TWI416114B - Substrate inspection tool and inspection probe - Google Patents
Substrate inspection tool and inspection probe Download PDFInfo
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- TWI416114B TWI416114B TW095134805A TW95134805A TWI416114B TW I416114 B TWI416114 B TW I416114B TW 095134805 A TW095134805 A TW 095134805A TW 95134805 A TW95134805 A TW 95134805A TW I416114 B TWI416114 B TW I416114B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
Description
本發明是有關於一種用於檢查作為檢查對象的被檢查基板的電特性的基板檢查用工模及檢查用探針。The present invention relates to a substrate inspection mold and an inspection probe for inspecting electrical characteristics of a substrate to be inspected to be inspected.
並且,本發明不僅限於印刷配線基板,還可適用於例如撓性基板、多層配線基板、液晶顯示器及電漿顯示器用的電極板,以及半導體封裝用的封裝用基板及薄膜式載體等各種基板上電性配線的檢查,本說明書中,將所有這些配線基板統稱為「基板」。Further, the present invention is not limited to a printed wiring board, and can be applied to, for example, a flexible substrate, a multilayer wiring substrate, an electrode plate for a liquid crystal display and a plasma display, and a substrate for packaging for a semiconductor package and a film carrier. In the inspection of electrical wiring, in this specification, all of these wiring boards are collectively referred to as "substrate."
基板上形成有由多條配線構成的配線圖案,為了檢查配線圖案是否符合設計的要求,以前人們就開發了各種基板檢查裝置,並且已經在實際中得到應用。A wiring pattern composed of a plurality of wirings is formed on the substrate, and various substrate inspection apparatuses have been developed in order to check whether the wiring patterns meet the design requirements, and have been applied in practice.
這些基板檢查裝置中,例如,有些裝置是從構成配線圖案的多條配線中選擇任意兩組配線上的檢查位置,檢查這些檢查位置相互之間在電氣上是斷開的還是導通的等電性特性。In these substrate inspection apparatuses, for example, some apparatuses select inspection positions on any two sets of wirings from a plurality of wirings constituting the wiring pattern, and check whether the inspection positions are electrically disconnected or electrically connected to each other. characteristic.
在這種裝置中,具有這樣的結構,即利用保持多個檢查用探針的基板檢查用工模,令檢查用探針的一端與被檢查基板的檢查點接觸,另一端與電極部接觸,使檢查裝置與檢查對象基板電性連接。In such a device, a substrate inspection mold that holds a plurality of inspection probes is used, and one end of the inspection probe is brought into contact with the inspection point of the inspection substrate, and the other end is in contact with the electrode portion. The inspection device is electrically connected to the inspection target substrate.
用於保持這種檢查用探針的基板檢查用工模,為了解決檢查用探針與被檢查基板或基板檢查用工模的電極部之 間的接觸問題,在結構上,安裝了向檢查用探針的軸向伸縮的彈簧片,或讓檢查用探針自身具有彈性,或讓檢查用探針向該軸向撓曲,以使檢查用探針向軸向外側彈推。The substrate inspection mold for holding the inspection probe, in order to solve the inspection probe and the electrode portion of the inspection substrate or the substrate inspection mold The contact problem between the two is structurally mounted with a spring piece that is stretched and contracted in the axial direction of the test probe, or the test probe itself is made elastic, or the test probe is deflected in the axial direction so that the test is performed. Use the probe to push outward in the axial direction.
藉由這種結構,在檢查用探針與接觸部相接觸時將產生接觸壓,從而解決了連接不良的問題。With this configuration, the contact pressure is generated when the inspection probe comes into contact with the contact portion, thereby solving the problem of poor connection.
例如,如第6圖所示的基板檢查用工模J,藉由保持撓性的檢查用探針P,使其在被檢查基板100與電極部E之間撓曲,使得檢查用探針P向軸向外側彈推,對被檢查基板100的檢查位置101與電極部E產生接觸壓。利用該接觸壓,解決檢查用探針P與被檢查基板100或電極部E的接觸問題(例如參照專利文獻1或2)。For example, the substrate inspection mold J shown in Fig. 6 is bent between the inspection substrate 100 and the electrode portion E by holding the flexible inspection probe P, so that the inspection probe P is oriented. The axially outer side is pushed, and a contact pressure is generated between the inspection position 101 of the substrate 100 to be inspected and the electrode portion E. By the contact pressure, the problem of contact between the inspection probe P and the substrate to be inspected 100 or the electrode portion E is solved (for example, refer to Patent Document 1 or 2).
但是,專利文獻1或2所公開的基板檢查用工模J,在檢查用探針P產生接觸壓與電極部接觸時,檢查用探針2將相對於電極部E表面斜向傾斜,每次承受載荷時,檢查用探針的前端都會在電極部表面滑動,導致配線上產生劃痕,或電極部E與檢查用探針P的接觸位置移動,接觸並不穩定。However, in the substrate inspection mold J disclosed in Patent Document 1 or 2, when the contact probe P is brought into contact with the electrode portion, the inspection probe 2 is inclined obliquely with respect to the surface of the electrode portion E, and is subjected to each time. At the time of the load, the tip end of the inspection probe slides on the surface of the electrode portion, causing scratches on the wiring, or the contact position between the electrode portion E and the inspection probe P is moved, and the contact is unstable.
〔專利文獻1〕日本專利第3690796號公報[Patent Document 1] Japanese Patent No. 3690796
〔專利文獻2〕日本專利第3690801號公報[Patent Document 2] Japanese Patent No. 3690081
本發明就是鑒於這種實際情況而創作者,在為了使被檢查基板與基板檢查用工模的電極部可導電地連接而使用 檢查用探針的場合,提供一種在檢查用探針承受載荷並處於導電接觸狀態時,能夠提供穩定的接觸狀況的檢查用探針及基板檢查用工模。The present invention has been made in view of such an actual situation, and is used in order to electrically connect the substrate to be inspected and the electrode portion of the substrate for inspection. In the case of the inspection probe, an inspection probe and a substrate inspection mold capable of providing a stable contact state when the inspection probe is subjected to a load and in a conductive contact state are provided.
申請專利範圍第1項所述之發明是提供一種基板檢查用工模,屬於由第一端部與作為檢查對象的被檢查基板的規定檢查位置導電接觸的檢查用探針、具有與上述檢查用探針的第二端部導電接觸的電極部的連接電極體,及佈置在上述被檢查基板與上述連接電極體之間,並保持上述檢查用探針的保持體所構成,其特徵為:上述保持體具有第一引導部,其上設有將上述檢查用探針的第一端部引導至上述檢查位置的第一引導孔;及第二引導部,其上設有將上述檢查用探針的第二端部引導至上述電極部的第二引導孔,並佈置成與上述第一引導部具有規定的間隔,上述檢查用探針由具有上述第一端部和上述第二端部並具有可撓性的線狀導體部;及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部所構成,當上述第一端部與被檢查基板抵接,檢查用探針彎曲時,為了使上述第二端部不橫移而抵接上述電極部,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份是保持微小間隔地插入於該第二引導孔,並且被插入的上述絕緣部的長度大於上述第二端部的長度,上述第二端部的長軸方向的長度大致等於或小於上述 檢查用探針絕緣部的外徑。The invention according to claim 1 is a mold for inspecting a substrate, and an inspection probe that is in electrical contact with a predetermined inspection position of a substrate to be inspected as a test object by the first end portion, and the inspection probe a connection electrode body of the electrode portion electrically contacting the second end of the needle, and a holder disposed between the inspection substrate and the connection electrode body and holding the inspection probe, wherein the retention is performed The body has a first guiding portion provided with a first guiding hole for guiding the first end portion of the inspection probe to the inspection position, and a second guiding portion provided with the inspection probe The second end portion is guided to the second guiding hole of the electrode portion, and is disposed at a predetermined interval from the first guiding portion, wherein the inspection probe has the first end portion and the second end portion and has a flexible linear conductor portion; and an insulating portion that is insulated and coated on an outer circumference of the conductor portion except the first end portion and the second end portion, and the first end portion is in contact with the substrate to be inspected, When the inspection probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guide portion so as to abut the electrode portion so that the second end portion does not traverse. a portion of the insulating portion is inserted into the second guiding hole while being minutely spaced, and a length of the inserted insulating portion is greater than a length of the second end portion, and a long axis direction of the second end portion The length is approximately equal to or less than the above Check the outer diameter of the probe insulation.
申請專利範圍第2項所述之發明提供一種基板檢查用工模,屬於由第一端部與作為檢查對象的被檢查基板的規定檢查位置導電接觸的檢查用探針、具有與上述檢查用探針的第二端部導電接觸的電極部的連接電極體,及佈置在上述被檢查基板與上述連接電極體之間,並保持上述檢查用探針的保持體所構成,其特徵為:上述保持體具有第一引導部,其上設有將上述檢查用探針的第一端部引導至上述檢查位置的第一引導孔;及第二引導部,其上設有將上述檢查用探針的第二端部引導至上述電極部的第二引導孔,並佈置成與上述第一引導部具有規定的間隔,上述檢查用探針由具有上述第一端部和上述第二端部並具有可撓性的線狀導體部,及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部構成,當上述第一端部與被檢查基板抵接,檢查用探針彎曲時,為了使上述第二端部不橫移而抵接上述電極部,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份是保持微小間隔地插入於該第二引導孔,並且被插入的上述絕緣部的長度大於上述第二端部的長度,上述第二引導孔的最小直徑大於上述檢查用探針絕緣部的外徑。The invention according to the second aspect of the invention provides a tool for inspecting a substrate, and an inspection probe which is electrically contacted with a predetermined inspection position of a substrate to be inspected as a test object by the first end portion, and the probe for inspection a connection electrode body of the electrode portion in which the second end portion is in conductive contact, and a holder that is disposed between the inspection substrate and the connection electrode body and holds the inspection probe, and is characterized in that the holder is a first guiding portion having a first guiding hole for guiding the first end portion of the inspection probe to the inspection position; and a second guiding portion provided with the inspection probe The second end portion is guided to the second guiding hole of the electrode portion, and is disposed at a predetermined interval from the first guiding portion, and the inspection probe has the first end portion and the second end portion and is flexible The linear conductor portion is insulated and covered with an insulating portion on the outer circumference of the conductor portion except the first end portion and the second end portion, and the first end portion is in contact with the substrate to be inspected, and is inspected. When the probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole in order to prevent the second end portion from traversing and abutting the electrode portion. a portion of the insulating portion is inserted into the second guiding hole while being minutely spaced, and a length of the inserted insulating portion is greater than a length of the second end portion, and a minimum diameter of the second guiding hole is larger than the above Check the outer diameter of the probe insulation.
申請專利範圍第3項所述之發明是提供如申請專利範圍第1項或第2項所述之基板檢查用工模,其中上述第二引導部分別層壓了多塊板狀構件,該構件上分別設有引導 上述第二端部的引導孔,上述板狀構件的引導孔佈置成沿同一方向逐個均勻錯開,使得上述第二引導孔向板面的直角方向傾斜,上述第二端部與上述絕緣部之間的邊界佈置在與上述連接電極體相接的上述板狀構件的引導孔內。The invention according to claim 3, wherein the second guiding portion is laminated with a plurality of plate-shaped members, respectively, on the member. Guided separately a guiding hole of the second end portion, the guiding holes of the plate-like member are arranged to be evenly shifted one by one in the same direction, so that the second guiding hole is inclined to a right angle direction of the board surface, and between the second end portion and the insulating portion The boundary is disposed in a guide hole of the above-described plate-like member that is in contact with the above-described connection electrode body.
申請專利範圍第4項所述之發明是提供一種檢查用探針,屬於其被保持在電氣連接作為檢查對象的被檢查基板與檢查該被檢查基板電特性的檢查裝置的檢查基板用工模的保持體上,穿過該保持體具有的引導到該被檢查基板檢查點的第一引導孔和引導到該檢查基板用工模的電極部的第二引導孔,並電氣連接該被檢查基板與該檢查基板用工模的電極部,其特徵為:由具有第一端部和第二端部,並具有可撓性的線狀的導體部;及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部所構成,在被保持在保持體上時,該第一端部與上述被檢查基板的檢查位置導電接觸並穿過上述第一引導孔,該第二端部與上述被檢查基板用工模的電極部導電接觸並穿過上述第二引導孔,上述第一端部抵接於被檢查基板,檢查用探針彎曲時,為了使上述第二端部不橫移而抵接於上述電極部,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份在插於該第二引導孔時保持微小間隔,並且被插入的上述絕緣部的長度大於上述第二端部的長度,上述第二端部的長軸方向的長度大致等於或小於上述檢查用探針絕緣部的外徑。According to the invention of claim 4, there is provided an inspection probe which is held by an inspection substrate for an inspection substrate which is held in electrical connection as an inspection target and an inspection device for inspecting electrical characteristics of the inspection substrate. a first guiding hole guided to the inspection substrate inspection point and a second guiding hole guided to the electrode portion of the inspection substrate mold, and electrically connecting the inspection substrate and the inspection An electrode portion of a mold for a substrate, comprising: a linear conductor portion having a first end portion and a second end portion and having flexibility; and insulating covering the first end portion and the second portion An insulating portion on an outer circumference of the conductor portion outside the end portion, the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole when being held on the holding body, the second portion The end portion is in conductive contact with the electrode portion of the mold for inspection substrate and passes through the second guide hole, the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end is made The portion does not traverse and abuts against the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located in the second guiding hole, and a portion of the insulating portion is inserted Maintaining a minute interval in the second guiding hole, and the length of the inserted insulating portion is greater than the length of the second end portion, and the length of the second end portion in the long axis direction is substantially equal to or smaller than the inspection probe insulation The outer diameter of the part.
申請專利範圍第5項所述之發明是提供一種檢查用探 針,屬於其被保持在電氣連接作為檢查對象的被檢查基板與檢查該被檢查基板電特性的檢查裝置的檢查基板用工模的保持體上,穿過該保持體具有的引導到該被檢查基板檢查點的第一引導孔和引導到該檢查基板用工模電極部的第二引導孔,並電氣連接該被檢查基板與該檢查基板用工模的電極部,其特徵為:由具有第一端部和第二端部,並具有可撓性的線狀的導體部;及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部構成,在被保持在保持體上時,該第一端部與上述被檢查基板的檢查位置導電接觸並穿過上述第一引導孔,該第二端部與上述被檢查基板用工模的電極部導電接觸並穿過上述第二引導孔,上述第一端部抵接被檢查基板,檢查用探針彎曲時,為了使上述第二端部不橫移而抵接於上述電極部,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份在插入於該第二引導孔時保持微小間隔,並且被插入的上述絕緣部的長度大於上述第二端部的長度,上述檢查用探針的絕緣部的外徑小於上述第二引導孔的最小直徑。The invention described in claim 5 is to provide an inspection probe. The needle belongs to a holder of the inspection substrate mold which is held by the inspection substrate to be electrically connected and the inspection apparatus for inspecting the electrical characteristics of the inspection substrate, and is guided to the inspection substrate through the holder. a first guiding hole of the inspection point and a second guiding hole guided to the inspection die electrode portion, and electrically connecting the inspected substrate and the electrode portion of the inspection substrate mold, characterized in that: having the first end portion And a second end portion having a flexible linear conductor portion; and an insulating portion that is insulated and covered on the outer circumference of the conductor portion except the first end portion and the second end portion, and is held in When the body is held, the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for the substrate to be inspected and passes through the above a second guiding hole, wherein the first end portion abuts against the substrate to be inspected, and when the inspection probe is bent, the second end portion and the second end portion are in contact with the electrode portion so that the second end portion does not traverse two a portion of the adjacent insulating portion is located in the second guiding hole, a portion of the insulating portion is kept slightly spaced when inserted into the second guiding hole, and the length of the inserted insulating portion is greater than the above The length of the two end portions is such that the outer diameter of the insulating portion of the inspection probe is smaller than the minimum diameter of the second guide hole.
藉由提供這些發明來解決上述問題。The above problems are solved by providing these inventions.
根據申請專利範圍第1項所述之發明,可以提供一種基板檢查用工模,其可撓性檢查用探針的第一端部被保持體第一引導部的第一引導孔引導,與被檢查基板的檢查位 置接觸,並且檢查用探針的第二端部被保持體第二引導部的第二引導孔引導,與連接電極體的電極部接觸,上述第一端部與被檢查基板抵接,檢查用探針彎曲時,為了使上述第二端部與上述電極部接觸而無橫向偏移,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份保持微小間隔插入於該第二引導孔,並且被插入的上述絕緣部的長度大於第二端部的長度,第二端部長軸方向的長度大致等於或小於檢查用探針絕緣部的外徑,因而檢查用探針被保持在被檢查基板與連接電極體之間,即使檢查用探針撓曲,第二端部也可以與電極部表面大致成直角接觸。According to the invention of claim 1, it is possible to provide a mold for substrate inspection, in which the first end portion of the probe for flexible inspection is guided by the first guide hole of the first guide portion of the holder, and is inspected. Substrate check bit The second end of the inspection probe is guided by the second guide hole of the second guide portion of the holder, and is in contact with the electrode portion of the connection electrode body, and the first end portion is in contact with the substrate to be inspected for inspection. When the probe is bent, the second end portion and the portion of the insulating portion adjacent to the second end portion are located in the second guiding hole in order to prevent the second end portion from contacting the electrode portion without lateral displacement. a portion of the insulating portion is inserted into the second guiding hole at a minute interval, and the length of the inserted insulating portion is greater than the length of the second end portion, and the length of the second end in the direction of the minor axis is substantially equal to or less than the inspection. Since the outer diameter of the probe insulating portion is used, the inspection probe is held between the substrate to be inspected and the connection electrode body, and the second end portion can be brought into substantially right angle contact with the surface of the electrode portion even if the inspection probe is deflected.
因此,本基板檢查用工模是可以提供穩定的接觸狀況。同時,由於第二端部與電極部表面大致成直角,不僅能防止因在電極部表面上滑動而導致劃痕產生,還可以防止第二端部與電極部接觸位置的偏移。Therefore, the substrate inspection mold can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.
根據申請專利範圍第2項所述之發明,可以提供一種基板檢查用工模,其可撓性檢查用探針的第一端部被保持體第一引導部的第一引導孔引導,與被檢查基板的檢查位置接觸,並且檢查用探針的第二端部被保持體第二引導部的第二引導孔引導,與連接電極體的電極部接觸,上述第一端部與被檢查基板抵接,檢查用探針彎曲時,為了使上述第二端部與上述電極部接觸而無橫向偏移,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份保持微小間隔插入該第二引導 孔,並且被插入的上述絕緣部的長度大於第二端部的長度,第二引導孔的最小直徑大於檢查用探針絕緣部的外徑,因而檢查用探針被保持在被檢查基板與連接電極體之間,即使檢查用探針撓曲,第二端部也可以與電極部表面大致成直角接觸。According to the invention of claim 2, a substrate inspection mold can be provided, in which the first end portion of the flexible inspection probe is guided by the first guide hole of the holder first guide portion, and is inspected. The inspection position of the substrate is in contact, and the second end of the inspection probe is guided by the second guide hole of the second guide portion of the holder, and is in contact with the electrode portion of the connection electrode body, and the first end portion abuts the substrate to be inspected When the inspection probe is bent, the second end portion and the second end portion are not laterally offset in order to make the second end portion contact the electrode portion, and the second end portion and a portion of the insulating portion adjacent to the second end portion are located a portion of the insulating portion is held in the second guiding hole to be inserted into the second guiding a hole, and the length of the insulating portion to be inserted is greater than a length of the second end portion, and a minimum diameter of the second guiding hole is larger than an outer diameter of the insulating portion of the inspection probe, so that the inspection probe is held on the substrate to be inspected and connected Even if the inspection probe is deflected between the electrode bodies, the second end portion may be in substantially right angle contact with the surface of the electrode portion.
因此,本基板檢查用工模是可以提供穩定的接觸狀況。同時,由於第二端部與電極部表面大致成直角,不僅能防止因在電極部表面上滑動而導致劃痕產生,還可以防止第二端部與電極部接觸位置的偏移。Therefore, the substrate inspection mold can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.
根據申請專利範圍第3項所述之發明,由於上述第二引導部分別層壓了多塊板狀構件,該構件上設有引導上述第二端部的引導孔,上述板狀構件的引導孔佈置成沿同一方向逐個均勻錯開,使得上述第二引導孔向板面的直角方向傾斜,上述第二端部與上述絕緣部之間的邊界佈置在與上述連接電極體相接的上述板狀構件的引導孔內,因而在進行檢查時,可以進行控制,使檢查用探針向大致相同的方向只撓曲大致相同的量。According to the invention of claim 3, the second guiding portion is laminated with a plurality of plate-like members respectively provided with a guiding hole for guiding the second end portion, and a guiding hole for the plate-shaped member Arranged to be evenly shifted one by one in the same direction such that the second guiding hole is inclined to a right angle direction of the board surface, and a boundary between the second end portion and the insulating portion is disposed on the plate-like member that is in contact with the connecting electrode body In the guide hole, when the inspection is performed, it is possible to control so that the inspection probes are deflected by substantially the same amount in substantially the same direction.
根據申請專利範圍第4項所述之發明,可以提供一種檢查用探針,屬於其被保持在電氣連接作為檢查對象的被檢查基板與檢查該被檢查基板電特性的檢查裝置的檢查基板用工模的保持體上,穿過該保持體具有的引導到該被檢查基板檢查點的第一引導孔和引導到該檢查基板用工模電極部的第二引導孔,並電氣連接該被檢查基板與該檢查基板用工模的電極部,其特徵為:由具有第一端部和第二端 部,並具有可撓性的線狀的導體部;及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部所構成,在被保持在保持體上時,該第一端部與上述被檢查基板的檢查位置導電接觸並穿過上述第一引導孔,該第二端部與上述被檢查基板用工模的電極部導電接觸並穿過上述第二引導孔,上述檢查用探針第二端部的長度小於上述引導孔的長度,且位於上述第二引導孔內的上述絕緣部的長度大於上述第二端部的長度,第二端部長軸方向的長度大致等於或小於檢查用探針絕緣部的外徑,以在使用時上述第二端部與上述電極部的表面大致成直角。According to the invention of the fourth aspect of the invention, it is possible to provide a test probe which is a test substrate for an inspection substrate which is held in an electrical connection as an inspection target and an inspection device for inspecting electrical characteristics of the inspection substrate. a first guiding hole which is guided to the inspection substrate inspection point and a second guiding hole which is guided to the inspection substrate mold electrode portion, and is electrically connected to the inspection substrate and the An electrode portion for inspecting a mold for a substrate, characterized by having a first end and a second end And a linear conductor portion having flexibility; and an insulating portion that is insulated and covered on the outer circumference of the conductor portion except the first end portion and the second end portion, and is held on the holding body And the first end portion is in conductive contact with the inspection position of the substrate to be inspected and passes through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for the inspection substrate and passes through the second guiding The length of the second end of the inspection probe is smaller than the length of the guiding hole, and the length of the insulating portion located in the second guiding hole is longer than the length of the second end portion, and the second end is in the direction of the minor axis The length is substantially equal to or smaller than the outer diameter of the probe insulating portion for inspection, and the second end portion is substantially at right angles to the surface of the electrode portion in use.
因此,本檢查用探針是可以提供穩定的接觸狀況。同時,由於第二端部與電極部表面大致成直角,不僅能防止因在電極部表面上滑動而導致劃痕產生,還可以防止第二端部與電極部接觸位置的偏移。Therefore, the probe for inspection can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.
根據申請專利範圍第5項所述之發明,可以提供一種檢查用探針,屬於其被保持在電氣連接作為檢查對象的被檢查基板與檢查該被檢查基板電特性的檢查裝置的檢查基板用工模的保持體上,穿過該保持體具有的引導到該被檢查基板檢查點的第一引導孔和引導到該檢查基板用工模電極部的第二引導孔,並電氣連接該被檢查基板與該檢查基板用工模的電極部,其特徵為:由具有第一端部和第二端部,並具有可撓性的線狀的導體部;及絕緣包覆在除上述第一端部和上述第二端部外的上述導體部外周的絕緣部所構成,在被保持在保持體上時,該第一端部與上述被檢查 基板的檢查位置導電接觸並穿過上述第一引導孔,該第二端部與上述被檢查基板用工模的電極部導電接觸並穿過上述第二引導孔,上述第一端部抵接被檢查基板,檢查用探針彎曲時,為了使上述第二端部不橫移而抵接上述電極部,上述第二端部和與該第二端部相鄰的上述絕緣部的一部份位於第二引導孔內,該絕緣部的一部份在插入於該第二引導孔時保持微小間隔,並且被插入的上述絕緣部的長度大於上述第二端部的長度,上述檢查用探針的絕緣部的外徑小於上述第二引導孔的最小直徑。According to the invention of the fifth aspect of the invention, it is possible to provide a test probe, which is a test substrate for an inspection substrate that is held in an electrical connection as an inspection target and an inspection device that inspects electrical characteristics of the inspection substrate. a first guiding hole which is guided to the inspection substrate inspection point and a second guiding hole which is guided to the inspection substrate mold electrode portion, and is electrically connected to the inspection substrate and the An electrode portion for inspecting a mold for a substrate, comprising: a conductor portion having a linear shape having a first end portion and a second end portion; and insulating covering the first end portion and the first portion The insulating portion on the outer circumference of the conductor portion outside the two end portions, the first end portion is inspected as described above when being held on the holding body The inspection position of the substrate is electrically contacted and passed through the first guiding hole, and the second end portion is in conductive contact with the electrode portion of the mold for inspection substrate and passes through the second guiding hole, and the first end portion is inspected and inspected When the inspection probe is bent, the second end portion and a portion of the insulating portion adjacent to the second end portion are located in order to prevent the second end portion from traversing and contacting the electrode portion. In the two guiding holes, a portion of the insulating portion is kept slightly spaced when inserted into the second guiding hole, and the length of the inserted insulating portion is greater than the length of the second end portion, and the insulating of the inspection probe is The outer diameter of the portion is smaller than the minimum diameter of the second guiding hole.
因此,本檢查用探針可以提供穩定的接觸狀況。同時,由於第二端部與電極部表面大致成直角,不僅能防止因在電極部表面上滑動而導致劃痕產生,還可以防止第二端部與電極部接觸位置的偏移。Therefore, the probe for inspection can provide a stable contact condition. At the same time, since the second end portion is substantially at right angles to the surface of the electrode portion, it is possible to prevent not only the occurrence of scratches due to sliding on the surface of the electrode portion but also the displacement of the contact position between the second end portion and the electrode portion.
下面參照圖式說明本發明實施例的基板檢查用工模1的構成。The configuration of the substrate inspection mold 1 according to the embodiment of the present invention will be described below with reference to the drawings.
第1圖是表示本發明實施例的基板檢查用工模的斷面圖,第1(a)圖是表示檢查用探針承受載荷前的狀態,第1(b)圖表示檢查用探針承受載荷後的狀態。第2(a)是表示本發明實施例的基板檢查用工模的保持體的斷面圖,第2(b)圖是檢查用探針插入後狀態的放大圖。第3圖是表示本發明實施例的檢查用探針的側視圖。第4(a)圖是表示本發明實施例的基板檢查用工模的連接電 極體的斷面圖,第4(b)圖是其他實施例的電極部的立體圖,第4(c)圖是表示檢查用探針接觸(b)的電極部的狀況。Fig. 1 is a cross-sectional view showing a mold for inspection of a substrate according to an embodiment of the present invention, wherein Fig. 1(a) shows a state before the test probe is subjected to a load, and Fig. 1(b) shows a load for the test probe. After the state. 2(a) is a cross-sectional view showing a holder of a mold for mold inspection according to an embodiment of the present invention, and FIG. 2(b) is an enlarged view showing a state after insertion of an inspection probe. Fig. 3 is a side view showing the probe for inspection of the embodiment of the present invention. Fig. 4(a) is a diagram showing the connection of the mold for the substrate inspection according to the embodiment of the present invention. The cross-sectional view of the polar body, the fourth (b) is a perspective view of the electrode portion of the other embodiment, and the fourth (c) is a view showing the state of the electrode portion of the inspection probe contact (b).
另外,本說明書中說明的基板檢查用工模的各種構成,是以1根檢查用探針為例進行說明,但實際中,檢查用探針的使用根數取決於檢查點的數量,可以設置幾根至幾萬根的檢查用探針。In addition, the various configurations of the substrate inspection mold described in the present specification are described by taking one inspection probe as an example. However, in practice, the number of inspection probes to be used depends on the number of inspection points. Root to tens of thousands of inspection probes.
基板檢查用工模1是具有檢查用探針2,保持體3和連接電極體4。The substrate inspection mold 1 has an inspection probe 2, a holder 3, and a connection electrode body 4.
檢查用探針2是與被檢查基板100的檢查位置101導電接觸,同時與連接電極體4的電極部41導電接觸。保持體3將檢查用探針2引導到規定的檢查位置101及電極部41並保持。連接電極體4是向檢查裝置(省略圖示)傳遞所檢測出的信號。The inspection probe 2 is in conductive contact with the inspection position 101 of the substrate 100 to be inspected, and is in conductive contact with the electrode portion 41 of the connection electrode body 4. The holding body 3 guides the inspection probe 2 to the predetermined inspection position 101 and the electrode portion 41 and holds it. The connected electrode body 4 transmits the detected signal to an inspection device (not shown).
保持體3佈置在被檢查基板100與連接電極體4之間,保持檢查用探針2。該保持體3包括第一引導部31,其具有引導檢查用探針2的第一端部23,使之與被檢查基板100的規定檢查位置101接觸的第一引導孔311;和第二引導部32,其具有引導檢查用探針2的第二端部24,使之與電極部41接觸的第二引導孔321。The holder 3 is disposed between the substrate to be inspected 100 and the connection electrode body 4, and holds the inspection probe 2. The holding body 3 includes a first guiding portion 31 having a first guiding hole 311 for guiding the first end portion 23 of the inspection probe 2 to be in contact with a prescribed inspection position 101 of the substrate 100 to be inspected; and a second guide The portion 32 has a second guide hole 321 that guides the second end portion 24 of the inspection probe 2 to be in contact with the electrode portion 41.
本說明書實施例中的保持體3,如第2圖所示,由第一引導部31、第二引導部32和支柱33所構成。該第一引導部31和第二引導部32是分別由不同的構件形成,這些構件用支柱33固定成為一體。該支柱33所設置的數量、 形狀和長度根據需要決定。另外,該支柱33的長度將決定保持體3的厚度(第2圖所示的縱向長度),所以還應根據檢查工模設計上的要求所設定。The holder 3 in the embodiment of the present specification is constituted by the first guide portion 31, the second guide portion 32, and the support post 33 as shown in Fig. 2 . The first guide portion 31 and the second guide portion 32 are respectively formed of different members, and these members are integrally fixed by the stays 33. The number of the pillars 33, The shape and length are determined as needed. Further, the length of the stay 33 determines the thickness of the holding body 3 (the longitudinal length shown in Fig. 2), and therefore should be set according to the design requirements of the inspection mold.
如上所述,第一引導部31是具有將檢查用探針2的第一端部23引導到檢查位置101的第一引導孔311。該第一引導孔311的直徑311W是形成小於檢查用探針2的絕緣部22所具有的最大直徑(檢查用探針2的直徑22W),防止檢查用探針2面向圖式向上方飛出。As described above, the first guiding portion 31 is the first guiding hole 311 having the first end portion 23 of the inspection probe 2 guided to the inspection position 101. The diameter 311W of the first guiding hole 311 is smaller than the maximum diameter of the insulating portion 22 of the inspection probe 2 (the diameter 22W of the inspection probe 2), and prevents the inspection probe 2 from flying upward in the drawing. .
第2圖所示的第一引導部31,是為了具有後述的三種機能,由3塊板狀體所形成,但該塊數並沒有限定,可以由一塊板狀體所形成,也可以由兩塊以上的板狀體所形成。The first guide portion 31 shown in Fig. 2 is formed of three plate-like members in order to have three functions to be described later. However, the number of the blocks is not limited, and may be formed by one plate-shaped body or two. A plate-shaped body above the block is formed.
該第2圖所示的第一引導部31是具有3塊板狀體312、313、314,板狀體312是用於將檢查用探針2(的第一端部23)引導到檢查位置101的板狀體,板狀體313是用於調整第一引導部31的厚度的板狀體,板狀體314上設有用於固定支柱33的螺釘孔。The first guide portion 31 shown in Fig. 2 has three plate-like members 312, 313, and 314 for guiding the (first end portion 23 of the inspection probe 2) to the inspection position. The plate-like body of 101, the plate-shaped body 313 is a plate-like body for adjusting the thickness of the first guide portion 31, and the plate-shaped body 314 is provided with a screw hole for fixing the support post 33.
另外,該第一引導部31的厚度是形成小於第一端部23的長度23L。Further, the thickness of the first guiding portion 31 is formed to be smaller than the length 23L of the first end portion 23.
如上所述,第二引導部32是檢查用探針2具有將第二端部24引導到電極部41的第二引導孔321。該第二引導孔321的直徑321W是形成大於檢查用探針2所具有的最大直徑,可以插拔檢查用探針2。As described above, the second guiding portion 32 is the second guiding hole 321 in which the inspection probe 2 has the second end portion 24 guided to the electrode portion 41. The diameter 321W of the second guiding hole 321 is larger than the maximum diameter of the inspection probe 2, and the inspection probe 2 can be inserted and removed.
第2圖所示的第二引導部32是與第一引導部31同樣 ,為了具有三種功能,由3塊板狀體所形成,但該塊數並沒有限定,可以由一塊板狀體所形成,也可以由兩塊以上的板狀體所形成。The second guide portion 32 shown in Fig. 2 is the same as the first guide portion 31. In order to have three functions, it is formed of three plate-shaped bodies, but the number of the blocks is not limited, and may be formed by one plate-like body or two or more plate-shaped bodies.
該第2(a)圖所示的第二引導部32是具有3塊板狀體322、323、324,板狀體322上設有用於固定支柱33的螺釘孔,板狀體323是用於調整第二引導部32的厚度的板狀體,板狀體324是用於將檢查用探針2(的第二端部24)引導到電極部41的板狀體。The second guide portion 32 shown in the second (a) diagram has three plate-like members 322, 323, and 324. The plate-like member 322 is provided with a screw hole for fixing the support post 33, and the plate-shaped member 323 is for The plate-shaped body that adjusts the thickness of the second guide portion 32 is a plate-like body for guiding (the second end portion 24 of the inspection probe 2) to the electrode portion 41.
第2(b)圖是第2(a)圖中虛線處的放大圖,表示檢查用探針2插入於保持體3的狀態。Fig. 2(b) is an enlarged view of the broken line in Fig. 2(a), showing a state in which the inspection probe 2 is inserted into the holder 3.
本發明實施例的基板檢查用工模1中,該第二引導孔321內存在第二端部24與絕緣部22的邊界26,因此可以將檢查用探針2的撓曲的影響限制到最小。In the substrate inspection mold 1 according to the embodiment of the present invention, the second guide hole 321 has the boundary 26 between the second end portion 24 and the insulating portion 22, so that the influence of the deflection of the inspection probe 2 can be minimized.
同時,該第二端部24的長度24L(見第3圖)是形成小於第二引導部32的厚度32T,即使檢查用探針2承受載重,該邊界26仍存在於第二引導孔321內部。At the same time, the length 24L of the second end portion 24 (see FIG. 3) is formed to be smaller than the thickness 32T of the second guiding portion 32, and the boundary 26 is still present inside the second guiding hole 321 even if the inspection probe 2 is subjected to the load. .
這樣,由於絕緣部22存在於第二引導部321內部,使得與第二引導部321的直徑321W之間的間隙S減小,即使檢查用探針2撓曲,第二端部24也與電極部41的表面大致成直角接觸,從而可以防止檢查用探針2的滑動,或抑制晃動。因此,本基板檢查用工模1可以提供比以前的檢查工模更加穩定的與電極部的接觸狀態。Thus, since the insulating portion 22 exists inside the second guiding portion 321, the gap S between the diameter 321W and the second guiding portion 321 is reduced, and even if the inspection probe 2 is deflected, the second end portion 24 is also connected to the electrode. The surface of the portion 41 is substantially in a right angle contact, so that the sliding of the inspection probe 2 can be prevented or the sway can be suppressed. Therefore, the present substrate inspection mold 1 can provide a more stable contact state with the electrode portion than the previous inspection mold.
如上所述,第二引導孔321的直徑321W是形成為大於檢查用探針2所具有的最大直徑(第3圖所示的22W )。該直徑321W是形成比檢查用探針2的直徑22W大1~50μm,最好是大10~30μm。As described above, the diameter 321W of the second guiding hole 321 is formed to be larger than the maximum diameter of the inspection probe 2 (22W shown in Fig. 3). ). The diameter 321W is formed to be 1 to 50 μm larger than the diameter 22W of the inspection probe 2, and preferably 10 to 30 μm.
例如,檢查用探針2的最大直徑形成0.09mm時,第二引導孔321可以形成直徑0.12mm,以在檢查用探針2與保持體3之間,具有合適的保持力。For example, when the maximum diameter of the inspection probe 2 is 0.09 mm, the second guiding hole 321 can be formed to have a diameter of 0.12 mm to have a proper holding force between the inspection probe 2 and the holder 3.
第2圖所示的保持體3,是第一引導孔311與第二引導孔321大致在垂直方向一致,但也可以將第一引導部31或第二引導部32沿平行方向錯開規定的間隔佈置。此時,第一引導孔311與第二引導孔321在垂直方向的一直線上不一致,因此當檢查用探針2插入後,檢查用探針2會撓曲,與第一引導孔311或第二引導孔321的側部摩擦接觸而卡住,可以防止掉落。In the holding body 3 shown in Fig. 2, the first guiding hole 311 and the second guiding hole 321 substantially coincide with each other in the vertical direction. However, the first guiding portion 31 or the second guiding portion 32 may be shifted by a predetermined interval in the parallel direction. Arrangement. At this time, the first guiding hole 311 and the second guiding hole 321 do not coincide with each other in the vertical direction. Therefore, when the inspection probe 2 is inserted, the inspection probe 2 is deflected, and the first guiding hole 311 or the second The side portions of the guide holes 321 are frictionally contacted and caught, and it is possible to prevent falling.
檢查用探針2是由線狀的導體部21和包覆在導體部21外周的絕緣部22所構成(見第3圖)。The inspection probe 2 is composed of a linear conductor portion 21 and an insulating portion 22 that is coated on the outer circumference of the conductor portion 21 (see Fig. 3).
該導體部21是由具有撓性的材料所形成,當承受來自導體部21軸向的負荷時,導體部21將向與軸向大致成直角的方向撓曲。藉由這樣的撓曲,檢查用探針2與檢查位置之間將產生後述的用於與電極部接觸的接觸力。The conductor portion 21 is formed of a material having flexibility, and when subjected to a load from the axial direction of the conductor portion 21, the conductor portion 21 is deflected in a direction substantially at right angles to the axial direction. By such deflection, a contact force for contacting the electrode portion, which will be described later, is generated between the inspection probe 2 and the inspection position.
該導體部21的材料是可以適當採用合適的材料,只要其具有如上所述的撓性,例如,可以採用鈹銅(BeCu)及鎢(W)。The material of the conductor portion 21 can be suitably a suitable material as long as it has flexibility as described above, and for example, beryllium copper (BeCu) and tungsten (W) can be used.
另外,檢查用探針2的軸向長度(導體部21的長度)如第1圖所示,為了用保持體3保持,至少需要形成大於保持體3厚度的長度,同時還需要滿足如下條件的長 度。Further, as shown in Fig. 1, the axial length of the inspection probe 2 (the length of the conductor portion 21) is required to be at least longer than the thickness of the holder 3 in order to be held by the holder 3, and it is necessary to satisfy the following conditions. long degree.
該檢查用探針2的導體部21的長度(軸向長度)根據保持體3的大小及長度決定,但可以形成10~100mm左右,或根據檢查基板用工模1的大小適當設定。The length (axial length) of the conductor portion 21 of the test probe 2 is determined according to the size and length of the holder 3, but may be set to about 10 to 100 mm, or may be appropriately set according to the size of the mold 1 for inspection substrates.
檢查用探針2的導體部21具有與被檢查基板100的檢查位置101接觸的第一端部23,和與後述的連接電極體4的電極部41接觸的第二端部24。The conductor portion 21 of the inspection probe 2 has a first end portion 23 that is in contact with the inspection position 101 of the inspection substrate 100, and a second end portion 24 that is in contact with the electrode portion 41 of the connection electrode body 4 to be described later.
如第3圖所示,第一端部23和第二端部24是形成在從絕緣部22露出的導體部21。As shown in FIG. 3, the first end portion 23 and the second end portion 24 are formed on the conductor portion 21 exposed from the insulating portion 22.
如第1圖所示,該第一端部23是佈置成從第一引導部31的第一引導孔311向外側(圖式的上方向)突出。而後述的第二端部24是佈置成從第二引導部32的第二引導孔321向外側(圖式的下方向)突出。檢查用探針2是佈置成穿過保持體3的第一及第二引導孔311、321。As shown in Fig. 1, the first end portion 23 is arranged to protrude outward from the first guiding hole 311 of the first guiding portion 31 (upward direction of the drawing). The second end portion 24, which will be described later, is arranged to protrude outward from the second guiding hole 321 of the second guiding portion 32 (downward direction of the drawing). The inspection probe 2 is the first and second guide holes 311, 321 arranged to pass through the holder 3.
同時,第一及第二端部23、24各自從保持體3(第一引導部31及第二引導部32)突出的突出量根據需要決定,但必須保證佈置成連接電極體4與被檢查基板100接觸後,檢查用探針2撓曲,連接電極體4與被檢查基板100能夠分別與保持體3貼合固定。At the same time, the amount of protrusion of each of the first and second end portions 23, 24 from the holding body 3 (the first guiding portion 31 and the second guiding portion 32) is determined as needed, but it must be ensured that the electrode body 4 is connected and inspected. After the substrate 100 is in contact, the inspection probe 2 is deflected, and the connection electrode body 4 and the substrate to be inspected 100 can be bonded and fixed to the holder 3, respectively.
該第一端部23與絕緣部22的邊界25是佈置在比第一引導部31更靠內側。該第一端部23的長度23L是只要滿足上述條件,可以根據與保持體3的關係適當設定,但一般形成10~50mm,最好是20~40mm左右。因為如果具有這個範圍的長度,在檢查用探針2撓曲時,檢查位置 101與第一端部23可以產生穩定的接觸狀態。The boundary 25 between the first end portion 23 and the insulating portion 22 is disposed inside the first guiding portion 31. The length 23L of the first end portion 23 is appropriately set according to the relationship with the holder 3 as long as the above conditions are satisfied, but is generally 10 to 50 mm, preferably 20 to 40 mm. Because if there is a length of this range, the inspection position is checked when the inspection probe 2 is flexed. The 101 and the first end portion 23 can produce a stable contact state.
第二端部24與連接電極體4的電極部41接觸。與形成第二端部24的絕緣部22之間的邊界26如圖1所示,是佈置在第二引導部32的第二引導孔321內。該第二端部24也如上所述,從第二引導部32突出的突出量是根據檢查時檢查用探針2撓曲的程度被決定,但必須保證連接電極體4與被檢查基板100接觸後,檢查用探針2撓曲,連接電極體4與被檢查基板100能夠分別與保持體3貼合固定。The second end portion 24 is in contact with the electrode portion 41 of the connection electrode body 4. A boundary 26 between the insulating portion 22 forming the second end portion 24 is disposed in the second guiding hole 321 of the second guiding portion 32 as shown in FIG. As described above, the second end portion 24 also has a projection amount that protrudes from the second guide portion 32 in accordance with the degree of deflection of the inspection probe 2 at the time of inspection, but it is necessary to ensure that the connection electrode body 4 is in contact with the substrate to be inspected 100. Thereafter, the inspection probe 2 is deflected, and the connection electrode body 4 and the substrate to be inspected 100 can be bonded and fixed to the holder 3, respectively.
該邊界26佈置在第二引導孔321內部,使得檢查用探針2的第二端部24可以與電極部41的表面大致成直角接觸。因此,可以避免像以前那樣,檢查用探針承受負荷時,檢查用探針以傾斜狀態接觸電極部41,並防止檢查用探針在電極部41上滑動,給電極部41造成劃痕。This boundary 26 is disposed inside the second guiding hole 321 such that the second end portion 24 of the inspection probe 2 can be in substantially right-angle contact with the surface of the electrode portion 41. Therefore, when the inspection probe is subjected to a load as in the prior art, the inspection probe contacts the electrode portion 41 in an inclined state, and the inspection probe is prevented from sliding on the electrode portion 41, thereby causing scratches on the electrode portion 41.
同時,該第二端部24的長度24L是形成小於第二引導孔321的長度(厚度)。因為這樣,即使檢查用探針2承受負荷時,邊界26也仍位於第二引導孔321內部。At the same time, the length 24L of the second end portion 24 is formed to be smaller than the length (thickness) of the second guiding hole 321. Because of this, the boundary 26 is still located inside the second guiding hole 321 even when the inspection probe 2 is under load.
另外,這些第一端部23及第二端部24的前端,最好是加工成如半球形,帶有圓弧狀,或前面細的錐形形狀。Further, the front ends of the first end portions 23 and the second end portions 24 are preferably formed into a semispherical shape, an arc shape, or a tapered shape in front.
該第二端部24的長度最好使得位於第二引導孔32內部的絕緣部22的長度大於第二端部24的長度,第二端部24長軸方向的長度大致等於或小於檢查用探針絕緣部的外徑,從而在使用時,該第二端部24與電極部41的表面大致成直角。The length of the second end portion 24 is preferably such that the length of the insulating portion 22 located inside the second guiding hole 32 is greater than the length of the second end portion 24, and the length of the second end portion 24 in the long axis direction is substantially equal to or less than that of the inspection. The outer diameter of the needle insulating portion is such that the second end portion 24 is substantially at right angles to the surface of the electrode portion 41 when in use.
如此形成第二端部24,即使是在第二端部24佈置在第二引導部32,檢查用探針2撓曲時,也可以與電極部41的表面大致成直角直立。When the second end portion 24 is formed in this manner, even when the second end portion 24 is disposed on the second guide portion 32 and the inspection probe 2 is deflected, it can stand upright at a substantially right angle to the surface of the electrode portion 41.
如上所述,形成檢查用探針2的絕緣部22是在包覆導體部21時要露出第一端部23及第二端部24,因此形成該絕緣部22的材料,應為絕緣材料,最好是加工性優異的材料。As described above, the insulating portion 22 forming the inspection probe 2 is such that the first end portion 23 and the second end portion 24 are exposed when the conductor portion 21 is covered. Therefore, the material forming the insulating portion 22 should be an insulating material. It is preferably a material having excellent workability.
只要是符合上述條件的材料,可以根據加工性適當選擇合適的材料,例如,可以使用聚四氟乙烯(PTFE)(所謂特福龍(註冊商標))及聚氨酯樹脂。尤其是使用精細加工性能優異的聚氨酯樹脂,可以將第3圖中的邊界25,26形成與導體部21大致成直角。As long as it is a material satisfying the above conditions, a suitable material can be appropriately selected depending on the workability, and for example, polytetrafluoroethylene (PTFE) (so-called Teflon (registered trademark)) and a urethane resin can be used. In particular, the urethane resin excellent in fine workability can be used to form the boundaries 25, 26 in Fig. 3 at substantially right angles to the conductor portion 21.
另外,本說明書及圖式中說明的檢查用探針2形成圓柱形狀,導體部21及絕緣部22的直徑是根據被檢查基板100的檢查位置101的大小確定合適的尺寸,但該直徑應能通過第二引導孔321,以使檢查用探針2可以從基板檢查用工模1插拔。Further, the inspection probe 2 described in the present specification and the drawings has a cylindrical shape, and the diameters of the conductor portion 21 and the insulating portion 22 are determined according to the size of the inspection position 101 of the substrate 100 to be inspected, but the diameter should be The second guide hole 321 is passed through so that the inspection probe 2 can be inserted and removed from the substrate inspection mold 1 .
連接電極體4是由電極部41、基底部42和固定部43所構成。該連接電極體4是接收從檢查用探針2得到電流及電壓等的電信號。The connection electrode body 4 is composed of the electrode portion 41, the base portion 42, and the fixing portion 43. The connected electrode body 4 is an electrical signal that receives current, voltage, and the like from the test probe 2.
如第4圖所示,該電極部41是製作成與連接電極體4的表面在同一平面。這樣製作,可以使位於第二引導孔321內部的第二端部24在電極部41穩定接觸。As shown in FIG. 4, the electrode portion 41 is formed in the same plane as the surface of the connection electrode body 4. Thus, the second end portion 24 located inside the second guiding hole 321 can be stably contacted at the electrode portion 41.
如第4圖所示,該電極部41是由導線所形成,該導 線的一端位於連接電極體4的表面上,導線的另一端連接是檢查裝置。基底部42是支撐電極部41的基底部件。固定部43是用於佈置電極部41的固定件。As shown in FIG. 4, the electrode portion 41 is formed by a wire, and the guide One end of the wire is located on the surface of the connecting electrode body 4, and the other end of the wire is connected to the inspection device. The base portion 42 is a base member that supports the electrode portion 41. The fixing portion 43 is a fixing member for arranging the electrode portion 41.
另外,形成該連接電極體4的方法,可以在基底部42上事先在所需的位置形成用於形成電極部41的孔。然後,佈置作為電極部41的導線,並填充形成固定部43的黏合劑,以固定該導線。固定部43形成後,去掉從連接電極體4的表面(與檢查用探針2接觸的面)突出的導線。這樣,就形成了連接電極體4。Further, in the method of forming the connection electrode body 4, a hole for forming the electrode portion 41 may be formed in the base portion 42 at a desired position in advance. Then, a wire as the electrode portion 41 is disposed, and the adhesive forming the fixing portion 43 is filled to fix the wire. After the fixing portion 43 is formed, the wire protruding from the surface (the surface in contact with the inspection probe 2) that connects the electrode body 4 is removed. Thus, the connection electrode body 4 is formed.
如第4(b)圖所示,電極部41是還可以使用圓筒形的導線。電極部41使用圓筒形導線,檢查用探針2與該電極部41接觸時,檢查用探針2第二端部24前端的一部份將處於電極部41內部,電極部41的內徑41W 2的四周與第二端部24抵接,可以提供穩定的接觸狀況(見第4(c)圖)。As shown in Fig. 4(b), the electrode portion 41 can also be a cylindrical wire. When the electrode portion 41 is a cylindrical lead wire and the test probe 2 is in contact with the electrode portion 41, a portion of the front end of the second end portion 24 of the test probe 2 will be inside the electrode portion 41, and the inner diameter of the electrode portion 41. The periphery of the 41W 2 abuts against the second end portion 24 to provide a stable contact condition (see Figure 4(c)).
為了具有這種接觸狀況,電極部41的內徑41W 2形成至少小於第二端部24(導體部21)的直徑21W。另外,電極部41的外徑41W 1最好大致等於檢查用探針2的導體部21的直徑21W的長度。In order to have such a contact condition, the inner diameter 41W 2 of the electrode portion 41 is formed to be at least smaller than the diameter 21W of the second end portion 24 (the conductor portion 21). Further, the outer diameter 41W 1 of the electrode portion 41 is preferably substantially equal to the length of the diameter 21W of the conductor portion 21 of the inspection probe 2.
該連接電極體4是在使用時緊貼保持體3的第二引導部32,因此保持體3與連接電極體4處於無間隙抵接的狀態,可以使第二端部24與電極部41的接觸狀況更加穩定。Since the connection electrode body 4 is in contact with the second guide portion 32 of the holder 3 during use, the holder 3 and the connection electrode body 4 are in a state of no contact with each other, and the second end portion 24 and the electrode portion 41 can be made. The contact situation is more stable.
以下對本發明實施例的檢查基板用工模1和檢查用探 針2的一個具體示例進行說明。但本發明並不限定於該具體示例中的尺寸及形狀。該具體示例的示意圖如第5圖所示。The following uses the mold 1 for inspection substrate and the inspection probe for the embodiment of the present invention. A specific example of the needle 2 will be described. However, the invention is not limited to the size and shape in this specific example. A schematic diagram of this specific example is shown in Fig. 5.
檢查用探針2的導體部21,用鎢加工製成長度約30mm、直徑0.07mm的圓柱形或圓筒形(的線狀)。此時,將導體部21的兩個前端加工成帶圓弧狀。The conductor portion 21 of the inspection probe 2 was processed by tungsten into a cylindrical or cylindrical shape (linear shape) having a length of about 30 mm and a diameter of 0.07 mm. At this time, both front ends of the conductor portion 21 are processed into a circular arc shape.
絕緣部22用聚氨酯樹脂所形成,包覆在該導體部21的外周。此時,第一端部23形成3mm,第二端部24形成0.05mm。絕緣部22的直徑22W形成0.09mm。The insulating portion 22 is formed of a urethane resin and is coated on the outer circumference of the conductor portion 21. At this time, the first end portion 23 is formed to be 3 mm, and the second end portion 24 is formed to be 0.05 mm. The diameter 22W of the insulating portion 22 is formed to be 0.09 mm.
另外,絕緣部22用便於加工形成的聚氨酯樹脂製作,因此可以將邊界25、26精細加工成與導體部21大致成直角。Further, since the insulating portion 22 is made of a urethane resin which is easy to process, the boundaries 25 and 26 can be finely machined to be substantially at right angles to the conductor portion 21.
形成保持體3的第一引導部31和第二引導部32上,如上所述,分別設有第一引導孔311和第二引導孔321。在該實施例中,第一引導部31由2塊板狀體312、313形成。第一引導孔311由2塊有高低差的板狀體的側部所形成。這是因為形成第一引導孔311時,使第一引導孔311的上端部與下端部具有所需的直徑,可以得到具有所需長度的第一引導孔311。The first guide portion 31 and the second guide portion 32 that form the holding body 3 are provided with a first guide hole 311 and a second guide hole 321 as described above, respectively. In this embodiment, the first guiding portion 31 is formed by two plate-like bodies 312, 313. The first guiding hole 311 is formed by two side portions of a plate-like body having a step. This is because when the first guiding hole 311 is formed, the upper end portion and the lower end portion of the first guiding hole 311 have a desired diameter, and the first guiding hole 311 having a desired length can be obtained.
第二引導部32由3塊枚有高低差的板狀體322、323、324所形成。與形成第一引導孔311時同樣,利用這3塊板狀體形成第二引導孔321。同時,在該實施例中,這3塊板狀體322、323、324按規定的間隔錯開佈置。這樣,第二引導孔321將成為斜向孔,檢查用探針2插入檢查 基板用工模1時,可以具有一定的撓度。因此,插入該基板檢查用工模1的所有的檢查用探針2將向大致相同的方向,撓曲大致相同的量。The second guiding portion 32 is formed of three plate-like bodies 322, 323, and 324 having a height difference. Similarly to the case where the first guiding holes 311 are formed, the second guiding holes 321 are formed by the three plate-like bodies. Meanwhile, in this embodiment, the three plate-like bodies 322, 323, 324 are staggered at prescribed intervals. Thus, the second guiding hole 321 will become an oblique hole, and the inspection probe 2 is inserted and inspected. When the mold 1 is used for the substrate, it can have a certain degree of deflection. Therefore, all of the inspection probes 2 inserted into the substrate inspection mold 1 are deflected by substantially the same amount in substantially the same direction.
另外,此時第一引導孔311是形成比檢查用探針2的導體部21的直徑21W大,且比絕緣部22的直徑22W小大約0.08mm,第二引導孔321,是在如上所述製成檢查用探針2時,被形成直徑大約0.12mm。Further, at this time, the first guiding hole 311 is formed larger than the diameter 21W of the conductor portion 21 of the inspection probe 2, and is smaller than the diameter 22W of the insulating portion 22 by about 0.08 mm, and the second guiding hole 321 is as described above. When the inspection probe 2 is formed, it is formed to have a diameter of about 0.12 mm.
連接電極體4的電極部41,是在如上所述形成檢查用探針2和保持體3時,用與檢查用探針2直徑大致相同的大約0.09mm的導線所形成。另外,固定部43的連接電極體4表面一側的直徑是被形成大約0.10mm。When the inspection probe 2 and the holder 3 are formed as described above, the electrode portion 41 of the electrode assembly 4 is formed by a wire having a diameter of approximately 0.09 mm which is substantially the same as the diameter of the inspection probe 2. Further, the diameter of the surface of the fixing portion 43 on the surface of the connection electrode body 4 is formed to be about 0.10 mm.
按這種條件所製作的基板檢查用工模1,即使每次檢查時檢查用探針2承受來自軸向的負荷,第二端部24也將與電極部41大致成直角接觸,因此可以保持良好的接觸狀態。The substrate inspection mold 1 produced under such conditions can maintain a good contact with the electrode portion 41 at substantially right angles even when the inspection probe 2 receives a load from the axial direction every time the inspection is performed. Contact status.
本發明的實施例的基板檢查用工模及檢查用探針,可以防止多次承受負荷引起的檢查用探針接觸位置的移動,從而可以提供穩定的接觸狀態,在基板檢查中發揮有效的效果。In the substrate inspection mold and the inspection probe according to the embodiment of the present invention, it is possible to prevent the movement of the inspection probe contact position due to the load from being repeatedly applied, and it is possible to provide a stable contact state and to exhibit an effective effect in the substrate inspection.
1‧‧‧基板檢查用工模1‧‧‧Working tool for substrate inspection
2‧‧‧檢查用探針2‧‧‧Inspection probe
21‧‧‧導體部21‧‧‧Conductor Department
22‧‧‧絕緣部22‧‧‧Insulation
23‧‧‧第一端部23‧‧‧ First end
24‧‧‧第二端部24‧‧‧second end
25‧‧‧邊界25‧‧‧ border
26‧‧‧邊界26‧‧‧ border
3‧‧‧保持體3‧‧‧ Keeping body
31‧‧‧第一引導部31‧‧‧First Guidance Department
311‧‧‧第一引導孔311‧‧‧First guiding hole
32‧‧‧第二引導部32‧‧‧Second Guide
321‧‧‧第二引導孔321‧‧‧Second guiding hole
4‧‧‧連接電極體4‧‧‧Connecting electrode body
41‧‧‧電極部41‧‧‧Electrode
100‧‧‧被檢查基板100‧‧‧Inspected substrate
101‧‧‧檢查位置101‧‧‧Check location
第1圖是本發明實施例之基板檢查用工模的斷面圖, 第1(a)圖是表示檢查用探針承受載重前的狀態,第1(b)圖是表示檢查用探針承受載重後的狀態。Fig. 1 is a cross-sectional view showing a mold for substrate inspection according to an embodiment of the present invention, Fig. 1(a) shows a state before the test probe receives the load, and Fig. 1(b) shows a state after the test probe receives the load.
第2(a)圖是表示本發明實施例之基板檢查用工模保持體的斷面圖,第2(b)圖是表示檢查用探針插入於保持體後狀態的放大圖。2(a) is a cross-sectional view showing a mold holding body for substrate inspection according to an embodiment of the present invention, and FIG. 2(b) is an enlarged view showing a state in which an inspection probe is inserted into a holder.
第3圖是表示本發明實施例之檢查用探針的側面圖。Fig. 3 is a side view showing the probe for inspection of the embodiment of the present invention.
第4(a)圖是表示本發明實施例之基板檢查用工模連接電極體的斷面圖,第4(b)圖是表示其他實施例之電極部的立體圖,第4(c)圖是表示檢查用探針接觸第4(b)圖的電極部的狀況。Fig. 4(a) is a cross-sectional view showing a die-connecting electrode assembly for a substrate inspection according to an embodiment of the present invention, and Fig. 4(b) is a perspective view showing an electrode portion of another embodiment, and Fig. 4(c) is a view showing The inspection probe is in contact with the electrode portion of Fig. 4(b).
第5圖表示本發明具體示例之基板檢查用工模之一實施例。Fig. 5 is a view showing an embodiment of a mold for substrate inspection according to a specific example of the present invention.
第6圖是表示以前的基板檢查用工模及檢查用探針。Fig. 6 is a view showing a conventional substrate inspection mold and an inspection probe.
1‧‧‧基板檢查用工模1‧‧‧Working tool for substrate inspection
2‧‧‧檢查用探針2‧‧‧Inspection probe
3‧‧‧保持體3‧‧‧ Keeping body
4‧‧‧連接電極體4‧‧‧Connecting electrode body
100‧‧‧被檢查基板100‧‧‧Inspected substrate
101‧‧‧檢查位置101‧‧‧Check location
Claims (5)
Applications Claiming Priority (1)
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JP2005332172A JP3849948B1 (en) | 2005-11-16 | 2005-11-16 | Substrate inspection jig and inspection probe |
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TW200720665A TW200720665A (en) | 2007-06-01 |
TWI416114B true TWI416114B (en) | 2013-11-21 |
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TW095134805A TWI416114B (en) | 2005-11-16 | 2006-09-20 | Substrate inspection tool and inspection probe |
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JP (1) | JP3849948B1 (en) |
KR (1) | KR100989300B1 (en) |
CN (1) | CN101310190B (en) |
TW (1) | TWI416114B (en) |
WO (1) | WO2007058037A1 (en) |
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WO2008081704A1 (en) * | 2006-12-28 | 2008-07-10 | Nhk Spring Co., Ltd. | Method for fixing probe unit wiring, and probe unit |
JP5098339B2 (en) * | 2007-01-11 | 2012-12-12 | 日本電産リード株式会社 | Manufacturing method of substrate inspection jig |
JP2009008516A (en) * | 2007-06-28 | 2009-01-15 | Nidec-Read Corp | Tool and method for substrate inspection |
JP2009036532A (en) * | 2007-07-31 | 2009-02-19 | Koyo Technos:Kk | Inspection tool and inspection device |
JP5504698B2 (en) * | 2009-06-02 | 2014-05-28 | 日本電産リード株式会社 | Inspection jig and contact for inspection |
KR200468277Y1 (en) * | 2009-12-04 | 2013-08-06 | 주식회사 오리온 | tester for testing open of electrodes on the substrates |
CN103348255B (en) * | 2011-02-10 | 2015-11-25 | 日本电产理德株式会社 | Checking tool |
JP2013137281A (en) * | 2011-12-28 | 2013-07-11 | Seiko Epson Corp | Probe device |
KR101363367B1 (en) * | 2012-09-04 | 2014-02-25 | 주식회사 에스피에스테크 | Examination apparatus of printed circuit board |
KR101363368B1 (en) * | 2012-09-04 | 2014-02-25 | 주식회사 에스피에스테크 | Examination apparatus of printed circuit board |
KR101398550B1 (en) * | 2013-04-22 | 2014-05-27 | 리노공업주식회사 | A contact probe and method for producting the same |
KR101662910B1 (en) * | 2014-12-21 | 2016-10-06 | 김일 | Contact Device for Test |
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KR101828547B1 (en) * | 2016-08-25 | 2018-02-12 | 한화테크윈 주식회사 | Apparatus for testing electronic component |
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CN110068711B (en) * | 2018-01-24 | 2022-04-26 | 台湾中华精测科技股份有限公司 | Probe card device and rectangular probe |
CN110346616B (en) * | 2018-04-03 | 2021-06-15 | 中华精测科技股份有限公司 | Probe card device and probe base |
KR102072452B1 (en) * | 2018-07-27 | 2020-02-04 | 주식회사 에스디에이 | Manufacturing method of probe card head block |
KR102072451B1 (en) * | 2018-07-27 | 2020-02-04 | 주식회사 에스디에이 | Probe Card Head Block |
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KR102324248B1 (en) * | 2020-06-19 | 2021-11-12 | 리노정밀(주) | Inspection device |
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- 2006-10-14 CN CN2006800429241A patent/CN101310190B/en active Active
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Also Published As
Publication number | Publication date |
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JP3849948B1 (en) | 2006-11-22 |
CN101310190B (en) | 2011-05-18 |
TW200720665A (en) | 2007-06-01 |
KR100989300B1 (en) | 2010-10-22 |
CN101310190A (en) | 2008-11-19 |
WO2007058037A1 (en) | 2007-05-24 |
KR20080063411A (en) | 2008-07-03 |
JP2007139524A (en) | 2007-06-07 |
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