TWI416114B - Substrate inspection tool and inspection probe - Google Patents

Abstract

[PROBLEMS] To provide a jig for inspecting substrates and an inspection probe to be used for inspecting electrical characteristics of substrates to be inspected. [MEANS FOR SOLVING PROBLEMS] A jig (1) for inspecting substrates is composed of an inspection probe (2) wherein a first end section (23) is electrically in contact with a prescribed inspecting position (101) of a substrate (100) to be inspected; a connecting electrode (4) having an electrode section (41) in electrically contact with a second end section (24) of the inspection probe (2); and a holding body (3) for holding the inspection probe (2). The holding body (3) is provided with a first guide section (31) having a first guide hole (311) for guiding the first end section (23) to the inspection position (101), and a second guide section (32) whereupon a second guide hole (321) is formed for guiding the second end section (24) to the electrode section (41). The inspection probe (2) is composed of a flexible linear conducting section (21) having the first end section (23) and the second end section (24), and an insulating section (22) applied for insulation on an outer circumference of the conducting section (21) excluding the first end section (23) and the second end section (24). The length of the second end section (24) is shorter than that of the second guide hole (321).

Description

Substrate inspection tool and inspection probe

The present invention relates to a substrate inspection mold and an inspection probe for inspecting electrical characteristics of a substrate to be inspected to be inspected.

Further, the present invention is not limited to a printed wiring board, and can be applied to, for example, a flexible substrate, a multilayer wiring substrate, an electrode plate for a liquid crystal display and a plasma display, and a substrate for packaging for a semiconductor package and a film carrier. In the inspection of electrical wiring, in this specification, all of these wiring boards are collectively referred to as "substrate."

A wiring pattern composed of a plurality of wirings is formed on the substrate, and various substrate inspection apparatuses have been developed in order to check whether the wiring patterns meet the design requirements, and have been applied in practice.

In these substrate inspection apparatuses, for example, some apparatuses select inspection positions on any two sets of wirings from a plurality of wirings constituting the wiring pattern, and check whether the inspection positions are electrically disconnected or electrically connected to each other. characteristic.

In such a device, a substrate inspection mold that holds a plurality of inspection probes is used, and one end of the inspection probe is brought into contact with the inspection point of the inspection substrate, and the other end is in contact with the electrode portion. The inspection device is electrically connected to the inspection target substrate.

The substrate inspection mold for holding the inspection probe, in order to solve the inspection probe and the electrode portion of the inspection substrate or the substrate inspection mold The contact problem between the two is structurally mounted with a spring piece that is stretched and contracted in the axial direction of the test probe, or the test probe itself is made elastic, or the test probe is deflected in the axial direction so that the test is performed. Use the probe to push outward in the axial direction.

With this configuration, the contact pressure is generated when the inspection probe comes into contact with the contact portion, thereby solving the problem of poor connection.

For example, the substrate inspection mold J shown in Fig. 6 is bent between the inspection substrate 100 and the electrode portion E by holding the flexible inspection probe P, so that the inspection probe P is oriented. The axially outer side is pushed, and a contact pressure is generated between the inspection position 101 of the substrate 100 to be inspected and the electrode portion E. By the contact pressure, the problem of contact between the inspection probe P and the substrate to be inspected 100 or the electrode portion E is solved (for example, refer to Patent Document 1 or 2).

However, in the substrate inspection mold J disclosed in Patent Document 1 or 2, when the contact probe P is brought into contact with the electrode portion, the inspection probe 2 is inclined obliquely with respect to the surface of the electrode portion E, and is subjected to each time. At the time of the load, the tip end of the inspection probe slides on the surface of the electrode portion, causing scratches on the wiring, or the contact position between the electrode portion E and the inspection probe P is moved, and the contact is unstable.

[Patent Document 1] Japanese Patent No. 3690796

[Patent Document 2] Japanese Patent No. 3690081

The present invention has been made in view of such an actual situation, and is used in order to electrically connect the substrate to be inspected and the electrode portion of the substrate for inspection. In the case of the inspection probe, an inspection probe and a substrate inspection mold capable of providing a stable contact state when the inspection probe is subjected to a load and in a conductive contact state are provided.

The invention according to claim 1 is a mold for inspecting a substrate, and an inspection probe that is in electrical contact with a predetermined inspection position of a substrate to be inspected as a test object by the first end portion, and the inspection probe a connection electrode body of the electrode portion electrically contacting the second end of the needle, and a holder disposed between the inspection substrate and the connection electrode body and holding the inspection probe, wherein the retention is performed The body has a first guiding portion provided with a first guiding hole for guiding the first end portion of the inspection probe to the inspection position, and a second guiding portion provided with the inspection probe The second end portion is guided to the second guiding hole of the electrode portion, and is disposed at a predetermined interval from the first guiding portion, wherein the inspection probe has the first end portion and the second end portion and has a flexible linear conductor portion; and an insulating portion that is insulated and coated on an outer circumference of the conductor portion except the first end portion and the second end portion, and the first end portion is in contact with the substrate to be inspected, When the inspection probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guide portion so as to abut the electrode portion so that the second end portion does not traverse. a portion of the insulating portion is inserted into the second guiding hole while being minutely spaced, and a length of the inserted insulating portion is greater than a length of the second end portion, and a long axis direction of the second end portion The length is approximately equal to or less than the above Check the outer diameter of the probe insulation.

