WO2014204161A2 - Insert pour inspection - Google Patents

Insert pour inspection Download PDF

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Publication number
WO2014204161A2
WO2014204161A2 PCT/KR2014/005278 KR2014005278W WO2014204161A2 WO 2014204161 A2 WO2014204161 A2 WO 2014204161A2 KR 2014005278 W KR2014005278 W KR 2014005278W WO 2014204161 A2 WO2014204161 A2 WO 2014204161A2
Authority
WO
WIPO (PCT)
Prior art keywords
insert
hole
insert body
inspection
support member
Prior art date
Application number
PCT/KR2014/005278
Other languages
English (en)
Korean (ko)
Other versions
WO2014204161A3 (fr
Inventor
오종우
최우석
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Publication of WO2014204161A2 publication Critical patent/WO2014204161A2/fr
Publication of WO2014204161A3 publication Critical patent/WO2014204161A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding

Definitions

  • the present invention relates to an inspection insert, and more particularly, to an inspection insert which enables easy electrical inspection with a terminal of a device under test.
  • a semiconductor device manufactured by a semiconductor device manufacturing process undergoes reliability tests such as an electrical property test and a function test before shipment.
  • an insert is mainly used as a device for transferring the manufactured semiconductor device to a test apparatus and classifying the tested semiconductor device.
  • the handler carries a plurality of semiconductor devices into a test apparatus and electrically contacts each semiconductor device to a test head for testing. Each semiconductor device after the test is completed is taken out from the test apparatus and classified according to the test result. In this case, the handler may return the test tray including the plurality of inserts containing the plurality of semiconductor devices to the test apparatus so that the test process may be performed.
  • FIGS. 1 and 2 As a conventional technique for such an insert, it is disclosed in FIGS. 1 and 2. Specifically, an inspection apparatus 110 such as a high fix board requiring electrical connection, and an inspection socket 120 disposed on the inspection apparatus 110 and detachably coupled to the inspection apparatus 110.
  • the insert 100 and the insert 100 which are transferred to the inspection apparatus 110 with the device under test 140 inserted therein and aligned with the inspection apparatus by a socket guide 150 disposed in the inspection apparatus. It is configured to include a pusher device 130 for pressing the device to be tested 140 inserted therein.
  • the inspection socket 120 disposed in the inspection apparatus is always in a state mounted on the inspection apparatus 110, and the insert 100 is transferred and electrically connected to the inspection target device 140 disposed inside the insert.
  • the inspection of the device under test 140 may be performed.
  • the insert is mainly responsible for carrying the device under test
  • the test socket is responsible for the electrical connection between the transported device under test and the test device, wherein the test socket has already been described above. It is arrange
  • the inspection socket is arranged on the inspection apparatus side, there is a problem that a lot of time is required for maintenance of the equipment. That is, when there is an insert problem, the insert should be checked as a whole, and when there is a problem with the inspection apparatus, the lower structure including the test socket should be checked as a whole.
  • the inserted insert can be securely aligned by the socket guide
  • the device under test does not have a configuration that can be surely aligned in the inspection socket. There may be cases where the sockets are not correctly aligned.
  • an object of the present invention is to provide an inspection insert which is easy to maintain and easy to align the device under test.
  • the terminal in the insert for inspection according to the present invention for achieving the above object, in the insert for moving the terminal to the external connecting body in a state of receiving a device under test provided with a plurality of terminals, the terminal is in contact with the connecting body,
  • An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof;
  • a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
  • the support member The support member,
  • a conductive sheet comprising a conductive portion in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal, and an insulating portion for supporting each of the conductive portions;
  • a guide sheet disposed on an upper surface side of the conductive sheet and having through-holes formed at positions corresponding to the terminals.
  • the guide sheet may be made of any one of Kapton, FR4, FR5, XPC, and polyimide.
  • the guide sheet may be integrally attached to the conductive sheet.
  • the support member has an edge is in close contact with the lower surface of the insert body, the insert body is provided with a plurality of protrusions protruding downward,
  • the support member is provided with a coupling hole for each position corresponding to the protrusion
  • the protrusion may attach the support member to the lower surface of the insert body by thermal fusion.
  • the stopper sheet may be disposed at the edge of the support member at the same height as the lower surface of the conductive portion, or protrude downward from the lower surface of the conductive portion, and may be made of a harder material than the support member.
  • the insert body includes an insert body coupled to a socket guide provided on an external connection body;
  • It may be configured to include a floating member coupled to the insert body relative to the insert body is attached to the support member.
  • the floating member may be movable between a first position where the bottom surface of the floating member is located below the bottom surface of the insert body and a second position where the bottom surface of the floating member is positioned above the bottom surface of the insert body.
  • the floating member may be detachably coupled to the insert body.
  • the floating member may be provided with elastic biasing means for elastically biasing the floating member from the first position to the second position.
  • the elastic bias means The elastic bias means,
  • a first hole disposed at an edge of the insert body
  • a second hole disposed at a position corresponding to the first hole of the insert body
  • a lower locking portion having a lower end engaged with the lower surface of the insert body, a central portion extending upwardly from the lower locking portion and penetrating through the second hole and the first hole and spaced upwardly from the first hole;
  • a catching member disposed at an upper end of a central portion and including an upper catching portion having a larger diameter than the central portion;
  • an elastic bias member disposed between the periphery of the first hole of the insert body and the upper locking portion to elastically bias the upper locking portion away from the lower surface of the insert body.
  • the lower locking portion may be engaged with the bottom surface of the insert body in the form of a hook.
  • the support member The support member,
  • It may include a frame integrally coupled to the edge of the conductive sheet and extending from the edge of the conductive sheet to face the bottom surface of the insert body.
  • An insert body in which a through hole into which the device under test can be inserted is formed at a central portion thereof;
  • a support member disposed to cross the through hole of the insert body and supporting the device under test inserted through the through hole to be held in the through hole.
  • the support member The support member,
  • a conductor including a housing having a through hole formed at each position corresponding to the terminal, a pin inserted in the through hole and in contact with a terminal of the device under test, and a spring absorbing a pressing force applied by the pin;
  • It may include a guide sheet disposed on the upper surface side of the conductive sheet and the through hole is formed for each position corresponding to the terminal.
  • the insert for inspection according to the present invention has an advantage in that maintenance is easy by arranging a support member on the insert side that electrically connects the device under test and the device under test while supporting the device under test.
  • the inspection insert according to the present invention has an advantage that the alignment of the device under test can be facilitated by arranging a guide sheet for guiding the position of the device under test on the support member.
  • FIG. 1 is an exploded perspective view showing a test insert according to the prior art.
  • FIG. 2 is a partially combined view of FIG. 1.
  • FIG 3 is an exploded perspective view of an inspection apparatus including an inspection insert according to an embodiment of the present invention.
  • Figure 4 is a perspective view from above of the inspection insert in the inspection device of FIG.
  • FIG. 5 is a perspective view from below of the inspection insert in the inspection device of FIG.
  • FIG. 6 is a perspective view from above of the floating member in the inspection device of FIG. 3;
  • FIG. 7 is a perspective view of the floating member from below in the inspection device of FIG. 3;
  • FIG. 9 is a cross-sectional view of the insert for inspection of FIG. 4.
  • FIG. 10 and 11 are views of the operation of the test insert of FIG.
  • test insert 12 is a cross-sectional view of the test insert according to another embodiment of the present invention.
  • test insert according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
  • the inspection insert 10 of the present invention is an external connection body (in the present invention, 'pad of the inspection device', but is limited thereto in the state of receiving the device under test 80 provided with a plurality of terminals 81.
  • the inspection insert 10 of the present invention includes an insert body 20 and a support member 60.
  • the insert body 20 has a through hole 22 into which the device under test 80 can be inserted, and includes an insert body 21 and a floating member 30.
  • the insert main body 21 has a substantially rectangular parallelepiped shape, and a through hole 22 having a corresponding size of the device under test 80 is formed in the center portion.
  • the guide body 23 is symmetrically formed in the insert body 21 with the through hole 22 therebetween.
  • the guide hole 23 has a size that can be inserted into the guide protrusion 921 of the socket guide 92 disposed on the inspection device 93 side.
  • the lower surface of the insert body 21 is provided with a receiving groove 24 to be dug upward and to allow the floating member 30 to be seated therein.
  • a first hole 25 is disposed between the guide hole 23 and the through hole 22 to communicate the upper surface of the receiving groove 24 with the upper surface of the insert body 21.
  • a locking member 40 to be described later may be inserted into the first hole 25.
  • An upper portion of the first hole 25 has a large inner diameter, and a lower portion of the first hole 25 has an inner diameter smaller than the upper portion, but a stepped portion having a diameter is provided at the center thereof.
  • a spring receiving groove 26 is inserted between the first hole 25 and the through hole 22 to insert a spring 901 to elastically support the upper cover 90 upward.
  • the upper cover 90 is configured to operate the latch for fixing the position of the device under test 80 inserted into the insert body 21, by a spring 901 seated in the spring receiving groove 26 Is elastically supported.
  • the floating member 30 is relatively movable to the insert main body 21 and the supporting member 60 is attached, and the lower surface of the floating member 30 is smaller than the lower surface of the insert main body 21.
  • the floating member 30 is disposed at the second position during transportation to prevent the floating member 30 or the supporting member 60 from being damaged by colliding with another device.
  • the inspection apparatus 93 side is moved to the first position and protrudes from the insert body 20, it is configured to be in contact with the inspection apparatus 93.
  • the floating member 30 is formed in the shape of a square plate having a through hole 32 formed at a center thereof, and a plurality of protrusions 31 are formed on a lower surface of the floating member 30 along the circumference of the through hole 22. It will be prepared.
  • the protrusion 31 performs a function of fixing the support member 60 to the floating member 30. Specifically, the protrusion 31 is configured to fix the position of the support member 60 while the end is spread in the surface direction by thermal fusion.
  • the floating member 30 is detachably coupled to the insert body 21.
  • the floating member 30 is provided with elastic biasing means for elastically biasing from the first position to the second position.
  • the elastic bias means includes a first hole 25 disposed at an edge of the insert body 20 and a second hole 32 disposed at a position corresponding to the first hole 25 of the insert body 20. ), A locking member 40 and an elastic bias member 50.
  • the locking member 40, the lower engaging portion 41, the lower end is engaged with the lower surface of the insert body 20, and extends upwardly from the lower locking portion 41 and the second hole 32 And a central portion 42 penetrating through the first hole 25 and spaced upwardly from the first hole 25, and disposed at an upper end of the central portion 42 and having a diameter larger than that of the central portion 42. And a portion 43.
  • the elastic bias member is disposed between the stepped portion of the first hole 25 of the insert body 20 and the upper catching portion 43 to move the upper catching portion 43 to the insert body 20. It is configured to include an elastic biasing member 50 for elastically biasing in a direction away from the lower surface.
  • the elastic bias means elastically biases the floating member 30 to the second position so that the floating member 30 can be positioned inside the insert body 20 at normal times. If the floating member 30 is pressed downward, the elastic bias member 50 is compressed to allow the floating member 30 to descend, and when the pressing is completed, the elastic bias member 50 is elastically restored to restore the floating member. The member 30 is returned to the second position.
  • the lower engaging portion 41 has the form of a hook can be fitted to the lower surface of the insert body (20). Specifically, it is caught around the second hole 32, so that the floating member 30 can be easily caught by the insert body 20. On the other hand, by manually forcing the lower locking portion 41 hanging on the lower surface of the insert body 20 is forced to the floating member 30 can be separated from the insert body (20).
  • the support member 60 is disposed to cross the through hole 22 of the insert body 20, and the device under test 80 inserted through the through hole 22 is inserted into the through hole 22.
  • the terminal 81 of the device under test 80 and the pad of the test device 93 are electrically connected to each other while being supported so as to be maintained.
  • the support member 60 includes the conductive sheet 61, the guide sheet 62, and the frame 63.
  • the conductive sheet 61 includes a conductive portion 611 in which a plurality of conductive particles are aligned in the thickness direction at each position corresponding to the terminal 81, and a conductive portion 611 while supporting the respective conductive portions 611. ) Is insulated from each other (612).
  • the conductive portion 611 is disposed at a position corresponding to the terminal 81 of the device under test 80, and a plurality of conductive particles are arranged in a line in the thickness direction in the elastic material.
  • the heat resistant high molecular material which has a crosslinked structure is preferable.
  • curable polymeric substance formation material which can be used in order to obtain such a crosslinked polymeric substance
  • Liquid silicone rubber is preferable.
  • the liquid silicone rubber may be an addition type or a condensation type, but an addition type liquid silicone rubber is preferable.
  • the silicone cured product has a compression set of 10% or less at 150 ° C. It is preferable, More preferably, it is 8% or less, More preferably, it is 6% or less.
  • the number average particle diameter of the magnetic core particle for obtaining electroconductive particle P is 3-40 micrometers.
  • the number average particle diameter of a magnetic core particle says what was measured by the laser diffraction scattering method.
  • iron, nickel, cobalt, a coating of these metals on copper, a resin, or the like can be used, but those whose saturation magnetization is 0.1 dl / m 2 or more can be preferably used, and more preferably.
  • Gold, silver, rhodium, platinum, chromium and the like can be used as the highly conductive metal to be coated on the surface of the magnetic core particles, and among these, gold is preferably used because it is chemically stable and has high electrical conductivity.
  • the insulating part 612 maintains insulation between the conductive parts 611 while supporting the conductive part 611.
  • the insulating part 612 may be made of the same material as that of the elastic material in the conductive part 611, but is not limited thereto. Any material having good elasticity and excellent insulating property may be used.
  • the guide sheet 62 is disposed on the upper surface side of the conductive sheet 61 and has a through hole 621 formed at each position corresponding to the terminal 81.
  • the guide sheet 62 is aligned with the conductive portion 611 to which the terminal 81 of the device under test 80 is to be contacted, and thus cannot be lowered.
  • 81 is guided by the guide sheet 62 to contact the conductive portion 611.
  • the through hole 621 may have a circular cross section and may have a reverse cone shape in which an inner diameter decreases toward the lower side.
  • the guide sheet 62 may be any material as long as it is flexible, but may be made of any one of Kapton, FR4, FR5, XPC, and polyimide. Such a guide sheet is preferably integrated with the conductive sheet 61 by an adhesive. Of course, the present invention is not limited to the adhesive and may be integrated into the mold by inserting into the mold in the process of manufacturing the conductive sheet 61.
  • the frame 63 is formed in the shape of a square plate having a hole formed in the center thereof, and the conductive sheet 61 is integrally attached to the frame 63.
  • the frame 63 is integrally coupled to the edge of the conductive sheet 61 to support the conductive sheet 61.
  • the frame 63 is provided with a coupling hole 631 at a position corresponding to the protrusion 31 of the insert body 20.
  • the stopper sheet 70 is an edge of the support member 60, specifically, disposed at the edge of the frame 63, and protrudes downward to the same position as the bottom surface of the conductive portion 611. It protrudes down to the same height as.
  • the stopper sheet 70 is made of a harder material than the support member 60, and when the floating member 30 descends while being inclined with respect to the inspection apparatus 93, the stopper sheet 70 is in contact with the inspection apparatus 93 in advance and horizontally. It is to guide the insert to descend. However, it is not necessary to use a hard material than the support member 60, it is also possible to use the same material.
  • Inspection insert 10 according to an embodiment of the present invention has the following effects.
  • the device under test 80 is inserted into the insert body 20 to place the device under test 80 on the support member 60.
  • the device under test 80 is in contact with the conductive portion 611 of the conductive sheet 61 while being aligned by the guide sheet 62 disposed on the upper surface of the support member 60.
  • the insert in which the device under test 80 is accommodated is moved to the inspection apparatus 93 side.
  • the insert moved to the inspection device 93 is lowered, and the insert body 20 is positioned in the correct position while being aligned by the guide socket.
  • a predetermined pusher 94 presses the device under test 80. Specifically, when the pusher device presses the device under test 80, the floating member 30 is lowered. Specifically, as shown in FIG. 9, the floating member 30 disposed in the first position by the elastic bias member 50 is lowered together as the device under test 80 descends as shown in FIG. 10. When the floating member 30 is sufficiently lowered, the bottom surface of the support member 60 comes into contact with the pad of the inspection device 93. After this, a predetermined electrical test is made. After the electrical inspection is completed, the pusher device is removed from the device under test 80 and the elastic bias member 50 is elastically restored, and the floating member 30 and the device under test 80 are removed from the inspection device 93. Away from the pads.
  • the lower locking portion is elastically deformed to release the lower surface of the insert body so that the floating member can be easily separated from the insert body.
  • Inspection insert according to an embodiment of the present invention has the following advantages.
  • the inspection insert according to the present embodiment has an advantage of easy maintenance by attaching a conductive sheet (support member) corresponding to the existing inspection socket to the insert side.
  • the terminal of the device under test can be accurately contacted with the conductive portion of the conductive sheet.
  • the stopper sheet is inclined to contact the surface of the inspection apparatus before the conductive sheet, thereby minimizing the falling of the floating member.
  • the support member is attached to the insert body by heat fusion to maximize the ease of assembly. That is, ease of attachment can be achieved rather than bolting.
  • the floating member since the floating member is exposed to the outside from the insert body only during the actual inspection and is inserted into the insert body during the other operation, that is, the floating member minimizes the damage of the floating member and external foreign matters on the lower surface of the conductive sheet. There is an advantage that it can.
  • the floating member is fastened to the insert body in the form of a hook, there is an advantage that can be achieved easy coupling.
  • test insert according to an embodiment of the present invention may be modified as follows.
  • the conductive sheet is provided on the support member, but as shown in FIG. 12, the conductor may be disposed.
  • the inspection insert is exemplified by various examples.
  • the present invention is not limited thereto, and it can be extended and interpreted as long as it is reasonably interpreted according to the scope of the present invention.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention se rapporte à un insert pour inspection et, plus particulièrement, à un insert pour inspection comprenant : un corps d'insert possédant un trou traversant formé dans la partie centrale de celui-ci, un dispositif à inspecter pouvant être inséré dans le trou traversant ; et un élément de support agencé par-dessus le trou traversant du corps d'insert, l'élément de support comprenant : une feuille conductrice comprenant des parties conductrices et des parties isolantes supportant des parties conductrices respectives ; et une feuille de guidage agencée sur le côté surface supérieure de la feuille conductrice, la feuille de guidage possédant un trou traversant formé dans chaque position correspondant à la borne.
PCT/KR2014/005278 2013-06-18 2014-06-17 Insert pour inspection WO2014204161A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20130069975A KR101490498B1 (ko) 2013-06-18 2013-06-18 검사용 인서트
KR10-2013-0069975 2013-06-18

Publications (2)

Publication Number Publication Date
WO2014204161A2 true WO2014204161A2 (fr) 2014-12-24
WO2014204161A3 WO2014204161A3 (fr) 2015-04-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2014/005278 WO2014204161A2 (fr) 2013-06-18 2014-06-17 Insert pour inspection

Country Status (3)

Country Link
KR (1) KR101490498B1 (fr)
TW (1) TWI533002B (fr)
WO (1) WO2014204161A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101626513B1 (ko) * 2015-01-21 2016-06-01 신종천 반도체 칩 테스트 소켓
KR20160118796A (ko) * 2015-04-03 2016-10-12 리노공업주식회사 테스트 소켓
KR101928466B1 (ko) * 2016-10-14 2018-12-12 주식회사 아이에스시 검사용 소켓
KR102192919B1 (ko) * 2019-11-19 2020-12-18 (주)티에스이 테스트 소켓 장치 및 그 제조방법
KR102192764B1 (ko) * 2019-11-19 2020-12-18 (주)티에스이 테스트 소켓 장치
KR102089653B1 (ko) 2019-12-30 2020-03-16 신종천 테스트 소켓 조립체
KR102144806B1 (ko) * 2020-04-24 2020-08-14 티씨에스 주식회사 전자부품 검사장치용 소켓
KR102319388B1 (ko) * 2020-07-16 2021-11-01 주식회사 아이에스시 검사용 커넥팅 장치
KR102342480B1 (ko) * 2020-08-21 2021-12-23 (주)티에스이 테스트 소켓 및 이를 포함하는 테스트 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090011498A (ko) * 2007-07-26 2009-02-02 정영석 테스트용 소켓
KR100926777B1 (ko) * 2008-06-13 2009-11-16 주식회사 아이에스시테크놀러지 돌출도전부가 도전패드에 마련된 테스트 소켓
KR20090132215A (ko) * 2008-06-20 2009-12-30 이재학 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의제조방법
KR101204941B1 (ko) * 2012-04-27 2012-11-27 주식회사 아이에스시 전극지지부를 가지는 테스트용 소켓 및 그 테스트용 소켓의 제조방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090011498A (ko) * 2007-07-26 2009-02-02 정영석 테스트용 소켓
KR100926777B1 (ko) * 2008-06-13 2009-11-16 주식회사 아이에스시테크놀러지 돌출도전부가 도전패드에 마련된 테스트 소켓
KR20090132215A (ko) * 2008-06-20 2009-12-30 이재학 테스트 소켓, 전기적 연결장치 및 그 테스트 소켓의제조방법
KR101204941B1 (ko) * 2012-04-27 2012-11-27 주식회사 아이에스시 전극지지부를 가지는 테스트용 소켓 및 그 테스트용 소켓의 제조방법

Also Published As

Publication number Publication date
KR101490498B1 (ko) 2015-02-05
TWI533002B (zh) 2016-05-11
WO2014204161A3 (fr) 2015-04-23
TW201512677A (zh) 2015-04-01
KR20140147207A (ko) 2014-12-30

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