TW202210838A - Contact terminal, inspection jig, inspection device, and manufacturing method - Google Patents

Abstract

To provide a contact terminal, an inspection jig, an inspection device, and a manufacturing method for easily reducing the likelihood of a conductor falling out of a tubular body. A contact terminal Pr comprises a tubular body Pa and a substantially rod-shaped first conductor P1. A first slit SL1 is formed extending from one end of the tubular body Pa toward the other end side of the tubular body Pa. A narrow portion N1 in which the width of the first slit SL1 is reduced is provided in a position spaced apart by a first distance D1 from the end on the other end side toward the one end side of the first slit SL1. A rod-shaped body Pb1 of the first conductor P1 includes an engaging portion K1 positioned in a receiving portion A1 of the first slit SL1 which is a region between the end on the other end side and the narrow portion N1. The engaging portion K1 protrudes in a Y-direction to a position allowing for interference with the narrow portion N1, the Y-direction being perpendicular to an X-direction, which is the width direction of the first slit SL1, and an axial direction Z of the tubular body.

Description

Contact terminal, inspection jig, inspection device, and manufacturing method

The present invention relates to a contact terminal used for inspection of an inspection object, an inspection jig for bringing the contact terminal into contact with the inspection object, an inspection apparatus including the inspection jig, and a manufacturing method.

Conventionally, there has been known a coil spring probe in which a rod-shaped conductor provided with a conductive pad that contacts the object to be measured, and a cylindrical cylindrical body into which the rod-shaped conductor is inserted, and a part of the peripheral wall of the cylindrical body serves as a spring (for example, refer to patent Reference 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2007-24664

[The problem to be solved by the invention]

However, in recent years, the miniaturization of semiconductor substrates and circuit substrates of measurement objects has progressed. The inspection points of the object to be measured and the adjacent distance between the inspection points are reduced. Therefore, the diameter of the probe (contact terminal) used for the inspection is about 0.1 mm. Therefore, when the diameter of the above-mentioned coil spring probe is set to 0.1 mm, a thin rod-shaped conductor is further inserted into a cylindrical body having a diameter of 0.1 mm.

If only the rod-shaped conductor is inserted into the cylinder, the rod-shaped conductor may come off from the cylinder. However, it is not easy to provide a mechanism for preventing the rod-shaped conductor from falling off in a contact terminal having a fine structure as described above.

It is an object of the present invention to provide a contact terminal, an inspection jig, an inspection apparatus, and a manufacturing method that can easily reduce the risk of the conductor falling off from the cylindrical body. [means to solve the problem]

A contact terminal according to an example of the present invention includes: a cylindrical body having conductivity; and a first conductor having a substantially rod-like shape and a rod-shaped body located in the cylinder on one end side of the cylindrical body, and an outer conductor portion protruding from the one end of the cylindrical body; forming a first slit extending from one end of the cylindrical body toward the other end side of the cylindrical body; on the other end side of the first slit The end portion is separated from the one end side by a preset first distance, and a narrowing portion of which the width of the first slit is reduced is provided; the rod-shaped body includes an end portion located on the other end side of the first slit. In the receiving portion, the region between the narrowing portion and the width direction of the first slit, that is, the first direction and the second direction perpendicular to the axial direction of the cylindrical body, the narrowing portion and the narrowing portion can be mutually caught. up to the engaging part.

Further, an inspection jig according to an example of the present invention includes the above-mentioned contact terminal, and a support member for supporting the above-mentioned contact terminal.

Further, an inspection apparatus according to an example of the present invention includes the inspection jig described above, and an inspection process for performing the inspection of the inspection object based on an electrical signal obtained by bringing the contact terminal into contact with an inspection point provided in the inspection object. department.

In addition, a method of manufacturing a cylindrical body according to an example of the present invention is the method of manufacturing a cylindrical body of the above-mentioned contact terminal, wherein: (a1) a photoresist is formed on the outer wall surface of the conductive cylindrical member; (a2) A first shape is exposed to the photoresist at a position separated from the one end of the outer wall surface; the first shape includes a pair of sides facing the first direction gradually approaching toward the one end side , the shape of the first part that converges on one side; (a3) remove the previously exposed part of the photoresist; (a4) etch the outer wall surface exposed in the removed part of the photoresist, and from the first part The etching is continued until the enlarged and removed portion reaches the one end of the cylindrical member to form the narrowed portion.

In addition, a method for producing a cylindrical body according to an example of the present invention is the above-mentioned method for producing a cylindrical body of a contact terminal, wherein: (b1) a photoresist is formed on the outer wall surface of the conductive cylindrical member; (b2) A first shape and a second shape spaced from the first shape are exposed to the photoresist; the first shape includes a pair of sides facing the first direction as it goes toward the one end side gradually The shape of the first part that is close to and converges on one side; the second shape includes a second part extending from the one end of the outer wall surface to the direction of the other end, and a second part connected to the second part and facing the first direction. The shape of the third portion where one pair of sides is gradually approached toward the other end side and converges; (b3) the exposed portion of the photoresist is removed; (b4) the removed portion of the photoresist The part of the exposed outer wall surface is etched, and the part enlarged and removed from the first part communicates with the part enlarged and removed from the third part to form the narrowed part and the funnel-shaped part.

In addition, a method of manufacturing a first conductor according to an example of the present invention is the method of manufacturing a first conductor of the above-mentioned contact terminal, wherein: (c1) one of the pair of narrow plate portions is formed; (c2) the narrow portion of the one is formed. The center plate portion is stacked on the plate portion; (c3) the other of the pair of narrow plate portions is stacked on the center plate portion. [Effect of invention]

The contact terminal, the inspection jig, and the inspection device of such a structure can easily reduce the risk of the conductor falling off from the cylindrical body. Moreover, according to such a manufacturing method, it becomes easy to manufacture the contact terminal which easily reduces the possibility that a conductor may fall off from a cylindrical body.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the structure which attached|subjected the same code|symbol to each figure shows the same structure, and abbreviate|omits the description. In each drawing, in order to clarify the directional relationship, the orthogonal coordinate axes of XYZ are appropriately disclosed. +X and -X (X direction) correspond to the first direction, +Y and -Y (Y direction) correspond to the second direction, +Z corresponds to one end direction, and -Z corresponds to the other end direction. In addition, in each drawing, there are cases in which the symbols of the parts related to the second slot SL2 and the second conductor P2 are shown in parentheses.

The inspection apparatus 1 shown in FIG. 1 is a semiconductor inspection apparatus for inspecting the circuit formed in the inspection object 101, such as a semiconductor wafer, for example.

Circuits corresponding to a plurality of semiconductor wafers are formed on the inspection object 101, for example, on a semiconductor substrate such as silicon. In addition, the inspection object may be an electronic component such as a semiconductor wafer, a CSP (Chip Size Package), or a semiconductor element (IC: Integrated Circuit), and it is only necessary to be an object of electrical inspection.

In addition, the inspection apparatus is not limited to a semiconductor inspection apparatus, and may be, for example, a substrate inspection apparatus for inspecting a substrate. The substrates to be inspected may be, for example, printed wiring substrates, glass epoxy substrates, flexible substrates, ceramic multilayer wiring substrates, packaging substrates for semiconductor packaging, interconnector substrates, film carriers, and the like. Electrode plates for displays such as liquid crystal displays, EL (Electro-Luminescence) displays, touch panel displays, and electrode plates for touch panels may be used, and may be used as various substrates.

The inspection apparatus 1 shown in FIG. 1 includes an inspection unit 4 , a sample stage 6 , and an inspection processing unit 8 . On the upper surface of the sample table 6, a placing portion 6a on which the inspection object 101 is placed is provided, and the sample table 6 is configured to fix the inspection object 101 to be inspected at a predetermined position.

The placing portion 6 a is movable up and down, for example, so that the inspection object 101 accommodated in the sample table 6 can be raised to the inspection position, or the inspected object 101 that has been inspected can be accommodated in the sample table 6 . Moreover, the mounting part 6a can rotate the inspection object 101 so that an orientation flat may face a predetermined direction, for example. In addition, the inspection apparatus 1 is provided with a conveyance mechanism such as a robot arm (not shown), and the inspection object 101 is placed on the placement portion 6a by the conveyance mechanism, or the inspected inspection object 101 is removed from the placement portion. 6a moved out.

The inspection unit 4 includes an inspection jig 3 , a connection plate 35 , and a test head 37 . The inspection jig 3 is a jig for inspecting a plurality of contact terminals Pr in contact with the inspection object 101 , and is configured as a so-called probe card, for example.

A plurality of wafers are formed on the inspection object 101 . A plurality of inspection points such as pads and bumps are formed on each wafer. The inspection jig 3 corresponds to an area (for example, the area indicated by hatching in FIG. 1 , hereinafter referred to as an inspection area) formed on a part of the plurality of wafers of the inspection object 101 , and holds it so as to correspond to each inspection point in the inspection area. Plural contact terminals Pr.

When the contact terminal Pr is brought into contact with each inspection point in the inspection area, and the inspection in the inspection area is completed, the placing portion 6a lowers the inspection object 101, the sample stage 6 is moved in parallel to move the inspection area, and the placing portion 6a moves the inspection object. The object 101 is lifted, and the contact terminal Pr is brought into contact with the new inspection area to perform inspection. In this way, the inspection of the entire inspection object 101 is performed by performing inspection while sequentially moving the inspection area.

1 is an explanatory diagram briefly and conceptually showing an example of the structure of the inspection apparatus 1 from the viewpoint of easy understanding of the invention, regarding the number, density, arrangement of the contact terminals Pr, and each part of the inspection part 4 and the sample stage 6 . The ratio of shapes and sizes, etc., are also simplified and conceptualized. For example, from the viewpoint of easy understanding of the arrangement of the contact terminals Pr, the inspection area may be enlarged and emphasized compared to a general semiconductor inspection apparatus, and the inspection area may be smaller or larger.

The test head 37 is configured as a detachable connection plate 35 . The connection plate 35 is provided with an electrode 34a which will be described later in contact with the end portion of each contact terminal Pr. The test head 37 is electrically connected to each electrode 34a and the inspection processing unit 8 by cables, connection terminals, etc., which are not shown in the drawings. The connection plate 35 may perform pitch conversion between each contact terminal Pr and the test head 37 .

The inspection jig 3 includes a plurality of contact terminals Pr, and a support member 31 that holds the plurality of contact terminals Pr.

The inspection unit 4 includes a connection circuit, which is not shown in the drawings, for electrically connecting the contact terminals Pr of the inspection jig 3 and the inspection processing unit 8 through the test head 37 and the connecting plate 35 or switching the connection.

Thereby, the inspection processing unit 8 can supply an inspection signal to an arbitrary contact terminal Pr, or can detect a signal from an arbitrary contact terminal Pr.

The inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, a microcomputer, and the like. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection unit 4 so that the contact terminals Pr are brought into contact with the inspection points of the inspection object 101 . Thereby, each inspection point and the inspection processing unit 8 are electrically connected.

The inspection processing unit 8 supplies current or voltage for inspection to each inspection point of the inspection object 101 through each of the contact terminals Pr of the inspection jig 3 in the above-described state, according to the voltage or current obtained from each of the contact terminals Pr, etc. For the electrical signal, inspection of the inspection object 101 such as disconnection or short circuit of the circuit pattern is performed. Alternatively, the inspection processing unit 8 may measure the impedance of the inspection object based on electrical signals such as voltage or current obtained from each contact terminal Pr by supplying alternating current or voltage to each inspection point.

The support member 31 shown in FIG. 2 is comprised, for example by laminating|stacking the plate-shaped support plates 31a, 31b, 31c. A plurality of through holes are formed so as to penetrate through the support plates 31a, 31b, and 31c.

In the support plates 31a and 31b, insertion holes Ha formed by opening holes having a predetermined diameter are respectively formed. A small diameter portion Ha1 having a diameter smaller than that of the insertion hole Ha is formed on the support plate 31c located on the surface side facing the inspection target object 101 . Then, a through hole penetrating the support member 31 is formed by connecting the insertion hole Ha of the support plates 31a and 31b and the small diameter portion Ha1 of the support plate 31c.

In addition, the support member 31 is not limited to an example in which the plate-shaped support plates 31a, 31b, and 31c are laminated, and as an integral member, for example, a through hole formed by the insertion hole Ha and the small diameter portion Ha1 is provided. Structure is also possible. In addition, the entire through hole may be a structure having an insertion hole Ha of a predetermined diameter. Furthermore, instead of the example in which the support plates 31a and 31b of the support members 31 are stacked on each other, a structure in which the support plate 31a and the support plate 31b are separated from each other may be connected by, for example, a column.

A connection plate 35 made of, for example, an insulating resin material is attached to the rear end side of the support plate 31a. The rear end side opening of the through hole, that is, the rear end face of the insertion hole Ha is blocked by the connecting plate 35 . The wiring 34 is attached to the connecting plate 35 so as to penetrate through the connecting plate 35 at a position facing the opening on the rear end side of the through hole. It is set so that the front surface of the connection board 35 which faces the support board 31a and the end surface of the wiring 34 may become the same surface. The end face of the wiring 34 serves as the electrode 34a.

The wiring 34 may be a wired space transformer that penetrates the connecting plate 35 in the direction from -Z to +Z as a wire on the side surface of the insulating-coated conductive wire. Alternatively, MLO (Multilayer Organic) or MLC (Multilayer Ceramic) is used, and in a substrate made of an insulating resin material or ceramic material, the mutual distance gradually changes from the -Z direction to the +Z direction. A conductive layer formed by patterning in a small manner can also be used.

The contact terminals Pr are inserted into and supported by the respective through holes of the support member 31 . The contact terminal Pr is provided with a cylindrical body Pa formed in a cylindrical shape with a material having conductivity, and first and second conductors P1 and P2 formed in a rod shape with a material having conductivity.

As the material of the cylindrical body Pa, the first conductor P1, and the second conductor P2, for example, palladium, copper, rhodium, nickel, and alloys thereof can be used alone or in combination.

2 to 5 , the cylindrical body Pa can be formed using, for example, a pipe having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm. For example, the outer diameter of the cylindrical body Pa can be set to about 120 μm, the inner diameter can be set to about 100 μm, and the overall length can be set to about 3000 μm. In addition, a conductor layer such as electroplating made of gold or an alloy thereof may be applied to the inner circumference of the cylindrical body Pa. The conductivity of the cylindrical body can be improved by the conductor layer. Moreover, it may be set as the structure which insulating-covers the peripheral surface of the cylindrical body Pa as needed.

The first conductor P1 and the second conductor P2 have, for example, a generally rod-like shape as a whole with a length of about 1000 to 3000 μm and a thickness of about 8 to 250 μm.

On the +Z (one end) side of the cylindrical body Pa, a pair of first slits SL1 (Fig. 3). A pair of 1st slit SL1 is formed in the position which opposes the Y direction. A narrowed portion N1 ( FIG. 4 ) in which the width of the first slit SL1 is reduced is formed at a position separated by a predetermined first distance D1 from the −Z side end SL1a of each first slit SL1 toward the +Z side.

The area between the -Z side end part SL1a of each 1st slit SL1 and the narrowing part N1 serves as a receiving part A1. In each of the first slits SL1, a funnel-shaped portion R1 ( FIG. 5 ) that is connected to the +Z side of the narrowed portion N1 and widens toward the +Z side is formed.

On the -Z (the other end) side of the cylindrical body Pa, a pair of second slits SL2 (Fig. 3). A pair of 2nd slit SL2 is formed in the position which opposes the Y direction. A narrowed portion N2 ( FIG. 4 ) in which the width of the second slit SL2 is reduced is formed at a position separated by a predetermined first distance D1 from the +Z side end SL2a of the second slit SL2 to the −Z side.

The widths W5 ( FIG. 10 ) of the reduced portions N1 and N2 are substantially the same as or slightly wider than the thicknesses of the plate-shaped projections B1 and B2 to be described later.

The region between the +Z side end portion SL2a of each second slit SL2 and the narrowing portion N2 serves as the receiving portion A2. In each of the second slits SL2, a funnel-shaped portion R2 ( FIG. 5 ) that is connected to the -Z side of the reduced portion N2 and widens toward the -Z side is formed.

The cylindrical body Pa includes an end-side cylindrical portion PP1 connected to the −Z side of the first slit SL1 , a helical first spring portion Pe1 connected to the −Z side of the end-side cylindrical portion PP1 , and a first spring portion Pe1 connected to the first slit SL1 . The center side cylinder part Pf on the -Z side of the spring part Pe1 (FIG. 3, FIG. 4). The cylindrical body Pa includes an end-side cylindrical portion PP2 connected to the +Z side of the second slit SL2, a helical second spring portion Pe2 connected to the +Z side of the end-side cylindrical portion PP2, and a second coiled spring portion Pe2 connected to the second slit SL2. The center-side cylindrical portion Pf on the +Z side of the spring portion Pe2.

The first conductor P1 has a substantially rod-like shape extending in the Z direction as a whole. The first conductor P1 has a shape in which a pair of narrow plate portions PN1 are stacked on both sides in the X direction of the center plate portion PL1 extending in a plate shape ( FIGS. 5 and 6 ). The narrow plate portion PN1 is narrower than the center plate portion PL1. Furthermore, the first conductor P1 may have a shape in which the center plate portion PL1 and the pair of narrow plate portions PN1 are stacked, and the center plate portion PL1 and the pair of narrow plate portions PN1 may be formed as one integral member.

The first conductor P1 has a rod-shaped body Pb1 located in the cylinder on the +Z side of the cylindrical body Pa, and an outer conductor portion Pc1 protruding from the +Z side end (one end) of the cylindrical body Pa ( FIG. 3 ).

The center plate portion PL1 of the rod-shaped body Pb1 is widened on both sides in the Y direction, and protrudes from a pair of plate-like protrusions B1 located in the Y direction in each narrowing portion N1 ( FIGS. 6 and 5 ). The -Z (the other end) side wall surface KW1 of the plate-like protrusion B1 and the -Z side end SL1a of the first slit SL1 are engaged with each other. Thereby, the insertion position of the 1st conductor P1 with respect to the cylindrical body Pa can be located.

In addition, the width W3 of the plate-shaped protrusion B1 in the Y direction is larger than the inner diameter of the small-diameter portion Ha1 of the support plate 31c. Thereby, the +Z side wall surface B1W of the plate-like protrusion B1 abuts on the -Z side surface of the support plate 31c, so that the first conductor P1 does not come off from the support plate 31c. On the other hand, the -Z side wall surface KW1 of the plate-like protrusion B1 is in contact with the -Z side end portion SL1a. As a result, the +Z side wall surface B1W is elastically pressed against the -Z side surface of the support plate 31c, and the -Z side wall surface KW1 is elastically pressed against the -Z side by the spring force of the first spring portion Pe1 and the second spring portion Pe2. end SL1a. As a result, the first conductor P1 can be stably held. In addition, the conduction between the first conductor P1 and the cylindrical body Pa is stabilized.

Furthermore, the rod-shaped body Pb1 includes the narrow plate portions PN1 on both sides in the X direction of the plate-shaped protrusions B1 that are widened on both sides in the Y direction, and protrude in the Y direction in each receiving portion A1 of the cylindrical body Pa (No. A pair of engaging parts K1 on both sides in two directions). The protrusion of the engaging portion K1 is set so that the top portion of the engaging portion K1 protrudes further to the outer peripheral side than the inner peripheral surface of the cylindrical body Pa, more specifically, the inner peripheral surface of the cylindrical body Pa located in the reduced portion N1. quantity. Thereby, the engaging part K1 is made to protrude to the position which can mutually engage with the reduction part N1.

On the -Z (other end) side of each engaging portion K1, an inclined surface KS1 whose protrusion amount decreases toward the -Z side is formed.

The front end of the rod-shaped body Pb1 is located in the center-side cylindrical portion Pf ( FIG. 3 ). Thereby, even when the first spring portion Pe1 and the second spring portion Pe2 expand and contract during inspection, it is possible to reduce the risk that the front end of the rod-shaped body Pb1 gets caught in the first spring portion Pe1 or the second spring portion Pe2.

The rod-shaped body Pb1 includes a wide portion PW1 located in the end-side cylindrical portion PP1 and a narrow portion PS1 located in the first spring portion Pe1 ( FIG. 6 ). The width W1 of the narrow portion PS1 is narrower than the width W2 of the wide portion PW1.

The width W2 of the wide portion PW1 is substantially the same as or slightly smaller than the inner diameter of the cylindrical body Pa (the end-side cylindrical portion PP1 ). Thereby, the possibility that the 1st conductor P1 shakes (wobbling) in the Y direction with respect to the cylindrical body Pa can be reduced. Furthermore, in the example shown in FIG. 2, the cylindrical bodies Pa of the respective contact terminals Pr are separated from each other by the walls of the support plates 31a and 31c, but the cylindrical bodies Pa may not be separated from each other. Construction using wall partitions. With such a structure, even if the plurality of contact terminals Pr are provided in the inspection jig 3 at a narrow interval, the provision of the wide portion PW1 can reduce the possibility that the cylindrical bodies Pa of the adjacent contact terminals Pr come into contact with each other. .

On the other hand, since the width W1 of the narrow portion PS1 in the first spring portion Pe1 is smaller than the width W2, the interval between the inner surface of the cylindrical body Pa (first spring portion Pe1) and the narrow portion PS1 can be secured. As a result, even when the first spring portion Pe1 expands and contracts during inspection, it is possible to reduce the risk of wear caused by friction between the narrow portion PS1 and the first spring portion Pe1. Furthermore, the narrow part PS1 located in the 1st spring part Pe1 can suppress the buckling at the time of expansion-contraction of the 1st spring part Pe1.

The narrow plate portion PN1 further includes an enlarged portion EX1 ( FIG. 5 ) that is located on the +Z (one end) side of the narrowed portion N1 and is wider than a portion located in the narrowed portion N1 . In the portion located in the narrowed portion N1, the narrow plate portion PN1 is narrowed in width in order to avoid mutual jamming with the narrowed portion N1 of the first slit SL1. Assuming that when the narrowed plate portion PN1 extends in the +Z direction with the same width as the portion of the narrowed plate portion PN1 located in the narrowed portion N1, the interval between the narrowed plate portion PN1 and the funnel-shaped portion R1 is widened, so that the cylindrical body Pa becomes relatively large. The first conductor P1 is relatively easy to shake (loose) in the X direction.

In the example shown in FIG. 2 , the cylindrical bodies Pa of the respective contact terminals Pr are separated from each other by the wall portions of the support plates 31a and 31b, but the cylindrical bodies Pa are not separated from each other by the wall portion. If the cylindrical body Pa becomes loose in the X direction with respect to the first conductor P1 at the time of the partitioned structure, there is an increased possibility that the adjacent cylindrical bodies Pa come into contact with each other.

On the other hand, at a position on the +Z (one end) side of the narrowed portion N1, even if the width of the narrowed plate portion PN1 is increased, the narrowed portion N1 does not get caught with each other. Therefore, by providing the enlarged portion EX1, the looseness in the X direction of the cylindrical body Pa can be reduced while avoiding the mutual jamming with the narrowed portion N1, and the possibility that the adjacent cylindrical bodies Pa come into contact with each other can be reduced.

The second conductor P2 has a substantially rod-like shape extending in the Z direction as a whole. The second conductor P2 includes a shape that roughly rotates the portion of the outer conductor portion Pc1 of the first conductor P1 excluding the front end shape by 180 degrees (replacement of +Z and -Z).

That is, as shown in FIGS. 3 to 7 , the center plate portion PL2 , the narrow plate portion PN2 , the narrow portion PS2 , the wide portion PW2 , the plate-like protrusions B2 , the +Z side wall surfaces KW2 , and −Z included in the second conductor P2 Each of the side wall surface B2W, the engaging portion K2, the inclined surface KS2, and the enlarged portion EX2 has a center plate portion PL1, a narrow plate portion PN1, a narrow portion PS1, a wide portion PW1, and a plate-like protrusion corresponding to the first conductor P1, respectively. B1, -Z side wall surface KW1, +Z side wall surface B1W, engagement portion K1, inclined surface KS1, and the shape of each portion of the enlarged portion EX1. As a result, the respective portions of the second conductor P2 can exhibit the same effects as those of the respective portions of the first conductor P1.

Next, the manufacturing method of the contact terminal Pr is demonstrated. First, the manufacturing method of the cylindrical body Pa is demonstrated, referring FIGS. 8-10. FIGS. 9 and 10 are also used for the description of the formation method of the 1st slit SL1 and the 2nd slit SL2. In FIGS. 9 , 10 , 12 and 13 , symbols and directions related to the second slit SL2 are shown in brackets.

First, a photoresist is formed on the outer wall surface of the metal tube T, which is a conductive cylindrical member (step S1: (b1)).

Next, on the photoresist, exposure is performed at a position where the first shape F1 and the second shape F2 are separated by a distance W4 (step S2 : FIG. 9 : ( b2 )).

The first shape F1 is a shape including a first portion F13 in which the sides F11 and F12 facing a pair of the X direction are gradually approached toward the +Z (-Z) side and merge. The second shape F2 includes a second portion F21 extending from the end E of the metal tube T in the -Z (+Z) direction, and a pair of sides F22 and F23 connected to the second portion F21 and facing the X direction. The shape of the third portion F24 that merges while gradually approaching toward the -Z (+Z) side.

In addition, the 2nd part F21 is the same as the 3rd part F24, and it may be a shape in which the pair of sides facing the X direction are gradually approached toward the -Z (+Z) side and converge.

Next, by developing the photoresist, the exposed portions of the first shape F1 and the second shape F2 are removed to expose the outer wall surface of the metal tube T (step S3: (b3)).

Next, the exposed portion of the outer wall surface is etched until the portion enlarged and removed from the exposed portion of the first portion F13 corresponding to the first shape F1 communicates with the portion enlarged and removed from the third portion F24 corresponding to the second shape F2 Etching is performed (step S4: FIG. 10: (b4)).

In step S4, if the exposed portions corresponding to the first shape F1 and the second shape F2 are etched, firstly in synchronization with the removal of the peripheral wall of the metal tube T in the thickness direction, the etching corresponding to the first shape F1 and the second shape F2 is performed first. part of the peripheral wall. As a result, a hole slightly larger than the first shape F1 and a notch slightly larger than the second shape F2 are formed. If the etching is continued, the peripheral wall portions corresponding to the outer edge portions of the first shape F1 and the second shape F2 are further corroded, and the holes according to the first shape F1 and the notch according to the second shape F2 continue to expand.

As a result, the part enlarged and removed from the first part F13 communicates with the part enlarged and removed from the third part F24, and a first slit connecting the receiving part A1 (A2), the narrowing part N1 (N2), and the funnel-shaped part R1 (R2) is formed SL1 (second slit SL2).

At this time, since the width W5 of the reduced portion N1 ( N2 ) is determined according to the duration of etching, it is easy to set the width W5 to a small interval. Assuming that, in step S2, when exposure is initially performed in a shape in which the first shape F1 and the second shape F2 are connected, that is, a shape in which the reduced portion N1 (N2) is spaced apart, the etching needs to be continued until at least the metal tube T is removed. up to the thickness of the peripheral wall.

During the etching period until the thickness of the peripheral wall portion is removed, the reduced portion N1 ( N2 ) is also etched simultaneously, and the width W5 is enlarged. In this way, the width W5 is enlarged during the time when the thickness of the peripheral wall portion of the metal tube T is etched, so that it is difficult to form the width W5 at an appropriate minute interval.

On the other hand, according to the present manufacturing method, even if the etching is continued until the thickness of the peripheral wall portion of the metal tube T is removed, the first shape F1 and the second shape F2 are not connected, or the width W5 becomes very small. Set the interval W4. Then, by performing steps S2 to S4, the etching time can be controlled regardless of the thickness of the peripheral wall portion, and the desired minute width W5 can be formed.

If the width W5 can be formed minutely, it is easy to make the cylindrical body Pa thin, that is, the contact terminal Pr can be made thin. As a result, it is easy to inspect a finer inspection object.

Regarding the first spring portion Pe1 and the second spring portion Pe2, the first helical groove Pg1 and the second helical groove Pg2 can be formed by forming the first helical groove Pg1 and the second helical groove Pg2 on the peripheral wall portion of the metal tube T by various processing methods such as etching or laser processing. The spring portion Pe1 and the second spring portion Pe2.

In addition, the cylindrical body Pa does not need to have the funnel-shaped parts R1 and R2. Hereinafter, the manufacturing method of the cylindrical body Pa when the cylindrical body Pa does not have the funnel-shaped part R1, R2 is demonstrated, referring FIGS. 11-13.

First, a photoresist is formed on the outer wall surface of the metal tube T, which is a conductive cylindrical member (step S1a: (a1)).

Next, the first shape F1 is exposed to the photoresist at a position separated from the end of the metal tube T by the interval W6 (step S2a: FIG. 12: (a2)).

Next, by developing the photoresist, the photoresist of the exposed portion of the first shape F1 is removed to expose the outer wall surface of the metal tube T (step S3a: (a3)).

Next, the exposed portion of the outer wall surface is etched, and the etching is continued until the portion expanded and removed from the exposed portion of the first portion F13 corresponding to the first shape F1 reaches the end E of the metal tube T (step S4a: Fig. 13: (a4)).

In step S4a, when etching the exposed portion corresponding to the first shape F1, the peripheral wall portion corresponding to the outer edge portion of the first shape F1 is etched in synchronization with the removal of the peripheral wall of the metal tube T in the thickness direction. As a result, a hole slightly enlarged than the first shape F1 is formed. If the etching is continued, the peripheral wall portion of the portion corresponding to the outer edge portion of the first shape F1 is further corroded, and the hole according to the first shape F1 continues to expand.

As a result, the portion expanded and removed from the first portion F13 reaches the end portion E to form the receiving portion A1 (A2) and the narrowing portion N1 (N2) to form the first slit SL1 (second slit SL2).

By steps S2a to S4a, even if the etching is continued until the thickness of the peripheral wall portion of the metal tube T is removed, the first shape F1 is not reached, or the width W5 becomes very small, similarly to the steps S2 to S4. , and preset interval W4. Then, by performing steps S2a to S4a, the etching time can be controlled regardless of the thickness of the peripheral wall portion, and the desired minute width W5 can be formed.

Next, the manufacturing method of the 1st conductor P1 is demonstrated. In addition, since the 2nd conductor P2 can be manufactured similarly to 1st conductor P1, its description is abbreviate|omitted. The manufacture of the first conductor P1 may use various microfabrication techniques such as MEMS (Micro Electro Mechanical Systems), lithography, semiconductor manufacturing, electroforming, and three-dimensional molding by 3D printing.

Referring to FIG. 14 , using the above-described microfabrication technique, first, as the first layer L1, one (c1) of the pair of narrow plate portions PN1 is formed.

Next, on the narrow plate portion PN1 of the first layer L1, the center plate portion PL1 (c2) is stacked as the second layer L2. Next, on the center plate portion PL1 of the second layer L2, the other (c3) of the pair of narrow plate portions PN1 is stacked as the third layer L3.

In this way, the first conductor P1 (second conductor P2) includes a central plate portion PL1 ( PL2 ) extending into a plate shape and a pair of narrow plate portions PN1 ( PN2 ) narrower than the central plate portion PL1 ( PL2 ), and has a A shape in which the narrow plate portion PN1 ( PN2 ) is stacked on both sides in the X direction of the central plate portion PL1 ( PL2 ). As a result, the fine structures of the plate-like protrusions B1 ( B2 ) and the engaging portions K1 ( K2 ) and the like can be easily formed using the above-described microfabrication technique.

The first conductor P1 (second conductor P2) has a shape in which a pair of narrow plate portions PN1 ( PN2 ) are stacked on both sides of the central plate portion PL1 ( PL2 ) in the X direction, so that the direction perpendicular to the axial direction of the contact terminal Pr is formed. The cross section is shown in Figure 15. With this shape, the cross-sectional area of the first conductor P1 (the second conductor P2 ) accommodated in the cylindrical body Pa becomes larger than that in the case where the cross-sectional shape is square. As a result, it becomes possible to easily reduce the resistance of the contact terminal Pr.

Next, a method of assembling the contact terminal Pr will be described with reference to FIGS. 4 to 6 . First, the cylindrical body Pa, the 1st conductor P1, and the 2nd conductor P2 manufactured as mentioned above are prepared. Next, the −Z side end portion of the first conductor P1 is inserted from the +Z side end portion of the cylindrical body Pa. At this time, since the cylindrical body Pa is first inserted from the narrow narrowed portion PS1, the first conductor P1 can be smoothly inserted into the cylindrical body Pa.

Next, when the −Z side wall surface KW1 of the plate-shaped protrusion B1 reaches the +Z side end of the cylindrical body Pa, the −Z side wall surface KW1 and the funnel-shaped portion R1 are caught with each other. The funnel-shaped portion R1 is connected to the +Z side of the narrowed portion N1 and widens as it goes to the +Z side. Therefore, if the -Z side wall surface KW1 and the funnel-shaped portion R1 are locked in each other and the first conductor P1 is continuously inserted, The -Z side wall surface KW1 is guided to the narrowing portion N1, the -Z side wall surface KW1 passes through the narrowing portion N1, and the plate-like protrusions B1 are located within the interval of the narrowing portion N1.

Thereby, the position of the engaging portion K1 can be positioned at an appropriate position where the narrowing portion N1 can be mutually locked.

