JP7114866B2 - Contact terminal, inspection jig, and inspection device - Google Patents

Description

The present invention relates to a contact terminal used for inspection of an object to be inspected, an inspection jig for bringing the contact terminal into contact with the object to be inspected, and an inspection apparatus provided with the inspection jig.

Conventionally, a contact terminal for an inspection device in which a cylindrical body (cylindrical member) having a spring portion formed at an intermediate position and a cylindrical central conductor (bar-shaped member) inserted therein, and an inspection jig using this contact terminal is known (see, for example, Patent Document 1). In the contact terminal, the main body of the central conductor is welded or crimped to the vicinity of one end of the tubular body, with the tip of the central conductor protruding from the tubular body. As a result, when the other end of the cylindrical body comes into contact with the electrode section and the tip of the central conductor comes into contact with the object to be inspected, the other end of the cylindrical body is moved according to the elastic restoring force of the spring section. is urged toward the electrode portion, and the tip portion of the center conductor is urged toward the test object, so that the contact state of the contact terminal with respect to the electrode portion and the test object is stabilized.

JP 2013-53931 A

By the way, in the inspection jig described above, a large number of extremely thin contact terminals are installed, and central conductors (small-diameter conductive portions) constituting the contact terminals are welded or crimped to a cylindrical body having a spring portion. Since it is configured to be fixed by, for example, fixing, this fixing work is extremely complicated. That is, after the user inserts the main body of the center conductor into an ultra-thin cylindrical body having a diameter of 1 mm or less, for example, the user performs a troublesome fixation work such as compressing and crimping the shaft of the cylindrical body. Therefore, it was difficult to manufacture the contact terminals easily and properly.

An object of the present invention is to provide a contact terminal, an inspection jig, and an inspection apparatus that can be manufactured easily and properly.

A contact terminal according to the present invention includes a tubular body made of a conductive material and a central conductor made of a conductive material and shaped like a bar. It has a rod-shaped main body that is inserted into the body, and a tip end side connection portion that is installed in a state of protruding outside the cylindrical body, and the base end portion of the tip end side connection portion is provided with the above-described A wide portion having a width dimension larger than the inner diameter of the cylindrical body is formed, and a pair of left and right slits are formed at one end of the cylindrical body, and both side portions of the wide portion are inserted into the slits. there is

According to this configuration, the user simply inserts the rod-shaped main body into the tubular body and inserts both side portions of the wide portion into the slits of the tubular body to integrally connect the tubular body and the central conductor. can do. Therefore, the contact terminal can be easily and properly manufactured without complicated fixing work such as welding or crimping the center conductor to the ultra-thin cylindrical body.

Moreover, it is preferable that the cylindrical body has a spiral spring portion that expands and contracts in its axial direction.

According to this configuration, when a substrate or the like is inspected using the contact terminal, by elastically deforming the spring portion of the tubular body, one end portion of the contact terminal is moved to the inspection target according to its restoring force. It can be brought into pressure contact with the point to be inspected with proper pressure. Moreover, there is an advantage that the other end of the contact terminal can be pressed against the electrode with a proper pressure.

Further, it is preferable that a cutout portion is provided at the proximal end portion of the slit so as to increase the width of the slit.

According to this configuration, when the user inserts the wide portion of the central conductor into the slit, the peripheral wall portion of the cylindrical body is pivotally displaced from the notch portion as a starting point to widen the one end portion of the cylindrical body. , there is an advantage that the insertion operation can be easily performed.

Further, the slit may have a tapered portion that is inclined so that the width of the slit increases toward one end of the cylindrical body.

According to this configuration, when the user inserts the wide portion of the center conductor into the slit, the user can smoothly insert the wide portion into the slit by using the tapered portion as a guide surface. Moreover, by setting the width of the slit at the proximal end of the tapered portion to a value smaller than the plate thickness of the wide portion, when the rod-like main body is inserted into the cylindrical body, both sides of the wide portion are tapered. By firmly crimping the base end of the shaped portion, the central conductor and the cylindrical body can be brought into electrical contact with each other.

Further, it is preferable that the distal end portion of the slit is provided with a retaining portion formed to have a smaller slit width than the proximal end portion of the slit.

According to this configuration, by inserting both side portions of the wide portion into the slit, the state in which the cylindrical body and the central conductor are integrally connected can be stably maintained with a simple configuration. There is an advantage.

Further, a tapered portion is formed on the distal end side of the slit so that the slit width increases toward one end of the cylindrical body, and the slit width is constant on the proximal end side of the slit. may be formed, and between the tapered portion and the slit main body, a retaining portion having a slit width smaller than that of the slit main body may be formed.

According to this configuration, when the user inserts the wide portion of the center conductor into the slit, the user can smoothly perform the insertion operation by using the tapered portion as a guide surface. Further, by inserting both side portions of the wide width portion into the slit main body over the retaining portion, there is an advantage that the state of connection between the cylindrical body and the central conductor is stably maintained.

Moreover, the inspection jig according to the present invention includes the contact terminal described above and a support member for supporting the contact terminal.

According to this configuration, it is possible to easily and properly manufacture an inspection jig used for inspection of an object to be inspected such as a semiconductor element.

Further, an inspection apparatus according to the present invention performs an inspection of an object to be inspected on the basis of an electrical signal obtained by bringing the contact terminal into contact with a point to be inspected provided on the object to be inspected. and a processing unit.

According to this configuration, it is possible to easily and properly manufacture an inspection device used for inspection of an inspection target.

The contact terminal, inspection jig, and inspection device configured as described above can be manufactured easily and appropriately.

1 is a perspective view schematically showing the configuration of a board inspection apparatus provided with contact terminals and inspection jigs according to an embodiment of the present invention; FIG. 3 is a perspective view showing another example of an inspection unit provided in the inspection apparatus shown in FIG. 1; FIG. FIG. 3 is a schematic cross-sectional view showing an example of the configuration of the inspection jig shown in FIGS. 1 and 2; FIG. It is a perspective view which shows the concrete structure of a contact terminal. FIG. 4 is a side view showing a configuration in which the contact terminal is disassembled into a cylindrical body and a central conductor; FIG. 6 is a plan view showing the structure of a wide portion provided in the central conductor shown in FIG. 5; FIG. 5 is a cross-sectional view showing an inspection state in which the end of the contact terminal is pressed against the inspection target; It is a side view which shows the 1st modification of the contact terminal which concerns on this invention. It is a side view which shows the 2nd modification of the contact terminal which concerns on this invention. It is a side view which shows the 3rd modification of the contact terminal which concerns on this invention. FIG. 11 is a side view showing a fourth modified example of the contact terminal according to the present invention; It is a side view which shows the fifth modification of the contact terminal which concerns on this invention.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment according to the present invention will be described below with reference to the drawings. It should be noted that the configurations with the same reference numerals in each figure indicate the same configuration, and the description thereof will be omitted.

FIG. 1 is a conceptual diagram schematically showing the configuration of a substrate inspection apparatus 1 having contact terminals and inspection jigs according to an embodiment of the present invention. The board inspection device 1 corresponds to an example of an inspection device. A substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate 101, which is an example of an object to be inspected.

The substrate 101 may be various substrates such as a printed wiring board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, a package substrate for a semiconductor package, or a film carrier. The object to be inspected is not limited to the substrate, but may be an electronic component such as a semiconductor element (IC: Integrated Circuit), or any other object that is electrically inspected.

The substrate inspection apparatus 1 shown in FIG. 1 includes inspection units 4U and 4D, a substrate fixing device 6, and an inspection processing unit 8. The board fixing device 6 is configured to fix the board 101 to be inspected at a predetermined position. The inspection units 4U and 4D are provided with inspection jigs 3U and 3D. The inspection units 4U and 4D support the inspection jigs 3U and 3D so as to be movable in three axial directions of X, Y and Z, which are orthogonal to each other, by a drive mechanism (not shown). It is rotatably supported around the Z axis.

The inspection unit 4U is located above the substrate 101 fixed to the substrate fixing device 6. As shown in FIG. The inspection unit 4D is positioned below the substrate 101 fixed to the substrate fixing device 6. As shown in FIG. Inspection jigs 3U and 3D for inspecting circuit patterns formed on the substrate 101 are detachably arranged in the inspection units 4U and 4D. The inspection units 4U and 4D have connectors 41 that are connected to the inspection jigs 3U and 3D, respectively. Hereinafter, the inspection units 4U and 4D are collectively referred to as an inspection unit 4. FIG.

The inspection jigs 3U and 3D each include a plurality of probes (contact terminals) Pr, a support member 31 that supports each probe Pr, and a base plate 321. As shown in FIG. The probe Pr corresponds to an example of a contact terminal. The base plate 321 is provided with electrodes, which will be described later, which are in contact with and conduct with the base ends of the probes Pr. The inspection units 4U and 4D have a connection circuit (not shown) that electrically connects the rear end of each probe Pr to the inspection processing unit 8 via each electrode provided on the base plate 321 and switches the connection. I have.

The probe Pr has a generally rod-like shape as a whole, and details of its specific configuration will be described later. A plurality of through holes are formed in the support member 31 to support each probe Pr. Each through-hole is arranged so as to correspond to the position of a point to be inspected set on the wiring pattern of the substrate 101 to be inspected, so that the tip of each probe Pr comes into contact with the point to be inspected on the substrate 101. is configured to For example, a plurality of probes Pr are arranged so as to correspond to grid intersection positions. The directions corresponding to the crosspieces of the grid are oriented so as to coincide with the mutually orthogonal X-axis direction and Y-axis direction. The points to be inspected are, for example, solder bumps on the substrate 101, wiring patterns, connection terminals, and the like.

The inspection jigs 3U and 3D are configured in the same manner as each other except that the arrangement of the probes Pr is different and the mounting direction to the inspection units 4U and 4D is upside down. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as the inspection jig 3. FIG. The inspection jig 3 is configured to be replaceable according to the type of the substrate 101 to be inspected.

The inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, a microcomputer, and the like. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection units 4U and 4D, and brings each probe Pr into contact with each point to be inspected on the substrate 101 . Thereby, each point to be inspected and the inspection processing section 8 are electrically connected. In this state, the inspection processing unit 8 supplies current or voltage for inspection to each point to be inspected on the substrate 101 via each probe Pr of the inspection jig 3, and the voltage signal or current obtained from each probe Pr Based on the signal, the substrate 101 is inspected for, for example, disconnection or short circuit of the circuit pattern. Alternatively, the inspection processing unit 8 may measure the impedance of the inspection target based on the voltage signal or current signal obtained from each probe Pr by supplying alternating current or voltage to each inspection point. good.

FIG. 2 is a perspective view showing another example of the inspection section 4 provided in the board inspection apparatus 1 shown in FIG. The inspection unit 4 a shown in FIG. 2 is constructed by incorporating the inspection jig 3 into a so-called IC socket 35 . The inspection unit 4 a does not have a driving mechanism like the inspection unit 4 , and is configured such that the probes Pr come into contact with IC pins, bumps, electrodes, or the like attached to the IC socket 35 . By providing the inspection unit 4a in place of the inspection units 4U and 4D shown in FIG. 1, it is possible to configure the inspection apparatus as an IC inspection apparatus, with the inspection target being, for example, a semiconductor element (IC).

FIG. 3 is a cross-sectional view showing an example of the configuration of the inspection jig 3 having the support member 31 and the base plate 321 shown in FIG. The support member 31 shown in FIG. 3 is configured by stacking plate-like support plates 31a, 31b, and 31c, for example. The support plate 31a located on the upper side in FIG. 3 is arranged on the front end side of the support member 31, and the support plate 31c located on the lower side in FIG. A plurality of through holes H are formed through the support plates 31a, 31b, and 31c.

The support plate 31b and the support plate 31c are formed with through-hole portions Ha each having a predetermined diameter. In the support plate 31a, a small-diameter portion Hb, which is a through hole having a diameter smaller than that of the insertion hole portion Ha, is formed at a portion facing a point to be inspected of the substrate 101 to be inspected. The small diameter portion Hb of the support plate 31a and the insertion hole portion Ha of the support plate 31b and the support plate 31c are communicated with each other to form a through hole H that serves as an installation portion for the probe Pr.

Note that the support member 31 is not limited to the example in which the plate-shaped support plates 31a, 31b, and 31c are stacked, and for example, a through hole H formed by a small diameter portion Hb and an insertion hole portion Ha is provided in an integrated member. It may be configured as follows. Further, instead of stacking the support plates 31b and 31c of the support member 31, the support plate 31b and the support plate 31c may be separated from each other and connected by, for example, a column.

A base plate 321 made of, for example, an insulating resin material is attached to the rear end side of the support plate 31c. The base plate 321 closes the rear end side opening of the through hole H, that is, the rear end surface of the insertion hole portion Ha. It is A wiring 34 is attached to the base plate 321 so as to pass through the base plate 321 at a position facing the rear end opening of the through hole H. As shown in FIG. The front surface of the base plate 321 facing the support plate 31c and the end surface of the wiring 34 are set to be flush with each other. The end face of this wiring 34 is used as an electrode 34a.

The probes Pr inserted into the through holes H of the support member 31 and supported are composed of a cylindrical body Pa made of a material having conductivity and a rod having a circular cross section made of a material having conductivity. and a central conductor Pb.

FIG. 4 is a perspective view showing a specific configuration of a contact terminal comprising a probe Pr, FIG. 5 is a side view showing the probe Pr disassembled into a cylindrical body Pa and a central conductor Pb, and FIG. , and a plan view showing a specific structure of a wide portion Pb3 provided in a central conductor Pb.

Cylindrical body Pa can be formed using, for example, a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm. For example, the cylindrical body Pa can have an outer diameter of about 120 μm, an inner diameter of about 100 μm, and an overall length of about 1700 μm. In addition, the inner periphery of the cylindrical body Pa may be plated with a layer such as gold plating, and the peripheral surface of the cylindrical body Pa may be coated with an insulating material if necessary.

At one end of the cylindrical body Pa disposed on the front end side of the support member 31, a pair of slits Pa1 into which both side portions of a wide portion Pb3 provided on the central conductor Pb as described later are press-fitted are formed. It is formed so as to extend in the axial direction of the cylindrical body Pa. On the other hand, a pair of slits Pa2 extending in the axial direction of the tubular body Pa like the one end of the tubular body Pa are formed at the other end of the tubular body Pa, which is disposed on the rear end side of the support member 31. formed.

A spiral spring portion Pa3 extending and contracting in the axial direction of the tubular body Pa is formed over a predetermined length in a portion of the tubular body Pa excluding both ends. For example, the peripheral wall of the cylindrical body Pa is irradiated with a laser beam from a laser processing machine (not shown) to form the spiral groove Pa4, thereby forming a spiral groove extending spirally along the peripheral surface of the cylindrical body Pa. A spring portion Pa3 composed of a body is constructed.

The spring portion Pa3 made of a spiral body may be provided by etching the peripheral wall of the cylindrical body Pa to form a spiral groove Pa4. The spring portion Pa3 can also be provided by forming the spiral groove Pa4 in the peripheral wall of the cylindrical body Pa by, for example, electroforming.

As shown in FIGS. 4 to 6, the central conductor Pb includes a rod-shaped main body Pb1 having a circular cross section inserted into the cylindrical body Pa and a central conductor Pb protruding outside the cylindrical body Pa. and a distal end side connection portion Pb2 having a circular cross section. The rod-shaped main body Pb1 is configured to be insertable into the cylindrical body Pa by setting its outer diameter to be slightly smaller than the inner diameter of the cylindrical body Pa.

A wide width portion Pb3 having a width dimension larger than the inner diameter of the cylindrical body Pa is formed between the base end of the distal end connection portion Pb2, that is, between the rod-shaped main body Pb1 and the distal end connection portion Pb2. Further, the total axial length of the rod-shaped main body Pb1 and the wide portion Pb3 is set to a value shorter than the total length of the cylindrical body Pa. As a result, when the rod-shaped main body Pb1 and the wide portion Pb3 of the central conductor Pb are inserted into the tubular body Pa, the base end face of the rod-shaped main body Pb1 is positioned inside the tubular body Pa.

The wide portion Pb3 is formed to be thinner and wider than the rod-shaped main body Pb1, for example, by pressing in the left-right direction in FIG. ing. Between the base end portion of the distal end side connecting portion Pb2 and the wide portion Pb3, and between the wide portion Pb3 and the distal end portion of the rod-shaped main body Pb1, the plate thickness gradually decreases toward the wide portion Pb3. At the same time, a tapered portion Pb4 whose shape changes so that the width dimension gradually increases is provided.

The plate thickness t of the wide portion Pb3 is formed to be substantially equal to the width dimension of the slit Pa1 formed in the cylindrical body Pa, that is, the slit width S, or slightly larger than the slit width S. Further, the axial length l of the wide portion Pb3 is shorter than the axial length L of the slit Pa1. Further, the wide width portion Pb3 has a width dimension w that is at least larger than the inner diameter of the cylindrical body Pa, and in this embodiment, the width dimension w of the wide width portion Pb3 is set to a value slightly larger than the outer diameter of the cylindrical body Pa. It is

In the above-described configuration, the rod-shaped main body Pb1 is inserted into the cylindrical body Pa, and both side portions of the wide portion Pb3 are inserted into the slits Pa1 of the cylindrical member Pa. is crimped to the inner wall surface of the slit Pa1. As a result, the probe Pr in which the cylindrical body Pa and the central conductor Pb are integrally connected is assembled.

Further, the width dimension w of the wide width portion Pb3 is formed smaller than the inner diameter of the insertion hole portion Ha formed in the support member 31, so that, as shown in FIG. Pb3 is arranged in the insertion hole portion Ha and is configured to be supported by the support member 31 . Further, the width dimension w of the wide width portion Pb3 is formed to be larger than the inner diameter of the small diameter portion Hb formed in the support plate 31a. Falling off from the member 31 is prevented.

The tip end side connection portion Pb2 of the center conductor Pb is formed to have a diameter smaller than the inner diameter of the small diameter portion Hb provided in the support plate 31a, so that it can be inserted through the small diameter portion Hb. Further, in a state in which the probe Pr is supported by the support member 31, the distal end connection is made so that the distal end surface of the distal end connection portion Pb2 protrudes outward from the support member 31 from the small diameter portion Hb of the support plate 31a. The entire length of the portion Pb2 is formed to be greater than the plate thickness of the support plate 31a. When inspecting the substrate 101 or the like, which will be described later, the tip end surface of the tip end side connection portion Pb2 is configured to abut against an inspected point to be inspected, which is a solder bump BP or the like.

The total thickness of the support plates 31b and 31c, that is, the distance β between the rear end side surface of the support plate 31a and the front end side surface of the base plate 321 shown in FIG. Slightly shorter than natural length. As a result, the cylindrical body Pa disposed in the insertion hole portion Ha is sandwiched between the support plate 31c and the base plate 321 and is slightly compressed. Then, due to the restoring force of the spring portion Pa3 provided in the cylindrical body Pa, one end of the cylindrical body Pa contacts the support plate 31a, and the other end of the cylindrical body Pa contacts the electrode 34a. is configured as

As a result, the cylindrical body Pa and the electrode 34a are in conductive contact, and the cylindrical body Pa is electrically connected to the inspection circuit of the substrate inspection apparatus 1 through the wiring 34. FIG. Further, by electrically connecting the cylindrical body Pa and the central conductor Pb, one end surface of the probe Pr, that is, the front end surface of the central conductor Pb is brought into contact with a point to be inspected on the substrate 101 to be inspected. It is possible to electrically connect the test points to the test circuit.

FIG. 7 is an explanatory diagram showing a state in which one end surface of the probe Pr is pressed against a point to be inspected on the substrate 101. As shown in FIG. The points to be inspected are, for example, solder bumps BP, wiring patterns, connection terminals, and the like. When the inspection unit 4 is positioned with respect to the substrate 101 and the inspection jig 3 is pressed against the substrate 101, one end face of the probe Pr is pressed against the point to be inspected. Then, the tip portion of the probe Pr is pressed toward the other end side, and the spring portion Pa3 of the cylindrical body Pa is compressed and deformed, thereby pushing one end portion of the cylindrical body Pa toward the rear end side of the support member 31. be Due to the restoring force of the spring portion Pa3 generated accordingly, one end surface of the probe Pr is elastically pressed against the point to be inspected, thereby improving the contact stability between the probe Pr and the point to be inspected.

As described above, the contact terminal (probe Pr) according to the present invention includes a cylindrical body Pa formed of a conductive material and a central conductor Pb formed of a conductive material in a bar shape. The center conductor Pb has a rod-like main body Pb1 installed in a state of being inserted into the tubular body Pa, and a tip end side connection portion Pb2 installed in a state of protruding outside the tubular body Pa. . A wide width portion Pb3 having a width dimension larger than the inner diameter of the cylindrical body Pa is formed at the proximal end of the distal end side connecting portion Pb2, and a pair of left and right slits Pa1 are formed at one end of the cylindrical body Pa. Since both sides of the wide portion Pb3 are inserted into the slit Pa1, the probe Pr used for inspecting the substrate 101 and the like, the inspection jig using the probe Pr, and the inspection apparatus can be easily and properly manufactured.

That is, in the above-described embodiment, the thickness t of the wide portion Pb3 is substantially equal to the slit width S of the slit Pa1, or is slightly larger than the slit width S. As a result, when the user inserts the rod-shaped main body Pb1 into the cylindrical body Pa, both side portions of the wide portion Pb3 are press-fitted into the slit Pa1 and pressed against the inner surface. For this reason, unlike the prior art disclosed in Patent Document 1, the tubular body does not require complicated fixing work such as welding or caulking the center conductor to the ultra-thin tubular body. Probe Pr in which Pa and central conductor Pb are integrally connected can be easily and properly manufactured.

Further, when the cylindrical body Pa has a spiral spring portion Pa3 that expands and contracts in its axial direction, the spring portion Pa3 of the cylindrical body Pa is elastically deformed when the substrate 101 or the like is inspected. Accordingly, one end face of the probe Pr, which is the tip end face of the tip end side connection portion Pb2, can be brought into pressure contact with the inspection point to be inspected with an appropriate pressure according to the restoring force. Moreover, the other end surface of the probe Pr, which is composed of the other end of the cylindrical body Pa, the base end of the central conductor Pb, and the like, can be brought into pressure contact with the electrode 34a at a proper pressure.

A structure in which the slit Pa2 formed at the other end of the cylindrical body Pa is omitted is also possible. However, when the slit Pa1 and the slit Pa2 are provided at both ends of the cylindrical body Pa, the wide portion Pb3 of the central conductor Pb must be press-fitted into both of the slit Pa1 and the slit Pa2. It has the advantage of being easy to use.

Further, instead of the above-described first embodiment, two central conductors having a wide portion Pb3 are provided, one of which is connected to one end side of the cylindrical body Pa, and the other of the two central conductors is the cylindrical body. It can also be configured to be connected to the other end side of Pa. One of both central conductors is pressed against a point to be inspected, which is a solder bump BP or the like, and the other of the two central conductors is pressed against the electrode 34a to inspect the object to be inspected. may

8 shows a first modified example of the contact terminal according to the present invention, FIG. 9 is a side view showing a second modified example of the contact terminal according to the present invention, and FIG. 10 shows a second modified example of the contact terminal according to the present invention. 11 is a side view showing a fourth modification of the contact terminal according to the present invention, and FIG. 12 is a side view showing a fifth modification of the contact terminal according to the present invention.

In the first modification shown in FIG. 8, a pair of upper and lower notch portions Pa5 are formed at the base end portion of the slit Pa1 provided at one end portion of the cylindrical body Pa so as to increase the slit width. It is. According to this configuration, when the user inserts the wide portion Pb3 of the central conductor Pb into the slit Pa1, the peripheral wall portion of the cylindrical body Pa is pivotally displaced in the vertical direction in FIG. By widening one end of the cylindrical body Pa, the insertion operation can be easily performed.

Further, in the second modification shown in FIG. 9, a slit Pa1 having a tapered portion Pa11 inclined so that the width of the slit increases toward the end portion of the cylindrical body Pa is provided. In the case where the tapered portion Pa11 is provided as described above, when the user inserts the wide portion Pb3 of the central conductor Pb into the slit Pa1, the tapered portion Pa11 can be used as a guide surface so that the slit The operation of inserting the wide portion Pb3 into Pa1 can be performed smoothly.

Moreover, by setting the slit width at the proximal end portion of the tapered portion Pa11 to a value smaller than the plate thickness of the wide width portion Pb3, the user can insert the rod-shaped main body Pb1 into the cylindrical body Pa to operate the probe Pr. When assembling, the base end of the tapered portion Pa11 is firmly crimped to both side portions of the wide portion Pb3, so that the central conductor Pb and the cylindrical body Pa can be reliably electrically connected.

Furthermore, in the second modified example shown in FIG. 9 as well, when a pair of upper and lower notch portions Pa5 which are notched so as to increase the slit width are provided at the base end portion of the tapered portion Pa11, When the user inserts the wide portion Pb3 of the central conductor Pb into the slit Pa1, the inserting operation can be easily performed by deforming one end portion of the tubular body Pa from the notch portion Pa5 as a starting point so as to widen the inserting operation. can be done.

The thickness t of the wide portion Pb3 is substantially equal to the slit width S of the slit Pa1 or slightly larger than the slit width S, so that the rod-shaped main body Pb1 is inserted into the cylindrical body Pa. Instead of the above-described embodiment in which both sides of the wide portion Pb3 are crimped to the slit Pa1, the slit width S of the slit Pa1 is formed to be slightly larger than the plate thickness t of the wide portion Pb3. You may

In this case, as shown in the third modified example shown in FIG. 10, the tip of the slit Pa1 is provided with a retaining portion Pa6 having a slit width smaller than that of the base of the slit Pa1. is preferred. As a result, there is an advantage that the connection state between the cylindrical body Pa and the central conductor Pb is stably maintained with a simple configuration.

Further, as shown in the fourth modification shown in FIG. 11, a retaining portion Pa6 is provided at the distal end of the slit Pa1, and a pair of upper and lower notches are provided at the proximal end of the slit Pa1 so that the slit width is increased. may be provided with a notch Pa5. In this configuration, when the wide portion Pb3 of the central conductor Pb climbs over the retainer portion Pa6 and is inserted into the slit Pa1, one end portion of the cylindrical body Pa is deformed so as to widen from the notch portion Pa5 as a starting point. , the insertion operation can be easily performed.

In the fifth modification shown in FIG. 12, a tapered portion Pa12 is formed on the distal end side of the slit Pa1 so that the slit width increases toward one end of the cylindrical body Pa, and the slit is formed at the proximal end of the slit. A slit body portion Pa13 having a constant slit width is formed on the side of the slit. Between the tapered portion Pa12 and the slit body portion Pa13, a retaining portion Pa6 having a slit width smaller than that of the slit body portion Pa13 is formed.

According to this configuration, when the user inserts the wide portion Pb3 of the central conductor Pb into the slit Pa1, the insertion operation can be performed smoothly by using the tapered portion Pa11 as a guide surface. Both side portions of the wide portion Pb3 are inserted into the slit main body portion Pa13 over the retaining portion Pa6, whereby the state of connection between the cylindrical body Pa and the central conductor Pb is stably maintained. Become.

Also in the fifth modified example shown in FIG. 12, a pair of upper and lower notch portions Pa5 may be provided at the proximal end portion of the slit main body portion Pa13 so as to increase the slit width. As a result, when the wide portion Pb3 of the central conductor Pb climbs over the retainer portion Pa6, the cylindrical body Pa is widened from the notch portion Pa5 as a starting point, so that the climbing operation can be performed smoothly.

Reference Signs List 1 substrate inspection device 3, 3U, 4D inspection jig 8 inspection processing unit 31 support member 34 wiring 34a electrode 101 substrate (inspection object)
L Length of slit in axial direction BP Solder bump (point to be inspected)
Pa Cylindrical body Pa1 Slit Pa11 Tapered part Pa12 Tapered part Pa13 Slit main body part Pa3 Spring part Pa4 Spiral groove Pa5 Notch part Pa6 Retaining part Pb Center conductor Pb1 Rod-shaped main body Pb2 Tip side connecting part Pb3 Wide part Pb4 Tapered part Pr Probe (contact terminal)
S Slit width t Plate thickness w Width dimension

Claims (4)

a tubular body formed in a tubular shape from a conductive material;
a center conductor formed in a rod shape from a conductive material,
The central conductor has a rod-shaped main body inserted into the cylindrical body and a distal end side connection portion protruding outside the cylindrical body,
A wide width portion having a width dimension larger than the inner diameter of the cylindrical body is formed at the proximal end portion of the distal end side connection portion,
A pair of left and right slits are formed at one end of the cylindrical body,
Both sides of the wide portion are inserted into the slit ,
The slit has a tapered portion that is inclined such that the width of the slit increases toward one end of the cylindrical body,
The slit width at the end of the tapered portion opposite to the one end is smaller than the plate thickness of the wide portion,
A slit main body portion having a constant slit width is formed on the side of the slit opposite to the one end side of the tapered portion,
Between the tapered portion and the slit main body, a retainer portion having a slit width smaller than the plate thickness of the slit main body and the wide width portion is formed,
A notch portion is provided at the base end portion, which is the end portion of the slit opposite to the one end side, so as to increase the width of the slit,
The contact terminals are positioned on the slit main body on both sides . 2. The contact terminal according to claim 1 , wherein said cylindrical body has a spiral spring portion that expands and contracts in its axial direction. A contact terminal according to claim 1 or 2 ;
and a support member that supports the contact terminals. The inspection jig according to claim 3 ;
An inspection apparatus comprising: an inspection processing unit that inspects the inspection object based on an electric signal obtained by bringing the contact terminal into contact with a point to be inspected provided on the inspection object.

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