JP2008032667A - Tool for substrate inspection, and electrode structure of it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrode structure stable in contact resistance even if the using frequency is increased. <P>SOLUTION: The tool for substrate inspection obtains electric conduction between a substrate inspection device body and a plurality of inspection points disposed in a wiring pattern of a substrate to be inspected in order to inspect the electric characteristic of the substrate to be inspected. The tool comprises a bar-like contact group including conductive contacts where both ends become conductible by electric contact and one end is pressure-connected to one of the plurality of substrate inspection points, a holding body for holding the contact group, and a connection electrode connected to the substrate inspection device body having a plurality of electrodes arranged facedly to other ends of respective contacts of the contact group. The electrode comprises a linear core having conductivity, and a conductive side section for covering the outer periphery of the core. The side section is made of material more excellent in abrasion resistance than that of the core. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a substrate inspection jig and a substrate inspection jig electrode part structure, and more particularly, a substrate inspection jig and a substrate inspection having an electrode part structure with stable contact resistance even when the number of uses increases. The present invention relates to an electrode part structure of a jig.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In this specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, a wiring pattern provided on a circuit board must accurately transmit an electric signal to an electric / electronic component such as a semiconductor or a resistor such as an IC mounted on the circuit board. A printed wiring board before mounting, a circuit wiring board on which a wiring pattern is formed on a liquid crystal display or a plasma display, or a wiring pattern formed on a substrate such as a semiconductor wafer is provided on a wiring pattern to be inspected The resistance value between the inspection points was measured, and the quality was judged.

  In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such continuity and short-circuit inspection, measurement terminals are brought into contact with inspection points provided at two locations of the wiring pattern to be inspected, and a predetermined level of measurement current is passed between the measurement terminals. The voltage value between the measurement terminals is measured, and the pass / fail is determined by comparing this voltage value with a predetermined threshold value.

However, in the board inspection jig used in such a method, the measurement terminals brought into contact with each of the two inspection points of the wiring pattern are commonly used for supplying the measurement current and measuring the voltage. In this case, the contact resistance between the measurement terminal and the inspection point affects the measurement voltage, and the measurement accuracy of the resistance value is lowered and the reliability of the inspection result is lowered.
Particularly, in recent years, the miniaturization of the wiring pattern provided on the circuit board has progressed, and the resistance value of the wiring pattern has decreased, and the influence of the contact resistance on the measured value has been a big problem. .

  For example, Patent Document 1 discloses a substrate inspection jig for inspecting electrical characteristics of an inspection object, and a contact pin (contactor) and an electrode portion in conductive contact with the contact pin are inserted into the contact pin. A technique is disclosed that is formed to exist in the holding hole.

Japanese Patent Laid-Open No. 2003-222637

  However, the electrode part disclosed in Patent Document 1 wears the contact surface every time it comes into contact with the contact, and has a problem that a stable contact state cannot be maintained due to wear when used for a long period of time. It was.

  This invention is made | formed in view of such a situation, and provides the electrode part structure which can maintain a favorable contact state even when it is a case where it is used for a long period of time.

According to the first aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, to obtain electrical continuity between the substrate inspection apparatus main body and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected. The substrate inspection jig is a contact having an end portion that can be electrically connected to both ends by electrical contact, and one end portion of the substrate inspection jig includes a plurality of the substrate inspection objects. A contact-shaped contact made of a conductive rod-shaped contact, which is in pressure contact with one of the points, a holding member for holding the contact, and the other end of each contact of the contact And a connecting electrode body connected to the substrate inspection apparatus main body including a plurality of electrode portions disposed opposite to each other, the electrode portion including a linear core portion having conductivity, and the core portion It has a conductive side that covers the outer periphery, and the side is more resistant to wear than the core. To provide a substrate inspection tool, characterized in that is formed by materials with excellent.
The invention according to claim 2 provides the substrate inspection jig according to claim 1, wherein the side portion has a hardness higher than the hardness of the core portion.
The invention according to claim 3 is characterized in that the core part is formed in a column, the side part is formed in a cylinder, and the core part and the side part are arranged concentrically. The board inspection jig described in 1. is provided.
According to a fourth aspect of the present invention, the end surface of the core portion is formed in a circular shape, the end surface of the side portion is formed in a circular shape concentric with the core portion, and the inner diameter of the side portion is the contactor. The substrate inspection jig according to claim 1, wherein the substrate inspection jig is formed smaller than the outer diameter of the substrate inspection jig.
According to a fifth aspect of the present invention, there is provided the substrate inspection jig according to any one of the first to fourth aspects, wherein the other end of the contact is formed in a curved surface shape.
According to a sixth aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, to obtain electrical continuity between the substrate inspection apparatus main body and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected. The electrode part structure of the substrate inspection jig that enables electrical conduction through contact with a plurality of contacts used in the electrode, wherein the electrode part includes a linear core part having conductivity and the core An electrode part structure for a substrate inspection jig having a conductive side part covering the outer periphery of the part, wherein the side part is formed of a material having higher wear resistance than the core part I will provide a.
By providing these inventions, the above problems are solved.

According to the first aspect of the present invention, the substrate inspection jig is a contact having end portions for electrical conduction at both ends, and one end portion thereof is one of the plurality of substrate inspection points. A bar-shaped contact that is in pressure contact with each other, a contact group comprising the contact group, a holding body that holds the contact group, and the other end of each contact of the contact group are arranged to face each other. A connecting electrode body connected to the main body of the substrate inspection apparatus having a plurality of electrode parts, and the electrode part is a conductive linear core part and a conductive side part covering the outer periphery of the core part Since the side part is made of a material that has better wear resistance than the core part, the contact state between the electrode part and the contactor should be kept in a good state even when used for a long time. Can do.
For this reason, the durability of the substrate inspection jig can be improved by using the electrode structure of the substrate inspection jig.
According to the invention described in claim 2, since the side portion is formed of the material having higher hardness than the core portion, the durability of the substrate inspection jig can be further improved.
According to the invention of claim 3, since the core part is formed in a column, the side part is formed in a cylinder, and the core part and the side part are arranged concentrically, the contactor and the electrode after a long period of use have passed. The contact of the part can be brought into a stable contact state.
According to invention of Claim 4, since the internal diameter of the side part is formed smaller than the outer diameter of the said contactor, providing the stability of the stable contact state after a long time use progress further. Can do.
According to the fifth aspect of the present invention, since the other end of the contactor is formed in a curved surface, the contactor simultaneously contacts the core part and the side part of the electrode part to provide a stable contact state. can do.
According to the invention described in claim 6, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity between the substrate inspection apparatus main body and the plurality of inspection points provided in the wiring pattern of the substrate to be inspected is achieved. An electrode part structure of a substrate inspection jig that enables electrical conduction through contact with a plurality of contacts used for obtaining a linear core part having conductivity and the core part It consists of a conductive side that covers the outer periphery of the electrode, and the side is made of a material that is more resistant to wear than the core. The state can be maintained in a good state.

The best mode for carrying out the present invention will be described.
FIG. 1 schematically shows the configuration of a substrate inspection jig according to the present invention. In FIG. 1, a plurality of contacts 2, a holding body 3 that holds the contacts 2 in a multi-needle shape, and an electrode portion 41 that supports the holding body 3 and is brought into conduction with the contact 2. The wire electrode 51 which connects the connection electrode body 4, the test | inspection signal process part 5 which processes the detected electrical signal, and the contactor 2 test | inspection signal process part 5 is shown.
The contact 2 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected. The connection electrode body 4 plays a role of pitch conversion that enables the contact 2 to increase the pitch between inspection points provided on the substrate to be inspected and to conduct contact with the inspection signal processing unit 5.
The connection electrode body 4 has an electrode portion 41 that is electrically connected to the contact 2 on the arrangement side of the holding body 3.
The present invention proposes an electrode part having high contact stability even when used for a long period of time.

A substrate inspection jig 1 according to an embodiment of the present invention includes a substrate inspection jig head 11. The substrate inspection jig head 11 has a contact 2 and a holder 3.
FIG. 2 shows an embodiment of a jig head for substrate inspection, where (a) shows a perspective view and (b) shows a side view. As shown in FIG. 2, the substrate inspection jig head 11 holds a plurality of contacts 2 by a holding body 3.

One end 2 a of the contact 2 is pressed against one of the plurality of inspection points, and the other end 2 b is pressed against the electrode portion 41. Since the end portions 2a and 2b are pressed against the inspection point and the electrode portion in this way, the inspection point and the electrode portion can be electrically connected via the contactor 2.
The contact 2 is formed in a bar shape having conductivity. As shown in FIG. 2A, the contact 2 is arranged in a multi-needle shape, and an outer periphery thereof is covered with an insulating layer. This insulating coating covers a portion excluding both ends of the rod-like conductive portion.
Furthermore, the contact 2 has flexibility and elasticity. For this reason, when the contact 2 is pressed against the inspection point and the electrode portion, the contact 2 is bent and bent, and as a result, the contact 2 presses the inspection point and the electrode portion. become.
As described above, the contact 2 is formed on the surface with a conductive portion that is in conductive contact with the inspection point and the electrode portion, respectively, and an insulating portion that prevents a short circuit between the other contacts. The boundary between the conductive portion and the insulating portion can be disposed inside a holding body, which will be described later, or between the two holding bodies.
In this boundary portion, a step is generated by the insulating portion and the conductive portion, so that the diameter of the step portion and the guide hole of the holding body can be used to prevent the separation.

  It is preferable that both ends or the other end 2b of the contactor 2 are formed with curved surfaces such as hemispheres, for example. This is because by forming in this way, it is possible to make contact with the inspection point or the contact surface of the electrode portion with high positional accuracy. Although details will be described later, it is possible to reliably and stably contact the electrode portion 41 by using the curved surface (spherical surface) as described above.

In the jig head 11 shown in FIG. 2, the holding body 3 is formed by an upper plate portion 31 and a lower plate portion 32. The upper plate portion 31 and the lower plate portion 32 are arranged with a predetermined interval so that the contact 2 can be bent in the space of both plate portions.
The upper plate portion 31 and the lower plate portion 32 are respectively formed with guide holes for guiding the target contact 2, and the end 2 a of the contact 2 is connected to the inspection point by the guide hole of the upper plate portion 31. The other end 2 b of the contact 2 is guided to the electrode portion 41 through the guide hole of the lower plate portion 32.
In the jig head 11 shown in FIG. 2B, the contact 2 is projected from the upper plate portion 31 and the lower plate portion 32 by a predetermined length.
The protruding predetermined length is appropriately adjusted by the designer according to the degree of deflection of the contact 2.
Although the upper plate portion 31 and the lower plate portion 32 of the jig head 11 shown in FIG. 2 are each formed by two plate members, the number of the plate is not particularly limited.
The substrate inspection jig head 11 is not limited to the above-described configuration, and is not particularly limited as long as it can hold the contact 2 and can be brought into conductive contact with the electrode portion 41. Absent.

The connection electrode body 4 includes a plurality of electrode portions 41 disposed to face the other end 2b of each contact 2 of the plurality of contacts 2, and supports the substrate inspection jig head 11.
FIG. 3 shows a part of one embodiment of the connection electrode body 4, FIG. 3A shows a perspective view of the surface of the connection electrode body 4, and FIG. 3B shows a part of the connection electrode body 4. A side section is shown.
As shown in FIG. 3A, the connection electrode body 4 includes an electrode portion 41 that is in contact with the contact 2 and is conductive, and a support plate 42 that supports the jig head 11. Moreover, the contact surface which contacts the contact 2 of the some electrode part 41 is formed in the connection electrode body 4 on the surface. Electrical contact is made when the contact surface of the electrode portion 41 and the contact 2 come into contact with each other.

The electrode portion 41 includes a linear core portion 412 having conductivity and a conductive side portion 411 that covers the outer periphery of the core portion 412.
The core portion 412 uses a linear conductor such as a copper wire, and the end portion of the wire cable 51 described above is formed by extending the core portion 412.
The side portion 411 is disposed so as to cover the outer periphery of the core portion 412. For example, a cylindrical member (cylindrical member) having an inner diameter substantially the same as or slightly larger than the outer diameter of the core portion 412 is used. ) May be accommodated with a cylindrical core portion 412. The core portion 412 and the side portion 411 are both made of a conductive material and are in contact with each other to be in an electrically conductive state.
For this reason, the side part 411 and the core part 412 are arrange | positioned concentrically. As a result, the contact surface of the electrode part 41 is formed in a concentric circle in which the core part 412 is arranged on the inner side and the side part 411 is arranged on the outer side.
Since the electrode part 41 is formed so as to be flush with the surface of the connection electrode body 4, the core part 412 and the side part 411 are also formed so as to be flush with the surface of the connection electrode body 4. It will be.

The side portion 411 and the core portion 412 are formed of a conductive material, but the side portion 411 is formed of a material that is more excellent in wear resistance than the core portion 412.
For this reason, when the contact 2 repeatedly contacts, the core portion 412 is worn and worn away as compared with the side portion 411. As a result, the core portion 412 has a shape that is recessed from the surface of the electrode portion 41 rather than the side portion 411.

The side part 411 and the core part 412 may have a hardness that the hardness of the side part 411 is higher than the hardness of the core part 412.
For this reason, when the contact 2 comes into contact with the contact surface of the electrode portion 41 and wears, the core portion 412 disposed inside the surface is worn away. For this reason, the contact surface of the electrode part 41 becomes a concave shape. For this reason, the electrode part 41 becomes a shape which has a hollow.
As a result, when the contact 2 comes into contact with the contact surface, the tip of the contact 2 comes into contact with the core portion 412 having a hollow shape, and the outer periphery of the tip of the contact 2 comes into contact with the side portion 411. Become. For this reason, since the contact 2 and the electrode part 41 will contact the core part 412 and / or the side part 411, the stable contact state can be provided.
In addition, the contact 2 is used by being bent in a certain direction at the time of use, but when the contact 2 is bent, it is disposed at a predetermined angle with respect to the contact surface. The side part 411 can prevent the contact 2 from sliding.
Examples of materials having excellent wear resistance include nickel (Ni), ruthenium (Ru), platinum (Pt), chromium (Cr) and rhodium (Rh). Excellent wear resistance.
As described above, the material of the side portion 411 and the core portion 412 is that the hardness of the side portion 411 is higher than the hardness of the core portion 412. For example, as a combination thereof, nickel (Ni) and copper ( Cu), rhodium (Rh) and copper (Cu), nickel (Ni) and brass can be exemplified.

The core portion 412 and the side portion 411 have an outer diameter r1 and an outer diameter r2, respectively. These outer diameters are not particularly limited as long as they can be reliably connected to the contact 2, but are set so that the contact 2 can simultaneously contact the core portion 412 and the side portion 411. For example, the outer diameter r1 of the core part 412 is shorter than the outer diameter of the conductive part of the contactor 2, or the outer diameter r2 of the side part 411 is substantially the same or shorter than the outer diameter of the contactor 2. It is preferable to form it as follows.
By forming in this way, the bottom surface of the contact 2 comes into contact with the core portion 412, the side surface of the contact 2 comes into contact with the side portion 411, and the contact 2 comes into contact with the core portion 412 and the side portion 411. Will do.
Since the outer diameter of the contact 2 is formed to be 30 to 110 μm, for example, the outer diameter of the core portion 412 is formed to 20 to 100 μm, and the outer diameter of the side portion 411 is formed to 40 to 120 μm.

In the embodiment shown in FIG. 3B, the support 42 is formed of two upper plate members (upper plate member 421 and lower plate member 422).
The upper plate member 421 is a plate-like member that forms the surface side of the connection electrode body 4, and the upper plate member 421 is formed with two holes having different diameters. The small and large holes (small holes, large holes) having different diameters are formed such that the small hole 423 has a diameter slightly larger than the outer diameter of the side portion 411 of the electrode portion 41. 41 contact surfaces are guided.
The large hole 424 can be used as a space for fixing the electrode part 41. For example, in FIG. 3B, in order to fix the electrode part 41, the electrode part 41 is arranged and then fixed with the adhesive 43. In this case, the adhesive 43 covers the outer periphery of the electrode portion 41. However, excess adhesive is accumulated in the large hole 424, and the space can be used without waste.
In FIG. 3B, the upper plate member 421 and the lower plate member 422 are arranged with a predetermined space, but may be arranged closely. When arranged with a space as shown in FIG. 3B, the extra adhesive 43 as described above can be absorbed by using this space.

The lower plate member 422 is formed with holes (small holes 425, large holes 426) having two different diameters, similar to the upper plate member 421. The lower plate member 422 is arranged so as to be aligned with the hole of the upper plate member 421.
For this reason, as shown in FIG. 3B, the large hole 424 of the upper plate member 421 and the large hole 426 of the lower plate member 422 are arranged to face each other, and a space as described above is formed. It will be.
The small hole 425 of the lower plate member 422 guides the position of the electrode part 41 and the line part extending from the core part 412. The diameter of the small hole 425 of the lower plate member 422 is preferably slightly larger than the outer diameter of the side portion 411. This is because the position accuracy of the electrode part 41 can be improved by forming in this way.

FIG. 4 is a cross-sectional view showing a usage state of the electrode portion. FIG. 4A shows a case where the number of uses is not large (just after use), and in FIG. 4B, the number of uses increases and the core portion 412 is worn and worn away. Shows the state.
In the substrate inspection jig 1 according to the present invention, the electrode portion 41 is initially flush with the surface of the connection electrode body 4 as shown in FIG.
On the other hand, when the substrate inspection jig is used, the contact 2 and the contact surface of the electrode portion 41 come into contact with each other many times, and the core portion 412 of the electrode portion 41 is worn as shown in FIG. Will wear out.
At this time, when the contact 2 comes into contact with the electrode part 41, the contact 2 comes into contact with the core part 412 and / or the side part 411. As a result, the contact 2 is surely in contact with the electrode part 41 as compared with a normal electrode part.
The above is the description of the configuration of the substrate inspection jig according to the present invention.

A method for manufacturing the connection electrode body 4 of the substrate inspection jig 1 according to the present invention will be described.
The connection electrode body 4 of the substrate inspection jig 1 of the present invention can be manufactured by the following method, but this method is merely an embodiment, and may be manufactured by other methods. It can also be manufactured by changing the order of the steps described here.
First, the substrate inspection jig head 11 is manufactured. At this time, the board inspection jig head 11 determines the number and arrangement position of the contacts 2 to be held based on the inspection points in the wiring pattern of the board to be inspected.

When the number and arrangement position of the contacts 2 of the board inspection jig head 11 are determined, the number and position of the electrode portions 41 of the connection electrode body 4 are determined according to this arrangement.
When the number and position of the electrode portions 41 are determined, two small holes and large holes having different diameters are formed in the upper plate member 421 and the lower plate member 422, which are the support plates 42, according to the number and position, respectively. Is done.
When an upper plate member 421 and a lower plate member 422 each having a small hole and a large hole are prepared, first, as shown in FIG. 5A, the upper plate member 421 is arranged and the small hole 423 is moved to. The electrode part 41 is inserted. At this time, the inserted electrode part 41 is formed such that the core part 412 and the side part 411 have a length equal to or longer than a predetermined length. The predetermined length is prepared to be longer than at least the thickness of the upper plate member 421 and protrudes from the upper surface (small hole 423) of the upper plate member 421.

Next, the lower plate member 422 is disposed at a corresponding position as shown in FIG. For this reason, the electrode part 41 is inserted through the holes of the upper plate member 421 and the lower plate member 422.
In addition, after laminating | stacking the upper board member 421 and the lower board member 422 previously, the electrode part 41 may be penetrated to the hole of each member.

When the electrode portion 41 is inserted into the holes of the upper plate member 421 and the lower plate member 422, the adhesive 43 is filled from the lower plate member 422 side (see FIG. 5C). The electrode portion 41 is bonded to the upper plate member 421 and the lower plate member 422 by the adhesive 43.
In this case, the excess adhesive 43 is accumulated in a space formed between the upper plate member 421 and the lower plate member 422, so that the upper plate member 421 and the lower plate member 422 are displaced by the adhesive 43. It is possible to prevent harassment.

When the electrode part 41 is fixed to the upper plate member 421 and the lower plate member 422, as shown in FIG. 5 (c), the electrode part 41 protrudes from the surface side of the upper plate member 421. The protruding portion is removed so as to be flush with the surface of the upper plate member 421 of the electrode body 4 (see FIG. 5D).
In this way, the connection electrode body of the board inspection jig is formed.

It is the schematic which shows the structure of the jig | tool for board | substrate inspection which concerns on this invention. 1 shows an embodiment of a jig head for substrate inspection according to the present invention. It is the schematic which shows the connection electrode body of the jig | tool for board | substrate inspection which concerns on this invention. It is sectional drawing which shows the use condition of an electrode part. The process of manufacturing the connection electrode body of the jig | tool for board | substrate inspection which concerns on this invention is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ...... Jig for substrate inspection 2 ... Contact 3 ... Holding body 4 ... Connection electrode body 41 ... Electrode part 411 ... Side part 412, ... Core part

Claims (6)

A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus main body and a plurality of inspection points provided on a wiring pattern of the substrate to be inspected in order to inspect the electrical characteristics of the substrate to be inspected. And
The substrate inspection jig is
A contact having an end that can be electrically connected to both ends by electrical contact, one end of which is pressed against one of the plurality of substrate inspection points, each having a conductive rod-like contact A contact group of children,
A holding body for holding the contact group;
It is constituted by a connection electrode body connected to the substrate inspection apparatus main body comprising a plurality of electrode portions arranged to face the other end of each contact of the contact group,
The electrode part has a linear core part having conductivity and a conductive side part covering the outer periphery of the core part,
The substrate inspection jig, wherein the side portion is formed of a material having higher wear resistance than the core portion.   The substrate inspection jig according to claim 1, wherein the side portion has a hardness higher than a hardness of the core portion.   The substrate inspection jig according to claim 1, wherein the core is formed in a column, the side is formed in a cylinder, and the core and the side are arranged concentrically. . The end surface of the core is formed in a circle, the end surface of the side is formed in a circle that is concentric with the core,
The substrate inspection jig according to claim 1, wherein an inner diameter of the side portion is formed smaller than an outer diameter of the contact.   5. The substrate inspection jig according to claim 1, wherein the other end of the contact is formed in a curved shape. A plurality of contacts used to obtain electrical continuity between a substrate inspection apparatus main body and a plurality of inspection points provided on a wiring pattern of the substrate to be inspected in order to inspect the electrical characteristics of the substrate to be inspected; The electrode part structure of the substrate inspection jig that enables electrical conduction by contact,
The electrode part has a linear core part having conductivity and a conductive side part covering the outer periphery of the core part,
The electrode part structure for a substrate inspection jig, wherein the side part is formed of a material having higher wear resistance than the core part.

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