CN101310190B - Jig for inspecting substrate, and inspection probe - Google Patents
Jig for inspecting substrate, and inspection probe Download PDFInfo
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- CN101310190B CN101310190B CN2006800429241A CN200680042924A CN101310190B CN 101310190 B CN101310190 B CN 101310190B CN 2006800429241 A CN2006800429241 A CN 2006800429241A CN 200680042924 A CN200680042924 A CN 200680042924A CN 101310190 B CN101310190 B CN 101310190B
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- substrate
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- 238000007689 inspection Methods 0.000 title claims abstract description 216
- 239000000758 substrate Substances 0.000 title claims abstract description 178
- 239000000523 sample Substances 0.000 title claims abstract description 177
- 238000009413 insulation Methods 0.000 claims abstract description 96
- 239000004020 conductor Substances 0.000 claims description 45
- 238000012423 maintenance Methods 0.000 claims description 35
- 239000000463 material Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Abstract
To provide a jig for inspecting substrates and an inspection probe to be used for inspecting electrical characteristics of substrates to be inspected. [MEANS FOR SOLVING PROBLEMS] A jig (1) for inspecting substrates is composed of an inspection probe (2) wherein a first end section (23) is electrically in contact with a prescribed inspecting position (101) of a substrate (100) to be inspected; a connecting electrode (4) having an electrode section (41) in electrically contact with a second end section (24) of the inspection probe (2); and a holding body (3) for holding the inspection probe (2). The holding body (3) is provided with a first guide section (31) having a first guide hole (311) for guiding the first end section (23) to the inspection position (101), and a second guide section (32) whereupon a second guide hole (321) is formed for guiding the second end section (24) to the electrode section (41). The inspection probe (2) is composed of a flexible linear conducting section (21) having the first end section (23) and the second end section (24), and an insulating section (22) applied for insulation on an outer circumference of the conducting section (21) excluding the first end section (23) and the second end section (24). The length of the second end section (24) is shorter than that of the second guide hole (321).
Description
Technical field
The present invention relates to be used to check as the jig for inspecting substrate of the electrical specification of the inspection substrate of checking object and check with probe.
In addition, the invention is not restricted to printed circuit board, for example can be applicable to the electrical wiring inspection on the various substrates such as the base plate for packaging of battery lead plate that flexible substrate, multi-layer wire substrate, LCD and plasma scope use and semiconductor-sealing-purpose and thin-film carrier, in this manual, above-mentioned various circuit boards are referred to as " substrate ".
Background technology
Whether be formed with the wiring figure that is made of many wirings on substrate, finish like that by design in order to check wiring figure, proposed various base board checking devices in the past, these devices have obtained practicality.
As this base board checking device, for example there is such device, that is: from a plurality of wirings that constitute wiring figure, select the inspection position in any 2 groups of wirings, check the electrical specification that these are checked between positions electric broken string whether or whether conduct electricity etc.
In this device, device with this spline structure is known, that is: utilize to keep the jig for inspecting substrate of a plurality of inspections with probe, and an end of checking with probe is contacted with the checkpoint of inspection substrate, the other end is contacted with electrode part, testing fixture and inspection object substrate are electrically connected.
Keep the jig for inspecting substrate employing such structure of this inspection with probe, that is: in order to solve the contact problems of checking with between the electrode part of probe and inspection substrate or jig for inspecting substrate, the spring that stretches with the direction of principal axis of popping one's head in checking is installed, perhaps make and check with probe self to have elasticity, make inspection with popping one's head in, check with the outside application of force axially of popping one's head in thereby make in its direction of principal axis deflection.
By adopting this structure, when contacting with contact site with probe, inspection produces contact pressure, solved this bad connection problem.
For example, as shown in Figure 6, jig for inspecting substrate J is held in deflection between inspection substrate 100 and electrode part E with flexible inspection with probe P, thereby produces the application of force outside the direction of principal axis of inspection with the P that pops one's head in, at the inspection position 101 and the electrode part E generation contact pressure of inspection substrate 100.Utilize this contact pressure, solved and checked with the contact problems (for example, with reference to patent documentation 1 or 2) between probe P and inspection substrate 100 or the electrode part E.
Yet, as patent documentation 1 or 2 disclosed, for jig for inspecting substrate J, check produce contact pressure with probe P and with situation that electrode part contact under, check with popping one's head in 2 to tilt agley, whenever bearing when loading with respect to electrode part E surface, check that the front end with probe slides on the electrode part surface, produce scratch in wiring, perhaps electrode part E and inspection are moved with the contact position between the probe P, thereby contact is unstable.
Patent documentation 1: No. 3690796 communique of Japan's special permission
Patent documentation 2: No. 3690801 communique of Japan's special permission
Summary of the invention
The present invention In view of the foregoing makes, the purpose of this invention is to provide such inspection with popping one's head in and jig for inspecting substrate, that is: under the situation that conduction that use to check the electrode part that realizes inspection substrate and jig for inspecting substrate with popping one's head in is connected, load and be under the situation with the electrically conducting manner contact condition checking to bear, stable contact condition can be provided with probe.
The described invention of claim 1 provides a kind of jig for inspecting substrate, and this jig for inspecting substrate is by constituting with the lower part, that is: check with probe, and its first end contacts with electrically conducting manner with regulation inspection position as the inspection substrate of checking object; The connection electrode body, it has with described inspection uses the second end of probe with electrically conducting manner electrodes in contact portion; And maintenance body, it is configured between described inspection substrate and the described connection electrode body and keeps described inspection with popping one's head in, this jig for inspecting substrate is characterised in that, described maintenance body has: first guide portion, and it is formed with first bullport that described inspection is directed to described inspection position with the first end of probe; And second guide portion, it is formed with second bullport that described inspection is directed to described electrode part with the second end of probe, described inspection with probe by constituting with the lower part, that is: the conductor portion of wire, it has described first end and described the second end and has flexible; And insulation division, it covers with insulation mode on the periphery of the described conductor portion except described first end and described the second end, and the length of described the second end forms shorter than the length of described second bullport.
The described invention of claim 2 provides claim 1 described jig for inspecting substrate, it is characterized in that, described electrode part forms the same one side of surface formation with described connection electrode body.
The described invention of claim 3 provides claim 1 or 2 described jig for inspecting substrate, it is characterized in that, described connection electrode body disposes in the tight mode that contacts with described second guide portion.
The described invention of claim 4 provides claim 1 described jig for inspecting substrate, it is characterized in that, described inspection forms littler than the diameter of described second guide portion with the maximum gauge of probe.
The described invention of claim 5 provides claim 1 described jig for inspecting substrate, it is characterized in that, described electrode part is formed by columnar lead.
The described invention of claim 6 provides a kind of jig for inspecting substrate, and this jig for inspecting substrate is by constituting with the lower part, that is: check with probe, and its first end contacts with electrically conducting manner with regulation inspection position as the inspection substrate of checking object; The connection electrode body, it has with described inspection uses the second end of probe with electrically conducting manner electrodes in contact portion; And maintenance body, it is configured between described inspection substrate and the described connection electrode body and keeps described inspection with popping one's head in, this jig for inspecting substrate is characterised in that, described maintenance body has: first guide portion, and it is formed with first bullport that described inspection is directed to described inspection position with the first end of probe; And second guide portion, it is formed with second bullport that described inspection is directed to described electrode part with the second end of probe, and this second guide portion is configured in the mode at the predetermined distance of being separated by between itself and described first guide portion, described inspection is with popping one's head in by constituting with the lower part, that is: the conductor portion of wire, it has described first end and described the second end and has flexible; And insulation division, it covers on the periphery of the described conductor portion except described first end and described the second end with insulation mode, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and this second bullport, and the length of the described insulation division that is inserted forms longer than the length of described the second end, and the length of the long axis direction of described the second end forms with described inspection roughly the same or shorter with the external diameter of the insulation division of probe than described inspection with the external diameter of the insulation division of probe.
The described invention of claim 8 provides a kind of jig for inspecting substrate, and this jig for inspecting substrate is by constituting with the lower part, that is: check with probe, and its first end contacts with electrically conducting manner with regulation inspection position as the inspection substrate of checking object; The connection electrode body, it has with described inspection uses the second end of probe with electrically conducting manner electrodes in contact portion; And maintenance body, it is configured between described inspection substrate and the described connection electrode body and keeps described inspection with popping one's head in, this jig for inspecting substrate is characterised in that, described maintenance body has: first guide portion, and it is formed with first bullport that described inspection is directed to described inspection position with the first end of probe; And second guide portion, it is formed with second bullport that described inspection is directed to described electrode part with the second end of probe, and this second guide portion is configured in the mode at the predetermined distance of being separated by between itself and described first guide portion, described inspection is with popping one's head in by constituting with the lower part, that is: the conductor portion of wire, it has described first end and described the second end and has flexible; And insulation division, it covers on the periphery of the described conductor portion except described first end and described the second end with insulation mode, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and this second bullport, and the length of the described insulation division that is inserted forms longer than the length of described the second end, and the minimum diameter of described second bullport forms bigger with the external diameter of the insulation division of probe than described inspection.
The described invention of claim 9 provides claim 6 or 8 described jig for inspecting substrate, it is characterized in that, described second guide portion is laminated with a plurality of tabular components, these a plurality of tabular components are formed with the bullport of the described the second end of guiding respectively, described second bullport is configured the right angle orientation that forms with respect to the plate face by the bullport with described tabular component in the mode that respectively is offset ormal weight in same direction and tilts, and the border of described the second end and described insulation division is configured in the bullport of the described tabular component that is connected with described connection electrode body.
The described invention of claim 10 provides a kind of inspection with popping one's head in, this is checked with the maintenance body of probe by jig for inspecting substrate and keeps, and the electrode part of inspection substrate and this jig for inspecting substrate is electrically connected, wherein, the testing fixture that described maintenance body will become this inspection substrate of checking object and the electrical specification of checking this inspection substrate is electrically connected, this inspection is characterised in that with probe, described inspection is with popping one's head in by constituting with the lower part, that is: have the conductor portion of flexible wire, it has: at the first end that contacts with electrically conducting manner with the inspection position of described inspection substrate when keeping body to keep; With the second end that contacts with electrically conducting manner with the electrode part of described jig for inspecting substrate; And insulation division, it covers with insulation mode on the periphery of the conductor portion except described first end and described the second end, and described inspection forms shorter than the length of bullport with the length of the second end of probe.
The described invention of claim 11 provides a kind of inspection with popping one's head in, this is checked with the maintenance body of probe by jig for inspecting substrate and keeps, and inserted and to lead at first bullport of the checkpoint that is directed to inspection substrate that this maintenances body has and be directed in second bullport of electrode part of this jig for inspecting substrate, thereby the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected, wherein, the testing fixture that described maintenance body will become this inspection substrate of checking object and the electrical specification of checking this inspection substrate is electrically connected, this inspection is characterised in that with probe, described inspection is with popping one's head in by constituting with the lower part, that is: have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when keeping body to keep; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And insulation division, it covers on the periphery of the conductor portion except described first end and described the second end with insulation mode, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is in being inserted into this second bullport the time and this second bullport slight gap of being separated by, and the length of the described insulation division that is inserted forms longer than the length of described the second end, and the length of the long axis direction of described the second end forms with described inspection roughly the same or shorter with the external diameter of the insulation division of probe than described inspection with the external diameter of the insulation division of probe.
The described invention of claim 12 provides a kind of inspection with popping one's head in, this is checked with the maintenance body of probe by jig for inspecting substrate and keeps, and inserted and to lead at first bullport of the checkpoint that is directed to inspection substrate that this maintenances body has and be directed in second bullport of electrode part of this jig for inspecting substrate, the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected, wherein, the testing fixture that described maintenance body will become this inspection substrate of checking object and the electrical specification of checking this inspection substrate is electrically connected, this inspection is characterised in that with probe, described inspection is with popping one's head in by constituting with the lower part, that is: have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when keeping body to keep; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And insulation division, it covers on the periphery of the conductor portion except described first end and described the second end with insulation mode, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is in being inserted into this second bullport the time and this second bullport slight gap of being separated by, and the length of the described insulation division that is inserted forms longer than the length of described the second end, and described inspection forms littler than the minimum diameter of described second bullport with the external diameter of the insulation division of probe.
By these inventions are provided, solved above-mentioned problem.
Invention according to claim 1, such jig for inspecting substrate is provided, that is: flexible inspection with the first end of probe by first bullport guiding of first guide portion that keeps body and contact with the inspection position of inspection substrate, and check that the second end with probe is contacted with the electrode part of connection electrode body by second bullport guiding of second guide portion that keeps body, check that the length with the second end of popping one's head in forms shorter than the length of second bullport, thereby inspection is maintained between inspection substrate and the connection electrode body with probe, even under situation about checking with the probe deflection, the second end also becomes approximate right angle to contact with the surface of electrode part.
Therefore, this jig for inspecting substrate provides stable contact condition.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Invention according to claim 2, because the electrode part of connection electrode body and connection electrode surface constitute with one side, thereby can utilize the electrode part that in manufacturing process, forms easily, and become approximate right angle electrodes in contact portion with the surface of electrode part owing to form the second end, thereby can prevent the slip of the second end, can make and check with probe and more stably contact with electrode part.
Invention according to claim 3, because the connection electrode body disposes in the tight mode that contacts with second guide portion, thereby the electrode part surface of contact of the second end can make inspection more stably contact with electrode part with probe roughly to contact with one side with the surface of second guide portion.
Invention according to claim 4 because it is littler than the diameter of second guide portion to check that maximum gauge with probe forms, thereby can be from the maintenance body of jig for inspecting substrate easily plug check with probe, can change easily and check with popping one's head in.
Invention according to claim 5, because electrode part is formed by the lead of drum, thereby, check that the part with probe embeds in the hole portion of this electrode part checking with under probe and the situation that electrode part contact, can make and check to use and pop one's head in and electrode part is stablized and contacted.
Invention according to claim 6, such jig for inspecting substrate is provided, that is: flexible inspection with the first end of probe by first bullport guiding of first guide portion that keeps body and contact with the inspection position of inspection substrate, and check that the second end with probe is contacted with the electrode part of connection electrode body by second bullport guiding of second guide portion that keeps body, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and this second bullport, and the length of the described insulation division that is inserted forms longer than the length of the second end, the length of the long axis direction of the second end forms roughly the same or shorter than it with the external diameter of checking the insulation division of using probe, thereby inspection is maintained between inspection substrate and the connection electrode body with probe, even under situation about checking with the probe deflection, the second end also becomes approximate right angle to contact with the surface of electrode part.
Therefore, this jig for inspecting substrate provides stable contact condition.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Invention according to claim 8, such jig for inspecting substrate is provided, that is: flexible inspection with the first end of probe by first bullport guiding of first guide portion that keeps body and contact with the inspection position of inspection substrate, and check that the second end with probe is contacted with the electrode part of connection electrode body by second bullport guiding of second guide portion that keeps body, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and second bullport, and the length of the described insulation division that is inserted forms longer than the length of the second end, the minimum diameter of second bullport forms than checking that the external diameter with the insulation division of popping one's head in is big, thereby inspection is maintained between inspection substrate and the connection electrode body with probe, even under situation about checking with the probe deflection, the second end also becomes approximate right angle to contact with the surface of electrode part.
Therefore, this jig for inspecting substrate provides stable contact condition.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Invention according to claim 9, described second guide portion is laminated with a plurality of tabular components, these a plurality of tabular components are formed with the bullport of the described the second end of guiding respectively, described second bullport is configured in the mode that respectively is offset ormal weight in same direction by the bullport with described tabular component and tilts with respect to the right angle orientation of plate face, the border of described the second end and described insulation division is configured in the bullport of the described tabular component that is connected with described connection electrode body, thereby controlled being formed in makes inspection with popping one's head in roughly the same direction with roughly the same amount deflection under the situation about checking.
Invention according to claim 10, such inspection probe is provided, that is: flexible inspection with the first end of probe by first bullport guiding of first guide portion that keeps body and contact with the inspection position of inspection substrate, and check that the second end with probe is contacted with the electrode part of connection electrode body by second bullport guiding of second guide portion that keeps body, check that the length with the second end of popping one's head in forms shorter than the length of second bullport, thereby inspection is maintained between inspection substrate and the connection electrode body with probe, even under situation about checking with the probe deflection, the second end also becomes approximate right angle to contact with the surface of electrode part.
Therefore, this inspection provides stable contact condition with probe.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Invention according to claim 11, such inspection probe is provided, this inspection keeps with the maintenance body of probe by the jig for inspecting substrate of the testing fixture electrical connection that will become the inspection substrate of checking object and the electrical specification of checking this inspection substrate, and inserted and to lead at first bullport of the checkpoint that is directed to this inspection substrate that this maintenances body has and be directed in second bullport of electrode part of this jig for inspecting substrate, the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected, this inspection is characterised in that with probe, described inspection is with popping one's head in by constituting with the lower part, that is: have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when keeping body to keep; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And insulation division, it covers on the periphery of the conductor portion except described first end and described the second end with insulation mode, described inspection forms shorter than the length of described bullport with the length of the second end of probe, and, length at the described insulation division of the described second bullport inside forms longer than the length of described the second end, so that in use, make described the second end become approximate right angle with the surface of described electrode part, the length of the long axis direction of the second end forms roughly the same or shorter than it with the external diameter of checking the insulation division of using probe.
Therefore, this inspection provides stable contact condition with probe.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Invention according to claim 12, such inspection probe is provided, this inspection keeps with the maintenance body of probe by the jig for inspecting substrate of the testing fixture electrical connection that will become the inspection substrate of checking object and the electrical specification of checking this inspection substrate, and inserted and to lead at first bullport of the checkpoint that is directed to this inspection substrate that this maintenances body has and be directed in second bullport of electrode part of this jig for inspecting substrate, the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected, this inspection is characterised in that with probe, described inspection is with popping one's head in by constituting with the lower part, that is: have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when keeping body to keep; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And insulation division, it covers on the periphery of the conductor portion except described first end and described the second end with insulation mode, to make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is in being inserted into this second bullport the time and this second bullport slight gap of being separated by, and the length of the described insulation division that is inserted forms longer than the length of described the second end, and described inspection forms littler than the minimum diameter of described second bullport with the external diameter of the insulation division of probe.
Therefore, this inspection provides stable contact condition with probe.And,, and prevent that the contact position of the second end and electrode part is offset because the second end becomes approximate right angle with the surface of electrode part, thereby prevents to produce the scratch that slides and cause owing on the electrode part surface.
Description of drawings
Fig. 1 illustrates the sectional view of the jig for inspecting substrate of embodiments of the invention, inspection (a) is shown bears the preceding state of load with probe, and the state that has born load with popping one's head in of checking (b) is shown.
Fig. 2 (a) illustrates the sectional view of maintenance body of the jig for inspecting substrate of embodiments of the invention, (b) amplifies to illustrate and checks with probe and be inserted into the state that keeps body interior.
Fig. 3 illustrates the outboard profile of the inspection of embodiments of the invention with probe.
Fig. 4 (a) illustrates the sectional view of connection electrode body of the jig for inspecting substrate of embodiments of the invention, and the stereographic map of the electrode part of another embodiment (b) is shown, and the situation that contacts with the electrode part of (b) with probe of checking (c) is shown.
Fig. 5 illustrates an embodiment of the jig for inspecting substrate of concrete example of the present invention.
Fig. 6 illustrates existing jig for inspecting substrate and checks with probe.
Label declaration
1: jig for inspecting substrate; 2: check with probe; 21: conductor portion; 22: insulation division; 23: first end; 24: the second end; 25: the border; 26: the border; 3: keep body; 31: the first guide portion; 311: the first bullports; 32: the second guide portion; 321: the second bullports; 4: the connection electrode body; 41: electrode part; 100: inspection substrate; 101: check the position.
Embodiment
Structure with reference to the jig for inspecting substrate 1 of description of drawings embodiments of the invention.
Fig. 1 illustrates the sectional view of the jig for inspecting substrate of embodiments of the invention, and Fig. 1 (a) illustrates inspection and bears the preceding state of load with probe, and Fig. 1 (b) illustrates the state that has born load with popping one's head in of checking.Fig. 2 (a) illustrates the sectional view of maintenance body of the jig for inspecting substrate of embodiments of the invention, and Fig. 2 (b) amplifies the state that is inserted into popping one's head in of checking that illustrates.Fig. 3 illustrates the outboard profile of the inspection of embodiments of the invention with probe.Fig. 4 (a) illustrates the sectional view of connection electrode body of the jig for inspecting substrate of embodiments of the invention, and Fig. 4 (b) illustrates the stereographic map of the electrode part of another embodiment, and Fig. 4 (c) illustrates the situation that contacts with the electrode part of (b) with probe of checking.
In addition, each structure of illustrated in this manual jig for inspecting substrate is that object describes with an inspection with probe, yet the inspection that can utilize the quantity corresponding with the checkpoint can be provided with several extremely inspections probes of about tens thousand of with probe in fact.
