CN112470012A

CN112470012A - Conductive sheet for inspection

Info

Publication number: CN112470012A
Application number: CN201980049553.7A
Authority: CN
Inventors: 郑永倍
Original assignee: ISC Co Ltd
Current assignee: ISC Co Ltd
Priority date: 2018-07-25
Filing date: 2019-07-23
Publication date: 2021-03-09
Also published as: KR101985445B1; TW202012940A; TWI753277B; WO2020022745A1

Abstract

A conductive sheet is provided to be disposed between an inspection apparatus and a device under inspection in order to inspect the device under inspection. The conductive sheet includes a1 st sheet and a2 nd sheet laminated in a vertical direction. The 1 st sheet includes a plurality of 1 st elastic conductive portions in the vertical direction, and a1 st elastic insulating portion that separates and insulates the plurality of 1 st elastic conductive portions in the horizontal direction. At least one 1 st elastic conductive portion has a protruding portion protruding in a vertical direction with respect to the 1 st elastic insulating portion. The 2 nd sheet includes a plurality of 2 nd elastic conductive portions in the vertical direction and a2 nd elastic insulating portion that separates and insulates the plurality of 2 nd elastic conductive portions in the horizontal direction. The at least one 2 nd elastic conductive portion has a recessed portion recessed in a vertical direction with respect to the 2 nd elastic insulating portion so that the protruding portion of the 1 st elastic conductive portion is fitted to the at least one 2 nd elastic conductive portion in the vertical direction.

Description

Conductive sheet for inspection

Technical Field

The present disclosure relates to a conductive sheet for inspecting a device under inspection.

Background

In order to inspect the device under inspection, a connector for electrically connecting the device under inspection and the inspection apparatus is disposed between the device under inspection and the inspection apparatus. The connector transmits the electrical test signal of the inspection device to the inspected device, and transmits the response signal of the inspected device to the inspection device. As such a connector, a pogo pin test socket (pogo pin test socket) and a conductive rubber sheet (conductive rubber socket) are being used.

The pogo pin test socket has pogo pins pressed in a vertical direction in response to an external force applied to a device under inspection. The pogo pin test socket is required to accommodate a part of the pogo pin, and thus it is difficult to have a thin thickness and to be applied to a fine pitch of a terminal of a device to be inspected.

The conductive rubber sheet is elastically deformable in response to an external force applied to the device under inspection. The conductive rubber sheet is advantageous in that it can be manufactured at less manufacturing cost, does not damage the terminals of the device under inspection, and has a very thin thickness, as compared with the pogo pin test socket. Therefore, various attempts to test sockets with conductive rubber sheets instead of pogo pins are being made in the field of inspection of devices under inspection.

The pogo pin test socket has a thickness thicker than the conductive rubber sheet. Therefore, it is impossible to replace the pogo pin test socket with a conductive rubber sheet by replacing one pogo pin test socket with one conductive rubber sheet. In order to achieve this replacement, redesign is required to adapt the components that attach the pogo pin test socket to the inspection device to the conductive rubber sheet. A conductive rubber sheet having a thickness equal to that of the pogo pin test socket is also conceivable. However, as the thickness of the conductive rubber sheet is increased, the resistance of the conductive rubber sheet is increased and the conductive performance is lowered, so that it is difficult to make the conductive rubber sheet have a predetermined thickness or more.

Regarding the replacement of the pogo pin test socket with the conductive rubber sheet, it is proposed in korean laid-open patent publication No. 10-2006-0123910 to dispose a conductive sheet similar to one conductive rubber sheet below it. However, simply disposing two conductive sheets one above the other cannot solve adverse effects such as a decrease in conductivity and a change in relative positions of the members disposed one above the other.

Disclosure of Invention

[ problem ] to

Embodiments of the present disclosure provide a laminate-type conductive sheet having an increased thickness. Embodiments of the present disclosure provide a laminate-type conductive sheet in which elastic conductive portions are aligned in a vertical direction. Embodiments of the present disclosure provide a laminated conductive sheet in which the positions of elastic conductive portions to be aligned do not change.

Means for solving the problems

Embodiments of the present disclosure relate to a conductive sheet arranged between an inspection apparatus and a device under inspection for inspecting the device under inspection. In one embodiment of the conductive sheet, the conductive sheet includes a1 st sheet and a2 nd sheet laminated in a vertical direction.

In one embodiment, the 1 st sheet includes a plurality of 1 st elastic conductive portions in a vertical direction, and a1 st elastic insulating portion that partitions and insulates the plurality of 1 st elastic conductive portions in a horizontal direction. At least one 1 st elastic conductive portion has a protruding portion protruding in a vertical direction with respect to the 1 st elastic insulating portion. The 2 nd sheet includes a plurality of 2 nd elastic conductive portions in the vertical direction, and a2 nd elastic insulating portion that separates and insulates the plurality of 2 nd elastic conductive portions in the horizontal direction. The at least one 2 nd elastic conductive portion has a recessed portion recessed in a vertical direction with respect to the 2 nd elastic insulating portion so that the protruding portion of the 1 st elastic conductive portion is fitted to the at least one 2 nd elastic conductive portion in the vertical direction.

In one embodiment, the 1 st elastic insulation part has a1 st horizontal plane extending in a horizontal direction, and the 2 nd elastic insulation part has a2 nd horizontal plane extending in the horizontal direction and opposite to the 1 st horizontal plane. The protrusion protrudes with respect to the 1 st horizontal surface, the depression is depressed with respect to the 2 nd horizontal surface, and the 1 st horizontal surface and the 2 nd horizontal surface are engaged with each other.

In one embodiment, the conductive sheet further includes a 3 rd sheet, the 3 rd sheet includes a plurality of 3 rd elastic conductive portions in a vertical direction and a 3 rd elastic insulating portion for separating and insulating the plurality of 3 rd elastic conductive portions in a horizontal direction, and the 3 rd sheet is disposed between the 1 st sheet and the 2 nd sheet. At least one 3 rd elastic conductive portion has a recessed portion in which a protruding portion of the 1 st sheet is fitted at one of one end and the other end opposite in the vertical direction, and has a protruding portion in which a protruding portion of the 2 nd sheet is fitted at the other of the one end and the other end.

In one embodiment, the 3 rd elastic insulation part has a pair of 3 rd horizontal planes spaced apart in a vertical direction. The recessed portion of the at least one 3 rd resilient conductive portion is located at one of a pair of 3 rd levels and the protruding portion of the at least one 3 rd resilient conductive portion is located at the other of the pair of 3 rd levels. The 1 st level is engaged with one of the pair of 3 rd levels, and the 2 nd level is engaged with the other of the pair of 3 rd levels.

In one embodiment, the protruding portion has an inclined portion inclined with respect to a central axis of the protruding portion, and the recessed portion has an inclined portion inclined with respect to the central axis of the recessed portion and in contact with the inclined portion of the protruding portion.

In one embodiment, the plurality of 1 st elastic conductive portions have protrusions and the plurality of 2 nd elastic conductive portions have recesses.

In one embodiment, the depression has a depth of 10% to 100% of the height of the protrusion.

In one embodiment, the 1 st resilient conductive portion has a protrusion adjacent to the protrusion of the at least one 1 st resilient conductive portion, and the 2 nd resilient conductive portion has a recess adjacent to the recess of the at least one 2 nd resilient conductive portion and into which the protrusion of the 1 st resilient conductive portion fits.

In still another embodiment of the conductive sheet, the 1 st elastic insulating portion of the 1 st sheet has at least one protruding portion protruding in a perpendicular direction with respect to the plurality of 1 st elastic conductive portions. The 2 nd elastic insulating portion of the 2 nd sheet has at least one recessed portion recessed in the vertical direction with respect to the plurality of 2 nd elastic conductive portions and having the protruding portion of the 1 st elastic insulating portion fitted in the vertical direction.

In one embodiment, the 1 st elastic insulation part has a1 st horizontal plane extending in a horizontal direction, and the 2 nd elastic insulation part has a2 nd horizontal plane extending in the horizontal direction and opposite to the 1 st horizontal plane. The protrusion protrudes from the 1 st horizontal surface, the depression is recessed from the 2 nd horizontal surface, and the 1 st and 2 nd horizontal surfaces are engaged with each other.

In one embodiment, the 3 rd elastic insulating part of the 3 rd sheet has at least one recess into which the protrusion of the 1 st sheet is fitted at one of the vertically opposite one end and the other end, and at least one protrusion fitted to the recess of the 2 nd sheet at the other one of the one end and the other end.

In one embodiment, the horizontal cross-sectional shape of the protruding portion of the 1 st elastic insulating portion may be any one of a circle, an ellipse, an oblong, and a quadrangle. The recess of the 2 nd elastic insulating portion may have a cross-sectional shape complementary to a cross-sectional shape of the protrusion.

In one embodiment, the protrusion has a height of 90% to 100% of the depth of the recess.

In one embodiment, at least one 1 st elastic conductive portion has a protrusion adjacent to the protrusion of the 1 st elastic insulating portion, and at least one 2 nd elastic conductive portion has a recess adjacent to and engaging the recess of the 2 nd elastic insulating portion.

In one embodiment, the 1 st and 2 nd elastic conductive portions include a plurality of conductive particles aligned in a vertical direction.

In one embodiment, the 1 st and 2 nd elastic insulating parts comprise a silicon rubber material.

In one embodiment, the 1 st horizontal surface of the 1 st sheet and the 2 nd horizontal surface of the 2 nd sheet may be joined by an adhesive.

[ Effect of the invention ]

According to an embodiment of the present disclosure, a laminate-type conductive sheet having an increased thickness may be provided. According to one embodiment of the present disclosure, matching between alignment components aligns the elastic conductive portions in the vertical direction, and therefore a laminate-type conductive sheet in which alignment between the elastic conductive portions is easily performed in configuration can be provided. Further, the electrical resistance of the laminated conductive sheet is not increased due to the elastic conductive portions aligned by the matching alignment members, the conductivity of the laminated conductive sheet is not decreased, and the laminated structure of the laminated conductive sheet is stably maintained. According to one embodiment of the present disclosure, the matched alignment block prevents the position change of the elastic conductive portion, and thus a laminated conductive sheet capable of maintaining conductivity with high reliability for a long period of time can be provided.

Drawings

Fig. 1 schematically illustrates a cross-sectional view of a conductive sheet according to embodiment 1 of the present disclosure.

Fig. 2a illustrates a schematic example of a planar arrangement of an elastic conductive portion and an elastic insulating portion in a conductive sheet according to an embodiment.

Fig. 2b illustrates a schematic example of a planar arrangement of an elastic conductive portion and an elastic insulating portion in a conductive sheet according to an embodiment.

Fig. 3 is a cross-sectional view illustrating the conductive sheet shown in fig. 1 before lamination.

Fig. 4 is a sectional perspective view of the 1 st sheet shown in fig. 3.

Fig. 5 is a sectional perspective view of the 2 nd sheet shown in fig. 3.

Fig. 6a illustrates an example of a protrusion and a recess in embodiment 1.

Fig. 6b illustrates an example of the protrusion and the recess in embodiment 1.

Fig. 6c illustrates an example of the protrusion and the depression in embodiment 1.

Fig. 6d illustrates an example of a protrusion and a recess in embodiment 1.

Fig. 6e illustrates an example of a protrusion and a recess in embodiment 1.

Fig. 6f illustrates an example of the protrusion and the recess in embodiment 1.

Fig. 6g illustrates an example of the protrusion and the depression in embodiment 1.

Fig. 7 is a cross-sectional view showing an example of the joining between the 1 st sheet and the 2 nd sheet.

Fig. 8 is a sectional view illustrating a conductive sheet according to embodiment 2 of the present disclosure.

Fig. 9 is a cross-sectional view illustrating the conductive sheet shown in fig. 8 before lamination.

Fig. 10 is a sectional view illustrating a conductive sheet according to embodiment 3.

Fig. 11 is a cross-sectional view illustrating the conductive sheet shown in fig. 10 before lamination.

Fig. 12a illustrates an example of the protrusion and the depression in embodiment 3.

Fig. 12b illustrates an example of the protrusion and the depression in embodiment 3.

Fig. 12c illustrates an example of the protrusion and the depression in embodiment 3.

Fig. 12d illustrates an example of the protrusion and the depression in embodiment 3.

Fig. 13a illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13b illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13c illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13d illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13e illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13f illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 13g illustrates an example of the shape of the protruding portion provided to the elastic conductive portion.

Fig. 14 is a sectional view illustrating a conductive sheet according to embodiment 4 of the present disclosure.

Fig. 15 is a cross-sectional view illustrating the conductive sheet shown in fig. 14 before lamination.

Detailed Description

The embodiments of the present disclosure are exemplified for the purpose of explaining the technical idea of the present invention. The scope of rights according to the present disclosure is not limited to the embodiments presented below or the specific description of the embodiments.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. All terms used in the present invention are selected for the purpose of more clearly illustrating the present disclosure, and are not selected for the purpose of limiting the scope of the claims of the present disclosure.

Expressions such as "include", "have", etc. used in the present disclosure should be understood as open-ended terms (open-ended terms) having the possibility of including other embodiments, as long as other meanings are not mentioned in the sentence or sentence including the corresponding expression.

The singular expressions recited in the present disclosure may include the plural meanings as long as other meanings are not mentioned, and this also applies equally to the singular expressions recited in the claims.

The terms "1 st", "2 nd", and the like used in the present disclosure are used to distinguish a plurality of constituent elements from each other, and do not limit the order or importance of the respective constituent elements.

In the present disclosure, when a certain component is referred to as being "connected" or "coupled" to another component, it is to be understood that the certain component may be directly connected or coupled to the other component, or may be connected or coupled via another new component.

As used in the present disclosure, the direction indicator of "upper" is based on the direction in which the conductive sheet is positioned with respect to the inspection apparatus, and the direction indicator of "lower" is the opposite direction to the upper direction. The directional indicator of "vertical direction" used in the present disclosure includes an upper direction and a lower direction, but should be understood not to refer to a specific direction of the upper direction and the lower direction.

Hereinafter, embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding constituent elements are given the same reference numerals. In the following description of the embodiments, the same or corresponding components may not be described repeatedly. However, even if the description of the constituent elements is omitted, it does not mean that such constituent elements are not included in any embodiment.

The embodiments described below relate to a conductive sheet for inspecting a device under inspection, and examples shown in the accompanying drawings. The conductive sheet according to the embodiment can be used for final inspection of the device under inspection in a subsequent step in the manufacturing steps of the device under inspection. However, examples to which the inspection of the conductive sheet according to the embodiment is applied are not limited to the above examples.

Fig. 1 illustrates a conductive sheet of embodiment 1 of the present invention. Referring to fig. 1, a conductive sheet (conductive sheet)1000 of an embodiment is disposed between an inspection apparatus 10 and a device 20 to be inspected for inspecting the device 20 to be inspected.

To inspect the device 20 under inspection, the socket 30 accommodating the device 20 under inspection can be removably mounted to the inspection apparatus 10. The socket 30 accommodates the device 20 to be inspected which is carried to the inspection apparatus 10 by the carrying device of the test handle therein, and positions the device 20 to be inspected in the inspection apparatus 10. The conductive sheet 1000 can be coupled to the socket 30 in a replaceable manner.

The device under test 20 may be a semiconductor package, for example, but is not limited thereto. The semiconductor package is a semiconductor device in which a semiconductor IC (Integrated Circuit) chip, a plurality of lead frames (lead frames), and a plurality of terminals are sealed in a hexahedral form using a resin material. As the above-described terminals, pins, solder balls (solder balls), or the like can be used. The semiconductor device 20 shown in fig. 1 includes terminals of solder balls. Therefore, the semiconductor device 20 has a plurality of terminals 21 of a hemispherical shape on its lower surface. Further, the semiconductor IC chip of the semiconductor device may be a memory IC chip or a non-memory IC chip.

The inspection apparatus 10 can inspect the electrical characteristics, functional characteristics, operation speed, and the like of the device 20 to be inspected. The inspection apparatus 10 may have a plurality of conductive pads 11 that can apply electrical test signals and can receive response signals in a test board performing the inspection. The conductive sheet 1000 may be positioned on the conductive pad 11 of the inspection apparatus 10 through the socket 30 to be in contact with the conductive pad 11. The terminals 21 of the device under inspection 20 are electrically connected to the corresponding conductive pads 11 through the conductive sheet 1000. That is, the conductive sheet 1000 connects the terminals 21 of the device 20 under inspection and the conductive pads 11 corresponding to the terminals 21 in such a manner as to be conductive in the vertical direction VD, thereby inspecting the device 20 under inspection by the inspection apparatus 10.

The conductive sheet 1000 of one embodiment includes a1 st sheet 1100 and a2 nd sheet 1200 laminated in a vertical direction VD. The conductive sheet 1000 has an increased thickness and an increased pressing amount due to the laminated 1 st sheet 1100 and 2 nd sheet 1200. If an external force in the downward direction LD is applied to the 1 st and 2

nd sheets

1100 and 1200, the 1 st and 2

nd sheets

1100 and 1200 can be elastically deformed in the downward direction LD and the horizontal direction HD. The above-described external force can be generated by pressing the device 20 to be inspected toward the inspection apparatus 10 side by the pushing means of the test handle. By such an external force, the device under inspection 20 and the conductive sheet 1000 may be in contact in the vertical direction VD, and the conductive sheet 1000 and the conductive pad 11 may be in contact in the vertical direction VD. When the external force is removed, the conductive sheet 1000 can be restored to its original shape.

