WO2015156653A1 - Procédé de fabrication d'une feuille de test, et feuille de test - Google Patents

Procédé de fabrication d'une feuille de test, et feuille de test Download PDF

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Publication number
WO2015156653A1
WO2015156653A1 PCT/KR2015/003660 KR2015003660W WO2015156653A1 WO 2015156653 A1 WO2015156653 A1 WO 2015156653A1 KR 2015003660 W KR2015003660 W KR 2015003660W WO 2015156653 A1 WO2015156653 A1 WO 2015156653A1
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WO
WIPO (PCT)
Prior art keywords
inspection sheet
frame
manufacturing
inspection
sheet
Prior art date
Application number
PCT/KR2015/003660
Other languages
English (en)
Korean (ko)
Inventor
이병주
이학용
김종원
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Priority to CN201580029419.2A priority Critical patent/CN106560004B/zh
Publication of WO2015156653A1 publication Critical patent/WO2015156653A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Definitions

  • the present invention relates to a method for manufacturing an inspection sheet and an inspection sheet that can be securely made even with a small load and easy to manufacture.
  • an electrical test is performed to determine whether a device under test, such as a semiconductor device, which has been manufactured is defective. Specifically, a predetermined test signal is sent from the inspection apparatus to the device under test to determine whether the substrate is shorted.
  • the inspection device and the device under test are not directly connected to each other, but are indirectly connected by using a so-called test socket. The reason is that if the terminal of the device under test is in direct contact with the terminal of the inspection device, the terminal of the inspection device may be worn or damaged during repeated tests. If the terminals of such inspection device are broken, the entire inspection device must be replaced. This is because the overall cost will be a factor. Therefore, when the test socket is used, the device under test comes into contact with the test socket mounted on the test apparatus, and accordingly, the test socket is worn or damaged by repeated contact, and only the test socket needs to be replaced, thereby reducing the overall replacement cost. It becomes possible.
  • test socket may be used a variety of springs, such as pogo pins, but in recent years has been mainly used for the inspection sheet containing the conductive particles and elastic.
  • the inspection sheet 1 has a form in which a plurality of conductive particles 21 are contained in an elastic material.
  • the plurality of conductive particles 21 are oriented in the thickness direction to form one conductive portion 20, and a plurality of conductive particles 21 are formed in the surface direction so that the conductive portions 20 correspond to the terminals 51 of the device under test 50. Will be arranged.
  • the conductive part 20 is disposed at a portion other than the terminal 51 of the device under test 50 and is coupled to the conductive part 20 to support each of the insulating support parts that insulate the conductive part 20 from each other ( 10) insulated and supported.
  • the conductive portion 20 is in contact with the pad 41 of the inspection apparatus 40 in a state where the inspection sheet 1 is mounted on the inspection apparatus 40. 2, when the device under test 50 is lowered, the terminal 51 of the device under test 50 contacts the respective conductive portions 20 and moves the inspection sheet 1 downward. Pressurized, and thus the conductive particles 21 in the conductive portion 20 are in close contact with each other to form a state where electricity can be supplied. Subsequently, when a predetermined test signal is applied from the inspection apparatus 40, the test signal is transmitted to the device under test 50 through the inspection sheet 1, and the reflection signal is reversely passed through the inspection sheet 1. It enters the inspection device 40.
  • Such an inspection sheet has a property of exhibiting conductivity only in the thickness direction when pressed in the thickness direction, and has no advantages in that durability and excellent electrical connection can be achieved since no mechanical means such as soldering or springs are used. In addition, since it can absorb mechanical shocks and deformations, there is an advantage that the smooth connection is possible, it is widely used for electrical connection with various electrical circuit devices and inspection devices.
  • a device to be inspected using an inspection sheet is configured such that a large number of terminals are arranged per unit area at the same time as the spacing between terminals is narrowed.
  • the pressing force for reliably contacting the terminals of the device under test to the inspection sheet must be increased.
  • the pressing force is excessively large, there is a risk of causing damage to some terminals or the inspection sheet, which is not preferable.
  • the groove 11 extending in the vertical direction may be provided in the insulating support part 10 to be easily deformed even with a small pressing force.
  • the present invention has been made to solve the above-mentioned problems, and more particularly, to a method for manufacturing an inspection sheet and an inspection sheet capable of facilitating electrical connection and simplifying production even with a small pressing force.
