TW202012940A - Conductive sheet for electrical test - Google Patents

Abstract

Provided is a conductive sheet disposed between a test apparatus and a device to be tested for testing of the device to be tested. The conductive sheet comprises a first sheet and a second sheet stacked in the vertical direction. The first sheet includes a plurality of first elastic conductive portions in the vertical direction and a first elastic insulation portion which separates and insulates the plurality of first elastic conductive portions in the horizontal direction. At least one first elastic conductive portion has a protrusion portion protruding in a direction perpendicular to the first elastic insulation portion. The second sheet includes a plurality of second elastic conductive portions in the vertical direction and a second elastic insulation portion which separates and insulates the plurality of second elastic conductive portions in the horizontal direction. At least one second elastic conductive portion has a concave portion which is concave in the vertical direction with respect to the second elastic insulation portion such that the protrusion portion of the first elastic conductive portion is fitted to the at least one second elastic conductive portion in the vertical direction.

Description

Conductive sheet for inspection

The present invention relates to a conductive sheet for inspecting a device under inspection.

In order to inspect the device under inspection, a connector electrically connected between the device under inspection and the inspection device is disposed between the device under inspection and the inspection device. The connector transmits the electrical test signal of the inspection device to the device under inspection, and transmits the response signal of the device under inspection to the inspection device. As such connectors, pogo pin test sockets and conductive rubber sockets are being used.

The pogo pin test socket has a pogo pin pressed in a vertical direction in response to an external force applied to the device under inspection. The pogo pin test socket must contain pogo pin parts, so it is difficult to have a thin thickness and it is difficult to apply to the fine pitch of the terminals of the device under inspection.

The conductive rubber sheet can elastically deform in response to a force applied to the device under inspection. Compared with the pogo pin test socket, the conductive rubber sheet is advantageous in that it can be manufactured with less manufacturing cost, does not damage the terminal of the device under inspection, and has a very thin thickness. Therefore, various attempts are being made to replace the spring pin test sockets with conductive rubber sheets in the inspection field of the device under inspection.

The pogo pin test socket is thicker than the conductive rubber sheet. Therefore, it is impossible to replace the pogo pin test socket with a conductive rubber sheet by replacing a pogo pin test socket with a conductive rubber sheet. In order to achieve the replacement, a redesign is needed to make the part that attaches the pogo pin test socket to the inspection device suitable for the conductive rubber sheet. A conductive rubber sheet with a thickness equal to the thickness of the spring pin test socket can also be considered. However, as the thickness of the conductive rubber sheet is thicker, the electrical resistance of the conductive rubber sheet increases and the conductivity becomes lower. Therefore, it is difficult to make the conductive rubber sheet more than a predetermined thickness.

Regarding the replacement of the spring pin test socket with a conductive rubber sheet, it is proposed in Korean Patent Publication No. 10-2006-0123910 to arrange a conductive sheet similar to it under one conductive rubber sheet. However, simply arranging two conductive sheets up and down cannot solve the adverse effects such as a decrease in conductivity and a change in the relative position of the components arranged up and down.

[Problems to be solved by the invention]

An embodiment of the present invention provides a laminated conductive sheet having an increased thickness. An embodiment of the present invention provides a laminated conductive sheet that is aligned with an elastic conductive portion in a vertical direction. An embodiment of the present invention provides a laminated conductive sheet in which the position of the aligned elastic conductive portion does not change. [Technical means to solve the problem]

An embodiment of the present invention relates to a conductive sheet disposed between an inspection device and an inspected device and used to inspect the inspected device. In one embodiment of the conductive sheet, the conductive sheet includes a first sheet and a second sheet stacked in the vertical direction.

In one embodiment, the first sheet includes a plurality of first elastic conductive portions in the vertical direction, and a first elastic insulating portion that isolates and insulates the plurality of first elastic conductive portions in the horizontal direction. At least one first elastic conductive portion has a protruding portion that protrudes in a vertical direction relative to the first elastic insulating portion. The second sheet includes a plurality of second elastic conductive portions in the vertical direction, and a second elastic insulating portion that isolates and insulates the plurality of second elastic conductive portions in the horizontal direction. At least one second elastic conductive portion has a recessed portion that is recessed in the vertical direction relative to the second elastic insulating portion, so that the protruding portion of the first elastic conductive portion is fitted into the at least one second elastic conductive portion in the vertical direction.

In one embodiment, the first elastic insulating portion has a first horizontal plane extending in the horizontal direction, and the second elastic insulating portion has a second horizontal plane extending in the horizontal direction and facing the first horizontal surface. The protruding portion protrudes with respect to the first horizontal plane, the recessed portion is recessed with respect to the second horizontal plane, and the first horizontal plane and the second horizontal plane are joined to each other.

In one embodiment, the conductive sheet further includes a third sheet, the third sheet includes a plurality of third elastic conductive portions in the vertical direction, and a third insulating third plurality of elastic conductive portions that are horizontally separated and insulated The elastic insulating portion is arranged between the first sheet and the second sheet. At least one third elastic conductive portion has a recessed portion that fits the protrusion of the first sheet at one of the one end and the other end facing in the vertical direction, and the other one of the one end and the other end has a The protruding part of the concave part of the second sheet.

In one embodiment, the third elastic insulating portion has a pair of third horizontal planes spaced apart in the vertical direction. The concave portion of at least one third elastic conductive portion is located in one of the pair of third horizontal planes, and the protruding portion of at least one third elastic conductive portion is located in the other of the pair of third horizontal planes. The first level is joined to one of the pair of third levels, and the second level is joined to the other of the pair of third levels.

In one embodiment, the protruding portion has an inclined portion inclined with respect to the central axis of the protruding portion, and the recessed portion has an inclined portion that is inclined with respect to the central axis of the recessed portion and is in contact with the inclined portion of the protruding portion.

In one embodiment, the plurality of first elastic conductive parts have protrusions, and the plurality of second elastic conductive parts have depressions.

In one embodiment, the concave portion has a depth of 10% to 100% of the height of the protrusion.

In one embodiment, the first elastic insulating portion has a protruding portion adjacent to at least one protruding portion of the first elastic conductive portion, and the second elastic insulating portion has a protruding portion adjacent to and recessed by at least one second elastic conductive portion 1 The concave part of the protruding part of the elastic insulating part.

In yet another embodiment of the conductive sheet, the first elastic insulating portion of the first sheet has at least one protruding portion that protrudes in the vertical direction relative to the plurality of first elastic conductive portions. The second elastic insulating portion of the second sheet has at least one recessed portion which is recessed in the vertical direction with respect to the plurality of second elastic conductive portions and in which the protruding portion of the first elastic insulating portion is fitted in the vertical direction.

In one embodiment, the first elastic insulating portion has a first horizontal plane extending in the horizontal direction, and the second elastic insulating portion has a second horizontal plane extending in the horizontal direction and facing the first horizontal surface. The protruding portion protrudes from the first horizontal surface, the recessed portion is recessed from the second horizontal surface, and the first and second horizontal surfaces are joined to each other.

In one embodiment, the third elastic insulating portion of the third sheet has at least one recessed portion that fits into the protrusion of the first sheet at one of the one end and the other end facing in the vertical direction, and at one end and the other The other of the one ends has at least one protruding portion fitted into the concave portion of the second sheet.

In one embodiment, the horizontal cross-sectional shape of the protruding portion of the first elastic insulating portion may be any of a circle, an ellipse, an oval, and a quadrangle. The concave portion of the second elastic insulating portion may have a cross-sectional shape complementary to the cross-sectional shape of the protruding portion.

In one embodiment, the protrusion has a height of 90% to 100% of the depth of the recess.

In one embodiment, at least one first elastic conductive portion has a protruding portion adjacent to the protruding portion of the first elastic insulating portion, and at least one second elastic conductive portion has a recessed portion adjacent to the second elastic insulating portion and fits at least A recessed portion of the protruding portion of the first elastic conductive portion.

In one embodiment, the first elastic conductive portion and the second elastic conductive portion include a plurality of conductive particles arranged in a vertical direction.

In one embodiment, the first elastic insulating portion and the second elastic insulating portion include silicone rubber material.

In one embodiment, the first horizontal plane of the first sheet and the second horizontal plane of the second sheet can be joined by an adhesive. [Effect of invention]

According to an embodiment of the present invention, a laminated conductive sheet having an increased thickness can be provided. According to an embodiment of the present invention, the matching between the alignment elements aligns the elastic conductive portions in the vertical direction, and thus it is possible to provide a laminated conductive sheet that can easily align the elastic conductive portions in structure. In addition, the elastic conductive portions aligned by the matching alignment elements do not increase the resistance of the laminated conductive sheet, do not reduce the conductivity of the laminated conductive sheet, and stably maintain the laminated structure of the laminated conductive sheet. According to an embodiment of the present invention, the matching alignment element prevents the position of the elastic conductive portion from being changed, and thus a laminated conductive sheet that can maintain conductivity with high reliability for a long period of time can be provided.

The embodiments of the present invention are exemplified for the purpose of explaining the technical idea of the present invention. The scope of rights of the present invention is not limited to the embodiments presented below or the specific descriptions of these embodiments.

As long as there is no other definition, all technical and scientific terms used in the present invention have the meanings generally understood by those of ordinary knowledge in the technical field to which the present invention belongs. All terms used in the present invention are selected for the purpose of more clearly explaining the present invention, and are not selected to limit the scope of rights of the present invention.

Expressions such as "include", "have", "have", etc. used in the present invention are understood as having the possibility of including other embodiments as long as other meanings are not mentioned in the sentence or sentence including the corresponding expression Open-ended terms.

As long as other meanings are not mentioned, the singular expressions described in the present invention may include plural meanings, and this case also applies to the singular expressions described in the patent application scope of the invention.

Expressions such as "first" and "second" used in the present invention are used to distinguish a plurality of constituent elements from each other, and do not limit the order or importance of the corresponding constituent elements.

In the present invention, when it is described that a certain constituent element is “connected” or “connected” to another constituent element, it should be understood that one of the above constituent elements may be directly connected or connected to the other constituent element, or may Connected or connected with a brand-new yet another constituent element.

The "upper" direction indicator used in the present invention is based on the direction in which the conductive sheet is positioned relative to the inspection device, and the "lower" direction indicator refers to the opposite direction from above. The direction indicator of “vertical direction” used in the present invention includes an upward direction and a downward direction, but it should be understood that it does not refer to a specific one of the upward direction and the downward direction.

Hereinafter, the embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding constituent elements are given the same reference symbols. In addition, in the description of the following embodiments, repeated description of the same or corresponding constituent elements may be omitted. However, even if the description of the constituent elements is omitted, it does not mean that such constituent elements are not included in a certain embodiment.

The embodiment described below and the example shown in the accompanying drawings relate to a conductive sheet for inspecting a device under inspection. The conductive sheet of the embodiment can be used for final inspection of the device under inspection in a subsequent step in the manufacturing step of the device under inspection. However, the example of inspection of the conductive sheet of the application embodiment is not limited to the above example.

Fig. 1 shows a conductive sheet according to a first embodiment of the present invention. Referring to FIG. 1, a conductive sheet 1000 according to an embodiment is disposed between the inspection apparatus 10 and the device under inspection 20 to inspect the device under inspection 20.

In order to inspect the device under inspection 20, the socket 30 accommodating the device under inspection 20 can be removably attached to the inspection apparatus 10. The socket 30 accommodates the device to be inspected 20 carried in the inspection device 10 by the carrying device of the test handle to position the device to be inspected 20 on the inspection device 10. The conductive sheet 1000 can be combined with the socket 30 in a replaceable manner.

As an example, the device under inspection 20 may be a semiconductor package, but it is not limited thereto. The semiconductor packaging system uses a resin material to package a semiconductor IC (Integrated Circuit) wafer, a plurality of lead frames (lead frame) and a plurality of terminals into a hexahedral semiconductor device. As the above-mentioned terminals, pins, solder balls, etc. can be used. The semiconductor device 20 shown in FIG. 1 includes solder ball terminals. Therefore, the semiconductor device 20 has a plurality of hemispherical terminals 21 on its lower surface. Furthermore, the semiconductor IC chip of the semiconductor device may be a memory IC chip or a non-memory IC chip.

The inspection device 10 can inspect the electrical characteristics, functional characteristics, operating speed, etc. of the device under inspection 20. The inspection device 10 may have a plurality of conductive pads 11 that can apply electrical test signals and can receive response signals in a test board that performs inspection. The conductive sheet 1000 can be in contact with the conductive pad 11 by positioning the socket 30 on the conductive pad 11 of the inspection device 10. The terminal 21 of the device under test 20 is electrically connected to the corresponding conductive pad 11 through the conductive sheet 1000. That is, the conductive sheet 1000 connects the terminal 21 of the device under inspection 20 and the conductive pad 11 corresponding to the terminal 21 in such a manner as to be conductive in the vertical direction VD, whereby the device under inspection 20 is inspected by the inspection device 10.

The conductive sheet 1000 according to an embodiment includes a first sheet 1100 and a second sheet 1200 laminated in a vertical direction VD. The conductive sheet 1000 has an increased thickness and an increased pressing amount due to the stacked first sheet 1100 and second sheet 1200. When a force outside the downward direction LD is applied to the first sheet 1100 and the second sheet 1200, the first sheet 1100 and the second sheet 1200 can elastically deform in the downward direction LD and the horizontal direction HD. The above-mentioned external force can be generated by pressing the ejector device of the test handle toward the inspection device 10 side toward the inspection device 20. With such an external force, the device to be inspected 20 and the conductive sheet 1000 may contact in the vertical direction VD, and the conductive sheet 1000 and the conductive pad 11 may contact in the vertical direction VD. If the above external force is removed, the conductive sheet 1000 can return to its original shape.

The first sheet 1100 and the second sheet 1200 have similar configurations. The first sheet 1100 includes a plurality of first elastic conductive portions 1110 in the vertical direction VD, and a first number that separates the plurality of first elastic conductive portions 1110 in the horizontal direction HD and insulates the plurality of first elastic conductive portions 1110 from each other Elastic insulating portion 1120. The second sheet 1200 includes a plurality of second elastic conductive portions 1210 in the vertical direction VD, and a second portion that separates the plurality of second elastic conductive portions 1210 in the horizontal direction HD and insulates the plurality of second elastic conductive portions 1210 from each other Elastic insulating portion 1220. In the conductive sheet 1000, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are positioned along the vertical direction VD. In addition, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD, and their respective end portions are conductively contacted.

In the example shown in FIG. 1, the upper end of the first elastic conductive portion 1110 is in contact with the lower end of the second elastic conductive portion 1210 (one end of the second elastic conductive portion), and the lower end thereof is in contact with the conductive pad 11 of the inspection device 10. The second elastic conductive portion 1210 has its upper end in contact with the terminal 21 of the device under test 20 and its lower end in contact with the upper end of the first elastic conductive portion 1110 (one end of the first elastic conductive portion). Therefore, in the conductive sheet 1000, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 aligned and contacted in the vertical direction VD form a vertical conductive path between the corresponding terminal 21 and the conductive pad 11. The upper and lower ends of the first elastic conductive portion 1110 may form the same plane as the upper and lower surfaces of the first elastic insulating portion 1120 or slightly protrude from it. The upper and lower ends of the second elastic conductive portion 1210 may form the same plane as the upper and lower surfaces of the second elastic insulating portion 1220 or be slightly recessed.

In the conductive sheet of the embodiment, in order to fix the position of the first sheet 1100 and the second sheet 1200 in the horizontal direction HD and align the first elastic conductive portion 1110 and the second elastic conductive portion 1210 in the vertical direction VD, At least one alignment element is provided in the first sheet 1100, and another alignment having a shape complementary to the alignment element of the first sheet 1100 and matching with the alignment element of the first sheet 1100 is provided in the second sheet 1200 element. A pair of alignment elements as described above can be realized as a protruding portion and a recessed portion, which can allow fitting in the vertical direction VD.

When the cross-section of the protruding portion is taken in the horizontal direction HD, the cross-sectional shape of the protruding portion may be circular, but it is not limited thereto. The recessed portion may have a cross-sectional shape complementary to the cross-sectional shape of the projected portion, so that the projected portion fits into the recessed portion.

The protruding portion may be provided by at least one of the first elastic conductive portions 1110 of the first sheet 1100, and the recessed portion may be provided by the second elastic conductive portion 1210 of the second sheet 1200 corresponding to the first elastic conductive portion. In this case, the protruding portion and the recessed portion may form an end of the elastic conductive portion in the vertical direction VD. Alternatively, the protruding portion may be provided by the first elastic insulating portion 1120 of the first sheet 1100, and the recessed portion may be provided by the second elastic insulating portion 1220 of the second sheet 1200. In this case, the protruding portion and the recessed portion may protrude from the surface of the elastic insulating portion or be recessed from the surface of the elastic insulating portion. Alternatively, the protruding portion may be provided by the first elastic conductive portion 1100 and the first elastic insulating portion 1120 of the first sheet 1100, and the recessed portion may be provided by the second elastic conductive portion 1210 and the second elastic insulating portion 1220 of the second sheet 1200.

Referring to the conductive sheet 1000 shown in FIG. 1, the first elastic conductive portion 1110 has a protrusion 1112 forming an upper end in the vertical direction VD, and the second elastic conductive portion 1210 has a recess 1212 forming a lower end in the vertical direction VD. The protruding portion 1112 and the recessed portion 1212 are formed such that the protruding portion 1112 is fitted into the recessed portion 1212 in the vertical direction VD. Therefore, when the first sheet 1100 and the second sheet 1200 are laminated, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD because the protrusion 1112 and the recessed portion 1212 are fitted in the vertical direction VD. Align and touch.

In order to explain the embodiment, the shape of the device to be inspected, the shape of the inspection device, and the shape of the socket shown in FIG. 1 are schematically shown. The arrangement of the first sheet 1100 and the second sheet 1200 in FIG. 1 is only an example. The conductive sheet of another embodiment may include the first sheet 1100 disposed on the second sheet 1200.

2a and 2b are schematic diagrams showing the planar arrangement of elastic conductive portions and elastic insulating portions in the first sheet used in the conductive sheet of the embodiment. The second sheet may have the same plane arrangement as that shown in FIGS. 2a and 2b. 2a and 2b, the first sheet 1100 includes a first elastic conductive portion 1110 and a first elastic insulating portion 1120. The planar arrangement of the first elastic conductive portion 1110 in the first sheet 1100 can be variously arranged according to the arrangement of the terminals of the device under inspection. Referring to FIG. 2a, in the first sheet 1100, the first elastic conductive portions 1110 may be arranged in a pair of matrix forms. Referring to FIG. 2b, in the first sheet 1100, the first elastic conductive portions 1110 may be arranged in a plurality of rows along each side of the quadrangle.

3 to 15, an embodiment of the conductive sheet will be described in detail. The shape of the sheet shown in FIGS. 3 to 15, the shape of the elastic conductive portion, and the shape and position of the alignment element are only examples selected for the purpose of explaining the embodiment.

To explain the conductive sheet of an embodiment, refer to the examples shown in FIGS. 3 to 5. FIG. 3 shows the conductive sheet shown in FIG. 1 before lamination, FIG. 4 shows the first sheet shown in FIG. 3, and FIG. 5 shows the second sheet shown in FIG.

Referring to FIG. 3, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 may have a cylindrical shape extending in the vertical direction VD. In such a cylindrical shape, the diameter of the middle portion may be smaller than the diameters of the upper and lower ends. Alternatively, in order to prevent the conductivity of the laminated conductive sheet 1000 from decreasing, the diameter of the end portion in contact with the terminal or inspection device of the device under inspection may be equal to or smaller than the diameter of the end portion on the opposite side of such end portion.

In one embodiment, the first elastic conductive portion 1110 includes a plurality of conductive particles 1111 arranged in a vertical direction VD, and the second elastic conductive portion 1210 includes a plurality of conductive particles 1211 arranged in a vertical direction VD. In each elastic conductive portion, the conductive particles are in contact with each other along the vertical direction VD. Therefore, the upper end and the lower end of each elastic conductive portion can be connected in such a manner as to conduct electricity in the vertical direction VD. The material constituting the first elastic insulating portion 1120 can hold the plurality of conductive particles 1111 in the shape of the first elastic conductive portion 1110 shown in FIG. 3. The material constituting the second elastic insulating portion 1220 can hold the plurality of conductive particles 1211 in the shape of the second elastic conductive portion 1210 shown in FIG. 3.

As an example, the surface of the core particles may be coated with a highly conductive metal to constitute the conductive particles. The core particles may include metallic materials such as iron, nickel, and cobalt as magnetic bodies, or particles such as resins having elasticity. As the highly conductive metal coated on the surface of the core particles, gold, silver, rhodium, platinum, chromium, etc. can be used.

Referring to FIG. 3, the plurality of first elastic conductive portions 1110 are separated and insulated from each other by the first elastic insulating portion 1120. The first elastic insulating portion 1120 can form a quadrangular elastic area of the first sheet 1100, and can maintain the plurality of conductive particles 1111 in the shape of the first elastic conductive portion 1110. The plurality of second elastic conductive portions 1210 are separated and insulated from each other by the second elastic insulating portion 1220. The second elastic insulating portion 1220 can form a quadrangular elastic region of the second sheet 1200, and can maintain the plurality of conductive particles 1211 in the shape of the second elastic conductive portion 1210.

The elastic insulating portion includes an elastic polymer material. In detail, the elastic insulating portion includes a hardened silicone rubber material. For example, liquid silicone rubber is injected into the mold for forming the first sheet 1100 or the second sheet 1200 and hardened, thereby forming the above-mentioned elastic insulating portion. As the liquid silicone rubber material for forming the above-mentioned elastic insulating portion, an addition-molded liquid silicone rubber, a condensed liquid silicone rubber, a liquid silicone rubber including vinyl or hydroxyl groups, etc. can be used. As a specific example, the liquid silicone rubber material may include dimethyl silicone rubber, methyl vinyl silicone rubber, methyl phenyl vinyl silicone rubber, and the like.

As an example, the elastic conductive portion may be formed by injecting liquid silicone rubber dispersed with the conductive particles into a mold for forming the first sheet 1100 or the second sheet 1200, and then applying The magnetic field at each position of the elastic conductive portion aligns the conductive particles. As yet another example, the above-mentioned elastic conductive portion may be formed by forming a through-hole in each position of the elastic conductive portion in a sheet formed by hardening of liquid silicone rubber excluding conductive particles and filling it with conductive particles Such through holes.

Referring to FIGS. 3 and 4, the first elastic insulating portion 1120 separates the adjacent first elastic conductive portions 1110 at the first horizontal interval D1 in the horizontal direction HD1. In addition, the first elastic insulating portion 1120 separates the adjacent first elastic conductive portion 1110 at a second horizontal interval D2 in another horizontal direction HD2 perpendicular to the horizontal direction HD1. The first horizontal interval D1 and the second horizontal interval D2 may be set to the same size as each other, or may be set to different sizes.

Referring to FIGS. 3 and 5, the second elastic insulating portion 1220 separates the adjacent second elastic conductive portions 1210 at the third horizontal interval D3 in the horizontal direction HD1. In addition, the second elastic insulating portion 1220 separates the adjacent second elastic conductive portions 1210 at the fourth horizontal interval D4 in the horizontal direction HD2. The third horizontal interval D3 and the fourth horizontal interval D4 may be set to the same size as each other, or may be set to different sizes.

In one embodiment, referring to FIGS. 3 and 4, at least one of the plurality of first elastic conductive portions 1110 of the first sheet 1100 has a protruding portion 1112 that protrudes in the vertical direction VD relative to the first elastic insulating portion 1120. Referring to FIGS. 3 and 5, at least one of the plurality of second elastic conductive portions 1210 of the second sheet 1200 has a recessed portion 1212 recessed in the vertical direction VD with respect to the second elastic insulating portion 1220. The protruding portion 1112 and the recessed portion 1212 are formed such that the protruding portion 1112 is fitted into the recessed portion 1212 in the vertical direction VD. The recessed portion 1212 is provided by the second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 having the protruding portion 1112 in the vertical direction VD. FIGS. 3 to 5 show, for the purpose of illustration only, a first elastic conductive portion providing a protruding portion and a second elastic conductive portion providing a recessed portion. The protrusion 1112 may be provided by at least one of the plurality of first elastic conductive portions located in one row, or at least one of the plurality of first elastic conductive portions located in different rows. Alternatively, the protruding portion 1112 may be provided by the first elastic conductive portion located at each corner of the sheet shown in FIGS. 2a and 2b. The recessed portion 1212 may be provided by the second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 providing the protruding portion 1112.

The protruding portion 1112 is located in the first elastic conductive portion 1110 in the vertical direction VD, and the recessed portion 1212 is located in the second elastic conductive portion 1210 in the vertical direction VD. When the first sheet 1100 and the second sheet 1200 are stacked, the protruding portion 1112 and the recessed portion 1212 serve as a reference for aligning the plurality of first elastic conductive portions 1110 and the plurality of second elastic conductive portions 1210 in the vertical direction VD Point to function. When the first sheet 1100 and the second sheet 1200 are stacked, the protruding portion 1112 is fitted into the recessed portion 1212. The first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD due to the fitting between the protruding portion 1112 and the recessed portion 1212. One end of the first elastic conductive portion 1110 (for example, the first 1 the upper end of the elastic conductive portion) is in contact with one end of the second elastic conductive portion 1210 (for example, the lower end of the second elastic conductive portion shown in FIG. 3) in the vertical direction VD. As described above, when the first sheet 1100 and the second sheet 1200 are laminated, the alignment between the elastic conductive portion located on the upper side and the elastic conductive portion located on the lower side is structurally achieved due to the fitting of the protrusion and the recess. Therefore, the conductive sheet 1000 has a thicker thickness due to the laminated structure, and does not increase the resistance or decrease the conductivity due to the aligned elastic conductive portions. In addition, the protruding portion 1112 and the recessed portion 1212 fitted in the vertical direction VD fix the positions of the first sheet 1100 and the second sheet 1200 in the horizontal direction HD. Therefore, even if the conductive sheet 1000 is repeatedly pressed to inspect the device under inspection, the first sheet 1100 and the second sheet 1200 do not move relative to each other. Therefore, the conductive sheet 1000 has a stable laminated structure that can maintain conductivity with high reliability for a long period of time.

Referring to FIGS. 3 to 5, in one embodiment, the first elastic insulating portion 1120 of the first sheet 1100 has a first horizontal surface 1121 extending in the horizontal direction HD, and the second elastic insulating portion 1220 of the second sheet 1200 has a horizontal The second horizontal plane 1221 extending in the direction HD. The first horizontal plane 1121 and the second horizontal plane 1221 face each other in the vertical direction VD. The protruding portion 1112 of the first elastic conductive portion protrudes in the vertical direction VD relative to the first horizontal surface 1121, and the recessed portion 1212 of the second elastic conductive portion is recessed in the vertical direction VD relative to the second horizontal surface 1221.

Referring to FIGS. 3 and 4, the protruding portion 1112 is a portion of the first elastic conductive portion 1110 that protrudes relative to the first horizontal surface 1121, and forms the upper end of the first elastic conductive portion 1110. The protrusion 1112 has a truncated cone shape. Therefore, the protruding portion 1112 has an inclined portion 1113 inclined with respect to the central axis CA1 of the protruding portion (or, the central axis of the first elastic conductive portion 1110 in the vertical direction VD). The inclined portion 1113 extends in a ring shape along the peripheral direction of the protruding portion 1112 to form the outer peripheral portion of the protruding portion 1112. The inclination angle IA1 of the inclined portion 1113 relative to the central axis CA1 of the protruding portion 1112 may be 0 degrees or more and 30 degrees or less.

Referring to FIGS. 3 and 5, the recessed portion 1212 is a portion of the second elastic conductive portion 1210 recessed with respect to the second horizontal plane 1221, and forms the lower end of the second elastic conductive portion 1210. The concave portion 1212 has a truncated cone shape corresponding to the shape of the protruding portion 1112. Therefore, the recessed portion 1212 has an inclined portion 1213 that is inclined with respect to the central axis CA2 of the recessed portion (or the central axis of the second elastic conductive portion 1210 in the vertical direction VD). The inclined portion 1213 extends in a ring shape along the outer peripheral direction of the recessed portion 1212 to form an inner peripheral portion of the recessed portion 1212. The inclination angle IA2 of the inclined portion 1213 relative to the central axis CA2 of the recessed portion 1212 may be 0 degrees or more and 30 degrees or less. Also, the inclination angle IA2 may be equal to or smaller than the inclination angle of the inclined portion of the protruding portion. The protruding portion 1112 is fitted into the recessed portion 1212, so the inclined portion 1113 of the protruding portion 1112 and the inclined portion 1213 of the recessed portion 1212 are in contact with each other.

The protruding portion 1112 and the recessed portion 1212 are to align the first elastic conductive portion 1110 and the second elastic conductive portion 1210 in the vertical direction VD and to make one end of the first elastic conductive portion 1110 (the first elastic conductive portion shown in FIG. 3) The upper end of the portion) is formed in contact with one end of the second elastic conductive portion 1210 (the lower end of the second elastic conductive portion shown in FIG. 3) in the vertical direction VD. As an example, when the overall height of the first sheet 1100 is referred to as T, the height of the protrusion 1112 may be 0.05T to 0.15T.

According to an embodiment, the recessed portion 1212 may have a proper depth within a range where the protrusion 1112 is slightly fitted into the recess 1212 to a depth where the protrusion 1112 is completely fitted into the recess 1212. In an embodiment, the recess 1212 may have a depth of 10% to 100% of the height of the protrusion 1112. As described above, the recess 1212 may have a depth equal to or less than the height of the protrusion 1112. Therefore, when the first sheet 1100 and the second sheet 1200 are laminated, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 can be reliably aligned and contacted in the vertical direction VD. In addition, if the recessed portion 1212 has a depth smaller than the height of the protruding portion 1112, a minute interval can be ensured between the first elastic insulating portion 1120 and the second elastic insulating portion 1220 in the vertical direction VD. Therefore, when the elastic conductive portion is pressed in the vertical direction by the terminal of the device under inspection, the elastic insulating portion smoothly allows the horizontal expansion of the elastic conductive portion, thereby improving the elastic force of the elastic conductive portion and the elastic force of the conductive sheet.

6a to 6g show various examples of the protruding portion and the recessed portion in the first embodiment described above.

Referring to FIG. 6a, only one of the plurality of first elastic conductive portions 1110 may have a protruding portion 1112, and only the second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 having the protruding portion 1112 may have Depression 1212.

Referring to FIG. 6b, the plurality of first elastic conductive portions 1110 may have protrusions 1112. The protruding portion 1112 may be provided by the first elastic conductive portions 1110 located in a row, or may be provided by all the first elastic conductive portions 1110. The second elastic conductive portion 1210 corresponding to the first elastic conductive portion 1110 may have a concave portion 1212.

Referring to FIG. 6c, the elastic conductive portion can be located adjacent to the end of the sheet illustrated in FIGS. 2a and 2b, and the protruding portion 1112 and the recessed portion 1212 can be provided by this elastic conductive portion.

Referring to FIG. 6d, the protrusion 1112 of the first sheet 1100 may have a cylindrical shape, and the recess 1212 of the second sheet 1200 may have a cylindrical shape.

Referring to FIG. 6e, the recessed portion 1212 can also be formed to be recessed toward the inside of the second elastic conductive portion 1210 in the vertical direction VD.

6f and 6g, the first elastic insulating portion 1120 may have a protruding portion 1122 adjacent to the protruding portion 1112, and the second elastic insulating portion 1220 may have a recessed portion 1222 adjacent to the recessed portion 1212. The protruding portion 1122 protrudes from the first horizontal surface 1121, and the recessed portion 1222 is recessed from the second horizontal surface 1221. The protrusion 1122 can protrude at a height equal to or less than the height of the protrusion 1112, and the recess 1222 can be recessed at a depth equal to or less than the depth of the recess 1212. The protruding portion 1122 can be formed so as to fit into the recessed portion 1222 in the vertical direction VD. Referring to FIG. 6f, the protrusion 1122 may be adjacent to the protrusion 1112, and the recess 1222 may be adjacent to the recess 1212. Referring to FIG. 6g, the protrusions 1122 may be linearly formed along the plurality of protrusions 1112 located in a row, and may be adjacent to each protrusion 1112. The protruding portion 1112 and the protruding portion 1222 may form a protruding portion extending with a predetermined length. In addition, the recessed portions 1222 may be linearly formed along the plurality of recessed portions 1212 in a row, and may be adjacent to each recessed portion 1212. The concave portion 1212 and the concave portion 1222 may form a concave portion extending with a predetermined length.

In one embodiment, the first sheet and the second sheet can be joined to each other. Therefore, the conductive sheet having the first sheet and the second sheet bonded to each other can be disposed between the device to be inspected and the inspection device as a laminated structure having a relatively thick thickness. 3 and 7, the bonding of the first sheet and the second sheet can be performed on the first horizontal plane 1121 and the second horizontal plane 1221. Therefore, the conductive sheet 1000 has a bonding layer BL between the first sheet 1100 and the second sheet 1200, and the bonding layer BL is formed between the first horizontal plane 1121 and the second horizontal plane 1221. FIG. 7 shows the bonding layer BL at an exaggerated size in order to illustrate the bonding between the first sheet 1100 and the second sheet 1200.

