JP2010281601A - Inspection jig and contactor for inspection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection jig including a contactor coping with microfabrication and complexity of a substrate and allowing four terminal measurement having a simple structure with a reduced number of components. <P>SOLUTION: The inspection jig electrically connecting an inspection device with an object to be inspected includes: an electrode part electrically connected to the inspection device; a first conductive tubular body having one end brought into press contact with an inspection part and the other end brought into press contact with the electrode part; and a second conductive tubular body coaxially arranged in the first tubular body and having one end brought into press contact with the inspection part and the other end brought into press contact with the electrode part. In the first and second conductive tubular bodies, two expanding/contracting parts formed from spiral cutout parts of a tubular wall part and expanding and contracting in a major axis direction are provided via an intermediate part. In the first and second conductive tubular bodies, the first and second conductive tubular bodies are fixed at the respective intermediate parts. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inspection jig for electrically connecting an inspection point set in advance on an inspection target portion of an object to be inspected and an inspection apparatus for performing this inspection, and in particular, 4-terminal measurement can be easily measured. The present invention relates to an inspection contact to be performed and an inspection jig using the contact.

  The inspection jig of the present invention refers to an inspection object by supplying electric power or an electric signal from an inspection apparatus to a predetermined inspection position and detecting an electric signal from the inspection object part. It is possible to detect the electrical characteristics of the part and perform an operation test.

  Examples of such inspected objects include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, and various boards such as package boards and film carriers for semiconductor packages, and semiconductors. Examples of the semiconductor device include a wafer, a semiconductor chip, and a CSP (Chip size package).

  In the present specification, these inspection objects are collectively referred to as “inspection object”, and an inspection target part formed on the inspection object is referred to as “inspection part”. An inspection point for actually inspecting the electrical characteristics of the inspection unit is set in the inspection unit, and the electrical characteristic of the inspection unit is detected by pressing a contact with the inspection point.

  Conventionally, a plurality of wirings are formed on a circuit board which is an embodiment of an object to be inspected. This wiring is formed to supply electric power and to flow an electric signal so that electric / electronic components mounted on the circuit board have a desired function. For this reason, it is known that defective wiring leads to defective operation of the circuit board.

  In order to solve such a problem, many inventions of an inspection apparatus for determining the quality of a target portion such as a wiring formed on an inspection object such as a circuit board or a semiconductor device have been proposed.

  Such an inspection apparatus, for example, in order to determine the quality of the wiring formed on the substrate to be inspected, a plurality of inspection points set in advance on the wiring, and a plurality of contacts connected to each of them. Inspection is performed using an inspection jig having a child (probe).

  In such an inspection jig, one end of the contact is pressed against an inspection point on the wiring (inspection part), and the other end is pressed against an electrode part electrically connected to the substrate inspection apparatus. Then, current and voltage for measuring the electrical characteristics of the wiring are supplied from the substrate inspection apparatus via the inspection jig, and an electrical signal from the wiring is transmitted to the substrate inspection apparatus.

  In recent years, with the advancement of technology, as the semiconductor device becomes smaller and the substrate becomes smaller, the wiring on the substrate is formed more finely and complicatedly. As miniaturization and complexity of the wiring of such a substrate progresses, the contacts provided in the inspection jig are also required to be thinned, the pitch between the contacts is reduced, the number of pins is increased, and simplification is required. Yes.

  In particular, when measuring a target portion of an inspection object that has been refined and complicated, a four-terminal measurement method is performed because the influence of a contact resistance value that occurs when the target portion comes into contact with a contact is large. In this four-terminal measurement method, it is necessary to arrange two electrically independent contacts for power supply and electric signal detection at the inspection point. For this reason, the contactor made thinner than usual is required.

  Here, for example, in the contact of the inspection jig disclosed in Patent Document 1, the first electrode part of the cylindrical member and the second electrode part insulated from the inside of the first electrode part and disposed therein And the first electrode part and the second electrode part are formed so as to be in contact with the inspection point at the same time.

  However, since the inspection jig disclosed in Patent Document 1 is formed by a coil spring using windings, it is difficult to form a coil having a diameter smaller than about four times the diameter of the coil. However, it was extremely difficult to form a winding coil spring having a thickness of 100 μm or less and assemble it as an inspection jig. Even if it could be formed, it was too expensive to use for 2 to 4,000 inspection jigs due to the problem of manufacturing cost, and there was an impractical problem.

JP 2005-249447 A

  The present invention provides an inspection jig provided with a four-terminal measuring contact having a simplified structure that can cope with miniaturization and complexity of a substrate and has a reduced number of components.

The invention according to claim 1 is an inspection jig for electrically connecting an object to be inspected having an inspection part to be inspected and an inspection apparatus for inspecting an electrical characteristic of the inspection part, A connection electrode body having a plurality of electrode portions electrically connected to the inspection apparatus, and a conductive cylindrical first tube body having one end pressed against the inspection portion and the other end pressed against the electrode portion And a conductive member that is electrically non-contact with the first cylinder and is disposed substantially coaxially within the first cylinder, and has one end pressed against the inspection portion and the other end pressed against the electrode portion. A cylindrical second cylinder, a first plate member having a first guide hole for guiding one end of each of the first cylinder and the second cylinder to the inspection point, and the first cylinder A second guide hole for guiding the other end of each of the body and the second cylindrical body to the electrode portion, and a predetermined distance from the first plate-like member The second plate member, the first cylinder body, and the second cylinder body are arranged and have two expansion / contraction portions that are expanded and contracted in the long axis direction formed by a spiral cutout portion of the cylinder wall portion. An inspection treatment characterized in that the first cylinder and the second cylinder are provided via an intermediate part, and the first cylinder and the second cylinder are fixed to each intermediate part. Provide ingredients.
According to a second aspect of the present invention, there is provided the inspection jig according to the first aspect, wherein the first cylinder and the second cylinder are formed of an alloy having nickel as a main component.
According to a third aspect of the present invention, the shape of the first cylinder is formed in a shape that is substantially symmetrical with respect to the center of the first cylinder, and the shape of the first cylinder is the second cylinder. 3. The inspection jig according to claim 1, wherein the inspection jig is formed in a shape that is substantially symmetrical with respect to the center of the body.
According to a fourth aspect of the present invention, the inspection jig includes a third plate-like member having a third guide hole that penetrates and guides the intermediate portion, and the third plate-like members are arranged in parallel. With three plate portions, one plate portion arranged in the middle is displaced in the surface direction with respect to the other plate portions, and the third guide hole is arranged at a position shifted from the alignment position. The inspection jig according to claim 1, wherein the intermediate portion is sandwiched.
According to a fifth aspect of the present invention, a cylindrical third cylinder having an inner diameter larger than the outer diameter of the first cylinder is formed, and the first cylinder is formed in the third cylinder. A first guide upper hole having a diameter larger than the outer diameter of the first cylinder and smaller than the outer diameter of the third cylinder; The inspection jig according to claim 1, further comprising a first guide lower hole that is connected to the guide upper hole and has a diameter larger than the outer diameter of the third cylinder. To do.
The invention according to claim 6 is characterized in that the two expansion / contraction portions of the first cylinder and the two expansion / contraction portions of the second cylinder are not arranged at adjacent positions in plan view. 5. The inspection jig according to any one of 5 is provided.

According to the first aspect of the present invention, the contact of the inspection jig is formed by the conductive first cylinder and the conductive second cylinder housed in the first cylinder, so that two terminals are provided. On the other hand, since it is housed inside, it can cope with a narrow pitch as compared with the conventional probe for four-terminal measurement. In addition, since the two contacts are formed from an integral cylindrical member, the number of parts can be simplified. Furthermore, since the two contactors are each formed with two expansion / contraction portions sandwiching the intermediate portion, one expansion / contraction portion slides according to the pressing force from the inspection point, and the other expansion / contraction portion is the electrode. Since the sliding is performed according to the pressing force from the part, each expansion and contraction part can function independently.
According to the second aspect of the present invention, since it is formed of nickel or a nickel alloy, it has conductivity, can be easily plated, and can ensure springiness.
According to the third aspect of the invention, since the contact has a shape that is symmetrical with respect to the center of the contact, the third plate that is easy to attach to the holding body and holds the intermediate portion of the contact is provided. By providing the shape member, the holder can easily hold the contact.
According to invention of Claim 5, since a 3rd cylinder is formed in the outer side of a 1st cylinder, this 3rd cylinder can be utilized now for the latching | locking part with a plate-shaped member. .
According to invention of Claim 6, since the expansion-contraction part of a 1st cylinder and the expansion-contraction part of a 2nd cylinder are not arrange | positioned in the position which adjoins, it can function without receiving mutual influence.

It is a schematic structure figure showing one embodiment of the inspection jig concerning the present invention. It is a schematic sectional drawing of the contact (1st contactor) of 1st embodiment of this invention. The exploded sectional view of the 1st cylinder and the 2nd cylinder which constitute the 1st contact child is shown, (a) shows the 1st cylinder and (b) shows the 2nd cylinder. It is sectional drawing which shows the state in which the 1st contactor was attached to the holding body. It is a schematic block diagram of the test | inspection jig | tool using a 1st contactor. It is a schematic sectional drawing of the contact (2nd contact) of 2nd embodiment of this invention. The 1st cylinder which constitutes the 2nd contact child, the 2nd cylinder, and the exploded sectional view of the 3rd cylinder are shown, (a) shows the 1st cylinder, (b) shows the 2nd cylinder, (C) has shown the 3rd cylinder. It is sectional drawing which shows the state in which the 2nd contactor was attached to the holding body. It is a schematic block diagram of the test | inspection jig | tool using a 2nd contactor. It is a schematic sectional drawing of the contact (3rd contactor) of 3rd embodiment of this invention. The exploded sectional view of the 1st cylinder and the 2nd cylinder which constitute the 3rd contact child is shown, (a) shows the 1st cylinder and (b) shows the 2nd cylinder. It is sectional drawing which shows the state with which the 3rd contactor was attached to the holding body. It is a schematic block diagram of the test jig | tool using a 4th contactor. It is a schematic sectional drawing of the contact (4th contact) of 4th embodiment of this invention. An exploded cross-sectional view of the first cylinder, the second cylinder, and the third cylinder constituting the fourth contact is shown, (a) shows the first cylinder, (b) shows the second cylinder, (C) has shown the 3rd cylinder. It is sectional drawing which shows the state with which the 4th contactor was attached to the holding body. It is a schematic block diagram of the test jig | tool using a 4th contactor. It is sectional drawing which shows the state in which the 5th contactor was attached to the holding body. The exploded sectional view of the 1st cylinder and the 2nd cylinder which constitute the 5th contact child is shown, (a) shows the 1st cylinder and (b) shows the 2nd cylinder.

A mode for carrying out the present invention will be described. FIG. 1 is a schematic configuration diagram showing an embodiment of an inspection jig according to the present invention. An inspection jig 1 according to the present invention includes a plurality of contacts 2, a holding body 3 that holds the contacts 2 in a multi-needle shape, supports the holding body 3, contacts the contact 2, and is in a conductive state. A connecting electrode body 4 having an electrode portion 41 (see FIG. 5), and a conductive wire portion 5 that is electrically connected and extended from the electrode portion 41.
In FIG. 1, three contacts are shown as the plurality of contacts 2 and three conductor portions 5 corresponding to the contacts are shown, but these are not limited to three, It is determined according to the inspection point set on the substrate to be inspected.

The main feature of the present invention is to perform four-terminal measurement by using two conductive cylindrical members, with one cylindrical member housed inside the other cylindrical member and used as one contact. Making it possible. Therefore, the contact having the characteristic configuration of the present invention will be described in detail.
Moreover, by comprising in this way, the number which forms the guide hole of the holding body holding a contactor can be reduced.

The contact according to the first embodiment of the present invention will be described. FIG. 2 is a schematic cross-sectional view of the contact (first contact) according to the first embodiment of the present invention, and FIG. 3 is an exploded cross-section of the first cylinder and the second cylinder constituting the first contact. The figure shows, (a) shows the first cylinder and (b) shows the second cylinder.
The first contactor 21 includes a first cylinder 211 and a second cylinder 212, and is formed by accommodating the second cylinder 212 inside the first cylinder 211 (see FIG. 2). ).

  The first cylinder 211 has a predetermined length and is formed from a conductive material. The first cylindrical body 211 is formed in a cylindrical shape that is a hollow cylindrical shape having openings at both ends. As for the 1st cylinder 211, the one end part contacts an inspection point, and the other end part contacts the electrode part 41 (1st electrode part 411), and performs an electrical connection of an inspection point and an electrode part.

  The first cylindrical body 211 includes a front end portion 211a, a first outer stretchable portion 211b, an outer middle portion 211c, a second outer stretchable portion 211d, and an outer rear end portion 211e. Since these parts (211a-211e) are formed from the same cylindrical member, they have the same outer diameter and inner diameter.

  The outer front end portion 211a abuts on an electrode portion 41 described later. The outer front end portion 211 a is guided through the second guide hole 321 of the second plate-like member 32 described later and guided to the predetermined first electrode portion 411.

  The outer rear end portion 211e abuts on an inspection point set on the inspection portion. The outer rear end portion 211e is penetrated and supported inside a first guide hole 311 of the first plate-like member 31 described later, and is guided to a predetermined inspection point.

  The outer first expansion / contraction part 211b is formed in a coil spring shape that expands and contracts in the long axis direction of the cylindrical member by forming a spiral cutout along the wall of the cylindrical member. In addition, the elastic force which this outer side 1st expansion-contraction part 211b has can change the intensity | strength of the elastic force by adjusting the width | variety and length of a spiral notch part suitably.

  The outer second expansion / contraction part 211d is formed in a coil spring shape that expands and contracts in the long axis direction of the cylindrical member by forming a spiral notch along the wall of the cylindrical member. In addition, the elastic force which this outer side 2nd expansion-contraction part 211d has can change the intensity | strength of the elastic force by adjusting the width | variety and length of a spiral notch part suitably like the outside 1st expansion-contraction part 211b. Can do.

  The outer intermediate portion 211 c is formed at the approximate center of the first cylinder 211. The outer intermediate portion 211c is electrically insulated and fixed from an inner intermediate portion 212c of the second cylinder 212 described later. The outer intermediate portion 211c has one end connected to the outer first extendable portion 211b and the other end connected to the outer second extendable portion 211d. The outer intermediate portion 211c shown in FIG. 3A shows an outer recess 211f that curves inward. The outer recess 211f accommodates the second cylinder 212 inside the first cylinder 211. In this case, the first cylinder 211 and the second cylinder 212 are formed to be fixed, and are not formed in the first cylinder 211 in advance. In addition, the outer concave portion 211f performs pressing (caulking) from the outer side (first cylindrical body 211) to the inner side (second cylindrical body 212) in order to fix the first cylindrical body 211 and the second cylindrical body 212. It is formed when fixed with. The fixing method of the first and second cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used.

  One end of the outer front end portion 211a is in contact with the first electrode portion 411, while the other end is connected to one end of the outer first stretchable portion 211b and the other end of the outer first stretchable portion 211b is the outer middle. The other end of the outer intermediate portion 211c is connected to one end of the outer second telescopic portion 211d, and the other end of the outer second elastic portion 211d is the one end of the outer rear end portion 211e. The other end of the outer rear end portion 211e is brought into contact with the inspection point.

  The first cylinder 211 can be formed of a single conductive cylindrical member, and is formed to have an outer diameter of 40 to 250 μm, an inner diameter of 30 to 240 μm, and a thickness of 5 to 50 μm, for example. By forming in this dimension, it is possible to cope with the inspected object such as the wiring of the substrate and the semiconductor device which are miniaturized and complicated by the inspection apparatus having a simplified structure.

  As shown in FIG. 3A, the first cylinder 211 is formed such that each part is arranged so as to be point-symmetric or line-symmetric with respect to the center thereof. This is because, by being formed in such a symmetrical shape, it can be handled without distinction between the upper and lower sides of the contact 2 when being mounted on the holder 3 of the inspection jig 1 described later. .

  The first cylinder 211 has one end in contact with the inspection point and the other end in contact with the electrode portion, and the electrical connection between the inspection point and the electrode portion is achieved through the first cylinder 211. The one cylinder 211 is formed of a conductive material. Although it will not specifically limit as this material if it is a material which has electroconductivity, For example, nickel, nickel alloy, and a palladium alloy can be illustrated.

  The first cylinder 211 is formed of a conductive material as described above. However, the contact 2 itself must be thinned in accordance with the miniaturization and complexity of the inspection object. I must. In particular, in order to expand and contract in the direction perpendicular to the holding plate, the contact 2 itself must be formed to have an expansion / contraction function, but a portion like a coil spring using a conventional winding is formed. Therefore, depending on the diameter of the coil itself, it is difficult to form a coil having a diameter smaller than about four times the diameter of the coil, and it is extremely difficult to form a coil spring having an outer diameter of 100 μm or less. It was difficult. Even if it could be formed, it was too expensive to use for 2 to 4,000 inspection jigs due to the problems of assembling and manufacturing costs, and there was an impractical problem.

  However, in the present invention, a fine contact can be easily produced at a lower cost by using the following production method. As this manufacturing method, the following two manufacturing methods can be disclosed.

[Production Example 1]
(1) First, a core wire (not shown) that forms the hollow portion of the first cylindrical body 211 is prepared. As the core wire, a SUS wire having a desired thickness (for example, a diameter of 30 μm) that defines the inner diameter of the first cylindrical body 211 is used.

(2) Next, a photoresist film is applied to the core wire (SUS wire) to cover the peripheral surface of the core wire. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, it is possible to form a spiral mask by forming a core line along the central axis and exposing with a laser. In order to form the first cylindrical body 211 of the present invention, the two stretchable parts (the outer first stretchable part 211b and the outer second stretchable part 211d) have a predetermined distance (distance corresponding to the length of the outer intermediate part 211c). It will be formed.

(3) Next, nickel plating is performed on this core wire. At this time, since the core wire is conductive, the portion where the photoresist mask is not formed is plated with nickel.

(4) Next, the photoresist mask is removed, the core wire is pulled out, and the cylinder is cut to a desired length to form the first cylinder 211. It goes without saying that the cylinder may be cut before the core wire is completely pulled out.

  Moreover, the 1st cylinder 211 can also be manufactured with the following method.

[Production Example 2]
First, a core wire (not shown) that forms the hollow portion of the first cylinder 211 as described above is prepared.

The core wire is plated with nickel to a desired thickness, and a nickel plating layer is formed on the peripheral surface of the core wire.

(2) Next, a photoresist is applied to the surface of the nickel plating layer. A desired portion of the photoresist is exposed, developed, and heated to form a spiral mask. At this time, for example, it is possible to form a spiral mask by forming a core line along the central axis and exposing with a laser. In order to form the first cylindrical body 211 of the present invention, the two stretchable parts (the outer first stretchable part 211b and the outer second stretchable part 211d) have a predetermined distance (distance corresponding to the length of the outer intermediate part 211c). It will be formed.

(3) Next, the nickel plating is removed by etching. At this time, the nickel plating in a portion where the photoresist mask is not formed is removed.

(4) Next, the photoresist mask is removed, the core wire is pulled out, and the cylinder is cut to a desired length to form the first cylinder 211. It goes without saying that the cylinder may be cut before the core wire is completely pulled out.

  In the conventional coil spring system using a winding, depending on the diameter of the winding material, it is difficult to form a coil having a diameter smaller than about four times the diameter, and a coil spring of 100 μm or less can be formed. It was extremely difficult. The first cylindrical body 211 of the present invention by the above manufacturing method is manufactured by extracting the core wire after nickel-plating the core wire to form a desired shape, so that a coil spring type using a conventional winding is used. As a result, the thickness of the spring material can be reduced, and at the same time, a fine outer diameter and inner diameter can be collectively manufactured with high accuracy and flexibility.

  Next, the 2nd cylinder 212 which forms the 1st contactor 21 is demonstrated (refer FIG.3 (b)). The second cylinder 212 has a predetermined length and is formed from a conductive material. The second cylinder 212 is formed in a cylindrical shape that is a hollow cylindrical shape having openings at both ends. As for the 2nd cylinder 212, the one end part contacts an inspection point, and the other end part contacts the electrode part 41 (2nd electrode part 412), and performs an electrical connection of an inspection point and an electrode part. The most different point of the second cylinder 212 from the first cylinder 211 is that the second cylinder 212 is accommodated in the first cylinder 211, and therefore the outer diameter of the second cylinder 212 is the first cylinder. It is formed to be slightly smaller than the inner diameter of the body 211.

  The second cylindrical body 212 includes an inner tip portion 212a, an inner first stretchable portion 212b, an inner intermediate portion 212c, an inner second stretchable portion 212d, and an inner rear end portion 212e. Since these parts (211a-211e) are formed from the same cylindrical member, they have the same outer diameter and inner diameter.

  The inner front end portion 212a abuts on a second electrode portion 412 described later. The inner front end portion 212 a moves in the internal space of the outer front end portion 211 a of the first cylindrical body 211. Since the outer front end portion 211 a is guided to the first electrode portion 411 through the second guide hole 321, the inner front end portion 212 a is also guided to the second electrode portion 412.

  The inner rear end portion 212e contacts an inspection point set on the inspection portion. The inner rear end portion 212e moves in the internal space of the inner rear end portion 211e of the first cylindrical body 211. Since the outer rear end portion 211e is guided to the inspection point through the first guide hole 311, the inner rear end portion 212e is also guided to the inspection point.

  The inner first expansion / contraction part 212b is formed in a coil spring shape that expands and contracts in the long axis direction of the cylindrical member by forming a spiral cutout along the wall of the cylindrical member. In addition, the elastic force which this inner side 1st expansion-contraction part 212b has can change the intensity | strength of the elastic force by adjusting the width | variety and length of a spiral notch part suitably.

  212 d of inner side 2nd expansion-contraction parts are formed in the coiled spring shape which expands-contracts in the longitudinal direction of a cylinder member by forming the spiral notch part along the wall part of a cylinder member. In addition, the elastic force which this inner side 2nd expansion-contraction part 212d has is changing the intensity | strength of the elastic force by adjusting the width | variety and length of a spiral notch part suitably like the inside 1st expansion-contraction part 212b. Can do.

  The inner intermediate portion 212 c is formed at the approximate center of the second cylinder 212. The inner intermediate portion 212c is electrically insulated and fixed from the outer intermediate portion 211c of the first cylinder 211 described above. One end of the inner intermediate portion 212c is connected to the inner first extendable portion 212b, and the other end is connected to the inner second extendable portion 212d. The inner intermediate portion 212c shown in FIG. 3B shows an inner concave portion 212f that curves inward. The inner concave portion 212f accommodates the second cylindrical body 212 inside the first cylindrical body 211. In this case, it is formed to fix the first cylinder 211 and the second cylinder 212, and is not formed in advance on the second cylinder 212. Further, the inner recess 212f is pressed (caulked) from the outer side (first cylindrical body 211) to the inner side (second cylindrical body 212) in order to fix the first cylindrical body 211 and the second cylindrical body 212. It is formed when fixed with. The fixing method of the first and second cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used.

  One end of the inner tip portion 212a is in contact with the second electrode portion 412, but the other end is connected to one end of the inner first stretchable portion 212b, and the other end of the inner first stretchable portion 212b is the inner middle. The other end of the inner intermediate portion 212c is connected to one end of the inner second stretchable portion 212d, and the other end of the inner second stretchable portion 212d is the one end of the inner rear end portion 212e. The other end of the inner rear end 212e is brought into contact with the inspection point.

  The second cylinder 212 can be formed of a single conductive cylindrical member, and is formed to have an outer diameter of 20 to 220 μm, an inner diameter of 10 to 200 μm, and a thickness of 5 to 50 μm, for example. By forming in this dimension, it is possible to cope with the inspected object such as the wiring of the substrate and the semiconductor device which are miniaturized and complicated by the inspection apparatus having a simplified structure.

  As shown in FIG. 3B, the second cylinder 212 is formed by arranging each part so as to be point-symmetric or line-symmetric with respect to the center thereof. This is because, by being formed in such a symmetrical shape, it can be handled without distinction between the upper and lower sides of the contact 2 when being mounted on the holder 3 of the inspection jig 1 described later. .

  The second cylinder 212 has one end in contact with the inspection point and the other end in contact with the electrode portion, and the second cylinder 212 is connected to the inspection point and the electrode portion through the second cylinder 212. The two cylinders 212 are made of a conductive material. Although it will not specifically limit as this material if it is a material which has electroconductivity, For example, nickel, nickel alloy, and a palladium alloy can be illustrated. Since the manufacturing method of this 2nd cylinder 212 is the same as that of the case of the above-mentioned 1st cylinder 211, description is abbreviate | omitted.

  Since the first contactor 21 accommodates and arranges the second cylinder 212 inside the first cylinder 211, an insulating coating is formed on the outer periphery of the second cylinder 212 as shown in FIG. Preferably 212 g is formed. For example, polyimide, polytetrafluoroethylene (PTFE), or an epoxy resin can be used for the insulating coating 212g. The insulating film 212g has a thickness of 1 to 5 μm, for example.

  The insulating coating 212g is formed on the outer peripheral edge of the second cylinder 212 in the embodiment of FIG. 2, but can also be formed on the inner peripheral edge of the first cylinder 211. In addition, when forming an insulating film in the inner periphery of the 1st cylinder 211, each expansion-contraction part is formed in the 1st cylinder 211, it pulls out a core wire and is formed after a cylinder shape is formed. .

  As shown in FIG. 2, the second cylinder 212 can be arranged so as to protrude from both open ends of the first cylinder 211, or arranged so that the second cylinder 212 does not protrude at all. You can also. Since both the first cylindrical body 211 and the second cylindrical body 212 have two expansion / contraction portions, the expansion / contraction portion is not pressed when pressed from the inspection point or the electrode portion, regardless of which of the two protrusions is planar. By sufficiently contracting, both the first cylinder 211 and the second cylinder 212 can come into contact with each other.

FIG. 4 is a cross-sectional view showing a state in which the first contactor 21 is attached to the holding body.
The inspection jig 1 has a holding body 3 for holding the first contactor 21. The holding body 3 includes a first plate member 31 and a second plate member 32.

  The first plate member 31 has a first guide hole 311 for guiding one end of the first contactor 21 to the inspection point. The first guide hole 311 is formed to be slightly larger than the outer diameter of the first cylinder 211. The thickness of the first plate member 31 is not particularly limited, but is preferably shorter than the length of the outer rear end portion 211e. This is because the outer rear end portion 211e can surely slide along the first guide hole 311.

  The second plate member 32 is disposed with a predetermined distance from the first plate member 31 and has a second guide hole 321 for guiding the other end of the first contactor 21 to the electrode part 41. . The second guide hole 321 is formed slightly larger than the outer diameter of the first cylinder 211. The thickness of the second plate-like member 32 is not particularly limited, but is preferably formed shorter than the length of the outer front end portion 211a. This is because the outer front end portion 211 a can surely slide along the second guide hole 321.

  From the 1st guide hole 311 and the 2nd guide hole 321, the 1st contactor 21 is arrange | positioned so that it may each protrude outside.

  When the first contactor 21 is used, it is preferable to use the third plate member 33 shown in FIG. The third plate member 33 includes an upper plate portion 331, a middle plate portion 332, and a lower plate portion 333 that are arranged in parallel with a predetermined interval. These plate-like portions have a third guide hole 334 for being inserted through the first contactor 21. In the third plate member 33, the third guide hole 334 of the third plate member 33 is arranged on a straight line between the first guide hole 311 and the second guide hole 321.

  The middle plate portion 332 of the third plate member 33 is displaced in the surface direction with respect to the other plate portions (the upper plate portion 331 and the lower plate portion 333). For this reason, the third contact hole 334 can be easily penetrated by the first contactor 21 before the middle plate part 332 is displaced. The middle plate portion 332 presses the portion 211c, and the first contactor 21 can be held. In this way, the first contact 21 is fixed to the holding body 3.

  FIG. 5 is a schematic configuration diagram of an inspection jig using the first contact. The connection electrode body 4 of the inspection jig 1 is formed with electrode portions 41 corresponding to the first contactors 21. The electrode part 41 includes a first electrode part 411 that comes into contact with the first cylindrical body 211 and enters a conductive state, and a second electrode part 412 that comes into contact with the second cylindrical body 212 and enters a conductive state. . The connection electrode body 4 is made of an insulating material.

  In the electrode part 41 shown by FIG. 5, the 1st electrode part 411 and the 2nd electrode part 412 are formed with a copper conducting wire, and it is formed so that each end surface may contact the edge part of each cylinder. Moreover, in FIG. 5, the 1st electrode part 411 and the 2nd electrode part 412 are arrange | positioned so that it may be in the most distant position while contacting each cylinder.

In the first embodiment shown in FIG. 5, the first cylindrical body 211 and the second cylindrical body 212 are fixed at their intermediate portions, and the middle plate portion 332 of the third plate-like member 33 is displaced in the plane direction. Thus, the first contactor 21 is detachably held. In the first embodiment, when the first contactor 21 is held by the holding body 3 and attached to the connection electrode body 4, the outer first elastic part 211 b and the inner first elastic part 211 b are compressed and biased. Mounted in a state. By being mounted in this manner, the outer first stretchable portion 211b and the inner first stretchable portion 212b constantly press the respective electrode portions 41, so that the inspection point and the first contactor 21 are in contact with each other. Without stopping, the contact resistance value between the first contactor 21 and the electrode part 41 can be extremely stabilized.
The above is the description of the inspection jig of the first embodiment.

  Next, the inspection jig 1 'according to the second embodiment will be described. FIG. 6 is a schematic cross-sectional view of a contact (second contact) according to the second embodiment of the present invention, and FIG. 7 shows a first cylinder, a second cylinder, and a third that constitute the second contact. The exploded sectional view of a cylinder is shown, (a) shows the 1st cylinder, (b) shows the 2nd cylinder, and (c) shows the 3rd cylinder. In addition, when the inspection jig of the second embodiment and the inspection jig of the first embodiment have the same configuration, the same reference numerals are given and description thereof is omitted.

  The second contactor 22 of the second embodiment includes a first cylinder 211, a second cylinder 212, and a third cylinder 223. The first cylindrical body 211 and the second cylindrical body 212 of the second contactor 22 have the same configuration as the first cylindrical body 211 and the second cylindrical body 212 of the first contactor 21, and the description thereof is omitted. .

  The third cylinder 223 accommodates the first cylinder 211 (and the second cylinder 212) so as to be coaxial with each other. For this reason, the third cylinder 223 is formed to have an inner diameter that is slightly larger than the outer diameter of the first cylinder 211. The third cylinder 223 is formed in a cylindrical shape with both ends opened, and a first cylinder 211 and a second cylinder 212 are extended from the openings at both ends (see FIG. 6).

  The third cylinder 223 has a fixing recess 223a for fixing to the first cylinder 211 (including the second cylinder 212). The fixed recess 223a is not formed in advance, but is formed after the first cylinder 211 is accommodated and disposed therein. Details of the method of forming the fixed recess 223a will be described later.

  The third cylinder 223 may be formed of a conductive material or a non-conductive material, but is electrically conductive so that it is not electrically in contact with the other adjacent second contact 22. In the case of being formed of a material, its peripheral edge is covered with an insulation as necessary. In addition, as a method for manufacturing the third cylinder 223, a method for manufacturing the first and second cylinders can be used.

  As for the 2nd contactor 22, the 2nd cylinder 212 is accommodated in the 1st cylinder 211, and the 3rd cylinder 223 accommodates this 1st cylinder 211 in the inside after that. And the fixed recessed part 223a is formed when it fixes by pressing (caulking) from the outer side of the 3rd cylinder 223 to the inner side. The fixing method of the first and second cylinders is not limited to this caulking, and other fixing methods such as laser welding, arc welding, and adhesive may be used. In addition, after all the 1st thru | or 3rd cylinders are arrange | positioned, you may form so that all the cylinders may be fixed, and after fixing a 1st and 2nd cylinder first, a 3rd cylinder is fixed. It may be fixed.

  FIG. 8 is a cross-sectional view showing a state in which the second contact is attached to the holding body. The inspection jig according to the second embodiment includes a first plate member 34 and a second plate member 32. Since the second plate-like member 32 has the same configuration as the inspection jig of the first embodiment, description thereof is omitted.

  The first plate-like member 34 has a first guide hole 341 that guides the second contactor 22 to the inspection point. The first guide hole 341 includes a first guide upper hole 34a and a first guide lower hole 34b. The first guide upper hole 34 a is formed to have a diameter slightly larger than the outer diameter of the third cylinder 223.

  The first guide lower hole 34 b is formed to have a diameter slightly larger than the outer diameter of the first cylinder 211 and smaller than the outer diameter of the third cylinder 223. As described above, the first guide hole 341 is formed by two holes having different diameters, so that the second contact 22 is engaged with the second contact 22 by the step between the third cylinder 223 and the first cylinder 211. Will be stopped.

  FIG. 9 is a schematic configuration diagram of an inspection jig 1 ′ using the second contact 22. When the second contactor 22 is attached to the holding body 3, the second contactor 22 is inserted from the second guide hole 321 of the second plate-like member 32 and guided to the first guide hole 341 of the first plate-like member 34. . At this time, in the second contactor 22, the third cylindrical body 223 is locked to a boundary having a different diameter inside the first guide hole 341.

After the second contact 22 is held by the holding body 3, the second plate member 32 is brought into contact with the connection electrode body 4 so that one end of the second contact 22 is pressed against the electrode portion 41. At this time, since the first cylindrical body 211 and the second cylindrical body 212 of the second contactor 22 are pressed against the first electrode part 41a and the second electrode part 41b, respectively, The first expansion / contraction part 212b contracts to be in an urging state, and the outer end part 211a of the first cylinder 211 and the inner end part 212a of the second cylinder 212 are constantly in contact with each other regardless of whether they contact the inspection point. The electrode part 41 is contacted. Further, the inner and outer second stretchable portions 211d and 212d to be arranged on the other side are in a waiting state for inspection in a natural length state, and these stretchable portions slide only during actual inspection. Become.
The above is the description of the inspection jig of the second embodiment.

  Next, the inspection jig 1 ″ according to the third embodiment will be described. FIG. 10 is a schematic cross-sectional view of the contact (third contact 23) of the third embodiment of the present invention. FIG. 11 shows an exploded cross-sectional view of the first cylinder and the second cylinder constituting the third contact, (a) showing the first cylinder, and (b) showing the second cylinder. . In addition, when the inspection jig of the third embodiment and the inspection jig of the first embodiment or the second embodiment have the same configuration, the same reference numerals are given and the description is omitted.

  The main features of the inspection jig 1 '' of the third embodiment are that an insulating coating 211g is provided on the outer peripheral edge of the first cylindrical body 211 of the third contact 23, and the outer peripheral edge of the second cylindrical body 212. The point is that an insulating coating 212g is provided.

  The third contactor 23 includes a first cylinder 211 and a second cylinder 212. Since the basic configuration of the first cylindrical body 211 and the second cylindrical body 212 of the third contactor 23 is the same as that of the first contactor 21, the description thereof will be omitted and different configurations will be described. The outer first elastic part 211b and the outer second elastic part 211d of the first cylinder 211 are arranged at positions that are not adjacent to each other in plan view with the inner first elastic part 212b and the inner second elastic part 212d of the second cylinder 212. (See FIG. 10). As described above, the respective expansion / contraction portions are alternately arranged along the major axis direction of the third contactor 23, so that even if the respective expansion / contraction portions slide, they do not contact each other.

  As for the 1st cylinder 211, the insulation coating 211g is formed in the outer periphery of the outer side front-end | tip part 211a, the outer side intermediate part 211c, and the outer side rear end part 211e. The insulating coating 211g is formed to have a predetermined thickness, for example, 5 to 20 μm. In particular, the insulating coating 211g formed on the periphery of the outer rear end portion 211e is the first guide hole of the first plate-like member 34, like the third cylinder 223 of the inspection jig 1 ′ of the second embodiment. 341 is locked.

