CN100535676C - Inspection jig and inspection equipment - Google Patents
Inspection jig and inspection equipment Download PDFInfo
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- CN100535676C CN100535676C CNB2005101134540A CN200510113454A CN100535676C CN 100535676 C CN100535676 C CN 100535676C CN B2005101134540 A CNB2005101134540 A CN B2005101134540A CN 200510113454 A CN200510113454 A CN 200510113454A CN 100535676 C CN100535676 C CN 100535676C
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- end side
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- inserting hole
- hole
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- 238000007689 inspection Methods 0.000 title claims abstract description 24
- 239000000523 sample Substances 0.000 claims abstract description 291
- 238000012360 testing method Methods 0.000 claims abstract description 16
- 230000005465 channeling Effects 0.000 claims description 79
- 238000003475 lamination Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 238000002955 isolation Methods 0.000 description 15
- 230000003321 amplification Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 238000003199 nucleic acid amplification method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 241000278713 Theora Species 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 230000008676 import Effects 0.000 description 5
- 239000011295 pitch Substances 0.000 description 5
- 230000005611 electricity Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- -1 beryllium copper metals Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
Subject of this invention is to provide an inspection jig for performing inspection by utilizing deflection of a flexible and elastic probe which can be simply-structured while enabling easier probe replacement. In this inspection equipment, the inspection jig 10 is provided with: a tip side support 11 which has a tip side through hole containing a probe guide direction toward a testing object; a rear end side support 12 which has a rear end side through hole containing a probe guide direction inclined to the probe guide direction of the tip side through hole, and arranged via space behind the tip side support 11; a flexible and elastic probe 14 which has both a tip side section threaded into the tip side through hole and a rear end side section threaded into the rear end side through hole so as to allow its tip to frequently be appeared; and an electrode 16 located at the back of the rear end side support 12 to directly be in contact with the rear end side section. The tip side section of the probe 14 is located on the position shifted to the inclined side in the probe guide direction of the rear end side through hole against the rear end side section.
Description
Technical field
The present invention relates to gauging fixture and testing fixture, particularly relate to the structure of the gauging fixture that uses under the situation of the electrical test that is suitable for carrying out circuit board and electronic component etc.
Background technology
Usually, when carrying out electric checking, use to be equipped with to possess and conduct electricity the testing fixture of gauging fixture of many probes contacting with checking object for abnormal conditions such as the short circuit of integrated circuit such as the Wiring pattern of finding circuit board and IC and broken string.Structure that can elastic deformation when in this case, the leading section that forms many probes contacts with the inspection object.Like this, make whole probes, conduct with it simultaneously checking that object applies suitable contact pressure.
In recent years, along with the development of the highly integrated grade of the complicated and integrated circuit of the Wiring pattern of circuit board, the arrangement pitches of the probe of gauging fixture becomes more and more littler, and therefore, the diameter of each probe also is necessary to do for a short time.Therefore, replace innerspring probe in the past, but use the gauging fixture of flexible lead (wi re) the shape probe that possesses flexing more and more.Known have such structure, promptly in such gauging fixture, setting is disposed at the front support plate of checking subject side and keeps arranged spaced in the rear end side support plate at this front support plate rear, on described front support plate, form the leading section discrepancy probe inserting hole freely that makes probe, the rearward end of stationary probe on the rear end side support plate, make the probe that is between front support plate and the rear end side support plate the structure (for example with reference to patent documentation 1) that constitutes of the suitable flexing of center section.
In addition, have and the top described identical front support plate and the rubber-like probe of flexing but possess, keep arranged spaced on the rear end side support plate at the rear of front support, also to form the probe inserting hole, probe is inserted this probe inserting hole, the rearward end of this probe is fixed on the electrode that disposes more behind of rear end side support plate, improve the reliability that probe is connected with electric conductivity between the electrode with this, the gauging fixture (reference example such as patent documentation 2) that probe can be changed easily also is disclosed.This gauging fixture is disposed at the state that constitutes two pieces of support plates on the position overlapped of plane like that with the probe inserting hole of front support plate and the probe inserting hole of rear end side support plate, make probe plug in the probe inserting hole of logical two pieces of support plates, thereafter, by front support plate and rear end side support plate are moved mutually, make the center section generation flexing of between front support plate and rear end side support plate probe on in-plane.
Patent documentation 1: Japanese kokai publication hei 9-274054 communique
Patent documentation 2: TOHKEMY 2002-90419 communique
Summary of the invention
The problem that invention will solve
But, use above-mentioned can flexing, in the gauging fixture of rubber-like probe, use is under the situation of the gauging fixture of stationary probe rearward end on the rear end side support plate, under the inappropriate situation of a part of probe, probe is replaced inconvenience, therefore there is the maintenance trouble, maybe the problem that whole gauging fixture must be replaced.
Again, be fixed in rearward end under the situation of the structure on the electrode of the behind that is configured in the rear end side support plate, exist by taking off electrode, easily the advantage that inappropriate probe is replaced from the rear side of rear end side support plate probe.But, for the ease of carrying out the replacement of probe, must form the structure that front support plate and rear end side support plate are moved on in-plane, therefore there is the problem of the structure complicated of gauging fixture.
Therefore, problem of the present invention is, but checks in the gauging fixture of usefulness in the deflection that utilizes flexing rubber-like probe, although realize carrying out the exchange of probe easily, can adopt the new construction of the gauging fixture of simple structure.
In order to solve above-mentioned problem, gauging fixture of the present invention, it is characterized in that, possess: the front support of front inserting hole with probe channeling direction of oriented inspection object, rear at the front support keeps arranged spaced, have the rear end side support of edge with respect to the rear end side inserting hole of the probe channeling direction of the probe channeling direction inclination of front inserting hole, have and to make probe front in the rear end side part of checking that subject side is inserted the front part of logical described front inserting hole with haunting and inserted logical described rear end side inserting hole, but the rubber-like probe of flexing, and the rear that is disposed at described rear end side support, with rear end side part electrodes in contact; Described rear end side support, the support plate that is formed with through hole by many pieces of laminations constitutes; Described rear end side inserting hole constitutes by a plurality of through holes, and simultaneously, described through hole is made of small diameter bore and the large diameter hole bigger than small diameter bore diameter; The probe channeling direction of described rear end side inserting hole forms with the state of off-centring separately by a plurality of through holes and to be set; Described probe is guided by the probe channeling direction to the rear end side inserting hole that tilts by the small diameter bore of through hole; The front part of probe is disposed on the relative rear end side part position that the inclined side of the probe channeling direction of distolateral inserting hole is offset backward.
Adopt the present invention, the probe channeling direction by the rear end side supporting hole tilts with respect to the probe channeling direction of front inserting hole, can make the centre of probe between front support and rear end side support
Patent documentation 1: Japanese kokai publication hei 9-274054 communique
Patent documentation 2: TOHKEMY 2002-90419 communique
Summary of the invention
The problem that invention will solve
But, use above-mentioned can flexing, in the gauging fixture of rubber-like probe, use is under the situation of the gauging fixture of stationary probe rearward end on the rear end side support plate, under the inappropriate situation of a part of probe, probe is replaced inconvenience, therefore there is the maintenance trouble, maybe the problem that whole gauging fixture must be replaced.
Again, be fixed in rearward end under the situation of the structure on the electrode of the behind that is configured in the rear end side support plate, exist by taking off electrode, easily the advantage that inappropriate probe is replaced from the rear side of rear end side support plate probe.But, for the ease of carrying out the replacement of probe, must form the structure that front support plate and rear end side support plate are moved on in-plane, therefore there is the problem of the structure complicated of gauging fixture.
Therefore, problem of the present invention is, but checks in the gauging fixture of usefulness in the deflection that utilizes flexing rubber-like probe, although realize carrying out the exchange of probe easily, can adopt the new construction of the gauging fixture of simple structure.
In order to solve above-mentioned problem, gauging fixture of the present invention, it is characterized in that, possess: the front support of front inserting hole with probe channeling direction of oriented inspection object, rear at the front support keeps arranged spaced, have the rear end side support of edge with respect to the rear end side inserting hole of the probe channeling direction of the probe channeling direction inclination of front inserting hole, have and to make probe front in the rear end side part of checking that subject side is inserted the front part of logical described front inserting hole with haunting and inserted logical described rear end side inserting hole, but the rubber-like probe of flexing, and the rear that is disposed at described rear end side support, with rear end side part electrodes in contact; Described rear end side support, the support plate that is formed with through hole by many pieces of laminations constitutes; Described rear end side inserting hole constitutes by a plurality of through holes, and simultaneously, described through hole is made of small diameter bore and the large diameter hole bigger than small diameter bore diameter; The probe channeling direction of described rear end side inserting hole forms with the state of off-centring separately by a plurality of through holes and to be set; Described probe is guided by the probe channeling direction to the rear end side inserting hole that tilts by the small diameter bore of through hole; The front part of probe is disposed on the relative rear end side part position that the inclined side of the probe channeling direction of distolateral inserting hole is offset backward.
Adopt the present invention, the probe channeling direction by the rear end side supporting hole tilts with respect to the probe channeling direction of front inserting hole, can make the centre of probe between front support and rear end side support
In the present invention, preferably set the angle that a plurality of different angles of inclination tilt as the probe channeling direction of a plurality of rear end side inserting holes.Adopt such structure,, also the rear end side mutual spacing partly of many probes can be done more even do the front arrangement pitches partly of probe little.Therefore, the rear end side part electrodes in contact of easier configuration and probe.Owing to can do electrode greatly,, the rear end side part of probe be contacted with electrode even therefore adopt the little structure of probe diameter again.
In the present invention, preferably have the electrode support of supporting electrode, rear end side support and electrode support form removably structure.Adopt such structure, by the electrode support of supporting electrode is set, assembling and maintenance become easily, owing to forming removably structure of rear end side support and electrode support, therefore form as long as take off the state that the electrode support just can be replaced probe from the rear end side support simultaneously.Particularly under the situation that a plurality of probes and electrode are set, adopt and utilize the electrode support to support that integrally the structure of a plurality of electrodes is effective.
In the present invention, preferably releasably dispose location-plate between rear end side support and electrode, setting is communicated with the rear end side inserting hole on the location-plate, forms the pilot hole of the diameter littler than rear end side inserting hole diameter.Adopt such structure, on location-plate, utilize the pilot hole of the minor diameter littler (forming) the rear end side part of inserting the probe of rear end side inserting hole can be located with having little opening scope, therefore can more reliably obtain conduction contact condition with respect to electrode than rear end side inserting hole diameter.Again, the aperture of rear end side inserting hole can be expanded to the degree of easily the probe insertion being extracted, therefore, can form the structure that to replace probe more easily by location-plate is set.Here, as long as above-mentioned pilot hole possesses the aperture (opening scope) that the position, rear end that do not hinder probe contacts with conduction between the electrode.
Again, in order to solve above-mentioned problem, gauging fixture of the present invention, it is characterized in that, possess: have front inserting hole that the probe of regulation channeling direction is arranged with the front support of checking the subtend face that object is relative, rear at described front support keeps arranged spaced, rear end side support with rear end side inserting hole that the probe of regulation channeling direction is arranged, have and to make probe front in the rear end side part of checking that subject side is inserted the front part of logical front inserting hole with haunting and inserted logical rear end side inserting hole, but the rubber-like probe of flexing, and the rear that is disposed at the rear end side support, with rear end side part electrodes in contact; Described rear end side support, the support plate that is formed with through hole by many pieces of laminations constitutes; Described rear end side inserting hole constitutes by a plurality of through holes, simultaneously, described through hole is made of small diameter bore and the large diameter hole bigger than small diameter bore diameter, and described rear end side inserting hole has the probe channeling direction with respect to the vertical direction of described subtend face and the rake that tilts; This rake forms with the state of off-centring separately by a plurality of through holes and to constitute; Described probe is guided by the probe channeling direction to the rear end side inserting hole that tilts by the small diameter bore of through hole; The front part of described probe is disposed at respect to the rear end side part on the position of the inclined side skew of rake.
Adopt the present invention, the rear end side inserting hole possesses the rake of its probe channeling direction with respect to the orthogonal directions inclination of subtend face, the front of probe partly is disposed at respect to the rear end side part on the position of the inclined side skew of rake, therefore, the center section of probe is tilted, therefore, when checking object, the preceding end in contact of probe can make the smooth deflection of probe.Again, the front of probe partly is disposed at relative rear end side part on the position of the inclined side skew of rake, thus the vergence direction of rake and the probe of installation that the direction of inclination attitude of probe maybe should be installed is consistent.Therefore extract or insert probe from the place ahead of front support or the rear of rear end side support easily.Consequently, the complicated structures such as member that make front support and rear end side support mobile usefulness on in-plane are set unlike in the past, also can change probe easily.
Again, testing fixture of the present invention is characterized in that, is the electric checking means that have above-mentioned each described gauging fixture and be electrically connected with a plurality of electrodes of this gauging fixture.As the electric checking means, can enumerate and find Wiring pattern and the short circuit of circuit, the open-circuit test of broken string or the research technique of short-circuit test.As the object of electric checking, printed circuit board (PCB) and SIC (semiconductor integrated circuit) etc. can have been enumerated again.
Also have, in above-mentioned each invention, probe preferably covers the electrical isolation coating from the front support to inspection object outstanding front end position and the part beyond the position, rear end that contacts with electrode at least.Adopt such structure, can utilize the electrical isolation coating to eliminate the danger that the short circuit accident between the probe takes place.In this case, the ora terminalis of electrical isolation coating that preferably forms the front of probe can prevent that to checking the chimeric structure of subject side, becoming probe is to the portion that prevents that checks that subject side comes off with respect to the front inserting hole.Adopt this structure, the ora terminalis of the electrical isolation coating of probe becomes to be entrenched in respect to the front inserting hole checks that coming off of subject side prevents portion, can prevent that therefore probe is to checking that subject side deviates from.
Again, the probe channeling direction of the front support vertical direction on the surface of the inspection subject side of front support preferably.In this case, can make probe, therefore be not easy the damage inspection object, and can access stable contact resistance perpendicular to checking that object surface is in contact with it.
Adopt the present invention, can provide excellent effect of replacing the gauging fixture of probe easily simple in structure although can access.
Description of drawings
Fig. 1 is the general stereographic map of structure of the gauging fixture of expression the invention process form 1.
Fig. 2 is the longitudinal diagram of the cross-section structure of expression gauging fixture shown in Figure 1.
Fig. 3 is the fragmentary cross-sectional view of amplification of the cross-section structure of expression front support shown in Figure 1.
Fig. 4 is the fragmentary cross-sectional view of amplification of the cross-section structure of expression rear end side support shown in Figure 1.
Fig. 5 is the part stereographic map of amplification of the conduction contact condition of the position, rear end of probe of expression the invention process form 1 and electrode.
Fig. 6 is the summary construction diagram that carries the testing fixture of gauging fixture formation shown in Figure 1.
Fig. 7 is the graph of relation that gauging fixture shown in Figure 1 is used in the amount of being pressed into of contact resistance value under the situation of inspection object of regulation and probe.
Fig. 8 be the invention process form 2 the rear end side support different sections with section shown in Figure 4 the fragmentary cross-sectional view of amplification of structure.
Fig. 9 is the longitudinal diagram of cross-section structure of a part of the gauging fixture of expression the invention process form 2.
Figure 10 is the figure that the configuration relation at the front end position of the probe of the invention process form 2 and position, rear end is gone out from the Z direction indication of Fig. 9.
Figure 11 is the fragmentary cross-sectional view of amplification of cross-section structure of the front support of expression the present invention other examples.
Figure 12 is the fragmentary cross-sectional view of amplification of cross-section structure of the rear end side support of expression the present invention other examples.
Figure 13 is the figure that the configuration relation at the front end position of probe of expression the present invention other examples and position, rear end goes out from the Z direction indication of Fig. 9.
Figure 14 is the figure that the configuration relation at the front end position of probe of expression the present invention other examples and position, rear end goes out from the Z direction indication of Fig. 9.
Figure 15 is the fragmentary cross-sectional view of amplification of the cross-section structure of the front support of expression the present invention other examples and rear end side support.
Figure 16 is the fragmentary cross-sectional view of amplification of the cross-section structure of the front support of expression the present invention other examples and rear end side support.
Symbol description
10 gauging fixtures
11,11 ', 51 front supports
11a, 51a subtend face
11X, 11X ', 51X front inserting hole
12,12 ', 52,62 rear end side supports
12X, 12X ', 12X1,12Y, 12Y1,52X, 62X rear end side inserting hole
14 probes
14s front part
14u rear end side part
15 electrode supports
16 electrodes
18 location-plates
The 18a pilot hole
100 testing fixtures
110 control parts (electric checking means)
The orientation of A front inserting hole
Direction of B
The C other direction
V1 probe channeling direction
V2 probe channeling direction
W checks object
θ 1, θ 2 angles (angle of inclination)
Concrete example
Followingly the optimal morphology of implementing the present invention and using is described with reference to accompanying drawing.
Example 1
Fig. 1 is the general stereographic map of structure of the gauging fixture 10 of expression the invention process form 1.Fig. 2 is the longitudinal diagram of gauging fixture 10 shown in Figure 1.Fig. 3 is the fragmentary cross-sectional view of amplification of the cross-section structure of expression front support 11 shown in Figure 1.Fig. 4 is the fragmentary cross-sectional view of amplification of the cross-section structure of expression rear end side support 12 shown in Figure 1.Fig. 5 is the part stereographic map of amplification of the conduction contact condition of position, the rear end 14v of probe 14 of expression the invention process form 1 and electrode 16.Fig. 6 carries gauging fixture 10 shown in Figure 1 and the summary construction diagram of the testing fixture 100 that forms.Fig. 7 is the graph of relation that gauging fixture shown in Figure 1 10 is used in the amount of being pressed into of contact resistance value under the situation of inspection object W of regulation and probe 14.
The gauging fixture 10 of this example possesses: front support 11, keep arranged spaced in the rear end side support 12 at the rear of this front support 11, be connected and fixed the supporting pillar 13 of front support 11 and rear end side support 12 usefulness.Front support 11 and rear end side support 12 form tabular respectively, and are configured its surface is parallel to each other.Insert logical probe 14 on front support 11 and rear end side support 12, the front end of this probe 14 is outstanding a little on the surface of front support 11.
At the rear of rear end side support 12 installing electrodes support 15.This electrode support 15 supports fixing and probe 14 to conduct electricity a plurality of electrodes 16 that contact and form as shown in Figure 2.Also have, in Fig. 2, only depict a probe 14 and an electrode 16, many probes 14 and electrode 16 are arranged but in fact go up alignment arrangements at the in-plane direction of the surface of front support 11, rear end side support 12 (promptly along).Again, in Fig. 2, the following front inserting hole 11X and the rear end side inserting hole 12X that are formed on front support 11 and the rear end side support 12 also omit in diagram.
Probe 14 usefulness tungsten, high-speed steel (SKH), beryllium copper metals such as (Be-Cu) and other electric conductors constitute, but form the rubber-like lead shape structure of flexing.In this example, probe 14 possesses lead 14a that aforesaid electric conductor formation is arranged and the electrical isolation coating 14b that covers the outside surface of this lead 14a.Electrical isolation coating 14b constitutes with insulators such as synthetic resin, preferably applies by applying the surface that insulating bag overlays on lead 14a.As shown in Figure 3 and Figure 4, among the front part 14s of probe 14 and the rear end side part 14u, do not form electrical isolation coating 14b, form the state that lead 14a exposes.The front end position 14t of this probe 14 and position, rear end 14v preferably form the dome shape structure as the illustration among the figure.Again, preferably utilizing method such as platings to form to improve on the surface of these front end position 14t and position, rear end 14v conducts electricity contact performance (contact) or keeps the superficial layer that this characteristic is used.Such superficial layer for example has at electrodeposited coating of metal levels such as nickel dam superimposed layer gold, palladium, rhodium etc.
3 through hole 111a, 112a, 113a form concentric shape.More particularly, through hole 111a is made of small diameter bore 111a1 and the large diameter hole 111a2 bigger than small diameter bore 111a1 diameter, and through hole 113a is made of small diameter bore 113a1 and the large diameter hole 113a2 bigger than small diameter bore 113a1 diameter.Again, small diameter bore 111a1 and small diameter bore 113a1 diameter are roughly the same, and, bigger slightly than the external diameter of lead 14a, and form with the slightly little internal diameter of external diameter than the probe 14 of the part of electrical isolation coating 14b.Also have, through hole 112a forms bigger than small diameter bore 111a1,113a1 diameter, and than large diameter hole 111a2, size that the 113a2 diameter is all little.
Rear end side support 12, many pieces of support plates of lamination 121,122,123 constitute by beginning in regular turn from front support 11 sides.As shown in Figure 4, form through hole 121a, 122a, 123a respectively on each support plate 121,122,123.Utilize these through holes 121a, 122a, 123a to constitute the rear end side inserting hole 12X of the rear end side part 14u that inserts logical probe 14.This rear end side inserting hole 12X has the probe channeling direction V 1 that the probe channeling direction (being the vertical direction of subtend face 11a) with respect to front inserting hole 11X tilts.Promptly 3 through hole 121a, 122a, 123a have the state of skew to form respectively with each center slightly, and whole rear end side inserting hole 12X becomes the rake with respect to the vertical direction inclination of subtend face 11a.More particularly, as shown in Figure 4, with the order according to through hole 121a, 122a, 123a, wherein the state of the right-hand skew slightly among the mind-set figure forms 3 through hole 121a, 122a, 123a.Therefore, probe channeling direction V 1 with respect to the normal n 1 of the Surface Vertical of rear end side support 12, in Fig. 4 to tilt angle theta 1 only counterclockwise.Again, this rear end side inserting hole 12X only is provided with the number of the probe 14 that is provided with on gauging fixture 10.
Again, through hole 121a is made of small diameter bore 121a1 and the large diameter hole 121a2 bigger than small diameter bore 121a1 diameter; Through hole 122a is made of small diameter bore 122a1 and the large diameter hole 122a2 bigger than small diameter bore 122a1 diameter; Through hole 123a is made of small diameter bore 123a1 and the large diameter hole 123a2 bigger than small diameter bore 123a 1 diameter.Small diameter bore 123a1 is big slightly with the external diameter than lead 14a, and form than the slightly little internal diameter of external diameter of the probe 14 of the part of electrical isolation coating 14b, small diameter bore 121a1 and small diameter bore 122a1 diameter are roughly the same, and form with the also big slightly internal diameter of external diameter than the probe 14 of the part that forms insulating coating film 14b.
Again, on each probe 14, the front part 14s that inserts logical front inserting hole 11X is disposed at the position of vergence direction of more being partial to the probe channeling direction V1 of rear end side inserting hole 12X than the rear end side part 14u that inserts rear end side inserting hole 12X.That is to say, import the aperture position (aperture position of the through hole 113a of support plate 113 just) of rear end side of front inserting hole 11X of the front part 14s of a certain probe 14, as shown in Figure 4, it seems from the rear end side inserting hole 12X of the rear end side part 14u that imports this probe 14, be disposed at the inclined side of the probe channeling direction V1 of this rear end side inserting hole 12X.In more detail, in this example, import the rear end side aperture position (aperture position of through hole 113a just) of front inserting hole 11X of the front part 14s of a certain probe 14, it seems from the rear end side inserting hole 12X of the rear end side part 14u that imports this probe 14, be disposed at the probe channeling direction V1 of this rear end side inserting hole 12X.
The ora terminalis 14b s of the electrical isolation coating 14b of the front of probe 14 is disposed at the position after small diameter bore 113a1 than the through hole 113a of front inserting hole 11X more leans on as shown in Figure 3.Again, as mentioned above, the small diameter bore 113a1 of through hole 113a is with bigger slightly than the external diameter of lead 14a and form than the slightly little internal diameter of external diameter of the probe 14 of the part of electrical isolation coating 14b.Therefore, the ora terminalis 14b s of electrical isolation coating 14b can form to inspection subject side (top among the figure) with respect to the opening edge 113b of the small diameter bore 113a1 of the through hole 113a of front inserting hole 11X chimericly.Like this, the ora terminalis 14b s of electrical isolation coating 14b forms the portion of coming off that prevents that is embedded in front inserting hole 11X, can prevent that therefore probe 14 is from checking that subject side comes off.
Fig. 5 is the amplification stereogram of contact condition of the surperficial 16a of expression position, rear end 14v of probe 14 and electrode 16.Position, rear end 14v constitutes dome shape as mentioned above, therefore along the inside of the rear end side inserting hole 12X that possesses the probe channeling direction V1 that tilts like that as mentioned above, even the rear end side part 14u of probe 14 tilts, the conduction contact condition of the surperficial 16a of position, rear end 14v and electrode 16 is not influenced yet.
Fig. 6 is the schematic summary construction diagram of general structure that carries the testing fixture 100 of gauging fixture 10.This testing fixture 100 possesses: comprise the check circuit that carries out electric judgement control part 110, be connected in the drive division 120 of this control part 110 and the inspection member 130 that drives by this drive division 120.Check member 130 have the 1st support disc 131 of installation check anchor clamps 10, with respect to the 2nd support disc 132 of the 1st support disc 131 subtends configuration and make the 1st support disc 131 and the 2nd support disc 132 can be relative to close and the mobile member 133 that moves with leaving.This mobile member 133 is made of ball screw member and oil pressure member etc., utilizes drive division 120 to drive.
The electrode 16 that is mounted on the gauging fixture 10 of the 1st support disc 131 is connected in distribution 109 by distribution 17, is electrically connected with control part 110 by this distribution 109.On the 2nd support disc 132, place inspection object W (circuit board etc.) with the state of location again.Then, drive division 120 is approaching to the 2nd support disc 132 according to control signal driving mobile member 133, the 1 support discs 131 of control part 110, with the pressure of regulation gauging fixture 10 is checked on the object W by being pressed in.In case each probe 14 of gauging fixture 10 with check object W conducting, control part 110 provides the signal of regulation by 109 pairs of gauging fixtures 10 of distribution, or the current potential of checking out by receiving check anchor clamps 10 etc., checks the electrical test of object W.
Action effect to the gauging fixture 10 of as above illustrated example 1 describes below.Under the situation of the gauging fixture 10 of assembling this example, at first after many probes 14 are inserted logical front support 11 and rear end side support 12, utilize supporting pillar 13 that front support 11 and rear end side support 12 are connected and fixed, then, electrode support 15 is installed and fixed with respect to rear end side support 12.
Again,, electrode support 15 is taken off from rear end side support 12, take off support plate 123 thereafter again, take off probe 14 from the rear end side inserting hole 12X of rear end side support 12 (support plate 121,122) replacing under the situation of probe 14.At this moment, the front part 14s of probe 14 is disposed at the position that the vergence direction of distolateral backward inserting hole 12X departs from (promptly to position that the inclined side of rake departs from), therefore takes out probe 14 along the rear end side inserting hole 12X of the probe channeling direction V1 with inclination easily.With the rear end side inserting hole 12X of new probe 14 insertion rear end side supports 12 (support plates 121,122), intactly front part 14s is inserted the front inserting hole 11X that leads to front support 11 again.At this moment, front inserting hole 11X is positioned at relative rear end side inserting hole 12X to the position of the inclined side of its probe channeling direction V1 skew the position of the inclined side skew of rake (promptly to), therefore, probe 14 is inserted led to front supports 11 easily., support plate 123 fixed, as the rear end side support of finishing 12 thereafter.Make probe 14 can not come off with this from leading section position 14t side with from position, rear end 14v side.
Particularly in this example, introduce the aperture position of rear end side of front inserting hole 11X of the front part 14s of a certain probe 14, it seems from the rear end side inserting hole 12X of the rear end side part 14u that imports this probe 14, is to be disposed on the probe channeling direction V1 of this rear end side inserting hole 12X.Therefore, when probe 14 being inserted rear end side inserting hole 12X from the rear of rear end side support 12, if probe 14 forms linearity, probe 14 just intactly extends on the probe channeling direction V1 of rear end side inserting hole 12X, the aperture position of the rear end side of the front inserting hole 11X of the front part 14s arrival front support 11 of probe 14, therefore, can carry out the insertion operation of probe 14 easily.
In this example, the direction that the center section of the probe 14 between front support 11 and the rear end side support 12 tilts to rear end side part 14u in rear end side inserting hole 12X tilts to extend, and keeps this state to be introduced into front inserting hole 11X.By means of this, in case the front end position 14t of probe 14 contacts and by being pressed on the inspection object, as mentioned above, be in the easy deflection of center section (flexing) of the probe 14 of inclination attitude, again, the deflection direction (flexion posture) of this center section is limited on this vergence direction.
The vergence direction of the probe channeling direction V1 of rear end side inserting hole 12X preferably has identical direction in a plurality of rear end inserting hole 12X.In this example, form such structure.Even therefore the arrangement pitches of many probes 14 is done for a short time, when checking during probe 14 deflections, the center section of probe 14 also is not easy to be in contact with one another, therefore the contact pressure that produces between probe 14 and the inspection object is stable with respect to the deflection of probe 14, and the contact pressure of many probes 14 also is uniform.
Fig. 7 be the probe 14 of expression when using the structure of this example with the inspection object between contact resistance value and the curve map of the relation of the amount of being pressed into of probe.Here, the resistance value of probe is 300m Ω, and the resistance value of distribution is 500m Ω.Shown in this curve map, also can access stable contact condition in the minimum zone of the amount of being pressed into of probe (amount of being pressed into is the following zone of the above 0.1mm of 0.04mm).The characteristic difference of the contact resistance between the probe is also minimum as can be known again.
Example 2
Fig. 8 is the amplifier section sectional view of structure of rear end side support 12 different with the section shown in Figure 4 section of the invention process form 2.Fig. 9 is the longitudinal diagram of cross-section structure of a part of the gauging fixture of expression the invention process form 2.Figure 10 is the figure that the configuration relation of the front end position 14t of probe 14 of the invention process form 2 and position, rear end 14v goes out from the Z direction indication of Fig. 9.
In above-mentioned example 1, form such structure, promptly the vergence direction of the probe channeling direction V1 of rear end side inserting hole 12X probe channeling direction with front inserting hole 11X in a plurality of rear end side inserting hole 12X is identical.On the other hand, in example 2, the vergence direction of the probe channeling direction of rear end side inserting hole is in adjacent a plurality of rear end side inserting holes, and with the probe channeling direction alternate of front inserting hole 11X, this point is example 1 and example 2 structural main difference points.Therefore, being the center below with this difference describes the structure of this example.Also have, in this example, other structures except said structure are identical with example 1, therefore are marked with identical symbol for identical structure, simultaneously identical part omitted its detailed description.Or, the diagram and the explanation of omitting the part identical with example 1.
In example 2, the same on the regulation position of each support plate 121,122,123 of formation rear end side support 12 with example 1, form through hole 121a, 122a, 123a as shown in Figure 4 respectively.Utilize these through holes 121a, 122a, 123a on the position of regulation, to constitute the rear end side inserting hole 12X of the rear end side part 14u that inserts logical probe 14.
On other positions different of each support plate 121,122,123, form through hole 121b, 122b, 123b as shown in Figure 8 respectively with position shown in Figure 4 again.Utilize these through holes 121b, 122b, 123b, on other positions, constitute the rear end side inserting hole 12Y of the rear end side part 14u that inserts logical probe 14.This rear end side inserting hole 12Y has the probe channeling direction V2 with respect to the probe channeling direction inclination of front inserting hole 11X.That is to say that 3 through hole 121b, 122b, 123b form with the state that each center is offset one by one slightly.More particularly, as shown in Figure 8, with the order of through hole 121b, 122b, 123b, with the left among the mind-set figure wherein to one by one slightly the state of skew form 3 through hole 121b, 122b, 123b.Therefore probe channeling direction V2 with respect to the normal n1 of the Surface Vertical of rear end side support 12 in Fig. 8 to clockwise direction tilt angle theta 1 only.
Again, through hole 121b is made of small diameter bore 121b1 and the large diameter hole 121b2 identical with large diameter hole 121a2 with the small diameter bore 121a1 of through hole 121a; Through hole 122b is made of small diameter bore 122b1 and the large diameter hole 122b2 identical with large diameter hole 122a2 with the small diameter bore 122a 1 of through hole 122a; Through hole 123b is made of small diameter bore 123b1 and the large diameter hole 123b2 identical with large diameter hole 123a2 with the small diameter bore 123a1 of through hole 123a.
As Fig. 9 and shown in Figure 10, with respect to the normal n1 of this Surface Vertical, probe channeling direction V 1 is to the rear end side inserting hole 12X of tilt angle theta 1 only counterclockwise, with respect to normal n1, probe channeling direction V2 is to the clockwise direction rear end side inserting hole 12Y of tilt angle theta 1 only, with respect to normal n1, the probe channeling direction is to the rear end side inserting hole 12X1 of the angle θ 2 that counterclockwise only rake ratio angle θ 1 is big, and with respect to normal n1, the probe channeling direction is to the clockwise direction rear end side inserting hole 12Y 1 of tilt angle theta 2 only, according to this order and repeat this sequentially, adjacent ground connection forms the number corresponding with the number of probe 14 on rear end side support 12.
That is to say, as Fig. 9 and shown in Figure 10, the probe channeling direction of above-mentioned 4 kinds of adjacent rear end side inserting hole 12X, 12Y, 12X1,12Y1 alternately to perpendicular to the direction of orientation (above-below direction among the figure) A of front inserting hole 11X (among the figure to the right direction) B and opposite with direction B to other direction (among the figure direction) the left so mutually different direction of C tilt.
Like this, adjacent rear end side inserting hole 12X, 12Y, 12X1,12Y1 form with respect to the normal n1 of the Surface Vertical of rear end side support 12, the probe channeling direction alternately tilts to different directions.Again, the tilt angle theta 1 of rear end side inserting hole 12X, 12Y form differently rear end side inserting hole 12X, 12Y, 12X1,12Y1 with the tilt angle theta 2 of rear end side inserting hole 12X1,12Y1.That is to say,, set two different tilt angle theta 1, θ 2 as the angle that the probe channeling direction of rear end side inserting hole 12X, 12Y, 12X1,12Y1 tilts.
In other words, in this example, front end position 14t with respect to probe 14, position, rear end 14v is to direction B and other direction C (left and right directions) skew of Figure 10, simultaneously, in the side-play amount difference of adjacent position, the rear end 14v of the orientation A of front inserting hole 11X (above-below direction).For example, in this example, as shown in figure 10, the side-play amount L1 with respect to front end position 14t of position, the rear end 14v that inserts among rear end side inserting hole 12X, the 12Y is 0.35mm, and the side-play amount L2 with respect to front end position 14t that inserts position, the rear end 14v of rear end side inserting hole 12X1,12Y1 is 0.75mm.
Also have, in this example, set two side-play amounts, as the side-play amount of position, the rear end 14v that inserts among rear end side inserting hole 12X, 12Y, 12X1, the 12Y 1; But the side-play amount of setting also can be one, also can set the side-play amount more than 3 or 3.That is to say, in this example, the angle that tilts as the probe channeling direction of rear end side inserting hole 12X, 12Y, 12X1,12Y1, set 2 different tilt angle theta 1, θ 2, but, the angle of inclination of the probe channeling direction of setting also can be 1, also can set the angle of inclination more than 3 or 3.
As mentioned above, in this example, the probe channeling direction of adjacent a plurality of rear end side inserting hole 12X, 12Y, 12X1,12Y1 forms the structure that the probe channeling direction with respect to front inserting hole 11X tilts to different directions.Therefore, even the arrangement pitches of the front end position 14t of probe 14 is done for a short time, also can do the mutual distance of position, the rear end 14v of a plurality of probes 14 greatly.For example, even the arrangement pitches of front end position 14t is made 80 microns, also can do the mutual distance of position, rear end 14v greatly.Therefore, position, the rear end 14v electrodes in contact of probe 14 disposes easily.
Owing to can do the mutual distance of position, the rear end 14v of a plurality of probes 14 greatly, therefore can do electrode 16 greatly again.For example, with respect to probe 14, can form electrode part 16 with 300 microns (0.3mm) diameters with 50 micron diameters.Thereby, even under the low situation of the positional precision of the machining precision of front inserting hole 11X and rear end side inserting hole 12X, 12Y, 12X1,12Y1 or electrode 16, position, the rear end 14v of probe 14 is contacted with electrode 16.
In this example, the probe channeling direction of adjacent a plurality of rear end side inserting hole 12X, 12Y, 12X1,12Y1 is alternately to tilting perpendicular to the direction B of the orientation A of front inserting hole 11X and the such different directions of rightabout other direction C of this direction B.Therefore, position, the rear end 14v that inserts the probe 14 of rear end side inserting hole 12X, 12Y, 12X1,12Y 1 correctly can be arranged regularly.Therefore, can dispose position, the rear end 14v electrodes in contact 16 of probe 14 expeditiously.
In this example,, set 2 different tilt angle theta 1, θ 2 as the angle that the probe channeling direction of a plurality of rear end side inserting hole 12X, 12Y, 12X1,12Y1 tilts.Therefore compare with the situation that the angle that tilts as the probe channeling direction is only set 1 angle of inclination (for example angle θ 1), the mutual distance of position, the rear end 14v of a plurality of probes 14 can be done more.Thereby the configuration of position, the rear end 14v electrodes in contact 16 of probe 14 is more prone to.Owing to can do electrode 16 greatly,, position, the rear end 14v of probe 14 be contacted with electrode 16 even therefore the diameter of probe 14 is done for a short time again.
Other examples
Aforesaid each example is an example of the best example of the present invention, but is not limited to this, and in not changing main idea of the present invention, the present invention can have various distortion.For example, also can use the front support 11 of front support 11 ' above-mentioned each example of replacement as shown in Figure 11.Two support plates 111 of this front support 11 ' be ' and 112 ' lamination form.Utilize the through hole 112a ' formation front inserting hole 11X ' that is provided with on support plate 111 ' last through hole 111a ' that is provided with and the support plate 112 again.
More particularly, the through hole 111a ' that is made of small diameter bore 111a1 ' and the large diameter hole 111a2 ' bigger than small diameter bore 111a1 ' diameter forms concentric shape with the through hole 112a ' that is made of small diameter bore 112a1 ' and the large diameter hole 112a2 ' bigger than small diameter bore 112a1 ' diameter.In this front inserting hole 11X ', form the ora terminalis 14bs structure chimeric of the electrical isolation coating 14b of probe 14 from the rear.That is to say, when probe 14 is wanted the forward end side shifting, the ora terminalis 14bs of electrical isolation coating 14b be embedded in support plate 112 ' on the opening edge 112b of through hole 112a ', can prevent that therefore probe 14 is from checking that subject side comes off.
This front support 11 ' only is with two support plates 111 ' and 112 ' constitute, but on the side foremost of front inserting hole 11X ' and rear end side small diameter bore 111a1 ' and small diameter bore 112a1 ' is set respectively.Therefore, can guarantee that front inserting hole 11X ' has sufficient length, that is to say, can guarantee the probe length of lead.
Again, also can use rear end side support 12 shown in Figure 12 ', use location-plate 18 simultaneously, replace the rear end side support 12 of aforesaid each example.These rear end side supports 12 ' and location-plate 18 fix with layer-by-layer state, but form can be from the structure of rear end side support 12 ' take off simply for location-plate 18.Again, location-plate 18 be disposed at rear end side support 12 ' and electrode support 15 between.
This rear end side support 12 ' utilize support plate 121,122 and 123 ' lamination constitute, each support plate 121,122,123 ' through hole 121a, 122a and 123a ' formation rear end side inserting hole 12X '.Also have, through hole 123a ' is made of small diameter bore 123a1 ' and the large diameter hole 123a2 ' bigger than small diameter bore 123a1 ' diameter.
Again, the pilot hole 18a that the position of position, the rear end 14v of formation decision probe 14 is used on location-plate 18.This pilot hole 18a forms than the internal diameter of rear end side inserting hole 12X ', particularly than the little structure of internal diameter of the small diameter bore 123a1 ' of the last distolateral through hole 123a ' of rear end side inserting hole 12X '.Therefore, have to a certain degree well-to-do even insert the position of rear end side part 14u of the probe 14 of rear end side inserting hole 12X ', also can utilize the pilot hole 18a of location-plate 18 more correctly to determine the position of position, the rear end 14v of probe 14, so can improve the reliability that contacts with electrode 16 conductions.Again, utilize location-plate 18 to be ensured, therefore can make the internal diameter of rear end side inserting hole 12X ' do more to a certain extent owing to contacting with the conduction of electrode 16.
Here, replace under the situation of probe 14, by location-plate 18 is taken off, position, the rear end 14v of probe 14 form distolateral backward support 12 ' the outstanding state in rear, and, rear end side inserting hole 12X ' can make the major diameter structure as described above, therefore as easy as rolling off a logly rearward probe 14 is pulled up, or new probe 14 is installed.
Also have, also can make the probe channeling direction of adjacent rear end side inserting hole be Figure 13 or direction shown in Figure 14.Among Figure 13 and Figure 14, the front end position 14t of the probe of observing from the Z direction of Fig. 9 14 and the configuration relation of position, rear end 14v are shown here, with Figure 10 identical table.That is to say, as shown in figure 13, the probe channeling direction that makes adjacent rear end side inserting hole for from a direction B to the illustrated counter clockwise direction direction of tilt angle alpha 1 only, and direction to a direction B inclination, and from other direction C clockwise direction direction of tilt angle alpha 2 only to figure, and, to this both direction of direction of other direction C inclination.At this moment, angle [alpha] 1 can be identical with angle [alpha] 2, also can be different.Again, as shown in figure 14, the probe channeling direction that makes adjacent rear end side inserting hole for from a direction B to the illustrated clockwise direction direction of inclination angle beta 1 only, and direction to a direction B inclination, and from other direction C clockwise direction direction of inclination angle beta 2 only to figure, and this both direction of direction that tilts to other direction C.At this moment, angle beta 1 can be identical with angle beta 2, also can be different.
Also have, in above-mentioned each example, front support 11,11 ' and rear end side support 12,12 ' respectively adopt the structure of laminations such as a plurality of support plates 111, still, also can adopt the structure that constitutes with single member.Again, on support plate 111 grades of above-mentioned each example, form the through hole 111a that is made of small diameter bore 111a1 etc. and large diameter hole 111a2 etc. etc., still, through hole also can be formed on the shape that has identical open profile on the axis direction.
Again, in above-mentioned each example, it is vertical with the subtend face 11a of front support 11 to form front inserting hole 11X, and rear end side inserting hole 12X is with respect to the rake of the vertical direction inclination of the subtend face 11a of front support 11 simultaneously.Again, the front part 14s of probe 14 be disposed at the position of the vergence direction skew of distolateral backward inserting hole 12X, promptly on the position of the inclined side skew of rake.But, as shown in figure 15, also can form to possess makes rear end side inserting hole 52X vertical with the subtend face 51a of front support 51, simultaneously, front inserting hole 51X is with respect to the structure of the rake of the vertical direction inclination of subtend face 51a, and the rear end side part 14u of probe 14 is disposed on the position of the inclined side (vergence direction) that departs from rake.
More particularly, also can form formation as described below.Support plate 212 laminations that for example, will have perpendicular to front support 51 and the support plate 211 through hole 211a that checks the subtend face 51a that object is relative and have a through hole 212a that the vertical direction with respect to subtend face 51a tilts constitute front support 51.Front inserting hole 51X is made of through hole 211a and through hole 212a, and the part that forms through hole 212a becomes the rake of front inserting hole 51X.On rear end side support 52, on perpendicular to the direction of subtend face 51a, form rear end side inserting hole 52X again.And the rear end side part 14u of probe 14 is configured on the position with respect to the skew of the inclined side (vergence direction) of the rake of the distolateral forward inserting hole 51X of front part 14s.
Under situation about constituting as mentioned above, extract probe 14 or the distolateral forward inserting hole 51X insertion of the upside from figure probe 14 from the upside of front inserting hole 51X to figure.Even under the situation of Gou Chenging, also can access and the identical effect of above-mentioned example 1 described effect like this.For example, because the vergence direction of rake is roughly consistent with the direction of the inclination attitude of probe 14, therefore can extract probe 14 at an easy rate.Because rear end side inserting hole 52X is disposed on the position of vergence direction skew of rake of distolateral forward inserting hole 51X, therefore easily probe 14 is inserted rear end side supports 52 again.
Again, as shown in figure 16, formation is except the rake of front inserting hole 51X, also possess the rake of rear end side inserting hole 62X with respect to the vertical direction inclination of subtend face 51a, simultaneously, can dispose front inserting hole 51X and rear end side inserting hole 62X, make the vergence direction of rake of front inserting hole 51X roughly consistent with the vergence direction of the rake of rear end side inserting hole 62X.That is to say, also can be that the front part 14s of probe 14 and the either party among the rear end side part 14u are disposed on the position with respect to the inclined side skew of any other direction rake among front part 14s and the rear end side part 14u.
More particularly, also can form structure as described below.For example, will have support plate 212 laminations of the through hole 212a that tilts perpendicular to the support plate 211 of the through hole 211a of subtend face 51a and the orthogonal directions that has with respect to subtend face 51a as mentioned above, constitute front support 51.Again, will have support plate 221 laminations of the through hole 221a that tilts perpendicular to the support plate 222 of the through hole 222a of subtend face 51a and the orthogonal directions that has with respect to subtend face 51a, constitute rear end side support 62.Front inserting hole 51X is made of through hole 211a and through hole 212a, and the part that forms through hole 212a becomes the rake of front inserting hole 51X.Again, rear end side inserting hole 62X is made of through hole 221a and through hole 222a, and the part that forms through hole 221a becomes the rake of rear end side inserting hole 62X.And, configuration front inserting hole 51X and rear end side inserting hole 62X, make the vergence direction of rake of front inserting hole 51X roughly consistent with the vergence direction of the rake of rear end side inserting hole 62X, simultaneously, either party among the front part 14s of probe 14 and the rear end side part 14u is configured to respect to any the opposing party among front part 14s and the rear end side part 14u, on the position of rake inclined side skew.
Under situation about constituting like this, the upside of distolateral forward inserting hole 51X, or extract probe 14 to downside, or from the distolateral forward inserting hole 51X of upside from rear end side inserting hole 62X, or insert probe 14 from the distolateral backward inserting hole 62X of downside.Even under the situation of Gou Chenging, also can access and the identical effect of above-mentioned example 1 described effect like this.For example, because the vergence direction of rake is roughly consistent with the direction of the inclination attitude of probe 14, so can easily extract probe 14.Again, under the situation of distolateral forward inserting hole 51X insertion probe 14 from upside, rear end side inserting hole 62X is disposed on the position of vergence direction skew of rake of distolateral forward inserting hole 51X, therefore easily probe 14 is inserted rear end side support 62, under the situation of distolateral backward inserting hole 62X insertion probe 14 from downside, front inserting hole 51X is disposed on the position of vergence direction skew of rake of distolateral backward inserting hole 62X, therefore easily probe 14 is inserted front supports 51.Also have, use the lamination number of the support plate of front support and rear end side support formation to be not limited to 2 layers.
