WO2020022745A1

WO2020022745A1 - Conductive sheet for test

Info

Publication number: WO2020022745A1
Application number: PCT/KR2019/009081
Authority: WO
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2018-07-25
Filing date: 2019-07-23
Publication date: 2020-01-30
Also published as: TWI753277B; KR101985445B1; CN112470012B; TW202012940A; CN112470012A

Abstract

Provided is a conductive sheet disposed between a test apparatus and a device to be tested for testing of the device to be tested. The conductive sheet comprises a first sheet and a second sheet stacked in the vertical direction. The first sheet includes a plurality of first elastic conductive portions in the vertical direction and a first elastic insulation portion which separates and insulates the plurality of first elastic conductive portions in the horizontal direction. At least one first elastic conductive portion has a protrusion portion protruding in a direction perpendicular to the first elastic insulation portion. The second sheet includes a plurality of second elastic conductive portions in the vertical direction and a second elastic insulation portion which separates and insulates the plurality of second elastic conductive portions in the horizontal direction. At least one second elastic conductive portion has a concave portion which is concave in the vertical direction with respect to the second elastic insulation portion such that the protrusion portion of the first elastic conductive portion is fitted to the at least one second elastic conductive portion in the vertical direction.

Description

Inspection conductive sheet

The present disclosure relates to a conductive sheet used for inspecting a device under test.

For the inspection of the device under test, a connector for electrically connecting the device under test and the test device is arranged between the device under test and the test device. The connector transmits the electrical test signal of the inspection apparatus to the device under test and the response signal of the device under test to the inspection apparatus. As such a connector, a pogo pin test socket and a conductive rubber socket are used.

The pogo pin test socket has a pogo pin that is pressed in a vertical direction in response to an external force applied to the device under test. The pogo pin test socket requires a part to receive the pogo pin, so it is difficult to have a thin thickness and is difficult to apply to the fine pitch of the terminals of the device under test.

The conductive rubber sheet can elastically deform in response to an external force applied to the device under test. Conductive rubber sheets are advantageous in that they can be manufactured at a low manufacturing cost compared to pogo pin test sockets, and do not damage the terminals of the device under test, and have a very thin thickness. Thus, attempts to replace the pogo pin test socket with a conductive rubber sheet have been made in various fields of inspection of the device under test.

Pogo pin test sockets are thicker than conductive rubber sheets. Thus, the conductive rubber sheet cannot replace the pogo pin test socket in such a manner as to replace one pogo pin test socket with one conductive rubber sheet. For replacement, it is essential that the components attaching the pogo pin test socket to the inspection device be redesigned to fit the conductive rubber sheet. Conductive rubber sheets having a thickness equal to the thickness of the pogo pin test socket may be considered. However, the thicker the conductive rubber sheet is, the more the electrical resistance of the conductive rubber sheet increases and the conductive performance is lowered, so that the conductive rubber sheet is hardly manufactured to have a predetermined thickness or more.

Regarding replacing the pogo pin test socket with a conductive rubber sheet, Korean Patent Publication No. 10-2006-0123910 proposes disposing a similar conductive sheet under one conductive rubber sheet. However, simply disposing two conductive sheets up and down does not solve disadvantages such as lowering of conductive performance and changing relative positions of the members disposed up and down.

One embodiment of the present disclosure provides a laminated conductive sheet having an increased thickness. One embodiment of the present disclosure provides a laminated conductive sheet in which elastic conductive portions are aligned in a vertical direction. One embodiment of the present disclosure provides a laminated conductive sheet in which positions of aligned elastic conductive portions are not changed.

Embodiments of the present disclosure relate to a conductive sheet disposed between an inspection apparatus and a device under test and used for inspection of the device under test. In one embodiment of the conductive sheet, the conductive sheet includes a first sheet and a second sheet stacked in a vertical direction.

In one embodiment, the first sheet includes a plurality of first elastic conductive portions in the vertical direction and a first elastic insulating portion spaced apart from and insulated in the horizontal direction. At least one first elastic conductive portion has a protrusion projecting in a direction perpendicular to the first elastic insulating portion. The second sheet includes a plurality of second elastic conductive parts in the vertical direction and a second elastic insulating part for separating and insulating the plurality of second elastic conductive parts in the horizontal direction. The at least one second elastic conductive portion has a concave portion concave in the vertical direction with respect to the second elastic insulating portion such that the protrusion of the first elastic conductive portion is fitted to the at least one second elastic conductive portion in the vertical direction.

In one embodiment, the first elastic insulator has a first horizontal plane extending in the horizontal direction and the second elastic insulator has a second horizontal plane extending in the horizontal direction and opposite the first horizontal plane. The protrusion protrudes with respect to the first horizontal plane and the recess is concave with respect to the second horizontal plane, and the first horizontal plane and the second horizontal plane are joined to each other.

In one embodiment, the conductive sheet includes a plurality of third elastic conductive portions in the vertical direction and a third elastic insulating portion for separating and insulating the plurality of third elastic conductive portions in the horizontal direction. It further comprises a third sheet disposed between. The at least one third elastic conductive portion has a recess that fits the protrusion of the first sheet to one of one end and the other end facing in the vertical direction and a protrusion that fits the recess of the second sheet to the other of one end and the other end. Have

In one embodiment, the third elastic insulating portion has a pair of third horizontal surfaces spaced apart in the vertical direction. The concave portion of the at least one third elastic conductive portion is located in one of the pair of third horizontal planes, and the protrusion of the at least one third elastic conductive portion is located in the other one of the pair of third horizontal surfaces. The first horizontal plane and one of the pair of third horizontal planes are joined, and the second horizontal plane and the other of the pair of third horizontal planes are joined.

In one embodiment, the protrusion has an inclined portion inclined with respect to the central axis of the protrusion, and the recess has an inclined portion inclined with respect to the central axis of the recess and in contact with the inclined portion of the protrusion.

In one embodiment, the plurality of first elastic conductive portions have protrusions, and the plurality of second elastic conductive portions have recesses.

In one embodiment, the recess has a depth of 10% to 100% of the height of the protrusion.

In one embodiment, the first elastic insulating portion has a protrusion adjacent to the protrusion of the at least one first elastic conductive portion, the second elastic insulating portion is adjacent to the concave portion of the at least one second elastic conductive portion and the first elastic insulating portion It has a recess to which the protrusion is fitted.

In another embodiment of the conductive sheet, the first elastic insulating portion of the first sheet has at least one protrusion projecting in the vertical direction with respect to the plurality of first elastic conductive portions. The second elastic insulator of the second sheet has at least one recess in which it is concave in the vertical direction with respect to the plurality of second elastic conductive parts and the protrusion of the first elastic insulator is fitted in the vertical direction.

In one embodiment, the first elastic insulator has a first horizontal plane extending in the horizontal direction and the second elastic insulator has a second horizontal plane extending in the horizontal direction and opposite the first horizontal plane. The protrusion projects from the first horizontal plane and the recess is recessed from the second horizontal plane, and the first horizontal plane and the second horizontal plane are joined to each other.

In one embodiment, the third elastic insulator of the third sheet has at least one recess in which the protrusion of the first sheet fits in one of one end and the other end facing in the vertical direction and the second one in the other of the one end and the other end. It has at least one protrusion that fits into the recess of the sheet.

In one embodiment, the cross-sectional shape in the horizontal direction of the protrusion of the first elastic insulating portion may have any one of a circle, an ellipse, an ellipse, and a rectangle. The concave portion of the second elastic insulating portion may have a cross sectional shape complementary to the cross sectional shape of the protrusion.

In one embodiment, the protrusion has a height of 90% to 100% of the depth of the recess.

In one embodiment, the at least one first elastic conductive portion has a protrusion adjacent to the protrusion of the first elastic insulating portion, and the at least one second elastic conductive portion is adjacent to the recess of the second elastic insulating portion and the at least one first portion. It has a recess to which the protrusion of an elastic conductive part is fitted.

In one embodiment, the first elastic conductive portion and the second elastic conductive portion include a plurality of conductive particles arranged in a vertical direction.

In one embodiment, the first elastic insulation and the second elastic insulation comprise silicon rubber material.

In one embodiment, the first horizontal plane of the first sheet and the second horizontal plane of the second sheet may be joined by an adhesive.

According to one embodiment of the present disclosure, a laminated conductive sheet having an increased thickness may be provided. According to one embodiment of the present disclosure, since the mating between the alignment elements aligns the elastic conductive portions in the vertical direction, a laminated conductive sheet can be provided in which the alignment between the elastic conductive portions is easily structurally performed. Further, due to the elastic conductive portions aligned by the matching alignment elements, the electrical resistance of the laminated conductive sheet does not increase, the conductivity of the laminated conductive sheet does not decrease, and the laminated structure of the laminated conductive sheet can be stably maintained. According to one embodiment of the present disclosure, since the matched alignment elements prevent the positional change of the elastic conductive portions, a laminated conductive sheet can be provided that can maintain conductivity with long term reliability.

1 is a cross-sectional view schematically showing a conductive sheet according to a first embodiment of the present disclosure.

2A shows a schematic example of the planar arrangement of the elastic conductive portion and the elastic insulating portion in the conductive sheet according to the embodiment.

2B shows a schematic example of the planar arrangement of the elastic conductive portion and the elastic insulating portion in the conductive sheet according to the embodiment.

3 is a cross-sectional view showing the conductive sheet shown in FIG. 1 before being laminated.

4 is a cross-sectional perspective view of the first sheet shown in FIG. 3.

5 is a cross-sectional perspective view of the second sheet shown in FIG. 3.

6A shows an example of the protrusion and the recess in the first embodiment.

6B shows examples of protrusions and recesses in the first embodiment.

6C shows an example of the protrusion and the recess in the first embodiment.

6D shows examples of protrusions and recesses in the first embodiment.

6E shows examples of protrusions and recesses in the first embodiment.

6F shows examples of the protrusions and recesses in the first embodiment.

Fig. 6G shows an example of the protrusions and the recesses in the first embodiment.

7 is a cross-sectional view showing an example of bonding between the first sheet and the second sheet.

8 is a cross-sectional view showing a conductive sheet according to a second embodiment of the present disclosure.

9 is a cross-sectional view showing the conductive sheet shown in FIG. 8 before being laminated.

10 is a cross-sectional view showing the conductive sheet according to the third embodiment.

FIG. 11 is a cross-sectional view showing the conductive sheet shown in FIG. 10 before being laminated.

12A shows examples of protrusions and recesses in the third embodiment.

12B shows examples of protrusions and recesses in the third embodiment.

12C shows examples of protrusions and recesses in the third embodiment.

12D shows examples of protrusions and recesses in the third embodiment.

13A shows an example of the shape of the protrusion provided on the elastic conductive portion.

13B shows an example of the shape of the protrusion provided on the elastic conductive portion.

13C shows an example of the shape of the protrusion provided on the elastic conductive portion.

13D shows an example of the shape of the protrusion provided on the elastic conductive portion.

13E shows an example of the shape of the protrusion provided on the elastic conductive portion.

13F shows an example of the shape of the protrusion provided on the elastic conductive portion.

13G shows an example of the shape of the protrusion provided on the elastic conductive portion.

14 is a cross-sectional view showing a conductive sheet according to a fourth embodiment of the present disclosure.

FIG. 15 is a cross-sectional view showing the conductive sheet shown in FIG. 14 before being laminated.

Embodiments of the present disclosure are illustrated for the purpose of describing the technical spirit of the present disclosure. The scope of the claims according to the present disclosure is not limited to the embodiments set forth below or the detailed description of these embodiments.

All technical and scientific terms used in the present disclosure, unless defined otherwise, have the meanings that are commonly understood by one of ordinary skill in the art to which this disclosure belongs. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure, and are not selected to limit the scope of the rights according to the present disclosure.

As used in this disclosure, expressions such as "comprising", "including", "having", and the like, are open terms that imply the possibility of including other embodiments unless otherwise stated in the phrase or sentence in which the expression is included. It should be understood as (open-ended terms).

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

Expressions such as “first”, “second”, and the like used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of the components.

In the present disclosure, when a component is referred to as being "connected" or "connected" to another component, the component may be directly connected to or connected to the other component, or new It is to be understood that the connection may be made or may be connected via other components.

As used in the present disclosure, the "upper" direction indicator is based on the direction in which the conductive sheet is positioned with respect to the inspection apparatus, and the "lower" direction indicator means the opposite direction upward. As used in the present disclosure, the "directive direction" directive includes an upward direction and a downward direction, but it should be understood that it does not mean a specific one of the upward direction and the downward direction.

Hereinafter, exemplary embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding components are given the same reference numerals. In addition, in the following description of the embodiments, it may be omitted to repeatedly describe the same or corresponding components. However, even if the description of the component is omitted, it is not intended that such component is not included in any embodiment.

The embodiments described below and the examples shown in the accompanying drawings relate to a conductive sheet used for inspection of a device under test. The conductive sheet according to the embodiments may be used to finally inspect the device under test in a later step in the manufacturing process of the device under test. However, the example of the inspection to which the conductive sheet according to the embodiments is applied is not limited to the above-described example.

1 illustrates a conductive sheet according to a first embodiment of the present disclosure. Referring to FIG. 1, a conductive sheet 1000 according to an embodiment is disposed between the inspection apparatus 10 and the device under test 20 and used for inspection of the device under test 20. do.

For the inspection of the device under test 20, a socket 30 for receiving the device under test 20 may be removably mounted to the test apparatus 10. The socket 30 accommodates the device under test 20 carried in the test apparatus 10 by the transport device of the test handler therein and positions the device under test 20 in the test apparatus 10. The conductive sheet 1000 may be interchangeably coupled to the socket 30.

For example, the device under test 20 may be a semiconductor package, but is not limited thereto. The semiconductor package is a semiconductor device in which a semiconductor IC chip, a plurality of lead frames, and a plurality of terminals are packaged in a hexahedral form using a resin material. As the terminal, pins, solder balls, and the like can be used. The semiconductor device 20 shown in FIG. 1 includes terminals of solder balls. Accordingly, the semiconductor device 20 has a plurality of hemispherical terminals 21 on the lower surface thereof. In addition, the semiconductor IC chip of the semiconductor device may be a memory IC chip or a non-memory IC chip.

The inspection apparatus 10 may inspect an electrical characteristic, a functional characteristic, an operating speed, and the like of the device under test 20. The inspection apparatus 10 may have a plurality of conductive pads 11 capable of applying an electrical test signal and receiving a response signal in a test board on which the inspection is performed. The conductive sheet 1000 may be positioned on the conductive pad 11 of the test apparatus 10 by the socket 30, and may be in contact with the conductive pad 11. The terminal 21 of the device under test 20 is electrically connected to the corresponding conductive pad 11 through the conductive sheet 1000. In other words, the conductive sheet 1000 electrically connects the terminal 21 of the device under test 20 and the conductive pad 11 corresponding to the terminal 21 in a vertical direction VD so that the conductive sheet 1000 is electrically conductive. The inspection of the device under test 20 is performed.

The conductive sheet 1000 according to the exemplary embodiment includes the first sheet 1100 and the second sheet 1200 stacked in the vertical direction VD. Due to the stacked first sheet 1100 and second sheet 1200, the conductive sheet 1000 has an increased thickness and an increased amount of crushing. When an external force in the downward direction LD is applied to the first sheet 1100 and the second sheet 1200, the first sheet 1100 and the second sheet 1200 may have the downward direction LD and the horizontal direction HD. It can be elastically deformed. The external force may be generated by the pusher device of the test handler pressing the device under test 20 toward the test device 10. By this external force, the device under test 20 and the conductive sheet 1000 may be contacted in the vertical direction VD, and the conductive sheet 1000 and the conductive pad 11 may be contacted in the vertical direction VD. have. When the external force is removed, the conductive sheet 1000 may be restored to its original shape.

The first sheet 1100 and the second sheet 1200 have a similar configuration. The first sheet 1100 separates the plurality of first elastic conductive parts 1110 and the plurality of first elastic conductive parts 1110 in the horizontal direction HD from the plurality of first elastic conductive parts 1110 in the vertical direction VD. A first elastic insulating portion 1120 to insulate the conductive portion 1110 from each other. The second sheet 1200 is spaced apart from the plurality of second elastic conductive parts 1210 in the vertical direction VD and the plurality of second elastic conductive parts 1210 in the horizontal direction HD, and thus, the plurality of second elastic parts 1210. A second elastic insulating portion 1220 to insulate the conductive portion 1210 from each other. In the conductive sheet 1000, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are positioned in the vertical direction VD. In addition, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD and are in electrical contact with each other at an end thereof.