In one embodiment, the first horizontal surface 1121 and the second horizontal surface 1221 can be joined by an adhesive. As the above-mentioned adhesive, a polysiloxane-based adhesive may be used, and the bonding layer BL may include such an adhesive. 4 and 7, the adhesive may be applied to the first horizontal surface 1121 of the first elastic insulating portion 1120 except for the upper end of the first elastic conductive portion 1110. Alternatively, referring to FIGS. 5 and 7, the adhesive may be applied to the second horizontal surface 1221 of the second elastic insulating portion 1220 except for the lower end of the second elastic insulating portion 1220. The first elastic conductive portion 1110 and the second elastic conductive portion 1210 are not coated with the adhesive, and the first elastic conductive portion and the second elastic conductive portion are not joined to each other. Therefore, there is no adhesive that increases resistance or decreases conductivity at the interface between the first elastic conductive portion 1110 and the second elastic conductive portion 1210 that are in contact with each other. Regarding the bonding using the above adhesive, one of the first sheet 1100 and the second sheet 1200 can pressurize the other in the vertical direction VD under a predetermined condition.

According to the embodiment, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 may also be connected. In this case, as long as the thickness of the polysiloxane adhesive is thin and the conductivity can be ensured, the polysiloxane adhesive can also be used. In addition, a conductive adhesive may be used as necessary. As yet another embodiment, the bonding layer BL shown in FIG. 7 may be formed on the inclined portion of the protruding portion 1112 and the inclined portion of the recessed portion 1212.

In one embodiment, the conductive sheet may include one or more third sheets disposed between the first sheet and the second sheet. Fig. 8 shows a conductive sheet according to a second embodiment of the present invention, and Fig. 9 shows a conductive sheet shown in Fig. 8 before lamination.

Referring to FIG. 8, the conductive sheet 2000 includes a third sheet 2300 disposed between the first sheet 1100 and the second sheet 1200. Due to the third sheet 2300, the conductive sheet 2000 may have a thicker thickness and may have a larger amount of pressing in the vertical direction. The third sheet 2300 includes a plurality of third elastic conductive portions 2310 extending in the vertical direction VD, and a third portion that separates the plurality of third elastic conductive portions 2310 in the horizontal direction HD and insulates the plurality of third elastic conductive portions 2310 3 Elastic insulation 2320. The third elastic conductive portion 2310 has its upper end in contact with the lower end of the second elastic conductive portion 1210 (one end of the second elastic conductive portion), and its lower end in contact with the upper end of the first elastic conductive portion 1110 (one end of the first elastic conductive portion) .

Referring to FIG. 9, the third elastic conductive portion 2310 includes a plurality of conductive particles 2311. The plurality of conductive particles 2311 may be the same as the conductive particles 1111 and 1211 described above. The conductive particles 2311 can be maintained in the shape of the third elastic conductive portion 2310 by the material constituting the third elastic insulating portion 2320. The third elastic insulating portion 2320 separates the adjacent third elastic conductive portion 2310 at the fifth horizontal interval D5 in the horizontal direction HD1, and makes the adjacent third elastic conductive portion 2310 at the sixth level in the horizontal direction HD2 Spaced apart. The third elastic insulating portion 2320 may be configured in the same manner as the first elastic insulating portion or the second elastic insulating portion.

8 and 9, at least one of the plurality of third elastic conductive portions 2310 of the third sheet 2300 has a recess 2312 at one of the one end and the other end facing in the vertical direction VD, at one end and the other The other of the one ends has a protrusion 2313. The concave portion 2312 may be located at the lower end of the third elastic conductive portion 2310. The recess 2312 can be configured in the same manner as the recess 1212 of the second sheet 1200. The recess 2312 is formed so that the protrusion 1112 of the first sheet 1100 fits into the recess 2312 when the first sheet 1100 and the third sheet 2300 are stacked. The protruding portion 2313 may be located at the upper end of the third elastic conductive portion 2310. The protrusion 2313 can be configured in the same manner as the protrusion 1112 of the first sheet 1100. The protrusion 2313 is formed so as to fit into the recess 1212 of the second sheet 1200 when the third sheet 2300 and the second sheet 1200 are stacked. 8 and 9 show the third elastic conductive portion 2310 provided with the concave portion 2312 and the protruding portion 2313 for the purpose of illustration only. The concave portion 2312 and the protruding portion 2313 of the third sheet 2300 may be provided by the third elastic conductive portion 2310 corresponding to the first elastic conductive portion 1110 having the protruding portion 1112 and the second elastic conductive portion 1210 having the recessed portion 1212.

The third elastic insulating portion 2320 has a pair of third horizontal surfaces 2321, 2322 that are spaced apart in the vertical direction VD and extend in the horizontal direction HD. The third horizontal surface 2321 located in the downward direction UD is opposed to the first horizontal surface 1121 of the first sheet 1100. The concave portion 2312 is located on the third horizontal surface 2321, and the concave portion 2312 is concave relative to the third horizontal surface 2321. The third horizontal plane 2322 located in the upward direction LD faces the second horizontal plane 1221 of the second sheet 1100. The protruding portion 2313 is located on the third horizontal surface 2322, and the protruding portion 2313 protrudes relative to the third horizontal surface 2322.

As shown in FIG. 8, in the conductive sheet 2000, the first sheet 1100 and the second sheet are stacked in the vertical direction VD so that the third sheet 2300 is arranged on the first sheet 1100 and the second sheet 1200 is arranged on the third sheet 2300 The sheet 1200 and the third sheet 2300. In the state where the first sheet to the third sheet 1100, 1200, 2300 are stacked, the first elastic conduction is performed by the fitting of the vertical portion VD between the protrusion 1112 of the first sheet 1100 and the concave portion 2322 of the third sheet 2300 The portion 1110 and the third elastic conductive portion 2310 are aligned and contacted along the vertical direction VD, and the third elastic conductive is formed by the fitting of the vertical portion VD between the protruding portion 2313 of the third sheet 2300 and the concave portion 1212 of the second sheet 1200 The portion 2310 is aligned with and contacts the second elastic conductive portion 1210 in the vertical direction VD. Therefore, in the conductive sheet 2000, the first elastic conductive portion 1110, the third elastic conductive portion 2310 corresponding to the first elastic conductive portion, and the second elastic conductive portion 1210 corresponding to the third elastic conductive portion are along the vertical direction The VDs are aligned to form a conductive path extending in the vertical direction.

In one embodiment, the conductive sheet 2000 is the first sheet 1100 joined to the third sheet 2300 and the third sheet 2300 is joined to the second sheet 1200, whereby it can be disposed as a laminated structure between the device under inspection and the inspection apparatus between. In this case, the third horizontal plane 2322 of the third sheet 2300 can be joined to the first horizontal plane 1121 of the first sheet 1100, and the third horizontal plane 2321 of the third sheet 2300 can be joined to the second horizontal plane 1221 of the second sheet 1200. Such bonding can be performed by using the above-mentioned adhesive.

The conductive sheet shown in FIG. 8 includes a third sheet. The conductive sheet of another embodiment may include two or more third sheets having the same configuration. Therefore, a conductive sheet having a thicker thickness as a laminated structure can be realized.

In order to explain the conductive sheet of the third embodiment of the present invention, refer to the examples shown in FIGS. 10 and 11. Fig. 10 shows the conductive sheet of the third embodiment, and Fig. 11 shows the conductive sheet shown in Fig. 10 before lamination.

Referring to FIG. 10, the conductive sheet 3000 of an embodiment includes a first sheet 3100 and a second sheet 3200 laminated in a vertical direction VD, and thus has an increased thickness and an increased amount of pressing. The positions of the first sheet 3100 and the second sheet 3200 shown in FIG. 10 are merely examples, and the first sheet 3100 can be disposed on the second sheet 3200.

The first sheet 3100 has a configuration similar to that of the first sheet 1100 described above. The first sheet 3100 includes a plurality of first elastic conductive portions 1110 in the vertical direction VD, and a first number that separates the plurality of first elastic conductive portions 1110 in the horizontal direction HD and insulates the plurality of first elastic conductive portions 1110 from each other Elastic insulating portion 1120. The second sheet 3200 has a configuration similar to that of the second sheet 1200 described above. The second sheet 3200 includes a plurality of second elastic conductive portions 1210 in the vertical direction VD, and a second portion that separates the plurality of second elastic conductive portions 1210 in the horizontal direction HD and insulates the plurality of second elastic conductive portions 1210 from each other Elastic insulating portion 1220. In the conductive sheet 3000 in which the first sheet 3100 and the second sheet 3200 are stacked in the vertical direction VD, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD and their respective ends are in contact.

In order to fix the positions of the first sheet 3100 and the second sheet 3200 and align the first elastic conductive portion 1110 and the second elastic conductive portion 1210 in the vertical direction VD, the first elastic insulating portion 1120 of the first sheet 3100 and the The second elastic insulating portion 1220 of the second sheet 3200 provides an alignment element similar to the protruding portion and the recessed portion. The alignment element including the protruding portion and the recessed portion can be formed in a manner of being fitted to each other in the vertical direction VD.

Referring to FIG. 11, in one embodiment, the first elastic insulating portion 1120 of the first sheet 3100 has at least one protruding portion 3122 that protrudes in the vertical direction VD relative to the first elastic conductive portion 1110. The protruding portion 3122 may be located in the first elastic insulating portion 1120 in the sheet shown in FIGS. 2a and 2b. The second elastic insulating portion 1220 of the second sheet 3200 has at least one recessed portion 3222, and the recessed portion 3222 is recessed in the vertical direction VD with respect to the second elastic conductive portion 1210. The recessed portion 3222 is formed such that the protruding portion 3122 of the first sheet 3100 is fitted into the recessed portion 3222 in the vertical direction VD. The recessed portion 3222 is formed at a position corresponding to the position of the protruding portion 3122 in the second elastic insulating portion 1220 of the second sheet 3200. In a state where the plurality of first elastic conductive portions 1110 and the plurality of second elastic conductive portions 1210 are contacted and aligned in the vertical direction VD by the fitting of the vertical direction VD between the protruding portion 3122 and the recessed portion 3222, the first One sheet 3100 and the second sheet 3200 are stacked in a vertical direction VD.

Referring to FIG. 11, in an embodiment, the first elastic insulating portion 1120 of the first sheet 3100 has a first horizontal surface 1121 extending in the horizontal direction HD, and the second elastic insulating portion 1220 of the second sheet 3200 has extending in the horizontal direction HD Of the second horizontal plane 1221. The first horizontal plane 1121 and the second horizontal plane 1221 face each other in the vertical direction VD. The protruding portion 3122 protrudes from the first horizontal surface 1121 in the vertical direction VD, and the recessed portion 3222 is recessed from the second horizontal surface 1221 in the vertical direction VD.

The protruding portion 3122 and the recessed portion 3222 are fitted in the vertical direction VD. When the first sheet 3100 and the second sheet 3200 are stacked, the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD due to the fitting between the protruding portion 3122 and the recessed portion 3222, and the first elasticity One end of the conductive portion 1110 (for example, the upper end of the first elastic conductive portion shown in FIG. 11) and one end of the second elastic conductive portion 1210 (for example, the lower end of the second elastic conductive portion shown in FIG. 11) are in the vertical direction VD Contact. As described above, when the first sheet 3100 and the second sheet 3200 are laminated, the protrusions 3122 and the recesses 3222 are structurally aligned in the vertical direction VD of the elastic conductive portion. Therefore, the conductive sheet 3000 has a thicker thickness due to the laminated structure, and does not increase the resistance or decrease the conductivity due to the aligned elastic conductive portions. In addition, the protruding portion 3122 and the recessed portion 3222 fitted in the vertical direction VD fix the positions of the first sheet 3100 and the second sheet 3200 in the horizontal direction HD. Therefore, even if the stacked conductive sheet 3000 is repeatedly pressed for inspection of the device under inspection, the first sheet 3100 and the second sheet 3200 do not move relative to each other. Therefore, the conductive sheet 3000 has a stable laminated structure that can maintain conductivity with high reliability for a long period of time.

When the first sheet 3100 and the second sheet 3200 are stacked, the protruding portion 3122 and the recessed portion 3222 are used to align the plurality of first elastic conductive portions 1110 and the plurality of second elastic conductive portions 1210 in the vertical direction VD The reference point functions. The protruding portion 3122 and the recessed portion 3222 are formed so that the first elastic conductive portion 1110 and the second elastic conductive portion 1210 are aligned in the vertical direction VD and are in contact with the vertical direction VD. As an example, when the overall height of the first sheet 3200 is referred to as T, the height of the protrusion 3122 may be 0.05T to 0.15T.

According to the embodiment, the protruding portion 3122 may have an appropriate height within the range where the protruding portion 3122 is more fitted into the recessed portion 3222 to the height where the protruding portion 3122 is completely fitted into the recessed portion 3222. In an embodiment, the protrusion 3122 may have a height of 90% to 100% of the depth of the recess 3222. As described above, the protrusion 3122 may have a height equal to or less than the depth of the recess 3222. Therefore, when the first sheet 3100 and the second sheet 3200 are laminated, the entire recessed portion 3222 can fit into the recessed portion 3122, the first horizontal surface 1121 and the second horizontal surface 1221 are in full contact, and all the first elastic conductive portions 1110 All the second elastic conductive portions 1210 can be in contact with the vertical direction VD.

In one embodiment, referring to FIGS. 10 and 11, the protruding portion 3122 has an inclined portion 3123 that is inclined with respect to the central axis CA1 of the protruding portion. The inclined portion 3123 extends in a ring shape along the outer peripheral direction of the protruding portion 3122 to form an outer peripheral portion of the protruding portion 3122. The inclination angle of the inclined portion 3123 with respect to the central axis CA1 may be the aforementioned inclination angle IA1. The concave portion 3222 has a shape corresponding to the shape of the protruding portion 3122. Therefore, the depressed portion 3222 has an inclined portion 3223 inclined with respect to the central axis CA2 of the depressed portion. The inclined portion 3223 extends in a ring shape along the outer peripheral direction of the recessed portion 3222 to form an inner peripheral portion of the recessed portion 3222. The inclination angle of the inclined portion 3223 with respect to the central axis CA2 may be the aforementioned inclination angle IA2. When the first sheet 3100 and the second sheet 3200 are stacked, the protruding portion 3122 is fitted into the recessed portion 3222, so the inclined portion 3123 and the inclined portion 3223 are in contact with each other.

In one embodiment, the first sheet 3100 and the second sheet 3200 can be joined to each other. The conductive sheet 3000 having the first sheet 3100 and the second sheet 3200 bonded to each other can be disposed between the device to be inspected and the inspection apparatus as a laminated structure having a relatively thick thickness. Referring to FIG. 11, the bonding of the first sheet 3100 and the second sheet 3200 can be performed on the first horizontal plane 1121 and the second horizontal plane 1221. Therefore, the conductive sheet 3000 may have a bonding layer BL similar to the bonding layer shown in FIG. 7 between the first sheet 3100 and the second sheet 3200. The first horizontal surface 1121 of the first sheet 3100 and the second horizontal surface 1221 of the second sheet 3200 can be joined by using the above-mentioned adhesive. The adhesive may be applied to the first horizontal surface 1121 other than the upper end of the first elastic conductive portion 1110. Alternatively, the adhesive may be applied to the second horizontal surface 1221 except the lower end of the second elastic insulating portion 1220.

12a to 12d show various examples of the protruding portion and the recessed portion in the third embodiment described above.

Referring to FIG. 12a, the first elastic insulating portion 1120 of the first sheet 3100 may have a protruding portion 3122, and the second elastic insulating portion 1220 of the second sheet 3200 may have a position corresponding to the position of the protruding portion 3122 of the first sheet 3100位置的一个槽部3222。 A recessed portion 3222.

Referring to FIG. 12b, the protruding portion 3122 may be located in the center of the sheet shown in FIGS. 2a and 2b, and the recessed portion 3222 may be positioned in a manner corresponding to the position of the protruding portion 3122. Alternatively, the protruding portion of the first elastic insulating portion may be located at each corner of the sheet shown in FIGS. 2a and 2b, and the second elastic insulating portion may have a concave portion at a position corresponding to such protruding portion.

12c and 12d, the first elastic conductive portion 1110 may have a protruding portion 3112 adjacent to the protruding portion 3122, and the second elastic conductive portion 1210 may have a recessed portion 3212 adjacent to the recessed portion 3222. The protruding portion 3112 protrudes with respect to the first horizontal surface 1121, and the recessed portion 3212 is recessed with respect to the second horizontal surface 1221. The protruding portion 3112 and the recessed portion 3212 can be configured similarly to the protruding portion and the recessed portion of the first embodiment described above, respectively. The protruding portion 3112 can be formed so as to fit into the recessed portion 3212 in the vertical direction VD. Referring to FIG. 12c, the protruding portion 3122 of the first elastic insulating portion 1120 may extend to the protruding portion 3112, and the protruding portion 3122 may be adjacent to the protruding portion 3122. In addition, the recessed portion 3222 of the second elastic insulating portion 1220 may extend to the recessed portion 3212, and the recessed portion 3212 may be adjacent to the recessed portion 3222. Referring to FIG. 12d, the protruding portion 3122 of the first elastic insulating portion 1120 may be formed in a linear shape along the plurality of protruding portions 3112 located in a row. In addition, the recessed portion 3222 of the second elastic insulating portion 1220 may be linearly formed along the plurality of recessed portions 3212 located in a row.