Jig for inspecting substrate 1 has to be checked with probe 2, maintenance body 3 and connection electrode body 4.
Check that the inspection position 101 with probe 2 and inspection substrate 100 contacts with electrically conducting manner, and contact with electrically conducting manner with the electrode part 41 of connection electrode body 4.Keep body 3 will check and 2 be directed to the inspection position 101 of regulation and electrode part 41 and its maintenance with popping one's head in.Connection electrode body 4 is delivered to testing fixture (not illustrating) with the signal that is detected.
Keep body 3 to be configured between inspection substrate 100 and the connection electrode body 4, keep checking with probe 2.This maintenance body 3 has: first guide portion 31, and it has first bullport 311, and the first end 23 with probe 2 is checked in these first bullport, 311 guiding, makes it check that with the regulation of inspection substrate 100 position 101 contacts; And second guide portion 32, it has second bullport 321, and these second bullport, 321 guiding are checked with the second end 24 of probe 2, and it is contacted with electrode part 41.
As shown in Figure 2, constitute by first guide portion 31, second guide portion 32 and pillar 33 at the maintenance body 3 shown in the embodiment of this instructions.This first guide portion 31 is formed by different members respectively with second guide portion 32, and these members are fixed into one by pillar 33.Quantity, shape and length that this pillar 33 is set decide as required.In addition, owing to the length of the thickness (length of longitudinal direction shown in Figure 2) that keeps body 3 according to this pillar 33 decides, thereby set according to the requirement in the design of gauging fixture.
As mentioned above, first guide portion 31 has and is used for checking first bullport 311 that is directed to inspection position 101 with the first end 23 of probe 2.It is little that the diameter 311W of this first bullport 311 forms the maximum gauge (checking the diameter 22W with probe 2) that has than the insulation division of checking with probe 2 22, prevents to check with popping one's head in 2 to give prominence to the figure direction that faces up.
This first guide portion 31 shown in Figure 2 has 3 tabular bodys 312,313,314, tabular body 312 is to be used for the tabular body that is directed to inspection position 101 with probe 2 (first end 23) with checking, tabular body 313 is the tabular bodys that are used to adjust the thickness of first guide portion 31, and tabular body 314 is formed with the threaded hole that is used for fixing pillar 33.
In addition, the thickness of this first guide portion 31 forms shorter than the length 23L of first end 23.
As mentioned above, second guide portion 32 has and is used for checking second bullport 321 that is directed to electrode part 41 with 2 the second end 24 of popping one's head in.The diameter 321W of this second bullport 321 forms bigger than checking with probe 2 maximum gauges that have, and can plug and check with probe 2.
Fig. 2 (b) is the enlarged drawing at the dotted line position shown in Fig. 2 (a), illustrates to check with 2 states that are inserted in the maintenance body 3 of popping one's head in.
In the jig for inspecting substrate 1 of embodiments of the invention, owing in second bullport 321, have the border 26 of the second end 24 and insulation division 22, thereby can will check that the flexure effects with probe 2 is suppressed to Min..
And, because the length 24L (with reference to Fig. 3) of this second end 24 forms the thickness 32T weak point than second guide portion 32, even thereby checking that this border 26 also is present in second bullport, 321 inside under the situation of having born load with probe 2.
Like this because insulation division 22 is present in second bullport, 321 inside, thereby and the diameter 321W of second bullport 321 between gap S reduce, even under situation about checking with probe 2 deflections, because the second end 24 becomes approximate right angle to contact with the surface of electrode part 41, thereby also prevent to check the slip of using probe 2, perhaps suppress to swing.Therefore, this jig for inspecting substrate 1 can provide than existing gauging fixture more stable and electrode part between contact condition.
The diameter 321W of second bullport 321 forms bigger than checking with probe 2 maximum gauges that have (22W shown in Figure 3) as mentioned above.This diameter 321W forms than the big 1 μ m of the diameter 22W～50 μ m that check with probe 2, more preferably big 10 μ m～30 μ m.
For example, checking that the maximum gauge with probe 2 forms under the situation of 0.09mm, the diameter of second bullport 321 can form 0.12mm, is checking with probe 2 and is keeping having suitable confining force between the body 3.
Check with probe 2 and constitute (with reference to Fig. 3) by the conductor portion 21 of wire and insulation division 22 on the periphery that covers conductor portion 21.
This conductor portion 21 forms by having flexible material, and forms, and under the situation of having born from the axial load of conductor portion 21, conductor portion 21 is becoming the deflection of approximate right angle direction with direction of principal axis.Check to produce and be used for and contact force that the inspection position contacts with electrode part described later owing to this deflection makes with probe 2.
The material of this conductor portion 21 just can suitably utilize suitable material so long as have flexible material as mentioned above, for example can utilize beryllium copper (BeCu) and tungsten (W).
In addition, keep by maintenance body 3 as shown in Figure 1 owing to check direction of principal axis length (length of conductor portion 21), thereby be necessary that the thickness that forms at least than keeping body 3 is long, and need be used to satisfy the length of following condition with probe 2.
This inspection is to decide according to the size and the length that keep body 3 with the length (direction of principal axis length) of the conductor portion 21 of probe 2, can form about 10mm～100mm, can suitably set according to the size of jig for inspecting substrate 1.
Check that the conductor portion 21 with probe 2 has: the first end 23 that contacts with the inspection position 101 of inspection substrate 100, with the second end 24 that contacts with the electrode part 41 of connection electrode body 4 described later.
As shown in Figure 3, first end 23 and the second end 24 are formed on the conductor portion of exposing from insulation division 22 21.
As shown in Figure 1, this first end 23 is configured to be projected into the outside (the last direction of drawing) from first bullport 311 of first guide portion 31.And the second end 24 described later is configured to be projected into the outside (the following direction of drawing) from second bullport 321 of second guide portion 32.Check with probe 2 and be configured to connect first and second bullports 311,321 that keep body 3.
And, first and second ends 23,24 are decided as required from the overhang separately that keeps body 3 (first guide portion 31 and second guide portion 32), yet when connection electrode body 4 contacts configuration with inspection substrate 100, check that with probe 2 deflections necessary is that connection electrode body 4 and inspection substrate 100 are fixed with keeping body 3 driving fits respectively.
The border 25 of this first end 23 and insulation division 22 is configured in the inboard of first guide portion 31.As long as the length 23L of this first end 23 satisfies above-mentioned condition, just the relation between energy basis and the maintenance body 3 is suitably set, and preferably forms 10mm～50mm, more preferably forms about 20mm～40mm.This is because by having the length of this scope, when checking with probe 2 deflections, can make and check that position 101 and first end 23 produce stable contact condition.
The second end 24 contacts with the electrode part 41 of connection electrode body 4.And the border 26 between the insulation division 22 of formation the second end 24 is configured in second bullport 321 of second guide portion 32 as shown in Figure 1.As mentioned above, this the second end 24 decides with 2 the degree of flexibility of popping one's head in from the overhang of the second guide portion 32 also inspection when checking, yet when connection electrode body 4 contacts with inspection substrate 100, check that connection electrode body 4 and inspection substrate 100 are fixed with keeping body 3 driving fits respectively with probe 2 deflections.
Because this border 26 is configured in second bullport, 321 inside, thereby check that the second end 24 with probe 2 can become approximate right angle to contact with the surface of electrode part 41.Therefore, can prevent from as in the past to check with probe under the situation of having born load with probe and under heeling condition, contact checking, can prevent to check with popping one's head on electrode part 41 slip or make electrode part 41 generation scratches with electrode part 41.
And the length 24L of this second end 24 forms shorter than the length of second bullport 321 (thickness).This is because by such formation, even born under the situation of load with probe 2 in inspection, border 26 also is configured in second bullport, 321 inside.
In addition, preferably, the front end of this first end 23 and the second end 24 is processed to have the chamfering as hemispherical, perhaps has most advanced and sophisticated more and more thinner cone-shaped.
Preferably, in order to make this second end 24 become approximate right angle in use with the surface of electrode part 41, the length of this second end 24 forms the length that makes at the insulation division 22 of second bullport, 32 inside and forms longlyer than the length of the second end 24, and it is roughly the same or lack than it with the external diameter of the insulation division of probe to make the length of the long axis direction of the second end 24 form and check.
This is because by such formation the second end 24, even be configured under the situation that makes 2 deflections of inspection usefulness probe on second guide portion 32 at the second end 24, also can become approximate right angle to stand with the surface of electrode part 41 and establish.
Owing to form to check with 2 the insulation division 22 of popping one's head in to cover as mentioned above on the conductor portion 21, so that first end 23 and the second end 24 expose, thereby the material that forms this insulation division 22 is insulating material, preferably the material of excellent processability.
When being material as described above, suitably select suitable material according to processability, for example can utilize polytetrafluoroethylene (PTFE) (so-called teflon (registered trademark)) and urethane resin.Particularly, by utilizing the good urethane resin of retrofit, border shown in Figure 3 25,26 can be formed and 21 one-tenth approximate right angle of conductor portion.
In addition, inspection illustrated in this instructions and drawing forms cylindrical shape with probe 2, the diameter of conductor portion 21 and insulation division 22 comes suitable decision according to the size of the inspection position 101 of inspection substrate 100, this diameter is can be by the diameter of second bullport 321, so that can check with probe 2 from jig for inspecting substrate 1 plug.
As shown in Figure 4, this electrode part 41 forms with the surface formation of connection electrode body 4 simultaneously same.By such formation, can make at the second end 24 of second bullport, 321 inside and stablize contact in electrode part 41.
As shown in Figure 4, this electrode part 41 is formed by lead, and an end of this lead is positioned on the surface of connection electrode body 4, and the other end of lead is connected with testing fixture.Base portion 24 is the base materials that keep electrode part 41.Fixed part 43 is the immobilization materials that are used for configured electrodes portion 41.
In addition, the method that forms this connection electrode body 4 for example is the hole portion that is formed for forming electrode part 41 on base portion 42 in advance at desired locations.Then, be configured as the lead of electrode part 41, fill the bonding agent that forms fixed part 43 in order to fix this lead.After having formed fixed part 43, remove the outstanding lead in surface (with checking) with probe 2 faces that contact from connection electrode body 4.Like this, form connection electrode body 4.
Shown in Fig. 4 (b), electrode part 41 also can be utilized columnar lead.By in electrode part 41, utilizing columnar lead, checking with under probe 2 and the situation that this electrode part 41 contacts, inspection is configured in electrode part 41 inside with the part of the front end of the second end 24 of probe 2, the periphery of the internal diameter 41W2 of electrode part 41 and the second end 24 butts provide stable contact condition (with reference to Fig. 4 (c)).
In order to have this contact condition, the internal diameter 41W2 of electrode part 41 forms littler than the diameter 21W of the second end 24 (conductor portion 21) at least.In addition, preferably, the length of the external diameter 41W1 of electrode part 41 is roughly the same with the diameter 21W that checks the conductor portion 21 of using probe 2.
Because this connection electrode body 4 disposes in intimate contact with second guide portion 32 that keeps body 3 in use, thereby keep body 3 and connection electrode body 4 to be in the state of butt seamlessly, can make the contact condition of the second end 24 and electrode part 41 more stable.
The jig for inspecting substrate 1 of embodiments of the invention below is described and checks a concrete example of using probe 2.Yet, the invention is not restricted to the size and dimension shown in this concrete example.In addition, Fig. 5 illustrates the summary of this concrete example.
Tungsten is processed, will be checked the cylindrical or cylindrical shape (wire) that forms the about 30mm of length, diameter 0.07mm with 2 the conductor portion 21 of popping one's head in.At this moment, two front ends of conductor portion 21 are processed into and have chamfering.
Use urethane resin to form insulation division 22, so that cover the periphery of this conductor portion 21.At this moment, first end 23 forms 3mm, and the second end 24 forms 0.05mm.The diameter 22W of insulation division 22 forms 0.09mm.
In addition, be easy to urethane resin formation because insulation division 22 uses to be processed to form, thereby the 21 one-tenth approximate right angle in border 25,26 and conductor portion can be carried out retrofit.
Forming on first guide portion 31 and second guide portion 32 that keeps body 3, as mentioned above, be formed with first bullport 311 and second bullport 321 respectively.In this embodiment, first guide portion 31 is formed by 2 tabular bodys 312,313.First bullport 311 is to form by 2 sidepieces with differential tabular body.This be because, forming under the situation of first bullport 311, form diameter with expectation by upper end and bottom with first bullport 311, can obtain having first bullport 311 of desired length.
In addition, in this case, first bullport 311 forms about 0.08mm, and this value is bigger and littler than the diameter 22W of insulation division 22 than the diameter 21W that checks the conductor portion 21 of using probe 2, second bullport 321 is being made under the situation about checking with probe 2 as mentioned above, forms the diameter of about 0.12mm.
Form to check as mentioned above with probe 2 and keeping under the situation of body 3 that the electrode part 41 of connection electrode body 4 is used and the lead formation of checking with about 0.09mm of probe 2 roughly the same diameters.In addition, the diameter of the face side of the connection electrode body 4 of fixed part 43 forms about 0.10mm.
The jig for inspecting substrate 1 that is made in this case, even check when checking with popping one's head in and 2 bear load from direction of principal axis at every turn, the second end 24 also contacts with 41 one-tenth approximate right angle of electrode part, thereby can keep the excellent contact state.
Utilizability on the industry
The jig for inspecting substrate of embodiments of the invention and check probe are moved by the contact position that repeatedly bears the check probe that causes of load by preventing, stable contact condition can be provided, and obtain effective effect in inspecting substrate.
Claims (6)
1. jig for inspecting substrate, this jig for inspecting substrate that is: check with probe by constituting with the lower part, and its first end contacts with electrically conducting manner with regulation inspection position as the inspection substrate of checking object; The connection electrode body, it has with described inspection uses the second end of probe with electrically conducting manner electrodes in contact portion; And the maintenance body, it is configured between described inspection substrate and the described connection electrode body and keeps described inspection with probe, and this jig for inspecting substrate is characterised in that,
Described maintenance body has:
First guide portion, it is formed with first bullport that described inspection is directed to described inspection position with the first end of probe; And
Second guide portion, it is formed with described inspection is directed to second bullport of described electrode part with the second end of probe, and this second guide portion is configured in the mode at the predetermined distance of being separated by between itself and described first guide portion,
Described inspection is with popping one's head in by constituting with the lower part, that is:
The conductor portion of wire, it has described first end and described the second end and has flexible; And
Insulation division, it covers with insulation mode on the periphery of the described conductor portion except described first end and described the second end,
In the time of will making check probe crooked when described first end and inspection substrate butt; In order to make described the second end not have lateral shift ground and described electrode part butt; Described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency; The part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and this second bullport; And the length of the described insulation division that inserts forms longer than the length of described the second end
The length of the long axis direction of described the second end forms identical or shorter with the external diameter of the insulation division of probe than described inspection with the external diameter of the insulation division of probe with described inspection.
2. jig for inspecting substrate according to claim 1 is characterized in that,
Described second guide portion is laminated with a plurality of tabular components, and these a plurality of tabular components are formed with the bullport of the described the second end of guiding respectively,
Described second bullport is configured the right angle orientation that forms with respect to the plate face by the bullport with described tabular component in the mode that respectively is offset ormal weight in same direction and tilts,
The border of described the second end and described insulation division is configured in the bullport of the described tabular component that is connected with described connection electrode body.
3. jig for inspecting substrate, this jig for inspecting substrate that is: check with probe by constituting with the lower part, and its first end contacts with electrically conducting manner with regulation inspection position as the inspection substrate of checking object; The connection electrode body, it has with described inspection uses the second end of probe with electrically conducting manner electrodes in contact portion; And the maintenance body, it is configured between described inspection substrate and the described connection electrode body and keeps described inspection with probe, and this jig for inspecting substrate is characterised in that,
Described maintenance body has:
First guide portion, it is formed with first bullport that described inspection is directed to described inspection position with the first end of probe; And
Second guide portion, it is formed with described inspection is directed to second bullport of described electrode part with the second end of probe, and this second guide portion is configured in the mode at the predetermined distance of being separated by between itself and described first guide portion,
Described inspection is with popping one's head in by constituting with the lower part, that is:
The conductor portion of wire, it has described first end and described the second end and has flexible; And
Insulation division, it covers with insulation mode on the periphery of the described conductor portion except described first end and described the second end,
In the time of will making check probe crooked when described first end and inspection substrate butt; In order to make described the second end not have lateral shift ground and described electrode part butt; Described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency; The part of this insulation division is to insert in this second bullport in the mode of the slight gap of being separated by between itself and this second bullport; And the length of the described insulation division that inserts forms longer than the length of described the second end
The minimum diameter of described second bullport forms bigger with the external diameter of the insulation division of probe than described inspection.
4. jig for inspecting substrate according to claim 3 is characterized in that,
Described second guide portion is laminated with a plurality of tabular components, and these a plurality of tabular components are formed with the bullport of the described the second end of guiding respectively,
Described second bullport is configured the right angle orientation that forms with respect to the plate face by the bullport with described tabular component in the mode that respectively is offset ormal weight in same direction and tilts,
The border of described the second end and described insulation division is configured in the bullport of the described tabular component that is connected with described connection electrode body.
5. check probe; This check probe is kept by the holder of jig for inspecting substrate; And be inserted through first bullport of the checkpoint that is directed to inspection substrate that this holder has and be directed in second bullport of electrode part of this jig for inspecting substrate; Thereby the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected; Wherein, The testing fixture that described holder will become this inspection substrate that checks object and the electrical characteristic that checks this inspection substrate is electrically connected; This check probe is characterised in that
Described inspection is with popping one's head in by constituting with the lower part, that is:
Have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when being kept by the maintenance body; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And
Insulation division, it covers with insulation mode on the periphery of the conductor portion except described first end and described the second end,
To make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is in being inserted into this second bullport the time and this second bullport slight gap of being separated by, and the length of the described insulation division that is inserted forms longer than the length of described the second end
The length of the long axis direction of described the second end forms identical or shorter with the external diameter of the insulation division of probe than described inspection with the external diameter of the insulation division of probe with described inspection.
6. check probe; This check probe is kept by the holder of jig for inspecting substrate; And be inserted through first bullport of the checkpoint that is directed to inspection substrate that this holder has and be directed in second bullport of electrode part of this jig for inspecting substrate; Thereby the electrode part of this inspection substrate and this jig for inspecting substrate is electrically connected; Wherein, The testing fixture that described holder will become this inspection substrate that checks object and the electrical characteristic that checks this inspection substrate is electrically connected; This check probe is characterised in that
Described inspection is with popping one's head in by constituting with the lower part, that is:
Have the conductor portion of flexible wire, it has: contact with electrically conducting manner and the slotting first end that leads in described first bullport of quilt with the inspection position of described inspection substrate when being kept by the maintenance body; Also inserted the second end that leads in described second bullport with contacting with electrically conducting manner with the electrode part of described jig for inspecting substrate; And
Insulation division, it covers with insulation mode on the periphery of the conductor portion except described first end and described the second end,
To make when described first end and inspection substrate butt and to check with probe when crooked, in order to make described the second end not have lateral excursion ground and described electrode part butt, described the second end and be positioned at second bullport with the part of the described insulation division of this second end adjacency, the part of this insulation division is in being inserted into this second bullport the time and this second bullport slight gap of being separated by, and the length of the described insulation division that is inserted forms longer than the length of described the second end
Described inspection forms littler than the minimum diameter of described second bullport with the external diameter of the insulation division of probe.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005332172A JP3849948B1 (en) | 2005-11-16 | 2005-11-16 | Substrate inspection jig and inspection probe |
| JP332172/2005 | 2005-11-16 | ||
| PCT/JP2006/320514 WO2007058037A1 (en) | 2005-11-16 | 2006-10-14 | Jig for inspecting substrate, and inspection probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101310190A CN101310190A (en) | 2008-11-19 |
| CN101310190B true CN101310190B (en) | 2011-05-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800429241A Active CN101310190B (en) | 2005-11-16 | 2006-10-14 | Jig for inspecting substrate, and inspection probe |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP3849948B1 (en) |
| KR (1) | KR100989300B1 (en) |
| CN (1) | CN101310190B (en) |
| TW (1) | TWI416114B (en) |
| WO (1) | WO2007058037A1 (en) |
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Also Published As
| Publication number | Publication date |
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| TW200720665A (en) | 2007-06-01 |
| TWI416114B (en) | 2013-11-21 |
| CN101310190A (en) | 2008-11-19 |
| JP2007139524A (en) | 2007-06-07 |
| WO2007058037A1 (en) | 2007-05-24 |
| JP3849948B1 (en) | 2006-11-22 |
| KR100989300B1 (en) | 2010-10-22 |
| KR20080063411A (en) | 2008-07-03 |
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