method of claim 1,
    상기 연통공은 서로 연결되어 있으며, 적어도 일부는 외부와 연결되는 것을 특징으로 하는 검사용 시트의 제조방법.The communication hole is connected to each other, at least a part of the manufacturing method for the inspection sheet, characterized in that connected to the outside.
  8. 제1항에 있어서,The method of claim 1,
    상기 프레임은 복수개가 서로 상하방향으로 이격되어 배치되는 것을 특징으로 하는 검사용 시트의 제조방법.The frame is a manufacturing method of the inspection sheet, characterized in that the plurality is arranged spaced apart from each other in the vertical direction.
  9. 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트의 제조방법으로서,A method for manufacturing an inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
    상기 피검사 디바이스의 단자와 대응되는 위치마다 관통공이 형성되어 있는 프레임을 제조하는 단계;Manufacturing a frame having through holes formed at positions corresponding to the terminals of the device under test;
    상기 프레임을 금형 내에 넣고 상기 금형 내에 액상 고분자 물질 내에 자성을 나타내는 도전성 입자를 분포되어 있는 액상 성형물질을 채워넣는 단계;Inserting the frame into a mold and filling a liquid molding material having conductive particles exhibiting magnetic properties in the liquid polymer material in the mold;
    상기 금형 내에 두께방향으로 자장을 가하여 액상 성형물질 내에서 도전성 입자가 상기 피검사 디바이스의 단자와 대응되는 위치마다 두께방향으로 정렬되도록 하는 단계;Applying a magnetic field in the mold in the thickness direction so that the conductive particles in the liquid molding material are aligned in the thickness direction at positions corresponding to the terminals of the device under test;
    상기 액상 성형물질을 경화시켜 프레임이 일체화된 검사용 시트를 제작하는 단계; 및Hardening the liquid molding material to produce an inspection sheet having an integrated frame; And
    상기 프레임을 검사용 시트의 면방향을 따라서 이동시킴으로서 상기 검사용 시트로부터 제거하고, 이로 인하여 상기 검사용 시트 내에 연통공이 마련되도록 하는 단계를 포함하는 것을 특징으로 하는 검사용 시트의 제조방법.And removing the frame from the inspection sheet by moving the frame along the surface direction of the inspection sheet, thereby providing a communication hole in the inspection sheet.
  10. 제9항에 있어서,The method of claim 9,
    상기 프레임은 적어도 일부분이 상기 검사용 시트로부터 외부로 노출되는 것을 특징으로 하는 검사용 시트의 제조방법.At least a portion of the frame is exposed to the outside from the inspection sheet.
  11. 제9항에 있어서,The method of claim 9,
    상기 프레임은 각각이 일정간격 이격되어 배치되며 일방향으로 연장되는 빔형 부재를 포함하는 것을 특징으로 하는 검사용 시트의 제조방법.The frame is a manufacturing method of the inspection sheet, characterized in that each of the spaced apart at a predetermined interval and comprises a beam-like member extending in one direction.
  12. 제11항에 있어서,The method of claim 11,
    상기 프레임은 복수개가 서로 상하방향으로 배치되어 있어, 위아래에 인접한 빔형 부재는 서로 직각방향으로 교차되어 있는 것을 특징으로 하는 검사용 시트의 제조방법.The plurality of frames are arranged in the vertical direction with each other, the beam-like member adjacent to the top and bottom are crossed with each other in a direction perpendicular to each other.
  13. 제9항에 있어서,The method of claim 9,
    상기 연통공은 서로 연결되어 있으며, 적어도 일부는 외부와 연결되는 것을 특징으로 하는 검사용 시트의 제조방법.The communication hole is connected to each other, at least a part of the manufacturing method for the inspection sheet, characterized in that connected to the outside.
  14. 제9항에 있어서,The method of claim 9,
    상기 프레임은 복수개가 서로 상하방향으로 이격되어 배치되는 것을 특징으로 하는 검사용 시트의 제조방법.The frame is a manufacturing method of the inspection sheet, characterized in that the plurality is arranged spaced apart from each other in the vertical direction.
  15. 제1항 내지 제14항 중 어느 한 항의 제조방법에 의하여 제조된 검사용 시트.An inspection sheet manufactured by the manufacturing method of any one of claims 1 to 14.
  16. 피검사 디바이스의 단자와 검사장치의 패드 사이에 배치되어 상기 단자와 상기 패드를 서로 전기적으로 연결시키기 위한 검사용 시트로서,An inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
    상기 피검사 디바이스의 단자와 대응되는 위치마다 배치되되 두께방향으로 연장되고 다수의 도전성 입자가 탄성 절연물질 내에 포함되어 있는 복수의 도전부; 및A plurality of conductive parts disposed at positions corresponding to the terminals of the device under test and extending in a thickness direction and including a plurality of conductive particles in an elastic insulating material; And
    각각의 도전부를 지지하면서 절연시켜 도전부들이 서로 전기적으로 접속되는 것을 방지하는 절연지지부;를 포함하되,Insulating support for preventing the electrically conductive portions are electrically connected to each other by insulating while supporting each conductive portion,
    상기 절연지지부에는 복수의 도전부 사이를 지나면서 수평방향으로 연장되어 있으며 단부가 외부와 연결되어 있는 연통공이 마련된 것을 특징으로 하는 검사용 시트.Inspection sheet, characterized in that the insulating support is provided with a communication hole extending in the horizontal direction and the end is connected to the outside while passing between the plurality of conductive parts.
  17. 제16항에 있어서,The method of claim 16,
    상기 연통공은 원형 또는 사각형 단면을 가지는 것을 특징으로 하는 검사용 시트.The communication hole is a test sheet, characterized in that it has a circular or rectangular cross section.
  18. 제16항에 있어서,The method of claim 16,
    상기 연통공은 상부에서 바라보았을 때 격자형상을 이루는 것을 특징으로 하는 검사용 시트.The communication hole is the inspection sheet, characterized in that to form a grid when viewed from the top.
PCT/KR2015/003660 2014-04-11 2015-04-13 Method for manufacturing test sheet, and test sheet WO2015156653A1 (en)

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