13a to 13g show various shapes of the protrusion provided by the elastic conductive portion. When the cross-section of the protrusion 3122 is taken in the horizontal direction, the horizontal cross-sectional shape of the protrusion 3122 may be any of a circle, an ellipse, an oval, and a quadrangle. As shown in FIGS. 13a and 13b, the horizontal cross-sectional shape of the protrusion 3122 may be circular. As shown in FIG. 13c, the horizontal cross-sectional shape of the protrusion 3122 may be elliptical. As shown in FIG. 13d, the horizontal cross-sectional shape of the protrusion 3122 may have an oblong shape. The above-mentioned oblong shape refers to a shape slightly longer than an ellipse and having a pair of straight lines parallel to each other and a pair of arc-shaped curves facing each other. As shown in FIGS. 13e to 13g, the horizontal cross-sectional shape of the protrusion 3122 may be rectangular or square. The concave portion 3222 has a cross-sectional shape complementary to the cross-sectional shape of the above-mentioned protruding portion 3122, so that the protruding portion 3122 and the concave portion 3222 can be fitted in the vertical direction VD. In the case of the elongated protrusions and the depressions corresponding to this shape shown in FIGS. 13c to 13g, the alignment between the elastic conductive portions can also be achieved by one protrusion and one depression.

14 and 15 show a conductive sheet according to a fourth embodiment of the present invention. 14 is a cross-sectional view of a conductive sheet according to a fourth embodiment of the present invention, and FIG. 15 is a cross-sectional view of the conductive sheet shown in FIG. 14 before lamination.

14 and 15, the conductive sheet 4000 includes a first sheet 3100 providing protrusions 3122, and a third sheet 4300 in which recesses 3222 are arranged between the second sheets 3200. The third sheet 4300 and the conductive sheet 4000 can have a thicker thickness and can have a larger amount of pressing in the vertical direction.

The third sheet 4300 has a configuration similar to that of the third sheet 2300 except that the third elastic conductive portion of the third sheet 4300 provides an alignment element for aligning the elastic conductive portion in the vertical direction VD. The third sheet 4300 includes a plurality of third elastic conductive portions 2310 oriented in the vertical direction VD, and a third elastic insulating portion 2320 that isolates and insulates the plurality of third elastic conductive portions 2310 from each other in the horizontal direction HD. The third elastic conductive portion 2310 of the third sheet 4300 includes a plurality of conductive particles 2311 shown in FIG. 9.

Referring to FIG. 15, the third elastic insulating portion 2320 of the third sheet 4300 has at least one recessed portion 4323 at one of the one end and the other end facing in the vertical direction VD, and at least one at the other one of the one end and the other end The protrusion 4324. The concave portion 4323 may be located below the third elastic insulating portion 2320. The concave portion 4323 can be configured in the same manner as the concave portion 3222 of the second sheet 3200. When the first sheet 3100 and the third sheet 4300 are stacked, the protruding portion 3122 of the first sheet 3100 is fitted into the concave portion 4323. The protruding portion 4324 may be located above the third elastic insulating portion 2320. The protruding portion 4324 can be configured the same as the protruding portion 3122 of the first sheet 3100. When the third sheet 2300 and the second sheet 1200 are stacked, the protruding portion 4324 is fitted into the concave portion 3222 of the second sheet 3200.

The third elastic insulating portion 2320 has a pair of third horizontal surfaces 2321, 2322 spaced apart in the vertical direction VD. The third horizontal plane 2321 of the downward direction LD is opposed to the first horizontal plane 1121 of the first sheet 3100. The concave portion 4323 is located on the third horizontal surface 2321, and the concave portion 4323 is concave from the third horizontal surface 2321. The third horizontal surface 2322 of the upward direction UD is opposed to the second horizontal surface 1221 of the second sheet 3200. The protruding portion 4324 is located on the third horizontal surface 2322, and the protruding portion 4324 protrudes from the third horizontal surface 2322.

As shown in FIG. 14, the first sheet 3100, the second sheet 3200, and the third sheet are stacked in the vertical direction VD so that the third sheet 4300 is arranged on the first sheet 3100 and the second sheet 3200 is arranged on the third sheet 4300. 4300. In the state where the first sheet to the third sheet 3100, 3200, 4300 are stacked, the first elastic conduction is performed by fitting the vertical portion VD between the protruding portion 3122 of the first sheet 3100 and the concave portion 4323 of the third sheet 4300 The portion 1110 and the third elastic conductive portion 2310 are aligned and contacted along the vertical direction VD, and the third elastic conductive is formed by fitting the vertical portion VD between the protrusion 4324 of the third sheet 4300 and the recessed portion 3222 of the second sheet 3200 The portion 2310 is aligned with and contacts the second elastic conductive portion 1210 in the vertical direction VD.

In one embodiment, the first sheet 3100 is joined to the third sheet 4300, and the third sheet 4300 is joined to the second sheet 3200, whereby the conductive sheet 4000 can be disposed between the device under inspection and the inspection device as a laminated structure . In this case, the third horizontal plane 2321 of the third sheet 4300 can be joined to the first horizontal plane 1121 of the first sheet 3100, and the third horizontal plane 2322 of the third sheet 4300 can be joined to the second horizontal plane 1221 of the second sheet 3200. Such bonding can be performed by using the above-mentioned adhesive.

The conductive sheet shown in FIG. 14 includes a third sheet 4300. The conductive sheet of another embodiment may include two or more third sheets 4300 having the same composition. Thereby, a conductive sheet having a thicker thickness as a laminated structure can be realized.

In the above, the technical idea of the present invention has been described through a part of the embodiments and the examples shown in the accompanying drawings, but it should be understood that the present invention can be understood without departing from the common understanding of those skilled in the technical field to which the present invention belongs Various replacements, changes and changes are made within the scope of technical ideas and scope. In addition, such replacements, changes, and alterations shall be deemed to fall within the scope of the accompanying patent application for invention.

10: Check the device 11: conductive pad 20: Device under inspection 21: Terminal 30: socket 1000: conductive sheet 1100: 1st slice 1110: The first elastic conductive part 1111: Conductive particles 1112: protrusion 1113: Inclined part 1120: The first elastic insulation part 1121: 1st level 1122: protrusion 1200: 2nd slice 1210: The second elastic conductive part 1211: conductive particles 1212: Depression 1213: Inclined part 1220: Second elastic insulation part 1221: 2nd level 1222: Depression 2000: conductive sheet 2300: 3rd slice 2310: The third elastic conductive part 2321: 3rd level 2312: Depression 2322: Level 3 2313: protrusion 2320: The third elastic insulation part 2321: 3rd level 2322: Level 3 3000: conductive sheet 3100: 1st slice 3112: protrusion 3122: protrusion 3123: Inclined part 3200: 2nd slice 3212: Depression 3222: Depression 3223: Inclined part 4000: conductive sheet 4300: 3rd slice 4323: Depression 4324: protrusion BL: junction layer CA1: Central axis CA2: Central axis D1: 1st horizontal interval D2: 2nd horizontal interval D3: 3rd horizontal interval D4: 4th horizontal interval D5: 5th horizontal interval HD: horizontal HD1: horizontal HD2: horizontal IA1: Tilt angle IA2: Tilt angle LD: downward direction UD: Upward direction VD: vertical direction

FIG. 1 is a schematic cross-sectional view of a conductive sheet according to a first embodiment of the present invention.

2a is a schematic example showing the planar arrangement of the elastic conductive portions and the elastic insulating portions in the conductive sheet of the embodiment.

2b is a schematic example showing the planar arrangement of the elastic conductive portions and the elastic insulating portions in the conductive sheet of the embodiment.

FIG. 3 is a cross-sectional view of the conductive sheet shown in FIG. 1 before lamination.

4 is a cross-sectional perspective view of the first sheet shown in FIG. 3.

FIG. 5 is a cross-sectional perspective view of the second sheet shown in FIG. 3.

Fig. 6a shows an example of the protruding portion and the recessed portion in the first embodiment.

Fig. 6b shows an example of the protruding portion and the recessed portion in the first embodiment.

Fig. 6c shows an example of the protruding portion and the recessed portion in the first embodiment.

Fig. 6d shows an example of the protruding portion and the recessed portion in the first embodiment.

Fig. 6e shows an example of the protruding portion and the recessed portion in the first embodiment.

FIG. 6f shows an example of the protruding portion and the recessed portion in the first embodiment.

