JP2009036532A - Inspection tool and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection tool capable of inspecting properly an inspection object, even when the width of a widthwise direction of an inspection terminal formed in an elongate shape is very narrow. <P>SOLUTION: The inspection tool 1 for inspecting the inspection object 50, having the elongate terminal having the lengthwise direction and the widthwise direction includes a tip side support 2 wherein a tip side insertion hole having a probe guiding direction facing to the inspection object 50 is formed; a rear end side support 3 arranged at intervals to the tip side support 2, wherein a rear side insertion hole having a probe guiding direction inclined approximately along the lengthwise direction of the terminal relative to the probe guiding direction of the tip side insertion hole is formed; and a probe 5 having a tip side part inserted into the tip side insertion hole and a rear end side part inserted into the rear end side insertion hole. The tip side part of the probe 5 is arranged on a position shifted to the side inclined to the probe guiding direction of the rear end side insertion hole relative to the rear end side part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection jig used for electrical inspection of a circuit board, an electronic component, and the like, and an inspection apparatus including the inspection jig.

  In general, an electrical inspection for detecting an abnormality such as a short circuit or disconnection of a circuit board wiring pattern or an integrated circuit such as an IC includes a plurality of probes that are in conductive contact with an inspection terminal formed on an inspection target. Inspection jigs are used. As this type of inspection jig, a front end side support body that supports front end side portions of a plurality of probes, and a rear end side that supports a rear end side portion of the plurality of probes that are arranged behind the front end side support bodies with a gap. The present applicant has proposed an inspection jig including a support and an electrode disposed behind the rear end side support and contacting the rear end side portion of the probe (see, for example, Patent Document 1).

  In the inspection jig described in Patent Document 1, a front end side insertion hole is formed in the front end side support body in a direction orthogonal to the facing surface facing the object to be inspected, and a front end side insertion hole is formed in the rear end side support body. A rear end side insertion hole is formed in a direction inclined with respect to the direction. Further, the rear end side insertion hole is inclined with respect to the front end side insertion hole so that the distal end side of the probe inserted through the rear end side insertion hole faces the front end side insertion hole.

  In this inspection jig, when the tips of a plurality of probes come into contact with the object to be inspected, the intermediate portion of the probe disposed in the gap between the front end side support plate and the rear end side support plate is bent. Further, since the intermediate portion of the probe is bent, all the probes are simultaneously brought into contact with the inspection object with an appropriate contact pressure.

JP 2005-338065 A

  In recent years, a variety of inspection terminals are formed on an inspection target. For example, an elongated terminal such as a rectangular shape is also formed on the inspection object. In recent years, the width of the elongated terminals in the short direction has become very narrow as the wiring pattern of the circuit board to be inspected becomes more complicated and the integrated circuit becomes more highly integrated. For example, a terminal having a very narrow width such as a width in the short direction of 20 μm to 30 μm may be formed on the inspection object.

  Here, when the inspection of the inspection object having a very short width in the short direction of the terminal is performed using the inspection jig described in Patent Document 1, it may be difficult to appropriately inspect the inspection object. It became clear by examination of the inventor.

  Thus, an object of the present invention is to provide an inspection jig capable of performing an appropriate inspection of an inspection object even when the width of the inspection terminal formed in an elongated shape is very narrow. An object of the present invention is to provide an inspection apparatus including an inspection jig.

  In order to solve the above problems, the present invention is an inspection jig for inspecting an inspection object on which an elongated terminal having a longitudinal direction and a short direction is formed, and a probe guide for the inspection object A distal end side support body in which a distal end side insertion hole having a direction is formed, and the distal end side support body is disposed through a predetermined gap, and substantially along the longitudinal direction with respect to the probe guide direction of the distal end side insertion hole A rear end side support body in which a rear end side insertion hole having an inclined probe guide direction is formed, and a front end side portion that is inserted into the front end side insertion hole so that the front end that contacts the terminal can be projected and retracted on the inspection object side And a probe having a rear end side portion inserted through the rear end side insertion hole, and the front end side portion of the probe is shifted to the side inclined toward the probe guide direction of the rear end side insertion hole with respect to the rear end side portion. It is specially placed To.

  In the inspection jig of the present invention, the rear end side support body disposed via a predetermined gap with respect to the front end side support body in which the front end side insertion hole having the probe guide direction facing the inspection object is formed is provided on the front end side. A rear end side insertion hole having a probe guide direction inclined substantially along the longitudinal direction of the elongated terminal with respect to the probe guide direction of the insertion hole is formed. Further, the front end side portion of the probe is disposed at a position shifted from the rear end side portion toward the side of the rear end insertion hole inclined in the probe guide direction.

  Therefore, even when the distal end insertion hole is formed larger than the probe diameter so that the distal end of the probe can be projected and retracted on the inspection object side, the distal end of the probe contacts the terminal, and the distal support plate When the intermediate portion of the probe disposed in the gap between the rear end side support plate and the rear end side support plate is bent, the front end portion of the probe moves substantially along the longitudinal direction of the elongated terminal in the front end insertion hole. That is, in the present invention, when the tip of the probe comes into contact with the terminal and the intermediate portion of the probe arranged in the gap between the front end side support plate and the rear end side support plate is bent, the tip of the probe in contact with the terminal is The terminal is displaced substantially along the longitudinal direction of the terminal, and is not so displaced along the short direction of the terminal. As a result, according to the present invention, the tip of the probe can be reliably brought into contact with the terminal to be inspected even when the width of the inspection terminal formed in an elongated shape is very narrow. It becomes possible to perform an appropriate inspection of the inspection object.

  In the present invention, the inspection jig includes a plurality of probes that are in contact with a plurality of terminals having different longitudinal directions, and the rear end side portions of the plurality of probes are substantially along the longitudinal direction of the terminals that are in contact with the probes. It is preferable to be inserted into the inclined rear end side insertion hole. With this configuration, even when a plurality of terminals having different longitudinal directions are formed on the inspection target, the tip of the probe is surely brought into contact with the terminal to be inspected to perform an appropriate inspection of the inspection target. Is possible.

  In order to solve the above problems, the present invention is an inspection jig for inspecting an inspection object on which an elongated terminal having a longitudinal direction and a short direction is formed, and is suitable for the inspection object. The tip side support body in which the tip side insertion hole having the probe guide direction is formed, and the plane formed by the longitudinal direction and the probe guide direction of the tip side insertion hole with respect to the probe guide direction of the tip side insertion hole are substantially A rear end side insertion hole having a probe guide direction inclined along the rear end side support body, which is disposed with a predetermined gap with respect to the front end side support body; A probe having a front end side portion inserted through the hole and a rear end side portion inserted through the rear end side insertion hole, and when the front end contacts the terminal, the front end is pushed toward the front end support. The probe is on the tip side Wherein the flex between the lifting member and the rear side support.

  In the inspection jig of the present invention, the rear end side support body disposed via a predetermined gap with respect to the front end side support body in which the front end side insertion hole having the probe guide direction facing the inspection object is formed is provided on the front end side. A rear end side insertion hole having a probe guide direction inclined substantially along a plane formed by the longitudinal direction of the elongated terminal and the probe guide direction of the front end side insertion hole is formed with respect to the probe guide direction of the insertion hole. Has been. Therefore, even when the distal end insertion hole is formed larger than the probe diameter so that the distal end of the probe contacts the terminal, the distal end is pushed toward the distal support. When the probe contacts the terminal and the probe bends between the front end side support plate and the rear end side support plate, the tip end of the probe is displaced substantially along the longitudinal direction of the terminal and displaced along the short side direction of the terminal. Not much. As a result, according to the present invention, the tip of the probe can be reliably brought into contact with the terminal to be inspected even when the width of the inspection terminal formed in an elongated shape is very narrow. It becomes possible to perform an appropriate inspection of the inspection object.

  The inspection jig of the present invention can be used in an inspection apparatus including an electrical inspection unit that is conductively connected to an electrode that is in contact with the rear end portion of the probe. In this inspection device, even if the width of the inspection terminal formed in an elongated shape is very narrow, the tip of the probe is securely brought into contact with the terminal to be inspected so that the inspection target Can be performed.

  As described above, in the inspection jig and the inspection apparatus of the present invention, even when the width of the inspection terminal formed in an elongated shape is very narrow, the inspection object is appropriately inspected. Is possible.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Configuration of inspection jig)
FIG. 1 is a plan view of an inspection jig 1 according to an embodiment of the present invention. FIG. 2 is a side view of the inspection jig 1 shown in FIG. FIG. 3 is a plan view showing an inspection object 50 to be inspected by the inspection jig 1 shown in FIG. FIG. 4 is an enlarged view showing an E portion of FIG. 3 in an enlarged manner. FIG. 5 is an enlarged cross-sectional view showing a cross-sectional structure of the distal end side support 2 shown in FIG. FIG. 6 is an enlarged cross-sectional view showing a cross-sectional structure of the rear end side support 3 shown in FIG.

  In the following description, the horizontal direction in FIG. 1 is the X direction, the vertical direction in FIG. 1 is the Y direction, and the vertical direction in FIG. 1 is the Z direction. A plane formed from the Y direction and the Z direction is a YZ plane, and a plane formed from the Z direction and the X direction is a ZX plane.

  As described later, the inspection jig 1 of this embodiment is mounted and used in an inspection apparatus 30 that performs an electrical inspection of an inspection object 50 such as a printed wiring board or a semiconductor integrated circuit (see FIG. 7). Further, as shown in FIGS. 3 and 4, the inspection jig 1 of this embodiment is for inspecting an inspection object 50 in which an elongated inspection terminal 60 having a longitudinal direction and a lateral direction is formed. It is a jig.

  The inspection object 50 is formed in a flat rectangular parallelepiped shape (rectangular plate shape) as a whole. As described above, a plurality of elongated inspection terminals 60 having a longitudinal direction and a short direction are formed on the inspection object 50. Specifically, as shown in FIGS. 3 and 4, two first terminal groups 60 </ b> A composed of a plurality of terminals 60 arranged in a line at a predetermined interval in the X direction are formed with a predetermined interval in the Y direction. The plurality of terminals 60 on the inspection target 50 are formed such that two second terminal groups 60B composed of a plurality of terminals 60 arranged in a line at a predetermined interval in the Y direction are formed at a predetermined interval in the X direction. Is formed. That is, the inspection object 50 is formed with a plurality of terminals 60 arranged in a straight line along the four sides of the inspection object 50.

  In this embodiment, the terminals 60 constituting the first terminal group 60A are formed in an elongated rectangular shape with the X direction as the short direction and the Y direction as the long direction. Further, the terminals 60 constituting the second terminal group 60B are formed in an elongated rectangular shape with the Y direction as the short direction and the X direction as the long direction. That is, a plurality of terminals 60 having different longitudinal directions are formed on the inspection object 50. In addition, the width W1 (refer FIG. 4) of the longitudinal direction of the terminal 60 is 2-3 mm, for example, and the width W2 (refer FIG. 4) of the short direction of the terminal 60 is 20-30 micrometers, for example.

  As shown in FIGS. 1 and 2, the inspection jig 1 includes a front end side support body 2 and a rear end side support body 3 that is disposed with respect to the front end side support body 2 via a predetermined gap. .

  The front end side support body 2 and the rear end side support body 3 are each formed in a flat rectangular parallelepiped shape (rectangular plate shape). Moreover, the front end side support body 2 and the rear end side support body 3 are arrange | positioned so that those surfaces may become mutually parallel. Specifically, the front end side support body 2 and the rear end side support body 3 are connected and fixed by four support columns 4 arranged at four corners of the front end side support body 2.

  A plurality of probes 5 are inserted through the front end side support body 2 and the rear end side support body 3. Specifically, as shown in FIG. 1 and FIG. 2, two first probe groups 5A composed of a plurality of probes 5 arranged in a line at a predetermined interval in the X direction are formed with a predetermined interval in the Y direction. The front-end-side support body 2 and the rear end are formed so that two second probe groups 5B composed of a plurality of probes 5 arranged in a line at a predetermined interval in the Y direction are formed at a predetermined interval in the X direction. A plurality of probes 5 are inserted through the side support 3.

  Further, as shown in FIG. 2, the plurality of probes 5 constituting the second probe group 5 </ b> B support the distal end side so as to spread outward in the X direction from the distal end side support body 2 toward the rear end side support body 3. The body 2 and the rear end side support body 3 are inserted. Further, the plurality of probes 5 constituting the first probe group 5A are extended to the outside in the Y direction toward the rear end side support body 3 from the front end side support body 2 and the rear end side support body 2 and the rear end side support body. The body 3 is inserted.

  Specifically, the plurality of probes 5 constituting the second probe group 5B are inclined substantially along the X direction (more specifically, the ZX plane), and the plurality of probes 5 constituting the first probe group 5A are The front end side support body 2 and the rear end side support body 3 are inserted so as to be inclined along the Y direction (more specifically, the YZ plane). In the present embodiment, when the inspection object 50 is inspected, the probes 5 constituting the first probe group 5A are in contact with the terminals 60 constituting the first terminal group 60A, and the probes 5 constituting the second probe group 5B are The terminal 60 which comprises the 2nd terminal group 60B is contacted. That is, the probe 5 is inclined between the front end side support body 2 and the rear end side support body 3 along the longitudinal direction of the contact terminal 60.

  Further, the tip 5e of the probe 5 slightly projects on the surface of the tip side support 2 as shown in FIG. For example, the tip 5 e protrudes from the surface of the tip side support 2 by 100 μm to 200 μm. In addition, the protrusion amount of the tip 5e from the surface of the tip side support body 2 may exceed 200 μm, or may be less than 100 μm (for example, 50 μm).

  An electrode support 6 is attached behind the rear end side support 3. As shown in FIG. 2, a plurality of electrodes 7 that are in conductive contact with the probe 5 (specifically, the rear end side portion 5 d) are fixed to the electrode support 6.

  The probe 5 is formed of a metal such as tungsten, high-speed steel (SKH), beryllium copper (Be-Cu) or other conductors, and is formed in a wire shape having a bendable elasticity. The probe 5 of this embodiment includes a conductive wire 5a made of the conductor as described above and an insulating coating 5b that covers the outer peripheral surface of the conductive wire 5a. The insulating coating 5b is formed of an insulator such as a synthetic resin. The insulating coating 5b may be an insulating coating formed by applying an insulating coating to the surface of the conductive wire 5a.

  As shown in FIGS. 5 and 6, the conductive wire 5 a is exposed at the front end side portion 5 c and the rear end side portion 5 d of the probe 5. Further, the front end 5e and the rear end 5f of the probe 5 are formed in a spherical shape as shown in the figure.

  The front end side support body 2 is configured by laminating a plurality (three in this embodiment) of support plates 10, 11, and 12 in order from the side (upper side in the figure) on which the inspection object 50 is arranged. These support plates 10 to 12 are fixed to each other by fixing means such as bolts. As shown in FIG. 5, through holes 10a, 11a, and 12a are formed in the support plates 10, 11, and 12, respectively. These through holes 10a, 11a, and 12a constitute one distal end side insertion hole 13 through which the distal end side portion 5c of the probe 5 is inserted.

  The distal end side insertion hole 13 has a probe guide direction toward the inspection object 50. Specifically, the distal end side insertion hole 13 has a guide direction of the probe 5 orthogonal to the facing surface (upper surface in the drawing) 2 a facing the inspection target 50 of the distal end side support 2. That is, the distal end side insertion hole 13 is formed in a direction (Z direction) orthogonal to the facing surface 2a. Therefore, the tip 5e of the probe 5 can be brought into contact with the terminal 60 of the inspection object 50 substantially perpendicularly.

  The tip side insertion holes 13 are formed as many as the number of probes 5 included in the inspection jig 1. Specifically, the probes 5 constituting the first probe group 5A are in contact with the terminals 60 constituting the first terminal group 60A, and the probes 5 constituting the second probe group 5B are terminals constituting the second terminal group 60B. A distal end side insertion hole 13 is formed so as to contact 60.

  The three through holes 10a, 11a, and 12a are formed concentrically. Specifically, the through hole 10a includes a small diameter hole 10b and a large diameter hole 10c larger in diameter than the small diameter hole 10b, and the through hole 12a has a large diameter hole 12c larger in diameter than the small diameter hole 12b and the small diameter hole 12b. It consists of and. The small-diameter hole 10b and the small-diameter hole 12b are formed to have an inner diameter slightly larger than the outer diameter of the conductive wire 5a and slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b. Further, the inner diameter of the through hole 11a is larger than the inner diameter of the small diameter hole 10b and the inner diameter of the small diameter hole 12b.

  The edge 5g of the insulating coating 5b on the distal end side of the probe 5 is disposed behind the small diameter hole 12b of the distal end insertion hole 13 as shown in FIG. As described above, the small-diameter hole 12b is formed with an inner diameter slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b. Therefore, the end edge 5g of the insulating coating 5b can be brought into contact with the open edge 12d of the small diameter hole 12b. In other words, the end edge 5g and the open edge 12d serve as a retaining portion for preventing the probe 5 from falling off to the inspection object side.

  The rear end side support body 3 is configured by laminating a plurality of (three in this embodiment) support plates 15, 16, and 17 in order from the front end side support body 2 side. These support plates 15 to 17 are fixed to each other by fixing means such as bolts. As shown in FIG. 6, through holes 15a, 16a, and 17a are formed in the support plates 15 to 17, respectively. These through holes 15a to 17a constitute one rear end side insertion hole 20 through which the rear end side portion 5d of the probe 5 is inserted. The rear end side insertion holes 20 are formed by the number of probes 5 included in the inspection jig 1.

  The rear end side insertion hole 20 has a probe guide direction V that is inclined with respect to the probe guide direction of the front end side insertion hole 13 (that is, the direction orthogonal to the facing surface 2a). That is, the three through holes 15a to 17a are formed in a state where the respective centers are slightly shifted, and the entire rear end side insertion hole 20 is inclined with respect to the orthogonal direction of the facing surface 2a. For example, as shown in FIG. 6, five through holes 15 a to 17 a are formed in a state where the centers of the through holes 15 a to 17 a are slightly shifted in the right direction in the drawing. That is, the probe guide direction V is inclined by the angle θ in the counterclockwise direction of FIG. 6 with respect to the normal line n orthogonal to the surface of the rear end side support 3.

  The through hole 15a includes a small diameter hole 15b and a large diameter hole 15c having a larger diameter than the small diameter hole 15b. Similarly, the through hole 16a includes a small diameter hole 16b and a large diameter hole 16c, and the through hole 17a includes a small diameter hole 17b and a large diameter hole 17c. The small-diameter hole 17b is formed with an inner diameter slightly larger than the outer diameter of the conductive wire 5a and slightly smaller than the outer diameter of the probe 5 in the insulating coating 5b, and the small-diameter holes 15b and 16b are formed by the insulating coating 5b. The inner diameter of the probe 5 is slightly larger than the outer diameter of the probe 5.

  As described above, in the present embodiment, the probe 5 is inclined along the longitudinal direction of the contacted terminal 60. That is, in this embodiment, the distal end side insertion hole 20 has a probe guide direction V substantially along the longitudinal direction of the terminal 60 with which the probe 5 inserted through the rear end side insertion hole 20 contacts. It is inclined with respect to the 13 probe guiding directions. Specifically, the probe guide direction V of the rear end side insertion hole 20 through which the probes 5 constituting the first probe group 5A are inserted is substantially along the Y direction (more specifically, the YZ plane), and The probe guide direction V of the rear end side insertion hole 20 through which the probe 5 constituting the second probe group 5B is inserted is a direction inclined so as to spread outward in the Y direction as it goes from the support plate 15 to the support plate 17. , And a direction that inclines so as to extend outward in the X direction substantially along the X direction (more specifically, the ZX plane) and from the support plate 15 toward the support plate 17.

  Further, in each probe 5, the distal end side portion 5 c inserted through the distal end side insertion hole 13 is closer to the probe guide direction V of the rear end side insertion hole 20 than the rear end side portion 5 d inserted into the rear end side insertion hole 20. It is arranged at a position shifted in the tilt direction. That is, the opening position on the rear end side of the distal end side insertion hole 13 through which the distal end side portion 5c of a certain probe 5 is inserted (that is, the opening position of the through hole 12a of the support plate 12) is as shown in FIG. When viewed from the rear end side insertion hole 20 through which the rear end side portion 5d of the probe 5 is inserted, the rear end side insertion hole 20 is disposed on the inclined side in the probe guide direction V.

  The rear end 5f of the probe 5 is formed into a spherical shape as described above. Therefore, even if the rear end side portion 5d of the probe 5 is inclined along the rear end insertion hole 20 having the inclined probe guide direction V, the conductive contact state between the rear end 5f and the surface of the electrode 7 is not affected. Absent.

  As shown in FIG. 2, the electrode support 6 is configured by laminating support plates 22 and 23 in which a plurality of electrodes 7 are embedded, and a support plate 25 that holds wirings 24 that are conductively connected to the electrodes 7. Yes. The wiring 24 is connected to a control unit 31 of the inspection apparatus 30 described later. The electrode support 6 is detachably fixed to the rear end support 3 by a fixing means such as a bolt.

  The inspection jig 1 configured as described above is assembled as follows. That is, first, the front end side support body 2 and the rear end side support body 3 are connected and fixed by the support columns 4.

  Thereafter, the plurality of probes 5 are inserted through the front end side support body 2 and the rear end side support body 3. Specifically, from the rear side of the rear end side support body 3 with the support plate 17 removed, the probe 5 until the end edge 5g of the insulating coating 5b on the front end side contacts the opening edge 12d of the small diameter hole 12b. Plug in. That is, the probe 5 is passed through the rear end side insertion hole 20, the space between the front end side support body 2 and the rear end side support body 3, and the front end side insertion hole 13 in order. Plug in. Thereafter, the support plate 17 is fixed.

  Thereafter, the electrode support 6 is fixed to the rear end support 3 to complete the inspection jig 1.

(Configuration of inspection equipment)
FIG. 7 is a schematic configuration diagram showing an inspection apparatus 30 on which the inspection jig 1 shown in FIG. 1 is mounted.

  As shown in FIG. 7, the inspection jig 1 of the present embodiment is mounted and used in an inspection apparatus 30 that performs an electrical inspection (specifically, inspection of disconnection, short circuit, etc.) of an inspection object 50. The inspection device 30 includes a control unit 31 as an electrical inspection unit including an inspection circuit that determines a conduction state of the inspection target 50, a drive unit 32 connected to the control unit 31, and an inspection driven by the drive unit 32. And a mechanism 33.

  The inspection mechanism 33 relatively includes a first support plate 34 to which the inspection jig 1 is attached, a second support plate 35 disposed opposite to the first support plate 34, and the first support plate 34 and the second support plate 35. And a moving mechanism 36 that moves in a detachable manner. The moving mechanism 36 is configured by a ball screw mechanism, a hydraulic mechanism, or the like, and is driven by the driving unit 32.

  The electrode 7 of the inspection jig 1 attached and fixed to the first support board 34 is conductively connected to the control unit 31 via a wiring 24 and a wiring 37 connected to the wiring 24. Further, the inspection object 50 is placed and fixed on the second support plate 35 in a state in which it is positioned. Specifically, the probes 5 constituting the first probe group 5A are in contact with the terminals 60 constituting the first terminal group 60A, and the probes 5 constituting the second probe group 5B are terminals constituting the second terminal group 60B. The inspection object 50 is fixed on the second support plate 35 so as to come into contact with 60.

  In this state, the drive unit 32 drives the moving mechanism 36 according to the control signal of the control unit 31, the first support plate 34 approaches the second support plate 35, and the inspection jig 1 is moved to the inspection object 50 with a predetermined pressure. Press. When the inspection jig 1 is pressed against the inspection object 50, each probe 5 of the inspection jig 1 comes into contact with the terminal 60 of the inspection object 50 and is pushed toward the distal support 2. Each probe 5 is electrically connected to the terminal 60. In this state, when the control unit 31 supplies a predetermined signal to the inspection jig 1 through the wiring 37 or receives a potential detected by the inspection jig 1, an electrical test of the inspection object 50 is performed. Done.

(Probe movement during inspection of inspection target)
FIG. 8 is a view for explaining the movement of the probe 5 when the inspection object 50 is inspected by the inspection apparatus 30 shown in FIG. 7. FIG. 8A is a view before the tip 5 e of the probe 5 contacts the terminal 60. The state is shown from the short direction of the terminal 60, (B) shows the state where the tip 5e of the probe 5 is in contact with the terminal 60, and (C) shows the state where the tip 5e of the probe 5 is a terminal. A state in which the terminal 60 is in contact is shown from the longitudinal direction of the terminal 60 (that is, the FF direction in (B)). In FIG. 8, illustration of the insulating coating 5b is omitted.

  In the inspection jig 1 of this embodiment, the intermediate portion of the probe 5 between the front end side support body 2 and the rear end side support body 3 is a direction in which the rear end side portion 5d is inclined along the rear end side insertion hole 20. Inclined and extended, and is inserted into the distal end side insertion hole 13 as it is. Therefore, when the tip 5e of the probe 5 comes into contact with the terminal 60 and is pushed toward the tip-side support 2 during the inspection of the inspection object 50, the intermediate portion of the probe 5 in the inclined posture is bent (bent). .

  The bending direction of the intermediate portion of the probe 5 at the time of bending is a direction corresponding to the inclination direction of the probe 5 (that is, the probe guide direction V of the rear end side insertion hole 20 through which the probe 5 is inserted). Specifically, the probes 5 constituting the first probe group 5A bend substantially along the YZ plane, and the probes 5 constituting the second probe group 5B bend substantially along the ZX plane.

  Therefore, when the tip 5e of the probe 5 comes into contact with the terminal 60, as shown in FIG. 8B, the tip-side portion 5c of the probe 5 constituting the first probe group 5A is first in the tip-side insertion hole 13. The distal end portion 5c of the probes 5 constituting the second probe group 5B moves substantially along the longitudinal direction (more specifically, the YZ plane) of the terminals 60 constituting the terminal group 60A. Thus, it moves substantially along the longitudinal direction (more specifically, the ZX plane) of the terminals 60 constituting the second terminal group 60B. That is, at this time, as shown in FIG. 8C, the distal end side portion 5c of the probe 5 constituting the first probe group 5A is connected to the terminal 60 constituting the first terminal group 60A within the distal end side insertion hole 13. The distal end portion 5c of the probe 5 constituting the second probe group 5B hardly moves in the lateral direction, and the distal end portion 5c constituting the second probe group 5B is almost in the lateral direction of the terminal 60 constituting the second terminal group 60B in the distal end side insertion hole 13. It does n’t move.

  Therefore, when the tip 5e of the probe 5 comes into contact with the terminal 60, as shown in FIG. 8B, the tip 5e is displaced substantially along the longitudinal direction of the terminal 60 with the lower end of the small diameter hole 12b as a fulcrum. On the other hand, even if the tip 5e contacts the terminal 60, the tip 5e is hardly displaced along the short direction of the terminal 60 as shown in FIG.

(Effect of this embodiment)
As described above, in this embodiment, the rear end side support 3 is provided with the longitudinal direction of the terminal 60 with respect to the probe guide direction of the distal end side insertion hole 13 (more specifically, the probe guide of the distal end side insertion hole 13. A rear end side insertion hole 20 having a probe guide direction V inclined substantially along the YZ plane or the ZX plane formed from the direction (Z direction) and the longitudinal direction of the terminal 60 is formed. Further, the distal end side portion 5c of the probe 5 is disposed at a position shifted from the rear end side portion 5d to the side inclined to the probe guide direction V of the rear end side insertion hole 20.

  Therefore, the distal end side insertion hole 13 has a diameter of the probe 5 (specifically, so that the distal end 5e of the probe 5 can protrude and retract on the inspection object 50 side (that is, the distal end 5e is pushed toward the distal end side support body 2). In other words, even if it is formed larger than the diameter of the conductive wire 5a), as described above, the tip 5e contacts the terminal 60, and the tip side support plate 2 and the rear end side support plate 3 When the intermediate portion of the probe 5 arranged in the gap is bent, the tip 5e that contacts the terminal 60 is displaced substantially along the longitudinal direction of the terminal 60 and is not likely to be displaced along the short direction of the terminal 60.

  As a result, in this embodiment, even when the width W2 in the short direction of the terminal 60 is very narrow, for example, 20 to 30 μm, the tip 5e of the probe 5 is securely attached to the terminal 60 when the inspection object 50 is inspected. It can be made to contact and the test | inspection object 50 can be test | inspected appropriately.

  In particular, in this embodiment, each of the rear end portion 5d of the probe 5 that contacts the terminal 60 constituting the first terminal group 60A and the terminal 60 constituting the second terminal group 60B having different longitudinal directions The terminal 60 is inserted through the rear end side insertion hole 20 that is inclined substantially along the longitudinal direction of the terminal 60 to be contacted. Therefore, even when a plurality of terminals 60 having different longitudinal directions are formed on the inspection object 50, the inspection object 50 can be appropriately inspected by reliably bringing the tip 5e of the probe 5 into contact with the terminal 60. it can.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the inspection target 50 is formed with a plurality of terminals 60 arranged in a straight line along the four sides of the inspection target 50. In addition, for example, as shown in FIG. 9, a plurality of terminals 60 arranged in a straight line in two rows (or two or more rows) along the four sides of the inspection object 50 are formed on the inspection object 50. May be. Further, as shown in FIG. 10, a plurality of terminals 60 arranged in a line (or a plurality of lines) in a straight line along one side of the inspection object 50 may be formed on the inspection object 50. Further, a plurality of terminals 60 arranged in a line or a plurality of lines along two or three sides of the inspection object 50 may be formed on the inspection object 50. In addition, a plurality of terminals 60 arranged in a substantially arc shape along at least one of the four sides of the inspection target 50 may be formed on the inspection target 50. Furthermore, the inspection object 50 may not be formed in a rectangular plate shape, and the terminal 60 may be formed on the inspection object 50 in an arbitrary arrangement pattern.

  In these cases, the rear end side portions 5d of the plurality of probes 5 are inserted into the rear end side insertion holes 20 that are substantially inclined along the longitudinal direction of the terminals 60 with which the probes 5 are in contact.

  In the embodiment described above, the terminal 60 formed in an elongated rectangular shape is formed on the inspection object 50. In addition, for example, as shown in FIG. 11A, an elongated terminal 61 having a wide portion 61a having a wide width and a narrow portion 61b having a narrower width than the wide portion 61a is formed on the inspection object 50. Also good. Further, as shown in FIG. 11B, an elongated terminal 62 like a track shape for athletics may be formed on the inspection object 50, or as shown in FIG. The terminal 63 may be formed on the inspection object 50.

  Further, in the above-described form, the X direction or the Y direction is the longitudinal direction or the short direction of the terminal 60, but the direction inclined with respect to the X direction or the Y direction is the longitudinal direction or the short direction of the terminal 60. It may be.

  In the embodiment described above, the front-end-side support 2 and the rear-end side are arranged such that the probes 5 constituting the first probe group 5A spread outward in the Y direction from the front-end-side support 2 toward the rear-end support 3. The support 3 is inserted. In addition to this, for example, the probes 5 constituting the first probe group 5 </ b> A are narrowed inward in the Y direction toward the rear end support 3 from the front end support 2 and the front end support 2 and the rear end. It may be inserted through the side support 3.

  Further, the probes 5 constituting the first probe group 5A are such that one probe 5 adjacent to each other in the X direction spreads outward in the Y direction from the front end side support body 2 toward the rear end side support body 3. The other probe 5 that is inserted into the front end side support body 2 and the rear end side support body 3 and is adjacent to each other in the X direction narrows inward in the Y direction as it goes from the front end side support body 2 to the rear end side support body 3. Furthermore, the front end side support body 2 and the rear end side support body 3 may be inserted. That is, the probe 5 may be inserted into the front end side support body 2 and the rear end side support body 3 so that the rear ends 5f of the probes 5 constituting the first probe group 5A are staggered.

  Similarly, the front end side support body 2 and the rear end side support body are configured such that the probes 5 constituting the second probe group 5B are narrowed inward in the X direction from the front end side support body 2 toward the rear end side support body 3. 3, or the probe 5 is inserted into the front end side support body 2 and the rear end side support body 3 so that the rear ends 5f of the probes 5 constituting the second probe group 5B are staggered. Also good.

  In the embodiment described above, the distal end side support body 2 is constituted by the three support plates 10 to 12. In addition to this, for example, the tip side support body 2 may be configured by two or less or four or more support plates. Similarly, in the embodiment described above, the rear end side support body 3 is configured by the three support plates 15 to 17, but the rear end side support body 3 is configured by two or less or four or more support plates. May be.

It is a top view of the inspection jig concerning an embodiment of the invention. It is a side view of the inspection jig shown in FIG. It is a top view which shows the test object with which a test | inspection is performed with the inspection jig shown in FIG. It is an enlarged view which expands and shows the E section of FIG. It is an expanded sectional view which shows the cross-section of the front end side support body shown in FIG. It is an expanded sectional view which shows the cross-section of the rear end side support body shown in FIG. It is a schematic block diagram which shows the inspection apparatus carrying the inspection jig shown in FIG. It is a figure for demonstrating the motion of a probe when test | inspecting a test object with the test | inspection apparatus shown in FIG. 7, (A) shows the state before the front-end | tip of a probe contacts a terminal from the transversal direction of a terminal, (B) shows the state in which the tip of the probe is in contact with the terminal from the short side of the terminal, and (C) shows the state in which the tip of the probe is in contact with the terminal from the longitudinal direction of the terminal. It is a figure which shows the arrangement | sequence of the terminal of the test object concerning other embodiment of this invention. It is a figure which shows the arrangement | sequence of the terminal of the test object concerning other embodiment of this invention. It is a figure which shows the shape of the terminal concerning other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection jig 2 Front end side support body 3 Rear end side support body 5 Probe 5c Front end side part 5d Rear end side part 5e Tip 7 Electrode 13 Front end side insertion hole 20 Rear end side insertion hole 30 Inspection apparatus 31 Control part (electrical inspection) means)
50 Inspection target 60, 61, 62, 63 Terminal V Probe guide direction

Claims (4)

An inspection jig for inspecting an inspection object in which an elongated terminal having a longitudinal direction and a short direction is formed,
A tip-side support in which a tip-side insertion hole having a probe guide direction facing the inspection object is formed;
A rear end side insertion hole is formed with a probe guide direction that is arranged with a predetermined gap with respect to the front end side support body and is inclined substantially along the longitudinal direction with respect to the probe guide direction of the front end side insertion hole. A rear end side support,
A probe having a front end side portion inserted through the front end side insertion hole and a rear end side portion inserted through the rear end side insertion hole so that the front end contacting the terminal can be projected and retracted on the inspection object side; Prepared,
The inspection jig according to claim 1, wherein the tip side portion of the probe is arranged at a position shifted from the rear end side portion toward a side inclined in the probe guide direction of the rear end side insertion hole.   A plurality of the probes that are in contact with each of the plurality of terminals having different longitudinal directions, and the rear end side portions of the plurality of probes are substantially along the longitudinal direction of the terminals that are in contact with the probes. The inspection jig according to claim 1, wherein the inspection jig is inserted into the inclined rear end side insertion hole. An inspection jig for inspecting an inspection object in which an elongated terminal having a longitudinal direction and a short direction is formed,
A tip-side support in which a tip-side insertion hole having a probe guide direction facing the inspection object is formed;
A rear end side insertion hole having a probe guide direction inclined substantially along a plane formed by the longitudinal direction and the probe guide direction of the front end side insertion hole is formed with respect to the probe guide direction of the front end side insertion hole. A rear end side support body disposed via a predetermined gap with respect to the front end side support body,
A probe having a tip contacting the terminal, a tip side portion inserted through the tip side insertion hole, and a rear end side portion inserted through the rear end side insertion hole;
When the tip comes into contact with the terminal, the tip is pushed toward the tip-side support, and the probe bends between the tip-side support and the rear-end support. Inspection jig.   An inspection apparatus comprising: the inspection jig according to any one of claims 1 to 3; and an electrical inspection unit that is conductively connected to an electrode that contacts the rear end side portion of the probe.

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