The 1 st sheet 1100 has a similar configuration to the 2 nd sheet 1200. The 1 st sheet 1100 includes a plurality of 1 st elastic conductive portions 1110 in the vertical direction VD, and a1 st elastic insulating portion 1120 which partitions the plurality of 1 st elastic conductive portions 1110 in the horizontal direction HD and insulates the plurality of 1 st elastic conductive portions 1110 from each other. The 2 nd sheet 1200 includes a plurality of 2 nd elastic conductive portions 1210 in the vertical direction VD, and a2 nd elastic insulating portion 1220 that partitions the plurality of 2 nd elastic conductive portions 1210 in the horizontal direction HD and insulates the plurality of 2 nd elastic conductive portions 1210 from each other. In the conductive sheet 1000, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are positioned in the vertical direction VD. Further, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are aligned in the vertical direction VD and respective ends are in conductive contact.

In the example shown in fig. 1, the 1 st elastic conductive portion 1110 is in contact at its upper end with the lower end of the 2 nd elastic conductive portion 1210 (one end of the 2 nd elastic conductive portion), and its lower end is in contact with the conductive pad 11 of the inspection apparatus 10. The 2 nd elastic conductive portion 1210 is in contact with the terminal 21 of the device under test 20 at its upper end, and in contact with the upper end of the 1 st elastic conductive portion 1110 (one end of the 1 st elastic conductive portion). Thus, in the conductive sheet 1000, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210, which are aligned and in contact along the vertical direction VD, form a conductive path in the vertical direction between their corresponding terminals 21 and the conductive pads 11. The upper and lower ends of the 1 st elastic conductive part 1110 may be formed on the same plane as or slightly protruded from the upper and lower surfaces of the 1 st elastic insulating part 1120. The upper and lower ends of the 2 nd elastic conductive part 1210 may be formed on the same plane as or slightly recessed from the upper and lower surfaces of the 2 nd elastic insulating part 1220.

In the conductive sheet of the embodiment, in order to fix the positions of the 1 st sheet 1100 and the 2 nd sheet 1200 in the horizontal direction HD and align the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 in the vertical direction VD, at least one alignment member is provided in the 1 st sheet 1100, and another alignment member having a shape complementary to that of the 1 st sheet 1100 and being matable with the alignment member of the 1 st sheet 1100 is provided in the 2 nd sheet 1200. A pair of alignment members as described above may be implemented as a protrusion and a recess, allowing engagement in the vertical direction VD.

The cross-sectional shape of the protruding portion may be circular when the cross-section of the protruding portion is taken in the horizontal direction HD, but is not limited thereto. The recess may have a cross-sectional shape complementary to a cross-sectional shape of the protrusion such that the protrusion is fitted into the recess.

The protruding portion may be provided by at least one of the 1 st elastic conductive portion 1110 of the 1 st sheet 1100, and the recessed portion may be provided by the 2 nd elastic conductive portion 1210 of the 2 nd sheet 1200 corresponding to the 1 st elastic conductive portion. In this case, the protruding portion and the recessed portion may form an end portion of the elastic conductive portion in the vertical direction VD. Alternatively, the protrusions may be provided by the 1 st elastic insulation 1120 of the 1 st sheet 1100 and the depressions may be provided by the 2 nd elastic insulation 1220 of the 2 nd sheet 1200. In this case, the protrusion and the recess may protrude from or be recessed from a surface of the elastic insulating portion. Alternatively, the protrusions may be provided by the 1 st elastic conductive portion 1100 and the 1 st elastic insulating portion 1120 of the 1 st sheet 1100, and the depressions may be provided by the 2 nd elastic conductive portion 1210 and the 2 nd elastic insulating portion 1220 of the 2 nd sheet 1200.

Referring to the conductive sheet 1000 shown in fig. 1, the 1 st elastic conductive portion 1110 has a protruding portion 1112 forming an upper end portion in the vertical direction VD, and the 2 nd elastic conductive portion 1210 has a recessed portion 1212 forming a lower end portion in the vertical direction VD. The protrusion 1112 and the recess 1212 are formed such that the protrusion 1112 is fitted into the recess 1212 in the vertical direction VD. Therefore, when the 1 st sheet 1100 and the 2 nd sheet 1200 are laminated, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are aligned and in contact with each other in the vertical direction VD due to the fitting between the protruding portion 1112 and the recessed portion 1212 in the vertical direction VD.

The shape of the device to be inspected, the shape of the inspection apparatus, and the shape of the socket shown in fig. 1 are schematically shown for the purpose of illustrating the embodiment. The arrangement of the 1 st and 2

nd sheets

1100 and 1200 in fig. 1 is merely exemplary. Conductive flakes of another embodiment can include a1 st flake 1100 disposed on a2 nd flake 1200.

Fig. 2a and 2b schematically illustrate a planar arrangement of an elastic conductive portion and an elastic insulating portion in a sheet 1 employed for a conductive sheet according to an embodiment. The 2 nd sheet may have the same planar arrangement as shown in fig. 2a and 2 b. Referring to fig. 2a and 2b, the 1 st sheet 1100 includes a1 st elastic conductive portion 1110 and a1 st elastic insulating portion 1120. The planar arrangement of the 1 st elastic conductive portion 1110 in the 1 st sheet 1100 can realize various arrangements according to the arrangement of the terminals of the device under inspection. Referring to fig. 2a, in the 1 st sheet 1100, the 1 st elastic conductive portions 1110 may be arranged in a pair of matrix forms. Referring to fig. 2b, in the 1 st sheet 1100, the 1 st elastic conductive portions 1110 may be arranged in a plurality of rows along each side of the quadrangle.

Referring to fig. 3 to 15, embodiments of the conductive sheet will be described in detail. The shape of the sheet, the shape of the resilient conductive portion, the shape and position of the alignment assembly shown in fig. 3-15 are merely examples chosen to illustrate the embodiments.

To illustrate the conductive sheet of one embodiment, reference is made to the examples shown in fig. 3-5. Fig. 3 shows the conductive sheet shown in fig. 1 before lamination, fig. 4 shows the 1 st sheet shown in fig. 3, and fig. 5 shows the 2 nd sheet shown in fig. 3.

Referring to fig. 3, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 may have a cylindrical shape extending along the vertical direction VD. In such a cylindrical shape, the diameter of the middle portion may be smaller than the diameters of the upper and lower ends. Alternatively, in order to prevent the conductivity of the laminated conductive sheet 1000 from being lowered, the diameter of the end portion that is in contact with the terminal of the device under inspection or the inspection apparatus may be equal to or smaller than the diameter of the end portion located on the opposite side of such end portion.

In one embodiment, the 1 st elastic conductive portion 1110 includes a plurality of conductive particles 1111 arranged along the vertical direction VD, and the 2 nd elastic conductive portion 1210 includes a plurality of conductive particles 1211 arranged along the vertical direction VD. In each elastic conductive portion, the conductive particles are in contact with each other in the vertical direction VD. Therefore, the upper end and the lower end of each elastic conductive portion can be electrically connected in the vertical direction VD. The material constituting the 1 st elastic insulating portion 1120 can hold the plurality of conductive particles 1111 in the shape of the 1 st elastic conductive portion 1110 shown in fig. 3. The material constituting the 2 nd elastic insulating portion 1220 can hold the plurality of conductive particles 1211 in the shape of the 2 nd elastic conductive portion 1210 shown in fig. 3.

For example, the conductive particles may be formed by covering the surface of the core particles with a highly conductive metal. The core particles may be made of a metal material such as iron, nickel, or cobalt, which is a magnetic material, or particles such as a resin having elasticity may be used. As the highly conductive metal covering the surface of the core particle, gold, silver, rhodium, platinum, chromium, or the like can be used.

Referring to fig. 3, the plurality of 1 st elastic conductive portions 1110 are spaced apart and insulated from each other by the 1 st elastic insulating portion 1120. The 1 st elastic insulating portion 1120 may form a quadrangular elastic region of the 1 st sheet 1100, and may hold the plurality of conductive particles 1111 in the shape of the 1 st elastic conductive portion 1110. The plurality of 2 nd elastic conductive parts 1210 are spaced apart and insulated from each other by the 2 nd elastic insulating part 1220. The 2 nd elastic insulating portion 1220 may form a rectangular elastic region of the 2 nd sheet 1200, and may hold the plurality of conductive particles 1211 in the shape of the 2 nd elastic conductive portion 1210.

The elastic insulating part comprises an elastic high polymer material. In detail, the elastic insulating portion includes a cured silicone rubber material. For example, the elastic insulating portion may be formed by injecting liquid silicon rubber into a mold for molding the 1 st or 2

nd sheet

1100 or 1200 and hardening the silicone rubber. As the liquid silicone rubber material for forming the elastic insulating portion, addition type liquid silicone rubber, condensation type liquid silicone rubber, liquid silicone rubber including a vinyl group or a hydroxyl group, or the like can be used. As a specific example, the liquid silicone rubber material may include dimethylsilicone rubber, methylvinylsilicone rubber, methylphenylvinylsilicone rubber, and the like.

For example, the elastic conductive portion may be formed as follows: after the liquid silicone rubber in which the conductive particles are dispersed is poured into a mold for molding the 1 st sheet 1100 or the 2 nd sheet 1200, the conductive particles are aligned by a magnetic field applied to each position of the elastic conductive portion. As another example, the elastic conductive portion may be formed as follows: in a sheet formed by hardening liquid silicone rubber containing no conductive particles, through-holes are formed at each position of an elastic conductive portion, and the through-holes are filled with conductive particles.