Claims (10)
1. gauging fixture is characterized in that possessing:
The front support of front inserting hole with probe channeling direction of oriented inspection object,
Rear at described front support keeps arranged spaced, has the rear end side support of edge with respect to the rear end side inserting hole of the probe channeling direction of the probe channeling direction inclination of described front inserting hole,
But have the rubber-like probe that can make probe front insert the front part of logical described front inserting hole with haunting and insert the rear end side flexing partly of logical described rear end side inserting hole in described inspection subject side, and
Be disposed at described rear end side support the rear, with described rear end side part electrodes in contact;
Described rear end side support, the support plate that is formed with through hole by many pieces of laminations constitutes;
Described rear end side inserting hole constitutes by a plurality of described through holes, and simultaneously, described through hole constitutes by small diameter bore with than the big large diameter hole of described small diameter bore diameter;
The probe channeling direction of described rear end side inserting hole forms with the state of off-centring separately by a plurality of described through holes and to be set;
Described probe is guided by the probe channeling direction to the described rear end side inserting hole that tilts by the described small diameter bore of described through hole;
The described front part of described probe is disposed at described relatively rear end side part on the position of the inclined side skew of the probe channeling direction of described rear end side inserting hole.
2. gauging fixture as claimed in claim 1 is characterized in that, the aperture position of the rear end side of described front inserting hole is disposed at from described rear end side inserting hole on the probe channeling direction of described rear end side inserting hole.
3. gauging fixture as claimed in claim 1, it is characterized in that, a plurality of described front inserting holes, rear end side inserting hole and probe are set, and the probe channeling direction of described a plurality of rear end side inserting holes tilts to identical direction with respect to the probe channeling direction of described front inserting hole.
4. gauging fixture as claimed in claim 1, it is characterized in that, a plurality of described front inserting holes, rear end side inserting hole and probe are set, and the probe channeling direction of adjacent described a plurality of rear end side inserting holes tilts to different directions with respect to the probe channeling direction of described front inserting hole.
5. gauging fixture as claimed in claim 4, it is characterized in that, the probe channeling direction of described adjacent a plurality of rear end side inserting holes is alternately to tilting perpendicular to the direction (B) of the orientation of described front inserting hole with as these two different directions of rightabout other direction (C) of this direction (B).
6. gauging fixture as claimed in claim 4 is characterized in that, sets the angle that a plurality of different angles of inclination tilt as the probe channeling direction of described a plurality of rear end side inserting holes.
7. gauging fixture as claimed in claim 1 is characterized in that, has the electrode support of supporting described electrode, and described rear end side support and described electrode support form removably structure.
8. gauging fixture as claimed in claim 1, it is characterized in that, between described rear end side support and described electrode, releasably dispose location-plate, the pilot hole that is communicated with, forms the diameter littler than described rear end side inserting hole diameter with described rear end side inserting hole is set on the described location-plate.
9. gauging fixture is characterized in that possessing:
Have front inserting hole that the probe of regulation channeling direction is arranged with the front support of checking the subtend face that object is relative,
Rear at described front support keeps arranged spaced, has the rear end side support of the rear end side inserting hole that the probe of regulation channeling direction is arranged,
But have the rubber-like probe that can make probe front insert the front part of logical described front inserting hole with haunting and insert the rear end side flexing partly of logical described rear end side inserting hole in described inspection subject side, and
Be disposed at described rear end side support the rear, with described rear end side part electrodes in contact;
Described rear end side support, the support plate that is formed with through hole by many pieces of laminations constitutes;
Described rear end side inserting hole constitutes by a plurality of described through holes, simultaneously, described through hole constitutes by small diameter bore with than the big large diameter hole of described small diameter bore diameter, and described rear end side inserting hole has the probe channeling direction with respect to the vertical direction of described subtend face and the rake that tilts;
This rake forms with the state of off-centring separately by a plurality of described through holes and to constitute;
Described probe is guided by the probe channeling direction to the described rear end side inserting hole that tilts by the described small diameter bore of described through hole;
The described front part of described probe is disposed at respect to described rear end side part on the position of the inclined side skew of described rake.
10. a testing fixture is characterized in that, is the electric checkup apparatus that has each the described gauging fixture in the claim 1～9 and be electrically connected with a plurality of described electrode of this gauging fixture.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005123162 | 2005-04-21 | ||
| JP2005123162A JP2005338065A (en) | 2004-04-26 | 2005-04-21 | Inspection jig and inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1854744A CN1854744A (en) | 2006-11-01 |
| CN100535676C true CN100535676C (en) | 2009-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101134540A Expired - Fee Related CN100535676C (en) | 2005-04-21 | 2005-10-09 | Inspection jig and inspection equipment |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100824394B1 (en) |
| CN (1) | CN100535676C (en) |
| TW (1) | TW200638046A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3849948B1 (en) * | 2005-11-16 | 2006-11-22 | 日本電産リード株式会社 | Substrate inspection jig and inspection probe |
| JP5651333B2 (en) * | 2007-07-17 | 2015-01-14 | 日本発條株式会社 | Probe unit |
| JP2009036532A (en) * | 2007-07-31 | 2009-02-19 | Koyo Technos:Kk | Inspection tool and inspection device |
| KR101037974B1 (en) * | 2009-05-20 | 2011-05-30 | 주식회사 메디오션 | Method of producing probe guide plate |
| KR101459667B1 (en) * | 2013-07-22 | 2014-11-12 | 바이옵트로 주식회사 | Jig |
| CN103983816A (en) * | 2014-05-15 | 2014-08-13 | 珠海市运泰利自动化设备有限公司 | High-precision test module |
| JP6537315B2 (en) * | 2015-03-23 | 2019-07-03 | オルガン針株式会社 | Wire probe jig |
| KR101656047B1 (en) * | 2016-03-23 | 2016-09-09 | 주식회사 나노시스 | Jig for Circuit Board Inspection |
| US11293976B1 (en) * | 2020-09-25 | 2022-04-05 | Essai, Inc. | Integrated circuit device test tooling with dual angle cavities |
| KR102649845B1 (en) * | 2023-11-29 | 2024-03-21 | 주식회사 나노시스 | Jig for semiconductor device testing |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69326609T2 (en) * | 1993-07-23 | 2000-04-27 | Ibm | Test probe arrangement with articulation needles |
| JPH09274054A (en) * | 1996-04-08 | 1997-10-21 | Furukawa Electric Co Ltd:The | Prober |
| JP3505495B2 (en) * | 2000-09-13 | 2004-03-08 | 日本電産リード株式会社 | Inspection jig for substrate inspection, substrate inspection device provided with the inspection jig, and method of assembling inspection jig for substrate inspection |
| JP2004325306A (en) * | 2003-04-25 | 2004-11-18 | Yokowo Co Ltd | Coaxial probe for inspection, and inspection unit using the same |
| JP4242199B2 (en) * | 2003-04-25 | 2009-03-18 | 株式会社ヨコオ | IC socket |
-
2005
- 2005-10-09 CN CNB2005101134540A patent/CN100535676C/en not_active Expired - Fee Related
- 2005-10-11 KR KR1020050095610A patent/KR100824394B1/en active IP Right Grant
- 2005-10-12 TW TW094135464A patent/TW200638046A/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI292826B (en) | 2008-01-21 |
| KR20060111248A (en) | 2006-10-26 |
| CN1854744A (en) | 2006-11-01 |
| KR100824394B1 (en) | 2008-04-22 |
| TW200638046A (en) | 2006-11-01 |
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