In the example shown in FIG. 1, the first elastic conductive portion 1110 is in contact with the lower end (one end of the second elastic conductive portion) of the second elastic conductive portion 1210 at the upper end thereof, and the inspection apparatus 10 at the lower end thereof. ) Is in contact with the conductive pad 11. The second elastic conductive portion 1210 is in contact with the terminal 21 of the device under test 20 at the upper end thereof, and in contact with the upper end (one end of the first elastic conductive portion) of the first elastic conductive part 1110 at the lower end thereof. do. Accordingly, in the conductive sheet 1000, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 aligned and contacted in the vertical direction VD correspond to the terminals 21 and the conductive pads corresponding thereto. A conductive path in the vertical direction is formed between (11). An upper end and a lower end of the first elastic conductive part 1110 may form the same plane as the upper and lower surfaces of the first elastic insulating part 1120, or may protrude slightly from the lower side of the first elastic conductive part 1120. An upper end and a lower end of the second elastic conductive part 1210 may be coplanar with or slightly concave than the upper and lower surfaces of the second elastic insulating part 1220.

In the conductive sheet of the embodiments, the position of the first sheet 1100 and the second sheet 1200 in the horizontal direction HD is fixed, and the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are fixed. In order to align in the vertical direction VD, the first sheet 1100 is provided with at least one alignment element, and the second sheet 1200 has a shape complementary to the alignment elements of the first sheet 1100. Another alignment element is provided that can be mated with the alignment element of one sheet 1100. Such a pair of alignment elements may be embodied as protrusions and recesses and may allow for fitting in the vertical direction VD.

When taking the cross section of the protrusion in the horizontal direction HD, the cross-sectional shape of the protrusion may have a circular shape, but is not limited thereto. The recess may have a cross-sectional shape that is complementary to the cross-sectional shape of the protrusion so that the protrusion fits into the recess.

The protrusion may be provided in at least one of the first elastic conductive portions 1110 of the first sheet 1100, and the recessed portion may be provided in the second elastic conductive portion 1210 of the second sheet 1200 corresponding thereto. Can be provided. In this case, the protruding portion and the concave portion may form an end portion in the vertical direction VD of the elastic conductive portion. Alternatively, the protrusion may be provided on the first elastic insulating part 1120 of the first sheet 1100, and the recess may be provided on the second elastic insulating part 1220 of the second sheet 1200. In this case, the protruding portion and the concave portion may protrude from the surface of the elastic insulating portion or may be concave from the surface of the elastic insulating portion. Alternatively, the protrusion may be provided on the first elastic conductive part 1100 and the first elastic insulating part 1120 of the first sheet 1100, and the recess may be the second elastic conductive part of the second sheet 1200. 1210 and the second elastic insulating portion 1220.

Referring to the conductive sheet 1000 illustrated in FIG. 1, the first elastic conductive portion 1110 has a protrusion 1112 forming an upper end portion in the vertical direction VD, and the second elastic conductive portion 1210 It has the recessed part 1212 which forms the lower end part in the vertical direction VD. The protrusion 1112 and the recess 1212 are formed such that the protrusion 1112 is fitted to the recess 1212 in the vertical direction VD. Therefore, when the first sheet 1100 and the second sheet 1200 are stacked, the first elastic conductive portion 1110 may be fitted by fitting in the vertical direction VD between the protrusion 1112 and the recess 1212. ) And the second elastic conductive portion 1210 are aligned and contacted in the vertical direction VD.

The shape of the device under test, the shape of the inspection apparatus and the shape of the socket shown in FIG. 1 are schematically represented for the purpose of describing the embodiment. The arrangement of the first sheet 1100 and the second sheet 1200 in FIG. 1 is merely illustrative. The conductive sheet of another embodiment may include the first sheet 1100 disposed on the second sheet 1200.

2A and 2B schematically show the planar arrangement of the elastic conductive portion and the elastic insulating portion in the first sheet employed in the conductive sheet according to the embodiment. The second sheet may have the same planar arrangement as the planar arrangement shown in FIGS. 2A and 2B. 2A and 2B, the first sheet 1100 includes a first elastic conductive portion 1110 and a first elastic insulating portion 1120. The planar arrangement of the first elastic conductive portions 1110 in the first sheet 1100 may vary depending on the arrangement of the terminals of the device under test. Referring to FIG. 2A, in the first sheet 1100, the first elastic conductive parts 1110 may be arranged in a pair of matrix forms. Referring to FIG. 2B, in the first sheet 1100, the first elastic conductive parts 1110 may be arranged in a plurality of rows along each side of the quadrangle.

3 to 15, embodiments of the conductive sheet will be described in detail. The shapes of the sheets, the shapes of the elastic conductive portions, the shapes and the positions of the alignment elements shown in FIGS. 3 to 15 are merely examples selected for the description of the embodiments.

For description of the conductive sheet of one embodiment, reference is made to the examples shown in FIGS. 3 to 5. FIG. 3 shows the conductive sheet shown in FIG. 1 before being laminated, FIG. 4 shows the first sheet shown in FIG. 3, and FIG. 5 shows the second sheet shown in FIG. 3.

Referring to FIG. 3, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 may have a cylindrical shape extending in the vertical direction VD. In this cylindrical shape, the diameter at the middle portion may be smaller than the diameter at the top and bottom. Alternatively, the diameter at the end contacting the terminal of the device under test or the test apparatus may be equal to or smaller than the diameter of the end located on the opposite side of the end to prevent the conductivity deterioration in the laminated conductive sheet 1000. have.

In one embodiment, the first elastic conductive portion 1110 includes a plurality of conductive particles 1111 arranged in the vertical direction (VD), the second elastic conductive portion 1210 is arranged in the vertical direction (VD) It includes a plurality of conductive particles 1211. Within each elastic conductive portion, the conductive particles are in contact with each other in the vertical direction VD. Accordingly, the upper end and the lower end of each elastic conductive part may be conductively connected in the vertical direction VD. The material constituting the first elastic insulating portion 1120 can maintain the plurality of conductive particles 1111 in the shape of the first elastic conductive portion 1110 shown in FIG. 3. The material constituting the second elastic insulating portion 1220 can maintain the plurality of conductive particles 1211 in the shape of the second elastic conductive portion 1210 shown in FIG. 3.

As an example, the conductive particles described above may be formed by coating the surface of the core particles with a highly conductive metal. The core particle may be made of a metal material such as iron, nickel, or cobalt which is a magnetic substance, or particles such as resin having elasticity may be used. As the highly conductive metal coated on the surface of the core particles, gold, silver, rhodium, platinum, chromium and the like can be used.

Referring to FIG. 3, the plurality of first elastic conductive parts 1110 are spaced apart from and insulated from each other by the first elastic insulating parts 1120. The first elastic insulating part 1120 may form a rectangular elastic region of the first sheet 1100, and maintain the plurality of conductive particles 1111 in the shape of the first elastic conductive part 1110 described above. have. The plurality of second elastic conductive parts 1210 are spaced apart from and insulated from each other by the second elastic insulating parts 1220. The second elastic insulating portion 1220 may form a rectangular elastic region of the second sheet 1200 and may maintain the plurality of conductive particles 1211 in the shape of the second elastic conductive portion 1210 described above. .

The elastic insulating portion is made of an elastic polymer material. Specifically, the elastic insulating portion is made of a cured silicone rubber material. For example, the liquid silicone rubber may be injected into the mold for forming the first sheet 1100 or the second sheet 1200 and cured to form the elastic insulating portion. As a liquid silicone rubber material for molding the elastic insulating portion, an additive liquid silicone rubber, a condensed liquid silicone rubber, a liquid silicone rubber containing a vinyl group or a hydroxyl group, and the like can be used. As a specific example, the liquid silicone rubber material may include dimethylsilicone rubber, methylvinylsilicone rubber, methylphenylvinylsilicone rubber, and the like.

As an example, after the liquid silicone rubber in which the above-mentioned conductive particles are dispersed is injected into a mold for forming the first sheet 1100 or the second sheet 1200, the conductive particles are formed by a magnetic field applied to each position of the elastic conductive portion. These may be aligned to form the aforementioned elastic conductive portion. As another example, the through-holes are formed at each position of the elastic conductive portion in the sheet formed by curing the liquid silicone rubber containing no conductive particles, and the above-mentioned elastic conductive portion can be formed by filling the through-holes with the conductive particles. have.

3 and 4, the first elastic insulating part 1120 spaces the first elastic conductive parts 1110 adjacent to each other at the first horizontal distance D1 in the horizontal direction HD1. In addition, the first elastic insulation part 1120 spaces the first elastic conductive parts 1110 adjacent to each other at a second horizontal distance D2 in another horizontal direction HD2 perpendicular to the horizontal direction HD1. The first horizontal interval D1 and the second horizontal interval D2 may be set to the same dimension or may be set to different dimensions.

3 and 5, the second elastic insulation part 1220 spaces apart the second elastic conductive parts 1210 adjacent to each other at a third horizontal distance D3 in the horizontal direction HD1. In addition, the second elastic insulation part 1220 spaces apart the second elastic conductive parts 1210 adjacent to each other at the fourth horizontal distance D4 in the horizontal direction HD2. The third horizontal gap D3 and the fourth horizontal gap D4 may be set to the same dimension or may be set to different dimensions.

3 and 4, at least one of the plurality of first elastic conductive parts 1110 of the first sheet 1100 may be perpendicular to the first elastic insulating part 1120. And a protrusion 1112 protruding to VD). 3 and 5, at least one of the plurality of second elastic conductive portions 1210 of the second sheet 1200 may be a concave portion concave in the vertical direction VD with respect to the second elastic insulating portion 1220. Has 1212. The protrusion 1112 and the recess 1212 are formed such that the protrusion 1112 is fitted to the recess 1212 in the vertical direction VD. The recess 1212 is provided in the second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 having the protrusion 1112 in the vertical direction VD. 3 to 5 show for example purposes only a first elastic conductive portion provided with a protrusion and a second elastic conductive portion provided with a recess. The protrusion 1112 may be provided in at least one of the plurality of first elastic conductive portions positioned in one row, or in at least one of the plurality of first elastic conductive portions positioned in different rows. Alternatively, the protrusion 1112 may be provided on the first elastic conductive portion located at each corner of the sheet shown in FIGS. 2A and 2B. The recessed portion 1212 may be provided in the second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 provided with the protrusion 1112.

The protrusion 1112 is positioned in the first elastic conductive portion 1110 in the vertical direction VD, and the recessed portion 1212 is positioned in the second elastic conductive portion 1210 in the vertical direction VD. The protrusions 1112 and the recesses 1212 may include a plurality of first elastic conductive parts 1110 and a plurality of second elastic conductive parts 1210 when the first sheet 1100 and the second sheet 1200 are stacked. ) Serves as a reference point for alignment in the vertical direction (VD). When the first sheet 1100 and the second sheet 1200 are stacked, the protrusions 1112 are fitted to the recesses 1212. Due to the fitting between the protrusion 1112 and the recess 1212, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD and the first elastic conductive portion 1110 One end (eg, the upper end of the first elastic conductive portion shown in FIG. 3) and one end of the second elastic conductive portion 1210 (eg, the lower end of the second elastic conductive portion shown in FIG. 3) are in the vertical direction VD. Contact. As such, when the first sheet 1100 and the second sheet 1200 are stacked, alignment between the elastic conductive portion located on the upper side and the elastic conductive portion located on the lower side is structurally achieved by fitting the protrusion and the recessed portion. do. Therefore, the conductive sheet 1000 has a thick thickness due to the laminated structure, but does not cause an increase in electrical resistance or a decrease in conductivity due to the aligned elastic conductive portions. In addition, the protrusions 1112 and the recesses 1212 fitted in the vertical direction VD fix the positions of the first sheet 1100 and the second sheet 1200 in the horizontal direction HD. As a result, even if the conductive sheet 1000 is repeatedly pressed to inspect the device under test, the first sheet 1100 and the second sheet 1200 are not moved relative to each other. Therefore, the conductive sheet 1000 has a stable laminated structure that can maintain conductivity with high reliability for a long time.

3 to 5, in one embodiment, the first elastic insulating portion 1120 of the first sheet 1100 has a first horizontal surface 1121 extending in the horizontal direction HD, and the second The second elastic insulating portion 1220 of the sheet 1200 has a second horizontal surface 1221 extending in the horizontal direction HD. The first horizontal plane 1121 and the second horizontal plane 1221 face each other in the vertical direction VD. The protruding portion 1112 of the first elastic conductive portion protrudes in the vertical direction VD with respect to the first horizontal plane 1121, and the concave portion 1212 of the second elastic conductive portion is perpendicular to the second horizontal plane 1221. Concave)

3 and 4, the protrusion 1112 becomes a portion of the first elastic conductive portion 1110 protruding with respect to the first horizontal plane 1121 and forms an upper end portion of the first elastic conductive portion 1110. The protrusion 1112 has a truncated cone shape. Accordingly, the protrusion 1112 has an inclined portion 1113 inclined with respect to the central axis CA1 of the protrusion (or the central axis of the vertical direction VD of the first elastic conductive portion 1110). The inclined portion 1113 extends annularly in the circumferential direction of the protrusion 1112 to form an outer circumferential portion of the protrusion 1112. The inclination angle IA1 of the inclined portion 1113 with respect to the central axis CA1 of the protrusion 1112 may be greater than 0 degrees and less than or equal to 30 degrees.

3 and 5, the recessed portion 1212 becomes a portion of the second elastic conductive portion 1210 concave with respect to the second horizontal plane 1221, and forms a lower end portion of the second elastic conductive portion 1210. . The recess 1212 has a truncated cone shape corresponding to the shape of the protrusion 1112. Accordingly, the recessed portion 1212 has an inclined portion 1213 inclined with respect to the central axis CA2 of the recessed portion (or the central axis of the vertical direction VD of the second elastic conductive portion 1210). The inclined portion 1213 extends annularly in the circumferential direction of the recessed portion 1212 to form an inner circumferential portion of the recessed portion 1212. The inclination angle IA2 of the inclined portion 1213 with respect to the central axis CA2 of the recess 1212 may be greater than 0 degrees and less than or equal to 30 degrees. In addition, the inclination angle IA2 may be equal to or smaller than the inclination angle of the inclined portion of the protrusion. Since the protrusion 1112 fits into the recess 1212, the inclined portion 1113 of the protrusion 1112 and the inclined portion 1213 of the recess 1212 are in contact with each other.

The protrusions 1112 and the recesses 1212 include a first elastic conductive portion 1110 and a second elastic conductive portion 1210 aligned in the vertical direction VD and having one end of the first elastic conductive portion 1110 (FIG. An upper end of the first elastic conductive portion shown in 3 and one end of the second elastic conductive portion 1210 (the lower end of the second elastic conductive portion shown in FIG. 3) are formed to contact each other in the vertical direction VD. As an example, when the overall height of the first sheet 1100 is T, the height of the protrusion 1112 may be 0.05T to 0.15T.

According to an embodiment, the recesses 1212 are suitable within a range from the depth at which the protrusions 1112 fit slightly into the recesses 1212, from the depth at which the protrusions 1112 are fully fitted into the recesses 1212. Can have depth. In one embodiment, the recess 1212 may have a depth of 10% to 100% of the height of the protrusion 1112. As such, the recess 1212 may have a depth equal to or less than the height of the protrusion 1112. Accordingly, when the first sheet 1100 and the second sheet 1200 are stacked, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are surely aligned and contacted in the vertical direction VD. Can be. In addition, when the recess 1212 has a depth smaller than the height of the protrusion 1112, a minute gap in the vertical direction VD may be secured between the first elastic insulating part 1120 and the second elastic insulating part 1220. have. As a result, when the elastic conductive portion is pressed in the vertical direction by the terminal of the device under test, the elastic insulating portion allows the expansion of the elastic conductive portion in the horizontal direction smoothly, thereby improving the elastic force of the elastic conductive portion and the elastic force of the conductive sheet.