Further, when the first conductor P1 is continuously inserted, the inclined surface KS1 of the engaging portion K1 abuts the narrowed portion N1 from the inside, and the inclined surface KS1 pushes the narrowed portion N1 toward the outer circumferential direction while sliding with respect to the narrowed portion N1, and engages with the narrowed portion N1. The portion K1 goes beyond the reduced portion N1 and enters the receiving portion A1.

In this way, since the engaging portion K1 is provided with the inclined surface KS1, the engaging portion K1 can be smoothly positioned in the receiving portion A1. Then, by positioning the engaging portion K1 in the receiving portion A1, the engaging portion K1 is engaged with the narrowing portion N1, so that the risk of the first conductor P1 falling off the cylindrical body Pa can be easily reduced.

In addition, the engaging parts K1 and K2 should just be able to engage with the reduction parts N1 and N2, and may not necessarily have the inclined surfaces KS1 and KS2.

Further, when the first conductor P1 is continuously inserted, the -Z side wall surface KW1 of the plate-like protrusion B1 and the -Z side end SL1a of the first slit SL1 are locked with each other, and the insertion position of the first conductor P1 to the cylindrical body Pa is positioned. . At this time, since the wide portion PW1 is located in the end-side cylindrical portion PP1, the gap between the wide portion PW1 with respect to the inner diameter of the cylindrical body Pa is reduced, and the fluctuation of the first conductor P1 in the Y direction with respect to the cylindrical body Pa can be reduced. Yu.

The second conductor P2 can be inserted into the cylindrical body Pa similarly to the first conductor P1.

In addition, as shown in FIG. 16, the 1st conductor P1 and the 2nd conductor P2 may not have the enlarged parts EX1, EX2, and may not have the plate-shaped protrusions B1, B2 further.

In addition, the first slit SL1, the second slit SL2, the plate-like protrusions B1, B2, the engaging portions K1, K2, and the enlarged portions EX1, EX2 have been disclosed as an example in which a pair of each is provided, but one may be used for each. However, by providing a pair of each, even if the first conductor P1 and the second conductor P2 are rotated by 180 degrees, the cylindrical body Pa can be inserted, so that the assembly of the contact terminal Pr becomes easy.

Moreover, the contact terminal Pr does not have the 2nd conductor P2, and the cylindrical body Pa does not need to have the 2nd slit SL2. Moreover, the cylindrical body Pa does not need to have the 1st spring part Pe1, the 2nd spring part Pe2, or the center side cylindrical part Pf.

That is, a contact terminal according to an example of the present invention includes: a cylindrical body having electrical conductivity; and a first conductor having a roughly rod-like shape and being located in the cylinder on one end side of the cylindrical body a body, and an outer conductor part protruding from the one end of the cylindrical body; a first slit extending from one end of the cylindrical body toward the other end side of the cylindrical body is formed; The end portion of one end side is separated from the first end side by a preset first distance, and a narrowed portion of which the width of the first slit is reduced is provided; the rod-shaped body includes a portion located on the other end side of the first slit. The area between the end of the slack and the shrinking portion, that is, the receiving portion, protrudes to the width direction of the first slit, that is, the first direction and the second direction perpendicular to the axial direction of the cylindrical body, and can be mutually engaged with the shrinking portion. The engaging part up to the living position.

According to this structure, the engaging portion in the receiving portion protrudes to a position where the narrowing portion and the narrowing portion can be engaged with each other. Therefore, when the first conductor is about to be detached from the cylindrical body, the narrowing portion and the engaging portion are locked with each other. As a result, it becomes easy to reduce the possibility that the first conductor falls off from the cylindrical body.

Moreover, it is preferable to form the inclined surface which the protrusion amount reduces toward the said other end side on the said other end side of the said engagement part.

According to this structure, when the first conductor is inserted into the cylindrical body when the contact terminal is assembled, the inclined surface of the engaging portion abuts against the narrowing portion from the inside, and the inclined surface pushes the narrowing portion toward the outer peripheral direction while sliding. At the top, the engaging portion will exceed the narrowing portion N1 and enter into the receiving portion. Therefore, it becomes easy to assemble the contact terminal.

Moreover, it is preferable that the said 1st slit further includes the said one end side connected to the said narrow part, and it is preferable that the funnel-shaped part which becomes wider toward the said one end side is included.

According to this structure, when the first conductor is inserted into the cylindrical body when the contact terminal is assembled, the engaging portion and the funnel-shaped portion are mutually engaged. The funnel-shaped portion is connected to the one end side of the narrowing portion and widens toward the one end side. Therefore, if the engaging portion and the funnel-shaped portion are locked with each other and the first conductor is continuously inserted, the engaging portion will be guided. Lead to the reduction section. Thereby, the position of the engaging portion can be positioned at an appropriate position where the narrowing portions can be mutually locked.

In addition, the cylindrical body further includes an end-side cylindrical portion connected to the other end side of the first slit, and a coil-shaped spring portion connected to the other end side of the end-side cylindrical portion; the above-mentioned Preferably, the rod-shaped body further includes a wide portion located in the end-side cylindrical portion, and a narrow portion located in the spring portion narrower than the wide portion.

According to this configuration, since the narrow portion in the spring portion is narrow, the interval between the inner surface of the spring portion and the narrow portion is increased. As a result, even when the spring portion expands and contracts, it is possible to reduce the risk of wear between the narrow portion and the spring portion due to friction. On the other hand, since the wide portion of the cylindrical body located in the non-contractable end portion side cylindrical portion is wider than the narrow portion, the interval between the inner surface of the end portion side cylindrical portion and the wide portion is narrowed. As a result, it is possible to reduce the possibility that the first conductor will vibrate vertically in the axial direction with respect to the cylindrical body.

In addition, the cylindrical body further includes a central cylindrical portion connected to the other end side of the spring portion, and the front end of the rod-shaped body is preferably located in the central cylindrical portion.

According to this structure, the front end of the rod-shaped body avoids the spring part and is located in the center-side cylindrical part. Thereby, even in the state in which the spring portion expands and contracts during inspection, it is possible to reduce the possibility that the front end of the rod-shaped body gets caught in the spring portion, and further, the rod-shaped body can suppress the buckling of the spring portion.

In addition, the first slits are formed as a pair at positions opposite to the second direction, and the engaging portions are preferably provided individually corresponding to the pair of first slits.

According to this structure, even if the first conductor is rotated 180 degrees, the cylindrical body can be inserted, so that the assembly of the contact terminal becomes easy.

In addition, the first conductor further includes plate-like protrusions protruding in the second direction and located in the narrowing portion; the engaging portions are respectively provided on both sides of the plate-like protrusions in the first direction. good.

According to this structure, since the plate-shaped protrusion is located in the narrowing portion, the position of the engaging portion can be positioned at an appropriate position where the narrowing portion can be locked with each other.

In addition, it is preferable that the other end side wall surface of the plate-like protrusion and the end portion of the other end side of the first slit are mutually locked.

According to this structure, the insertion position of the first conductor into the cylindrical body can be positioned by the other end side wall surface of the plate-shaped protrusion and the other end side end of the first slit being mutually locked.

In addition, the first conductor includes a center plate portion extending into a plate shape and a pair of narrow plate portions narrower than the center plate portion, and has the first pair of narrow plate portions stacked on the center plate portion. The shape of the two sides in the direction; the plate-like protrusion has a shape in which the center plate portion becomes wide in the second direction; the engaging portion has a shape in which the pair of narrow plate portions widens in the second direction: good.

The first conductor system having such a shape can be easily produced by a microfabrication technique that can be formed in layers.

In addition, the narrow plate portion is further included in a position closer to the one end side than the narrowed portion, and preferably includes an enlarged portion wider than a portion located in the narrowed portion.

According to this structure, the narrow plate portion has a wide enlarged portion at a position closer to the narrowed portion than the narrowed portion where the width of the one end side is difficult to be restricted, thereby increasing the conductor cross-sectional area of the narrowed plate portion. As a result, it becomes easy to reduce the resistance value of the first conductor.

In addition, a second slit of a shape extending from the other end of the cylindrical body toward the one end side to rotate the first slit by 180 degrees is further formed in the cylindrical portion; on the other end side of the cylindrical portion Furthermore, it is preferable to mount a second conductor having a shape in which the outer conductor portion of the first conductor is rotated by 180 degrees except for the front end shape.

According to this structure, the rod-shaped conductor can be attached to both ends of the cylindrical body.

Further, an inspection jig according to an example of the present invention includes the above-mentioned contact terminal, and a support member for supporting the above-mentioned contact terminal.

According to this structure, it is possible to obtain an inspection jig using a contact terminal that can easily reduce the risk of the conductor falling off the cylindrical body.

Further, an inspection apparatus according to an example of the present invention includes the above-mentioned inspection jig, and an inspection process for performing the inspection of the inspection object based on an electrical signal obtained by bringing the contact terminal into contact with an inspection point provided in the inspection object. department.

According to this structure, it is possible to obtain an inspection device using a contact terminal that can easily reduce the risk of the conductor falling off from the cylindrical body.

In addition, a method of manufacturing a cylindrical body according to an example of the present invention is the method of manufacturing a cylindrical body of the above-mentioned contact terminal, wherein: (a1) a photoresist is formed on the outer wall surface of the conductive cylindrical member; (a2) A first shape is exposed to the photoresist at a position separated from the one end of the outer wall surface; the first shape includes a pair of sides facing the first direction gradually approaching toward the one end side , the shape of the first part that converges on one side; (a3) remove the previously exposed part of the photoresist; (a4) etch the outer wall surface exposed in the removed part of the photoresist, and from the first part The etching is continued until the enlarged and removed portion reaches the one end of the cylindrical member to form the narrowed portion.

In addition, a method for producing a cylindrical body according to an example of the present invention is the above-mentioned method for producing a cylindrical body of a contact terminal, wherein: (b1) a photoresist is formed on the outer wall surface of the conductive cylindrical member; (b2) A first shape and a second shape spaced from the first shape are exposed to the photoresist; the first shape includes a pair of sides facing the first direction as it goes toward the one end side gradually The shape of the first part that is close to and converged on one side; the second shape includes a second part extending from the one end of the outer wall surface to the direction of the other end, and a second part connected to the second part and facing the first direction. The shape of the third portion where one pair of sides is gradually approached toward the other end side and converges; (b3) the exposed portion of the photoresist is removed; (b4) the removed portion of the photoresist The portion of the outer wall surface exposed in the portion is etched, and the portion enlarged and removed from the first portion communicates with the portion enlarged and removed from the third portion to form the narrowed portion and the funnel-shaped portion.

According to these manufacturing methods, the narrowed portion of the above-mentioned cylindrical body can be formed at fine intervals.

In addition, a method of manufacturing a first conductor according to an example of the present invention is the method of manufacturing a first conductor of the above-mentioned contact terminal, wherein: (c1) one of the pair of narrow plate portions is formed; (c2) the narrow portion of the one is formed. The center plate portion is stacked on the plate portion; (c3) the other of the pair of narrow plate portions is stacked on the center plate portion.

According to this manufacturing method, the above-described first conductor can be easily manufactured.

1: Inspection device 3: Check the fixture 4: Inspection Department 6a: Loading part 6: sample table 8: Check the processing department 31a, 31b, 31c: Support plate 31: Support Components 34a: Electrodes 34: Wiring 35: Connection board 37: Test head 101: Check the object A1, A2: Undertaking Department B1, B2: Plate-like protrusions B1W:+Z sidewall face B2W:-Z sidewall face D1: first distance E: end EX1, EX2: Expansion Department F1: First shape F11, F12, F22, F23: Edge F13: Part 1 F2: Second shape F21: Part II F24: Part III Ha: through hole Ha1: Small diameter section K1, K2: Engagement part KS1, KS2: inclined plane KW1:-Z sidewall face KW2:+Z side wall surface L1: first floor L2: second floor L3: The third floor N1, N2: reduction part P1: first conductor P2: Second conductor P2A:-Z end Pa: cylindrical body Pb1, Pb2: rod body Pc1, Pc2: Outer conductor part Pe1: The first spring part (spring part) Pe2: Second spring part (spring part) Pf: Central side cylinder Pg1: the first helical groove Pe2: the second helical groove PL1, PL2: Center plate part PN1, PN2: Narrow plate PP1, PP2: end side barrel Pr: Contact terminal PS1, PS2: Narrow part PW1, PW2: Wide part R1, R2: funnel SL1: first slit SL1a:-Z side end SL2: Second slit SL2a: +Z side end T: metal tube W1,W2,W3,W4,W5: width W6: Interval

1 is a conceptual diagram schematically showing the structure of an inspection apparatus 1 provided with a contact terminal Pr according to an embodiment of the present invention. [ Fig. 2] Fig. 2 is a schematic cross-sectional view schematically showing an example of the structure of the inspection jig 3 shown in Fig. 1 . [ Fig. 3 ] An exploded view of the contact terminal Pr viewed from the X direction. [ Fig. 4 ] An exploded view of the contact terminal Pr viewed from the Y direction. [ FIG. 5 ] An enlarged perspective view of the vicinity of the first slit SL1 (the second slit SL2 ). [ FIG. 6 ] Front and side views of the first conductor P1 . [ FIG. 7 ] Front and side views of the second conductor P2 . 8 is a flowchart showing an example of a method of manufacturing the cylindrical body Pa. [ Fig. 9] Fig. 9 is an explanatory diagram of a method of manufacturing the cylindrical body Pa. [Fig. [ FIG. 10 ] An explanatory diagram of the first slit SL1 (second slit SL2 ) formed by the manufacturing method shown in FIG. 8 . 11 is a flowchart showing an example of a manufacturing method of a modification of the cylindrical body Pa. [ Fig. 12] Fig. 12 is an explanatory view of a manufacturing method of a modification of the cylindrical body Pa. [Fig. [ FIG. 13 ] An explanatory diagram of the first slit SL1 (second slit SL2 ) formed by the manufacturing method shown in FIG. 11 . [ Fig. 14 ] An explanatory diagram of a method of manufacturing the first conductor P1. [ FIG. 15 ] A cross-sectional view of the first conductor P1 (the second conductor P2 ). [ FIG. 16 ] An enlarged perspective view of the vicinity of the first slit SL1 (second slit SL2 ) according to the modification.

