CN216523652U

CN216523652U - Copper foil thickness measuring probe and probe head thereof

Info

Publication number: CN216523652U
Application number: CN202123084189.1U
Authority: CN
Inventors: 王昕�; 叶灿明; 王世进
Original assignee: Guangzhou Kunde Semiconductor Testing Technology Co ltd
Current assignee: Guangzhou Kunde Semiconductor Testing Technology Co ltd
Priority date: 2021-12-09
Filing date: 2021-12-09
Publication date: 2022-05-13
Anticipated expiration: 2031-12-09

Abstract

The utility model discloses a copper foil thickness measuring probe and a probe head thereof, which comprise a needle rod for contacting a copper foil measuring surface, wherein one end of the needle rod is inserted into a needle tube, and the needle rod moves axially in the needle tube; the needle tube is internally provided with a spring which props against the needle rod to enable the needle rod to be in close contact with the copper foil measuring surface under the action of the spring force, the probes penetrate through the conical seat and are connected with the aviation socket through the conductive wires, the probes are in contact with the surface of the copper foil of the copper-clad plate by adopting the conductive elastic needle rod, the mechanical damage to the copper foil material is avoided, the good electrical contact of measurement can be ensured, the accuracy, the repeatability and the reproducibility of square resistance measuring data are ensured, the probes are slightly different in stress according to the plane to be measured, the probes can adapt to planes with various differences in real time, the accurate measuring data of contact points are truly reflected, and the measuring precision is improved.

Description

Copper foil thickness measuring probe and probe head thereof

Technical Field

The utility model relates to the performance measurement of electronic materials, in particular to a probe for measuring the thickness of copper foil of a copper-clad plate by using the square resistance measurement principle of a semiconductor.

Background

The Copper Clad Laminate (CCL) as the substrate material of the printed circuit board is formed by laminating (electroplating or bonding) a Copper foil on a glass epoxy substrate, wherein the thickness of the Copper foil is 4 types of the thickness of 18 micrometers, 35 micrometers, 55 micrometers, 70 micrometers and the like. The thickness parameters of the copper foil affect the resistance, inductance, noise voltage and current of the copper wire of the circuit board, so it is very important to detect the thickness of the copper foil.

Known copper foil thickness measuring equipment is developed based on principles such as a micro-resistance method, an eddy current method or a four-probe method, and is a more common contact type metal four-probe method, wherein probes are tungsten carbide or high-speed steel, the four probes are jointly pressed by a single spring to contact a copper foil plane, the probes need to be connected with the spring through a needle clamp, the spring force received by each probe is uniform and consistent, and the probe can only be used for measuring a needle head position with higher planeness (a flat surface), if the plane to be measured is not uniform, the measuring precision can be influenced or the measuring failure can be caused, and the whole copper foil is easily 'punctured' and left due to the fact that the needle point is a cone with an angle of 45-60 degrees when the pressure is applied to be larger, so that the copper clad plate is scrapped. In order to avoid adverse effects caused by contact measurement, an eddy current thickness gauge manufactured by adopting an eddy current type principle is also provided, but the accuracy is lower than that of a four-probe method, and the manufacturing cost is quite high.

The known copper foil thickness measuring equipment has the defects and the reasons of the defects are mainly related to factors such as the material of a probe, the pressure applied by a spring, the shape of the needle head of the probe and the like, and the problem that the high-speed measurement of the thickness of the copper foil on line cannot be solved only by researching and developing the probe with a reasonable structure and a detecting head of the probe.

SUMMERY OF THE UTILITY MODEL

In order to overcome the technical defects, the utility model provides the copper foil thickness measuring probe which selects reasonable probe materials, spring applied pressure and structure thereof and probe needle head shape to improve the measuring accuracy, prolong the service life and be friendly to the tested copper foil surface.

In order to realize the purpose, the utility model adopts the technical scheme that: a copper foil thickness measuring probe comprises a needle rod used for contacting a copper foil measuring surface, wherein one end of the needle rod is inserted into a needle tube, and the needle rod moves axially in the needle tube; the needle tube is internally provided with a spring which props against the needle rod to enable the needle rod to be in close contact with the copper foil measuring surface under the action of spring force.

Preferably, the needle of the needle rod is hemispherical or circular arc.