The invention according to the second aspect of the invention provides a tool for inspecting a substrate, and an inspection probe which is electrically contacted with a predetermined inspection position of a substrate to be inspected as a test object by the first end portion, and the probe for inspection a connection electrode body of the electrode portion in which the second end portion is in conductive contact, and a holder that is disposed between the inspection substrate and the connection electrode body and holds the inspection probe, and is characterized in that the holder is a first guiding portion having a first guiding hole for guiding the first end portion of the inspection probe to the inspection position; and a second guiding portion provided with the inspection probe The second end portion is guided to the second guiding hole of the electrode portion, and is disposed at a predetermined interval from the first guiding portion, and the inspection probe has the first end portion and the second end portion and is flexible The linear conductor portion is insulated and covered with an insulating portion on the outer circumference of the conductor portion except the first end portion and the second end portion, and the first end portion is in contact with the substrate to be inspected, and is inspected. When the probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole in order to prevent the second end portion from traversing and abutting the electrode portion. a portion of the insulating portion is inserted into the second guiding hole while being minutely spaced, and a length of the inserted insulating portion is greater than a length of the second end portion, and a minimum diameter of the second guiding hole is larger than the above Check the outer diameter of the probe insulation.

The invention according to claim 3, wherein the second guiding portion is laminated with a plurality of plate-shaped members, respectively, on the member. Guided separately a guiding hole of the second end portion, the guiding holes of the plate-like member are arranged to be evenly shifted one by one in the same direction, so that the second guiding hole is inclined to a right angle direction of the board surface, and between the second end portion and the insulating portion The boundary is disposed in a guide hole of the above-described plate-like member that is in contact with the above-described connection electrode body.

According to the invention of claim 4, there is provided an inspection probe which is held by an inspection substrate for an inspection substrate which is held in electrical connection as an inspection target and an inspection device for inspecting electrical characteristics of the inspection substrate. a first guiding hole guided to the inspection substrate inspection point and a second guiding hole guided to the electrode portion of the inspection substrate mold, and electrically connecting the inspection substrate and the inspection An electrode portion of a mold for a substrate, comprising: a linear conductor portion having a first end portion and a second end portion and having flexibility; and insulating covering the first end portion and the second portion An insulating portion on an outer circumference of the conductor portion outside the end portion, the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole when being held on the holding body, the second portion The end portion is in conductive contact with the electrode portion of the mold for inspection substrate and passes through the second guide hole, the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end is made The portion does not traverse and abuts against the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole, and a portion of the insulating portion is inserted Maintaining a minute interval in the second guiding hole, and the length of the inserted insulating portion is greater than the length of the second end portion, and the length of the second end portion in the long axis direction is substantially equal to or smaller than the inspection probe insulation The outer diameter of the part.

The invention described in claim 5 is to provide an inspection probe. The needle belongs to a holder of the inspection substrate mold which is held by the inspection substrate to be electrically connected and the inspection apparatus for inspecting the electrical characteristics of the inspection substrate, and is guided to the inspection substrate through the holder. a first guiding hole of the inspection point and a second guiding hole guided to the inspection die electrode portion, and electrically connecting the inspected substrate and the electrode portion of the inspection substrate mold, characterized in that: having the first end portion And a second end portion having a flexible linear conductor portion; and an insulating portion that is insulated and covered on the outer circumference of the conductor portion except the first end portion and the second end portion, and is held in When the body is held, the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for the substrate to be inspected and passes through the above a second guiding hole, wherein the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end portion and the second end portion are in contact with the electrode portion so that the second end portion does not traverse two a portion of the adjacent insulating portion is located in the second guiding hole, a portion of the insulating portion is kept slightly spaced when inserted into the second guiding hole, and the length of the inserted insulating portion is greater than the above The length of the two end portions is such that the outer diameter of the insulating portion of the inspection probe is smaller than the minimum diameter of the second guide hole.

The above problems are solved by providing these inventions.

According to the invention of claim 1, it is possible to provide a mold for substrate inspection, in which the first end portion of the probe for flexible inspection is guided by the first guide hole of the first guide portion of the holder, and is inspected. Substrate check bit The second end of the inspection probe is guided by the second guide hole of the second guide portion of the holder, and is in contact with the electrode portion of the connection electrode body, and the first end portion is in contact with the substrate to be inspected for inspection. When the probe is bent, the second end portion and the portion of the insulating portion adjacent to the second end portion are located in the second guiding hole in order to prevent the second end portion from contacting the electrode portion without lateral displacement. a portion of the insulating portion is inserted into the second guiding hole at a minute interval, and the length of the inserted insulating portion is greater than the length of the second end portion, and the length of the second end in the direction of the minor axis is substantially equal to or less than the inspection. Since the outer diameter of the probe insulating portion is used, the inspection probe is held between the substrate to be inspected and the connection electrode body, and the second end portion can be brought into substantially right angle contact with the surface of the electrode portion even if the inspection probe is deflected.

Therefore, the substrate inspection mold can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.

According to the invention of claim 2, a substrate inspection mold can be provided, in which the first end portion of the flexible inspection probe is guided by the first guide hole of the holder first guide portion, and is inspected. The inspection position of the substrate is in contact, and the second end of the inspection probe is guided by the second guide hole of the second guide portion of the holder, and is in contact with the electrode portion of the connection electrode body, and the first end portion abuts the substrate to be inspected When the inspection probe is bent, the second end portion and the second end portion are not laterally offset in order to make the second end portion contact the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located a portion of the insulating portion is held in the second guiding hole to be inserted into the second guiding a hole, and the length of the insulating portion to be inserted is greater than a length of the second end portion, and a minimum diameter of the second guiding hole is larger than an outer diameter of the insulating portion of the inspection probe, so that the inspection probe is held on the substrate to be inspected and connected Even if the inspection probe is deflected between the electrode bodies, the second end portion may be in substantially right angle contact with the surface of the electrode portion.

Therefore, the substrate inspection mold can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.

According to the invention of claim 3, the second guiding portion is laminated with a plurality of plate-like members respectively provided with a guiding hole for guiding the second end portion, and a guiding hole for the plate-shaped member Arranged to be evenly shifted one by one in the same direction such that the second guiding hole is inclined to a right angle direction of the board surface, and a boundary between the second end portion and the insulating portion is disposed on the plate-like member that is in contact with the connecting electrode body In the guide hole, when the inspection is performed, it is possible to control so that the inspection probes are deflected by substantially the same amount in substantially the same direction.

According to the invention of the fourth aspect of the invention, it is possible to provide a test probe which is a test substrate for an inspection substrate which is held in an electrical connection as an inspection target and an inspection device for inspecting electrical characteristics of the inspection substrate. a first guiding hole which is guided to the inspection substrate inspection point and a second guiding hole which is guided to the inspection substrate mold electrode portion, and is electrically connected to the inspection substrate and the An electrode portion for inspecting a mold for a substrate, characterized by having a first end and a second end And a linear conductor portion having flexibility; and an insulating portion that is insulated and covered on the outer circumference of the conductor portion except the first end portion and the second end portion, and is held on the holding body And the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for the inspection substrate and passes through the second guiding The length of the second end of the inspection probe is smaller than the length of the guiding hole, and the length of the insulating portion located in the second guiding hole is longer than the length of the second end portion, and the second end is in the direction of the minor axis The length is substantially equal to or smaller than the outer diameter of the probe insulating portion for inspection, and the second end portion is substantially at right angles to the surface of the electrode portion in use.

Therefore, the probe for inspection can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.

According to the invention of the fifth aspect of the invention, it is possible to provide a test probe, which is a test substrate for an inspection substrate that is held in an electrical connection as an inspection target and an inspection device that inspects electrical characteristics of the inspection substrate. a first guiding hole which is guided to the inspection substrate inspection point and a second guiding hole which is guided to the inspection substrate mold electrode portion, and is electrically connected to the inspection substrate and the An electrode portion for inspecting a mold for a substrate, comprising: a conductor portion having a linear shape having a first end portion and a second end portion; and insulating covering the first end portion and the first portion The insulating portion on the outer circumference of the conductor portion outside the two end portions, the first end portion is inspected as described above when being held on the holding body The inspection position of the substrate is electrically contacted and passed through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for inspection substrate and passes through the second guiding hole, and the first end portion is inspected and inspected When the inspection probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in order to prevent the second end portion from traversing and contacting the electrode portion. In the two guiding holes, a portion of the insulating portion is kept slightly spaced when inserted into the second guiding hole, and the length of the inserted insulating portion is greater than the length of the second end portion, and the insulating of the inspection probe is The outer diameter of the portion is smaller than the minimum diameter of the second guiding hole.

Therefore, the probe for inspection can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.

The configuration of the substrate inspection mold 1 according to the embodiment of the present invention will be described below with reference to the drawings.

Fig. 1 is a cross-sectional view showing a mold for inspection of a substrate according to an embodiment of the present invention, wherein Fig. 1(a) shows a state before the test probe is subjected to a load, and Fig. 1(b) shows a load for the test probe. After the state. 2(a) is a cross-sectional view showing a holder of a mold for mold inspection according to an embodiment of the present invention, and FIG. 2(b) is an enlarged view showing a state after insertion of an inspection probe. Fig. 3 is a side view showing the probe for inspection of the embodiment of the present invention. Fig. 4(a) is a diagram showing the connection of the mold for the substrate inspection according to the embodiment of the present invention. The cross-sectional view of the polar body, the fourth (b) is a perspective view of the electrode portion of the other embodiment, and the fourth (c) is a view showing the state of the electrode portion of the inspection probe contact (b).

In addition, the various configurations of the substrate inspection mold described in the present specification are described by taking one inspection probe as an example. However, in practice, the number of inspection probes to be used depends on the number of inspection points. Root to tens of thousands of inspection probes.

The substrate inspection mold 1 has an inspection probe 2, a holder 3, and a connection electrode body 4.

The inspection probe 2 is in conductive contact with the inspection position 101 of the substrate 100 to be inspected, and is in conductive contact with the electrode portion 41 of the connection electrode body 4. The holding body 3 guides the inspection probe 2 to the predetermined inspection position 101 and the electrode portion 41 and holds it. The connected electrode body 4 transmits the detected signal to an inspection device (not shown).

The holder 3 is disposed between the substrate to be inspected 100 and the connection electrode body 4, and holds the inspection probe 2. The holding body 3 includes a first guiding portion 31 having a first guiding hole 311 for guiding the first end portion 23 of the inspection probe 2 to be in contact with a prescribed inspection position 101 of the substrate 100 to be inspected; and a second guide The portion 32 has a second guide hole 321 that guides the second end portion 24 of the inspection probe 2 to be in contact with the electrode portion 41.

The holder 3 in the embodiment of the present specification is constituted by the first guide portion 31, the second guide portion 32, and the support post 33 as shown in Fig. 2 . The first guide portion 31 and the second guide portion 32 are respectively formed of different members, and these members are integrally fixed by the stays 33. The number of the pillars 33, The shape and length are determined as needed. Further, the length of the stay 33 determines the thickness of the holding body 3 (the longitudinal length shown in Fig. 2), and therefore should be set according to the design requirements of the inspection mold.

As described above, the first guiding portion 31 is the first guiding hole 311 having the first end portion 23 of the inspection probe 2 guided to the inspection position 101. The diameter 311W of the first guiding hole 311 is smaller than the maximum diameter of the insulating portion 22 of the inspection probe 2 (the diameter 22W of the inspection probe 2), and prevents the inspection probe 2 from flying upward in the drawing. .

The first guide portion 31 shown in Fig. 2 is formed of three plate-like members in order to have three functions to be described later. However, the number of the blocks is not limited, and may be formed by one plate-shaped body or two. A plate-shaped body above the block is formed.

The first guide portion 31 shown in Fig. 2 has three plate-like members 312, 313, and 314 for guiding the (first end portion 23 of the inspection probe 2) to the inspection position. The plate-like body of 101, the plate-shaped body 313 is a plate-like body for adjusting the thickness of the first guide portion 31, and the plate-shaped body 314 is provided with a screw hole for fixing the support post 33.

Further, the thickness of the first guiding portion 31 is formed to be smaller than the length 23L of the first end portion 23.

As described above, the second guiding portion 32 is the second guiding hole 321 in which the inspection probe 2 has the second end portion 24 guided to the electrode portion 41. The diameter 321W of the second guiding hole 321 is larger than the maximum diameter of the inspection probe 2, and the inspection probe 2 can be inserted and removed.

The second guide portion 32 shown in Fig. 2 is the same as the first guide portion 31. In order to have three functions, it is formed of three plate-shaped bodies, but the number of the blocks is not limited, and may be formed by one plate-like body or two or more plate-shaped bodies.

The second guide portion 32 shown in the second (a) diagram has three plate-like members 322, 323, and 324. The plate-like member 322 is provided with a screw hole for fixing the support post 33, and the plate-shaped member 323 is for The plate-shaped body that adjusts the thickness of the second guide portion 32 is a plate-like body for guiding (the second end portion 24 of the inspection probe 2) to the electrode portion 41.

Fig. 2(b) is an enlarged view of the broken line in Fig. 2(a), showing a state in which the inspection probe 2 is inserted into the holder 3.

In the substrate inspection mold 1 according to the embodiment of the present invention, the second guide hole 321 has the boundary 26 between the second end portion 24 and the insulating portion 22, so that the influence of the deflection of the inspection probe 2 can be minimized.

At the same time, the length 24L of the second end portion 24 (see FIG. 3) is formed to be smaller than the thickness 32T of the second guiding portion 32, and the boundary 26 is still present inside the second guiding hole 321 even if the inspection probe 2 is subjected to the load. .

Thus, since the insulating portion 22 exists inside the second guiding portion 321, the gap S between the diameter 321W and the second guiding portion 321 is reduced, and even if the inspection probe 2 is deflected, the second end portion 24 is also connected to the electrode. The surface of the portion 41 is substantially in a right angle contact, so that the sliding of the inspection probe 2 can be prevented or the sway can be suppressed. Therefore, the present substrate inspection mold 1 can provide a more stable contact state with the electrode portion than the previous inspection mold.

As described above, the diameter 321W of the second guiding hole 321 is formed to be larger than the maximum diameter of the inspection probe 2 (22W shown in Fig. 3). ). The diameter 321W is formed to be 1 to 50 μm larger than the diameter 22W of the inspection probe 2, and preferably 10 to 30 μm.

For example, when the maximum diameter of the inspection probe 2 is 0.09 mm, the second guiding hole 321 can be formed to have a diameter of 0.12 mm to have a proper holding force between the inspection probe 2 and the holder 3.

In the holding body 3 shown in Fig. 2, the first guiding hole 311 and the second guiding hole 321 substantially coincide with each other in the vertical direction. However, the first guiding portion 31 or the second guiding portion 32 may be shifted by a predetermined interval in the parallel direction. Arrangement. At this time, the first guiding hole 311 and the second guiding hole 321 do not coincide with each other in the vertical direction. Therefore, when the inspection probe 2 is inserted, the inspection probe 2 is deflected, and the first guiding hole 311 or the second The side portions of the guide holes 321 are frictionally contacted and caught, and it is possible to prevent falling.

The inspection probe 2 is composed of a linear conductor portion 21 and an insulating portion 22 that is coated on the outer circumference of the conductor portion 21 (see Fig. 3).

The conductor portion 21 is formed of a material having flexibility, and when subjected to a load from the axial direction of the conductor portion 21, the conductor portion 21 is deflected in a direction substantially at right angles to the axial direction. By such deflection, a contact force for contacting the electrode portion, which will be described later, is generated between the inspection probe 2 and the inspection position.

The material of the conductor portion 21 can be suitably a suitable material as long as it has flexibility as described above, and for example, beryllium copper (BeCu) and tungsten (W) can be used.

Further, as shown in Fig. 1, the axial length of the inspection probe 2 (the length of the conductor portion 21) is required to be at least longer than the thickness of the holder 3 in order to be held by the holder 3, and it is necessary to satisfy the following conditions. long degree.

The length (axial length) of the conductor portion 21 of the test probe 2 is determined according to the size and length of the holder 3, but may be set to about 10 to 100 mm, or may be appropriately set according to the size of the mold 1 for inspection substrates.

The conductor portion 21 of the inspection probe 2 has a first end portion 23 that is in contact with the inspection position 101 of the inspection substrate 100, and a second end portion 24 that is in contact with the electrode portion 41 of the connection electrode body 4 to be described later.

As shown in FIG. 3, the first end portion 23 and the second end portion 24 are formed on the conductor portion 21 exposed from the insulating portion 22.

As shown in Fig. 1, the first end portion 23 is arranged to protrude outward from the first guiding hole 311 of the first guiding portion 31 (upward direction of the drawing). The second end portion 24, which will be described later, is arranged to protrude outward from the second guiding hole 321 of the second guiding portion 32 (downward direction of the drawing). The inspection probe 2 is the first and second guide holes 311, 321 arranged to pass through the holder 3.

At the same time, the amount of protrusion of each of the first and second end portions 23, 24 from the holding body 3 (the first guiding portion 31 and the second guiding portion 32) is determined as needed, but it must be ensured that the electrode body 4 is connected and inspected. After the substrate 100 is in contact, the inspection probe 2 is deflected, and the connection electrode body 4 and the substrate to be inspected 100 can be bonded and fixed to the holder 3, respectively.

The boundary 25 between the first end portion 23 and the insulating portion 22 is disposed inside the first guiding portion 31. The length 23L of the first end portion 23 is appropriately set according to the relationship with the holder 3 as long as the above conditions are satisfied, but is generally 10 to 50 mm, preferably 20 to 40 mm. Because if there is a length of this range, the inspection position is checked when the inspection probe 2 is flexed. The 101 and the first end portion 23 can produce a stable contact state.

The second end portion 24 is in contact with the electrode portion 41 of the connection electrode body 4. A boundary 26 between the insulating portion 22 forming the second end portion 24 is disposed in the second guiding hole 321 of the second guiding portion 32 as shown in FIG. As described above, the second end portion 24 also has a projection amount that protrudes from the second guide portion 32 in accordance with the degree of deflection of the inspection probe 2 at the time of inspection, but it is necessary to ensure that the connection electrode body 4 is in contact with the substrate to be inspected 100. Thereafter, the inspection probe 2 is deflected, and the connection electrode body 4 and the substrate to be inspected 100 can be bonded and fixed to the holder 3, respectively.

This boundary 26 is disposed inside the second guiding hole 321 such that the second end portion 24 of the inspection probe 2 can be in substantially right-angle contact with the surface of the electrode portion 41. Therefore, when the inspection probe is subjected to a load as in the prior art, the inspection probe contacts the electrode portion 41 in an inclined state, and the inspection probe is prevented from sliding on the electrode portion 41, thereby causing scratches on the electrode portion 41.

At the same time, the length 24L of the second end portion 24 is formed to be smaller than the length (thickness) of the second guiding hole 321. Because of this, the boundary 26 is still located inside the second guiding hole 321 even when the inspection probe 2 is under load.

Further, the front ends of the first end portions 23 and the second end portions 24 are preferably formed into a semispherical shape, an arc shape, or a tapered shape in front.

The length of the second end portion 24 is preferably such that the length of the insulating portion 22 located inside the second guiding hole 32 is greater than the length of the second end portion 24, and the length of the second end portion 24 in the long axis direction is substantially equal to or less than that of the inspection. The outer diameter of the needle insulating portion is such that the second end portion 24 is substantially at right angles to the surface of the electrode portion 41 when in use.

When the second end portion 24 is formed in this manner, even when the second end portion 24 is disposed on the second guide portion 32 and the inspection probe 2 is deflected, it can stand upright at a substantially right angle to the surface of the electrode portion 41.

As described above, the insulating portion 22 forming the inspection probe 2 is such that the first end portion 23 and the second end portion 24 are exposed when the conductor portion 21 is covered. Therefore, the material forming the insulating portion 22 should be an insulating material. It is preferably a material having excellent workability.

As long as it is a material satisfying the above conditions, a suitable material can be appropriately selected depending on the workability, and for example, polytetrafluoroethylene (PTFE) (so-called Teflon (registered trademark)) and a urethane resin can be used. In particular, the urethane resin excellent in fine workability can be used to form the boundaries 25, 26 in Fig. 3 at substantially right angles to the conductor portion 21.

Further, the inspection probe 2 described in the present specification and the drawings has a cylindrical shape, and the diameters of the conductor portion 21 and the insulating portion 22 are determined according to the size of the inspection position 101 of the substrate 100 to be inspected, but the diameter should be The second guide hole 321 is passed through so that the inspection probe 2 can be inserted and removed from the substrate inspection mold 1 .

The connection electrode body 4 is composed of the electrode portion 41, the base portion 42, and the fixing portion 43. The connected electrode body 4 is an electrical signal that receives current, voltage, and the like from the test probe 2.

As shown in FIG. 4, the electrode portion 41 is formed in the same plane as the surface of the connection electrode body 4. Thus, the second end portion 24 located inside the second guiding hole 321 can be stably contacted at the electrode portion 41.

As shown in FIG. 4, the electrode portion 41 is formed by a wire, and the guide One end of the wire is located on the surface of the connecting electrode body 4, and the other end of the wire is connected to the inspection device. The base portion 42 is a base member that supports the electrode portion 41. The fixing portion 43 is a fixing member for arranging the electrode portion 41.

Further, in the method of forming the connection electrode body 4, a hole for forming the electrode portion 41 may be formed in the base portion 42 at a desired position in advance. Then, a wire as the electrode portion 41 is disposed, and the adhesive forming the fixing portion 43 is filled to fix the wire. After the fixing portion 43 is formed, the wire protruding from the surface (the surface in contact with the inspection probe 2) that connects the electrode body 4 is removed. Thus, the connection electrode body 4 is formed.

As shown in Fig. 4(b), the electrode portion 41 can also be a cylindrical wire. When the electrode portion 41 is a cylindrical lead wire and the test probe 2 is in contact with the electrode portion 41, a portion of the front end of the second end portion 24 of the test probe 2 will be inside the electrode portion 41, and the inner diameter of the electrode portion 41. The periphery of the 41W 2 abuts against the second end portion 24 to provide a stable contact condition (see Figure 4(c)).

In order to have such a contact condition, the inner diameter 41W 2 of the electrode portion 41 is formed to be at least smaller than the diameter 21W of the second end portion 24 (the conductor portion 21). Further, the outer diameter 41W 1 of the electrode portion 41 is preferably substantially equal to the length of the diameter 21W of the conductor portion 21 of the inspection probe 2.

Since the connection electrode body 4 is in contact with the second guide portion 32 of the holder 3 during use, the holder 3 and the connection electrode body 4 are in a state of no contact with each other, and the second end portion 24 and the electrode portion 41 can be made. The contact situation is more stable.

The following uses the mold 1 for inspection substrate and the inspection probe for the embodiment of the present invention. A specific example of the needle 2 will be described. However, the invention is not limited to the size and shape in this specific example. A schematic diagram of this specific example is shown in Fig. 5.

The conductor portion 21 of the inspection probe 2 was processed by tungsten into a cylindrical or cylindrical shape (linear shape) having a length of about 30 mm and a diameter of 0.07 mm. At this time, both front ends of the conductor portion 21 are processed into a circular arc shape.

The insulating portion 22 is formed of a urethane resin and is coated on the outer circumference of the conductor portion 21. At this time, the first end portion 23 is formed to be 3 mm, and the second end portion 24 is formed to be 0.05 mm. The diameter 22W of the insulating portion 22 is formed to be 0.09 mm.

Further, since the insulating portion 22 is made of a urethane resin which is easy to process, the boundaries 25 and 26 can be finely machined to be substantially at right angles to the conductor portion 21.

The first guide portion 31 and the second guide portion 32 that form the holding body 3 are provided with a first guide hole 311 and a second guide hole 321 as described above, respectively. In this embodiment, the first guiding portion 31 is formed by two plate-like bodies 312, 313. The first guiding hole 311 is formed by two side portions of a plate-like body having a step. This is because when the first guiding hole 311 is formed, the upper end portion and the lower end portion of the first guiding hole 311 have a desired diameter, and the first guiding hole 311 having a desired length can be obtained.

The second guiding portion 32 is formed of three plate-like bodies 322, 323, and 324 having a height difference. Similarly to the case where the first guiding holes 311 are formed, the second guiding holes 321 are formed by the three plate-like bodies. Meanwhile, in this embodiment, the three plate-like bodies 322, 323, 324 are staggered at prescribed intervals. Thus, the second guiding hole 321 will become an oblique hole, and the inspection probe 2 is inserted and inspected. When the mold 1 is used for the substrate, it can have a certain degree of deflection. Therefore, all of the inspection probes 2 inserted into the substrate inspection mold 1 are deflected by substantially the same amount in substantially the same direction.

Further, at this time, the first guiding hole 311 is formed larger than the diameter 21W of the conductor portion 21 of the inspection probe 2, and is smaller than the diameter 22W of the insulating portion 22 by about 0.08 mm, and the second guiding hole 321 is as described above. When the inspection probe 2 is formed, it is formed to have a diameter of about 0.12 mm.

When the inspection probe 2 and the holder 3 are formed as described above, the electrode portion 41 of the electrode assembly 4 is formed by a wire having a diameter of approximately 0.09 mm which is substantially the same as the diameter of the inspection probe 2. Further, the diameter of the surface of the fixing portion 43 on the surface of the connection electrode body 4 is formed to be about 0.10 mm.

The substrate inspection mold 1 produced under such conditions can maintain a good contact with the electrode portion 41 at substantially right angles even when the inspection probe 2 receives a load from the axial direction every time the inspection is performed. Contact status.

[Industrial Availability]

In the substrate inspection mold and the inspection probe according to the embodiment of the present invention, it is possible to prevent the movement of the inspection probe contact position due to the load from being repeatedly applied, and it is possible to provide a stable contact state and to exhibit an effective effect in the substrate inspection.

1‧‧‧Working tool for substrate inspection

2‧‧‧Inspection probe

21‧‧‧Conductor Department

22‧‧‧Insulation

23‧‧‧ First end

24‧‧‧second end

25‧‧‧ border

26‧‧‧ border

3‧‧‧ Keeping body

31‧‧‧First Guidance Department

311‧‧‧First guiding hole

32‧‧‧Second Guide

321‧‧‧Second guiding hole

4‧‧‧Connecting electrode body

41‧‧‧Electrode

100‧‧‧Inspected substrate

101‧‧‧Check location

Fig. 1 is a cross-sectional view showing a mold for substrate inspection according to an embodiment of the present invention, Fig. 1(a) shows a state before the test probe receives the load, and Fig. 1(b) shows a state after the test probe receives the load.

2(a) is a cross-sectional view showing a mold holding body for substrate inspection according to an embodiment of the present invention, and FIG. 2(b) is an enlarged view showing a state in which an inspection probe is inserted into a holder.

Fig. 3 is a side view showing the probe for inspection of the embodiment of the present invention.

Fig. 4(a) is a cross-sectional view showing a die-connecting electrode assembly for a substrate inspection according to an embodiment of the present invention, and Fig. 4(b) is a perspective view showing an electrode portion of another embodiment, and Fig. 4(c) is a view showing The inspection probe is in contact with the electrode portion of Fig. 4(b).

Fig. 5 is a view showing an embodiment of a mold for substrate inspection according to a specific example of the present invention.

Fig. 6 is a view showing a conventional substrate inspection mold and an inspection probe.

1‧‧‧Working tool for substrate inspection

2‧‧‧Inspection probe

3‧‧‧ Keeping body

4‧‧‧Connecting electrode body

100‧‧‧Inspected substrate

101‧‧‧Check location

Claims (5)

A tool for inspecting a substrate, which is an inspection probe that is in electrical contact with a predetermined inspection position of a substrate to be inspected to be inspected by a first end portion, and an electrode portion that is in conductive contact with a second end portion of the inspection probe. And a support body configured to connect the electrode body between the test substrate and the connection electrode body and holding the test probe, wherein the holder has a first guide portion and is provided thereon a first guiding hole for guiding the first end of the inspection probe to the inspection position; and a second guiding portion provided with a second end for guiding the second end of the inspection probe to the electrode portion a guide hole disposed at a predetermined interval from the first guiding portion, wherein the inspection probe is provided with a linear conductor portion having the first end portion and the second end portion and having flexibility; and an insulating coating An insulating portion on an outer circumference of the conductor portion excluding the first end portion and the second end portion, wherein the first end portion is in contact with the substrate to be inspected, and when the inspection probe is bent, in order to make the second portion The portion does not traverse and abuts the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole, and a portion of the insulating portion is kept small Interposed at the second guiding hole at intervals, and the length of the inserted insulating portion is larger than the length of the second end portion, and the length of the second end portion in the long axis direction is substantially equal to or smaller than the insulating portion of the inspection probe The outer diameter. A tool for inspecting a substrate, which is an inspection probe that is in electrical contact with a predetermined inspection position of a substrate to be inspected to be inspected by a first end portion, and an electrode portion that is in conductive contact with a second end portion of the inspection probe. And a support body configured to connect the electrode body between the test substrate and the connection electrode body and holding the test probe, wherein the holder has a first guide portion and is provided thereon a first guiding hole for guiding the first end of the inspection probe to the inspection position; and a second guiding portion provided with a second end for guiding the second end of the inspection probe to the electrode portion The guiding hole is disposed at a predetermined interval from the first guiding portion, and the inspection probe is provided with a linear conductor portion having the first end portion and the second end portion and having flexibility, and is insulated and covered An insulating portion on an outer circumference of the conductor portion excluding the first end portion and the second end portion, wherein the first end portion is in contact with the substrate to be inspected, and the inspection probe is bent to make the second end The portion does not traverse and abuts the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole, and a portion of the insulating portion is kept small Inserted into the second guiding hole at intervals And the length of the insulating portion is inserted into said length is greater than the second end portion, the minimum diameter of the second guide hole is larger than the outer diameter of the insulating portion inspection probe. The substrate inspection mold according to the first or second aspect of the invention, wherein the second guide portion is laminated with a plurality of plate-shaped members, each of which is provided with a guide for guiding the second end portion. a hole, the guiding holes of the plate-like member are arranged to be evenly shifted one by one in the same direction, so that the second guiding hole is inclined to a right angle direction of the plate surface, and a boundary between the second end portion and the insulating portion is arranged at the same The electrode body is in contact with the guide hole of the above-mentioned plate member. An inspection probe belonging to a holder for holding a test substrate for holding an inspection substrate to be inspected and an inspection device for inspecting the electrical characteristics of the inspection substrate, and guiding the holder through the holder a first guiding hole of the inspection substrate inspection point and a second guiding hole guided to the electrode portion of the inspection substrate mold, and electrically connecting the inspection substrate and the electrode portion of the inspection substrate mold, wherein: a linear conductor portion having a first end portion and a second end portion and having flexibility; and an insulating portion insulated from the outer periphery of the conductor portion except the first end portion and the second end portion When being held on the holding body, the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole, and the second end portion is electrically conductive with the electrode portion of the mold for the substrate to be inspected Contacting and passing through the second guiding hole, the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end portion is in contact with the electrode portion so as not to traverse the second end portion, the second portion And a portion of the insulating portion adjacent to the second end portion is located in the second guiding hole, a portion of the insulating portion is kept slightly spaced when inserted in the second guiding hole, and is inserted into the above The length of the insulating portion is larger than the length of the second end portion, and the length of the second end portion in the longitudinal direction is substantially equal to or smaller than the outer diameter of the insulating portion of the inspection probe. An inspection probe belonging to a holder for holding a test substrate for holding an inspection substrate to be inspected and an inspection device for inspecting the electrical characteristics of the inspection substrate, and guiding the holder through the holder a first guiding hole of the inspection substrate inspection point and a second guiding hole guided to the inspection substrate electrode portion, and electrically connecting the inspected substrate An electrode portion of the mold for inspection substrate, comprising: a linear conductor portion having a first end portion and a second end portion and having flexibility; and insulating covering the first end portion and The insulating portion on the outer circumference of the conductor portion outside the second end portion is configured to electrically contact the inspection position of the substrate to be inspected and pass through the first guiding hole when held on the holder The two end portions are in conductive contact with the electrode portion of the mold for inspection substrate and pass through the second guide hole, the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end portion is made to be Abutting against the electrode portion without traversing, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole, and a portion of the insulating portion is inserted The second guide hole is kept at a minute interval, and the length of the inserted insulating portion is larger than the length of the second end portion, and the outer diameter of the insulating portion of the inspection probe is smaller than the minimum diameter of the second guide hole.