JP3190128B2 - 4-terminal resistance measurement probe head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a four-terminal resistance measuring probe head used for measuring a resistance of a printed wiring board or the like by a four-terminal method.

In recent years, the density of printed wiring boards has been increased, and precise measurement of conductor resistance, which greatly affects the speed of signal propagation between wiring lines, is required. For this reason, there is a demand for a four-terminal resistance measurement probe head having a structure capable of making accurate contact regardless of the surface shape of the substrate to be measured and having a structure capable of coping with a substrate having a high density.

[0003]

2. Description of the Related Art As a conventional probe used for measuring conductor resistance, a spring contact probe, a probe card, or the like has been used.

[0004]

However, in the above-mentioned spring contact probe, when measuring by the two-terminal method, the measurement accuracy is poor due to variation in the contact resistance between the object to be measured and the tip of the probe, and when measuring by the four-terminal method. Is 1
Two probes are required at a location, and there is a problem that it is difficult to make the two probes contact the minute conductor of the high-density substrate. Further, in the probe card, it is difficult to arrange the probes at a high density, and naturally, there is a problem that the contact with the unevenness on the substrate surface is not good because the stroke in the pressing direction is small.

The present invention relates to a four-terminal resistance measurement probe head used for measuring the resistance of a printed wiring board or the like by a four-terminal method. The object of the present invention is to provide a four-terminal resistance measurement probe head that enables measurement even when the probe head is used.

[0006]

In order to achieve the above object, a four-terminal resistance measuring probe head according to the present invention comprises:
A pair of probes, one for supplying current and the other for measuring voltage, each of which is a linear conductive elastic body having a plane along the longitudinal direction and a sharp pointed tip; The front ends of the pair of probes are slidably opposed to each other with the planes insulated by the interposition of an insulating film, and the tips of both probes are aligned, and penetrate through the hole of the first insulating plate in the opposed form. The tip of each probe is movable in the direction along the hole, and the base side of the pair of probes is bent in the same direction at a different position between the two probes at a different position between the two probes. And the base of each probe is fixed to the second insulating plate in the separated form,
In addition, due to the free-length bending between the bent portion and the base,
The tip of the probe is biased, and the first insulating plate and the second insulating plate are fixed to each other.

[0007]

Since the pair of probes, one for supplying current and the other for measuring voltage, is constructed as described above, the tip for supplying current and the tip for measuring voltage can be brought close to each other, Can be brought into contact with both ends. In addition, the bending part on the base side of each probe and the base
, The pressure stroke of each tip can be increased, and each tip can be brought into good contact with the conductor regardless of the surface shape of the substrate to be measured.

As a result, the present probe head enables measurement by the four-terminal method even if the substrate to be measured has irregularities on its surface and has a high density.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a side view of the first embodiment, and FIG. 2 is a side view of the second embodiment.

In FIG. 1, reference numerals 1A and 1B denote a pair of probes, one for supplying current and the other for measuring voltage, 2 is a first insulating plate, 3 is a second insulating plate, and 4 is a pipe. Each of the pair of probes 1A and 1B is a linear conductive elastic body having a plane along the longitudinal direction and having a pointed tip,
Here, the cross-sectional shape is a semicircle, and the material is beryllium copper (BeCu). The cross-sectional shape need not be a semicircle,
The material need not be limited to beryllium copper.

The distal ends of the pair of probes 1A and 1B are slidably opposed to each other so that the planes are insulated by the interposition of an insulating film, and the tips of both probes 1A and 1B are aligned. The tip of each of the probes 1A and 1B can move in the direction along the hole 2a through the second hole 2a.

At the base side of the pair of probes 1A and 1B, between the probes 1A and 1B, the respective probes 1A and 1B
Are separated by an L-shaped bend 5 in the same direction at different positions in the middle of
The bases of A and 1B are fitted to the pipe 4 and fixed to the second insulating plate 3.