Preferably, the radius of curvature of the hemispherical needle is 0.23-0.25 mm.

Preferably, the material of the needle bar is carbon tool steel.

Meanwhile, the technical scheme adopted by the utility model is as follows: the utility model provides a copper foil thickness measurement detecting head, includes the drum, and the both ends of drum assemble awl seat and aviation socket respectively, have four copper foil thickness measurement probes to pass in the awl seat, and the probe top is passed through the conductor wire and is connected its characterized in that with aviation socket: the copper foil thickness measuring probe consists of a needle rod used for contacting the copper foil measuring surface, a needle tube used for inserting the needle rod and a spring arranged in the needle tube, wherein the spring is propped against the space between the needle rod and the inner wall of the needle tube, and the needle rod is tightly contacted with the copper foil measuring surface under the action of spring force.

Preferably, the taper seat is provided with a needle plate, the needle plate is provided with a needle hole, a jewel shaft sleeve is embedded in the needle hole, and the jewel shaft sleeve is used for a needle rod to pass through.

Preferably, the needle of the needle rod is hemispherical or circular arc.

Preferably, the curvature radius of the hemispherical needle head is 0.23-0.25 mm.

Preferably, the material of the needle bar is carbon tool steel.

Preferably, the conical seat is provided with a side plate, the side plate is provided with an insulating cover, and the insulating cover fixedly encapsulates the needle tube.

By adopting the technical scheme, the novel improved probe material, needle head shape, spring pressure and needle rod guide structure are adopted, and unexpected effects are achieved:

1. this probe adopts electrically conductive elasticity needle bar and copper clad laminate copper foil surface contact, and semicircular probe syringe needle compares in traditional toper probe syringe needle, has avoided causing mechanical damage to the copper foil material, and the area of contact of semicircular probe is big, can guarantee the good electricity contact of measurement, has guaranteed square resistance measured data's the degree of accuracy and repeatability and reproducibility.

2. Because the inside of needle tubing is provided with elasticity flexible spring from top to bottom, when a plurality of probes were measured the object, each probe guaranteed the surface in close contact with the corresponding syringe needle branch of object because the effect of elasticity flexible spring about the ability of its connection to make all probes homoenergetic and the surface that the corresponding syringe needle of object divide keep in close contact, thereby guaranteed measurement accuracy, reduced the flatness requirement on surveyed surface.

3. Because the probe and the spring are integrated into a whole, the probe is not required to be connected with the spring through an intermediate piece (a needle clamp), unstable mechanical contact is reduced, the change of the distance between the needles is also reduced, and the measurement repeatability is better. The probes are slightly different in stress according to the plane to be measured, can adapt to various different planes in real time, truly reflects accurate measurement data of the contact point, and improves measurement precision.

Drawings

Fig. 1 is a schematic structural view of a copper foil thickness measuring probe head.

Fig. 2 is a schematic view of the structure of a copper foil thickness measuring probe.

FIG. 3 is an assembly view of the needle shaft of the probe.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 to 3, the copper foil thickness measuring probe head is mainly composed of a housing, a probe 6, an aviation socket 10 and an insulating member. The shell is composed of a cylinder 2 and a conical seat 1, and an aviation socket 10 and the conical seat 1 are respectively sleeved at two ends of the cylinder 2. The interior of the housing mainly accommodates the aviation socket 10, the probe 6, the side plates 5, and the insulation, etc.

Two ends of the conical seat 1 are respectively provided with a pore plate 4, a needle plate 5 and a side plate 5, and the pore plate 4 is used for the needle tube 6.1 to pass through. The needle bar end of the conical seat 1 is provided with an insulation cover 9, the insulation cover 9 is provided with a square through hole for the needle bar to penetrate out, and the insulation cover 9 fixes the needle plate 5. The needle plate 5 is provided with a plurality of needle holes 3.1, ruby shaft sleeves 11 are embedded in the needle holes 3.1, and the ruby shaft sleeves 11 are used for the needle rod 6.2 to pass through. The probe on the production line is the consumptive material, and the wear resistance of ruby axle sleeve as direction function has guaranteed the stability of probe interval, reaches the measurement repeatability that requires on the production line. The diameter of the inner hole of the ruby shaft sleeve 11 is only larger than the diameter of the probe by within 5 microns, so that the probe is ensured not to shake left and right when moving up and down, which influences the measurement precision. One end (bottom end) of the side plate 5 is arranged on the conical seat 1, and the side plate 5 is positioned beside the needle tube 6.1. The other end (top end) of the side plate 5 is provided with an insulating cover 7, and the insulating cover 7 is used for fixedly packaging the needle tube 6.1.

The probe 6 is composed of a needle tube 6.1, a needle rod 6.2 and a spring 6.3, the needle tube 6.1 is provided with only one opening, the spring 6.3 is arranged in the needle tube 6.1 in a vacant mode, the needle tube 6.2 is axially inserted into the needle rod 6.2, and the spring 6.3 is abutted against the needle rod 6.3 and the inner wall of the needle tube 6.1. The needle rod 6.2 is connected with a lead wire 8, and the lead wire 8 is connected into an aviation socket 10. The diameter of the needle rod 6.2 is 0.485mm, and the material is SK4(T10) carbon tool steel. The needle head of the needle rod is hemispherical, the curvature radius R is 0.2425 +/-0.005 mm, the copper foil cannot be damaged under the pressure of 1.5N, and a stable test signal can be obtained. The hardness and the elastic modulus of the carbon tool steel are matched with those of the copper foil, so that a good contact surface can be formed, the contact resistance is low, and the copper foil cannot be irreversibly deformed. However, although the conventional probe material such as tungsten carbide has higher hardness and is more wear-resistant, the contact with the copper foil can only change the shape of the copper foil, so that the copper foil is damaged due to plastic deformation.

According to the relation between the sheet resistance and the resistivity of the measured copper foil: the thickness W is ρ/R (R-sheet resistance, ρ -resistivity), and the resistivity is a known constant, and the thickness of the copper foil can be calculated by measuring the sheet resistance by using the probe of the present application.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art will be able to make the description as a whole, and the embodiments can be combined as appropriate to form other embodiments that can be understood by those skilled in the art.

Claims

1. The utility model provides a copper foil thickness measurement probe, includes the needle bar that is used for contacting the measuring face of copper foil, its characterized in that: one end of the needle rod is inserted into the needle tube, and the needle rod moves axially in the needle tube; the needle tube is internally provided with a spring which props against the needle rod to enable the needle rod to be in close contact with the copper foil measuring surface under the action of spring force.

2. The copper foil thickness measuring probe according to claim 1, characterized in that: the needle head of the needle rod is hemispherical or circular arc.

3. The copper foil thickness measuring probe according to claim 2, characterized in that: the curvature radius of the hemispherical needle head is 0.23-0.25 mm.

4. The copper foil thickness measuring probe according to claim 1, characterized in that: the needle rod is made of carbon tool steel.

5. The utility model provides a copper foil thickness measurement detecting head, includes the drum, and the both ends of drum assemble awl seat and aviation socket respectively, and four copper foil thickness measurement probes are worn to establish by the awl seat, and the probe passes through the conductor wire and is connected its characterized in that with aviation socket: the copper foil thickness measuring probe consists of a needle rod used for contacting the copper foil measuring surface, a needle tube used for inserting the needle rod and a spring arranged in the needle tube, wherein the spring is propped against the space between the needle rod and the inner wall of the needle tube, and the needle rod is tightly contacted with the copper foil measuring surface under the action of spring force.

6. The copper foil thickness measurement probe of claim 5, wherein: the needle plate is installed on the conical seat, a needle hole is formed in the needle plate, a jewel shaft sleeve is embedded in the needle hole, and the jewel shaft sleeve is used for a needle rod to penetrate through.

7. The copper foil thickness measurement probe of claim 5, wherein: the needle head of the needle rod is hemispherical or circular arc.

8. The copper foil thickness measurement probe of claim 7, wherein: the curvature radius of the hemispherical needle head is 0.23-0.25 mm.

9. The copper foil thickness measurement probe of claim 5, wherein: the needle rod is made of carbon tool steel.

10. The copper foil thickness measurement probe of claim 5, wherein: the conical seat is provided with a side plate, the side plate is provided with an insulating cover, and the insulating cover fixedly encapsulates the needle tube.