  • the manufacturing method of the inspection sheet for achieving the above-mentioned object is a manufacturing method of the inspection sheet which is arrange
  • a frame made of a first material which can be changed from a solid state to a gaseous state by applying heat above a predetermined temperature and having holes formed at positions corresponding to terminals of the device under test;
  • Vaporizing the frame by applying heat above a predetermined temperature to the frame to remove the frame from the inspection sheet, thereby providing a communication hole in the inspection sheet.
  • the first material of the frame may be a blowing agent.
  • the blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine.
  • the frame may further include a second material that is liquefied by applying heat in a solid state.
  • the second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
  • the frame includes an inner portion located inside the inspection sheet and an exposed portion exposed to the outside of the inspection sheet, wherein the inner portion is connected to the exposed portion so that the first gaseous substance vaporized in the inner portion is vaporized. It can be released to the outside.
  • the communication hole is connected to each other, at least a portion may be connected to the outside.
  • the plurality of frames may be spaced apart from each other in the vertical direction.
  • the manufacturing method of the inspection sheet of the present invention for achieving the above object is disposed between the terminal of the device under test and the pad of the inspection apparatus, the manufacturing method of the inspection sheet for electrically connecting the terminal and the pad to each other.
  • Removing the frame from the inspection sheet by moving the frame along the plane direction of the inspection sheet, thereby providing a communication hole in the inspection sheet.
  • At least a portion of the frame may be exposed to the outside from the inspection sheet.
  • the frames may each include a beam-shaped member disposed spaced apart from each other and extending in one direction.
  • the plurality of frames may be arranged in the vertical direction to each other, so that beam-shaped members adjacent to each other above and below may cross each other at right angles.
  • the communication hole is connected to each other, at least a portion may be connected to the outside.
  • the plurality of frames may be spaced apart from each other in the vertical direction.
  • the inspection sheet of the present invention for achieving the above object is manufactured by the above-described manufacturing method.
  • An inspection sheet disposed between a terminal of a device under test and a pad of an inspection apparatus, for electrically connecting the terminal and the pad to each other,
  • a plurality of conductive parts disposed at positions corresponding to the terminals of the device under test and extending in a thickness direction and including a plurality of conductive particles in an elastic insulating material;
  • Insulating support for preventing the electrically conductive portions are electrically connected to each other by insulating while supporting each conductive portion,
  • the insulating support portion is provided with a communication hole extending in the horizontal direction while passing between the plurality of conductive portions, the end of which is connected to the outside.
  • the communication hole has a circular or rectangular cross section.
  • the communication hole may form a grid when viewed from the top.
  • the inspection sheet according to the present invention is provided with a communication hole extending in the horizontal direction in the inspection sheet, there is an advantage that the electrical connection can be easily made with a small pressing force and the manufacturing can be simplified.
  • FIG. 1 is a view showing a sheet for inspection according to a conventional embodiment.
  • FIG. 2 is a view showing the operation of FIG.
  • FIG. 3 is a view showing an inspection sheet according to another conventional embodiment.
  • 4 to 8 is a view showing a state of manufacturing a test sheet according to an embodiment of the present invention.
  • FIGS. 9 is a perspective view showing the inspection sheet manufactured by FIGS.
  • 10 to 13 is a view showing a state of manufacturing a test sheet according to another embodiment of the present invention.
  • FIG. 14 and 15 are views showing a state of manufacturing a test sheet according to another embodiment of the present invention.
  • 16 and 17 are views showing the inspection sheet according to another embodiment of the present invention.
  • Inspection sheet 100 is disposed between the terminal of the device to be inspected and the pad of the inspection device to electrically connect the terminal and the pad to each other, and the conductive portion 110 and Insulation support 120 is included.
  • the conductive part 110 is disposed at each position corresponding to the terminal of the device under test, and extends in the thickness direction, and a plurality of conductive particles 111 are included in the elastic insulating material.
  • the elastic insulating material is preferably a heat resistant polymer material having a crosslinked structure as the elastic polymer material.
  • curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance, Liquid silicone rubber is preferable.
  • the liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable.