Referring to fig. 3 and 4, the 1 st elastic conductive portion 1120 separates adjacent 1 st elastic conductive portions 1110 in the horizontal direction HD1 by a1 st horizontal interval D1. Further, the 1 st elastic conductive portions 1120 separate the adjacent 1 st elastic conductive portions 1110 at 2 nd horizontal intervals D2 in a further horizontal direction HD2 perpendicular to the horizontal direction HD 1. The 1 st horizontal interval D1 and the 2 nd horizontal interval D2 may be set to the same size as each other, or may be set to different sizes.

Referring to fig. 3 and 5, the 2 nd elastic conductive part 1220 separates adjacent 2 nd elastic conductive parts 1210 in the horizontal direction HD1 at a 3 rd horizontal interval D3. Further, the 2 nd elastic conductive portions 1220 have the adjacent 2 nd elastic conductive portions 1210 spaced apart at 4 th horizontal intervals D4 in the horizontal direction HD 2. The 3 rd horizontal interval D3 and the 4 th horizontal interval D4 may be set to the same size as each other, or may be set to different sizes.

In one embodiment, referring to fig. 3 and 4, at least one of the plurality of 1 st elastic conductive portions 1110 of the 1 st sheet 1100 has a protrusion 1112 protruding in the vertical direction VD with respect to the 1 st elastic insulating portion 1120. Referring to fig. 3 and 5, at least one of the plurality of 2 nd elastic conductive portions 1210 of the 2 nd sheet 1200 has a recessed portion 1212 recessed in the vertical direction VD with respect to the 2 nd elastic insulating portion 1220. The protrusion 1112 and the recess 1212 are formed such that the protrusion 1112 is fitted into the recess 1212 in the vertical direction VD. The 2 nd elastic conductive portion 1210 corresponding to the 1 st elastic conductive portion 1110 having the protrusion 1112 in the vertical direction VD provides a recess 1212. Fig. 3-5 illustrate, for exemplary purposes only, a1 st elastic conductive portion provided with a protruding portion and a2 nd elastic conductive portion provided with a recessed portion. The protrusion 1112 may be provided in at least one of the plurality of 1 st elastic conductive portions located in one row, or at least one of the plurality of 1 st elastic conductive portions located in a different row. Alternatively, the protrusions 1112 may be provided at the 1 st resilient conductive portions located at each corner of the sheet shown in fig. 2a and 2 b. A recessed portion 1212 may be provided at the 2 nd elastic conductive portion 1210 corresponding to the 1 st elastic conductive portion 1110 provided with the protruding portion 1112.

The protrusion 1112 is located on the 1 st elastic conductive portion 1110 along the vertical direction VD, and the recess 1212 is located on the 2 nd elastic conductive portion 1210 along the vertical direction VD. When the 1 st sheet 1100 and the 2 nd sheet 1200 are laminated, the protruding portions 1112 and the recessed portions 1212 serve as reference points for aligning the plurality of 1 st elastic conductive portions 1110 with the plurality of 2 nd elastic conductive portions 1210 in the vertical direction VD. When the 1 st sheet 1100 and the 2 nd sheet 1200 are laminated, the protrusion 1112 is fitted into the recess 1212. Due to the fit between the protrusion 1112 and the recess 1212, the 1 st elastic conductive portion 1110 is aligned with the 2 nd elastic conductive portion 1210 in the vertical direction VD, and one end of the 1 st elastic conductive portion 1110 (e.g., the upper end of the 1 st elastic conductive portion shown in fig. 3) is in contact with one end of the 2 nd elastic conductive portion 1210 (e.g., the lower end of the 2 nd elastic conductive portion shown in fig. 3) in the vertical direction VD. As described above, when the 1 st sheet 1100 and the 2 nd sheet 1200 are laminated, the protruding portion and the recessed portion are fitted to each other, thereby structurally achieving alignment between the elastic conductive portion located on the upper side and the elastic conductive portion located on the lower side. Therefore, the conductive sheet 1000 has a thick thickness due to the laminate type structure, and does not cause an increase in resistance or a decrease in conductivity due to the aligned elastic conductive portions. Further, the projecting portion 1112 and the recessed portion 1212 fitted in the vertical direction VD fix the positions of the 1 st sheet 1100 and the 2 nd sheet 1200 in the horizontal direction HD. Therefore, even if the conductive sheet 1000 is repeatedly pressed in order to inspect the device under inspection, the 1 st sheet 1100 and the 2 nd sheet 1200 do not move relative to each other. Therefore, the conductive sheet 1000 has a stable laminate structure capable of maintaining conductivity with high reliability for a long period of time.

Referring to fig. 3 to 5, in one embodiment, the 1 st elastic insulation portion 1120 of the 1 st sheet 1100 has a1 st horizontal plane 1121 extending in the horizontal direction HD, and the 2 nd elastic insulation portion 1220 of the 2 nd sheet 1200 has a2 nd horizontal plane 1221 extending in the horizontal direction HD. The 1 st horizontal surface 1121 is opposed to the 2 nd horizontal surface 1221 in the vertical direction VD. The 1 st elastic conductive portion protrusion 1112 protrudes in the vertical direction VD with respect to the 1 st horizontal plane 1121, and the 2 nd elastic conductive portion recess 1212 is recessed in the vertical direction VD with respect to the 2 nd horizontal plane 1221.

Referring to fig. 3 and 4, the protrusion 1112 is a portion of the 1 st elastic conductive portion 1110 protruding from the 1 st horizontal surface 1121, and forms an upper end portion of the 1 st elastic conductive portion 1110. The protrusion 1112 has a truncated cone shape. Therefore, the protruding portion 1112 has an inclined portion 1113 inclined with respect to the center axis CA1 of the protruding portion (or the center axis of the 1 st elastic conductive portion 1110 in the vertical direction VD). The inclined portion 1113 extends annularly in the peripheral direction of the protrusion 1112 to form the outer peripheral portion of the protrusion 1112. The inclination angle IA1 of the inclined portion 1113 with respect to the center axis CA1 of the protrusion 1112 may be 0 degree or more and 30 degrees or less.

Referring to fig. 3 and 5, the recessed portion 1212 is a portion of the 2 nd elastic conductive portion 1210 recessed with respect to the 2 nd horizontal surface 1221, forming a lower end portion of the 2 nd elastic conductive portion 1210. The recess 1212 has a truncated cone shape corresponding to the shape of the protrusion 1112. Therefore, the recessed portion 1212 has an inclined portion 1213 inclined with respect to the central axis CA2 of the recessed portion (or the central axis of the 2 nd elastic conductive portion 1210 in the vertical direction VD). The inclined portion 1213 extends in a ring shape in the peripheral direction of the recess 1212 to form an inner peripheral portion of the recess 1212. The inclination angle IA2 of the inclined portion 1213 with respect to the central axis CA2 of the recessed portion 1212 may be 0 degree or more and 30 degrees or less. Also, the inclination angle IA2 may be equal to or less than the inclination angle of the inclined portion of the protruding portion. The protrusion 1112 is fitted to the recess 1212, and thus the inclined portion 1113 of the protrusion 1112 and the inclined portion 1213 of the recess 1212 contact each other.

The protruding portion 1112 and the recessed portion 1212 are formed such that the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are aligned in the vertical direction VD and one end of the 1 st elastic conductive portion 1110 (the upper end of the 1 st elastic conductive portion shown in fig. 3) and one end of the 2 nd elastic conductive portion 1210 (the lower end of the 2 nd elastic conductive portion shown in fig. 3) are in contact with each other in the vertical direction VD. For example, when the overall height of the 1 st sheet 1100 is referred to as T, the height of the protrusion 1112 may be 0.05T to 0.15T.

According to an embodiment, the recess 1212 may have an appropriate depth within a range from a depth at which the protrusion 1112 is slightly fitted into the recess 1212 to a depth at which the protrusion 1112 is completely fitted into the recess 1212. In one embodiment, the recess 1212 may have a depth of 10% to 100% of the height of the protrusion 1112. As described above, the recess 1212 may have a depth equal to or less than the height of the protrusion 1112. Therefore, when the 1 st sheet 1100 and the 2 nd sheet 1200 are laminated, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 can be surely aligned and brought into contact with each other in the vertical direction VD. Further, if the recess 1212 has a depth smaller than the height of the protrusion 1112, a slight interval may be secured in the vertical direction VD between the 1 st elastic insulation portion 1120 and the 2 nd elastic insulation portion 1220. Therefore, when the elastic conductive portion is pressed in the vertical direction by the terminal of the device under inspection, the elastic insulating portion smoothly allows the horizontal expansion of the elastic conductive portion, so that the elastic force of the elastic conductive portion and the elastic force of the conductive sheet can be improved.

Fig. 6a to 6g illustrate various examples of the protruding portion and the recessed portion in the above-described embodiment 1.

Referring to fig. 6a, only one 1 st elastic conductive portion 1110 of the plurality of 1 st elastic conductive portions 1110 may have a protrusion 1112, and only the 2 nd elastic conductive portion 1210 corresponding to the 1 st elastic conductive portion 1110 having the protrusion 1112 may have a recess 1212.

Referring to fig. 6b, the plurality of 1 st elastic conductive portions 1110 may have protrusions 1112. The protrusions 1112 may be provided at the 1 st elastic conductive portion 1110 located in one row or the protrusions 1112 may be provided at all the 1 st elastic conductive portions 1110. The 2 nd elastic conductive portion 1210 corresponding to such 1 st elastic conductive portion 1110 may have a recess 1212.

Referring to fig. 6c, the resilient conductive portion can be positioned adjacent to the end of the sheet illustrated in fig. 2a and 2b, and a protrusion 1112 and a recess 1212 may be provided in such resilient conductive portion.

Referring to fig. 6d, the protrusion 1112 of the 1 st sheet 1100 may have a cylindrical shape and the recess 1212 of the 2 nd sheet 1200 may have a cylindrical shape.

Referring to fig. 6e, the recessed portion 1212 may be formed to be recessed inward of the 2 nd elastic conductive portion 1210 in the vertical direction VD.

Referring to fig. 6f and 6g, the 1 st elastic insulation portion 1120 may have a protrusion 1122 adjacent to the protrusion 1112, and the 2 nd elastic insulation portion 1220 may have a recess 1222 adjacent to the recess 1212. The protrusion 1122 protrudes from the 1 st horizontal surface 1121, and the recess 1222 is recessed from the 2 nd horizontal surface 1221. The protrusion 1122 may protrude at a height equal to or less than the height of the protrusion 1112, and the recess 1222 may be recessed at a depth equal to or less than the depth of the recess 1212. The protrusion 1122 may be formed to fit into the recess 1222 in the vertical direction VD. Referring to fig. 6f, protrusion 1122 may be contiguous with protrusion 1112 and recess 1222 may be contiguous with recess 1212. Referring to fig. 6g, the protrusion 1122 may be formed in a straight line shape along the plurality of protrusions 1112 positioned in one row, and may be adjacent to each protrusion 1112. The protrusion 1112 and the protrusion 1222 may be formed as protrusions extending by a predetermined length. Further, the recess 1222 may be formed in a straight line shape along the plurality of recesses 1212 positioned in a row, and may be adjacent to each recess 1212. The recess 1212 and the recess 1222 may be formed as recesses extending by a predetermined length.

In one embodiment, the 1 st and 2 nd sheets may be engaged with each other. Therefore, the conductive sheet having the 1 st sheet and the 2 nd sheet bonded to each other can be arranged between the device under inspection and the inspection apparatus as one laminated structure having a relatively thick thickness. Referring to fig. 3 and 7, the engagement of the 1 st sheet with the 2 nd sheet may be performed at the 1 st horizontal plane 1121 and the 2 nd horizontal plane 1221. Therefore, the conductive sheet 1000 has a bonding layer BL between the 1 st sheet 1100 and the 2 nd sheet 1200, the bonding layer BL being formed between the 1 st horizontal surface 1121 and the 2 nd horizontal surface 1221. Fig. 7 shows the bonding layer BL in an exaggerated size for illustrating the bonding between the 1 st sheet 1100 and the 2 nd sheet 1200.

In one embodiment, the 1 st horizontal surface 1121 and the 2 nd horizontal surface 1221 can be joined by an adhesive. As the above-mentioned adhesive, a silicon-based adhesive may be used, and the joining layer BL may include such an adhesive. Referring to fig. 4 and 7, an adhesive may be applied to the 1 st horizontal surface 1121 of the 1 st elastic conductive part 1120 excluding the upper end of the 1 st elastic conductive part 1110. Alternatively, referring to fig. 5 and 7, the adhesive may be applied to the 2 nd horizontal plane 1221 of the 2 nd elastic insulation portion 1220 except for the lower end of the 2 nd elastic insulation portion 1220. The 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are not coated with an adhesive, and the 1 st elastic conductive portion and the 2 nd elastic conductive portion are not bonded to each other. Therefore, no adhesive is present at the interface between the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210, which are in contact with each other, to increase the electrical resistance or decrease the conductivity. With respect to bonding using the above-described adhesive, one of the 1 st sheet 1100 and the 2 nd sheet 1200 may be pressed toward the other in the vertical direction VD under prescribed conditions.

According to an embodiment, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 may also be bonded. In this case, the silicon adhesive may be used as long as the thickness of the silicon adhesive is thin to ensure conductivity. In addition, a conductive adhesive may be used as needed. As still another example, the bonding layer BL shown in fig. 7 may be formed on the inclined portion of the protruding portion 1112 and the inclined portion of the recessed portion 1212.

In one embodiment, the conductive sheet may include more than one 3 rd sheet disposed between the 1 st sheet and the 2 nd sheet. Fig. 8 illustrates a conductive sheet according to embodiment 2 of the present invention, and fig. 9 illustrates the conductive sheet shown in fig. 8 before lamination.

Referring to fig. 8, conductive sheet 2000 includes a 3 rd sheet 2300 disposed between 1 st sheet 1100 and 2 nd sheet 1200. Due to the 3 rd sheet 2300, the conductive sheet 2000 may have a thicker thickness and may have a larger pressing amount in the vertical direction. The 3 rd sheet 2300 includes a plurality of 3 rd elastic conductive portions 2310 extending in the vertical direction VD, and a 3 rd elastic insulating portion 2320 spacing the plurality of 3 rd elastic conductive portions 2310 in the horizontal direction HD and insulating the plurality of 3 rd elastic conductive portions 2310. The 3 rd elastic conductive portion 2310 is in contact with the lower end of the 2 nd elastic conductive portion 1210 (one end of the 2 nd elastic conductive portion) at the upper end thereof, and is in contact with the upper end of the 1 st elastic conductive portion 1110 (one end of the 1 st elastic conductive portion) at the lower end thereof.

Referring to fig. 9, the 3 rd elastic conductive portion 2310 includes a plurality of conductive particles 2311. The plurality of conductive particles 2311 may be the same as the

conductive particles

1111 and 1211 described above. The conductive particles 2311 may be held in the shape of the 3 rd elastic conductive portion 2310 by the material constituting the 3 rd elastic insulating portion 2320. The 3 rd elastic insulation 2320 spaces adjacent 3 rd elastic conductive portions 2310 at a 5 th horizontal spacing D5 in the horizontal direction HD1, and spaces adjacent 3 rd elastic conductive portions 2310 at a 6 th horizontal spacing in the horizontal direction HD 2. The 3 rd elastic insulating portion 2320 may be configured in the same manner as the 1 st elastic insulating portion or the 2 nd elastic insulating portion.

Referring to fig. 8 and 9, at least one of the plurality of 3 rd elastic conductive portions 2310 of the 3 rd sheet 2300 has a recessed portion 2312 at one of the opposite one end and the other end in the vertical direction VD, and a protruding portion 2313 at the other of the one end and the other end. The recess 2312 may be located at a lower end of the 3 rd elastic conductive portion 2310. The recess 2312 may be configured the same as the recess 1212 of the 2 nd sheet 1200. The recess 2312 is formed such that the protrusion 1112 of the 1 st sheet 1100 fits into the recess 2312 when the 1 st sheet 1100 and the 3 rd sheet 2300 are laminated. The protrusion 2313 may be located at an upper end of the 3 rd elastic conductive portion 2310. The protrusion 2313 may be configured the same as the protrusion 1112 of the 1 st sheet 1100. The protrusion 2313 is formed so as to fit into the recess 1212 of the 2 nd sheet 1200 when the 3 rd sheet 2300 and the 2 nd sheet 1200 are laminated. Figures 8 and 9 illustrate the 3 rd resilient conductive portion 2310 providing the recess 2312 and the protrusion 2313 for illustration purposes only. The recesses 2312 and protrusions 2313 of the 3 rd sheet 2300 may be provided at the 3 rd elastic conductive portion 2310 corresponding to the 1 st elastic conductive portion 1110 having the protrusions 1112 and the 2 nd elastic conductive portion 1210 having the recesses 1212.

The 3 rd elastic insulating part 2320 has a pair of 3 rd

horizontal surfaces

2321, 2322 spaced apart in the vertical direction VD and extending in the horizontal direction HD. The 3 rd horizontal surface 2321 located in the downward direction UD is opposed to the 1 st horizontal surface 1121 of the 1 st sheet 1100. The depression 2312 is located at a 3 rd horizontal plane 2321, and the depression 2312 is depressed relative to the 3 rd horizontal plane 2321. The 3 rd horizontal plane 2322 located in the upward direction LD is opposed to the 2 nd horizontal plane 1221 of the 2 nd sheet 1100. The protrusion 2313 is located at a 3 rd horizontal plane 2322, and the protrusion 2313 protrudes relative to the 3 rd horizontal plane 2322.

As shown in fig. 8, in the conductive sheet 2000, a1 st sheet 1100, a2 nd sheet 1200 and a 3 rd sheet 2300 are laminated in a vertical direction VD so that a 3 rd sheet 2300 is disposed on the 1 st sheet 1100 and a2 nd sheet 1200 is disposed on the 3 rd sheet 2300. In a state where the 1 st to 3

rd sheets

1100, 1200, 2300 are laminated, the 1 st elastic conductive portion 1110 and the 3 rd elastic conductive portion 2310 are aligned and brought into contact with each other in the vertical direction VD by the engagement between the protrusion 1112 of the 1 st sheet 1100 and the depression 2322 of the 3 rd sheet 2300, and the 3 rd elastic conductive portion 2310 and the 2 nd elastic conductive portion 1210 are aligned and brought into contact with each other in the vertical direction VD by the engagement between the protrusion 2313 of the 3 rd sheet 2300 and the depression 1212 of the 2 nd sheet 1200. Thus, in the conductive sheet 2000, the 1 st elastic conductive portion 1110, the 3 rd elastic conductive portion 2310 corresponding to the 1 st elastic conductive portion, and the 2 nd elastic conductive portion 1210 corresponding to the 3 rd elastic conductive portion are aligned in the vertical direction VD, thereby forming a conductive path extending in the vertical direction.

In one embodiment, the 1 st sheet 1100 is bonded to the 3 rd sheet 2300 and the 3 rd sheet 2300 is bonded to the 2 nd sheet 1200, whereby the conductive sheet 2000 can be disposed as a build-up structure between the device under inspection and the inspection apparatus. In this case, the 3 rd horizontal surface 2322 of the 3 rd sheet 2300 may be engaged with the 1 st horizontal surface 1121 of the 1 st sheet 1100, and the 3 rd horizontal surface 2321 of the 3 rd sheet 2300 may be engaged with the 2 nd horizontal surface 1221 of the 2 nd sheet 1200. This bonding may be performed by using the above-mentioned adhesive.

The conductive sheet shown in fig. 8 includes a 3 rd sheet. The conductive sheet of another embodiment may include more than two 3 rd sheets having the same configuration. Therefore, a conductive sheet having a larger thickness as a laminated structure can be realized.

For explanation of the conductive sheet of embodiment 3 of the present invention, reference is made to examples shown in fig. 10 and 11. Fig. 10 shows the conductive sheet of embodiment 3, and fig. 11 shows the conductive sheet shown in fig. 10 before lamination.

Referring to fig. 10, the conductive sheet 3000 of one embodiment includes the 1 st sheet 3100 and the 2 nd sheet 3200 laminated in the vertical direction VD, and thus has an increased thickness and an increased pressing amount. The positions of the 1 st and 2

nd sheets

3100 and 3200 shown in fig. 10 are merely examples, and the 1 st sheet 3100 may be disposed on the 2 nd sheet 3200.

The 1 st sheet 3100 has a similar configuration to that of the 1 st sheet 1100 described above. The 1 st sheet 3100 includes a plurality of 1 st elastic conductive portions 1110 in the vertical direction VD, and a1 st elastic insulating portion 1120 which partitions the plurality of 1 st elastic conductive portions 1110 in the horizontal direction HD and insulates the plurality of 1 st elastic conductive portions 1110 from each other. The 2 nd sheet 3200 has a similar configuration to that of the 2 nd sheet 1200 described above. The 2 nd sheet 3200 includes a plurality of 2 nd elastic conductive portions 1210 in the vertical direction VD, and a2 nd elastic insulating portion 1220 that partitions the plurality of 2 nd elastic conductive portions 1210 in the horizontal direction HD and insulates the plurality of 2 nd elastic conductive portions 1210 from each other. In the conductive sheet 3000 in which the 1 st sheet 3100 and the 2 nd sheet 3200 are laminated in the vertical direction VD, the 1 st elastic conductive portion 1110 is aligned with the 2 nd elastic conductive portion 1210 in the vertical direction VD and each end is in contact.

In order to fix the positions of the 1 st sheet 3100 and the 2 nd sheet 3200 and align the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 in the vertical direction VD, alignment members similar to the above-described protruding portions and recessed portions are provided at the 1 st elastic insulating portion 1120 of the 1 st sheet 3100 and the 2 nd elastic insulating portion 1220 of the 2 nd sheet 3200, respectively. The alignment members formed of the protruding portion and the recessed portion may be formed so as to be fitted to each other in the vertical direction VD.

Referring to fig. 11, in one embodiment, the 1 st elastic insulating portion 1120 of the 1 st sheet 3100 has at least one protruding portion 3122, the protruding portion 3122 protruding in the vertical direction VD with respect to the 1 st elastic conductive portion 1110. The protruding portion 3122 may be located at the 1 st elastic insulation 1120 in the sheet shown in fig. 2a and 2 b. The 2 nd elastic conductive part 1220 of the 2 nd sheet 3200 has at least one concave portion 3222, and the concave portion 3222 is concave in the vertical direction VD with respect to the 2 nd elastic conductive part 1210. The concave portions 3222 are formed such that the protruding portions 3122 of the 1 st sheet 3100 are fitted to the concave portions 3222 in the vertical direction VD. The concave portion 3222 is formed at a position corresponding to the position of the protruding portion 3122 at the 2 nd elastic insulating portion 1220 of the 2 nd sheet 3200. The 1 st sheet 3100 and the 2 nd sheet 3200 are laminated in the vertical direction VD in a state where the plurality of 1 st elastic conductive portions 1110 and the plurality of 2 nd elastic conductive portions 1210 are brought into contact and aligned in the vertical direction VD by fitting the protruding portions 3122 and the recessed portions 3222 in the vertical direction VD.

Referring to fig. 11, in one embodiment, the 1 st elastic insulation portion 1120 of the 1 st sheet 3100 has a1 st horizontal plane 1121 extending in the horizontal direction HD, and the 2 nd elastic insulation portion 1220 of the 2 nd sheet 3200 has a2 nd horizontal plane 1221 extending in the horizontal direction HD. The 1 st horizontal surface 1121 is opposed to the 2 nd horizontal surface 1221 in the vertical direction VD. The protruding portion 3122 protrudes from the 1 st horizontal plane 1121 in the vertical direction VD, and the recessed portion 3222 is recessed from the 2 nd horizontal plane 1221 in the vertical direction VD.

The protruding portion 3122 and the recessed portion 3222 are engaged in the vertical direction VD. If the 1 st sheet 3100 and the 2 nd sheet 3200 are laminated, the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are aligned in the vertical direction VD due to the fitting between the protruding portion 3122 and the recessed portion 3222, and one end of the 1 st elastic conductive portion 1110 (for example, the upper end of the 1 st elastic conductive portion shown in fig. 11) and one end of the 2 nd elastic conductive portion 1210 (for example, the lower end of the 2 nd elastic conductive portion shown in fig. 11) are in contact in the vertical direction VD. As described above, when the 1 st sheet 3100 and the 2 nd sheet 3200 are laminated, the alignment of the elastic conductive portion in the vertical direction VD is structurally achieved by the protruding portion 3122 and the recessed portion 3222. Therefore, the conductive sheet 3000 has a thick thickness due to the laminate structure, and does not cause an increase in resistance or a decrease in conductivity due to the aligned elastic conductive portions. Further, the protruding portion 3122 and the recessed portion 3222 fitted in the vertical direction VD fix the positions of the 1 st sheet 3100 and the 2 nd sheet 3200 in the horizontal direction HD. Therefore, even if the laminated conductive sheet 3000 is repeatedly pressed in order to inspect the device under inspection, the 1 st sheet 3100 and the 2 nd sheet 3200 do not move relative to each other. Therefore, the conductive sheet 3000 has a stable laminate structure capable of maintaining conductivity with high reliability for a long period of time.

When the 1 st sheet 3100 and the 2 nd sheet 3200 are laminated, the protruding portion 3122 and the recessed portion 3222 serve as reference points for aligning the plurality of 1 st elastic conductive portions 1110 and the plurality of 2 nd elastic conductive portions 1210 in the vertical direction VD. The protruding portion 3122 and the recessed portion 3222 are formed such that the 1 st elastic conductive portion 1110 and the 2 nd elastic conductive portion 1210 are aligned in and in contact along the vertical direction VD. For example, when the entire height of the 1 st sheet 3200 is referred to as T, the height of the protruding portion 3122 may be 0.05T to 0.15T.

According to an embodiment, the protruding portion 3122 may have an appropriate height within a range from when the protruding portion 3122 is more fitted to the height of the recess 3222 to when the protruding portion 3122 is completely fitted to the height of the recess 3222. In one embodiment, the protrusion 3122 may have a height that is 90% to 100% of the depth of the depression 3222. As described above, the protrusion 3122 may have a height equal to or less than the depth of the depression 3222. Therefore, when the 1 st sheet 3100 and the 2 nd sheet 3200 are laminated, the entire protruding portion 3122 can be fitted into the recessed portion 3222 in the recessed portion 3222, and the 1 st horizontal surface 1121 and the 2 nd horizontal surface 1221 can be completely brought into contact, whereby all of the 1 st elastic conductive portions 1110 and all of the 2 nd elastic conductive portions 1210 can be brought into contact in the vertical direction VD.

In one embodiment, referring to fig. 10 and 11, the protruding portion 3122 has an inclined portion 3123 inclined with respect to the central axis CA1 of the protruding portion. The inclined portion 3123 extends in a ring shape along the peripheral direction of the protruding portion 3122 to form an outer peripheral portion of the protruding portion 3122. The inclination angle of the inclined portion 3123 with respect to the central axis CA1 may be the above-described inclination angle IA 1. The concave portion 3222 has a shape corresponding to the shape of the protruding portion 3122. Therefore, the concave portion 3222 has an inclined portion 3223 inclined with respect to the central axis CA2 of the concave portion. The inclined portion 3223 extends in a ring shape along the peripheral direction of the concave portion 3222 to form an inner peripheral portion of the concave portion 3222. The inclination angle of the inclined portion 3223 with respect to the center axis CA2 may be the above-described inclination angle IA 2. When the 1 st and 2

nd sheets

3100 and 3200 are laminated, the protruding portion 3122 is fitted into the recessed portion 3222, and thus the inclined portion 3123 and the inclined portion 3223 are in contact with each other.

In one embodiment, the 1 st and 2

nd sheets

3100, 3200 can be engaged with each other. The conductive sheet 3000 having the 1 st sheet 3100 and the 2 nd sheet 3200 bonded to each other can be disposed between the device to be inspected and the inspection apparatus as one laminated structure having a relatively thick thickness. Referring to FIG. 11, the engagement of the 1 st sheet 3100 and the 2 nd sheet 3200 may be performed at the 1 st horizontal plane 1121 and the 2 nd horizontal plane 1221. Thus, the conductive sheet 3000 may have a bonding layer BL between the 1 st sheet 3100 and the 2 nd sheet 3200 similar to the bonding layer shown in fig. 7. The 1 st horizontal surface 1121 of the 1 st sheet 3100 and the 2 nd horizontal surface 1221 of the 2 nd sheet 3200 may be joined by the above-described manner using an adhesive. The adhesive may be applied on the 1 st horizontal surface 1121 except for the upper end of the 1 st elastic conductive portion 1110. Alternatively, the adhesive may be applied to the 2 nd horizontal surface 1221 except for the lower end of the 2 nd elastic insulating part 1220.

Fig. 12a to 12d illustrate various examples of the protruding portion and the recessed portion in the above-described 3 rd embodiment.

Referring to fig. 12a, the 1 st elastic insulation portion 1120 of the 1 st sheet 3100 may have one protruding portion 3122, and the 2 nd elastic insulation portion 1220 of the 2 nd sheet 3200 may have one recessed portion 3222 formed at a position corresponding to the position of the protruding portion 3122 of the 1 st sheet 3100.

Referring to fig. 12b, the protrusion 3122 may be located in the center of the sheet as shown in fig. 2a and 2b, and the depression 3222 can be located to correspond to the location of the protrusion 3122. Alternatively, the 1 st elastic insulating part may have a protrusion at each corner of the sheet shown in fig. 2a and 2b, and the 2 nd elastic insulating part may have a recess at a position corresponding to such a protrusion.

Referring to fig. 12c and 12d, the 1 st resilient conductive portion 1110 may have a protrusion 3112 contiguous with the protrusion 3122 and the 2 nd resilient conductive portion 1210 may have a recess 3212 contiguous with the recess 3222. The protrusion 3112 protrudes with respect to the 1 st horizontal surface 1121, and the recess 3212 is recessed with respect to the 2 nd horizontal surface 1221. The protrusion 3112 and the recess 3212 may be configured similarly to the protrusion and recess, respectively, of embodiment 1 described above. The protrusion 3112 is formed to be able to fit into the recess 3212 in the vertical direction VD. Referring to fig. 12c, the protruding portion 3122 of the 1 st elastic insulation portion 1120 may extend to the protruding portion 3112, and the protruding portion 3122 may abut the protruding portion 3122. Further, the recess 3222 of the 2 nd elastic insulating part 1220 may extend to the recess 3212, and the recess 3212 may be adjacent to the recess 3222. Referring to fig. 12d, the protruding portion 3122 of the 1 st elastic insulation portion 1120 may be formed in a straight line shape along the plurality of protruding portions 3112 positioned in a row. In addition, the recess 3222 of the 2 nd elastic insulating part 1220 may be formed in a linear shape along the plurality of recesses 3212 located in one row.

Fig. 13a to 13g illustrate various shapes of the protruding portion provided at the elastic conductive portion. The horizontal cross-sectional shape of the protruding portion 3122 may be any one of a circle, an ellipse, an oblong, and a quadrangle when the cross-section of the protruding portion 3122 is taken in the horizontal direction. As shown in fig. 13a and 13b, the horizontal cross-sectional shape of the protruding portion 3122 may be circular. As shown in fig. 13c, the horizontal cross-sectional shape of the protruding portion 3122 may be an ellipse. As shown in fig. 13d, the horizontal cross-sectional shape of the protruding portion 3122 may be an oblong shape (oblong shape). The above-mentioned oblong shape means a shape slightly longer than the oblong shape and having a pair of straight lines parallel to each other and a pair of circular arc-shaped curves facing each other. As shown in fig. 13e to 13g, the horizontal cross-sectional shape of the protruding portion 3122 may be rectangular or square. The concave portions 3222 have a cross-sectional shape complementary to the cross-sectional shape of the protruding portion 3122 described above, so that the protruding portion 3122 and the concave portions 3222 can be fitted in the vertical direction VD. In the case of the elongated protruding portions and the recessed portions corresponding to such shapes shown in fig. 13c to 13g, the alignment between the elastic conductive portions can also be achieved by one protruding portion and one recessed portion.

Fig. 14 and 15 illustrate a conductive sheet according to embodiment 4 of the present invention. Fig. 14 is a sectional view illustrating a conductive sheet according to embodiment 4 of the present invention, and fig. 15 is a sectional view illustrating the conductive sheet shown in fig. 14 before lamination.

Referring to fig. 14 and 15, the conductive sheet 4000 includes a 3 rd sheet 4300 disposed between the 1 st sheet 3100 provided with the protruding portion 3122 and the 2 nd sheet 3200 provided with the recessed portion 3222. With the 3 rd sheet 4300, the conductive sheet 4000 may have a thicker thickness and may have a larger pressing amount in the vertical direction.

Sheet 3 4300 has a similar configuration to that of sheet 3 2300 described above, except that an alignment member for achieving alignment of the elastic conductive portion in the vertical direction VD is provided at the elastic conductive portion 3 of sheet 3 4300. The 3 rd sheet 4300 includes a plurality of 3 rd elastic conductive portions 2310 oriented in the vertical direction VD and a 3 rd elastic insulating portion 2320 that separates and insulates the plurality of 3 rd elastic conductive portions 2310 from each other in the horizontal direction HD. The 3 rd elastic conductive portion 2310 of the 3 rd sheet 4300 includes a plurality of conductive particles 2311 shown in fig. 9.

Referring to fig. 15, the 3 rd elastic insulating portion 2320 of the 3 rd sheet 4300 has at least a recessed portion 4323 at one of opposite one end and the other end in the vertical direction VD, and at least one protruding portion 4324 at the other of the one end and the other end. The recess 4323 may be located at a lower side of the 3 rd elastic insulation 2320. The recessed portion 4323 may be configured similarly to the recessed portion 3222 of the 2 nd sheet 3200. When the 1 st sheet 3100 and the 3 rd sheet 4300 are laminated, the projection 3122 of the 1 st sheet 3100 fits into the recess 4323. The protruding part 4324 may be located at an upper side of the 3 rd elastic insulation 2320. The tab 4324 may be constructed identically to the tab 3122 of the 1 st sheet 3100. When the 3 rd sheet 2300 and the 2 nd sheet 1200 are laminated, the projection 4324 fits into the recess 3222 of the 2 nd sheet 3200.

The 3 rd elastic insulation 2320 has a pair of 3 rd

horizontal surfaces

2321, 2322 spaced apart in the vertical direction VD. The 3 rd horizontal surface 2321 of the lower direction LD faces the 1 st horizontal surface 1121 of the 1 st sheet 3100. The recessed portion 4323 is located at the 3 rd horizontal plane 2321, and the recessed portion 4323 is recessed from the 3 rd horizontal plane 2321. The 3 rd horizontal surface 2322 in the upward direction UD faces the 2 nd horizontal surface 1221 of the 2 nd sheet 3200. Projection 4324 is located at level 3, 2322, and projection 4324 projects from level 3, 2322.

As shown in fig. 14, the 1 st sheet 3100, the 2 nd sheet 3200, and the 3 rd sheet 4300 are laminated in the vertical direction VD so that the 3 rd sheet 4300 is disposed on the 1 st sheet 3100 and the 2 nd sheet 3200 is disposed on the 3 rd sheet 4300. In a state where the 1 st to 3

rd sheets

3100, 3200, 4300 are stacked, the 1 st elastic conductive portion 1110 and the 3 rd elastic conductive portion 2310 are aligned and brought into contact with each other in the vertical direction VD by the fitting in the vertical direction VD between the protruding portion 3122 of the 1 st sheet 3100 and the recessed portion 4323 of the 3 rd sheet 4300, and the 3 rd elastic conductive portion 2310 and the 2 nd elastic conductive portion 1210 are aligned and brought into contact with each other in the vertical direction VD by the fitting in the vertical direction VD between the protruding portion 4324 of the 3 rd sheet 4300 and the recessed portion 3222 of the 2 nd sheet 3200.

In one embodiment, the 1 st sheet 3100 is bonded to the 3 rd sheet 4300, and the 3 rd sheet 4300 is bonded to the 2 nd sheet 3200, whereby the conductive sheet 4000 may be disposed as a build-up structure between a device to be inspected and an inspection apparatus. In this case, the 3 rd horizontal surface 2321 of the 3 rd sheet 4300 may engage the 1 st horizontal surface 1121 of the 1 st sheet 3100, and the 3 rd horizontal surface 2322 of the 3 rd sheet 4300 may engage the 2 nd horizontal surface 1221 of the 2 nd sheet 3200. This bonding may be performed by using the above-mentioned adhesive.

The conductive sheet shown in fig. 14 includes a 3 rd sheet 4300. The conductive sheet of another embodiment may include more than two 3 rd sheets 4300 having the same configuration. Thus, a conductive sheet having a larger thickness as a laminated structure can be realized.

While the technical idea of the present disclosure has been described above by way of a part of the embodiments and examples shown in the accompanying drawings, it should be understood that various substitutions, changes and modifications may be made within the scope of the technical idea and scope of the present disclosure as understood by those skilled in the art to which the present disclosure pertains. Further, such substitutions, changes and modifications are to be considered within the scope of the appended claims.

Claims

1. A conductive sheet disposed between an inspection apparatus and a device under inspection, the conductive sheet comprising:

a1 st sheet including a plurality of 1 st elastic conductive portions in a vertical direction, and 1 st elastic insulating portions that horizontally separate and insulate the plurality of 1 st elastic conductive portions, at least one of the 1 st elastic conductive portions having a protruding portion that protrudes in the vertical direction with respect to the 1 st elastic insulating portion; and

a2 nd sheet including a plurality of 2 nd elastic conductive portions in the vertical direction and a2 nd elastic insulating portion that separates and insulates the plurality of 2 nd elastic conductive portions in the horizontal direction, at least one of the 2 nd elastic conductive portions having a recessed portion recessed in the vertical direction with respect to the 2 nd elastic insulating portion so that the protruding portion is fitted to the at least one 2 nd elastic conductive portion in the vertical direction; and is

The 1 st sheet and the 2 nd sheet are laminated in the vertical direction.

2. The conductive sheet of claim 1, wherein the 1 st elastic insulating portion has a1 st horizontal plane extending in the horizontal direction, the 2 nd elastic insulating portion has a2 nd horizontal plane extending in the horizontal direction and opposite to the 1 st horizontal plane,

the protrusion protruding with respect to the 1 st horizontal plane, the depression being depressed with respect to the 2 nd horizontal plane,

the 1 st and 2 nd horizontal surfaces are joined to each other.

3. The conductive sheet according to claim 2, further comprising a 3 rd sheet, the 3 rd sheet comprising a plurality of 3 rd elastic conductive portions in the vertical direction and a 3 rd elastic insulating portion that partitions and insulates the plurality of 3 rd elastic conductive portions in the horizontal direction, and the 3 rd sheet being disposed between the 1 st sheet and the 2 nd sheet,

at least one of the 3 rd elastic conductive parts has a recessed part in which a protruding part of the 1 st sheet is fitted at one of one end and the other end opposite in the vertical direction, and has a protruding part in which a protruding part of the 2 nd sheet is fitted at the other of the one end and the other end.

4. The conductive sheet of claim 3,

the 3 rd elastic insulating part has a pair of 3 rd horizontal planes spaced apart in the vertical direction,

the recessed portion of the at least one 3 rd resilient conductive portion is located at one of the pair of 3 rd levels, the protruding portion of the at least one 3 rd resilient conductive portion is located at the other of the pair of 3 rd levels,

the 1 st level is engaged with one of the pair of 3 rd levels, and the 2 nd level is engaged with the other of the pair of 3 rd levels.

5. The conductive sheet of claim 1,

the protruding portion has an inclined portion inclined with respect to a central axis of the protruding portion,

the recessed portion has an inclined portion that is inclined with respect to a central axis of the recessed portion and that is in contact with the inclined portion of the protruding portion.

6. The conductive sheet according to claim 1, wherein the plurality of 1 st elastic conductive portions have the protruding portions, and the plurality of 2 nd elastic conductive portions have the recessed portions.

7. The conductive sheet of claim 6, wherein the depression has a depth of 10% to 100% of the height of the protrusion.

8. The conductive sheet of claim 1,

the 1 st elastic conductive portion has a protruding portion adjoining the protruding portion of the at least one 1 st elastic conductive portion,

the 2 nd elastic conductive part has a recessed part which is adjacent to the recessed part of the at least one 2 nd elastic conductive part and which fits the protruding part of the 1 st elastic conductive part.

9. The conductive sheet as claimed in claim 1, wherein the 1 st elastic conductive portion and the 2 nd elastic conductive portion include a plurality of conductive particles aligned in the vertical direction.

10. The conductive sheet of claim 1, wherein the 1 st and 2 nd elastic insulating portions comprise a silicone rubber material.

11. The conductive sheet of claim 2, wherein the 1 st level and the 2 nd level are joined by an adhesive.

12. A conductive sheet disposed between an inspection apparatus and a device under inspection, the conductive sheet comprising:

a1 st sheet including a plurality of 1 st elastic conductive portions in a vertical direction, and a1 st elastic insulating portion that partitions and insulates the plurality of 1 st elastic conductive portions in a horizontal direction, the 1 st elastic insulating portion having at least one protruding portion that protrudes in the vertical direction with respect to the plurality of 1 st elastic conductive portions; and

a2 nd sheet including a plurality of 2 nd elastic conductive portions in the vertical direction and a2 nd elastic insulating portion that separates and insulates the plurality of 2 nd elastic conductive portions in the horizontal direction, the 2 nd elastic insulating portion having at least one recessed portion that is recessed in the vertical direction with respect to the plurality of 2 nd elastic conductive portions and that fits the protruding portion in the vertical direction, and

the 1 st sheet and the 2 nd sheet are laminated in the vertical direction.

13. The conductive sheet of claim 12, wherein the 1 st elastic insulating portion has a1 st horizontal plane extending in the horizontal direction, the 2 nd elastic insulating portion has a2 nd horizontal plane extending in the horizontal direction and opposite to the 1 st horizontal plane,

the protrusion protruding from the 1 st horizontal plane, the depression being depressed from the 2 nd horizontal plane,

the 1 st and 2 nd horizontal surfaces are joined to each other.

14. The conductive sheet according to claim 13, further comprising a 3 rd sheet, the 3 rd sheet comprising a plurality of 3 rd elastic conductive portions in the vertical direction and a 3 rd elastic insulating portion that partitions and insulates the plurality of 3 rd elastic conductive portions in the horizontal direction, and the 3 rd sheet being disposed between the 1 st sheet and the 2 nd sheet,

the 3 rd elastic insulating part has at least one recess portion in which the protrusion of the 1 st sheet is fitted at one of one end and the other end opposite in the vertical direction, and has at least one protrusion portion fitted to the recess portion of the 2 nd sheet at the other of the one end and the other end.

15. The conductive sheet of claim 14,

the recess of the 3 rd elastic insulation portion is located at one of the pair of 3 rd horizontal planes, the protrusion of the 3 rd elastic insulation portion is located at the other of the pair of 3 rd horizontal planes,

16. The conductive sheet as claimed in claim 12, wherein the horizontal-direction cross-sectional shape of the protruding portion may be any one of a circle, an ellipse, an oblong, and a quadrangle, and the recessed portion has a cross-sectional shape complementary to that of the protruding portion.

17. The conductive flake of claim 12, wherein the protrusion has a height of 90% to 100% of the depth of the depression.

18. The conductive sheet of claim 12,

at least one of the 1 st elastic conductive portions has a protruding portion adjoining the protruding portion of the 1 st elastic insulating portion,

at least one of the 2 nd elastic conductive parts has a recessed part which is adjacent to the recessed part of the 2 nd elastic insulating part and which fits the protruding part of the at least one 1 st elastic conductive part.

19. The conductive sheet as claimed in claim 12, wherein the 1 st elastic conductive portion and the 2 nd elastic conductive portion include a plurality of conductive particles aligned in the vertical direction.

20. The conductive sheet of claim 12, wherein the 1 st and 2 nd elastic insulating portions comprise a silicone rubber material.

21. The conductive sheet of claim 13, wherein the 1 st level and the 2 nd level are joined by an adhesive.