A1, A2: Undertaking Department

B1, B2: Plate-like protrusions

B1W:+Z sidewall face

B2W:-Z sidewall face

EX1, EX2: Expansion Department

K1, K2: Engagement part

KS1, KS2: inclined plane

KW1:-Z sidewall face

KW2:+Z side wall surface

N1, N2: reduction part

P1: first conductor

P2: Second conductor

Pa: cylindrical body

PL1, PL2: Center plate part

PN1, PN2: Narrow plate

PP1, PP2: end side barrel

R1, R2: funnel

SL1: first slit

SL1a:-Z side end

SL2: Second slit

SL2a: +Z side end

Claims (16)

A contact terminal is characterized by having: a cylindrical body, which is electrically conductive; and The first conductor has a rod-shaped body having a roughly rod-like shape and is located in the cylinder on one end side of the cylindrical body, and an outer conductor portion protruding from the one end of the cylindrical body; forming a first slit extending from one end of the cylindrical body toward the other end side of the cylindrical body; a narrowing portion in which the width of the first slit is reduced is provided at a position separated by a predetermined first distance from the end of the first slit on the other end side to the one end side; The rod-shaped body includes a receiving portion located in a region between the end portion of the first slit on the other end side and the narrowing portion, and protrudes toward the width direction of the first slit, that is, the first direction and the aforementioned An engaging portion up to a position where the second direction perpendicular to the axial direction of the cylindrical body and the narrowing portion can be mutually engaged. The contact terminal as described in claim 1, wherein, On the other end side of the engaging portion, an inclined surface whose protrusion amount decreases toward the other end side is formed. The contact terminal as described in claim 1 or 2, wherein, The first slit further includes a funnel-shaped portion that is connected to the one end side of the narrowing portion and that becomes wider toward the one end side. The contact terminal according to any one of claims 1 to 3, wherein, The cylindrical body further comprises an end-side cylindrical portion connected to the other end side of the first slit, and a coil-shaped spring portion connected to the other end side of the end-side cylindrical portion; The rod-shaped body further includes a wide portion located in the end-side cylindrical portion, and a narrow portion located in the spring portion narrower than the wide portion. The contact terminal as described in claim 4, wherein, The cylindrical body further includes a central cylindrical portion connected to the other end side of the spring portion; The front end of the rod-shaped body is located in the central cylindrical portion. The contact terminal according to any one of claims 1 to 5, wherein, The first slits form a pair at positions opposite to the second direction; The aforementioned engaging portions are individually arranged corresponding to the aforementioned pair of first slits. The contact terminal according to any one of claims 1 to 6, wherein, The first conductor further includes a plate-shaped protrusion protruding in the second direction in a plate-like shape and located in the narrowing portion; The engaging portions are respectively disposed on both sides of the plate-shaped protrusion in the first direction. The contact terminal according to claim 7, wherein, The side wall surface of the other end of the plate-shaped protrusion is locked with the end of the other end side of the first slit. The contact terminal as described in claim 7 or 8, wherein, The first conductor includes a center plate portion extending into a plate shape and a pair of narrow plate portions narrower than the center plate portion, and has the pair of narrow plate portions stacked on both sides of the first direction of the center plate portion. the shape of the side; The plate-like protrusion has a shape in which the center plate portion becomes wide in the second direction; The engaging portion has a shape in which the pair of narrow plate portions are widened in the second direction. The contact terminal as described in claim 9, wherein, The narrow plate portion further includes an enlarged portion wider than a portion located in the narrowed portion at a position closer to the one end side than the narrowed portion. The contact terminal according to any one of claims 1 to 10, wherein, In the cylindrical portion, a second slit in a shape extending from the other end of the cylindrical body toward the one end side and rotating the first slit by 180 degrees is further formed; On the other end side of the cylindrical portion, a second conductor having a shape in which the portion of the outer conductor portion of the first conductor other than the front end shape is rotated by 180 degrees is further attached. An inspection jig is characterized by having: The contact terminal described in any one of Claims 1 to 11; and The support member supports the aforementioned contact terminal. An inspection device is characterized by having: The inspection jig described in claim 12; and The inspection processing unit performs the inspection of the inspection object based on the electrical signal obtained by bringing the contact terminal into contact with the inspection point provided in the inspection object. A method for manufacturing a cylindrical body, which is the method for manufacturing a cylindrical body of a contact terminal according to any one of claims 1 to 11, characterized by: (a1) forming a photoresist on the outer wall surface of the conductive cylindrical member; (a2) exposing a first shape to the photoresist in a position spaced from the one end of the outer wall surface; The first shape includes a shape of a first portion in which the pair of sides facing the first direction are gradually approached toward the one end side and converge; (a3) removing the aforementioned exposed portion of the aforementioned photoresist; (a4) Etching the outer wall surface exposed in the removed portion of the photoresist, and continues until the portion enlarged and removed from the first portion reaches the end of the cylindrical member to form the narrowed portion The aforementioned etching. A method for manufacturing a cylindrical body, which is the method for manufacturing a cylindrical body of a contact terminal according to claim 3, characterized in that: (b1) forming a photoresist on the outer wall surface of the conductive cylindrical member; (b2) exposing a first shape and a second shape spaced from the first shape to the photoresist; The first shape includes a shape of a first portion in which the pair of sides facing the first direction are gradually approached toward the one end side and converge; The second shape includes a second portion extending from the one end of the outer wall in the direction of the other end, and a pair of sides connected to the second portion and facing the first direction as it goes toward the first direction. The shape of the third part where the other end gradually approaches, and one side converges; (b3) removing the aforementioned exposed portion of the aforementioned photoresist; (b4) Etching the outer wall surface exposed in the removed portion of the photoresist, and the enlarged and removed portion from the first portion communicates with the enlarged and removed portion from the third portion to form the reduced portion and The aforementioned etching is continued until the aforementioned funnel-shaped portion. A method for manufacturing a first conductor, which is the method for manufacturing a first conductor of a contact terminal as claimed in claim 9 or 10, characterized by: (c1) forming one of the pair of narrow plate portions; (c2) Laminating the center plate portion on the narrow plate portion of the one above; (c3) The other of the pair of narrow plate portions is stacked on the center plate portion.

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