  • This addition type liquid silicone rubber is cured by the reaction of a vinyl group and a Si-H bond, and is a one-component type (one-component type) consisting of a polysiloxane containing both a vinyl group and a Si-H bond, and a polysiloxane containing a vinyl group.
  • a two-component (two-component) composed of polysiloxane containing a Si-H bond, but in the present invention, it is preferable to use a two-component addition type liquid silicone rubber.
  • the thing of the viscosity in 23 degreeC of 100-1,250 Pa.s More preferably, it is 150-800 Pa.s, Especially preferably, it is 250-500 Pa.s.
  • this viscosity is less than 100 Pa.s, sedimentation of the conductive particles 111 in the additive liquid silicone rubber is likely to occur, and good storage stability cannot be obtained, and conductive particles are formed when a parallel magnetic field is applied to the molding material layer. It may become difficult to form the chain
  • this viscosity exceeds 1250 Pa.s, since the molding material obtained becomes a high viscosity, it may become difficult to form a molding material layer in the metal mold 140, and also parallel to the molding material layer. Even if the magnetic field is acted on, the conductive particles 111 do not sufficiently move, which may make it difficult to orient the conductive particles 111 in the thickness direction.
  • the conductive particles 111 constituting the conductive portion 110 are preferably formed by coating a highly conductive metal on the surface of the core particles of the metal material (hereinafter also referred to as “magnetic core particles”).
  • “highly conductive metal” means that the electrical conductivity at 0 ° C is 5 ⁇ 10 6 ⁇ ⁇ 1 m ⁇ 1 or more.
  • the number average particle diameter of the core particle for obtaining electroconductive particle 111 (13) (P) is 3-40 micrometers.
  • the number average particle diameter of a core particle means what was measured by the laser diffraction scattering method.
  • the number average particle diameter is 3 ⁇ m or more, it is preferable that the pressure deformation is easy, and the conductive portion 110 having a low resistance value and high connection reliability can be easily obtained.
  • the said number average particle diameter is 40 micrometers or less, the fine electrically-conductive part 110 can be easily formed, and the electrically-conductive part 110 obtained becomes easy to have stable conductivity.
  • iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used.
  • magnetic material is preferable.
  • Gold, silver, rhodium, platinum, chromium, and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
  • the insulating support part 120 is disposed at a portion other than a terminal of the device under test, and is coupled with each conductive part 110 to support and insulate the conductive part 110.
  • the insulating support 120 is preferably made of the same material as the elastic material of the conductive portion 110, specifically, made of silicone rubber.
  • the present invention is not limited thereto and may be made of a material different from that of the elastic material of the conductive part 110.
  • the insulation support part 120 is provided with a communication hole 121 extending in the horizontal direction while passing between the plurality of conductive parts 110 and having an end portion connected to the outside.
  • the communication hole 121 has a substantially rectangular cross-sectional shape and has a lattice shape when viewed from above.
  • the communication hole 121 is connected to each other as a whole, so even if a part of the communication hole 121 is compressed, the compressed air is released to the outside to enable a certain deformation.
  • the manufacturing method of the inspection sheet 100 of the present invention is as follows.
  • the frame when the heat is applied to a predetermined temperature or more is made of a first material that can be changed from a solid state to a gaseous state, the frame is formed in each position corresponding to the terminal of the device under test 130 is manufactured.
  • the frame 130 is formed in a substantially grid form.
  • the liquid molding material 100 in which the frame 130 is placed in the mold 140 and the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold 140. Fill in ').
  • the liquid molding material 100 ′ is configured to fill the cavity in the mold 140 to surround the frame 130.
  • the magnetic field is applied to the mold 140 in the thickness direction so that the conductive particles 111 are aligned at positions corresponding to the terminals of the device under test in the liquid molding material 100 ′.
  • a magnetic layer 141 is formed in which a portion adjacent to the cavity is disposed at a predetermined interval, and a nonmagnetic layer 142 is disposed between the magnetic layers.
  • the magnetic layer 141 may be disposed at a position corresponding to the terminal of the device under test.
  • a magnetic substrate 143 is formed on the rear side of the magnetic layer 141 and the nonmagnetic layer 142, and an electromagnet (not shown) is disposed on the rear side of the magnetic substrate 143.
  • the electromagnet when the electromagnet is operated, the magnetic field is moved from the upper side to the lower side.
  • the conductive particles 111 in the liquid silicone rubber may be arranged in the vertical direction in the liquid molding material 100 '(silicone rubber). Will be.
  • the fabrication of the inspection sheet 100 in which the frame 130 is integrated is completed, and when the inspection sheet 100 which is hardened is taken out to the mold 140, The inspection sheet 100 as in step 7 is obtained.
  • the frame 130 is vaporized by applying heat above a predetermined temperature to the frame 130 to remove the frame 130 from the inspection sheet 100.
  • the communication hole 121 is formed at the position where the frame 130 is located.
  • the shape of the communication hole 121 corresponds to the shape of the frame 130.
  • the first material of the frame 130 may be a blowing agent, and the blowing agent may be any one of sodium carbonate, azodicarbonamide, and benzene sulfonyl hydrazine.
  • the material constituting the frame 130 is not limited thereto, and may further include a second material liquefied when the frame 130 is heated in a solid state.
  • the second material may be a paraffinic hydrocarbon or an alcohol fatty acid ester.
  • the frame 130 includes an inner portion 131 located inside the inspection sheet 100 and an exposed portion exposed to the outside of the inspection sheet 100, wherein the inner portion 131 is exposed. Is connected to the part is the gaseous first material vaporized in the inner portion 131 is discharged to the outside.
  • the communication holes 121 formed by the frame 130 are connected to each other, at least a part of which is connected to the outside.
  • the frame 130 may be manufactured within a predetermined frame, but is not limited thereto and may be manufactured by various methods.
  • Inspection sheet 100 according to a preferred embodiment of the present invention has the following advantages.
  • the communication hole around the conductive portion may absorb the deformation in the thickness direction of the conductive portion to some extent in contact with the device under test, so that it may be possible to contact the device under test with a small load.
  • the inspection sheet 100 of the present invention it is possible to align the conductive particles 111 of the conductive portion 110 with a fine and high density.
  • the conductive particles 111 are finely or densely disposed, there is a concern that the conductive particles 111 may be connected to the adjacent conductive portions 110.
  • the present invention provides a frame 130 that separates the adjacent conductive portions 110 from the manufacturing process. It has the advantage that there is no fear of connection.
  • the inspection sheet 100 of the present invention may be modified as shown in FIGS. 10 to 13. That is, in the above-described embodiment of FIGS. 4 and 9, the frame 130 is used as a single unit. However, as illustrated in FIGS. 10 to 13, the plurality of frames 230 may be disposed in the vertical direction. It is possible.
  • predetermined communication holes 221 may be spaced apart from each other in the vertical direction, and accordingly, the thickness direction of the conductive portion 210 is determined. There is an advantage that the insulation support 220 can sufficiently absorb the deformation.
  • the inspection sheet 300 may be modified as shown in FIGS. 14 and 15.
  • a method of manufacturing an inspection sheet 300 disposed between a terminal of a device under test and a pad of an inspection apparatus to electrically connect the terminal and the pad to each other wherein Manufacturing a frame 330 having a through hole formed at each position corresponding to the terminal of the device under test; Inserting the frame 330 into the mold 300 and filling the liquid molding material in which the conductive particles 111 exhibiting magnetism in the liquid polymer material are distributed in the mold; Applying a magnetic field in the mold in the thickness direction so that the conductive particles in the liquid molding material are aligned in the thickness direction at positions corresponding to the terminals of the device under test; Hardening the liquid molding material to produce an inspection sheet 300 in which the frame 330 is integrated; And removing the frame 330 from the inspection sheet 300 by moving the frame 330 along the surface direction of the inspection sheet 300, thereby providing a communication hole 321 in the inspection sheet 300. It may include a step.
  • the frame 330 may each include a beam-like member is disposed spaced apart a predetermined interval and extending in one direction.
  • the frame 330 may be formed in a substantially comb-like shape.
  • the plurality of frames 330 are arranged in a vertical direction with each other, so that the beam-shaped members adjacent to the top and bottom may cross each other in a perpendicular direction.
  • the communication hole 321 is connected to each other, at least a part of the connection to the outside, the plurality of frames 330 may be arranged spaced apart from each other in the vertical direction.
  • the inspection sheet 100 according to the present invention is not limited thereto, and may have a shape as shown in FIGS. 16 and 17. That is, a plurality of communication holes 421 crossing the conductive portions 410 in the horizontal direction may be provided in the inspection sheet 400.
  • the communication hole 421 is to have a substantially cylindrical cross-section extending in the horizontal direction.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Measuring Leads Or Probes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

