JPH11304835A - Fixture for contact probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixture for a contact probe, capable of restricting a contact flaw at the time of probing to the smallest possible. SOLUTION: This fixture for a contact probe 10 to be installed on a probe guide mechanism at one end and fix a probe main body 2 for bringing the probe main body 2 fixed to obtain bringing in contact with an objective body P for probing, in accordance with guide by the probe guide mechanism is provided with a link mechanism to allow linear or approximately linear motion of the probe main body 2 in a reverse direction to an energization direction by elastic deformation of elastic deformation parts 8a-8d, when the probe main body 2 is energized by the provide guide mechanism to the objective body P for probing as the probe main body 2 is in a contact condition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fixture for a contact probe for performing an electrical test by bringing a probe main body into contact with an object to be probed.

[0002]

2. Description of the Related Art A probe 31 shown in FIG. 13 has conventionally been known as a contact probe (hereinafter, also referred to as a "probe") provided with a contact probe fixture of this type. The probe 31 includes a probe main body 32 whose tip 32a is brought into contact with the probing object P, and a fixing arm 33 for fixing the probe main body 32. At one end of the fixing arm 33, fixing holes 34a and 34b for fixing to a probe guide mechanism (not shown) are formed, and at the other end, a probe for fixing the probe main body 32 is provided. A fixing portion 35 is formed. In this case, the probe main body 32 and the probe fixing arm 33 are each formed of a conductive material, and are integrated by press-fitting the probe main body 32 into the probe fixing portion 35, and the tip 3
2a and the probe fixing arm 33 are electrically connected to each other.

[0005] When probing is performed on the probing object P using the probe 31, first, FIG.
As shown in (a), the tip 32a of the probe 31 is positioned above the probing object P by the probe guide mechanism. Next, the probe fixing arm 33 is moved downward in the direction of arrow A in FIG. 14A in accordance with the guidance of the probe guiding mechanism, and the tip 32a is brought into contact with the probing object P as shown in FIG. 14B. Let it. Next, when the probe fixing arm 33 is further moved downward in the direction of arrow A,
As shown in FIG.
Is elastically deformed in the direction of arrow B, and the elastic force urges the tip 32a toward the probing object P in the direction of arrow A shown in FIG. This completes the electrical connection between the tip 32a and the probing object P. Thereafter, the probe guide mechanism applies a measurement voltage output via the probe fixing arm 33 and the distal end 32a of the probe main body 32 to the probing target P, thereby executing a predetermined electrical test.

[0004]

However, the conventional probe 31 has the following problems. First, in the conventional probe 31, the probe fixing arm 33 is moved downward by the probe guide mechanism, so that FIG.
As shown in FIG. 5, first, the tip 32a contacts the surface X of the probing object P. Next, by further moving the probe downward, the probe fixing arm 33 is elastically deformed as shown by the dashed line, and the tip 32a is urged toward the surface X of the probing target object P shown by the dashed line.
In the figure, in order to facilitate understanding of the operation principle,
With respect to the probe 31 and the probing target object P indicated by the dashed line, the fixing holes 3
4a and 34b are shown at relative positions with respect to the reference. In this case, the tip 32a is fixed to the fixing holes 34a, 34b.
With reference to the position of, as shown by an arrow C, it moves along an arc-shaped trajectory centered on the vicinity of the fixing hole 34b. As a result, as shown in FIG. 16, the tip 32a moves from the position where it was first contacted to the surface X of the probing target object P.
By the distance S in the direction of arrow D. Therefore, the probe 31 has a problem that a large contact mark is left when the tip 32a moves on the surface X of the probing object P.

Second, since the conventional probe 31 has a small allowable deformation when urged toward the surface of the probing object P, the amount of urge must be monitored in order to prevent damage. Must. For this reason, the conventional probe 31
However, there is a problem that the provision of a monitoring device or the like inevitably increases the size of the device, and that the cost of the device is rising.

[0006] The present invention has been made in view of the above problems, and has as its main object to provide a contact probe fixture capable of minimizing a contact mark at the time of probing. Another object of the present invention is to provide a contact probe fixture having a large allowable deformation during probing.

[0007]

According to a first aspect of the present invention, there is provided a fixture for a contact probe, wherein one end is attached to a probe guide mechanism and the probe body is fixed. The probe body is in contact with the probing object according to the guidance by the probe guiding mechanism. When the probe body is in contact with the probing object and is further urged toward the probing object by the probe guiding mechanism, the elastic deformation of the elastic deformation portion And a link mechanism that allows linear or approximate linear movement of the probe body in a direction opposite to the biasing direction.

According to a second aspect of the present invention, there is provided a contact probe fixing device according to the first aspect, wherein the link mechanism includes a probe fixing portion for fixing the probe main body and a probe fixing portion for attaching to the probe guiding mechanism. An attachment portion, and at least two connection arms, wherein the probe fixing portion and the attachment portion are connected via elastic deformation portions formed at both ends of the at least one connection arm;
Further, the probe fixing portion and the mounting portion are connected via elastically deforming portions formed at both ends of at least one other connecting arm.

In the contact probe fixing tool according to the first and second aspects, when the tip of the probe body is brought into contact with the probing target body by the probe guide mechanism and further urged in the guide direction, the link mechanism is activated. The linear deformation or the approximate linear movement of the probe body in the direction opposite to the urging direction is allowed by the elastic deformation of the elastic deformation portion. Therefore, the tip of the probe main body substantially moves on a straight line in the same direction as the guide direction of the probe guide mechanism, with reference to one end attached to the probe guide mechanism. You. For this reason, the length of the contact mark from the position where the tip of the probe body is first brought into contact with the probing target body to the position of the tip when the probe body is further urged is minimized.

According to a third aspect of the present invention, there is provided the contact probe fixture according to the first or second aspect, wherein the elastically deforming portion is formed by cutting out a part of a connecting portion of the connecting arm in an arc shape. It is characterized in that it is a formed arc notch fulcrum.

As the elastically deformable portion, a structure in which a fulcrum using a hinge fitting and a helical spring is disposed at both ends of the connecting arm may be employed. However, the complexity of the structure leads to an increase in cost. On the other hand, in the contact probe fixing device, since the elastic deformation portion is configured by the arc-shaped notch fulcrum, it can be configured without using any other components, and thus it is possible to suppress an increase in cost. In addition, by appropriately changing the notch degree, it is possible to adjust the amount of elastic deformation of the link mechanism and the elastic force of the elastic deformation portion to arbitrary sizes.

According to a fourth aspect of the present invention, there is provided the contact probe fixing tool according to the second or third aspect, wherein the probe fixing portion is formed with a fitting groove for fitting the probe body. It is characterized by.

In this fixture for a contact probe, for example, it is formed entirely of resin, and a groove for fitting is formed in the probe fixing portion during resin molding. Next, a contact probe is formed by fitting a separately formed metal probe body into the fitting groove. In this case, since the probe main body can be attached to the probe fixing portion with one touch, the manufacturing cost can be reduced.

According to a fifth aspect of the present invention, there is provided a contact probe fixing device according to the second or third aspect, wherein the probe main body and the probe fixing portion are integrally formed.

In this fixture for contact probes, for example, when the fixture is formed entirely of metal including the probe main body, or when the fixture is manufactured, the metal probe main body and the resin probe fixing portion are integrated by insert molding. It is formed. In this case, the manufacturing process of fixing the probe main body to the probe fixing portion can be omitted, so that the manufacturing cost can be reduced.

According to a sixth aspect of the present invention, there is provided a contact probe fixture according to any one of the first to fifth aspects, wherein the link mechanism is a double lever mechanism, and is biased by a probe guide mechanism. A biasing member is provided for biasing a part of the link mechanism in a normal state so as to rotate in a direction opposite to the rotation direction of the lever movement at the time.

The contact probe fixture is configured such that the tip of the probe main body moves on a straight line in the same direction as the guide direction of the probe guide mechanism. May be slightly displaced from the straight line or approach the limit value of the elastic deformation in the link mechanism. In this fixture for contact probes, the link mechanism is biased in advance by the biasing member such that the link mechanism is rotated in a direction opposite to the rotational direction of the lever motion at the time of biasing by the probe guide mechanism. Therefore, when the link mechanism is urged by the probe guide mechanism, the link mechanism is rotated in the original rotation direction of the lever motion against the urging force of the urging member, so that the link mechanism passes through a state in which the link mechanism is not urged. , Further rotated in the original rotation direction. Therefore, the lever movement of the link mechanism can be doubled without increasing the displacement of the probe body.

According to a seventh aspect of the present invention, there is provided the contact probe fixture according to the sixth aspect, further comprising an urging amount regulating means for regulating the amount of urging by the urging member to a predetermined amount. It is characterized by.

If the amount of urging by the urging member in the normal state is not uniform, the size of the contact mark due to the tip of the probe body may be non-uniform. In this fixture for contact probes, under normal conditions, the biasing amount regulating means regulates the biasing amount by the biasing member to a predetermined amount. Therefore, it is possible to minimize and uniform the contact mark at the tip of the probe main body.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a contact probe fixing device according to the present invention will be described below with reference to the accompanying drawings.

First, the structure of a probe 1 having a fixture 10 as a contact probe fixture according to the present invention will be described with reference to FIGS.

The probe 1 includes a probe body 2 and a fixture 10 as shown in FIG. Fixture 10
Is manufactured by resin molding, and a probe fixing portion 3 for fixing the probe main body 2 and a probe guide mechanism PM
(See FIG. 3) L-shaped mounting portion 5 for mounting to
The connecting arms 6 and 7 for connecting the probe fixing portion 3 and the mounting portion 5 to each other are integrally formed.

In this case, a fitting groove 3a corresponding to the fitting groove in the present invention is provided on the left side surface of the probe fixing portion 3.
2A and 2B, the probe main body 2 and the probe fixing portion 3 are integrated by fitting the probe main body 2 into the fitting groove 3a. On the other hand, fixing holes 4a and 4b for fixing the probe 1 to the probe guide mechanism PM are formed in the mounting portion 5, as shown in FIGS. Further, the connecting arm 6 is formed in a rectangular rod shape shorter than the connecting arm 7, and a connecting portion between the mounting portion 5 and the probe fixing portion 3 corresponds to an arc-shaped notch fulcrum in the present invention. A fulcrum 8 formed by notching a part in an arc shape
a, 8b. On the other hand, the connecting arm 7 is formed in a long rectangular bar shape, and has the mounting portion 5 and the probe fixing portion 3.
And the fulcrum 8c, 8d corresponding to the arc-shaped notch fulcrum in the present invention and partially cut out in an arc shape. These probe fixing parts 3,
The mounting portion 5, the connecting arms 6, 7 and the fulcrums 8a to 8d form a four-bar rotating mechanism which is the link mechanism RM in the present invention.

Next, the operation of the probe 1 during probing will be described with reference to FIGS.

First, the tip 2a of the probe main body 2 is positioned above the probing object P by the probe guide mechanism PM. Next, the probe guide mechanism PM moves the mounting portion 5 downward. As a result, the probe main body 2 moves downward, and its tip 2a is brought into contact with the probing target P as shown in FIGS. 2 (a) and 2 (b). Next, when the probe guide mechanism PM further lowers the mounting portion 5 in the direction of arrow A in FIG. 3, the fulcrums 8a to 8d are elastically deformed as shown in FIG. At this time, based on the position of the mounting portion 5, the connecting arms 6, 7 are relatively rotated in the directions of arrows E, F about the fulcrums 8a, 8c, respectively. At the same time, a return force for returning the fulcrums 8a to 8d to the original state acts on the distal end 2a of the probe main body 2.

In this case, in the link mechanism RM, the length of the connecting arms 6 and 7, the length from the fulcrum 8a to the fulcrum 8c,
The length from the fulcrum 8b to the fulcrum 8d, the length from the fulcrum 8b to the tip 2a of the probe main body 2, and the length from the fulcrum 8d to the tip 2a are formed at predetermined ratios that can move the tip 2a directly. ing. Therefore, the probe body 2
When the position of the mounting portion 5 is used as a reference, the tip 2a is equivalently, as shown in FIG. 4, from a point Q1 on a straight line Q in the same direction as the direction of the arrow A guided by the probe guide mechanism PM. It is linearly or approximately linearly moved to the point Q2. Here, the point Q1 is an attachment portion between the time when the tip 2a of the probe main body 2 is not in contact with the probing object P and the time immediately after the contact (that is, when the probe fixing portion 3 of the link mechanism RM is not rotating by leverage). Tip 2a for 5
The point Q2 indicates the mounting position when the tip 2a of the probe main body 2 is urged toward the probing object P side (that is, when the probe fixing portion 3 is rotated by the lever movement). The relative position of the tip 2a with respect to the part 5 is shown. Therefore, the tip 2 of the probe body 2
When the restoring force of the fulcrums 8a to 8d is acting on a, the restoring force acts on the tip 2a to move the tip 2a from the position of the point Q2 to the position of the point Q1. For this reason,
The distal end 2a of the probe body 2 is urged in the direction of arrow A, which is the guide direction, so that the probe body 2 is reliably brought into point contact without moving on the probing object P.

As described above, in this probe 1, the tip 2
Since a is almost linearly moved in the vertical direction, the contact mark where the tip 2a moves on the surface of the probing object P is extremely small between the time when the tip 2a contacts the probing object P and the time when it is further urged. can do. Specifically, the total length of the probe 1 and the conventional probe 31 is 2
Numerical values will be described for an example in which the diameter of both contact marks is 10 μm when the distance is 0 mm and there is no displacement when the probe is brought into contact with the probing object P.
In this case, when the probe guide mechanism PM further urges the mounting portion 5 with a stroke amount of 0.15 mm after the tip 2a of the probe main body 2 is brought into contact with the probing object P, as shown in FIG. In the conventional probe 31, the displacement amount is 60 μm. On the other hand, in the probe 1, the length of the displacement is less than 0.1 μm. Therefore, the contact mark of the conventional probe 31 has a length of 70 μm, while the contact mark of the probe 1 has a length of about 10.1 μm. For this reason, probing can be performed without impairing the aesthetic appearance and function of the probing object P.

Thereafter, for example, when inspecting the disconnection of the circuit pattern on the circuit board, a voltage or a current is supplied to the probing object P via the tip 2a of one probe main body 2 and the other probe main body is supplied. By inputting a voltage or current through the tip 2a of the second circuit 2, a disconnection of the circuit pattern can be inspected.

Next, another embodiment of the contact probe fixture according to the present invention will be described.

First, the structure of the probe 11 having the fixture for contact probes according to the present invention will be described with reference to FIG.
This will be described with reference to FIGS. Note that the same components as those of the probe 1 are denoted by the same reference numerals, and redundant description will be omitted.

As shown in FIG. 6, in addition to the structure of the probe 1, the probe 11 has an auxiliary tool 1 integrally formed of resin.
7 is provided. As shown in FIGS. 7 and 8, the auxiliary tool 17 has an L-shaped side surface and includes a base 12 for attaching to the probe guide mechanism PM. The assisting tool 17 includes a leaf spring 14 that constitutes an urging member according to the present invention. The leaf spring 14 is connected at one end to a fixed portion 13 that is a narrow portion of the base portion 12. The other end is formed so as to be vertically movable in FIG. Further, the assisting tool 17 includes a stopper 15 which is equivalent to the urging amount regulating means in the present invention and is provided upright on the base portion 12. The fixing portion 13 has a fixing hole (not shown) for fixing the auxiliary tool 17 to the fixing tool 10, and the probe guide mechanism P
The fixing holes 16a and 16b for fixing to M are formed.

Next, the procedure for assembling the probe 11 will be described. First, as shown in FIG. 6, the connecting arm 6 of the fixing tool 10 is integrated with the stopper 15 of the auxiliary tool 17 and the leaf spring 14 so as to be sandwiched therebetween. Then, in that state,
By fastening nuts 19, 19 to bolts 18, 18, which penetrate the fixing holes 4a, 4b of the mounting part 5 of the fixing tool 10 and the fixing holes formed in the fixing part 13 of the auxiliary tool 17, as shown in FIG. As shown in a) to (c), the fixture 10 and the auxiliary tool 17 are fixed to each other. In this state, the movable end 14a of the leaf spring 14 moves the probe fixing portion 3 downward (in the guide direction by the probe guide mechanism PM).
, The link mechanism RM is maintained in a rotational state opposite to the rotational direction of the lever movement at the time of the urging by the probe guide mechanism PM. In this case, the stopper 1
5 regulates the amount of urging of the link mechanism RM by the leaf spring 14 to a fixed amount.

Next, the operation principle of the probe 11 will be described.

In this probe 11, as shown in FIG. 4, the tip 2a of the probe body 2 is normally displaced by a leaf spring 14 to the position of a point Q3 on the straight line Q in advance. Therefore, when guided by the probe guide mechanism PM, the tip 2a of the probe body 2
First, assuming that the position of the mounting portion 5 is a reference, the probe contacts the probing object P at the position of the point Q3. Then, fulcrum 8
a to 8d are elastically deformed, so that the probe fixing portion 3
The tip 2a is displaced to the position of the point Q1, and then displaced from the position of the point Q1 to or near the position of the point Q2. In this case, since the tip 2a is relatively moved on the straight line Q, the probe 1 that moves from the point Q1 to the point Q2 is moved.
Even if the stroke amount after the contact by the probe guide mechanism PM is doubled, the length of the contact mark can be suppressed to the same length as the contact mark on the probe 1.

A more specific description will be given with reference to FIG. The figure shows the amount of displacement of the tip 2a of the probe body 2 with respect to the amount of stroke of the mounting portion 5 by the probe guide mechanism PM in a slightly exaggerated manner. As shown in this figure,
In the probes 1 and 11 provided with the link mechanism RM, the displacement amount increases as the stroke amount (the amount of bias to the link mechanism RM) increases in any of the vertical directions. The shift amount is generally line-symmetric. For this reason, for example, as shown in the figure, assuming that the distal end 2a of the probe main body 2 is moved by a stroke amount of N mm, the distal end 2a of the probe main body 2 is not pivoted by the link mechanism RM. When the link mechanism RM is pivotally rotated from the position H and moves N mm to the position I, the amount of displacement is L μm. On the other hand, from the position J where the tip 2a of the probe body 2 is urged by the end 14a of the leaf spring 14,
When the link mechanism RM is moved N mm to the position K by leverage rotation, the displacement amount is M μm. As is clear from this figure, when the stroke amount is the same, the distal end 2a of the probe main body 2 is pre-biased by the leaf spring 14 so that
The displacement amount of “a” can be reduced. Therefore, in the probe 11, when the stroke amount is the same, the displacement amount can be further reduced as compared with the probe 1 described above, and when the displacement amount is the same, the link mechanism RM The lever rotation amount (allowable deformation amount) can be increased.

The present invention is not limited to the configuration shown in the above embodiment of the present invention. For example, in the embodiment of the present invention, the probe main body 2 is fitted into the probe fixing portion 3 to integrate the two, but a press-fitting hole for press-fitting the probe main body 2 is formed in the probe fixing portion. The two can be integrated by press-fitting the probe main body 2, or when the fixture 10 is manufactured,
Can be integrated by insert molding. In this case, the fixing tool 10 and the probe main body 2 can be electrically connected by applying a conductive paint to the entire resin fixing tool 10. Further, the fixture 10 and the probe main body 2 can be integrally formed electrically and mechanically from the beginning by using a conductive material such as a metal.

Further, in the embodiment of the present invention, an example in which the probe fixing portion 3 and the mounting portion 5 are connected by the two connecting arms 6 and 7 as the link mechanism RM has been described. Not limited. For example, like the probe 21 shown in FIG. 10, the probe fixing part 3 and the mounting part 5 are connected by three connecting arms 22a to 22c, and the connecting part is a fulcrum 23a which is a circular notch fulcrum.
To 23f may be formed. Further, as in a probe 24 shown in FIG. 11, the connection arm 25a and the connection arm 2
The probe fixing part 3 and the mounting part 5 are connected so that the angle between the probe fixing part 3 and the mounting part 5 is a right angle.
a to 26d may be formed. Further, as in a probe 27 shown in FIG.
The spaces may be connected using six connecting arms 28a to 28f, and fulcrums 29a to 29j may be formed at the respective connecting portions. In FIGS. 10 to 12, components having the same functions as the components of the probe 1 are denoted by the same reference numerals.

Further, in the embodiment of the present invention, an example is described in which an arc-shaped notch fulcrum is used as the elastically deformable portion. However, the present invention is not limited to this. It can be used, and its shape can be appropriately changed.

In the embodiment of the present invention, the fixture 1
0 and the auxiliary tool 17 are manufactured separately,
Although they are integrated by 8, 18 and nuts 19, 19, they may be integrally formed of resin or the like. Further, the stopper 15 may be configured to restrict the amount of urging by the leaf spring 14 by contacting the connecting arm 7.

[0040]

As described above, according to the contact probe fixing tool of the first and second aspects, the link mechanism moves the tip of the probe body directly on a straight line parallel to the guide direction of the probe guide mechanism. Thereby, the length of the contact mark can be shortened to the limit.

According to the third aspect of the present invention, since the elastically deformable portion is formed by the arc-shaped notch fulcrum, the cost can be reduced and the degree of the notch can be appropriately changed. Thereby, the elastic deformation amount of the link mechanism and the elastic force of the elastic deformation portion can be adjusted to an arbitrary size.

According to the fourth aspect of the present invention, since the fitting groove for fitting the probe main body in the probe fixing portion is formed, the manufacturing cost of the contact probe can be reduced. In addition, it is possible to easily manufacture a contact probe including a probe main body whose shape is arbitrarily changed according to a probing target.

According to the fixture for a contact probe according to the fifth aspect, since the probe main body and the probe fixing portion are integrally formed, the manufacturing cost can be reduced.

Further, according to the contact probe fixing device of the sixth aspect, the link mechanism in the normal state is such that the urging member is rotated in a direction opposite to the rotational direction of the lever motion at the time of urging by the probe guide mechanism. Of the link mechanism can be doubled without enlarging the contact mark by the probe body, and a monitoring device for monitoring the amount of bias by the probe guide mechanism. Can be eliminated, and the cost of the probe guide mechanism can be reduced. in addition,
When the leverage of the link mechanism during probing is the same, the contact mark by the probe body can be further reduced.

Further, according to the contact probe fixing device of the present invention, the biasing amount regulating means regulates the biasing amount by the biasing member to a predetermined amount, thereby minimizing a contact mark due to the tip of the probe main body. And it can be uniform.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a probe 1 according to an embodiment of the present invention.

FIG. 2A shows a probe 1 according to an embodiment of the present invention.
2B is a front view of the probe 1. FIG.

FIG. 3 is a side view of the probe 1 when a tip 2a of a probe main body 2 is biased toward a probing target body P side.

FIG. 4 is an explanatory diagram showing an operation of the probes 1 and 11 according to the embodiment of the present invention.

FIG. 5 is a characteristic diagram showing a displacement amount of a tip of a probe main body with respect to a stroke amount in a probe 1 according to an embodiment of the present invention and a conventional probe 31;

FIG. 6 is an external perspective view of another probe 11 according to the embodiment of the present invention.

7A is a left side view of another probe 11 according to the embodiment of the present invention, FIG. 7B is a right side view thereof, and FIG. 7C is a front view thereof.

FIG. 8 is an external perspective view of an auxiliary tool 17 used for the probe 11 according to the embodiment of the present invention.

FIG. 9 is a characteristic diagram showing a displacement amount of the probes 1 and 11 according to the embodiment of the present invention with respect to a stroke amount of the tip 2a of the probe main body 2.

FIG. 10 shows a probe 21 according to another embodiment of the present invention.
FIG.

FIG. 11 shows a probe 24 according to another embodiment of the present invention.
FIG.

FIG. 12 shows a probe 27 according to another embodiment of the present invention.
FIG.

FIG. 13 is an external perspective view of a conventional probe 31.

FIG. 14 is a side view of a conventional probe 31;
(A) is a side view of a state where it is located above the probing object P by the probe guide mechanism, and (b)
FIG. 3 is a side view of a state in which the probing object P is brought into contact with the probing object P, and FIG.

FIG. 15 is an explanatory diagram for explaining an operation of a conventional probe 31.

FIG. 16 is another explanatory diagram for explaining the operation of the conventional probe 31.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Probe 2 Probe main body 2a Tip 3 Probe fixing part 3a Fitting groove 5 Attachment part 6 Connecting arm 7 Connecting arm 8a-8d Support point 10 Fixture 11 Probe 14 Leaf spring 15 Stopper 17 Auxiliary tool P Probing object PM Probe guide Mechanism RM Link mechanism

Claims (7)

[Claims] 1. A contact probe fixing tool having one end attached to a probe guide mechanism and capable of fixing a probe main body, wherein the fixed probe main body is brought into contact with an object to be probed according to guidance by the probe guide mechanism. When the probe main body is in a contact state and is further urged toward the probing target body by the probe guide mechanism, the elastic deformation of the elastic deformation portion causes the probe main body to straighten in a direction opposite to the urging direction. A fixture for a contact probe, comprising: a link mechanism that allows movement or approximate linear movement. 2. The link mechanism includes a probe fixing part for fixing the probe main body, a mounting part for mounting the probe main body, and at least two connection arms, and at least one connection arm. The probe fixing portion and the mounting portion are connected via the elastic deformation portions formed at both ends of the connecting arm, and via the elastic deformation portions formed at both ends of at least one other connecting arm. The fixture for a contact probe according to claim 1, wherein the probe fixing portion and the mounting portion are connected. 3. The arc-shaped notch fulcrum, wherein the elastically deforming portion is formed by cutting out a part of a connecting portion of the connecting arm in an arc shape.
Or the fixture for contact probes according to 2. 4. The fixture for a contact probe according to claim 2, wherein a fitting groove for fitting the probe body is formed in the probe fixing portion. 5. The probe body according to claim 2, wherein the probe main body and the probe fixing portion are integrally formed.
Or the fixture for contact probes according to 3. 6. The link mechanism according to claim 1, wherein the link mechanism is a double lever mechanism, and a part of the link mechanism in a normal state is rotated in a direction opposite to the rotation direction of the lever motion at the time of urging by the probe guide mechanism. The fixture for a contact probe according to any one of claims 1 to 5, further comprising an urging member for urging the contact probe. 7. The contact probe fixture according to claim 6, further comprising an urging amount regulating means for regulating an amount of urging by said urging member to a predetermined amount.