6A to 6G show various examples of protrusions and recesses in the above-described first embodiment.

Referring to FIG. 6A, only one first elastic conductive portion of the plurality of first elastic conductive portions 1110 may have a protrusion 1112, and may be provided to the first elastic conductive portion 1110 having the protrusion 1112. Only the corresponding second elastic conductive portion 1210 may have a recess 1212.

Referring to FIG. 6B, the plurality of first elastic conductive parts 1110 may have protrusions 1112. The protrusions 1112 may be provided to the first elastic conductive parts 1110 positioned in a line or may be provided to all the first elastic conductive parts 1110. The second elastic conductive portions 1210 corresponding to the first elastic conductive portions 1110 may have a concave portion 1212.

Referring to FIG. 6C, elastic conductive portions may be positioned adjacent to ends of the sheets illustrated in FIGS. 2A and 2B, and protrusions 1112 and recesses 1212 may be provided in the elastic conductive portions.

Referring to FIG. 6D, the protrusion 1112 of the first sheet 1100 may have a cylindrical shape, and the recess 1212 of the second sheet 1200 may have a cylindrical shape.

6E, the concave portion 1212 may be formed to concave in the vertical direction VD to the inside of the second elastic conductive portion 1210.

6F and 6G, the first elastic insulator 1120 may have a protrusion 1122 adjacent to the protrusion 1112, and the second elastic insulator 1220 is adjacent to the recess 1212. It may have a recess 1222 to. The protrusion 1122 protrudes from the first horizontal plane 1121, and the recess 1222 is concave from the second horizontal plane 1221. The protrusion 1122 may protrude to a height equal to or less than the height of the protrusion 1112, and the recess 1222 may be recessed to a depth equal to or less than the depth of the recess 1212. The protrusion 1122 may be formed to fit with the recess 1222 in the vertical direction VD. Referring to FIG. 6F, the protrusion 1122 may be adjacent to the protrusion 1112, and the recess 1222 may be adjacent to the recess 1212. Referring to FIG. 6G, the protrusions 1122 may be formed in a straight line along a plurality of protrusions 1112 positioned in a line, and may be adjacent to each protrusion 1112. The protrusions 1112 and the protrusions 1222 may form protrusions extending to a predetermined length. In addition, the recesses 1222 may be formed in a straight line along the plurality of recesses 1212 positioned in a line, and may be adjacent to each recess 1212. A recess 1212 and a recess 1222 may form a recess extending to a predetermined length.

In one embodiment, the first sheet and the second sheet may be bonded to each other. Accordingly, the conductive sheet having the first sheet and the second sheet bonded to each other can be disposed between the device under test and the inspection apparatus as one laminated structure having a thick thickness. 3 and 7, the bonding of the first sheet and the second sheet may be performed at the first horizontal plane 1121 and the second horizontal plane 1221. Accordingly, the conductive sheet 1000 has a bonding layer BL between the first sheet 1100 and the second sheet 1200, and the bonding layer BL has a first horizontal plane 1121 and a second horizontal plane. It is formed between 1221. FIG. 7 illustrates the bonding layer BL as an exaggerated dimension to illustrate the bonding between the first sheet 1100 and the second sheet 1200.

In one embodiment, the first horizontal surface 1121 and the second horizontal surface 1221 may be joined by an adhesive. As the adhesive, a silicone-based adhesive may be used, and the bonding layer BL may include such an adhesive. 4 and 7, the adhesive may be applied to the first horizontal surface 1121 of the first elastic insulating portion 1120 except for the upper end of the first elastic conductive portion 1110. Alternatively, referring to FIGS. 5 and 7, the adhesive may be applied to the second horizontal surface 1221 of the second elastic insulating part 1220, except for the lower end of the second elastic insulating part 1220. The adhesive is not applied to the first elastic conductive portion 1110 and the second elastic conductive portion 1210 and is not bonded to each other. Accordingly, there is no adhesive on the interface between the first elastic conductive portion 1110 and the second elastic conductive portion 1210 in contact with each other to increase the electrical resistance or decrease the conductivity. With regard to the bonding using the above adhesive, one of the first sheet 1100 and the second sheet 1200 may be pressed in the vertical direction VD under a predetermined condition toward the other.

In some embodiments, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 may be bonded to each other. In this case, the thickness of the silicone adhesive is thin, so that the silicone adhesive may be used if the conductivity can be secured. In addition, if necessary, a conductive adhesive may be used. As another example, the bonding layer BL illustrated in FIG. 7 may be formed on the inclined portion of the protrusion 1112 and the inclined portion of the concave portion 1212.

In one embodiment, the conductive sheet may include one or more third sheets disposed between the first sheet and the second sheet. 8 shows a conductive sheet according to a second embodiment of the present disclosure, and FIG. 9 shows the conductive sheet shown in FIG. 8 before being laminated.

Referring to FIG. 8, the conductive sheet 2000 includes a third sheet 2300 disposed between the first sheet 1100 and the second sheet 1200. Due to the third sheet 2300, the conductive sheet 2000 may have a thicker thickness and may have a larger amount of pressing in the vertical direction. The third sheet 2300 has a plurality of third elastic conductive portions 2310 extending in the vertical direction VD and a plurality of third elastic conductive portions 2310 spaced apart from each other in the horizontal direction HD. The third elastic conductive part 2310 may be insulated from the third elastic conductive part 2310. The third elastic conductive portion 2310 is in contact with the lower end (one end of the second elastic conductive portion) of the second elastic conductive portion 1210 at the upper end thereof, and the upper end (first made of the first elastic conductive portion 1110 at the lower end thereof). 1 end of the elastic conductive portion).

Referring to FIG. 9, the third elastic conductive portion 2310 includes a plurality of conductive particles 2311. The plurality of conductive particles 2311 may be the same as the

conductive particles

1111 and 1211 described above. The conductive particles 2311 may be maintained in the shape of the third elastic conductive portion 2310 by the material constituting the third elastic insulating portion 2320. The third elastic insulation part 2320 spaces the third elastic conductive part 2310 adjacent to each other at the fifth horizontal interval D5 in the horizontal direction HD1 and neighbors at the sixth horizontal interval in the horizontal direction HD2. The third elastic conductive portions 2310 are spaced apart from each other. The third elastic insulation part 2320 may be configured in the same manner as the first elastic insulation part or the second elastic insulation part described above.

8 and 9, at least one of the plurality of third elastic conductive parts 2310 of the third sheet 2300 may have a recess 2312 at one of one end and the other end thereof facing in the vertical direction VD. And a protrusion 2313 on the other of one end and the other end. The recess 2312 may be located at the lower end of the third elastic conductive part 2310. The recess 2312 may be configured to be the same as the recess 1212 of the second sheet 1200. The recess 2312 is formed such that the protrusion 1112 of the first sheet 1100 fits into the recess 2312 when the first sheet 1100 and the third sheet 2300 are stacked. The protrusion 2313 may be located at an upper end of the third elastic conductive portion 2310. The protrusion 2313 may be configured to be the same as the protrusion 1112 of the first sheet 1100. The protrusion 2313 is formed to fit into the recess 1212 of the second sheet 1200 when the third sheet 2300 and the second sheet 1200 are stacked. 8 and 9 show a third elastic conductive portion 2310 provided with a recess 2312 and a protrusion 2313 for illustrative purposes only. The recess 2312 and the protrusion 2313 in the third sheet 2300 include the first elastic conductive portion 1110 having the protrusion 1112 and the second elastic conductive portion 1210 having the recess 1212. It may be provided in the third elastic conductive portion 2310 corresponding to the.

The third elastic insulation part 2320 has a pair of third

horizontal surfaces

2321 and 2322 spaced apart in the vertical direction VD and extending in the horizontal direction HD. The third horizontal surface 2321 positioned in the downward direction UD faces the first horizontal surface 1121 of the first sheet 1100. A recess 2312 is positioned in the third horizontal plane 2321, and the recess 2312 is recessed with respect to the third horizontal plane 2321. The third horizontal surface 2232 positioned in the upward direction LD faces the second horizontal surface 1221 of the second sheet 1100. A convex portion 2313 is positioned on the third horizontal surface 2322, and the convex portion 2313 is convex with respect to the third horizontal surface 2232.

As illustrated in FIG. 8, in the conductive sheet 2000, the third sheet 2300 is disposed on the first sheet 1100 and the second sheet 1200 is disposed on the third sheet 2300. The first sheet 1100, the second sheet 1200, and the third sheet 2300 are stacked in the vertical direction VD. In the state in which the first to

third sheets

1100, 1200, and 2300 are stacked, the vertical direction VD between the protrusion 1112 of the first sheet 1100 and the recesses 2322 of the third sheet 2300 is in the vertical direction. The first elastic conductive portion 1110 and the third elastic conductive portion 2310 are aligned and contacted in the vertical direction VD by fitting, and the protrusions 2313 and the second sheet 1200 of the third sheet 2300 are aligned. The third elastic conductive portion 2310 and the second elastic conductive portion 1210 are aligned and contacted in the vertical direction VD by the fitting of the vertical direction VD between the recesses 1212. Accordingly, in the conductive sheet 2000, the first elastic conductive portion 1110, the corresponding third elastic conductive portion 2310, and the corresponding second elastic conductive portion 1210 are perpendicular to the vertical direction VD. Aligned to create a conductive path extending in the vertical direction.

In one embodiment, the conductive sheet 2000, the first sheet 1100 and the third sheet 2300 are bonded to each other, the third sheet 2300 and the second sheet 1200 is bonded to one laminate structure It can be arranged between the device under test and the test device. In this case, the third horizontal surface 2322 of the third sheet 2300 and the first horizontal surface 1121 of the first sheet 1100 may be bonded to each other, and the third horizontal surface 2321 of the third sheet 2300 may be bonded to each other. The second horizontal surface 1221 of the second sheet 1200 may be bonded. This bonding can be done in a manner using the adhesives described above.

The conductive sheet shown in FIG. 8 includes one third sheet. The conductive sheet of another embodiment may include two or more third sheets having the same configuration. Thus, a conductive sheet as a laminated structure having a thicker thickness can be realized.

For description of the conductive sheet according to the third embodiment of the present disclosure, reference is made to the examples shown in FIGS. 10 and 11. FIG. 10 shows a conductive sheet according to the third embodiment, and FIG. 11 shows the conductive sheet shown in FIG. 10 before being laminated.

Referring to FIG. 10, the conductive sheet 3000 according to an embodiment includes a first sheet 3100 and a second sheet 3200 stacked in a vertical direction VD, such that an increased thickness and an increased amount of pressing are performed. Has Positions of the first sheet 3100 and the second sheet 3200 shown in FIG. 10 are merely exemplary, and the first sheet 3100 may be disposed above the second sheet 3200.

The first sheet 3100 has a configuration similar to that of the first sheet 1100 described above. The first sheet 3100 separates the plurality of first elastic conductive parts 1110 in the vertical direction VD and the plurality of first elastic conductive parts 1110 in the horizontal direction HD to separate the plurality of first elastic parts. A first elastic insulating portion 1120 to insulate the conductive portion 1110 from each other. The second sheet 3200 has a configuration similar to that of the second sheet 1200 described above. The second sheet 3200 separates the plurality of second elastic conductive portions 1210 and the plurality of second elastic conductive portions 1210 in the horizontal direction HD from the plurality of second elastic conductive portions 1210 in the vertical direction VD. A second elastic insulating portion 1220 to insulate the conductive portion 1210 from each other. In the conductive sheet 3000 in which the first sheet 3100 and the second sheet 3200 are stacked in the vertical direction VD, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are perpendicular to each other in a vertical direction ( VD) and are in contact at their ends.

In order to fix the position of the first sheet 3100 and the second sheet 3200 and to align the first elastic conductive portion 1110 and the second elastic conductive portion 1210 in the vertical direction VD, Alignment elements similar to the recesses are provided in the first elastic insulating portion 1120 of the first sheet 3100 and the second elastic insulating portion 1220 of the second sheet 3200, respectively. Alignment elements consisting of protrusions and recesses may be formed to fit with each other in the vertical direction VD.

Referring to FIG. 11, in an embodiment, the first elastic insulating portion 1120 of the first sheet 3100 has at least one protrusion 3122, and the protrusion 3122 may include the first elastic conductive portion 1110. Protrude in the vertical direction (VD) with respect to. The protrusion 3122 may be located on the first elastic insulation 1120 in the sheet shown in FIGS. 2A and 2B. The second elastic insulating portion 1220 of the second sheet 3200 has at least one recess 3322, and the recess 3222 is recessed in the vertical direction VD with respect to the second elastic conductive portion 1210. Do. The recess 3322 is formed such that the protrusion 3122 of the first sheet 3100 fits the recess 3322 in the vertical direction VD. The recess 3222 is formed at a position corresponding to the position of the protrusion 3122 on the second elastic insulating portion 1220 of the second sheet 3200. The plurality of first elastic conductive parts 1110 and the plurality of second elastic conductive parts 1210 are aligned in the vertical direction VD by the fitting in the vertical direction VD between the protrusion part 3122 and the concave part 3222. In the contacted and aligned state, the first sheet 3100 and the second sheet 3200 are stacked in the vertical direction VD.

Referring to FIG. 11, in an embodiment, the first elastic insulation portion 1120 of the first sheet 3100 has a first horizontal surface 1121 extending in the horizontal direction HD, and the second sheet 3200. The second elastic insulating portion 1220 has a second horizontal surface 1221 extending in the horizontal direction HD. The first horizontal plane 1121 and the second horizontal plane 1221 face each other in the vertical direction VD. The protrusion 3122 protrudes from the first horizontal plane 1121 in the vertical direction VD, and the recess 3322 is recessed from the second horizontal plane 1221 in the vertical direction VD.

The protrusion 3122 and the recess 3322 realize fitting in the vertical direction VD. When the first sheet 3100 and the second sheet 3200 are stacked, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 due to the fitting between the protrusion 3122 and the recess 3322. Is aligned in the vertical direction VD and one end of the first elastic conductive portion 1110 (eg, the upper end of the first elastic conductive portion shown in FIG. 11) and one end of the second elastic conductive portion 1210 (eg, FIG. 11). The lower end of the second elastic conductive portion shown in FIG. 6 is in contact in the vertical direction VD. As such, when the first sheet 3100 and the second sheet 3200 are stacked, the alignment in the vertical direction VD of the elastic conductive portions is structurally performed by the protrusions 3122 and the recesses 3322. . Therefore, the conductive sheet 3000 has a thick thickness due to the laminated structure and does not cause an increase in electrical resistance or a decrease in conductivity due to the aligned elastic conductive portions. In addition, the protrusion part 3122 and the recess part 3322 fitted in the vertical direction VD fix the position of the 1st sheet 3100 and the 2nd sheet 3200 in the horizontal direction HD. Accordingly, even if repeated pressing is applied to the conductive sheets 3000 stacked for the inspection of the device under test, the first sheet 3100 and the second sheet 3200 are not moved relative to each other. Therefore, the conductive sheet 3000 has a stable laminated structure that can maintain conductivity with high reliability for a long time.

The protrusion part 3122 and the recess part 3222 have a plurality of first elastic conductive parts 1110 and a plurality of second elastic conductive parts 1210 when the first sheet 3100 and the second sheet 3200 are stacked. ) Serves as a reference point for alignment in the vertical direction (VD). The protrusion 3122 and the recess 3322 are formed such that the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD and contact in the vertical direction VD. For example, when the overall height of the first sheet 3200 is T, the height of the protrusion 3122 may be 0.05T to 0.15T.

According to an embodiment, within the range of the height at which the protrusion 3122 fits significantly into the recess 3322, the protrusion 3122 is at a suitable height within the range of the height at which the protrusion 3122 is fully fitted to the recess 3322. It can have In one embodiment, the protrusion 3122 may have a height of 90% to 100% of the depth of the recess 3322. As such, the protrusion 3122 may have a height that is less than or equal to the depth of the recess 3322. Accordingly, when the first sheet 3100 and the second sheet 3200 are stacked, the concave portion 3222 may fit all of the protrusions 3122 to the concave portion 3222, and the first horizontal surface ( 1121 and the second horizontal surface 1221 may be completely in contact with each other, and all of the first elastic conductive parts 1110 and all of the second elastic conductive parts 1210 may be contacted in the vertical direction VD.

10 and 11, the protrusion 3122 has an inclined portion 3123 inclined with respect to the central axis CA1 of the protrusion. The inclined portion 3123 extends annularly in the circumferential direction of the protrusion 3122 to form an outer circumferential portion of the protrusion 3122. The inclination angle of the inclination portion 3123 with respect to the central axis CA1 may be the inclination angle IA1 described above. The recess 3322 has a shape corresponding to the shape of the protrusion 3122. Accordingly, the recess 3322 has an inclined portion 3223 inclined with respect to the central axis CA2 of the recess. The inclined portion 3223 extends annularly in the circumferential direction of the concave portion 3222 to form an inner circumferential portion of the concave portion 3222. The inclination angle of the inclined portion 3223 with respect to the central axis CA2 may be the inclination angle IA2 described above. When the first sheet 3100 and the second sheet 3200 are stacked, the protrusion 3122 fits into the recess 3322, so that the inclined portion 3123 and the inclined portion 3223 contact each other.

In one embodiment, the first sheet 3100 and the second sheet 3200 may be bonded to each other. The conductive sheet 3000 having the first sheet 3100 and the second sheet 3200 bonded to each other may be disposed between the device under test and the inspection apparatus as a laminate structure having a thick thickness. Referring to FIG. 11, bonding of the first sheet 3100 and the second sheet 3200 may be performed at the first horizontal plane 1121 and the second horizontal plane 1221. Accordingly, the conductive sheet 3000 may have a bonding layer BL similar to the bonding layer shown in FIG. 7 between the first sheet 3100 and the second sheet 3200. The first horizontal surface 1121 of the first sheet 3100 and the second horizontal surface 1221 of the second sheet 3200 may be joined by a method using the aforementioned adhesive. The adhesive may be applied to the first horizontal surface 1121 except for the upper end of the first elastic conductive portion 1110. Alternatively, the adhesive may be applied to the second horizontal surface 1221 except for the lower end of the second elastic insulating portion 1220.

12A to 12D show various examples of protrusions and recesses in the above-described third embodiment.

Referring to FIG. 12A, the first elastic insulation portion 1120 of the first sheet 3100 may have one protrusion 3122, and the second elastic insulation portion 1220 of the second sheet 3200 may be formed of a first elastic insulation portion 1120. It may have one concave portion 3222 formed at a position corresponding to the position of the protrusion 3122 of the first sheet 3100.

Referring to FIG. 12B, the protrusion 3122 may be positioned at the center of the sheet illustrated in FIGS. 2A and 2B, and the recess 3322 may be positioned to correspond to the position of the protrusion 3122. Alternatively, the protrusions of the first elastic insulator may be located at each corner of the sheet shown in FIGS. 2A and 2B, and the second elastic insulator may have the recesses at positions corresponding to the protrusions.

12C and 12D, the first elastic conductive portion 1110 may have a protrusion 3112 adjacent to the protrusion 3122, and the second elastic conductive portion 1210 is adjacent to the recess 3322. It may have a recess 3212. The protrusion 3112 protrudes with respect to the first horizontal plane 1121, and the recess 3212 is concave with respect to the second horizontal plane 1221. The protrusions 3112 and the recesses 3212 may be configured similarly to the protrusions and the recesses of the first embodiment described above, respectively. The protrusion 3112 may be formed to fit with the recess 3212 in the vertical direction VD. Referring to FIG. 12C, the protrusion 3122 of the first elastic insulating portion 1120 may extend to the protrusion 3112 and the protrusion 3122 may be adjacent to the protrusion 3122. In addition, the concave portion 3222 of the second elastic insulation portion 1220 may extend to the concave portion 3212, and the concave portion 3212 may be adjacent to the concave portion 3222. Referring to FIG. 12D, the protrusions 3122 of the first elastic insulating unit 1120 may be formed in a straight line along a plurality of protrusions 3112 positioned in a line. In addition, the concave portion 3222 of the second elastic insulating portion 1220 may be formed in a straight line along a plurality of concave portions 3212 positioned in a line.

13A-13G illustrate various shapes of protrusions provided on the elastic conductive portions. When taking the cross section of the protrusion 3122 in the horizontal direction, the cross-sectional shape in the horizontal direction of the protrusion 3122 may have any one of a circle, an ellipse, an ellipse, and a rectangle. As shown in FIGS. 13A and 13B, the cross-sectional shape in the horizontal direction of the protrusion 3122 may have a circular shape. As shown in FIG. 13C, the cross-sectional shape in the horizontal direction of the protrusion 3122 may have an ellipse. As shown in FIG. 13D, the cross-sectional shape in the horizontal direction of the protrusion 3122 may have an oblong shape. The long oval means a shape having a pair of arc-shaped curves facing each other and a pair of straight lines slightly longer than the ellipse and parallel to each other. As shown in FIGS. 13E-13G, the cross-sectional shape in the horizontal direction of the protrusion 3122 may have a rectangular or square shape. The recesses 3222 have a cross-sectional shape complementary to the cross-sectional shapes of the protrusions 3122 described above, so that the protrusions 3122 and the recesses 3222 can be fitted in the vertical direction VD. In the case of the elongated protrusions shown in Figs. 13C to 13G and the recesses corresponding to these shapes, alignment between the elastic conductive parts may be achieved by one protrusion and one recess.

14 and 15 illustrate a conductive sheet according to a fourth embodiment of the present disclosure. 14 is a cross-sectional view showing a conductive sheet according to a fourth embodiment of the present disclosure, and FIG. 15 is a cross-sectional view showing the conductive sheet shown in FIG. 14 before being laminated.

14 and 15, the conductive sheet 4000 may include a third sheet in which a first sheet 3100 provided with a protrusion 3122 and a recess 3322 are disposed between the second sheet 3200 ( 4300). Due to the third sheet 4300, the conductive sheet 4000 may have a thicker thickness and may have a larger amount of pressing in the vertical direction.

The third sheet 4300 is the aforementioned third sheet 2300 except that an alignment element for alignment in the vertical direction VD of the elastic conductive portions is provided in the third elastic conductive portion of the third sheet 4300. Has a configuration similar to that of The third sheet 4300 separates and insulates the plurality of third elastic conductive parts 2310 oriented in the vertical direction VD and the plurality of third elastic conductive parts 2310 from each other in the horizontal direction HD. The third elastic insulating portion 2320 is included. The third elastic conductive portion 2310 of the third sheet 4300 includes a plurality of conductive particles 2311 shown in FIG. 9.

Referring to FIG. 15, the third elastic insulation part 2320 of the third sheet 4300 has at least one recess 4323 in one of the one end and the other end facing in the vertical direction VD, and among the one end and the other end. At least one protrusion 4324 is on the other. The recess portion 4323 may be positioned below the third elastic insulating portion 2320. The recess portion 4323 may be configured to be the same as the recess portion 3222 of the second sheet 3200. When the first sheet 3100 and the third sheet 4300 are stacked, the protrusions 3122 of the first sheet 3100 are fitted to the recesses 4323. The protrusion 4324 may be positioned above the third elastic insulation part 2320. The protrusion 4324 may be configured to be the same as the protrusion 3122 of the first sheet 3100. When the third sheet 2300 and the second sheet 1200 are stacked, the protrusions 4324 fit into the recesses 3222 of the second sheet 3200.

The third elastic insulation part 2320 has a pair of third

horizontal surfaces

2321 and 2322 spaced apart in the vertical direction VD. The third horizontal surface 2321 in the downward direction LD faces the first horizontal surface 1121 of the first sheet 3100. The recessed part 4323 is located in the 3rd horizontal surface 2321, and the recessed part 4323 is recessed from the 3rd horizontal surface 2321. The third horizontal surface 2232 in the upward direction UD faces the second horizontal surface 1221 of the second sheet 3200. A protrusion 4324 is positioned on the third horizontal surface 2322, and the protrusion 4324 is convex from the third horizontal surface 2322.

As shown in FIG. 14, the first sheet 3100, the third sheet 4300 is disposed on the first sheet 3100, and the second sheet 3200 is disposed on the third sheet 4300. The second sheet 3200 and the third sheet 4300 are stacked in the vertical direction VD. In a state in which the first to

third sheets

3100, 3200, and 4300 are stacked, the vertical direction VD between the protrusion 3122 of the first sheet 3100 and the concave portion 4323 of the third sheet 4300 is measured. The first elastic conductive portion 1110 and the third elastic conductive portion 2310 are aligned and contacted in the vertical direction VD by fitting, and the protrusions 4324 and the second sheet 3200 of the third sheet 4300 are aligned. The third elastic conductive portion 2310 and the second elastic conductive portion 1210 are aligned and contacted in the vertical direction VD by the fitting of the vertical direction VD between the recesses 3222 of FIG.

In one embodiment, the conductive sheet 4000 is a laminated structure by bonding the first sheet 3100 and the third sheet 4300 and the third sheet 4300 and the second sheet 3200 are bonded. It can be arranged between the device under test and the test device. In this case, the third horizontal surface 2321 of the third sheet 4300 and the first horizontal surface 1121 of the first sheet 3100 may be bonded to each other, and the third horizontal surface 2322 of the third sheet 4300 may be bonded to each other. The second horizontal surface 1221 of the second sheet 3200 may be bonded. This bonding can be done in a manner using the adhesives described above.

The conductive sheet shown in FIG. 14 includes one third sheet 4300. In another embodiment, the conductive sheet may include two or more third sheets 4300 having the same configuration. Thus, a conductive sheet as a laminated structure having a thicker thickness can be realized.

While the technical spirit of the present disclosure has been described with reference to some embodiments and the accompanying drawings, the technical spirit and scope of the present disclosure may be understood by those skilled in the art. It will be appreciated that various substitutions, modifications, and alterations can be made in the scope. Also, such substitutions, modifications and variations are intended to be included within the scope of the appended claims.

Claims

A conductive sheet disposed between the inspection device and the device under test,

A plurality of first elastic conductive parts in a vertical direction and a first elastic insulating part for separating and insulating the plurality of first elastic conductive parts in a horizontal direction, wherein at least one of the first elastic conductive parts is provided in the first elastic insulating part; A first sheet having a protrusion projecting in the vertical direction relative to the first sheet;

And a second elastic insulating portion for separating and insulating the plurality of second elastic conductive portions in the vertical direction and the plurality of second elastic conductive portions in the horizontal direction, wherein at least one second elastic conductive portion includes: A second sheet having a concave recessed in the vertical direction with respect to the second elastic insulated portion to fit into the at least one second elastic conductive portion in a vertical direction,

The first sheet and the second sheet are laminated in the vertical direction,

Conductive sheet.
The method of claim 1,

The first elastic insulating portion has a first horizontal surface extending in the horizontal direction and the second elastic insulating portion has a second horizontal surface extending in the horizontal direction and opposite the first horizontal surface,

The protrusion protrudes with respect to the first horizontal plane and the concave part is concave with respect to the second horizontal plane,

The first horizontal plane and the second horizontal plane are bonded to each other,

Conductive sheet.
The method of claim 2,

A third elastic insulating part spaced apart from and insulated from the horizontal direction by the plurality of third elastic conductive parts in the vertical direction and the plurality of third elastic conductive parts and disposed between the first sheet and the second sheet. 3 more seats included

At least one third elastic conductive portion has a recess in which the protrusion of the first sheet fits into one of one end and the other end facing in the vertical direction and a recess of the second sheet in the other of the one end and the other end. With protrusions to be fitted,

Conductive sheet.
The method of claim 3,

The third elastic insulating portion has a pair of third horizontal plane spaced apart in the vertical direction,

A concave portion of the at least one third elastic conductive portion is located in one of the pair of third horizontal surfaces, and a protrusion of the at least one third elastic conductive portion is located in another one of the pair of third horizontal surfaces,

One of the first horizontal plane and one of the pair of third horizontal planes is bonded, and the other of the second horizontal plane and the pair of third horizontal planes is bonded,

Conductive sheet.
The method of claim 1,

The protrusion has an inclined portion inclined with respect to the central axis of the protrusion,

The recessed portion having an inclined portion inclined with respect to the central axis of the recessed portion and in contact with the inclined portion of the protrusion,

Conductive sheet.
The method of claim 1,

Wherein the plurality of first elastic conductive portions have the protruding portion, and the plurality of second elastic conductive portions have the concave portion,

Conductive sheet.
The method of claim 6,

The recess has a depth of 10% to 100% of the height of the protrusion,

Conductive sheet.
The method of claim 1,

The first elastic insulating portion has a protrusion adjacent to the protrusion of the at least one first elastic conductive portion,

Wherein the second elastic insulating portion has a recess that is adjacent to the recess of the at least one second elastic conductive portion and to which the protrusion of the first elastic insulating portion is fitted.

Conductive sheet.
The method of claim 1,

The first elastic conductive portion and the second elastic conductive portion includes a plurality of conductive particles arranged in the vertical direction,

Conductive sheet.
The method of claim 1,

Wherein the first elastic insulator and the second elastic insulator include silicon rubber material,

Conductive sheet.
The method of claim 2,

The first horizontal plane and the second horizontal plane are joined by an adhesive;

Conductive sheet.
A conductive sheet disposed between the inspection device and the device under test,

A plurality of first elastic conductive parts in a vertical direction and a first elastic insulating part for separating and insulating the plurality of first elastic conductive parts in a horizontal direction, wherein the first elastic insulating parts are provided with respect to the plurality of first elastic conductive parts. A first sheet having at least one protrusion projecting in the vertical direction,

A plurality of second elastic insulators which are spaced apart from and insulated from the plurality of second elastic conductive parts in the vertical direction and the plurality of second elastic conductive parts in the horizontal direction; A second sheet, concave in the vertical direction with respect to and having at least one recess in which the protrusion fits in the vertical direction,

The first sheet and the second sheet are laminated in the vertical direction,

Conductive sheet.
The method of claim 12,

The first elastic insulating portion has a first horizontal surface extending in the horizontal direction and the second elastic insulating portion has a second horizontal surface extending in the horizontal direction and opposite the first horizontal surface,

The protrusion protrudes from the first horizontal plane and the concave portion concave from the second horizontal plane,

The first horizontal plane and the second horizontal plane are bonded to each other,

Conductive sheet.
The method of claim 13,

A third elastic insulating part spaced apart from and insulated from the horizontal direction by the plurality of third elastic conductive parts in the vertical direction and the plurality of third elastic conductive parts and disposed between the first sheet and the second sheet. 3 more seats included

The third elastic insulating portion has at least one recess in which the protrusion of the first sheet fits into one of one end and the other end facing in the vertical direction and the recess of the second sheet at the other of the one end and the other end. With at least one protrusion fitted

Conductive sheet.
The method of claim 14,

The third elastic insulating portion has a pair of third horizontal plane spaced apart in the vertical direction,

A concave portion of the third elastic insulation portion is located in one of the pair of third horizontal surfaces, and a protrusion of the third elastic insulation portion is located in another one of the pair of third horizontal surfaces,

One of the first horizontal plane and one of the pair of third horizontal planes is bonded, and the other of the second horizontal plane and the pair of third horizontal planes is bonded,

Conductive sheet.
The method of claim 12,

The cross sectional shape in the horizontal direction of the protrusion has any one of a circle, an ellipse, an ellipse, and a quadrangle, and the recess has a cross sectional shape complementary to the cross sectional shape of the protrusion,

Conductive sheet.
The method of claim 12,

The protrusion has a height of 90% to 100% of the depth of the recess,

Conductive sheet.
The method of claim 12,

At least one first elastic conductive portion has a protrusion adjacent to a protrusion of the first elastic insulating portion,

At least one second elastic conductive portion has a concave portion adjacent to the concave portion of the second elastic insulating portion and to which a protrusion of the at least one first elastic conductive portion is fitted;

Conductive sheet.
The method of claim 12,

The first elastic conductive portion and the second elastic conductive portion includes a plurality of conductive particles arranged in the vertical direction,

Conductive sheet.
The method of claim 12,

Wherein said first elastic insulator and said second elastic insulator comprise silicon rubber material,

Conductive sheet.
The method of claim 13,

The first horizontal plane and the second horizontal plane are joined by an adhesive,

Conductive sheet.