La présente invention concerne un procédé de fabrication d'une feuille de test, la feuille de test étant disposée entre une borne d'un dispositif à tester et une plaquette d'un dispositif de test de manière à connecter électriquement la borne et la plaquette l'une à l'autre. Le procédé comprend les étapes suivantes : fabrication d'un cadre comportant des trous formés à chaque position correspondant à la borne du dispositif à tester ; positionnement du cadre à l'intérieur d'un moule et remplissage du moule avec un matériau de moulage liquide ; application d'un champ magnétique à l'intérieur du moule dans un sens de l'épaisseur ; durcissement du matériau de moulage liquide ; et application, au cadre, de chaleur à une température supérieure ou égale à une température prédéterminée.
PCT/KR2015/003660 2014-04-11 2015-04-13 Procédé de fabrication d'une feuille de test, et feuille de test WO2015156653A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201580029419.2A CN106560004B (zh) 2014-04-11 2015-04-13 测试片以及测试片的制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140043685A KR101506131B1 (ko) 2014-04-11 2014-04-11 검사용 시트의 제조방법 및 검사용 시트
KR10-2014-0043685 2014-04-11

Publications (1)

Publication Number Publication Date
WO2015156653A1 true WO2015156653A1 (fr) 2015-10-15

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Application Number Title Priority Date Filing Date
PCT/KR2015/003660 WO2015156653A1 (fr) 2014-04-11 2015-04-13 Procédé de fabrication d'une feuille de test, et feuille de test

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KR (1) KR101506131B1 (fr)
CN (1) CN106560004B (fr)
TW (1) TWI570414B (fr)
WO (1) WO2015156653A1 (fr)

Families Citing this family (5)

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KR101751269B1 (ko) 2016-05-13 2017-06-27 배준규 반도체 테스트용 러버 소켓 및 이를 위한 도전성 폴의 제조 방법
KR20180049424A (ko) * 2016-11-01 2018-05-11 솔브레인멤시스(주) 테스트 하중을 수평방향으로 분산시키는 기능을 구비하는 이방 도전성 시트
KR101969792B1 (ko) * 2017-10-23 2019-04-17 주식회사 오킨스전자 보이드를 포함하는 테스트 소켓, 및 스페이서를 이용하는 그 제조 방법
KR102388678B1 (ko) * 2020-08-28 2022-04-20 주식회사 스노우 검사용 소켓
KR102338903B1 (ko) * 2021-03-29 2021-12-14 (주)위드멤스 컨택터 및 그 제조 방법

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KR101339166B1 (ko) * 2012-06-18 2013-12-09 주식회사 아이에스시 관통공이 형성된 도전성 입자를 가지는 검사용 소켓 및 그 제조방법

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Publication number Priority date Publication date Assignee Title
JP2001076541A (ja) * 1999-09-09 2001-03-23 Jsr Corp 異方導電性シート
KR20020079350A (ko) * 2001-04-12 2002-10-19 신종천 집적화된 실리콘 콘택터 및 그 제작장치와 제작방법
KR20040084202A (ko) * 2003-03-27 2004-10-06 주식회사 아이에스시테크놀러지 집적화된 실리콘 콘택터의 제조방법
KR20070029205A (ko) * 2004-07-23 2007-03-13 제이에스알 가부시끼가이샤 이방 도전성 커넥터 및 그의 제조 방법, 어댑터 장치 및회로 장치의 전기적 검사 장치
KR101204939B1 (ko) * 2009-08-27 2012-11-26 주식회사 아이에스시 검사용 시트 및 그 검사용 시트의 제조방법

Also Published As

Publication number Publication date
CN106560004B (zh) 2020-01-21
TW201546459A (zh) 2015-12-16
CN106560004A (zh) 2017-04-05
KR101506131B1 (ko) 2015-03-26
TWI570414B (zh) 2017-02-11

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