Fig. 6g shows an example of the protruding portion and the recessed portion in the first embodiment.

7 is a cross-sectional view showing an example of the bonding between the first sheet and the second sheet.

8 is a cross-sectional view showing a conductive sheet of a second embodiment of the present invention.

9 is a cross-sectional view of the conductive sheet shown in FIG. 8 before lamination.

10 is a cross-sectional view showing a conductive sheet of the third embodiment.

FIG. 11 is a cross-sectional view of the conductive sheet shown in FIG. 10 before lamination.

Fig. 12a shows an example of the protruding portion and the recessed portion in the third embodiment.

Fig. 12b shows an example of the protruding portion and the recessed portion in the third embodiment.

Fig. 12c shows an example of the protruding portion and the recessed portion in the third embodiment.

Fig. 12d shows an example of the protruding portion and the recessed portion in the third embodiment.

FIG. 13a shows an example of the shape of the protrusion provided on the elastic conductive portion.

Fig. 13b shows an example of the shape of the protruding portion provided by the elastic conductive portion.

Fig. 13c shows an example of the shape of the protrusion provided by the elastic conductive portion.

Fig. 13d shows an example of the shape of the protrusion provided by the elastic conductive portion.

Fig. 13e shows an example of the shape of the protruding portion provided by the elastic conductive portion.

Fig. 13f shows an example of the shape of the protrusion provided by the elastic conductive portion.

Fig. 13g shows an example of the shape of the protruding portion provided by the elastic conductive portion.

14 is a cross-sectional view showing a conductive sheet of a fourth embodiment of the present invention.

15 is a cross-sectional view of the conductive sheet shown in FIG. 14 before being laminated.

10: Check the device

11: conductive pad

20: Device under inspection

21: Terminal

30: socket

1000: conductive sheet

1100: 1st slice

1110: The first elastic conductive part

1112: protrusion

1120: The first elastic insulation part

1200: 2nd slice

1210: The second elastic conductive part

1212: Depression

1220: Second elastic insulation part

HD: horizontal

HD1: horizontal

HD2: horizontal

LD: downward direction

UD: Upward direction

VD: vertical direction

Claims (21)

A conductive sheet, which is arranged between the inspection device and the device to be inspected, and includes: The first sheet includes a plurality of first elastic conductive portions in the vertical direction, and a first elastic insulating portion that partitions and insulates the plurality of first elastic conductive portions in the horizontal direction, and at least one of the first elastic conductive portions Having a protruding portion that protrudes in the vertical direction relative to the first elastic insulating portion; and The second sheet includes a plurality of second elastic conductive portions in the vertical direction, and a second elastic insulating portion that separates and insulates the plurality of second elastic conductive portions in the horizontal direction, and at least one of the second elastic The conductive portion has a recessed portion that is recessed in the vertical direction relative to the second elastic insulating portion, so that the protruding portion fits in the at least one second elastic conductive portion in the vertical direction; and The first sheet and the second sheet are stacked in the vertical direction. The conductive sheet according to claim 1, wherein the first elastic insulating portion has a first horizontal plane extending in the horizontal direction, and the second elastic insulating portion has a second extending in the horizontal direction and facing the first horizontal surface level, The protruding portion protrudes relative to the first horizontal plane, and the recessed portion protrudes relative to the second horizontal plane. The first horizontal plane and the second horizontal plane are joined to each other. The conductive sheet according to claim 2 further includes a third sheet, the third sheet includes a plurality of third elastic conductive portions in the vertical direction, and the plurality of third elastic conductive portions are spaced apart in the horizontal direction and An insulating third elastic insulating portion is disposed between the first sheet and the second sheet, At least one of the third elastic conductive portions has a recessed portion that fits the protruding portion of the first sheet at one of the one end and the other end facing in the vertical direction, and the other one of the one end and the other end It has a protruding portion that fits into the concave portion of the second sheet. The conductive sheet according to claim 3, wherein the third elastic insulating portion has a pair of third horizontal planes spaced apart in the vertical direction, The concave portion of the at least one third elastic conductive portion is located in one of the pair of third horizontal planes, and the protruding portion of the at least one third elastic conductive portion is located in the other of the pair of third horizontal planes, The first horizontal plane is joined to one of the pair of third horizontal planes, and the second horizontal plane is joined to the other of the pair of third horizontal planes. The conductive sheet according to claim 1, wherein the protruding portion has an inclined portion inclined with respect to the central axis of the protruding portion, The recessed portion has an inclined portion that is inclined with respect to the central axis of the recessed portion and is in contact with the inclined portion of the protruding portion. The conductive sheet according to claim 1, wherein the plurality of first elastic conductive portions have the protruding portion, and the plurality of second elastic conductive portions have the recessed portion. The conductive sheet according to claim 6, wherein the concave portion has a depth of 10% to 100% of the height of the protruding portion. The conductive sheet according to claim 1, wherein the first elastic insulating portion has a protruding portion adjacent to the protruding portion of the at least one first elastic conductive portion, The second elastic insulating portion has a recessed portion adjacent to the recessed portion of the at least one second elastic conductive portion and fitted into the protruding portion of the first elastic insulating portion. The conductive sheet according to claim 1, wherein the first elastic conductive portion and the second elastic conductive portion include a plurality of conductive particles arranged in the vertical direction. The conductive sheet according to claim 1, wherein the first elastic insulating portion and the second elastic insulating portion include a silicone rubber material. The conductive sheet according to claim 2, wherein the first horizontal plane and the second horizontal plane are joined by an adhesive. A conductive sheet, which is arranged between the inspection device and the device to be inspected, and includes: The first sheet includes a plurality of first elastic conductive portions in the vertical direction, and a first elastic insulating portion that partitions and insulates the plurality of first elastic conductive portions in the horizontal direction, and the first elastic insulating portion has a relative At least one protruding portion protruding from the plurality of first elastic conductive portions in the vertical direction; and The second sheet includes a plurality of second elastic conductive portions in the vertical direction, and a second elastic insulating portion that separates and insulates the plurality of second elastic conductive portions in the horizontal direction, and the second elastic insulating portion Having at least one recessed portion that is recessed in the vertical direction with respect to the plurality of second elastic conductive portions and in which the protruding portion is fitted in the vertical direction, and The first sheet and the second sheet are stacked in the vertical direction. The conductive sheet according to claim 12, wherein the first elastic insulating portion has a first horizontal plane extending in the horizontal direction, and the second elastic insulating portion has a second extending in the horizontal direction and facing the first horizontal surface level, The protruding portion protrudes from the first horizontal surface, and the recessed portion protrudes from the second horizontal surface, The first horizontal plane and the second horizontal plane are joined to each other. The conductive sheet according to claim 13 further includes a third sheet, the third sheet includes a plurality of third elastic conductive portions in the vertical direction, and the plurality of third elastic conductive portions are spaced apart in the horizontal direction and An insulating third elastic insulating portion is disposed between the first sheet and the second sheet, The third elastic insulating portion has at least one recessed portion that fits the protruding portion of the first sheet at one of the one end and the other end facing in the vertical direction, and the other one of the one end and the other end It has at least one protrusion that fits into the recess of the second sheet. The conductive sheet according to claim 14, wherein the third elastic insulating portion has a pair of third horizontal planes spaced apart in the vertical direction, The concave portion of the third elastic insulating portion is located in one of the pair of third horizontal planes, and the protruding portion of the third elastic insulating portion is located in the other of the pair of third horizontal planes, The first horizontal plane is joined to one of the pair of third horizontal planes, and the second horizontal plane is joined to the other of the pair of third horizontal planes. The conductive sheet according to claim 12, wherein the cross-sectional shape of the protrusion in the horizontal direction may be any one of a circle, an ellipse, an oval, and a quadrangle, and the recessed portion has a cross-section with the protrusion Cross-sectional shapes with complementary shapes. The conductive sheet according to claim 12, wherein the protruding portion has a height of 90% to 100% of the depth of the recessed portion. The conductive sheet according to claim 12, wherein at least one of the first elastic conductive portions has a protruding portion adjacent to the protruding portion of the first elastic insulating portion, At least one of the second elastic conductive portions has a recessed portion adjacent to the recessed portion of the second elastic insulating portion and fitted into the protruding portion of the at least one first elastic conductive portion. The conductive sheet according to claim 12, wherein the first elastic conductive portion and the second elastic conductive portion include a plurality of conductive particles arranged in the vertical direction. The conductive sheet according to claim 12, wherein the first elastic insulating portion and the second elastic insulating portion include a silicone rubber material. The conductive sheet according to claim 13, wherein the first horizontal plane and the second horizontal plane are joined by an adhesive.

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