  The insulating coating 211g of the first cylinder 211 exemplified in FIG. 11A is not provided in the portion of the outer recess 211f for fixing the first cylinder 211 and the second cylinder 212. In this case, when pressing from the outside of the first cylinder 211, an insulating coating is not provided in order to fix the first cylinder 211 and the second cylinder 212 more reliably.

  As for the 2nd cylinder 212, the insulation coating 212g is formed in the outer periphery of the inner side front-end | tip part 212a, the inner side intermediate part 212c, and the inner side rear-end part 212e. The insulating coating 212g is formed to have a predetermined thickness, for example, 1 to 10 μm. By providing the insulating coating 212g at each of the above-mentioned portions of the second cylindrical body 212, it is possible to stably regulate the sliding direction of each expansion / contraction portion of the first cylindrical body 211 in the major axis direction of the second contactor 23. it can.

  FIG. 12 is a cross-sectional view showing a state in which the third contact is attached to the holding body. As shown in FIG. 12, similarly to the second contact of the second embodiment, two different hole portions (first guide upper hole 34a and first guide hole 341) of the first plate member 34 are different. With the one guide lower hole 34 b), the third contact 23 is locked by the step between the insulating coating 211 g provided on the outer rear end portion 211 e and the first cylindrical body 211.

  FIG. 13 is a schematic configuration diagram of an inspection jig using a third contact. The inspection jig 1 ″ of the third embodiment is similar to the inspection jig 1 ′ of the second embodiment when the third contact 23 is attached to the holding body 3. It is inserted from the second guide hole 321 of the member 32 and guided to the first guide hole 341 of the first plate member 34. At this time, in the third contactor 23, the insulating coating 211g is locked to a boundary having a different diameter inside the first guide hole 341.

After the third contact 23 is held by the holding body 3, the second plate member 32 is brought into contact with the connection electrode body 4 so that one end of the third contact 23 is pressed against the electrode portion 41. At this time, since the first cylindrical body 211 and the second cylindrical body 212 of the third contactor 23 are pressed against the first electrode portion 41a and the second electrode portion 41b, respectively, The first expansion / contraction part 212b contracts to be in an urging state, and the outer end part 211a of the first cylinder 211 and the inner end part 212a of the second cylinder 212 are constantly in contact with each other regardless of whether they contact the inspection point. The electrode part 41 is contacted. Further, the inner and outer second stretchable portions 211d and 212d to be arranged on the other side are in a waiting state for inspection in a natural length state, and these stretchable portions slide only during actual inspection. Become.
The above is the description of the inspection jig of the third embodiment.

  Next, the inspection jig according to the fourth embodiment will be described. FIG. 14 is a schematic cross-sectional view of a contact (fourth contact) according to the fourth embodiment of the present invention. FIG. 15 is an exploded cross-sectional view of the first cylinder, the second cylinder, and the third cylinder constituting the fourth contact, (a) showing the first cylinder, and (b) showing the second cylinder. (C) has shown the 3rd cylinder.

  The fourth contact 24 of the fourth embodiment includes a first cylinder 211, a second cylinder 212, and a third cylinder 223, and is similar to the second contact 22 of the second embodiment. . The difference between the fourth contactor 24 and the second contactor 22 is that each expansion / contraction part of the second contactor 22 is arranged at an adjacent position (see FIG. 6), whereas the fourth contactor is It does not have the elastic part arrange | positioned in the adjacent position.

  FIG. 16 is a cross-sectional view showing a state in which the fourth contact is attached to the holding body. FIG. 17 is a schematic configuration diagram of an inspection jig using a fourth contactor. As shown in FIG. 12, similarly to the second contact of the second embodiment, two different hole portions (first guide upper hole 34a and first guide hole 341) of the first plate member 34 are different. The fourth contact 24 is locked by the step between the third cylinder 223 and the first cylinder 211 of the fourth contact 24 by the one guide lower hole 34b).

  FIG. 17 is a schematic configuration diagram of an inspection jig using a fourth contactor. The inspection jig 1 ′ ″ according to the fourth embodiment is similar to the inspection jig 1 ′ according to the second embodiment when the fourth contactor 24 is attached to the holding body 3. It is inserted from the second guide hole 321 of the plate member 32 and guided to the first guide hole 341 of the first plate member 34. At this time, in the fourth contactor 24, the third cylindrical body 223 is locked to a boundary having a different diameter inside the first guide hole 341.

After the fourth contactor 24 is held by the holding body 3, the second plate member 32 is brought into contact with the connection electrode body 4 so that one end of the fourth contactor 24 is pressed against the electrode portion 41. At this time, since the first cylinder 211 and the second cylinder 212 of the fourth contactor 23 are pressed against the first electrode part 41a and the second electrode part 41b, respectively, the outer first expansion / contraction part 211b and the inner side The first expansion / contraction part 212b contracts to be in an urging state, and the outer end part 211a of the first cylinder 211 and the inner end part 212a of the second cylinder 212 are constantly in contact with each other regardless of whether they contact the inspection point. The electrode part 41 is contacted. Further, the inner and outer second stretchable portions 211d and 212d to be arranged on the other side are in a waiting state for inspection in a natural length state, and these stretchable portions slide only during actual inspection. Become.
The above is the description of the inspection jig of the fourth embodiment.

  The inspection jig according to the fifth embodiment will be described. FIG. 18 is a schematic cross-sectional view showing a state in which the contact (fifth contact 25) of the fifth embodiment of the present invention is held by the holding body. FIG. 19 shows an exploded cross-sectional view of the first cylinder and the second cylinder constituting the fifth contact, (a) showing the first cylinder, and (b) showing the second cylinder. . When the inspection jig (or fifth contactor 25) of the fifth embodiment and the inspection jig (or third contactor 23) of the third embodiment have the same configuration, the same reference numerals are used. And the description is omitted.

  The main feature of the inspection jig (not shown) of the fifth embodiment is that the outer first expansion / contraction part 211b and the outer second expansion / contraction part 211d of the first cylinder 211 of the fifth contactor 25 are the fifth contactor. It is that it is arranged on the outermost side among the 25 expansion / contraction parts, and that two inner first expansion / contraction parts and two inner second expansion / contraction parts of the second cylinder 212 are provided.

  The fifth contactor 25 includes a first cylinder 211 and a second cylinder 212. Since the basic configuration of the first cylinder 211 and the second cylinder 212 of the fifth contactor 25 is the same as that of the third contactor 23, a description thereof will be omitted and a different configuration will be described. The outer first stretchable portion 211b and the outer second stretchable portion 211d of the first cylindrical body 211 are, in plan view, the inner first stretchable portions 212b1, 212b2 and the inner second stretchable portions 212d1, 212d2 of the second cylindrical body 212, respectively. It arrange | positions in the position which is not adjacent (refer FIG. 18). In this manner, the respective expansion / contraction portions are arranged at positions that are not adjacent to each other along the major axis direction of the fifth contactor 25, so that even if the respective expansion / contraction portions slide, they do not contact each other.

  Although the 2nd cylinder 212 has an inner side 1st expansion-contraction part and an inside 2nd expansion-contraction part, respectively, in embodiment of this 5th contactor 25, an inner side 1st expansion / contraction part is made into two expansion-contraction parts 212b1, 212b2. The inner second elastic part is formed by two elastic parts 212d1, 212d2. In addition, the cylinder part for having a predetermined space | interval is formed between two expansion-contraction parts, and the insulation coating is formed in the outer periphery of this cylinder part. In this way, by forming a plurality of first stretchable parts and second stretchable parts, it is possible to suppress bending of the second cylindrical body 212 disposed inside.

In the fifth contactor 25, an insulating coating 211g is formed on the outer peripheral edges of the outer front end portion 211a, the outer intermediate portion 211c, and the outer rear end portion 211e. The insulating coating 211g formed on the periphery of the outer rear end 211e is formed in the first guide hole 341 of the first plate-like member 34 in the same manner as the third cylinder 223 of the inspection jig 1 ′ of the second embodiment. Locked.
The above is the description of the configuration of the fifth contact of the inspection jig of the fifth embodiment.

  The inspection jig of the sixth embodiment will be described. FIG. 19 is a schematic cross-sectional view of a contact (sixth contact) according to a sixth embodiment of the present invention.

  The sixth contact 26 of the sixth embodiment includes a first cylinder 211, a second cylinder 212, and a third cylinder 223, and is similar to the fourth contact 24 of the fourth embodiment. . The difference between the sixth contact 26 and the fourth contact 24 is that the inner first expansion / contraction part 212b and the inner second expansion / contraction part 212d formed on the second cylindrical body 212 of the sixth contact 26 each have two. It is formed by a stretchable part. In addition, each expansion-contraction part of the 6th contact 26 is set so that an expansion-contraction part may not be arrange | positioned similarly to the 5th contact 25. FIG.

In the sixth contact 26, the third cylindrical portion 223 is locked in the first guide hole 341 of the first plate member 34, thereby preventing the sixth contact 26 from coming out of the holding body 3.
The above is the description of the sixth contact used in the inspection jig of the sixth embodiment.

  In the present specification, the electrode portions 41 are arranged such that the end surfaces of the copper conductors are in contact with a part of each of the first cylinder and the second cylinder. It can also be formed and arranged to have the same end surface as the body.

  Further, the insulating coating 211g may be formed so as to cover the surface of the stretchable part except for the both ends. Furthermore, although both expansion-contraction parts described in drawing for demonstrating this invention are formed in the clockwise winding, it sets so that it may turn in the reverse direction with a 1st cylinder and a 2nd cylinder. You can also.

1 ... Inspection jig 2 ... Contact 211 ... First cylinder 212 ... Second cylinder 31 ... First plate-shaped part 311 ... First guide hole 32 ... Second plate-like member 321, second guide hole 41 ... electrode part

Claims (6)

An inspection jig for electrically connecting an inspection object having an inspection part to be inspected and an inspection device for inspecting an electrical characteristic of the inspection part,
A connection electrode body comprising a plurality of electrode portions electrically connected to the inspection device;
A conductive cylindrical first cylinder having one end pressed against the inspection portion and the other end pressed against the electrode portion;
An electrically conductive cylinder that is electrically non-contact with the first cylinder and is disposed substantially coaxially within the first cylinder, one end of which is in pressure contact with the inspection portion and the other end of which is in pressure contact with the electrode portion. A second cylindrical body,
A first plate member having a first guide hole for guiding one end of each of the first cylinder and the second cylinder to the inspection point;
A second plate having a second guide hole for guiding the other end of each of the first cylinder and the second cylinder to the electrode portion, and being arranged at a predetermined interval from the first plate member. A member,
The first cylindrical body and the second cylindrical body are provided with two expansion / contraction portions that extend and contract in the major axis direction formed by a spiral cutout portion of a cylindrical wall portion, via an intermediate portion,
An inspection jig, wherein the first cylinder and the second cylinder are fixed to each other at an intermediate portion thereof.   The inspection jig according to claim 1, wherein the first cylinder and the second cylinder are formed of nickel or a nickel alloy.   The shape of the first cylinder is formed so as to be substantially symmetrical with respect to the center of the first cylinder, and the shape of the first cylinder is substantially symmetrical with respect to the center of the second cylinder. The inspection jig according to claim 1, wherein the inspection jig is formed in a shape to become. The inspection jig has a third plate-like member having a third guide hole that guides through the intermediate portion,
The third plate-like member includes three plate portions arranged in parallel, and one plate portion arranged in the middle is displaced in a plane direction with respect to the other plate portion, and the third guide hole is formed. The inspection jig according to claim 1, wherein the intermediate portion is sandwiched by being arranged at a position shifted from the alignment position. A cylindrical third cylinder having an inner diameter larger than the outer diameter of the first cylinder is formed,
The first cylinder is accommodated in the third cylinder approximately coaxially with the first cylinder,
The first guide hole is
A first guide upper hole having a diameter larger than the outer diameter of the first cylinder and smaller than the outer diameter of the third cylinder;
The inspection treatment according to any one of claims 1 to 3, further comprising a first guide lower hole connected in communication with the first guide upper hole and having a diameter larger than an outer diameter of the third cylindrical body. Ingredients.   6. The inspection according to claim 1, wherein the two expansion / contraction portions of the first cylinder and the two expansion / contraction portions of the second cylinder are not arranged at adjacent positions in a plan view. jig.

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