The insulating film that insulates between the probes 1A and 1B is a film insulated from the tip of the probes 1A and 1B to the portion of the bend 5, and the pipe 4 is
It is made of a conductor, and determines a free length from the bent portion 5 of the probe 1A or 1B to the base.

The first insulating plate 2 and the second insulating plate 3 are fixed to each other. In the above structure, the probe 1
In A and 1B, the bending stroke of the bent portion 5 with respect to the fixing of the base portion can be increased independently, so that the pressure stroke at the front end can be increased, and both the front ends are close to each other. Further, the stiffness for the pressurizing stroke depends on the free length, and can be adjusted by the length of the pipe 4.

Therefore, in this probe head, when the first insulating plate 2 is brought close to the substrate to be measured in use, both ends of the probes 1A and 1B can be brought into contact with the minute conductor. In addition, it is possible to favorably contact each end with the conductor without being affected by the surface shape of the substrate to be measured.

In FIG. 2 showing the second embodiment, this probe head is an example in which probes are arranged in accordance with the arrangement of probe contact locations on a substrate to be measured. In the figure, 6A and 6
B, 7A and 7B, 8A and 8B, 9A and 9B are a pair of probes corresponding to the pair of probes 1A and 1B in the first embodiment, and 10 and 11 are the same as the first insulating plate 2 and the second insulating plate 3, respectively. Corresponding first and second insulating plates, 12
Is a pipe also corresponding to the pipe 4, 13 is a bend corresponding to the bend 5, and 14 and 15 are fixing plates for fixing the first insulating plate 10 and the second insulating plate 11 to each other.

The pair of probes 6A and 6B to 9A and 9B are arranged in a line, and nine sets of the arrangement are arranged in parallel, and the arrangement of the tips of the probes protruding from the first insulating film 10 is determined by the probe contact point of the substrate to be measured. According to the array. Also, since the arrangement of the tips is relatively honey, the bending angle of the bending 13 is set to 4
The angle is set to 5 degrees so that the arrangement of the probe bases in the second insulating film 11 is prevented from being excessively performed.

The probe head of the second embodiment also has
Since the two tips of the pair of probes are close to each other and each probe functions in the same manner as the probe of the first embodiment,
As in the case of the probe head described above, even when the substrate to be measured has irregularities on the surface and the density is increased, measurement by the four-terminal method is enabled.

[0019]

As described above, according to the present invention, a four-terminal resistance measuring probe head used for measuring the resistance of a printed wiring board or the like by the four-terminal method is provided. In addition, a probe head for four-terminal resistance measurement that enables measurement even when the density is increased is provided, and has an effect of stabilizing the measurement by the four-terminal method for a printed circuit board with increased density. .

[Brief description of the drawings]

FIG. 1 is a side view of a first embodiment.

FIG. 2 is a front view and a side view of a second embodiment.

[Explanation of symbols]

 1A, 1B, 6A, 6B to 9A, 9B Probe 2,10 First insulating plate 2a Hole 3,11 Second insulating plate 4,12 Pipe 5,13 Bending 14,15 Fixing plate

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01R 1/073 G01R 27/02 G01R 31/28

Claims (1)

(57) [Claims] 1. One for supplying current and the other for measuring voltage
Each pair of probes has a plane along the longitudinal direction.
The probe is a linear conductive elastic body having a sharpened tip, and at the tip side of the pair of probes, the flat surfaces are interposed by an insulating film.
The ends of both probes are slidably opposed and insulated by
Are aligned and penetrate through the hole of the first insulating plate
The tip of each probe can move in the direction along the hole
The base side of the pair of probes has a space between both probes, respectively.
Bending in the same direction at different positions in the middle of the probe
The more separated, the separated form of each probe
The base is fixed to the second insulating plate,And the bent portion
The free length deflection between the position and the base causes the tip of the probe
The end is biased,  The first insulating plate and the second insulating plate are fixed to each other.
A probe head for measuring four-terminal resistance, characterized in that: