TWI383163B - - Google Patents

Info

Publication number
TWI383163B
TWI383163B TW097128552A TW97128552A TWI383163B TW I383163 B TWI383163 B TW I383163B TW 097128552 A TW097128552 A TW 097128552A TW 97128552 A TW97128552 A TW 97128552A TW I383163 B TWI383163 B TW I383163B
Authority
TW
Taiwan
Application number
TW097128552A
Other languages
Chinese (zh)
Other versions
TW200905221A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of TW200905221A publication Critical patent/TW200905221A/en
Application granted granted Critical
Publication of TWI383163B publication Critical patent/TWI383163B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW097128552A 2007-07-31 2008-07-29 Inspection jig and inspection apparatus TW200905221A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007198751A JP2009036532A (en) 2007-07-31 2007-07-31 Inspection tool and inspection device

Publications (2)

Publication Number Publication Date
TW200905221A TW200905221A (en) 2009-02-01
TWI383163B true TWI383163B (en) 2013-01-21

Family

ID=40331497

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097128552A TW200905221A (en) 2007-07-31 2008-07-29 Inspection jig and inspection apparatus

Country Status (4)

Country Link
JP (1) JP2009036532A (en)
KR (1) KR101011360B1 (en)
CN (1) CN101358997A (en)
TW (1) TW200905221A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6255914B2 (en) * 2013-11-07 2018-01-10 日本電産リード株式会社 Inspection jig
KR101565344B1 (en) 2013-12-13 2015-11-03 현대자동차주식회사 A vehicle interconnection terminal illumination control system and a control method
JP6237441B2 (en) * 2014-04-24 2017-11-29 日本電産リード株式会社 Electrode structure, inspection jig, and manufacturing method of electrode structure
CN106324481B (en) * 2016-08-23 2018-11-27 管仙福 A kind of locating and detecting device for integrated circuit
IT201700021400A1 (en) * 2017-02-24 2018-08-24 Technoprobe Spa Measuring head with vertical probes with improved frequency properties
CN106932615B (en) * 2017-04-28 2024-02-13 尼得科精密检测设备(浙江)有限公司 Inspection jig and inspection apparatus provided with the same
CN112424615A (en) * 2018-07-13 2021-02-26 日本电产理德股份有限公司 Inspection jig and inspection device
US11454650B2 (en) * 2018-07-18 2022-09-27 Nidec-Read Corporation Probe, inspection jig, inspection device, and method for manufacturing probe
CN113433360B (en) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 Test adapter, test apparatus and method of testing a component carrier
KR102324248B1 (en) * 2020-06-19 2021-11-12 리노정밀(주) Inspection device
CN113639979B (en) * 2021-07-26 2022-04-26 苏州佳祺仕信息科技有限公司 Detection tool and detection device for detecting performance of workpiece with hole
KR102649845B1 (en) * 2023-11-29 2024-03-21 주식회사 나노시스 Jig for semiconductor device testing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040226744A1 (en) * 2003-05-16 2004-11-18 Matsushita Electric Industrial Co., Ltd. Module with built-in circuit component and method for producing the same
TW200532204A (en) * 2004-03-16 2005-10-01 Kimoto Gunsei Electric signal connecting device, and probe assembly and prober device using it
TW200638046A (en) * 2005-04-21 2006-11-01 Koyo Technos K K Inspection jig and inspection equipment
TW200722759A (en) * 2005-12-12 2007-06-16 Ohnishi Electronics Co Ltd Inspection fixture for printed wiring board

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729838U (en) * 1993-11-08 1995-06-02 日本電子材料株式会社 Vertical motion probe card with buckling stress reduction mechanism
JP3575501B2 (en) * 1995-05-15 2004-10-13 株式会社日本マイクロニクス Probe device
JPH09274054A (en) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The Prober
JP3505495B2 (en) 2000-09-13 2004-03-08 日本電産リード株式会社 Inspection jig for substrate inspection, substrate inspection device provided with the inspection jig, and method of assembling inspection jig for substrate inspection
JP2005338065A (en) * 2004-04-26 2005-12-08 Koyo Technos:Kk Inspection jig and inspection equipment
JP3849948B1 (en) * 2005-11-16 2006-11-22 日本電産リード株式会社 Substrate inspection jig and inspection probe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040226744A1 (en) * 2003-05-16 2004-11-18 Matsushita Electric Industrial Co., Ltd. Module with built-in circuit component and method for producing the same
TW200532204A (en) * 2004-03-16 2005-10-01 Kimoto Gunsei Electric signal connecting device, and probe assembly and prober device using it
TW200638046A (en) * 2005-04-21 2006-11-01 Koyo Technos K K Inspection jig and inspection equipment
TW200722759A (en) * 2005-12-12 2007-06-16 Ohnishi Electronics Co Ltd Inspection fixture for printed wiring board

Also Published As

Publication number Publication date
KR101011360B1 (en) 2011-01-28
CN101358997A (en) 2009-02-04
TW200905221A (en) 2009-02-01
KR20090013139A (en) 2009-02-04
JP2009036532A (en) 2009-02-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees